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JP2006058028A - Magnetic sensor - Google Patents

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JP2006058028A
JP2006058028A JP2004237419A JP2004237419A JP2006058028A JP 2006058028 A JP2006058028 A JP 2006058028A JP 2004237419 A JP2004237419 A JP 2004237419A JP 2004237419 A JP2004237419 A JP 2004237419A JP 2006058028 A JP2006058028 A JP 2006058028A
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magnetic sensor
magnet
magnetoresistive element
case
holder
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Nobuaki Kishi
信明 岸
Masaru Tsuchiya
勝 土屋
Yasuharu Shibazaki
康晴 柴崎
Hiroshi Yajima
浩 矢嶋
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Chichibu Fuji Co Ltd
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Chichibu Fuji Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a magnetic sensor capable of easily correcting the dispersion of output voltage at a low cost, by making the distance between the magnet and the magnetoresistive element adjustable, using a simple constitution. <P>SOLUTION: In the depression parts 2a, 2b of the holder 3 the magnets 1a, 1b are accommodated, and on the substrate 4 fixed on the upper surface of the holder, the magnetoresistive elements 5a, 5b are mounted. By a plurality of protruded thread 6 provide in the depression part, the magnets 1a, 1b are held slidably toward the magnetoresistive elements 5a, 5b. At the bottom of the holder 3, an operation hole 7 is provided for sliding the magnets 1a, 1b toward the magnetoresistive elements 5a, 5b. By pushing the magnets toward the magnetoresistive elements via the operation hole, the distances 8 between the magnetoresistive elements and the magnets are adjusted. After adjustment, resin 9 is injected into the depression 2a, 2b from the operation hole 7 for fixing the magnets 1a, 1b. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、回転センサ,角度センサ,磁気識別センサ,近接センサ等として用いられる、磁気抵抗素子を応用した磁気センサとその取付構造の改良に関する。   The present invention relates to an improvement in a magnetic sensor using a magnetoresistive element used as a rotation sensor, an angle sensor, a magnetic identification sensor, a proximity sensor, and the like, and its mounting structure.

従来、この種磁気センサとして、磁気抵抗素子と、その下に近接状に配置される磁石とを、筐体等に固定してなる構造のものが一般に知られている(例えば特許文献1、2参照)。
磁気抵抗素子は、感磁部(表面部)に印加される磁界の変化を検出して信号として出力するものであるが、その出力信号電圧は微弱であり、そのままでは取り扱いが困難である。よって、その下に配した磁石により磁気抵抗素子にバイアス磁界を加えて磁気動作点を移動させ、微小な磁界の変化に対して出力電圧レベルを大きくとれるように構成されている。
Conventionally, as this kind of magnetic sensor, one having a structure in which a magnetoresistive element and a magnet arranged close to the magnetoresistive element are fixed to a housing or the like is generally known (for example, Patent Documents 1 and 2). reference).
The magnetoresistive element detects a change in the magnetic field applied to the magnetosensitive part (surface part) and outputs it as a signal, but its output signal voltage is weak and difficult to handle as it is. Therefore, the magnet arranged below it applies a bias magnetic field to the magnetoresistive element to move the magnetic operating point so that the output voltage level can be increased with respect to a minute change in magnetic field.

しかし、旧来の磁気センサは、磁気抵抗素子の抵抗値、磁石の磁束密度、磁気抵抗素子と磁石の取付け位置などにバラツキがあると、出力電圧が小さかったり、出力電圧にバラツキが生じてしまうという問題があった。
このような問題を解決するため、特許文献1では、磁電変換素子と磁石との距離を調整して前記したバラツキを補正できるようにしている。また、特許文献2では、磁石の下に磁性体を設けることで磁気抵抗素子に印加されるバイアス磁界の強度を変化させ、磁気センサの抵抗値や感度を調節するようになっている。
However, in the conventional magnetic sensor, if the resistance value of the magnetoresistive element, the magnetic flux density of the magnet, and the mounting position of the magnetoresistive element and the magnet vary, the output voltage is small or the output voltage varies. There was a problem.
In order to solve such a problem, in Patent Document 1, the above-described variation can be corrected by adjusting the distance between the magnetoelectric transducer and the magnet. In Patent Document 2, a magnetic material is provided under the magnet to change the intensity of the bias magnetic field applied to the magnetoresistive element, thereby adjusting the resistance value and sensitivity of the magnetic sensor.

特開平9−257897号公報Japanese Patent Laid-Open No. 9-257897 特開2000−39472号公報JP 2000-39472 A

しかし、特許文献1の磁気センサは、磁石収容部の内側面にネジ部を設けると共に、磁石を載置する回転板にこれに螺合するネジ部を設け、その回転板の螺動進退により磁石の位置調整を行うようになっており、構造が複雑なため製造コストが高くなるという問題があった。
また、特許文献2の磁気センサは、磁気抵抗素子、磁石に加えて磁性体が必要であるばかりか、要求される出力電圧に合せて磁性体を適宜選択しなければならず、結果としてコスト高になるという問題があった。
However, in the magnetic sensor of Patent Document 1, a screw portion is provided on the inner surface of the magnet housing portion, and a screw portion that is screwed to the rotating plate on which the magnet is placed is provided. However, there is a problem that the manufacturing cost is high because the structure is complicated.
In addition to the magnetoresistive element and the magnet, the magnetic sensor disclosed in Patent Document 2 requires a magnetic material, and the magnetic material must be appropriately selected according to the required output voltage, resulting in high cost. There was a problem of becoming.

本発明はこのような従来事情に鑑みてなされたもので、その目的とする処は、磁石と磁気抵抗素子との間隔を簡単な構成で調整し得るようにして、出力電圧のバラツキなどを容易に補正できる磁気センサを低コストで提供することにある。   The present invention has been made in view of such conventional circumstances, and the object of the present invention is to make it possible to adjust the gap between the magnet and the magnetoresistive element with a simple configuration so that the output voltage can be easily varied. It is to provide a magnetic sensor that can be corrected at low cost.

上記目的を達成するために、本発明に係る磁気センサは、磁石(1a,1b)を収容する凹部(2a,2b)を備えたホルダ(3)と、前記凹部に嵌合状に収容された磁石と、前記ホルダの上面に固定された基板(4)と、該基板に搭載され前記磁石に近接して固定された磁気抵抗素子(5a,5b)と、を備えた磁気センサ(a)であって、
前記凹部内に、前記磁石を前記磁気抵抗素子へ向けて摺動可能に保持する保持手段(6)を設けると共に、
前記ホルダの底面に、前記凹部内に収容された磁石を前記磁気抵抗素子へ向けて摺動させるための操作孔(7)を設け、
前記操作孔を介して前記磁石を前記磁気抵抗素子へ向けて押すことで、前記磁気抵抗素子と前記磁石との間隔(8)が調整されることを特徴とする。
In order to achieve the above object, a magnetic sensor according to the present invention is housed in a fitting manner in a holder (3) having recesses (2a, 2b) for receiving magnets (1a, 1b) and the recesses. A magnetic sensor (a) comprising a magnet, a substrate (4) fixed on the upper surface of the holder, and a magnetoresistive element (5a, 5b) mounted on the substrate and fixed in proximity to the magnet. There,
In the recess, provided is a holding means (6) for slidably holding the magnet toward the magnetoresistive element,
On the bottom surface of the holder, an operation hole (7) is provided for sliding the magnet accommodated in the recess toward the magnetoresistive element,
The distance (8) between the magnetoresistive element and the magnet is adjusted by pushing the magnet toward the magnetoresistive element through the operation hole.

このような構成とした場合、ホルダ(3)の底面に操作孔(7)を設けるだけの簡単な構造で、磁気抵抗素子(5a,5b)と磁石(1a,1b)との間隔(8)を調整して、出力電圧のバラツキを補正することができる。   In such a configuration, the distance (8) between the magnetoresistive elements (5a, 5b) and the magnets (1a, 1b) is a simple structure in which the operation hole (7) is simply provided on the bottom surface of the holder (3). The output voltage variation can be corrected by adjusting.

このようにして出力電圧のバラツキを調整した後、凹部(2a,2b)内に樹脂を注入して、磁石(1a,1b)を固定することが好ましい。この場合、ホルダ(3)の底面側から樹脂を注入するには、磁気抵抗素子(5a,5b)が邪魔になるので、ホルダ(3)の底面に設けた前記操作孔(7)を介して凹部(2a,2b)内に樹脂を注入することが好ましい。   After adjusting the variation of the output voltage in this way, it is preferable to fix the magnets (1a, 1b) by injecting resin into the recesses (2a, 2b). In this case, in order to inject the resin from the bottom surface side of the holder (3), the magnetoresistive elements (5a, 5b) are in the way, so that the operation hole (7) provided on the bottom surface of the holder (3) is used. It is preferable to inject resin into the recesses (2a, 2b).

また、前記保持手段は、凹部(2a,2b)内に磁石(1a,1b)がやや緩めに嵌合するような手段としても良いが、その場合、磁石を凹部内に固定するための樹脂充填用の隙間が凹部底面側にしか確保されないので、注入樹脂による磁石の固定が不安定になる虞れがある。
よって、前記保持手段が、前記凹部の内側面における複数箇所に突設された凸部(6)からなり、それら凸部により、前記凹部内に収容された磁石と前記凹部の内側面との間に、前記樹脂が充填される隙間(10)が形成されると共に、
前記磁石(1a,1b)が前記凹部内で偏在しないよう、前記複数の凸部(6)が前記凹部(2a,2b)内に均等に配置されていることが好ましい。
この場合、磁石を凹部内に固定するための樹脂充填用の隙間が凹部底面側と側面側に確保されるので、注入樹脂による磁石の固定がより確実になされる。また、凹部内側面と磁石外側面との間に、樹脂充填用の隙間が均等に形成されるので、磁石(1a,1b)の中心出しがより確実になされ、磁石の設置位置のズレによる出力電圧のバラツキを可及的に防止することができる。
Further, the holding means may be a means in which the magnets (1a, 1b) fit slightly loosely in the recesses (2a, 2b), but in that case, a resin filling for fixing the magnets in the recesses Since the gap for this purpose is ensured only on the bottom surface side of the recess, there is a possibility that the fixing of the magnet with the injected resin may become unstable.
Therefore, the holding means is composed of convex portions (6) projecting at a plurality of locations on the inner side surface of the concave portion, and the convex portions provide a gap between the magnet accommodated in the concave portion and the inner side surface of the concave portion. And a gap (10) filled with the resin is formed,
It is preferable that the plurality of convex portions (6) are evenly arranged in the concave portions (2a, 2b) so that the magnets (1a, 1b) are not unevenly distributed in the concave portions.
In this case, since the gap for resin filling for fixing the magnet in the recess is ensured on the bottom surface side and the side surface side of the recess, the magnet is more reliably fixed by the injected resin. In addition, since the gaps for filling the resin are evenly formed between the inner side surface of the recess and the outer side surface of the magnet, the centering of the magnets (1a, 1b) is more reliably performed, and the output due to the deviation of the magnet installation position Voltage variations can be prevented as much as possible.

処で、この種磁気センサを、例えば工作機の歯車の回転数、回転方向などを検知するために用いる場合、図5,図8などに示すように、磁気センサaをケースbに収納し、そのケースbをセンサ取付面100にビス25等で固定するようになる。
この時、磁気抵抗素子5a,5bの位置ズレに起因して、磁気センサaからの出力波形がずれる虞れがある。
よって、磁気センサ(a)をケース(b)に対し所定の範囲内で回転可能に装着して、磁気抵抗素子(5a,5b)からの出力波形における位相のズレ(磁気抵抗素子のA/B相からの出力波形とZ/Z-相からの出力波形の位相のずれ)を補正可能に構成することが好ましい。
この場合、磁気センサー(a)を回転操作するだけで、磁気抵抗素子(5a,5b)の位置ズレ等に起因する出力波形のズレを簡単に補正することができる。また、磁気センサー(a)の回転範囲を所定範囲内に規制することで、磁気センサー(a)を回転操作する際の回転しすぎを防止することができる。
By the way, when this kind of magnetic sensor is used, for example, to detect the rotation speed, rotation direction, etc. of a gear of a machine tool, the magnetic sensor a is accommodated in a case b as shown in FIGS. The case b is fixed to the sensor mounting surface 100 with a screw 25 or the like.
At this time, there is a possibility that the output waveform from the magnetic sensor a is shifted due to the positional deviation of the magnetoresistive elements 5a and 5b.
Therefore, the magnetic sensor (a) is attached to the case (b) so as to be rotatable within a predetermined range, and the phase shift in the output waveform from the magnetoresistive elements (5a, 5b) (A / B of the magnetoresistive element) It is preferable to be able to correct the phase shift between the output waveform from the phase and the output waveform from the Z / Z-phase.
In this case, it is possible to easily correct the deviation of the output waveform due to the positional deviation of the magnetoresistive elements (5a, 5b) only by rotating the magnetic sensor (a). Further, by restricting the rotation range of the magnetic sensor (a) within a predetermined range, it is possible to prevent excessive rotation when the magnetic sensor (a) is rotated.

また、前記ケース(b)をセンサ取付面(100)に固定するための固定ビス挿通孔(26)に、金属製のスリーブ(27)を内装すると共に、該スリーブの一端部をセンサ取付面(100)側に向けて突出させ、センサ取付面(100)とケース(b)底面との間に、センサ取付面(100)からの振動(歯車の回転に伴う振動や工作機の振動等)の伝達を防止するための隙間(28)が確保されるよう構成することが好ましい。
この場合、センサ取付面からの振動の影響による磁気センサの誤検出等を防止して、高精度の検知を行うことができる。
In addition, a metal screw (27) is housed in a fixing screw insertion hole (26) for fixing the case (b) to the sensor mounting surface (100), and one end of the sleeve is attached to the sensor mounting surface ( 100) projecting toward the side of the sensor mounting surface (100) and the bottom surface of the case (b), vibrations from the sensor mounting surface (100) (vibration due to gear rotation, machine tool vibration, etc.) It is preferable that the gap (28) for preventing transmission is secured.
In this case, erroneous detection of the magnetic sensor due to the influence of vibration from the sensor mounting surface can be prevented, and highly accurate detection can be performed.

本発明の磁気センサは以上説明したように構成したので、出力電圧のバラツキや位相ズレを、簡単な構成で正確に設定、補正することができる。したがって、例えば工作機の歯車の回転数、回転方向などを検知するために用いる磁気センサを低コストで提供することができるなど、多くの効果を奏する。   Since the magnetic sensor of the present invention is configured as described above, it is possible to accurately set and correct output voltage variations and phase shifts with a simple configuration. Therefore, for example, it is possible to provide a magnetic sensor used for detecting the rotation speed, rotation direction, and the like of the gear of the machine tool at a low cost.

以下、本発明の実施形態の例を図面を参照しながら説明する。   Embodiments of the present invention will be described below with reference to the drawings.

図1(イ)は本例の磁気センサaの斜視図、(ロ)は同分解斜視図で、磁気センサaは、磁石1a,1bと、ホルダ3と、基板4と、磁気抵抗素子5a,5bとを有してなる。
図2(ロ)は磁気センサaをケースbに装着した状態における要部拡大断面図、(イ)はホルダ3の要部拡大平面図を示す。
1A is a perspective view of the magnetic sensor a of this example, FIG. 1B is an exploded perspective view thereof, and the magnetic sensor a includes magnets 1a and 1b, a holder 3, a substrate 4, a magnetoresistive element 5a, 5b.
2B is an enlarged cross-sectional view of a main part in a state where the magnetic sensor a is mounted on the case b, and FIG.

ホルダ3は、磁石収容用の左右の凹部2a,2bを上面側から底面側に向けて夫々凹設してなり、夫々の凹部2a,2bの内側面に設けた複数の突条6により、磁石1a,1bが、磁気抵抗素子5a,5bへ向けて摺動可能なよう、各凹部2a,2b内に嵌合状に保持されている。   The holder 3 has left and right recesses 2a and 2b for accommodating the magnets recessed from the upper surface side toward the bottom surface side, and a plurality of protrusions 6 provided on the inner side surfaces of the respective recesses 2a and 2b 1a and 1b are held in the respective recesses 2a and 2b in a fitting manner so that they can slide toward the magnetoresistive elements 5a and 5b.

図2(イ)に示すように、夫々の突条6は、磁石1a,1bが凹部2a,2b内で偏在しないよう、凹部2a,2bの内側面において均等に配置されている。図2(ロ)に示すように、夫々の突条6の上端部は、ホルダ3上面側からの凹部2a,2b内への磁石1a,1bの挿入が容易に行えるよう、テーパー部6aとして形成されている。また、夫々の突条6により、凹部2a,2b内に収容された磁石1a,1bと凹部2a,2bの内側面との間に、磁石固定用の樹脂9(図示例では樹脂を省略して示す)が充填される隙間10が形成されるようになっている。   As shown in FIG. 2 (a), the respective protrusions 6 are evenly arranged on the inner surfaces of the recesses 2a and 2b so that the magnets 1a and 1b are not unevenly distributed in the recesses 2a and 2b. As shown in FIG. 2 (b), the upper end portion of each protrusion 6 is formed as a tapered portion 6a so that the magnets 1a and 1b can be easily inserted into the recesses 2a and 2b from the upper surface side of the holder 3. Has been. Also, a resin 9 for fixing a magnet (in the illustrated example, the resin is omitted) between the magnets 1a, 1b accommodated in the recesses 2a, 2b and the inner surfaces of the recesses 2a, 2b by the respective protrusions 6. A gap 10 is formed to be filled.

ホルダ3の上面には、左右の磁気抵抗素子5a,5bを搭載すると共に、夫々の磁気抵抗素子5a,5bに接続する出力配線11及び出力ピン12を備えた基板4が固定されている。
基板4のホルダ3に対する固定手段は、接着,溶着やビス止めなども考えられるが、このような固定手段によれば、磁石1a,1bに対する磁気抵抗素子5a,5bの位置ズレが生じる虞れがある。よって本例では、ホルダ3と基板4のいずれか一方にボス13aを、他方にボス孔13bを夫々設けて、磁石1a,1bに対する磁気抵抗素子5a,5bの位置出しが正確になされるようにしている。さらに、ホルダ3と基板4を貫通する固定ピン14を、ホルダ3又は基板4に半田固定15又はカシメ固定することで、ホルダ3に対し基板4が密着状に固定されるようにして、磁石1a,1bと磁気抵抗素子5a,5bとの間に余分な隙間が形成されることを防止している。
On the upper surface of the holder 3, the left and right magnetoresistive elements 5a and 5b are mounted, and a substrate 4 provided with output wirings 11 and output pins 12 connected to the respective magnetoresistive elements 5a and 5b is fixed.
The fixing means for the holder 3 of the substrate 4 may be bonding, welding, screwing, or the like. However, according to such fixing means, there is a possibility that displacement of the magnetoresistive elements 5a, 5b with respect to the magnets 1a, 1b may occur. is there. Therefore, in this example, either one of the holder 3 and the substrate 4 is provided with a boss 13a, and the other is provided with a boss hole 13b so that the magnetoresistive elements 5a and 5b are accurately positioned with respect to the magnets 1a and 1b. ing. Further, the fixing pin 14 penetrating the holder 3 and the substrate 4 is fixed to the holder 3 or the substrate 4 by soldering 15 or caulking so that the substrate 4 is fixed in close contact with the holder 3 so that the magnet 1a is fixed. , 1b and the magnetoresistive elements 5a, 5b are prevented from forming an excessive gap.

前記凹部2a,2bの底面には、図2(ロ)などに示すように、凹部2a,2b内に収容された磁石1a,1bを基板4上の磁気抵抗素子5a,5bへ向けて摺動させるための操作孔7が形成されている。そうして、凹部2a,2b内に磁石1a,1bを収容したホルダ3の上面に、磁気抵抗素子5a,5bを搭載した基板4を固定した後、操作孔7を介して磁石1a,1bを磁気抵抗素子5a,5bへ向けて押すことで、磁気抵抗素子5a,5bと磁石1a,1bとの間隔8を微調整し、その間隔8の寸法に起因する磁気抵抗素子5a,5bからの出力電圧のバラツキを調整し得るようになっている。尚、図示例では、磁気抵抗素子5a,5bと磁石1a,1bとの間隔8を無くした状態を示す。   On the bottom surfaces of the recesses 2a and 2b, the magnets 1a and 1b accommodated in the recesses 2a and 2b slide toward the magnetoresistive elements 5a and 5b on the substrate 4 as shown in FIG. An operation hole 7 is formed for this purpose. Then, after fixing the substrate 4 on which the magnetoresistive elements 5a and 5b are mounted on the upper surface of the holder 3 in which the magnets 1a and 1b are accommodated in the recesses 2a and 2b, the magnets 1a and 1b are attached via the operation holes 7. By pushing toward the magnetoresistive elements 5a and 5b, the interval 8 between the magnetoresistive elements 5a and 5b and the magnets 1a and 1b is finely adjusted, and the output from the magnetoresistive elements 5a and 5b due to the size of the interval 8 The voltage variation can be adjusted. In the illustrated example, a state in which the interval 8 between the magnetoresistive elements 5a and 5b and the magnets 1a and 1b is eliminated is shown.

また、前記操作孔7は、前記したようにして磁気抵抗素子5a,5bと磁石1a,1bとの間隔8を調整した後に、磁石1a,1bを凹部2a,2b内に固定するための樹脂9を注入するための注入孔を兼用している。
該操作孔7から注入される樹脂9は、前述した各突条6により、磁石1a,1bの外側面と凹部2a,2bの内側面との間に均等に形成された隙間10に流れ込み、磁石1a,1bを凹部2a,2bの中心に固定させている。
Further, the operation hole 7 is a resin 9 for fixing the magnets 1a, 1b in the recesses 2a, 2b after adjusting the distance 8 between the magnetoresistive elements 5a, 5b and the magnets 1a, 1b as described above. Also serves as an injection hole for injecting.
The resin 9 injected from the operation hole 7 flows into the gap 10 formed uniformly between the outer surface of the magnets 1a and 1b and the inner surface of the recesses 2a and 2b by the above-described protrusions 6, and the magnet 1a and 1b are fixed to the centers of the recesses 2a and 2b.

このような構成になる本例の磁気センサaは、操作孔7に治具等を差し込んで磁気抵抗素子5a,5bと磁石1a,1bとの間隔8を微調整することで、該間隔8に起因する出力電圧のバラツキを容易に補正することができる。   In the magnetic sensor a of this example having such a configuration, a jig or the like is inserted into the operation hole 7 to finely adjust the interval 8 between the magnetoresistive elements 5a and 5b and the magnets 1a and 1b. The resulting variation in output voltage can be easily corrected.

次に、本例の磁気センサaを、工作機等の歯車の回転数と回転方向の検出センサとして用いる場合について、図3〜図8を参照しながら説明する。
図3は磁気抵抗素子の説明図、図4は磁気抵抗素子の実装ズレが生じた場合の説明図、図5は磁気センサaをケースbにより台座100に取り付けた状態の簡略断面図、図6はケースbの説明図、図7はケースbの変形例の説明図、図8は磁気センサaにより工作機等の歯車200の回転数と回転方向を検出する際の使用状態図である。
Next, the case where the magnetic sensor a of this example is used as a detection sensor for the rotational speed and rotational direction of a gear such as a machine tool will be described with reference to FIGS.
FIG. 3 is an explanatory view of the magnetoresistive element, FIG. 4 is an explanatory view when the mounting displacement of the magnetoresistive element occurs, FIG. 5 is a simplified cross-sectional view of the state in which the magnetic sensor a is attached to the base 100 by the case b, 7 is an explanatory diagram of the case b, FIG. 7 is an explanatory diagram of a modification of the case b, and FIG. 8 is a use state diagram when the rotational speed and direction of the gear 200 such as a machine tool are detected by the magnetic sensor a.

本例の磁気センサaは、歯車200の回転数を検出するためのZ/Z-相の出力を行う磁気抵抗素子5aと、歯車200の回転方向を検出するためのA/B相の出力を行う磁気抵抗素子5bを備え、それに対応して、磁石1a,1b、凹部2a,2bを二つ宛備えている。それら磁気抵抗素子5a,5bを構成する各磁気抵抗素子MR1〜MR8の詳細な配置を図3(ロ)に、内部回路の構成図を図3(ハ)に、Z/Z-相とA/B相の出力波形を図3(ニ)に示す。
図3(ニ)に示すように、磁気センサaにおいて各磁気抵抗素子5a,5bのズレ、すなわち、磁石1a,1bに対する磁気抵抗素子5a,5bの位置ズレがなければ、Z/Z-相用の磁気抵抗素子5aからの出力波形と、A/B相用の磁気抵抗素子5bからの出力波形が一致する理想の状態となる。
The magnetic sensor a of this example includes a magnetoresistive element 5a that outputs a Z / Z-phase for detecting the rotation speed of the gear 200 and an A / B phase output for detecting the rotation direction of the gear 200. The magnetoresistive element 5b to be performed is provided, and two magnets 1a and 1b and two concave portions 2a and 2b are provided correspondingly. The detailed arrangement of the magnetoresistive elements MR1 to MR8 constituting the magnetoresistive elements 5a and 5b is shown in FIG. 3B, the configuration diagram of the internal circuit is shown in FIG. 3C, and the Z / Z− phase and the A / A The output waveform of the B phase is shown in FIG.
As shown in FIG. 3 (d), if there is no displacement of the magnetoresistive elements 5a and 5b in the magnetic sensor a, that is, if the magnetoresistive elements 5a and 5b are not displaced relative to the magnets 1a and 1b, the Z / Z-phase The output waveform from the magnetoresistive element 5a and the output waveform from the A / B phase magnetoresistive element 5b are in an ideal state.

しかし、実際には、図4(イ)に示すように、基板4に対し各磁気抵抗素子5a,5bを搭載する際等に各磁気抵抗素子5a,5bの実装ズレが僅かながら生じる虞れがあり、その場合、図4(ロ)に示すように、Z/Z-相用の磁気抵抗素子5aからの出力波形と、A/B相用の磁気抵抗素子5bからの出力波形の位相のズレが生じる。   However, in actuality, as shown in FIG. 4 (a), when mounting each of the magnetoresistive elements 5a and 5b on the substrate 4, there is a possibility that a slight misalignment of each of the magnetoresistive elements 5a and 5b may occur. Yes, in this case, as shown in FIG. 4B, the phase shift between the output waveform from the Z / Z-phase magnetoresistive element 5a and the output waveform from the A / B phase magnetoresistive element 5b. Occurs.

よって、本例では、磁気センサaをケースbに対し所定の範囲内で回転可能に装着して、磁気抵抗素子5a,5bの実装ズレに起因する各磁気抵抗素子5a,5bからの出力波形の位相のずれを補正可能に構成している。   Therefore, in this example, the magnetic sensor a is mounted so as to be rotatable within a predetermined range with respect to the case b, and the output waveform of each of the magnetoresistive elements 5a and 5b due to the mounting misalignment of the magnetoresistive elements 5a and 5b. The phase shift can be corrected.

ケースbは、所望の合成樹脂により一体形成されたもので、磁気センサaを収容するための箱状の収容部20と、台座100にケースbを固定するための盤状の取付部21を備え、収容部20の前壁22に設けた円形の装着孔23に、磁気センサaが所定範囲のみ回転し得るように装着されている。   The case b is integrally formed of a desired synthetic resin, and includes a box-shaped housing portion 20 for housing the magnetic sensor a and a disk-shaped mounting portion 21 for fixing the case b to the pedestal 100. The magnetic sensor a is mounted in a circular mounting hole 23 provided in the front wall 22 of the housing portion 20 so that it can rotate only within a predetermined range.

すなわち、図6(イ),(ロ)等に示すように、磁気センサaにおけるホルダ3の前後の外周縁31a,31bは、前記装着孔23に摺接して磁気センサaを回転自在に装着孔23に固定する円弧状に形成されている。また、Z/Z-相用の磁気抵抗素子5a側になる外周縁31aの中心部には、装着孔23の内周上側に突設したピン24が遊挿される切欠き32が形成されていて、磁気センサaをケースbに取り付ける際に、必ずZ/Z-相用の磁気抵抗素子5aが上側に位置するようになると共に、ピン24により磁気センサaの回転範囲が所定範囲のみ(切欠き32の開口範囲のみ)に規制されるようになっている。   That is, as shown in FIGS. 6A, 6B, etc., the outer peripheral edges 31a and 31b of the magnetic sensor a before and after the holder 3 are in sliding contact with the mounting hole 23 so that the magnetic sensor a can be freely rotated. It is formed in the shape of an arc fixed to 23. Further, a notch 32 is formed at the center of the outer peripheral edge 31a on the Z / Z-phase magnetoresistive element 5a side so that a pin 24 protruding from the inner peripheral upper side of the mounting hole 23 is loosely inserted. When attaching the magnetic sensor a to the case b, the magnetoresistive element 5a for Z / Z-phase is always positioned on the upper side, and the rotation range of the magnetic sensor a is limited to a predetermined range (notched by the pin 24). Only 32 opening ranges).

このようにして、図6(ハ)に示すように、ケースbに装着した磁気センサaを回転操作することで、磁気抵抗素子5a,5bの実装ズレを補正し、図4(ロ)に示すZ/Z-相とA/B相の出力波形の位相のズレを、図3(ニ)に示すように一致させる若しくは位相のズレを可及的に小さくすることができる。   In this way, as shown in FIG. 6C, the magnetic sensor a mounted on the case b is rotated to correct the mounting misalignment of the magnetoresistive elements 5a and 5b, and shown in FIG. The phase shift between the output waveforms of the Z / Z− phase and the A / B phase can be matched as shown in FIG. 3D or the phase shift can be made as small as possible.

また、図6(ニ)に示すように、前記ホルダ3の前後の外周縁31a,31bに、装着孔23の内周に摺接する1mm以下程度突出する突起33を均等に配置されるよう複数突設することで、装着孔23に対する磁気センサaの中心出しを行い、磁気センサaの位置ズレによる出力電圧のバラツキ防止を向上させることができる。   Also, as shown in FIG. 6 (d), a plurality of protrusions 33 are arranged so that the protrusions 33 protruding about 1 mm or less in sliding contact with the inner periphery of the mounting hole 23 are evenly arranged on the front and rear outer peripheral edges 31a and 31b of the holder 3. By providing the center of the magnetic sensor a with respect to the mounting hole 23, it is possible to improve the prevention of variations in output voltage due to the positional deviation of the magnetic sensor a.

ケースbの取付部21には、該ケースbを台座100に固定するためのビス25の挿通孔26が左右に形成されているが、該ビス挿通孔26には金属製のスリーブ27が内装されると共に、該スリーブ27の下端部が台座100側に突出している。これにより、台座100とケースbの底面との間に、台座100からの振動の伝達を防止するための隙間28が確保され、台座100からの振動の影響による磁気センサaの誤検出などを防止して、高精度の検知を行うことができるようになっている。   An insertion hole 26 for a screw 25 for fixing the case b to the pedestal 100 is formed on the left and right sides of the mounting portion 21 of the case b. The screw insertion hole 26 is internally provided with a metal sleeve 27. In addition, the lower end portion of the sleeve 27 protrudes toward the base 100 side. This secures a gap 28 between the pedestal 100 and the bottom surface of the case b to prevent transmission of vibration from the pedestal 100, thereby preventing erroneous detection of the magnetic sensor a due to the influence of vibration from the pedestal 100. Thus, highly accurate detection can be performed.

図7のケースbは、前記収容部20の底壁における前記左右の挿通孔26と対応する箇所に一体に突設された凸部29を備えており、該凸部29と、前記左右のスリーブ27とでケースbが三点支持されるようにして、ケースbのガタツキ防止を図っている。
尚、この凸部29の突出寸法を、前記左右のスリーブ27の突出寸法より高くなるよう設定すれば、ビス25による締め付けがなされた際にケースbの底壁が弾性変形し、ケースbのがたつき防止を向上させることができる。
The case b in FIG. 7 includes a convex portion 29 that is integrally projected at a location corresponding to the left and right insertion holes 26 in the bottom wall of the housing portion 20, and the convex portion 29 and the left and right sleeves 27, the case b is supported at three points to prevent rattling of the case b.
If the projecting dimension of the convex portion 29 is set to be higher than the projecting dimensions of the left and right sleeves 27, the bottom wall of the case b is elastically deformed when the screws 25 are tightened, and the case b is deformed. It is possible to improve the prevention of rattling.

以上、本発明の実施形態の例を図面を参照して説明したが、本発明は図示例に限定されるものではなく、例えばA/B相のみの検知を行うために磁気抵抗素子を一つだけ搭載し、それに合わせて磁石なども一つとしたり、磁気センサaやケースbの外観形状を変更したり、その他、特許請求範囲の各請求項に記載された技術的思想の範疇において種々の変更が可能であることは言うまでもない。   As described above, the embodiments of the present invention have been described with reference to the drawings. However, the present invention is not limited to the illustrated examples. For example, one magnetoresistive element is used to detect only the A / B phase. Only a single magnet or the like, or changing the external shape of the magnetic sensor a or the case b, and various other methods within the scope of the technical idea described in the claims. It goes without saying that changes are possible.

(イ)本発明に係る磁気センサの一例を示す斜視図、(ロ)同分解斜視図。(A) A perspective view showing an example of a magnetic sensor according to the present invention, (b) an exploded perspective view of the same. (イ)図1に示す磁気センサのホルダの要部拡大平面図、(ロ)図1に示す磁気センサのケース装着状態における縦断面図。(A) The principal part enlarged plan view of the holder of the magnetic sensor shown in FIG. 1, (B) The longitudinal cross-sectional view in the case mounting state of the magnetic sensor shown in FIG. (イ)磁気抵抗素子の平面図、(ロ)磁気抵抗素子の配置図、(ハ)磁気抵抗素子の内部回路図、(ニ)磁気抵抗素子の出力波形図。(A) Plan view of magnetoresistive element, (b) Arrangement of magnetoresistive element, (c) Internal circuit diagram of magnetoresistive element, (d) Output waveform diagram of magnetoresistive element. (イ)磁気抵抗素子の実装ズレ状態を示す平面図、(ロ)磁気抵抗素子の出力波形の位相のズレを示す波形図。(A) A plan view showing a mounting deviation state of the magnetoresistive element, and (b) a waveform diagram showing a phase deviation of the output waveform of the magnetoresistive element. 本発明に係る磁気センサの取付構造の一例を示す断面図。Sectional drawing which shows an example of the attachment structure of the magnetic sensor which concerns on this invention. (イ)図5に示すケースの後面側の正面図、(ロ)同要部拡大図、(ハ)磁気センサの回転状態を示す模式図、(ニ)他の実施形態に係る磁気センサ装着孔の拡大図。(B) Front view of rear side of case shown in FIG. 5, (b) Enlarged view of the main part, (c) Schematic diagram showing rotation state of magnetic sensor, (d) Magnetic sensor mounting hole according to other embodiment Enlarged view of. (イ)本発明に係る磁気センサの取付構造の他例を示す断面図、(ロ)ケースの底面側の斜視図。(A) A cross-sectional view showing another example of the magnetic sensor mounting structure according to the present invention, (b) a perspective view of the bottom side of the case. 本発明に係る磁気センサの使用状態の一例を示す側面図。The side view which shows an example of the use condition of the magnetic sensor which concerns on this invention.

符号の説明Explanation of symbols

a:磁気センサ
1a,1b:磁石
2a,2b:凹部
3:ホルダ
4:基板
5a,5b:磁気抵抗素子
6:突条(磁石の保持手段としての凸部)
7:操作孔
8:磁石と磁気抵抗素子との間隔
9:注入樹脂
10:樹脂充填用の隙間
b:ケース
25:ビス
26:ビス挿通孔
27:スリーブ
28:隙間
100:台座(センサ取付面)
a: Magnetic sensor 1a, 1b: Magnet 2a, 2b: Concave part 3: Holder 4: Substrate 5a, 5b: Magnetoresistive element 6: Projection (convex part as magnet holding means)
7: Operation hole 8: Spacing between magnet and magnetoresistive element 9: Injection resin 10: Clearance for filling resin b: Case 25: Screw 26: Screw insertion hole 27: Sleeve 28: Clearance 100: Base (sensor mounting surface)

Claims (5)

磁石(1a,1b)を収容する凹部(2a,2b)を備えたホルダ(3)と、前記凹部に嵌合状に収容された磁石と、前記ホルダの上面に固定された基板(4)と、該基板に搭載され前記磁石に近接して固定された磁気抵抗素子(5a,5b)と、を備えた磁気センサ(a)であって、
前記凹部内に、前記磁石を前記磁気抵抗素子へ向けて摺動可能に保持する保持手段(6)を設けると共に、
前記ホルダの底面に、前記凹部内に収容された磁石を前記磁気抵抗素子へ向けて摺動させるための操作孔(7)を設け、
前記操作孔を介して前記磁石を前記磁気抵抗素子へ向けて押すことで、前記磁気抵抗素子と前記磁石との間隔(8)が調整されることを特徴とする磁気センサ。
A holder (3) having recesses (2a, 2b) for receiving magnets (1a, 1b), a magnet housed in the recesses in a fitting manner, and a substrate (4) fixed to the upper surface of the holder; A magnetoresistive element (5a, 5b) mounted on the substrate and fixed in proximity to the magnet,
In the recess, provided is a holding means (6) for slidably holding the magnet toward the magnetoresistive element,
On the bottom surface of the holder, an operation hole (7) is provided for sliding the magnet accommodated in the recess toward the magnetoresistive element,
The magnetic sensor, wherein the distance (8) between the magnetoresistive element and the magnet is adjusted by pushing the magnet toward the magnetoresistive element through the operation hole.
前記磁気抵抗素子と前記磁石との間隔調整後に前記操作孔から前記凹部内に注入される樹脂(9)により、前記磁石が前記ホルダに固定されることを特徴とする請求項1記載の磁気センサ。   The magnetic sensor according to claim 1, wherein the magnet is fixed to the holder by a resin (9) injected from the operation hole into the concave portion after adjusting a distance between the magnetoresistive element and the magnet. . 前記保持手段が、前記凹部の内側面における複数箇所に突設された凸部(6)からなり、それら凸部により、前記凹部内に収容された磁石と前記凹部の内側面との間に、前記樹脂が充填される隙間(10)が形成されると共に、
前記磁石(1a,1b)が前記凹部内で偏在しないよう、前記複数の凸部(6)が前記凹部(2a,2b)内に均等に配置されていることを特徴とする請求項2記載の磁気センサ。
The holding means comprises convex portions (6) projecting at a plurality of locations on the inner side surface of the concave portion, and the convex portions allow the magnet accommodated in the concave portion and the inner side surface of the concave portion, A gap (10) filled with the resin is formed,
The said some convex part (6) is arrange | positioned equally in the said recessed part (2a, 2b) so that the said magnet (1a, 1b) may not be unevenly distributed in the said recessed part, The Claim 2 characterized by the above-mentioned. Magnetic sensor.
請求項1〜3の何れか記載の磁気センサ(a)と、該磁気センサをセンサ取付面(100)に固定するためのケース(b)とを備え、
前記磁気センサを前記ケースに対し所定の範囲内で回転可能に装着して、前記磁気抵抗素子からの出力波形における位相のずれを補正可能に構成したことを特徴とする磁気センサの取付構造。
A magnetic sensor (a) according to any one of claims 1 to 3, and a case (b) for fixing the magnetic sensor to the sensor mounting surface (100),
An attachment structure for a magnetic sensor, wherein the magnetic sensor is attached to the case so as to be rotatable within a predetermined range, and a phase shift in an output waveform from the magnetoresistive element can be corrected.
前記ケース(b)が、該ケースを前記センサ取付面(100)に固定するための固定ビス挿通孔(26)を有し、該ビス挿通孔に金属製のスリーブ(27)が内装されると共に、該スリーブの一端が前記センサ取付面に向けて突出して、前記センサ取付面と前記ケースの間に、センサ取付面からの振動の伝達を防止するための隙間(28)が確保されるよう形成したことを特徴とする請求項4記載の磁気センサの取付構造。   The case (b) has a fixed screw insertion hole (26) for fixing the case to the sensor mounting surface (100), and a metal sleeve (27) is provided in the screw insertion hole. One end of the sleeve protrudes toward the sensor mounting surface, and a gap (28) for preventing transmission of vibration from the sensor mounting surface is secured between the sensor mounting surface and the case. The magnetic sensor mounting structure according to claim 4, wherein:
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506989A (en) * 2011-10-26 2012-06-20 西安工业大学 Speed-type vibration sensor with adjustable magnetic circuit

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Publication number Priority date Publication date Assignee Title
JPS61202012U (en) * 1985-06-07 1986-12-18
JPH09505410A (en) * 1995-01-18 1997-05-27 ハネウエル・インコーポレーテッド Magnetic sensor with improved calibration function
JPH09257897A (en) * 1996-03-21 1997-10-03 Murata Mfg Co Ltd Magnetic sensor
JP2004170134A (en) * 2002-11-18 2004-06-17 Koyo Seiko Co Ltd Torque detector and rotation angle detector

Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
JPS61202012U (en) * 1985-06-07 1986-12-18
JPH09505410A (en) * 1995-01-18 1997-05-27 ハネウエル・インコーポレーテッド Magnetic sensor with improved calibration function
JPH09257897A (en) * 1996-03-21 1997-10-03 Murata Mfg Co Ltd Magnetic sensor
JP2004170134A (en) * 2002-11-18 2004-06-17 Koyo Seiko Co Ltd Torque detector and rotation angle detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506989A (en) * 2011-10-26 2012-06-20 西安工业大学 Speed-type vibration sensor with adjustable magnetic circuit

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