JP2006088229A - Small-diameter coated tool and method of coating the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the breakage life of a small-diameter rotary tool, which is the most important factor in machining the small-diameter tool, by coating a substrate surface of the small-diameter rotary tool with a suitable hard film, to improve the wear resistance by suppressing oxidization of the hard film, and to improve the strength at a step portion between a neck portion and a shank portion for clamping, which is particularly susceptible to breakage etc., to thereby prevent breakage. <P>SOLUTION: The small-diameter coated tool coated with the hard film has a blade portion having a diameter D μm which is set in the range of 5≤D≤800. The hard film is applied to the substrate by sputtering, and at least one layer of the hard film has a residual compressive stress T GPa which is set in the range of 2≤T≤8. Further if the small-diameter coated tool is formed like a stepped cylinder, the blade portion and at least part of the neck portion are coated with the hard film. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a coated small-diameter tool used for processing metal materials, plastic materials, various ceramics and the like.

With the cost reduction of manufacturing, there is a demand for shortening the processing time, increasing the hardness of the workpiece, and high-precision processing. In particular, in recent years, in addition to these requirements, fine machining by miniaturizing the workpiece has been especially emphasized, and the diameter of cutting tools has been remarkably reduced. With these requirements, cutting tools are forced to have a more severe cutting environment. For example, there is an increase in tool wear due to high hardness of the workpiece, high-speed machining, and a reduction in machining accuracy due to tool wear. In particular, in a small-diameter tool having a tool diameter of less than 1 mm, these phenomena are remarkable, and it is difficult to say that stable machining is currently performed. The following Patent Documents 1 to 5 are disclosed for these problems.
Patent Document 1 discloses a coated tool coated with a (TiAl) (CN) -based hard film, and describes that the residual compressive stress of the hard film is 8 GPa or less.
Patent Document 2 discloses a surface-coated cemented carbide that coats a (TiAl) N-based multilayer film on the surface of a tool by physical vapor deposition in order to suppress wear of the tip cutting edge in drilling a multilayer laminate on a printed circuit board. A miniature drill made is disclosed.
Patent Document 3 discloses a drill for drilling a printed circuit board having a blade diameter of 0.30 to 0.50 mm, in which a hard carbon film is coated on the surface of a cemented carbide as a base in order to improve wear resistance and breakage resistance. Is disclosed.
Patent Document 4 discloses a surface-coated cutting tool in which fracture resistance and durability are improved by coating a printed circuit board processing tool with a (TiSi) (CN) layer.
Patent Document 5 discloses a surface of an ultrafine structure formed by forming a surface coating layer composed of a sputter deposition film having an ultrafine structure having substantially the same composition as a cemented carbide with an average thickness of 1 to 10 μm. A proposal has been disclosed in which a miniature drill made of a surface-coated cemented carbide having excellent adhesion of the coating layer is used to increase the adhesion of the surface coating material and further improve the wear resistance.
However, none of the above patent documents mentions the relationship between the residual compressive stress of the coating and the breakage resistance of the coated small-diameter tool.

JP 2003-305601 A JP 2003-136316 A JP-A-10-138027 JP 2004-90150 A JP 2001-162419 A

  An object of the present invention is to solve the following problems by coating an appropriate hard film on the surface of a base of a rotary tool having a small diameter. The first problem is that a coating technique suitable for the shape is required when the blade diameter Dμm is 5 ≦ D ≦ 800 and when the blade diameter is 1 mm or more. It is to provide a film that contributes to performance improvement as a hard film for small diameter tools. That is, the improvement of the breakage life, which is the most important in the cutting of small diameter tools, and the improvement of wear resistance by suppressing the oxidation of the hard coating. The second problem is to improve the strength of the stepped portion of the small diameter tool, which is particularly likely to be broken, and the shank portion for clamping from the neck portion, thereby preventing breakage.

The first invention of the present application is a coated small-diameter tool coated with a hard coating, wherein the diameter D μm of the blade portion of the small-diameter tool is 5 ≦ D ≦ 800, the hard coating is coated by a sputtering method, The residual compressive stress T of at least one layer is GPa, and 2 ≦ T ≦ 8.
According to a second aspect of the present invention, there is provided a coated small-diameter tool coated with a hard coating, wherein the coated small-diameter tool is connected to the blade portion, the neck portion connected to the blade portion and having a larger outer diameter, and connected to the neck portion. It has a cylindrical shape with a step having a large diameter and a shank portion for clamping a tool, the diameter Dμm of the blade portion is 5 ≦ D ≦ 800, and the residual compressive stress T of at least one layer of the hard coating Is a small-diameter coated tool characterized in that 2 ≦ T ≦ 8 and at least one part of the blade / neck is coated with the hard coating. Here, the blade portion 1 indicates a portion where a blade groove is formed, the neck portion 2 has a diameter different from that of the blade portion 1 and substantially does not participate in cutting, and the shank portion 3 indicates a tool. Refers to the part to be clamped. By adopting the above configuration, it is possible to provide a hard coating coated small-diameter tool having excellent breakage resistance and excellent wear resistance.

The hard coating is preferably configured such that there are crystal particles having an Si content of less than 10 atomic% and an amorphous phase having an Si content of 10 atomic% or more in an atomic ratio of only the metal element. The hard coating contains at least one element selected from Ti, Cr, Al, Zr, and Nb, and C, O, B in a region within 500 nm from the outermost surface of the hard coating in the film thickness direction. It is also preferable that at least one element selected from the group consisting of Cl, S, P, and S contains 3 atomic% or more of the entire film. The hard coating contains at least Si, and has a binding energy of at least Si—N, Si—O, and metallic Si by X-ray photoelectron spectroscopy, and the strength of the binding energy corresponding to Si—N is I (Si -N), when the bond energy intensity corresponding to Si-O is I (Si-O) and the bond energy intensity corresponding to metal Si is I (Si), I (Si-N)> I (Si ), I (Si—N)> I (Si—O), and the ratio of I (Si—N) is 52% or more and 85% or less,
The coated small-diameter tool of the present invention is a rotary tool, and is preferably applied to any of an end mill, a drill, a reamer, and a router, and can obtain excellent cutting performance. In addition, it is preferable to employ a method in which the hard coating of the present invention is coated by a combination of a sputtering method and an arc discharge ion plating method.

  The hard coating coated small diameter tool of the present invention has excellent fracture resistance by coating a hard coating optimal for small diameter tools where breakage resistance is regarded as important, and studying suitable tool shapes and the like. However, a coated small diameter tool having excellent wear resistance could be provided. As a result, it is possible to provide a tool that is extremely effective in improving productivity and reducing costs in cutting.

The D value μm of the first invention of the present invention is 5 ≦ D ≦ 800, the hard film is coated by a sputtering method, the residual compressive stress T of at least one layer of the hard film is GPa, and 2 ≦ T ≦ 8 is a coated small-diameter tool. This is because the D value may be eliminated by ion bombardment when the D value is less than 5 μm in the ion cleaning process, which is a previous process for coating the hard film, when a coating means by sputtering is employed. On the other hand, if it exceeds 800 μm, the effect of breakage resistance of the present invention is not remarkably recognized.
The residual compressive stress T is GPa and is limited to 2 ≦ T ≦ 8. A hard film obtained with a T value in the range of 2 ≦ T ≦ 8 is particularly excellent in the smoothness of the surface of the hard film, and has high hardness, and thus is excellent in wear resistance. Furthermore, the reason for limiting the T value is that if it has the above range, the strength of the tool itself is improved, and the strength and resistance to bending and deflection in the cutting process, which is particularly important for small-diameter tools, are increased, and the fracture resistance is remarkably improved. It is because it can be made. A more preferable T value range is 2.5 GPa or more and 4.5 GPa. When the tool is coated, the residual compressive stress can be confirmed by a hard film composition, a crystal structure, a structure structure, a film hardness, a hard film state at the tip of the blade, a (200) half-value width measurement in micro thin film X-ray diffraction, etc. Can be judged comprehensively. For example, if the half width of the (200) plane by micro thin film X-ray diffraction is 1 ° or more at 2θ and the composition can be determined, the residual compressive stress is estimated. However, it is preferable to finally cover the single layer and calculate from the curvature of the thin plate before and after the coating. The residual compressive stress of the hard coating is a residual compressive stress of at least one layer in the hard coating. By the above, the hard coating for small diameter tools which is the 1st subject can be provided, and the coating which contributes to performance improvement can be provided.

  A second aspect of the present invention is to have a cylindrical shape with a step, and to be configured such that at least one part of the step portion is covered with the hard coating. FIG. 1 is a schematic view showing an example of a coated small diameter tool according to the present invention. 1 is a blade part, 3 is a shank part for clamping a tool, 2 is the neck part having at least one or more neck parts having different diameters that are not substantially involved in cutting, and a preferable hard coating of the present invention As the coating portion, it means that at least a part of the region of the neck 2 is coated with the hard coating. By providing a plurality of at least one or more neck portions 2 having different diameters that are not substantially involved in cutting, the breakage resistance of the blade portion is improved. Similarly to the blade portion 1, the region of the neck portion 2 is preferably coated with the hard film having a residual compressive stress, whereby the strength is improved and the breakage resistance is greatly improved. Further, although not shown in FIG. 1, it is preferable to form a minute curvature at a connecting portion of at least one neck having different diameters, since the breakage resistance can be further improved.

  It is necessary to reduce the occurrence of unevenness on the surface of the hard coating by employing a sputtering method as a coating technique for a small-diameter tool shape having a blade diameter D μm of 5 ≦ D ≦ 800. Thereby, friction resistance can be reduced and long-term maintenance of tool accuracy can be measured. For example, in the formation of TiN, (TiAl) N, and (TiSi) N-based hard coatings, the hard coating constituent elements can be evaporated and ionized and coated on the tool base surface by employing a sputtering method. In addition, by optimizing the plasma density during film formation, unevenness on the surface of the hard coating near the blade portion of the small-diameter tool is reduced, contributing to reduction of frictional resistance and improvement of tool accuracy, which is effective for performance improvement. The sputtering method is advantageous in optimizing the plasma density by selecting the structure of the vapor deposition source, the power during film formation, the gas pressure, etc., and avoiding the non-ionized film elements from adhering to the substrate surface as metal particles.

  The hard coating of the present invention contains at least Si, and at least the binding energy of Si—N, Si—O and metal Si is confirmed by X-ray photoelectron spectroscopy, and corresponds to Si—N in the Si 2p spectrum. When the bond energy strength is I (Si—N), the bond energy strength corresponding to Si—O is I (Si—O), and the bond energy strength corresponding to metal Si is I (Si), I (Si) Si—N)> I (Si), I (Si—N)> I (Si—O) is satisfied, and the ratio of I (Si—N) is preferably controlled to 52% or more and 85% or less. . This is because Si is contained in the hard coating, and by satisfying the above relationship, a very smooth and high hardness hard coating can be obtained, and the balance between wear resistance and breakage resistance is optimal. Further, when the hard film is coated by a sputtering method, crystal grains of the hard film are further refined and surface smoothness is improved as compared with an arc discharge ion plating method (hereinafter referred to as AIP method). Moreover, the strength of the hard coating is improved by these, and it effectively acts on the improvement of the wear resistance by improving the breakage resistance and the coating hardness. The film which contributes to the improvement of breakage life by the above can be provided.

  The relationship between the calculation method of I (Si—N), I (Si), and I (Si—O) by the X-ray photoelectron spectroscopy in the present invention and the coating conditions will be described. The coated substrate was a mirror-finished fine-grain cemented carbide with a Co content of 13.5% by weight. The X-ray photoelectron spectroscopic analysis was carried out using a 1600S type X-ray photoelectron spectroscopic analyzer manufactured by PHI, the X-ray source was set to 400 W using MgKα, and the inside of a circle having a diameter of 0.4 mm was analyzed. Before analysis, thoroughly degrease and wash with acetone, and further etch using an Ar ion gun for 5 minutes to remove contaminants attached to the hard coating surface of the analysis unit, and then measure the entire spectrum, After etching for 30 seconds, a spectrum corresponding to Si2p was measured. The etching rate by Ar ion gun was 1.9 nm / min in terms of SiO2. The intensity ratio of I (Si—N) in the whole is determined by the coating conditions and the hard film composition. As a result of examination on coating conditions, preferable coating conditions in which the ratio of I (Si—N) is 52% or more and 85% or less include a reaction pressure of 0.2 to 2.0 Pa and a bias voltage of −50 to −500 V. The coating temperature was 350 to 500 degrees.

In order to obtain a preferable coated small-diameter tool in the present invention, in the hard coating, crystal grains having an Si content of less than 10 atomic% and an amorphous phase having an Si content of 10 atomic% or more in an atomic ratio of only the metal element Is preferably present. The reason for this is that the crystal grain size in the hard film having the above-described structure is refined to the nano order to form an extremely smooth hard film surface. Further, by dispersing crystal grains or amorphous phases having different Si contents, it is possible to easily improve the residual compressive stress, which is effective for the control. Here, the above-mentioned structure is confirmed with a transmission electron microscope in a region where the sample thickness is about the particle size, and several nanometer order corresponding to each region is quantitatively analyzed by energy dispersive analysis. The crystal structure was confirmed by taking a line diffraction image. For taking an electron diffraction image, analysis was performed with a camera length of 50 cm and a beam diameter of 2 to 5 nm.
When the hard coating of the present invention contains at least one of Ti, Cr, Al, Zr, and Nb in addition to Si and is coated by a sputtering method, the control of the residual compressive stress of the hard coating and the hard coating It is effective and preferable for surface smoothness.
When any one or more of C, O, B, Cl, S, P, S within 500 nm from the outermost surface of the hard coating of the present invention contains 3 atomic% or more of the entire hard coating, the wear resistance is excellent. Cutting resistance is reduced and breakage resistance can be improved. In this case, various elements can be added as a reactive gas, a method of adding from a solid evaporation material as a sputtering target, or after the coating of the hard film is completed, it can be added to the surface of the hard film by an ion implantation apparatus. is there.
The coated small-diameter tool of the present invention is suitable for use in any of rotating tools, particularly an end mill, a drill, a reamer, or a router, because the cutting performance is significantly improved.
In the coating method of the hard coating of the present invention, it is important to employ a coating means by a physical vapor deposition sputtering method, but when the adhesion strength with the substrate is not sufficient, by using together with the AIP method, sputtering is performed. The adhesion strength of the hard coating by the method can be reinforced. In this case, it is necessary to limit the film thickness from the substrate surface to within 200 nm, more preferably within 100 nm. This is because the effect of the present invention tends to decrease as the thickness of the hard film by the AIP method increases. Further, as a means for adding elements having different characteristics, the sputtering method and the AIP method can be used simultaneously, and the coating of the present invention can be coated. In this case, care should be taken because the breakage resistance tends to decrease as the coating time by the AIP method increases. When the AIP method and the sputtering method are used in combination, a simultaneous method and a sequential coating method are possible. As described above, it is possible to provide a hard film coating technique suitable for a small-diameter tool. Hereinafter, the present invention will be described based on examples.

As a base material, a Co content of 7 weight percent, a WC average particle size of 0.2 μm to 0.6 μm, a round bar-shaped cemented carbide is used, and the shape shown in FIG. 1 is a blade part 1, a neck part 2, and a shank part. 3 was processed. The diameter of the shank part was 4 mm. FIG. 2 shows an AA cross-sectional shape of the blade portion 1, which is composed of a cutting edge ridge line intersecting the flank face 4 and the rake face 5, a two-blade square end mill having a blade diameter of 40 μm and a twist angle of 30 degrees. processed. The connecting part from the blade part to the neck part, each connecting part that becomes a step of different diameter in the neck part, and the connecting part from the neck part to the shank part formed a minute round shape to suppress breakage due to stress concentration. .
Next, the base of the two-blade square end mill produced as described above was degreased and cleaned and placed in a vacuum container formed by sputtering. The coated substrate was heated and evacuated to a temperature of 500 degrees, and Ar gas was introduced into the vacuum vessel. Ar ions were formed by plasma in a vacuum vessel, and the coated substrate was cleaned by a negative bias voltage applied to the substrate. It is also possible to use metal ions as the cleaning source at this time. The target material was ionized while introducing Ar and reactive gas nitrogen into the vacuum vessel, and the substrate was coated with 1 μm of a hard film by a negatively applied bias voltage. Unless otherwise specified, coated small-diameter tools were prepared by the manufacturing method described above, and various hard coatings were coated. The coating conditions including the coating region of the hard coating are shown in Table 1.

As shown in Table 1, cutting tests were carried out according to various examples of the present invention, comparative examples, and conventional examples. The evaluation of the breakage life was performed by cutting three identical samples and writing the breakage life in Table 1 as an average value of the cutting length. In addition, the broken life is shown by rounding down the decimal point. The cutting conditions are shown below.
(Cutting conditions)
Tool: 2-flute end mill Cutting method: Side finish cutting Work material: Martensitic stainless steel, Hardness: HRC53
Cutting depth: axial direction: 4 μm, radial direction: 1 μm
Cutting speed: 5 m / min
Feed: 1 μm / blade Cutting oil: None

In the expression method in Table 1, SP in the column of coating means indicates a sputtering method, and AIP indicates an arc discharge ion plating method. AIP → SP indicates that a hard film by AIP was coated at 200 nm or less, and then the hard film was coated by SP. Here, the reason why the hard film by AIP was set to 200 nm or less was that when it was thickly coated exceeding 200 nm, metal particles adhered to or on the surface of the hard film, resulting in increased frictional resistance and reduced breakage life. It is. AIP + SP indicates that a part of the hard coating was coated by operating AIP and SP simultaneously.
The intensity ratio of I (Si—N) of the Si-containing coating calculated by X-ray photoelectron spectroscopy was also shown. The structure of the Si-containing coating was described as a nanostructure when the Si content included a layer containing less than 10 atomic% in the crystalline layer and 10 atomic% or more in the amorphous phase. FIG. 3 shows a spectrum measurement result corresponding to Si2p of Invention Example 1 obtained by this measurement. 3, the Si—N component peak position is 101.2 ± 0.2 eV, the Si—O component peak position is 103.3 ± 0.2 eV, and the Si metal component peak position is 99. ± 9. The peak fitting method was performed at 3 ± 0.2 eV. From FIG. 3, the area strengths are I (Si—N) = 1098, I (Si) = 184, I (Si—O) = 265, and the intensity ratio of I (Si—N) in the whole is 71. %.

  Inventive Examples 1 to 23 shown in Table 1 showed a stable break life as compared with Comparative Examples 24 to 27 and Conventional Examples 28 to 32. Details of the present invention will be described below. Examples 1 to 5 of the present invention show cases where the coating of the present invention is coated and the blade diameter D is different. Although the breakage life tended to decrease as the D value was smaller, the examples of the present invention still exhibited long cutting life and excellent cutting performance even when the D value was small. When compared with the same D value, the breakage life of the example of the present invention was remarkably superior to that of the comparative example and the conventional example. In Comparative Example 25, the D value was 1000 μm, but it could not be said that the fracture life was significantly improved as compared with Conventional Example 30. Compared with Example 5 of the present invention having a D value of 800 μm, the present invention has a large effect of improving the breakage life on the small diameter side. Inventive Example 6 shows a case where the coating portion of the hard coating covers the entire neck portion 2 in addition to the blade portion 1. Compared to Example 2 of the present invention, the breakage life was remarkably excellent. This is because the tool strength is improved by applying compressive stress to the neck and the breakage resistance is improved. Examples 7 and 8 of the present invention show those that deviate from the range of 52% or more and 85% or less, which is the ratio of I (Si—N) of the Si-containing film considered preferable in the present invention. Since the fracture life was inferior to that of other examples of the present invention, 52% or more and 85% or less are optimal. Invention Example 9 shows a case where no amorphous phase is observed in the structure of the Si-containing coating. In this case as well, the fracture life was inferior to that of the other examples of the present invention, so that there are crystal grains having an Si content of 10 atomic% or less and an amorphous phase containing Si of 10 atomic% or more. Is preferred. Examples 12, 13, and 14 of the present invention are cases where the amorphous phase was observed in the structure of the Si-containing coating, but the Si content in the amorphous phase was less than 10 atomic%, but the fracture life It was excellent. Invention Example 15 shows a case where the thickness of each layer is several nanometers and the total number of layers is about 3000 layers. Compared with Example 1 of the present invention, the breakage life is long, which is a preferable coating form. Invention Examples 16, 17, 18, and 19 show the case where three types of hard coatings were laminated, and were excellent in breakage life. The outermost layer of Invention Example 18 is a case where molybdenum disulfide and (TiSi) N are coated simultaneously. Example 19 of the present invention is a case where Cl is implanted by installing in an ion implantation apparatus after coating a hard film. Invention Example 20 shows a case where the residual compressive stress of the (TiSi) N layer is 6.2 GPa. Compared with Example 2 of the present invention, the breakage life was slightly deteriorated. Accordingly, a preferable residual compressive stress value is 6 GPa or less. On the other hand, Comparative Examples 27 and 28 show cases where the residual compressive stress is outside the specified range of the present invention. When the residual compressive stress is lower than 2 GPa, the effect of improving the breakage resistance is not recognized. When the residual compressive stress is higher than 8 GPa, the peeling of the hard film is recognized by the residual compressive stress, and the breakage resistance is improved. It did not come. Invention Example 21 shows the case of a layer containing Si and Hf, but the breakage life is inferior to that of Invention Example 1 containing Si and Ti. The present invention 22 is a case where (TiSi) N is coated with 50 nm of (TiAl) N by AIP and then (TiSi) N is coated with SP, but the effect of defects due to AIP is hardly confirmed and the fracture life is excellent. Invention Example 23 shows the case where a part of the hard coating was simultaneously coated with AIP and SP. At this time, the thickness of the hard film by AIP was set to 10 nm to 100 nm. The effect of defects due to AIP is hardly confirmed, and the fracture life is excellent. Invention Example 24 shows a case where one part of the blade part is made of cubic boron nitride. Since the fracture resistance was improved, the original wear resistance effect of cubic boron nitride could be exhibited.

FIG. 1 is a schematic view showing an example of a coated small diameter tool according to the present invention. FIG. 2 is a cross-sectional view taken along the line AA in FIG. FIG. 3 shows spectral peak separation by X-ray photoelectron spectroscopy of Example 1 of the present invention.

Explanation of symbols

1: Blade part 2: Neck part 3: Shank part 4: Flank 5: Rake face

Claims (8)

In a coated small-diameter tool coated with a hard coating, the diameter D μm of the blade portion of the small-diameter tool is 5 ≦ D ≦ 800, the hard coating is coated by a sputtering method, and the residual compressive stress T of at least one layer of the hard coating is A coated small diameter tool having a GPa of 2 ≦ T ≦ 8. In a coated small-diameter tool coated with a hard coating, the coated small-diameter tool includes the blade portion, a neck portion that is continuous with the blade portion and has a larger outer diameter, and is continuous with the neck portion and clamps the tool with a larger outer diameter. The blade portion has a diameter D μm of 5 ≦ D ≦ 800, and the residual compressive stress T of at least one layer of the hard coating is GPa, 2 ≦ A coated small diameter tool, wherein T ≦ 8, and the hard coating is coated on at least one part of the blade part and the neck part. The coated small-diameter tool coated with the hard coating according to claim 1 or 2, wherein the hard coating contains at least Si and has a binding energy of at least Si-N, Si-O, and metal Si by X-ray photoelectron spectroscopy. The bond energy intensity corresponding to Si-N is I (Si-N), the bond energy intensity corresponding to Si-O is I (Si-O), and the bond energy intensity corresponding to metal Si is I ( Si), I (Si-N)> I (Si), I (Si-N)> I (Si-O) is satisfied, and the ratio of I (Si-N) is 52% or more and 85%. A coated small-diameter tool characterized by: The coated small-diameter tool coated with the hard coating according to claim 3, wherein the hard coating includes crystal particles having an Si content of less than 10 atomic% and an Si content of 10 atomic% or more. Coated small diameter tool characterized by the presence of a crystalline phase. The coated small diameter tool coated with the hard coating according to claim 3 or 4, wherein the hard coating contains at least one element selected from Ti, Cr, Al, Zr, and Nb. tool. The coated small-diameter tool coated with the hard coating according to any one of claims 3 to 5, wherein C, O, B, Cl, S, and a region within 500 nm from the outermost surface of the hard coating in the film thickness direction. A coated small-diameter tool characterized in that one or more elements of P and S are contained by 3 atomic% or more of the entire coating. The coated small-diameter tool according to any one of claims 1 to 6, which is a rotary tool, and is any one of an end mill, a drill, a reamer, and a router. The coated small diameter tool coated with the hard coating according to any one of claims 1 to 7, wherein the hard coating is coated by combining the sputtering method and the arc discharge ion plating method. Tool coating method.

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