JP2006260664A - Manufacturing device for optical information recording medium - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing device for an optical information recording medium which is effective in enhancing productivity. <P>SOLUTION: The manufacturing device for the optical information recording medium is equipped with a transfer process for forming a recording resin layer, in which resin 36 is hardened by irradiation with UV and the information recording surface of stamper 18 is transferred to the substrate 29 surface after lowering a center pin 11 to a stamper 18 fixed to a rotary table T and applied with UV hardening resin 36, a substrate 29 is stuck with the stamper 18, and a peeling process for peeling the substrate 29 integrated with the recording resin layer from the stamper 18 by lifting the center pin 11 and discharging the air from an air discharging hole 24. The time for the manufacturing process is approximately reduced by half compared with the conventional one by intermittently rotating a pair of rotary tables T, T back and forth so that when one of the pair of the rotating table T is in a first stage S1, the other one of the pair is in a second stage S2, performing the peeling process, delivering the peeled substrate 29 and the preparation process for the transfer in the first stage S1, in the second stage S2, performing the main process for the transfer after loading 31. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an apparatus for manufacturing an optical information recording medium used for data recording for audio, video, and information equipment, for example, and more particularly to improvements of Japanese Patent Nos. 2509978 and 2509979.

  An optical disc, which is a kind of this type of optical information recording medium, has a property that, as shown in, for example, the following patent document, a stamper as a master on which data is recorded is placed and fixed on a rotary table and cured by ultraviolet rays. A light-transmitting disc substrate supported by a center pin that can be moved up and down with respect to the rotary table after applying a resin (hereinafter referred to as an ultraviolet curable resin) to the surface of the stamper, and a light-transmitting weight member mounted on the disc substrate The disc substrate is laminated on the resin application surface of the stamper and laminated together, and the resin layer is cured by irradiating ultraviolet rays from above the disc substrate, so that it is integrated with the disc substrate. After the information recording surface (recording data) of the stamper is transferred to the surface of the resin layer, the disc substrate integrated with the recording resin layer is scanned. By peeling the damper is manufactured.

Patent No. 2509978, Patent No. 2509979

  However, in the apparatus shown in the above-mentioned patent document, the supply (application) of the ultraviolet curable resin to the stamper on the rotary table, the placement of the disc substrate on the center pin, the placement of the weight member on the disc substrate, A single stage is used for all the steps from sticking the disc substrate to the stamper by lowering, curing the resin layer by UV irradiation, peeling the disc substrate from the stamper, and unloading the peeled disc substrate (optical disc). Yes.

  For this reason, there is a problem that it takes time from the supply (application) of the ultraviolet curable resin to the production of one recording resin layer integrated disk substrate (optical disk), and the productivity is poor. In particular, it takes approximately one minute for the disk substrate to crush the resin and adhere to the stamper, which accounts for approximately half of the total process time.

  Therefore, the inventor divides the entire process of the apparatus into two stages, a first stage and a second stage, so that the two rotating tables that rotate rotate intermittently and sequentially pass through the first stage and the second stage. If the main transfer process is performed in the second stage and the other processes are performed in the first stage, the process time is reduced. As a result of trial manufacture considering that it would be half, it was confirmed that it was effective, and the present invention was proposed.

  The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide an apparatus for manufacturing an optical information recording medium that is effective in improving productivity.

In order to achieve the above object, in the optical information recording medium manufacturing apparatus according to the present invention, between the light transmissive substrate supported by the center pin and the stamper set around the center pin, In an apparatus for manufacturing an optical information recording medium in which a recording resin layer to which the recording surface of this stamper is transferred is set,
A rotary table configured so that the center pin is set as a central shaft portion and a guide ring applied to the inner diameter portion of the stamper is set on the upper surface thereof so that the stamper can be fixed and held.
An air discharge hole formed at a position close to the outer periphery of the center pin at the center of the rotary table;
Means for raising and lowering the center pin,
For the stamper that is fixed and held on the rotary table and coated with UV-curing resin in a ring shape, the center pin is lowered to bond the light-transmitting substrate to the stamper, and UV light is irradiated to cure the UV-curing resin. A transfer step of forming a recording resin layer by transferring the information recording surface of the stamper on the surface of the light transmissive substrate,
While slightly raising the center pin and releasing air from the air discharge hole, an air layer is formed between the recording resin layer integral with the light transmissive substrate and the stamper adsorbed to the table, An optical information recording medium manufacturing apparatus comprising: a peeling step of peeling a light transmissive substrate integrated with a recording resin layer from a stamper;
When a pair of rotary tables arranged opposite to each other with the turning center axis sandwiching and reciprocatingly turns around the turning center axis and one of the rotating tables is on the first stage, the other rotating table is in the second stage. While being configured to be on stage,
In the first stage, the peeling process, carrying out the peeled light transmissive substrate, supplying (applying) an ultraviolet curable resin to the stamper, placing the light transmissive substrate on the center pin, and lowering the center pin Perform the transfer preparation process of placing the light transmissive substrate on the UV curable resin on the stamper,
The second stage is configured to perform a transfer main process of attaching a disk substrate to a stamper by placing a light transmissive weight member and curing a resin layer by irradiating ultraviolet rays.

  (Operation) A center pin (and a center pin) that supports a light-transmitting substrate with respect to a stamper that is positioned by engaging with a guide ring, fixed and held on a rotary table, and having an ultraviolet curable resin applied in a ring shape on its upper surface. The light-transmitting weight member) is lowered to bond the light-transmitting substrate to the stamper, and the information recording surface of the stamper is placed on the surface of the light-transmitting substrate by a transfer process in which the ultraviolet-curing resin is cured by irradiating ultraviolet light A transferred recording resin layer is formed.

  Then, with the cured recording resin layer formed between the light transmissive substrate and the stamper, the center pin is lifted by a small amount to form a gap apart from the stamper surface at the center of the light transmissive substrate. Then, the resin layer is peeled off from the stamper integrally with the substrate without applying a peeling force to the resin layer by the peeling step of sequentially peeling the resin layer from the central portion by sending air into the gap from the center of the table. An optical information recording medium (optical disk) is manufactured in a highly reliable state.

  In particular, the supply of UV-curable resin into the stamper (coating), most time in a series of manufacturing steps up out of detached light transmissive substrate (optical information recording medium) is taken, the light-transmitting substrate transfer the step of curing the resin layer by lamination and ultraviolet irradiation of the stamper, while performing at the rotary table located in the second stage, in the rotary table located in the first stage, the other steps performs, first, since the movement of the rotary table between the second stage requires a short reciprocating turning operation, the time takes to manufacturing process is a conventional substantially half.

  In the second aspect, in the manufacturing apparatus of the optical information recording medium according to claim 1, the light transmissive weight member, with the lifting operatively disposed in the second stage, the lowering operation of the elevating mechanism Thus, the light transmissive substrate is configured to descend at a speed equal to or higher than a descending speed at which the light transmissive weight member descends due to its own weight.

  (Operation) Since the pressing force by the lifting mechanism acts on the resin layer between the stamper and the light transmissive substrate in addition to the weight of the light transmissive weight member, the settling speed of the light transmissive substrate with respect to the stamper (pushing the resin layer) The crushing speed is high, and the light transmissive substrate and the stamper have a predetermined thickness with the resin layer interposed in a short time.

As described above, according to the optical information recording medium manufacturing apparatus of the present invention, since the manufacturing process time is substantially half that of the conventional method, the production amount of the optical information recording medium is remarkably improved.
According to the second aspect, since the time required for bonding the light-transmitting substrate to the stamper is further shortened, the manufacturing process time is further shortened and the production amount of the optical information recording medium is further improved.

  An embodiment of the present invention will be described below with reference to the drawings.

  Figure 1-15 shows a manufacturing apparatus for an optical information recording medium according to an embodiment of the present invention, fragmentary cross-sectional view of FIG. 1 is an optical disk manufacturing apparatus, FIG. 2 is an enlarged neighborhood table of the apparatus FIG. 3 is a diagram showing an overview of a monitor screen of a CCD camera for photographing the outermost parting line of the groove formed on the stamper and a video image of the CCD camera, and FIG. 4 is a front view of the apparatus. 5 is a right side view of the apparatus, FIG. 6 is a plan view of the apparatus, FIG. 7 is a diagram illustrating a flow of processing in a control circuit for controlling the center pin of the apparatus, and FIG. 8 is a description of a disk substrate loading process. FIG. 9 is an explanatory diagram when the substrate is placed in the substrate bonding step, FIG. 10 is an explanatory diagram when the weight is placed in the substrate bonding step, and FIG. 11 is an explanatory diagram when the substrate is pressed in the substrate bonding step. 12 at the end of substrate pressing in the substrate bonding process Illustration, FIG. 13 is an explanatory view when the ultraviolet irradiation of the substrate bonding process, Fig 14 is an optical disk stripping step illustration, FIG. 15 is a disc unloading step illustration.

  In Figure 2, in the manufacturing apparatus is provided with a center pin 11 as the center of the operation. The center pin 11 is intended to be axially movably set within the hollow portion of the support member 13 is a shaft portion of the rotary table T is configured in a cylindrical shape is set in a vertical position, the shaft portion of the rotary table T The support member 13 is supported by the bearing mechanism 14 so as to be rotatable in a vertical state with respect to the base 10. Reference numeral 13a is an O-ring interposed between the support member 13 and the center pin 11 is a shaft portion of the rotary table T.

  The support member 13 is intended to be selectively rotated controlled comprise integrally gear 131, above the support members 13 cradle 16 so as to spread in a plane is formed. A disk-shaped table body 17 is placed and set on the cradle 16. A metal or resin stamper 18 can be adsorbed and fixed on the table body 17 by a negative pressure suction force. ing.

  Disc-shaped table body 17, disc shape plate housing recess 172 on the upper side is open to the plate casing 170, the plate of the case 170 plate housing recess 172 housing has been adhesively secured a disc-shaped to The suction plate 174 is configured. Reference numerals 172a and 172b are annular stepped portions that are formed on the inner and outer peripheral sides of the plate receiving recess 172 and function as a support surface of the suction plate 174, and are regions surrounded by the stepped portions 172a and 172b in the plate receiving recess 172. and by the suction plate 174, the disc-shaped negative pressure chamber 176 corresponding to the suction plate 174 are defined.

  The suction plate 174 constituting the stamper mounting surface is made of porous ceramics with air permeability, and the lower surface of the suction plate 174 faces the negative pressure chamber 176, so that the suction plate made of porous ceramics uniform negative pressure is generated in the entire top surface 174, the stamper 18 placed on the suction plate 174 is sucked and fixed held by the negative pressure suction attractive force generated by the suction plate 174 top surface.

  Note that the stamper 18, in which holes for the round guide at the center is formed, unevenness of recording the groups and information bits or the like is formed on the upper surface thereof. The position of the stamper 18 on the table body 17 is fixedly set by the guide ring 19 formed integrally with the table body 17 (plate case 170). That is, the guide ring 19 is screwed to the inner diameter side of the plate case 170 and is arranged coaxially with the central axis of the center pin 11. The inner diameter portion (a hole for guide) of the stamper 18 is formed on the outer periphery of the guide ring 19. by engaging the groove of the stamper 18 is positioned with respect to the center axis of the center pin 11.

  In addition, an annular vacuum plate 180 provided with a negative pressure chamber 182 opening in an annular shape on the upper surface side thereof is assembled to the outside of the cylindrical bearing case 15 so as to be movable in the axial direction, and the vacuum plate 180 and by the compression coil spring 184 interposed between the bearing case 15 is disposed to slidably contact the bottom surface of the top side cradle 16 of the vacuum plate 180. The negative pressure chamber 182 of the vacuum plate 180 is configured such that a negative pressure of a vacuum source (vacuum pump) P, which is a negative pressure generating means (not shown), acts via an electromagnetic valve 186 provided on the vacuum plate 180. The plate case 170 and the cradle 16 are provided with passages 187 (circular holes 187a, 187b) extending in the axial direction at a plurality of positions equally divided in the circumferential direction, and the negative pressure chamber 176 and the vacuum plate on the table side that slide relative to each other. Communication between the negative pressure chambers 182 on the 180 side is ensured. Reference numeral 188 denotes an O-ring for ensuring confidentiality between the circular holes 187a and 187b constituting the passage 187.

  The outer shape of the table body 17 (plate case 170) is formed slightly smaller than the inner shape of the table housing portion of the cradle 16 and slightly in the horizontal and vertical directions within the table housing portion of the table body 17 cradle 16. An annular plate case holder 177 fixed to the cradle 16 by a screw 177a is provided on the outer periphery of the upper surface of the cradle 16, and the plate case holder from the cradle 16 is provided. 177 is prevented from falling off, and an O-ring 178 is interposed between the cradle 16 and the plate case holder 177 so that the plate case 170 is elastically supported by the cradle 16 without shaking in the axial and circumferential directions. Has been.

  Further, the outer periphery equal three cradle 16, the lever-type flatness adjustment mechanism 190 for adjusting such that the horizontal plane perpendicular to the upper surface of the table body 17 to the center axis of the center pin 11 is provided. That is, a lever 192 that extends radially and swings around the pin 191 is provided on the lower surface of the outer periphery of the cradle 16, and one end of the lever 192 passes through a hole 193 provided in the bottom wall of the cradle 16. The lower end of the rod 194 that supports the bottom surface of the plate case 170 is supported, and the other end of the lever 192 abuts on the lower end of the adjustment screw 195 extending in the axial direction provided on the outer periphery of the cradle 16. It is configured as follows. Then, by rotating the adjustment screw 195 in each lever flatness adjustment mechanism 190, with respect to the cradle 16 is tilted surface (stamper mounting surface) of the plate casing 170 (the suction plate 174), the center pin 11 It can be set as a horizontal plane orthogonal to the central axis of.

  Specifically, the disk substrate 29, but are bonded to the lower of the stamper 18 is lowered together with the center pin 11 horizontally supported form by the valve member 12 of the distal end portion of the center pin 11, the disc substrate 29 and the stamper 18 so that they can be bonded in a parallel state, the flatness adjusting mechanism 190 (after the stamper 18 is placed and fixed on the plate case 170 (suction plate 174) before the continuous operation of the apparatus is started. The adjustment screw 195) is used to adjust the inclination of the surface (stamper mounting surface) of the plate case 170 (suction plate 174) (adjust so that the stamper 18 contacts the descending disk substrate 29 in a parallel state). It is like that.

  Further, the outer periphery equal three cradle 16 that does not interfere with the lever-type flatness adjustment mechanism 190, the through-hole 202 passing through the outer peripheral wall of the cradle 16 radially provided in the respective through holes 202, A micrometer head 200 and a sliding rod 204 that moves back and forth in conjunction with the rotation of the knob 201 of the micrometer head 200 are assembled, and the cradle 16 is moved by the micrometer head 200 (the rotation of the knob 201). In contrast, the circumferential position of the plate case 170 can be adjusted. That is, in many cases, the center of the groove in the stamper 18 placed and fixed on the suction plate 174 and the center of the center pin 11 (the rotation center of the rotary table T) do not exactly coincide with each other. The center and center of the groove in the stamper 18 mounted and fixed on the suction plate 170 by the micrometer head 200 (rotation of the knob 201) before the operation of the automatic substrate bonding process is started. The circumferential position of the plate case 170 is adjusted in the cradle 16 so that the center of the pin 11 (the rotation center of the turntable T) coincides.

  Specifically, as shown in FIG. 3, a CCD camera 40 that images a part of the outer peripheral edge of the stamper 18 mounted and fixed on the suction plate 174 is disposed above the rotary table T. The reference numeral 40 is configured to be movable to a predetermined position that does not interfere with the operation of the chamber 32 and the substrate transport mechanism 40 described later. The image (image of the outermost parting line 18a of the groove formed on the surface of the stamper 18) captured by the CCD camera 40 arranged at a predetermined position above the rotary table T has orthogonal coordinates and scale lines on the display device 42. The image is displayed on the monitor screen 44 provided. On the monitor screen 44 shown in FIG. 3, the outermost peripheral parting line 18a of the groove forming area indicated by the oblique lines is displayed in the vicinity of the zero point of the orthogonal coordinates. When the center of the groove and the center of the center pin 11 in the stamper 18, which is mounted and fixed to the suction plate 174 (rotational center of the rotary table T) is shifted, when rotating the rotary table T, the monitor screen If the position of the outermost parting line 18a of the groove displayed on 44 is not constant (flickers) as shown by the arrow C, on the other hand, if both centers coincide, the groove outermost line 18a displayed on the monitor screen 44 The outer peripheral parting line 18a is in a position that does not fluctuate. Therefore, the operator looks at the monitor screen 44 while intermittently rotating the turntable T every 120 degrees, for example, so that the fluctuation of the position of the outermost parting line 18a of the groove displayed on the screen 44 is eliminated. The horizontal position of the table body 17 (plate case 170) with respect to the cradle 16 is adjusted by the meter head 200 (rotation of the knob 201), that is, the center of the groove in the stamper 18 and the center of the center pin 11 (rotary table T The center of rotation).

  The inner peripheral surface side of the upper guide ring 19, an annular valve member 12 which is fixed to the distal end outer periphery of the center pin 11 is provided, the negative pressure generating annular between the guide ring 19 and the valve member 12 Alternatively, a passage 210 for jetting pressurized air is provided. The passage 210 communicates with an annular negative pressure chamber 212 provided near the center of the cradle 16 so as to surround the center pin 11, and the negative pressure chamber 212 is a shaft portion (support member) 13 of the rotary table T. Is connected to a vacuum source (vacuum pump) P, which is a negative pressure generating means, through a passage 214 provided in the bearing, a passage 215 provided in the bearing case 15 and an electromagnetic valve 216, and between the guide ring 19 and the valve member 12 The excess resin can be sucked and collected by the negative pressure generated in the passage 210.

  Further, the center pin 11 has an air passage 22 formed in its axial portion, and this passage 22 communicates with a passage 23 formed so as to open to the passage 210 outside the valve member 12, and is shown in the figure. The air sent from the pressurized air supply source to the passage 23 via the air passage 22 is released toward the bottom on the inner peripheral side of the substrate 29 disposed at the center of the table 17 via the passage 210. It is configured.

  The center pin 11 is adapted to be controlled to move in the vertical direction as shown in Figure 1 the arrow A by a drive mechanism 25. The drive mechanism 25 includes a screw shaft 252 that is rotated by a servo motor 251, and the center pin 11 is supported by a moving body 253 that is screwed to the screw shaft 252. the angular center pin 11 is to be precisely controlled to move vertically in μm units. Then, the servo motor 251, the rotational angle is controlled by a control circuit 26 that becomes a microcomputer or the like.

  The valve member 12 provided above the center pin 11 also functions as a mounting portion for the disk substrate 29, and a truncated cone-shaped guide pin 27 is provided above the valve member 12. Then, the disk substrate 29 is placed and set on the valve member 12 such that the center position is set by the guide pin 27. Reference numeral 28 denotes a compression coil spring. When the disk substrate 29 is placed on the valve member 12 so that the inner diameter portion of the disk substrate 29 is engaged with the guide pin 27, the inner diameter portion of the disk substrate 29, the guide pin 28, Even if the shape does not exactly match, the compression coil spring 28 is compressed by the pressing force acting through the disk substrate 29 and the guide pin 27 is lowered, so that the guide is automatically guided to the inner diameter portion of the disk substrate 29. The pin 27 is engaged.

  The disk substrate 29 is made of, for example, a thermosetting resin such as epoxy, epoxy vinyl ester, or unsaturated polyester, a thermoplastic resin such as polymethyl methacrylate or polycarbonate, or glass.

  The valve member 12 is set to be flush with the upper end surface of the guide ring 19 of the rotary table T when the center pin 11 is lowered.

  On the surface of the stamper 18 fixedly held on the rotary table T, a resin 36, which is a material for forming a recording layer of the optical disk, is placed and set. This resin 36 is made of a 2P resin material that is cured by irradiating ultraviolet rays, and is a liquid resin having an acrylic group and / or a methacrylic group at its end, for example, acrylic acid and / or methacrylic acid ester of an epoxy resin, acrylic group And / or a urethane resin having a methacrylic group at its terminal, and a liquid resin diluted with a reactive monomer having an acrylic group and / or a methacrylic group.

  The resin 36 is placed in a ring shape on the fixed quantity stamper 18 by a nozzle or the like while rotating the rotary table 17.

  In addition, a chamber 32 of the ultraviolet irradiation device 4 is arranged and set above the disk substrate 29 to be supported by the center pin 11, and the chamber 32 is constituted by a transparent body such as glass by a moving table 30. The set disc-shaped weight 31 is set. The moving table 30 (moving table 30) is set to be movable up and down by a predetermined amount in the chamber 32 as indicated by an arrow B in FIG. This moving table 30 has a cylindrical standing wall extending along the inside of the chamber 32, and in a state where it is set to move downward as shown in the figure, in cooperation with the chamber 32, the moving table 30 so to form a chamber chamber 33 which is sealed so as to correspond to the periphery of the rotary table T on the upper surface.

  Although not shown in the drawing, an ultraviolet ray source is set above the weight 31 in the chamber chamber 33 so that the ultraviolet ray is irradiated through the transparent weight 31. .

  Moving base 30 is adapted to be controlled to move in the vertical direction as shown in Figure 1 the arrow B by a drive mechanism 35. The drive mechanism 35 includes a screw shaft 352 that is rotated by a servo motor 351, and the moving base 30 (weight 31) is supported by a cylindrical frame portion 354 of a moving body 353 that is screwed to the screw shaft 352. Therefore, the weight 31 is precisely controlled to move in the vertical direction in units of μm according to the rotation angle of the servo motor 251. The rotation angle of the servo motor 351 is controlled by the control circuit 26.

  The movable table 30 is configured such that a weight (glass) 31 integrated with an annular spacer member 30b is accommodated in an annular lower portion 30a having a reduced diameter on the lower end side so as to be movable up and down, and an annular shape is formed on the annular lower portion 30a. It is fixed to the frame part 354 of the mobile 353 an upper 30c in the laminated integrated form. A ring-shaped elastic material 355 that can be expanded and contracted is integrally attached to a lower end portion of the cylindrical frame portion 354. In addition, a predetermined gap (a minute gap set larger than the maximum subsidence amount when the disk substrate 29 crushes the resin 36 and approaches the stamper) d is formed between the spacer member 30b and the annular upper portion 30c. In addition, by setting the moving base 30 in advance to the lower end position (the lowermost lowering position of the disk substrate 29 to be bonded to the stamper 18), it is possible to apply only the weight of the weight 31 to the disk substrate 29, or the servo motor. 351 causes the frame portion 354 of the moving body 353 to move down beyond the minute gap d, and the annular upper portion 30c presses the annular spacer member 30b (weight 31) downward. It is also possible to apply a pressure greater than the weight of the weight 31 accompanying the lowering to the disk substrate 29 (the disk substrate 29 crushes (expands) the resin 36 and increases the lowering speed of the lowering). In particular, when the viscosity of 36 is high and it takes time to lower the disk substrate 29, the servo motor 251 is driven to drive the weight 31 or more to reduce the time required for bonding to the stamper 18. It is desirable that the pressure is applied to the disk substrate 29 to force the resin 36 to be crushed (expanded).

  Overall structure of the apparatus is shown in FIGS. 4-6, and a reciprocating pivotable disc-shaped turntable 2 around the pivot axis C1. A pair of rotary tables T and T are arranged opposite to each other on the turning table 2 with the turning center axis C1 interposed therebetween, and the turning table 2 (the pair of rotating tables T and T) is turned around by the rotation of a drive motor (not shown). When the rotary table T is intermittently reciprocated around the axis C1 and one rotary table T is on the first stage S1, the other rotary table T is on the second stage S2.

  Then, in the first stage S1, the disk substrate 29 to the recording resin layer 41 by the transfer step has been transferred and formed in the second stage S1, the peeling step and exfoliated loading and unloading mechanism of the disc substrate 29 is peeled from the stamper 18 40 In addition to unloading by means of the above, supply (application) of a new resin 36 to the stamper 18 through the resin supply nozzle 37, placement of the disk substrate 29 on the center pin 11 by the unloading / unloading mechanism 40, and lowering of the center pin 11 transfer preparation step of placing a disk substrate 29 to the resin 36 on the stamper 18 by takes place. On the other hand, in the second stage S2, the transfer main process of bonding the disk substrate 29 to the stamper 18 by placing the weight 31 and curing the resin layer 41 by ultraviolet irradiation from the upper ultraviolet irradiation device 4 is performed. Is set to

  FIG. 7 shows the flow of processing in the control circuit 26 for controlling the movement of the center pin 11 in the process of manufacturing the recording resin layer of the optical disk by the apparatus configured as described above.

  First, after setting the resin 36 in a ring shape centering around the center pin 11 by a resin supply nozzle 37 onto the surface of the stamper 18 of the rotary table T which is located on the stage S1, in step 101, the center pin 11 in FIG. 8 As shown, it is set to the raised position. Then, the disk substrate 29 is transported onto the center pin 11 by the substrate transport mechanism 40 in a state where the center pin 11 is set up, and the substrate 29 is set on the valve member 12 formed on the center pin 11.

  If the disk substrate 29 to the center pin 11 is set, in step 102, to lower the center pin 11 to the interval between the stamper 18 and the substrate 29 are a first position close. That is, as shown in FIG. 9, in this state, the disk substrate 29 is brought into a state immediately before contacting the ring-shaped resin 36.

  If the center pin 11 is set to be lowered as described above, the center pin 11 is controlled to be lowered every 1 to several seconds in units of microns as in step 103. That is, the disk substrate 29 is intermittently lowered in units of micron, and part of the ring of the resin 36 is in contact with the surface of the substrate 29 in the descending process, and this contact portion is gradually enlarged, and the resin 36 The entire circumference of the ring comes into contact with the substrate 29.

  Thus, when the disk substrate 29 comes into contact with the ring-shaped resin 36, bubbles may be mixed into the resin 36. However, as described above, the substrate 29 is intermittently lowered in units of micron per second, for example, and after the substrate 29 and the resin 36 first contact at one place, this contact point is extended along the ring from side to side. If the contact portion is formed in a ring shape, bubbles are effectively prevented from entering the resin 36 (see FIG. 9).

  In step 104, in which the interval between the stamper 18 and the substrate 29 is determined whether or not a second position, in a state where the gap becomes the second position, the flow proceeds to step 105. Here, the second position is an empirically obtained value at which the entire circumference of the ring of the resin 36 comes into contact with the substrate 29.

  In step 105, to quickly lower the center pin 11, the substrate supporting surface of the valve member 12 of the center pin 11, a position that is the height from the surface of a predetermined stamper 18, specifically made from the surface of the stamper 18 height corresponding to the thickness of the recording layer 41 by the resin of the optical disk that a (the position shown in Figure 9 phantom), such that the valve member 12 is set in the accommodating position in the central recess of the rotary table T To.

  After step 105, pivoting (clockwise in FIG. 6) predetermined direction turntable 2 in step 105A. That is, the turntable 2 is turning 180 degrees, the rotary table T that was in the first stage S1 is moved to the second stage S2, and a rotary table T that was in the second stage S2 is the first stage Move to S1. Above the second stage S 2, a chamber 32 of an ultraviolet irradiation device is disposed, and a movable table 30 that can be moved up and down is provided below the chamber 32. The moving table 30 (weight 31) is set to be raised, and the movement of the rotary table T from the first stage S1 (second stage S2) to the second stage S2 (first stage S1) is prevented. There is no.

  When the turntable T moves to the second stage S2, the moving table 30 set upward in the chamber 32 descends, and the weight 31 is placed on the substrate 29 as shown in FIGS. . At the same time, it switches the path 210 between the solenoid valve 216 is a guide ring 19 and the valve member 12 to the intake passage. That is, in this state, a room surrounded by a ring-shaped resin 36 is formed between the stamper 18 and the disk substrate 29 as shown in FIG. 10, and this room is inhaled by a vacuum source (vacuum pump) P. Further, the load of the weight 31 acts on the resin 36, and as shown in FIG. 11, the resin 36 is gradually crushed (pushed out).

  In this way, even when the disk substrate 29 and the resin 36 are in contact with each other and bubbles are mixed in the resin 36, the entire circumference of the ring-shaped resin 36 is in contact with the substrate 29. The operation is performed such that the resin 36 is sucked from the center with a small amount of vacuum. By this way the resin 36 is moved suction inside, inside the bubbles resin 36 is made of to be pushed out toward the outer circumference, this phenomenon was confirmed by repeated experiments.

  In step 106, the above-mentioned state is waited for a predetermined time, for example, 50 seconds. During this time, the ring-shaped resin 36 is pushed and spread by the load of the weight 31, and the disk substrate 29 is lowered as the height of the resin 36 decreases. Then, in a state in which the resin 36 has spread between the stamper 18 and the substrate 29, the disk substrate 29 stops against the valve member 12 of the center pin 11 set at the lowered position, and the state as shown in FIG. It becomes. In this case, the gap between the stamper 18 and the substrate 29 is set numerically accurately by the lowering setting position of the center pin 11, and the thickness of the resin 36 on the data recording surface of the stamper 18 is controlled. Easy and accurate.

  Here, the mounting position of the stamper 18 is accurately set by the guide ring 19, but in which peel preventing the stamper 18 is effectively carried out, of the inner peripheral edge of the stamper 18 is inside the guide ring 19 the lower vacuum source passage 210 communicating with the (vacuum pump) P is opened. Therefore, when the resin 36 is spread on the surface of the stamper 18 as described above, even if the resin wraps around from the inner peripheral edge to the back surface of the stamper 18, the wraparound resin is reliably recovered and removed by vacuum suction. It becomes like this.

  If a layer made of the resin 36 is formed between the stamper 18 and the substrate 29 as described above, the substrate 29, the weight 31 and the like are rotated together with the table 17 as shown in FIG. The surface of the spread resin 36 is uniformly irradiated through the weight 31, and the resin is cured to form the recording resin layer 41. In this state, the movable table 30 is set to a position slightly elevated from the lower set position, and the weight 31 is not carried by the movable table 30 (the weight 31 is separated from the movable table 30). ) The moving table 30 does not hinder the rotation of the turntable T. The recording due to the unevenness formed on the stamper 18 is transferred to the surface of the recording resin layer 41 facing the stamper 18, and the recording surface of the optical disk is formed by the resin layer 41.

  Thus, the resin layer 41 having the recording surface is formed so as to be integrated with the disc substrate 29, and the basic structure of the optical disc is completed. Thereafter, the substrate 29 and the resin layer are completed. It is necessary to peel 41 from the surface of the stamper 18 together. Therefore, when the transfer main process is completed in stage S2, the movable table 30 (weight 31) is raised upward, and the turning table 2 is moved in the reverse direction (in the opposite direction to the turning direction in step 105A, that is, in FIG. Turn clockwise. That is, the turntable 2 turns 180 degrees, the turntable T in the second stage S2 moves (returns) to the first stage S1, and the turntable T in the first stage S1 moves to the first stage S1. Move to stage 1 S2.

  In the first stage S1, when the recording resin layer 41 is to be peeled off from the stamper 18, when the resin layer 41 is lifted away from the stamper 18, the stamper 18 also rotates integrally with the resin. In this apparatus, the recording resin layer 41 is easily peeled off from the stamper 18 without lifting the stamper 18, and the peeling is described below. The process will be described.

  First, as shown in shown Figure 14 at step 107, the center pin 11 is raised a small amount. The valve member 12 is set at a lower position, the vacuum source of the passage 210 between the guide ring 19 and the valve member 12 closes the electromagnetic valve 216 keep blocking the communication between the (vacuum pump) P. Then, air is sent from the air passage 22 formed in the central shaft portion of the center pin 11 to the passage 23 formed in the valve member 12, and is discharged upward from the passage 210. This air is the lower surface of the central portion of the disc substrate 29 from the passageway 210, now further fed between the recording resin layer 41 and the stamper 18, thereby peeling the resin layer 41 from the surface of the stamper 18.

  When further raising the center pin 11, as in step 108 in this state, the resin layer 41 as shown in Figure 15 is smoothly peeled from the surface of the stamper 18, integral with the disk substrate 29, the transport Raised to position. Thus, if it raises to a conveyance position, the disk substrate 29 in which the resin layer 41 was formed will be adsorb | sucked by the conveyance mechanism 40, and it will convey to a predetermined storage position. The disk substrate 29 on which the recording resin layer 41 is thus formed is not shown in the figure, but the optical disk is completed through a reflective layer, a recording film forming process, or a protective film forming process.

  Further, the stamper 18 is sucked and held by the negative pressure suction force acting on the surface of the table body 17, but when the stamper 18 is to be removed from the table body 17 and replaced with a new one, the electromagnetic valve 186 is closed and the table is closed. By releasing the negative pressure suction force acting on the surface of the main body 17 (negative pressure acting on the negative pressure chamber 176), the stamper 18 can be easily removed from the table 17 or replaced with a new one.

  As described above, in the apparatus of this embodiment, in the first stage, in the peeling process, the peeled disk substrate is carried out, the ultraviolet curable resin is supplied (applied) to the stamper, and the light transmissive substrate is placed on the center pin. In addition, a transfer preparation step of placing the disk substrate on the resin on the stamper by lowering the center pin is performed, while in the second stage, the disk substrate stamper is placed by placing the light transmissive weight member. Therefore, the transfer main process of curing the resin layer by ultraviolet irradiation is performed, so that the recording resin layer can be formed on a single optical disk in approximately half the time required for a single stage.

  In the substrate bonding step in the above-described embodiment, the weight 31 is applied to the disk substrate 29 so that the disk substrate 29 is bonded to the stamper 18, but the drive mechanism 35 is driven ( By moving the moving body 353 below the minute gap d by driving the servo motor 251), a pressure force higher than the weight of the weight 31 acts on the disk substrate 29, and the disk substrate 29 crushes the resin 36. The transfer main process time in the second stage may be shortened by increasing the descending speed (expanding). In particular, if the transfer main process time in the second stage is shortened, the transfer preparation process in the first stage, which originally ends in a shorter time than the main transfer process in the second stage, is performed in the shortened second stage. There is no problem in adjusting to the transfer main process time.

  Further, in the above-described embodiment, the suction plate 174 constituting the stamper mounting surface is made of porous ceramics having air permeability. However, the material of the suction plate 174 is not limited to ceramics, and carbon You may comprise with another porous material with air permeability.

  Further, in the above-described embodiment, the suction plate 174 is configured by a porous member having air permeability, and the stamper is configured to be fixed and held by the negative pressure suction force acting on the surface of the suction plate 174. Similarly, the suction plate 174 may be formed of a permanent magnet, and a stamper made of a magnetic material may be fixed and held on the suction plate 174 by a magnetic suction force.

It is principal part sectional drawing of the optical disk manufacturing apparatus based on one Example of this invention. It is a cross section which expands and shows the table periphery of the apparatus. It is a figure which shows the outline | summary of the monitor screen of the CCD camera which image | photographs the outermost periphery parting line of the groove formed in the stamper, and the display apparatus which projects the image | video. It is a front view of the same apparatus. It is a right view of the same apparatus. It is a top view of the apparatus. It is a figure explaining the flow of a process in the control circuit which controls especially a center pin of the said apparatus. It is explanatory drawing of a disk substrate carrying-in process. It is explanatory drawing at the time of board | substrate mounting of a board | substrate bonding process. At the time of mounting the weight in the substrate bonding process. It is explanatory drawing at the time of the board | substrate press of a board | substrate bonding process. It is explanatory drawing at the time of the board | substrate press end of a board | substrate bonding process. It is explanatory drawing at the time of the ultraviolet irradiation of a board | substrate bonding process. It is optical disk peeling process explanatory drawing. It is explanatory drawing of an optical disk carrying out process.

Explanation of symbols

2 swivel table
4 UV irradiation device T rotary table C1 rotation center axis S1 first stage S2 second stage
10 base
11 Center pin
12 Valve member that is the disk substrate mounting part
13 Support member T which is shaft part of rotary table
16 cradle
17 Table body
18 Stamper
19 Guide ring
22 Pressurized air passage
23 Pressurized air passage
25 Center pin drive mechanism
26 Control circuit
29 Disc board
31 Weight (glass)
32 chambers
35 Weight drive mechanism
36 Resin
37 Resin supply nozzle
40 Disc substrate loading / unloading mechanism
170 Plate case
174 Suction plate
176, 182 and 212 Negative pressure chamber P Vacuum source (vacuum pump) as negative pressure generating means
180 vacuum plate
187 (187a, 187b) Passage
210 Passage for intake or pressurized air injection
352 Screw shaft constituting the drive mechanism
352 Servo motor constituting the drive mechanism
353 Moving objects that constitute the drive mechanism

Claims (2)

A recording in which the recording surface of this stamper is transferred between a light-transmitting substrate supported by a center pin and having a light-transmitting weight member placed on its upper surface, and a stamper set around the center pin. In an apparatus for manufacturing an optical information recording medium in which a resin layer is set,
A rotary table configured so that the center pin is set as a central shaft portion and a guide ring applied to the inner diameter portion of the stamper is set on the upper surface thereof so that the stamper can be fixed and held.
An air discharge hole formed at a position close to the outer periphery of the center pin at the center of the rotary table;
Means for raising and lowering the center pin,
For the stamper fixed and held on the rotary table and coated with UV curable resin in a ring shape, the center pin is lowered and the light transmissive substrate is bonded to the stamper, and UV light is irradiated to cure the UV curable resin. A transfer step of forming a recording resin layer by transferring the information recording surface of the stamper on the surface of the light transmissive substrate,
While slightly raising the center pin and releasing air from the air discharge hole, an air layer is formed between the recording resin layer integral with the light transmissive substrate and the stamper adsorbed to the table, An optical information recording medium manufacturing apparatus comprising: a peeling step of peeling a light transmissive substrate integrated with a recording resin layer from a stamper;
When a pair of rotary tables arranged opposite to each other with the turning center axis sandwiching and reciprocatingly turns around the turning center axis and one of the rotating tables is on the first stage, the other rotating table is in the second stage. Configured to be on stage,
In the first stage, the peeling process, carrying out the peeled light transmissive substrate, supplying (applying) an ultraviolet curable resin to the stamper, placing the light transmissive substrate on the center pin, and lowering the center pin A transfer preparation step of placing a light transmissive substrate on an ultraviolet curable resin on a stamper is performed,
In the second stage, light is characterized in that a transfer main process of bonding a disc substrate to a stamper by placing a light transmissive weight member and curing of a resin layer by ultraviolet irradiation is performed. An apparatus for manufacturing an information recording medium.   The light transmissive weight member is provided so as to be able to move up and down in the second stage, and a speed equal to or higher than a lowering speed at which the light transmissive substrate is lowered by the weight of the light transmissive weight member by a lowering operation of the lifting mechanism. in the manufacturing apparatus of the optical information recording medium according to claim 1, characterized in that descent.