JP2005322618A - Dielectric barrier discharge excimer light source - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge excimer light source, capable of obtaining a light of high luminance, having a wavelength in the vacuum ultraviolet-ray region, and efficiently irradiating an object to be irradiated with the light. <P>SOLUTION: An anode electrode 10 is composed of a straight longitudinal cylindrical body, and its outer periphery of the cylindrical body is covered by a dielectric 12. The shape of a cathode part 20 is straight and semicircular. The cathode 25 surrounds the anode, and the anode and the cathode are arranged in parallel with each other in the longitudinal direction. The cathode has a cathode wire group 16, and both ends of wires of the cathode wire group are fixed to both ends 20D, in the longitudinal direction of the semicircular body so that the plurality of wires become parallel to each other. A reflection face, reflecting the radiation in a range of vacuum ultraviolet-ray, is formed on a surface 20S of the cathode part on the facing side of the anode. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vacuum ultraviolet light source that emits light having a wavelength in a vacuum ultraviolet (VUV) region with high efficiency. In particular, in the field of microelectronics, a vacuum ultraviolet light source (hereinafter sometimes referred to as a “VUV light source”) used for cleaning materials by ultraviolet light or for surface reformation by ultraviolet light (surface reformation). The present invention relates to a high-efficiency dielectric barrier discharge excimer light source that can be used as:

  As a spontaneous radiation lamp that emits light having a wavelength in the VUV band, a gas discharge light source that uses radiation in the VUV region of a BX transition of an inert gas is well known. A typical light source for this type of gas discharge light source is a VUV spontaneous emission light source using dielectric barrier discharge that can obtain strong light emission generated when excimer molecules transition to the energy level of the ground state. .

  The dielectric barrier discharge is a discharge realized by a discharge device configured by disposing glass or ceramic as a dielectric between electrodes. By disposing a dielectric between the electrodes, it is possible to prevent arc discharge from occurring between the electrodes, and it is possible to stably realize light emission by excimer molecules.

  The principle of operation of this type of light source using a dielectric barrier discharge is that a so-called excimer molecule, which is generated by a plasma chemical reaction caused by a dielectric barrier discharge flowing in a gas, is formed in the discharge gas plasma. This is because the molecule emits light by spontaneous radiation.

  The excimer molecule is characterized by having a stable molecular bond only in the excited state, and that the ground state exists in a separable state. This determines the generation of radiation in various energy band bands. Among them, the B-X transition contributes most strongly to light emission. That is, an excimer molecule is formed by non-radiative transition, and the excimer molecule emits light by causing a radiative transition to the energy level of the ground state. Due to the fact that up to 80% of the gas discharge radiation power is concentrated due to the B-X transition (observed fact), it is expected that the light emission based on the B-X transition is highly efficient.

  Since the wavelength of radiation based on the BX transition corresponds to the VUV region that is strongly absorbed by most optical materials, the VUV light source of the present invention does not have an extraction window for extracting VUV light. That is, the sample (surface) that irradiates light having a wavelength in the VUV band and the electrode unit of the light source are placed in the same gas medium (Ar, Kr, Xe) used to obtain radiation at the same time. In addition, the VUV light source of the present invention can be configured to include an extraction window for extracting VUV light, which is made of a material that does not absorb the radiation based on the BX transition.

  As a spontaneous emission light source that emits light having a wavelength in the above-described VUV band, a light source based on spontaneous emission emission of hydrogen (double hydrogen) VUV is known (see Non-Patent Document 1). Further, there is known a radiation light source based on mutual resonance transition of hydrogen and an inert gas at a low pressure or a mixed gas of them and a halogen (see Non-Patent Document 2). Similarly, a high-pressure rare gas discharge tube for obtaining radiation by excimer BX transition is also known (see Non-Patent Documents 3, 4 and 5). The light sources disclosed in Non-Patent Documents 3, 4, and 5 have a feature that they are high-intensity light sources.

  Various methods have been devised as methods for exciting high pressure gas. For example, a method using an electron beam (see Non-Patent Document 6), a method using a corona discharge (see Non-Patent Documents 7 and 8), a method using a barrier discharge (see Non-Patent Documents 4, 5, 9 and 10) ) Etc. In the case of utilizing electron beam excitation, a device for separating the chamber for confining the active gas and the electrode of the electron beam apparatus is required. This is a complex device.

  Although a method using corona discharge has been studied as a device that can be realized more simply, it is difficult to stabilize the corona discharge. In order to stabilize, 50% power loss must be tolerated. In addition, when a multi-point discharge chamber having a plurality of discharge locations is used, the power loss for resistance control is considerably increased. In addition, there are conditions for confining excimer molecules only in the corona discharge region (see Non-Patent Document 7).

  First, it has been shown that the maximum radiation efficiency of excimer molecules of about 60% can be achieved by one-barrier discharge by exciting Xe atoms. (See Non-Patent Document 9). This has been confirmed later by experiments (see Non-Patent Document 10).

  According to Non-Patent Document 9, one of the conditions necessary for causing the Xe light source to emit light with high efficiency is that most of the Xe atoms are excited and the excitation mode that realizes the minimum energy loss of the parasitic vibration process Is to select. In addition, it is necessary to use a pulse power supply with a short voltage rise time to achieve uniform discharge. The light source reported in Non-Patent Document 9 is a light source sealed with fused quartz (Suprasil quartz-type: fused quartz sold under the trade name Suprasil), which is filled with Xe gas, has a metal rod-like cathode. It is. The anode has a structure in which a mesh is arranged on the outer surface of the fused quartz tube.

  In the discharge tube of the light source, a discharge current flows between a plurality of electrodes alternately arranged in parallel with the positive electrode and the negative electrode, and radiation from the discharge plasma of the gas is generated. In the case of a light source that uses Ar gas or Kr gas (the emission wavelengths due to BX transition are 126 and 146 nm, respectively), the fused silica absorbs light with a wavelength of 160 nm or less. It is inappropriate to construct a light source in which Kr gas and electrodes are sealed with fused silica.

The light sources disclosed in Non-Patent Documents 5 and 11 do not have a window for extracting radiation. That is, it is not configured as a light source in which Ar gas or Kr gas and an electrode are sealed with fused silica. Discharge occurs between an electrode constituted by arranging positive and negative electrodes alternately arranged in parallel in the longitudinal direction and a dielectric tube surrounding the electrode. The light source with this configuration is disadvantageous compared to the light source disclosed in Non-Patent Document 9, and the voltage at which discharge starts (dielectric breakdown voltage) increases as the pressure of the gas contributing to light emission decreases. That is.
AN Zaidel, E. Ya. Schreider, VUV spectroscopy, Moscow "Nauka", 1967. LP Schischatskaya, SA Yakovlev, GA Volkova, VUV lamps with a large emitting surface, Optical Journal, Vol. 65, No. 12, pp. 93-95, 1998. Y. Tanaka, Continuous emission spectra of rare gases in the vacuum ultraviolet region, J. Opt. Soc. Am. Vol. 45, No. 9, pp.710-713, 1955. GA Volkova, NN Kirillova, EN Pavlovskaya, IV Podmoschenskii, AV Yakovleva, VUV irradiation lamp. Bul. Of Inventions, 1982, No. 41 p.179. U. Kogelschatz, Silent-discharge driven excimer UV sources and their applications, Appl.Surf Sci, Vol. 54, pp.410-423, 1992. US Patent No. 6,052,401 US Patent No. 6,400,089 M. Salvermoser, DE Murnick, Efficient, stable, corona discharge 172 nm xenon excimer light source, J. Appl. Phys. Vol. 94, No. 6, pp. 3722-3731, 2003. F. Vollkommer, L. Hitzschke, Dielectric Barrier Discharge, The 8th International. Symposium on Science and Technology of LIGHT SOURCES LS-8, Greifswald, Germany, pp. 51-60, 1998. RP Mildren, Rl J. Carman, Enhanced performance of a dielectric barrier discharge lamp using short-pulsed excitation, J. Phys. D: Appl. Phys. Vol. 34, pp. L1-L6, 2001. H. Esrom and U. Kogelschatz, Appl. Surf. Sci. Vol. 54, p.440, 1992.

  An object of the present invention is to provide a VUV light source that realizes high-efficiency light emission, and to provide a spontaneous emission light source that prevents absorption of radiation by the wall of the discharge tube and obtains light having a wavelength in the high-luminance VUV region. There is. It is another object of the present invention to provide a cathode and anode structure capable of efficiently irradiating a target (irradiated object) irradiated with light having a wavelength in the VUV region.

  A first dielectric barrier discharge excimer light source of the present invention includes an anode having a dielectric and an anode electrode that is covered with the dielectric and includes a straight, long, hollow cylindrical body, and surrounds the anode. A long cathode. The cathode has a straight semi-cylindrical body and a cathode wire group composed of a plurality of wires fixed to the semi-cylindrical body in parallel to each other. The anode and the cathode are arranged parallel to each other in the longitudinal direction. In addition, a reflective surface that reflects VUV radiation is formed on the surface of the cathode facing the anode.

  A second dielectric barrier discharge excimer light source according to the present invention surrounds an anode having a dielectric and an anode electrode that is covered with the dielectric and is formed of a straight and long hollow cylindrical body. Consists of a long cathode. The cathode is composed of a three-sided semi-tubular body having a U-shaped cross section perpendicular to the longitudinal direction and a group of cathode wires composed of a plurality of wires fixed in parallel to the half-tubular body. Have. The anode and the cathode are arranged parallel to each other in the longitudinal direction. In addition, a reflective surface that reflects VUV radiation is formed on the surface of the cathode facing the anode.

  A third dielectric barrier discharge excimer light source according to the present invention includes a dielectric and a hollow tubular body that is covered with the dielectric and has a rectangular shape with a rectangular cross section perpendicular to the longitudinal direction. An anode having an anode electrode, a semi-tubular body having a three-faced cross-sectional shape perpendicular to the longitudinal direction, and a plurality of wires fixed to the semi-tubular body in parallel to each other A cathode having a cathode wire group. The cathode is disposed at a position surrounding the anode, and the anode and the cathode are disposed in parallel to each other in the longitudinal direction. In addition, a reflective surface that reflects VUV radiation is formed on the surface of the cathode facing the anode.

  A fourth dielectric barrier discharge excimer light source according to the present invention includes a dielectric and an anode having a straight and long hollow cylindrical body that is covered with the dielectric and has a straight long length. A semi-tubular body comprising a plurality of anodes arranged in parallel so as to be parallel to the cylindrical body, and a three-sided surface having a U-shaped cross section perpendicular to the straight longitudinal direction And a cathode having a cathode wire group composed of a plurality of wires fixed in parallel to each other. The cathode is disposed at a position surrounding the anode group, and the anode and the cathode are disposed in parallel to each other in the longitudinal direction. The surface of the cathode on the side facing the anode group is formed with a reflecting surface for reflecting VUV radiation.

  A fifth dielectric barrier discharge excimer light source according to the present invention comprises a dielectric and a hollow tubular body that is covered with the dielectric and has a rectangular shape with a rectangular cross section perpendicular to the longitudinal direction. An anode having an anode electrode is a group of anodes arranged in parallel so as to be parallel to the straight long tubular body, and a straight long cathode surrounding the anode. And a cathode having a cathode wire group composed of a plurality of wires fixed in parallel to a semi-tubular body having three surfaces whose cross-sections perpendicular to the longitudinal direction are U-shaped. The The anode and the cathode are arranged parallel to each other in the longitudinal direction, and the surface of the cathode facing the anode is formed with a reflecting surface that reflects VUV radiation.

  A sixth dielectric barrier discharge excimer light source according to the present invention includes an anode having a dielectric and an anode electrode that is covered with the dielectric and is formed of a straight, long hollow cylindrical body, and a length that surrounds the anode. And a discharge electrode unit comprising a straight half-cylinder and a cathode wire group comprising a plurality of wires fixed to the half-cylinder in parallel to each other. Is done. The discharge electrode units are arranged in parallel in the long direction. In addition, a reflective surface that reflects VUV radiation is formed on the surface of the cathode facing the anode.

  According to a seventh dielectric barrier discharge excimer light source of the present invention, an anode having a dielectric and an anode electrode that is covered with the dielectric and includes a straight, long hollow cylindrical body, and surrounds the anode Cathode wire consisting of a three-sided semi-tubular body having a U-shaped cross section perpendicular to the longitudinal direction, and a plurality of wires fixed in parallel to the semi-tubular body. And a discharge electrode unit including the cathode having a group. The discharge electrode units are arranged in parallel in the long direction. In addition, a reflective surface that reflects VUV radiation is formed on the surface of the cathode facing the anode.

  An eighth dielectric barrier discharge excimer light source according to the present invention includes a dielectric and a hollow tubular body that is covered with the dielectric and has a rectangular shape with a rectangular cross section perpendicular to the longitudinal direction. An anode having an anode electrode, a long cathode surrounding the anode, and a semi-tubular body having a three-faced cross-sectional shape perpendicular to the longitudinal direction, and a half-tubular body. And a discharge electrode unit including the cathode having a cathode wire group composed of a plurality of wires fixed in parallel to each other. The discharge electrode units are arranged in parallel in the long direction. In addition, a reflective surface that reflects VUV radiation is formed on the surface of the cathode facing the anode.

  In the ninth dielectric barrier discharge excimer light source of the present invention, the cathode has a shape in which a plurality of additional rod-shaped conductors are arranged in parallel on the plane of the straight semi-tubular body in a single plane. It is a feature. That is, an additional rod-shaped conductor having the same potential as the cathode and parallel to the longitudinal direction of the straight semi-tubular body is disposed between the anode group and the cathode wire group.

  According to a tenth dielectric barrier discharge excimer light source of the present invention, the anode electrode has a semi-cylindrical shape, and the convex surface of the semi-cylindrical shape is oriented in the direction in which the cathode wire group is disposed. The semi-cylindrical shape is characterized in that the end shape along the longitudinal direction is configured to be rounded toward the inner side of the semi-cylindrical shape.

  In an eleventh dielectric barrier discharge excimer light source of the present invention, the anode electrode has a semi-tubular shape, and the bottom surface of the semi-tube shape is disposed so as to face the direction in which the cathode wire group is disposed, and The semi-tubular shape is characterized in that the end shape along the longitudinal direction is configured to be rounded toward the inner side of the rectangle.

  A twelfth dielectric barrier discharge excimer light source according to the present invention includes a dielectric, an anode having a straight hollow cylindrical body covered with the dielectric, and a spiral-shaped body. It is composed of a metallic cathode wire. In a state where the central axis of the cylindrical body coincides with the central axis of the spiral body, the anode is arranged so that the cathode wire surrounds the anode.

  A thirteenth dielectric barrier discharge excimer light source according to the present invention includes a dielectric, an anode having a straight hollow cylindrical body covered with the dielectric, and a spiral-shaped body. It is composed of a metallic cathode wire. In a state where the central axis of the cylindrical body coincides with the central axis of the spiral body, the anode is arranged so that the cathode wire surrounds the anode. An anode and a cathode wire are disposed inside the reflector. The reflector is a straight long semi-cylindrical body, and the longitudinal direction of the semi-cylindrical body is arranged in parallel with the central axis of the cylindrical body and the central axis of the spiral-shaped body. Yes.

  A fourteenth dielectric barrier discharge excimer light source according to the present invention includes a dielectric, an anode that is covered with the dielectric, and includes an anode electrode that is a straight and long hollow cylindrical body. A coaxial discharge electrode unit comprising a metallic cathode wire and arranged so that the cathode wire surrounds the anode in a state where the central axis of the cylindrical body and the central axis of the spiral shaped body coincide with each other. It has. A plurality of coaxial discharge electrode units are arranged in a single reflector in parallel so that their central axes are parallel to each other. The reflector is a semi-tubular body having three surfaces whose cross-sectional shape perpendicular to the longitudinal direction is a U-shape, and the longitudinal direction and the central axis of the cylindrical body are arranged in parallel. .

  According to a fifteenth dielectric barrier discharge excimer light source of the present invention, an anode having a dielectric, and an anode electrode that is covered with the dielectric and includes a straight, long, hollow cylindrical body; a spiral-shaped body; A coaxial discharge electrode unit comprising a metallic cathode wire and arranged so that the cathode wire surrounds the anode in a state where the central axis of the cylindrical body and the central axis of the spiral shaped body coincide with each other. This is in common with the 12-14 dielectric barrier discharge excimer light source of the present invention described above. The difference is that the anode has a semi-cylindrical shape, and the shape of the end along the longitudinal direction of the semi-cylindrical shape is configured to be rounded toward the inner direction of the semi-cylindrical shape. is there.

  A sixteenth dielectric barrier discharge excimer light source according to the present invention includes a dielectric, an anode having a straight hollow cylindrical body covered with the dielectric, and a spiral-shaped body. With metallic cathode wire. Then, the anode wire is arranged so that the cathode wire surrounds the anode with the central axis of the cylindrical body and the central axis of the helical body aligned. Further, the cathode and the anode are installed inside a tube made of a dielectric material that is transparent to the emission wavelength, and the cathode is made by the tube made of a dielectric material that is transparent to the emission wavelength. And the anode is sealed.

  In the first to sixteenth dielectric barrier discharge excimer light sources of the present invention described above, it is preferable that the distance between the anode and the cathode is 0 to 2 mm.

  In the first to sixteenth dielectric barrier discharge excimer light sources of the present invention described above, it is preferable that the cooling liquid or gas is configured as a structure that can circulate inside the casing of the anode. is there.

  In the first to third dielectric barrier discharge excimer light sources of the present invention, since the cathode wire group is attached to the cathode, the electric field strength in the vicinity of the wires constituting the wire group can be increased, and the dielectric It has a structure in which body barrier discharge is likely to occur. In addition, stable discharge can be realized in a high-pressure discharge gas, and the light emission efficiency with respect to the injection power to the excimer light source can be increased. That is, it is possible to provide a spontaneous emission light source that emits light having a wavelength in the vacuum ultraviolet region with high luminance.

  In addition, a reflective surface that reflects vacuum ultraviolet radiation is formed on the surface of the cathode facing the anode, so that it is possible to efficiently irradiate an object to be irradiated with light having a wavelength in the vacuum ultraviolet region. It becomes possible.

  The first to third dielectric barrier discharge excimer light sources of the present invention include a region where the above-described vacuum ultraviolet radiation is generated and a region where the irradiated object which irradiates the vacuum ultraviolet radiation is disposed. Since it is the structure which does not arrange | position a window between, vacuum ultraviolet radiation light does not receive the absorption of the material which comprises a window. Therefore, the object to be irradiated can be irradiated with stronger vacuum ultraviolet radiation as much as it is not absorbed by the window.

  In addition, the fourth to eighth dielectric barrier discharge excimer light sources of the present invention are configured to include an anode group instead of a single anode. By doing so, the total area of the dielectric covering the anode electrode can be increased by increasing the number of anodes, so that the area that can be irradiated on the irradiated object can be increased.

  According to a ninth dielectric barrier discharge excimer light source of the present invention, the cathode has a shape in which a plurality of additional rod-shaped conductors are arranged on a single plane parallel to the longitudinal direction of the straight semi-tubular body. Therefore, the inductance caused by the wires constituting the lead wire and the cathode wire group can be reduced. As a result, the efficiency of the electric power introduced into the dielectric barrier discharge excimer light source can be increased, and a vacuum ultraviolet light source that realizes highly efficient light emission can be obtained.

  Further, in the tenth or eleventh dielectric barrier discharge excimer light source, the anode electrode to be set is in the shape of the end portion along the longitudinal direction of the semicylindrical shape or in the longitudinal direction of the rectangular semitubular shape. The shape of the end portion along the shape is configured to be rounded toward the inside of the semi-cylindrical shape or the inside of the rectangular semi-tubular shape. As a result, the capacitance between the electrodes can be reduced, and the region where the plasma is formed is limited to the convex surface of the semi-cylindrical shape or the dielectric surface on the bottom side of the rectangular semi-tubular shape. A light source that can be determined and can irradiate the irradiated object with vacuum ultraviolet light emitted more efficiently can be produced.

  A twelfth dielectric barrier discharge excimer light source of the present invention comprises an anode electrode made of a straight long cylindrical body covered with a dielectric, and a metallic cathode wire having a spiral shape. In this state, the anode is arranged so that the cathode wire surrounds the anode in a state where the center axis of the cylindrical body and the center axis of the spiral-shaped body coincide with each other. As a result, the volume of the region occupied by the discharge plasma can be increased, and the intensity of the emitted vacuum ultraviolet light can be increased accordingly.

  Further, since the thirteenth dielectric barrier discharge excimer light source of the present invention is provided with the reflector, the vacuum ultraviolet light emitted by the discharge can be emitted in a substantially parallel direction. This makes it possible to irradiate the irradiated object with vacuum ultraviolet light more efficiently.

  In addition, according to the fourteenth dielectric barrier discharge excimer light source, since it is configured to include a plurality of coaxial discharge electrode units, the total area of the dielectric covering the anode electrode is increased and the number of anodes is increased. It can be expanded. As a result, a region where the plasma of the discharge gas, which is a light emitting portion, is formed is expanded, and as a result, the area that can be irradiated on the irradiated object can be increased.

  Further, according to the fifteenth dielectric barrier discharge excimer light source of the present invention, the anode electrode of the tenth dielectric barrier discharge excimer light source and the same electrode as the dielectric structure covering the anode electrode are provided. The dielectric barrier discharge excimer light source has a spiral-shaped metallic cathode wire, and, like the eleventh or twelfth dielectric barrier discharge excimer light source of the present invention, Capacitance can be reduced, and the region where plasma is formed can be defined and limited to the surface of the semi-cylindrical convex surface or the dielectric surface on the bottom side of the semicircular tube shape. A vacuum ultraviolet light source capable of irradiating the irradiated object with vacuum ultraviolet light that is efficiently emitted can be obtained.

  Further, in the first to sixteenth dielectric barrier discharge excimer light sources of the present invention, if the gap between the anode and the cathode is configured to be as narrow as 0 to 2 mm, the power to supply power to these dielectric barrier discharge excimer light sources can be increased. The voltage of the voltage pulse power supply can be set low. As a result, the voltage required for the drive power supply can be reduced, and it becomes easier to make a high voltage pulse power supply. In addition, if the distance between the anode and the cathode is set to be as narrow as 0 to 2 mm, the plasma can be localized near the surface of the dielectric, and the most efficient reduction in luminous efficiency due to the rise in plasma temperature. Can be prevented.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Each drawing merely schematically shows the shape, size, and arrangement relationship of each component to the extent that the present invention can be understood, and the present invention is not limited to the illustrated examples. In the following description, specific materials and conditions may be used. However, these materials and conditions are only one preferred example, and are not limited to these. Moreover, in each figure, the same number is shown about the same component, The overlapping description may be abbreviate | omitted regarding those functions.

  The structure of the first dielectric barrier discharge excimer light source of the present invention and the operating principle thereof will be described with reference to FIGS. FIG. 1 is a schematic cross-sectional view of the first dielectric barrier discharge excimer light source of the present invention cut along a direction orthogonal to the longitudinal direction of the anode. FIG. 2 is a schematic longitudinal sectional view of the dielectric barrier discharge excimer light source of the present invention cut along a direction parallel to the longitudinal direction of the anode.

  The anode electrode 10 is composed of a straight and long cylindrical body, and the dielectric 12 covers the outer periphery of the cylindrical body. The anode 15 includes an anode electrode 10 and a dielectric 12. In the following description, a structure composed of an anode electrode and a dielectric is sometimes referred to as an anode structure.

  The cathode 25 includes a cathode portion 20 and a cathode wire group 16 each having a straight semi-cylindrical shape. The cathode portion 20 has a straight semi-cylindrical shape, the cathode 25 surrounds the anode electrode 10, and the anode electrode 10 and the cathode portion 20 are arranged in parallel to each other in the longitudinal direction. The cathode wire group 16 has both ends extending in a direction along the longitudinal direction of the semi-cylindrical body constituting the cathode portion 20 so that a plurality of wires (wire stubs) are parallel to each other. It is fixed to 20D. Further, the surface 20S of the cathode portion 20 on the side facing the anode electrode 10 is formed with a reflecting surface that reflects VUV radiation. In the following description, a structure including a cathode portion and a cathode wire group may be referred to as a cathode structure.

  The anode electrode 10 is connected to the high voltage pulse power source 18 by the introduction lead 14, and the cathode 25 is grounded by the introduction lead 22. The anode electrode 10, the cathode 25, and the irradiated object 24 are disposed in a chamber (not shown) filled with an inert gas (discharge gas) such as Ar, Kr, or Xe. Then, a pulse voltage is applied from the high voltage pulse power source 18 so that the potential of the anode electrode 10 becomes a positive potential with respect to the cathode 25. That is, a positive high voltage pulse is applied to the anode electrode 10.

  When a high voltage pulse voltage is applied between the anode electrode 10 and the cathode 25, a dielectric barrier discharge occurs between the electrodes, and discharge plasma is generated. By this discharge plasma, the atoms of the discharge gas are excited to form excimer molecules instantly. When this excimer molecule transitions to the ground state that is the state of the original atom (B-X transition), radiation (emission in the VUV band) is generated. That is, spontaneous emission occurs and a spontaneous emission light source is realized.

  In addition, the first dielectric barrier discharge excimer light source of the present invention shown in FIG. 1 includes a case where the anode 15 and the cathode wire group 16 are arranged in contact with each other. In this case, it is possible to operate the light source with the lowest voltage of the high voltage pulse power supply 18 that supplies power to the light source, and as a result, the supply voltage required for the light source can be set low. . As a result, the output voltage required for the drive power source of the light source may be low, and the design of the power source is facilitated accordingly.

  In the following description, the shapes of the anode structure and the cathode structure are different for each embodiment, but when a high voltage pulse voltage is applied between the two electrodes, a dielectric is provided between the two electrodes that are spaced apart or in contact with each other. The operation principle that a barrier discharge occurs, an excimer molecule is instantly formed, and light is emitted by spontaneous emission of the excimer molecule is common to the second to sixteenth dielectric barrier discharge excimer light sources of the present invention.

  Hereinafter, the radiation emitted by this radiation is sometimes referred to as VUV radiation. The radiation generated when the excimer molecule transitions to the ground state, which is the original atomic state, is also called excimer emission. The wavelength of this radiation is determined by the type of discharge gas. Due to this radiation, light emission occurs in the space between the dielectric 12 covering the anode electrode 10 and the cathode 25, that is, around the dielectric 12. By covering the anode electrode 10 with the dielectric 12, it is possible to prevent the discharge once generated from shifting to the arc discharge and to maintain the excimer emission.

  A first dielectric barrier discharge excimer light source according to the present invention divides a region where the above-described VUV radiation is generated and a region where the irradiated object 24 that irradiates the VUV radiation is disposed, The first feature is that no window made of an absorbing material is disposed. Thus, since the VUV radiation is not absorbed by the material constituting the window, the irradiated object 24 can be efficiently irradiated with the VUV radiation.

  In a dielectric barrier discharge excimer light source, it is ideal that continuous discharge is achieved in order to obtain continuous light emission, but excimer molecules have a lifetime of only a few nanoseconds due to the low discharge current density in normal arc discharge. Cannot be generated at high density, and excimer emission is hardly obtained. Therefore, by adopting an electrode with a structure in which the anode electrode 10 is covered with the dielectric 12 and causing a dielectric barrier discharge, it is devised so that a high discharge current density can be ensured while being a pseudo continuous discharge. Has been.

  By configuring the cathode wire group 16 attached to the cathode 20 with a plurality of thin wires having a small diameter, the electric field strength in the vicinity of the wires can be increased. As a result, dielectric barrier discharge can easily occur, and stable discharge can be realized in a high-pressure discharge gas. By realizing a stable and uniform discharge in a high-pressure discharge gas, the concentration of excimer molecules can be kept high, and the luminous efficiency with respect to the power injected into the excimer light source can be increased. That is, it is possible to provide a spontaneous emission light source that emits light having a wavelength in the high-luminance VUV region.

  As shown in FIG. 1, in order to efficiently irradiate the irradiated object 24 with irradiation light (light in the VUV spectral band), the surface of the cathode portion 20 on the side facing the anode electrode 10 has radiation in the VUV spectral region, A reflection surface 20S for reflecting the VUV radiation is formed. As a result, it is possible to efficiently irradiate a target (irradiated object) irradiated with light having a wavelength in the VUV region. The reflecting surface 20S can be formed, for example, by forming a cathode portion with aluminum or the like that is a material that reflects radiation in the VUV spectral region and mirror-polishing the surface. In the embodiments to be described later, the formation method and the like of the reflection surface that reflects the VUV radiation light is the same as in the case of the first embodiment, and thus the description thereof is omitted.

  On the other hand, the cathode wire group 16 and the reflecting surface 20S both play a role of mechanically protecting the anode electrode 10 in addition to maintaining the electric field between the anode electrode 10 and the uniform strength.

  In the following description of Example 2 and below, the anode is connected to the high voltage pulse power supply by the lead-in conductor, the cathode is grounded by the lead-in lead, and the anode, the cathode and the irradiated object are filled with the discharge gas. Since the points arranged in the chamber are common, the description on this point is omitted. Further, except for Example 16, there is no window for partitioning the above-described region for generating vacuum ultraviolet radiation and the region for irradiating the object 24 to be irradiated with this vacuum ultraviolet radiation.

  In addition, since the pulse voltage is applied from the high voltage pulse power supply so that the anode potential is a positive potential with respect to the cathode, the description on this point is also omitted.

  The structure of the second dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. FIG. 3 is a schematic cross-sectional view of the second dielectric barrier discharge excimer light source of the present invention cut along a direction orthogonal to the longitudinal direction of the anode. A schematic longitudinal sectional view in a plane parallel to the longitudinal direction of the anode is the same as FIG. In the following description, as a general rule, only a cross-sectional view of the light source is shown, and a vertical cross-sectional view similar to FIG. 2 is omitted unless particularly necessary.

  A second dielectric barrier discharge excimer light source includes an anode electrode 10 made of a straight, long hollow cylindrical body covered with a dielectric 12, and a long cathode portion 30 surrounding the anode electrode 10. The configuration is the same as that of the first dielectric barrier discharge excimer light source described above. However, the shape of the cathode portion 30 is different. The cathode portion 30 is a semi-tubular body composed of three surfaces (30S-1, 30S-2 and 30S-3) whose cross-sectional shape perpendicular to the longitudinal direction is a U-shape (also referred to as a U-shape). The cathode portion 30 surrounds the anode electrode 10, and the anode electrode 10 and the cathode portion 30 are arranged in parallel to each other in the longitudinal direction.

  The cathode portion 30 has a cathode wire group 16 composed of a plurality of wires fixed to the semi-tubular body in parallel to each other. Therefore, the anode and the cathode are arranged parallel to each other in the longitudinal direction. The cathode wire group 16 is fixed to both ends 30D in which both ends of the wires are along the longitudinal direction of the semi-tubular body constituting the cathode portion 30 so that the plurality of wires are parallel to each other. Further, the surfaces 30S-1, 30S-2, and 30S-3 on the side of the cathode portion 30 facing the anode electrode 10 are formed with reflecting surfaces that reflect VUV radiation.

  The structure of the third dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. FIG. 4 is a schematic cross-sectional view of the third dielectric barrier discharge excimer light source according to the present invention cut along a direction orthogonal to the longitudinal direction of the anode. A schematic longitudinal sectional view parallel to the longitudinal direction of the anode is the same as FIG.

  The third dielectric barrier discharge excimer light source includes an anode electrode 40 made of a straight long cylindrical body covered with a dielectric, and a long cathode portion 30 surrounding the anode electrode 40. The point is the same as that of the first dielectric barrier discharge excimer light source described above. However, the shapes of the anode electrode 40 and the cathode portion 30 are different. The anode electrode 40 is a four-sided shape (40S-1, 40S-2, 40S-3, and 40S-4) having a rectangular cross-sectional shape perpendicular to the longitudinal direction covered with the dielectric 42. It consists of the tubular body which consists of. On the other hand, the cathode portion 30 is a semi-tubular shape composed of three surfaces (30S-1, 30S-2 and 30S-3) having a U-shaped cross section perpendicular to the straight longitudinal direction. Is the body. The cathode 35 has a cathode portion 30 and a cathode wire group 16 composed of a plurality of wires fixed to the semi-tubular body in parallel to each other. The cathode 35 surrounds the anode electrode 40, and the anode electrode 40 and the cathode portion 30 are disposed parallel to each other in the longitudinal direction. On the surfaces 30S-1, 30S-2, and 30S-3 on the side of the cathode portion 30 facing the anode electrode 40, a reflecting surface that reflects VUV radiation is formed.

  The structure of the fourth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. The fourth dielectric barrier discharge excimer light source of the present invention differs from the first to third embodiments described above in that it is made of a straight and long cylindrical body covered with a dielectric instead of a single anode. A plurality of anodes include a group of anodes configured to be arranged in parallel so as to be parallel to a straight long tubular body.

  This configuration example includes first, second and third anodes. The first anode 64a includes an anode electrode 60a made of a straight and long cylindrical body, and a dielectric 62a that covers the outer periphery of the anode electrode 60a. The second anode 64b includes an anode electrode 60b made of a straight and long cylindrical body, and a dielectric 62b that covers the outer periphery of the anode electrode 60b. The third anode 64c includes an anode electrode 60c formed of a straight and long cylindrical body, and a dielectric 62c that covers the outer periphery of the anode electrode 60c. These three anodes 64a, 64b and 64c are arranged in a straight long semi-tubular body 50 in parallel along the longitudinal direction of the semi-tubular body 50 (three in this case). Is done. Although FIG. 5 shows a case where there are three anodes, the number of anodes is not limited to three, and two or three or more anodes may be arranged.

  Further, the cathode 55 is a half of a cathode portion composed of three surfaces (50S-1, 50S-2, and 50S-3) having a U-shaped cross section in a straight vertical direction. It has a cathode wire group 16 composed of a tubular body 50 and a plurality of wires fixed to the semi-tubular body 50 in parallel to each other. The cathode 55 is disposed at a position surrounding the anode group 64. Further, a reflective surface for reflecting VUV radiation is formed on the surface of the cathode (50S-1, 50S-2 and 50S-3) on the side facing the anode group 64.

  The structure of the fifth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. FIG. 6 is a schematic cross-sectional view of a fifth dielectric barrier discharge excimer light source according to the present invention cut along a direction orthogonal to the longitudinal direction of the anode. Further, in order to avoid making the drawing cumbersome, the high-voltage pulse voltage power source 18, the lead wires 14, 22 and the irradiated object 24 shown in FIGS. 1 to 5 are omitted. . In FIG. 7 to FIG. 9 to be referred to for the description of the dielectric barrier discharge excimer light source of Example 6 to Example 8, which will be described later, similarly, the high voltage pulse voltage power supply 18, the lead wires 14, 22, and Illustration of the irradiated object 24 is omitted.

  The fifth dielectric barrier discharge excimer light source is different from the above-described fourth dielectric barrier discharge excimer light source in that the cross-sectional shape of the anodes constituting the anode group 70 is not circular but rectangular.

  This configuration example includes first, second and third anodes. The first anode 70a includes an anode electrode 66a made of a straight and long cylindrical body, and a dielectric 68a covering the outer periphery of the anode electrode 66a. The second anode 70b includes an anode electrode 66b made of a straight and long cylindrical body, and a dielectric 68b covering the outer periphery of the anode electrode 66b. The third anode 70c includes an anode electrode 66c formed of a straight and long cylindrical body, and a dielectric 68c that covers the outer periphery of the anode electrode 66c. These three anodes 70a, 70b, and 70c are composed of three surfaces (50S-1, 50S-2, and 50S-3) having a U-shaped cross section that is straight in the longitudinal direction. A plurality (three in this case) of the semi-tubular bodies 50 are arranged in parallel in the longitudinal direction of the semi-tubular body 50 in the tubular body 50 which is a cathode portion. Although FIG. 5 shows a case where there are three anodes, the number of anodes is not limited to three, and two or three or more anodes may be arranged.

  The anode group 70 and the cathode 50 are arranged parallel to each other in the longitudinal direction, and the surface (50S-1, 50S-2 and 50S-3) of the cathode 50 facing the anode group 70 is VUV. A reflecting surface for reflecting radiation is formed.

  With reference to FIG. 7, the structure of a sixth dielectric barrier discharge excimer light source according to the present invention will be described. FIG. 7 is a schematic cross-sectional view of a sixth dielectric barrier discharge excimer light source according to the present invention cut along a direction orthogonal to the longitudinal direction of the anode.

  The sixth dielectric barrier discharge excimer light source of the present invention comprises a plurality of discharge electrode units. FIG. 7 shows a dielectric barrier discharge excimer light source including three sets of discharge electrode units 80, 82 and 84. However, the number of discharge electrode units is not limited to three, and two or four or more. It may be configured.

  The structure of the discharge electrode unit 80 will be described by taking one of the discharge electrode units as an example. The discharge electrode unit 80 includes an anode 15a and a cathode 25a. The anode 15a has a straight and long cylindrical anode electrode 10a and a dielectric 12a covering the outer peripheral surface of the cylindrical body. The cathode 25a includes a straight semi-cylindrical body 20a constituting a long cathode portion 20a, and a cathode wire group 16a composed of a plurality of wires fixed in parallel to the semi-cylindrical body 20a. Have. The cathode 25a is disposed so as to surround the anode 15a. Further, the surface 20aS of the cathode portion 20a on the side facing the anode 15a is formed with a reflection surface that reflects VUV radiation.

  In FIG. 7, discharge electrode units 82 and discharge electrode units 84 having the same configuration are arranged in parallel along the long direction.

  The structure of the seventh dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. FIG. 8 is a schematic cross-sectional view of a seventh dielectric barrier discharge excimer light source according to the present invention cut along a direction orthogonal to the longitudinal direction of the anode.

  The seventh dielectric barrier discharge excimer light source of the present invention comprises a plurality of discharge electrode units. FIG. 8 shows a dielectric barrier discharge excimer light source including three sets of discharge electrode units 86, 88, and 90. However, the number of discharge electrode units is not limited to three, and two or four or more. It may be configured.

  The structure of the discharge electrode unit 86 will be described using one of the discharge electrode units as an example. The discharge electrode unit 86 includes an anode 15a and a cathode 35a. The anode 15a has a straight and long cylindrical anode electrode 10a and a dielectric 12a covering the outer peripheral surface of the cylindrical body. The cathode 35a comprises a cathode portion 30a composed of three surfaces (30S-1, 30S-2 and 30S-3) having a U-shaped cross section perpendicular to the straight longitudinal direction. A straight semi-tubular body, and a cathode wire group 16a composed of a plurality of wires fixed in parallel to each other on the semi-tubular body. The cathode 35a is disposed so as to surround the anode 15a. Further, on the surface 30aS-1, 30aS-2, and 30aS-3 of the cathode portion 30a on the side facing the anode 15a, a reflecting surface that reflects VUV radiation is formed.

  In FIG. 8, the discharge electrode unit 88 and the discharge electrode unit 90 having the same configuration are arranged in parallel along the longitudinal direction.

  With reference to FIG. 9, the structure of an eighth dielectric barrier discharge excimer light source according to the present invention will be described. FIG. 9 is a schematic cross-sectional view of the eighth dielectric barrier discharge excimer light source according to the present invention cut along a direction orthogonal to the longitudinal direction of the anode.

  The eighth dielectric barrier discharge excimer light source of the present invention comprises a plurality of discharge electrode units. FIG. 9 shows a dielectric barrier discharge excimer light source including three sets of discharge electrode units 92, 94, and 96. However, the number of discharge electrode units is not limited to three, and two or more than four are provided. It may be configured.

  The structure of the discharge electrode unit 92 will be described by taking one of the discharge electrode units as an example. The discharge electrode unit 92 includes an anode 45a and a cathode 35a. The anode 45a includes a tubular anode electrode 40a having a straight and long cross-sectional shape and a dielectric 42a covering the outer peripheral surface of the tubular body. The cathode 35a comprises a cathode portion 30a composed of three surfaces (30S-1, 30S-2 and 30S-3) having a U-shaped cross section perpendicular to the straight longitudinal direction. A straight semi-tubular body, and a cathode wire group 16a composed of a plurality of wires fixed in parallel to each other on the semi-tubular body. The cathode 35a is disposed so as to surround the anode 45a. Further, the surfaces 30aS-1, 30aS-2, and 30aS-3 of the cathode portion 30a on the side facing the anode 45a are formed with reflecting surfaces that reflect VUV radiation.

  In FIG. 9, the discharge electrode unit 94 and the discharge electrode unit 96 having the same configuration are arranged in parallel along the long direction.

  As described above, the dielectric barrier discharge excimer light sources of Examples 4 to 8 are configured to include an anode group instead of a single anode. By doing so, the total area of the dielectric covering the anode can be increased by increasing the number of anode units, so that the area that can be irradiated to the irradiated object 24 can be increased.

  The structure of the ninth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. The ninth dielectric barrier discharge excimer light source of the present invention is different from the above-mentioned embodiment 4 in that additional rod-shaped conductors 102 and 104 are connected in parallel along the longitudinal direction of a straight semi-tubular body to the cathode wire. The configuration is that they are arranged side by side on the same plane parallel to the group 16. The rod-shaped conductors 102 and 104 are set to the same potential as the cathode.

  This rod-shaped conductor 102 is a space between a first anode 64a composed of an anode electrode 60a covered with a dielectric 62a and a second anode 64b composed of an anode electrode 60b covered with a dielectric 62b. The anodes 64a and 64b are arranged in parallel. The first and second anodes 64a and 64b are arranged closer to the plane including the cathode wire group 16 so as to be parallel to the plane including the cathode wire group 16. The rod-shaped conductor 104 is formed between the second anode 64b composed of the anode electrode 60b covered with the dielectric 62b and the third anode 64c composed of the anode electrode 60c covered with the dielectric 62c. Are arranged in parallel with these anodes 64b and 64c. In addition, they are arranged so as to be parallel to the plane including the cathode wire group 16 and at the same distance from the second and third anodes 64b and 64c and close to the plane including the cathode wire group 16.

  The number of anodes of the ninth dielectric barrier discharge excimer light source of the present invention is not limited to three as shown in FIG. 10, but may be two or four or more. Of course, as the number of anodes increases, the number of rod-shaped conductors to be inserted also increases. Moreover, you may comprise using the anode which consists of a straight elongate cylindrical body as an anode.

  By arranging the rod-shaped conductor as described above, the inductance caused by the lead wires 14 or 22 and the wires constituting the cathode wire group 16 can be reduced. As a result, the difference between the phase of the voltage applied between the anode and the cathode and the phase of the discharge current can be reduced, so that the efficiency of the power introduced into the dielectric barrier discharge excimer light source can be increased. That is, a vacuum ultraviolet light source that realizes highly efficient light emission can be obtained.

  A structure of the anode 115 of the tenth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. The anode 115 includes an anode electrode 110 and a dielectric 112 that covers the anode electrode 110. FIG. 11A is a schematic cross-sectional view showing the anode electrode 110 and the dielectric 112 covering the anode electrode 110 taken along a plane perpendicular to the longitudinal direction thereof. The anode 110 includes a semi-cylindrical portion 110a and rounded portions 110b that are rounded from both ends along the longitudinal direction of the semi-cylindrical portion 110a toward the inside of the semi-cylindrical portion 110a. The two rounded portions 110b have tip edges 110D-1 and 110D-2 that are parallel to and spaced from each other. The convex surface 110S of the semi-cylindrical portion 110a is disposed in the direction in which the cathode wire group is disposed, and is provided in contact with the inner surface of the cylindrical dielectric 112. The cross-sectional shape of the semi-cylindrical portion 110a is preferably a semi-cylindrical shape, and the cross-sectional shape of the rounded portion 110b is preferably a curved shape that is separated from the inner wall surface of the dielectric 112.

  An eleventh dielectric barrier discharge excimer light source anode 145 according to the present invention will be described with reference to FIG. The anode 145 includes an anode electrode 140 and a dielectric 142 that covers the anode electrode 140. FIG. 11B is a schematic cross-sectional view of the anode electrode 140 and the dielectric 142 covering the anode electrode 140 taken along a plane perpendicular to the longitudinal direction thereof. The anode electrode 140 includes a semi-rectangular tubular portion 140a and rounded portions that are rounded from both ends along the longitudinal direction of the semi-rectangular tubular portion 140a toward the inside of the semi-rectangular tubular portion 140a. The two rounded portions 140b have tip edges 140D-1 and 140D-2 that are parallel to and spaced from each other. The convex surface (bottom surface) 140S of the semi-rectangular tubular portion 140a is disposed so as to face the direction in which the cathode wire group is disposed, and is provided in contact with the inner surface of the rectangular tubular dielectric 142. The cross-sectional shape of the semi-rectangular tube portion 140a is preferably a semi-cylindrical shape, and the cross-sectional shape of the rounded portion 140b is preferably curved so as to be separated from the inner wall surface of the dielectric 142.

  Like the anode set in the tenth or eleventh dielectric barrier discharge excimer light source described above, the shape of the rounded portions 110b and 140b is set inside the semi-cylindrical portion 110a or inside the semi-rectangular tubular portion 140a. Thus, the electrostatic capacitance between the anode electrode 110b and the dielectric 112 and the anode electrode 140b and the dielectric 142 in the rounded portion can be reduced. As a result, the region where plasma is formed can be determined by limiting it to the dielectric surface on the convex surface 110S of the semicylindrical portion 110a or the bottom surface 140S of the semirectangular tubular portion.

  That is, the anode electrode 110 and the dielectric 112 covering the anode electrode 110 are rounded toward the inner side of the semi-cylindrical portion, so that the anode electrode 110 and the dielectric 112 Since the plasma is difficult to form on the outside of the dielectric 112 that hits the part where the distance is away, the brightness decreases even if the light does not emit or emits light. Further, the anode electrode 140 and the dielectric 142 covering the anode electrode 140 are rounded toward the inner side of the semi-rectangular tubular portion, so that the anode electrode 140 and the dielectric 142 are separated. Since the plasma is difficult to form outside the dielectric 142 that hits a distant portion, the brightness is reduced even if light is not emitted or light is emitted. That is, the side that mainly emits light is the convex surface 110S of the semicylindrical portion described above or the bottom surface 140S side of the semirectangular tubular portion described above.

  Thus, if the convex surface 110S of the semi-cylindrical portion or the bottom surface 140S of the semi-rectangular tube portion is set so as to face the side on which the sample is arranged, the vacuum ultraviolet light is irradiated with the object 24 (illustrated). Can be emitted mainly in the region of the outer surface of the dielectric on the side where the is disposed), so that the irradiated object 24 can be efficiently irradiated with VUV light.

  A structure of a twelfth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIGS. 12 (A) and (B). FIG. 12A is a schematic cross-sectional view of a dielectric barrier discharge excimer light source in which the anode 155 is cut along a plane perpendicular to the longitudinal direction. The anode 155 includes an anode electrode 150 and a dielectric 152 that covers the anode electrode 150. FIG. 12 (B) is a schematic longitudinal sectional view taken along the longitudinal direction of the anode 155, and particularly shows a cut surface of the cross section.

  A twelfth dielectric barrier discharge excimer light source according to the present invention includes a straight and long cylindrical anode electrode 150, an anode 155 composed of a dielectric 152 covering the anode electrode 150, and a spiral-shaped metal. The cathode wire 160 is configured. The thickness of the cathode wire 160 does not exceed 2 mm at the maximum and is 2 mm or less. The spiral-shaped body is made by winding a wire in a spiral shape. The cathode wire 160 is arranged so as to surround the anode 155 in a state where the center axis of the cylindrical body coincides with the center axis of the cathode wire 160 of the spiral shape body. With the configuration as described above, the volume of the region occupied by the discharge plasma can be increased, and the intensity of the emitted vacuum ultraviolet light can be increased accordingly.

  Referring to FIG. 13, the structure of a thirteenth dielectric barrier discharge excimer light source according to the present invention will be described. The thirteenth dielectric barrier discharge excimer light source of the present invention is different from the above-mentioned twelfth dielectric barrier discharge excimer light source in that the anode 155 and the spiral-shaped cathode wire 160 are disposed inside the reflector 170. It is a point that is arranged. The reflector 170 is a straight and long semi-cylindrical body, and the longitudinal direction of the semi-cylindrical body, the central axis of the cylindrical body constituting the anode 155, and the metallic cathode wire of the spiral-shaped body The central axis of 160 is arranged in parallel.

  The surface 170S of the reflector 170 on the side facing the cathode 155 and the metallic cathode wire 160 of the spiral shape is processed as a surface having a property of reflecting radiation in the VUV spectral region, that is, VUV radiation. . As a result, it is possible to efficiently irradiate a target (irradiated object) irradiated with light having a wavelength in the VUV region. The surface 170S can be formed by, for example, forming the reflector 170 with aluminum or the like that is a material that reflects radiation in the VUV spectral region (VUV radiation) and mirror-polishing the surface 170S.

  Since the surface 170S is a semi-cylindrical concave shape, a part of the VUV radiation emitted by the discharge is reflected by the surface 170S and newly arranged in a substantially parallel direction by newly providing the reflector 170. , Can be emitted. As a result, the irradiated object 24 can be irradiated with vacuum ultraviolet light at a higher rate.

  A structure of a fourteenth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. A fourteenth dielectric barrier discharge excimer light source according to the present invention is a coaxial discharge electrode composed of an anode 155 and a cathode wire 160 coated with a dielectric 152 used in a thirteenth dielectric barrier discharge excimer light source. This is a point that includes a plurality of units 182, 184, and 186. A plurality of the coaxial discharge electrode units 182, 184 and 186 are arranged in one reflector 180 in parallel so that their central axes are parallel to each other.

  The reflector 180 is a semi-rectangular body composed of three surfaces 180S-1, 180S-2, and 180S-3 having a U-shaped cross section perpendicular to the longitudinal direction. The longitudinal direction of the rectangular body and the central axis of the cylindrical body are arranged in parallel. According to the fourteenth dielectric barrier discharge excimer light source, since it is configured to include a plurality of coaxial discharge electrode units, the total area of the dielectric covering the anode is increased by increasing the number of anodes. Can be spread. As a result, a region where the plasma of the discharge gas, which is a light emitting portion, is formed is expanded. As a result, the radiation power is increased as a whole, and the area that can be irradiated to the irradiated object 24 can be increased.

  With reference to FIGS. 15A and 15B, a fifteenth dielectric barrier discharge excimer light source structure according to the present invention will be described. FIG. 15 (A) is a schematic cross-sectional view of a fifteenth dielectric barrier discharge excimer light source of the present invention, and FIG. 15 (B) is a vertical cross-sectional view, particularly showing a cut section. Yes. The structure of the electrode of the fifteenth dielectric barrier discharge excimer light source of the present invention comprises the same electrode as the structure of the anode 115 of the tenth dielectric barrier discharge excimer light source and the dielectric 112 covering the anode 115. And a metallic cathode wire 160 of a helical shape of the twelfth dielectric barrier discharge excimer light source. In a state where the central axis of the cylindrical body and the central axis of the spiral body coincide with each other, the anode 115 is arranged so as to surround the cathode wire 160.

  By adopting the above-described configuration, similarly to the tenth or eleventh dielectric barrier discharge excimer light source of the present invention, the region where plasma is formed is formed on the convex surface 110S of the semicylindrical portion or the bottom surface 140S of the semirectangular tubular portion. A light source that can be limited to the dielectric surface on the side and can irradiate the irradiated object 24 with more efficiently radiated light can be produced.

  A structure of a sixteenth dielectric barrier discharge excimer light source according to the present invention will be described with reference to FIG. FIG. 16 is a schematic longitudinal sectional view of a sixteenth dielectric barrier discharge excimer light source according to the present invention, and particularly shows a cut surface of the cross section. A sixteenth dielectric barrier discharge excimer light source according to the present invention is a straight long cylinder composed of an anode electrode 190 made of a straight long cylindrical body and a dielectric 192 covering the anode electrode. And an anode 195 made of a rod-like body and a metal cathode wire 194 having a spiral shape. The anode 195 is arranged so that the cathode wire 194 surrounds the central axis of the cylindrical body and the central axis of the spiral body. Also, the cathode wire 194 and the anode 195 are installed inside a tube 200 made of a dielectric material that is transparent to the emission wavelength, and made of a dielectric material that is transparent to the emission wavelength. The tube 200 seals the cathode wire 194 and the anode 195.

  Therefore, the irradiated object 24 is arranged outside the tube 200 made of a dielectric material and irradiated with vacuum ultraviolet light. Therefore, it is necessary to fill the space between the tube 200 and the irradiated object 24 with a gas that does not absorb vacuum ultraviolet light, such as nitrogen gas, so that there is no gas such as oxygen that absorbs vacuum ultraviolet light. . In FIG. 16, the irradiated object 24 is set at a position above the tube 200 or a position below the tube 200.

  Further, if fused quartz (for example, fused silica sold under the trade name Suprasil) is used as the dielectric material constituting the tube 200, the tube 200 is transparent to vacuum ultraviolet light having a wavelength of about 172 nm. Therefore, if the discharge gas sealed in the tube 200 is Xe gas, the peak wavelength of the spectrum of light emitted from the excimer molecule is 172 nm, so that the emission in the vacuum ultraviolet region can be taken out of the tube 200. it can. However, it is not possible to use Ar gas or Kr gas, which is an inert gas other than Xe gas (the emission wavelengths due to BX transition are 126 and 146 nm, respectively) as the discharge gas sealed in the tube 200. This is because fused silica absorbs light having a wavelength of 160 nm or less.

  The cathode wire constituting the twelfth to sixteenth dielectric barrier discharge excimer light sources described above has a diameter not exceeding 2 mm, and is a straight or semi-longitudinal direction of the semi-cylindrical body. The angle between the longitudinal direction of the tubular body and the length direction of the cathode wire is set to an angle within a range where the angle deviation from the orthogonal or orthogonal position does not exceed 15 °, so that the light source is produced. Preferred above.

  In the first to sixteenth dielectric barrier discharge excimer light sources of the present invention described above, it is preferable that the cooling liquid or gas is configured to be able to circulate inside the anode casing. is there. By circulating a cooling liquid or gas through the inside of the housing, it is possible to prevent the temperature of the electrode from rising, and it is possible to prevent a decrease in efficiency in which the discharge gas is turned into plasma due to the temperature rise, A light source with high efficiency can be realized.

  In the first to sixteenth dielectric barrier discharge excimer light sources described above, the cathode structure, the wires of the cathode structure (cathode wire group), the additional conductors, and the spiral shaped cathode wire are made of stainless steel. It is preferable to manufacture. The anode part and the reflector are preferably made of aluminum. As the dielectric covering the anode electrode, it is preferable to use fused silica.

  The thickness of the dielectric covering the anode electrode is preferably 1.5 mm. It is preferable that the diameter of the anode electrode or the length of one side of the rectangle of the vertical cross section is 23 mm and the length in the longitudinal direction is 200 mm. The diameter of the anode electrode or the length of one side of the rectangle of the vertical cross section is preferably selected in the range of 10 mm to 40 mm. The length of the anode electrode in the longitudinal direction is preferably selected in the range of 50 mm to 1 m. The diameter of the wire constituting the cathode wire group, the diameter of the cathode wire, and the diameter of the additional conductor is preferably 1 mm.

  Further, it is preferable that the length of one side of the semi-cylindrical diameter or the U-shape of the cathode is 80 mm and the length in the longitudinal direction is 200 mm. In addition, it is preferable to select the semicylindrical diameter of the cathode or the length of one side of the U shape in the range of 50 mm to 100 mm. Further, the length of the cathode in the longitudinal direction is preferably selected in the range of 50 mm to 1 m.

  The voltage of the high voltage pulse applied between the anode and the cathode is preferably 4 to 6 kV and the frequency is preferably 20 kHz. The frequency is preferably selected and set in the range of 10 to 20 kHz. The pressure of the discharge gas is preferably set to 120 Torr (15.96 kPa), and is preferably selected and set within the range of 80 to 760 Torr (10.64 to 101.08 kPa).

  Here, with reference to FIG. 17 to FIG. 19, the relationship between the gap between the anode and the cathode and the breakdown voltage will be described. The breakdown voltage, as will be described in detail later, is a potential difference between the anode and the cathode when the discharge is started.

  FIG. 17 is a diagram showing the positional relationship between the anode and the cathode. FIG. 17 is a diagram schematically showing the electrode configuration, power source and relationship of the dielectric barrier discharge excimer light source of the first to sixteenth aspects of the invention, and does not show the electrode structure for a specific embodiment of the invention. Accordingly, FIG. 17 shows the relationship between the characteristic electrode structure of the dielectric barrier discharge excimer light source of the first to sixteenth inventions and the electrode structure shown in FIG. It is a drawing which should be referred with attention to only the interval. FIG. 17 shows an example of a configuration in which three anodes having the same structure composed of an anode electrode and a dielectric are connected in parallel to the power supply 300. However, the configuration has one anode. The distance between the anode and the cathode is also defined as shown below for the light source.

  As shown in FIG. 17, an anode 315 constituted by an anode electrode 310 and a dielectric 312 and a cathode wire 316 constituting a cathode are arranged with a distance d therebetween. That is, the distance d between the anode and the cathode means the shortest distance between the surface of the dielectric 312 and the cathode wire 316.

FIG. 18 is an equivalent circuit diagram including a power source and a dielectric barrier discharge excimer light source. FIG. 18 shows a state in which driving power is supplied from the power source 330 to the dielectric barrier discharge excimer light source 320. What is indicated by the capacitor 322 whose capacitance is C _d is the capacitance of the capacitor that is constructed in a pseudo manner including the dielectric 312. Hereinafter, sometimes simply referred to as an electrostatic capacitance C _d of the electrostatic capacitance caused by the dielectric 312. What is indicated by the capacitor 326 having a capacitance of C _g is the capacitance of the capacitor that is constructed in a pseudo manner including the discharge gas between the anode and the cathode. Hereinafter, sometimes simply referred to as an electrostatic capacitance C _g electrostatic capacitance caused by the discharge gas. Further, what is indicated by the variable resistor 324 having a resistance value R _gap is a pseudo electric resistance caused by the discharge gas between the anode and the cathode. Hereinafter, the resistance value of the pseudo electric resistance caused by the discharge gas may be simply referred to as a resistance value R _gap .

18, a dielectric barrier discharge excimer light source 320, is expressed by an equivalent circuit, a capacitor of the capacitance C _d, the electrostatic capacitance is configured to include a capacitor of C _g, and a resistance of the resistance value R _gap Will be. That is, in order to discuss the voltage required to drive the dielectric barrier discharge excimer light source 320, it is only necessary to discuss the electric circuit composed of these capacitors and resistors.

When current flows due to the breakdown of the insulation resistance caused by the discharge gas between the anode and the cathode, the discharge is started. The breakdown of the insulation resistance is a phenomenon in which the resistance value R _gap suddenly decreases when a voltage value applied to the insulation resistance is gradually increased and reaches a certain voltage value. Although the discharge gas is an insulating material, when the applied voltage is increased, the insulation is destroyed and the resistance value R _gap suddenly decreases, and a current flows through the discharge gas, that is, discharge starts. That is, at this time, the dielectric barrier discharge excimer light source starts to emit light. A voltage applied to the resistor at the moment when the resistance value R _gap becomes small is called a breakdown voltage.

  As is apparent from the above description, lowering the breakdown voltage leads to a reduction in the output voltage required for the high voltage pulse power source for driving the dielectric barrier discharge excimer light source of the present invention. That is, the output voltage value of the high voltage pulse power supply only needs to be equal to or higher than the breakdown voltage. Therefore, if the breakdown voltage is low, the output voltage value of the high voltage pulse power supply may be lowered accordingly.

  FIG. 19 shows the result of examining the breakdown voltage V in the dielectric barrier discharge excimer light source having the electrode structure shown in FIG. 17 using Ar as the discharge gas. In FIG. 19, the gas pressure is graduated in units of atmospheric pressure (atm) and shown on the horizontal axis, the vertical axis shows the breakdown voltage V, and 1 is normalized with 1 being the maximum value. Here, the breakdown voltage value indicated by 1 on the vertical axis is about 2.8 kV to 2.9 kV. Therefore, the place with 0.6 corresponds to 1.68 kV to 1.74 kV, and the place with 0.35 corresponds to 0.98 kV to 1.02 kV. Further, the distance d between the anode and the cathode was set to d = 2 mm and d = 5 mm, and the breakdown voltage was measured for each.

  The discharge gas pressure was set to 0.5 atm, 0.75 atm, and 1.0 atm, and the breakdown voltage was measured for each. In FIG. 19, the curve indicated by A shows the measurement results set with d = 5 mm, and the curve indicated by B shows the measurement results set with d = 2 mm. According to FIG. 19, since the curve indicated by B is below the curve indicated by A, it can be seen that the breakdown voltage decreases as the distance d between the anode and the cathode decreases. From this result, it can be concluded that the breakdown voltage can be minimized by setting the distance d between the anode and the cathode to 0 mm.

  As described above, in the dielectric barrier discharge excimer light source, the anode and the cathode are placed in contact with each other, so that the light source is operated in a state where the voltage of the high voltage pulse power source that supplies power to the light source is low. It turns out that it becomes possible.

  Further, the plasma is localized in the vicinity of the surface of the dielectric 312 by reducing the distance d between the anode and the cathode. Since the dielectric (quartz glass) covering the cathode is kept at a low temperature by water cooling the cathode, it can efficiently absorb the heat generated by the plasma. Therefore, it is possible to prevent a decrease in light emission efficiency caused by an increase in plasma temperature, and high efficiency light emission is realized.

  The electrode materials, dimensions, and the like described above are merely preferred examples, and the technical scope of the present invention is not limited to the materials or conditions described above.

  According to the above-described first to sixteenth dielectric barrier discharge excimer light sources of the present invention, since the object to be irradiated can be efficiently irradiated with light emitted in the vacuum ultraviolet region, in the field of microelectronics, It can be used as a vacuum ultraviolet light source used for cleaning with ultraviolet light or reconstructing the material surface with ultraviolet light.

In carrying out the present invention, the present invention can adopt the following preferred configurations.
(1) A high-pressure dielectric barrier discharge excimer light source having a cathode surrounding the anode with a dielectric cover and having a reduced breakdown voltage for obtaining radiation in a VUV having a radiator structure without a take-out window, At least one side of the cathode is made of wire with a thickness not exceeding 2 mm at most, the cathode being perpendicular to the anode axis or a small angle (15 ° to the direction perpendicular to the anode axis). The following is composed of several wire piece sets in parallel, positive unipolar high voltage pulse is applied to the anode electrode, the cathode is grounded, and the radiation intensity at the irradiated object is increased A dielectric barrier discharge excimer light source in which the cathode surface is used as a reflector.
(2) The dielectric barrier discharge excimer light source according to (1), wherein the anode including the dielectric cover is manufactured as a set of several anodes arranged in parallel and surrounded by one cathode.
(3) The dielectric barrier discharge excimer light source according to (1), wherein the cathode and the anode provided with the dielectric cover are manufactured as several section sets in close proximity to each other and in parallel.
(4) The dielectric barrier discharge excimer light source according to any one of (1) to (3), wherein the cathode has a rectangular or square cross section.
(5) The dielectric barrier discharge excimer light source according to (1) or (3), wherein the cathode is composed of half segments.

(6) The dielectric barrier discharge excimer light source according to (1) or (3), wherein the cathode is manufactured as a semi-cylindrical body having an extended edge.
(7) The dielectric barrier discharge excimer light source according to (1), (2), (3) or (4), wherein the anode is set in a dielectric tube having a rectangular or square cross section.
(8) The dielectric barrier discharge excimer according to (1), (2), (3), (4), (5) or (6), wherein the anode is set in a cylindrical dielectric tube light source.
(9) The dielectric barrier discharge excimer light source according to (1), (2), or (8), wherein the cathode has additional conduction placed in a plane between dielectric tubes surrounding the anode.
(10) The dielectric barrier discharge excimer light source according to any one of (1) to (9), wherein the anode is manufactured as a half segment having a circular edge whose convex side faces the direction of the cathode wire.

(11) A dielectric barrier discharge excimer light source having a cathode surrounding the anode with a dielectric cover and having a reduced breakdown voltage for obtaining radiation in a VUV having a radiator structure without a takeout window,
The dielectric is a dielectric barrier discharge excimer light source in which the cathode is spirally formed of a metal wire having a thickness of 2 mm or less, a positive unipolar pulse is applied to an internal electrode of the anode, and the cathode is grounded.
(12) The dielectric barrier discharge excimer light source according to (11), wherein the cathode and the anode are disposed in a reflector.
(13) The dielectric barrier discharge excimer according to any one of (11) to (12), wherein the cathode and the anode are composed of several parallel sections arranged in one reflector. light source.
(14) The anode has a shape having a semi-cylindrical portion and a rounded portion that is rounded from both ends along the longitudinal direction of the semi-cylindrical portion toward the inside of the semi-cylindrical portion. The dielectric barrier discharge excimer light source described in any one of (11), (12), and (13).
(15) The above-mentioned (11) for ultraviolet light, vacuum ultraviolet light, and visible light region, wherein the cathode is inserted into a dielectric tube having transparency at the operating wavelength, and is made as a non-sealing type light source The dielectric barrier discharge excimer light source described in 1.
(16) The dielectric barrier discharge excimer according to any one of (1) to (15), wherein a cooling liquid or gas is injected into the inner cavity of the anode to cool the dielectric barrier discharge excimer light source. light source.

FIG. 6 is a diagram (part 1) for explaining the structure of a first dielectric barrier discharge excimer light source; FIG. 2 is a diagram (part 2) for explaining the structure of a first dielectric barrier discharge excimer light source; FIG. 5 is a diagram for explaining the structure of a second dielectric barrier discharge excimer light source. FIG. 6 is a diagram for explaining the structure of a third dielectric barrier discharge excimer light source. It is a figure where it uses for description of the structure of the 4th dielectric barrier discharge excimer light source. FIG. 10 is a diagram for explaining the structure of a fifth dielectric barrier discharge excimer light source. FIG. 10 is a diagram for explaining the structure of a sixth dielectric barrier discharge excimer light source. FIG. 10 is a diagram for explaining the structure of a seventh dielectric barrier discharge excimer light source. It is a figure where it uses for description of the structure of the 8th dielectric barrier discharge excimer light source. FIG. 10 is a diagram for explaining the structure of a ninth dielectric barrier discharge excimer light source. FIG. 15 is a schematic cross-sectional structure diagram of an anode and a dielectric coating portion of tenth and eleventh dielectric barrier discharge excimer light sources of the present invention. FIG. 20 is a diagram for explaining the structure of a twelfth dielectric barrier discharge excimer light source. It is a figure for explanation of the structure of a thirteenth dielectric barrier discharge excimer light source. It is a figure where it uses for description of the structure of the 14th dielectric barrier discharge excimer light source. FIG. 25 is a diagram for explaining the structure of a fifteenth dielectric barrier discharge excimer light source. FIG. 20 is a diagram for explaining the structure of a sixteenth dielectric barrier discharge excimer light source. It is a figure where it uses for description about the space | interval of an anode and a cathode. It is an equivalent circuit diagram including a high output pulse power supply and a dielectric barrier discharge excimer light source. It is a figure which shows the space | interval dependence of the breakdown voltage of an anode and a cathode.

Explanation of symbols

10, 40, 60, 66, 110, 140, 150, 190, 310: Anode electrode
12, 42, 62, 68, 112, 142, 152, 192, 312: Dielectric
15, 45, 115, 145, 155, 195, 315: Anode
14, 22: Lead wire
16, 316: Cathode wire group
18, 300, 330: High voltage pulse power supply
20, 30, 50: Cathode part
24: Irradiated object
25, 35, 55: Cathode
64, 70: Anode group
80, 82, 84, 86, 88, 90, 92, 94, 96: Discharge electrode unit
102, 104: Rod-shaped conductor
160, 194: Cathode wire
170: Reflector
182, 184, 186: Coaxial discharge electrode unit
200: Tube made of dielectric material
320: Dielectric barrier discharge excimer light source
322: Condenser capacitance is C _d
324: Variable resistance with resistance R _gap
326: capacitor capacitance is C _g

Claims (28)

An anode having a dielectric, and an anode electrode covered with the dielectric and made of a straight, long hollow cylindrical body;
A long cathode surrounding the anode, the cathode having a straight semi-cylindrical body and a cathode wire group composed of a plurality of wires fixed to the semi-cylindrical body in parallel;
The anode and the cathode are arranged parallel to each other in the longitudinal direction,
A dielectric barrier discharge excimer light source characterized in that a reflection surface for reflecting radiation in a vacuum ultraviolet spectral region is formed on a surface of the cathode facing the anode. The dielectric barrier discharge excimer light source according to claim 1,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-cylindrical body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle between the straight longitudinal direction of the semi-cylindrical body and the length direction of the wire is set to an angle within a range where the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. Dielectric barrier discharge excimer light source. An anode having a dielectric, and an anode electrode covered with the dielectric and made of a straight, long hollow cylindrical body;
A long cathode surrounding the anode, a semi-tubular body having a three-faced cross-sectional shape perpendicular to the straight longitudinal direction, and a plurality of the semi-tubular bodies fixed in parallel to the semi-tubular body A cathode wire group consisting of a plurality of wires, and
The anode and the cathode are arranged parallel to each other along the longitudinal direction,
A dielectric barrier discharge excimer light source characterized in that a reflection surface for reflecting radiation in a vacuum ultraviolet spectral region is formed on a surface of the cathode facing the anode. A dielectric barrier discharge excimer light source according to claim 3,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-tubular body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle formed between the longitudinal direction of the straight semi-tubular body and the length direction of the wire is set to an angle within a range in which the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. A dielectric barrier discharge excimer light source. An anode having a dielectric, and an anode electrode made of a hollow tubular body formed of four surfaces that are covered with the dielectric and have a rectangular cross-sectional shape perpendicular to the longitudinal direction;
A long cathode surrounding the anode, a semi-tubular body having a three-faced cross-sectional shape perpendicular to the straight longitudinal direction, and a plurality of the semi-tubular bodies fixed in parallel to the semi-tubular body A cathode wire group consisting of a plurality of wires, and
The anode and the cathode are arranged parallel to each other in the longitudinal direction,
A dielectric barrier discharge excimer light source characterized in that a reflection surface for reflecting radiation in a vacuum ultraviolet spectral region is formed on a surface of the cathode facing the anode. The dielectric barrier discharge excimer light source according to claim 5,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-tubular body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle formed between the longitudinal direction of the straight semi-tubular body and the length direction of the wire is set to an angle within a range in which the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. A dielectric barrier discharge excimer light source. An anode having a dielectric and an anode electrode that is covered with the dielectric and includes a straight, long hollow cylindrical body,
A plurality of anodes arranged in parallel so as to be parallel to the straight long cylindrical body; and
A long cathode that surrounds the anode group, and is composed of a plurality of wires fixed in parallel to each other on a semi-tubular body having a three-faced cross-sectional shape perpendicular to the longitudinal direction. The cathode having a group of cathode wires,
The anode and the cathode are arranged parallel to each other in the longitudinal direction,
A dielectric barrier discharge excimer light source characterized in that a reflective surface for reflecting radiation in a vacuum ultraviolet spectrum region is formed on a surface of the cathode facing the anode group. The dielectric barrier discharge excimer light source according to claim 7,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-tubular body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle formed between the longitudinal direction of the straight semi-tubular body and the length direction of the wire is set to an angle within a range in which the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. A dielectric barrier discharge excimer light source. An anode having a dielectric and an anode electrode made of a hollow tubular body having four faces that are covered with the dielectric and have a rectangular cross-sectional shape perpendicular to the longitudinal direction,
A plurality of anodes arranged in parallel so as to be parallel to the straight long tubular body;
A cathode wire group comprising a plurality of wires fixed in parallel to a semi-tubular body consisting of three surfaces, each of which is a long cathode surrounding the anode group and having a rectangular cross-sectional shape perpendicular to the longitudinal direction. And the cathode having
The anode and the cathode are arranged parallel to each other in the longitudinal direction,
A dielectric barrier discharge excimer light source characterized in that a reflective surface for reflecting radiation in a vacuum ultraviolet spectrum region is formed on a surface of the cathode facing the anode group. The dielectric barrier discharge excimer light source according to claim 9,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-tubular body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle formed between the longitudinal direction of the straight semi-tubular body and the length direction of the wire is set to an angle within a range in which the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. A dielectric barrier discharge excimer light source. An anode having a dielectric and an anode electrode made of a straight hollow cylinder covered with the dielectric and a long cathode surrounding the anode, and a straight half-cylinder And a discharge electrode unit comprising a cathode wire group comprising a plurality of wires fixed in parallel to each other on the semi-cylindrical body, the discharge electrode unit being arranged in parallel in the longitudinal direction. Comprising a group of discharge electrode units,
A dielectric barrier discharge excimer light source characterized in that a reflective surface for reflecting radiation in a vacuum ultraviolet spectral region is formed on a surface of the cathode facing the anode. The dielectric barrier discharge excimer light source according to claim 11,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-cylindrical body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle between the straight longitudinal direction of the semi-cylindrical body and the length direction of the wire is set to an angle within a range where the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. Dielectric barrier discharge excimer light source. An anode having a dielectric and an anode electrode made of a straight hollow cylinder covered with the dielectric, and a long cathode surrounding the anode, in a straight longitudinal direction A discharge electrode unit comprising a semi-tubular body consisting of three surfaces whose vertical cross-sectional shape is a U-shape and a plurality of wires fixed to the semi-tubular body in parallel to each other in a long direction. Comprising a group of discharge electrode units arranged in parallel with each other,
A dielectric barrier discharge excimer light source characterized in that a reflective surface for reflecting radiation in a vacuum ultraviolet spectral region is formed on a surface of the cathode facing the anode. The dielectric barrier discharge excimer light source according to claim 13,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-tubular body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle formed between the longitudinal direction of the straight semi-tubular body and the length direction of the wire is set to an angle within a range in which the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. A dielectric barrier discharge excimer light source. An anode having a dielectric, and an anode electrode formed of a hollow tubular body having four faces that are covered with the dielectric and have a rectangular cross-section perpendicular to the longitudinal direction; and a long length surrounding the anode And a cathode wire comprising a three-sided semi-tubular body having a U-shaped cross-section perpendicular to the longitudinal direction and a plurality of wires fixed in parallel to the half-tubular body A discharge electrode unit comprising the cathode having a group, and comprising a discharge electrode unit group configured to be arranged in parallel in the long direction,
A dielectric barrier discharge excimer light source characterized in that a reflective surface for reflecting radiation in a vacuum ultraviolet spectral region is formed on a surface of the cathode facing the anode. The dielectric barrier discharge excimer light source according to claim 15,
The plurality of wires constituting the cathode wire group are stretched between both ends along the longitudinal direction of the straight semi-tubular body,
The diameter of the plurality of wires constituting the cathode wire group is a thickness not exceeding 2 mm,
The angle formed between the longitudinal direction of the straight semi-tubular body and the length direction of the wire is set to an angle within a range in which the angle deviation from the orthogonal or orthogonal position does not exceed 15 °. A dielectric barrier discharge excimer light source. The dielectric barrier discharge excimer light source according to any one of claims 7 to 10,
In the cathode, a plurality of rod-shaped additional conductors parallel to the longitudinal direction of the straight semi-tubular body are arranged on one plane between the anode group and the cathode wire group. A dielectric barrier discharge excimer light source. The dielectric barrier discharge excimer light source according to any one of claims 1 to 4, 7, 8, 11 to 14,
The anode electrode has a semi-cylindrical shape, and the convex surface of the semi-cylindrical shape is disposed so as to face the direction in which the cathode wire group is arranged, and the end of the semi-cylindrical shape along the longitudinal direction is arranged. A dielectric barrier discharge excimer light source characterized in that the shape is rounded toward the inside of the semi-cylindrical shape. The dielectric barrier discharge excimer light source according to any one of claims 5, 6, 9, 10, 15, and 16,
The anode electrode has a rectangular semi-tube shape, and the bottom surface of the rectangular semi-tube shape is installed in a direction in which the cathode wire group is disposed, and the rectangular semi-tube-shaped long shape is provided. A dielectric barrier discharge excimer light source characterized in that the shape of the end along the direction is rounded toward the inner side of the rectangular semi-tubular shape. An anode having a dielectric, and an anode electrode covered with the dielectric and made of a straight, long hollow cylindrical body;
With a metallic cathode wire in a spiral shape,
In a state where the central axis of the cylindrical body and the central axis of the spiral-shaped body coincide with each other, the cathode wire is arranged so as to surround the anode.
A dielectric barrier discharge excimer light source. An anode having a dielectric, and an anode electrode covered with the dielectric and made of a straight, long hollow cylindrical body;
With a metallic cathode wire in a spiral shape,
A coaxial discharge electrode unit configured so that the cathode wire surrounds the anode in a state where the central axis of the cylindrical body and the central axis of the spiral-shaped body coincide with each other is provided inside the reflector. Are located in
The reflector is a straight long semi-cylindrical body, and the longitudinal direction of the semi-cylindrical body is arranged in parallel with the central axis of the cylindrical body and the central axis of the spiral-shaped body. A dielectric barrier discharge excimer light source. An anode having a dielectric, and an anode electrode covered with the dielectric and made of a straight, long hollow cylindrical body;
With a metallic cathode wire in a spiral shape,
A coaxial discharge electrode unit configured so that the cathode wire surrounds the anode in a state where the central axis of the cylindrical body and the central axis of the spiral-shaped body are coincident with each other is the central axis of each other. Are arranged in one reflector so that they are parallel,
The dielectric barrier discharge excimer light source, wherein the reflector is a semi-tubular body having three surfaces whose cross-sectional shape perpendicular to the longitudinal direction is a U-shape. The dielectric barrier discharge excimer light source according to any one of claims 20 to 22,
The anode electrode has a semi-cylindrical shape, and an end shape along the longitudinal direction of the semi-cylindrical shape is configured to be rounded toward an inner direction of the semi-cylindrical shape. Dielectric barrier discharge excimer light source. An anode having a dielectric, and an anode electrode covered with the dielectric and made of a straight, long hollow cylindrical body;
With a metallic cathode wire in a spiral shape,
In a state where the central axis of the cylindrical body and the central axis of the helical body are coincident, the anode is configured so that the cathode wire surrounds the anode,
The cathode wire and the anode are placed inside a tube made of a dielectric material that is transparent to the emission wavelength;
A dielectric barrier discharge excimer light source characterized in that the cathode wire and the anode are sealed by the tube made of a dielectric material transparent to the emission wavelength. A dielectric barrier discharge excimer light source according to any one of claims 1 to 24,
A dielectric barrier discharge excimer light source characterized in that the liquid or gas for cooling is configured to be able to circulate inside the casing of the anode. The dielectric barrier discharge excimer light source according to any one of claims 20 to 25,
A dielectric barrier discharge excimer light source, wherein the spiral cathode wire has a diameter not exceeding 2 mm. The dielectric barrier discharge excimer light source according to any one of claims 1 to 26,
A dielectric barrier discharge excimer light source, wherein a distance between the anode and the cathode is 2 mm. The dielectric barrier discharge excimer light source according to any one of claims 1 to 26,
A dielectric barrier discharge excimer light source, wherein the anode and the cathode are in contact with each other.

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