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JP2006175638A - Sheet resin for compression molding and compression molding method - Google Patents

Sheet resin for compression molding and compression molding method Download PDF

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Publication number
JP2006175638A
JP2006175638A JP2004369165A JP2004369165A JP2006175638A JP 2006175638 A JP2006175638 A JP 2006175638A JP 2004369165 A JP2004369165 A JP 2004369165A JP 2004369165 A JP2004369165 A JP 2004369165A JP 2006175638 A JP2006175638 A JP 2006175638A
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Prior art keywords
resin
sheet
mold
compression molding
sealed
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Japanese (ja)
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Toshihide Miyama
寿秀 深山
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Scinex Corp
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Scinex Corp
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Priority to JP2004369165A priority Critical patent/JP2006175638A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/36Moulds for making articles of definite length, i.e. discrete articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/56Compression moulding under special conditions, e.g. vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating
    • B29C2043/5875Measuring, controlling or regulating the material feed to the moulds or mould parts, e.g. controlling feed flow, velocity, weight, doses
    • B29C2043/5883Measuring, controlling or regulating the material feed to the moulds or mould parts, e.g. controlling feed flow, velocity, weight, doses ensuring cavity filling, e.g. providing overflow means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00Moulds or cores; Details thereof or accessories therefor
    • B29C33/10Moulds or cores; Details thereof or accessories therefor with incorporated venting means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29KINDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/25Solid
    • B29K2105/253Preform
    • B29K2105/256Sheets, plates, blanks or films

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

【課題】型内に空気が残存しにくいシート状樹脂及びこれを利用した圧縮成形方法を提供する。
【解決手段】シート状樹脂10は、圧縮成形用の原材料として型12内に収容される板状体で、厚さ方向に貫通する通気孔14が形成されている。
【選択図】図1
The present invention provides a sheet-like resin in which air hardly remains in a mold and a compression molding method using the same.
A sheet-like resin 10 is a plate-like body accommodated in a mold 12 as a raw material for compression molding, and has a vent hole 14 penetrating in the thickness direction.
[Selection] Figure 1

Description

本発明は、例えば電子部品の封止のために用いられる圧縮成形用のシート状樹脂及びこれを用いた圧縮成形方法に関する。   The present invention relates to a compression molding sheet resin used for sealing electronic components, for example, and a compression molding method using the same.

従来、半導体のような電子部品を樹脂で封止する手法の一つとして、シート状樹脂を用いた圧縮成形法が知られている。簡単に説明すると、被封止物と原材料であるシート状樹脂とを加熱した型内に収容してシート状樹脂を軟化させ、軟化した樹脂を型で加圧して被封止物を封止しつつ所定の形状に成形する。樹脂は熱硬化性であり、軟化した後、更に加熱されて硬化する。   2. Description of the Related Art Conventionally, a compression molding method using a sheet-like resin is known as one method for sealing an electronic component such as a semiconductor with a resin. Briefly, the object to be sealed and the sheet-shaped resin as a raw material are accommodated in a heated mold to soften the sheet-shaped resin, and the softened resin is pressed with a mold to seal the object to be sealed. While forming into a predetermined shape. The resin is thermosetting, and after being softened, it is further heated and cured.

シート状樹脂は、適度の隙間を有して型に収容される形状に成形されており、これにより、型内に容易に搬入できるようになっている。   The sheet-like resin is molded into a shape that can be accommodated in the mold with an appropriate gap, and can be easily carried into the mold.

型には排気孔が形成されており、軟化した樹脂を型が加圧して所定の形状に成形する際、型とシート状樹脂との間の隙間の空気は排気孔から外部に排気される。   Exhaust holes are formed in the mold, and when the mold pressurizes the softened resin into a predetermined shape, the air in the gap between the mold and the sheet-shaped resin is exhausted to the outside through the exhaust holes.

しかしながら、樹脂は成形される過程で型内を仕切るような態様で変形することがあり、樹脂で排気孔から仕切られた部分の空気が型内に閉じ込められてしまうことがある。このような空気のために、樹脂の表面の一部が充分に加熱されず、軟化が不充分となり、欠陥部位が形成されてしまうことがある。   However, the resin may be deformed in such a manner as to partition the inside of the mold during the molding process, and the air in the part partitioned from the exhaust hole by the resin may be trapped in the mold. Due to such air, a part of the surface of the resin is not sufficiently heated, the softening becomes insufficient, and a defective part may be formed.

又、型内に閉じ込められた空気のために、製品の表面に凹部が形成されたり、製品の内部に空隙が形成されてしまうことがある。隙間の容積が僅かであっても、空気は加熱により膨張するため、許容できない大きさの凹部や空隙が製品に形成されてしまうことがある。   Further, due to air trapped in the mold, a concave portion may be formed on the surface of the product, or a void may be formed inside the product. Even if the volume of the gap is small, the air expands due to heating, so that recesses and voids with unacceptable sizes may be formed in the product.

これに対し、シート状樹脂の中央部を周辺部よりも突出した形状とすることで、型内の空気を排気しやすくする手法が提案されている(例えば、特許文献1参照)。   On the other hand, a method has been proposed in which the air in the mold is easily exhausted by making the central portion of the sheet-like resin protrude from the peripheral portion (see, for example, Patent Document 1).

特開平9―129659号公報JP-A-9-129659

しかしながら、中央部が周辺部よりも突出したシート状樹脂は、均一な厚さのシート状樹脂よりも、成形過程における変形の自由度が大きいため、型内を仕切るような態様の変形が生じることも考えられる。又、中央部が周辺部よりも突出したシート状樹脂は、均一な厚さのシート状樹脂よりも、型との間に容積が大きい隙間を形成するので、却って大きな凹部や空隙が製品に形成されることが懸念される。   However, since the sheet-like resin whose central portion protrudes from the peripheral portion has a greater degree of freedom of deformation in the molding process than the sheet-like resin having a uniform thickness, deformation in an aspect that partitions the inside of the mold occurs. Is also possible. In addition, the sheet-shaped resin with the central part protruding from the peripheral part forms a large gap between the mold and the sheet-shaped resin with a uniform thickness. There is concern about being done.

本発明は、以上の問題点に鑑みてなされたものであって、型内に空気が残存しにくいシート状樹脂及びこれを利用した圧縮成形方法を提供することをその課題とする。   The present invention has been made in view of the above problems, and an object thereof is to provide a sheet-like resin in which air hardly remains in a mold and a compression molding method using the same.

本発明は、圧縮成形用の原材料として型内に収容される板状体で、厚さ方向に貫通する通気孔が形成された圧縮成形用のシート状樹脂により上記課題を解決したものである。   The present invention solves the above-mentioned problems with a sheet-like resin for compression molding, which is a plate-like body accommodated in a mold as a raw material for compression molding and has a vent hole penetrating in the thickness direction.

このように通気孔を形成しておくことで、シート状樹脂が型内を仕切るように変形しても、仕切られた隙間の空気は通気孔を通ってシート状樹脂の一方側から他方側に移動し、外部に排気される。   By forming a vent hole in this way, even if the sheet-shaped resin is deformed so as to partition the inside of the mold, the air in the partitioned gap passes through the vent hole from one side of the sheet-shaped resin to the other side. It moves and is exhausted to the outside.

又、通気孔に代えて、厚さ方向両面に連通する切り欠きを形成してもよい。   Moreover, it may replace with a ventilation hole and may form the notch connected to thickness direction both surfaces.

又、周縁に連通する通気溝を厚さ方向の少なくとも一方の面に形成してもよい。このように、シート状樹脂に通気溝を形成した場合、シート状樹脂が型内を仕切るように変形しても、仕切られた隙間の空気は、通気溝を通ってシート状樹脂の周縁まで移動し、外部に排気される。   Further, a ventilation groove communicating with the peripheral edge may be formed on at least one surface in the thickness direction. As described above, when the ventilation groove is formed in the sheet-shaped resin, even if the sheet-shaped resin is deformed so as to partition the inside of the mold, the air in the partitioned gap moves to the periphery of the sheet-shaped resin through the ventilation groove. And exhausted to the outside.

又、シート状樹脂の厚さ方向の少なくとも一方の面に複数の突起を形成し、型に嵌合した状態で型との間に、通気可能な空隙を形成する構成としてもよい。   Moreover, it is good also as a structure which forms several protrusion on the at least one surface of the thickness direction of sheet-like resin, and forms the space | gap which can ventilate between a type | mold in the state fitted to the type | mold.

このように意図的に通気可能な空隙を形成することで、確実な排気が可能である。又、突起を複数形成することで、シート状樹脂の成形過程における自由度を小さく抑制し、型内を仕切るような態様のシート状樹脂の変形を抑制できる。   In this way, by forming a void that can be intentionally ventilated, reliable exhaust is possible. Further, by forming a plurality of protrusions, it is possible to suppress the degree of freedom in the molding process of the sheet-like resin to be small, and to suppress deformation of the sheet-like resin that partitions the mold.

本発明によれば、型内の空気を確実に排気し、高品質の圧縮成形を実現できる。   According to the present invention, high-quality compression molding can be realized by reliably exhausting the air in the mold.

以下、本発明を実施するための好ましい形態について図面を参照して詳細に説明する。   Hereinafter, preferred embodiments for carrying out the present invention will be described in detail with reference to the drawings.

図1に示されるように、本発明の第1実施形態に係るシート状樹脂10は、圧縮成形用の原材料として型12内に収容される板状体で、厚さ方向に貫通する通気孔14が形成されたことを特徴としている。他の構成については、本実施形態の理解のために特に重要とは思われないため、説明を適宜省略する。   As shown in FIG. 1, a sheet-like resin 10 according to the first embodiment of the present invention is a plate-like body accommodated in a mold 12 as a raw material for compression molding, and a vent hole 14 penetrating in the thickness direction. It is characterized by the formation. Other configurations are not considered particularly important for understanding the present embodiment, and thus description thereof will be omitted as appropriate.

シート状樹脂10は、図2に示されるように、厚さが均一な略長方形の板状体で、材料は熱硬化性樹脂である。   As shown in FIG. 2, the sheet-like resin 10 is a substantially rectangular plate-like body having a uniform thickness, and the material is a thermosetting resin.

通気孔14は、断面が略円形で、シート状樹脂10における複数(本第1実施形態では9箇所)の部位に適宜な間隔で形成されている。尚、通気孔14の直径は1mm以上であることが好ましく、3mm以上であれば更に好ましい。   The vent holes 14 have a substantially circular cross section, and are formed at appropriate intervals in a plurality of (9 places in the first embodiment) portions of the sheet-like resin 10. The diameter of the vent hole 14 is preferably 1 mm or more, and more preferably 3 mm or more.

被封止物16は、基板18の片面に複数固着されている。   A plurality of objects to be sealed 16 are fixed to one side of the substrate 18.

型12は、上型20と、下型22と、枠状型24と、これらを加熱するための図示しない加熱器と、を備えている。   The mold 12 includes an upper mold 20, a lower mold 22, a frame-shaped mold 24, and a heater (not shown) for heating them.

上型20は、図示しない吸着機構又はチャック機構を備えており、下面において基板18における被封止物16が固着された面と反対側の面を保持/解放自在である。   The upper mold 20 includes a suction mechanism or a chuck mechanism (not shown), and can hold / release the surface of the lower surface of the substrate 18 opposite to the surface to which the object to be sealed 16 is fixed.

下型22は、上端部22Aと、中間部22Bと、基部22Cと、を有している。上端部22Aは枠状型24の内側に上下方向摺動自在に嵌合している。中間部22Bは、枠状型24の下端部を貫通し、上端部22A及び基部22Cを連結している。基部22Cと枠状型24との間には圧縮ばね26が装架されている。   The lower mold 22 includes an upper end portion 22A, an intermediate portion 22B, and a base portion 22C. The upper end portion 22A is fitted inside the frame-shaped mold 24 so as to be slidable in the vertical direction. The intermediate portion 22B penetrates the lower end portion of the frame mold 24 and connects the upper end portion 22A and the base portion 22C. A compression spring 26 is mounted between the base portion 22 </ b> C and the frame-shaped mold 24.

枠状型24の内側、且つ、下型22の上端部22Aの上側は、キャビティ24Aを構成している。枠状型24には、キャビティ24A内側の空気を外側に排気するための排気孔24Bが形成されている。排気孔24Bには、配管27を介して、キャビティ24A内の空気を吸引するための減圧装置28が連結されている。   The inside of the frame-shaped mold 24 and the upper side of the upper end portion 22A of the lower mold 22 constitute a cavity 24A. The frame-shaped mold 24 is formed with exhaust holes 24B for exhausting the air inside the cavity 24A to the outside. A pressure reducing device 28 for sucking air in the cavity 24A is connected to the exhaust hole 24B via a pipe 27.

下型22及び枠状型24は、上型20に対し上下方向に接近/離間自在であり、枠状型24及び上型20で基板18の周縁を上下方向両側から挟持し、更に下型22が上型20に接近することで、シート状樹脂10を加圧できるようになっている。   The lower mold 22 and the frame-shaped mold 24 can be moved up and down in the vertical direction with respect to the upper mold 20, and the periphery of the substrate 18 is sandwiched from both sides in the vertical direction by the frame-shaped mold 24 and the upper mold 20. Since the upper mold 20 is approached, the sheet-like resin 10 can be pressurized.

次に、シート状樹脂10の型12内における作用について説明する。   Next, the operation of the sheet-like resin 10 in the mold 12 will be described.

まず、上型20から下型22及び枠状型24を離間させた状態で、上型20の下面に基板18を被封止物16が下向きとなるように保持する。又、キャビティ24A内にシート状樹脂10を搬入する。   First, in a state where the lower mold 22 and the frame mold 24 are separated from the upper mold 20, the substrate 18 is held on the lower surface of the upper mold 20 so that the object to be sealed 16 faces downward. Further, the sheet-like resin 10 is carried into the cavity 24A.

次に、上型20に下型22及び枠状型24を接近させて、上型20及び枠状型24で基板18の周縁を挟持すると共に、キャビティ24A内に被封止物16を収容する。上型20、下型22及び枠状型24は、加熱器で常時加熱されており、キャビティ24A内に搬入、収容されたシート状樹脂10は軟化する。   Next, the lower mold 22 and the frame-shaped mold 24 are brought close to the upper mold 20, the periphery of the substrate 18 is sandwiched between the upper mold 20 and the frame-shaped mold 24, and the object to be sealed 16 is accommodated in the cavity 24A. . The upper mold 20, the lower mold 22, and the frame-shaped mold 24 are constantly heated by a heater, and the sheet-shaped resin 10 that is carried into and accommodated in the cavity 24A is softened.

この状態で、減圧装置26により、キャビティ24A内の空気を吸引して枠状型24の外側に排気しながら、圧縮ばね26の反力に抗して下型22を上型20に更に接近させて、軟化した樹脂を加圧する。これにより、樹脂は、被封止物16を封止しつつ、キャビティ24Aの形状に成形される。   In this state, the lower die 22 is further brought closer to the upper die 20 against the reaction force of the compression spring 26 while sucking the air in the cavity 24A by the pressure reducing device 26 and exhausting it outside the frame-like die 24. And pressurizing the softened resin. Thus, the resin is molded into the shape of the cavity 24A while sealing the object 16 to be sealed.

この際、図3に示されるように、シート状樹脂10は、キャビティ24A内を仕切るような態様で変形することがある。尚、図3は、本実施形態の理解のため、シート状樹脂10と型12との間の隙間を実際よりも著しく大きく描いている。しかしながら、シート状樹脂10には通気孔14が形成されているので、シート状樹脂10により排気孔24B側から仕切られたような部分の空気は通気孔14を通ってシート状樹脂10の一方側から他方側に移動し、排気孔24Bから外部に排気される。従って、高品質の圧縮成形を実現できる。尚、一部又は全部の通気孔14は、被封止物16と、紙面に垂直な方向に位置がずれており、被封止部22Aで閉塞されていない。   At this time, as shown in FIG. 3, the sheet-like resin 10 may be deformed in such a manner as to partition the cavity 24A. In FIG. 3, the gap between the sheet-like resin 10 and the mold 12 is drawn to be significantly larger than actual for understanding the present embodiment. However, since the vent hole 14 is formed in the sheet-like resin 10, the air in a portion that is partitioned from the exhaust hole 24 </ b> B side by the sheet-like resin 10 passes through the vent hole 14 on one side of the sheet-like resin 10. To the other side and exhausted to the outside through the exhaust hole 24B. Therefore, high quality compression molding can be realized. Note that a part or all of the vent holes 14 are displaced from the object to be sealed 16 in the direction perpendicular to the paper surface and are not closed by the part to be sealed 22A.

圧縮成形後、樹脂及び基板18は、被封止物16毎に切断され、複数の製品が完成する。   After the compression molding, the resin and the substrate 18 are cut for each of the objects to be sealed 16 to complete a plurality of products.

尚、本第1実施形態において、減圧装置28でキャビティ24A内の空気を吸引しているが、キャビティ24A内の空気を充分に排気できれば、減圧装置は省略してもよい。   In the first embodiment, the pressure reducing device 28 sucks the air in the cavity 24A. However, the pressure reducing device may be omitted if the air in the cavity 24A can be exhausted sufficiently.

又、本第1実施形態において、通気孔14は断面が円形で、9個形成されているが、通気孔の形状、個数は、型の形状や、被封止物の形状に応じて適宜決定すればよい。例えば、図4に示される、本発明の第2実施形態に係るシート状樹脂30のように、細長い3本のスリット状の通気孔32を形成してもよい。   In the first embodiment, the vent hole 14 has a circular cross section and nine holes are formed. The shape and number of the vent holes are appropriately determined according to the shape of the mold and the shape of the object to be sealed. do it. For example, like the sheet-like resin 30 according to the second embodiment of the present invention shown in FIG. 4, three elongated slit-like vent holes 32 may be formed.

又、本第1実施形態において、1回の圧縮成形で複数の被封止物16を同時に樹脂で封止しているが、1回の圧縮成形で1個の被封止物を樹脂で封止する場合にも本発明を適用可能である。   In the first embodiment, a plurality of objects to be sealed 16 are simultaneously sealed with resin by one compression molding. However, one object to be sealed is sealed with resin by one compression molding. The present invention can also be applied when stopping.

次に、本発明の第3実施形態について説明する。   Next, a third embodiment of the present invention will be described.

図5に示されるように、本第3実施形態に係るシート状樹脂40は、前記第1実施形態に係るシート状樹脂10に対し、通気孔14に代えて厚さ方向両面に連通する切り欠き42が形成された点が異なっている。他の構成は、前記シート状樹脂10と同様であるので説明を省略する。   As shown in FIG. 5, the sheet-like resin 40 according to the third embodiment has a notch that communicates with both sides in the thickness direction instead of the vent hole 14 with respect to the sheet-like resin 10 according to the first embodiment. The difference is that 42 is formed. Since other structures are the same as those of the sheet-like resin 10, description thereof is omitted.

切り欠き42は、周縁に略垂直な細長いスリット状で、複数(本実施形態では6箇所に)形成されている。具体的には、1の周縁の3箇所に適宜な間隔で3本の切り欠き42が形成され、これらと対称的に、他の周縁の3箇所に3本の切り欠き42が形成されている。   The notches 42 are formed into a plurality of (six in this embodiment) in the form of elongated slits substantially perpendicular to the periphery. Specifically, three cutouts 42 are formed at appropriate intervals at three positions on one peripheral edge, and three cutouts 42 are formed at three positions on the other peripheral edge symmetrically with these. .

シート状樹脂40は、成形される際にキャビティ24A内を仕切るような態様で変形しても、前記シート状樹脂10と同様に、シート状樹脂40により排気孔24B側から仕切られた部分の空気は、切り欠き42を通ってシート状樹脂40の一方側から他方側に移動し、排気孔24B側から排気される。   Even if the sheet-like resin 40 is deformed in such a manner as to partition the cavity 24A when being molded, the air in the portion partitioned from the exhaust hole 24B side by the sheet-like resin 40 is the same as the sheet-like resin 10. Moves from the one side of the sheet-like resin 40 to the other side through the notch 42 and is exhausted from the exhaust hole 24B side.

尚、本第3実施形態において、切り欠き42はスリット状で、シート状樹脂40の6箇所に形成されているが、切り欠きの形状、個数は、型の形状や、被封止物の形状に応じて適宜決定すればよい。   In the third embodiment, the notches 42 are slit-like and are formed at six locations in the sheet-like resin 40. The shape and number of the notches are the shape of the mold or the shape of the object to be sealed. What is necessary is just to determine suitably according to.

次に、本発明の第4実施形態について説明する。   Next, a fourth embodiment of the present invention will be described.

図6及び図7に示されるように、本第4実施形態に係るシート状樹脂50は、前記第1実施形態に係るシート状樹脂10に対し、通気孔14に代えて、周縁に連通する通気溝52が厚さ方向の両面に形成された点が異なる。他の構成は、前記シート状樹脂10と同様であるので説明を省略する。   As shown in FIG. 6 and FIG. 7, the sheet-like resin 50 according to the fourth embodiment is a ventilation that communicates with the periphery of the sheet-like resin 10 according to the first embodiment instead of the vent hole 14. The difference is that the grooves 52 are formed on both surfaces in the thickness direction. Since other structures are the same as those of the sheet-like resin 10, description thereof is omitted.

通気溝52は、シート状樹脂50の周縁に略平行な格子状のパターンで形成されている。   The ventilation grooves 52 are formed in a lattice pattern substantially parallel to the periphery of the sheet-like resin 50.

シート状樹脂50は、成形される際にキャビティ24A内を仕切るような態様で変形しても、シート状樹脂50により排気孔24B側から仕切られた部分の空気は、通気溝52を通ってシート状樹脂50の周縁部に移動し、排気孔24Bから外部に排気される。   Even when the sheet-like resin 50 is deformed in such a manner as to partition the cavity 24A when being molded, the air in the portion partitioned from the exhaust hole 24B side by the sheet-like resin 50 passes through the ventilation groove 52 and the sheet. It moves to the peripheral part of the resin 50 and is exhausted to the outside through the exhaust hole 24B.

尚、本第4実施形態において、通気溝52は格子状のパターンで形成されているが、通気溝のパターンは、型の形状や、被封止物の形状に応じて適宜決定すればよい。又、通気溝のパターンはシート状樹脂の両面で異なるパターンとしてもよい。又、シート状樹脂の片面だけに、通気溝を形成してもよい。   In the fourth embodiment, the ventilation groove 52 is formed in a lattice pattern, but the ventilation groove pattern may be appropriately determined according to the shape of the mold and the shape of the object to be sealed. Further, the pattern of the ventilation grooves may be different on both sides of the sheet-like resin. Moreover, you may form a ventilation groove only in the single side | surface of sheet-like resin.

次に、本発明の第5実施形態について説明する。   Next, a fifth embodiment of the present invention will be described.

図8及び図9に示されるように、本第5実施形態に係るシート状樹脂60は、前記第1実施形態に係るシート状樹脂10に対し、厚さ方向の一方の面に複数(本第5実施形態では5個)の突起62が形成され、型12との間に通気自在の空隙を形成するように構成された点が異なる。他の構成は、前記シート状樹脂10と同様であるので説明を省略する。   As shown in FIGS. 8 and 9, the sheet-like resin 60 according to the fifth embodiment has a plurality of (this first-like) on one surface in the thickness direction with respect to the sheet-like resin 10 according to the first embodiment. The fifth embodiment is different in that five projections 62 are formed and an air-permeable gap is formed between the projection 12 and the mold 12. Since other structures are the same as those of the sheet-like resin 10, description thereof is omitted.

突起62は、断面が略円形でシート状樹脂10の中央部及び4隅近傍に形成され、これらの突出量はほぼ等しい。   The protrusions 62 have a substantially circular cross section and are formed in the vicinity of the central portion and the four corners of the sheet-like resin 10, and these protrusion amounts are substantially equal.

このように意図的に通気可能な空隙を形成することで、空隙の空気を確実に排気できる。又、突起62は複数形成されているので、シート状樹脂60は変形過程における自由度が小さく抑制され、型内を仕切るような態様のシート状樹脂の変形が抑制される。   By thus forming a gap that can be intentionally ventilated, the air in the gap can be reliably exhausted. In addition, since a plurality of protrusions 62 are formed, the degree of freedom in the deformation process of the sheet-like resin 60 is suppressed to be small, and the deformation of the sheet-like resin in a manner that partitions the mold is suppressed.

尚、本第5実施形態において、突起62は断面が略円形で、シート状樹脂60の5箇所に形成されているが、突起の形状、個数は、型の形状や、被封止物の形状に応じて適宜決定すればよい。例えば、シート状樹脂の1辺に平行な2本の細長い2本の突起を形成してもよい。又、シート状樹脂の両面に複数の突起を形成してもよい。   In the fifth embodiment, the protrusions 62 have a substantially circular cross section and are formed at five locations on the sheet-like resin 60. The shape and number of protrusions are the shape of the mold or the shape of the object to be sealed. What is necessary is just to determine suitably according to. For example, two elongated two protrusions parallel to one side of the sheet-like resin may be formed. Moreover, you may form a some protrusion on both surfaces of sheet-like resin.

又、上記第1〜第5実施形態において、それぞれ1枚のシート状樹脂に通気孔、切り欠き、通気溝、突起のいずれかを個別に形成したものであるが、これらの2以上の要素を1枚のシート状樹脂に形成してもよい。例えば、通気孔及び切り欠きを1枚のシート状樹脂に形成してもよい。   In the first to fifth embodiments, each of the sheet-like resin is formed with any one of a vent hole, a notch, a vent groove, and a protrusion. You may form in one sheet-like resin. For example, the air hole and the notch may be formed in one sheet-like resin.

上記第1〜第5実施形態において、シート状樹脂は略長方形であるが、シート状樹脂の形状は型の形状等に応じて決定すればよい。   In the first to fifth embodiments, the sheet-like resin is substantially rectangular, but the shape of the sheet-like resin may be determined according to the shape of the mold or the like.

本発明は、例えば電子部品の封止等のための圧縮成形に利用することができる。   The present invention can be used for compression molding for sealing electronic components, for example.

本発明の第1実施形態に係るシート状樹脂及び圧縮成形用の型の構造を模式的に示す側断面図1 is a side sectional view schematically showing the structure of a sheet-like resin and a compression molding die according to a first embodiment of the present invention. 同シート状樹脂の平面図Plan view of the sheet resin 同シート状樹脂の型内における変形態様を模式的に示す側断面図Side sectional view schematically showing a deformation mode in the mold of the sheet-like resin 本発明の第2実施形態に係るシート状樹脂の平面図The top view of sheet-like resin concerning a 2nd embodiment of the present invention. 本発明の第3実施形態に係るシート状樹脂の平面図The top view of sheet-like resin concerning a 3rd embodiment of the present invention. 本発明の第4実施形態に係るシート状樹脂の平面図The top view of sheet-like resin concerning a 4th embodiment of the present invention. 図6におけるVII−VII線に沿う側断面図Side sectional view along line VII-VII in FIG. 本発明の第5実施形態に係るシート状樹脂の平面図The top view of sheet-like resin concerning a 5th embodiment of the present invention. 同シート状樹脂の側面図Side view of the sheet resin

符号の説明Explanation of symbols

10、30、40、50、60…シート状樹脂
12…型
14、32…通気孔
16…被封止物
18…基板
20…上型
22…下型
22A…上端部
22B…中間部
22C…基部
24…枠状型
24A…キャビティ
24B…排気孔
26…圧縮ばね
27…配管
28…減圧装置
42…切り欠き
52…通気溝
62…突起
DESCRIPTION OF SYMBOLS 10, 30, 40, 50, 60 ... Sheet-like resin 12 ... Type | mold 14, 32 ... Air hole 16 ... Sealed object 18 ... Board | substrate 20 ... Upper mold | type 22 ... Lower mold | type 22A ... Upper end part 22B ... Middle part 22C ... Base part 24 ... Frame type 24A ... Cavity 24B ... Exhaust hole 26 ... Compression spring 27 ... Piping 28 ... Pressure reducing device 42 ... Notch 52 ... Ventilation groove 62 ... Protrusion

Claims (6)

圧縮成形用の原材料として型内に収容される板状体で、厚さ方向に貫通する通気孔が形成された
ことを特徴とする圧縮成形用のシート状樹脂。
A sheet-like resin for compression molding, which is a plate-like body accommodated in a mold as a raw material for compression molding, and has a vent hole penetrating in the thickness direction.
圧縮成形用の原材料として型内に収容される板状体で、厚さ方向両面に連通する切り欠きが形成された
ことを特徴とする圧縮成形用のシート状樹脂。
A sheet-like resin for compression molding, which is a plate-like body accommodated in a mold as a raw material for compression molding, and has cutouts communicating with both sides in the thickness direction.
圧縮成形用の原材料として型内に収容される板状体で、周縁に連通する通気溝が厚さ方向の少なくとも一方の面に形成された
ことを特徴とする圧縮成形用のシート状樹脂。
A sheet-like resin for compression molding, characterized in that it is a plate-like body accommodated in a mold as a raw material for compression molding, and a ventilation groove communicating with the periphery is formed on at least one surface in the thickness direction.
圧縮成形用の原材料として型内に収容される板状体で、厚さ方向の少なくとも一方の面に複数の突起が形成され、前記型との間に通気自在の空隙を形成するように構成された
ことを特徴とする圧縮成形用のシート状樹脂。
It is a plate-like body accommodated in a mold as a raw material for compression molding, and a plurality of protrusions are formed on at least one surface in the thickness direction, and a ventilation space is formed between the mold and the mold. A sheet-like resin for compression molding characterized by the above.
請求項1〜4のいずれかに記載の圧縮成形用のシート状樹脂と、被封止物と、を前記型内に収容し、前記シート状樹脂を加熱して軟化させ、軟化した樹脂を前記型で加圧して前記被封止体を封止しつつ所定の形状に成形する
ことを特徴とする圧縮成形方法。
The sheet-like resin for compression molding according to any one of claims 1 to 4 and an object to be sealed are accommodated in the mold, the sheet-like resin is heated and softened, and the softened resin is A compression molding method characterized in that it is molded into a predetermined shape while sealing the object to be sealed by pressing with a mold.
請求項5において、
前記型内の空気を吸引して外部に排気しつつ、前記軟化した樹脂を前記型で加圧して前記被封止体を封止しつつ所定の形状に成形する
ことを特徴とする圧縮成形方法。
In claim 5,
A compression molding method characterized by sucking air in the mold and exhausting it outside, pressurizing the softened resin with the mold and sealing the object to be sealed into a predetermined shape .
JP2004369165A 2004-12-21 2004-12-21 Sheet resin for compression molding and compression molding method Pending JP2006175638A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009166415A (en) * 2008-01-18 2009-07-30 Sumitomo Heavy Ind Ltd Resin for compression molding, resin sealing apparatus and resin sealing method
JP4935957B1 (en) * 2010-11-17 2012-05-23 株式会社村田製作所 Manufacturing method of resin sheet for sealing
CN104425292A (en) * 2013-09-11 2015-03-18 株式会社东芝 Semiconductor device manufacturing method, semiconductor manufacturing apparatus and sheet-shaped resin for resin sealing
JP2017034286A (en) * 2016-11-02 2017-02-09 株式会社東芝 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
US12409586B2 (en) 2020-11-25 2025-09-09 Apic Yamada Corporation Resin-sealing apparatus and resin-sealing method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009166415A (en) * 2008-01-18 2009-07-30 Sumitomo Heavy Ind Ltd Resin for compression molding, resin sealing apparatus and resin sealing method
JP4935957B1 (en) * 2010-11-17 2012-05-23 株式会社村田製作所 Manufacturing method of resin sheet for sealing
WO2012066902A1 (en) * 2010-11-17 2012-05-24 株式会社村田製作所 Method for manufacturing sealing resin sheet
CN104425292A (en) * 2013-09-11 2015-03-18 株式会社东芝 Semiconductor device manufacturing method, semiconductor manufacturing apparatus and sheet-shaped resin for resin sealing
JP2015056467A (en) * 2013-09-11 2015-03-23 株式会社東芝 Semiconductor device manufacturing method, semiconductor manufacturing apparatus, and sheet-like resin for resin sealing
TWI575615B (en) * 2013-09-11 2017-03-21 東芝股份有限公司 A semiconductor device manufacturing method, and a semiconductor manufacturing apparatus
JP2017034286A (en) * 2016-11-02 2017-02-09 株式会社東芝 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
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