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JP2006114399A - Organic EL device - Google Patents

Organic EL device Download PDF

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JP2006114399A
JP2006114399A JP2004301923A JP2004301923A JP2006114399A JP 2006114399 A JP2006114399 A JP 2006114399A JP 2004301923 A JP2004301923 A JP 2004301923A JP 2004301923 A JP2004301923 A JP 2004301923A JP 2006114399 A JP2006114399 A JP 2006114399A
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organic
film
sealing
sealing film
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Yasuhiro Tanaka
康裕 田中
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Canon Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic EL element in which light-emitting characteristics stabilized over a long period of time is maintained by preventing invasion of moisture from the outside, and which can be fabricated inexpensively in a manufacturing process. <P>SOLUTION: As a sealing film of the organic EL element, a sealing film satisfying following conditions is used. (a) The moisture amount contained in a transparent film is 100 ppm or less, (b) transmittance at 400 nm to 700 nm is 80% or more at 100 μm of film thickness, (c) linear expansion coefficient is 10 ppm or less. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、有機発光素子に関する。 The present invention relates to an organic light emitting device.

下部のフィルム基板上に有機発光層が2つの電極の間に挟まれたサンドイッチ構造の有機EL素子が知られているが、前記有機発光層の光を外に取り出せるようにするために、電極の片方は透明のものが使われており、一般的には陽極にITO(Indium Tin Oxide)透明電極が使われている。更に、前記有機発光層の外周面は封止材により封止され、外部駆動回路により電圧を印加することにより発光する。   An organic EL device having a sandwich structure in which an organic light emitting layer is sandwiched between two electrodes on a lower film substrate is known. In order to allow light from the organic light emitting layer to be extracted outside, One of them is transparent, and generally an ITO (Indium Tin Oxide) transparent electrode is used for the anode. Furthermore, the outer peripheral surface of the organic light emitting layer is sealed with a sealing material, and emits light when a voltage is applied by an external drive circuit.

以上の原理により発光する有機EL素子は、視認性或いはフレキシブル性に優れ、且つ、発色性が多様であることから、車載用コンポや携帯電話等のディスプレイや表示素子に利用されている。   An organic EL element that emits light based on the above principle is excellent in visibility or flexibility, and has various color development properties. Therefore, the organic EL element is used in displays and display elements such as in-vehicle components and mobile phones.

ところで、これらの特性を有するディスプレイではあるが、一方で有機EL素子は一般にガスや水蒸気に対して極めて弱いという問題が良く知られている。一例としては、有機EL素子中に有機発光層を形成するフィルム基板を封止する際の環境雰囲気中に含まれる水分や封止層欠陥部を透過してくるガスや水蒸気が進入することにより、ダークスポットと称する非発光領域が発生、発光が維持できなくなるといった寿命の課題が生じている。   By the way, although it is a display which has these characteristics, on the other hand, the problem that an organic EL element is generally very weak with respect to gas and water vapor | steam is known well. As an example, the moisture and the gas permeating through the defective portion of the sealing layer enter in the environmental atmosphere when sealing the film substrate forming the organic light emitting layer in the organic EL element, A non-light-emitting region called a dark spot is generated, and there is a problem of lifetime such that light emission cannot be maintained.

この有機EL素子の寿命に関する課題を解決するための方策として、封止フィルムとしてフィルム基材の片面又は両面に、プラズマCVD法によって形成された酸化珪素膜を有するガスバリアフィルムを用いる手法が知られている(特許文献1)。   As a measure for solving the problem relating to the lifetime of the organic EL element, a technique using a gas barrier film having a silicon oxide film formed by a plasma CVD method on one side or both sides of a film substrate as a sealing film is known. (Patent Document 1).

更に、封止フィルムとして親水性グラフトポリマー鎖が存在する親水性表面を有する支持体上に、無機薄膜を設けたガスバリアフィルムを用いる手法が知られている(特許文献2)。   Furthermore, a technique using a gas barrier film in which an inorganic thin film is provided on a support having a hydrophilic surface where a hydrophilic graft polymer chain exists as a sealing film is known (Patent Document 2).

特開2002−192646号公報JP 2002-192646 A 特開2004−136638号公報JP 2004-136638 A

上記特許文献1及び2に示されるように、封止フィルムとしてフィルム表面上にプラズマCVD法により酸化珪素膜を形成することでガスバリア性を向上させても、製品耐久試験時に行う温度衝撃試験によりフィルムと無機膜の線膨張係数差による応力によって無機膜にマイクロクラックが発生し、ガスバリア性が損なわれる課題があった。   As shown in Patent Documents 1 and 2, even if the gas barrier property is improved by forming a silicon oxide film on the film surface as a sealing film by a plasma CVD method, the film is subjected to a temperature impact test during a product durability test. There was a problem that the gas barrier property was impaired due to micro cracks generated in the inorganic film due to the stress due to the difference in linear expansion coefficient between the inorganic film and the inorganic film.

そこで、本発明は上述の問題点に鑑みてなされたものであり、外部からの水分の侵入を防ぐことにより、長期に亘って安定した発光特性を維持するとともに、製造工程上安価に作製することが可能な有機EL素子提供することを目的とする。
Therefore, the present invention has been made in view of the above-described problems, and by maintaining moisture emission characteristics stable over a long period of time by preventing moisture from entering from the outside, the present invention can be manufactured at a low cost in the manufacturing process. An object of the present invention is to provide an organic EL element capable of satisfying the requirements.

本発明は、対向する陽極と陰極から成る1対の電極と前記1対の電極の間に有機層が設けられ、且つ、前記有機EL素子の外周部に封止構造が設けられている有機EL素子において、内側から有機EL保護層、充填層、封止フィルムの順で形成されて成る前記有機EL素子の封止フィルムとして、
(a)透明フィルムに含まれる水分量が100ppm以下。
(b)400nmから700nmでの透過率が膜厚100μmで80%以上。
(c)線膨張係数が10ppm以下。
を示す封止フィルムを用いることを特徴とする有機EL素子を提供する。
The present invention provides an organic EL in which an organic layer is provided between a pair of electrodes composed of an anode and a cathode opposed to each other and the pair of electrodes, and a sealing structure is provided on an outer peripheral portion of the organic EL element. In the element, as the sealing film of the organic EL element formed from the inside in the order of the organic EL protective layer, the filling layer, and the sealing film,
(A) The water content contained in the transparent film is 100 ppm or less.
(B) The transmittance from 400 nm to 700 nm is 80% or more at a film thickness of 100 μm.
(C) The linear expansion coefficient is 10 ppm or less.
An organic EL element characterized by using a sealing film showing the above is provided.

本発明によれば、有機EL素子の充填材としてフィルム基板、有機EL素子、有機EL保護層、充填層、封止フィルムの順で形成されて成る前記有機EL素子の封止フィルムとして、(a)透明フィルムに含まれる水分量が100ppm以下、(b)400nmから700nmでの透過率が膜厚100μmで80%以上、(c)線膨張係数が10ppm以下の特性を示す封止フィルムを用いる構成にすることにより、下記に示す効果が得られる。   According to the present invention, as a sealing film for the organic EL element, which is formed in the order of a film substrate, an organic EL element, an organic EL protective layer, a filling layer, and a sealing film as a filler for the organic EL element, (A) A structure using a sealing film having a water content of 100 ppm or less, (b) a transmittance from 400 nm to 700 nm of 80% or more at a film thickness of 100 μm, and (c) a linear expansion coefficient of 10 ppm or less. By doing so, the following effects can be obtained.

有機EL素子組立時において、有機EL素子の封止フィルムとして用いる透明フィルムの水分量が100ppm以下であるため、素子内部まで到達する水分が低減できることから、安定性に優れた有機EL素子を提供することができる。   Since the moisture content of the transparent film used as the sealing film for the organic EL element is 100 ppm or less during the assembly of the organic EL element, the moisture reaching the inside of the element can be reduced, and thus an organic EL element having excellent stability is provided. be able to.

又、フィルム基材の線膨張係数が10ppmと低膨張性を有するため、これまでのようにCVDや真空蒸着法によりフィルム基材上に窒化珪素膜等の無機膜を形成した後に、製品耐久試験時に行う温度衝撃試験時に発生するフィルムと無機膜の線膨張係数差による応力による無機膜にマイクロクラックが発生することもなく、安定した素子の性能を得ることが可能となる。   In addition, since the linear expansion coefficient of the film base material is as low as 10 ppm, a product durability test is performed after an inorganic film such as a silicon nitride film is formed on the film base material by CVD or vacuum evaporation as before. Stable element performance can be obtained without causing microcracks in the inorganic film due to the stress caused by the difference in linear expansion coefficient between the film and the inorganic film generated during the temperature shock test.

<実施の形態>
本発明の代表図を図1に示す。図1はフィルム基板1上に蒸着装置やスピンコーター等の成膜装置により透明電極と有機発光層と電極から成る有機EL素子3を形成し、更に保護膜を蒸着装置4により形成する。
<Embodiment>
A typical view of the present invention is shown in FIG. In FIG. 1, an organic EL element 3 including a transparent electrode, an organic light emitting layer, and an electrode is formed on a film substrate 1 by a film forming apparatus such as a vapor deposition apparatus or a spin coater, and a protective film is further formed by a vapor deposition apparatus 4.

又、図2に示すように、別の工程で封止フィルム面2上にCVDや真空蒸着等の成膜装置により無機膜5を形成した後、有機EL素子3側と貼り合わせること貼り合わせる(図3)。その後、フィルム基板1と封止フィルム2の周囲部を精密ディスペンサーによりエポキシ系封止剤6で封止を行い、有機EL素子を形成する(図4)。   Further, as shown in FIG. 2, after forming the inorganic film 5 on the sealing film surface 2 by a film forming apparatus such as CVD or vacuum vapor deposition in another process, it is bonded to the organic EL element 3 side. FIG. 3). Thereafter, the periphery of the film substrate 1 and the sealing film 2 is sealed with an epoxy sealant 6 with a precision dispenser to form an organic EL element (FIG. 4).

封止後、電極を外部回路に接続することにより、本発明の有機EL素子が発光する。   After sealing, the organic EL element of the present invention emits light by connecting the electrode to an external circuit.

ここで、本発明の封止フィルムの詳細について、フィルムの部分を拡大して図5に示す。   Here, about the detail of the sealing film of this invention, the part of a film is expanded and it shows in FIG.

先ず、封止フィルム5中には外部からの水分や素子内部に残存する微量な水分を吸着するフィラー7を内添することが好ましい。   First, it is preferable to internally add a filler 7 that adsorbs moisture from the outside and a very small amount of moisture remaining inside the element into the sealing film 5.

ここで、フィラー7は、水分吸着作用を有するフィラーであり、具体的にはシリカ(合成シリカ含む)、カオリン、デラミカオリン、水酸化アルミニウム、チタンホワイト、重質炭酸カルシウム、軽質炭酸カルシウム、硫酸カルシウム、硫酸バリウム、二酸化チタン、焼成カオリン、タルク、酸化亜鉛、炭酸亜鉛、硫化亜鉛、アルミナ、微粒子状アルミナ、ケイソウ土、焼成ケイソウ土、珪酸アルミニウム、珪酸カルシウム、珪酸マグネシウム、酸化マグネシウム、炭酸マグネシウム、アルミノ珪酸塩、コロイダルシリカ、活性白土、ベントナイト、ゼオライト、セリサイト、リトポン等の鉱物質顔料、多孔質顔料や有機顔料等の微粒子、多孔質微粒子及び中空微粒子等が挙げられる。   Here, the filler 7 is a filler having a moisture adsorption action, and specifically, silica (including synthetic silica), kaolin, deramikaolin, aluminum hydroxide, titanium white, heavy calcium carbonate, light calcium carbonate, calcium sulfate. , Barium sulfate, titanium dioxide, calcined kaolin, talc, zinc oxide, zinc carbonate, zinc sulfide, alumina, particulate alumina, diatomaceous earth, calcined diatomaceous earth, aluminum silicate, calcium silicate, magnesium silicate, magnesium oxide, magnesium carbonate, alumino Examples thereof include mineral pigments such as silicate, colloidal silica, activated clay, bentonite, zeolite, sericite and lithopone, fine particles such as porous pigments and organic pigments, porous fine particles and hollow fine particles.

又、有機材料としてはエポキシ樹脂、環状ポリオレフィン系樹脂、ポリ塩化ビニル系樹脂、ポリ(メタ)アクリル系樹脂、ポリエチレンテレフタレート系樹脂、各種ナイロンのポリアミド樹、ポリイミド樹脂、ポリアミドイミド樹脂、ポリアリールフタレート樹脂、シリコーン樹脂、ポリスルホン系樹脂、ポリフェニレンスルフィド系樹脂、ポリエーテルスルホン系樹脂、ポリウレタン系樹脂、アセタール系樹脂及び上記列挙の前駆体を共重合してなる共重合体が挙げられる。   Organic materials include epoxy resins, cyclic polyolefin resins, polyvinyl chloride resins, poly (meth) acrylic resins, polyethylene terephthalate resins, various nylon polyamide resins, polyimide resins, polyamideimide resins, and polyaryl phthalate resins. , Silicone resins, polysulfone resins, polyphenylene sulfide resins, polyether sulfone resins, polyurethane resins, acetal resins, and copolymers obtained by copolymerizing the above listed precursors.

ここで、例えば、封止フィルム2を透明フィルムとして、外部からの水分を吸着させるために合成ゼオライト系の乾燥剤であるモレキュラシーブス(3Aタイプ/巴工業製)を20wt%添加した厚み50μmの透明ポリイミドフィルムを用いた。   Here, for example, the sealing film 2 is used as a transparent film, and a molecular sieves (3A type / manufactured by Sakai Kogyo), which is a synthetic zeolite-based desiccant, is adsorbed in order to adsorb moisture from the outside. A polyimide film was used.

次に、前記ポリイミドフィルム中に含まれる水分を除去するために、真空加熱により水分量を1ppmまで低減させた。   Next, in order to remove the moisture contained in the polyimide film, the moisture content was reduced to 1 ppm by vacuum heating.

水分を低減させた前記透明ポリイミドフィルムにガスバリア性を向上させるために、不図示のCVD装置により酸化珪素膜を約500nmの厚みに成膜する。   In order to improve the gas barrier property of the transparent polyimide film with reduced moisture, a silicon oxide film is formed to a thickness of about 500 nm by a CVD apparatus (not shown).

成膜後、保護膜4まで形成した有機EL素子側基板と無機膜を形成した封止フィルム面を貼り合わせる。   After the film formation, the organic EL element side substrate formed up to the protective film 4 and the sealing film surface on which the inorganic film is formed are bonded together.

貼り合わせた後、前記有機EL素子の安定性を確保するために、封止フィルム2の外周部を再びサイド封止6により封着した。   After bonding, the outer peripheral part of the sealing film 2 was sealed again by the side sealing 6 in order to ensure the stability of the organic EL element.

これら封着する工程は、グローブボックス(不図示)中の水分濃度を10ppm以下に制御して封着することにより、組み立て直後にこれまで大きな課題であったダークスポットの発生を押さえ込むことが可能となった。又、長期信頼性においても60℃/90%RHの雰囲気条件で1000時間の連続耐久試験を行ったが、輝度劣化等の発光特性の低下は確認されず、ダークスポットの発生もなく、安定した有機EL素子とその製造方法を得ることができた。   These sealing steps can suppress the generation of dark spots, which has been a major problem until now, immediately after assembly by controlling the moisture concentration in the glove box (not shown) to 10 ppm or less for sealing. became. In addition, in the long-term reliability, a continuous durability test for 1000 hours was performed under the atmospheric condition of 60 ° C./90% RH. An organic EL element and a manufacturing method thereof were obtained.

本発明の有機EL素子は、照明用光源、電子写真方式の画像形成装置における感光体へ画像を露光するための光源及びそのような光源を有する電子写真方式の画像形成装置、車載用ディスプレイ、デジタルカメラや電子写真方式の画像形成装置の表示部、テレビ、パソコン用ディスプレイ等に適用可能である。   The organic EL element of the present invention includes a light source for illumination, a light source for exposing an image on a photoreceptor in an electrophotographic image forming apparatus, an electrophotographic image forming apparatus having such a light source, a vehicle-mounted display, and a digital display. The present invention is applicable to a display unit of a camera or an electrophotographic image forming apparatus, a television, a display for a personal computer, and the like.

本発明の代表図を図1に示す。ここで、1はフィルム基板であり、3は蒸着装置やスピンコーター等の成膜装置により透明電極と有機発光層と電極から成る有機EL素子を示す。ここで、該有機EL素子の詳細な作製方法について以下に述べる。
[Cr電極形成]
ガラス基板上に、CrターゲットをDCスパッタし陽極Aとして100nmの厚さにCr膜を成膜した。この際、成膜マスクを用いて3mmのストライプとした。Arガスを用いて、0.2Paの圧力、300Wの投入Pw条件で行った。
[大気開放]
次に、基板をスパッタ装置より取り出してアセトン、イソプロピルアルコール(IPA)で順次超音波洗浄し、次いでIPAで煮沸洗浄後乾燥した。更に、UV/オゾン洗浄した。
[前処理]
有機EL素子蒸着装置へ移し、真空排気した後、前処理室で基板付近に設けたリング状電極に50WのRF電力を投入して酸素プラズマ洗浄処理を行った。酸素圧力は0.6Pa、処理時間は40秒であった。
[正孔輸送層形成]
基板を前処理室より成膜室へ移動し、成膜室を1×10E(−4)Paまで排気した後、正孔輸送性を有するαNPDを抵抗加熱蒸着法により成膜速度0.2〜0.3nm/secの条件で成膜し、膜厚35nm正孔輸送層を形成した。尚、正孔輸送層、発光層及び電子注入層は、同一の蒸着マスクを用いることにより所定の部分に蒸着した。所定の部分とは基板上でCrが露出している部分である(画素電極)。
[発光層形成]
続いて、正孔輸送層の上にアルキレート錯体であるAlq3を抵抗加熱蒸着法により正孔輸送層と同様の成膜条件で膜厚15nm成膜、発光層を形成した。
[電子注入電極層形成]
次に、発光層の上に抵抗加熱共蒸着法によりAlq3と炭酸セシウム(CsCO)を膜厚比9:1の割合で混合されるよう、各々の蒸着速度を調整して成膜し、膜厚35nm電子注入層を形成した。詳しくは、それぞれの蒸着ボートにセットした材料を抵抗加熱方式で蒸発させ、有機層は〜5A/S、共蒸着層もそれぞれのボート電流値を調整することで、併せて〜5A/Sの蒸着速度で膜形成を行った。
[陰極(透明導電膜)形成]
最後に、別の成膜室に基板を移し、電子注入層の上にITOターゲットを用いてDCマグネトロンスパッタリング法により、膜厚が130nmになるよう、又、マスク成膜によりCr画素電極を覆って、Crストライプに交差するように陰極Kを形成した。
A typical view of the present invention is shown in FIG. Here, 1 is a film substrate, and 3 is an organic EL element comprising a transparent electrode, an organic light emitting layer, and an electrode by a film forming apparatus such as a vapor deposition apparatus or a spin coater. Here, a detailed manufacturing method of the organic EL element will be described below.
[Cr electrode formation]
On the glass substrate, a Cr target was DC sputtered to form a Cr film having a thickness of 100 nm as an anode A. At this time, a 3 mm stripe was formed using a film formation mask. Using Ar gas, the pressure was 0.2 Pa, and the input Pw was 300 W.
[Atmospheric release]
Next, the substrate was taken out from the sputtering apparatus, ultrasonically washed with acetone and isopropyl alcohol (IPA) in sequence, then boiled and washed with IPA, and then dried. Further, UV / ozone cleaning was performed.
[Preprocessing]
After moving to an organic EL element deposition apparatus and evacuating, an oxygen plasma cleaning process was performed by applying 50 W RF power to a ring electrode provided near the substrate in the pretreatment chamber. The oxygen pressure was 0.6 Pa and the treatment time was 40 seconds.
[Hole transport layer formation]
The substrate is moved from the pretreatment chamber to the film formation chamber, and after the film formation chamber is evacuated to 1 × 10E (−4) Pa, αNPD having a hole transporting property is formed by a resistance heating vapor deposition method at a film formation rate of 0.2˜ A film was formed under the condition of 0.3 nm / sec to form a 35 nm-thick hole transport layer. In addition, the hole transport layer, the light emitting layer, and the electron injection layer were vapor-deposited on predetermined portions by using the same vapor deposition mask. The predetermined portion is a portion where Cr is exposed on the substrate (pixel electrode).
[Light emitting layer formation]
Subsequently, Alq3, which is an alkylate complex, was formed on the hole transport layer by a resistance heating vapor deposition method under a film formation condition similar to that of the hole transport layer, and a light emitting layer was formed.
[Electron injection electrode layer formation]
Next, a film is formed on the light-emitting layer by adjusting each vapor deposition rate so that Alq3 and cesium carbonate (CsCO 3 ) are mixed at a film thickness ratio of 9: 1 by resistance heating co-evaporation. A 35 nm thick electron injection layer was formed. Specifically, the material set in each evaporation boat is evaporated by resistance heating method, the organic layer is ~ 5A / S, and the co-deposition layer is also adjusted for each boat current value. Film formation was performed at a speed.
[Cathode (transparent conductive film) formation]
Finally, the substrate is moved to another film formation chamber, and the film thickness is 130 nm by DC magnetron sputtering using an ITO target on the electron injection layer, and the Cr pixel electrode is covered by mask film formation. The cathode K was formed so as to cross the Cr stripe.

成膜中においては、成膜時間の経過につれてH2Oガス供給量を減少させることにより陰極Kの膜厚方向にHの濃度勾配を形成した。Hの濃度勾配は、電子注入電極層界面近傍においてHを5×1021〜1×1022atom/ccとし、膜厚方向に向かって連続的に濃度を低下させ、陰極Kの膜厚中心付近(電子注入電極層界面より65nm)でHの含有量が1020atom/cc台とした。尚、前述のようにITOターゲット裏面には強磁場タイプのマグネットが配置されており、低電圧スパッタリングが可能となっている。 During film formation, a H concentration gradient was formed in the film thickness direction of the cathode K by decreasing the H 2 O gas supply amount as the film formation time elapses. The concentration gradient of H is such that H is 5 × 10 21 to 1 × 10 22 atoms / cc in the vicinity of the interface of the electron injection electrode layer, the concentration is continuously decreased in the film thickness direction, and the vicinity of the film thickness center of the cathode K The H content was set to the order of 10 20 atoms / cc at (65 nm from the electron injection electrode layer interface). As described above, a strong magnetic field type magnet is disposed on the back surface of the ITO target, and low voltage sputtering is possible.

成膜条件としては、基板加熱なしの室温成膜で成膜圧力を1.0Pa、Ar、H2O及びOガスを用い、それぞれの流量は500、1.5、5.0scccmとし、ターゲットに印加する投入パワーはITO:500Wで成膜を行った。透過率は85%(at.450nm)、比抵抗値は8.0E−4Ωcmであった。 The deposition conditions are room temperature deposition without substrate heating, deposition pressure of 1.0 Pa, Ar, H 2 O and O 2 gases, flow rates of 500, 1.5 and 5.0 sccm, respectively, applied to the target. The film was formed with an input power of ITO: 500 W. The transmittance was 85% (at 450 nm), and the specific resistance value was 8.0E-4 Ωcm.

以上のようにして、符号1のガラス基板上に、陽極、正孔輸送層、発光層、電子注入電極層及び陰極を設け、有機EL発光素子を形成した。
[封止工程]
次に、形成した有機EL発光素子に空気中の水蒸気が浸入しないような封止材料でバリア性を付与させるため、封止工程に移る。
As described above, the anode, the hole transport layer, the light emitting layer, the electron injection electrode layer, and the cathode were provided on the glass substrate denoted by reference numeral 1 to form an organic EL light emitting device.
[Sealing process]
Next, in order to give barrier property with the sealing material which the water vapor | steam in air does not permeate into the formed organic electroluminescent light emitting element, it moves to a sealing process.

ここで用いる符号2の封止フィルムの透明フィルムとして、外部からの水分を吸着させるために合成ゼオライト系の乾燥剤であるモレキュラシーブス(3Aタイプ/巴工業製)を20wt%添加した厚み50μmの透明ポリイミドフィルムを用いた。   As the transparent film of the sealing film of reference number 2 used here, a transparent film having a thickness of 50 μm is added with 20% by weight of molecular sieves (3A type / manufactured by Sakai Kogyo Co., Ltd.), a synthetic zeolite-based desiccant to adsorb moisture from the outside. A polyimide film was used.

次に、前記ポリイミドフィルム中に含まれる水分を除去するために、真空加熱により水分量を1ppmまで低減させた。   Next, in order to remove the moisture contained in the polyimide film, the moisture content was reduced to 1 ppm by vacuum heating.

水分を低減させた前記透明ポリイミドフィルムにガスバリア性を向上させるために、不図示のCVD装置により酸化珪素膜を約500nmの厚みに成膜する。   In order to improve the gas barrier property of the transparent polyimide film with reduced moisture, a silicon oxide film is formed to a thickness of about 500 nm by a CVD apparatus (not shown).

成膜後、保護膜4まで形成した有機EL素子側基板と無機膜を形成した封止フィルム面を貼り合わせる。   After the film formation, the organic EL element side substrate formed up to the protective film 4 and the sealing film surface on which the inorganic film is formed are bonded together.

貼り合わせた後、前記有機EL素子の安定性を確保するために、封止フィルム2の外周部を再びサイド封止6により封着した。   After bonding, the outer peripheral part of the sealing film 2 was sealed again by the side sealing 6 in order to ensure the stability of the organic EL element.

ここで、封止材6としては、光カチオン重合系の液状樹脂(KR695/旭電化製)を用い、前記液状樹脂中に水分吸着作用を有するフィラーとしてここでは合成シリカ(商品名:マイクロイド/東海化学工業所製)を混合・分散装置により50wt%内添した材料を用いた。   Here, as the sealing material 6, a photocationic polymerization type liquid resin (KR695 / manufactured by Asahi Denka) is used, and here, synthetic silica (trade name: Microid / A material in which 50 wt% was internally added by a mixing / dispersing device was used.

これら封着する工程は、グローブボックス(不図示)中の水分濃度を10ppm以下に制御して封着することにより、組み立て直後にこれまで大きな課題であったダークスポットの発生を押さえ込むことが可能となった。
[素子評価]
長期信頼性においても、表1に示すように60℃/90%RHの雰囲気条件で1000時間の連続耐久試験を行ったが、輝度劣化等の発光特性の低下は殆ど確認されず(輝度:95%)、ダークスポット等の発生もなく、安定した有機EL素子とその製造方法を得ることができた。
<比較例1>
第1の比較例は実施例1に対して、有機EL素子の封止フィルムとして、フィルム中に含まれる水分量が多く、且つ、線膨張係数が大きい透明ポリイミドフィルムを用いた場合について示す。
These sealing steps can suppress the generation of dark spots, which has been a major problem until now, immediately after assembly by controlling the moisture concentration in the glove box (not shown) to 10 ppm or less and sealing. became.
[Element evaluation]
As for long-term reliability, as shown in Table 1, a continuous durability test was performed for 1000 hours under an atmospheric condition of 60 ° C./90% RH, but almost no deterioration in light emission characteristics such as luminance deterioration was confirmed (luminance: 95 %), No dark spots and the like, and a stable organic EL device and a method for producing the same were obtained.
<Comparative Example 1>
The first comparative example shows a case where a transparent polyimide film having a large amount of moisture contained in the film and a large linear expansion coefficient is used as the sealing film for the organic EL element, as compared with Example 1.

フィルム基板1に保護膜4まで形成した有機EL素子基板と水分量が3500ppm、線膨張係数が50ppmの物性を有する封止フィルム2にCVDにより無機膜を約500nmの厚みに形成した後、封止材6による封止工程に移る。   After forming an inorganic film with a thickness of about 500 nm by CVD on the sealing film 2 having physical properties of the organic EL element substrate formed up to the protective film 4 on the film substrate 1 and moisture content of 3500 ppm and linear expansion coefficient of 50 ppm, sealing The process proceeds to the sealing step with the material 6.

ここで用いる封止材6としては、光カチオン重合系の液状樹脂(KR695/旭電化製)及び水分吸着フィラーは実施例1と同様とした。   As the sealing material 6 used here, the photocation polymerization type liquid resin (KR695 / manufactured by Asahi Denka) and the moisture adsorbing filler were the same as those in Example 1.

前記封止材6を精密ディスペンサー用シリンジ中に注入し、注入後、図4に示すように、封止フィルム2の外周部に封止材6をディスペンサーにより、精密塗布を行った。   The said sealing material 6 was inject | poured in the syringe for precision dispensers, and as shown in FIG. 4, the sealing material 6 was precisely apply | coated to the outer peripheral part of the sealing film 2 with the dispenser after injection | pouring.

塗布後、前記フィルム基板1と該封止フィルム2とを封止材6により封着し、加熱硬化させた。尚、その時の加熱条件は80℃/30分である。   After the application, the film substrate 1 and the sealing film 2 were sealed with a sealing material 6 and cured by heating. The heating condition at that time is 80 ° C./30 minutes.

以上述べた封着工程は、グローブボックス(不図示)中の水分濃度を10ppm以下に制御して封着した。
[素子評価]
組み立てた有機EL素子について、60℃/90%RHの雰囲気条件で1000時間の連続耐久試験を行ったが、余分な水分が封止材及び封止界面から浸入し、表1に示すように輝度劣化が進む(輝度:30.5%)、安定性に乏しい有機EL素子となった。
In the sealing step described above, sealing was performed by controlling the water concentration in the glove box (not shown) to 10 ppm or less.
[Element evaluation]
The assembled organic EL device was subjected to a continuous durability test for 1000 hours under an atmospheric condition of 60 ° C./90% RH. Excess water penetrated from the sealing material and the sealing interface, and the luminance was as shown in Table 1. Deterioration progressed (luminance: 30.5%), resulting in an organic EL device with poor stability.

Figure 2006114399
Figure 2006114399

本発明の有機EL素子の断面図である。It is sectional drawing of the organic EL element of this invention. CVDにより封止フィルム上に無機膜を形成した図である。It is the figure which formed the inorganic film | membrane on the sealing film by CVD. 保護膜まで形成したガラス基板と無機膜を形成した封止フィルムを貼り合わせる時の図であるIt is a figure at the time of bonding the glass substrate formed even to the protective film, and the sealing film which formed the inorganic film. 封止フィルムの外周部を精密ディスペンサーにより封止剤を塗布している(サイド封止)の図である。It is a figure which has applied the sealing agent to the outer peripheral part of the sealing film with the precision dispenser (side sealing). 本発明の封止フィルムの拡大図である。It is an enlarged view of the sealing film of this invention.

符号の説明Explanation of symbols

1 フィルム基板
2 封止フィルム
3 有機EL素子
4 保護膜
5 透明充填層
6 封止材
7 水分吸着フィラー
DESCRIPTION OF SYMBOLS 1 Film substrate 2 Sealing film 3 Organic EL element 4 Protective film 5 Transparent filling layer 6 Sealing material 7 Moisture adsorption filler

Claims (8)

対向する陽極と陰極から成る1対の電極と前記1対の電極の間に有機層が設けられ、且つ、前記有機EL素子の外周部に封止材が設けられている有機EL素子において、
内側から有機EL保護層、充填層、封止フィルムの順で形成されて成る前記有機EL素子の封止フィルムとして、下記条件:
(a)透明フィルムに含まれる水分量が100ppm以下
(b)400nm〜700nmでの透過率が膜厚100μmで80%以上
(c)線膨張係数が10ppm以下
を満たす透明フィルムを用いることを特徴とする有機EL素子。
In an organic EL element in which an organic layer is provided between a pair of electrodes composed of an anode and a cathode facing each other and the pair of electrodes, and a sealing material is provided on an outer peripheral portion of the organic EL element.
As the sealing film of the organic EL device formed from the inside in the order of the organic EL protective layer, the filling layer, and the sealing film, the following conditions:
(A) The water content contained in the transparent film is 100 ppm or less. (B) The transmittance at 400 nm to 700 nm is 80% or more when the film thickness is 100 μm. (C) A transparent film satisfying a linear expansion coefficient of 10 ppm or less is used. Organic EL element to be used.
前記封止フィルム基板上の少なくとも一方に、酸化ケイ素及び/又は窒化ケイ素から成るガスバリア層が積層されたことを特徴とする請求項1記載の有機EL素子。   2. The organic EL device according to claim 1, wherein a gas barrier layer made of silicon oxide and / or silicon nitride is laminated on at least one of the sealing film substrates. 前記封止フィルム中に固体吸湿剤が含まれていることを特徴とする請求項1記載の有機EL素子。   The organic EL device according to claim 1, wherein the sealing film contains a solid hygroscopic agent. 前記固体吸湿剤が、ゼオライト、シリカ等の多孔質吸湿剤であることを特徴とする請求項2記載の有機EL素子。   3. The organic EL device according to claim 2, wherein the solid moisture absorbent is a porous moisture absorbent such as zeolite or silica. 前記固体吸湿剤の平均粒子径が1μm以下であることを特徴とする請求項2記載の有機EL素子。   The organic EL device according to claim 2, wherein an average particle size of the solid moisture absorbent is 1 μm or less. 前記封止フィルムの厚みが1μm以上100μm以下であることを特徴とする請求項1記載の有機EL素子。   The organic EL element according to claim 1, wherein the sealing film has a thickness of 1 μm to 100 μm. 前記封止フィルムとして、ポリイミドフィルムを用いることを特徴とする請求項1記載の有機EL素子。   The organic EL element according to claim 1, wherein a polyimide film is used as the sealing film. トップエミッション構造であることを特徴とする請求項1〜7の何れか1項記載の有機EL素子。   8. The organic EL device according to claim 1, wherein the organic EL device has a top emission structure.
JP2004301923A 2004-10-15 2004-10-15 Organic EL device Withdrawn JP2006114399A (en)

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