JP2006037121A - Apparatus for producing radiograph conversion panel and method for producing radiograph conversion panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for producing a radiograph conversion panel by which a uniform radiograph conversion panel having high sensitivity and also having excellent durability is obtained, and to provide a method for producing the radiograph conversion panel. <P>SOLUTION: The production apparatus 1 for the radiograph conversion panel comprises: a vacuum vessel 2; an evaporation source 4 for vapor-depositing a luminous phosphor on a support 5 provided at the inside of the vacuum vessel 2; a support holder 6 provided with a curved surface having a prescribed radius of curvature so as to be confronted with the evaporation source 4; a support rotation mechanism 10 for vapor-depositing the luminous phosphor from the evaporation source 4 by rotating the support holder 6 to the evaporation source 4; and fixed members 7a, 7b holding both the edge parts of the support 5 abutted against the curved surface of the support holder 6 and fixed to the support holder 6 in such a manner that tension is generated in the support 5. The one at least holding one end of the support 5 in the fixed members 7a, 7b is fixed to the support holder 6 via springs 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a radiation image conversion panel, and more particularly, to a manufacturing apparatus for a radiation image conversion panel in which a photostimulable phosphor layer is formed and a method for manufacturing the radiation image conversion panel.

  Conventionally, as a method for obtaining a radiation image without using a silver salt, a radiation image conversion panel in which a photostimulable phosphor layer is formed on a support has been developed.

  The radiation image conversion panel can absorb radiation transmitted through the subject into the stimulable phosphor layer and accumulate radiation energy corresponding to the radiation transmission density of each part of the subject. Thereafter, the stimulable phosphor is excited in time series by electromagnetic waves (excitation light) such as visible light and infrared rays, thereby releasing the radiation energy accumulated in the stimulable phosphor as stimulated emission. The signal based on the intensity of light can be converted into an electric signal by photoelectric conversion, for example, and can be reproduced as a visible image on a recording material such as a silver halide photographic material or a display device such as a CRT.

  In the radiation image conversion panel in which the photostimulable phosphor layer is formed, in order to achieve both high sensitivity and high sharpness, it is necessary to crystallize the photostimulable phosphor layer on the support. In recent years, it has been reported that a photostimulable phosphor with extremely high sensitivity can be obtained by forming a photostimulable phosphor layer based on an alkali halide such as CsBr by vapor deposition (Patent Document 1).

  As an apparatus for depositing the photostimulable phosphor layer as described above, an evaporation apparatus including a vacuum container and a support holder for holding a support above the vacuum container is known. Such a vapor deposition apparatus is provided with an evaporation source for vapor-depositing a stimulable phosphor as a vapor in the vicinity of the bottom surface in the vacuum vessel, and the support is pressed against the evaporation source side surface of the support holder. While being held by the support holder, the photostimulable phosphor is deposited on the support from the evaporation source.

According to such a vapor deposition apparatus, the stimulable phosphor layer is vaporized and attached to the support, so that the stimulable phosphor layer can be uniformly formed on the support.
JP 2001-249198 A

  However, in such a vapor deposition apparatus, the support body hangs down with the passage of time only by pressing the support body against the support body holder. Further, in a support having a high coefficient of thermal expansion, when the temperature of the support increases due to the heat of vapor deposition, the support extends and hangs downward.

  Thus, when the support and the support holder are not sufficiently in contact with each other and are separated from each other, the temperature between the support and the support holder increases with the temperature rise of the support due to the heat of vapor deposition of the stimulable phosphor. There is a difference, and the temperature of the entire support cannot be kept uniform.

  That is, when the surface of the support opposite to the evaporation source is heated by the evaporation heat, only the temperature of the portion of the support where the photostimulable phosphor is quickly deposited rises. In particular, this tendency becomes remarkable when the support is a metal having a high thermal conductivity. In this case, if the support is separated from the support holder, the temperature of the entire support cannot be controlled within a predetermined range by heating or cooling the support holder.

  As described above, when the temperature of the entire support is not within the predetermined range, it is impossible to control the luminance distribution because the generation of columnar crystals cannot be controlled. Therefore, there has been a problem that the sensitivity of the radiation image conversion panel becomes nonuniform and film peeling occurs.

  Here, as a method for strengthening the close contact between the support and the support holder, there is a method in which a contact metal is interposed between the support and the support holder. However, this method has a problem in that the manufacturing process becomes complicated because it is necessary to deposit another film as a contact metal on the support.

  The object of the present invention is made in view of such points, and the temperature of the entire support is made constant by strengthening the close contact between the support and the support holder without complicating the manufacturing process. An object of the present invention is to provide a radiological image conversion panel manufacturing apparatus and a radiographic image conversion panel manufacturing method capable of obtaining a radiological image conversion panel that is highly sensitive, uniform, and excellent in durability.

  In order to solve such a problem, the invention of claim 1 is an apparatus for manufacturing a radiation image conversion panel, which is provided in a vacuum vessel and the vacuum vessel, and a stimulable phosphor is deposited on a support. An evaporation source to be generated, a support holder having a curved surface facing the evaporation source and having a predetermined radius of curvature, and a stimulable phosphor from the evaporation source by rotating the support holder with respect to the evaporation source A support rotating mechanism for vapor-depositing the support on the support, and a fixing member for clamping the both ends of the support and fixing the support to the support holder in a state where tension is applied. To do.

  According to the first aspect of the present invention, since the support is in close contact with the curved surface of the support holder while being pulled by the fixing member, the adhesion between the support and the support holder is enhanced.

  Invention of Claim 2 is a manufacturing apparatus of the radiation image conversion panel of Claim 1, Comprising: When the said support body expand | swells by a temperature change, the said fixing member expands and contracts, and tension | tensile_strength is given to the said support body. A spring to be applied is attached.

  According to the second aspect of the present invention, the fixing member sandwiching the both ends of the support is fixed to the support holder via the spring, so that the support is biased and attached in the direction of the support holder. Since the tension is variable, the tension of the support is always within a certain range even when the support is expanded by the heat of vapor deposition, and the close contact between the support and the support holder is kept strengthened.

  The invention of claim 3 is a method for manufacturing a radiation image conversion panel, comprising: a step of sandwiching both ends of a support by fixing members in a vacuum vessel; and a support holder provided above the vacuum vessel. Of these, the step of contacting the support to a curved surface facing the bottom side in the vacuum vessel and having a predetermined radius of curvature, and fixing the support to the support holder in a state where tension is applied by the fixing member And a step of forming a stimulable phosphor layer by vapor-depositing a stimulable phosphor evaporating from an evaporation source provided at the bottom of the vacuum vessel on the support. And

  According to invention of Claim 3, since a support body is closely_contact | adhered to the curved surface of a support body holder in the state pulled by the fixing member, the adhesiveness of a support body and a support body holder is strengthened.

  Invention of Claim 4 is a manufacturing method of the radiographic image conversion panel of Claim 3, Comprising: The process of fixing the said support body to the said support body holder in the state to which tension | tensile_strength was provided by the said fixing member, The method includes a step of attaching a spring that expands and contracts to apply tension to the support when the support expands due to a temperature change.

  According to the invention of claim 4, since the fixing member is fixed via the spring, the support body is urged and attached in the direction of the support body holder, and the tension is made variable. Even when the support is expanded by the heat of vapor deposition, the tension of the support is always within a certain range, and the close contact between the support and the support holder is kept strengthened.

  According to the manufacturing apparatus of the radiation image conversion panel and the manufacturing method of the radiation image conversion panel of the present invention, it is possible to uniformly control the temperature of the entire support by enhancing the adhesion between the support and the support holder. This makes it possible to control the luminance distribution and form a photostimulable phosphor layer that is less susceptible to film peeling and sensitivity nonuniformity. As a result, it is possible to obtain an effect that a good radiation image conversion panel having high sensitivity, uniformity and excellent durability can be manufactured.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the radiation image conversion panel manufacturing apparatus 1 according to the present invention will be described.

  As shown in FIG. 1, a radiographic image conversion panel manufacturing apparatus 1 (hereinafter referred to as manufacturing apparatus 1) includes a vacuum vessel 2, and the vacuum vessel 2 is evacuated and introduced with air. A vacuum pump 3 is provided.

  In the vicinity of the bottom surface inside the vacuum vessel 2, an evaporation source 4 for depositing a stimulable phosphor as a vapor is provided. The evaporation source 4 contains a stimulable phosphor and is heated by a resistance heating method. The evaporation source 4 may be composed of an alumina crucible around which a heater is wound, or a boat or a heater made of a refractory metal. It may be configured.

  The evaporation source 4 of the present embodiment is composed of a crucible, and the crucible contains a stimulable phosphor that is a material for the stimulable phosphor layer formed on the surface of the support 5 by vapor deposition. .

  Here, the photostimulable phosphor in the present embodiment is preferably a photostimulable phosphor represented by the following general formula (1).

General formula (1)
M ¹ X · aM ² X ' ₂ · bM ³ X " ₃ : eA
[Wherein, M ¹ is at least one alkali metal atom selected from Li, Na, K, Rb and Cs atoms, and M ² is Be, Mg, Ca, Sr, Ba, Zn, Cd, Cu. And at least one divalent metal atom selected from each atom of Ni, and M ³ is Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, At least one trivalent metal atom selected from each atom of Tm, Yb, Lu, Al, Ga and In, and X, X ′ and X ″ are at least selected from each atom of F, Cl, Br and I 1 type of halogen atom, A is Eu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd, Lu, Sm, Y, Tl, Na, Ag, Cu and Mg. At least one metal atom selected from each atom, and , B, e each represent a number between 0 ≦ a <0.5,0 ≦ b <0.5,0 <e <1.0.]

In the photostimulable phosphor represented by the general formula (1), M ¹ represents at least one alkali metal atom selected from each atom such as Li, Na, K, Rb and Cs. At least one alkaline earth metal atom selected from each atom of Cs is preferable, and a Cs atom is more preferable.

M ² represents at least one divalent metal atom selected from atoms such as Be, Mg, Ca, Sr, Ba, Zn, Cd, Cu, and Ni, and among these, Be, It is a divalent metal atom selected from each atom such as Mg, Ca, Sr and Ba.

M ³ is selected from atoms such as Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Al, Ga, and In. At least one trivalent metal atom is represented, but among them, a trivalent metal atom selected from each atom such as Y, Ce, Sm, Eu, Al, La, Gd, Lu, Ga and In is preferable. It is.

  A is at least one selected from each atom of Eu, Tb, In, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd, Lu, Sm, Y, Tl, Na, Ag, Cu, and Mg. It is a seed metal atom.

  From the viewpoint of improving the photostimulable emission brightness of the photostimulable phosphor, X, X ′ and X ″ represent at least one halogen atom selected from F, Cl, Br and I atoms. At least one halogen atom selected from Br is preferable, and at least one halogen atom selected from Br and I atoms is more preferable.

In the general formula (1), the b value is 0 ≦ b <0.5, and preferably 0 ≦ b <10 ⁻² .

  Here, the photostimulable phosphor layer has a long and narrow columnar crystal structure independent of each other, and is preferably a columnar crystal having a uniform diameter and shape. Since the thickness of the columnar crystal, that is, the average area of the columnar crystal is affected by the temperature of the support, it is possible to produce a columnar crystal having a desired average area by controlling these. That is, the thickness of the columnar crystal is controlled by adjusting the temperature of the entire support on which the photostimulable phosphor layer is provided to a predetermined range and by making the deviation from the predetermined temperature range as small as possible. In addition, it is possible to form a photostimulable phosphor layer having a uniform sensitivity and hardly causing film peeling.

  A support holder 6 that holds the support 5 is provided near the upper surface inside the vacuum vessel 2.

  As the support 5, various types of glass, polymer materials, metals, and the like are generally used. In the present embodiment, polymer materials such as resins or metal sheets such as aluminum sheets, iron sheets, and copper sheets are particularly preferable. Further, the thickness of the support 5 is generally 80 μm to 5000 μm, and preferably 80 μm to 3000 μm from the viewpoint of handling.

  The support holder 6 includes a support holder substrate 6b and a support holder convex portion 6a, and the support holder convex portion 6a protrudes near the center of the surface of the support holder substrate 6b facing the evaporation source 4. Is formed. The surface of the support holder convex portion 6 a that faces the evaporation source 4 has a predetermined curvature, and is a curved surface that bulges in the direction of the evaporation source 4 with the central portion of the support holder 6 in the vertical direction as the center. Yes.

  Here, as for the curvature radius R of the curved surface of the support body holder convex part 6a, R = 100-100000 are preferable, More preferably, it is R = 1000-20000.

  The support body holder substrate 6b is provided with fixing members 7a and 7b that sandwich the end portion of the support body 5 and are fixed near both ends of the support body holder convex portion 6a.

  As shown in FIG. 2, the fixing member 7b is fixed to the support holder substrate 6b with screws. The fixing member 7b may be fixed with an adhesive or the like in addition to screwing. Further, three springs 8 are attached to the fixing member 7a, and hooks formed at the tip portions of the springs 8 are respectively engaged with the three hook engaging portions 9 provided on the support body holder substrate 6b. Thus, the support 5 is attached in a state of being biased in the direction of the support holder convex portion 6a. The fixing members 7a and 7b may be fixed with the spring 8 interposed.

  Further, the support holder 6 is provided with a support rotating mechanism 10 for vapor deposition from the evaporation source 4 by rotating the support 5 with respect to the evaporation source 4. The support rotation mechanism 10 supports the support holder 6 and rotates the support holder 6, a motor 10 (not shown) that is disposed outside the vacuum vessel 2 and serves as a drive source for the rotation shaft 10 a, and the like. It is composed of

The support holder 6 is preferably provided with a heater (not shown) for heating the support 5. By heating the support 5 with this heater, the adhesion of the support 5 to the support holder 6 is enhanced and the film quality of the stimulable phosphor layer is adjusted. Further, the adsorbate on the surface of the support 5 is removed and removed, and an impurity layer is prevented from being generated between the surface of the support 5 and the photostimulable phosphor.
Moreover, you may have a mechanism (not shown) for circulating a heating medium or a heating medium as a heating means. In this case, it is suitable for vapor deposition while keeping the substrate temperature at the time of vapor deposition at a relatively low temperature of 50 to 150 ° C.

  Moreover, it is preferable to install the space | interval of the support body 5 and the evaporation source 4 at 100 mm-1500 mm. Further, a shutter (not shown) that blocks a space from the evaporation source 4 to the support 5 may be provided between the support 5 and the evaporation source 4. Substances other than the target substance attached to the surface of the photostimulable phosphor by the shutter can be prevented from evaporating at the initial stage of vapor deposition and adhering to the support 5.

  Then, the manufacturing method of the radiographic image conversion panel of this invention using the manufacturing apparatus of the above-mentioned radiographic image conversion panel is demonstrated.

  In order to form the photostimulable phosphor layer on the support 5 using the aforementioned radiation image conversion panel manufacturing apparatus 1, first, the support 5 is attached to the support holder 6.

  When mounting the support body 5, first, the fixing member 7b is fixed to the vicinity of one side surface of the support body holder convex portion 6a on the support body holder substrate 6b with one end side of the support body 5 held between the fixing members 7b. To do. Next, with the support 5 in contact with the curved surface of the support holder convex portion 6a, the other end of the support 5 is sandwiched by the fixing member 7a, and the three springs 8 attached to the fixing member 7a are supported by the support. It engages with the three hook engaging portions 9 provided on the holder substrate 6b.

  Next, the vacuum container 2 is evacuated. Thereafter, the support holder 6 is rotated with respect to the evaporation source 4 by the support rotating mechanism 10, and when the vacuum container 2 reaches a vacuum degree capable of vapor deposition, the stimulable phosphor is evaporated from the heated evaporation source 4. Then, a stimulable phosphor layer is grown on the surface of the support 5 to a desired thickness. This stimulable phosphor layer 12 is formed to a thickness of 10 to 1000 μm, preferably 10 μm to 500 μm.

  According to the radiographic image conversion panel manufacturing apparatus 1 or manufacturing method described above, the support 5 is in close contact with the support holder convex portion 6a while being pulled by the fixing members 7a and 7b. Adhesion with the holder 6 is enhanced. Furthermore, since the spring 8 is interposed and fixed, the support body 5 is attached in a state of being biased in the direction of the support body holder 6, and the tension is variable. Therefore, even when the support 5 has a high thermal expansion coefficient and the support 5 is expanded by the heat of vapor deposition of the stimulable phosphor, the tension of the support 5 is always within a certain range, and the support 5 and the support holder 6 The adhesion of is kept reinforced.

  Therefore, even when the photostimulable phosphor is deposited on the support 5 and the temperature of the support 5 is increased, the entire temperature of the support 5 can always be within a predetermined range. Since the luminance distribution can be controlled by controlling the generation of, the sensitivity of the radiation image conversion panel can be made uniform.

  As described above, according to the present invention, the entire temperature of the support 5 can be kept uniform, so that the brightness distribution can be easily controlled, and the photostimulability is less likely to cause film peeling and non-uniform sensitivity. A phosphor layer can be formed. As a result, it is possible to obtain an effect that a good radiation image conversion panel having high sensitivity, uniformity and excellent durability can be manufactured.

  In particular, in the present invention, a remarkable effect can be obtained when a polymer material such as a resin or a thin metal sheet such as an aluminum sheet, an iron sheet, or a copper sheet is used as the support 5.

  EXAMPLES Hereinafter, although an Example is given and this invention is demonstrated concretely, the embodiment of this invention is not limited to this.

[Example 1]
Fixing the fixing member with a screw near one side of the support holder convex portion of the support holder substrate with one end of the 0.5 mm thick support pinched by the fixing member near the upper surface inside the vacuum vessel did. Next, in a state where the support is in contact with the curved surface of the support holder convex portion, the other end side of the support is sandwiched by the fixing member, and three springs attached to the fixing member are provided on the support holder substrate. The support was fixed to the support holder in a state where tension was applied to the support by engaging with the three hook engaging portions.
Next, a photostimulable phosphor (CsBr: 0.0001Eu) as an evaporation source was filled in a resistance heating tungsten boat and placed near the bottom surface inside the vacuum vessel.
Subsequently, the vacuum vessel was once evacuated and Ar gas was introduced to adjust the degree of vacuum to 0.1 Pa. And the temperature of the support body was adjusted to 100 degreeC with the heater installed in the support body holder. Thereafter, the tungsten boat was heated to evaporate the evaporation source. When the film thickness reached 500 μm, the deposition was finished. Next, this stimulable phosphor was heat-treated (annealed) at 150 ° C. to produce a radiation image conversion panel.

[Example 2]
A radiation image conversion panel was obtained by setting the thickness of the support of Example 1 to 0.2 mm.

[Example 3]
A radiation image conversion panel was obtained using polycarbonate as the material of the support of Example 1.

[Example 4]
A radiation image conversion panel was obtained by setting the thickness of the support of Example 1 to 0.2 mm and using PET as the material.

[Comparative Example 1]
The support of Example 1 was fixed to a support holder in a state where no tension was applied to obtain a radiation image conversion panel.

[Comparative Example 2]
The support of Example 2 was fixed to a support holder in a state where no tension was applied to obtain a radiation image conversion panel.

[Comparative Example 3]
The support of Example 3 was fixed to a support holder in a state where no tension was applied to obtain a radiation image conversion panel.

[Comparative Example 4]
The support of Example 4 was fixed to a support holder in a state where no tension was applied to obtain a radiation image conversion panel.

  And the following evaluation was performed about the radiographic image conversion panel obtained as mentioned above.

<Luminance distribution evaluation>
The radiation image conversion panel is uniformly irradiated with X-rays having a tube voltage of 80 kVp from the side of the support opposite to the photostimulable phosphor layer, and then the radiation image conversion panel is scanned with He-Ne laser light (633 nm) for excitation. Then, at 25 measurement points arranged at equal intervals on the radiation image conversion panel, the photostimulated luminescence emitted from the photostimulable phosphor layer is received by a light receiver (photomultiplier tube having a spectral sensitivity of S-5). The intensity was measured, and the sensitivity unevenness was evaluated from the variation in intensity between the measurement points. Sensitivity unevenness is obtained by dividing the width of the maximum value and the minimum value at each measurement point of each panel by the average value of the intensities at 25 measurement points, and expressing this in%. The evaluation results are shown in Table 1.

<Adhesiveness>
Adhesive tape was applied to the surface of the photostimulable phosphor layer of the radiation image conversion panel, and the area where the photostimulable phosphor layer was attached to the support when the tape was peeled off was measured. Adhesion was evaluated. The evaluation results are shown in Table 1.

(Circle): The area of the photostimulable fluorescent substance layer adhering to the support body 5 is 60% or more.
X: The area of the photostimulable phosphor layer adhering to the support 5 is less than 60%.

  As described above, as apparent from the results of Table 1, in Examples 1 to 4 in which the support was fixed to the support holder in a tensioned state, the area of the photostimulable phosphor layer attached to the support. Is over 60%. On the other hand, in Comparative Examples 1 to 4 in which the support is fixed to the support holder in a state where no tension is applied, the area of the stimulable phosphor layer attached to the support is less than 60%. From this result, it can be seen that when vapor deposition is performed with the support fixed with tension, the temperature of the entire support is kept uniform during the vapor deposition process, and the adherence of the photostimulable phosphor layer is improved. .

  And in Example 1- Example 4, it turns out that the value of luminance distribution is low compared with Comparative Example 1- Comparative Example 4. That is, as a result of improving the adherence of the photostimulable phosphor layer, it can be seen that the variation in the intensity of the photostimulated luminescence is reduced and the sensitivity unevenness of the radiation image conversion panel is reduced.

Moreover, it turns out that the same effect is acquired from Example 1- Example 4, even when the material of a support body differs.
However, as can be seen from Examples 1 and 2 and Examples 3 and 4, since the thermal conductivity is high when the material of the support is metal, it is easier to control the temperature of the support, By keeping the temperature constant, the luminance distribution can be further reduced.

  Further, as can be seen from Examples 1 and 3 and Examples 2 and 4, the brightness distribution is suppressed lower when the thickness of the support is 0.5 mm than when 0.2 mm, and the support is somewhat rigid. It can be seen that close contact with the support holder is more easily obtained, and on the other hand, if the thickness is too thin, it is difficult to uniformly contact the support holder.

  As described above, by performing vapor deposition while applying tension to the support and fixing it to the support holder, a radiation image conversion panel with excellent adhesion of the stimulable phosphor layer to the support and less sensitivity unevenness is obtained. be able to.

It is sectional drawing which shows the manufacturing apparatus of the radiographic image conversion panel of this invention. It is a top view which shows the state which fixed the support body to the support body holder with the fixing member of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Radiation image conversion panel manufacturing apparatus 2 Vacuum container 3 Vacuum pump 4 Evaporation source 5 Support body 6 Support body holder 6a Support body holder convex part 6b Support body holder substrate 7a, 7b Fixing member 8 Spring 9 Hook engagement part 10 Support body Rotating mechanism 10a Rotating shaft

Claims (4)

A vacuum vessel;
An evaporation source provided in the vacuum vessel and for depositing a stimulable phosphor on a support;
A support holder having a curved surface facing the evaporation source and having a predetermined radius of curvature;
A support rotating mechanism for depositing a stimulable phosphor from the evaporation source on the support by rotating the support holder with respect to the evaporation source;
A fixing member that clamps both ends of the support and fixes the support to the support holder in a state in which tension is applied;
An apparatus for manufacturing a radiation image conversion panel.   The radiation image conversion panel according to claim 1, wherein the fixing member is attached with a spring that expands and contracts when the support body expands due to a temperature change and applies tension to the support body. Manufacturing equipment. In the vacuum vessel, sandwiching both ends of the support by the fixing members;
Of the support holder provided above the inside of the vacuum vessel, the step of contacting the support to a curved surface facing the bottom side in the vacuum vessel and having a predetermined radius of curvature;
Fixing the support to the support holder in a state where tension is applied by the fixing member;
Forming a stimulable phosphor layer by vapor-depositing a stimulable phosphor evaporating from an evaporation source provided at the bottom of the vacuum vessel on the support;
A method for producing a radiation image conversion panel.   The step of fixing the support to the support holder in a state where tension is applied to the support by the fixing member, expands and contracts when the support expands due to a temperature change, and applies tension to the support. The manufacturing method of the radiographic image conversion panel of Claim 3 including the process of attaching the spring to perform.

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