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JP2006077264A - METHOD FOR RECYCLING RARE-EARTH SINTERED MAGNET AND TRANSITION-METAL BASED SCRAP, AND METHOD FOR MANUFACTURING MAGNETIC-MATERIAL POWDER FOR GHz BAND WAVE ABSORBER AND METHOD FOR MANUFACTURING WAVE ABSORBER - Google Patents

METHOD FOR RECYCLING RARE-EARTH SINTERED MAGNET AND TRANSITION-METAL BASED SCRAP, AND METHOD FOR MANUFACTURING MAGNETIC-MATERIAL POWDER FOR GHz BAND WAVE ABSORBER AND METHOD FOR MANUFACTURING WAVE ABSORBER Download PDF

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JP2006077264A
JP2006077264A JP2004259282A JP2004259282A JP2006077264A JP 2006077264 A JP2006077264 A JP 2006077264A JP 2004259282 A JP2004259282 A JP 2004259282A JP 2004259282 A JP2004259282 A JP 2004259282A JP 2006077264 A JP2006077264 A JP 2006077264A
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Takashi Horikawa
高志 堀川
Masahiro Ito
正浩 伊東
Kenichi Machida
憲一 町田
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Abstract

<P>PROBLEM TO BE SOLVED: To provide, with respect to a method for recycling scrap (e.g. machining chips generated in the course of grinding for a rare-earth magnet) generated in a rare-earth magnet manufacturing process, a method for manufacturing a magnetic-material powder having electromagnetic wave absorption property in a GHz band, particularly, in a GHz band whose amount of use is recently increasing in the fields of cellular phone waves, automatic payment systems, digital broadcasting, indoor wireless LAN, etc., and also to provide a method for manufacturing a wave absorber using the same. <P>SOLUTION: Remarkable reduction in raw-material costs can be attained by using, as a part of raw materials, the scrap generated at the manufacture of the rare-earth magnet constituted of an intermetallic compound of rare-earth metal and transition metal. The conventional Fe-metal-based electromagnetic wave absorber produced by the conventional technology shows absorption with respect to electric waves of several GHz alone because of the low magnetic anisotropy of the Fe metal; while on the other hand, the production of the electromagnetic wave absorber having excellent absorption property with respect to the electric waves of several GHz or higher can be attained in this method by combining the Fe metal and Ti both separated and recovered from the above scrap by a simplified process and providing crystalline magnetic anisotropy. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

この発明は、希土類磁石の製造工程において生ずるスクラップ(希土類磁石の研磨過程において発生する切削屑など)のリサイクル法に関し、特に、携帯電波、自動料金支払システム、デジタル放送、室内の無線LAN等々で近年その使用量が増大しているGHz帯域のGHz帯域に電磁波吸収特性を有する磁性体粉末の製造方法及びこれを用いた電波吸収体の製造方法に関する。   The present invention relates to a recycling method for scraps generated in the manufacturing process of rare earth magnets (cutting scraps generated in the polishing process of rare earth magnets), and in particular in portable radio waves, automatic fee payment systems, digital broadcasting, indoor wireless LAN, etc. The present invention relates to a method of manufacturing a magnetic powder having electromagnetic wave absorption characteristics in the GHz band of the GHz band where the amount of use is increasing, and a method of manufacturing a radio wave absorber using the same.

近年、情報通信機器や制御機器、小型モータを使用する民生用弱電機器、さらには医療診断装置などに高性能な希土類焼結磁石が使用され、その生産量は年々増加している。特にNd−Fe−B系焼結磁石の製造においては、合金溶解から始まり、粉砕、成形、焼結、切断・研磨、表面処理を経て最終磁石製品が出来上がるが、その中でも、切断、研磨の工程において発生する磁石スクラップは磁石仕込み量の数十%に達する。   In recent years, high-performance rare earth sintered magnets have been used for information communication equipment, control equipment, consumer light electrical equipment using small motors, medical diagnostic equipment, etc., and their production volume is increasing year by year. In particular, in the production of Nd-Fe-B sintered magnets, the final magnet product is completed through alloy dissolution and pulverization, molding, sintering, cutting / polishing, and surface treatment. The magnet scrap generated in the process reaches tens of percent of the magnet charge.

上記の焼結磁石スクラップの再利用法として、酸に溶解させた後に希土類元素のみを溶媒抽出して分離・乾燥し、さらに酸化させて再度焼結磁石用の原料とする手法(特開平5−287405号公報、特開平9−217132号公報)が提案されている。しかしながら、上記の方法では、磁石原料合金としての再生に複雑かつ高エネルギー投入を要するプロセスを必要とする点で問題が残る。 As a method of reusing the sintered magnet scrap, a method is described in which only a rare earth element is extracted with a solvent after being dissolved in an acid, separated and dried, and further oxidized to be used again as a raw material for a sintered magnet (Japanese Patent Laid-Open No. Hei 5-). No. 287405 and JP-A-9-217132) have been proposed. However, the above method still has a problem in that it requires a complicated and high energy input process for regeneration as a magnet raw material alloy.

他方で、軽量かつ耐食性に優れるTi金属は航空宇宙産業から化学プラント、民生品用途としての時計、メガネなどあらゆる製品に使用されており、産業の発展に伴い、Tiの再利用法が重要視されている。Tiの切削加工時に発生する研磨屑に対しては、これらのスクラップが不純物金属の混入とともに酸素を含有するために、不純物金属を除去した後、金属Mgを用いたテルミット反応によりTi金属として再生されている。これらの手法は、Ti金属としての再利用を考えたもので、その品質として高純度を必要とするために再生に供せられるエネルギーは多大なものとなる。
特開平5−287405号公報 特開平9−217132号公報
On the other hand, Ti metal, which is lightweight and has excellent corrosion resistance, is used in a variety of products, including aerospace industry, chemical plants, watches for consumer goods, and glasses. ing. For abrasive scraps generated during Ti cutting, these scraps contain oxygen as well as impurity metals, so after removing the impurity metals, they are regenerated as Ti metal by a thermite reaction using metal Mg. ing. These methods are intended to be reused as Ti metal, and require high purity as the quality, so that the energy used for regeneration is enormous.
JP-A-5-287405 JP-A-9-217132

Nd−Fe−B系希土類焼結磁石は、その高い磁気特性のために希土類磁石市場の大半を占めているが、大きさや形状を所望の寸法に合せる際に多量の研磨屑(スラッジ)が発生する。これらスラッジは酸素や炭素等の不純物を多く含んでおり、そのままでは使用できない。そこで、貴重な資源である希土類成分のみが、酸溶解に基づく湿式法によって分離精製され、再利用されている。しかしながら、多量の酸が必要であることや、コストに見合わないために鉄分を廃棄していることなどの問題があり、簡便に再生することはできない。   Nd-Fe-B rare earth sintered magnets occupy most of the rare earth magnet market due to their high magnetic properties, but a large amount of abrasive debris (sludge) is generated when the size and shape are adjusted to the desired dimensions. To do. These sludges contain a large amount of impurities such as oxygen and carbon and cannot be used as they are. Therefore, only rare earth components, which are valuable resources, are separated and purified by a wet method based on acid dissolution and reused. However, there are problems such as the need for a large amount of acid and the disposal of iron because it does not meet the cost, and it cannot be easily regenerated.

一方、Siはエレクトロニクス産業を支える最重要素材となっているが、半導体製造過程で使われるSiは20%が製品化されるものの、残りの80%は排水中に含まれ、産業廃棄物として処分されているという問題がある。   On the other hand, Si is the most important material that supports the electronics industry. Although 20% of Si used in the semiconductor manufacturing process is commercialized, the remaining 80% is contained in wastewater and disposed of as industrial waste. There is a problem that has been.

同様に、Tiは軽量、強靭、高耐食性、高耐熱性等の優れた特性を持つ素材としてさまざまな産業分野において、その用途は急速に拡がっている(Ti伸展材の出荷量はこの10年で2倍近く成長)が、Ti鋼研磨過程で排出されるTi屑は産業廃棄物として埋め立てられており、これらの資源の有効なリサイクル技術の確立は、今後ますます重要になってくると考えられる。   Similarly, Ti is a material with excellent properties such as light weight, toughness, high corrosion resistance, and high heat resistance, and its application is rapidly expanding in various industrial fields. However, it is thought that the establishment of effective recycling technology for these resources will become more and more important in the future. .

また、今日、携帯電話や無線LANをはじめとした情報通信機器の高速化、高周波数化が進むにつれ、電磁波環境問題はますます重要性を増している。電磁波障害は機器の誤動作から、人体への影響といった多岐に及ぶため、これら電磁波による利便性を損なわず、なおかつ安全に利用するための対策は必要不可欠となっている。   Also, today, as information communication devices such as mobile phones and wireless LANs increase in speed and frequency, electromagnetic wave environmental problems are becoming more and more important. Since electromagnetic interference ranges from malfunction of equipment to effects on the human body, measures to use them safely without compromising the convenience of these electromagnetic waves are indispensable.

本発明者らは、希土類焼結磁石研削屑(スラッジ)の新規なリサイクル方法として、スラッジをSi、Al、Ti等の金属と共にアーク溶解もしくは高周波誘導加熱およびそれに引き続く液体急冷により、Fe系金属間化合物および副生成物のスラグとすることで、前者をGHz領域の電磁波に対して有効な電磁波吸収材料とし、後者を多量の希土類を含む希土類酸化物スラグ相として有効に回収する手法を確立した。   As a novel recycling method of rare earth sintered magnet grinding scraps (sludge), the present inventors have used a metal such as Si, Al, Ti and the like to melt the Fe sludge by arc melting or high frequency induction heating and subsequent liquid quenching. By using the slag of a compound and a by-product, the former was used as an electromagnetic wave absorbing material effective for electromagnetic waves in the GHz region, and the latter was effectively recovered as a rare earth oxide slag phase containing a large amount of rare earth.

本発明は、希土類金属と遷移金属との金属間化合物から構成された希土類磁石の製造時に発生するスクラップを原料の一部として用いることで、原料コストを大幅に減少することができる。また、これまでの技術で作製されたFe金属をベースとする電波吸収材がFe金属の低い磁気異方性のために数GHzの電波にのみ吸収を示すのに対して、本発明では、上記スクラップより簡便なプロセスで分離回収されるFe金属とTiとを化合化させ、結晶磁気異方性を有せしめることにより、数GHz以上の電波に対して良好な吸収特性を有する電波吸収材の作製が可能となる。   The present invention can significantly reduce the raw material cost by using, as part of the raw material, scrap generated during the production of a rare earth magnet composed of an intermetallic compound of a rare earth metal and a transition metal. In addition, in the present invention, the electromagnetic wave absorbing material based on Fe metal produced by the conventional technology exhibits absorption only in radio waves of several GHz due to the low magnetic anisotropy of Fe metal. Production of a radio wave absorber having good absorption characteristics for radio waves of several GHz or more by combining Fe metal and Ti separated and recovered by a simpler process than scrap, and having crystal magnetic anisotropy Is possible.

本発明技術の適用により、希土類磁石スラッジより、効率よく希土類成分とFe成分とを酸化物スラグおよび遷移金属系合金または金属間化合物として分別でき、更に前者を希土類磁石用希土類金属として、また後者はGHz帯域対応電波吸収体用磁性体としてそれぞれ有効利用することが可能となり、該磁石のエコマテリアル化が実現できる。   By applying the technology of the present invention, rare earth components and Fe components can be efficiently separated from rare earth magnet sludge as oxide slag and transition metal alloys or intermetallic compounds, and the former as rare earth metals for rare earth magnets and the latter as It can be effectively used as a magnetic material for a radio wave absorber corresponding to the GHz band, and the eco-material of the magnet can be realized.

以下に本発明の好ましい実施の形態を示す。
図1はこの発明に関わる電波吸収体の断面図を示したものである。反射損失(電波吸収性能)の算出は、図1のようなインピーダンス整合型のモデルを用いておこなう。このモデルでは、右図のように厚さdの吸収体の裏に金属板が置いてあり、吸収体に電波が垂直に入射する場合、吸収体表面から金属板を見込む試料のインピーダンスZinは電波の波長λ、複素誘電率ε、複素透磁率μ、自由空間のインピーダンスZ0を用いて下記(1)式のように表される。このモデルにおいては、吸収が最大、つまり反射が最小となる条件は下記(2)式に示す反射係数Sが最小の時である。このとき入射面から見たインピーダンスZinは自由空間のインピーダンスZ0と等しくなる。また、反射損失(RL)は下記(3)式のように書くことができ、Sがf(λ=c/f)とdを含むことから、(1)〜(3)式を用いて試験体の厚さdを変えた場合の反射損失を算出することができる。S<0.1となる場合は、反射波の振幅が1/10、反射電力にすれば1/100ということであり(99%吸収)、このとき (3) 式よりRL=20 (dB)となり、この値を目安として電波吸収体を設計、製造することができる。

Figure 2006077264

すなわち、上記詳述した本発明の方法により得られる電波吸収体用磁性体粉末に対しエポキシ樹脂等の樹脂バインダを、例えば重量比において100:10〜100:25で配合、混練し、例えば金属板等を基板として所定の厚さのシートあるいはボード状に成型し、これを電波吸収体として使用する。なお、電磁波が最も良好に吸収される共鳴周波数は、上述の通り電波吸収体の厚みに依存し、所望の電波の周波数に応じて厚みを調整することができる。また、図1に示した形態よりも更に薄板状としたシートまたはテープ形態、あるいは信号用ケーブル等のコードの被覆体形状に電波吸収体を加工することも可能である。
Hereinafter, preferred embodiments of the present invention will be described.
FIG. 1 is a sectional view of a radio wave absorber according to the present invention. The reflection loss (radio wave absorption performance) is calculated using an impedance matching model as shown in FIG. In this model, as shown in the right figure, a metal plate is placed behind the absorber of thickness d. When radio waves are incident on the absorber vertically, the impedance Z in of the sample looking into the metal plate from the absorber surface is Using the wavelength λ of radio waves, the complex dielectric constant ε r , the complex magnetic permeability μ r , and the free space impedance Z 0 , the following expression (1) is used. In this model, the condition for maximum absorption, that is, minimum reflection is when the reflection coefficient S shown in the following equation (2) is minimum. At this time, the impedance Z in viewed from the incident surface is equal to the free space impedance Z 0 . In addition, the reflection loss (RL) can be written as in the following formula (3), and S includes f (λ = c / f) and d, so the test is performed using the formulas (1) to (3). It is possible to calculate the reflection loss when the thickness d of the body is changed. When S <0.1, the reflected wave amplitude is 1/10, and the reflected power is 1/100 (99% absorption). At this time, RL = 20 (dB) from equation (3). Thus, the electromagnetic wave absorber can be designed and manufactured using this value as a guide.
Figure 2006077264

That is, a resin binder such as an epoxy resin is blended and kneaded in a weight ratio of, for example, 100: 10 to 100: 25 with the magnetic powder for a radio wave absorber obtained by the above-described method of the present invention, for example, a metal plate Etc. are molded into a sheet or board having a predetermined thickness as a substrate and used as a radio wave absorber. Note that the resonance frequency at which electromagnetic waves are best absorbed depends on the thickness of the radio wave absorber as described above, and the thickness can be adjusted according to the frequency of the desired radio wave. Further, it is also possible to process the radio wave absorber into a sheet or tape form that is thinner than the form shown in FIG. 1 or a covering form of a cord such as a signal cable.

以下、本発明においてSiを導入した場合の実施例を詳細に説明する。 Hereinafter, an example in which Si is introduced in the present invention will be described in detail.

実施例1
R'−Fe−B系焼結磁石スクラップとして、Nd−Fe−B系焼結磁石研磨屑粉末を用意した。また、Si原料としてSi片を用意した。
Example 1
As the R′—Fe—B sintered magnet scrap, Nd—Fe—B sintered magnet polishing scrap powder was prepared. Moreover, Si piece was prepared as Si raw material.

アーク溶解の際に溶解しやすくするために、Nd:Fe:Bの組成比が1:14:0.5となるように上記焼結磁石研磨粉末にFe粉末を加え、加圧成型することにより圧紛体を得た。この圧紛体と、圧紛体に含まれるFe成分に対して3原子%となるようにSi片を混合し、減圧アルゴン雰囲気下でアーク溶解することにより、所望のFe系金属間化合物を得た。この際、焼結磁石研磨粉末に含まれる希土類成分はFeよりも酸化されやすいために、希土類酸化物スラグとして生成する。   In order to facilitate melting during arc melting, Fe powder is added to the sintered magnet polishing powder so as to have a composition ratio of Nd: Fe: B of 1: 14: 0.5, followed by pressure molding. A compact was obtained. A desired Fe-based intermetallic compound was obtained by mixing this compact and Si pieces so as to be 3 atomic% with respect to the Fe component contained in the compact and arc melting in a reduced pressure argon atmosphere. At this time, since the rare earth component contained in the sintered magnet polishing powder is more easily oxidized than Fe, the rare earth oxide slag is generated.

アーク溶解で得られた生成物を、主としてFe系金属間化合物からなる合金相と、主として希土類酸化物からなるスラグ相とに分離をした。得られた合金相を、石英ノズルに装填し、液体急冷凝固装置を用い、リボン状の生成物を得た。このときの作製条件は、減圧アルゴン雰囲気で高周波溶解した後、加圧したアルゴンガスを石英ノズル内に導入することにより、溶融合金を石英ノズル下部の直径0.5mmの細孔から、回転周速度25m/sの銅ロール上に噴射し急冷凝固させた。この際、アーク溶解後に分離した合金中に残留していた希土類成分は、希土類酸化物スラグとなり石英ノズル壁面に生成する。   The product obtained by arc melting was separated into an alloy phase mainly composed of an Fe-based intermetallic compound and a slag phase mainly composed of a rare earth oxide. The obtained alloy phase was loaded into a quartz nozzle, and a ribbon-like product was obtained using a liquid rapid solidification apparatus. The production conditions at this time are: high-frequency dissolution in a reduced-pressure argon atmosphere, and then introducing a pressurized argon gas into the quartz nozzle to remove the molten alloy from the pores with a diameter of 0.5 mm below the quartz nozzle and the rotational peripheral speed. It was jetted onto a 25 m / s copper roll and rapidly solidified. At this time, the rare earth component remaining in the alloy separated after the arc melting becomes rare earth oxide slag and is generated on the quartz nozzle wall surface.

上記過程を経て得られたリボン状の合金は、Siの含有量が少なく、そのままでは粉砕できないため、500℃で2時間、その後引き続き400℃で2時間窒化をおこなった後、ボールミル粉砕をした。その後、得られた粉末を450℃で2時間水素還元することで、最終的な電波吸収体用磁性材料粉末を得た。この一連の過程における試料のXRDパターンの変化を図2に示す。図より、まずアーク溶解後急冷した試料ではα-Feにごくごく近い回折ピークが観測された。その後、窒化をおこなうことでXRDパターンはFe3Nに基づくブロードな回折ピークとなり、窒化が充分にされていることが確認された。その後、水素還元した試料では、観測される回折ピークは再びα-Feにごくごく近いものとなり、水素還元が充分にされていることが確認された。 The ribbon-like alloy obtained through the above process has a low Si content and cannot be pulverized as it is. Therefore, nitriding was performed at 500 ° C. for 2 hours and then at 400 ° C. for 2 hours, followed by ball milling. Thereafter, the obtained powder was subjected to hydrogen reduction at 450 ° C. for 2 hours to obtain a final magnetic material powder for radio wave absorber. The change in the XRD pattern of the sample during this series of processes is shown in FIG. From the figure, a diffraction peak very close to α-Fe was observed in the sample first quenched after arc melting. After that, by performing nitriding, the XRD pattern became a broad diffraction peak based on Fe 3 N, and it was confirmed that nitriding was sufficient. After that, in the hydrogen-reduced sample, the observed diffraction peak was very close to α-Fe again, and it was confirmed that the hydrogen reduction was sufficient.

次に、上記試料粉末を25重量%のエポキシ樹脂と混合し、130℃で30分その後170℃で30分加熱・硬化することにより、外径約10mmφの円板状試料を作製した。この試料を超音波加工機を用いて外計7.00mmφ、内径3.04mmφのドーナツ状に成形後、市販のネットワークアナライザーを用いて、Sパラメータ法により0〜20GHzの周波数領域で複素誘電率および複素透磁率の周波数依存性を求めた。得られた値より反射損失(dB)の周波数依存性を計算し、試料の電波吸収特性を評価した。   Next, the sample powder was mixed with 25 wt% epoxy resin, and heated and cured at 130 ° C. for 30 minutes and then at 170 ° C. for 30 minutes to produce a disk-shaped sample having an outer diameter of about 10 mmφ. This sample was formed into a donut shape having an outer diameter of 7.00 mmφ and an inner diameter of 3.04 mmφ using an ultrasonic processing machine, and then a complex dielectric constant and a dielectric constant in a frequency range of 0 to 20 GHz using a commercially available network analyzer by the S-parameter method. The frequency dependence of the complex permeability was obtained. The frequency dependence of the reflection loss (dB) was calculated from the obtained value, and the radio wave absorption characteristics of the sample were evaluated.

得られた電波吸収特性を図3に示す。また、図4に何ら処理を施さないNd−Fe−B系焼結磁石研磨屑粉末成形体(a)および何ら処理を施さないα-Fe粉末(b)について測定した電波吸収特性を比較として示す。図3に示した両試料においては、20 dBを超えるような良好な電波吸収特性は観測されなかった。一方で、図2に示した結果より、本試料は試料厚みを3.0から6.0mmまで変化させることで、1.5〜3.9GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み5.4mmのときに1.9GHzにおいて34.4dBであった。通常球状のα-Feの共鳴周波数は1.5GHzである。この試料はSiの添加により若干の形状異方性が生じたため、わずかに高い周波数域での吸収が得られたものの、XRDパターンからもわかるように、電磁波の吸収に寄与している成分としては、ほぼα-Feと考えられる。しかし、α-Feと比較して吸収量が大幅に増加している要因については、結晶粒が細かくなり、さらに絶縁性のNd23を主とする希土類酸化物で覆われることでより渦電流の発生が少なくなったためと思われる。 The obtained radio wave absorption characteristics are shown in FIG. In addition, FIG. 4 shows, as a comparison, the radio wave absorption characteristics measured for the Nd—Fe—B sintered magnet polishing powder powder compact (a) not subjected to any treatment and the α-Fe powder (b) not subjected to any treatment. . In both samples shown in FIG. 3, good radio wave absorption characteristics exceeding 20 dB were not observed. On the other hand, from the results shown in FIG. 2, this sample can absorb good electromagnetic waves exceeding 20 dB over a frequency range of 1.5 to 3.9 GHz by changing the sample thickness from 3.0 to 6.0 mm. I can see that. The maximum absorption was 34.4 dB at 1.9 GHz when the thickness was 5.4 mm. The resonance frequency of normally spherical α-Fe is 1.5 GHz. Since this sample had some shape anisotropy due to the addition of Si, although absorption in a slightly high frequency range was obtained, as can be seen from the XRD pattern, as a component contributing to electromagnetic wave absorption, It is considered to be almost α-Fe. However, the reason why the amount of absorption is greatly increased compared to α-Fe is that the crystal grains become finer and further covered with a rare earth oxide mainly composed of insulating Nd 2 O 3 , making it more vortex. This is thought to be due to less current generation.

実施例2
Nd:Fe:Bの組成比が1.5:14:0.75となるように焼結磁石研磨粉末とFe粉末を混合し、実施例1と同様に加圧成型することにより圧紛体を得た。実施例1よりも希土類成分を多くしたのは合金相の粉砕を容易にするためである。この圧紛体と、圧紛体に含まれるFe成分に対して10原子%となるようにSi片を混合し、減圧アルゴン雰囲気下でアーク溶解することにより、所望のFe系金属間化合物を得た。この際、焼結磁石研磨粉末に含まれる希土類成分は実施例1と同様に、希土類酸化物スラグとして生成する。
Example 2
Sintered magnet polishing powder and Fe powder are mixed so that the composition ratio of Nd: Fe: B is 1.5: 14: 0.75, and compacted by pressure molding in the same manner as in Example 1. It was. The reason why the rare earth component is increased more than in Example 1 is to facilitate the grinding of the alloy phase. A desired Fe-based intermetallic compound was obtained by mixing this compact and Si pieces so as to be 10 atomic% with respect to the Fe component contained in the compact, and arc melting in a reduced pressure argon atmosphere. At this time, the rare earth component contained in the sintered magnet polishing powder is produced as rare earth oxide slag as in the first embodiment.

アーク溶解で得られた生成物を、実施例1と同様に合金相とスラグ相に分離し、合金相は液体急冷凝固装置を用いて、リボン状にした。この処理においても、実施例1と同様に、アーク溶解後の合金相中に残留していた希土類成分は、希土類酸化物スラグとなり石英ノズル壁面に生成する。   The product obtained by arc melting was separated into an alloy phase and a slag phase in the same manner as in Example 1, and the alloy phase was formed into a ribbon using a liquid rapid solidification apparatus. Also in this treatment, as in Example 1, the rare earth component remaining in the alloy phase after arc melting becomes rare earth oxide slag and is generated on the quartz nozzle wall surface.

上記過程を経て得られたリボン状の合金は、Siの含有量が多く容易に粉砕可能であったので、ボールミルにより粉砕処理を施し電波吸収体用磁性材料粉末を得た。ボールミル粉砕処理の条件は、400rpmで2時間とした。得られた粉末のXRDパターンにはFe3Siに近いピークが観測された。 The ribbon-like alloy obtained through the above process had a high Si content and could be easily pulverized. Therefore, the ribbon-like alloy was pulverized by a ball mill to obtain a magnetic material powder for radio wave absorber. The ball mill pulverization conditions were 400 rpm and 2 hours. A peak close to Fe 3 Si was observed in the XRD pattern of the obtained powder.

上記試料粉末を25重量%のエポキシ樹脂と混合し、実施例1と同様の手法で電波吸収特性測定用の成型体試料を作製し、試料の電波吸収特性の評価をおこなった。   The sample powder was mixed with 25% by weight of an epoxy resin, a molded product sample for measuring radio wave absorption characteristics was prepared in the same manner as in Example 1, and the radio wave absorption characteristics of the samples were evaluated.

得られた電波吸収特性を図5に示す。本試料は試料厚みを3.7から6.0mmまで変化させることで、1.2〜2.3GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み5.0mmのときに1.6GHzにおいて33.7dBであった。実施例1と比較すると、20dBを超える吸収が見られる周波数域は狭くなったものの、最大の吸収が見られた周波数および吸収量はほとんど変化がなく、Si成分はFe成分に対して10原子%まで導入しても、電波吸収特性に大きな影響がないことが確認された。Si導入量を多くできる場合、得られる合金は容易に粉砕可能となるために、実施例1でおこなったような窒化・水素化等の処理を経る必要がない。これはより少ないエネルギーで焼結磁石研磨粉末スクラップを電波吸収体用磁性材料粉末として再生できることを示している。   The obtained radio wave absorption characteristics are shown in FIG. This sample was found to have good electromagnetic wave absorption exceeding 20 dB over the frequency range of 1.2 to 2.3 GHz by changing the sample thickness from 3.7 to 6.0 mm. The maximum absorption was 33.7 dB at 1.6 GHz when the thickness was 5.0 mm. Compared with Example 1, although the frequency range where absorption exceeding 20 dB was observed was narrow, the frequency and the amount of absorption at which maximum absorption was observed were almost unchanged, and the Si component was 10 atomic% with respect to the Fe component. It was confirmed that there was no significant effect on the radio wave absorption characteristics even if it was introduced. When the amount of Si introduced can be increased, the obtained alloy can be easily pulverized, so that it is not necessary to undergo treatments such as nitridation and hydrogenation performed in Example 1. This indicates that the sintered magnet polishing powder scrap can be regenerated as a magnetic material powder for a radio wave absorber with less energy.

実施例3
Nd:Fe:Bの組成比が1:14:0.5となるように焼結磁石研磨粉末とFe粉末を混合し、実施例1〜2と同様に加圧成型することにより圧紛体を得た。これとAl薄板およびSi片を、高透磁率な軟磁性材料であるセンダスト合金(Fe:Si:Al=84.9:9.7:5.4 重量比)における各元素の比率になるように混合した。この場合、Si成分量はFe成分に対して18.5原子%となる。これらの圧紛体とAl薄板およびSi片を、減圧アルゴン雰囲気下でアーク溶解することにより、所望のFe系金属間化合物を得た。この際、焼結磁石研磨粉末に含まれる希土類成分は実施例1〜2と同様に、希土類酸化物スラグとして生成する。
Example 3
The sintered magnet polishing powder and the Fe powder are mixed so that the composition ratio of Nd: Fe: B is 1: 14: 0.5, and the compact is obtained by pressure molding in the same manner as in Examples 1 and 2. It was. This, and the Al thin plate and Si piece are made to have the ratio of each element in Sendust alloy (Fe: Si: Al = 84.9: 9.7: 5.4 weight ratio) which is a soft magnetic material with high magnetic permeability. Mixed. In this case, the amount of Si component is 18.5 atomic% with respect to the Fe component. These powder compacts, the Al thin plate, and the Si piece were arc-melted under a reduced pressure argon atmosphere to obtain a desired Fe-based intermetallic compound. At this time, the rare earth component contained in the sintered magnet polishing powder is produced as rare earth oxide slag as in Examples 1-2.

アーク溶解で得られた生成物を、実施例1〜2と同様に合金相とスラグ相に分離し、合金相は液体急冷凝固装置を用いて、リボン状にした。この処理においても、実施例1〜2と同様に、合金相中に残留していた希土類成分は、希土類酸化物スラグとなり石英ノズル壁面に生成する。得られたリボン状の合金は、実施例2と同様の手法でボールミル粉砕処理を施し、電波吸収体用磁性材料粉末とした。得られた粉末のXRDパターンにはFe3Al0.7Si0.3の回折ピークが観測された。 The product obtained by arc melting was separated into an alloy phase and a slag phase in the same manner as in Examples 1 and 2, and the alloy phase was formed into a ribbon using a liquid rapid solidification apparatus. Also in this process, as in Examples 1 and 2, the rare earth component remaining in the alloy phase becomes a rare earth oxide slag and is generated on the quartz nozzle wall surface. The obtained ribbon-like alloy was ball milled by the same method as in Example 2 to obtain a magnetic material powder for a radio wave absorber. In the XRD pattern of the obtained powder, a diffraction peak of Fe 3 Al 0.7 Si 0.3 was observed.

上記試料粉末を25重量%のエポキシ樹脂と混合し、実施例1〜2と同様の手法で電波吸収特性測定用の成型体試料を作製し、試料の電波吸収特性の評価をおこなった。   The above sample powder was mixed with 25% by weight of an epoxy resin, a molded product sample for measuring radio wave absorption characteristics was prepared in the same manner as in Examples 1 and 2, and the radio wave absorption characteristics of the samples were evaluated.

得られた電波吸収特性を図6に示す。本試料は試料厚みを3.5から7.0mmまで変化させることで、1.9〜4.6GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み5.0mmのときに2.9GHzにおいて34.0dBであった。実施例1〜2と比較すると、最大の吸収量はほとんど変化がないものの、最大の吸収が見られた周波数は高周波数側へ移動しており、より高い周波数領域での効率的な吸収材として有望であることがわかった。   The obtained radio wave absorption characteristics are shown in FIG. This sample was found to have good electromagnetic wave absorption exceeding 20 dB over the frequency range of 1.9 to 4.6 GHz by changing the sample thickness from 3.5 to 7.0 mm. The maximum absorption was 34.0 dB at 2.9 GHz when the thickness was 5.0 mm. Compared with Examples 1 and 2, although the maximum absorption amount hardly changes, the frequency at which the maximum absorption was seen has moved to the high frequency side, and as an efficient absorber in a higher frequency region It turned out to be promising.

実施例4
Nd:Fe:Bの組成比が1:14:0.5となるように焼結磁石研磨粉末とFe粉末を混合し、実施例1〜3と同様に加圧成型することにより圧紛体を得た。これとSi片を、高透磁率な軟磁性材料であるセンダスト合金(Fe:Si:Al=84.9:9.7:5.4 重量比)におけるFeおよびSiの比率になるように混合した。この場合、Si成分量はFe成分に対して18.5原子%となる。これらの圧紛体とSi片を、減圧アルゴン雰囲気下でアーク溶解することにより、所望のFe系金属間化合物を得た。この際、焼結磁石研磨粉末に含まれる希土類成分は実施例1〜3と同様に、希土類酸化物スラグとして生成する。
Example 4
The sintered magnet polishing powder and the Fe powder are mixed so that the composition ratio of Nd: Fe: B is 1: 14: 0.5, and a compact is obtained by pressure molding in the same manner as in Examples 1 to 3. It was. This and the Si piece were mixed so that the ratio of Fe and Si in a Sendust alloy (Fe: Si: Al = 84.9: 9.7: 5.4 weight ratio), which is a soft magnetic material having high permeability, was mixed. . In this case, the amount of Si component is 18.5 atomic% with respect to the Fe component. These powder compacts and Si pieces were arc-melted under a reduced pressure argon atmosphere to obtain a desired Fe-based intermetallic compound. At this time, the rare earth component contained in the sintered magnet polishing powder is produced as rare earth oxide slag as in Examples 1-3.

アーク溶解で得られた生成物を、実施例1〜3と同様に合金相とスラグ相に分離し、合金相は液体急冷凝固装置を用いて、リボン状にした。この処理においても、実施例1〜3と同様に、合金相中に残留していた希土類成分は、希土類酸化物スラグとなり石英ノズル壁面に生成する。得られたリボン状の合金は、実施例2〜3と同様の手法でボールミル粉砕処理を施し、電波吸収体用磁性材料粉末とした。得られた粉末のXRDパターンにはFe3Siの回折ピークが観測された。 The product obtained by arc melting was separated into an alloy phase and a slag phase in the same manner as in Examples 1 to 3, and the alloy phase was formed into a ribbon using a liquid rapid solidification apparatus. In this process, as in Examples 1 to 3, the rare earth component remaining in the alloy phase becomes rare earth oxide slag and is generated on the quartz nozzle wall surface. The obtained ribbon-like alloy was ball milled by the same method as in Examples 2 to 3 to obtain a magnetic material powder for a radio wave absorber. In the XRD pattern of the obtained powder, a diffraction peak of Fe 3 Si was observed.

上記試料粉末を25重量%のエポキシ樹脂と混合し、実施例1〜3と同様の手法で電波吸収特性測定用の成型体試料を作製し、試料の電波吸収特性の評価をおこなった。   The above sample powder was mixed with 25% by weight of an epoxy resin, a molded product sample for measuring radio wave absorption characteristics was prepared in the same manner as in Examples 1 to 3, and the radio wave absorption characteristics of the samples were evaluated.

得られた電波吸収特性を図7に示す。本試料は試料厚みを3.4から6.2mmまで変化させることで、2.2〜4.6GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み4.5mmのときに3.3GHzにおいて38.9dBであった。実施例1〜3と比較すると、本試料が最大の吸収量が一番大きく、また最大の吸収が見られた周波数も一番高いものであった。さらに、最大の吸収を示す試料厚みも4.5mmと実施例1〜3の中で一番薄く、本試料は高い吸収特性を持つ電波吸収材として有望であることがわかった。   The obtained radio wave absorption characteristics are shown in FIG. This sample was found to exhibit good electromagnetic wave absorption exceeding 20 dB over the frequency range of 2.2 to 4.6 GHz by changing the sample thickness from 3.4 to 6.2 mm. The maximum absorption was 38.9 dB at 3.3 GHz when the thickness was 4.5 mm. Compared with Examples 1 to 3, the maximum absorption amount of this sample was the largest, and the frequency at which the maximum absorption was observed was the highest. Furthermore, the thickness of the sample exhibiting the maximum absorption is 4.5 mm, which is the thinnest among Examples 1 to 3, and it was found that this sample is promising as a radio wave absorber having high absorption characteristics.

実施例5
以下、本発明においてTiを導入した場合の実施例を詳細に説明する。
Example 5
Hereinafter, an example in which Ti is introduced in the present invention will be described in detail.

R'−Fe−B系焼結磁石スクラップとして、Nd−Fe−B系焼結磁石研磨屑粉末を用意した。また、Ti原料としてTi棒を用意した。 As the R′—Fe—B based sintered magnet scrap, Nd—Fe—B based sintered magnet polishing scrap powder was prepared. Further, a Ti rod was prepared as a Ti raw material.

まず、焼結磁石研磨屑粉末を加圧成型することにより圧紛体を得た。この圧紛体と、圧紛体に含まれるFe成分に対して60原子%となるようにTiを混合し、減圧アルゴン雰囲気下でアーク溶解することにより、所望のFe系金属間化合物を得た。この際、焼結磁石研磨粉末に含まれる希土類成分はFeよりも酸化されやすいために、希土類酸化物スラグとして生成する。 First, a compact was obtained by pressure molding sintered magnet polishing scrap powder. Ti was mixed so that this powder and the Fe component contained in the powder would be 60 atomic%, and arc melting was performed in a reduced pressure argon atmosphere to obtain a desired Fe-based intermetallic compound. At this time, since the rare earth component contained in the sintered magnet polishing powder is more easily oxidized than Fe, the rare earth oxide slag is generated.

アーク溶解で得られた生成物を、主としてFe系金属間化合物からなる合金相と、主として希土類酸化物からなるスラグ相とに分離をした。得られた合金相は、後述するXRDパターンより合金相ラーベス相のFe2Tiであり、乳鉢で容易に砕くことが可能であった。乳鉢を用いて粉砕することで粉末の粒径を35μm以下にし、その後マッフル炉内にて250℃で3時間および12時間の熱処理をし、粉末表面を酸化させた。粉末の酸素濃度は、熱処理前が0.33重量%、3時間および12時間の熱処理後はそれぞれ1.42および1.88重量%であった。 The product obtained by arc melting was separated into an alloy phase mainly composed of an Fe-based intermetallic compound and a slag phase mainly composed of a rare earth oxide. The obtained alloy phase was Fe 2 Ti of the alloy phase Laves phase from the XRD pattern described later, and could be easily crushed in a mortar. By pulverizing using a mortar, the particle size of the powder was reduced to 35 μm or less, and then heat treatment was performed at 250 ° C. for 3 hours and 12 hours in a muffle furnace to oxidize the powder surface. The oxygen concentration of the powder was 0.33% by weight before heat treatment and 1.42% and 1.88% by weight after heat treatment for 3 hours and 12 hours, respectively.

次に、上記試料粉末を20重量%のエポキシ樹脂と混合し、130℃で30分その後170℃で30分加熱・硬化することにより、外径約10mmφの円板状試料を作製した。この試料を超音波加工機を用いて外径7.00mmφ、内径3.04mmφのドーナツ状に成形後、市販のネットワークアナライザーを用いて、Sパラメータ法により0〜20GHzの周波数領域で複素誘電率および複素透磁率の周波数依存性を求めた。得られた値より反射損失(dB)の周波数依存性を計算し、試料の電波吸収特性を評価した。 Next, the sample powder was mixed with 20% by weight of an epoxy resin, and heated and cured at 130 ° C. for 30 minutes and then at 170 ° C. for 30 minutes to produce a disk-shaped sample having an outer diameter of about 10 mmφ. This sample was formed into a donut shape having an outer diameter of 7.00 mmφ and an inner diameter of 3.04 mmφ using an ultrasonic machine, and then a complex dielectric constant and a dielectric constant in the frequency range of 0 to 20 GHz by a S-parameter method using a commercially available network analyzer. The frequency dependence of the complex permeability was obtained. The frequency dependence of the reflection loss (dB) was calculated from the obtained value, and the radio wave absorption characteristics of the sample were evaluated.

一連の過程における試料のXRDパターンの変化を図8に示す。観測された回折ピークは、すべてFe2Tiのものであり、処理の前後でXRDパターンにはほとんど変化が見られないことがわかった。 FIG. 8 shows changes in the XRD pattern of the sample in a series of processes. The observed diffraction peaks were all of Fe 2 Ti, and it was found that the XRD pattern hardly changed before and after the treatment.

次に、熱処理後の粉末について得られた電波吸収特性を、熱処理を施さなかった試料の特性と併せて図9に示す。図9(a)に示した3時間熱処理した後の試料は、試料厚みを0.9から2.0mmまで変化させることで、7.8〜17.6GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み1.4mmのときに11.3GHzにおいて45.3dBであった。また、図9(b)に示した12時間熱処理した後の試料は、試料厚みを0.9から1.1mmまで変化させることで、15.6〜18.8GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み1.0mmのときに17.5GHzにおいて37.4dBであった。図9(c)に示した熱処理をしなかった場合の試料に比べ、熱処理をした場合の試料は、どちらも20dBを大きく超える良好な吸収特性を示した。これは、酸化処理によって粉末表面が絶縁性の酸化皮膜によって覆われることで、渦電流の発生が少なくなったためと考えられる。図9(a)と(b)を比較すると、(b)の方で吸収ピークが見られる周波数域は(a)の方でカバーできており、熱処理に必要な時間は3時間で充分であることがわかった。本実施例の結果は、焼結磁石研磨粉末スクラップを電波吸収体用磁性材料粉末として有効に再生できることを示している。   Next, the radio wave absorption characteristics obtained for the powder after the heat treatment are shown in FIG. 9 together with the characteristics of the sample not subjected to the heat treatment. The sample after heat treatment for 3 hours shown in FIG. 9 (a) is a good electromagnetic wave exceeding 20 dB over a frequency range of 7.8 to 17.6 GHz by changing the sample thickness from 0.9 to 2.0 mm. Was found to be absorbed. The maximum absorption was 45.3 dB at 11.3 GHz when the thickness was 1.4 mm. In addition, the sample after the heat treatment for 12 hours shown in FIG. 9 (b) exceeds 20 dB over the frequency range of 15.6 to 18.8 GHz by changing the sample thickness from 0.9 to 1.1 mm. It was found that electromagnetic wave absorption was observed. The maximum absorption was 37.4 dB at 17.5 GHz when the thickness was 1.0 mm. Compared with the sample without the heat treatment shown in FIG. 9 (c), both the samples with the heat treatment showed good absorption characteristics greatly exceeding 20 dB. This is thought to be because the generation of eddy currents is reduced by covering the powder surface with an insulating oxide film by oxidation treatment. Comparing FIGS. 9 (a) and (b), the frequency range in which the absorption peak is observed in (b) is covered by (a), and the time required for the heat treatment is sufficient for 3 hours. I understood it. The results of this example show that sintered magnet polishing powder scrap can be effectively recycled as magnetic material powder for radio wave absorbers.

実施例6
実施例5と同様の手法で、焼結磁石研磨屑粉末圧紛体とTiを混合・アーク溶解して所望のFe系金属間化合物および副生成物の希土類酸化物スラグを得た。
Example 6
In the same manner as in Example 5, the sintered magnet polishing dust powder compact and Ti were mixed and arc-melted to obtain the desired Fe-based intermetallic compound and by-product rare earth oxide slag.

アーク溶解で得られた生成物を、実施例5と同様に合金相とスラグ相とに分離をし、合金相は乳鉢を用いて数100μmに粉砕したのち、ボールミル粉砕処理をした。そして引き続きマッフル炉内にて熱処理をし、粉末表面を酸化させた。ボールミル粉砕処理、熱処理の条件および熱処理後の粉末の酸素濃度(重量%)は、以下の表1のとおりである。なお、熱処理前の粉末の酸素濃度は0.34重量%であった。また、XRDパターンにはいずれの試料もFe2Tiの回折ピークが観測された。 The product obtained by arc melting was separated into an alloy phase and a slag phase in the same manner as in Example 5. The alloy phase was pulverized to several hundred μm using a mortar and then subjected to ball mill pulverization. Subsequently, heat treatment was performed in a muffle furnace to oxidize the powder surface. Table 1 below shows the ball milling treatment, heat treatment conditions, and the oxygen concentration (% by weight) of the powder after the heat treatment. The oxygen concentration of the powder before the heat treatment was 0.34% by weight. In addition, an Fe 2 Ti diffraction peak was observed in all samples in the XRD pattern.

Figure 2006077264
Figure 2006077264

上記試料粉末を20重量%のエポキシ樹脂と混合し、実施例5と同様の手法で電波吸収特性測定用の成型体試料を作製し、試料の電波吸収特性の評価をおこなった。   The sample powder was mixed with 20% by weight of an epoxy resin, a molded product sample for measuring radio wave absorption characteristics was prepared in the same manner as in Example 5, and the radio wave absorption characteristics of the samples were evaluated.

得られた電波吸収特性を図10に示す。これら3つの試料の中で最もよい電波吸収特性を示したのは、図10(c)の試料3であった。試料3は試料厚みを1.0から2.3mmまで変化させることで、6.2〜13.4GHzの周波数領域にわたって20dBを超える良好な電磁波の吸収が見られることがわかった。最大の吸収は、厚み1.2mmのときに12GHzにおいて32.5dBであった。試料3と比較すると、図10(a)の試料1は20dBを超える吸収に必要な試料厚みが2.0〜6.0mmと厚く、また最大の吸収を示す周波数は10.2GHzと若干低いものであった。また、図10(b)の試料2は20dBを超える吸収に必要な試料厚みが3.7〜6.0mmと厚く、またその周波数範囲も狭いものであった。これら試料1および2に見られる特性の低下は、ボールミルによる粉砕で化合物の分解が始まってしまったためと思われる。試料3に見られた特性は、実施例5での試料の電波吸収特性には劣るものの、必要な熱処理条件が150℃・1時間と穏やかな条件であるため、焼結磁石研磨粉末スクラップを電波吸収体用磁性材料粉末として再生する手法として非常に有効であると思われる。   The obtained radio wave absorption characteristics are shown in FIG. Among these three samples, the sample 3 shown in FIG. 10 (c) showed the best radio wave absorption characteristics. Sample 3 was found to have good electromagnetic wave absorption exceeding 20 dB over the frequency range of 6.2 to 13.4 GHz by changing the sample thickness from 1.0 to 2.3 mm. The maximum absorption was 32.5 dB at 12 GHz when the thickness was 1.2 mm. Compared to sample 3, sample 1 in FIG. 10 (a) has a thick sample thickness of 2.0 to 6.0 mm necessary for absorption exceeding 20 dB, and the frequency of maximum absorption is slightly low at 10.2 GHz. Met. Moreover, the sample 2 of FIG.10 (b) had a sample thickness required for absorption exceeding 20 dB as thick as 3.7-6.0 mm, and the frequency range was also narrow. It seems that the deterioration of the characteristics observed in these samples 1 and 2 is that the decomposition of the compound has started by grinding with a ball mill. Although the characteristics seen in Sample 3 are inferior to the radio wave absorption characteristics of the sample in Example 5, the necessary heat treatment conditions are mild conditions of 150 ° C. and 1 hour. It seems to be very effective as a method of regenerating as a magnetic material powder for absorbers.

実施例7
焼結磁石研磨屑粉末にSiを導入した実施例1〜4および、Tiを導入した実施例5〜6において、アーク溶解もしくは液体急冷凝固処理の際に発生した、希土類酸化物スラグ相に含まれる希土類成分の量を概算した。
Example 7
Included in rare earth oxide slag phase generated during arc melting or liquid rapid solidification treatment in Examples 1-4 in which Si was introduced into sintered magnet polishing scrap powder and Examples 5-6 in which Ti was introduced The amount of rare earth component was estimated.

(a)実施例1〜4の場合、原料の焼結磁石研磨屑粉末とSiの総量に対して、得られたスラグは12.3重量%であった。また、(b)実施例5〜6の場合、原料の焼結磁石研磨屑粉末とTiの総量に対して、得られたスラグは17.5重量%であった。(a)、(b)どちらの場合も、得られたスラグのXRD測定およびEDX(エネルギー分散型蛍光X線分析)測定による成分分析の結果、スラグはほぼ希土類酸化物Nd23であることがわかった。また、(a)、(b)それぞれの場合のスラグの酸素濃度は10.72、10.53重量%であった。 (a) In the case of Examples 1 to 4, the obtained slag was 12.3% by weight with respect to the total amount of sintered magnet polishing scrap powder and Si as raw materials. Moreover, in the case of (b) Examples 5-6, the obtained slag was 17.5 weight% with respect to the total amount of the sintered magnet grinding | polishing waste powder and Ti of a raw material. In both cases (a) and (b), as a result of component analysis by XRD measurement and EDX (energy dispersive X-ray fluorescence analysis) of the obtained slag, the slag is almost a rare earth oxide Nd 2 O 3 I understood. In addition, the oxygen concentration of the slag in each of the cases (a) and (b) was 10.72 and 10.53% by weight.

上記結果より、スラグに含まれる希土類成分を概算すると、(a)の場合は原料の焼結磁石研磨屑粉末に含まれる希土類成分の62%、また(b)の場合は64%となり、貴重な資源である希土類成分を有効に回収できていることがわかった。
From the above results, when the rare earth component contained in the slag is estimated, it is 62% of the rare earth component contained in the raw sintered magnet polishing scrap powder in the case of (a) and 64% in the case of (b), which is valuable. It was found that the rare earth component as a resource could be effectively recovered.

本発明に関わる電波吸収体の基本構造である。1 is a basic structure of a radio wave absorber according to the present invention. 焼結磁石研磨屑粉末に3原子%のSiを導入し、アーク溶解および急冷した後の試料、その後窒化した試料、その後水素還元した試料のX線回折パターンである。3 is an X-ray diffraction pattern of a sample after introducing 3 atomic% Si into sintered magnet polishing scrap powder, arc melting and quenching, then nitriding sample, and then hydrogen reduction sample. 焼結磁石研磨屑粉末に3原子%のSiを導入して作製した試料の、反射損失の周波数依存性である。This is the frequency dependence of reflection loss of a sample prepared by introducing 3 atomic% Si into sintered magnet polishing scrap powder. (a)何ら処理を施さないNd−Fe−B系焼結磁石研磨屑粉末成形体、および(b)何ら処理を施さないα-Fe粉末について測定した反射損失の周波数依存性であるIt is the frequency dependence of the reflection loss measured for (a) Nd—Fe—B based sintered magnet abrasive scrap powder compact without any treatment, and (b) α-Fe powder with no treatment. 焼結磁石研磨屑粉末に10原子%のSiを導入して作製した試料の、反射損失の周波数依存性である。This is the frequency dependence of reflection loss of a sample produced by introducing 10 atomic% Si into sintered magnet polishing scrap powder. 焼結磁石研磨屑粉末に、Fe:Si:Al=84.9:9.7:5.4(重量比)となるようにAlおよびSiを導入して作製した試料の、反射損失の周波数依存性である。Frequency dependence of reflection loss of a sample prepared by introducing Al and Si into a sintered magnet polishing scrap powder so that Fe: Si: Al = 84.9: 9.7: 5.4 (weight ratio) It is sex. 焼結磁石研磨屑粉末に、Fe:Si=84.9:9.7(重量比)となるようにSiを導入して作製した試料の、反射損失の周波数依存性である。This is the frequency dependence of reflection loss of a sample prepared by introducing Si into a sintered magnet polishing scrap powder so that Fe: Si = 84.9: 9.7 (weight ratio). 焼結磁石研磨屑粉末に60原子%のTiを導入し、アーク溶解し粉砕した後の試料、その後250℃で3時間および12時間の熱処理をした試料のX線回折パターンである。It is an X-ray diffraction pattern of a sample after introducing 60 atomic% Ti into sintered magnet polishing scrap powder, arc melting and pulverizing, and then heat treatment at 250 ° C. for 3 hours and 12 hours. 焼結磁石研磨屑粉末に60原子%のTiを導入し、アーク溶解し粉砕した後、マッフル炉を使って、(a)250℃で3時間熱処理、(b)250℃で12時間熱処理、(c)熱処理なし、それぞれの試料の反射損失の周波数依存性である。After introducing 60 atomic% Ti into sintered magnet polishing scrap powder, arc melting and pulverizing, (a) heat treatment at 250 ° C. for 3 hours, (b) heat treatment at 250 ° C. for 12 hours, ( c) The frequency dependence of the reflection loss of each sample without heat treatment. 焼結磁石研磨屑粉末に60原子%のTiを導入して作製した試料を、ボールミル粉砕装置およびマッフル炉を使って、(a)400rpmで1時間粉砕、150℃で1時間熱処理、(b)400rpmで1時間粉砕、250℃で1時間熱処理、(c)200rpmで2時間粉砕、150℃で1時間熱処理をした試料の反射損失の周波数依存性である。Using a ball mill pulverizer and a muffle furnace, a sample prepared by introducing 60 atomic% Ti into sintered magnet polishing scrap powder is (a) pulverized at 400 rpm for 1 hour, and heat treated at 150 ° C. for 1 hour. (B) It is the frequency dependence of the reflection loss of a sample that was pulverized at 400 rpm for 1 hour, heat treated at 250 ° C. for 1 hour, (c) crushed at 200 rpm for 2 hours, and heat treated at 150 ° C. for 1 hour.

Claims (7)

Nd−Fe−B系希土類焼結磁石研削屑(スラッジ)に対する有効なリサイクル方法として、スラッジ粉末、磁性体中の磁性成分(主にFe)組成比調整のためのFe、CoおよびNi金属(以下M'金属という)と磁性体の構造形成成分であるAl、Si、Ti、Zr、NbおよびMo金属(以下M''金属という)のうち、少なくともそれぞれを一種以上とを原子比(スラッジに含まれるFeとM'金属との合計量/M''金属量)として3から60%で溶解し、該スラッジ中の希土類成分を主成分とする酸化物スラグと該スラグ中のFeとM'金属とM''金属とからなる合金または金属間化合物の融液とを形成せしめ、前者を希土類粗原料として再利用すると共に、後者をM'金属とM''金属とからなる合金または金属間化合物からなる磁性材料として再利用することを特徴とする再生技術。 As an effective recycling method for Nd-Fe-B rare earth sintered magnet grinding scrap (sludge), Fe, Co and Ni metal (hereinafter referred to as sludge powder, magnetic component (mainly Fe) composition ratio adjustment in the magnetic material) M 'metal) and Al, Si, Ti, Zr, Nb, and Mo metal (hereinafter referred to as M ″ metal), which is a structure forming component of the magnetic substance, at least one or more of each in an atomic ratio (sludge is included in the sludge) The total amount of Fe and M ′ metal / M ″ metal amount) dissolved in 3 to 60%, and oxide slag mainly composed of rare earth components in the sludge, Fe and M ′ metal in the slag And an alloy composed of M ″ metal or a melt of intermetallic compound, the former is reused as a rare earth crude material, and the latter is alloy or intermetallic compound composed of M ′ metal and M ″ metal. Magnetic material consisting of Play technology, characterized in that the re-use this in. 請求項1において、該スラッジ粉末、M'金属およびM''金属の混合物を高周波またはアーク溶解後、表層にあるスラグ部と合金または金属間化合物からなる磁性材料部とを粗粉砕により分離することを特徴とする該磁石スクラップ再生技術。 2. The sludge powder, a mixture of M ′ metal and M ″ metal is subjected to high-frequency or arc melting, and then the slag portion on the surface layer and the magnetic material portion made of an alloy or intermetallic compound are separated by coarse pulverization. The magnet scrap recycling technology characterized by the above. 請求項1において、該スラッジ粉末、M'金属およびM''金属の混合物を、高周波またはアーク溶解により融液とし、溶湯の流し出しによりスラグ部と合金または金属間化合物からなる磁性材料部とを分離することを特徴とする該磁石スクラップの再生技術。 2. The sludge powder, a mixture of M ′ metal and M ″ metal is made into a melt by high frequency or arc melting, and a slag part and a magnetic material part made of an alloy or an intermetallic compound are formed by pouring molten metal. The magnet scrap recycling technique characterized by separating. 上記請求項において、スラグ部より分離させた合金または金属間化合物インゴットまたは溶湯を、最溶解またはそのままの状態で急冷し、均一な微結晶組織からなる薄帯とする該磁石スクラップの再生技術。 In the above-mentioned claim, the magnet scrap recycling technique according to claim 1, wherein the alloy or intermetallic compound ingot or molten metal separated from the slag portion is rapidly melted in the most molten state or as it is, to form a thin ribbon having a uniform microcrystalline structure. 上記請求項1から3において、スラグ部より分離させた合金または金属間化合物インゴットをそのまま、または上記請求項4において、急冷した合金または金属間化合物薄帯を、それぞれ粉砕し、樹脂とのコンパウンド状シートまたはボンド状等の成型体をGHz帯域対応の合金または金属間化合物に基づく電波吸収材として再利用する再生技術。 In Claims 1 to 3, the alloy or intermetallic compound ingot separated from the slag portion is used as it is, or the rapidly cooled alloy or intermetallic compound ribbon is crushed and compounded with a resin. Recycling technology that reuses molded products such as sheets or bonds as radio wave absorbers based on alloys or intermetallic compounds compatible with the GHz band. 上記請求項において得られたFe系金属間化合物に対して、空気中で150〜250℃の温度範囲で1〜12時間熱処理をし、合金または金属間化合物粉末表面に酸化被膜を形成せしめることでFe系金属間化合物粉末同士の絶縁をはかり、複素誘電率を低く抑えかつ粉末粒子内の渦電流の発生を抑制することで、更なる高い電磁波吸収特性を有することを特徴とする合金または金属間化合物粉末を製造する方法。 The Fe-based intermetallic compound obtained in the above claims is heat-treated in air at a temperature range of 150 to 250 ° C. for 1 to 12 hours to form an oxide film on the surface of the alloy or intermetallic compound powder. Insulation between Fe-based intermetallic powders, lowering the complex dielectric constant and suppressing the generation of eddy currents in the powder particles, which has further higher electromagnetic wave absorption characteristics A method for producing a compound powder. 上記請求項において、M'およびM''金属が、製造過程または使用済み機器から発生するスクラップである該再生技術。
The recycling technology as claimed in claim 1, wherein the M ′ and M ″ metals are scrap generated from a manufacturing process or used equipment.
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