JP2005234051A - Optical unit and optical device using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical unit which can be surely grasped and an optical device using the optical unit. <P>SOLUTION: The optical unit 5, whose one end face is a lower surface 5a and whose other end face is an upper surface 5b, is equipped with grasping parts 39 and 39 realizing grasping by a grasping device 61 on the side parts on the upper surface 5b side. The grasping parts 39 are provided as a pair symmetrically at positions where they are opposed to each other at the side parts, and have two grasping surfaces 33 and 37 extended over the entire width of the side surfaces. One grasping surface 33 is constituted so that its normal going toward the outside turns downside and the other grasping surface 37 is constituted so that its normal going toward the outside turns upside, whereby the chuck surfaces 73 and 77 of the grasping device 61 are pressed on the grasping surfaces 33 and 37 respectively and the optical unit 5 is grasped. Therefore, stable grasping by four surfaces is realized. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical unit and an optical apparatus using the same.

An optical axis adjusting device for adjusting the optical axis of an optical unit having a substantially rectangular parallelepiped shape and positioning the optical unit on a base is known (for example, see Patent Document 1). In this type of device, both sides of the optical unit are gripped by chuck claws (gripping devices), moved to a predetermined position on the base, positioned, and fixed on the base with a tightening screw.
JP-A-6-67074

  However, in this type of optical axis adjusting device, the chuck claw that grips the side surface of the optical unit does not have a strong gripping force. In some cases, the optical unit is displaced due to slipping of the chuck claw, etc. There is a possibility that the positional accuracy and the orientation accuracy cannot be sufficiently obtained.

  Accordingly, an object of the present invention is to provide an optical unit that can be reliably gripped and an optical device using the same.

  In order to solve the above problems, the optical unit of the present invention has one end surface as a lower surface, the other end surface as an upper surface, and a grip portion that enables gripping by a gripping device on a side portion on the upper surface side. , Provided as a pair in a symmetrical shape at opposite positions on the side, and having two gripping surfaces extending over the entire width of the side surface, and one gripping surface has a normal line toward the outside on the lower side The other gripping surface is characterized in that the normal toward the outside faces upward.

  According to this optical unit, the chucking surface of the gripping device is pressed against each of the two gripping surfaces provided as a pair to grip the optical unit, so that stable gripping with four surfaces is achieved.

  Here, as a configuration of the optical unit that effectively exhibits the above-described operation, specifically, a concave groove extending over the entire width of the side surface is provided, and one gripping surface is an inner upper surface of the concave groove. The other gripping surface is configured by an inner lower surface of the recessed groove or an edge of the upper surface which is the other end surface.

  In addition, as another configuration of the optical unit that effectively exhibits the above-described operation, specifically, the optical unit includes a convex portion extending over the entire width of the side surface, and one gripping surface is a lower surface of the convex portion. The other gripping surface is configured by the upper surface of the ridge or the edge of the upper surface which is the other end surface.

  Moreover, as a configuration of the optical unit that effectively exhibits the above-described operation, specifically, a configuration including an optical element and an optical frame that has a gripping portion and holds the optical element can be given.

  The optical device of the present invention includes a mount base and any one of the optical units described above, and a lower surface which is one end surface of the optical unit is bonded to the mount base via an adhesive. It is said.

  According to this optical device, the optical unit is stably held by the holding device until the adhesive is cured in the process of adhering the optical unit on the mount base with the adhesive. This suppresses the position and orientation of the optical unit from shifting, and improves the positional accuracy and orientation accuracy of the optical unit.

  ADVANTAGE OF THE INVENTION According to this invention, the optical unit which can be hold | gripped reliably, and an optical apparatus using the same can be provided.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of an optical apparatus including an optical unit according to the invention will be described with reference to the accompanying drawings. In each figure, the same symbols are attached to the same elements, and duplicate descriptions are omitted.

  FIG. 1 is a perspective view showing an optical device 1 according to a first embodiment of the present invention. This optical device 1 constitutes a so-called Mach-Zehnder interferometer including a mount base 3 and an optical unit 5. ing.

  The mount base 3 is made of a metal such as aluminum and is formed in a plate shape to form a substrate.

  The optical unit 5 is mounted on the mount base 3. This optical unit 5 includes a light emitting unit 5P equipped with a light emitting element, a lens unit 5Q equipped with a collimating lens, beam splitter units 5S1, 5S2 equipped with a beam splitter, mirror units 5M1, 5M2 equipped with mirrors, and a light receiving element. The light receiving unit 5 </ b> R, and a unit in which these light emitting element, collimator lens, beam splitter, mirror, and light receiving element are mounted as optical elements, are collectively referred to as an optical unit 5. The lower surface of the optical unit 5 is bonded to the mount base 3 via an adhesive made of an ultraviolet curable resin (photo curable resin) that is cured by receiving light having a predetermined wavelength.

  The light emitting unit 5P, the lens unit 5Q, the beam splitter unit 5S1, and the mirror unit 5M1 are coaxially installed in a line, and the mirror unit 5M2, the beam splitter unit 5S2, and the light receiving unit 5R are coaxially installed in a line. These unit rows are arranged in parallel, and the mirror surfaces of the beam splitter unit 5S2 and the mirror unit 5M2 and the mirror surfaces of the mirror unit 5M1 and the beam splitter unit 5S2 face each other, and the light emitted from the light emitting unit 5P The beam is collimated by the lens unit 5Q, and is divided by the beam splitter unit 5S1 into the light toward the mirror unit 5M1 and the light toward the mirror unit 5M2, and the straight light from the beam splitter unit 5S1 is perpendicular to the mirror unit 5M1. On the other hand, the separated light from the beam splitter unit 5S1 is reflected at a right angle by the mirror unit 5M2, and the light from the mirror unit 5M1 and the mirror unit 5M2 reaches the beam splitter unit 5S2, and the light receiving unit passes through the beam splitter unit 5S2. The arrangement is such that light is received by 5R. Then, by arranging the test object 7 to be inspected on the optical path between the beam splitter unit 5S1 and the mirror unit 5M1, the light receiving unit 5R detects the interference fringes and measures the distortion of the test object 7 and the like. The

  Hereinafter, the optical unit 5 will be described in detail. It should be noted that upper and lower concepts such as upper, lower, upper, and lower used in the following description correspond to the upper and lower sides of the drawings.

  2 is a perspective view showing the optical unit 5 in FIG. 1. Here, the optical units 5S1 and 5S2 will be described as a representative, but the same applies to the other optical units 5P, 5Q, 5M1, 5M2, and 5R. . The optical unit 5 has one end surface as a lower surface 5 a and the other end surface as an upper surface 5 b, and the lower surface 5 a is bonded to the mount base 3. Adhesion with the mount base 3 is performed by an adhesive made of an ultraviolet curable resin. The optical unit 5 includes an optical component 21 and a transparent plate 23 on the lower surface thereof. The lower surface 5a of the transparent plate is used as one end surface, and the upper surface 5b of the optical component 21 is used as the other end surface. 23 is bonded with an adhesive made of, for example, a thermosetting resin.

  The optical component 21 includes an optical frame 25 and an optical element 27 held by the optical frame 25 (the above-described optical elements are collectively referred to as an optical element 27). The optical frame 25 has an element mounting portion 29 that is opaque to ultraviolet rays and is formed as a groove having a rectangular cross section at the center thereof. The optical element 27 is optically inserted into the groove of the element mounting portion 29. It is held by the frame 25. The optical element 27 is installed in a predetermined direction, and the optical function of the various optical units 5 described above is exhibited by installing the optical unit 5 holding the optical element 27 at a predetermined position on the mount base 3. . The element mounting portion 29 is not limited to a groove having a rectangular cross section, and may be, for example, a through hole having a circular cross section or a groove having a semicircular cross section.

  The optical frame 25 has recessed grooves 31 and 31 formed on both side surfaces of the upper portion thereof. These recessed grooves 31, 31 are formed in pairs so as to be plane-symmetric, and extend over the entire width in the depth direction (width direction) of both side surfaces. The recessed groove 31 is a V-groove that is cut inward, and includes an inner upper surface 33 and an inner lower surface 35.

  The inner upper surface 33 is inclined with respect to the horizontal plane, with the normal line 33h facing outward facing downward. The inner upper surface 33 forms a gripping surface of the optical unit 5 together with the edge 37 of the upper surface 5b of the optical frame 25. That is, the gripping portion 39 of the optical unit 5 is configured by the inner upper surface 33 in which the normal line 33h toward the outer side faces downward and the upper surface edge portion 37 in which the normal line 37h toward the outer side faces upward. The optical unit 5 can be gripped by pressing the chuck surface against the inner upper surface 33 and the upper surface edge 37.

  The optical frame 25 has inclined surfaces 51 and 51 formed on both side surfaces of the lower portion thereof. These inclined surfaces 51 are formed in pairs so as to be plane-symmetric and extend over the entire width in the depth direction (width direction) of both side surfaces. The inclined surface 51 is inclined so that the outer shape of the optical frame 25 becomes smaller toward the bottom surface 25a of the optical frame 25. Thus, by providing the inclined surface 51 in the optical frame 25, the escape part 53 is defined in the lower part.

  The transparent plate 23 is made of, for example, quartz glass that transmits ultraviolet light having the predetermined wavelength, and is formed in a flat plate shape. The transparent plate 23 has a shape in which the projected outer shape in the vertical direction does not protrude from the projected outer shape in the same direction of the optical component 21. That the projected outer shape does not protrude includes that the projected outer shape is the same.

  The upper surface 23 b of the transparent plate is bonded to the bottom surface 25 a of the optical frame 25 as a bonding surface only at the center, and the upper surface edge 23 c outside this is exposed from the escape portion 53. When the ultraviolet rays having the predetermined wavelength are irradiated obliquely from the upper side on the optical component 21 side toward the transparent plate 23, the ultraviolet rays pass through the escape portion 53 and reach the upper surface edge 23 c of the transparent plate 23.

  Next, the bonding process for bonding the optical unit 5 onto the mount base 3 will be described with reference to FIG. FIG. 3 is a state explanatory view showing the bonding process of the optical unit 5 in FIG. 2, and shows the optical unit 5 held by the holding device 61 and installed on the mount base 3. First, the gripping device 61 and the manipulator 67 used for the bonding process will be described.

  The gripping device 61 has chuck portions 63 and 64 provided as a pair. The chuck part 63 and the chuck part 64 are connected by a contact / separation mechanism 65, and one chuck part 63 is movable in a direction in which the chuck part 63 is in contact with or separated from the other chuck part 64. As the contact / separation mechanism 65, for example, a cylinder mechanism driven by hydraulic pressure, air pressure, or the like is used. The chuck portions 63 and 64 have chuck surfaces 73 and 77 configured to extend along the entire depth direction (width direction) of the side surface and to be along the grip surfaces 33 and 37 of the optical unit 5. In other words, the chuck surfaces 73 and 77 are brought into close contact with the grip surfaces 33 and 37 when the chuck portions 63 and 64 move in the approaching direction.

  The manipulator 67 is connected to the gripping device 61 and moves the gripping device 61 in a three-dimensional direction under the control of a control unit (not shown). The control unit controls the driving of the manipulator 67 based on the position and orientation of the optical unit 5 detected by a detection unit (not shown).

  The manipulator 67 includes a pair of light source portions 69 that irradiate the ultraviolet rays obliquely from the optical component 21 side toward the escape portion 53 of the transparent plate 23. As the light source unit 69, for example, a bundle of optical fibers that diffuses ultraviolet rays from the emission surface 69a is used.

  Next, a bonding process for bonding the optical unit 5 onto the mount base 3 will be described. First, an adhesive made of an uncured ultraviolet curable resin is applied in advance to the lower surface (lower surface of the transparent plate) 5 a of the optical unit 5, and the upper portion of the optical unit 5 is gripped by the gripping device 61. That is, first, the manipulator 67 moves the gripping device 61 to a position that sandwiches the upper portion of the optical unit 5 with the chuck portions 63 and 64 being separated. Next, the contact / separation mechanism 65 is driven, and the chuck part 63 is moved in a direction approaching the chuck part 64. Then, the gripping surfaces 33 and 37 of the optical unit 5 are pressed against the chuck surfaces 73 and 77, respectively, and the optical unit 5 is gripped by the gripping device 61. In this way, the optical unit 5 is in close contact with the four planes when gripping the upper part, and is thus securely gripped with respect to the gripping device 61.

  The optical unit 5 is moved by the manipulator 67 while being held by the holding device 61, and the lower surface 5 a is arranged on the mount base 3 in a predetermined installation position and installation direction on the mount base 3. At this time, the adhesive previously applied to the lower surface 5a is sandwiched between the lower surface 5a and the mount base 3, and an adhesive layer 83 is formed by the sandwiched adhesive. Here, the adhesive is applied in advance to the lower surface 5 a of the optical unit 5, but may be applied in advance to an installation position on the mount base 3.

  Next, the driving of the manipulator 67 is controlled by the control means, and the position and orientation of the optical unit 5 are finely adjusted while the optical unit 5 is held by the holding device 61 with the upper holding portions 39 and 39.

  Next, the ultraviolet light having the predetermined wavelength is emitted from the light source unit 69. Then, the emitted ultraviolet light passes through the escape portion 53 and reaches the exposed upper surface edge 23c, passes through the inside of the transparent plate 23 and reaches the adhesive layer 83, and the adhesive of the adhesive layer 83 is cured by receiving the ultraviolet light. The adhesive tends to shrink with this hardening, but the optical unit 5 does not move by being dragged by the shrinkage of the adhesive because the gripping portion 39 is securely fixed by the gripping device 61. Even during curing, the installation position and orientation are accurately maintained. When the adhesive is completely cured, the gripping device 61 is removed from the gripping portions 39, 39, and the bonding of the optical unit 5 is completed.

  As described above, according to the optical unit 5, the chuck surfaces 73 and 77 of the gripping device 61 are pressed against the gripping surfaces 33 and 37, respectively, by gripping the optical unit 5 by having the gripping surfaces 33 and 37 on the upper part. Therefore, the optical unit 5 is stably held by the four surfaces and is securely held.

  In addition, since the optical unit 5 is securely gripped in this manner, the optical unit 5 is restrained from changing its position and orientation when receiving a force accompanying shrinkage during curing of the adhesive, and a desired installation position after the curing of the adhesive. The optical unit 5 is installed in a desired installation position and installation direction with high accuracy.

  In addition, according to the optical unit 5, the recessed groove 31 extends over the entire width in the depth direction of the side surface, and therefore has a simpler structure than the case where a hole-shaped recessed portion is provided on the side surface to constitute the grip portion. The chuck portions 63, 64 can be used, and automatic gripping by a manipulator or the like is facilitated.

  Further, according to the optical unit 5, the projected outer shape of the transparent plate 23 is configured not to protrude from the projected outer shape of the optical component 21, and even if the optical units 5 are installed close to each other, the transparent plates 23 are in the way. Therefore, the optical units 5 can be installed close to each other, and the optical units 5 can be densely arranged in the optical device 1.

  Further, according to the optical unit 5, the inclined surface 51 is provided at the lower portion thereof to form the escape portion 53, and the upper surface edge 23 c is exposed while the projected outer shape of the transparent plate 23 is the same as or smaller than that of the optical component 21. Therefore, the ultraviolet rays from the light source 69 reach the upper surface edge 23c, and the ultraviolet rays are easily hit to the center side of the adhesive layer 83, the adhesive force of the adhesive is sufficiently ensured, and the optical unit 5 is securely mounted on the mount base 3. It is glued to.

  Further, according to the optical device 1 using the optical unit 5, the inclined surface 51 of the optical unit 5 is inclined so that the outer shape of the optical frame 25 becomes smaller toward the bottom surface 25a. The generated scattered light toward the optical unit 5 is reflected downward by the inclined surface 51 and attenuated by the transparent plate 23 and the mount base 3, so that a highly reliable optical device can be obtained.

  Further, according to the optical unit 5, the optical component 21 and the transparent plate 23 are joined in advance and are integrally formed. Therefore, when installing on the mount base 3, the optical unit 5 and the mount base 3 are bonded. As compared with the case where the optical component 21, the transparent plate 23, and the mount base 3 are bonded at the same time, handling is easy, and high positional accuracy and orientation accuracy of the optical unit 5 can be obtained.

  In addition, according to the optical unit 5, a sufficient adhesive force of the adhesive that is adhered to the mount base 3 by the exposure of the upper surface edge 23 c of the transparent plate 23 while being stably and securely held by the holding portions 39 and 39. Therefore, the optical unit 5 is reliably fixed on the mount base 3 in the desired installation position and orientation, and higher optical position accuracy and orientation accuracy of the optical unit 5 can be obtained.

  Further, according to the optical unit 5, since the recessed groove 31 and the inclined surface 51 extend in the same depth direction, the recessed groove 31 and the inclined surface 51 are processed simultaneously when the optical frame 25 is manufactured. The optical frame 25 can be easily manufactured.

  The optical device 1 to which the various optical units 5 are applied is not limited to a Mach-Zender interferometer, and can be applied to a Fourier transform spectrometer, a flatness measuring device, and the like.

  Next, an optical unit 200 that is a second embodiment of the optical unit according to the present invention will be described with reference to FIG. FIG. 4 is a perspective view showing the optical unit 200. The difference between the optical unit 200 and the optical unit 5 is the configuration of the grip portion 239.

  In this embodiment, the optical frame 225 constituting the optical unit 200 has ridges 231 and 231 formed on both side surfaces of the upper portion thereof. These ridges 231 and 231 are formed in pairs so as to be plane-symmetric and extend over the entire width in the depth direction (width direction) of both side surfaces. This ridge portion 231 is formed in a quadrangular cross section, and includes a ridge portion lower surface 233 and a ridge portion upper surface 237.

  The ridge portion lower surface 233 is inclined with respect to the horizontal plane with the normal line 233 h directed outward, and the ridge portion upper surface 237 is an edge on the same plane as the upper surface 200 b of the optical unit 200. The normal line 237h toward the outside is directed upward, and the convex portion lower surface 233 and the convex portion upper surface 237 constitute a gripping surface of the optical unit 200. That is, the convex portion lower surface 233 and the convex portion upper surface 237 constitute the grip portion 239 of the optical unit 200, and a gripping device described later pushes the chuck surface against the convex portion lower surface 233 and the convex portion upper surface 237. The optical unit 200 can be gripped by the contact.

  Next, the gripping device 261 used in the bonding process of the optical unit 200 will be described with reference to FIG. FIG. 5 is a state explanatory view showing the bonding process of the optical unit 200 of FIG. 4, and shows the optical unit 200 that is gripped by the gripping device 261 and installed on the mount base 3. The difference between the gripping device 261 and the gripping device 61 is the configuration of the contact / separation mechanism 265.

  The contact / separation mechanism 265 is configured such that the male screw shaft 265n is rotated by driving of the motor 265m, and the connecting portion 265p including the chuck portion 63 is screwed to move in a direction in which the chuck portion 64 is in contact with and separated from the chuck portion 64.

  According to the optical unit 200 of the present embodiment, the chuck surfaces 73 and 77 of the gripping device 261 are pressed against the gripping surfaces 233 and 237 and grip the optical unit 200 by having the gripping surfaces 233 and 237 on the upper part. Therefore, the same operation and effect as in the case of the optical unit 5 are exhibited. The ridges are provided so as to be shifted downward with respect to the optical frame (provided so that the upper surface of the ridges is lower than the upper surface of the optical frame), and the upper surface of the ridge that is not the upper edge of the optical unit. Can be used as a gripping surface together with the lower surface of the ridge.

  Next, an optical unit 300 that is a third embodiment of the optical unit according to the present invention will be described with reference to FIG. FIG. 6 is a perspective view showing the optical unit 300. The optical unit 300 is different from the optical unit 5 in the configuration of the grip portion 339.

  In this embodiment, the optical frame 325 constituting the optical unit 300 has recessed grooves 331 and 331 formed on both side surfaces of the upper portion thereof. These recessed grooves 331 and 331 are formed in pairs so as to be plane-symmetric and extend over the entire width in the depth direction (width direction) of both side surfaces. The recessed groove 331 is a groove having a trapezoidal cross section cut inward, and includes an inner upper surface 333 and an inner lower surface 337.

  The inner upper surface 333 is inclined with respect to the horizontal plane with a normal line 333h facing outward, and the inner lower surface 337 is inclined with respect to the horizontal plane with a normal line 337h facing outward. The inner upper surface 333 and the inner lower surface 337 constitute a gripping surface of the optical unit 300. That is, the inner upper surface 333 and the inner lower surface 337 form a grip portion 339 of the optical unit 300, and the gripping device described later grips the optical unit 300 by pressing the chuck surface against the inner upper surface 333 and the inner lower surface 337. It is possible to do.

  Subsequently, still another gripping device 361 used in the bonding process of the optical unit 300 will be described with reference to FIG. FIG. 7 is a state explanatory view showing the bonding process of the optical unit 300 of FIG. 6, and is a view showing the optical unit 300 gripped by another gripping device 361 and installed on the mount base 3. The difference between the gripping device 361 and the gripping device 61 is the configuration of the chuck portions 363 and 364.

  The chuck portions 363 and 364 have chuck surfaces 373 and 377 configured to extend along the entire width in the depth direction (width direction) of the side surface and to be formed along the gripping surfaces 333 and 337 of the optical unit 300. That is, the chuck surfaces 373 and 377 are brought into close contact with the gripping surfaces 333 and 337 by moving the chuck portions 363 and 364 in the approaching direction.

  In addition, with reference to FIG. 8, still another gripping device used in the bonding process of the optical unit 300 will be described. FIG. 8 is a state explanatory view showing a state in which the optical unit 300 of FIG. 6 is gripped by a chuck portion 383 constituting still another gripping device, and is a view showing the vicinity of the grip portion 339 of the optical unit 300 in that state. is there.

  The chuck portions 383 are configured so that the chuck surfaces 393 and 397 which are the outer surfaces of the respective close contact portions 386 are formed by the arm 384 rotating in a direction in which the close contact portions 386 at the distal ends of the arms 384 open with respect to the rotation shaft 385. Each of the optical units 300 is configured to be pressed against the gripping surfaces 333 and 337.

  According to the optical unit 300 of this embodiment, the chuck surfaces 333 and 377 of the gripping device 361 are pressed against the gripping surfaces 333 and 337 respectively by holding the gripping surfaces 333 and 337 on the upper part, thereby gripping the optical unit 300. In addition, since the chuck surfaces 393 and 397 of other gripping devices are pressed against the gripping surfaces 333 and 337 to grip the optical unit 300, the same operations and effects as in the case of the optical unit 5 are achieved.

  The combination of the optical units 5, 200, and 300 and the gripping device that grips them is not limited to the combination of the above embodiments, and can be used for each applicable embodiment. .

  Subsequently, the optical unit 400 according to the fourth embodiment of the optical unit according to the present invention, the optical unit 500 according to the fifth embodiment, and the optical unit 600 according to the sixth embodiment are respectively shown in FIGS. This will be described with reference to FIG. 9, 10 and 11 are perspective views showing the optical units 400, 500 and 600, respectively. The difference between these optical units 400, 500, and 600 from the optical unit 5 lies in the configuration of the lower part thereof, and in particular, the configuration of the optical frames 425 and 525 that are constituent elements of the optical units 400 and 500, and the optical unit 600. It is in the configuration of the transparent plate 623 which is a component.

  In the fourth to sixth embodiments, the transparent plates 23, 523, and 623 of the optical units 400, 500, and 600 are projected in the vertical direction as in the optical unit 5 according to the first embodiment. The outer shape is a shape that does not protrude from the projected outer shape in the same direction of the optical components 421, 521, and 621.

  In the optical unit 400 of the fourth embodiment shown in FIG. 9, the optical frame 425 is provided with inclined through holes 453 while both lower side surfaces thereof are vertical surfaces. The inclined through-holes 453 are inclined and extended from both lower side surfaces of the optical frame 425 so as to reach the joint surface between the optical frame 425 and the transparent plate 23, and one or a plurality of (in-depth) (in this direction) In the embodiment, two on one side) are provided. The upper surface 23 b of the transparent plate 23 is exposed to the outside through the inclined through hole 453.

  According to such an optical unit 400, when the ultraviolet rays having the predetermined wavelength are obliquely irradiated from the optical component 421 side toward the transparent plate 23 as in the first embodiment, the ultraviolet rays are inclined through-holes 453. And reaches the exposed transparent plate upper surface 23b, so that the same effect as in the case of the optical unit 5 can be obtained.

  Further, according to the optical device using the optical unit 400, the inclined through hole 453 is provided on the side surface of the optical unit 400, and thus scattered light generated in the optical device and directed toward the optical unit 400 is directed to the inclined through hole 453. As a result of being incident and attenuated by the transparent plate 23 and the mount base 3, a highly reliable optical device can be obtained.

  Further, according to the optical unit 400, since the area of the joint surface between the optical frame 425 and the transparent plate 23 is larger than that of the optical unit 5, strong adhesion between the optical frame 425 and the transparent plate 23 can be obtained. Further, since the through hole is generally easy to process, the optical frame 425 can be easily manufactured.

  In the optical unit 500 of the fifth embodiment shown in FIG. 10, the optical frame 525 includes a large-diameter flange 551 provided in a pair, with both lower side surfaces thereof being vertical surfaces and protruding from the lower side surfaces. A through hole 553 is provided. The through hole 553 extends from the upper surface 551b of the flange portion 551 so as to reach the joint surface between the optical frame 525 and the transparent plate 523, and one or a plurality (one side 2 in this embodiment) in the depth direction (width direction). Are provided). The upper surface 523b of the transparent plate 523 is exposed to the outside through the through hole 553.

  According to the optical unit 500 as described above, when the ultraviolet ray having the predetermined wavelength is irradiated from the optical component 521 side toward the transparent plate 523 as in the first embodiment, the ultraviolet ray passes through the through hole 553. Since it reaches the exposed transparent plate upper surface 523b, the same effect as in the case of the optical unit 5 can be obtained.

  Further, according to the optical unit 500, since the area of the joint surface between the optical frame 525 and the transparent plate 523 is larger than that of the optical unit 400, stronger bonding between the optical frame 525 and the transparent plate 523 can be obtained. Further, since the through hole is generally easy to process, the optical frame 525 can be easily manufactured.

  In the optical unit 600 of the sixth embodiment shown in FIG. 11, the optical frame 625 has a vertical lower surface on both sides thereof, and the transparent plate 623 has an outer shape of the transparent plate 623 as its both side surfaces are directed upward. The inclined surface 623d is small. As a result, the incident angle on the inclined surface 623d when the ultraviolet rays having a predetermined wavelength are obliquely irradiated from the optical component 621 side toward the transparent plate 623 is larger than the incident angle when the oblique ultraviolet rays are incident on the vertical surface. Becomes smaller.

  For this reason, according to such an optical unit 600, the reflection loss of the ultraviolet light incident on the inclined surface 623d is reduced, and the ultraviolet light with a small reflection loss passes through the inside of the transparent plate 623 and enters the lower surface 5a of the transparent plate 623. Therefore, substantially the same effect as in the case of the optical unit 5 can be obtained.

  Although the present invention has been specifically described above based on the embodiment, the present invention is not limited to the above embodiment. For example, in the above embodiment, the optical unit 5, 200, 300, 400, 500 is used. , 600 can be densely installed, and the projection shape in the vertical direction of the transparent plates 23, 23, 23, 23, 523, 623 is the projection in the same direction of the optical components 21, 221, 321, 421, 521, 621. Although it is configured in a shape that does not protrude from the outer shape, the projected outer shape of each transparent plate may protrude from the projected outer shape of each optical component.

  Further, in the above embodiment, the optical units 5, 200, 300, 400, 500, and 600 are preferable because the amount of light applied to the adhesive layer 83 increases, and the optical frames 25, 225, 325, 425, 525, and 625 are preferred. However, the optical unit does not have a transparent plate, and the bottom surface of the optical frames 25, 225, 325, 425, 525, and 625 is the optical unit. 5 may be formed, and these surfaces may be bonded to the mount base 3.

  In the above embodiment, the optical units 5, 200, 300, 400, 500, and 600 are bonded to the mount base 3 with an adhesive made of an ultraviolet curable resin. The adhesive is a thermosetting resin. You may adhere | attach using other adhesive agents, such as an adhesive agent which consists of.

  In the above embodiment, two light source portions 69 are provided to irradiate ultraviolet rays from two symmetrical directions so that the cured state of the adhesive is symmetric, and the distortion of the adhesive layer 83 due to shrinkage during curing is averaged. However, it is sufficient that at least one light source unit 69 is provided, and ultraviolet rays may be irradiated from at least one direction. At this time, the inclined surface 51, the inclined through hole 453, the through hole 553, and the inclined surface 623d of the transparent plate 623 of the optical unit may be provided in at least one place corresponding to the irradiation direction of ultraviolet rays. In addition, when there are three or more light sources 69 and the inclined surfaces 51, the inclined through holes 453, the through holes 553, and the inclined surfaces 623 d, it is preferable to arrange them at equal positions in the circumferential direction.

  In the above embodiment, the optical components 21, 221, 321, 421, 521, 621 have the optical frames 25, 225, 325, 425, 525, 625, and these optical frames hold the optical element 27. As a matter of fact, gripping portions 39, 239, and 339 are provided in the optical frame. However, these optical frames are not essential in the optical unit, and the optical element 27 itself constitutes an optical component or an optical unit and is directly gripped by this optical element. A gripping portion such as portions 39, 239, and 339 may be provided.

It is a perspective view which shows the optical apparatus provided with the optical unit which concerns on 1st Embodiment of this invention. It is a perspective view which shows the optical unit in FIG. It is a state explanatory drawing which shows the adhesion | attachment process of the optical unit of FIG. 2, and is a figure which shows the optical unit hold | gripped by the holding apparatus and installed on the mount base. It is a perspective view which shows the optical unit which concerns on 2nd Embodiment of this invention. It is a state explanatory drawing which shows the adhesion | attachment process of the optical unit of FIG. 4, and is a figure which shows the optical unit hold | gripped by the other holding apparatus and installed on the mount base. It is a perspective view which shows the optical unit which concerns on 3rd Embodiment of this invention. It is a state explanatory drawing which shows the adhesion | attachment process of the optical unit of FIG. 6, and is a figure which shows the optical unit hold | gripped by the further holding apparatus and installed on the mount base. FIG. 7 is a state explanatory view showing a state in which the optical unit of FIG. 6 is gripped by a chuck portion constituting still another gripping device. It is a perspective view which shows the optical unit which concerns on 4th Embodiment of this invention. It is a perspective view which shows the optical unit which concerns on 5th Embodiment of this invention. It is a perspective view which shows the optical unit which concerns on 6th Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Optical apparatus, 3 ... Mount base, 5,200,300,400,500,600 ... Optical unit, 5a ... Lower surface, 5b, 200b ... Upper surface, 25, 225, 325, 425, 525, 625 ... Optical frame, 27: optical element 31, 331: recessed groove, 33, 333 ... inner upper surface (gripping surface), 37 ... upper surface edge (gripping surface), 33h, 233h, 333h ... downward normal, 37h, 237h, 337h ... Upward normal line, 39, 239, 339 ... gripping part, 61, 261, 361 ... gripping device, 83 ... adhesive layer, 231 ... ridge part, 233 ... ridge part lower surface (grip surface), 237 ... ridge part upper surface (Gripping surface) 337 ... Inner lower surface (gripping surface).

Claims (5)

One end surface is the lower surface, the other end surface is the upper surface, and provided with a gripping portion that enables gripping by a gripping device on the side of the upper surface side,
The gripping part is
The two side surfaces are provided as a pair in a symmetrical shape at positions facing each other, and have two gripping surfaces extending over the entire width of the side surface,
One gripping surface has its normal facing outward facing down,
The other holding surface has an optical unit characterized in that a normal line toward the outside faces upward. A concave groove extending over the entire width of the side surface,
The one gripping surface is constituted by an inner upper surface of the recessed groove,
2. The optical unit according to claim 1, wherein the other gripping surface is configured by an inner lower surface of the concave groove or an edge of an upper surface which is the other end surface. Comprising a ridge extending over the entire width of the side surface;
The one gripping surface is constituted by a lower surface of the ridge portion,
2. The optical unit according to claim 1, wherein the other gripping surface is configured by an upper surface edge that is the upper surface of the ridge portion or the other end surface. The optical unit according to claim 1, further comprising: an optical element; and an optical frame that has the grip portion and holds the optical element. Mount base,
An optical unit according to any one of claims 1 to 4,
An optical device, wherein a lower surface which is the one end surface of the optical unit is bonded onto the mount base with an adhesive.

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