JP2005321292A - Cdm discharge distribution observation apparatus and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem wherein the distribution of CDM discharge on an LSI chip cannot be measured. <P>SOLUTION: A detection probe 1, having a detector 1a at the tip thereof which can detect a magnetic field, is arranged on the LSI chip 11. A contact maker 2a of a charge/discharge probe 2 is in contact with a pad 11a on the LSI chip 11. The detection probe 1 can move in the XYZ directions with high precision. The detection probe 1 is connected to an oscilloscope 3. When a charge switch SW2 is closed, the LSI chip 11 is charged through the charge/discharge probe 2. When a discharge switch SW1 is closed then, charged electric charges are discharged to the LSI chip. The discharged current is detected with a resistor R1 of a discharged current detection section 7. The detected output is used as a trigger signal which captures an detection output of the probe 1 on the oscilloscope 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a CDM discharge distribution observation apparatus and a CDM discharge distribution observation method, and more particularly to an apparatus and method for observing the distribution of current flowing on a chip when CDM discharge is performed on an LSI.

  One of the things that causes fatal damage to LSI is electrostatic breakdown. For example, when the LSI is separated from the adsorber used for transportation, peeling electrification occurs in the LSI, and in this state, at the moment when the LSI pin touches the metal or the like, the rise between the LSI and the metal is 1 nsec or less. High-speed excessive current flows, destroying LSI. Alternatively, the LSI is charged when touched by a person who is charged with static electricity, and is destroyed when a high-speed overcurrent flows during discharging. This type of electrostatic breakdown is caused by discharge of charges in the chip induced by charges charged on the package surface. CDM (charged device model) is generally employed as a test method that models this phenomenon of electrostatic breakdown (see, for example, Patent Documents 1 and 2). A model that evaluates the CDM tolerance in a state closer to the actual condition is a method called FiCDM (free injection CDM) that gives a charge to the surface of the package, but in order to more easily evaluate the CDM tolerance, an initial charge is given inside the chip. DCDM (direct CDM) is used for discharging from there.

FIG. 8 is a perspective view showing a conventional method for evaluating DCDM tolerance. In order to perform the electrostatic breakdown test, the switch SW is switched to the a side, and the contact T of the testing machine is brought into contact with the pin of the semiconductor integrated circuit IC. As a result, the high voltage power supply V is supplied to the IC via the resistor R, and the stray capacitance C of the IC is charged. Next, the switch SW is switched to the b side to discharge the electric charge charged in the chip, thereby applying stress to the circuit due to the discharge current. Then, it is inspected whether the circuit operates normally after stress.
Japanese Patent Publication No. 5-668 Registered Utility Model Publication No. 3003306

Since the conventional CDM test is for evaluating whether or not the discharge breakdown is caused by the application of the discharge stress, it is understood what path the discharge current that is the cause of the breakdown passes through the LSI. It is not possible. That is, when analyzing the destruction mechanism by CDM, the current path in the chip cannot be estimated by the conventional test method, although the current path in the chip has an important meaning.
In addition, for devices in which electrostatic breakdown occurs due to the CDM test, measures such as a change in wiring width and a change in wiring route must be taken. In the conventional CDM test method, a countermeasure is taken at any part of the device. It is difficult to determine whether the current must be applied, and since it was impossible to know what current change occurred inside the device before and after the electrostatic breakdown countermeasures, the countermeasures against the destruction were effective. It was difficult to evaluate whether there was.
Further, in the conventional CDM test apparatus, in order to grasp the current path inside the LSI chip, the discharge current waveform is observed with an oscilloscope, for example, even if a magnetic field detection means for current detection is simply arranged on the LSI chip. I can't. The reason is as follows. When performing a CDM test, it is necessary to discharge after applying a voltage in order to give an initial charge. In general, when a small device such as an LSI is used as an object to be measured, it is applied until a steady state is obtained. In order to prevent the leakage of electric charges, the discharge is performed after several milliseconds without taking much time. For this reason, if a waveform observation device such as an oscilloscope is set in the trigger wait state, then charging and discharging are performed, and if the output of the picked-up magnetic field sensor is taken into the measuring instrument as a trigger, the waveform at the time of charging is taken in. Therefore, the waveform at the desired discharge cannot be observed.
The object of the present invention is to solve the above-mentioned problems of the prior art, and the purpose of the present invention is to first enable the grasp of the discharge current path inside the object to be measured using a CDM test apparatus. Secondly, it is possible to recognize only the discharge current without receiving the interference of the charge current, and this ensures reliable and easy discharge distribution on the LSI chip useful for analysis of the CDM destruction mechanism. It is intended to be able to measure.

In order to achieve the above object, according to the present invention, a first probe that is disposed in the vicinity of a measurement object and detects an electric field, a magnetic field, or both formed by the measurement object, the measurement object, and the measurement object A manipulator capable of minutely changing the relative position with the first probe, a second probe for charging / discharging a predetermined location of the object to be measured, and charging and discharging of the second probe. A charge / discharge control unit having a charge / discharge switch for switching, a waveform observer for observing a waveform of a signal detected by the first probe, and a discharge detection unit for detecting that discharge has been performed, There is provided a CDM discharge distribution observation apparatus characterized in that an output signal of a discharge detector is used as a trigger signal for giving measurement timing to the waveform observer.
Preferably, the discharge detection unit detects a current flowing through a discharge path connecting the charge / discharge switch and the ground point, or a low resistance inserted in series in the discharge path, or a discharge connecting the charge / discharge switch and the ground point. A magnetic field sensor for detecting the magnetic field generated by the path or a coupling transformer for detecting the magnetic field generated by the discharge path is provided.

  In order to achieve the above object, according to the present invention, a first probe that is arranged in the vicinity of a measured object and detects an electric field, a magnetic field, or both formed by the measured object, and the measured object A manipulator capable of minutely changing the relative position between the first probe and the first probe; a second probe for charging / discharging a predetermined location of the object to be measured; and charging the second probe A charge / discharge control unit having a charge / discharge switch for switching discharge; and a waveform observer for observing the waveform of the signal detected by the first probe; to the discharge of the charge / discharge switch in the charge / discharge control unit A CDM discharge distribution observation apparatus is provided in which the switching signal is a trigger signal that gives the waveform observer a measurement timing.

  In order to achieve the above object, according to the present invention, a first probe that is arranged in the vicinity of a measured object and detects an electric field, a magnetic field, or both formed by the measured object, and the measured object A manipulator capable of minutely changing the relative position between the first probe and the first probe; a second probe for charging / discharging a predetermined location of the object to be measured; and charging the second probe A charge / discharge control unit having a charge / discharge switch for switching discharge, and a waveform observer for observing a waveform of a signal detected by the first probe, wherein the waveform observer is set to wait for a trigger after charging is completed. The CDM discharge distribution observation apparatus is characterized in that waveform observation is performed by self-triggering in the waveform observer.

  In order to achieve the above object, according to the present invention, a first probe that is arranged in the vicinity of a measured object and detects an electric field, a magnetic field, or both formed by the measured object, and the measured object A manipulator capable of minutely changing the relative position between the first probe and the first probe; a second probe for charging / discharging a predetermined location of the object to be measured; and charging the second probe In a CDM discharge distribution observation apparatus comprising a charge / discharge control unit having a charge / discharge switch for switching discharge and a waveform observer for observing the waveform of a signal detected by the first probe, the charging circuit has a time constant. Provided is a CDM discharge distribution observation apparatus characterized in that charging is performed gradually by providing a circuit, and waveform observation is performed by self-triggering in the waveform observer.

  In order to achieve the above object, according to the present invention, a charge is provided to a predetermined location of the object to be measured by a charging circuit provided in the second probe, and this is discharged to the second probe. A method for observing a CDM discharge distribution in which a current flowing inside a device under test when it is rapidly discharged by a circuit is detected by a first probe and a signal waveform thereof is observed by a waveform observer, for charging the device under test A CDM discharge distribution observing method characterized in that a waveform observer is set in a trigger waiting state in advance, and a detection signal of a discharge current flowing through the discharge circuit is used as a trigger signal for taking in a waveform signal of the waveform observer. Provided.

  In order to achieve the above object, according to the present invention, a charge is provided to a predetermined location of the object to be measured by a charging circuit provided in the second probe, and this is discharged to the second probe. A method for observing a CDM discharge distribution in which a current flowing inside a device under test when it is rapidly discharged by a circuit is detected by a first probe and a signal waveform thereof is observed by a waveform observer, for charging the device under test The CDM discharge distribution is characterized in that the waveform monitor is set in a trigger waiting state in advance and a signal for switching the second probe to flow a discharge current is used as a trigger signal for capturing the waveform signal of the waveform monitor. An observation method is provided.

  In order to achieve the above object, according to the present invention, a charge is provided to a predetermined location of the object to be measured by a charging circuit provided in the second probe, and this is discharged to the second probe. A CDM discharge distribution observing method in which a current flowing inside a device under test when it is rapidly discharged by a circuit is detected by a first probe and its signal waveform is observed by a waveform observer, wherein the device under test is charged A CDM discharge distribution observation method is provided, wherein after completion, the waveform observer is set in a trigger waiting state, and the waveform observer takes a waveform signal by self-triggering.

  In the present invention, for example, the detection signal of the discharge current in the discharge path is used as a trigger signal, and the current signal inside the device under test (LSI) is taken into the waveform observation device. Can recognize the internal current. Therefore, according to the present invention, the location of current concentration at the time of CDM discharge inside the LSI can be known, the location of electrostatic breakdown can be estimated, and countermeasures against breakdown can be easily taken. In addition, for example, since it becomes possible to recognize the difference in current distribution before and after the countermeasure, it is possible to easily verify whether or not the countermeasure is effective.

Next, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1A is a schematic diagram showing a basic configuration of the first embodiment of the present invention, and FIG. 1B is a side view showing a test state of an LSI chip which is an object to be measured in a CDM test. FIG. As shown in FIG. 1B, the LSI chip 11 is mounted on a printed circuit board 10, and the printed circuit board 10 is placed on an XY table 9 that can move the printed circuit board 10 in a horizontal plane. On the LSI chip 11, a detection probe 1 having a minute loop-shaped detector 1a capable of detecting a magnetic field formed by a current flowing through the wiring of the LSI chip 11 is disposed. A contact 2 a of the charge / discharge probe 2 is in contact with the pad 11 a on the chip 11. The LSI chip 11 may be a packaged one opened.

The detection probe 1 is arranged so that it can be moved in the XYZ directions with high accuracy by a manipulator (not shown). The detection probe 1 is connected to an oscilloscope 3, and a signal detected by the detector 1a is taken into the oscilloscope 3 by a trigger signal described later. The oscilloscope 3 is connected to a personal computer 4 that controls the overall operation of the waveform observation apparatus, and data observed by the oscilloscope 3 is transferred to the personal computer 4. The personal computer 4 is provided with a data storage unit 4 a that can store currents of the respective parts of the LSI chip 11.
The charge / discharge probe 2 is connected to a ground point via the discharge switch SW1 of the charge / discharge control unit 6 and the resistor R1 of the discharge current detection unit 7, and is connected to the high-voltage power supply 8 via the charge switch SW2. The discharge switch SW1 and the charge switch SW2 of the charge / discharge control unit 6 are switches that are opened and closed by a switch operation unit 6a configured by a microcomputer or the like, and operate exclusively with each other. When the charge switch SW2 is closed, the high-voltage power supply 8 is connected to the pad 11a of the LSI chip 11, and the LSI chip is charged. When the discharge switch SW1 is closed, the charge charged in the LSI chip 11 is discharged through a resistor R1 having a low resistance (for example, 1Ω). The resistor R1 constitutes a discharge current detection unit 7, and current signals detected at both ends of the resistor R1 are transmitted to the oscilloscope 3 and used as a trigger signal. The personal computer 4 is connected to a manipulator (not shown), the charge / discharge control unit 6, the oscilloscope 3, and the like by a communication cable compatible with GPIB (general purpose interface bus). In addition, since the CDM discharge waveform is generally very fast, it is necessary to consider the electrical length of the measurement system cable. That is, it is necessary to roughly align the electrical length from the position of the detector 1 a at the tip of the detection probe 1 to the oscilloscope and the electrical length from the discharge current detection unit 7 to the oscilloscope 3. Otherwise, the oscilloscope may not be able to maintain the trigger and waveform observation at the same time.

  FIG. 2 is a flowchart showing a measurement procedure using the CDM discharge distribution observation apparatus shown in FIG. Prior to the measurement, the printed circuit board 10 on which the LSI chip 11 is mounted is placed on the XY table 9, and the contact 2a of the charge / discharge probe 2 is brought into contact with a pad 11a, for example, a ground terminal of the LSI chip 11. At this time, the discharge switch SW1 is closed and the charge switch SW2 is opened. In step S101, the unillustrated manipulator is operated to position the detection probe 1 on the measurement starting point of the LSI chip 11. Next, in step S102, the oscilloscope 3 is set in a trigger waiting state. In step S103, the charge switch SW2 is closed and the LSI chip 11 is charged. Subsequently, in step S104, the discharge switch SW1 is closed and discharging is performed. This discharge current is detected by the resistor R1, and this detection signal is transmitted to the oscilloscope. In step S105, the oscilloscope takes in the detection signal of the detection probe 1 using this signal as a trigger, calculates the integral value, and calculates the integrated waveform. Is displayed. The integrated data is taken up by the personal computer 4 in step S106, the peak on the waveform is detected in step S107, and this peak value is stored in the data storage unit 4a as the current value at that point in step S108. The Thereafter, in step S109, it is checked whether or not the measurement has been completed for all scheduled measurement points. If the measurement has not been completed, the process proceeds to step S110 and the manipulator is operated to move the detection probe 1 to the next. After moving the measurement point, the process returns to step S102. If it is determined in step S109 that the measurement has been completed for all scheduled measurement points, the observation of the CDM discharge distribution is terminated.

Thereafter, if necessary, the discharge probe 2 is moved onto another pad of the LSI chip 11 by a manipulator, and the same measurement as described above is performed.
The detection probe 1 is provided with two detectors whose loop surfaces are perpendicular to the chip main surface and intersect each other, and the outputs of the respective detectors are taken in independently so that not only the current value but also the current direction can be detected. Also good. Further, a detector having a horizontal loop surface may be provided so that the magnetic field can be recognized three-dimensionally. Alternatively, the detector may be rotated in place of the means for providing a plurality of detectors. In the above-described embodiment, the detector is configured by a loop sensor that can detect a magnetic field. However, an electric field may be detected using an EO (electro-optical) probe or a monopole antenna. You may enable it to detect both a magnetic field and an electric field.
In the above-described embodiment, the detection probe 1 is moved by the manipulator attached to the detection probe 1 at the measurement point on the LSI chip. However, the XY table side may be moved. Good. Alternatively, both may be moved. Further, a table that can move in a three-dimensional direction may be used as a table on which the printed circuit board is placed.

FIGS. 3A and 3B are circuit diagrams showing a modification of the first embodiment shown in FIG. In the modification shown in FIG. 3A, the discharge current detector 7 is provided with a loop coil type magnetic field sensor 7a for detecting the current in the discharge current path. When the switch SW1 is closed by the switch operation unit 6a, a discharge current flows, and a detection signal of the current by the magnetic field sensor 7a is transmitted to the oscilloscope 3 as a trigger signal.
In the modification shown in FIG. 3B, the discharge current detector 7 is provided with a loop coil type coupling transformer 7b for detecting the current in the discharge current path. The operation is the same as in the example shown in FIG. 3A. However, in the case of this modified example, if the inductance component inserted in the discharge path is too large, the impedance in the discharge path increases, and the discharge current itself is large. Since there is a risk of influence, it is necessary to select a coupling transformer in consideration of the impedance of the entire discharge path.

  FIG. 4 is a schematic diagram showing the basic configuration of the second exemplary embodiment of the present invention. 4, parts that are the same as the parts of the first embodiment shown in FIG. 1 are given the same reference numerals, and redundant descriptions are omitted. In the present embodiment, the charge / discharge control unit 6 includes a microcomputer 6b and a driver 6c that is controlled by the microcomputer 6b to open and close the switches SW1 and SW2. The control signal is also transmitted to the oscilloscope 3 and used as a trigger signal for the oscilloscope 3. In this embodiment, when the control signal output from the microcomputer 6b is “H”, the switch SW1 is closed (SW2 is opened), and when the control signal is “L”, the switch SW1 is opened (SW2 is closed). Completed). The rising edge of the control signal to “H” is used as a trigger signal for capturing the signal of the oscilloscope 3.

FIG. 5 is a schematic diagram showing the basic configuration of the third embodiment of the present invention. In FIG. 5, parts that are the same as the parts of the second embodiment shown in FIG. 4 are given the same reference numerals, and redundant descriptions are omitted. In the present embodiment, a command for placing the oscilloscope 3 in a trigger waiting state is directly transmitted to the oscilloscope 3 from the microcomputer 6b of the charge / discharge control unit 6. The actual trigger is performed when the detection signal of the detection probe 1 rises to an appropriate level (that is, self-trigger).
FIG. 6 is a flowchart showing a measurement procedure using the CDM discharge distribution observation apparatus shown in FIG. Prior to the measurement, the printed circuit board 10 on which the LSI chip 11 is mounted is placed on the XY table 9, and the contact 2a of the charge / discharge probe 2 is brought into contact with a pad 11a, for example, a ground terminal of the LSI chip 11. At this time, the control signal to the driver 6c of the microcomputer 6b is in the “H” state, the discharge switch SW1 is closed, and the charge switch SW2 is opened. In step S201, the unillustrated manipulator is operated to position the detection probe 1 on the measurement starting point of the LSI chip 11. Next, in step S202, the control signal of the microcomputer 6b is switched to “L”, the charge switch SW2 is closed, and the LSI chip 11 is charged. After a sufficient time has elapsed and the voltage at the LSI chip has stabilized, in step S203, a command to wait for a trigger is issued from the microcomputer 6b to the oscilloscope 3, and the oscilloscope enters a trigger wait state. Subsequently, in step S204, the discharge switch SW1 is closed and discharge is performed. Then, in step S205, the oscilloscope captures the detection signal of the detection probe 1 by self-trigger, calculates the integral value, and displays the integral waveform. The integrated data is taken up by the personal computer 4 in step S206, peak detection on the waveform is performed in step S207, and this peak value is stored in the data storage unit 4a as a current value at that point in step S208. The Thereafter, in step S209, it is checked whether or not the measurement has been completed for all scheduled measurement points. If not, the process proceeds to step S210, and the manipulator is operated to move the detection probe 1 to the next. After moving the measurement point, the process returns to step S202. If it is determined in step S209 that the measurement has been completed for all scheduled measurement points, the observation of the CDM discharge distribution is terminated.
Thereafter, if necessary, the manipulator moves the discharge probe 2 onto another pad of the LSI chip 11 and performs the same measurement as described above.

FIG. 7 is a schematic diagram showing the basic configuration of the fourth exemplary embodiment of the present invention. In FIG. 7, parts that are the same as the parts of the third embodiment shown in FIG. 5 are given the same reference numerals, and redundant descriptions are omitted. In the present embodiment, the charge / discharge control unit 6 is provided with a charge switch SW3 for charging an integration circuit composed of a resistor R2 and a capacitor C2 in addition to the charge switch SW2 for charging the LSI chip 11. ing. The charging switches SW2 and SW3 are closed synchronously. However, since the charging circuit is provided with a time constant circuit, the LSI chip is gradually charged over time.
In the first to third embodiments described above, an electric field probe or an electromagnetic field probe can be used as the detector of the detection probe 1 in addition to the magnetic field probe. In this embodiment, a loop type magnetic field probe is used. Use its inherent properties with. That is, the reception frequency characteristic of the loop probe uses the property that the sensitivity increases as the frequency becomes higher, and is a method of suppressing the power of frequency components with high reception sensitivity by slowly increasing the voltage during charging. The value of the time constant of the integration circuit must be set in the entire system. For example, when the size of the LSI chip is several millimeters square, the frequency component of the CDM discharge waveform is dominant in the order of MHz or more, and the practical frequency characteristics of the loop sensor have a similar region. Therefore, if the time constant is set to several hundred kHz or less, the power spectrum at the time of charging is outside the practical band of the loop sensor, and the trigger level can be easily set between the CDM discharge waveform level.
In this way, when charging is performed at such a slow rate that the power spectrum at the time of charging is out of the band of the detection probe, the waveform observation at the time of discharging can be performed even if the process of setting to the oscilloscope trigger waiting state is omitted. Is possible.

The figure which shows the schematic structure of the 1st Embodiment of this invention. The flowchart which shows the procedure of the waveform observation using the discharge observation apparatus of the 1st Embodiment of this invention. The circuit diagram which shows the example of a change of the 1st Embodiment of this invention. The figure which shows the schematic structure of the 2nd Embodiment of this invention. The figure which shows the schematic structure of the 3rd Embodiment of this invention. The flowchart which shows the procedure of the waveform observation using the discharge observation apparatus of the 3rd Embodiment of this invention. The figure which shows the schematic structure of the 4th Embodiment of this invention. The perspective view which shows the state of the conventional CDM test.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Detection probe 1a Detector 2 Charge / discharge probe 2a Contact 3 Oscilloscope 4 Personal computer 4a Data storage part 6 Charge / discharge control part 6a Switch operation part 6b Microcomputer 6c Driver 7 Discharge current detection part 7a Magnetic field sensor 7b Coupling transformer 8 High voltage power supply 9 XY table 10 Printed circuit board 11 LSI chip 11a Pad

Claims (17)

A first probe that is disposed in the vicinity of the object to be measured and detects an electric field and / or a magnetic field formed by the object to be measured, and a relative position between the object to be measured and the first probe is changed minutely. A manipulator capable of charging, a second probe for charging / discharging a predetermined location of the object to be measured, a charge / discharge control unit having a charge / discharge switch for switching between charge and discharge of the second probe, A waveform observer for observing the waveform of the signal detected by one probe, and a discharge detector for detecting that a discharge has occurred, and measuring the output signal of the discharge detector to the waveform observer A CDM discharge distribution observation apparatus characterized by using a trigger signal for giving timing. The discharge detector detects a current flowing through a discharge path connecting the charge / discharge switch and the ground point. A low resistance inserted in series in the discharge path, or a magnetic field generated by a discharge path connecting the charge / discharge switch and the ground point. 2. The CDM discharge distribution observation apparatus according to claim 1, further comprising: a magnetic field sensor that detects a magnetic field, or a coupling transformer that detects a magnetic field generated by the discharge path. A first probe that is disposed in the vicinity of the object to be measured and detects an electric field and / or a magnetic field formed by the object to be measured, and a relative position between the object to be measured and the first probe is changed minutely. A manipulator capable of charging, a second probe for charging / discharging a predetermined location of the object to be measured, a charge / discharge control unit having a charge / discharge switch for switching between charge and discharge of the second probe, And a waveform monitor that observes the waveform of the signal detected by one probe, and a trigger signal that gives a measurement timing to the waveform monitor for a switching signal to discharge the charge / discharge switch in the charge / discharge control unit A CDM discharge distribution observation apparatus. A first probe that is disposed in the vicinity of the object to be measured and detects an electric field and / or a magnetic field formed by the object to be measured, and a relative position between the object to be measured and the first probe is changed minutely. A manipulator capable of charging, a second probe for charging / discharging a predetermined location of the object to be measured, a charge / discharge control unit having a charge / discharge switch for switching between charge and discharge of the second probe, A waveform observer that observes the waveform of the signal detected by one probe, and after the completion of charging, the waveform observer is set to wait for a trigger, and the waveform observer performs waveform observation by self-triggering CDM discharge distribution observation apparatus characterized by this. 5. The CDM discharge distribution observation apparatus according to claim 4, wherein the charging circuit is provided with a time constant circuit, and charging is performed gradually. A first probe that is disposed in the vicinity of the object to be measured and detects a magnetic field formed by the object to be measured; a manipulator capable of minutely changing the relative position between the object to be measured and the first probe; Detected by a second probe for charging / discharging a predetermined location of the object to be measured, a charge / discharge control unit having a charge / discharge switch for switching charging and discharging of the second probe, and the first probe In the CDM discharge distribution observation apparatus having a waveform observer for observing the waveform of the received signal, the charging circuit is provided with a time constant circuit so that charging is performed gradually. A CDM discharge distribution observation apparatus characterized in that a waveform is observed by a trigger. The CDM discharge distribution observation according to any one of claims 1 to 6, wherein the first probe is provided with a rotation function about a rotation axis orthogonal to the main surface of the object to be measured. apparatus. The CDM discharge distribution according to any one of claims 1 to 6, wherein the first probe has a function of detecting a biaxial or triaxial electric field, a magnetic field, or both. Observation device. 9. The CDM discharge distribution observation apparatus according to claim 1, wherein the second probe has a function of moving in a biaxial direction parallel to the main surface of the object to be measured. . An information processing device is connected to the waveform observer, and the waveform signal captured by the waveform observer is transferred to the information processor and the peak value is stored in a data storage device. Item 10. The CDM discharge distribution observation apparatus according to any one of Items 1 to 9. When a charge is provided by a charging circuit provided in the second probe to a predetermined location of the object to be measured and this is rapidly discharged by a discharging circuit provided in the second probe, a current flowing inside the object to be measured is obtained. A CDM discharge distribution observing method in which a signal is detected by a first probe and a signal waveform thereof is observed by a waveform monitor, wherein the waveform monitor is set in a trigger waiting state prior to charging of the object to be measured. A CDM discharge distribution observation method, wherein a detection signal of a discharge current flowing through a circuit is used as a trigger signal for taking in a waveform signal of the waveform observer. When a charge is provided by a charging circuit provided in the second probe to a predetermined location of the object to be measured and this is rapidly discharged by a discharging circuit provided in the second probe, a current flowing inside the object to be measured is obtained. A CDM discharge distribution observing method for detecting a signal waveform by a first probe and observing a signal waveform thereof by a waveform observer, wherein the waveform observer is set in a trigger waiting state prior to charging of an object to be measured. A CDM discharge distribution observing method, wherein a signal for switching a discharge current to flow through the probe is used as a trigger signal for taking in a waveform signal of the waveform observer. When a charge is provided by a charging circuit provided in the second probe to a predetermined location of the object to be measured and this is rapidly discharged by a discharging circuit provided in the second probe, a current flowing inside the object to be measured is obtained. A CDM discharge distribution observation method for detecting a signal waveform by a first probe and observing the signal waveform with a waveform observer, wherein after the charging of the object to be measured is completed, the waveform observer is set in a trigger waiting state, A method for observing a CDM discharge distribution, wherein the waveform observer performs waveform signal capture by self triggering. The CDM discharge distribution observation method according to claim 13, wherein the charging circuit is provided with a time constant circuit so that charging is performed gradually. When a charge is provided by a charging circuit provided in the second probe to a predetermined location of the object to be measured and this is rapidly discharged by a discharging circuit provided in the second probe, a current flowing inside the object to be measured is obtained. A CDM discharge distribution observing method for detecting a signal waveform by a first probe and observing a signal waveform thereof with a waveform observer, wherein the charging circuit is provided with a time constant circuit so that charging is performed gradually. A method for observing a CDM discharge distribution, wherein the waveform observer performs waveform signal capture by self triggering. A plurality of positions on the object to be measured are obtained by repeating the operation of changing the detection position of the first probe on the object to be measured and charging and discharging the object to be measured to the predetermined place by the second probe. The CDM discharge distribution observation method according to claim 11, wherein the current waveform is observed. 17. A CDM discharge distribution observation method, comprising: performing the observation according to claim 16 and moving a charge / discharge location to the object to be measured by the second probe to perform similar waveform observation.

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