JP2005212194A - Method for manufacturing ceramic green sheet, method for manufacturing multilayer ceramic sheet, and method for manufacturing piezoelectric actuator element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ceramic green sheet, a laminated ceramic sheet, and a piezoelectric actuator element that can improve the adhesion of a sheet and reduce the amount of warpage and is excellent in productivity.
A process for forming a green sheet by casting a ceramic slurry composition in which a water-soluble binder, ceramic powder and water are mixed on a support, a process for laminating the green sheet, In the method for producing a multilayer ceramic sheet having a binder removal step and a firing step, the green body laminate is held in a constant humidity of 45% to 55% relative humidity before the binder removal step. By adjusting the moisture absorption amount of the green sheet, the moisture absorption amount of the green sheet is optimized, and at the same time, the wrinkles and deflections generated in the sheet are repaired, and after firing, a good quality ceramic with excellent adhesion and reduced warpage A sheet can be obtained.
[Selection] Figure 1

Description

  The present invention relates to a method for producing a ceramic green sheet using a water-soluble binder, a method for producing a multilayer ceramic sheet, and a method for producing a piezoelectric actuator element.

  Ceramic sheets are widely used in many fields such as circuit boards for electronic components, multilayer chip capacitors, actuator elements utilizing the piezoelectric effect, and the like. Among them, the ceramic sheet used for the multilayer piezoelectric ceramic actuator is manufactured by the following process, for example.

(1) A molding binder (an organic binder, a plasticizer, a dispersant, etc.) is mixed with the calcined powder of piezoelectric ceramic, and slurried with an organic solvent.
(2) This ceramic slurry is spread on a carrier film with a doctor blade to a certain thickness.
(3) The ceramic slurry developed on the carrier film is dried by volatilization of an organic solvent to produce a piezoelectric green sheet.
(4) This green sheet is cut into a predetermined size, and the internal electrode metal paste is printed on one side.
(5) Stack several tens to several hundreds of these and heat press with a press to make a green laminate.
(6) After heating the raw laminate to a temperature of about 400 ° C. and undergoing a binder removal step of thermally decomposing all the organic components contained therein,
(7) Reheat to 1100 ° C. or higher and sinter.
(8) This sintered body is a piezoelectric ceramic containing a large number of metal electrodes inside, and this is cut into desired dimensions and shapes,
(9) An actuator is configured by electrically connecting each internal electrode in parallel with an external electrode (metal film) provided on the side surface of the sintered body.

  Conventionally, a butyral resin or the like has been used as an organic solvent-based binder for producing a ceramic green sheet (for example, see Patent Documents 1 and 2 below). For this reason, it was necessary to use a large amount of various organic solvents such as alcohols, ketones, chlorinated solvents, and aromatic solvents as these solvents.

  However, in recent years, there has been an increasing demand for water-soluble binders that do not use organic solvents from the viewpoints of environmental pollution and toxicity. Then, the manufacturing method of the ceramic green sheet using water-soluble binders, such as water-soluble polyvinyl butyral, polyvinyl acetate, polyvinyl alcohol, an acrylic ester, and an emulsion of an acrylic ester, as a binder is proposed (patent document 3 below). . Since this water-soluble binder uses water as a solvent, it meets the needs of the times from the viewpoint of environmental protection and the like.

Japanese Patent No. 2876811 Japanese Patent No. 2996489 JP 2002-338362 A JP-A-11-126318

  However, in the conventional method for producing a ceramic green sheet or laminated ceramic sheet using a water-soluble binder, the desired adhesion during lamination cannot be obtained, or the sheet is wrinkled or bent, resulting in debinding and An increase in the warp amount of the sheet occurred after firing. For this reason, in the conventional manufacturing method, there existed a problem that a high quality ceramic sheet could not be manufactured stably.

  Further, this type of ceramic sheet is used as a bimorph piezoelectric bending type actuator element equipped with a magnetic head as described in Patent Document 4, for example. Cause inability to withstand use.

  In addition, the above Patent Documents 1 and 2 disclose a technique for suppressing the occurrence of structural defects in a sintered body by holding the molded body in a constant humidity atmosphere after debinding (degreasing) and before firing. However, since this treatment is for preventing damage to the molded body in the firing step by applying appropriate moisture to the molded body heat-dried in the binder removal step, the Patent Document 1, The treatment described in 2 is not suitable as a measure for preventing the occurrence of bending or warping in a ceramic sheet using a water-soluble binder.

  The present invention has been made in view of the above-mentioned problems, and can improve the adhesion of the sheet and reduce the amount of warpage. The method for manufacturing a ceramic green sheet, the method for manufacturing a multilayer ceramic sheet, and the piezoelectric actuator element excellent in productivity It is an object to provide a manufacturing method.

  In solving the above problems, the method for producing a ceramic green sheet of the present invention includes a step of casting a ceramic slurry composition obtained by mixing a water-soluble binder, ceramic powder, and water on a support to form a green sheet. And a debinding step for removing the water-soluble binder from the green sheet, wherein the green sheet is held in a constant humidity before the debinding step to absorb moisture of the green sheet. A step of adjusting the amount.

  Further, the method for producing a multilayer ceramic sheet of the present invention comprises a step of casting a ceramic slurry composition obtained by mixing a water-soluble binder, ceramic powder and water on a support to form a green sheet, A method for producing a laminated ceramic sheet, comprising a lamination step of laminating to obtain a green sheet laminate, a debinding step of the green sheet laminate, and a firing step, and before the debinding step, the green sheet laminate Is held in constant humidity to adjust the amount of moisture absorption of the green sheet laminate.

  Furthermore, the manufacturing method of the piezoelectric actuator element of the present invention is a manufacturing method of a piezoelectric actuator element made of a piezoelectric body having an intermediate electrode, and the ceramic slurry is a mixture of a water-soluble binder, ceramic powder, and water as the piezoelectric body. After the composition is cast on a support to form a green sheet, a laminated ceramic sheet obtained by lamination, debinding and firing is used. Before the debinding step, the green sheet laminate is fixed. It has the process of hold | maintaining in humidity and adjusting the moisture absorption amount of the said laminated body.

  The present invention adjusts the moisture absorption amount of the green sheet before debinding (degreasing), thereby controlling the moisture absorption amount or moisture content of the green sheet to eliminate bending, and the amount of warpage in the subsequent debinding and firing steps. I try to get few ceramic sheets.

  In particular, after debinding, the fluidity of the sheet is cut off due to the disappearance of the water-soluble binder, making it impossible to repair the deflection.Therefore, the moisture absorption amount of the green sheet is reduced at the stage before the debinding process in which the binder exists. It needs to be adjusted.

  Thereby, the ceramic green sheet without a wrinkle and a bending can be obtained, and the improvement of productivity can be aimed at. Further, when the sheets are laminated, the adhesion between the layers can be increased, and further, when used as a piezoelectric actuator element, delamination and cracks can be effectively prevented.

  The holding humidity condition in the moisture absorption adjustment step is preferably 45% to 55% relative humidity. If it is less than 45%, the water content in the sheet is too small, the adhesion becomes poor, and delamination tends to occur. If it exceeds 55%, the amount of warping of the sheet will increase after debinding and firing, which will cause cracks when used as a piezoelectric actuator element.

  Regarding the production of the multilayer ceramic sheet or the piezoelectric actuator element, it is preferable that the moisture absorption amount adjusting step is performed after the green sheets are laminated and before the thermocompression bonding. This is because, after the moisture absorption adjustment process, after the thermocompression bonding, the adhesion between the layers wins and it becomes difficult to repair the bending.

  As described above, according to the method for producing a ceramic green sheet of the present invention, the step of adjusting the amount of moisture absorption of the green sheet by holding the green sheet in constant humidity is provided before the binder removal step. Thus, it is possible to obtain a ceramic green sheet free from wrinkles and bends, and to improve productivity.

  Further, according to the method for producing a laminated ceramic sheet of the present invention, the step of holding the green sheet laminate in constant humidity and adjusting the moisture absorption amount of the laminate is provided before the binder removal step. A multilayer ceramic sheet having a reduced amount and excellent adhesion can be obtained.

  Furthermore, according to the method for manufacturing a piezoelectric actuator element of the present invention, before the debinding step, the step of holding the green sheet laminate in constant humidity and adjusting the moisture absorption amount of the laminate is provided. It is possible to prevent the occurrence of delamination and cracks in the multilayer ceramic sheet during use, and to obtain a highly reliable piezoelectric actuator element.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 shows a process flow for manufacturing a multilayer ceramic sheet or a piezoelectric actuator element according to an embodiment of the present invention. First, an outline of this process flow will be described.

  First, a ceramic dielectric powder mainly composed of PZT (lead zirconate titanate), for example, is weighed (step S1), wet primary mixing (step S2) is performed and dried, followed by coarse pulverization (step S3), and after the calcination (step S4), wet secondary mixing (step S5) is performed. After drying again, coarse pulverization (step S6) is performed, the powder is weighed (step S7), and the water-soluble acrylic resin is mixed as a binder (step S8). After mixing the binder, high-speed stirring (step S9) is performed, and defoaming treatment (step S10) is performed under reduced pressure to obtain a ceramic slurry.

  Next, a ceramic slurry is applied onto the coating roll using a doctor blade method to be described later, sheet forming (step S11) is performed, and drying (step S12) is performed at a temperature of 100 ° C., for example, to obtain a green sheet.

  Subsequently, the green sheet is cut into a predetermined size (step S13), and the conductive paste constituting the internal electrode is printed on the cut green sheet using, for example, a screen printing method (step S14), and then dried. (Step S15). And after peeling off a coating roll (process S16) and laminating | stacking a plurality of green sheets (process S17) and making it a green sheet laminated body, it inserts into a humidity chamber so that it may mention later, and the said temperature and humidity conditions The moisture absorption amount of the laminate is adjusted (step S18).

  After adjusting the amount of moisture absorption, the green sheet laminate is degassed using a vacuum laminator (step S19) and the green sheet laminate is hot pressed (step S20) under predetermined hot press conditions to adhere the layers. Then, the green sheet laminate is cut to a predetermined size, separated into pieces (step S21), subjected to binder removal treatment at a temperature of 400 ° C. (step S22), and fired (step S23) to obtain a laminated ceramic sheet. .

  Next, the outer shape of the obtained multilayer ceramic sheet is processed into a desired shape (step S24), and external electrodes are formed, whereby a piezoelectric actuator element having a bimorph structure in which an intermediate electrode to be described later is sandwiched between piezoelectric bodies (FIG. 4). ) (Step S25), the characteristic inspection (step S26) is performed.

  In the present embodiment, an example in which a ceramic dielectric powder mainly composed of lead zirconate titanate (PZT) is used as the ceramic powder is shown. However, the present invention is not limited to this example, and an electronic component molded using a green sheet For example, other materials may be used as long as they can be used as piezoelectric elements.

  Moreover, although the example which used the water-soluble acrylic resin as a binder was shown, if it is a water-soluble binder instead of an organic solvent-type binder, other water-type binders, such as polyvinyl acetal, polyvinyl alcohol, an acrylate ester, vinyl acetate, are also included. Applicable.

  Next, the sheet forming step (step S11) and the drying step (step S12) will be described with reference to FIGS. FIG. 2 is a sectional view schematically showing a sheet forming apparatus using a doctor blade method, and FIG. 3 is an external perspective view thereof.

  In the doctor blade method, the gap of the blade gap 3 which is the gap between the container part 1 and the doctor blade 2 is adjusted, and the ceramic slurry 6 is applied onto the coating roll 4 while the coating roll 4 is moved by the drawing roller 5. is there. The ceramic slurry 6 applied on the coating roll 4 is dried while moving the support plate 8 to form a green sheet 7.

  The container part 1 has a space for storing the ceramic slurry 6, and the space has a taper so that the bottom surface side is narrowed. The coating roll 4 can pass through the bottom surface of the container portion 1. The width of the container portion 1 is equal to or slightly narrower than the width of the coating roll 4.

  The doctor blade 2 is a plate-like member that adjusts the thickness at which the ceramic slurry 6 stored in the container part 1 is cast on the coating roll 4, and the blade gap that is a constant distance from the bottom surface of the container part 1. 3 is arranged. The doctor blade 2 has a function of damming the ceramic slurry 6 and casting a certain amount of the ceramic slurry 6 on the coating roll 4 passing through the bottom surface of the container part 1. Although the figure shows an example in which two doctor blades 2 are provided vertically, the number of doctor blades 2 can be selected as appropriate.

  The blade gap 3 is a gap formed between the container part 1 and the doctor blade 2, and the ceramic slurry 6 leaks from the blade gap 3 when the coating roll 4 passes through the bottom surface of the container part 1. 4 is coated with ceramic slurry 6.

  The coating roll 4 is a sheet formed of resin, and is pulled out from the rear (left side in the figure) of the container unit 1 as the drawing roller 5 rotates, and passes through the bottom surface of the container unit 1 and the blade gap 3. The ceramic slurry 6 is applied onto the coating roll 4 by moving on the support plate 8. The drawing roller 5 is a member that sandwiches the coating roll 4 by two rollers that rotate oppositely to face each other, and draws and moves the coating roll 4.

  When the ceramic slurry 6 is put into the container portion 1, the ceramic slurry 6 flows out from the blade gap 3 due to its own weight. At the same time, the drawing roller 5 is rotated to draw the coating roll 4 at a constant speed, and the ceramic slurry 6 is applied onto the coating roll 4. The ceramic slurry 6 applied on the coating roll 4 is dried in the process of moving on the support plate 8, and the water in the ceramic slurry 6 evaporates to form the green sheet 7.

  In forming the internal electrode on the green sheet 7 cut into a predetermined size (steps S13 and S14), the above example shows an example using the screen printing method. However, the present invention is not limited to this. Metal spraying, electroless plating Alternatively, it is also possible to use a vacuum thin film forming technique such as sputtering or vacuum deposition.

  In the present embodiment, the green sheet 7 on which the internal electrode is formed is peeled off from the coating roll 4 and then laminated to form a green sheet laminated body (raw laminated body). Adjustment of the moisture absorption amount of the body is performed (step S18). And after this moisture absorption adjustment process, while carrying out the thermocompression bonding of the interlayer of a green sheet laminated body with a hot press method, each process (process S20, S22, S23) of binder removal and baking is performed, and it concerns on this invention. A laminated ceramic sheet is produced.

  Now, in the moisture absorption adjustment step (step S18) according to the present invention, the moisture absorption or moisture content of the green sheet laminate is controlled to repair sheet wrinkles and flexure, and the amount of warpage in the subsequent debinding and firing steps. A multilayer ceramic sheet having a small amount is obtained.

  In particular, in the present embodiment, since the drying process (step S15) of the conductive paste constituting the internal electrode formed on the green sheet 7 is performed, the green sheet 7 is also dried at the same time and the moisture absorption amount is reduced. For this reason, after being formed into a sheet form from the ceramic slurry 6, wrinkles and deflections generated in the sheet with the amount of water contained remain as it is after drying. Therefore, the moisture absorption amount adjustment process (step S18) is performed to adjust the moisture absorption amount of the green sheet 7, and the binder is dissolved by the absorbed moisture to bring the sheet to fluidity, thereby repairing wrinkles and bending. .

  Here, after removing the binder, the water-soluble binder is in a state removed from the green sheet laminate, so that the sheet is no longer fluid, and wrinkles and flexure cannot be repaired even if the amount of moisture absorption is increased. Therefore, it is necessary to perform the moisture absorption amount adjusting step at a stage before the binder removal step.

  In addition, the moisture absorption amount adjusting step is performed before the thermocompression treatment (step S20) of the green sheet laminate, because after the thermocompression treatment, the adhesion between the sheets wins and the fluidization of the sheet is restricted. This is because it becomes difficult to repair wrinkles and deflection.

  The holding humidity condition in the moisture absorption adjustment step is preferably 45% to 55% relative humidity. If the relative humidity is less than 45%, the water content in the sheet is too small, the adhesion between the sheets is deteriorated even after the subsequent thermocompression treatment (step S20), and delamination tends to occur. On the other hand, if the relative humidity exceeds 55%, the amount of warping of the sheet after debinding and firing is increased, which may cause cracks when used as a piezoelectric actuator element as described later.

  As described above, by performing a process of adjusting the amount of moisture absorption of the green sheet laminate before the binder removal treatment of the green sheet laminate, a high-quality ceramic green sheet or green sheet laminate free from wrinkles and deflection is obtained. It is possible to obtain a laminated ceramic sheet having desired electronic properties with excellent adhesion and suppressed warpage by subsequent lamination, debinding, and firing treatment.

  FIG. 4 is a schematic perspective view showing an example of the configuration of a piezoelectric bending actuator element using the multilayer ceramic sheet manufactured as described above.

  The piezoelectric bending actuator element 10 is configured as a so-called DT (Dynamic Tracking) head device, and has a cantilever structure integrally formed with a trapezoidal bimorph 11 and a holder 12 attached to a base end portion of the bimorph 11. The plate spring 13 is disposed in parallel, and a magnetic head 15 is attached to the tip of the plate spring 13 via a head base 14 that is a tilt suppressing means.

  The bimorph 11 has a structure in which two piezoelectric plates 111 and 112 are bonded to each other with an intermediate electrode 113 interposed therebetween, and surface electrodes 114 and 115 are formed on both bonded surfaces. At the front ends of the bimorph 11 and the leaf spring 13, a thin-walled inclination suppressing portion 14a on the rear end side of the head base 14 that suppresses the inclination of the magnetic head 15 when the bimorph 11 and the leaf spring 13 are curved is attached.

  The magnetic head 15 is mounted on the mounting portion 14 b on the distal end side of the head base 14. Further, the end of the bimorph 11 is sandwiched between a base holder 16 and a presser holder 17 constituting the holder 12.

  Here, as a material of the piezoelectric plates 111 and 112, a ceramic material manufactured by the method for manufacturing a multilayer ceramic sheet of the present invention is used. As the material of the intermediate electrode 113, a metal material such as a titanium alloy or stainless steel that is light and has a small linear expansion coefficient is used. The material of the surface electrodes 114 and 115 is preferably one that matches or is close to the linear expansion coefficient of the piezoelectric plates 111 and 112, has good conductivity and oxidation resistance, and is easy to solder. For example, nickel A metal material such as silver, lead, molybdenum, tin, or an alloy material thereof is used.

  The surface electrodes 114 and 115 can be formed by applying a paste of the above material to the surfaces of the piezoelectric plates 111 and 112 by screen printing or the like and drying or baking, or by metal spraying, vacuum deposition, or sputtering. There is a method of forming by electroless plating or the like. As the material of the holder 12, a conductive material such as aluminum or brass is used.

  By changing the potential applied to the surface electrodes 114 and 115 and the intermediate electrode 113, the voltage applied to the piezoelectric plates 111 and 112 changes, and each of them expands and contracts due to the piezoelectric effect of PZT, and the bimorph 31 is deformed to cause the actuator. Works.

  Therefore, according to the piezoelectric bending actuator element 10 of the present embodiment, the multilayer ceramic sheets used as the piezoelectric plates 111 and 112 are formed by performing the moisture absorption adjustment process before debinding as described above. Therefore, since it is a high-quality multilayer ceramic sheet with excellent interlayer adhesion and reduced warpage, it is highly reliable by preventing cracks and delamination of the piezoelectric plates 111 and 112 due to deformation of the bimorph 11. The actuator element 10 can be configured.

  For 100 parts by weight of ceramic dielectric powder composed mainly of lead zirconate titanate (PZT), 0.1 part by weight of antifoaming agent, water-soluble acrylic resin (aqueous solution with a solid content of 10%) as a binder, and water Was added so that the volume solid content ratio would be 4%, and the mixture was mixed for 5 minutes at 1000 rpm with a high-speed planetary stirrer to obtain a ceramic slurry for experiments.

  The obtained ceramic slurry was prepared by using a doctor blade method to prepare a clean sheet having a thickness of 30 μm, and this was cut into a predetermined size. It was applied to the extent.

  And the obtained green sheet was laminated | stacked, it inserted in the thermo-hygrostat, and the moisture absorption amount adjustment process which adjusts the moisture absorption amount of a green sheet laminated body was performed. At this time, the temperature condition of the constant temperature and humidity chamber is kept constant at 23 ° C., and the humidity conditions are RH (relative humidity) 30%, 35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, The retention time was changed to 75%, 80%, 85%, and 90%, and the holding time was 1 hour. In addition, the experiment was also performed when the holding time was 30 minutes under the conditions of RH 45% to 55% (Examples 1-1, 2-1, 3-1).

  And each green sheet laminated body processed on the said temperature / humidity conditions was thermocompression-bonded by the hot press method after vacuum lamination, respectively. The hot press conditions were a heating temperature of 80 ° C., a press pressure of 50 MPa, and a press holding time of 20 minutes.

  Then, the pressed green sheet laminate was cut along the internal electrode pattern at a size of 15 mm × 15 mm, and the fracture surface was confirmed to confirm the state of adhesion strength. Thereafter, the warpage amount of the element (laminated ceramic sheet) produced through the binder removal step and the firing step was measured for the green sheet laminate.

  Regarding the adhesion strength, the cut surface was confirmed after the green sheet laminate was cut using a cutting machine. As a result, the state of the cut surface in which bending stresses of 45 ° and 90 ° were applied to the green sheet laminate was observed and classified as follows.

A: The cut surface of the laminate is in close contact with the internal electrode surface and the green sheet without being peeled even at a bending stress of 90 °.
●: peeled off at a bending stress of 90 °, but at a bending stress of 45 °, the cut surface of the laminate was in close contact with the internal electrode surface and the green sheet without being peeled off.
Δ: peeled off at a bending stress of 45 °, but in normal carrying, the internal electrode surface and the green sheet are in close contact with each other.
X: The internal electrode surface and the green sheet do not adhere to each other and easily peel off.

  Regarding the amount of warpage, the entire length of the fired element was measured using a surface roughness meter, and the amount of warpage was confirmed.

  The results of the experiment are shown in Table 1.

  As is apparent from Table 1, when the humidity condition is RH 45% or more and 55% or less and the holding time is 1 hour (Examples 1-2, 2-2, 3-2), the adhesion is good and the amount of warpage is small. A piezoelectric laminated element can be formed.

  Further, when the holding time is 30 minutes under the above humidity conditions (Examples 1-1, 2-1, and 3-1), the amount of warpage is not greatly changed, but the adhesion It turns out that it is somewhat inferior. From this, it can be said that the holding time in constant humidity is preferably 1 hour or more.

  On the other hand, when the humidity condition is RH 35% or less (Comparative Examples 1 and 2), the moisture absorption amount or moisture content of the green sheet is too small, and the sheets do not adhere to each other even after the hot pressing process, and firing is performed. It was impossible. In addition, when the humidity condition was RH 40% (Comparative Example 3), it seemed to adhere to the appearance, and it was possible to perform the binder removal step and the firing treatment without applying stress, When the cross section was observed, delamination occurred between the internal electrode surface and the green sheet.

  On the other hand, when the humidity condition is RH 60% or more (Comparative Examples 4 to 10), the device itself can be manufactured. However, the amount of moisture absorption is too large, and the amount of warpage is greatly generated after debinding and firing. At the same time it becomes defective, there is a high possibility of causing cracks during use.

  From the above experimental results, the humidity condition in the moisture absorption adjustment step is preferably RH 45% or more and 55% or less, and the holding time is 30 minutes to 1 hour, more preferably 1 hour or more, so that the quality is excellent. An actuator element can be obtained.

  The embodiment of the present invention has been described above. Of course, the present invention is not limited to this, and various modifications can be made based on the technical idea of the present invention.

  For example, in the above embodiment, an example in which the moisture absorption amount adjusting process is performed in a laminated state of the green sheet and the laminated ceramic sheet or the piezoelectric actuator element is manufactured through the binder removal and firing is described. The present invention can also be applied to a case where a single-layer ceramic sheet is obtained through adjustment and debinding and firing.

  In the above embodiment, the case where a piezoelectric ceramic element is manufactured by forming an internal electrode on a green sheet has been described as an example. However, the present invention is not limited to this example. For example, a multilayer ceramic capacitor or an internal electrode may be used. The present invention can also be applied to the case of manufacturing a ceramic sheet that does not have any.

It is a process flow figure explaining the manufacturing process of the multilayer ceramic sheet by the embodiment of this invention, and a piezoelectric actuator element. It is sectional drawing which shows the outline of the sheet forming apparatus by a doctor blade method. It is an external appearance perspective view of the said sheet forming apparatus. It is a figure which shows an example of a structure of a piezoelectric bending type actuator element, and is an external appearance perspective view of a DT head apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Container part, 2 ... Doctor blade, 3 ... Blade clearance, 4 ... Coating roll, 5 ... Drawing-out roller, 6 ... Ceramic slurry, 7 ... Green sheet, 8 ... Support plate, 10 ... Piezoelectric bending type actuator element, 11 ... Bimorph, 12 ... holder, 13 ... leaf spring, 14 ... head base, 15 ... magnetic head, 16 ... base holder, 17 ... presser holder, 111, 112 ... piezoelectric plate, 113 ... intermediate electrode, 114, 115 ... surface electrode.

Claims (9)

A step of casting a ceramic slurry composition obtained by mixing a water-soluble binder, ceramic powder, and water on a support to form a green sheet; and a binder removal step of removing the water-soluble binder from the green sheet. A method for producing a ceramic green sheet,
Before the said binder removal process, it has the moisture absorption amount adjustment process of hold | maintaining the said green sheet in constant humidity and adjusting the moisture absorption amount of the said green sheet. The manufacturing method of the ceramic green sheet characterized by the above-mentioned. The method for producing a ceramic green sheet according to claim 1, wherein the holding humidity condition of the green sheet in the moisture absorption adjustment step is 45% to 55% relative humidity. A step of casting a ceramic slurry composition obtained by mixing a water-soluble binder, ceramic powder, and water on a support to form a green sheet; a stacking step of stacking the green sheets to obtain a green sheet laminate; A method for producing a multilayer ceramic sheet having a binder removal step of the green sheet laminate and a firing step,
Before the said binder removal process, it has the moisture absorption amount adjustment process of hold | maintaining the said green sheet laminated body in constant humidity, and adjusting the moisture absorption amount of the said laminated body. The manufacturing method of the laminated ceramic sheet characterized by the above-mentioned. The method for producing a multilayer ceramic sheet according to claim 3, wherein the humidity retention condition of the green sheet laminate in the moisture absorption adjustment step is a relative humidity of 45% or more and 55% or less. The method for producing a multilayer ceramic sheet according to claim 3, wherein the moisture absorption amount adjusting step is performed after the green sheets are laminated and before thermocompression bonding. The method for producing a multilayer ceramic sheet according to claim 3, further comprising a step of forming an internal electrode on the green sheet before the lamination step. A method of manufacturing a piezoelectric actuator element comprising a piezoelectric body having an intermediate electrode,
As the piezoelectric body, a ceramic slurry composition obtained by mixing a water-soluble binder, ceramic powder, and water is cast on a support to form a green sheet, and then laminated, debindered, and fired to obtain a laminated ceramic sheet. Is used,
Prior to the debinding step, there is a moisture absorption amount adjusting step of adjusting the moisture absorption amount of the laminate by holding the green sheet laminate in constant humidity. A method of manufacturing a piezoelectric actuator element, comprising: The method for manufacturing a piezoelectric actuator element according to claim 7, wherein a holding humidity condition of the laminated body in the moisture absorption amount adjusting step is 45% or more and 55% or less of relative humidity. The method for manufacturing a piezoelectric actuator element according to claim 7, wherein the moisture absorption amount adjusting step is performed before thermocompression bonding between layers of the laminate.

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