JP2006255650A - Pure water production equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing pure water, in which the amount of the pure water to be obtained is prevented from being fluctuated even when a heat exchanger is not used. <P>SOLUTION: Raw water is filtered by an activated carbon filtration unit 1, which is then sent to a reverse osmosis membrane unit 3 through a water supply pump 2 for the reverse osmosis membrane unit and demineralized there. The water demineralized in the reverse osmosis membrane unit 3 is brought into contact with a water quality sensor 4 equipped with a water temperature sensor 4a, then sent to an electric deionization unit 5 and deionized there electrically. The electrically deionized water is brought into contact with another water quality sensor 6 equipped with another water temperature sensor 6a and then withdrawn as treated water (pure water). A signal detected by the water temperature sensor 4a is inputted in a pump control circuit 7 to control the amount of the water to be supplied from the water supply pump 2 so that the amount of the permeated water from the reverse osmosis membrane unit 3 becomes constant. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a pure water production apparatus, and more particularly to a pure water production apparatus in which raw water is treated by a reverse osmosis membrane apparatus and an electrodeionization apparatus.

As a system for producing pure water by treating recovered water from industrial water, city water, well water, or semiconductor manufacturing processes, etc., an apparatus that treats raw water with a reverse osmosis membrane device and then with an electrodeionization device is well known. (For example, Patent Documents 1 and 2 below).
JP 2003-1259 A JP 2001-29752 A

  In a pure water production apparatus that produces pure water by treating raw water with a reverse osmosis membrane apparatus and an electrodeionization apparatus, the reverse osmosis occurs when the temperature of water treated by the reverse osmosis membrane apparatus or the electrodeionization apparatus fluctuates. The amount of permeated water in the membrane device or deionized water in the electrodeionization device varies, and as a result, the amount of pure water produced by the pure water production device varies.

  Conventionally, in order to prevent fluctuations in the amount of water due to fluctuations in the water temperature, a heat exchanger is installed on the upstream side of the reverse osmosis membrane device so that the temperature of the inflow water to the reverse osmosis membrane device is constant. However, when such a heat exchanger is provided, the equipment cost of a pure water manufacturing apparatus will increase.

  An object of this invention is to provide the pure water manufacturing apparatus by which the fluctuation | variation of the amount of pure water obtained is prevented, without using a heat exchanger.

  The pure water production apparatus of the present invention (Claim 1) is a pure water production apparatus for producing pure water by treating raw water with a reverse osmosis membrane device and then treating with the electrodeionization device. Water temperature detection means, and control means for controlling the amount of water supplied to the reverse osmosis membrane device based on the water temperature detected by the detection means so that the amount of permeated water of the reverse osmosis membrane device is constant. It is characterized by having.

  The pure water production apparatus according to claim 2 is a pure water production apparatus for producing pure water by treating raw water with a reverse osmosis membrane device and then treating with the electrodeionization device, and the water temperature of the deionized water of the electrodeionization device. And a control means for controlling the amount of water supplied to the electrodeionization apparatus so that the amount of deionized water in the electrodeionization apparatus is constant based on the water temperature detected by the detection means. It is characterized by this.

  The pure water production apparatus according to claim 3 is characterized in that, in claim 1 or 2, the water temperature detection means is also used as a temperature correction detector of a conductivity meter or a resistivity meter. .

  The pure water production apparatus of the present invention detects the water temperature of the permeated water of the reverse osmosis membrane device or the deionized water of the electrodeionization device, and the amount of water supplied to the reverse osmosis membrane device or the electrodeionization device based on this detected water temperature By controlling the flow rate, the amount of permeated water in the reverse osmosis membrane device is made constant. By controlling the amount of water supplied to the reverse osmosis membrane device in this way, fluctuations in the amount of permeated water in the reverse osmosis membrane device or deionized water in the electrodeionization device are prevented, and as a result, fluctuations in the amount of pure water are prevented. Therefore, it is not necessary to provide a heat exchanger on the upstream side of the reverse osmosis membrane device, and the equipment cost of the pure water production device is reduced.

  In particular, as the water temperature detection means, by using a conductivity meter for detecting the water quality of the permeated water of the reverse osmosis membrane device or the deionized water of the electrodeionization device, or a temperature correction detector of a specific resistance meter, the equipment cost is reduced. Can be further reduced.

  Hereinafter, embodiments will be described with reference to the drawings. FIG. 1 is a system diagram of a pure water production apparatus according to an embodiment.

  The raw water is filtered by the activated carbon filtration device 1, then sent to the reverse osmosis membrane device 3 through the reverse osmosis membrane device (shown as RO in FIG. 1) feed water pump 2, and desalted. . The water demineralized by the reverse osmosis membrane device 3 is brought into contact with the water quality sensor 4 provided with the water temperature sensor 4a, and then sent to the electrodeionization device 5 and subjected to electrodeionization treatment. This electrodeionized treated water is taken out as treated water (pure water) after contacting the water quality sensor 6 having the water temperature sensor 6a.

  In the first control method, the detection signal of the water temperature sensor 4a is input to the pump control circuit 7, and the discharge amount of the pump 2 is prevented so as to prevent the fluctuation of the reverse osmosis membrane apparatus permeated water quantity due to the fluctuation of the water temperature. To control. The pump 2 is controlled by, for example, an inverter.

  Thus, according to this pure water manufacturing apparatus, the water temperature sensor 4a detects the water temperature of the desalted water from the reverse osmosis membrane device 3, and based on this, the discharge amount of the pump 2 is controlled to prevent the desalted water amount fluctuation. Therefore, fluctuations in the amount of demineralized water are prevented without using a heat exchanger, so that fluctuations in the amount of pure water obtained can be reliably prevented, and the equipment cost of the pure water production apparatus is low. .

  In the second control method, the detection signal of the water temperature sensor 6a is input to the pump control circuit 7, and the discharge amount of the pump 2 is controlled so as to prevent fluctuations in the amount of deionized water from the electrodeionization device 5 due to fluctuations in the water temperature. Control.

  In this way, the amount of deionized water in the electrodeionization device 5 is prevented from changing by controlling the amount of water supplied to the electrodeionization device 5 based on the detected water temperature of the water temperature sensor 6a. It is not necessary to provide a heat exchanger on the side, and the equipment cost of the pure water production apparatus is reduced.

  In the above embodiment, since the water temperature sensors 4a and 6a for temperature correction of the water quality sensors 4 and 6 are used as the water temperature sensor, it is not necessary to newly install a water temperature sensor, and this also reduces the equipment cost of the pure water production apparatus. Will be further reduced.

  In the present invention, raw water to be treated is industrial water, city water, well water or manufacturing process recovered water, for example, washing waste water of a manufacturing process such as semiconductor or liquid crystal. It is also good. When manufacturing process recovered water such as semiconductor manufacturing recovered water is used as raw water, and the organic matter (TOC) concentration of the recovered water is high, TOC removal such as biological treatment means, heating means, catalytic decomposition means, etc. You may process beforehand with an apparatus.

  Moreover, it is preferable to pre-process raw water, such as industrial water, city water, and well water, with the activated carbon filtration apparatus 1 etc. like this embodiment as needed. In addition, you may use an ultrafiltration (UF) membrane apparatus, a microfiltration (MF) membrane apparatus, etc. as things other than an activated carbon filtration apparatus.

The raw water or its pretreated water (or TOC removal treated water) may be treated with a deoxygenating apparatus after adding a mineral acid such as HCl and H ₂ SO ₄ to adjust the pH to 4-6.

  Here, the adjusted pH is performed to remove carbon dioxide together with oxygen, and reduces the load on the desalting apparatus in the subsequent stage. As this deoxygenating device, a membrane degassing device, a vacuum degassing device, an air gas degassing device or the like can be used. When the pH is acid and the deoxygenation is performed by the deoxygenation device, an alkali such as NaOH is added to adjust the pH to 7-8.

  There is no restriction | limiting in particular as a film | membrane of a reverse osmosis membrane apparatus, Membranes, such as a polysulfone, polyamide, a polyvinyl acetate, can be used.

As the electrodeionization apparatus 5, a plurality of anion exchange membranes and cation exchange membranes are alternately arranged between an anode chamber having an anode and a cathode chamber having a cathode to alternately form a concentration chamber and a desalting chamber. In addition, a desalting chamber filled with an ion exchanger such as a mixed resin of an anion exchange resin and a cation exchange resin or an ion exchange fiber can be used. The applied voltage of the electrodeionization device 5 is preferably about 10 to 100 V, particularly about 30 to 70 V, and the energization current density is preferably about 4 to 20 A / m ² , particularly about 6 to 10 A / m ² .

  The deionized water of the electrodeionization device 5 is treated with a second reverse osmosis membrane device or an ultrafiltration membrane device (not shown) as necessary to further remove residual traces of TOC and silica. The purity may be increased.

  In the present invention, it is preferable to return the concentrated water of the electrodeionization device 5 to the inlet side of the reverse osmosis membrane device 3 and circulate it in terms of improving the water recovery rate. Also in this case, the water supply to the electrodeionization device 5 is sufficiently improved in quality by the treatment by the reverse osmosis membrane device 3, so the electrodeionization device concentrated water is returned to the inlet side of the reverse osmosis membrane device 3. There is no problem of deterioration of treated water quality.

  In the present invention, the amount of water flowing through each pipe may be adjusted by adjusting the valve opening, but the flow rate may be adjusted (set) by providing an orifice in each pipe.

It is a systematic diagram which shows embodiment of the pure water manufacturing apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Activated carbon filtration apparatus 2 Water supply pump to reverse osmosis membrane apparatus 3 Reverse osmosis membrane apparatus 5 Electrodeionization apparatus 7 Pump control circuit

Claims (3)

In a pure water production apparatus that produces pure water by treating raw water with a reverse osmosis membrane device and then treating with an electrodeionization device,
Means for detecting the water temperature of the permeated water of the reverse osmosis membrane device;
And a control means for controlling the amount of water supplied to the reverse osmosis membrane device based on the water temperature detected by the detection means so that the amount of permeated water of the reverse osmosis membrane device is constant. Water production equipment. In a pure water production apparatus that produces pure water by treating raw water with a reverse osmosis membrane device and then treating with an electrodeionization device,
Means for detecting the water temperature of the deionized water of the electrodeionization device;
Control means for controlling the amount of water supplied to the electrodeionization apparatus so that the amount of deionized water in the electrodeionization apparatus is constant based on the water temperature detected by the detection means. Pure water production equipment.   3. The pure water producing apparatus according to claim 1, wherein the water temperature detecting means is also used as a temperature correction detector of a conductivity meter or a resistivity meter.

Images