JP2005338137A - Laser light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a laser light source device capable of switching and outputting lasers of two wavelengths at high speed on the same optical axis.
SOLUTION: Light source means for simultaneously outputting different wavelengths, a first optical system in which rays from the light source means are separated for each wavelength to form first and second optical axes, and a rotating chopper plate A light-blocking means that blocks one or both of the first and second optical axes, and a second optical system that aligns the light beams of the first and second optical axes with the same outgoing optical axis, and is discontinuous The laser light source device is characterized in that a plurality of wavelengths are sequentially switched and output.
[Selection] Figure 1

Description

  The present invention relates to a laser light source device capable of switching and outputting lasers of two wavelengths at high speed on the same optical axis.

  Prior art documents related to the laser light source device include the following.

JP-A-11-174332

FIG. 5 is an explanatory diagram of the main part of a conventional laser light source device, which is an example used for a laser scanning microscope.
The laser scanning microscope of this conventional example has, as a light source device, a pair of laser light sources 1 and 21 that generate laser light having a plurality of wavelengths for illumination, and an optimum wavelength for illumination from the laser light emitted from each laser light source 1 and 21. A pair of excitation filter devices 2 and 22 that respectively select a laser beam, a pair of dimming filter devices 3 and 23 that respectively adjust the power of the laser light that has passed through each excitation filter device 2 and 22, and each dimming filter A reflection mirror 24 and a dichroic mirror 25 for mixing laser beams having a plurality of wavelengths that have passed through the devices 3 and 23 are provided.

  Further, the laser scanning microscope, as an illumination light monitoring device, a reference light separating mirror 4 that is a splitting device that splits a part of a plurality of laser beams emitted from the light source device as reference light, and a reference light separating mirror 4 A wavelength selection device 16 that selects and transmits only the reference light having a target wavelength from the reference light partially divided in step 1, and an intensity detector 17 that detects the power of the reference light selected by the wavelength selection device 16. Prepare.

  In addition, the laser scanning microscope is used as a scanning detection device for scanning the detection light separation mirror 6 that separates the illumination laser light and the detection light, and the optical axis of the laser light reflected by the detection light separation mirror 6. The horizontal scanner 7 and the vertical scanner 8 to be adjusted, the objective lens 9 for condensing the laser light that has passed through the horizontal scanner 7 and the vertical scanner 8 at the position of the sample SP on the stage 10, and the laser light from the sample SP. A pinhole device 11 that passes through the objective lens 9, is scanned by the vertical scanner 8 and the horizontal scanner 7, and selectively passes through the detection light separation mirror 6, and the pinhole device 11 Detection filter device 12 that selects light of a desired wavelength from the detected light, and photoelectric conversion device 1 that converts the detection light that has passed through detection filter device 12 into an electrical signal Provided with a door.

  The laser scanning microscope is a laser that is arranged between the reference light separation mirror 4 and the detection light separation mirror 6 and can block the laser light from the light source device and prevent the laser light from entering the sample SP. A shutter 5 is provided.

  Furthermore, the laser scanning microscope includes a control processing device 14 that performs overall control of the entire laser scanning microscope and performs appropriate processing on the electrical signal detected by the photoelectric conversion device 13 to display a sample image on the display device 15.

  The control processing device 14 controls the laser light sources 1 and 21 to adjust the laser power output from them, and controls the excitation filter devices 2 and 22 to select the wavelength of the laser light used for illumination. The light control filter devices 3 and 23 are controlled to adjust the intensity of the laser light used for illumination.

  The control processing device 14 controls the wavelength selection device 16 to select the wavelength of the laser light to be detected as the reference light, and the reference light at the selected wavelength based on the detection output of the intensity detector 17. To monitor the power.

  Further, the control processing device 14 controls both the scanners 7 and 8 to monitor the scanning spot of the excitation laser light at the sample SP position, controls the stage 10 to monitor the position of the sample SP, and the pinhole device. 11 is controlled to place a pinhole having a required aperture diameter on the optical axis of the detection light, and the detection filter device 12 is controlled to select only a required detection wavelength and enter the photoelectric conversion device 13.

  The excitation filter devices 2 and 22 provided in the light source device include, for example, a turret plate in which a plurality of band pass filters are fixed in place. The turret plate is electrically rotated to change any of the band pass filters to the optical axis of the laser light. By arranging them above, it is possible to extract only laser light having a desired wavelength from the laser light sources 1 and 21.

  The dimming filter devices 3 and 23 are for finely adjusting the laser power in an analog manner when the laser light sources 1 and 21 themselves do not have a dimming function (for example, a He-Ne laser).

  As the dimming filter devices 3 and 23, for example, a continuous ND filter whose transmittance continuously changes, or the transmittance is continuously changed by changing the amplitude of the dense wave in the crystal using the acoustooptic effect. Such an acousto-optic element can be used, and the laser power of the laser light output from the light source device can be easily adjusted based on the control signal from the control processing device 14.

The reference light separation mirror 4 provided in the illumination light monitoring device is for directly monitoring the amount of laser light supplied from the light source device, and may be, for example, a simple plate glass. By such surface reflection of the plate glass, several percent of laser light is split and guided to the wavelength selection device 16 and the intensity detector 17 side as reference light.
Such a plate glass has almost no wavelength selectivity, and the divided reference light includes laser light having a plurality of wavelengths having an intensity corresponding to the wavelength distribution of the laser light emitted from the light source device.

The wavelength selection device 26 selects a target wavelength from the reference light divided by the reference light separation mirror 4. The wavelength selection device 16 can switch the wavelength to be selected based on a control signal from the control processing device 14.
For wavelength switching, various mechanisms can be employed depending on the required switching speed. When switching is not required so quickly, the object can be achieved, for example, by manually inserting a desired band-pass filter into an alignment holder.

When somewhat quick switching is required, the object can be achieved by electrically rotating a turret plate to which a plurality of bandpass filters are attached and arranging a desired bandpass filter on the optical axis of the reference light.
If further high speed is required, it is possible to select a wavelength with an acousto-optic conversion element (AOTF) and guide only reference light having a required wavelength to the intensity detector 17.

  The intensity detector 17 is composed of, for example, a silicon photodiode (SPD), and converts a current to be output into a voltage according to the power of the reference light. Thereby, on the control processing apparatus 14 side, the laser power of the laser beam supplied to the sample SP can be monitored as a voltage.

  The laser shutter 5 moves on the optical axis of the laser beam for illumination and prevents the laser beam from entering the sample SP. The laser shutter 5 moves outside the optical axis of the laser beam for illumination and the laser beam is moved to the sample. It is movable between a retracted position that allows it to enter the SP, and is controlled by the control processing device 14 so that the laser beam is incident on the sample SP only when necessary.

The detection light separating mirror 6 is for separating the illumination laser light and the detection light. For example, a dichroic mirror is used for fluorescence observation, and a half mirror or a deflecting beam splitter is used for reflection observation.
As the horizontal scanner 7 and the vertical scanner 8, for example, a galvanometer mirror can be used.

  The pinhole device 11 is composed of, for example, a plate provided with a plurality of pinholes having different opening diameters at appropriate positions, and by rotating this plate electrically to place any pinhole on the optical axis of the detection light, Necessary confocal effect can be obtained.

  The detection filter device 12 is composed of, for example, a turret plate in which a plurality of band pass filters are fixed in place, and by rotating this turret plate electrically to place any band pass filter on the optical axis of the detection light, Of the fluorescence and reflected light from the sample SP, only light having a desired wavelength can be extracted.

  In addition, the photoelectric conversion device 13 is configured by, for example, a photomultiplier tube (PMT), and outputs a signal corresponding to the intensity of light emitted from the sample.

Hereinafter, the operation of the apparatus shown in FIG. 5 will be described.
The laser light emitted from the laser light sources 1 and 21 is adjusted in power by the dimming filters 3 and 23 after the wavelength is selected by the excitation filters 2 and 22. The modulated laser light passes through the reference light separation mirror 4, is reflected by the detection light separation mirror 6 that separates the illumination laser light and the detection light, and is guided to the horizontal scanner 7 and the vertical scanner 8.

  The laser light incident on both scanners 7 and 8 becomes a point light source by the objective lens 9 and scans the sample SP two-dimensionally. On the other hand, the detection light (fluorescence for fluorescence observation and reflected light for reflection observation) generated from the laser beam by the laser beam is descanned by the vertical scanner 8 and the horizontal scanner 7 with the optical axis reversed. The light passes through the detection light separation mirror 6 and is separated from the irradiation laser light. The detection light transmitted through the detection light separation mirror 6 enters the photoelectric conversion device 13 and is converted into an electric signal, and is converted into an image by the control processing device 14.

  At this time, since the laser power of the laser light after dimming can be monitored by the reference light separation mirror 4 provided behind the dimming filters 3 and 23, the laser power for illuminating the sample SP and intensity detection for monitoring the light amount The correlation with the output of the device 17 can be obtained. In other words, if the dimming filters 3 and 23 are adjusted so that the output values of the intensity detector 17 are the same, the laser power for illuminating the sample SP can be easily made the same.

  Further, since the laser shutter 5 is disposed behind the reference light separation mirror 4, the laser power is monitored and adjusted in a state where the laser shutter 5 is closed, that is, a state where the sample SP is not irradiated with laser light. With the optical filters 3 and 23, the laser power of the laser beam for illumination can be adjusted appropriately.

  When simultaneously monitoring the laser power of a plurality of wavelengths from the plurality of laser light sources 1 and 21, the wavelength of the reference light selected by the wavelength selection device 26 is sequentially switched at an appropriate timing. The selected wavelength is monitored by the control processing device 14 together with the output of the intensity detector 17, and the laser power for each wavelength can be obtained.

  At this time, if the transmission and reflection wavelength characteristics of the reference beam separation mirror 4, the wavelength selection device 16, the dichroic mirror 25, etc. are measured in advance, the absolute value of the intensity of the laser beam for illumination on the sample SP is estimated. You can also. By providing the illumination light monitoring device as described above, it is not necessary to provide a special monitoring mechanism for each laser beam having a plurality of wavelengths.

In a laser confocal microscope, in order to measure an intracellular reaction in real time with multiple wavelengths, a high-speed switching means is required.
In the prior art, it is necessary to provide one of the excitation filters 2 and 22 or the dimming filter devices 3 and 23 of the optical system shown in FIG.

At that time, due to the inertia of the rotating mechanism including the filter, it takes time of several hundred milliseconds to move to the light shielding part, and it is too slow to measure the intracellular reaction at a high speed of several tens Hz. is there.
Further, as the excitation filter devices 2 and 22 or the dimming filter devices 3 and 23, an acousto-optic element that can control the transmission wavelength and intensity at high speed by applying ultrasonic waves to the crystal can be used, but the problem is that the price is high. There is.

  The object of the present invention is to solve the above-mentioned problems, and the wavelength can be switched at a high speed for a device such as a laser confocal microscope which needs to sequentially switch and enter a plurality of discontinuous wavelengths. The purpose is to provide a laser light source device with a wavelength switching mechanism that can improve the time efficiency of observation by minimizing time waste and can realize an inexpensive price without using special parts. .

In order to achieve such a problem, in the present invention, in the laser light source device of claim 1,
First and second light source means for simultaneously outputting different wavelengths, a first optical system in which light rays from the light source means are separated for each wavelength to form first and second optical axes, and rotating chopper plates. Light shielding means for shielding one or both of the optical axes, and a second optical system for aligning the light beams of the first and second optical axes with the same outgoing optical axis, and having a plurality of discontinuous wavelengths. It is characterized by being sequentially switched and output.

In the laser light source device according to claim 2 of the present invention, in the laser light source device according to claim 1,
The light source means includes a first light source, a first light source that transmits a part of the light from the light source, is emitted to the first optical axis, and a part of the light from the light source is reflected. A dichroic mirror, a first mirror that reflects the light reflected from the first dichroic mirror and is emitted to the second optical axis, and the light that is reflected from the first dichroic mirror. And a first mirror that reflects on the optical axis.

In Claim 3 of this invention, in the laser light source device of Claim 1,
The light source means includes a first light source emitted to the first optical axis and a second light source reflected by the first mirror to the second optical axis.

According to a fourth aspect of the present invention, in the laser light source device according to the first aspect,
The light source means includes a first light source emitted to the first optical axis and a second light source emitted to the second optical axis.

According to a fifth aspect of the present invention, in the laser light source device according to any one of the first to fourth aspects,
The first optical axis and the second optical axis are arranged in parallel.

In Claim 6 of this invention, in the laser light source apparatus in any one of Claim 1 thru | or 5,
The chopper plate has a semicircular shape.

According to a seventh aspect of the present invention, in the laser light source device according to any one of the first to sixth aspects,
The second optical system includes a second mirror that reflects light from the second optical axis, and transmits light from the first optical axis and reflects light from the second mirror. And a second dichroic mirror aligned with the same outgoing optical axis.

According to an eighth aspect of the present invention, in the laser light source device according to any one of the first to seventh aspects,
A photo sensor is provided which is disposed to face the periphery of the chopper plate and detects the rotation state of the chopper plate.

According to a ninth aspect of the present invention, in the laser light source device according to any one of the first to eighth aspects,
A variable attenuator provided on both or one of the output sides of the first and second optical axes is provided.

According to a tenth aspect of the present invention, in the laser light source device according to any one of the first to ninth aspects,
A band-pass filter provided on both or one of the output sides of the first and second optical axes is provided.

In Claim 11 of this invention, in the laser light source apparatus in any one of Claim 1 thru | or 10,
An angle adjuster provided on both or one of the first and second mirrors is provided.

In a twelfth aspect of the present invention, in the laser light source device according to any one of the first to eleventh aspects,
A pulse motor is used as means for rotating the chopper plate.

According to claim 1 of the present invention, there are the following effects.
It is possible to obtain a laser light source device that can switch and output lasers of two wavelengths at high speed on the same optical axis.
Since the switching speed depends on the number of rotations, for example, a laser light source device capable of high-speed switching of 100 times or more per second is obtained.

According to claim 2 of the present invention, there are the following effects.
The light source means includes one first light source, a first dichroic mirror that transmits a part of the light from the light source, is emitted to the first optical axis, and reflects a part of the light from the light source. Since the first mirror that reflects the light reflected from the dichroic mirror and emits the light to the second optical axis is used, only one light source is required, and an inexpensive laser light source device can be obtained.

According to claim 3 of the present invention, there are the following effects.
Since the light source means is provided with the first light source emitted to the first optical axis and the second light source emitted to the second optical axis via the first mirror, the first dichroic is provided. A mirror is unnecessary, and an inexpensive laser light source device can be obtained.

According to claim 4 of the present invention, there are the following effects.
Since the light source means is provided with the first light source emitted to the first optical axis and the second light source emitted to the second optical axis, the first mirror becomes unnecessary and is inexpensive. A laser light source device is obtained.

According to claim 5 of the present invention, there are the following effects.
Since the first optical axis and the second optical axis are arranged in parallel, a laser light source device with easy adjustment of the optical axis can be obtained.

According to claim 6 of the present invention, there are the following effects.
Since the chopper plate has a semicircular shape, a laser light source device that can easily shield one or both of the first and second optical axes by rotation is obtained.
In addition, the dead time during which neither wavelength is output during switching is determined by the laser beam diameter and the circumference determined by the diameter of the chopper plate blocking the laser beam, so that the laser light source device can be suppressed in a short time Is obtained.

According to claim 7 of the present invention, there are the following effects.
The second optical system includes a second mirror that reflects light from the second optical axis, and the same outgoing light that transmits light from the first optical axis and reflects light from the second mirror. Since the second dichroic mirror that matches the axis is provided, the configuration is simplified and an inexpensive laser light source device can be obtained.

According to claim 8 of the present invention, there are the following effects.
A photo sensor is provided opposite to the periphery of the chopper plate and detects the rotation state of the chopper plate, so the angle of the chopper plate can be detected by the photo sensor. A laser light source device capable of outputting an electric signal as to whether it is from the shaft is obtained.
By stopping the angle of the chopper plate at a predetermined angle based on a detection signal from the photosensor, a laser light source device capable of continuously outputting either wavelength can be obtained.

According to the ninth aspect of the present invention, the following effect can be obtained.
Since the variable attenuation mechanism provided on both or one of the output sides of the first and second optical axes is provided, a laser light source device capable of adjusting the outputs of the first and second optical axes is obtained.

According to the tenth aspect of the present invention, the following effects can be obtained.
Since a band pass filter is provided on both or one of the output sides of the first and second optical axes, it is possible to block the leaked unnecessary wavelength component, and to reliably obtain the necessary wavelength component. A light source device is obtained.

According to the eleventh aspect of the present invention, the following effects can be obtained.
Since the angle adjuster is provided on both or one of the first and second mirrors, a laser light source device with easy adjustment of the optical axis can be obtained.

According to claim 12 of the present invention, the following effects can be obtained.
Since a pulse motor is used as a means for rotating the chopper plate, a laser light source device that can easily control the rotation angle of the chopper plate can be obtained.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram illustrating the configuration of the main part of one embodiment of the present invention, and FIG. 2 is a diagram illustrating the operation of FIG.
The light source means 31 outputs different wavelengths simultaneously.

  In this case, the light source means 31 has one first light source 311 and a part of the light from the light source 311 that is transmitted and emitted to the first optical axis 312, and a part of the light from the light source 311. The first dichroic mirror 313 is reflected, and the first mirror 315 that reflects the light reflected from the first dichroic mirror 313 and is emitted to the second optical axis 314 is included.

The first optical system 32 forms the first and second optical axes 312 and 314 by separating the light beam from the light source means 31 for each wavelength.
In this case, the first optical axis 312 and the second optical axis 314 are arranged in parallel.

The light shielding means 33 shields one or both of the first and second optical axes 312 and 314 by the rotating chopper plate 331.
In this case, the chopper plate 331 has a semicircular shape.

The second optical system 34 aligns the light beams of the first and second optical axes 312 and 314 with the same outgoing optical axis 35.
In this case, the second optical system 34 transmits the light from the second mirror 341 that reflects the light from the second optical axis 312 and the first optical axis 312 and from the second mirror 341. And a second dichroic mirror 342 that reflects the same light and matches the same outgoing optical axis 35.

The photo sensor 36 is disposed to face the periphery of the chopper plate 331 and detects the rotation state of the chopper plate 331.
The variable attenuator 37 is provided on both or one of the output sides of the first and second optical axes 312 and 314.
In this case, variable attenuators 371 and 372 are provided on both the output sides of the first and second optical axes 312 and 314.

The band pass filter 38 is provided on both or one of the output sides of the first and second optical axes 312 and 314.
In this case, band-pass filters 381 and 382 are provided on both the output sides of the first and second optical axes 312 and 314.

The angle adjuster 39 is provided on both or one of the first and second mirrors 315 and 341.
In this case, angle adjusters 391 and 392 are provided on both the output sides of the first and second mirrors 315 and 341.

The pulse motor 41 is used as a means for rotating the chopper plate 331.
The control device 42 controls the photo sensor 35, the pulse motor 39, and the variable attenuators 361 and 362.

In the above configuration, the laser light source 311 is a laser oscillator using a medium such as argon krypton gas, and can simultaneously irradiate laser beams having a plurality of wavelengths on the same optical axis.
Each wavelength component of the generated laser beam is separated by the first dichroic mirror 313, the wavelength longer than the specific wavelength is transmitted and proceeds to the first optical axis 312, the wavelength shorter than the specific wavelength is reflected, and the first Reflected by the first mirror 615 and travels to a second optical axis 314 parallel to the first optical axis 312.

One or both of the laser beams having the respective wavelengths traveling to the first optical axis 312 and the second optical axis 314 are blocked by the chopper plate 331 rotated by the pulse motor 39.
The initial angle of the chopper plate 331 is detected by the photo sensor 36.
When the laser light passing through the first optical axis 312 passes through the chopper plate 331, the power of the laser light is adjusted by the variable attenuation mechanism 371 that controls the transmittance.

Further, the wavelength component that should leak to the first dichroic mirror 313 and should go to the second optical axis 314 is blocked by the band-pass filter 381.
When the laser light passing through the second optical axis 314 passes through the chopper plate 331, the power of the laser light is adjusted by the variable attenuation mechanism 372 that controls the transmittance.

In addition, the wavelength component that should leak to the first dichroic mirror 313 and should originally go to the first optical axis 312 is blocked by the band-pass filter 282.
The component of the first optical axis 312 transmitted through the first band pass filter 381 and the component of the second optical axis 314 transmitted through the band pass filter 382 and reflected by the second mirror 341 are the second dichroic mirror. The light is transmitted through and reflected from 342 and output on the same outgoing optical axis 35.

The first and second mirrors 316 and 341 are provided with angle adjusting mechanisms 391 and 392 so that the second optical axis 314 can coincide with the first optical axis 312 on the outgoing optical axis 35. ing.
The control device 41 initializes the angle of the chopper plate 331 by a signal obtained by the photosensor 36, and controls the rotational speed of the pulse motor 39 and the variable damping mechanisms 371 and 372.

2 (1), (2), (3), and (4) show the relationship between the chopper plate 331 and the first optical axis 312 and the second optical axis 314 as seen from the arrow A in FIG.
In FIG. 2A, both the first optical axis 312 and the second optical axis 314 are shielded by the chopper plate 331, and no laser of any wavelength is output to the outgoing optical axis 35.

When the chopper plate 331 rotates, the laser of the first optical axis 312 can pass as shown in FIG.
Further, when the chopper plate 331 rotates, the first optical axis 312 and the second optical axis 314 are again shielded by the chopper plate 331 as shown in FIG.

When further rotated, the laser of the second optical axis 314 can now pass through as shown in FIG. 2 (4).
By repeating this, the laser beams of the first optical axis 312 and the second optical axis 314 can be alternately output.

As a result,
It is possible to obtain a laser light source device that can switch and output lasers of two wavelengths at high speed on the same optical axis.
Since the switching speed depends on the number of rotations of the motor, for example, a laser light source device capable of performing high-speed switching at least 100 times per second even when a hard disk motor of about 7000 rpm is used is obtained.

  The light source means includes a first light source 311 and a first light source through which a part of the light from the light source is transmitted and emitted to the first optical axis 312 and a part of the light from the light source 311 is reflected. Since the dichroic mirror 313 and the first mirror 315 that reflects the light reflected from the dichroic mirror 313 and is emitted to the second optical axis 314 are used, only one light source 311 is required, and an inexpensive laser light source is used. A device is obtained.

  Since the first optical axis 312 and the second optical axis 314 are arranged in parallel, a laser light source device that can easily adjust the optical axis is obtained.

Since the chopper plate 331 has a semicircular shape, it is possible to obtain a laser light source device that can easily shield one or both of the first and second optical axes 312 and 314 by rotation.
In addition, the dead time during which neither wavelength is output during switching is determined by the laser beam diameter and the circumference determined by the diameter of the chopper plate 331 that shields the laser light, so that the laser light source can be suppressed in a short time. A device is obtained.

  The second optical system 34 reflects the light from the second optical axis 314 and the second mirror 341 that reflects the light from the first optical axis 312 and reflects the light from the second mirror 341. In addition, since the second dichroic mirror 342 aligned with the same outgoing optical axis 35 is provided, the configuration is simplified and an inexpensive laser light source device can be obtained.

  Since the photo sensor 36 that is disposed opposite to the periphery of the chopper plate 331 and detects the rotation state of the chopper plate 331 is provided, the angle of the chopper plate 331 can be detected by the photo sensor 36. It is possible to obtain a laser light source device that can output from which optical axis the wavelength is from an electric signal.

  By stopping the angle of the chopper plate 331 at a predetermined angle based on the detection signal from the photosensor 36, a laser light source device that can continuously output one of the wavelengths is obtained.

  Since the variable attenuator 37 provided on both or one of the output sides of the first and second optical axes 312 and 314 is provided, the output of the first and second optical axes 312 and 314 can be adjusted. A laser light source device is obtained.

  Since the bandpass filter 38 is provided on both or one of the output sides of the first and second optical axes 312 and 314, unnecessary wavelength components that have leaked can be blocked, and the necessary wavelength components can be reliably obtained. The laser light source device obtained as described above is obtained.

  Since the angle adjuster 39 is provided on both or one of the first and second mirrors 315 and 341, a laser light source device with easy adjustment of the optical axis can be obtained.

  Since the pulse motor 41 is used as a means for rotating the chopper plate 331, a laser light source device that can easily control the rotation angle of the chopper plate 331 can be obtained.

FIG. 3 is an explanatory view showing the structure of the main part of another embodiment of the present invention.
In the present embodiment, the light source means 51 includes a first light source 511 emitted to the first optical axis 312 and a second light source 512 reflected by the first mirror 315 to the second optical axis 314. And have.

  As a result, the light source means 51 includes a first light source 511 emitted to the first optical axis 312 and a second light source 512 emitted to the second optical axis 314 via the first mirror 315. Since it is provided, the first dichroic mirror 313 is not necessary, and an inexpensive laser light source device can be obtained.

FIG. 4 is an explanatory view showing the configuration of the main part of another embodiment of the present invention.
In the present embodiment, the light source means 61 includes a first light source 611 emitted to the first optical axis 312 and a second light source 612 emitted to the second optical axis 314.

  As a result, the light source means 61 is provided with the first light source 611 emitted to the first optical axis 312 and the second light source 612 emitted to the second optical axis 314. The mirror 315 is unnecessary, and an inexpensive laser light source device can be obtained.

The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.

It is principal part structure explanatory drawing of one Example of this invention. It is operation | movement explanatory drawing of FIG. It is principal part structure explanatory drawing of the other Example of this invention. It is principal part structure explanatory drawing of the other Example of this invention. It is structure explanatory drawing of the prior art example generally used conventionally.

Explanation of symbols

31 light source means 311 first light source 312 first optical axis 313 first dichroic mirror 314 second optical axis 315 first mirror 32 first optical system 33 light shielding means 331 chopper plate 34 second optical system 341 Second mirror 342 Second dichroic mirror 35 Output optical axis 36 Photo sensor 37 Variable attenuator 371 Variable attenuator 372 Variable attenuator 38 Band pass filter 381 Band pass filter 382 Band pass filter 39 Angle adjuster 391 Angle adjuster 392 Angle adjuster 41 Pulse motor 42 Control device 51 Light source means 511 First light source 512 Second light source 61 Light source means 611 First light source 612 Second light source

Claims (12)

Light source means for simultaneously outputting different wavelengths;
A first optical system in which light rays from the light source means are separated for each wavelength to form first and second optical axes;
Light shielding means for shielding one or both of the first and second optical axes by a rotating chopper plate;
A second optical system for aligning the light beams of the first and second optical axes with the same outgoing optical axis;
A laser light source device, wherein a plurality of discontinuous wavelengths are sequentially switched and output. The light source means includes one first light source,
A first dichroic mirror that transmits a part of the light from the light source and is emitted to the first optical axis and reflects a part of the light from the light source;
A first mirror that reflects light reflected from the first dichroic mirror and is emitted to the second optical axis;
The laser light source device according to claim 1, comprising: The light source means includes a first light source emitted to the first optical axis;
The laser light source device according to claim 1, further comprising: a second light source that is reflected by the first mirror to the second optical axis. The light source means includes a first light source emitted to the first optical axis;
The laser light source device according to claim 1, further comprising: a second light source that is emitted to the second optical axis. The laser light source device according to any one of claims 1 to 4, wherein the first optical axis and the second optical axis are arranged in parallel. The laser light source device according to any one of claims 1 to 5, wherein the chopper plate has a semicircular shape. The second optical system includes a second mirror that reflects light from the second optical axis;
2. A second dichroic mirror that transmits light from the first optical axis and reflects light from the second mirror so as to match the same outgoing optical axis. Item 7. The laser light source device according to Item 6. The laser light source device according to any one of claims 1 to 7, further comprising a photosensor that is disposed to face a periphery of the chopper plate and detects a rotation state of the chopper plate. 9. The laser light source device according to claim 1, further comprising a variable attenuator provided on both or one of the output sides of the first and second optical axes. The laser light source device according to any one of claims 1 to 9, further comprising: a band-pass filter provided on both or one of the output sides of the first and second optical axes. 11. The laser light source device according to claim 1, further comprising an angle adjuster provided on both or one of the first and second mirrors. The laser light source device according to any one of claims 1 to 11, wherein a pulse motor is used as means for rotating the chopper plate.

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