JP2006145658A - Transparent film correcting apparatus and transparent film correcting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently correct a defective portion of a transparent film.
A transparent film at a defective portion of a transparent film formed on a substrate is removed, a predetermined three-dimensional shaped post-removal removal part is shaped (S101), and a surface shape of the post-shaping removal part is measured. (S102), the volume of the post-shaping removal part is calculated according to the surface shape (S103), and the coating amount of the transparent film equivalent material is calculated according to the volume of the post-shaping removal part (S104, 105). The transparent film equivalent material is applied to the removal portion after shaping (S106), and the surface shape of the cured transparent film equivalent material after curing is measured (S111, 121), and the volume of the transparent film equivalent material after curing is determined according to the surface shape. The volume of the unapplied removal portion excluding the coating is calculated (S112, 122), and the coating amount of the transparent film equivalent material is calculated according to the volume of the uncoated removal portion (S113-115, 123-125). Transparent film equivalent material not applied It is applied to the removal portion (S116, 126).
[Selection] Figure 3

Description

  The present invention relates to a transparent film correcting apparatus and a transparent film correcting method, and more particularly to a transparent film correcting apparatus and a transparent film correcting method for correcting defects in a transparent film such as a transparent conductive film or a transparent insulating film provided in a flat panel display.

  A flat panel display (hereinafter referred to as “FPD”) represented by a liquid crystal display (hereinafter referred to as “LCD”) and a plasma display panel (hereinafter referred to as “PDP”). In recent years, the number of pixels has increased as the resolution has increased. Therefore, the defect occurrence rate in the manufacturing process is high. Furthermore, the FPD unit price is increasing due to the increase in size. That is, the number of defective FPD products generated in the manufacturing process is increasing, and the unit price is also increasing. For these two reasons, it is desired to correct a defect generated in the FPD manufacturing process.

  As one of FPD manufacturing processes, there is a process of forming a transparent conductive film or a transparent insulating film. And the correction apparatus which corrects the defect of this transparent conductive film or transparent insulating film has already been proposed. Patent Document 1 discloses a display element correcting device that corrects a defect in which a part of a transparent film is missing. The correction device disclosed in Patent Document 1 supplies a conductive film forming gas to a defective portion of a transparent conductive film, and further irradiates an energy beam, thereby depositing the conductive film on the defective portion, thereby forming a transparent conductive film. The defect of the membrane is corrected. Similarly, in the case of a defect in the transparent insulating film, the insulating film forming gas is supplied to the defective part and further irradiated with an energy beam, thereby depositing the insulating film on the defective part and removing the defect in the transparent insulating film. It has been corrected. However, since the correction device disclosed in Patent Document 1 includes a vacuum furnace, an energy beam generator, a gas supply device, a gas disposal device, etc., expensive and large-scale equipment is required. Therefore, a film forming apparatus capable of forming a film at a low cost by an ink jet method has already been proposed.

  Patent Document 2 discloses a method for manufacturing a color filter for an LCD, and particularly proposes a method for preventing uneven coloring of ink. That is, in the color filter manufacturing method disclosed in Patent Document 2, the opening area of the partition wall layer that forms the colored portion is measured, and the ink amount per unit area of the colored portion set in advance and the measured value, The amount of ink applied to the opening is determined, and the discharge amount or discharge density of each nozzle in the coloring process is reset. Thereby, since the ink amount corresponds to the variation in the area of the opening, the film thickness of the colored portion becomes constant, and the occurrence of uneven coloring is prevented. In the color filter manufacturing method disclosed in Patent Document 2, the light transmittance per unit film thickness is measured, and the ink amount per unit area of the colored portion is set based on the measurement result. Thereby, uneven coloring due to uneven discharge within the inkjet is also prevented.

A method of correcting the discharge unevenness is proposed in addition to the method of measuring the absorbance per unit film thickness proposed in Patent Document 2. In the ink weight measurement method disclosed in Patent Literature 3, the weight of the amount of ink ejected from the ink jet is measured before or during the ejection of ink, and the ink ejected based on the measured ink weight The amount is adjusted. For example, an electronic balance may be provided for the weight measurement.
JP 2000-306906 A JP 2003-66220 A Japanese Patent Laid-Open No. 11-248927

  However, the correction device disclosed in Patent Document 1 requires large-scale equipment as described above. In addition, in the light transmittance measurement method disclosed in Patent Document 2, the ink must be a colored material. That is, it cannot be applied to a transparent material. In addition, in the ink weight measuring method of Patent Document 3, a weight measuring device for measuring the ink weight is separately required. Furthermore, a discharge process for measuring the weight and a process for removing and cleaning the ink discharged for the weight measurement are newly added, and the task time increases.

  The present invention has been made to solve the above-described problems, and one of the objects of the present invention is to provide a transparent film correcting apparatus and a transparent film correcting method capable of efficiently correcting a defective portion of the transparent film. It is to provide.

  In order to solve the above-described problems, according to one aspect of the present invention, a transparent film correcting device removes a transparent film in a defective portion of a transparent film formed on a substrate, thereby determining a predetermined three-dimensional object. After shaping the shape, the shaping part shaping the transparent film removing part, the surface shape measuring part measuring the surface shape of the shaped transparent film removing part shaped by the shaping part, and the surface shape measured by the surface shape measuring part Accordingly, the volume of the post-shaping transparent film removal unit is calculated, and the calculation unit that calculates the coating amount of the transparent film equivalent material according to the calculated volume of the transparent film removal unit after shaping, and the coating amount calculated by the calculation unit And a coating part for applying the transparent film equivalent material to the transparent film removing part after shaping, the surface shape measuring part measures the surface shape of the cured transparent film equivalent material applied and cured by the application part, and the computing part is The surface measured by the surface shape measurement unit Calculate the volume of the uncoated transparent film removal part excluding the volume of the transparent film equivalent material after curing according to the shape, and calculate the coating amount of the transparent film equivalent material according to the calculated volume of the uncoated transparent film removal part Then, the coating unit applies the transparent film equivalent material of the coating amount calculated by the calculation unit to the uncoated transparent film removing unit.

  According to the present invention, the transparent film correcting device removes the transparent film in the defective portion of the transparent film formed on the substrate, thereby shaping the predetermined three-dimensional shaped post-transparent transparent film removing unit. The surface shape of the shaped transparent film removal part after shaping is measured, the volume of the transparent film removal part after shaping is calculated according to the measured surface shape, and the volume of the transparent film removal part after shaping is calculated The coating amount of the transparent film equivalent material is calculated, the calculated coating amount of the transparent film equivalent material is applied to the transparent film removal portion after shaping, and the surface shape of the cured transparent film equivalent material after being applied and cured is measured, The volume of the uncoated transparent film removal part excluding the volume of the transparent film equivalent material after curing is calculated according to the measured surface shape, and the volume of the transparent film equivalent material is calculated according to the calculated volume of the uncoated transparent film removal part. The application amount is calculated and the calculated application amount Film equivalent material is applied to the uncoated transparent film removing unit.

  For this reason, a transparent film equivalent material with an application amount corresponding to the volume of the post-shaped transparent film removal part and the uncoated transparent film removal part calculated by measuring the surface shape is applied, so an appropriate amount of the transparent film equivalent By applying the material, the defective portion of the transparent film can be corrected. As a result, it is possible to provide a transparent film correcting device that can efficiently correct a defective portion of the transparent film.

  Preferably, the shaping unit removes the transparent film in the defective part by irradiating light to the defective part of the transparent film, and shapes the transparent film removing part.

  Preferably, the image forming apparatus further includes a volume storage unit that previously stores the volume of the transparent film removal unit after shaping, and the calculation unit applies the transparent film equivalent material according to the volume of the transparent film removal unit after shaping stored in the volume storage unit. Calculate the amount.

  According to this invention, the volume of the transparent film removal part after shaping is stored in advance, and the application amount of the transparent film equivalent material corresponding to the stored volume of the transparent film removal part after shaping is calculated. For this reason, it becomes unnecessary to measure the surface shape of the transparent film removal part after shaping and to calculate the volume of the transparent film removal part after shaping. As a result, the defective portion of the transparent film can be corrected more efficiently.

  Preferably, the shape of the transparent film removal portion after shaping is a columnar shape having a predetermined cross section, and the volume storage portion is a volume of the transparent film removal portion after shaping calculated from the film thickness of the transparent film and the area of the predetermined shape. Is stored in advance.

  Preferably, the surface shape measuring unit measures the surface shape of the post-shaping transparent film removal unit when measuring the surface shape of the transparent film equivalent material after curing after the transparent film equivalent material is applied by the application unit, The calculation unit calculates the volume of the transparent film equivalent material after curing according to the surface shape of the transparent film equivalent material after curing measured by the surface shape measurement unit and the surface shape of the transparent film removal unit after shaping. The volume of the uncoated transparent film removal part excluding the volume of the transparent film equivalent material after curing is calculated, and the coating amount of the transparent film equivalent material is calculated according to the calculated volume of the uncoated transparent film removal part.

  According to this invention, after the transparent film equivalent material is applied, when the surface shape of the transparent film equivalent material after curing is measured, the surface shape of the transparent film removal portion after shaping is measured, and after the measured curing The volume of the transparent film equivalent material after curing is calculated according to the surface shape of the transparent film equivalent material and the surface shape of the transparent film removal part after shaping, and the equivalent of the transparent film according to the calculated volume of the uncoated transparent film removal part The amount of material applied is calculated.

  For this reason, it is not necessary to measure the surface shape of the transparent film removal portion after shaping before the transparent film equivalent material is applied. As a result, the defective portion of the transparent film can be corrected more efficiently.

  Preferably, the surface shape measurement unit controls and measures the confocal microscope. For this reason, a minute surface shape can be measured more accurately.

  Preferably, the surface shape measurement unit controls and measures the white two-beam interference microscope. For this reason, a minute surface shape can be measured more accurately.

  Preferably, the application unit controls and applies an inkjet head having a nozzle that discharges the transparent film equivalent material. For this reason, a minute amount of a transparent film equivalent material can be applied.

  Preferably, the coating unit adjusts the coating amount by changing the number of droplets ejected by the nozzles of the inkjet head or the amount of droplets per droplet. For this reason, a minute amount can be adjusted appropriately.

  Preferably, the calculation unit calculates an application amount at which the transparent film equivalent material does not overflow from the uncoated transparent film removal unit due to surface tension when applied by the application unit.

  According to the present invention, the coating amount is calculated so that the transparent film equivalent material does not overflow from the uncoated transparent film removal portion due to the surface tension when applied, and the calculated coating amount of the transparent film equivalent material is removed from the uncoated transparent film. It is applied to the part.

  For this reason, the applied transparent film equivalent material can be prevented from overflowing from the uncoated transparent film removal portion. As a result, it is possible to prevent the periphery of the uncoated transparent film removal portion from being soiled, so that the defective portion of the transparent film can be corrected more efficiently.

  Preferably, the calculation unit calculates a coating amount according to a volume obtained by dividing the volume of the transparent film removal unit after shaping, and the coating unit is transparent with a coating amount of a plurality of volumes calculated by the calculation unit. Each film equivalent material is applied in several batches.

  According to the present invention, the coating amount is calculated according to the volume obtained by dividing the volume of the transparent film removal portion after shaping, and a plurality of transparent film-equivalent materials each having a volume divided into the calculated volume are provided. It is applied in batches.

  For this reason, since the coating amount per time can be reduced, it is possible to prevent the applied transparent film equivalent material from overflowing from the uncoated transparent film removing portion. As a result, the periphery of the uncoated transparent film removal portion can be made difficult to become dirty, so that the defective portion of the transparent film can be corrected more efficiently.

  According to another aspect of the present invention, a transparent film correction method measures a surface shape of a transparent film removal section, a shaping section that shapes the transparent film removal section in a defective portion of the transparent film formed on the substrate, and the transparent film removal section. A method of correcting a transparent film by a transparent film correcting apparatus, comprising: a surface shape measuring unit; a calculating unit for calculating a coating amount of a transparent film equivalent material applied to the transparent film removing unit; The step of shaping the transparent film removing unit having a predetermined three-dimensional shape by controlling the shaping unit and removing the transparent film at the defective portion, and the surface shape measuring unit are shaped and shaped. The step of measuring the surface shape of the transparent film removal part after shaping, the step of controlling the calculation part, calculating the volume of the transparent film removal part after shaping according to the measured surface shape, and the calculation part are controlled. To the calculated volume of the transparent film removal part after shaping. A step of calculating a coating amount of the transparent film equivalent material, a step of controlling the coating unit to apply the calculated coating amount of the transparent film equivalent material to the transparent film removing unit after shaping, and a surface shape measuring unit. Controlling and measuring the surface shape of the cured transparent film equivalent material applied and cured, and controlling the arithmetic unit to remove the volume of the transparent film equivalent material after curing according to the measured surface shape. A step of calculating a volume of the coated transparent film removing unit, a step of controlling the calculation unit to calculate a coating amount of the transparent film equivalent material according to the calculated volume of the uncoated transparent film removing unit, and a coating unit And controlling to apply the calculated coating amount of the transparent film equivalent material to the uncoated transparent film removing portion.

  According to the present invention, it is possible to provide a transparent film correction method capable of efficiently correcting a defective portion of the transparent film.

  The best mode for carrying out the present invention will be described below with reference to the drawings. FIG. 1 is a conceptual configuration diagram of a transparent film correcting device 100 of the present invention. Referring to FIG. 1, a transparent film correcting device 100 includes a laser processing device 1 as a shaping device, an inkjet head 2 as a coating device, a microscope 3 as a surface shape measuring device, and a driving device 4 as a driving device. And a calculation device 5 as a volume calculation device and a control device 6 as a control device.

  The laser processing apparatus 1 removes a transparent film remaining in a predetermined shape region including a defective portion of the transparent film, and shapes a columnar transparent film removal portion having a substantially predetermined cross section. Note that the three-dimensional shape of the transparent film removing portion is not limited to a columnar shape, and may be a slab shape, a cone shape, or a frustum shape. The predetermined shape is, for example, a polygon such as a square or a rectangle, a circle, or an ellipse, and a composite shape thereof.

  The shaping device is not limited to the laser processing device 1, and shapes the transparent film removing unit by removing the transparent film remaining in the predetermined shape region including the defective portion of the transparent film formed on the substrate. As long as it exists, it is not limited to the laser processing apparatus using a laser beam, and may be another processing apparatus. For example, a processing apparatus that performs mechanical processing such as cutting or grinding may be used. Moreover, the processing apparatus which processes chemically with a chemical | medical agent etc. may be sufficient.

  The inkjet head 2 includes a nozzle that discharges a transparent film equivalent material and a container that stores the transparent film equivalent material. Since the inkjet head 2 can discharge a minute volume of droplets, the inkjet head 2 is suitable for a coating apparatus that corrects a defective portion of a minute transparent film and the above-described transparent film removing portion. The microscope 3 is preferably a confocal microscope or a white two-beam interference microscope, and can measure the surface shape of the transparent film with an accuracy of less than 1 micron.

  The driving device 4 integrally drives the laser processing device 1, the inkjet head 2, and the microscope 3, and the X-axis direction (in-plane horizontal direction shown in FIG. 1), the Y-axis direction (perpendicular to the surface shown in FIG. 1), Z It is configured to be movable in the axial direction (in the vertical direction in FIG. 1). The drive device 4 can individually move the laser processing device 1, the inkjet head 2, and the microscope 3 directly above the defect portion.

  The arithmetic unit 5 is an arithmetic circuit or a computer that calculates the volume of the surface shape obtained from the microscope 3 and calculates the volume. The control device 6 is an arithmetic circuit or a computer that outputs an application amount control signal based on the volume obtained from the arithmetic device 5. The stage 7 is a stage for fixing the substrate 8 to be corrected.

  FIG. 2 is a cross-sectional view of the substrate 8 and the transparent film 9 for explaining a process of correcting the defective portion 10 of the transparent film 9 formed on the substrate 8. With reference to FIG. 2, the correction process of the transparent film correction apparatus 100 shown in FIG. 1 will be described.

  FIG. 2A is a cross-sectional view of a missing portion 10 (a portion surrounded by a broken line in the drawing) of the transparent film 9 formed on the substrate 8. First, the laser processing apparatus 1 irradiates the defect portion 10 with laser light, removes the transparent film of the defect portion 10, and shapes the defect portion 10 into the transparent film removal portion described above. The laser processing apparatus 1 is preferably ablation processing using an ultraviolet laser that does not change due to heating around the substrate 8 or the shaping region, which is the lower layer of the transparent film 9, and that enables fine shaping.

FIG. 2B is a cross-sectional view of the transparent film removing unit 11. Hereinafter, the volume of the transparent film removing unit 11 is set to V _A. The material equivalent to the transparent film applied to the transparent film removing unit 11 is preferably a material that is cured after application to become a transparent film. The curing method is preferably a heat (room temperature) curable material in which the solvent component is vaporized and the transparent film equivalent component dissolved in the solvent is cured by becoming an air atmosphere after coating. In addition to vaporization naturally, curing may be accelerated by heating. Alternatively, a photocurable material may be used as the transparent film equivalent material, and light may be irradiated after application to be cured. In general, the volume of the transparent film equivalent material shrinks due to curing.

  In the present embodiment, for example, the volume shrinkage ratio α of the transparent film equivalent material is set to 1/2 and n = 3 times is applied to apply the transparent film equivalent material. The volume shrinkage α represents the ratio of the volume after curing to the coating volume of the transparent film equivalent material.

Since the volume after target curing is equal to the volume V _A of the transparent film removal portion, the target application volume V _B = V _A / α = 2V _{A of the} transparent film equivalent material is eventually obtained. When this is applied by dividing into n = 3 times, the target application volume per time is V _B / n = 2V _A / 3, and the target post-curing volume per time is V _A / n = V _A / 3. It becomes. Of course, in the transparent film correcting device 100 of the present invention, the volume shrinkage α of the transparent film equivalent material may be other than 1/2, or the number of coatings n may be other than 3.

In general, when the volume shrinkage ratio α is large, the viscosity of the transparent film equivalent material becomes hard and the ink jet head is difficult to be ejected. On the other hand, there is an advantage that the number of coatings n is reduced and the correction time can be shortened. In general, when the number of times of application n is small, the target application volume V _B / n per application increases, and the transparent film equivalent material overflows from the transparent film removal unit 11 during application, and the transparent film removal unit 11. While there is a drawback of contaminating the surrounding transparent film or increasing the thickness, there is an advantage that the correction time can be shortened.

FIG. 2C is a cross-sectional view immediately after the first application. By applying the transparent film equivalent material 12A having a volume of 2V _A / 3 onto the substrate 8 which is the bottom surface of the transparent film removing unit 11, the volume of the uncoated transparent film removing unit 12B becomes V _A / 3. Thereafter, the applied transparent film-equivalent material 12A begins to cure and shrinks in volume.

FIG. 2D is a cross-sectional view after curing of the transparent film equivalent material 12A applied for the first time. When the applied transparent film equivalent material 12A is cured, the volume of the cured transparent film equivalent material 13A becomes V _A / 3, and the volume of the uncoated transparent film removal portion 13B becomes 2 V _A / 3.

FIG. 2E is a cross-sectional view immediately after the second application. _A transparent film equivalent material 14A having a volume of 2 V _A / 3 is applied on the cured transparent film equivalent material 13A, which is the bottom surface of the uncoated transparent film removal portion 13B. At this time, the surface of the transparent film equivalent material 14A immediately after coating and the surface of the transparent film 9 that is not corrected have the same height. Thereafter, the transparent film equivalent material 14A applied for the second time starts to cure and shrinks in volume.

FIG. 2F is a cross-sectional view after curing of the transparent film equivalent material 14A applied for the second time. When the applied transparent film equivalent material 14A is cured, the volume of the cured transparent film equivalent material 15A formed by the first application and the second application becomes 2V _A / 3, and the uncoated transparent film removal portion 15B. The volume of is V _A / 3.

FIG. 2G is a cross-sectional view immediately after the third application. _A transparent film equivalent material 16A having a volume of 2 V _A / 3 is applied onto the cured transparent film equivalent material 15A, which is the bottom surface of the uncoated transparent film removal portion 15B. At this time, the surface of the transparent film equivalent material 16A immediately after coating is higher than the surface of the transparent film 9 that is not corrected. The portion of the transparent film equivalent material 16A that is higher than the surface of the transparent film 9 that is not corrected does not overflow due to surface tension. Thereafter, the transparent film equivalent material 16 </ b> A applied for the third time begins to cure and shrinks in volume.

FIG. 2H is a cross-sectional view after curing of the transparent film equivalent material 16A applied for the third time. When the applied transparent film equivalent material 16A is cured, the volume of the cured transparent film equivalent material 17 formed by the first to third application is V _A. Thus, the transparent film removing unit 11 has been corrected by the transparent film equivalent material 17 after curing.

  Next, a program executed by a CPU (Central Processing Unit) of a computer that functions as the arithmetic device 5 and the control device 6 described above will be described. This program is stored in a ROM (Read Only Memory) of the computer. Then, the RAM (Random Access Memory) of the computer is used as a work area. The program may be stored not in the ROM but in an external storage device such as a hard disk drive.

  FIG. 3 is a flowchart showing the flow of the transparent film correction process executed by the transparent film correction apparatus 100 according to the present embodiment. Referring to FIG. 3, first, in step S <b> 101, the laser processing apparatus 1 is controlled, so that a predetermined shape including the transparent film 9 deficient portion 10 formed on the substrate 8 described in FIG. The transparent film remaining in the region is removed, and the columnar transparent film removing portion 11 having a substantially predetermined cross section described in FIG. 2B is shaped.

Next, step S <b> 102 is executed, and the surface shape 18 of the transparent film removing unit 11 is measured by controlling the microscope 3. In step S103, the arithmetic unit 5 included in the computer calculates the volume _VA of the transparent film removing unit 11 based on the surface shape 18 measured by the microscope 3.

In the present embodiment, the target post-curing volume per time is V _A / 3. However, it is difficult to keep the volume after target curing every time at V _A / 3. This is because there are fluctuations in the volumetric shrinkage rate α and fluctuations in the discharge volume from the inkjet head. The variation in the former volumetric shrinkage rate α occurs due to variations in lots of the material equivalent to the transparent film or changes in concentration due to evaporation of the solvent in the container. In addition, the latter variation in the discharge volume has been a problem in conventional coating apparatuses using an ink jet head, and as described above, a correction method as in the prior art has been proposed.

Here, a method of calculating the target post-curing volume _VA will be described. FIG. 4 is a cross-sectional view of the measured surface shape 18 after removal of the transparent film. Since substrate 8, transparent film 9, and transparent film removing unit 11 have been described with reference to FIG. 2, description thereof will not be repeated.

With reference to FIG. 4, the arithmetic unit 5 calculates the volume V _{A of} the shaped transparent film removing unit 11, that is, the target post-curing volume V _A based on the surface shape 18. As a calculation method, for example, the surface shape 18 may be divided into areas within a predetermined shape region.

When the surface shape 18 is z = f (x, y) and the z coordinate of the bottom surface of the transparent film 9 is z ₁ , the film thickness Δz of the remaining transparent film of the transparent film removing unit 11 at the coordinates (x, y) is Δz = f (x, y) −z ₁ If Δz is 0, the transparent film is completely removed.

Further, the z coordinate of the surface of the transparent film 9 is z ₀ , the predetermined shape region is S, the area of the predetermined shape region is S _0, and the height z ₀ −f (x, y) of the transparent film removing unit 11 is transparent. The volume _VA of the transparent film removing unit 11 can be calculated by dividing the area over a predetermined shape region where the film removing unit 11 exists. That is, the volume V _A of the transparent film removing unit 11 can be expressed by Equation 1.

Since the target post-curing volume V _A is calculated directly from the surface shape 18 thus measured, even if there is a variation in the film thickness of the transparent film or the size of the transparent film removing portion 11, the target post-curing volume is accurately determined. V _A can be grasped.

Returning to FIG. 3, in step S < _b > 104, the target application volume V _B = V _A / α is calculated by the arithmetic unit 5 based on the target post-curing volume V _A calculated in step S < _b > 103. In step S105, the first application volume U ₁ = V _B / 3 is calculated by applying the target application volume V _B calculated in step S104 in three steps.

In step S106, the application amount control signal corresponding to the _first application volume U1 calculated in step S105 is output to the inkjet head 2 by the control device 6 included in the computer. Thereby, the transparent film equivalent material of the _first application volume U ₁ is discharged from the inkjet head 2. At this time, the cross section becomes as described with reference to FIG. In step S107, it is determined whether the applied transparent film equivalent material is cured. If it is determined that it is not cured, step S107 is repeated, and if it is determined that it is cured, the process proceeds to step S111.

  Next, in step S111, by controlling the microscope 3, the surface shape 19 of the transparent film equivalent material 13A after the first curing described with reference to FIG. 2D is measured. FIG. 5 is a cross-sectional view of the surface shape 19 after the first curing. Since transparent film equivalent material 13A and transparent film removal portion 13B have been described with reference to FIG. 2D, description thereof will not be repeated.

Then, in step S112, the arithmetic unit 5, based on the measured surface profile 19, uncoated volume W ₁ of the transparent film removal part 13B of the uncoated it is calculated. Next, in step S113, already uncoated volume W ₁ is subtracted from the already calculated target after curing the volume V _A, after curing and cured actually applied to the first volume T ₁ is calculated. Since it is applied in three steps, it is desirable that the post-curing volume T ₁ coincides with the target post-curing volume V _A / 3 per one time.

In step S114, an error amount E ₁ = T ₁ −V _A / between the post-curing volume T ₁ of the transparent film equivalent material actually applied and cured by the arithmetic unit 5 and the target post-curing volume V _A / 3 per time. 3 is calculated. In step S115, based on the target application volume V _B calculated in step S104 and the error amount E ₁ = T ₁ −V _A / 3 calculated in step S114, the second application volume U ₂ = V _B / 3-k × E ₁ / α is calculated. Here, k is a feedback gain.

At step S116, the control unit 6, the coating amount control signal in accordance with the second coating volume U ₂ calculated in step S115 is output to the ink jet head 2. The inkjet head 2 increases or decreases the application amount based on the input application amount control signal. That is, the inkjet head 2 increases or decreases the number of applied droplets per time, increases or decreases the appropriate amount of liquid per droplet, or combines the two, so that the target application volume V _B / 3 = Increase or decrease αV _A / 3. At this time, the cross section becomes as described in FIG.

  In step S117, it is determined whether the applied transparent film equivalent material is cured. If it is determined that it is not cured, step S117 is repeated, and if it is determined that it is cured, the process proceeds to step S121.

  Next, in step S121, the microscope 3 is controlled to measure the surface shape 20 of the transparent film equivalent material 15A after the second curing described with reference to FIG. FIG. 6 is a cross-sectional view of the surface shape 20 after the second curing. Since transparent film equivalent material 15A and transparent film removal portion 15B have been described with reference to FIG. 2 (F), description thereof will not be repeated.

In step S122, the calculation device 5 calculates the uncoated volume W _{2 of the} uncoated transparent film removing unit 15B based on the measured surface shape 20. Next, in step S123, is already subtracted from the non-coated volume W ₁ already calculated in step S112 the second uncoated volume W ₂ is after actually applied cured cured a second time volume T ₂ is calculated . That is, T ₂ = W ₁ −W ₂ . Since it is applied in three steps, the post-curing volume T ₂ is preferably equal to the target post-curing volume V _A / 3.

In step S124, the arithmetic unit 5 causes the error amount E ₂ = T ₂ −V _A / between the post-curing volume T ₂ of the transparent film equivalent material actually applied and cured to the target post-curing volume V _A / 3. 3 is calculated. In step S125, based on the target application volume V _B calculated in step S104 and the error amount E ₂ = T ₂ −V _A / 3 calculated in step S124, the third application volume U ₃ = V _B / 3-k × E ₂ / α is calculated. If the error amount E ₂ is small, the third application volume U ₃ ≈V _B / 3, and the third application volume after curing T 3 = αU ₃ ≈V _A / 3.

In step S126, the control unit 6, the coating amount control signal according to the third coating volume U ₃ calculated in step S125 is output to the ink jet head 2. The inkjet head 2 increases or decreases the coating amount based on the input coating amount control signal. In this way, even if the actual application volume is different from the target application volume, it can be corrected as appropriate. At this time, the cross section becomes as described with reference to FIG.

  In step S127, it is determined whether or not the applied transparent film equivalent material is cured. If it is determined that the film has not been cured, step S127 is repeated. If it is determined that the film has been cured, the transparent film correction process ends.

Furthermore, the post-curing volume T ₃ of the transparent film equivalent material actually applied and cured for the third time may be calculated. In this case, the surface shape 21 of the transparent film equivalent material 17 after the third curing described in FIG. 2H is measured by controlling the microscope 3. FIG. 7 is a cross-sectional view of the surface shape 21 after the third curing. Moreover, since the transparent film equivalent material 17 was demonstrated in FIG.2 (H), description is not repeated.

Then, the unapplied volume W ₃ is calculated by the arithmetic device 5 based on the measured surface shape 21. If W ₃ is negative, the cured transparent film equivalent material 17 is higher than the surface of the transparent film 9 that is not corrected. That is, the cured volume of the transparent film equivalent material 17 is equal to that of the transparent film removal unit 11. This indicates that the volume is more than V _A.

Further, when the volume after curing of the transparent film equivalent material 17 after curing does not reach the target post-curing volume V _A that is the volume of the transparent film removing unit 11, further application may be performed. In this case, the post-curing volume T ₃ = W ₂ −W ₃ applied and cured for the third time by the arithmetic unit 5, the third post-curing volume T ₃ and the target post-curing volume V _A / 3 per time Error amount E ₃ = T ₃ −V _A / 3 and the fourth coating volume U ₄ = W ₃ / α−k × E ₃ / α are calculated.

Then, the control device 6 outputs a coating amount control signal corresponding to the _fourth coating volume U ₄ to the inkjet head 2. Thereby, even if the post-curing volume of the transparent film equivalent material 17 after curing does not reach the target post-curing volume V _A , the uncoated transparent film removing portion can be corrected.

  Further, the correction may not be performed every three coatings, but may be performed collectively for each of the plurality of coatings. For example, the correction may be performed only the third time without performing the first and second surface shape measurements and adjusting the coating amount control signal by the control device 6. In this case, as described in step S102 and FIG. 2B, the surface shape 18 of the transparent film removing unit 11 shaped into a columnar shape having a predetermined cross section is measured by the microscope 3. Then, as described in step S <b> 121 and FIG. 2F, the surface shape 20 after the second curing is measured by the microscope 3.

Next, the target curing volume V _A is calculated from the surface shape 18 of the transparent film removing unit 11 by the arithmetic device 5. Further, the unapplied volume W ₂ is calculated by the arithmetic device 5 based on the surface shape 20 after the second curing. Next, W ₂ is subtracted from the already calculated target post-curing volume V _A, and the total post-curing volume (T ₁ + T ₂ ) actually applied and cured for the first and second times is calculated. The post-curing volume (T ₁ + T ₂ ) is preferably equal to the sum of the first and second post-curing volumes (2V _A / 3).

Next, application according to the third application volume U ₃ = V _B / 3-k × E / α calculated by the control device 6 based on the error amount E = (T ₁ + T ₂ ) −2V _A / 3. A quantity control signal is output to the inkjet head 2. As described above, when correcting collectively for each of a plurality of times of application, there is an advantage that the correction time can be shortened because the number of times of surface shape measurement is small. is there.

  Moreover, when measuring the surface shape after hardening, you may also measure the surface shape of the transparent film removal part 11 after shaping simultaneously. In this case, it is not necessary to separately measure the surface shape of the transparent film removing unit 11 with the microscope 3 described in FIG. 2B and step S102.

  First, correction based on the first application when simultaneous measurement is performed will be described. In step S111, the surface shape 18 of the transparent film removing unit 11 described with reference to FIG. 4 and the surface shape 19 of the transparent film equivalent material 13A after the first curing described with reference to FIG. In other words, the back surface shape and the surface shape of the transparent film equivalent material 13A after curing are simultaneously measured.

Then, by calculating the area between the back surface shape and the surface shape of the cured transparent film equivalent material 13A by the arithmetic unit 5, the post-curing volume T _{1 that} is actually applied and cured for the _{first time} is obtained. Calculated. Such a microscope 3 is already commercially available, for example, SP-500F manufactured by Toray Engineering Co., Ltd., and simultaneous measurement can be easily realized.

Next, the correction based on the second application when performing simultaneous measurement will be described. In step S121, the surface shape 18 of the transparent film removing unit 11 described with reference to FIG. 4 and the surface shape 20 of the transparent film equivalent material 15A after the second curing described with reference to FIG. In other words, the back surface shape and the surface shape of the transparent film equivalent material 15A after curing are measured simultaneously. The region sandwiched between the back surface shape and the surface shape of the transparent film equivalent material 15A corresponds to the total T ₁ + T ₂ of the volume after curing applied and cured for the first time and the second time.

Then, T ₁ + T ₂ can be calculated by dividing the area sandwiched between the back surface shape and the surface shape of the transparent film equivalent material 15A by the arithmetic device 5. Since T ₁ has already been calculated as described above, the post-curing volume T ₂ that has been applied and cured for the second time can be calculated.

Further, when the variation in the film thickness of the transparent film 9 is sufficiently small and the transparent film in the transparent film removing unit 11 is completely removed, based on the film thickness of the transparent film 9 and the area of the predetermined shape region, The target post-curing volume V _A may be calculated and stored in the RAM, ROM, or external storage device of the computer that constitutes the arithmetic device 5 and the control device 6. The calculation method is the film thickness of the transparent film 9 × the area of the predetermined shape region. In this case, the step of measuring the surface shape 18 of the transparent film removing unit 11 described in step S102 can be omitted, and there is an advantage that the correction time can be shortened.

  In addition, although the inkjet head was used as a coating device, it is not limited to this. A dispenser, a needle, a brush, or the like may be used as the coating device.

  Note that the shaping device shaped the missing portion of the transparent film 9 in advance. However, this shaping may be omitted. In that case, the surface shape of the defective portion may be measured to calculate the coating volume, and the transparent film equivalent material may be directly applied and corrected. Moreover, what is necessary is just to calculate a target application | coating volume using the surface shape of a defect | deletion part instead of the surface shape 18 of the transparent film removal part 11. FIG.

FIG. 8 is a diagram showing the characteristics of the application of the transparent film equivalent material in the correction of the defective portion of the transparent film 9 of the present embodiment. FIG. 8A is a cross-sectional view of the substrate 8 and the transparent film 9 when a transparent film equivalent material is applied to the transparent film removing unit 11 at once to correct a defective portion of the transparent film 9. Referring to FIG. 8A, in this case, since the volume after correction after the transparent film equivalent material is cured is the post-curing volume V _A , the coating volume U = V _B = V _A / α is transparent. It is necessary to apply the film equivalent material 22.

Therefore, the volume X = U−V _A = V _B −V _A = V _A (1 / α−1) of the material equivalent to the transparent film in the portion raised from the transparent film 9 due to the surface tension is prevented from overflowing due to the surface tension. If the volume is not sufficient to be maintained, the applied transparent film equivalent material overflows from the transparent film removal unit 11. In the present embodiment, since α = ½, X = V _A.

  FIG. 8B is a cross-sectional view of the substrate 8 and the transparent film 9 when a transparent film equivalent material is applied to the transparent film removing unit 11 in a plurality of times to correct a defective portion of the transparent film 9. FIG. 8B is similar to FIG. That is, FIG. 8B shows a state immediately after the third application when the correction is made in three steps.

Referring to FIG. 8 (B), in this case, the volume _{X = T 1 + T 2 +} U 3 -V A transparent film equivalent material raised portion by the surface tension of a transparent film 9. Here, the first cured volume T ₁ ≈V _A / 3, the second cured volume T ₂ ≈V _A / 3, and the third coated volume U ₃ ≈V _B / 3 = V _A / (3α). Therefore, the volume X of the raised portion is X≈V _A (1 / α−1) / 3 = V _A / 3.

As described above, when the correction is performed in three steps, the volume of the raised portion is about 1/3 as compared with the case where the correction is performed at one time. When correction is performed in n times by the same method as in the present embodiment, the volume X of the raised portion X≈V _B / n−V _A / n = V _A (1 / α−1) / n = V _A / n. Here, V _B / n is a coating volume per one time, and V _A / n is a coating volume after curing per one time. Therefore, when the correction is performed in n times, the volume of the raised portion is about 1 / n compared to the case where the correction is performed at once.

  The volume of the raised portion where the transparent film equivalent material of the portion raised from the transparent film 9 due to the surface tension does not overflow due to the surface tension shapes the height and shape of the transparent film removing portion 11 and the transparent film removing portion 11. Although it varies depending on the shape and area of the predetermined shape as the region, it can be obtained in advance by experiments.

Then, when the corrected divided n times, by the following volume of a degree that does not overflow by the surface tension of the volume X ≒ V _A / n of raised portions, the transparent film is removed when applying the transparent film equivalent material The transparent film equivalent material does not overflow from the part 11 to contaminate the transparent film 9 around the transparent film removal part 11, and the thickness of the transparent film 9 around the transparent film removal part 11 does not increase. In the present embodiment, since the volume V _A / 3 is equal to or less than the volume that does not overflow due to the surface tension, the case where the defective portion of the transparent film 9 is corrected in n = 3 times has been described.

<Modification of transparent film correction process>
Next, a modification of the above-described embodiment will be described. This modification is a modification of the method for calculating the coating volume each time in the transparent film correction process in the above-described embodiment. FIG. 9 is a flowchart showing the flow of the transparent film correction process executed by the transparent film correction apparatus 100 in the modification of the present embodiment.

  The steps from step S201 to step S203 are the same as the steps from step S101 to step S103 in FIG. The steps from step S206 to step S212 and the steps from step S216 to step S217 are the same as the steps from step S106 to step S112 in FIG. 3 and the steps from step S116 to step S117, respectively. is there. Therefore, the overlapping description of these steps will not be repeated.

In step S205, the first application volume U ₁ = V _A + Y is calculated based on the target post-curing volume V _A and the predetermined volume Y. The predetermined volume Y is a volume such that the transparent film equivalent material applied by the surface tension does not overflow from the transparent film removing unit 11, and in the present embodiment, the predetermined volume Y = _VA / 3. That is, in step S206, the transparent film equivalent material having the first application volume U ₁ = 4V _A / 3 is applied to the transparent film removing unit 11.

Next, in step S211, the surface shape of the cured transparent film equivalent material is measured. Here, a surface shape similar to the surface shape 20 described in FIG. 6 is measured. In step S213, the uncoated volume W is calculated. Here, since the first application volume is U ₁ = 4V _A / 3 and the volume shrinkage ratio α = 1/2, the unapplied volume W is about V _A / 3.

Therefore, in step S214, it is determined whether or not W> 0, but it is determined that W≈V _A / 3> 0, and the process proceeds to step S215. In step S215, the second application volume U = W + Y is calculated. Here, the coating volume U≈V _A / 3 + V _A / 3 = 2V _A / 3. In step S216, a transparent film equivalent material having a second application volume U≈2V _A / 3 is applied. The cross sections of the substrate 8 and the transparent film 9 at this time are the same as those described with reference to FIG.

  Therefore, after the transparent film equivalent material is cured in step S217, the surface shape is measured again in step S211, and the unapplied volume calculated in step S212 is approximately W = 0. If W> 0 is not satisfied, the transparent film correction process ends.

  As described above, when the defect portion is corrected in a plurality of times, the transparent film 9 around the transparent film removing unit 11 is contaminated by applying a transparent film equivalent material with a volume that does not overflow with surface tension each time. In addition, the thickness of the transparent film 9 around the transparent film removing portion 11 is not increased, and the defective portion can be corrected with a smaller number of coatings.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a conceptual block diagram of the transparent film correction apparatus of this invention. It is sectional drawing of the board | substrate and transparent film for performing the process of correcting the defect | deletion part of the transparent film | membrane formed into a film on the board | substrate. It is a flowchart which shows the flow of the transparent film correction process performed by the transparent film correction apparatus in this Embodiment. It is sectional drawing of the surface shape after the transparent film removal measured. It is sectional drawing of the surface shape after the 1st hardening. It is sectional drawing of the surface shape after the 2nd hardening. It is sectional drawing of the surface shape after the 3rd hardening. It is a figure which shows the characteristic of application | coating of the transparent film equivalent material in correction | amendment of the defect | deletion part of the transparent film of this Embodiment. It is a flowchart which shows the flow of the transparent film correction process performed by the transparent film correction apparatus in the modification of this Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Laser processing apparatus, 2 Inkjet head, 3 Microscope, 4 Drive apparatus, 5 Calculation apparatus, 6 Control apparatus, 7 Stage, 8 Substrate, 100 Transparent film correction apparatus.

Claims (12)

A shaping means for shaping the transparent film removal portion after shaping a predetermined three-dimensional shape by removing the transparent film of the defective portion of the transparent film formed on the substrate;
Surface shape measuring means for measuring the surface shape of the post-shaping transparent film removal part shaped by the shaping means;
Calculate the volume of the post-shaping transparent film removal part according to the surface shape measured by the surface shape measuring means, and calculate the coating amount of the transparent film equivalent material according to the calculated volume of the transparent film removal part after shaping Computing means for
Application means for applying the transparent film equivalent material of the application amount calculated by the arithmetic means to the transparent film removal portion after shaping,
The surface shape measuring means measures the surface shape of the post-curing transparent film equivalent material applied and cured by the applying means,
The calculation means calculates the volume of the uncoated transparent film removal portion excluding the volume of the post-curing transparent film equivalent material according to the surface shape measured by the surface shape measuring means, and calculates the calculated uncoated transparent film Calculate the coating amount of the transparent film equivalent material according to the volume of the removal part,
The said application | coating means is a transparent film correction apparatus which apply | coats the said transparent film equivalent material of the application quantity computed by the said calculating means to the said uncoated transparent film removal part.   The transparent film correction apparatus according to claim 1, wherein the shaping unit removes the transparent film of the defective portion by irradiating light to the defective portion of the transparent film, and shapes the transparent film removing unit. Further comprising volume storage means for previously storing the volume of the transparent film removal portion after shaping,
The transparent film correction apparatus according to claim 1, wherein the calculation unit calculates a coating amount of the transparent film equivalent material according to the volume of the post-shaping transparent film removal unit stored in the volume storage unit. The shape of the transparent film removal part after shaping is a columnar shape with a predetermined cross section,
The transparent film correction apparatus according to claim 3, wherein the volume storage unit stores in advance a volume of the post-shaped transparent film removal unit calculated from a film thickness of the transparent film and an area of the predetermined shape. The surface shape measuring means measures the surface shape of the post-shaping transparent film removing portion when measuring the surface shape of the transparent film equivalent material after curing after the transparent film equivalent material is applied by the applying means. ,
The calculation means calculates the volume of the post-curing transparent film equivalent material according to the surface shape of the post-curing transparent film equivalent material measured by the surface shape measuring means and the surface shape of the post-shaping transparent film removal portion. Calculate the volume of the uncoated transparent film removal part excluding the calculated volume of the transparent film equivalent material after curing, and the application amount of the transparent film equivalent material according to the calculated volume of the uncoated transparent film removal part The transparent film correction device according to claim 1, wherein the device is calculated.   The transparent film correction apparatus according to claim 1, wherein the surface shape measurement unit controls and measures a confocal microscope.   The transparent film correction apparatus according to claim 1, wherein the surface shape measurement unit controls and measures a white two-beam interference microscope.   The transparent film correction apparatus according to claim 1, wherein the coating unit applies and controls an inkjet head having a nozzle that discharges a transparent film-equivalent material.   The transparent film correction apparatus according to claim 8, wherein the coating unit adjusts the coating amount by changing the number of droplets ejected by the nozzles of the inkjet head or the amount of droplets per droplet.   The transparent film correction apparatus according to claim 1, wherein the calculation unit calculates a coating amount that prevents the transparent film equivalent material from overflowing from the uncoated transparent film removal unit due to surface tension when applied by the coating unit. The calculation means calculates a coating amount according to a volume obtained by dividing the volume of the transparent film removal portion after shaping,
The transparent film correcting apparatus according to claim 10, wherein the coating unit applies the transparent film equivalent material having a volume divided into a plurality of volumes calculated by the calculation unit in a plurality of times. A shaping part for shaping the transparent film removal part in a defective part of the transparent film formed on the substrate, a surface shape measurement part for measuring the surface shape of the transparent film removal part, and a transparent applied to the transparent film removal part A transparent film correction method for correcting the transparent film by a transparent film correction apparatus having a calculation unit for calculating a coating amount of a film equivalent material and an application unit for applying the transparent film equivalent material,
Shaping the transparent film removing portion having a predetermined three-dimensional shape by controlling the shaping portion and removing the transparent film of the defective portion;
Controlling the surface shape measuring unit to measure the surface shape of the shaped transparent film removal unit after shaping;
Controlling the calculation unit to calculate the volume of the post-shaping transparent film removal unit according to the measured surface shape;
Controlling the calculation unit to calculate a coating amount of the transparent film equivalent material according to the calculated volume of the transparent film removal unit after shaping;
Controlling the application unit to apply the calculated application amount of the transparent film equivalent material to the post-shaping transparent film removal unit;
Controlling the surface shape measurement unit to measure the surface shape of the cured transparent film equivalent material applied and cured;
Controlling the arithmetic unit to calculate the volume of the uncoated transparent film removal part excluding the volume of the post-curing transparent film equivalent material according to the measured surface shape;
Controlling the calculation unit to calculate a coating amount of the transparent film equivalent material according to the calculated volume of the uncoated transparent film removal unit;
And applying the calculated application amount of the transparent film equivalent material to the uncoated transparent film removal unit by controlling the application unit.

Images