JP2006072460A - Fluid controller - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid controller that is easily installed in the inside of a semiconductor manufacturing device, easy to connect to piping and wiring, capable of reducing pressure loss due to the piping connection, capable of easily changing arrangement for each module, capable of preventing corrosion from generating, even if a corrosive fluid is used as the fluid, and capable of controlling the flow rate, even if the flowing-in fluid is pulsating. <P>SOLUTION: This fluid controller has a flowmeter sensor part 4 having an ultrasonic oscillator 12 for emitting an ultrasonic wave into the fluid, and an ultrasonic oscillator 13 for receiving ultrasonic waves from the ultrasonic oscillator 12 to output a signal to a flowmeter amplifier part 64, and a pressure control valve 5 for controlling pressure of the fluid, and the flowmeter sensor part 4 and the pressure control valve 5 are installed inside a casing 2, having a fluid flowing-in inlet 3 and a fluid flowing-out outlet 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fluid control device used in a fluid transportation pipe that requires fluid control. More particularly, the present invention relates to a fluid control device that is easy to install in a semiconductor manufacturing apparatus or the like, piping and wiring connection, and that does not cause corrosion even when a corrosive fluid is used as the fluid.

  Conventionally, wet etching, in which a wafer surface is etched using cleaning water obtained by diluting a chemical solution such as hydrofluoric acid with pure water, is used as one step of a semiconductor manufacturing process. It is said that the concentration of cleaning water for these wet etching needs to be managed with high accuracy. In recent years, the method of managing the concentration of cleaning water by the flow rate ratio of pure water and chemical liquid has become the mainstream, and therefore, a fluid control device that manages the flow volume of pure water or chemical liquid with high accuracy has been applied. Yes.

  Various fluid control devices have been proposed, but there has been a pure water flow rate control device 101 that performs flow rate control when the pure water temperature is variable as shown in FIG. 5 (see, for example, Patent Document 1). The configuration includes a flow rate adjusting valve 102 that is adjusted in opening degree under the action of an operating pressure to adjust the pure water flow rate, and an operating pressure adjusting valve 103 that adjusts the operating pressure supplied to the flow rate adjusting valve 102. A flow rate measuring device 104 for measuring the flow rate of pure water output from the flow rate adjusting valve 102, and an on-off valve 105 for allowing or blocking the flow of pure water that has passed through the flow rate measuring device 104. A control device for controlling the flow rate of pure water output from the flow rate adjustment valve 102 to be constant by balancing the operation pressure adjusted by the pressure adjustment valve 103 and the output pressure of pure water in the flow rate adjustment valve 102. 101 for feedback control of the operating pressure supplied from the operating pressure adjusting valve 103 to the flow rate adjusting valve 102 based on the measured value so that the measured value by the flow rate measuring device 104 is constant. It was characterized in that a control circuit. The effect is that even if the output pressure at the flow rate adjustment valve 102 changes with the temperature change of the pure water, the operation pressure is adjusted in real time in accordance with the change amount, so that the output pressure is output from the flow rate adjustment valve 102. Since the pure water flow rate is adjusted, the pure water flow rate can be maintained at a constant value with high accuracy.

  Further, as a module for performing fluid control, there has been a fluid control module 106 connected in-line to a fluid circuit for transferring fluid as shown in FIG. 6 (see, for example, Patent Document 2). The configuration includes a housing 107 having a chemically inert flow path, an adjustable control valve 108 connected to the flow path, a pressure sensor 109 connected to the flow path, and a throttle located in the flow path. And a control valve 108 and a pressure sensor 109 housed in the housing 107, and a driver 111 having a mechanical, electrical, or pneumatic configuration for driving the control valve 108, and the control valve 108 And a controller 112 electrically connected to the pressure sensor 109 is accommodated in the housing 107. The effect is that the flow rate in the flow channel is measured from the pressure difference measured in the fluid circuit and the diameter of the throttle 110, and the control valve 108 is driven by feedback control based on the measured flow rate. The internal flow rate could be determined with high accuracy.

JP-A-11-161342 JP 2001-242940 A

  However, since the conventional pure water flow rate control device 101 has many components, when it is installed in a semiconductor manufacturing apparatus or the like, piping connection work, electrical wiring and air piping work for each component are respectively performed. There is a problem that the operation is complicated and time-consuming, and the piping and wiring are troublesome and a mistake may occur. In addition, pressure loss due to the connection occurs because the connection is made via a tube or fitting when connecting the piping, and this pressure loss affects the flow meter side, resulting in a large flow measurement error, and accurate flow control. There was a problem that became difficult. Furthermore, since components that may be corroded in the flow meter 104 are used in the flow meter 104, when a corrosive fluid is used as the fluid, the components in the flow meter 104 are corroded by permeation of corrosive gas. There was a problem.

  Further, when a corrosive fluid is used as the fluid, the conventional flow control module 106 corrodes the controller 112 and the driver 111 when the permeated corrosive gas fills the flow control module 106, thereby There is a risk that accurate flow control cannot be performed due to the influence of the flow control operation, or in the worst case, it may be damaged. At this time, even if the cause of failure of the module is due to corrosion of the controller 112 or the driver 111, the flow control module 106 designed on the assumption that the parts are integrated is difficult to repair or replace for each part. Therefore, there is a problem that the cost for repairing damage is increased because the module itself is replaced. In addition, when the fluid flowing into the fluid control device is a pulsating flow having a fast pressure fluctuation cycle, the control valve 108 operates to control the flow rate with respect to the pulsating fluid, but hunting occurs and the flow rate cannot be controlled. There is a problem, and there is a problem that the driver 111 and the control valve 108 are damaged if continued as they are.

  The present invention has been made in view of the above-described problems of the prior art, and can be easily installed in a semiconductor manufacturing apparatus or the like, connected to piping and wiring, reduces pressure loss due to piping connection, and each module. To provide a fluid control device that can control the flow rate even when a corrosive fluid is used and no corrosion occurs even if a corrosive fluid is used. With the goal.

The configuration of the fluid control device of the present invention for solving the above problems will be described with reference to FIGS.
A flowmeter sensor unit 4 including an ultrasonic transducer 12 that transmits ultrasonic waves into a fluid and an ultrasonic transducer 13 that receives ultrasonic waves transmitted from the ultrasonic transducer 12 and outputs signals to the flowmeter amplifier unit 64. And a pressure control valve 5 that controls the pressure of the fluid by the operation pressure, and the flowmeter sensor unit 4 and the pressure control valve 5 are in one casing 2 having a fluid inlet 3 and a fluid outlet 6. The first feature is that it is connected to and installed.

A valve module 1 in which a flowmeter sensor unit 4 and a pressure control valve 5 are installed in one casing (2);
Based on the flow rate value calculated by the flow meter amplifier unit 64 that calculates the flow rate by the signal of the flow meter sensor unit 4, the electropneumatic converter 66 that adjusts the operating pressure of the pressure control valve 5, and the flow meter amplifier unit 64. A control unit 65 for adjusting the operation pressure and performing feedback control includes an electrical module 62 installed in one casing 63,
A second feature is that the valve module 1 and the electrical module 62 are configured separately, for example, each is configured by an independent casing.

The pressure control valve 5 is
The second gap 22 provided at the bottom center and opened to the bottom, the inlet channel 24 communicating with the second gap 22, and the upper face opened at the top and the diameter of the second gap 22. The first gap 23 having a large diameter, the outlet channel 25 communicating with the first gap 23, the first gap 23 and the second gap 22 are communicated, and the diameter of the first gap 23 is smaller. A main body 14 having a communication hole 26 having a diameter, and the upper surface of the second gap 22 being a valve seat 27;
A bonnet 15 having a cylindrical gap 28 communicating with an air supply hole 30 and a discharge hole 31 provided on a side surface or an upper surface, and having a step portion 29 on the inner peripheral surface of the lower end;
A spring receiver 16 having a through hole 32 in the center portion and fitted in the step portion 29 of the bonnet 15, a first joint portion 37 having a smaller diameter than the through hole 32 of the spring receiver 16 at the lower end portion, and a collar portion at the upper portion A piston 17 that is provided in the gap 28 of the bonnet 15 so as to be movable up and down;
A spring 18 sandwiched and supported by the lower end surface of the flange portion 35 of the piston 17 and the upper end surface of the spring receiver 16;
A first diaphragm in which a peripheral portion is sandwiched and fixed between the main body 14 and the spring receiver 16 and a central portion forming the first valve chamber 44 is covered with the first gap 23 of the main body 14 to be thick. 40, a second joint 42 that is joined and fixed to the first joint 37 of the piston 17 through the through hole 32 of the spring receiver 16 at the center of the upper surface, and the communication hole 26 of the main body 14 at the center of the bottom surface. A first valve mechanism 19 having a third joint 43 provided;
A valve body 45 located inside the second gap 22 of the main body 14 and having a larger diameter than the communication hole 26 of the main body 14, and a third of the first valve mechanism 19 provided protruding from the upper end surface of the valve body 45. A fourth joint 47 that is joined and fixed to the joint 43, a rod 48 that protrudes from the lower end surface of the valve body 45, and a second diaphragm 50 that extends from the lower end surface of the rod 48 in the radial direction. A second valve mechanism 20 having
A projecting portion 52 located below the main body 14 and sandwiching and fixing the peripheral portion of the second diaphragm 50 of the second valve mechanism 20 with the main body 14 is provided at the upper center, and a notch recess 53 is formed at the upper end of the projecting portion 52. And a base plate 21 provided with a breathing hole 54 communicating with the notch recess 53.
The third configuration is that the opening area of the fluid control unit 55 formed by the valve body 45 of the second valve mechanism body 20 and the valve seat 27 of the main body 14 changes as the piston 17 moves up and down. Features.

  Also, cables 70 and 71 for connecting the flow meter sensor unit 4 of the valve module 1 and the flow meter amplifier unit 64 of the electrical module 62 are connected to the flow meter sensor unit 4 and / or via connectors 59, 60, 67 and 68, respectively. Alternatively, a fourth feature is that the flowmeter amplifier unit 64 is detachably provided.

  In addition, a connector box 56 is provided in the casing 2 of the valve module 1, and an intake hole 57 that communicates with the discharge hole 31 of the pressure control valve 5 and an exhaust hole 58 that communicates with the outside of the casing 2 are provided in the connector box 56. This is the fifth feature.

In addition, the flowmeter sensor unit 4 includes an inlet channel 7 that communicates with the fluid inlet 3, a first rising channel 8 that is suspended from the inlet channel 7, and an inlet flow that communicates with the first rising channel 8. A straight channel 9 provided substantially parallel to the axis of the path 7, a second rising channel 10 suspended from the linear channel 9, and an axis of the inlet channel 7 communicating with the second rising channel 10. An outlet channel 11 that is provided substantially in parallel and communicates with the inlet channel 24 of the pressure control valve 5 is provided continuously, and the axis of the straight channel 9 on the side walls of the first and second rising channels 8 and 10 It is a flow meter sensor unit 4 in which the ultrasonic transducers 12 and 13 are arranged to face each other at the intersecting position,
The flow meter amplifier unit 64 is a flow meter amplifier unit 64 to which the ultrasonic transducers 12 and 13 are connected via cables 70 and 71.
The flow meter sensor unit 4 and the flow meter amplifier unit 64 constitute a flow meter,
The flow rate measuring device calculates the flow rate of the fluid flowing through the linear flow path 9 by alternately switching between transmission and reception of the ultrasonic transducers 12 and 13 and measuring the ultrasonic propagation time difference between the ultrasonic transducers 12 and 13. A sixth feature is that the ultrasonic flowmeter is configured as described above.

Further, the flow meter sensor unit 74 includes an inlet channel 77 communicating with the fluid inlet 3, a vortex generator 78 that generates Karman vortex suspended in the inlet channel 77, and an outlet channel 79. The straight flow path 80 is continuously provided, and the ultrasonic transducers 81 and 82 are disposed on the side wall on the downstream side of the vortex generator 78 of the straight flow path 80 so as to face each other at a position orthogonal to the flow path axial direction. Flow meter sensor unit 74,
The flow meter amplifier unit 86 is a flow meter amplifier unit 86 to which the ultrasonic transducers 81 and 82 are connected via cables 92 and 93.
The flow meter sensor unit 74 and the flow meter amplifier unit 86 constitute a flow meter,
The flow rate measuring device calculates the flow rate based on the phase difference between the signal transmitted by the ultrasonic transducer 81 and the signal received by the ultrasonic transducer 82 for the Karman vortex generation frequency generated downstream of the vortex generator 78. The seventh feature is that the ultrasonic vortex flowmeter is configured as described above.

  Further, the casing 63 of the electrical module 62 has an eighth feature in that a discharge port 73 provided for discharging the gas filled in the casing 63 is formed.

  In the present invention, at least the flowmeter sensor unit 4 and the pressure control valve 5 may be configured to be connected in one casing 2. This is because the flow meter sensor unit 4 and the pressure control valve 5 are integrated so that the flow control device can be provided in a compact manner, and the piping connection is facilitated, and the connection part by a joint or the like is reduced so that the connection is reduced. Pressure loss due to the portion can be reduced. In addition, since the pressure control valve can control the fluid to a constant pressure, even if the inflowing fluid has a pulsating flow with a fast pressure fluctuation cycle, stable pressure control can be performed without causing hunting. The flow rate of the fluid flowing out from the pressure control valve 5 is determined by the relationship between the pressure adjusted by the pressure control valve 5 and the pressure loss after the pressure control valve 5 by the combination with the flow meter sensor unit 4. This is preferable because the flow rate is controlled by the pressure control valve 5 so that the flow rate becomes a constant value at the set flow rate.

  In the present invention, the pressure control valve 5 is not particularly limited as long as the pressure can be controlled by the operation pressure, but preferably has the configuration of the pressure control valve 5 of the present invention. This is because compressed air is constantly supplied from the air supply hole 30 into the gap 28 of the bonnet 15 and is always discharged from the discharge hole 31. Therefore, when a corrosive fluid is used as the fluid, the corrosive gas permeates into the gap 28. Even if it does, it will be discharged by riding on the flow of air from the air supply hole 30 to the discharge hole 31, and it is difficult to accumulate inside the gap 28. Therefore, the corrosion of the spring 18 that may be corroded among the components of the pressure control valve 5 is prevented, and it is not necessary to perform a coating or the like for preventing the corrosion and can be manufactured at a low cost. In addition, since the spring constant does not change due to the coating, the individual difference can be kept small and the yield can be improved. Furthermore, the compact structure is preferable because stable fluid pressure control can be obtained.

  In the present invention, the flow meter sensor unit 4 of the valve module 1 and the flow meter amplifier unit 64 of the electrical module 62 may be directly connected by cables 70 and 71, but the connector 59 connected to the flow meter sensor unit 4, 60 and the flowmeter amplifier unit 64 are preferably connected to the flowmeter sensor unit 4 and the flowmeter amplifier unit 64 via cables 70 and 71 via connectors 67 and 68 connected to the flowmeter amplifier unit 64. At this time, the connectors may be provided only with the connectors 59 and 60 connected to the flow meter sensor unit 4, or may be provided only with the connectors 67 and 68 connected to the flow meter amplifier unit 64, or both may be provided. By connecting via the connector, the wiring connection of the fluid control device can be made easily and in a short time only by connecting the connector, and since it is detachable, it is easy to remove the wiring connection, so that each module This is preferable because the arrangement of the can be easily changed.

  Further, a connector box 56 may be provided in the casing 2 of the valve module 1 of the present invention. The inert gas or air discharged from the discharge hole 31 of the pressure control valve 5 is supplied into the connector box 56 from the intake hole 57 of the connector box 56 and discharged from the exhaust hole 58, so that corrosive fluid is supplied to the fluid. Even when the corrosive gas permeates into the connector box 56 when used, it is discharged by riding on the air flow from the intake hole 57 to the exhaust hole 58, and is difficult to collect inside the connector box 56. This is preferable because corrosion of the connectors 59 and 60 that may be corroded is prevented.

  In addition, the flow rate measuring device configured by the flow meter sensor unit 4 and the flow meter amplifier unit 64 of the present invention is not particularly limited as long as the measured flow rate is converted into an electrical signal and output to the control unit 65. An ultrasonic flow meter and an ultrasonic vortex flow meter are preferable, and those having the configurations of the ultrasonic flow meter and the ultrasonic vortex flow meter of the present invention are more preferable. In the case of the ultrasonic flowmeter of the present invention, the flow rate can be accurately measured with respect to a minute flow rate, and therefore, it is suitable for fluid control of a minute flow rate. In addition, the ultrasonic vortex flowmeter of the present invention is suitable for fluid control of a large flow rate because the flow rate can be accurately measured for a large flow rate. Thus, accurate fluid control can be performed by properly using the ultrasonic flowmeter and the ultrasonic vortex flowmeter according to the flow rate of the fluid.

  In addition, the casing 2, the fluid inlet 3 of the present invention, the flowmeter sensor unit 4 excluding the ultrasonic transducers 12 and 13, the components of the pressure control valve 5, the material of the casing 63 of the fluid outlet 6 and the electrical module 62 Can be any of vinyl chloride resin, polypropylene, polyethylene, etc., as long as they are made of resin, especially when a corrosive fluid is used as the fluid, polytetrafluoroethylene (hereinafter referred to as PTFE), polyvinylidene fluoride (hereinafter referred to as PVDF). Fluorine resin such as tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer resin (hereinafter referred to as PFA) is preferable. If it is made of fluororesin, corrosion of each part even if corrosive gas permeates. There is no worry.

  Further, the valve module 1 of the present invention is provided with the fluid inlet 3, the flowmeter sensor unit 4, the pressure control valve 5, and the fluid outlet 6. However, if the valve module 1 has a structure that does not cause corrosion, the valve module 1 Other piping members such as a thermometer may be provided. The electrical module 62 is also provided with the flow meter amplifier unit 64, the control unit 65, and the electropneumatic converter 66, but other electrical components may be provided.

The present invention has the structure as described above, and the following excellent effects are obtained.
(1) Since the flow meter sensor unit and the pressure control valve are connected in one casing, the flow control device can be provided in a compact manner, piping connection is facilitated, and the number of connecting parts such as joints is reduced. Therefore, pressure loss due to the connecting portion can be reduced, and stable pressure control can be performed without causing hunting even if the inflowing fluid is a pulsating flow having a fast pressure fluctuation period.
(2) Since the valve module and the electrical module are divided into two parts, even if a corrosive gas permeates when a corrosive fluid is used as the fluid, the electrical equipment has components that may corrode. The module does not corrode because it can be isolated from the valve module through which the corrosive fluid flows.
(3) Each component that performs fluid control is installed in a valve module and an electrical module, and is divided into two parts. The parts are detachably connected via connectors so that they can be connected to a semiconductor manufacturing apparatus. Installation, piping and wiring connection are easy and can be performed in a short time, and can be easily removed, and the arrangement of each module can be easily changed.
(4) By using the pressure control valve of the configuration of the present invention, the fluid pressure can be controlled stably with a compact structure, and the compressed air inside the gap is always discharged, so the spring is caused by the permeated corrosive gas. Without being corroded, it is not necessary to take measures such as coating of a spring, and it can be manufactured at low cost.
(5) By using the ultrasonic flowmeter of the configuration of the present invention, accurate and stable fluid control can be performed when a minute flow rate of fluid is flowing.
(6) By using the ultrasonic vortex flowmeter having the configuration of the present invention, accurate and stable fluid control can be performed when a large flow rate of fluid is flowing.

  Hereinafter, embodiments of the present invention will be described with reference to the embodiments shown in the drawings. However, it is needless to say that the present invention is not limited to the embodiments. FIG. 1 is a longitudinal sectional view of a fluid control apparatus showing a first embodiment of the present invention. FIG. 2 is an enlarged view of a main part of the pressure control valve of FIG. FIG. 3 is a longitudinal sectional view of a fluid control apparatus showing a second embodiment of the present invention. 4 is a cross-sectional view taken along the line AA in FIG.

  Hereinafter, the fluid control apparatus according to the first embodiment of the present invention will be described with reference to FIGS. 1 and 2.

  Reference numeral 1 denotes a valve module. The valve module 1 is formed of a casing 2, a fluid inlet 3, a flowmeter sensor unit 4, a pressure control valve 5, and a fluid outlet 6, each of which has the following configuration.

  2 is a PVDF casing. In the casing 2, a flow meter sensor unit 4 and a pressure control valve 5 are fixed to the bottom surface of the casing 2 with bolts and nuts (not shown), a fluid inlet 3, a flow meter sensor unit 4, a pressure The control valve 5 and the fluid outlet 6 are installed in the state of being continuously connected. The casing 2 is provided with a connector box 56 which will be described later. The connector box 56 is formed so as to be supplied with an inert gas or air from the intake hole 57 and exhausted from the exhaust hole 58. The flow meter sensor unit 4 and the pressure control valve 5 may be reversed in order.

  3 is a PTFE fluid inlet. The fluid inflow port 3 communicates with an inlet channel 7 of a flow meter sensor unit 4 which will be described later.

  Reference numeral 4 denotes a flowmeter sensor unit that measures the flow rate of the fluid. The flowmeter sensor unit 4 includes an inlet channel 7 that communicates with the fluid inlet 3, a first rising channel 8 that is suspended from the inlet channel 7, and an inlet channel 7 that communicates with the first rising channel 8. A straight channel 9 provided substantially parallel to the axis of the second channel, a second rising channel 10 suspended from the linear channel 9, and a parallel to the axis of the inlet channel 7 communicating with the second rising channel 10. The ultrasonic vibrators 12 and 13 are opposed to each other at a position intersecting with the axis of the straight flow path 9 on the side walls of the first and second rising flow paths 8 and 10. Has been placed. The ultrasonic vibrators 12 and 13 are covered with a fluororesin, and wiring extending from the vibrators 12 and 13 is connected to connectors 59 and 60 in a connector box 56 described later. The parts other than the ultrasonic transducers 12 and 13 of the flow meter sensor unit 4 are made of PFA.

  A pressure control valve 5 controls the fluid pressure according to the operation pressure. The pressure control valve 5 includes a main body 14, a bonnet 15, a spring receiver 16, a piston 17, a spring 18, a first valve mechanism 19, a second valve mechanism 20, and a base plate 21.

  Reference numeral 14 denotes a PTFE main body having a diameter larger than the diameter of the second gap 22 provided open to the bottom at the center of the lower part and the second gap 22 provided open at the top at the upper part. An inlet channel 24 having one gap 23 and communicating with the second gap 22 on the side surface, and an outlet channel communicating with the first gap 23 on the surface facing the inlet channel 24. 25, and a communication hole 26 that communicates the first gap 23 and the second gap 22 and has a diameter smaller than the diameter of the first gap 23 is provided. The upper surface portion of the second gap 22 is a valve seat 27. In addition, the inlet channel 24 communicates with the outlet channel 11 of the flowmeter sensor unit 4, and the outlet channel 25 communicates with the fluid outlet 6 described later.

  15 is a PVDF bonnet, which is provided with a cylindrical gap 28 inside and a stepped portion 29 having a diameter larger than the gap 28 on the inner peripheral surface of the lower end, and an inert gas compressed inside the gap 28 on the side surface. In order to supply air and air, the air supply hole 30 that communicates between the air gap 28 and the outside, and a microhole discharge hole 31 for discharging a small amount of inert gas and air introduced from the air supply hole 30 are provided.

  A flat circular spring receiver 16 made of PVDF has a through hole 32 in the center, and the upper half is fitted into the stepped portion 29 of the bonnet 15. An annular groove 33 is provided in a side surface portion of the spring receiver 16, and by attaching an O-ring 34, the exhaust gas from the exhaust hole 31 of the bonnet 15 and the discharge of the air from the bonnet 15 are excluded. Prevents outflow of inert gas and air.

  Reference numeral 17 denotes a PVDF piston, which has a disc-shaped flange 35 at the top, a piston shaft 36 that protrudes in a cylindrical shape from the center lower portion of the flange 35, and a female screw that is provided at the lower end of the piston shaft 36. And a first joint portion 37 composed of a portion. The piston shaft 36 is provided with a smaller diameter than the through hole 32 of the spring receiver 16, and the first joint portion 37 is joined to the second joint portion 42 of the first valve mechanism 19 described later by screwing.

  Reference numeral 18 denotes a SUS spring, which is sandwiched between the lower end surface of the flange 35 of the piston 17 and the upper end surface of the spring receiver 16. As the piston 17 moves up and down, the spring 18 also expands and contracts, but a long free length is preferably used so that the change in load at that time is small.

  Reference numeral 19 denotes a PTFE first valve mechanism body, which includes a membrane portion 39 having a cylindrical portion 38 projecting upward from the outer peripheral edge portion, a first diaphragm 40 having a thick portion at the center portion, A second joint portion 42 made of a small-diameter male screw provided at the upper end portion of the shaft portion 41 provided so as to protrude from the central upper surface of one diaphragm 40, and a female formed at the lower end portion provided protruding from the lower surface of the central portion. It has the 3rd junction part 43 screwed together with the 4th junction part 47 of the postscript 2nd valve mechanism body 20 which consists of a thread part. The cylindrical portion 38 of the first diaphragm 40 is sandwiched and fixed between the main body 14 and the spring receiver 16, so that the first valve chamber 44 formed on the lower surface of the first diaphragm 40 serves as an inlet of the main body 14. The fluid from the flow path 24 is formed so as not to flow out from the first valve chamber 44 to the gap 28 of the bonnet 15. Further, the compressed inert gas or air supplied to the gap 28 of the bonnet 15 by the O-ring 34 does not flow out to the first valve chamber 44, and the upper surface of the first diaphragm 40, the gap 28 of the bonnet 15 The air chamber filled with the compressed inert gas or air supplied from the air supply hole 30 of the bonnet 15 is formed.

  Reference numeral 20 denotes a PTFE second valve mechanism body, which is disposed inside the second gap 22 of the main body 14 and has a larger diameter than the communication hole 26, and projects from the upper end surface of the valve body 45. A shaft portion 46 provided on the upper end of the valve body 45, a fourth joint portion 47 including a male screw portion that is screwed and fixed to a third joint portion 43 provided on the upper end thereof, and a lower end surface of the valve body 45. And a second diaphragm 50 having a cylindrical protrusion 49 provided so as to extend radially from the lower end surface of the rod 48 and project downward from the peripheral edge. A cylindrical protrusion 49 of the second diaphragm 50 is sandwiched and fixed between the protrusion 52 of the base plate 21 and the main body 14 to be described later, thereby forming the second gap 22 of the main body 14 and the second diaphragm 50. The second valve chamber 51 is formed so that the fluid from the inlet channel 24 of the main body 14 does not flow out from the second valve chamber 51 to the notch recess 53 of the base plate 21.

  Reference numeral 21 denotes a PVDF base plate, which has a protruding portion 52 that clamps and fixes the cylindrical protruding portion 49 of the second diaphragm 50 of the second valve mechanism 20 with the main body 14 at the center of the upper portion. A notch recess 53 is provided at the upper end portion, and a breathing hole 54 communicating with the notch recess 53 is provided on the side surface. The main body 14 is passed between the bonnet 15 and clamped by bolts and nuts (not shown). is doing.

  6 is a PTFE fluid outlet.

  A PVDF connector box 56 is provided on the casing 2. The connector box 56 is provided with an intake hole 57 communicating with the inside of the casing 2 and an exhaust hole 58 communicating with the outside of the casing 2, and the intake hole 57 is connected to the discharge hole 31 of the pressure control valve 5 through a tube. Yes. The connector box 56 is configured to be supplied with compressed inert gas or air from the intake hole 57 and to be exhausted from the exhaust hole 58. Connectors 59 and 60 connected to wiring extending from the ultrasonic transducers 12 and 13 are disposed in the connector box 56, and the connectors 59 and 60 are connected to wiring extending from the flow meter amplifier unit 64 of the electrical module 62 described later. The cables 70 and 71 are detachably connected to the connectors.

  Further, an air connector 61 connected to a pipe extending to the air supply hole 30 of the pressure control valve 5 is fixed to the casing 2 so that a connection portion protrudes from the outer surface of the casing 2.

  62 is an electrical module. The electrical module 62 is formed of a casing 63, a flowmeter amplifier unit 64, a control unit 65, and an electropneumatic converter 66, each of which has the following configuration.

  63 is a PVDF casing. A flow meter amplifier unit 64, a control unit 65, and an electropneumatic converter 66 are installed in the casing 63. In addition, the casing 63 is supplied with an inert gas or air from the outside to the electropneumatic converter 66, the casing 63 is provided with a discharge port 73, and compressed air is supplied from the electropneumatic converter 66 into the casing 63. Yes. The casing 63 is formed such that the compressed air supplied from the electropneumatic converter 66 into the casing 63 is discharged from the discharge port 73.

  Reference numeral 64 denotes a flow meter amplifier unit. The flow meter amplifier unit 64 has a calculation unit that calculates the flow rate from the signal output from the flow meter sensor unit 4. The calculation unit includes a transmission circuit that outputs ultrasonic vibration of a fixed period to the ultrasonic transducer 12 on the transmission side, a reception circuit that receives ultrasonic vibration from the ultrasonic transducer 13 on the reception side, and each ultrasonic wave A comparison circuit for comparing the propagation time of vibration and an arithmetic circuit for calculating a flow rate from the propagation time difference output from the comparison circuit are provided.

  Reference numeral 65 denotes a control unit. The control unit 65 has a control circuit that performs feedback control on the flow rate output from the flow meter amplifier unit 64 so as to be a set flow rate, and controls the operation pressure of the electropneumatic converter 66 described later. .

  66 is an electropneumatic converter that adjusts the operating pressure of the inert gas or air. The electropneumatic converter 66 is composed of an electromagnetic valve that is electrically driven to adjust the operation pressure proportionally, and adjusts the operation pressure of the pressure control valve 5 in accordance with a control signal from the control unit 65.

  In addition, connectors 67 and 68 connected to the wiring extending from the flow meter amplifier unit 64 are fixed to the casing 63 so that the connection portions protrude from the outer surface of the casing 63. Similarly, an air connector 69 connected to a pipe extending from the electropneumatic converter 66 is fixed so that the connection portion protrudes from the outer surface of the casing 63.

  The valve module 1 and the electrical module 62 connect the connectors of the cables 70 and 71 to the connectors 59, 60, 67, and 68 of the modules 1 and 62, respectively, so that the tubes 72 are connected to the modules 1 and 62, respectively. The air connectors 61 and 69 are detachably connected to each of the air connectors 61 and 69 so as to be divided into two parts. Note that the number of cables of the present invention is two, but they may be combined. In this case, one connector is provided for each module 1 and 62.

  Next, the operation of the fluid control apparatus according to the first embodiment of the present invention will be described.

The fluid flowing in from the fluid inlet 3 of the valve module 1 first flows into the flow meter sensor unit 4.
The flow rate of the fluid that has flowed into the flowmeter sensor unit 4 is measured by the straight flow path 9. The ultrasonic vibration is propagated from the ultrasonic transducer 12 located on the upstream side to the ultrasonic transducer 13 located on the downstream side with respect to the fluid flow. The ultrasonic vibration received by the ultrasonic transducer 13 is converted into an electric signal and output to the calculation unit of the flow meter amplifier unit 64. When the ultrasonic vibration propagates from the upstream ultrasonic transducer 12 to the downstream ultrasonic transducer 13 and is received, transmission / reception is instantaneously switched in the calculation unit, and the ultrasonic transducer located on the downstream side The ultrasonic vibration is propagated from 13 to the ultrasonic transducer 12 located on the upstream side. The ultrasonic vibration received by the ultrasonic transducer 12 is converted into an electric signal and output to the calculation unit of the flow meter amplifier unit 64. At this time, since the ultrasonic vibration propagates against the flow of the fluid in the straight flow path 9, the propagation of the ultrasonic vibration in the fluid is greater than when the ultrasonic vibration is propagated from the upstream side to the downstream side. The speed is delayed and the propagation time is increased. The output mutual electrical signals are measured for propagation time in the calculation unit of the flowmeter amplifier unit 64, and the flow rate is calculated from the difference in propagation time. The flow rate calculated by the flow meter amplifier unit 64 is converted into an electrical signal and output to the control unit 65.

  Next, the fluid that has passed through the flow meter sensor unit 4 flows into the pressure control valve 5. The control unit 65 outputs a signal to the electropneumatic converter 66 so that the deviation is zero based on the deviation from the flow rate measured in real time with respect to an arbitrary set flow rate, and the electropneumatic converter 66 responds accordingly. The operating pressure is supplied to the pressure control valve 5 and driven. The flow rate of the fluid flowing out from the pressure control valve 5 is determined by the relationship between the pressure adjusted by the pressure control valve 5 and the pressure loss after the pressure control valve 5, and the higher the adjusted pressure, the higher the flow rate. Conversely, the lower the pressure, the smaller the flow rate. For this reason, the fluid is controlled by the pressure control valve 5 so that the flow rate becomes a constant value at the set flow rate, that is, the deviation between the set flow rate and the measured flow rate is converged to zero.

  Here, the operation of the pressure control valve 5 with respect to the operating pressure supplied from the electropneumatic converter 66 will be described. The valve body 45 of the second valve mechanism 20 includes the repulsive force of the spring 18 held between the flange 35 of the piston 17 and the spring receiver 16, and the fluid pressure on the lower surface of the first diaphragm 40 of the first valve mechanism 19. Due to this, a force for urging upward is exerted, and a force for urging downward is exerted by the pressure of the operation pressure on the upper surface of the first diaphragm 40. More strictly, the lower surface of the valve body 45 and the upper surface of the second diaphragm 50 of the second valve mechanism body 20 are subjected to fluid pressure, but their pressure receiving areas are substantially equal, so the force is almost offset. . Therefore, the valve body 45 of the second valve mechanism body 20 is stationary at a position where the above three forces are balanced.

  Here, when the operating pressure supplied from the electropneumatic converter 66 is increased, the force that pushes down the first diaphragm 40 increases, thereby forming the valve body 45 and the valve seat 27 of the second valve mechanism 20. Since the opening area of the fluid control unit 55 is increased, the pressure of the first valve chamber 44 can be increased. Conversely, when the operating pressure is decreased, the opening area of the fluid control unit 55 is decreased and the pressure is also decreased. Therefore, an arbitrary pressure can be set by adjusting the operation pressure.

  In this state, when the upstream fluid pressure increases, the pressure in the first valve chamber 44 also instantaneously increases. Then, the force that the lower surface of the first diaphragm 40 receives from the fluid is greater than the force that the upper surface of the first diaphragm 40 receives from the compressed air due to the operating pressure, and the first diaphragm 40 moves upward. Accordingly, the position of the valve body 45 also moves upward, so that the opening area of the fluid control unit 55 formed between the valve seat 27 and the pressure in the first valve chamber 44 is reduced. Eventually, the position of the valve body 45 moves to a position where the three forces are balanced and stops. If the load of the spring 18 does not change greatly at this time, the pressure inside the air gap 28, that is, the force received by the upper surface of the first diaphragm 40 is constant, so the pressure received by the lower surface of the first diaphragm 40 is substantially constant. Therefore, the fluid pressure on the lower surface of the first diaphragm 40, that is, the pressure in the first valve chamber 44 is substantially the same as the original pressure before the upstream pressure increases.

  When the upstream fluid pressure decreases, the pressure in the first valve chamber 44 also decreases instantaneously. Then, the force that the lower surface of the first diaphragm 40 receives from the fluid is smaller than the force that the upper surface of the first diaphragm 40 receives from the compressed air due to the operating pressure, and the first diaphragm 40 moves downward. Accordingly, the position of the valve body 45 is also moved downward, so that the opening area of the fluid control unit 55 formed between the valve seat 27 and the fluid pressure in the first valve chamber 44 is increased. Eventually, the position of the valve body 45 moves to a position where the three forces are balanced and stops. Therefore, the fluid pressure in the first valve chamber 44 is substantially the same as the original pressure, as in the case where the upstream pressure has increased.

  With the above operation, the fluid flowing into the fluid inlet 3 of the valve module 1 is controlled to be constant at the set flow rate, and flows out from the fluid outlet 6. The ultrasonic flow meter including the flow meter sensor unit 4 and the flow meter amplifier unit 64 measures the flow rate from the propagation time difference with respect to the flow direction of the fluid, so that the flow rate can be accurately measured even with a minute flow rate. The compact and stable fluid pressure control can be obtained by the configuration, so it has excellent effect on fluid control of minute flow rate. Furthermore, even if the upstream pressure of the fluid flowing into the fluid inlet 3 of the valve module 1 fluctuates, the flow rate is maintained independently by the operation of the pressure control valve 5, so instantaneous pressure fluctuations such as pump pulsation Even if this occurs, the flow rate can be controlled stably. Moreover, since each component of the valve module 1 is integrally provided in the casing, the pressure loss at the connection portion is minimized, and the flow rate can be measured with less error.

  Next, when the fluid of the fluid control device according to the first embodiment of the present invention is a corrosive fluid, an operation when corrosive gas permeates into the valve module will be described.

  The fluid control device of the present invention is configured by being divided into two parts, a valve module 1 and an electrical module 62. Each component in the valve module 1 is made of a fluororesin that is resistant to corrosion, so there is no concern about corrosion, and the ultrasonic vibrators 12 and 13 are also covered with the fluororesin, so that corrosion can be prevented. Further, the portion of the valve module 1 that is likely to be corroded is the spring 18 of the pressure control valve 5 and the connectors 59 and 60, but the inside of the gap 28 of the pressure control valve 5 provided with the spring 18 is an air supply hole. Compressed air supplied from 30 is always discharged from the discharge hole 31. Further, in the connector box 56 in which the connectors 59 and 60 are arranged, compressed air supplied from the discharge hole 31 and supplied from the intake hole 57 is supplied. Since the exhaust hole 58 is always discharged out of the casing 2, the permeated corrosive gas is discharged along with the air flow, and it is difficult to accumulate in the air gap 28 and the connector box 56 to prevent corrosion. can do.

  On the other hand, the electrical module 62 has components that affect flow measurement and fluid control when corroded. However, since it is configured separately from the valve module 1, it is installed at a position where corrosive gas does not affect. Corrosion of parts in the electrical module 62 can be prevented. Further, the inside of the casing 63 of the electrical module 62 is installed at a position where the electrical module 62 is affected by the corrosive gas by constantly discharging the compressed air supplied from the electropneumatic converter 66 into the casing 63 from the exhaust port 73. Even if this is done, the permeated corrosive gas will be discharged along with the air flow, and it will be difficult to accumulate in the casing 63, and corrosion of each part of the electrical module 62 can be prevented.

  Next, a procedure for installing the fluid control apparatus according to the first embodiment of the present invention in the semiconductor manufacturing apparatus will be described.

  First, the valve module 1 is disposed at a predetermined position of a pipe line in the semiconductor manufacturing apparatus, the fluid inlet 3 and the fluid outlet 6 are connected to the pipe of the pipe, and the valve module 1 is fixed in the semiconductor manufacturing apparatus. And the electrical module 62 is installed in the predetermined position away from the pipe line in a semiconductor manufacturing apparatus. Next, one connector of the cables 70 and 71 is put in the connector box 56 of the valve module 1 and connected to the connectors 59 and 60, and the other connector of the cables 70 and 71 is connected to the connectors 67 and 68 of the electrical module 62. . Subsequently, one end of the tube 72 is inserted and connected to the air connector 61 of the valve module 1, and the other end of the tube 72 is connected to the air connector 69 of the electrical module 62. By the above procedure, installation in the semiconductor manufacturing apparatus can be performed very easily, and the connection between the wiring and the air piping can be performed easily and in a short time by only connecting the connector. Further, according to the configuration of the present invention, replacement work is easy even when a part of the fluid control device is damaged. Furthermore, when installing a plurality of fluid control devices, it is possible to collectively manage the fluid control devices of the present invention by installing each electrical module together in the control box.

  Hereinafter, a fluid control apparatus according to a second embodiment of the present invention will be described with reference to FIGS. 3 and 4.

  Reference numeral 74 denotes a flowmeter sensor unit installed in the casing 76 of the valve module 75. The flow meter sensor unit 74 includes a linear flow path 80 including an inlet flow path 77, a vortex generator 78 that generates a Karman vortex suspended in the inlet flow path 77, and an outlet flow path 79. On the side wall of the flow path 80 on the downstream side of the vortex generator 78, the ultrasonic vibrators 81 and 82 are arranged opposite to each other at a position orthogonal to the flow path axis direction. The ultrasonic vibrators 81 and 82 are covered with a fluororesin, and the wiring extending from the vibrators 81 and 82 is connected to the connectors 84 and 85 in the connector box 83. Similar to the first embodiment, the connector box 83 is formed such that compressed inert gas or air from its intake hole is supplied and exhausted from the exhaust hole. The parts other than the ultrasonic transducers 81 and 82 of the flow meter sensor unit 74 are made of PTFE.

  Reference numeral 86 denotes a flowmeter amplifier unit disposed in the casing 89 of the electrical module 88. The flow meter amplifier unit 86 is provided with a calculation unit that calculates the flow rate of the fluid by obtaining the flow velocity of the fluid flowing through the flow path from the Karman vortex generation cycle (frequency). The calculation unit includes a transmission circuit that outputs ultrasonic vibration of a fixed period to the ultrasonic transducer 81 on the transmission side, a reception circuit that receives ultrasonic vibration from the ultrasonic transducer 82 on the reception side, and each ultrasonic vibration. And a calculation circuit for calculating the flow rate by integrating the Karman vortex detection signals output from the comparison circuit. In addition, connectors 90 and 91 connected to the wiring extending from the flowmeter amplifier unit 86 are fixed to the casing 89 so that the connection portions protrude from the outer surface of the casing 89.

  The valve module 75 and the electrical module 88 are divided into two parts by detachably connecting the connectors of the cables 92 and 93 to the connectors 84, 85, 90 and 91 of the modules 75 and 88, respectively. . Since the other structure of 2nd Embodiment is the same as that of 1st Embodiment, description is abbreviate | omitted.

  Next, the operation of the fluid control apparatus according to the second embodiment of the present invention will be described.

  The fluid that has flowed into the valve module 75 first flows into the flow meter sensor unit 74. The flow rate of the fluid that has flowed into the flow meter sensor unit 74 is measured in the straight flow path 80. The ultrasonic vibration is propagated from the ultrasonic vibrator 81 toward the ultrasonic vibrator 82 with respect to the fluid flowing in the straight flow path 80. Karman vortices generated downstream of the vortex generator 78 are generated at a period proportional to the flow velocity of the fluid, and Karman vortices with different vortex directions are alternately generated. When passing, it is accelerated or decelerated in the direction of travel. Therefore, the frequency (period) of the ultrasonic vibration received by the ultrasonic vibrator 82 varies due to the Karman vortex. The ultrasonic vibrations transmitted and received by the ultrasonic transducers 81 and 82 are converted into electric signals and output to the calculation unit of the flow meter amplifier unit 86. In the calculation unit of the flowmeter amplifier unit 86, the Kalman obtained from the phase difference between the ultrasonic vibration output from the transmission-side ultrasonic transducer 81 and the ultrasonic vibration output from the reception-side ultrasonic transducer 82. The flow rate of the fluid flowing through the straight flow path 80 is calculated based on the frequency of the vortex. The flow rate calculated by the flow meter amplifier unit 86 is converted into an electrical signal and output to the control unit 87. Since the operation of other parts of the second embodiment is the same as that of the first embodiment, the description thereof is omitted.

  Further, when the fluid used in the second embodiment is a corrosive fluid, the action when the corrosive gas permeates into the valve module and the fluid control device of the second embodiment are installed in the semiconductor manufacturing apparatus. Since the procedure is the same as that of the first embodiment, description thereof is omitted. The ultrasonic vortex flow meter comprising the flow meter sensor unit 74 and the flow meter amplifier unit 86 is capable of measuring the flow rate accurately even at a large flow rate because the Karman vortex is generated as the flow rate is increased, and is excellent in controlling a large flow rate. Demonstrate the effect.

It is a longitudinal cross-sectional view of the fluid control apparatus which shows 1st embodiment of this invention. FIG. 2 is an enlarged view of a main part of the pressure control valve in FIG. It is a longitudinal cross-sectional view of the fluid control apparatus which shows 2nd embodiment of this invention. It is sectional drawing which follows the AA line of FIG. It is a conceptual block diagram which shows the conventional control apparatus of a pure water flow rate. It is a fragmentary sectional view showing the conventional fluid control module.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Valve module 2 Casing 3 Fluid inlet 4 Flowmeter sensor part 5 Pressure control valve 6 Fluid outlet 7 Inlet flow path 8 First rising flow path 9 Straight flow path 10 Second rising flow path 11 Outlet flow path 12 Ultrasonic vibration Child 13 Ultrasonic vibrator 14 Body 15 Bonnet 16 Spring receiver 17 Piston 18 Spring 19 First valve mechanism 20 Second valve mechanism 21 Base plate 30 Air supply hole 31 Discharge hole 56 Connector box 57 Intake hole 58 Exhaust hole 59 Connector 60 Connector 61 Air Connector 62 Electrical Module 63 Casing 64 Flow Meter Amplifier 65 Control Unit 66 Pneumatic Converter 67 Connector 68 Connector 69 Air Connector 70 Cable 71 Cable 72 Tube 73 Outlet 74 Flow Meter Sensor Port 75 Valve Module 76 Casing 77 Inlet Flow 78 shedder 79 outlet channel 80 the straight channel 81 ultrasonic transducer 82 ultrasonic transducer 83 connector box 84 connector 85 connector 86 flowmeter amplifier unit 87 the control unit 88 electrical module 89 casing 90 connector 91 connector 92 Cable 93 Cable

Claims (8)

An ultrasonic transducer (12) for transmitting ultrasonic waves into a fluid, and an ultrasonic transducer (13) for receiving ultrasonic waves transmitted from the ultrasonic transducer (12) and outputting signals to the flow meter amplifier unit (64) And a pressure control valve (5) for controlling the pressure of the fluid by operating pressure, and at least the flow meter sensor part (4) and the pressure control valve (5) Connected and installed in one casing (2) having a fluid inlet (3) and a fluid outlet (6),
A fluid control device. A valve module (1) in which the flow meter sensor unit (4) and the pressure control valve (5) are installed in one casing (2);
A flow meter amplifier unit (64) for calculating a flow rate based on a signal from the flow meter sensor unit (4), an electropneumatic converter (66) for adjusting an operation pressure of the pressure control valve (5), and a flow meter amplifier unit (64 And a control unit (65) for adjusting the operation pressure based on the flow rate value calculated in (1) and performing feedback control, and an electrical module (62) installed in one casing (63),
The valve module (1) and the electrical module (62) are configured separately.
The fluid control apparatus according to claim 1. The pressure control valve (5)
A second gap (22) provided open to the bottom in the center of the lower part, an inlet channel (24) communicating with the second gap (22), and an upper face provided open on the upper part. A first gap (23) having a diameter larger than the diameter of the gap (22), an outlet channel (25) communicating with the first gap (23), the first gap (23) and the second gap It has a communication hole (26) that communicates with the gap (22) and has a diameter smaller than the diameter of the first gap (23), and the upper surface of the second gap (22) serves as a valve seat (27). Main body (14),
A bonnet (15) having a cylindrical gap (28) therein and having a step (29) on the inner peripheral surface of the lower end;
An air supply hole (30) provided in a side surface or an upper surface of the bonnet (15) for supplying a pressurized gas into the cylindrical gap (28);
A spring receiver (16) fitted into the step (29) of the bonnet (15) and having a through hole (32) in the center;
The lower end portion has a first joint portion (37) having a diameter smaller than that of the through hole (32) of the spring receiver (16), and a flange portion (35) is provided at the upper portion inside the gap (28) of the bonnet (15). A piston (17) inserted in a vertically movable manner;
A spring (18) clamped and supported by the lower end surface of the flange (35) of the piston (17) and the upper end surface of the spring receiver (16);
The center where the peripheral portion is sandwiched and fixed between the main body (14) and the spring receiver (16), and forms the first valve chamber (44) so as to cover the first gap (23) of the main body (14). The first diaphragm (40) having a thickened portion and the first joint (37) of the piston (17) through the through hole (32) of the spring receiver (16) are joined and fixed to the center of the upper surface. A first valve mechanism (19) having a second joint (42) and a third joint (43) provided through the communication hole (26) of the main body (14) in the center of the lower surface;
A valve body (45) located inside the second gap (22) of the main body (14) and having a larger diameter than the communication hole (26) of the main body (14), and protruding to the upper end surface of the valve body (45) A fourth joint part (47) which is joined and fixed to the third joint part (43) of the first valve mechanism (19), and a rod (48) which projects from the lower end surface of the valve body (45). And a second valve mechanism (20) having a second diaphragm (50) provided to extend radially from the lower end surface of the rod (48),
A protrusion (52) located at the lower center of the main body (14) and sandwiching and fixing the peripheral edge of the second diaphragm (50) of the second valve mechanism (20) with the main body (14) is provided at the upper center. A base plate (21) provided with a notch recess (53) at the upper end of the protrusion (52) and a breathing hole (54) communicating with the notch recess (53);
The opening area of the fluid control unit (55) formed by the valve body (45) of the second valve mechanism (20) and the valve seat (27) of the main body (14) as the piston (17) moves up and down. Configured to change,
The fluid control apparatus according to claim 1, wherein the fluid control apparatus is configured as described above. Cables (70, 71) for connecting the flow meter sensor unit (4) of the valve module (1) and the flow meter amplifier unit (64) of the electrical module (62) are connectors (59, 60, 67, 68). The flow meter sensor unit (4) and / or the flow meter amplifier unit (64) are detachably provided via the
The fluid control device according to any one of claims 1 to 3, wherein the fluid control device is characterized in that: A discharge hole (31) for discharging gas from the inside of the cylindrical gap (28) is provided on a side surface or an upper surface of the bonnet (15) of the pressure control valve (5),
The discharge hole (31) communicates with an intake hole (57) of a connector box (56) provided in the casing (2) of the valve module (1), and the connector box (56) is connected to the outside of the casing (2). An exhaust hole (58) that communicates is provided,
The fluid control apparatus according to claim 4. The flowmeter sensor unit (4) includes an inlet channel (7) communicating with the fluid inlet (3), a first rising channel (8) suspended from the inlet channel (7), and a first A straight channel (9) provided in communication with the rising channel (8) and substantially parallel to the axis of the inlet channel (7), and a second rising channel (10) suspended from the straight channel (9). ) And an outlet channel (11) that communicates with the second rising channel (10) and communicates with the inlet channel (24) of the pressure control valve (5) provided substantially parallel to the axis of the inlet channel (7). Are arranged continuously, and the ultrasonic transducers (12, 13) are opposed to each other at a position intersecting with the axis of the straight flow path (9) on the side walls of the first and second rising flow paths (8, 10). The flow meter sensor unit (4) arranged
The flow meter amplifier unit (64) is a flow meter amplifier unit (64) to which ultrasonic transducers (12, 13) are connected via cables (70, 71).
The flow meter sensor unit (4) and the flow meter amplifier unit (64) alternately switch the transmission / reception of the ultrasonic transducers (12, 13) to transmit ultrasonic waves between the ultrasonic transducers (12, 13). Constituting an ultrasonic flowmeter that calculates the flow rate of the fluid flowing through the straight flow path (9) by measuring the time difference;
The fluid control device according to any one of claims 1 to 5, wherein the fluid control device is configured as described above. The flow meter sensor unit (74) includes an inlet channel (77) communicating with the fluid inlet (3) and a vortex generator (78) that generates Karman vortices suspended in the inlet channel (77). And a straight flow path (80) including an outlet flow path (79) are continuously provided, and each ultrasonic transducer is provided on the downstream side wall of the vortex generator (78) of the straight flow path (80). (81, 82) is a flow meter sensor unit (74) disposed opposite to each other at a position orthogonal to the flow path axis direction;
The flow meter amplifier unit (86) is a flow meter amplifier unit (86) to which each ultrasonic transducer (81, 82) is connected via a cable (92, 93).
The flow meter sensor unit (74) and the flow meter amplifier unit (86) are superposed on the signal transmitted by the ultrasonic transducer (81) and the frequency of the Karman vortex generated downstream of the vortex generator (78). Constituting an ultrasonic vortex flowmeter for calculating the flow rate according to the phase difference with the signal received by the acoustic transducer (82);
The fluid control device according to any one of claims 1 to 5, wherein the fluid control device is configured as described above. The casing (63) of the electrical module (62) has a discharge port (73) provided for discharging the gas filled in the casing (63).
The fluid control device according to any one of claims 2 to 7, wherein the fluid control device is characterized in that:

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