JP2006010088A - Rocking vibration control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To control the hard-to-predict rocking vibration with a simple constitution in a rocking vibration control device. <P>SOLUTION: A plurality of plate spring members 5 - 8 are mounted between a base-isolated object 20 and a base part 21 in such manner that they are respectively fastened to the base-isolated object 20 and the base part 21 for converting the vertical relative displacement of the base-isolated object 20 and the base part 21 transmitted from the fastening parts into the horizontal displacement, and a connecting member 4 is mounted in a state of being connected with each of the plate spring members 5 - 8 for transmitting the horizontal displacement obtained from the specific plate spring members 5, 6 to the other plate spring members 7, 8. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a rocking vibration control device, and is suitable for application to, for example, a vibration isolation device used in a manufacturing facility for manufacturing precision equipment.

  Conventionally, in precision equipment manufacturing equipment, an external vibration isolation device is interposed between a base such as a floor slab or foundation and an isolation object such as an upper floor on which the devices and the devices are placed. Is prevented from propagating to the object to be isolated.

  For example, in an integrated circuit manufacturing facility, a single crystal of silicon is grown and formed into a cylindrical shape by a pulling method (CZ method), and a wafer serving as a substrate is obtained by slicing it into a disk shape. In such a silicon wafer, the flatness of the surface and the uniformity of the specific resistance are important. However, when vibration is applied during the growth process of the silicon single crystal, the growth formation becomes non-uniform. Examples of such vibrations include traffic vibrations from surrounding areas and so-called daily vibrations caused by movement of people around the device. Such traffic vibrations and daily life vibrations are minute vibrations, but even such minute vibrations are a significant hindrance to the uniform growth of silicon single crystals. Therefore, in such a manufacturing facility, as described above, a vibration isolator is interposed between the base and the vibration isolation object so as to suppress vibration.

  The vibration isolator has a configuration in which an elastic body is provided between the upper floor on which the object to be isolated is placed and the base, and the upper floor is used as a vibration isolation table, and the vibration isolation support is supported in the vertical direction by the elastic body. By absorbing vibration energy, vibration propagating from the outside is suppressed. In a vibration isolator in a precision equipment manufacturing facility, for example, an air spring or the like is used as an elastic body from the viewpoint of suppressing the absorption of minute vibrations. Usually, a plurality of such elastic bodies are provided and vibration energy is dispersed and absorbed by each elastic body, thereby further improving the vibration suppressing effect.

  By the way, in the vibration isolator having such a configuration, the load applied to each elastic body due to vibration is not necessarily uniform, and it is difficult to completely equalize the vibration isolation performance of each elastic body, and the rocking rotation Vibration may occur.

  For example, when variation occurs in the vibration load applied to each elastic body constituting the vibration isolation table, or when an uneven load is generated on the vibration isolation table, the amount of expansion / contraction displacement of the elastic body due to the load is limited to a specific elastic body. The vibration isolator is tilted. As a result, a rotational moment due to the tilt is generated in the vibration isolation object on the vibration isolation table. For this reason, there is a need to take measures against such rocking rotational vibration.

  First, there is a method of lowering the center of gravity of the object to be isolated on the vibration isolation table by adding additional weight to the lower part of the vibration isolation table or expanding the width of the equipment itself to lower the relative height. . However, with such a technique, there is a problem that it is difficult to completely prevent the occurrence of the inclination, only by suppressing the inclination of the vibration isolation table caused by the rocking rotational vibration to some extent.

  Second, there is a technique for suppressing rocking rotational vibration by arranging a damping device such as a damper in parallel with the elastic body between the base portion and the upper floor. However, with this method, for example, when the damping coefficient of the damping device is low, the rocking rotational vibration cannot be sufficiently suppressed. When the coefficient is high, the effect of suppressing the rocking rotational vibration is obtained, but the vertical movement of the elastic body is also suppressed, and the effect of suppressing the vibration by the vibration isolator is reduced. Therefore, a delicate setting is required for the coefficient, and there is a problem that it is difficult to set an optimal coefficient.

  Third, there is a method of actively suppressing rocking rotational vibration. This is to provide a sensor and a drive device, and when a load that tilts the vibration isolation table occurs due to rocking rotation vibration, this is detected by the sensor and a load is applied in the reverse direction by the drive device to dissipate the vibration energy. As a result, the inclination angle of the vibration isolation table is maintained at zero. However, this method has a problem that, when an instantaneous inclination occurs, it lacks responsiveness to it and the configuration becomes complicated.

  As described above, countermeasures against rocking rotational vibrations in the vibration isolator need detailed examination from the design stage regarding the expected amount of rocking vibrations, amount of overturning moments, etc. Due to the existence of uncertain factors, it is difficult to make a complete prediction, and there is a problem that the effect of suppressing rocking rotation vibration is limited. In some cases, the vibration isolation in the vertical direction, which is the cause of rocking rotational vibration, was abandoned.

  The present invention has been made in consideration of the above points, and an object of the present invention is to propose a rocking vibration control device capable of removing rocking rotation vibration that is difficult to predict with a simple configuration.

  In order to solve such a problem, in the present invention, a displacement for converting the relative displacement in the vertical direction of the vibration isolation object and the base portion, which are respectively solidified to the vibration isolation object and the base portion and transmitted from the solidification portion, into a horizontal displacement. Displacement transmitting means for disposing a plurality of converting means between the object to be isolated and the base, and for solidly connecting the displacement converting means to each other and mutually connecting the horizontal displacement between the displacement converting means. Is provided.

  When a vibration load is applied between the base and the vibration isolation object due to the input vibration, each displacement converting means consolidated with the base and the vibration isolation object causes the vertical relative displacement between the base and the vibration isolation object. The generated vertical vibration load is converted into a horizontal vibration load corresponding to the generated vertical vibration load and transmitted to the displacement transmitting means. Since the displacement transmitting means connects the displacement converting means to each other, such a horizontal vibration load is transmitted between the displacement converting means. In each displacement conversion means, the mutually transmitted horizontal vibration load is converted into a vertical vibration load. That is, it is possible to uniformly level by converting the vertical vibration load with variation causing the rocking vibration into the horizontal vibration load, and transmitting it between the displacement conversion means via this displacement transmission means, At the consolidation positions of the bases of all the displacement converting means and the object to be vibration-isolated, an equal amount of vertical vibration load can be averaged. In particular, since the displacement converting means is solidified with the base and the object to be isolated, and the displacement converting means and the displacement transmitting means are solidified, there is no play in the structure and there is no play against the input vibration. Can respond instantly.

Further, in the present invention, as the displacement converting means, a pair of diagonal members disposed at positions where the one end is fixed to the vibration isolation object and the base and overlapped vertically are provided, and the other ends of the diagonal members are fixed to each other. .
When the relative displacement in the vertical direction is caused by the input vibration, the diagonal member is displaced in the horizontal direction by changing the inclination angle with respect to the solidified portion at the other end, and the one end is at the object to be isolated and the base portion, respectively. Since it is solidified, a tensile force or a compressive force corresponding to such horizontal displacement can be applied to the displacement transmitting means solidified at the other end.

In the present invention, the diagonal member is a spring that is elastically restored.
The diagonal member can convert the vertical vibration load into a horizontal vibration load, absorbs the vertical vibration energy to be propagated from the base portion to the vibration isolation object by elastic force, Propagation of vibration can be suppressed.

In the present invention, the vertical elastic support means is disposed in parallel with the displacement conversion means between the vibration isolation object and the base.
The vertical elastic support means can absorb the vertical vibration energy to be propagated from the base to the vibration isolation object, and suppress the propagation of the vertical vibration to the vibration isolation object.

In the present invention, the horizontal direction vibration isolation means is disposed in series with the displacement conversion means between the vibration isolation object and the base.
The horizontal direction vibration isolating means can absorb the horizontal vibration energy to be propagated from the base to the vibration isolation object, and suppress the propagation of the horizontal vibration to the vibration isolation object.

In the present invention, the free ends of the horizontal direction vibration isolation means are connected to each other.
The free ends of the horizontal direction isolation means are connected to each other so that the behavior of the individual free ends can be regulated between each other, and each horizontal direction isolation means tilts locally and sinks locally. As a result, even when an eccentric load acts on the object to be isolated, the inclination can be reliably prevented.

  As described above, according to the present invention, the displacement conversion is performed by converting the relative displacement in the vertical direction of the vibration isolation object and the base, respectively, which is solidified to the vibration isolation object and the base and transmitted from the consolidation part into the horizontal displacement. Displacement transmitting means for disposing a plurality of means between the object to be isolated and the base, and connecting and connecting the displacement converting means to each other, and transmitting the displacement in the horizontal direction between the displacement converting means. As a result, when a vibration load that causes a vertical relative displacement between the base and the vibration isolation object is applied by the input vibration, each displacement conversion means solidified with the base and the vibration isolation object is moved in the vertical direction. The vibration load is converted into a horizontal vibration load in accordance with this and transmitted to the displacement transmission means. Since the displacement transmission means interconnects the respective displacement conversion means, the horizontal vibration load is exchanged between the displacement conversion means. Each displacement change The horizontal vibration load transmitted to each other is converted into the vertical vibration load, that is, the vertical vibration load having a variation causing the rocking vibration is transferred between the respective displacement conversion means via the displacement transmission means. It can be uniformly leveled by transmission, and at the consolidated position with the base of all the displacement conversion means and the object to be isolated, an equal amount of vertical vibration load can be averaged, and the displacement conversion means Since the base is fixed to the base and the object to be isolated, and the displacement conversion means and the displacement transmission means are solidified, there is no play in structure and it can respond instantaneously to the input vibration without play. It is possible to prevent rocking rotation vibration that is difficult to predict with a simple configuration.

  Further, according to the present invention, as the displacement converting means, a pair of diagonal members arranged at positions where the one end is fixed to the vibration isolation object and the base and overlapped vertically are provided, and the other ends of the diagonal members are fixed to each other. By doing so, when the relative displacement in the vertical direction occurs due to the input vibration, the diagonal member can be displaced in the horizontal direction by changing the inclination angle with respect to the solidified portion at the other end, In addition, since one end is respectively solidified to the object to be isolated and the base, it is possible to apply a tensile force or a compressive force according to the horizontal displacement to the displacement transmission means solidified to the other end, and a simple configuration Thus, the vertical vibration load causing the vertical relative displacement can be converted into a horizontal vibration load corresponding to the vertical vibration load and transmitted to the displacement transmitting means.

  Further, according to the present invention, by using the spring that elastically restores the diagonal member, the vertical vibration load can be converted into the horizontal vibration load, and the vertical direction is about to propagate from the base portion to the vibration isolation object. The vibration energy can be absorbed by elastic force and the propagation of the vertical vibration to the object to be isolated can be suppressed, and the rocking rotation vibration can be prevented and the vertical vibration can be suppressed with a simple integrated configuration.

  According to the invention, the vertical elastic support means is disposed in parallel with the displacement conversion means between the vibration isolation object and the base. The vertical elastic support means can absorb the vibration energy to be propagated from the base to the object to be isolated and can suppress the propagation of the vertical vibration to the object to be isolated. Suppression of directional vibration can be obtained with an apparatus having an integrated structure.

  Further, according to the present invention, the horizontal direction vibration isolation means is disposed in series with the displacement conversion means between the vibration isolation object and the base. The horizontal vibration isolating means absorbs vibration energy to be propagated from the base to the vibration isolation object, can suppress the propagation of horizontal vibration to the vibration isolation object, prevent rocking rotation vibration and prevent horizontal vibration. Suppression of directional vibration can be obtained with an apparatus having an integrated structure.

  Further, according to the present invention, since the free end portions of the horizontal direction vibration isolating means are connected to each other, the individual behaviors of the free end portions of the horizontal direction vibration isolation means are restricted by mutual connection. The direction isolation means can be prevented from tilting and sinking locally, and even when an eccentric load is applied to the object to be isolated, the tilt can be reliably prevented.

  Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. 1 to 4, reference numeral 1 denotes a rocking vibration suppression device as a whole, and has a shape in which elastic support portions 2 and 3 are connected using a connecting member 4. The elastic support portion 2 has a shape in which both end portions in the longitudinal direction of the leaf spring members 5 and 6 formed using steel are bent in parallel at a predetermined angle, and the one bent end portions 5a and 6a are overlapped. . Similarly, the elastic support portion 3 has a shape in which both end portions in the longitudinal direction of the leaf spring members 7 and 8 formed of steel are bent in parallel at a predetermined angle, and the one bent end portions 7a and 8a are overlapped. It becomes. Further, the connecting member 4 is a hollow prismatic member formed using a steel material, and has a shape in which plate pieces 9 and 10 protrude from both ends in the longitudinal direction. Here, due to the factors described later, a member having sufficient rigidity that does not buckle against the compressive force is used as the connecting member 4.

  The rocking vibration damping device 1 sandwiches the plate piece 9 between one end portions 5a and 6a of the leaf spring members 5 and 6, and the plate piece 10 holds one end portion 7a and 8a of the leaf spring members 7 and 8. The elastic support portions 2 and 3 are connected to each other by fastening the bent end portions 5a and 6a and the plate piece 9, and the bent end portions 7a and 8a and the plate piece 10 with bolts or the like. 4 are connected to each other. Further, the bent end portions 5a and 6a, the connecting member 4, and the bent end portions 7a and 8a are fixed to the both side surfaces in the longitudinal direction between them by welding or the like. The rigidity of the consolidated part and the connecting member 4 is increased. A spring 13 is disposed between the bent ends 5b and 6b, and a spring 14 is disposed between the bent ends 7b and 8b. The springs 13 and 14 are arranged to suppress vibration propagation in the vertical direction, and it is desirable to use air springs from the viewpoint that even minute vibrations can be absorbed.

  Further, the rocking vibration control device 1 fixes the other bent end portions 5b and 7b of the elastic support portions 2 and 3 to the bottom portion of the pedestal support portion 15 with a bolt or the like, and the other of the elastic support portions 2 and 3. The bent end portions 6b and 8b are firmly fixed to the substrate 16 with bolts or the like, and a vibration isolation table 19 is placed on the pedestal support portion 15, and a vibration isolation target is placed on the vibration isolation table 19. An object 20 is placed thereon. As described above, in the present embodiment, the pedestal support 15 and the vibration isolation table 19 are interposed between the rocking vibration damping device 1 and the vibration isolation object 20. Any of the bases 19 may be omitted, or the rocking vibration damping device 1 may be directly fixed to the vibration isolation object 20.

  Further, vibration-isolating rubbers 17 and 18 are respectively disposed below the substrate 16 to which the bent end portions 6b and 8b are consolidated. The vibration isolating rubbers 17 and 18 are arranged to suppress vibration propagation in the horizontal direction to the rocking vibration damping device 1, and one is fixed to the substrate 16 and the other is fixed to the base floor slab. Thus, the rocking vibration damping device 1 is fixed on the foundation 21. The vibration isolation rubbers 17 and 18 have a fixed end portion on the base 21 side and a free end portion on the substrate 16 side, and the substrate 16 on the free end portion is connected to each other via a high-rigidity connecting plate 16a. ing.

  Here, as shown in FIG. 5, the rocking vibration damping device 1 is arranged along a peripheral side of the vibration isolation table 19 via a pedestal support portion 15 made of H-shaped steel. The pedestal support portions 15 are arranged in parallel so as to have a well shape, and the vibration isolation table 19 is placed on the pedestal support portions 15 thus arranged, and is solidified by bolts or welding. Each pedestal support portion 15 in a parallel state has both longitudinal ends projecting from the side portions of the vibration isolation table 19, and the rocking vibration damping device 1 is parallel to each side of the vibration isolation table 19. The bent end portions 5a and 7a are respectively arranged on the bottom surface of each projecting portion of the base support portion 15 to be fixed. By providing the rocking vibration damping device 1 at a position along the peripheral side of the vibration isolation table 19 in such an arrangement state, the rocking vibration damping device 1 exhibits its vibration isolation effect and the rocking rotation vibration suppression effect.

  In the above configuration, there is an input vibration that causes a relative displacement in the vertical direction between the vibration isolation table 19 and the base 21 which are supported by the elastic supports 2 and 3, and each of the elastic supports 2 and 3 has a vibration. When different vertical vibration loads are generated, the relative displacement in the vertical direction is generated differently in each elastic support portion by trying to perform vibration isolation support in accordance with this, and rocking rotational vibration will occur in the vibration isolation table 19. And

  The rocking vibration damping device 1 converts the vertical vibration load applied to the elastic support portions 2 and 3 into a horizontal vibration load corresponding thereto. Here, the elastic support portions 2 and 3 are formed by the leaf spring members 5 to 8, respectively, and one end portions 5 b to 8 b are respectively fixed to the pedestal support portion 15 and the substrate 16. Due to the elastic deformation, the inclination angle of the leaf spring members 5 to 8 is changed to cause displacement in the horizontal direction, whereby the vertical vibration load can be converted into the horizontal vibration load. The horizontal vibration load obtained by such conversion is transmitted between the elastic support portions 2 and 3 by the connecting member 4 solidified with the elastic support portions 2 and 3, respectively. Here, the horizontal vibration loads urged to the connecting member 4 from the elastic support portions 2 and 3 are different because they are caused by different vibration loads, but they are offset by mutual transmission by the connecting member 4. Force balance, and as a result, it is evenly balanced. The horizontal vibration load leveled in this way is transmitted as an average of the vertical vibration loads applied to the elastic supports 2 and 3, respectively.

  For example, as shown in FIG. 6, due to the vibration load that causes rocking rotational vibration on the vibration isolation table 19, the eccentric load W <b> 1 indicated by the downward arrow in the solid line in the drawing causes the base support portion 15 (FIG. (Not shown) is joined to the bent end portion 7b and the bent end portion 8b becomes a fixed point fixed to the substrate 16, so that the bent end portion 7b is lowered by the offset load W1. Try to sink in the direction. At this time, the elastic support portion 3 tends to deform in response to the sinking of the bent end portion 7b, and the solidified portion of the elastic support portion 3 with the connecting member 4 tends to move in the horizontal direction. A tensile force T <b> 1 in the horizontal direction indicated by a direction arrow is urged to the connecting member 4. Since the connecting member 4 is also solidified with the elastic support portion 2, the horizontal tensile force T <b> 1 urged by the connecting member 4 is transmitted to the solidified portion with the elastic support portion 2. Due to the tensile force T <b> 1 transmitted in this way, the consolidated portion of the elastic support portion 2 with the connecting member 4 tends to move in the horizontal direction. Here, since the bent end portion 6b is a fixed point that is fixed to the substrate 16 similarly to the bent end portion 8b, the elastic support portion 2 is elastically supported by the movement of the consolidated portion of the elastic support portion 2 with the connecting member 4. The part 2 tends to deform, and the bent end part 5b solidified with the pedestal support part 15 (not shown) tends to sink. Thus, the unbalanced load W1 that is intended to cause a relative displacement in the vertical direction at the bent end portion 7b is averaged by the mutual transmission in the connecting member 4 and is transmitted half by half between the elastic support portions 2 and 3. Thus, the bent end portions 5b and 7b are sunk with the same displacement amount in conjunction with each other.

  Further, for example, as shown in FIG. 7, due to the vibration load that causes rocking rotational vibration on the vibration isolation table 19, an unbalanced load W2 indicated by a solid line downward arrow in the figure causes the base support portion 15 ( When the bent end portion 5b is joined to the bent end portion 5b, the elastic support portion 2 serves as a fixing point where the bent end portion 6b is fixed to the substrate 16, so that the bent end portion 5b is not polarized. It tries to sink downward by the load W2. Here, the elastic support portion 2 tends to deform in response to the sinking of the bent end portion 5b, and the consolidated portion of the elastic support portion 2 with the connecting member 4 tends to move in the horizontal direction. A horizontal compression force C <b> 1 indicated by a horizontal arrow is urged to the connecting member 4. Since the connecting member 4 is also solidified with the elastic support portion 3, the horizontal compressive force C <b> 1 urged by the connecting member 4 is transmitted to the solidified portion with the elastic support portion 3. Due to the compressive force C1 transmitted in this way, the elastic support portion 3 tends to move the solidified portion with the connecting member 4 in the horizontal direction. Here, since the bent end portion 8b is a fixed point that is fixed to the substrate 16 in the same manner as the bent end portion 6b, the elastic support portion 3 is elastically supported by the movement of the consolidated portion of the elastic support portion 3 with the connecting member 4. The part 3 tends to be deformed, and the bent end part 7b solidified with the pedestal support part 15 (not shown) tends to sink. Thus, the unbalanced load W2 that causes the vertical end relative displacement at the bent end portion 5b is averaged by the mutual transmission in the connecting member 4 and transmitted to the elastic support portions 2 and 3 in half each other. Thus, the bent end portions 5b and 7b are sunk with the same displacement amount in conjunction with each other.

  Further, for example, as shown in FIG. 8, due to a vibration load that causes rocking rotational vibration on the vibration isolation table 19, an upward biased load W3 indicated by a solid line arrow in the figure is applied to the bent end portion 5b of the elastic support portion 2, and In the figure, when a downward offset load W4 indicated by a solid line arrow is applied to the bent end portion 7b of the elastic support portion 3, the bent end portion 5b tends to float upward and the bent end portion 7b is Trying to sink down. Here, the elastic support portion 2 tends to deform in response to the bent end portion 5b floating, and the solidified portion of the elastic support portion 2 with the connecting member 4 tries to move in the horizontal direction. Thus, a tensile force T2 in the horizontal direction indicated by a solid line arrow in the left-right direction in the drawing is urged to the connecting member 4. On the other hand, the elastic support portion 3 tends to deform in response to the bent end portion 7b sinking, and the consolidated portion of the elastic support portion 3 with the connecting member 4 tends to move in the horizontal direction. In the figure, a tensile force T2 in the horizontal direction indicated by a solid line arrow in the left-right direction is urged to the connecting member 4. Here, if the opposing tensile forces T2 in the horizontal direction are equal, that is, if the unbalanced load W3 applied to the elastic support portion 2 and the unbalanced load W4 applied to the elastic support portion 3 are equal, the connecting member 4 is pulled in the opposite direction. The forces T2 cancel each other and do not move in either direction, so that the bent ends 5b and 7b do not move in either the up-down direction. Further, when the tensile force in the direction of the elastic support portion 2 is large, that is, when the unbalanced load W3 is larger than the unbalanced load W4, the connecting member 4 is caused by the tensile force in the direction of the elastic support portion 3. Therefore, it moves in the horizontal direction due to the tensile force excluding the offset, so that only the tensile force toward the elastic support portion 2 is apparently applied to the connecting member 4, Both the parts 5b and 7b are lifted upward. Further, when the tensile force in the direction of the elastic support portion 3 is large, that is, when the unbalanced load W4 is larger than the unbalanced load W3, the connecting member 4 is caused by the tensile force in the direction of the elastic support portion 2. Accordingly, it is moved in the horizontal direction by the tensile force excluding the offset amount, so that only the tensile force toward the elastic support portion 3 is apparently applied to the connecting member 4, and the bent end Both the parts 5b and 7b sink downward.

  Further, due to the vibration load that causes rocking rotational vibration on the vibration isolation table 19, a downward offset load W3 indicated by a broken line arrow in the drawing is indicated at the bent end portion 5b of the elastic support portion 2, and also indicated by a broken line arrow in the drawing. When an upward biased load W4 is applied to the bent end portion 7b of the elastic support portion 3, the bent end portion 5b tends to sink downward and the bent end portion 7b tends to float upward. . At this time, the elastic support portion 2 tends to be deformed in response to the bent end portion 5b trying to sink, and the solidified portion of the elastic support portion 2 with the connecting member 4 tends to move in the horizontal direction. Thus, a compressive force C2 in the horizontal direction indicated by a broken arrow in the left-right direction in the drawing is urged to the connecting member 4. On the other hand, the elastic support portion 3 tends to be deformed in response to the bent end portion 7b being lifted, and the solidified portion of the elastic support portion 3 and the connecting member 4 is going to move in the horizontal direction. The horizontal compression force C2 indicated by the left and right broken arrows in the drawing is urged to the connecting member 4. When the opposing horizontal compressive forces C2 are equal, that is, when the offset load W3 applied to the elastic support portion 2 and the offset load W4 applied to the elastic support portion 3 are equal, the connecting member 4 is compressed in the opposite direction. The forces C2 cancel each other and do not move in either direction, so the bent ends 5b and 7b do not move in either the up-down direction. When the compressive force in the direction of the elastic support portion 3 is large, that is, when the unbalanced load W3 is larger than the unbalanced load W4, the connecting member 4 is caused by the compressive force in the direction of the elastic support portion 2. Therefore, it moves in the horizontal direction due to the compressive force excluding the offset, so that only the compressive force toward the elastic support portion 3 is apparently applied to the connecting member 4, Both the parts 5b and 7b sink downward. Further, when the compressive force in the direction of the elastic support portion 2 is large, that is, when the unbalanced load W4 is larger than the unbalanced load W3, the connecting member 4 is caused by the compressive force in the direction of the elastic support portion 3. Therefore, it is moved in the horizontal direction by the compressive force excluding the offset amount, so that only the tensile force toward the elastic support portion 2 is apparently applied to the connecting member 4, and the bent end Both the parts 5b and 7b are lifted upward.

  As described above, when the rocking vibration damping device 1 is isolated from the vertical vibration, the vertical relative displacement varies due to the vibration load caused by the input vibration being different between the elastic support portions 2 and 3, and the rocking vibration restraining device 1 is locked on the vibration isolation table 19. When an unbalanced load causing vibration is generated, the elastic support portion 2 is caused by the leaf spring members 5 and 6, and the elastic support portion 3 is caused by the leaf spring members 7 and 8, and the base support portion 15 and the base portion 16 are caused by the uneven load. It is possible to easily convert a vertical vibration load causing a relative displacement in the vertical direction into a horizontal vibration load, and elastically support the horizontal vibration load as a tensile force or a compression force by urging the connecting member 4 By transmitting between the parts, the horizontal vibration load transmitted from each elastic support part can be leveled, and the vertical vibration load can be averaged and transmitted to each displacement converting means. That.

  Further, the rocking vibration control device 1 is configured such that one end portions 5 b to 8 b of the elastic support portions 2 and 3 are respectively fixed to the base support portion 15 and the substrate 16, and the other end portions 5 a to 8 a and the connecting member 4 are connected. Therefore, the elastic support portions 2 and 3 and the connecting member 4 can respond instantaneously to the input vibration without play.

  In addition, since the compressing force may be urged from both of the elastic support portions 2 and 3 to the connecting member 4 due to the offset load (FIG. 7), as described in the above configuration, In other words, it is formed by using a member having sufficient strength, so that buckling is not caused by compression. Further, when an unbalanced load is applied to the elastic support portions 2 and 3 in different directions (FIG. 8), they are canceled each other if the tensile force T2 or the compression force C2 biased by the connecting member 4 is equal, and the bent end portion 5b. And 7b do not move, but in actuality, a slight amount of vertical movement may occur due to the elastic strain of each member. In order to avoid such a problem, the rocking vibration damping device 1 uses a member having high cross-sectional performance for each member.

  Further, in the rocking vibration damping device 1, the spring 13 is provided between the one end portions 5b and 6b of the elastic support portion 2, and the spring 14 is provided between the one end portions 7b and 8b of the elastic support portion 3, respectively. In addition, a vibration isolating rubber 17 is provided between the substrate 16 and the base 21. Thus, the vertical vibration isolation can be performed by the springs 13 and 14 and the horizontal vibration isolation can be performed by the vibration isolation rubber 17.

  According to the above configuration, the rocking vibration damping device 1 can perform vibration isolation in the vertical direction by the springs 13 and 14 and horizontal vibration isolation by the vibration isolation rubbers 17 and 18, and can be applied to the elastic support portions 2 and 3. In such a state that the connecting members 4 are consolidated and connected to each other, they are arranged along each side of the vibration isolation table 19 so that vibration loads applied to the respective elastic support portions are transmitted to each other via the connecting members 4. Therefore, when the vibration load due to the input vibration is different in each elastic support portion during the vibration isolation from the vertical vibration, the relative displacement in the vertical direction varies so that the base vibration is generated on the vibration isolation table 19. The vertical vibration load that tends to cause a relative displacement in the vertical direction between the support portion 15 and the base portion 16 is easily converted into a horizontal vibration load by the leaf spring members 5 to 8 of the elastic support portions 2 and 3. In addition, the horizontal vibration load transmitted from each elastic support portion can be transmitted between the elastic support portions by urging the horizontal vibration load to the connecting member 4 as a tensile force or a compression force. Equally, the vertical vibration load can be averaged, and all elastic support parts can be interlocked and averaged to cause expansion and contraction in the vertical direction. In addition, it is possible to achieve rocking vibration prevention that is difficult to predict with a simple configuration.

  Further, since the free end portions of the vibration isolating rubbers 17 and 18 are connected to each other via the connecting plate 16a, the behavior of each free end portion is regulated and each of the vibration isolating rubbers 17 and 18 is tilted independently and locally. Can be prevented from occurring. For this reason, even when an eccentric load acts on the vibration isolation table 19, the vibration isolation table 19 can be prevented from being inclined. By the way, in this embodiment, although each board | substrate 16 provided in the free end of the isolation rubber | gum 17 and 18 was connected with the connection board 16a, each board | substrate 16 was extended and integrated without using this connection board 16a. Alternatively, the substrates 16 can be connected via other structures. Of course, when the connecting plate 16a is used in this way, the behavior of the vibration isolating rubbers 17 and 18 is different in each case where the substrates 16 are integrated or connected via other structures. It has sufficient rigidity to regulate.

  In the above-described embodiments, the case where the apparatus is used for precision equipment manufacturing equipment has been described. However, the present invention is not limited to this and may be applied to buildings.

  In the above-described embodiment, the case of the rocking vibration suppression device 1 in which the elastic support portions 2 and 3 are connected by the connecting member 4 has been described. However, the present invention is not limited to this, and three or more elastic support means are used. You may apply when connecting mutually. In this case, the same effect as that of the embodiment can be obtained.

  In the above-described embodiment, the elastic support portion 2 and the plate piece 9 are sandwiched between the bent end portions 5a and 6a and the plate piece 10 is sandwiched between the bent end portions 7a and 8a. Although the description has been given of the case of the rocking vibration suppression device 1 in which the members 3 are connected to each other by the connecting member 4, the present invention is not limited to this, and a prismatic connecting member having no plate-shaped protrusion may be used. Good. That is, the both ends of the prismatic connecting member in the longitudinal direction may be directly sandwiched between the bent end portions 5a and 6a and the bent end portions 7a and 8a.

It is a side view which shows the whole structure of the rocking | fluctuation vibration control apparatus in this invention. It is a top view which shows the whole structure of the rocking | fluctuation vibration control apparatus in this invention. It is sectional drawing in the B line of FIG. 1 which shows the joining state of a connection part. It is sectional drawing in the A line of FIG. 1 which shows the inside of a connection member. It is a top view which shows the arrangement structure of the rocking | fluctuation vibration control apparatus and vibration isolator in this invention. It is a figure for demonstrating the function of the rocking | fluctuation vibration suppression apparatus in this invention. It is a figure for demonstrating the function of the rocking | fluctuation vibration suppression apparatus in this invention. It is a figure for demonstrating the function of the rocking | fluctuation vibration suppression apparatus in this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Rocking vibration suppression apparatus 2, 3 Elastic support part 4 Connection member 5, 6, 7, 8 Leaf spring member 9, 10 Blate piece 11, 12 Plate member 13, 14 Spring 15 Base support part 16 Board | substrate 16a Connection board 17, 18 Anti-vibration rubber 19 Anti-vibration table 20 Anti-vibration object 21 Basic

Claims (6)

In a device for preventing rocking vibration of a vibration isolation object whose vibration isolation support is made on the base,
A plurality of the vibration isolation object and the base are arranged between the vibration isolation object and the base, respectively, and the vibration isolation object and the base are transmitted from the consolidation part. Displacement converting means for converting the vertical relative displacement into the horizontal displacement;
A rocking vibration characterized by comprising: a displacement transmitting means for connecting said displacement converting means to each other and connecting said displacement converting means to each other and transmitting said horizontal displacement between said displacement converting means; Stop device.   The displacement converting means is a pair of diagonal members arranged at positions where one end is fixed to the base and the base portion and overlapped vertically, and the other ends of the diagonal materials are fixed to each other. The rocking vibration damping device according to claim 1.   The rocking vibration damping device according to claim 2, wherein the diagonal member is a spring that is elastically restored.   The rocking vibration damping device according to any one of claims 1 to 3, further comprising a vertical elastic support means disposed in parallel with the displacement conversion means between the vibration isolation object and the base. .   The rocking vibration damping device according to any one of claims 1 to 4, further comprising horizontal direction vibration isolation means disposed in series with the displacement conversion means between the vibration isolation object and the base. .   6. The rocking vibration damping device according to claim 5, wherein the free ends of the horizontal direction vibration isolation means are connected to each other.

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