JP2006030067A - Glass plate defect inspection method and apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and device for inspecting a defect of a glass plate capable of certainly detecting a defect that can be detected by image pickup by reflected and scattered light but cannot be detected by image pickup by transmitted and scattered light. <P>SOLUTION: A defect inspecting device 10 inspects the defect based on red reflected and scattered light reflected by the upper face 12B of a glass substrate 12, blue reflected and scattered light reflected by the lower face 12C of the glass substrate 12, and green reflected and scattered light reflected by an end face 12A of the glass substrate 12. The transmitted and scattered light is cut by a B band cut filter 28 and an R band cut filter 30 and a defect is inspected, so that even the defect that can be detected by image pickup by reflected and scattered light but cannot be detected by image pickup by transmitted and scattered light can be detected certainly. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a glass plate defect inspection method and apparatus for detecting defects such as chipping, scratches such as chipping, and chamfering at the end surface of the glass plate and in the vicinity thereof, that is, the periphery (near the edge) of the glass plate.

  For example, for a glass substrate for display, a plate glass manufactured to a predetermined thickness (for example, about 0.5 to 2.8 mm) is cut into a size corresponding to the product, and this is chamfered or formed on the surface. The product is manufactured by polishing to remove the minute irregularities and undulations.

  Prior to shipment, a commercialized glass substrate is inspected by a defect inspection device for defects such as chipping and chipping generated on the end surface and in the vicinity thereof, and defects such as unchamfered (for example, Patent Documents). 1).

  Here, the above-mentioned defects will be explained. As shown in FIG. 5, the chipping 1 is a minimal chip occurring at the boundary 2D between the upper surface 2B and the end 2A of the glass substrate 2, and the hammer chip 3 is an end from the upper surface 2B. This is a relatively large chip generated over the portion 2A. Further, the end portion 2A may have a non-chamfered portion 4 due to wear of a chamfering grindstone or the like, which is also judged as a defect. A predetermined threshold value is set according to the size of these defects, and when the threshold value is exceeded, the glass plate is treated as a defective product.

  In addition, the inspection of the defects related to the glass plate is not limited to the glass substrate for display, but is also performed on a glass plate used for other uses such as an architectural glass plate and an automotive glass plate.

By the way, the defect inspection apparatus disclosed in Patent Document 1 irradiates an end portion of the glass substrate and its vicinity by spot illumination, for example, and images the upper surface side of the glass substrate with a camera via a prism, and the lower surface of the glass substrate. The side is imaged by the same camera via another prism (paragraph [0017] of Patent Document 1). Then, the obtained image is processed, the presence or absence of a defect is detected, the size and the like are compared with a predetermined threshold value, and good or bad is discriminated.
JP 2002-62267 A

  By the way, in the defect inspection apparatus of the glass plate using light like patent document 1, when imaging the upper surface of a glass plate with a camera, for example, it is irradiated from the reflected scattered light of the illumination irradiated from the upper surface side, and the lower surface side. And transmitted scattered light of the illumination. The brightness of the reflected scattered light at this time is usually 10 to 20% of the brightness of the transmitted scattered light, and the transmitted scattered light is overwhelmingly brighter.

  Here, a defect occurring on the upper surface of the glass plate can be detected by imaging with reflected scattered light, but cannot be detected by imaging with transmitted scattered light (for example, a transparent shallow shallow chipping has occurred). In the case of the defect inspection apparatus of Cited Document 1, the reflected and scattered light due to the defect generated on the upper surface side is imaged by being superimposed on the transmitted and scattered light brighter than the light, and the SN ratio is deteriorated. There was a problem that the defect could not be detected.

  The present invention has been made in view of such circumstances, and is a glass plate that can reliably detect defects occurring in the end surface of the glass plate and in the vicinity thereof, that is, in the peripheral portion of the glass plate (near the edge). An object of the present invention is to provide a defect inspection method and apparatus.

  In order to achieve the above object, the invention according to claim 1 irradiates one of the three primary colors with one primary color light toward one surface of the glass plate and the primary color toward the other surface of the glass plate. A defect inspection method for inspecting a defect of a glass plate by irradiating a primary color light other than light, wherein the primary color light is irradiated with one surface of the glass plate toward the first prism and at least the other surface. The image pickup means picks up the image through the filter that cuts the second surface of the glass plate by the image pickup means through the second prism and the filter that cuts at least the primary color light emitted toward the one surface. A defect inspection method is provided, in which a defect is detected by a detection means on the one side and the other side of the glass plate based on an image picked up by the image pickup means. To.

  In order to achieve the above object, the invention according to claim 5 is a first illumination means for irradiating any one of the three primary colors of light toward one surface of the glass plate, and the other surface of the glass plate. A defect inspecting apparatus for inspecting a defect of the glass plate using a second illuminating means for irradiating a primary color light other than the primary color light toward the first surface, wherein one surface of the glass plate is formed on the first prism. And a filter that cuts at least the primary color light irradiated toward the other surface, and the other surface of the glass plate is irradiated toward the second prism and at least the one surface. An image pickup means for picking up an image through a filter for cutting the image, and a detection means for detecting defects on one side and the other face of the glass plate based on the image picked up by the image pickup means. Features To provide a defect inspection apparatus.

  According to invention of Claim 1 and 5, while irradiating any one primary color light among three primary colors toward the one surface of a glass plate from a 1st illumination means, it is glass from a 2nd illumination means. A primary color light other than the primary color light is irradiated toward the other side of the plate. Then, the one surface of the glass plate is imaged by the imaging means through the first prism and a filter that cuts at least the primary color light irradiated toward the other surface, and the other surface of the glass plate is An image is picked up by the image pickup means through a prism and a filter that cuts at least the primary color light irradiated toward the one surface. And based on the image imaged by this imaging means, the fault which exists in the one side and other side of a glass plate is detected by a detection means.

  That is, the basic idea of the present invention is to provide a filter that cuts off other primary color light in the imaging system on the side that irradiates the primary color light, and to inspect defects by using a light image obtained by cutting off the other primary color light. Yes. Therefore, the transmitted scattered light is cut by the filter, and the reflected scattered light is incident on the image pickup means, so that a defect occurring in the glass plate can be reliably detected.

  The invention according to claim 2 is the defect inspection method invention according to claim 1, in which light is irradiated toward an end of the glass plate and the end of the glass plate is imaged by the imaging means, On the basis of the image picked up by the image pickup means, a defect existing at the end of the glass plate is detected by the detection means.

  Invention of Claim 6 has 3rd illumination means to irradiate light toward the edge part of the said glass plate in invention of the defect inspection apparatus of Claim 5, and is equipped with the edge part of a glass plate. An image is picked up by the image pickup means, and a defect existing at an end of the glass plate is detected by the detection means based on an image picked up by the image pickup means.

  According to invention of Claim 2 and 6, light is irradiated toward the edge part of a glass plate from a 3rd illumination means, the edge part of a glass plate is imaged with the said imaging means, and it images with an imaging means Based on the obtained image, the detection means detects a defect existing at the end of the glass plate. The end of the glass plate can also be imaged by the same imaging means. Further, the light emitted from the third illumination means is not particularly limited because the influence of the transmitted scattered light on the imaging means is small, that is, it may be one of R, G, and B light. White light may be used.

  In order to achieve the above object, the invention according to claim 3 irradiates one of the light primary colors toward one surface of the glass plate and the primary color toward the other surface of the glass plate. A defect inspection method for inspecting defects of a glass plate by irradiating light of a primary color other than light, wherein a filter that cuts primary color light that is irradiated toward at least the other surface of one side of the glass plate Through the first imaging means, and image the second surface of the glass plate by the second imaging means through a filter that cuts at least the primary color light emitted toward the one surface. A defect inspection method for a glass plate, characterized in that a defect present on one side and the other side of the glass plate is detected by a detection unit on the basis of images picked up by the image pickup means and the second image pickup means. To provide.

  In order to achieve the above object, the invention according to claim 7 is a first illuminating means for irradiating any one of the three primary colors of light toward one surface of the glass plate, and the other surface of the glass plate. A defect inspecting apparatus for inspecting a defect of the glass plate using a second illuminating means for irradiating a primary color light other than the primary color light toward the surface, wherein one side of the glass plate is at least the other side Through a filter that cuts primary color light that is emitted toward at least one of the other surfaces of the glass plate, and a first imaging unit that captures an image through a filter that cuts primary color light emitted toward the surface. Second image pickup means for picking up images, and detection means for detecting defects on one side and the other side of the glass plate based on images picked up by the first image pickup means and the second image pickup means. With the features That provides a defect inspection apparatus for a glass plate.

  According to invention of Claim 3 and 7, while irradiating any one primary light of three primary colors from the 1st illumination means toward the one surface of a glass plate, it is glass from a 2nd illumination means. A primary color light other than the primary color light is irradiated toward the other side of the plate. And while imaging one side of a glass plate with a 1st imaging means through the filter which cuts at least the primary color light irradiated toward the said other side, the other side of a glass plate is at least said one side An image is picked up by the second image pickup means through a filter that cuts off the primary color light emitted toward. And based on the image imaged by the 1st and 2nd imaging means, the fault which exists in the one surface and the other surface of a glass plate is detected by a detection means. The invention is basically the same as that of the first and fifth aspects of the invention, but an imaging means may be provided for each imaging system as in the third and seventh aspects. When a CCD camera is applied as the image pickup means, a small and light CCD camera is commercially available at a low price. Therefore, the apparatus can be downsized and provided at a low price without increasing the size and cost of the apparatus.

  According to a fourth aspect of the present invention, in the defect inspection method of the third aspect of the present invention, light is emitted toward the end of the glass plate, and the end of the glass plate is imaged by the third imaging means. Based on the image picked up by the third image pickup means, a defect existing at the end of the glass plate is detected by the detection means.

  According to an eighth aspect of the present invention, in the defect inspection apparatus according to the seventh aspect, the third illuminating means for irradiating light toward the end of the glass plate and the end of the glass plate are imaged. And a third imaging unit, wherein the detection unit detects a defect existing at an end of the glass plate based on an image captured by the third imaging unit.

  According to invention of Claim 4 and 8, light is irradiated toward the edge part of a glass plate from a 3rd illumination means, and the edge part of a glass plate is imaged by a 3rd imaging means, and it images. Based on the obtained image, the detection means detects a defect existing at the end of the glass plate. Basically, it is the same as the inventions described in claims 2 and 6, but third image pickup means for picking up an end portion as in claims 4 and 8 may be provided individually.

  As described above, according to the glass plate defect inspection method and apparatus according to the present invention, the first illumination means irradiates one of the three primary colors with one primary color light toward one surface of the glass plate. The primary illumination light other than the primary color light is irradiated from the second illumination means toward the other surface of the glass plate, and one surface of the glass plate is irradiated toward the first prism and at least the other surface. The image is picked up by the imaging means through a filter that cuts the primary color light, and the other surface of the glass plate is passed through the second prism and the filter that cuts the primary color light irradiated toward at least the one surface. Defects occurring in the glass plate because the detection means detects defects on one side and the other side of the glass plate based on the image taken by the imaging means and based on the image taken by the imaging means. It can be reliably detected.

  Hereinafter, preferred embodiments of a glass plate defect inspection method and apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

  The defect inspection apparatus 10 shown in FIG. 1 is an apparatus for inspecting defects (see FIG. 5) occurring on the end surface of the glass substrate 12 for liquid crystal display and the vicinity thereof, that is, the peripheral portion (near the edge) of the glass substrate 12. The principal part perspective view is shown. FIG. 2 is a side view of the defect inspection apparatus 10 shown in FIG. 1, and arrows in the figure indicate the light irradiation direction and the reflection direction. The defect inspection apparatus 10 is disposed adjacent to a conveyance apparatus (not shown) that conveys the glass substrate 12, and the defect inspection apparatus 10 detects the defect of the glass substrate 12 during conveyance.

  As shown in FIG. 1, the defect inspection apparatus 10 mainly includes a first prism 14, a second prism 16, a CCD camera (corresponding to an imaging means) 18, and an image processing apparatus (corresponding to a detection means) 20. The prism 14 is disposed to face the upper surface (corresponding to one surface) 12B of the glass substrate 12, and the second prism 16 is disposed to face the lower surface (corresponding to the other surface) 12C of the glass substrate 12. In addition, the said upper surface and lower surface of the glass substrate 12 demonstrated here are surfaces of the edge part 12A vicinity of the glass substrate 12. FIG.

  The first and second prisms 14 and 16 are prisms having the same shape on which the incident surfaces 14A and 16A, the reflecting surfaces 14B and 16B, and the emitting surfaces 14C and 16C are formed. According to the first and second prisms 14 and 16, as shown in FIG. 2, the light beam incident from the incident surfaces 14A and 16A is totally reflected by the reflecting surfaces 14B and 16B and converted in the direction of 90 °, and the emitting surface 14C. , 16C to the outside. The first and second prisms 14 and 16 are arranged so that the incident surfaces 14A and 16A face each other with the glass substrate 12 interposed therebetween, and the emission surfaces 14C and 16C are located on the same plane. Has been placed.

  The CCD camera 18 is arranged to face the end 12A so as to directly image the end 12A of the glass substrate 12 sandwiched between the first prism 14 and the second prism 16. The CCD camera 18 is disposed at a position for imaging the light flux emitted from the emission surface 14C of the first prism 14, and at a position for imaging the light flux emitted from the emission surface 16C of the second prism 16. Has been placed. Thereby, the camera 18 can simultaneously image the end portion 12A, the upper surface 12B, and the lower surface 12C, which are the inspection site 13 of the glass substrate 12, as shown in FIG.

  On the other hand, the defect inspection apparatus 10 is provided with a number of illumination means for illuminating the inspection site 13.

  These illumination means include LEDs 22 and 22 that emit red primary color light R toward the upper surface 12B of the glass substrate 12, and LEDs 24 and 24 that emit blue primary color light B toward the lower surface 12C of the glass substrate 12, It is comprised from LED26 which irradiates green G primary color light toward the edge part 12A of the glass substrate 12. FIG.

  The LEDs 22 and 22 are arranged at positions to irradiate the upper surface 12B of the glass substrate 12 via the first prism 14, and the LEDs 24 and 24 similarly irradiate the upper surface 12B of the glass substrate 12 via the second prism 16. It is arranged at the position to do. In this way, by irradiating the upper surface 12B or the lower surface 12C with two or more LEDs, respectively, the received light amount distribution of the reflected scattered light reflected by the upper surface 12B and the lower surface 12C can be changed over the entire region of the examination region 13. In this case, the inspection accuracy can be improved.

  In addition, a B-band cut filter 28 is disposed so as to face the emission surface 14 </ b> C of the first prism 14. The B-band cut filter 28 is a filter that cuts blue light, whereby blue light out of the light emitted from the emission surface 14C of the first prism 14 is cut by the B-band cut filter 28, and the other light. Is imaged by the CCD camera 18. That is, the transmitted scattered light emitted from the blue LEDs 24 and 24 and transmitted through the glass substrate 12 is not picked up by the CCD camera 18 because it is cut by the B-band cut filter 28.

  Similarly, an R band cut filter 30 is disposed so as to face the emission surface 16 </ b> C of the second prism 16. The R-band cut filter 30 is a filter that cuts red light. As a result, red light out of the light emitted from the emission surface 16C of the second prism 16 is cut by the R-band cut filter 30, and the other light. Is imaged by the CCD camera 18. That is, the transmitted scattered light emitted from the red LEDs 22 and 22 and transmitted through the glass substrate 12 is not picked up by the CCD camera 18 because it is cut by the R-band cut filter 30.

  The green light emitted from the LED 26 is reflected by the end 12 </ b> A of the glass substrate 12, and the reflected scattered light is directly imaged by the CCD camera 18. Thereby, the CCD camera 18 reflects the red reflected / scattered light reflected by the upper surface 12B of the glass substrate 12, the blue reflected / scattered light reflected by the lower surface 12C of the glass substrate 12, and the green reflected by the end 12A of the glass substrate 12. The reflected and scattered light is simultaneously imaged.

  The camera 18 includes a photographic lens 32 and a camera body 34. A CCD area sensor 36 indicated by a broken line in FIG. 2 is arranged in the camera main body 34, and a light receiving surface of the CCD area sensor 36 is installed at an imaging position of the photographing lens 32. The video signal output from the CCD area sensor 36 is output to the image processing device 20 of FIG.

  The image processing apparatus 20 acquires a feature amount such as a bright area, a dark area, or a total area from the video signal output from the CCD sensor 36. Then, the image processing device 20 compares the feature amount with the respective threshold values stored in the memory 38, and controls the automatic determination device 40 when the feature amount exceeds the threshold value, and the glass substrate. 12 is identified as a defective product. Note that it may be determined that a defect exists when the level of the video signal exceeds a predetermined threshold.

  Next, the operation of the defect inspection apparatus 10 configured as described above will be described.

  While operating the defect inspection apparatus 10 in the state of FIG. 1, the LEDs 22, 24, and 26 are turned on to illuminate the inspection site 13 of the glass substrate 12. Then, the glass substrate 12 is transported at a predetermined speed by a transport device (not shown) in the direction of the arrow in FIG. 1, and the defect inspection of the glass substrate 12 is started.

  At the time of defect inspection, the CCD camera 18 reflects red reflected / scattered light reflected by the upper surface 12B of the glass substrate 12, blue reflected / scattered light reflected by the lower surface 12C of the glass substrate 12, and reflected by the end 12A of the glass substrate 12. The reflected green scattered light is imaged simultaneously. FIG. 3 shows an image of the glass substrate 12 picked up by the CCD camera 18.

  When the video signal output from the CCD sensor 36 of the camera 18 is output to the image processing device 20, the image processing device 20 acquires a feature amount such as a bright area from the video signal. Then, the image processing apparatus 20 compares the feature amount with each threshold value stored in the memory 38. And when a feature-value exceeds a threshold value, the automatic discrimination device 40 is controlled and the glass substrate 12 is discriminated as a defective product.

  As described above, the defect inspection apparatus 10 according to the embodiment includes the red reflected / scattered light reflected by the upper surface 12B of the glass substrate 12, the blue reflected / scattered light reflected by the lower surface 12C of the glass substrate 12, and the end of the glass substrate 12. Based on the green reflected scattered light reflected by 12A, that is, the transmitted scattered light is cut by the B-band cut filter 28 and the R-band cut filter 30, and the defect is inspected. Therefore, it can be detected by imaging with the reflected scattered light. However, even a defect that cannot be detected by imaging with transmitted scattered light (for example, transparent and shallow chipping) can be reliably detected.

  In the embodiment, the upper surface 12B is irradiated with red light and the lower surface 12C is irradiated with blue light. However, the present invention is not limited to this. In short, the present invention has a basic idea of providing a filter for cutting off the other primary color light in the imaging system on the side for irradiating the primary color light, and inspecting the defect with the light image obtained by cutting off the other primary color light. . Therefore, the upper surface 12B may be irradiated with, for example, blue light, and the lower surface 12C may be irradiated with red light. In this case, the R band cut filter 30 is disposed on the upper surface 12B side, and the B band cut filter is disposed on the lower surface 12C side. 28 may be arranged. Moreover, although LED which irradiates green light was applied as LED26 which is a 3rd illumination means, since this light has the influence of the transmitted scattered light with respect to CCD camera 18, it is not specifically limited. That is, it may be one of R, G, B light or white light like a fluorescent lamp.

  Furthermore, in the embodiment, the illumination light from the LEDs 22 and 24 is irradiated to the examination site 13 via the first prism 14 and the second prism 16, but the present invention is not limited to this, and the first prism 14, The inspection site 13 may be directly irradiated without passing through the second prism. Further, the illumination means is not limited to the LED, and a light guide cable is extended from a primary color light source provided separately from the defect inspection apparatus 10, and an inspection site is formed from the light emitting end of the light guide cable. 13 may be irradiated with primary color light.

  FIG. 4 is a side view showing the configuration of the defect inspection apparatus 50 according to another embodiment. The same or similar members as those in the defect inspection apparatus 10 shown in FIG. Omitted.

  The defect inspection apparatus 50 of FIG. 4 is provided with CCD cameras 52, 54, and 56 for each imaging system without using a prism. These CCD cameras 52, 54, and 56 are shown in FIG. A CCD camera equipped with an area sensor or line sensor having a smaller number of pixels than the CCD camera 18 is applied.

  According to this defect inspection apparatus 50, in the CCD camera 52 that images the upper surface 12 </ b> B of the glass substrate 12, the blue light (blue transmitted scattered light) from the LED 24 is cut by the B-band cut filter 28. The red reflected / scattered light reflected by the upper surface 12B is imaged. Further, in the CCD camera 54 that images the lower surface 12C of the glass substrate 12, the red light (red transmitted scattered light) from the LED 22 is cut by the R-band cut filter 30, so that the blue light reflected by the lower surface 12C of the glass substrate 12 is reflected. The reflected and scattered light is imaged. The CCD camera 56 images the green reflected / scattered light reflected by the end 12A of the glass substrate 12. The image processing apparatus 20 (see FIG. 1) detects a defect (see FIG. 5) occurring in the glass substrate 12 based on video signals output from the CCD cameras 52, 54, and 56. Since this detection method has been described above, a description thereof will be omitted.

  As described above, even if the CCD cameras 52, 54, and 56 are provided for each imaging system without using a prism, the defects occurring in the glass substrate 12 can be reliably detected as in the defect inspection apparatus 10 of FIG. it can.

  JP-A-4-37711 discloses a method for inspecting a color liquid crystal display panel. This inspection method uses a filter that selectively extracts primary colors corresponding to each color of a color filter from a white light source on a glass substrate on which a color filter for color display is built, and through this filter This is a method of inspecting the presence or absence of defects in the color filter for each color by irradiating the color filters with each primary color light. This inspection method is similar to the present invention in that the primary color light is used as the inspection light. However, the present invention provides a filter for cutting off the other primary color light in the imaging system that irradiates the primary color light. The basic idea is to inspect defects by using a light image obtained by cutting other primary color lights. Therefore, the inspection method is fundamentally different between the present invention and the inspection method disclosed in Japanese Patent Laid-Open No. 4-37711.

  FIG. 1 of Japanese Patent Laying-Open No. 2003-148927 discloses a three-dimensional shape inspection apparatus using an active sensing method. In this inspection apparatus, a ring-shaped light emitter that projects light of different wavelengths (red light, green light, and blue light) to an inspection object and reflected light of the light reflected from the inspection object are incident. A color CCD camera. When light of different wavelengths is projected onto the inspection object 4 by changing the irradiation angle, the inspection object viewed from the color CCD camera appears colored in different colors depending on the shape of the surface. By analyzing the coloring pattern of the image, the uneven state of the inspection object is determined. This inspection method is similar to the present invention in that the primary color light is used as the inspection light. However, the present invention provides a filter for cutting off the other primary color light in the imaging system that irradiates the primary color light. The basic idea is to inspect defects by using a light image obtained by cutting other primary color lights. Therefore, the present invention and Japanese Patent Laid-Open No. 2003-148927 are completely different in the inspection method.

The enlarged perspective view of the fault inspection apparatus concerning an embodiment of the invention Side view of the defect inspection apparatus shown in FIG. Explanatory drawing which shows the image imaged with the CCD camera of the defect inspection apparatus shown in FIG. Side view of defect inspection apparatus according to another embodiment of the present invention. Schematic diagram for explaining the defects that occur in glass plates

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10, 50 ... Defect inspection apparatus, 12 ... Glass substrate, 12A ... End part of glass substrate, 12B ... Upper surface of glass substrate, 12C ... Lower surface of glass substrate, 13 ... Inspection part, 14 ... First prism, 16 ... Second Prism, 18, 52, 54, 56 ... CCD camera, 20 ... Image processing device, 22, 24, 26 ... LED, 28 ... B band cut filter, 30 ... R band cut filter, 32 ... Shooting lens, 34 ... Camera body 36 ... CCD area sensor, 38 ... Memory, 40 ... Automatic discrimination device

Claims (8)

Irradiate one primary color light among the three primary colors toward one side of the glass plate, and irradiate other primary color light other than the primary color light toward the other side of the glass plate to inspect defects in the glass plate. A defect inspection method to be performed,
The one side of the glass plate is imaged by the imaging means through the first prism and a filter that cuts at least the primary color light irradiated toward the other side, and the other side of the glass plate is Imaging by the imaging means through a prism and a filter that cuts at least the primary color light irradiated toward the one surface,
A defect inspection method for a glass plate, wherein a defect present on one side and the other side of the glass plate is detected by a detection unit based on an image picked up by the image pickup unit.   Irradiating light toward the end of the glass plate to image the end of the glass plate by the imaging means, and based on the image taken by the imaging means, the defects present at the end of the glass plate 2. The defect inspection method for a glass plate according to claim 1, wherein the detection is performed by a detecting means. Irradiate one primary color light among the three primary colors toward one side of the glass plate, and irradiate other primary color light other than the primary color light toward the other side of the glass plate to inspect defects in the glass plate. A defect inspection method to be performed,
The one surface of the glass plate is imaged by the first imaging means through a filter that cuts at least the primary color light irradiated toward the other surface, and the other surface of the glass plate is directed to at least the one surface. Imaged by the second imaging means through a filter that cuts the primary color light irradiated
A defect inspection of a glass plate, wherein a defect existing on one side and the other side of the glass plate is detected by a detection unit on the basis of images picked up by the first image pickup unit and the second image pickup unit. Method.   Light is emitted toward the end of the glass plate, and the end of the glass plate is picked up by the third image pickup means. Based on the image picked up by the third image pickup means, the light is present at the end of the glass plate. 4. The defect inspection method for a glass sheet according to claim 3, wherein the defect to be detected is detected by the detection means. A first illuminating means for irradiating one of the three primary colors of light toward one surface of the glass plate, and a second irradiating the other primary color light other than the primary color light toward the other surface of the glass plate. A defect inspection apparatus for inspecting a defect of a glass plate using the illumination means of
One side of the glass plate is imaged through a first prism and a filter that cuts at least the primary color light irradiated toward the other side, and the other side of the glass plate is taken as a second prism. Imaging means for imaging through at least a filter that cuts primary color light irradiated toward the one surface;
Detection means for detecting defects on one side and the other side of the glass plate based on the image taken by the imaging means;
A defect inspection apparatus for glass plates, comprising:   Third illumination means for irradiating light toward the edge of the glass plate, the edge of the glass plate is imaged by the imaging means, and based on the image taken by the imaging means, the edge of the glass plate 6. The apparatus for inspecting a defect of a glass plate according to claim 5, wherein a defect present in the part is detected by the detection means. A first illuminating means for irradiating one of the three primary colors of light toward one surface of the glass plate, and a second irradiating the other primary color light other than the primary color light toward the other surface of the glass plate. A defect inspection apparatus for inspecting a defect of a glass plate using the illumination means of
First imaging means for imaging one surface of the glass plate through a filter that cuts at least primary color light irradiated toward the other surface;
A second imaging means for imaging the other surface of the glass plate through a filter that cuts at least the primary color light emitted toward the one surface;
Detection means for detecting defects on one side of the glass plate and the other side based on images taken by the first imaging means and the second imaging means;
A defect inspection apparatus for glass plates, comprising:   Based on an image captured by the third imaging means, having third illumination means for irradiating light toward the edge of the glass plate and third imaging means for imaging the edge of the glass plate The glass plate defect inspection device according to claim 7, wherein a defect existing at an end of the glass plate is detected by the detection means.

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