JP2006150329A - Ultrasonic vibration table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining table fixedly holding a work to a machining apparatus with enhanced machining speed and machining accuracy by applying substantially uniform ultrasonic vibration to the whole machining table. <P>SOLUTION: One bolting Langevin ultrasonic vibrator 1 is composed by integrally fastening four sets of support tables 7, piezo-electric ceramics 4, and rear masses 3 on an ultrasonic emitting face and the opposite face with bolts 6. Four support tables 7 supporting nods of vibration of the vibrator 1 are attached to a base table 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention is an ultrasonic wave used for cutting, grinding and polishing of difficult-to-cut materials such as glass, ceramic, silicone, titanium, and hard metal, and general metal materials, organic materials, inorganic materials and composite materials thereof. The present invention relates to a vibration table.

  In general, it is very difficult to cut and grind brittle materials with high hardness such as glass, ceramic, silicone, titanium, and super hard metal. Has been done. In such ultrasonic cutting, since cutting resistance is reduced, the frictional heat of the cutting tool is reduced, the thermal distortion of the processed surface is reduced, the life of the cutting tool is extended, and the machining accuracy is improved. Ultrasonic cutting is described in detail in “Ultrasonic Handbook” (Maruzen Co., Ltd., published in 1999), pages 679-684.

Further, it is well known in the art that vibration is applied to a table for fixing a workpiece, and this is propagated to the workpiece to perform vibration cutting. For example, the ultrasonic vibration table disclosed in Japanese Patent Laid-Open No. 2002-355726 shown in FIG. 17 is a table device that can fix a workpiece to be processed by being attached to a bed of a machine tool. is there.
First, there is an ultrasonic vibrator that generates vibration. There is an aluminum transmission horn for amplifying the ultrasonic vibration and transmitting it to the vibration table. The surface of the transmission horn in contact with the ultrasonic transducer has the same diameter as that of the ultrasonic transducer, but the diameter is smaller at the upper part than the outer flange. Then, the outer flange is fastened and fixed to the inner flange of the casing by a bolt member with a rubber plate interposed therebetween.
In addition, a guide member that protrudes downward from the lower portion of the vibration table and is inserted into a guide recess formed on the outside of the casing and guides in the vertical direction while restricting the lateral movement of the vibration table is provided.

  As another method, Japanese Patent Laid-Open No. 2003-220530 shown in the plan view of FIG. 18 and the side view of FIG. 19 discloses three bolted Langevin types on the lower surface of the table 9 that holds and holds the workpiece (workpiece). An ultrasonic vibration table having a configuration in which the ultrasonic vibrator 1 is fixed and the lower surface of the table 9 is connected to a main body case 16 is disclosed. Then, by applying ultrasonic vibration to the workpiece temporarily fixed on the upper surface of the disk-shaped table 9 by these bolted Langevin type ultrasonic vibrators 1, the workpiece formed from a hard and brittle material It is said that ultra-small diameter drilling and grooving are easy.

However, in ultrasonic cutting, when the tool becomes large, it is very difficult to give uniform ultrasonic vibration to the processed portion of the tool that comes into contact with the workpiece.
In addition, when the tool is downsized, the device for applying ultrasonic vibration must be downsized. The smaller the ultrasonic vibration device is, the smaller the vibration energy given to the tool. For this reason, when a tool is small, there exists a fault that an ultrasonic cutting capability will become small.

On the other hand, the ultrasonic vibration table can be vibrated regardless of the shape of the tool. However, the ultrasonic vibration table disclosed in Japanese Patent Application Laid-Open No. 2002-355726 shown in FIG. 17 has a smaller ultrasonic radiation surface area than one table as shown in FIG. The entire table 9 has a drawback that uniform vibration displacement cannot be obtained. The one-dot chain line in FIG. 20 indicates the center line of the table 9 when not vibrating. The two-dot chain line indicates the amplitude width when the table 9 is vibrating. Table 9 shows how undesirable bending vibrations are excited.
Further, since the vibrating table 9 and the casing that should not vibrate are connected through the guide member, the vibration of the table 9 is suppressed and the vibration leaks to the casing or the base. For this reason, since the table has the same vibration displacement, more power must be input, which causes a problem of heat generation. Further, there is a problem that unnecessary vibration is transmitted to the processing apparatus to which the ultrasonic vibration table is attached, and the performance of the processing apparatus is deteriorated.

The ultrasonic vibration table of Japanese Patent Application Laid-Open No. 2003-220530 shown in FIGS. 18 and 19 has an ultrasonic vibration of Japanese Patent Application Laid-Open No. 2002-355726 because the outer peripheral portion of the lower surface of the table 9 is connected to the main body case 16. Since the table 9 that vibrates similarly to the table and the main body case 16 that should not vibrate are fixed, vibration of the table 9 is suppressed, and vibration leaks to the main body case 16 or the base. For this reason, since the table has the same vibration displacement, more power must be input, which causes a problem of heat generation. Further, there is a problem that unnecessary vibration is transmitted to the processing apparatus to which the ultrasonic vibration table is attached, and the performance of the processing apparatus is deteriorated.
Further, only three bolted Langevin type ultrasonic transducers are fixed to the table 9. For this reason, as shown in FIG. 21, the portion fixed to the main body case 16 becomes a node, and the central portion of the table 9 becomes an antinode of vibration. In addition, a dashed-dotted line shows the centerline of the table 9 when not vibrating. The two-dot chain line indicates the amplitude width when the table is vibrating.
Therefore, since a large difference in vibration displacement appears in the table, there is a problem that the ultrasonic processing effect cannot be exhibited depending on the location.
Furthermore, when the weight of the table or the work that is a mechanical load increases in this configuration, the table or the work is close to the vibration node, and the surface of the bolted Langevin type ultrasonic transducer opposite to the table side is close to the vibration antinode. It becomes a state. That is, there is a problem that the amplitude amount of the table varies greatly depending on the weight of the table or the workpiece.
An object of the present invention is to provide an ultrasonic vibration table that solves the above-mentioned problems.

The present invention relates to an ultrasonic vibration table apparatus that fixes and holds a workpiece to be processed by being attached to a machine tool, and is bolted with two or more piezoelectric ceramics on a surface parallel to the bottom surface of the front mass with respect to one front mass. The ultrasonic vibration table device uses a Langevin type ultrasonic transducer.

An ultrasonic vibration table device is provided in which a support base is provided at a vibration node of the bolted Langevin type ultrasonic vibrator, and the support base is connected to a base base.

  Since the ultrasonic vibration table of the present invention can excite substantially uniform ultrasonic vibration on the table surface, the ultrasonic vibration of almost uniform magnitude can be obtained regardless of the location of the work held and fixed on this surface. Is propagated. As a result, it is possible to improve the processing speed of the work that is held and fixed, the processing of difficult-to-process materials, and the processing accuracy without being substantially affected by the position and size of the work that is held and fixed on the table. Become.

  The present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of a bolted Langevin type ultrasonic transducer used in the ultrasonic vibration table of the present invention fixed to a base table, and FIG. 2 is a side view thereof.

The bolted Langevin type ultrasonic transducer is described in detail in “Ultrasonic Engineering” (Corona Co., Ltd., published by Maruzen Co., Ltd., 1993), pages 12-22.
FIG. 23 shows a plan view of FIG. 22 and a side cross-sectional view of a general bolted Langevin type ultrasonic transducer 1 taken along line AA of FIG. A piezoelectric ceramic 4 is arranged on both sides of the electrode plate 5, a front mass 2 and a rear mass 3 are arranged on the outside thereof, and a vibrator obtained by fastening these with bolts 6 and nuts 17 is bolted Langevin type ultrasonic vibrator Called 1 The output-side front mass 2 is provided with a connecting screw. In this bolted Langevin type ultrasonic vibrator, a vibration generated by applying an alternating electric field of a certain frequency to the piezoelectric ceramic generated a standing wave in a range including the metal block (front mass and rear mass) through the mechanical joint surface. When mechanical resonance occurs.

The bolted Langevin type ultrasonic transducer 1 attached to the base 10 shown in FIGS. 1 and 2 is designed and manufactured for an ultrasonic vibration table, and the material of the front mass 2 is titanium. The shape of the ultrasonic radiation surface of the front mass 2 is a square having a side of 90 mm, and its thickness is 40 mm. A female screw for joining the table is provided on the ultrasonic radiation surface of the front mass 2. Four female screws are also provided on the surface of the front mass 2 opposite to the ultrasonic radiation surface. However, the female thread portion has been omitted in order to simplify the drawing.
There are also four support bases 7 for supporting the vibration nodes and for attaching to the base base 10. The support base 7 is manufactured by joining an annular support plate 12 and a cylindrical carbon fiber reinforced plastic support rod 13 with screws or the like. A thin rubber plate may be inserted between the support plate 12 and the support rod 13 in order to further insulate transmission of vibration. The thickness of the support plate 12 is 3 mm. The piezoelectric elements are PZT piezoelectric ceramics 4a and 4b, and the shape is an outer diameter of 36 mmφ, an inner diameter of 16 mmφ, and a thickness of 5 mm. The mechanical quality factor Q is a highQ material exceeding 1000. The rear mass 3 is also made of titanium. There is also a phosphor bronze electrode plate between the two piezoelectric ceramics 4a, 4b. The shape is an outer diameter of 36 mmφ, an inner diameter of 14.5 mmφ, and a thickness of 0.25 mm. Furthermore, the bolt 6 for fastening and integrating them is made of titanium. The distance from the lower surface of the support base to the top surface of the bolt is about 40 mm.
The bolt-clamped Langevin type ultrasonic vibrator 1 is manufactured by passing bolts through a front mass, a support base, a piezoelectric ceramic and a rear mass, and fastening and integrating them with female screws and bolts provided on the front mass.

The above configuration has four piezoelectric ceramics 4a, 4c, 4e, and 4g in a plane parallel to the bottom surface of the front mass 2 with respect to one front mass 2, so that it has a single piezoelectric ceramic. This is suitable for uniformly vibrating the front mass 2 longitudinally.
In other words, by using a bolt-clamped Langevin type ultrasonic transducer with two or more piezoelectric ceramics in a plane parallel to the bottom of the front mass for one front mass, uniform vibration is excited by the radiation surface of the front mass. Can be made.
In addition, in the conventional bolted Langevin type ultrasonic transducer 1, the total length of the maximum diameter of the front mass is required to be about twice or more to efficiently excite longitudinal vibration. Can be made twice or less, so that the total length can be reduced.
Further, when the area of the ultrasonic radiation surface of the front mass 1 is 3 times or less, preferably 2.5 times or less, the area formed by the outer periphery of the piezoelectric ceramic, more uniform longitudinal vibration can be excited on the front surface of the front mass. . When the area of the ultrasonic radiation surface of the front mass is larger than three times the area formed by the outer periphery of the piezoelectric ceramic, there is a high possibility that bending vibration is excited in the front mass.

  Since the support base 7 is provided at the vibration node of the bolted Langevin type ultrasonic vibrator 1 and the support base 7 is connected to the base base 10, the vibration of the Langevin type ultrasonic vibrator 1 is the other vibration. Since it does not propagate to the part, it can be vibrated with high efficiency.

  Further, the vibration of the bolted Langevin type ultrasonic transducer is not propagated to other devices, and the device is not damaged.

Furthermore, since the four support bases 7a, 7b, 7c and 7d are provided for one front mass 2 of the bolted Langevin type ultrasonic transducer 1, the positions of the vibration nodes are made to have an ideal distribution. be able to.
That is, it is possible to obtain a vibration node close to ideal by having a plurality of support bases.

FIG. 3 is a plan view showing an example of the ultrasonic vibration table 8 of the present invention using the bolted Langevin type ultrasonic transducers 1a, 1b, 1c, and 1d described above, and FIG. It is the side view which notched the part. The aluminum table 9 has a square plate shape with a side of about 220 mm and a plate thickness of 10 mm. The table 9 is provided with holes for joining the bolted Langevin type ultrasonic transducers 1a, 1b, 1c, and 1d, and female screws for attaching a work or a fixture for fixing the work fixing plate to the table. . The four bolt-clamped Langevin type ultrasonic transducers 1a, 1b, 1c and 1d attached to the base table 10 are those shown in FIGS. The general shape of the base 10 is a square plate, and one side of the square is about 240 mm and the thickness is 15 mm. The material of the base 10 is SUS303. The base table 10 is provided with a female screw to be joined to the support table 7 of the bolt-clamped Langevin type ultrasonic transducer 1 and holes for attaching to the processing apparatus in the vicinity of the four corners.
The assembly of the ultrasonic vibration table 8 is performed as follows. First, the support base 7 and the base base 10 of the four bolt-clamped Langevin type ultrasonic transducers 1a, 1b, 1c and 1d are joined with screws. Next, the aluminum table 9 and the front bolts 2 of the four bolted Langevin type ultrasonic transducers 1a, 1b, 1c, 1d are joined with screws. At this time, they may be joined together with an epoxy resin.

Next, an operation example of the ultrasonic vibration table 8 will be described. FIG. 5 is a plan view showing only the table, fixture, fixing plate and workpiece of the ultrasonic vibration table 8 shown in FIGS. 3 and 4, and FIG. 6 is a side view thereof. Except for this, illustration is omitted for the convenience of the drawings.
The ultrasonic vibration table 8 is attached to the dicer. Then, it is temporarily joined with a wax to a carbon fixing plate 14 for fixing the ceramic workpiece 11 to be cut. The carbon plate is cut together with the workpiece, but is used so as not to damage the member located below it. Further, the carbon fixing plate 14 to which the workpiece 11 is attached is temporarily joined to the fixing tool 15 using wax. The fixture 15 is fixed to the table 9 with bolts 6. In order to hold and fix the fixing plate 14 including the work 11 on the table 9, bonding with wax, fixing to the table with screws or the like, fixing with a vacuum device, magnetic fixing, electrostatic fixing, There are methods such as freezing and fixing.

  Next, an alternating voltage of about 20 Khz from the ultrasonic oscillator is applied to the four bolted Langevin type ultrasonic transducers 1a, 1b, 1c, 1d. As a result, the four bolted Langevin type ultrasonic transducers 1a, 1b, 1c, and 1d vibrate ultrasonically.

The table of this ultrasonic vibration table 8 vibrates substantially uniformly. This is because the area of the vibration radiating surface of the front mass of the bolted Langevin type ultrasonic transducer 1 is large and causes uniform longitudinal vibration, so that the table 9 mounted thereon vibrates substantially uniformly.
When the area of the front mass of the bolted Langevin type ultrasonic transducer 1 is 40% or more, preferably 50% or more with respect to the area of the table 9, the table vibrates substantially uniformly.

  If the area of the front mass of the bolted Langevin type ultrasonic transducer in contact with the table is less than 40% of the table area, bending vibration is likely to be excited in the table, and uniform longitudinal vibration cannot be excited in the table. There is a fear.

  When the ultrasonic vibration table is operated, the vibration of the bolted Langevin type ultrasonic transducer propagates to the workpiece through the aluminum table. When ultrasonic vibration is excited on the workpiece, the cutting ability of the dicer is greatly improved due to the effect of ultrasonic processing.

  Specific figures for the cutting effect resulted in about 20 percent lower dicer spindle current and about 40 percent lower blade wear.

  This is an effect described in detail on pages 679 to 684 of “Ultrasonic Handbook” (Maruzen Co., Ltd., issued in 1999). In other words, ultrasonic cutting has proved that the cutting force is reduced, so that the frictional heat of the cutting tool is small, the thermal distortion of the processed surface is small, and the life of the cutting tool is extended.

  Moreover, the same effect was confirmed even if the processing conditions of the dicer were changed. In addition, chipping of cut ceramic ceramic workpieces has been greatly reduced. In this way, machining accuracy was improved. The effect of the content described in detail on pages 679-684 of “Ultrasonic Handbook” (Maruzen Co., Ltd., published in 1999) was also confirmed.

  In order to configure an optimum ultrasonic vibration table, the method for supporting the bolted Langevin type ultrasonic transducer 1 is important in the same manner as the shape of the bolted Langevin type ultrasonic transducer described above.

  In order for the ultrasonic vibration table to operate stably, it is desirable that the table vibrates in a vertical plane even when a mechanical load is applied, and that the position of the vibration node does not change. In order to realize this, as shown in FIGS. 3 and 4, it is necessary to fix the vibration node of the bolted Langevin type ultrasonic vibrator to the base table by the support table.

It is also desirable to have a piezoelectric ceramic near the position of the vibration node. This is because a piezoelectric ceramic is weaker than a metal material with respect to tensile stress. Therefore, it is necessary to keep the piezoelectric ceramic in the vicinity of the vibration node and to which a compressive stress is always applied.
For this purpose, as shown in FIGS. 3 and 4, it is necessary to fix the vicinity of the vibration node of the bolted Langevin type ultrasonic transducer to the base table by the support table.

Furthermore, it is desirable that the vibration node position of the ultrasonic vibration table is only the node position of the bolted Langevin type ultrasonic transducer. This is because if there are nodes at other positions, a tensile stress acts on the piezoelectric ceramic and the piezoelectric ceramic may be damaged.
As a configuration for that purpose, as shown in FIGS. 3 and 4, it is necessary to fix the node portion of the bolted Langevin type ultrasonic transducer to the base.

The configuration in which the table is connected to the base table as in JP-A-2002-355726 and JP-A-2003-220530 is not desirable because the table may become a node.
The necessary configuration is that the table is merely joined to the front mass of the bolted Langevin type ultrasonic transducer as shown in FIGS. 3 and 4 and is not connected to anything else.

  In addition, when the table area of the ultrasonic vibration table is 2.5 times or more compared to the area of the ultrasonic radiation surface of the front mass, the vibration distribution of the table becomes worse, so to improve this, It is desirable to arrange two or more bolted Langevin type ultrasonic transducers so that the table area is 2.5 times or less than the area of the ultrasonic radiation surface of the front mass.

  Furthermore, when the table area of the ultrasonic vibration table is 2.5 times or more than the ultrasonic radiation surface area of the front mass, there is a risk of bending due to the weight of the table and the weight of the workpiece, etc. There is also a problem that it becomes unsuitable as a table.

  In the configuration in which bolt-tightened Langevin type ultrasonic transducers are joined to the lower surface of the table as in Japanese Patent Application Laid-Open No. 2003-220530, the number of bolt-tightened Langevin type ultrasonic transducers is supported only by the end of the table. As the number increases, the central portion is bent. Such a configuration is not suitable as a high-precision table device.

  The structure required when the table area of the ultrasonic vibration table is large is preferably a structure in which the lower surface of the table is supported by a plurality of surfaces in order to increase the rigidity of the table. The optimum configuration for this is as shown in FIGS. 3 and 4, in which the front masses of two or more bolted Langevin type ultrasonic transducers are joined to the table, and further, the bases near the joints of the bolted Langevin type ultrasonic transducers are used as a base. It is connected and fixed to the base.

As another embodiment of the present invention, a bolted Langevin type ultrasonic transducer 1 attached to a base table 10 is shown in a plan view of FIG. 7 and a side view of FIG. A female screw is provided on the surface of the aluminum front mass 2. Since the workpiece and the fixing plate to which the workpiece is attached can be fixed directly to the front mass 2, the ultrasonic vibration table can be obtained as it is.
A front mass 2 and a titanium support plate 12, 16 piezoelectric ceramics 4 consisting of two piezoelectric ceramics, an electrode plate and an aluminum rear mass 3 are tightened with titanium bolts 6. It is assumed that the vibrator 1 is used. The bolted Langevin type ultrasonic transducer 1 is supported by being attached to a stainless steel base 10 by means of 25 high-density polyethylene support rods 13 attached to a support plate 12.
In this configuration, the front mass 2 and the support plate 12 can be integrated. That is, 25 support rods may be joined directly to the front mass 2.
With such a configuration, even an ultrasonic vibration table that requires a large area needs only to use one bolt-clamped Langevin type ultrasonic transducer 1, and therefore, assembly is simplified.

The bolted Langevin type ultrasonic transducer 1 attached to the base 10 is shown in the plan view of FIG. 9 and the side view of FIG. This is obtained by changing the positions of the piezoelectric ceramics 4 of the bolted Langevin type ultrasonic vibrator 1 attached to the base 10 shown in the plan view of FIG. 7 and the side view of FIG. 8 to both sides of the support plate 12. .
Since the piezoelectric ceramics 4a, 4b, 4c and 4d are arranged on both sides of the support plate 12, the displacement of the piezoelectric ceramic is the smallest when the bolt-clamped Langevin type ultrasonic vibrator 1 is vibrated. Is the smallest.

A bolted Langevin type ultrasonic transducer 1 attached to a base 10 is shown in a plan view of FIG. 11 and a side view of FIG. This is obtained by changing the positions of the piezoelectric ceramics 4a and 4b of the bolt-clamped Langevin type ultrasonic vibrator 1 attached to the base stand shown in the plan view of FIG. 7 and the side view of FIG. is there.
Since the piezoelectric ceramic is arranged on the upper side of the support plate 12, the displacement amount of the longitudinal vibration of the front mass can be increased, which is suitable when a large vibration displacement amount is required.

Another configuration of the front mass 2 of the bolted Langevin type ultrasonic transducer 1 shown in the plan view of FIG. 7 and the side view of FIG. 8 is shown in the plan view of FIG. 13 and the side view of FIG. The front mass 2 is provided with a slit 18 along the vibration propagation direction so that ultrasonic vibration propagates only in the vertical direction.
With this configuration, it is possible to provide an ultrasonic vibration table that excites more uniform longitudinal vibration.

As yet another embodiment of the present invention, a bolted Langevin type ultrasonic transducer 1 attached to a base 10 is shown in a plan view of FIG. 15 and a side view of FIG. A female screw is provided on the surface of the titanium front mass 2. Since the workpiece and the fixing plate to which the workpiece is attached can be fixed directly to the front mass 2, the ultrasonic vibration table can be obtained as it is.
A front mass 2 and four titanium support plates, four piezoelectric ceramics 4 consisting of two piezoelectric ceramics, an electrode plate, and a titanium rear mass 3 are tightened with titanium bolts 6 and tightened with bolts. The ultrasonic vibrator 1 is assumed. The bolted Langevin type ultrasonic transducer 1 is supported by being attached to a stainless steel base 10 by four high-density polyethylene cylindrical support rods 13 attached to a support plate 12.

  Since the front mass 2 has a quadrangular pyramid shape and the area of the ultrasonic radiation surface is smaller than the surface on the piezoelectric ceramic side, the vibration displacement is expanded on the front mass front end surface. Therefore, such a shape is an effective measure when the vibration displacement is insufficient.

  The ultrasonic vibration table is noisy when the vibration frequency is 15 KHz or less, and the vibration amplitude of the Langevin type ultrasonic transducer exceeding 100 KHz is small and is not suitable as a vibration source of the vibration table.

  Therefore, in the ultrasonic vibration table, it is desirable that the frequency of the AC voltage applied to the bolted Langevin type ultrasonic transducer is 15 Khz or more and 100 Khz or less.

  The ultrasonic vibration table of the present invention can be used as a processing table used in a machining facility or the like.

It is the top view which attached the bolting Langevin type ultrasonic vibrator used for the ultrasonic vibration table of the present invention to the base stand. It is a cross-sectional side view in the AA line of "FIG. 1". It is a top view which shows the structure of the ultrasonic vibration table of this invention. A part of “FIG. 3” is a side view including a cross section. It is the top view which attached the workpiece | work, the fixing board, and the fixing tool to the table. It is the side view which attached the workpiece | work, the fixing board, and the fixing tool to the table. It is the top view which attached the bolting Langevin type ultrasonic transducer used for the ultrasonic vibration table of another form of the present invention to the base stand. FIG. 8 is a side view of “FIG. 7”. FIG. 8 is a plan view in which the position of the piezoelectric ceramic is positioned on both sides of the support plate in the configuration of “FIG. 7”. FIG. 10 is a side view of “FIG. 9”. FIG. 8 is a plan view in which the position of the piezoelectric ceramic is positioned below the support plate in the configuration of FIG. 7. FIG. 12 is a side view of “FIG. 11”. It is a top view of the front mass which provided the slit. It is a side view of the front mass which provided the slit. It is the top view which attached the bolting Langevin type ultrasonic transducer used for the ultrasonic vibration table of another form of the present invention to the base stand. FIG. 16 is a side view of “FIG. 15”. It is a figure which shows the conventional ultrasonic vibration table. It is a top view which shows another conventional ultrasonic vibration table. It is a side view which shows another conventional ultrasonic vibration table. It is a figure which shows the vibration displacement of the table surface of the conventional ultrasonic vibration table. It is a figure which shows the vibration displacement of the table surface of another conventional ultrasonic vibration table. It is a top view of the conventional bolting Langevin type ultrasonic transducer. It is side surface sectional drawing of the conventional bolting Langevin type ultrasonic transducer | vibrator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Bolt tightening Langevin type ultrasonic transducer 2 Front mass 3 Rear mass 4 Piezoelectric ceramic 5 Electrode plate 6 Bolt 7 Support stand 8 Ultrasonic vibration table 9 Table 10 Base stand 11 Work 12 Support plate 13 Support rod 14 Fixing plate 15 Fixing tool 16 Body case 17 Nut 18 Slit

Claims (2)

In an ultrasonic vibration table device that fixes and holds a workpiece to be processed by being attached to a machine tool, a bolted Langevin type ultrasonic wave having two or more piezoelectric ceramics in a plane parallel to the bottom surface of the front mass with respect to one front mass. An ultrasonic vibration table device using a vibrator. An ultrasonic vibration table device comprising a support table at a vibration node of the bolted Langevin type ultrasonic transducer, and the support table connected to a base table.

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