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JP2006105768A - Gas sensor - Google Patents

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JP2006105768A
JP2006105768A JP2004292371A JP2004292371A JP2006105768A JP 2006105768 A JP2006105768 A JP 2006105768A JP 2004292371 A JP2004292371 A JP 2004292371A JP 2004292371 A JP2004292371 A JP 2004292371A JP 2006105768 A JP2006105768 A JP 2006105768A
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gas
sensor
gas side
sensor element
measured
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Susumu Naito
将 内藤
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Denso Corp
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Denso Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a gas sensor of low electric power consumption excellent in early stage activity. <P>SOLUTION: This gas sensor is provided with a sensor element 2 provided with a measured gas side electrode 23 and a reference gas side electrode 21 in a solid electrolyte 21, a cylindrical housing 12 for holding the sensor element 2, a measured gas side cover 6 provided in a tip side of the housing 12, and a reference gas side cover 71 provided in a base end side of the housing 12, and an induction coil 5 for induction-heating the sensor element 2 is stored inside the measured gas side cover 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、酸素濃度等の測定を行うガスセンサに関し、例えば、内燃機関の排気系に設置されるガスセンサに関する。   The present invention relates to a gas sensor that measures oxygen concentration and the like, for example, a gas sensor installed in an exhaust system of an internal combustion engine.

内燃機関の排気系に設置されて排気ガス中の酸素濃度やNOx濃度等を測定するガスセンサとして、固体電解質体に被測定ガス側電極および基準ガス側電極を設けたセンサ素子を用いて基準ガスと被測定ガスの濃度差に応じた信号を検出するものが知られている。   As a gas sensor that is installed in an exhaust system of an internal combustion engine and measures the oxygen concentration, NOx concentration, etc. in the exhaust gas, a reference gas using a sensor element provided with a gas side electrode to be measured and a reference gas side electrode on a solid electrolyte body A device that detects a signal corresponding to a concentration difference of a gas to be measured is known.

この種のガスセンサは、センサ素子が所定の温度範囲にないとガス濃度を測定することができないため、センサ素子の温度を調整しなければならない。特に、内燃機関始動直後においては、センサ素子の温度は外気温程度となっており、この状態から速やかにセンサ素子を所定温度に加熱する必要がある。このため、センサ素子を加熱するヒータが設けられている。   Since this type of gas sensor cannot measure the gas concentration unless the sensor element is within a predetermined temperature range, the temperature of the sensor element must be adjusted. In particular, immediately after the internal combustion engine is started, the temperature of the sensor element is about the outside air temperature, and it is necessary to quickly heat the sensor element to a predetermined temperature from this state. For this reason, a heater for heating the sensor element is provided.

このヒータとしては、絶縁性セラミック内にタングステン等の発熱体を有するセラミックヒータが知られている(例えば、特許文献1または特許文献2参照)。また、その他のヒータとして、ハロゲンランプ、タングステンよりなる赤外線球、炭化珪素よりなるクロード等の外部熱源を用いるものがある(例えば、特許文献3参照)。
特開2002−14077号公報 特開2000−106266号公報 特開平11−287784号公報
As this heater, a ceramic heater having a heating element such as tungsten in an insulating ceramic is known (see, for example, Patent Document 1 or Patent Document 2). Other heaters use external heat sources such as halogen lamps, infrared spheres made of tungsten, and Claude made of silicon carbide (see, for example, Patent Document 3).
JP 2002-14077 A JP 2000-106266 A Japanese Patent Laid-Open No. 11-287784

前述のセラミックヒータを用いてセンサ素子を加熱するガスセンサは、セラミックヒータとセンサ素子とを接触させて伝熱する構成である。しかし、セラミックヒータの熱がセンサ素子にすべて伝熱されるのではなく、セラミックヒータの熱の一部はセンサ素子の加熱に利用されることなく大気中に放熱される。このため、セラミックヒータの熱を有効に利用しているとは言えず、早期活性のためにヒータ発熱量を大きくしたとしても、センサ素子の加熱に利用されない熱量も増加するため、ヒータの消費電力が大きくなる割に早期活性を達成することができない。なお、本明細書において、「早期活性」とは、センサ素子加熱開始後、速やかにセンサ素子作動温度となってガス濃度検出ができることを意味する。   The gas sensor that heats the sensor element using the ceramic heater described above is configured to transfer heat by bringing the ceramic heater and the sensor element into contact with each other. However, not all the heat of the ceramic heater is transferred to the sensor element, but a part of the heat of the ceramic heater is radiated to the atmosphere without being used for heating the sensor element. For this reason, it cannot be said that the heat of the ceramic heater is effectively used, and even if the heat generation amount of the heater is increased for early activation, the amount of heat that is not used for heating the sensor element also increases. However, early activity cannot be achieved despite the increase of. In the present specification, “early activation” means that the sensor element operating temperature can be quickly obtained and gas concentration detection can be performed after the start of heating of the sensor element.

また、ハロゲンランプ等の熱源を用いるガスセンサでは、別に設けられた熱源から放射状に発せられる熱を熱導入部材に導入して伝熱する必要があり、特に熱導入部材に導入されずに取りこぼされセンサ素子の加熱に利用されない熱が生じるため、ヒータの消費電力が大きくなる割に早期活性を達成することができない。   In addition, in a gas sensor using a heat source such as a halogen lamp, heat generated radially from a separately provided heat source needs to be introduced into the heat introduction member to conduct heat, and is not particularly introduced into the heat introduction member. Since heat that is not used for heating the sensor element is generated, early activation cannot be achieved for the increased power consumption of the heater.

本発明は、かかる問題点に鑑みてなされたもので、低消費電力で早期活性に優れるガスセンサを提供しようとするものである。   The present invention has been made in view of such problems, and an object of the present invention is to provide a gas sensor having low power consumption and excellent early activity.

請求項1の発明は、固体電解質体に被測定ガス側電極と基準ガス側電極を設けたセンサ素子と、前記センサ素子を誘導加熱する誘導コイルとを備えたことを特徴とするガスセンサである。   The invention according to claim 1 is a gas sensor comprising a sensor element in which a measured gas side electrode and a reference gas side electrode are provided on a solid electrolyte body, and an induction coil for induction heating the sensor element.

本発明は、センサ素子を加熱するために誘導コイルを用いたものである。誘導コイルによる加熱は、センサ素子に設けた被測定ガス側電極および基準ガス側電極に渦電流を発生させてセンサ素子を加熱するものである。そして、電極自体を発熱させることができるため、ガス濃度検知部を速やかに加熱することができ、消費電力を抑えつつ早期活性に優れるガスセンサを得ることができる。ここで、ガス濃度検知部とは、被測定ガス側電極および基準ガス側電極が設けられた箇所の近傍をいう。   The present invention uses an induction coil to heat the sensor element. Heating by the induction coil heats the sensor element by generating eddy currents in the measured gas side electrode and the reference gas side electrode provided in the sensor element. And since the electrode itself can be made to generate heat, the gas concentration detection part can be heated quickly, and a gas sensor excellent in early activation while suppressing power consumption can be obtained. Here, the gas concentration detection unit refers to the vicinity of the location where the measured gas side electrode and the reference gas side electrode are provided.

請求項2の発明は、前記被測定ガス側電極が前記誘導コイルの内側に配置されていることを特徴とするガスセンサである。誘導コイルの内側は誘導コイルによって発生する磁束密度が高く、効果的にセンサ素子を加熱することができる。   The invention according to claim 2 is the gas sensor characterized in that the measured gas side electrode is arranged inside the induction coil. The inside of the induction coil has a high magnetic flux density generated by the induction coil, and can effectively heat the sensor element.

請求項3の発明は、前記センサ素子を保持する筒状のハウジングと、前記ハウジングの先端側に設けた被測定ガス側カバーと、前記ハウジングの基端側に設けた基準ガス側カバーとを備え、前記誘導コイルを前記被測定ガス側カバー内に収納したことを特徴とするガスセンサである。このように、被測定ガス側カバー内に誘導コイルを配置することにより、センサ素子と誘導コイルとを一体化することができ、ガスセンサの取り付け性が向上する。   The invention of claim 3 includes a cylindrical housing for holding the sensor element, a measured gas side cover provided on the distal end side of the housing, and a reference gas side cover provided on the proximal end side of the housing. The gas sensor is characterized in that the induction coil is housed in the measured gas side cover. Thus, by arranging the induction coil in the gas side cover to be measured, the sensor element and the induction coil can be integrated, and the attachment of the gas sensor is improved.

請求項4の発明は、前記センサ素子が、前記被測定ガス側電極および前記基準ガス側電極以外の導体部を有することを特徴とするガスセンサである。このように電極以外の導体部を設けることでより一層早期活性を実現することができる。   The invention according to claim 4 is the gas sensor characterized in that the sensor element has a conductor portion other than the measured gas side electrode and the reference gas side electrode. Thus, by providing conductor parts other than the electrodes, it is possible to realize even faster activity.

請求項5の発明は、前記導体部の厚みが1〜10μmであることを特徴とするガスセンサである。導体部の厚みを上記範囲内とすることで導体部に渦電流が流れる際に電気抵抗による十分なジュール損失が得られ、早期活性に優れるガスセンサを得ることができる。   The invention according to claim 5 is the gas sensor characterized in that the conductor portion has a thickness of 1 to 10 μm. By setting the thickness of the conductor portion within the above range, when an eddy current flows through the conductor portion, sufficient Joule loss due to electric resistance is obtained, and a gas sensor excellent in early activity can be obtained.

請求項6の発明は、センサ信号の特定周波数成分を除去する信号処理を行うことを特徴とするガスセンサである。この構成により、センサ信号に重畳した、特に上記の渦電流における交流周波数のノイズを除去することで高精度なガス濃度検出を実現できる。   The invention according to claim 6 is a gas sensor characterized by performing signal processing for removing a specific frequency component of the sensor signal. With this configuration, it is possible to realize highly accurate gas concentration detection by removing noise of the AC frequency superimposed on the sensor signal, particularly in the eddy current.

(第1実施形態)
本実施形態にかかるガスセンサ1について図1を用いて説明する。ガスセンサ1は、図1に示すごとく、センサ素子2と、センサ素子2を保持するハウジング12と、ハウジング12の一端に設けた被測定ガス側カバー6と、ハウジング12の他端に設けた基準ガス側カバー71と、被測定ガス側カバー6の内側に配置した誘導コイル5を有している。
(First embodiment)
A gas sensor 1 according to the present embodiment will be described with reference to FIG. As shown in FIG. 1, the gas sensor 1 includes a sensor element 2, a housing 12 that holds the sensor element 2, a measured gas side cover 6 provided at one end of the housing 12, and a reference gas provided at the other end of the housing 12. It has the side cover 71 and the induction coil 5 arranged inside the measured gas side cover 6.

なお、本明細書では、ガスセンサ1の軸線方向において被測定ガスカバー6を設けた側を「先端側」、これと反対側であって基準ガス側カバー71を設けた側を「基端側」として説明を行う。   In the present specification, the side where the measured gas cover 6 is provided in the axial direction of the gas sensor 1 is the “front end side”, and the side opposite to this side where the reference gas side cover 71 is provided is the “base end side”. Will be described.

以下詳細説明する。図1〜図3に示すごとく、センサ素子2は複数のセラミックシートを積層して構成される。ジルコニアからなる板状の固体電解質体21に固体電解質体21を介して対向するように基準ガス側電極22と被測定ガス側電極23を有している。これら電極は、白金からなり、スクリーン印刷、スパッタリング成膜等により形成される。また、被測定ガス側電極23の先端側を覆うように多孔質拡散抵抗層25および遮蔽層26が形成されている。この多孔質拡散抵抗層25はアルミナ等の多孔質セラミックからなり、遮蔽層26はアルミナ等の緻密なセラミックからなる。多孔質拡散抵抗層25および遮蔽層26により被測定ガス側電極23に到達する被測定ガスの量を規制している。また、固体電解質体21の基準ガス側電極22を設けた側には、ダクト形成シート27および29が設けられ、基準ガスを基準ガス側電極22まで導くダクト24を形成している。   Details will be described below. As shown in FIGS. 1 to 3, the sensor element 2 is configured by laminating a plurality of ceramic sheets. A reference gas side electrode 22 and a measured gas side electrode 23 are provided so as to face a plate-like solid electrolyte body 21 made of zirconia via the solid electrolyte body 21. These electrodes are made of platinum, and are formed by screen printing, sputtering film formation, or the like. Further, a porous diffusion resistance layer 25 and a shielding layer 26 are formed so as to cover the front end side of the measured gas side electrode 23. The porous diffusion resistance layer 25 is made of a porous ceramic such as alumina, and the shielding layer 26 is made of a dense ceramic such as alumina. The amount of the measurement gas that reaches the measurement gas side electrode 23 is regulated by the porous diffusion resistance layer 25 and the shielding layer 26. In addition, duct forming sheets 27 and 29 are provided on the side of the solid electrolyte body 21 where the reference gas side electrode 22 is provided, and a duct 24 that guides the reference gas to the reference gas side electrode 22 is formed.

ハウジング12は、ステンレスからなる略円筒形状を有する部材である。ハウジング12の外径面には、軸方向中央部に内燃機関の排気管に着座するフランジがあり、フランジよりも先端側に排気管と結合する雄ねじが形成されている。ハウジング12の内径面には、貫通穴55を有する円筒状の絶縁碍子52が配置されている。貫通穴55にはセンサ素子2が挿通されており、絶縁碍子52の基端側内径に設けた空間にガラス53を注入することで絶縁碍子52とセンサ素子2とを固定している。   The housing 12 is a member having a substantially cylindrical shape made of stainless steel. On the outer diameter surface of the housing 12, there is a flange seated on the exhaust pipe of the internal combustion engine at the center in the axial direction, and a male screw that is coupled to the exhaust pipe is formed on the tip side of the flange. A cylindrical insulator 52 having a through hole 55 is disposed on the inner diameter surface of the housing 12. The sensor element 2 is inserted into the through hole 55, and the insulator 52 and the sensor element 2 are fixed by injecting glass 53 into a space provided on the inner diameter of the base end side of the insulator 52.

被測定ガス側カバー6は、内側カバー61、外側カバー62よりなる二重構造である。被測定ガス側カバー6は、有底筒状の形状を有し、その開口端にはつば部が設けられている。このつば部がハウジング12の先端側にかしめおよびスポット溶接等により接合されることで、被測定ガス側カバー6はハウジング12に固定される。被測定ガス側カバー6は、被測定ガスを導入するための被測定ガス導入穴63を有し、ここから被測定ガスを導入して、内側カバー61の内部の被測定ガス室64を被測定ガス雰囲気にする。   The measured gas side cover 6 has a double structure including an inner cover 61 and an outer cover 62. The measured gas side cover 6 has a bottomed cylindrical shape, and a flange is provided at the open end. The gas side cover 6 to be measured is fixed to the housing 12 by joining the collar portion to the front end side of the housing 12 by caulking, spot welding or the like. The measured gas side cover 6 has a measured gas introduction hole 63 for introducing the measured gas, from which the measured gas is introduced, and the measured gas chamber 64 inside the inner cover 61 is measured. Use a gas atmosphere.

基準ガス側カバー71は、略円筒形状で、一端に大径部を有し、他端に小径部を備えている。小径部と大径部との間には段部81が形成されており、大径部の内径面にはリード端子16を保持する絶縁保持部材56が設けられている。基準ガス側カバー71の大径部端部は、ハウジング12の基端側にレーザ溶接により溶接固定されており、基準ガス側カバー71の小径部端部は弾性絶縁部材14により封止されている。基準ガス側カバー71の小径部の外周面には、撥水フィルタ74を介して筒状の外側カバー72がかしめ固定されている。基準ガス側カバー71と外側カバー72はともに基準ガスを導入する基準ガス導入穴73を有し、この基準ガス導入穴73を通じて、基準ガス側電極22に基準ガスを導入する。   The reference gas side cover 71 is substantially cylindrical and has a large diameter portion at one end and a small diameter portion at the other end. A step portion 81 is formed between the small diameter portion and the large diameter portion, and an insulating holding member 56 for holding the lead terminal 16 is provided on the inner diameter surface of the large diameter portion. The end portion of the large diameter portion of the reference gas side cover 71 is welded and fixed to the proximal end side of the housing 12 by laser welding, and the end portion of the small diameter portion of the reference gas side cover 71 is sealed by the elastic insulating member 14. . A cylindrical outer cover 72 is caulked and fixed to the outer peripheral surface of the small diameter portion of the reference gas side cover 71 via a water repellent filter 74. Both the reference gas side cover 71 and the outer cover 72 have a reference gas introduction hole 73 for introducing a reference gas, and the reference gas is introduced into the reference gas side electrode 22 through the reference gas introduction hole 73.

センサの信号取り出し線18は、リード端子16を介して基準ガス側電極22と被測定ガス側電極23に電気的に接続しており、弾性絶縁部材14に設けた穴を貫通してセンサ出力が外部へと取り出される。このリード線には、センサ信号の特定周波数成分を除去する信号処理を行う回路(図示せず)が接続されている。   The sensor signal lead-out line 18 is electrically connected to the reference gas side electrode 22 and the measured gas side electrode 23 via the lead terminal 16, and the sensor output passes through the hole provided in the elastic insulating member 14. It is taken out to the outside. A circuit (not shown) for performing signal processing for removing a specific frequency component of the sensor signal is connected to the lead wire.

誘導コイル5は、銅からなる導電性の線材をらせん状に巻くことで形成されたもので、被測定ガス側カバー6の内周面にエポキシ樹脂等で接着固定される。このとき、センサ素子2の被測定ガス側電極23が誘導コイル5の内側に位置している。この導電性の線材の両端には図示しないリード線が接続されており、交流電流が供給される。   The induction coil 5 is formed by spirally winding a conductive wire made of copper, and is bonded and fixed to the inner peripheral surface of the measured gas side cover 6 with an epoxy resin or the like. At this time, the measured gas side electrode 23 of the sensor element 2 is positioned inside the induction coil 5. Lead wires (not shown) are connected to both ends of the conductive wire, and an alternating current is supplied.

本発明のガスセンサ1の作動について以下に説明する。   The operation of the gas sensor 1 of the present invention will be described below.

内燃機関始動後、誘導コイル5は交流電圧を印加される。誘導コイル5に交流電流が流れると、誘導コイルの内部には交番磁束が発生する。この磁束により被測定ガス側電極23および基準ガス側電極22に渦電流を発生し、電極自体が発熱する。このため、センサ素子2のガス濃度検知部が速やかに加熱される。同時に、内燃機関の排気管内の排気ガスが、ガスセンサ1の被測定ガス導入穴63より被測定ガス室64に導入される。また、基準ガスは、内燃機関始動前から基準ガス導入穴73より基準ガス側電極22に導入されている。   After starting the internal combustion engine, the induction coil 5 is applied with an alternating voltage. When an alternating current flows through the induction coil 5, an alternating magnetic flux is generated inside the induction coil. This magnetic flux generates eddy currents in the measured gas side electrode 23 and the reference gas side electrode 22, and the electrodes themselves generate heat. For this reason, the gas concentration detection part of the sensor element 2 is heated quickly. At the same time, the exhaust gas in the exhaust pipe of the internal combustion engine is introduced into the measured gas chamber 64 from the measured gas introduction hole 63 of the gas sensor 1. The reference gas is introduced into the reference gas side electrode 22 from the reference gas introduction hole 73 before the internal combustion engine is started.

誘導コイル5により加熱が開始された後、センサ素子2の被測定ガス側電極23と基準ガス側電極22の間に上述の誘導コイル5への引加電圧と異なる周波数の交流電圧が印加され、信号処理を施すことで固体電解質体21の抵抗値が検出される。センサ素子温度が上昇し、固体電解質体21の抵抗値が所定の値となったところで誘導コイルに印加する電圧を小さくし、センサ素子温度を調整する。   After the heating by the induction coil 5 is started, an AC voltage having a frequency different from the applied voltage to the induction coil 5 is applied between the measured gas side electrode 23 and the reference gas side electrode 22 of the sensor element 2, The resistance value of the solid electrolyte body 21 is detected by performing signal processing. When the sensor element temperature rises and the resistance value of the solid electrolyte body 21 reaches a predetermined value, the voltage applied to the induction coil is reduced to adjust the sensor element temperature.

所定の温度となったガスセンサ素子は排気ガス中の酸素濃度に応じた限界電流値を出力する。限界電流値とは、例えば排気ガスの状態が酸素過多の場合、基準ガス側電極22と被測定ガス側電極23の間に電圧を印加し、その電圧を徐々に高くすると最終的には電流が変化しなくなる。この電流が限界電流であり、基準ガス側電極22と被測定ガス側電極23間の電圧引加による酸素ポンピング量が、多孔質層24のガス拡散抵抗による排気ガス中の酸素のセンサ内への流入量を上回るために起こる現象である。上記限界電流値から酸素濃度を測定し、空燃比を求めることができる。この空燃比を示すセンサ信号には、前記渦電流の影響によるノイズが重畳しているが、センサ信号の特定周波数成分を除去する信号処理を行うことで高精度な空燃比を検出することができる。   The gas sensor element that has reached a predetermined temperature outputs a limit current value corresponding to the oxygen concentration in the exhaust gas. The limit current value is, for example, when the state of the exhaust gas is excessive oxygen, a voltage is applied between the reference gas side electrode 22 and the measured gas side electrode 23, and when the voltage is gradually increased, the current eventually becomes It will not change. This current is the limiting current, and the amount of oxygen pumping due to voltage application between the reference gas side electrode 22 and the gas side electrode 23 to be measured is the oxygen in the exhaust gas due to the gas diffusion resistance of the porous layer 24 into the sensor. It is a phenomenon that occurs because it exceeds the inflow. The air-fuel ratio can be obtained by measuring the oxygen concentration from the limit current value. Although noise due to the effect of the eddy current is superimposed on the sensor signal indicating the air-fuel ratio, highly accurate air-fuel ratio can be detected by performing signal processing for removing a specific frequency component of the sensor signal. .

また、空燃比検出中に、固体電解質体21の温度コントロールを行う。これは、固体電解質体21の温度が、所定温度以下である場合は固体電解質体が電気的に高抵抗となって機能しないことと、高温時には破損や電極の溶融等を起こす可能性が高まるためである。固体電解質体21の温度が所定の温度より低い場合は、誘導コイル5に印加する電圧を上げ、所定の温度より高い場合には誘導コイル5に印加する電圧を下げる。   Further, the temperature of the solid electrolyte body 21 is controlled during the air-fuel ratio detection. This is because when the temperature of the solid electrolyte body 21 is equal to or lower than a predetermined temperature, the solid electrolyte body does not function due to electrical resistance, and there is a high possibility of causing damage or melting of the electrode at a high temperature. It is. When the temperature of the solid electrolyte body 21 is lower than the predetermined temperature, the voltage applied to the induction coil 5 is increased, and when higher than the predetermined temperature, the voltage applied to the induction coil 5 is decreased.

固体電解質体21の温度コントロールを行うために、固体電解質体21の温度をモニターする。その方法として、センサ素子2に交流電圧を印加させる。その時のセンサ素子2を印加後、得られる電流を測定する。この電流と交流電圧の関係から素子抵抗を求め、あらかじめ検出しておいた素子複素抵抗と固体電解質21の温度との関係式より、間接的に固体電解質体21の温度を求めることができる。   In order to control the temperature of the solid electrolyte body 21, the temperature of the solid electrolyte body 21 is monitored. As the method, an alternating voltage is applied to the sensor element 2. After applying the sensor element 2 at that time, the obtained current is measured. The element resistance is obtained from the relationship between the current and the AC voltage, and the temperature of the solid electrolyte body 21 can be obtained indirectly from the relational expression between the element complex resistance detected in advance and the temperature of the solid electrolyte 21.

なお、温度においては上述の方法のほかに、素子に白金抵抗体等を内蔵することにより、抵抗体の抵抗値を測定することによって間接的に固体電解質体の温度を求めることも可能である。   In addition to the above-described method, the temperature of the solid electrolyte body can be indirectly obtained by measuring the resistance value of the resistor by incorporating a platinum resistor or the like in the element.

(第2実施形態)
本実施形態は、図4に示すごとく、第1実施形態のガスセンサにおけるセンサ素子2に導体部28を設けたものである。その他の構造と作用は、第1実施形態と同様である。
(Second Embodiment)
In the present embodiment, as shown in FIG. 4, the conductor portion 28 is provided in the sensor element 2 of the gas sensor of the first embodiment. Other structures and operations are the same as those in the first embodiment.

誘導コイル5に交流電圧を印加すると、被測定ガス側電極23と基準ガス側電極22に渦電流が流れるとともに、導体部28にも渦電流が流れる。このため、センサ素子2をより早く加熱することができ、早期活性を実現できる。   When an AC voltage is applied to the induction coil 5, an eddy current flows through the measured gas side electrode 23 and the reference gas side electrode 22, and an eddy current also flows through the conductor portion 28. For this reason, the sensor element 2 can be heated more quickly, and early activation can be realized.

図5は、第2実施形態のガスセンサにおいて、導体部28の厚みを変化させた場合の素子昇温速度を示したものである。図5から導体部28の厚みが1〜10μmのときに素子昇温速度が高いことが分かる。これは、加熱導体板の厚みが1〜10μmの範囲のとき、渦電流密度と導体部28の抵抗によって定まる発熱量が大きくなるからである。したがって、導体部28の厚みを1〜10μmとしたガスセンサが好ましい。なお、1μmより薄い場合には渦電流が流れる際の抵抗が高いために渦電流自体が流れにくく、また10μmより厚い場合には渦電流は多く流れるものの抵抗が小さいために十分なジュール損失が得られず、さらに大電流を供給する必要が出てくるために容量の大きな電流が必要となるため経済的ではない。   FIG. 5 shows the element temperature increase rate when the thickness of the conductor portion 28 is changed in the gas sensor of the second embodiment. FIG. 5 shows that the element heating rate is high when the thickness of the conductor portion 28 is 1 to 10 μm. This is because when the thickness of the heating conductor plate is in the range of 1 to 10 μm, the amount of heat generated by the eddy current density and the resistance of the conductor portion 28 increases. Therefore, a gas sensor in which the thickness of the conductor portion 28 is 1 to 10 μm is preferable. When the thickness is less than 1 μm, the resistance when the eddy current flows is high, so that the eddy current itself is difficult to flow. When the thickness is thicker than 10 μm, the eddy current flows much but the resistance is small, so that sufficient Joule loss is obtained. In addition, since it is necessary to supply a larger current, a large current is required, which is not economical.

第1実施形態における、ガスセンサの断面図。Sectional drawing of the gas sensor in 1st Embodiment. 第1実施形態における、センサ素子の展開斜視図。The expansion | deployment perspective view of the sensor element in 1st Embodiment. 図1のA−A線矢視断面図1 is a cross-sectional view taken along line AA in FIG. 第2実施形態における、ガスセンサの断面図。Sectional drawing of the gas sensor in 2nd Embodiment. 第2実施形態における、素子昇温速度を示す図。The figure which shows the element temperature increase rate in 2nd Embodiment.

符号の説明Explanation of symbols

1 ガスセンサ
2 センサ素子
5 誘導コイル
6 被測定ガス側カバー
12 ハウジング
14 弾性絶縁部材
21 固体電解質体
22 基準ガス側電極
23 被測定ガス側電極
28 導体部
DESCRIPTION OF SYMBOLS 1 Gas sensor 2 Sensor element 5 Inductive coil 6 Gas side cover 12 to be measured 12 Housing 14 Elastic insulating member 21 Solid electrolyte body 22 Reference gas side electrode 23 Gas to be measured side electrode 28 Conductor part

Claims (6)

固体電解質体に被測定ガス側電極と基準ガス側電極を設けたセンサ素子と、前記センサ素子を誘導加熱する誘導コイルとを備えたことを特徴とするガスセンサ。 A gas sensor comprising: a sensor element having a gas electrode to be measured and a reference gas side electrode provided on a solid electrolyte body; and an induction coil for induction heating the sensor element. 請求項1において、前記被測定ガス側電極は、前記誘導コイルの内側に配置されていることを特徴とするガスセンサ。 2. The gas sensor according to claim 1, wherein the measured gas side electrode is disposed inside the induction coil. 請求項1または2において、前記センサ素子を保持する筒状のハウジングと、前記ハウジングの先端側に設けた被測定ガス側カバーと、前記ハウジングの基端側に設けた基準ガス側カバーとを備え、前記誘導コイルを前記被測定ガス側カバー内に収納したことを特徴とするガスセンサ。 3. A cylindrical housing that holds the sensor element according to claim 1, a measured gas side cover provided on a distal end side of the housing, and a reference gas side cover provided on a proximal end side of the housing. A gas sensor characterized in that the induction coil is housed in the measured gas side cover. 請求項1〜3のいずれかにおいて、前記センサ素子は、前記被測定ガス側電極および前記基準ガス側電極以外の導体部を有することを特徴とするガスセンサ。 4. The gas sensor according to claim 1, wherein the sensor element has a conductor portion other than the gas side electrode to be measured and the reference gas side electrode. 5. 請求項4において、前記導体部の厚みが1〜10μmであることを特徴とするガスセンサ。 The gas sensor according to claim 4, wherein the conductor portion has a thickness of 1 to 10 μm. 請求項1〜5のいずれかにおいて、センサ信号の特定周波数成分を除去する信号処理を行うことを特徴とするガスセンサ。 6. The gas sensor according to claim 1, wherein signal processing for removing a specific frequency component of the sensor signal is performed.
JP2004292371A 2004-10-05 2004-10-05 Gas sensor Pending JP2006105768A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018147287A1 (en) * 2017-02-09 2018-08-16 株式会社デンソー Heating device for manufacturing gas sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018147287A1 (en) * 2017-02-09 2018-08-16 株式会社デンソー Heating device for manufacturing gas sensor
JP2018128385A (en) * 2017-02-09 2018-08-16 株式会社デンソー Heating device for manufacturing gas sensor

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