JP2006068999A - Method of manufacturing inkjet recording head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet recording head capable of preventing wrinkles from being formed on a dumper member and of not creating deviation in bonding between the dumper member and a highly rigid fluid channel forming member. <P>SOLUTION: A flat laminated sub-assembly member 10 is formed such that the dumper member 12 and a fluid channel forming plate 14 are bonded with each other as shown in figure (A). The fluid channel forming plate 14 is selectively removed via a mask 42 to form a communication hole 18 and an ink pool 20 as shown in figures (B) and (C). The dumper member 12 is selectively removed via a mask 44 to form a nozzle 16 communicating with the communication hole 18 as shown in figures (C) and (D). In this method of manufacturing, as the dumper member 12 having the nozzle, the ink pool, and the like formed thereon beforehand is not bonded with the fluid channel forming plate 14, it is possible to prevent wrinkles from being formed on the dumper member 12 and no deviation in the bonding is caused. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method of manufacturing an ink jet recording head that ejects ink droplets from a plurality of nozzles by applying a pressure wave to ink filled in a pressure chamber.

  2. Description of the Related Art Conventionally, ink jet recording apparatuses that eject ink droplets from a plurality of nozzles and perform printing on a recording medium such as paper have various advantages such as small size, low cost, and quietness, and are widely marketed.

  As such an ink jet recording apparatus, for example, a piezo ink jet in which a piezoelectric element is disposed adjacent to a pressure chamber, a pressure wave is applied to ink in the pressure chamber by pressurization from the piezoelectric element, and ink droplets are ejected from a nozzle. The method is adopted. This piezo inkjet system has many advantages such as high-speed printing and high resolution.

In this piezo ink jet recording apparatus, a damper material that absorbs the reflected wave is provided in order to prevent the reflected wave of the backward component of the pressure wave generated in the pressure chamber from being propagated to other pressure chambers. The damper material is formed of a low-rigidity film, a thin film SUS, or the like. For example, an adhesive is applied to a high-rigidity channel forming member (for example, SUS) in which a liquid chamber serving as a pressure chamber or an ink channel is formed. Or a flow path forming member is sequentially joined using a damper material as an adhesive layer (see, for example, Patent Document 1).
Japanese Patent Laid-Open No. 2002-19109 (pages 5 to 6, FIG. 1, etc.)

  However, in the ink jet recording head described in Patent Document 1, since the damper material is joined to the highly rigid flow path forming member in which the pressure chamber or the ink flow path is formed, the linear expansion difference between the flow path forming member and the damper material. This causes wrinkles in the damper material.

  On the other hand, in an inkjet recording head that forms a nozzle on a damper material and aligns and adheres to the ink flow path of the flow path forming member, it is necessary to adjust the stacking position of the damper material and the flow path forming member with high accuracy. There is also a problem that a joining shift occurs.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an ink jet recording head manufacturing method capable of preventing the generation of wrinkles of a damper material and the joining displacement with a highly rigid flow path forming member. To do.

  In order to achieve the above object, the invention described in claim 1 is a method of manufacturing an ink jet recording head that ejects ink droplets from a plurality of nozzles by applying pressure waves to ink filled in a pressure chamber. A plate-like first flat composite member obtained by joining a low-rigidity damper member and a first high-rigidity member having a higher rigidity than the damper member, and the first high-rigidity member from one side of the first flat composite member. The member is selectively removed to form a plurality of ink flow paths communicating with the pressure chamber, and the damper member is selectively removed to form a plurality of nozzles or ink passages.

  According to the first aspect of the present invention, the plate-like first flat composite member has a two-layer structure in which a low-rigidity damper member and a first high-rigidity member are joined, and one side of the first flat composite member. A plurality of ink flow paths communicating with the pressure chamber are formed by selectively removing the high-rigidity member from the pressure chamber. Furthermore, a plurality of nozzles are formed by selectively removing the damper member of the first flat composite member. In this way, since the ink flow path and the like are formed in the first flat composite member in which the damper member and the first high-rigidity member are joined, wrinkles can be prevented from occurring in the damper member, and highly accurate position adjustment can be performed at the time of joining. Not necessary. Therefore, the manufacturing process can be made efficient.

  The invention according to claim 1 can also be applied to an inkjet head structural component in which the damper member does not share a nozzle.

  According to a second aspect of the present invention, there is provided an ink jet recording head manufacturing method for ejecting ink droplets from a plurality of nozzles by applying a pressure wave to ink filled in a pressure chamber, wherein the damper member and the damper have a low rigidity. A plate-like second flat composite member in which a first high-rigidity member having higher rigidity than the member is joined, and a second high-rigidity member is joined to the opposite side of the surface of the damper member to which the first high-rigidity member is joined. And selectively removing the first high-rigidity member from one side of the second flat composite member to form a plurality of ink flow paths communicating with the pressure chamber, and from the other side of the second flat composite member. The second high-rigidity member is selectively removed to form a plurality of step holes, and then the damper member is selectively removed to form the nozzle or ink passage in the step hole.

  In the second aspect of the present invention, the second high-rigidity member is joined to the damper member on the opposite side to the surface where the first high-rigidity member of the second flat composite member is joined, and the other of the second flat composite members By selectively removing the second high-rigidity member from the side, a plurality of step holes are formed. Thereafter, the damper member is selectively removed to form a nozzle in the step hole. The first high-rigidity member is formed with an ink flow path as in the first aspect. For this reason, highly accurate position adjustment is not required at the time of joining, and it can manufacture efficiently. In addition, since the periphery of the nozzle is retracted from the surface of the second high-rigidity member by the step hole, the recording medium that has been lifted during printing is prevented from coming into contact with the periphery of the nozzle, and the water-repellent film around the nozzle is damaged. There is no.

  The invention according to claim 2 can also be applied to an inkjet head structural component in which the damper member does not share a nozzle.

  According to a third aspect of the present invention, in the ink jet recording head manufacturing method according to the first or second aspect, the damper member is made of a polymer resin material.

  In the third aspect of the present invention, the damper member is made of a polymer resin material and is easily deformed. Therefore, the reflected wave propagating from the pressure chamber to the ink flow path is absorbed during printing, and the reflected wave is transferred to the other pressure chamber. Propagation can be prevented more reliably. Further, since the damper member can be easily processed, a plurality of nozzles can be formed at desired positions.

  According to a fourth aspect of the present invention, in the method for manufacturing an ink jet recording head according to any one of the first to third aspects, the first high-rigidity member or the second high-rigidity member is made of a metal material. It is characterized by becoming.

  In the invention according to claim 4, even if the first high-rigidity member or the second high-rigidity member is made of a metal material and joined to the damper member, the first flat composite member or the second flat composite member is formed. Wrinkles can be prevented from occurring in the damper member.

  According to a fifth aspect of the present invention, in the method of manufacturing an ink jet recording head according to any one of the first to fourth aspects, the first high-rigidity member and the damper member or the first height The first flat composite member or the second flat composite member is formed by joining the rigid member, the damper member, and the second high-rigidity member with an adhesive.

  In the invention according to claim 5, the first flat composite member or the second flat composite member is formed by joining the damper member and the first high rigidity member, or the first high rigidity member, the damper member, and the second high rigidity member with an adhesive. Since the member is formed, wrinkles can be prevented from occurring in the damper member. Moreover, position adjustment is not required at the time of joining, and manufacturing efficiency is good.

  According to the present invention, since it is configured as described above, it is possible to prevent the generation of wrinkles of the damper member and the joining deviation between the damper member and the first high-rigidity member and the second high-rigidity member. it can.

  Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a sectional view showing an ink jet recording head 40 manufactured according to the first embodiment of the present invention.

  As shown in FIG. 1, the inkjet recording head 40 includes a laminated subassembly member 10 in which a damper member 12 and a flow path forming plate 14 are laminated. In addition, the communication hole plate 22, the pressure chamber plate 24, and the vibration plate 26 are aligned and stacked above the flow path forming plate 14, and are bonded by a bonding means such as an adhesive.

  A plurality of nozzles 16 for ejecting ink droplets are formed on the damper member 12 constituting the laminated subassembly member 10. A plurality of communication holes 18 communicating with the nozzles 16 are formed in the flow path forming plate 14. The communication hole plate 22 is formed with a plurality of communication holes 32. The nozzle 16, the communication hole 18, and the communication hole 32 communicate with each other in a state where the laminated subassembly member 10 and the communication hole plate 22 are laminated, and are connected to a pressure chamber 30 formed in the pressure chamber plate 24.

  On the other hand, the flow path forming plate 14 is formed with a plurality of ink pools 20 and stores ink supplied from ink supply holes (not shown). The communication hole plate 22 is formed with a plurality of supply holes 34 so as to be connected to the ink pool 20. The ink pool 20, the supply hole 34, and the pressure chamber 30 communicate with each other in a state where the flow path forming plate 14, the communication hole plate 22, and the pressure chamber plate 24 are stacked. In addition, a piezoelectric element 28 as pressure generating means is mounted on the vibration plate 26 above the pressure chamber 30 so that a driving voltage is applied from a flexible wiring board (not shown).

  Here, the flow path forming plate 14 is made of a highly rigid member having a thickness in the range of 10 μm to 500 μm and a Young's modulus of 10 GPa or more. In the present embodiment, SUS304TA is used as the flow path forming plate 14.

The damper member 12 is composed of a low rigidity and easily deformable member, and a high molecular compound (molecular weight of 10 ³ or more) is mainly used. A thin layer metal having a thickness of 20 μm or less may be used. In the present embodiment, a polyimide resin having a thickness of 25 μm is used as the damper member 12.

  In such an ink jet recording head 40, a continuous ink passage is formed from the ink pool 20 to the supply hole 34, the pressure chamber 30, the communication hole 32, the communication hole 18, and the nozzle 16. ) And the ink stored in the ink pool 20 is filled into the pressure chamber 30 through the supply hole 34. When a drive voltage is applied to the piezoelectric element 28 from a flexible wiring board (not shown), the diaphragm 26 is deformed together with the piezoelectric element 28 in the direction of arrow A in FIG. 1 to compress the pressure chamber 30. As a result, a volume change occurs in the pressure chamber 30, and a pressure wave is generated in the pressure chamber 30. The ink moves by the action of the pressure wave, and ink droplets are ejected from the nozzle 16 to the outside. At that time, the reflected wave from the pressure chamber 30 is propagated to the ink pool 20 through the supply hole 34, but the damper member 12 is deformed in the direction of arrow B to absorb the reflected wave and reflect to the other pressure chamber 30. Waves can be prevented from propagating.

  Next, a method for manufacturing the ink jet recording head 40 according to the first embodiment of the present invention will be described.

  As shown in FIG. 2A, the plate-like damper member 12 before the nozzle 16 is formed and the plate-like flow path forming plate 14 are joined to form the first flat composite member of the present invention. A laminated subassembly member 10 having a structure is formed. The damper member 12 made of polyimide resin and the flow path forming plate 14 made of SUS are joined by, for example, an adhesive. By bonding the two damper members 12 having no holes and the flow path forming plate 14, wrinkles can be prevented from entering the damper member 12 due to poor handling or a difference in linear expansion.

  As an adhesive for joining the damper member 12 and the flow path forming plate 14, a thermoplastic resin or a thermosetting resin is used. Examples of the thermoplastic resin include polyimide, polyacetal, polystyrene, polyvinyl chloride, polypropylene, and polyethylene. Examples of the thermosetting resin include phenol resin, urea resin, melamine resin, epoxy resin, alkyd resin, unsaturated polyester resin, diallyl phthalate resin, and silicon resin. In this embodiment, a polyimide polyimide resin is used. Furthermore, 5 μm is appropriate for the adhesive application thickness in consideration of adhesion. In addition, when the damper member 12 and the flow path forming plate 14 are bonded without using an adhesive by using a polyimide varnish or the like, or the heat bonding type polyimide film is used as the damper member 12, and the flow path forming plate 14 is directly bonded. In some cases.

  As shown in FIG. 2B, a resist layer 44 is formed on the surface of the flow path forming plate 14, and the resist layer 44 is exposed through a mask 42 on which predetermined patterns 42a and 42b are formed. Then, the exposed resist layer 44 is removed, and the flow path forming plate 14 is selectively removed by etching. In this embodiment, the etching of the SUS material by ferric oxide is used. As a result, as shown in FIG. 2C, a plurality of communication holes 18 and an ink pool 20 are formed in the flow path forming plate 14. As selective removal means, laser processing, machining, or the like may be used in addition to etching.

  Further, as shown in FIG. 2D, the laser processing of the damper member 12 is performed by the excimer laser 46, and the nozzle 16 is formed. The diameter of the nozzle 16 is set to about 25 μm. As selective removal means for the damper member 12, wet etching, dry etching, or the like is used in addition to laser processing. Thereby, as shown in FIG. 2E, the laminated subassembly member 10 having a plurality of nozzles 16 at predetermined positions of the damper member 12 is completed.

  Thereafter, as shown in FIG. 1, the communication hole plate 22 and the pressure chamber plate 24 are joined above the flow path forming plate 14, and the diaphragm 26 is attached with an adhesive so as to cover the opening of the pressure chamber plate 24. Join. Further, the piezoelectric element 28 is joined to the upper portion of the pressure chamber 30 of the pressure chamber plate 24.

  In the manufacturing method of the ink jet recording head 40 as described above, the communication hole 18, the ink pool 20, and the nozzle 16 are selectively removed from the laminated subassembly member 10 in which the flat damper member 12 and the flow path forming plate 14 are joined. Therefore, wrinkles can be prevented from occurring in the damper member 12. Further, it is not necessary to adjust the position at the time of joining the damper member 12 and the flow path forming plate 14, and problems such as joining displacement do not occur. Further, since a large number of communication holes 18 and ink pools 20 are formed in the flow path forming plate 14 by etching, the number of inspection steps can be reduced, and the manufacturing process can be made efficient. Furthermore, since the nozzle 16 is formed in the damper member 12 in contact with the ink pool 20, the damper member 12 can be used also as the nozzle plate, and the cost can be reduced.

  Also, the present invention can be applied to an inkjet head structural component in which the damper member does not share a nozzle.

  Next, 2nd Embodiment of this invention is described based on drawing.

  FIG. 3 is a sectional view showing an inkjet recording head 70 manufactured according to the second embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the member same as 1st Embodiment, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 3, the ink jet recording head 70 includes a laminated subassembly member 50 in which a step hole forming plate 54, a damper member 52, and a flow path forming plate 14 are laminated in order.

  A plurality of nozzles 16 that eject ink droplets are formed in the damper member 52. The step hole forming plate 54 is provided with a step hole 56 around each nozzle 16. The step hole 56 has a shape in which the periphery of the nozzle 16 is retreated from the surface of the step hole forming plate 54. An opening 58 is formed in the step hole forming plate 54 corresponding to the position of each ink pool 20. The reason why such an opening 58 is formed is that the damper member 52 can be easily deformed, and the damper member 52 absorbs the reflected wave propagated from the pressure chamber 30 to the ink pool 20 during printing.

Here, the damper member 52 is composed of a member having low rigidity and easily deformable, and a high molecular compound (molecular weight of 10 ³ or more) is mainly used. In the present embodiment, a polyimide resin having a thickness of 25 μm is used as the damper member 52.

  The step hole forming plate 54 is made of a highly rigid member having a thickness in the range of 10 μm to 500 μm and a Young's modulus of 10 GPa or more. In the present embodiment, SUS304TA is used as the step hole forming plate 54. The diameter of the nozzle 16 is set to about 25 μm, and the diameter of the step hole 56 is set to 50 μm to 300 μm.

  In such an ink jet recording head 70, since the step hole 56 is formed around the nozzle 16, even if the recording medium P floats and contacts the surface of the ink jet recording head 70 at the time of printing, the repelling of the periphery of the nozzle 16 is performed. A water film (not shown) is not damaged. Further, since the opening 58 is formed in the step hole forming plate 54 corresponding to the ink pool 20, the damper member 52 is easily deformed and absorbs the reflected wave propagated from the pressure chamber 30 to the ink pool 20 during printing. It is possible to prevent the reflected wave from propagating to the other pressure chambers 30.

  Next, the manufacturing method of the inkjet recording head 70 which is 2nd Embodiment of this invention is demonstrated.

  As shown in FIG. 4A, a plate-like step hole forming plate 54 before forming the step hole 56 and the opening 58, a plate-like damper member 52 before forming the nozzle 16, and a plate-like The flow path forming plate 14 is sequentially joined to form the laminated subassembly member 50 having a three-layer structure. The three step hole forming plates 54, the damper member 52, and the flow path forming plate 14, which are not perforated, are joined to the damper member 52 by, for example, an adhesive, due to poor handling or a difference in linear expansion of each member. Wrinkles can be prevented from entering.

  As shown in FIG. 4B, a resist layer 44 is formed on the upper surface of the laminated subassembly member 50, and the flow path forming plate 14 is exposed through a mask 42 on which predetermined patterns 42a and 42b are formed. Further, a resist layer 64 is formed on the lower surface of the laminated subassembly member 50, and the step hole forming plate 54 is exposed through a mask 62 on which predetermined patterns 62a and 62b are formed from the lower part in the drawing. Then, the exposed portions of the resist layers 44 and 64 are removed, and the flow path forming plate 14 and the step hole forming plate 54 are selectively removed by etching. In this embodiment, the etching of the SUS material by ferric oxide is used. As a result, as shown in FIG. 4C, a plurality of communication holes 18 and ink pools 20 are formed at predetermined positions of the flow path forming plate 14, and a plurality of openings are formed at predetermined positions of the step hole forming plate 54. 58 and a step hole 56 are formed. As selective removal means, laser processing, machining, or the like may be used in addition to etching.

  Further, as shown in FIG. 4D, the laser processing of the damper member 12 is performed by the excimer laser 46, and the nozzle 16 is formed in the step hole 56. As a result, as shown in FIG. 4E, the laminated subassembly member 50 having the nozzles 16 in the plurality of step holes 56 is completed.

  In such a method of manufacturing the ink jet recording head 70, the communication hole 18 is selectively formed from the laminated subassembly member 50 having a three-layer structure in which the flat stepped hole forming plate 54, the damper member 52, and the flow path forming plate 14 are joined. Since the ink pool 20, the step hole 56, the opening 58, and the nozzle 16 are removed, the damper member 52 can be prevented from being wrinkled and can be manufactured efficiently. Further, it is not necessary to adjust the position at the time of joining the step hole forming plate 54, the damper member 52, and the flow path forming plate 14, and problems such as joining displacement do not occur. Further, since a large number of step holes 56 and openings 58 are formed in the step hole forming plate 54 by etching, the number of inspection steps can be reduced, and the manufacturing process can be made more efficient.

  As in the first embodiment, the present invention can also be applied to an inkjet head structural component in which the damper member does not share a nozzle.

  Next, 3rd Embodiment of this invention is described based on drawing.

  FIG. 5 is a cross-sectional view showing an inkjet recording head 100 manufactured according to the third embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the member same as 1st Embodiment, and the overlapping description is abbreviate | omitted.

  As shown in FIG. 5, the inkjet recording head 100 includes a laminated subassembly member 80 in which a damper member 82 and a flow path forming plate 14 are laminated. In the damper member 82, an ink passage 84 that is continuous with the plurality of communication holes 18 is formed. The damper member 82 is composed of a low rigidity and easily deformable member, and in this embodiment, a polyimide resin having a thickness of 25 μm is used.

  A communication hole plate 86 and a nozzle plate 88 are aligned and stacked at the lower part of the damper member 82 constituting the stacked subassembly member 80 and bonded by a bonding means such as an adhesive. The communication hole plate 86 is formed with a communication hole 90 that is continuous with the ink passage 84, and further, an opening 92 that is a hollow portion is formed at a position facing the ink pool 20 with the damper member 82 interposed therebetween. This opening 92 allows the damper member 82 to be easily deformed. The nozzle plate 88 is formed with a nozzle 94 that communicates with the communication hole 90.

  Such an ink jet recording head 100 is formed by laminating a flat damper member 82 and a flow path forming plate 14 before forming the ink passage 84 and the like, similarly to the manufacturing method of the first embodiment (see FIG. 2). It can be manufactured using a laminated subassembly member (not shown) having a layer structure. That is, it can be manufactured by selectively removing the communication holes 18 and the ink pool 20 of the flow path forming plate 14 and selectively removing the ink passages 84 of the damper member 82 from the laminated subassembly member (not shown) having a two-layer structure. Thereby, wrinkles are not generated in the damper member 82, and joining displacement and the like are prevented.

  The ink jet recording heads 40, 70, 100 described in the above embodiments record images (including characters) on the recording medium P, but the present invention is not limited to this. That is, the recording medium is not limited to paper, and the liquid to be ejected is not limited to ink. For example, it is industrially useful to create color filters for displays by discharging ink onto polymer films or glass, or to form bumps for component mounting by discharging solder in a welded state onto a substrate. It is included in all droplet ejecting apparatuses used.

It is sectional drawing which shows the inkjet recording head manufactured with the manufacturing method of the inkjet recording head which concerns on 1st Embodiment of this invention. It is a figure explaining the manufacturing method of the ink jet recording head concerning a 1st embodiment of the present invention. It is sectional drawing which shows the inkjet recording head manufactured with the manufacturing method of the inkjet recording head which concerns on 2nd Embodiment of this invention. It is a figure explaining the manufacturing method of the inkjet recording head which concerns on 2nd Embodiment of this invention. It is sectional drawing which shows the inkjet recording head manufactured with the manufacturing method of the inkjet recording head which concerns on 3rd Embodiment of this invention.

Explanation of symbols

10 Laminated subassembly member (first flat composite member)
12 Damper member 14 Flow path forming plate (first high rigidity member)
16 Nozzle 18 Communication hole 20 Ink pool 22 Communication hole plate 24 Pressure chamber plate 26 Vibration plate 28 Piezoelectric element 30 Pressure chamber 32 Communication hole 34 Supply hole 40 Inkjet recording head 50 Multilayer sub-assembly member (second flat composite member)
52 Damper member 54 Step hole forming plate (second high rigidity member)
56 Step hole 58 Opening 70 Inkjet recording head 80 Laminating subassembly member 82 Damper member 84 Ink passage 86 Communication hole plate 88 Nozzle plate 90 Communication hole 92 Opening 94 Nozzle 100 Inkjet recording head

Claims (5)

A method of manufacturing an ink jet recording head that discharges ink droplets from a plurality of nozzles by applying pressure waves to ink filled in a pressure chamber,
Using a plate-like first flat composite member obtained by joining a low-rigidity damper member and a first high-rigidity member having higher rigidity than the damper member,
Selectively removing the first high-rigidity member from one side of the first flat composite member to form a plurality of ink flow paths communicating with the pressure chamber;
A method of manufacturing an ink jet recording head, wherein a plurality of nozzles or ink passages are formed by selectively removing the damper member. A method of manufacturing an ink jet recording head that ejects ink droplets from a plurality of nozzles by applying pressure waves to ink filled in a pressure chamber,
A plate in which a low-rigidity damper member and a first high-rigidity member that is higher in rigidity than the damper member are joined, and a second high-rigidity member is joined to the opposite side of the surface of the damper member where the first high-rigidity member is joined. Second flat composite member in the shape of
Selectively removing the first high-rigidity member from one side of the second flat composite member to form a plurality of ink flow paths communicating with the pressure chamber;
After selectively removing the second high-rigidity member from the other side of the second flat composite member to form a plurality of step holes,
A method of manufacturing an ink jet recording head, comprising selectively removing the damper member to form the nozzle or ink passage in the step hole.   The method of manufacturing an ink jet recording head according to claim 1, wherein the damper member is made of a polymer resin material.   The method of manufacturing an ink jet recording head according to any one of claims 1 to 3, wherein the first high-rigidity member or the second high-rigidity member is made of a metal material.   The first high-rigidity member and the damper member, or the first high-rigidity member, the damper member, and the second high-rigidity member are joined to form the first flat composite member or the second flat composite member. The method for manufacturing an ink jet recording head according to any one of claims 1 to 4, wherein the ink jet recording head is used.

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