JP2005351691A - Semiconductor device measuring apparatus and measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an instrument and a method for a semiconductor device allowing quick measurement, even when measuring a large number of measuring samples. <P>SOLUTION: A measuring condition and a predicted measured value in each of the samples are input into an input interface part 1. The optimum measuring range is calculated thereafter in the each measuring sample by an optimum range calculation part 5, on the basis of the measuring condition and the predicted measured value. Then, electric characteristics of the each sample are measured by an electric characteristic measuring part 2, on the basis of the measuring condition and the optimum measuring range. A measuring object is thereby able to be measured in the optimum measuring range all the time, and switching for the measuring range is restrained to allow the quick measurement. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a measurement apparatus and measurement method for a semiconductor device, and more particularly to a technique for realizing high-speed measurement of voltage, current, capacitance, inductor, and the like.

  In recent years, in particular, with the higher integration and higher functionality of semiconductor integrated circuit devices, the evaluation items of semiconductor elements have diversified, and in response to this, for example, in current measurement, the measurement range has been extended from minute current evaluation to large current evaluation. A technique for measuring while automatically changing is proposed (for example, Non-Patent Document 1).

  With reference to FIGS. 4 and 5, an example of a conventionally proposed semiconductor device measuring apparatus and method for measuring the same, particularly an example of setting a measurement range, will be described.

  As shown in FIG. 4, in a conventional semiconductor device measurement apparatus, measurement conditions of a measurement sample are input into the measurement apparatus 10 via the input interface 1, and the electrical characteristic measurement unit 2 performs the input based on the input measurement conditions. We are measuring electrical characteristics. In this case, the measurement range is set automatically.

In the configuration as shown in FIG. 4, as a method for automatically setting the measurement range, as shown in FIG. 5, when measuring a certain measurement point, the optimum range is found by tracing the locus of the arrow from the minimum range. I do. As a result, correct measurement can be performed, and an arbitrary measurement value can be evaluated with one range setting even if the evaluation elements are diversified and various measurement ranges need to be used.
Agilent Technologies Semiconductor parametric test system 4062C General system information System library vol.1

  However, in recent years, with the miniaturization of semiconductor integrated circuit devices, variations in measurement data within a chip and within a wafer have become very significant, and as a result, it has become necessary to measure a large number of the same element or various elements. ing.

  In such a case, the automatic range setting method as described above sweeps the range from the lowest range to the optimum measurement point for each evaluation element every time, and enormous measurement time is required when many measurements are performed. End up.

  The present invention has been made in view of the above problems, and an object of the present invention is to enable measurement in a short time even when various elements are measured using an optimum measurement range. To do.

  The measurement apparatus of the semiconductor device of the present invention calculates an optimum measurement range for each measurement sample based on the input interface unit for inputting measurement conditions and measurement prediction values of the measurement sample and the measurement conditions and measurement prediction values. And an electrical property measurement unit for measuring electrical properties of each measurement sample based on the measurement conditions and the measurement range.

  The above configuration further includes a measurement condition storage unit that stores the input measurement condition, and a measurement prediction value storage unit that stores the input measurement prediction value.

  The above configuration further includes an optimum range storage unit that stores the measurement range calculated by the optimum range calculation unit.

  Another measurement apparatus for a semiconductor device according to the present invention includes an input interface unit for inputting measurement conditions of a measurement sample, a sub-electric characteristic measurement unit for measuring electric characteristics of the sample sample using the measurement conditions, and a measurement value of the sample sample Equipped with an optimal range calculation unit that calculates the optimal measurement range of each measurement sample corresponding to the sample sample, and a main electrical property measurement unit that measures the electrical characteristics of each measurement sample based on the measurement conditions and measurement range Is.

  The above configuration further includes a measurement condition storage unit that stores the input measurement conditions and a sample measurement value storage unit that stores measurement values of the sample specimen.

  The said structure WHEREIN: The optimal range memory | storage part which memorize | stores the optimal measurement range of each measurement sample calculated by the optimal range calculation part is further provided.

  The method for measuring a semiconductor device according to the present invention includes a step of inputting measurement conditions and measurement predicted values of a measurement sample, and a step of calculating an optimum measurement range for each measurement sample based on the measurement conditions and measurement predicted values. And a step of measuring the electrical characteristics of each measurement sample based on the measurement conditions and the optimum measurement range.

  Another measurement method of a semiconductor device according to the present invention corresponds to a sample sample from a step of inputting measurement conditions of a measurement sample, a step of measuring electrical characteristics of the sample sample using the measurement conditions, and a measurement value of the sample sample The method includes a step of calculating an optimum measurement range of each measurement sample and a step of measuring electrical characteristics of each measurement sample based on the measurement conditions and the measurement range.

  According to the measurement apparatus and the measurement method of the semiconductor device according to the present invention, the measurement range can be fixed to the optimum measurement range from the beginning for each measurement sample, and it is not necessary to use the automatic measurement range. Even if a large number of measurements are performed, the measurement range does not change, so high-speed measurement can be realized.

(First embodiment)
Hereinafter, a semiconductor device measuring apparatus and a measuring method thereof according to a first embodiment of the present invention will be described with reference to the drawings.

  First, as shown in FIG. 1, the semiconductor device measurement apparatus according to the present embodiment includes an input interface unit 1, an electrical characteristic measurement unit 2, a measurement condition storage unit 3, a measurement predicted value storage unit 4, and an optimum range calculation unit 5. And an optimum range storage unit 6. Here, the difference from the conventional measurement apparatus is that the measurement predicted value storage unit 4, the optimum range calculation unit 5, and the optimum range storage unit 6 determine the optimum range in the measurement range before measurement.

  In the semiconductor device measurement method according to the present embodiment, first, the measurement conditions of the measurement sample and the predicted measurement value of the sample are input to the measurement device via the input interface unit 1. Here, for example, the sample measurement prediction value is obtained by creating a database of sample measurement data from the past, connecting the input interface unit 1 and the database, and measuring the sample corresponding to the measurement condition when determining the measurement item and measurement condition. A mechanism such as automatically extracting predicted values from the database and automatically sending them to the measuring apparatus via the input interface unit 1 is used.

  Next, the input measurement conditions are stored in the measurement condition storage unit 3, and the measurement prediction values are stored in the measurement prediction value storage unit 4. Next, based on the measurement conditions and the predicted measurement values stored in the measurement condition storage unit 3 and the predicted measurement value storage unit 4, the optimal range calculation unit 5 calculates the optimal measurement range for each sample, and the result is Store in the optimum range storage unit 6.

  Next, the electrical property measurement of each sample is performed by the electrical property measurement unit 2 based on the measurement conditions and the optimum measurement range of each sample stored in the measurement condition storage unit 3 and the optimum range storage unit 6.

  Next, as shown in FIG. 2, at the time of a specific sample measurement, the electrical characteristics of the sample are evaluated in an optimal measurement range calculated in advance from the measurement conditions and the predicted measurement values.

  For example, when the applied voltage is 1V and the predicted measurement value of the measurement target is 28 KΩ as the measurement conditions, the measurement range is 1 ÷ 28000 = 35.7 μA, and the optimum measurement range is the next digit of 35.7 μA. It becomes a certain 100 μA.

 When the optimum measurement range is set by such a method, the search of the measurement point is performed only within the set range, and the range is not switched.

  According to the first embodiment, since the optimal measurement range for each sample is determined before measurement using the measurement conditions and the predicted measurement value, switching of the measurement range does not occur during measurement. Therefore, even when a large number of elements are measured, high-speed measurement is possible.

(Second Embodiment)
Hereinafter, a semiconductor device measuring apparatus and a measuring method thereof according to a second embodiment of the present invention will be described with reference to the drawings.

  First, as shown in FIG. 3, the semiconductor device measurement apparatus according to the present embodiment includes an input interface unit 1, a measurement condition storage unit 3, an optimal range calculation unit 5, an optimal range storage unit 6, and a main electrical characteristic measurement unit 8. And a sub electrical property measuring unit 9. Here, the difference from the conventional measuring apparatus is that the sub-electric characteristic measuring unit 9, the optimum range calculating unit 5 and the optimum range storage unit 6 determine the optimum range in the measurement range based on the sample measurement before the measurement. It is to be.

  In the semiconductor device measurement method according to the present embodiment, first, the measurement conditions of the measurement sample are input to the measurement apparatus via the input interface unit 1. Next, the input measurement conditions are stored in the measurement condition storage unit 3. Next, based on the measurement conditions stored in the measurement condition storage unit 3, the secondary electrical property measurement unit 9 measures the electrical properties of each sample using an automatic setting range technique. Next, the measurement result is stored in the sample measurement value storage unit 7, and is optimized for each sample by the optimum range calculation unit 5 from the measurement conditions and sample measurement values stored in the measurement condition storage unit 3 and the sample measurement value storage unit 7. An appropriate measurement range is calculated, and the result is stored in the optimum range storage unit 6.

 Next, based on the measurement conditions and the optimum measurement range of each sample stored in the measurement condition storage unit 3 and the optimum range storage unit 6, the main electrical property measurement unit 8 measures the electrical characteristics of each sample.

  At the time of concrete sample measurement, the first sample measurement is performed using the automatic setting range method, and the range actually measured at that time is stored as the optimum measurement range. Then, at the time of measuring each sample for the second time and thereafter, the electrical characteristics of each sample are evaluated in the optimum measurement range determined by the sample measurement. Therefore, the search of the measurement points for the second and subsequent measurements is performed only within the set range, and no range switching occurs.

  According to the second embodiment, since the optimum measurement range for each sample is determined by the first sample measurement before the second and subsequent measurements, the measurement range is changed during the measurement except for the first measurement. Switching does not occur. Therefore, even when a large number of elements are measured, high-speed measurement is possible.

  In the first embodiment and the second embodiment, each storage unit may not be provided, and electric characteristics may be measured after inputting and calculating conditions.

  A semiconductor device measuring apparatus and a measuring method thereof according to the present invention enable measurement in a short time even when a large number of semiconductor devices are measured, such as a semiconductor device measuring apparatus and a measuring method thereof. And is particularly useful for high-speed measurement of voltage, current, capacitance, inductor, and the like.

It is a conceptual diagram of the measuring apparatus and measuring method which concern on 1st Embodiment. It is operation | movement explanatory drawing of the measurement range of the measuring apparatus which concerns on 1st Embodiment. It is a conceptual diagram of the measuring apparatus and measuring method which concern on 2nd Embodiment. It is a conceptual diagram of the conventional measuring apparatus and measuring method. It is operation | movement explanatory drawing of the measurement range of the conventional measuring apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Input interface part 2 Electrical property measurement part 3 Measurement condition memory | storage part 4 Measurement prediction value memory | storage part 5 Optimal range calculation part 6 Optimum range memory | storage part 7 Measured value memory | storage part 8 Main electrical characteristic measurement part 9 Sub electrical characteristic measurement part

Claims (8)

  An input interface unit for inputting measurement conditions and measurement prediction values of a measurement sample, an optimal range calculation unit for calculating an optimal measurement range for each measurement sample based on the measurement conditions and the measurement prediction values, A semiconductor device measurement apparatus including an electrical property measurement unit that measures electrical properties of each measurement sample based on measurement conditions and the measurement range.   The measurement apparatus for a semiconductor device according to claim 1, further comprising: a measurement condition storage unit that stores an input measurement condition; and a measurement prediction value storage unit that stores an input measurement prediction value.   3. The semiconductor device measurement apparatus according to claim 1, further comprising an optimum range storage unit that stores the measurement range calculated by the optimum range calculation unit.   An input interface unit for inputting measurement conditions of the measurement sample, a secondary electrical characteristic measurement unit for measuring the electrical characteristics of the sample sample using the measurement conditions, and each measurement sample corresponding to the sample sample from the measurement values of the sample sample An apparatus for measuring a semiconductor device, comprising: an optimum range calculation unit for calculating an optimum measurement range of the first measurement unit; and a main electrical property measurement unit for measuring electrical characteristics of each measurement sample based on the measurement conditions and the measurement range.   The semiconductor device measurement device according to claim 4, further comprising a measurement condition storage unit that stores the input measurement conditions, and a sample measurement value storage unit that stores measurement values of the sample specimen.   The semiconductor device measurement device according to claim 1, further comprising an optimum range storage unit that stores an optimum measurement range of each measurement sample calculated by the optimum range calculation unit.   A step of inputting a measurement condition and a predicted measurement value of the measurement sample, a step of calculating an optimum measurement range for each measurement sample based on the measurement condition and the predicted measurement value, and the measurement condition and the optimal A method of measuring a semiconductor device including a step of measuring electrical characteristics of each measurement sample based on a measurement range.   The step of inputting the measurement conditions of the measurement sample, the step of measuring the electrical properties of the sample specimen using the measurement conditions, and the optimum measurement range of each measurement specimen corresponding to the sample specimen from the measurement values of the sample specimen A method for measuring a semiconductor device, comprising: a step of calculating; and a step of measuring electrical characteristics of each measurement sample based on the measurement conditions and the measurement range.

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