[go: up one dir, main page]

JP2005349418A - Trepanning apparatus for printed circuit board - Google Patents

Trepanning apparatus for printed circuit board Download PDF

Info

Publication number
JP2005349418A
JP2005349418A JP2004170439A JP2004170439A JP2005349418A JP 2005349418 A JP2005349418 A JP 2005349418A JP 2004170439 A JP2004170439 A JP 2004170439A JP 2004170439 A JP2004170439 A JP 2004170439A JP 2005349418 A JP2005349418 A JP 2005349418A
Authority
JP
Japan
Prior art keywords
hole
laser beam
printed wiring
wiring board
machining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004170439A
Other languages
Japanese (ja)
Inventor
Kenichi Murano
賢一 村野
Satoru Tamura
悟 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2004170439A priority Critical patent/JP2005349418A/en
Publication of JP2005349418A publication Critical patent/JP2005349418A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Laser Beam Processing (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To drill a through hole by rotary locus processing only along the outer circumference of the hole and also to protect a machining lens against scattering matters in the machining. <P>SOLUTION: A trepanning apparatus for a printed circuit board drills a hole larger than a laser beam diameter by rotating a laser beam 20 along the outer circumference of the hole 16, wherein the apparatus is equipped with a housing 30 having an exhaust port 34 which is arranged, in a manner covering a machining area, between the printed circuit board 10 and the machining lens 22 for emitting a laser beam 20 to the board 10, and is also equipped with an exhaust mechanism 40 which sucks in the matters scattered in the machining and the wrecks 18 inside the hole to discharge them from the exhaust port 34 to the outside of the housing 30. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、穴の外周に沿ってレーザビームを旋回させることにより、レーザビーム径より大きな穴を開けるプリント配線基板のトレパニング加工装置に係る。特に、プリント配線基板に貫通穴(スルーホール)を形成する際に用いるのに好適な、貫通穴外周のみの旋回軌跡加工で、穴形成ができるプリント配線基板のトレパニング加工装置に関する。   The present invention relates to a printed circuit board trepanning apparatus for making a hole larger than a laser beam diameter by turning a laser beam along the outer periphery of the hole. In particular, the present invention relates to a trepanning apparatus for a printed wiring board capable of forming a hole by turning trajectory processing of only the outer periphery of the through hole, which is suitable for use in forming a through hole (through hole) in a printed wiring board.

図1に示す如く絶縁樹脂12の表裏両面に、導電体である銅箔14が被覆された、厚み0.1〜0.4mm程度のプリント配線基板(PCB)10に、直径200〜300μm程度の貫通穴を開ける際、従来は、数値制御により機械的なドリル(メカドリルと称する)を制御する機械式工法が一般的に用いられている。図において、13は、絶縁樹脂12内のガラス繊維である。   As shown in FIG. 1, a printed wiring board (PCB) 10 having a thickness of about 0.1 to 0.4 mm and having a diameter of about 200 to 300 μm is coated on both sides of the insulating resin 12 with a copper foil 14 as a conductor. Conventionally, a mechanical construction method for controlling a mechanical drill (referred to as a mechanical drill) by numerical control is generally used when a through hole is formed. In the figure, 13 is a glass fiber in the insulating resin 12.

一方、近年プリント配線基板の高密度化及び小型化に伴い、直径100μm以下の小径の貫通穴の要求が高まっている。しかしながら、このような小径の貫通穴をメカドリルで開けると、ドリルビットが2000穴程度で破損し、短寿命でランニングコストが高くなるという問題点を有する。   On the other hand, with the recent increase in the density and miniaturization of printed wiring boards, there is an increasing demand for through holes having a small diameter of 100 μm or less. However, when such a small-diameter through hole is opened with a mechanical drill, the drill bit is broken at about 2000 holes, and there is a problem that the running cost becomes short with a short life.

一方、特許文献1や2には、レーザビームを用いて貫通穴を開ける方法が記載されており、特に、レーザビーム径より大きな穴を開ける場合には、図2に示す如く、貫通穴16の外周に沿ってレーザビーム20を旋回させる、いわゆるトレパニング工法を用いることが記載されている。図において、22は、例えばfθレンズでなる加工レンズ、24は加工ヘッド、26は、PCB10を固定するチャックプレートである。   On the other hand, Patent Documents 1 and 2 describe a method of making a through hole using a laser beam. In particular, when making a hole larger than the laser beam diameter, as shown in FIG. It is described that a so-called trepanning method of turning the laser beam 20 along the outer periphery is described. In the figure, 22 is a processing lens made of, for example, an fθ lens, 24 is a processing head, and 26 is a chuck plate for fixing the PCB 10.

特開2000−263263号公報JP 2000-263263 A 特開2004−87879号公報Japanese Patent Laid-Open No. 2004-87879

しかしながら、貫通穴16の外周に沿ってレーザビーム20を旋回させた場合、その中心部に加工残り18が生じるため、中心部にもレーザビーム20を照射して加工残り18も飛ばす必要があった。更に、加工時の飛散物により、加工レンズ22が破損することもあった。   However, when the laser beam 20 is swung along the outer periphery of the through hole 16, a machining residue 18 is generated at the center thereof, and therefore it is necessary to irradiate the laser beam 20 also on the center portion to fly the machining residue 18. . Further, the processed lens 22 may be damaged due to scattered objects during processing.

本発明は、前記従来の問題点を解消するべくなされたもので、貫通穴外周のみの旋回軌跡加工で、貫通穴を開けることができるようにすることを課題とする。   The present invention has been made to solve the above-described conventional problems, and an object of the present invention is to enable a through hole to be opened by turning trajectory machining only on the outer periphery of the through hole.

本発明は、穴の外周に沿ってレーザビームを旋回させることにより、レーザビーム径より大きな穴を開けるプリント配線基板のトレパニング加工装置において、レーザビームをプリント配線基板に照射するための加工レンズとプリント配線基板の間に、加工領域をカバーするように配設された、排気口を有する筐体と加工時の飛散物や穴内部の残骸を吸い取って、前記排気口から筐体外へ排出させる排気手段とを備えることにより、前記課題を解決したものである。   The present invention relates to a processing lens and a print for irradiating a printed wiring board with a laser beam in a trepanning processing apparatus for a printed wiring board that makes a hole larger than the laser beam diameter by turning the laser beam along the outer periphery of the hole. An exhaust unit disposed between the wiring boards so as to cover the processing region, and an exhaust unit that sucks out the scattered matter and the debris inside the hole from the exhaust port and exhausts the case out of the case. By solving, the above-mentioned problem is solved.

本発明によれば、貫通穴外周のみの旋回軌跡加工で、貫通穴を形成することができ、生産性が向上する。又、加工時の飛散物や穴内部の残骸を除去でき、プリント配線基板穴あけの歩留りを向上すると共に、加工レンズが飛散物で破損する事故を防止できる。これにより、従来の機械式に比べ、低ランニングコストで小径の貫通穴加工が可能となる。   According to the present invention, a through hole can be formed by turning trajectory machining only on the outer periphery of the through hole, and productivity is improved. Further, scattered objects during processing and debris inside the holes can be removed, and the yield of drilling the printed wiring board can be improved, and an accident that the processed lens is damaged by the scattered objects can be prevented. As a result, a small-diameter through hole can be machined at a low running cost compared to the conventional mechanical type.

以下図面を参照して、本発明の実施形態を詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

貫通穴を形成するためには、銅箔層(導電層)の穴あけが必要となる。銅箔14をレーザビームにより直接加工するためには、吸収率の高い波長(例えば355nm)を持つ高調波固体レーザ(例えばUVレーザ)が適する。第3高調波固体レーザが望ましいが、第4高調波でも構わない。貫通穴の品質を守るためには、表面銅箔の盛り上がりや飛散物を少なくし、開口率を高くする必要がある。実験の結果、加工面エネルギ密度で30J/cm2以上が望ましいことが分かった。エネルギが低いと、図3に例示する如く、絶縁樹脂12内のガラス繊維13の先端が貫通穴16内に突出してしまう。 In order to form the through hole, it is necessary to make a copper foil layer (conductive layer). In order to directly process the copper foil 14 with a laser beam, a harmonic solid-state laser (for example, a UV laser) having a wavelength with a high absorption rate (for example, 355 nm) is suitable. A third harmonic solid-state laser is desirable, but a fourth harmonic may be used. In order to protect the quality of the through hole, it is necessary to reduce the bulge and scattering of the surface copper foil and increase the aperture ratio. As a result of experiments, it was found that the processed surface energy density is preferably 30 J / cm 2 or more. When the energy is low, the tip of the glass fiber 13 in the insulating resin 12 protrudes into the through hole 16 as illustrated in FIG.

上記エネルギ密度を実現するため、レーザビームのスポット径を直径30μmに絞り、例えば外径100μmの貫通穴を形成する場合は、外周が100μmとなるよう、旋回軌跡でトレパニング加工する。その際に生じる図2に示したような加工残り18を除去するため、本発明では、図4に示す実施形態の如く、加工領域をカバーする筐体30を、加工レンズ22とプリント配線基板10の間に設ける。   In order to achieve the above energy density, the spot diameter of the laser beam is reduced to a diameter of 30 μm. For example, when a through hole having an outer diameter of 100 μm is formed, trepanning is performed with a turning trajectory so that the outer periphery becomes 100 μm. In order to remove the processing residue 18 as shown in FIG. 2 that occurs at this time, in the present invention, as in the embodiment shown in FIG. 4, the housing 30 that covers the processing region is replaced with the processing lens 22 and the printed wiring board 10. Provide between.

この筐体30は、レーザビーム20が通過する部分は、透過率の高い材料(例えばUV領域での透過率が99%のアクリル材)を用い、レーザビーム20の減衰を避ける。又、筐体30には排気口34を設け、外部に設けた排気機構40により排気することで、貫通穴形成時の飛散物や加工残り18を吸い取り、排気口34を通って、外部へ排出させる。   The casing 30 uses a material having a high transmittance (for example, an acrylic material having a transmittance of 99% in the UV region) where the laser beam 20 passes, and avoids attenuation of the laser beam 20. Further, the housing 30 is provided with an exhaust port 34 and exhausted by an exhaust mechanism 40 provided outside, so that scattered matter and processing residue 18 at the time of forming the through hole are sucked and discharged to the outside through the exhaust port 34. Let

ここで、紫外線(UV)領域の波長を有するレーザビームとしては、Nd:YAGレーザの第3高調波の他、Nd:YAGレーザの第4若しくは第5高調波を用いることができる。又、Nd:YAGレーザの代わりにYLFレーザやYVO4レーザを用いても良い。又、KrFエキシマレーザやXeClエキシマレーザの基本波を用いても良い。   Here, as a laser beam having a wavelength in the ultraviolet (UV) region, the fourth or fifth harmonic of the Nd: YAG laser can be used in addition to the third harmonic of the Nd: YAG laser. A YLF laser or a YVO4 laser may be used instead of the Nd: YAG laser. Further, a fundamental wave of a KrF excimer laser or a XeCl excimer laser may be used.

なお、前記実施形態においては、銅箔が加工されていたが、加工対象はこれに限定されず、アルミニウム箔や金箔等、他の金属箔も同様に加工できる。   In the embodiment, the copper foil is processed. However, the processing target is not limited to this, and other metal foils such as an aluminum foil and a gold foil can be processed in the same manner.

加工対象であるプリント配線基板の構成を示す断面図Sectional drawing which shows the structure of the printed wiring board which is a processing object 本発明が解決すべき課題を示す、(A)加工ヘッド周辺の断面図及び(B)プリント配線基板の平面図(A) Cross-sectional view around processing head and (B) Plan view of printed wiring board showing problems to be solved by the present invention 同じくプリント配線基板の断面図Cross-sectional view of the same printed wiring board 本発明の実施形態の構成を示す断面図Sectional drawing which shows the structure of embodiment of this invention

符号の説明Explanation of symbols

10…プリント配線基板(PCB)
12…絶縁樹脂
14…銅箔
16…貫通穴
18…加工残り
20…レーザビーム
22…加工レンズ
24…加工ヘッド
26…チャックプレート
30…筐体
32…レーザビーム通過部
34…排気口
40…排気機構
10 ... Printed wiring board (PCB)
DESCRIPTION OF SYMBOLS 12 ... Insulating resin 14 ... Copper foil 16 ... Through-hole 18 ... Processing remaining 20 ... Laser beam 22 ... Processing lens 24 ... Processing head 26 ... Chuck plate 30 ... Housing 32 ... Laser beam passage part 34 ... Exhaust port 40 ... Exhaust mechanism

Claims (1)

穴の外周に沿ってレーザビームを旋回させることにより、レーザビーム径より大きな穴を開けるプリント配線基板のトレパニング加工装置において、
レーザビームをプリント配線基板に照射するための加工レンズとプリント配線基板の間に、加工領域をカバーするように配設された、排気口を有する筐体と、
加工時の飛散物や穴内部の残骸を吸い取って、前記排気口から筐体外へ排出させる排気手段と、
を備えたことを特徴とするプリント配線基板のトレパニング加工装置。
In the trepanning processing device for a printed wiring board that opens a hole larger than the laser beam diameter by turning the laser beam along the outer periphery of the hole,
A housing having an exhaust port disposed between the processing lens for irradiating the printed wiring board with the laser beam and the printed wiring board so as to cover the processing area;
An exhaust means for sucking out scattered matter and debris inside the hole during processing, and discharging it from the exhaust port to the outside of the housing;
A printed wiring board trepanning apparatus characterized by comprising:
JP2004170439A 2004-06-08 2004-06-08 Trepanning apparatus for printed circuit board Pending JP2005349418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004170439A JP2005349418A (en) 2004-06-08 2004-06-08 Trepanning apparatus for printed circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004170439A JP2005349418A (en) 2004-06-08 2004-06-08 Trepanning apparatus for printed circuit board

Publications (1)

Publication Number Publication Date
JP2005349418A true JP2005349418A (en) 2005-12-22

Family

ID=35584304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004170439A Pending JP2005349418A (en) 2004-06-08 2004-06-08 Trepanning apparatus for printed circuit board

Country Status (1)

Country Link
JP (1) JP2005349418A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055478A (en) * 2006-08-31 2008-03-13 Honda Motor Co Ltd Finishing method
WO2008052518A1 (en) * 2006-11-03 2008-05-08 Lpkf Laser & Electronics Ag Device and method for machining a workpiece by means of a laser beam, comprising suction and a lateral air supply
JP2009252892A (en) * 2008-04-03 2009-10-29 Mitsubishi Electric Corp Laser machining method, method for manufacturing printed board, and laser machining apparatus
CN107695516A (en) * 2017-10-25 2018-02-16 扬州杰泰克电子有限公司 A kind of dustless high efficiency optical-fiber laser welder

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055478A (en) * 2006-08-31 2008-03-13 Honda Motor Co Ltd Finishing method
WO2008052518A1 (en) * 2006-11-03 2008-05-08 Lpkf Laser & Electronics Ag Device and method for machining a workpiece by means of a laser beam, comprising suction and a lateral air supply
JP2009252892A (en) * 2008-04-03 2009-10-29 Mitsubishi Electric Corp Laser machining method, method for manufacturing printed board, and laser machining apparatus
CN107695516A (en) * 2017-10-25 2018-02-16 扬州杰泰克电子有限公司 A kind of dustless high efficiency optical-fiber laser welder

Similar Documents

Publication Publication Date Title
KR100752829B1 (en) Method and apparatus for drilling a stack with a laser
CN109922603B (en) PCB drilling method
EP0706309B1 (en) Printed circuit manufacture
KR101289755B1 (en) Method for laser drilling a multilayer workpiece
JP5442130B2 (en) Laser processing method
JP2002064274A (en) Via hole structure, method of forming the same, and multilayer wiring board using the same
JP2005349418A (en) Trepanning apparatus for printed circuit board
KR100752831B1 (en) Method and apparatus for laser drilling of organic materials
JP2006026665A (en) Laser boring method
JP2000202664A (en) Lasder drilling method
CN114340167A (en) Method for manufacturing blind hole of printed circuit board
CN1514757A (en) Laser drilling along the circumference
JP3062142B2 (en) Method for manufacturing multilayer printed wiring board
JP3479890B2 (en) Laser drilling machine
JP3583279B2 (en) Drilling method
KR100434072B1 (en) Through hole forming method of pcb using laser
JP2805242B2 (en) Drilling method for printed circuit boards
JP7649534B2 (en) Printed circuit board manufacturing method
JPS60134493A (en) Method of machining circuit board
JP2005349446A (en) Laser beam boring method
JP3245820B2 (en) Laser drilling method
JP2003053580A (en) Laser processing method, printed wiring board manufacturing method, and printed wiring board manufacturing apparatus
Lei et al. UV laser solutions for electronic interconnect and packaging
KR20250060459A (en) Flexible circuit board, flexible circuit board structure, electronic device including the flexible circuit board, and method of manufacturing flexible circuit board
JPH1158343A (en) Laser processing ceramic composite material