JP2006152329A - Surface treatment method for copper layer, and laminate and wiring board including copper layer subjected to the treatment - Google Patents
Surface treatment method for copper layer, and laminate and wiring board including copper layer subjected to the treatment Download PDFInfo
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Abstract
【課題】銅層と樹脂絶縁層を一体化するに当り十分な密着力を確保できる銅層の表面処理法を提供する。
【解決手段】谷から山までの高さが5μmを越える凹凸を含み生成するように銅層の表面にエッチング型化学粗化処理をし、さらに前記処理面に黒化還元処理をする。前記エッチング型化学粗化処理は、好ましくは谷から山までの高さが8μmを越える凹凸、さらに好ましくは12μmを越える凹凸を含み生成するように行なう。また、黒化還元処理後に、カップリング剤処理を付加してもよい。前記処理法は、例えば、厚さ100μm以上の圧延銅箔に適用し、その処理面をプリプレグ層に重ねて加熱加圧成形により一体化して積層板とする。
【選択図】 なしThe present invention provides a surface treatment method for a copper layer capable of ensuring sufficient adhesion for integrating a copper layer and a resin insulating layer.
The surface of the copper layer is subjected to etching-type chemical roughening so that the height from the valley to the peak includes unevenness exceeding 5 μm, and the treated surface is further subjected to blackening reduction treatment. The etching type chemical roughening treatment is preferably performed so that the height from the valley to the peak includes unevenness exceeding 8 μm, more preferably including unevenness exceeding 12 μm. Further, a coupling agent treatment may be added after the blackening reduction treatment. The treatment method is applied to, for example, a rolled copper foil having a thickness of 100 μm or more, and the treatment surface is overlapped with the prepreg layer and integrated by heating and pressing to obtain a laminated plate.
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Description
本発明は、銅層の表面処理法に関する。また、当該処理をした銅層を含む積層板ならびに配線板に関する。前記配線板は、大電流を通電する用途に好適なものである。 The present invention relates to a surface treatment method for a copper layer. Moreover, it is related with the laminated board and wiring board containing the copper layer which performed the said process. The wiring board is suitable for applications in which a large current is passed.
電子機器に搭載する配線板は、電子機器の軽薄短小化に伴う微細配線・高密度実装の技術が求められる一方で、発熱に対応する高放熱の技術も求められている。特に、各種制御・操作に大電流を使用する自動車などにおける電子回路では、導電回路の抵抗に起因する発熱やパワー素子からの発熱が非常に多く、配線板の放熱特性は高レベルであることが必須となってきている。その対策として、配線板の導電回路を構成する銅層を厚くして熱伝導性を高め、放熱を促進することが提案されている。 A wiring board mounted on an electronic device is required to have a technology for fine wiring and high-density mounting in accordance with a reduction in the thickness and size of the electronic device, and a technology for high heat dissipation corresponding to heat generation is also required. In particular, in electronic circuits such as automobiles that use a large current for various controls and operations, heat generation due to the resistance of the conductive circuit and heat generation from the power element are very large, and the heat dissipation characteristics of the wiring board may be high. It has become essential. As a countermeasure, it has been proposed to increase the thermal conductivity by increasing the copper layer constituting the conductive circuit of the wiring board and to promote heat dissipation.
上記配線板の製造においては、銅層を樹脂絶縁層に加熱加圧成形により一体化した積層板を用いており、その積層板の銅層を導電回路に加工し配線板としている。通常、銅層は、電解銅箔や圧延銅箔から選択するが、厚みの薄い銅層でよい場合は電着による電解銅箔を選択し、電着では製造が難しい厚みの厚い銅層を必要とする場合には圧延銅箔を選択している。
電解銅箔は、その片面が電着の結果生じる粗面となっているので、当該粗面を樹脂絶縁層に当接して上記の加熱加圧成形を行ない、粗面を構成する凸部を樹脂絶縁層に食い込ませ、その投錨効果により樹脂絶縁層と銅層の密着性を高めている。一方、圧延銅箔は、その製造工程上、両面とも滑らかな面になるので、当該銅層を樹脂絶縁層に一体化するに当っては、銅層の樹脂絶縁層への当接面に、別途粗化処理をする必要がある。
In the production of the wiring board, a laminated board in which a copper layer is integrated with a resin insulating layer by heating and pressing is used, and the copper layer of the laminated board is processed into a conductive circuit to form a wiring board. Usually, the copper layer is selected from electrolytic copper foil or rolled copper foil, but if a thin copper layer is acceptable, electrolytic copper foil by electrodeposition is selected, and a thick copper layer that is difficult to manufacture by electrodeposition is required. In this case, a rolled copper foil is selected.
Since one surface of the electrolytic copper foil is a rough surface resulting from electrodeposition, the rough surface is brought into contact with the resin insulating layer and the above-mentioned heat-press molding is performed, and the convex portions constituting the rough surface are made of resin. The insulating layer is bitten and the anchoring effect increases the adhesion between the resin insulating layer and the copper layer. On the other hand, since both sides of the rolled copper foil are smooth surfaces in the manufacturing process, in integrating the copper layer into the resin insulation layer, the contact surface of the copper layer to the resin insulation layer is A separate roughening treatment is required.
銅層の一般的な粗化処理法として、黒化処理や黒化還元処理があるが、銅層と樹脂絶縁層の一体化において十分な耐熱性(加熱処理後においても、銅層と樹脂絶縁層の密着力を低下させない特性)を確保することができないことが知られている。また、圧延銅箔の粗化処理法として、銅層の表面に微粒子を高速衝突させ、表面に微小な凹凸を付与する方法(例えば、特許文献1)がある。しかし、このような処理をした銅層にあっても、樹脂絶縁層との十分な密着力、耐熱性を確保するには至っていない。 Common roughening treatment methods for copper layers include blackening treatment and blackening reduction treatment, but sufficient heat resistance in the integration of copper layer and resin insulation layer (copper layer and resin insulation even after heat treatment) It is known that it is not possible to ensure properties that do not reduce the adhesion of the layers. Moreover, as a roughening method of the rolled copper foil, there is a method (for example, Patent Document 1) in which fine particles collide with the surface of the copper layer at high speed to give fine irregularities on the surface. However, even with such a treated copper layer, sufficient adhesion and heat resistance with the resin insulating layer have not been secured.
本発明が解決しようとする課題は、銅層と樹脂絶縁層を一体化するに当り十分な密着力を確保できる銅層の表面処理法を提供することである。また、当該処理をした銅層と樹脂絶縁層を一体化した積層板ならびに配線板を提供することである。 The problem to be solved by the present invention is to provide a surface treatment method of a copper layer that can secure a sufficient adhesion force when the copper layer and the resin insulating layer are integrated. Moreover, it is providing the laminated board and wiring board which integrated the copper layer and resin insulating layer which processed the said process.
上記銅層の表面処理法は、好ましくは、表面が滑らかな圧延銅箔に適用して、銅層と絶縁樹脂層との密着力を確保することを目指すものである。 The surface treatment method for the copper layer is preferably applied to a rolled copper foil having a smooth surface, and aims to ensure adhesion between the copper layer and the insulating resin layer.
上記課題を達成するために、本発明に係る銅層の表面処理法は、谷から山までの高さが5μmを越える凹凸を含み生成するように銅層の表面にエッチング型化学粗化処理をし、さらに前記処理面に黒化還元処理をすることを特徴とする(請求項1)。前記において、エッチング型化学粗化処理は、好ましくは谷から山までの高さが8μmを越える凹凸(請求項2)、さらに好ましくは12μmを越える凹凸(請求項3)を含み生成するように行なう。
銅層は、例えば、厚さ100μm以上の圧延銅箔である(請求項4)。
In order to achieve the above object, the surface treatment method for a copper layer according to the present invention includes an etching-type chemical roughening treatment on the surface of the copper layer so that the height from the valley to the mountain includes irregularities exceeding 5 μm. Further, the processing surface is subjected to blackening reduction processing (claim 1). In the above, the etching-type chemical roughening treatment is preferably performed so as to include an unevenness having a height from a valley to a peak exceeding 8 μm (Claim 2), more preferably an unevenness exceeding 12 μm (Claim 3). .
The copper layer is, for example, a rolled copper foil having a thickness of 100 μm or more (Claim 4).
ここで、黒化還元処理とは、銅層表面に微細な針状の酸化第一銅または酸化第二銅を生成し、その後これを還元処理する操作である。 Here, the blackening reduction treatment is an operation of producing fine acicular cuprous oxide or cupric oxide on the surface of the copper layer, and thereafter reducing this.
本発明に係る方法により粗化処理した銅層の表面には、エッチング型化学粗化処理によるミクロンオーダの凹凸が付与され、さらにその上に黒化還元処理によるサブミクロンオーダの微細な凹凸が付与される。その結果、銅層は微細で複雑な表面性状を呈したものとなる。 The surface of the copper layer roughened by the method according to the present invention is provided with micron-order irregularities by etching-type chemical roughening treatment, and further sub-micron-order irregularities by blackening reduction treatment are provided thereon. Is done. As a result, the copper layer exhibits fine and complicated surface properties.
上記のような表面性状の銅層を、その粗化処理面を樹脂絶縁層に当接して加熱加圧成形により一体化した積層板は、上記の銅層の微細で複雑な表面性状により、樹脂絶縁層への投錨効果が大きくなる。 The laminated board in which the copper layer having the above-described surface property is integrated by heating and pressing while the roughened surface is brought into contact with the resin insulating layer is formed by the fine and complicated surface property of the copper layer. Throwing effect on the insulating layer is increased.
上記本発明に係る方法において、黒化還元処理後に、さらに加えてカップリング剤処理をしてもよい(請求項5)。この場合、銅層と樹脂絶縁層の一体化は、投錨効果による密着力だけでなく化学的な結合力も付加されたものとなる。 In the method according to the present invention, a coupling agent treatment may be further performed after the blackening reduction treatment (Claim 5). In this case, the integration of the copper layer and the resin insulating layer is not only an adhesion force due to the anchoring effect but also a chemical bonding force.
本発明に係る銅層の表面処理法(請求項1〜3)によれば、銅層に微細で複雑な凹凸を付与することができ、この銅層を樹脂絶縁層に加熱加圧成形により一体化した積層板(請求項6)やこれを加工した配線板(請求項7)においては、銅層の樹脂絶縁層への大きな投錨効果により、銅層と樹脂絶縁層の密着力を優れたものにすることができる。 According to the surface treatment method for a copper layer according to the present invention (Claims 1 to 3), the copper layer can be provided with fine and complicated irregularities, and the copper layer is integrated with the resin insulating layer by heat and pressure molding. In the laminated board (Claim 6) and the wiring board (Claim 7) processed from the same, the adhesion between the copper layer and the resin insulating layer is excellent due to the large anchoring effect of the copper layer on the resin insulating layer. Can be.
厚さ100μm以上の銅層は、電着による方法では製造が次第に難しくなり、圧延により製造することになる。この場合、銅層の表面は滑らかで凹凸がないので、請求項4に係る方法により表面処理をして積層板の製造に供すれば、銅層と樹脂絶縁層の高い密着力を確保するのに都合がよい。導電回路の厚い配線板の提供に寄与でき、大電流を流す自動車機器や大型機械用の配線板に適用して信頼性が高まる。導電回路が厚いため、放熱性も良好である。 A copper layer having a thickness of 100 μm or more becomes increasingly difficult to produce by the electrodeposition method, and is produced by rolling. In this case, since the surface of the copper layer is smooth and has no irregularities, a high adhesion between the copper layer and the resin insulating layer is ensured if the surface treatment is performed by the method according to claim 4 and the laminate is manufactured. Convenient to. This contributes to the provision of a wiring board having a thick conductive circuit, and the reliability is improved by applying it to a wiring board for automobile equipment and large machines through which a large current flows. Since the conductive circuit is thick, heat dissipation is good.
請求項5係る方法により処理した銅層を用いれば、銅層と樹脂絶縁層の一体化は、投錨効果による密着だけでなく化学的な結合力も付加されて行なわれる。その結果、積層板や配線板は、加熱処理後においても銅層と樹脂絶縁層の密着力を低下させない特性(以下、「耐熱性」という)も向上させることができる。 If the copper layer processed by the method according to claim 5 is used, the integration of the copper layer and the resin insulating layer is performed by adding not only adhesion due to anchoring effect but also chemical bonding force. As a result, the laminated board and the wiring board can also improve the characteristic (hereinafter referred to as “heat resistance”) that does not reduce the adhesion between the copper layer and the resin insulating layer even after the heat treatment.
銅層として圧延銅箔を使用する場合について、発明の実施の形態を説明する。圧延銅箔は、通常、厚み100μm以上のものである。 An embodiment of the invention will be described for the case of using a rolled copper foil as the copper layer. The rolled copper foil usually has a thickness of 100 μm or more.
まず、圧延銅箔へのエッチング型化学粗化処理は、硫酸−過酸化水素系の化学粗化液や有機酸系の化学粗化液を用いて実施することができる。この粗化処理は、谷から山までの高さが5μmを越える凹凸を含み生成するように実施する。この場合、粗化処理によって除去される銅箔の量(以下、「粗化量」という)は、銅箔の厚み換算で4μm以上の厚みに相当する量に設定する。 First, the etching-type chemical roughening treatment for the rolled copper foil can be performed using a sulfuric acid-hydrogen peroxide-based chemical roughening solution or an organic acid-based chemical roughening solution. This roughening process is performed so as to include the irregularities having a height from the valley to the mountain exceeding 5 μm. In this case, the amount of copper foil removed by the roughening treatment (hereinafter referred to as “roughening amount”) is set to an amount corresponding to a thickness of 4 μm or more in terms of the thickness of the copper foil.
上記5μmを越える凹凸を含むことは、銅箔と樹脂絶縁層の十分な密着力を得るために必用である。密着力をさらに大きくするためには、好ましくは8μmを越える凹凸、さらに好ましくは12μmを越える凹凸を含むようにエッチング型化学粗化処理を実施する。この場合、粗化量は、銅箔の厚み換算で、それぞれ、8μm以上、20μm以上に設定する。 The inclusion of irregularities exceeding 5 μm is necessary for obtaining sufficient adhesion between the copper foil and the resin insulating layer. In order to further increase the adhesion, the etching type chemical roughening treatment is performed so as to include irregularities exceeding 8 μm, more preferably irregularities exceeding 12 μm. In this case, the roughening amount is set to 8 μm or more and 20 μm or more, respectively, in terms of the thickness of the copper foil.
その後、上記の粗化処理面に黒化還元処理を行ない、粗化処理の凹凸の表面にさらに小さいサブミクロンオーダの凹凸を形成する。これにより、微細で複雑な凹凸の表面性状を呈することになる。前記黒化処理には、亜塩素酸ナトリウム水溶液を主成分とする粗化液を用いることができ、この処理により、銅箔表面に微細な針状の酸化第一銅又は酸化第二銅を生成させる。これに続く還元処理には、有機系と無機系の還元剤をいずれも用いることができ、この処理により、前記酸化第一銅又は酸化第二銅を銅に還元する。これら黒化処理と還元処理は、多層プリント配線板の製造工程において一般的に用いられている処理を適用することができる。 Thereafter, the roughening treatment surface is subjected to blackening reduction treatment to form smaller sub-micron irregularities on the roughening surface of the roughening treatment. As a result, the surface properties of fine and complicated irregularities are exhibited. For the blackening treatment, a roughening solution mainly composed of an aqueous sodium chlorite solution can be used, and this treatment produces fine acicular cuprous oxide or cupric oxide on the copper foil surface. Let In the subsequent reduction treatment, both organic and inorganic reducing agents can be used. By this treatment, the cuprous oxide or cupric oxide is reduced to copper. For the blackening treatment and the reduction treatment, treatments generally used in the manufacturing process of the multilayer printed wiring board can be applied.
上記の黒化還元処理の後に、好ましくは、カップリング剤処理を行なう。カップリング剤は、シラン系カップリング剤やチタネート系カップリング剤である。 After the above blackening reduction treatment, a coupling agent treatment is preferably performed. The coupling agent is a silane coupling agent or a titanate coupling agent.
上記の処理を行なった圧延銅箔の粗化処理面を樹脂絶縁層に当接して加熱加圧成形により一体化し、積層板とする。樹脂絶縁層は、シート状の繊維基材(無機又は有機繊維の織布や不織布)にエポキシ樹脂等の熱硬化性樹脂を含浸し半硬化状態としたプリプレグやシート状の繊維基材を含まない樹脂絶縁層(BTレジン等)である。前記プリプレグは、加熱加圧成形により樹脂が硬化して樹脂絶縁層となる。前記樹脂絶縁層には、金属酸化物又は水酸化物、無機セラミックス、その他の充填材を配合することができる。このような充填材を配合した場合にも、銅層と樹脂絶縁層の良好な密着性を確保することができる。 The roughened surface of the rolled copper foil subjected to the above treatment is brought into contact with the resin insulating layer and integrated by heating and pressing to obtain a laminated plate. The resin insulation layer does not include a prepreg or a sheet-like fiber base material that is semi-cured by impregnating a sheet-like fiber base material (a woven or non-woven fabric of inorganic or organic fibers) with a thermosetting resin such as an epoxy resin. It is a resin insulating layer (BT resin or the like). In the prepreg, the resin is cured by heating and pressing to form a resin insulating layer. A metal oxide or hydroxide, inorganic ceramics, and other fillers can be blended in the resin insulating layer. Even when such a filler is blended, good adhesion between the copper layer and the resin insulating layer can be secured.
上記積層板は、樹脂絶縁層を介してセラミック基板と一体になった構成でもよい。上記積層板は、銅層を導体回路に加工することにより配線板となるが、その導体回路の表面に本発明に係る処理法を適用し、その上に樹脂絶縁層を介して銅層を一体化し、多層の配線板構成とすることができる。 The laminated plate may be integrated with the ceramic substrate via a resin insulating layer. The laminated board becomes a wiring board by processing the copper layer into a conductor circuit, and the treatment method according to the present invention is applied to the surface of the conductor circuit, and the copper layer is integrated on the resin insulating layer thereon. And a multilayer wiring board configuration can be obtained.
以下、本発明に係る実施例を、比較例とともに詳細に説明する。尚、本発明は、その要旨を逸脱しない限り、本実施例に限定されるものではない。 Hereinafter, examples according to the present invention will be described in detail together with comparative examples. In addition, this invention is not limited to a present Example, unless it deviates from the summary.
実施例1
厚み100μmの圧延銅箔(JIS C1201P)を脱脂処理してから、硫酸−過酸化水素系エッチング型化学粗化処理液に浸漬して、120秒間の粗化処理を行ない、谷から山までの高さが2〜8μmの間にある凹凸を付与した。このときの銅箔の粗化量は、銅箔の厚み換算で、4μmに調整した。
その後、脱脂処理、酸処理、酸化処理、還元処理の順で黒化還元処理を実施した。この際、酸処理には硫酸を、酸化処理には亜塩素酸ナトリウムとリン酸ナトリウムと水酸化ナトリウムの混合水溶液を、還元処理にはジメチルアミノボランと水酸化ナトリウムの混合水溶液を、それぞれ用いた。
以上の粗化処理を実施した圧延銅箔の粗化処理面に、高耐熱FR−4グレードのプリプレグ5枚からなる層を重ね、温度175℃、圧力4MPaの条件で90分間加熱加圧形成して一体化し、厚さ1.2mmの積層板を得た。
Example 1
After degreasing a rolled copper foil (JIS C1201P) having a thickness of 100 μm, it is immersed in a sulfuric acid-hydrogen peroxide-based etching type chemical roughening treatment solution and subjected to a roughening treatment for 120 seconds. Concavities and convexities with a thickness of 2 to 8 μm were applied. The roughening amount of the copper foil at this time was adjusted to 4 μm in terms of the thickness of the copper foil.
Then, the blackening reduction process was implemented in order of the degreasing process, the acid process, the oxidation process, and the reduction process. At this time, sulfuric acid was used for the acid treatment, a mixed aqueous solution of sodium chlorite, sodium phosphate and sodium hydroxide was used for the oxidation treatment, and a mixed aqueous solution of dimethylaminoborane and sodium hydroxide was used for the reduction treatment. .
On the roughened surface of the rolled copper foil subjected to the above roughening treatment, a layer composed of five high heat resistant FR-4 grade prepregs was stacked, and heated and pressed for 90 minutes under the conditions of a temperature of 175 ° C. and a pressure of 4 MPa. To obtain a laminated plate having a thickness of 1.2 mm.
実施例2
実施例1において、黒化還元処理を経て乾燥後に、さらにシラン系カップリング剤の水溶液に浸漬する処理を行なった。以下、実施例1と同様に、厚さ1.2mmの積層板を得た。
Example 2
In Example 1, after the blackening reduction treatment and drying, a treatment of immersing in an aqueous solution of a silane coupling agent was performed. Thereafter, a laminate having a thickness of 1.2 mm was obtained in the same manner as in Example 1.
実施例3
実施例2において、硫酸−過酸化水素系エッチング型化学粗化処理液による粗化処理時間を180秒とし、谷から山までの高さが5〜12μmの間にある凹凸を付与した。このときの銅箔の粗化量は、銅箔の厚み換算で、8μmに調整した。以下、実施例2と同様に、厚さ1.2mmの積層板を得た。
Example 3
In Example 2, the roughening time by the sulfuric acid-hydrogen peroxide etching chemical roughening treatment liquid was 180 seconds, and unevenness having a height from the valley to the mountain of 5 to 12 μm was imparted. The roughening amount of the copper foil at this time was adjusted to 8 μm in terms of the thickness of the copper foil. Thereafter, a laminated plate having a thickness of 1.2 mm was obtained in the same manner as in Example 2.
実施例4
実施例2において、硫酸−過酸化水素系エッチング型化学粗化処理液による粗化処理時間を600秒とし、谷から山までの高さが10〜25μmの間にある凹凸を付与した。このときの銅箔の粗化量は、銅箔の厚み換算で、20μmに調整した。以下、実施例2と同様に、厚さ1.2mmの積層板を得た。
Example 4
In Example 2, the roughening time by the sulfuric acid-hydrogen peroxide etching chemical roughening treatment solution was 600 seconds, and unevenness having a height from the valley to the mountain of 10 to 25 μm was imparted. The roughening amount of the copper foil at this time was adjusted to 20 μm in terms of the thickness of the copper foil. Thereafter, a laminated plate having a thickness of 1.2 mm was obtained in the same manner as in Example 2.
比較例1
実施例1において、硫酸−過酸化水素系エッチング型化学粗化処理を行なわずに、黒化還元処理を行ない、以下、実施例1と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 1
In Example 1, the blackening reduction treatment was performed without performing the sulfuric acid-hydrogen peroxide-based etching type chemical roughening treatment, and a 1.2 mm thick laminate was obtained in the same manner as in Example 1.
比較例2
実施例2において、黒化還元処理を行なわずに、そのほかは実施例2と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 2
In Example 2, a blackboard reduction treatment was not performed, and a laminate having a thickness of 1.2 mm was obtained in the same manner as in Example 2 except for that.
比較例3
実施例1で使用した圧延銅箔の表面に、空気圧を利用した吸引式エアブラスト装置を用いブラスト処理を行なった。これは、平均粒子径70μmのアルミナを主成分とする粒子を、吐出圧力0.4MPaで銅箔表面に40秒間吹き付ける処理である。
上記の粗化処理を実施した圧延銅箔の粗化処理面に、実施例1と同様にプリプレグ5枚からなる層を重ね、加熱加圧形成により一体化して厚さ1.2mmの積層板を得た。
Comparative Example 3
The surface of the rolled copper foil used in Example 1 was blasted using a suction type air blasting device using air pressure. This is a process of spraying particles mainly composed of alumina having an average particle diameter of 70 μm on the surface of the copper foil at a discharge pressure of 0.4 MPa for 40 seconds.
On the roughened surface of the rolled copper foil subjected to the above roughening treatment, a layer consisting of five prepregs was stacked in the same manner as in Example 1, and a laminated plate having a thickness of 1.2 mm was integrated by heating and pressing. Obtained.
比較例4
実施例2において、硫酸−過酸化水素系エッチング型化学粗化処理液による粗化処理時間を60秒とし、谷から山までの高さが1〜3μmの間にある凹凸を付与した。このときの銅箔の粗化量は、銅箔の厚み換算で、2μmに調整した。以下、実施例2と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 4
In Example 2, the roughening treatment time with the sulfuric acid-hydrogen peroxide etching chemical roughening treatment liquid was set to 60 seconds, and irregularities with a height from the valley to the mountain of 1 to 3 μm were imparted. The roughening amount of the copper foil at this time was adjusted to 2 μm in terms of the thickness of the copper foil. Thereafter, a laminated plate having a thickness of 1.2 mm was obtained in the same manner as in Example 2.
比較例5
実施例2において、硫酸−過酸化水素系エッチング型化学粗化処理液による粗化処理時間を90秒とし、谷から山までの高さが2〜5μmの間にある凹凸を付与した。このときの銅箔の粗化量は、銅箔の厚み換算で、3μmに調整した。以下、実施例2と同様に、厚さ1.2mmの積層板を得た。
Comparative Example 5
In Example 2, the roughening time with the sulfuric acid-hydrogen peroxide based etching type chemical roughening treatment liquid was 90 seconds, and unevenness with a height from the valley to the mountain of 2 to 5 μm was imparted. The roughening amount of the copper foil at this time was adjusted to 3 μm in terms of the thickness of the copper foil. Thereafter, a laminated plate having a thickness of 1.2 mm was obtained in the same manner as in Example 2.
上記各例の積層板から、25mm×100mmの試験片を切り出し、常態および177℃で240時間エージング後の銅箔引き剥がし強度を測定(ショッパーを用い室温で測定)し、その結果を表1に示した。
常態における銅箔引き剥がし強度は、実施例1を基準として、相対的な指標で示した。また、エージング後の引き剥がし強度は、常態における引き剥がし強度に対する保持率が、50%以上:◎、20%〜50%未満:○、20%未満:×として表示した。
A test piece of 25 mm × 100 mm was cut out from the laminate of each of the above examples, and the copper foil peeling strength after aging at 177 ° C. for 240 hours was measured (measured at room temperature using a shopper). The results are shown in Table 1. Indicated.
The copper foil peel strength in the normal state is shown as a relative index with reference to Example 1. Moreover, the peeling strength after aging was expressed as 50% or more: 、, 20% to less than 50%: ◯, less than 20%: x with respect to the peeling strength in a normal state.
上記表から明らかなように、本発明に係る方法により処理した銅層を樹脂絶縁層に加熱加圧成形により一体化した積層板は、常態における引き剥がし強度が良好で、耐熱性もよいことが理解できる(実施例と比較例の対比)。エッチング型化学粗化処理により付与する凹凸の谷から山までの高さが5μmを越えるものを含むように処理することが必要であることは、実施例2と比較例4、5の対比から理解できる。 As is clear from the above table, the laminated board in which the copper layer treated by the method according to the present invention is integrated with the resin insulating layer by heat and pressure molding has good peel strength in a normal state and good heat resistance. Can be understood (contrast of Example and Comparative Example). It is understood from the comparison between Example 2 and Comparative Examples 4 and 5 that it is necessary to perform treatment so that the height from the uneven valleys to the peaks provided by the etching type chemical roughening treatment exceeds 5 μm. it can.
上記凹凸の谷から山までの高さが8μmを越えるものを含むように、さらには、12μmを越えるものを含むようにすれば、引き剥がし強度は一層大きくなる(実施例2と実施例3、4の対比)。 If the height from the valleys to the peaks of the unevenness includes more than 8 μm, and further includes more than 12 μm, the peel strength is further increased (Examples 2 and 3, 4 contrast).
カップリング剤による処理を付加することにより、耐熱性を向上できることも理解できる(実施例1と実施例2の対比)。 It can also be understood that heat resistance can be improved by adding a treatment with a coupling agent (contrast of Example 1 and Example 2).
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| WO2014126193A1 (en) * | 2013-02-14 | 2014-08-21 | 三井金属鉱業株式会社 | Surface-treated copper foil, and copper-clad laminate obtained using surface-treated copper foil |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR101216864B1 (en) | 2010-12-29 | 2012-12-28 | 한국이엔에쓰 주식회사 | Printed circuit board and manufacturing method of the same |
| WO2014126193A1 (en) * | 2013-02-14 | 2014-08-21 | 三井金属鉱業株式会社 | Surface-treated copper foil, and copper-clad laminate obtained using surface-treated copper foil |
| CN108728841A (en) * | 2018-05-04 | 2018-11-02 | 瑞声科技(新加坡)有限公司 | Roll copper darkening ring piece preparation method and calendering copper darkening ring piece |
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| CN113747683A (en) * | 2020-05-29 | 2021-12-03 | 深南电路股份有限公司 | Printed circuit board and manufacturing method thereof |
| CN113747683B (en) * | 2020-05-29 | 2023-07-07 | 深南电路股份有限公司 | Printed circuit board and manufacturing method thereof |
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