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JP2005297143A - Surface coated cutting tool - Google Patents

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JP2005297143A
JP2005297143A JP2004118342A JP2004118342A JP2005297143A JP 2005297143 A JP2005297143 A JP 2005297143A JP 2004118342 A JP2004118342 A JP 2004118342A JP 2004118342 A JP2004118342 A JP 2004118342A JP 2005297143 A JP2005297143 A JP 2005297143A
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layer
cutting tool
cutting
coated cutting
outermost layer
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JP4340579B2 (en
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Haruyo Fukui
治世 福井
Yoshio Okada
吉生 岡田
Junya Okita
淳也 沖田
Naoya Omori
直也 大森
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Sumitomo Electric Hardmetal Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a surface coated cutting tool which is excellent in the chipping resistance and the peeling resistance and has a long service life even under the service conditions that the cutting edge is exposed in the high temperature state, such as high speed cutting, heavy cutting, and dry cutting. <P>SOLUTION: The surface coated cutting tool has a coating layer composed of an outermost layer and an inner layer on the surface of a base material. The inner layer has a columnar structure having an aspect ratio of at least 3 to improve wear resistance, and has a Ti-containing layer composed of TiCN, in which any one of respective orientation indexes TC(220), TC(311), and TC(422) of crystal planes (220), (311), (422) becomes the maximum value of the orientation indexes. The outermost layer is composed of aluminum nitride to give the lubricity. Further, the inner layer is formed by the CVD method which can give excellent adhesiveness, and the outermost layer is formed by the PVD method which can give a compressive residual stress. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、基材表面に被覆層を具える切削工具に関するものである。特に、高速、高能率加工やドライ加工などの刃先が高温となる環境下であっても、被覆層が剥離しにくく、耐欠損性に優れ、工具寿命が長い表面被覆切削工具に関するものである。   The present invention relates to a cutting tool having a coating layer on a substrate surface. In particular, the present invention relates to a surface-coated cutting tool in which a coating layer hardly peels off, has excellent fracture resistance, and has a long tool life even in an environment where the cutting edge becomes high temperature, such as high-speed, high-efficiency machining, and dry machining.

近年、機械加工の現場では、加工コストの低減や需要の変化などにより、高速、高能率加工や高精度、高品位が志向されると共に、被削材も多様化してきている。また、1990年代後半以降、地球温暖化やダイオキシン問題などの環境汚染に対する関心が高まる中で、機械加工においても地球環境保全、作業環境改善の観点から切削油の使用を極力抑制すること、究極的には切削油を一切使わず完全なゼロエミッション加工となるドライ加工とすることが要請されている。ドライ加工は、切削油を使用しないため冷却効果が少なく、切削時、刃先に対する負荷や刃先温度の上昇が大きく、上記高速、高能率加工といった加工も同様に刃先に対する負荷や刃先温度の上昇が大きい。このような背景から、切削工具は、耐熱性(耐酸化性)、800〜900℃といった高温における耐摩耗性といった性能がますます重要視されており、工具材料に要求される特性は、厳しくなる一方である。   In recent years, at machining sites, due to reduction in machining costs and changes in demand, high-speed, high-efficiency machining, high accuracy, and high quality have been aimed at, and work materials have also diversified. Also, since the latter half of the 1990s, interest in environmental pollution such as global warming and dioxin issues has increased, and in machining, the use of cutting oil has been suppressed as much as possible from the viewpoint of global environmental conservation and work environment improvement. Is required to have a dry process that does not use any cutting oil and is a completely zero-emission process. Since dry machining does not use cutting oil, there is little cooling effect, and during cutting, the load on the cutting edge and the temperature of the cutting edge temperature are greatly increased. In the processing such as high speed and high efficiency machining, the load on the cutting edge and the cutting edge temperature are also increased. . Against this background, cutting tools are becoming more and more important for performance such as heat resistance (oxidation resistance) and wear resistance at high temperatures such as 800-900 ° C, and the characteristics required for tool materials become severe. On the other hand.

上記要求を満たすべく、工具基材の表面に炭化チタン(TiC)、窒化チタン(TiN)、炭窒化チタン(Ti(C,N))といったチタン系セラミックスや、アルミナ(Al2O3)、ジルコニア(ZrO2)などの酸化物系セラミックスからなる被覆層を具える切削工具が広く利用されている。例えば、特許文献1では、X線回折の配向性指数を規定した被覆層を具える切削工具が開示されている。また、耐酸化性などの特性を向上するべく、窒化アルミニウムからなる被覆層を具える切削工具が提案されている(特許文献2、3参照)。 In order to meet the above requirements, the surface of the tool base is made of titanium-based ceramics such as titanium carbide (TiC), titanium nitride (TiN), titanium carbonitride (Ti (C, N)), alumina (Al 2 O 3 ), zirconia Cutting tools having a coating layer made of an oxide ceramic such as (ZrO 2 ) are widely used. For example, Patent Document 1 discloses a cutting tool including a coating layer that defines an orientation index of X-ray diffraction. Further, a cutting tool including a coating layer made of aluminum nitride has been proposed in order to improve characteristics such as oxidation resistance (see Patent Documents 2 and 3).

特開平11-124672号公報Japanese Patent Laid-Open No. 11-124672 特公昭59-27302号公報Japanese Patent Publication No.59-27302 特開2002-273607号公報JP 2002-273607 A

しかしながら、従来の切削工具では、更なる高速、高能率加工や切削油を全く用いないドライ加工を行うために不十分な切削性能を有していない。耐酸化性や耐摩耗性などの切削性能に優れる膜を具えていても、切削初期に剥離したり、欠損が生じると、膜の特性を十分に発揮させることができない。従って、剥離や欠損などを発生させることなく、より長時間に亘って基材表面に被覆層を維持することができる切削工具の開発が望まれている。   However, conventional cutting tools do not have sufficient cutting performance to perform further high-speed, high-efficiency processing or dry processing that does not use any cutting oil. Even if a film having excellent cutting performance such as oxidation resistance and wear resistance is provided, if the film is peeled off at the initial stage of cutting or a defect occurs, the characteristics of the film cannot be fully exhibited. Therefore, it is desired to develop a cutting tool that can maintain the coating layer on the surface of the base material for a longer time without causing peeling or chipping.

図1は、切削工具の典型的な刃先部分の構造を示す断面模式図である。通常、基材10において刃先は、図1(A)に示すように逃げ面11とすくい面12とから構成され、多くの場合、逃げ面11とすくい面12とがつくる角αは、鋭角又は直角である。このような形状の刃先に被膜20を形成すると、逃げ面11の膜厚aやすくい面12の膜厚bに比べて刃先先端部分の膜厚cが大きくなる。   FIG. 1 is a schematic cross-sectional view showing the structure of a typical cutting edge portion of a cutting tool. In general, the cutting edge in the base material 10 is composed of a flank 11 and a rake face 12 as shown in FIG. 1 (A) .In many cases, the angle α formed by the flank 11 and the rake face 12 is an acute angle or Right angle. When the coating film 20 is formed on the blade edge having such a shape, the film thickness c of the tip of the blade edge becomes larger than the film thickness b of the surface 12 where the film thickness a of the flank 11 is easy to be a.

上記被膜20を具える切削工具において、刃先の理想的な摩耗の進行を説明すると、図1(B)に示すように、まず、刃先先端部分の被膜20から徐々に摩耗され、図1(C)に示すように基材10に達した後、図1(D)に示すように基材10が露出されながら被膜20と共に摩耗されていくことである。   In the cutting tool provided with the coating 20, the ideal wear progress of the cutting edge will be described. First, as shown in FIG. ), After reaching the base material 10, as shown in FIG. 1 (D), the base material 10 is worn with the coating 20 while being exposed.

しかし、本発明者らが被覆層を具える切削工具の摩耗状態を詳細に調査した結果、従来の切削工具では、上記図1(B)〜(D)のように摩耗が進行せず、切削初期において、図1(E)に示すように被膜20だけでなく基材10の刃先先端部分が既になくなって基材10が露出しており、その形態から、通常、摩耗と考えられていた損傷は、実は欠損であることがわかった。また、基材10において露出部分13は、既に酸化していることがわかった。これらのことから、上記特許文献に記載されるような耐酸化性や耐摩耗性などに優れる被覆層を具えていても、切削初期に基材が露出されることで、工具寿命の著しい向上は困難であると考えられる。   However, as a result of detailed investigation of the wear state of the cutting tool having the coating layer by the present inventors, in the conventional cutting tool, the wear does not proceed as shown in FIGS. In the initial stage, as shown in FIG. 1 (E), not only the coating 20, but also the tip of the blade tip of the substrate 10 has already disappeared, and the substrate 10 is exposed. Actually turned out to be deficient. Further, it was found that the exposed portion 13 in the substrate 10 was already oxidized. From these things, even if it has a coating layer excellent in oxidation resistance and abrasion resistance as described in the above-mentioned patent documents, the base material is exposed at the initial stage of cutting, and the tool life is significantly improved. It is considered difficult.

そこで、本発明の主目的は、基材との密着性及び耐欠損性に優れる被覆層を具えて、工具寿命をより長くすることができる表面被覆切削工具を提供することにある。   Therefore, a main object of the present invention is to provide a surface-coated cutting tool that has a coating layer that is excellent in adhesion to a substrate and fracture resistance, and that can further extend the tool life.

本発明は、潤滑性を付与するべく最外層の組成を規定し、耐摩耗性の向上を図るべく、内層の組成、結晶構造、配向性を規定すると共に、基材との密着性及び耐欠損性の向上を図るべく、最外層の成膜方法と内層の成膜方法とを異ならせることで上記目的を達成する。   The present invention defines the composition of the outermost layer to impart lubricity, defines the composition, crystal structure and orientation of the inner layer in order to improve wear resistance, and adheres to the base material and provides fracture resistance. In order to improve the properties, the above-mentioned object is achieved by making the outermost layer deposition method different from the inner layer deposition method.

即ち、本発明は、基材表面に被覆層を具える表面被覆切削工具であって、前記被覆層は、基材上に形成される内層と、この内層上に形成される最外層とからなり、最外層及び内層は、以下を満たすものとする。
<内層>
I. 化学的蒸着法にて形成する
II. 以下の条件(1)及び(2)を満たすTiCNからなるチタン含有層を具える
(1)アスペクト比3以上の柱状組織を有する
(2)結晶の(220)面、(311)面、(422)面の各配向性指数TC(220)、TC(311)、TC(422)のいずれかが配向性指数の最大値をとる
<最外層>
I. 物理的蒸着法にて形成する
II. Alの窒化物、炭窒化物、窒酸化物、炭窒酸化物から選ばれるアルミニウム化合物からなる膜から構成される
That is, the present invention is a surface-coated cutting tool having a coating layer on a substrate surface, the coating layer comprising an inner layer formed on the substrate and an outermost layer formed on the inner layer. The outermost layer and the inner layer satisfy the following.
<Inner layer>
I. Forming by chemical vapor deposition
II. Provide a titanium-containing layer made of TiCN that satisfies the following conditions (1) and (2)
(1) Has a columnar structure with an aspect ratio of 3 or more
(2) Any of the orientation indices TC (220), TC (311), and TC (422) on the (220), (311), and (422) planes of the crystal has the maximum value of the orientation index. <Outermost layer>
I. Forming by physical vapor deposition
II. Consists of a film made of an aluminum compound selected from Al nitride, carbonitride, oxynitride, and oxycarbonitride

本発明者らは、高速、高能率加工や切削油を全く使用しないドライ加工などといった過酷な条件であっても、切削工具の寿命をより長くするには、被覆層の耐酸化性や耐摩耗性の向上はもちろんのこと、切削初期に起こる刃先の欠損やチッピング、膜の剥離に伴う基材の露出を抑制することが効果的であるとの知見を得た。そして、耐欠損性の向上には、最外層を圧縮残留応力が付与できる物理的蒸着法にて形成することと共に、比較的硬度が低い窒化系アルミニウムから構成すること、また、被覆層と基材との密着性の向上には、内層を化学的蒸着法にて形成することが好適であるとの知見を得た。このとき、特に、内層を特定の組成、構造を有する化合物から構成することで、耐摩耗性の向上を図ることができるとの知見も得た。これらの知見に基づき、本発明を規定する。以下、本発明をより詳しく説明する。   In order to extend the life of the cutting tool even under harsh conditions such as high speed, high efficiency machining, and dry machining that does not use any cutting oil, the present inventors have made it possible to improve the oxidation resistance and wear resistance of the coating layer. In addition to improving the properties, it has been found that it is effective to suppress the chipping and chipping of the cutting edge that occur in the early stage of cutting and the exposure of the base material due to film peeling. In order to improve fracture resistance, the outermost layer is formed by a physical vapor deposition method capable of imparting compressive residual stress, and is composed of nitride aluminum having a relatively low hardness. In order to improve the adhesiveness, it was found that it is preferable to form the inner layer by chemical vapor deposition. At this time, in particular, it was also found that the wear resistance can be improved by constituting the inner layer from a compound having a specific composition and structure. Based on these findings, the present invention is defined. Hereinafter, the present invention will be described in more detail.

(被覆層)
<最外層>
本発明において、切削時、被削材に最初に接触する最外層は、Alの窒化物、炭窒化物、窒酸化物、炭窒酸化物から選ばれるいずれかのアルミニウム化合物からなるものとする。これら窒化系アルミニウムは、六方晶系の結晶構造であり、20GPa以下と比較的低硬度である、1000℃を超えても酸化が進行しにくい(耐酸化性に優れる)、鉄鋼材料との反応性も低いといった性質を有する。上記のように比較的低硬度であることで、欠損することなく被膜の摩耗が進行して、内層の欠損を抑制することができる。また、被削材との反応性が低いことから、刃先の凝着が抑制されるため、刃先表面の潤滑性を高めることができ、切削抵抗を低減して、突発的な欠損やチッピングを抑制すると共に、被削材の面品位をも向上することができるという効果も得られる。
(Coating layer)
<Outermost layer>
In the present invention, the outermost layer that first contacts the work material during cutting is made of any aluminum compound selected from Al nitride, carbonitride, nitride oxide, and carbonitride oxide. These nitride-based aluminums have a hexagonal crystal structure, have a relatively low hardness of 20 GPa or less, hardly oxidize even when the temperature exceeds 1000 ° C. (excellent oxidation resistance), and reactivity with steel materials Has the property of being low. As described above, since the hardness is relatively low, the wear of the coating proceeds without loss, and the loss of the inner layer can be suppressed. Also, since the reactivity with the work material is low, adhesion of the cutting edge is suppressed, so that the lubricity of the cutting edge surface can be improved, cutting resistance is reduced, and sudden chipping and chipping are suppressed. In addition, the effect that the surface quality of the work material can be improved is also obtained.

そして、本発明では、上記窒化系アルミニウムからなる最外層を物理的蒸着法(以下、PVD法と呼ぶ)にて形成する。耐欠損性を向上させるには、被膜に圧縮残留応力が付与されることが好ましい。通常、化学的蒸着法(以下、CVD法と呼ぶ)による被膜は、高温で成膜されるため基材との密着性に優れるが、成膜時の熱応力により引っ張り応力が残留するため、膜表面に亀裂が発生し易い。この亀裂は、切削時に被膜から基材に伝搬して耐欠損性を低下させる恐れがある。そこで、本発明では、耐欠損性を向上するべく、最外層に圧縮残留応力を付与するために、PVD法にて最外層を形成する。   In the present invention, the outermost layer made of nitride aluminum is formed by physical vapor deposition (hereinafter referred to as PVD method). In order to improve the fracture resistance, it is preferable to apply compressive residual stress to the coating. Normally, a film formed by chemical vapor deposition (hereinafter referred to as a CVD method) is formed at a high temperature and thus has excellent adhesion to the substrate, but tensile stress remains due to thermal stress during film formation. Cracks are likely to occur on the surface. This crack may propagate from the coating to the base material at the time of cutting to reduce the fracture resistance. Therefore, in the present invention, in order to improve the fracture resistance, the outermost layer is formed by the PVD method in order to impart compressive residual stress to the outermost layer.

上記残留圧縮応力値は、-5GPa以上0GPa以下であることが好ましい。残留応力値が0GPa超となると、被膜に引っ張り残留応力が負荷されることとなり、CVD法よる膜と同様に亀裂が入り易くなるため、耐欠損性の更なる向上が望めない。-5GPa未満であると、圧縮残留応力が大き過ぎて、切削を行う以前に刃先部分で被膜が剥離したり、チッピングを起こしたりする恐れがあり好ましくない。残留応力は、成膜条件を変化させることで調整することができる。例えば、成膜温度、ガス圧力、バイアス電圧などを調整することで制御できる。   The residual compressive stress value is preferably -5 GPa or more and 0 GPa or less. When the residual stress value exceeds 0 GPa, tensile residual stress is applied to the coating, and cracking is likely to occur as in the case of a film formed by the CVD method, so that further improvement in fracture resistance cannot be expected. If it is less than -5 GPa, the compressive residual stress is too large, and the coating may peel off at the cutting edge before cutting or chipping may occur, which is not preferable. The residual stress can be adjusted by changing the film forming conditions. For example, it can be controlled by adjusting the film formation temperature, gas pressure, bias voltage, and the like.

本発明では、上記のように結晶性が高く、圧縮残留応力が付与された最外層を形成することができるように、最外層の成膜方法としてPVD法を採用する。PVD法としては、例えば、バランスドマグネトロンスパッタリング法、アンバランスドマグネトロンスパッタリング法、イオンプレーティング法などが挙げられる。特に、原料元素のイオン化率が高いアーク式イオンプレーティング法(カソードアークイオンプレーティング)が最適である。カソードアークイオンプレーティングを用いると、最外層を形成する前に、内層の表面に対して、金属のイオンボンバードメント処理が可能となるため、最外層と内層との密着性を格段によくすることができるので、密着性という意味からも好ましいプロセスである。   In the present invention, as described above, the PVD method is adopted as a film formation method of the outermost layer so that the outermost layer having high crystallinity and imparted with compressive residual stress can be formed. Examples of the PVD method include a balanced magnetron sputtering method, an unbalanced magnetron sputtering method, and an ion plating method. In particular, the arc ion plating method (cathode arc ion plating) in which the ionization rate of the raw material elements is high is optimal. When cathode arc ion plating is used, metal ion bombardment treatment can be performed on the surface of the inner layer before forming the outermost layer, so that the adhesion between the outermost layer and the inner layer is remarkably improved. This is a preferable process from the viewpoint of adhesion.

上記最外層には、B、F、Mg、Si、Ca、V、Cr、Zn、Zr、Tiから選ばれる1種以上の付加元素が含まれていてもよい。B、Mg、Ca、V、Cr、Zn、Zrの少なくとも1種が含まれる場合、切削中の温度上昇により工具表面で酸化反応が起こることで形成されるこれら元素の酸化物により、主成分であるAlの酸化物を緻密化させる作用がある。また、B、Vの酸化物は、低融点であるため、切削時、潤滑剤として作用したり、Mg、Ca、Zn、Zrの酸化物及びFは、被削材の凝着を抑える効果がある。更に、V、Cr、Zr、Tiの窒化物、炭窒化物、窒酸化物、炭窒酸化物は、導電性を示すことから、成膜時、カソードの放電が安定すると共に、基板に印加される直流バイアス電圧が有効となる、即ち、電流が流れ易くなるため、好ましい。上記付加元素の含有量は、Alと付加元素とで100原子%として、0超10原子%未満が好ましい。   The outermost layer may contain one or more additional elements selected from B, F, Mg, Si, Ca, V, Cr, Zn, Zr, and Ti. When at least one of B, Mg, Ca, V, Cr, Zn, and Zr is included, the oxides of these elements formed by the oxidation reaction occurring on the tool surface due to the temperature rise during cutting are the main components. It has the effect of densifying some Al oxides. Also, since the oxides of B and V have a low melting point, they act as a lubricant during cutting, and the oxides and F of Mg, Ca, Zn, and Zr have the effect of suppressing adhesion of the work material. is there. Furthermore, since nitrides, carbonitrides, nitrides, and carbonitrides of V, Cr, Zr, and Ti exhibit conductivity, the cathode discharge is stabilized during film formation and applied to the substrate. This is preferable because the DC bias voltage is effective, that is, the current easily flows. The content of the additional element is preferably more than 0 and less than 10 atomic%, with Al and the additional element being 100 atomic%.

上記最外層の膜厚は、後述する内層の合計膜厚の1/2以下とすることが好ましい。このとき、被覆層は、耐欠損性及び潤滑性と耐摩耗性とをバランスよく具えることができる。1/2超とすると、最外層が厚くなることで、潤滑性に優れるものの摩耗し易くなるため、工具寿命を短くする恐れがある。特に、最外層の膜厚は、0.03μm以上10μm以下が好ましい。0.03μm未満では、十分な耐欠損機能、潤滑機能が得られにくく、10μm超では、上記と同様に内層よりも最外層の方が厚くなって、耐摩耗性を低下させ易い。膜厚の測定法は、例えば、被覆層を具える切削工具を切断し、その断面をSEM(走査型電子顕微鏡)を用いて観察して求めることができる。   The film thickness of the outermost layer is preferably set to 1/2 or less of the total film thickness of the inner layers described later. At this time, the coating layer can have a good balance between fracture resistance, lubricity and wear resistance. If it exceeds 1/2, the outermost layer becomes thick, and although it is excellent in lubricity, it tends to be worn out, so there is a risk of shortening the tool life. In particular, the thickness of the outermost layer is preferably 0.03 μm or more and 10 μm or less. If it is less than 0.03 μm, it is difficult to obtain a sufficient fracture resistance function and lubrication function, and if it exceeds 10 μm, the outermost layer is thicker than the inner layer in the same manner as described above, and wear resistance tends to be lowered. The method for measuring the film thickness can be obtained, for example, by cutting a cutting tool having a coating layer and observing the cross section using an SEM (scanning electron microscope).

上記最外層において、刃先稜線部分近傍で被削材と接触する箇所の面粗さは、切削工具断面から観察する方法で測定される5μmに対してRmaxで1.3μm以下であることが好ましい。本発明者らが調べたところ、最外層において上記接触する箇所の表面粗さが1.3μmより粗くなると、被削材の溶着が発生し易くなり、欠損抑制効果や潤滑効果などが発揮しにくくなることが判った。この面粗さは、最外層成膜後、切削工具を切断してその断面をラッピングし、金属顕微鏡や電子顕微鏡などで被膜表面の凹凸状況を基準長さ5μmの範囲で観察した際の最大面粗さ(Rmax)とし、巨視的なうねりなどは排除する。また、この面粗さは、成膜条件によってある程度制御することができる。例えば、成膜温度を高温にするほど、結晶組織が粗くなるため、引いては膜表面の面粗度が粗くなる。そこで、成膜温度を低めにすることが挙げられる。このように成膜後、特別な処理を施すことなく成膜完了状態においてRmaxで1.3μm以下とすることができるが、成膜後に、例えば、バフ、ブラシ、バレルや弾性砥石などによる研磨を施したり、マイクロブラスト、ショットピーニング、イオンビーム照射による表面改質を行うことによって、面粗さを変化させることも可能である。   In the outermost layer, the surface roughness of the portion in contact with the work material in the vicinity of the edge of the cutting edge is preferably 1.3 μm or less in terms of Rmax with respect to 5 μm measured by a method of observing from the cutting tool cross section. As a result of investigations by the present inventors, when the surface roughness of the contacted portion in the outermost layer becomes rougher than 1.3 μm, welding of the work material is likely to occur, and it becomes difficult to exert a defect suppressing effect or a lubricating effect. I found out. This surface roughness is the maximum surface when the cutting tool is cut and the cross section is wrapped after the outermost layer is formed, and the surface roughness of the coating surface is observed within a standard length of 5 μm with a metal microscope or electron microscope. Roughness (Rmax) is assumed, and macroscopic swells are excluded. Further, the surface roughness can be controlled to some extent by the film forming conditions. For example, the higher the film formation temperature, the rougher the crystal structure, so that the surface roughness of the film surface becomes rougher. Therefore, lowering the film formation temperature can be mentioned. Thus, after film formation, Rmax can be 1.3 μm or less in the film formation completion state without performing any special treatment, but after film formation, for example, polishing with a buff, a brush, a barrel, an elastic grindstone, or the like is performed. It is also possible to change the surface roughness by performing surface modification by microblasting, shot peening, or ion beam irradiation.

<内層>
本発明では、最外層よりも基材側に設ける内層として、後述する特定の組織と配向性とを具えるTiCNからなるチタン含有層を基材表面に被覆して耐摩耗性を持たせ、上記最外層の特性に加えて、耐摩耗性をも兼ね備える切削工具を提供する。特に、上記内層をCVD法にて形成することにより、被覆層と基材との密着性を向上することで、上記被覆層の特性を有効に発揮させ、工具寿命の延命化を実現する。CVD法としては、例えば、熱CVD法、プラズマCVD法などが挙げられる。
<Inner layer>
In the present invention, as an inner layer provided on the substrate side with respect to the outermost layer, a titanium-containing layer made of TiCN having a specific structure and orientation described later is coated on the substrate surface to provide wear resistance, and Provided is a cutting tool having wear resistance in addition to the characteristics of the outermost layer. In particular, by forming the inner layer by a CVD method, the adhesion between the coating layer and the substrate is improved, so that the characteristics of the coating layer can be effectively exhibited and the tool life can be extended. Examples of the CVD method include a thermal CVD method and a plasma CVD method.

《チタン含有層》
本発明においてチタン含有層は、アスペクト比3以上の柱状組織を有し、かつ結晶面が特定の結晶配向を有するTiCN膜のことで、刃先が高温となるような厳しい切削環境下において耐摩耗性を向上して、引いては工具寿命の延命化を図ることができるとの知見より、結晶配向を規定する。具体的には、結晶の(220)面、(311)面、(422)面の各配向性指数(配向性強度係数)TC(220)、TC(311)、TC(422)のいずれかが配向性指数の最大値をとるものとする。配向性指数TCは、以下のように定義される。
<Titanium-containing layer>
In the present invention, the titanium-containing layer is a TiCN film having a columnar structure with an aspect ratio of 3 or more and a crystal plane having a specific crystal orientation, and wear resistance in a severe cutting environment where the cutting edge is at a high temperature. The crystal orientation is defined based on the knowledge that the tool life can be extended by extending the tool life. Specifically, each orientation index (orientation strength coefficient) TC (220), TC (311), or TC (422) on the (220) plane, (311) plane, or (422) plane of the crystal is one of The maximum value of the orientation index is assumed. The orientation index TC is defined as follows.

Figure 2005297143
Figure 2005297143

配向性指数(配向性強度係数)TC(220)、TC(311)、TC(422)のいずれかが最大値となるには、チタン含有層の成膜条件(成膜温度、成膜圧力、ガス組成、ガスの流速、ガスの流量、ガスの導入手順など)を適宜変更させる方法が挙げられる。また、チタン含有層の直下又は下方にある基材の表面状態、又はチタン含有層の直下又は下層にある被覆膜の表面状態を適宜変化させる方法も挙げられる。具体的には、例えば、基材の表面を表面粗さZmaxで0.05μm以上1.3μm以下に制御させた状態でこの基材上に、成膜条件を適宜変更させてチタン含有層を成膜してもよい。或いは、ある膜の表面粗さや粒子の化学的状態、粒子径などを制御させた状態でこの膜の上に、成膜条件を適宜変更させてチタン含有層を成膜してもよい。   In order for the orientation index (orientation strength coefficient) TC (220), TC (311), or TC (422) to reach the maximum value, the deposition conditions for the titanium-containing layer (deposition temperature, deposition pressure, gas composition) , Gas flow rate, gas flow rate, gas introduction procedure, and the like). Moreover, the method of changing suitably the surface state of the base material directly under or below a titanium containing layer, or the surface state of the coating film directly under or under a titanium containing layer is also mentioned. Specifically, for example, a titanium-containing layer is formed on the base material by appropriately changing the film formation conditions in a state where the surface roughness Zmax is controlled to 0.05 μm or more and 1.3 μm or less. May be. Alternatively, a titanium-containing layer may be formed on this film by appropriately changing the film formation conditions in a state in which the surface roughness of the film, the chemical state of the particles, the particle diameter, and the like are controlled.

回折強度は、基材の断面において、基材の凹凸により反射などが生じないように基材がフラットな部分(平滑な部分)で測定することが好ましい。なお、周期律表IVa、Va、VIa族金属の炭窒化物において、X線の回折強度の同定は、JCPDSファイル(Powder Diffraction File Published by JCPDS International Center for Diffraction Data)に記載がない。そのため、当該炭窒化物であるTiCNからなるチタン含有層の回折強度の同定は、当該金属であるチタン(Ti)の炭化物の回折データ、同窒化物の回折データ、及び実測したTiCNの炭窒化物の回折データを比較して、それぞれの面指数を推定し、その面指数の回折強度を測定することで得るとよい。   The diffraction intensity is preferably measured in a flat portion (smooth portion) of the base material so that reflection or the like is not caused by unevenness of the base material in the cross section of the base material. The identification of the X-ray diffraction intensity in the periodic table IVa, Va, VIa group metal carbonitride is not described in the JCPDS file (Powder Diffraction File Published by JCPDS International Center for Diffraction Data). Therefore, the identification of the diffraction intensity of the titanium-containing layer made of TiCN as the carbonitride is the diffraction data of the titanium (Ti) carbide as the metal, the diffraction data of the nitride, and the measured TiCN carbonitride It is preferable to obtain the surface index by comparing the diffraction data of the surface area, estimating each plane index, and measuring the diffraction intensity of the plane index.

また、上記チタン含有層は、耐摩耗性の向上を図るべく、アスペクト比3以上の柱状組織を有するものとする。アスペクト比が3未満であると、高温切削条件下において、耐摩耗性が低下し、目的とする耐摩耗性の向上が図られないからである。   The titanium-containing layer has a columnar structure having an aspect ratio of 3 or more in order to improve wear resistance. This is because if the aspect ratio is less than 3, the wear resistance decreases under high-temperature cutting conditions, and the intended wear resistance cannot be improved.

柱状組織とするには、柱状構造が得られ易いCH3CNなどの有機炭窒化物を原料ガスに用い、反応雰囲気温度(800℃以上950℃以下)及び圧力(4.0kPa以上80kPa以下)に制御することで得ることができる。また、有機炭窒化物以外のガス種を使用する場合などは、膜の成膜速度を上げる、膜の成膜温度を高くする、原料ガスの濃度を濃くするなどの方法が挙げられる。アスペクト比を3以上とするには、例えば、結晶の平均粒径を小さくする(好ましくは0.05μm以上1.5μm以下)と共に、柱状構造の膜組織を成長させることが挙げられる。その方法として、チタン含有層の成膜条件(成膜温度、成膜圧力、ガス組成、ガスの流速、ガスの流量など)を適宜変更させる方法が挙げられる。また、チタン含有層の直下又は下方にある基材の表面状態、又はチタン含有層の直下又は下層にある被覆層の表面状態を適宜変化させる方法も挙げられる。具体的には、例えば、基材の表面を表面粗さZmaxで0.05μm以上1.5μm以下に制御させた状態でこの基材上に、成膜条件を適宜変更させてチタン含有層を成膜してもよい。或いは、ある膜の表面粗さや粒子の化学的状態、粒子径(特に0.01μm以上1.0μm以下)などを制御させた状態でこの膜の上に、成膜条件を適宜変更させてチタン含有層を成膜してもよい。 In order to obtain a columnar structure, organic carbonitride such as CH 3 CN, which can easily obtain a columnar structure, is used as the raw material gas, and the reaction atmosphere temperature (800 ° C to 950 ° C) and pressure (4.0 kPa to 80 kPa) are controlled. You can get it. In addition, when using a gas species other than organic carbonitrides, there are methods such as increasing the film formation rate, increasing the film formation temperature, and increasing the concentration of the source gas. In order to set the aspect ratio to 3 or more, for example, the average grain size of crystals is reduced (preferably 0.05 μm or more and 1.5 μm or less), and a film structure of a columnar structure is grown. Examples of the method include a method of appropriately changing the film formation conditions (film formation temperature, film formation pressure, gas composition, gas flow rate, gas flow rate, etc.) of the titanium-containing layer. Moreover, the method of changing suitably the surface state of the base material directly under or under a titanium content layer, or the surface state of the coating layer directly under or under a titanium content layer is also mentioned. Specifically, for example, a titanium-containing layer is formed on the base material by appropriately changing the film formation conditions in a state where the surface roughness Zmax is controlled to be 0.05 μm or more and 1.5 μm or less. May be. Alternatively, a titanium-containing layer may be formed by appropriately changing the film formation conditions on the film in a state in which the surface roughness of the film, the chemical state of the particles, the particle diameter (especially 0.01 μm or more and 1.0 μm or less) are controlled A film may be formed.

上記アスペクト比の測定は、例えば、以下のように求めるとよい。即ち、被覆層の断面を鏡面加工して、柱状構造を有するTiCNからなる膜の組織の粒界をエッチングする。そして、TiCNからなる膜の膜厚の1/2にあたる箇所で、基材と水平方向にある各結晶の幅を粒径とし、各結晶の粒径を測定して平均値を求める(平均値は平均粒径となる)。膜厚を得られた平均粒径で割って、膜厚に対する平均粒径の割合を算出し、この算出値をアスペクト比とするとよい。   The aspect ratio may be measured as follows, for example. That is, the cross section of the coating layer is mirror-finished to etch the grain boundaries of the film structure of TiCN having a columnar structure. Then, at a place corresponding to 1/2 of the thickness of the film made of TiCN, the width of each crystal in the horizontal direction with the base material is defined as the particle size, and the average value is obtained by measuring the particle size of each crystal (the average value is Average particle size). The film thickness is divided by the obtained average particle diameter to calculate the ratio of the average particle diameter to the film thickness, and this calculated value may be used as the aspect ratio.

《化合物層》
内層を複数の膜にて形成する場合、少なくとも一つの膜を上記チタン含有層とし、その他の膜としては、周期律表IVa、Va、VIa族金属、Al、Si、Bから選ばれる1種以上の第一元素と、B、C、N、Oから選ばれる1種以上の第二元素とからなる化合物層とすることが好ましい(但し、第一元素がBのみの場合、第二元素は、B以外とする)。即ち、内層を複数膜にて形成する場合、上記チタン含有層と、上記化合物層にて構成することが好ましい。この化合物層は、上記チタン含有層と異なるものとする。即ち、チタン含有層と組成が異なる膜としてもよいし、化合物層をTiCNからなる膜とする場合、組織又は配向性を異ならせればよい。また、この化合物層は、上記チタン含有層と同様にCVD法にて形成する。
<Compound layer>
When the inner layer is formed of a plurality of films, at least one film is the titanium-containing layer, and the other films are one or more selected from periodic table IVa, Va, VIa group metals, Al, Si, B It is preferable to be a compound layer composed of the first element and one or more second elements selected from B, C, N, O (However, when the first element is only B, the second element is Other than B). That is, when the inner layer is formed of a plurality of films, it is preferable that the inner layer is composed of the titanium-containing layer and the compound layer. This compound layer is different from the titanium-containing layer. That is, a film having a composition different from that of the titanium-containing layer may be used. When the compound layer is a film made of TiCN, the structure or orientation may be different. Further, this compound layer is formed by the CVD method in the same manner as the titanium-containing layer.

これらチタン含有層、化合物層はそれぞれ、単一の膜でもよいし、複数の膜から形成してもよい。チタン含有層を複数の膜にて構成する場合、配向性が異なる膜とすることが挙げられる。化合物層を複数の膜にて構成する場合、各膜の組成や組織などを異ならせることが挙げられる。また、化合物層を具える場合、チタン含有層、化合物層のいずれを基材側にしてもよい。即ち、基材側から順に、チタン含有層、化合物層、最外層としてもよいし、基材側から順に、化合物層、チタン含有層、最外層としてもよい。化合物層を最内層とする場合、基材との密着性が高い窒化チタン(TiN)からなる膜とすることが好ましい。   Each of the titanium-containing layer and the compound layer may be a single film or a plurality of films. In the case where the titanium-containing layer is composed of a plurality of films, it may be a film having different orientation. In the case where the compound layer is composed of a plurality of films, the composition or structure of each film may be different. Moreover, when providing a compound layer, you may make any of a titanium content layer and a compound layer into the base-material side. That is, it is good also as a titanium content layer, a compound layer, and an outermost layer in order from a base material side, and it is good also as a compound layer, a titanium content layer, and an outermost layer in order from a base material side. When the compound layer is the innermost layer, it is preferably a film made of titanium nitride (TiN) having high adhesion to the substrate.

上記最外層及び内層からなる被覆層全体の膜厚は、0.1μm以上30.0μm以下とすることが好ましい。被覆層全体の膜厚が0.1μm未満の場合、耐摩耗性が損なわれ易い。30.0μm超の場合、被覆層が厚くなることで耐摩耗性の向上は実現できるが、欠損が生じ易く、欠けによる寿命が多発して安定した加工が困難になり易い。なお、被覆層を成膜後、従来と同様に切れ刃稜線部に研磨処理やレーザー処理などの表面処理を施してももちろんよい。本発明工具は、このような表面処理によって被覆層の特性を著しく損なうことはない。   The film thickness of the entire coating layer composed of the outermost layer and the inner layer is preferably 0.1 μm or more and 30.0 μm or less. When the film thickness of the entire coating layer is less than 0.1 μm, the wear resistance tends to be impaired. When the thickness exceeds 30.0 μm, the wear resistance can be improved by increasing the thickness of the coating layer, but the chipping tends to occur, and the life due to chipping often occurs, and stable processing tends to be difficult. Of course, after forming the coating layer, surface treatment such as polishing or laser treatment may be applied to the cutting edge ridge line portion as in the conventional case. The tool of the present invention does not significantly impair the properties of the coating layer by such surface treatment.

本発明は、被覆層を形成するにあたり、上記のようにPVD法とCVD法との双方の成膜方法を利用し、基材表面にCVD法にて成膜された内層があり、引き続いてPVD法で成膜された最外層を具える構成である。また、本発明では、最外層をPVD法にて形成しているため、塩化系ガスを利用することが多いCVD法にて形成する場合と異なり、被膜の劣化を起こす恐れがあるClが最外層中に含有されない。   The present invention uses both the PVD method and the CVD method as described above to form the coating layer, and there is an inner layer formed by the CVD method on the substrate surface. It is the structure which comprises the outermost layer formed into a film by the method. Further, in the present invention, since the outermost layer is formed by the PVD method, unlike the case of forming by the CVD method in which a chlorinated gas is often used, Cl which may cause deterioration of the coating film is the outermost layer. Not contained in.

(基材)
本発明において基材は、基材は、WC基超硬合金、サーメット、高速度鋼、セラミックス、立方晶型窒化硼素焼結体、ダイヤモンド焼結体、窒化ケイ素焼結体、及び酸化アルミニウムと炭化チタンとを含む焼結体のいずれかから構成されるものを利用することが好ましい。また、WC基超硬合金、サーメットからなる基材を利用する場合、WC以外の硬質相が消失したいわゆる脱β相、硬質相が消失して結合相に富むバインダー富化層、結合相を低減させた表面硬化層といった表面改質層が基材表面に存在しても本発明の効果は認められる。
(Base material)
In the present invention, the base material is a WC base cemented carbide, cermet, high speed steel, ceramics, cubic boron nitride sintered body, diamond sintered body, silicon nitride sintered body, and aluminum oxide and carbonized. It is preferable to use what is comprised from either of the sintered compacts containing titanium. In addition, when using a base material made of WC-based cemented carbide or cermet, the so-called de-β phase where the hard phase other than WC has disappeared, the binder-rich layer rich in the binder phase with the hard phase disappearing, and the binder phase reduced. The effect of the present invention is recognized even when a surface modification layer such as a cured surface layer is present on the surface of the substrate.

本発明工具は、ドリル、エンドミル、フライス加工用刃先交換型チップ、旋削用刃先交換型チップ、メタルソー、歯切工具、リーマ及びタップのいずれかとすることが挙げられる。   The tool of the present invention may be any one of a drill, an end mill, a cutting edge exchangeable tip for milling, a cutting edge exchangeable tip for turning, a metal saw, a gear cutting tool, a reamer, and a tap.

以上説明したように本発明は、被覆層として、耐欠損性、潤滑性に優れる最外層及び耐摩耗性に優れる内層を具えると共に、これら被覆層の機能を十分に発揮するべく、成膜方法を規定することで、ドライ加工や高速、高能率加工といった刃先が高温状態にさらされる使用環境下であっても、優れた切削性能を有し、工具寿命をより延命化することができる。   As described above, the present invention provides the coating layer with the outermost layer having excellent fracture resistance and lubricity and the inner layer having excellent wear resistance as a coating layer, and in order to sufficiently exhibit the functions of these coating layers. By prescribing, it is possible to have excellent cutting performance and prolong the tool life even in the use environment where the cutting edge is exposed to a high temperature state such as dry machining, high speed and high efficiency machining.

以下、実施例を用いて、本発明表面被覆切削工具を具体的に説明する。各試料において、被覆層の組成はXPSよって、残留応力はX線回折法によって、膜硬度はナノインデンター(MTS社製Nano Indenter XP)によって、焼き付き性はSUJ2を相手材として大気中800℃の条件で高温型ピン・オン・ディスク式トライボ試験器(SCM社製TRIBOMETER/HT-800)によって確認した。また、被覆層のうち、最外層は、以下に示すカソードアークイオンプレーティング法以外のPVD法、例えば、バランスドスパッタリング法やアンバランスドスパッタリング法など、内層は、以下に示す熱CVD法以外のCVD法、例えば、プラズマCVD法などによっても成膜可能である。   Hereinafter, the surface-coated cutting tool of the present invention will be specifically described using examples. In each sample, the composition of the coating layer was XPS, the residual stress was measured by X-ray diffraction, the film hardness was measured by a nano indenter (MTS Nano Indenter XP), and the seizure property was SUJ2 as a counterpart material in the atmosphere at 800 ° C. The condition was confirmed by a high-temperature pin-on-disk tribo tester (TRIBOMETER / HT-800 manufactured by SCM). Among the coating layers, the outermost layer is a PVD method other than the cathode arc ion plating method shown below, for example, a balanced sputtering method or an unbalanced sputtering method, and the inner layer is other than the thermal CVD method shown below. A film can also be formed by a CVD method, for example, a plasma CVD method.

(試験例1)
組成がWC:86質量%、Co:8.0質量%、TiC:2.0質量%、NbC:2.0質量%、ZrC:2.0質量%である材料粉末を配合し、ボールミルで72時間湿式混合して乾燥した後、ブレーカ形状が施された圧粉体にプレス成型した。この圧粉体を真空雰囲気中で1420℃、1時間の条件で焼結炉にて焼結を行い、焼結体を得た。得られた焼結体の刃先稜線部にSiCブラシホーニング処理を施して面取り加工を行い、ISO・SNMG120408のWC基超硬合金からなるスローアウェイチップ基材を得た。
(Test Example 1)
After blending material powders with a composition of WC: 86% by mass, Co: 8.0% by mass, TiC: 2.0% by mass, NbC: 2.0% by mass, ZrC: 2.0% by mass, wet-mixed for 72 hours in a ball mill and dried Then, it was press-molded into a green compact with a breaker shape. The green compact was sintered in a sintering furnace in a vacuum atmosphere at 1420 ° C. for 1 hour to obtain a sintered body. The edge of the edge of the obtained sintered body was subjected to SiC brush honing and chamfered to obtain a throw-away tip base material made of WC-based cemented carbide of ISO · SNMG120408.

この基材表面にCVD法の一種である熱CVD法を用いて内層を形成した。本例では、基材側から順に、TiN(0.5μm)、柱状組織TiCN(6μm)、TiBN(0.5μm)、κ-Al2O3(2μm)とした。表1に各膜の成膜条件、具体的には反応ガスの組成(容量%)、成膜時の圧力(kPa)、成膜温度(℃)を示す。膜厚は、成膜時間により調整した。また、本試験においてTiCN膜は、アスペクト比が4.2の柱状組織を有し、配向性指数TCのうち(311)面が最大値をとなるように成膜させた。具体的には、反応ガスにCH3CNを用い、温度:900℃、圧力:8kPaとすると共に、TiCN膜の下層に形成したTiN膜の表面粗さがZmaxで0.1μm程度となるようにTiN膜の成膜条件(ガス組成、圧力、温度)を定めた。 An inner layer was formed on the surface of the substrate using a thermal CVD method which is a kind of CVD method. In this example, TiN (0.5 μm), columnar structure TiCN (6 μm), TiBN (0.5 μm), and κ-Al 2 O 3 (2 μm) were sequentially formed from the substrate side. Table 1 shows the film formation conditions of each film, specifically, the composition (volume%) of the reaction gas, the pressure (kPa) during film formation, and the film formation temperature (° C.). The film thickness was adjusted by the film formation time. In this test, the TiCN film was formed such that it had a columnar structure with an aspect ratio of 4.2 and the (311) plane of the orientation index TC had the maximum value. Specifically, the reaction gas is CH 3 CN, the temperature is set to 900 ° C., the pressure is set to 8 kPa, and the surface roughness of the TiN film formed in the lower layer of the TiCN film is set to about 0.1 μm at Zmax. The film formation conditions (gas composition, pressure, temperature) were determined.

Figure 2005297143
Figure 2005297143

次に最外層の成膜方法を説明する。公知のカソードアークイオンプレーティング装置の基材ホルダに、既に内層が形成された基材を装着し、真空ポンプにてチャンバ内の圧力を減圧すると共に、基材ホルダを回転させながら装置内に設置されたヒータにて基材を温度650℃に加熱し、チャンバ内の圧力が1.0×10-4Paとなるまで真空引きを行った。次に、チャンバ内にアルゴンガスを導入して、チャンバ内の圧力を3.0Paに保持し、基材バイアス用電源の電圧を徐々に上げていって-2000Vとし、工具表面のクリーニングを15分間行った。その後、チャンバ内のアルゴンガスを排気した。 Next, a method for forming the outermost layer will be described. A base material with an inner layer formed is mounted on the base material holder of a known cathode arc ion plating device, and the pressure in the chamber is reduced by a vacuum pump, and the base material holder is rotated and installed in the device. The substrate was heated to a temperature of 650 ° C. with the heater and vacuuming was performed until the pressure in the chamber became 1.0 × 10 −4 Pa. Next, argon gas is introduced into the chamber, the pressure in the chamber is maintained at 3.0 Pa, the substrate bias power supply voltage is gradually increased to -2000 V, and the tool surface is cleaned for 15 minutes. It was. Thereafter, the argon gas in the chamber was exhausted.

次に、最外層を構成する被膜成分の金属蒸発源である合金製ターゲットを配置して、反応ガスとして窒素、メタン、酸素のうち、所望の被膜が得られるガスを導入させながら、基板温度650℃、反応ガス圧2.0Pa、基板バイアス電圧を200Vに維持したまま、カソード電極に100Aのアーク電流を供給して、アーク式蒸発源(Alを主成分とする金属)から金属イオン(アルミニウムイオン)を発生させて最外層を形成した。そして、所定の膜厚(2μm)となったところで蒸発源に供給する電流をストップさせて、表2に示す組成の最外層を具える切削チップを得た(試料1-1〜1-4)。これら切削チップにおいて、刃先稜線部分近傍で被削材と接触する箇所の最外層の面粗さを調べたところ、いずれの試料も、工具断面から観察する方法によって測定される基準長さ5μmに対して、Rmaxで1.3μm以下、具体的には、例えば、試料1-2では、Rmaxで0.6μmであった。また、従来品として、上記PVD法による最外層を具えていない切削工具、即ち、CVD法による被覆層のみを有する試料1-5(被覆層の組成は、上記内層と同様の組成)も用意した。これら被覆層を具える切削チップにおいて、最外層のClの含有量(原子%)、最外層の残留応力、被覆層のナノインデテーション硬さ(GPa)、焼き付き状態を調べてみた。その結果を表2に示す。なお、試料No.1-5における最外層(CVD法によるκ-Al2O3膜)のCl含有量は、0.1原子%程度であった。また、表2においてCl含有量が「ND」と表記されているものは、XPSによる分析での検出限界以下を示す。ナノインデテーション硬さの測定は、被覆層に対して、圧子の押し込み深さが被覆層全体の膜厚の1/10以下となるように押し込み荷重を制御して行った。 Next, an alloy target, which is a metal evaporation source of the coating component constituting the outermost layer, is arranged, and a substrate temperature of 650 is introduced while introducing a gas for obtaining a desired coating among nitrogen, methane, and oxygen as reaction gases. While maintaining 100 ° C, reaction gas pressure 2.0Pa, substrate bias voltage at 200V, supply 100A arc current to the cathode electrode, and metal ion (aluminum ion) from arc evaporation source (metal whose main component is Al) Was generated to form the outermost layer. Then, when the predetermined film thickness (2 μm) was reached, the current supplied to the evaporation source was stopped to obtain cutting tips having the outermost layer having the composition shown in Table 2 (Samples 1-1 to 1-4). . In these cutting tips, when the surface roughness of the outermost layer in contact with the work material in the vicinity of the edge of the edge of the cutting edge was examined, all samples were compared with a reference length of 5 μm measured by the method of observing from the tool cross section. Thus, Rmax was 1.3 μm or less. Specifically, for example, in Sample 1-2, Rmax was 0.6 μm. In addition, as a conventional product, a cutting tool having no outermost layer by the PVD method, that is, a sample 1-5 having only a coating layer by the CVD method (the composition of the coating layer is the same composition as the inner layer) was also prepared. . In the cutting tip having these coating layers, the Cl content (atomic%) of the outermost layer, the residual stress of the outermost layer, the nanoindentation hardness (GPa) of the coating layer, and the seizure state were examined. The results are shown in Table 2. Note that the Cl content of the outermost layer (κ-Al 2 O 3 film by CVD method) in Sample No. 1-5 was about 0.1 atomic%. In Table 2, the Cl content expressed as “ND” indicates the detection limit or less in the XPS analysis. The nanoindentation hardness was measured by controlling the indentation load so that the indentation depth of the indenter was 1/10 or less of the film thickness of the entire coating layer.

Figure 2005297143
Figure 2005297143

上記被覆層を具える切削チップを用いて、表3に示す条件にて切削加工を行い、工具寿命となるまでの加工時間を測定した。耐剥離性試験では、膜剥離が生じたときを工具寿命とした。耐摩耗性試験では、逃げ面摩耗量が300μmに達したときを工具寿命とした。試験の結果を表4に示す。   Using a cutting tip having the coating layer, cutting was performed under the conditions shown in Table 3, and the processing time until the tool life was reached was measured. In the peel resistance test, the tool life was defined as the time when film peeling occurred. In the wear resistance test, the tool life was determined when the flank wear amount reached 300 μm. The test results are shown in Table 4.

Figure 2005297143
Figure 2005297143

Figure 2005297143
Figure 2005297143

表4に示すようにPVD法にて形成した窒化系アルミニウム膜を最外層として具える試料1-1〜1-4は、ドライ加工であっても、工具寿命が長いことがわかる。これは、窒化系アルミニウム膜がチッピングや欠損が生じにくく、潤滑性が付与されて切削抵抗を下げることで膜が剥離しにくくなったためであると考えられる。特に、PVD法にて形成したことで耐欠損性を高めることができたと考えられる。また、耐摩耗性に優れる内層を密着性に優れるCVD法により形成したことで、被覆層と基材との密着性を向上して、被覆層が有する機能を十分に発揮することができたためであると考えられる。更に、これらの試料1-1〜1-4は、表2に示すように高温環境下でも焼き付きが少なく、耐熱性に優れることがわかる。   As shown in Table 4, samples 1-1 to 1-4 having a nitrided aluminum film formed by the PVD method as the outermost layer have a long tool life even in dry processing. This is considered to be because the nitride-based aluminum film is less likely to be chipped or chipped, and the lubricity is imparted to reduce the cutting resistance to make the film difficult to peel off. In particular, it is considered that the fracture resistance could be improved by forming by the PVD method. In addition, because the inner layer with excellent wear resistance was formed by the CVD method with excellent adhesion, the adhesion between the coating layer and the base material was improved, and the functions of the coating layer were fully demonstrated. It is believed that there is. Further, as shown in Table 2, these samples 1-1 to 1-4 show little seizure even under a high temperature environment and are excellent in heat resistance.

(試験例2)
試験例1で用いた超硬合金基材と同様の切削チップ基材を作製し、得られた基材表面に熱CVD法を用いて表1に示す成膜条件(ガス組成、圧力、温度)にて内層を形成した。本例では、基材側から順に、TiN(0.5μm)、柱状組織TiCN(4μm)又は粒状組織TiCN(4μm)、TiBN(0.5μm)、Al2O3-ZrO2(1.5μm)とした。この内層の上に試験例1と同様の条件(カソードアークイオンプレーティング)にて、最外層としてAlN(表2試料1-1;2μm)を形成した。膜厚は、成膜時間により調整した。本例においてTiCN膜は、成膜条件を変えることで、柱状組織又は粒状組織を有するものをそれぞれ形成した。柱状組織TiCN膜は、表1に示すように成膜時の圧力と成膜温度とを変化させると共に、TiCN膜の下層に形成した膜の表面粗さやガス条件を変化させることで、アスペクト比、配向性指数の最大値をとる面を変化させた。具体的には、反応ガスにCH3CNを用い、ガス温度920℃、圧力6kPaとし、CH3CNを徐々に導入することでTiCN膜のアスペクト比を3以上とした(チタン含有層に相当)。また、基材の表面粗さをZmaxで0.09μmに制御すると共に、この基材の外側(基材から離れる側)にアスペクト比の制御を行いながらTiCN膜を成膜することで、TiCN膜の配向性指数の最大値TC(422)とした。更に、最外層の刃先稜線部分近傍で被削材と接触する箇所の面粗さが工具断面から観察する方法によって測定される基準長さ5μmに対してRmaxで0.4μmとなるように、全ての試料において、最外層を形成後、最外層の表面に研磨処理を施した。表5にTiCN膜の組織形態、アスペクト比、配向性指数TCが最大値を示す面を示す。
(Test Example 2)
A cutting tip substrate similar to the cemented carbide substrate used in Test Example 1 was produced, and the film formation conditions (gas composition, pressure, temperature) shown in Table 1 using the thermal CVD method on the obtained substrate surface The inner layer was formed at In this example, TiN (0.5 μm), columnar structure TiCN (4 μm) or granular structure TiCN (4 μm), TiBN (0.5 μm), and Al 2 O 3 —ZrO 2 (1.5 μm) were sequentially formed from the substrate side. On this inner layer, AlN (Table 2 Sample 1-1; 2 μm) was formed as the outermost layer under the same conditions as in Test Example 1 (cathode arc ion plating). The film thickness was adjusted by the film formation time. In this example, TiCN films each having a columnar structure or a granular structure were formed by changing the film forming conditions. As shown in Table 1, the columnar texture TiCN film changes the pressure during film formation and the film formation temperature, and also changes the surface roughness and gas conditions of the film formed in the lower layer of the TiCN film. The surface taking the maximum value of the orientation index was changed. Specifically, CH 3 CN is used as the reaction gas, the gas temperature is 920 ° C., the pressure is 6 kPa, and the aspect ratio of the TiCN film is set to 3 or more by gradually introducing CH 3 CN (corresponding to the titanium-containing layer). . In addition, the surface roughness of the base material is controlled to 0.09 μm in Zmax, and the TiCN film is formed while controlling the aspect ratio on the outside (the side away from the base material) of this base material. The maximum value of the orientation index was TC (422). In addition, all the surface roughness of the part that contacts the work material near the edge of the edge of the outermost layer is 0.4 μm in Rmax with respect to the reference length of 5 μm measured by the method of observing from the tool cross section. In the sample, after forming the outermost layer, the surface of the outermost layer was polished. Table 5 shows the surface of the TiCN film having the maximum morphology, aspect ratio, and orientation index TC.

Figure 2005297143
Figure 2005297143

表5に示すTiCN膜を内層に具える各試料を用いて、以下の切削条件にて連続切削加工を行い、工具寿命までの加工時間を測定した。工具寿命は、逃げ面摩耗量が300μmに達したときとした。試験の結果も表5に示す。   Using each sample having the TiCN film shown in Table 5 as an inner layer, continuous cutting was performed under the following cutting conditions, and the processing time until the tool life was measured. The tool life was determined when the flank wear amount reached 300 μm. The test results are also shown in Table 5.

被削材:SUS材 丸棒による耐摩耗試験
速 度:V=200m/min
送 り:f=0.2mm/rev.
切込み:d=1.5mm
切削油:なし
Work material: SUS material Wear resistance test with round bar Speed: V = 200m / min
Feed: f = 0.2mm / rev.
Cutting depth: d = 1.5mm
Cutting oil: None

その結果、表5に示すように内層にアスペクト比3以上、配向性指数TC(311)、TC(220)、TC(422)のいずれかが最大値をとる柱状組織のTiCN膜を具える試料2-1〜2-3は、ドライ加工であっても、耐摩耗性を維持することができ、最外層のAlN膜の潤滑効果、欠損抑制効果と合わせて、切削工具の長寿命化が図れることがわかる。特に、内層をCVD法にて形成したことで、被覆層の基材との密着性に優れ、上記耐摩耗性、潤滑性、耐欠損性といった特性を十分に発揮できたと考えられる。   As a result, as shown in Table 5, a sample having a columnar structure TiCN film in which the inner layer has an aspect ratio of 3 or more and the orientation index TC (311), TC (220), or TC (422) has the maximum value. 2-1 to 2-3 can maintain wear resistance even in dry processing, and can extend the life of cutting tools together with the lubrication effect and chipping suppression effect of the outermost AlN film I understand that. In particular, it is considered that the inner layer was formed by the CVD method, so that the adhesiveness of the coating layer to the substrate was excellent, and the characteristics such as wear resistance, lubricity, and fracture resistance were sufficiently exhibited.

(試験例3)
試験例1で用いた超硬合金基材と同様の切削チップ基材を作製し、得られた基材表面に熱CVD法を用いて表1に示す成膜条件(ガス組成、圧力、温度)にて内層を形成した。そして、この内層の上に試験例1と同様の条件(カソードアークイオンプレーティング)で最外層を形成し、被覆層を具える切削チップを得た(試料No.3-1〜3-19,3-21)。また、最外層もCVD法にて形成した切削チップを得た(試料No.3-20)。表6に被覆層を構成する各被膜の組成、各被膜の膜厚を示す。表6に示す各膜は、基材に近い方から順に、第一膜、第二膜…としている。膜厚は、成膜時間により調整した。また、本例において、柱状組織TiCN膜は、アスペクト比が3以上、配向性指数TC(311)、TC(220)、TC(422)のいずれかが最大値をとるように成膜条件を制御した(チタン含有層に相当)。
(Test Example 3)
A cutting tip substrate similar to the cemented carbide substrate used in Test Example 1 was produced, and the film formation conditions (gas composition, pressure, temperature) shown in Table 1 using the thermal CVD method on the obtained substrate surface The inner layer was formed at Then, an outermost layer was formed on the inner layer under the same conditions as in Test Example 1 (cathode arc ion plating) to obtain a cutting tip having a coating layer (Sample Nos. 3-1 to 3-19, 3-21). In addition, a cutting tip in which the outermost layer was formed by the CVD method was obtained (Sample No. 3-20). Table 6 shows the composition of each coating film constituting the coating layer and the film thickness of each coating film. Each film shown in Table 6 is a first film, a second film, etc. in order from the side closer to the substrate. The film thickness was adjusted by the film formation time. In this example, the columnar TiCN film has an aspect ratio of 3 or more, and the film formation conditions are controlled so that one of the orientation indices TC (311), TC (220), and TC (422) takes the maximum value. (Corresponding to a titanium-containing layer).

Figure 2005297143
Figure 2005297143

表6に示す被覆層を有する切削チップを用いて、以下の切削条件にて連続切削加工を行い、工具寿命までの加工時間を測定した。工具寿命は、逃げ面摩耗量が300μmに達したときとした。試験の結果を表7に示す。   Using a cutting tip having a coating layer shown in Table 6, continuous cutting was performed under the following cutting conditions, and the processing time until the tool life was measured. The tool life was determined when the flank wear amount reached 300 μm. The results of the test are shown in Table 7.

被削材:SCM435 丸棒による10秒繰返し耐摩耗性試験
速 度:V=180m/min
送 り:f=0.2mm/rev.
切込み:d=1.5mm
切削油:なし
Work material: SCM435 Round wear resistance test with a round bar for 10 seconds Speed: V = 180 m / min
Feed: f = 0.2mm / rev.
Cutting depth: d = 1.5mm
Cutting oil: None

Figure 2005297143
Figure 2005297143

その結果、表7に示すようにPVD法による窒化系アルミニウム膜を最外層とし、CVD法による特定のTiCN膜及び特定組成の化合物膜を内層に具える試料3-1〜3-12、3-16〜3-19、3-21は、工具寿命が長くなっていることがわかる。これは、優れた密着性を有すると共に、耐欠損性、潤滑性、耐摩耗性に優れているためであると考えられる。   As a result, as shown in Table 7, samples 3-1 to 3-12, in which a nitrided aluminum film by PVD method is used as the outermost layer, and a specific TiCN film and a compound film having a specific composition by CVD method are provided in the inner layer. It can be seen that 16 to 3-19 and 3-21 have longer tool life. This is considered to be because it has excellent adhesion and is excellent in fracture resistance, lubricity, and wear resistance.

また、表7に示す結果から、最外層の膜厚は、0.03μm以上10μm以下、全体膜厚は0.1μm以上30μm以下が好ましいことがわかる。更に、最外層は、内層の合計厚みの1/2以下が好ましいことがわかる。   Further, the results shown in Table 7 indicate that the outermost layer preferably has a thickness of 0.03 μm to 10 μm, and the overall thickness is preferably 0.1 μm to 30 μm. Further, it is understood that the outermost layer is preferably 1/2 or less of the total thickness of the inner layer.

上記試料3-1〜3-21の全てのチップを切断し、最外層において、刃先稜線部近傍で被削材と接触する箇所の面粗さを基準長さ5μmで測定した結果、試料3-21を除く全てのチップがRmaxで1.3μm以下となっていたが、試料3-21はRmaxで1.9μmであった。そこで、試料3-21の最外層において刃先稜線部近傍で被削材と接触する箇所を#1500のダイヤモンドペーストで研磨して、同様の方法で研磨後の面粗さを測定したところ、Rmaxで0.52μmとなっていた。この研磨したチップを用いて同じ切削条件で切削試験を行った結果、工具寿命は28minとなった。これは、刃先稜線部近傍において被削材と接触する箇所の凹凸が減り、切削抵抗が下がったためであると考えられる。また、試料3-3において同様に面粗さを測定したところ、Rmaxで0.78μmであったが、上記と同様の方法で刃先を研磨し、再度切削すると加工時間は51minとなり、大幅に改善された。   As a result of cutting all the chips of Samples 3-1 to 3-21 and measuring the surface roughness of the outermost layer in contact with the work material in the vicinity of the edge of the cutting edge at a reference length of 5 μm, Sample 3- All the chips except 21 had a Rmax of 1.3 μm or less, but Sample 3-21 had a Rmax of 1.9 μm. Therefore, when polishing the surface roughness of the outermost layer of sample 3-21 with the # 1500 diamond paste in the vicinity of the edge of the edge of the cutting edge, the surface roughness after polishing was measured by the same method. It was 0.52 μm. As a result of a cutting test using the polished tip under the same cutting conditions, the tool life was 28 min. This is considered to be because the unevenness of the portion in contact with the work material in the vicinity of the edge of the edge of the cutting edge is reduced and the cutting resistance is lowered. In addition, when the surface roughness was measured in the same manner for Sample 3-3, the Rmax was 0.78 μm, but when the edge was polished and cut again in the same manner as above, the machining time was 51 min, which was greatly improved. It was.

JIS規格K10の超硬合金からなる外径8mmのドリル基材を複数用意し、実施例1と同様の方法により、各基材上にそれぞれ被覆層を形成して、被覆層を具えるドリルを得た。被覆層のうち、内層は試験例1と同様とし、最外層は試料1-1と同様のものとした。また、従来品として、PVD法による最外層を具えていない試料1-5(CVD法による被覆層のみを具える)と同様のものを用意した。これら被覆層を具えるドリルを用いてSCM440(HRC30)の穴開け加工を行い、工具寿命を評価してみた。 Prepare a plurality of drill base materials made of cemented carbide of JIS standard K10 with an outer diameter of 8 mm, and form a coating layer on each base material in the same manner as in Example 1, and then drill with a coating layer. Obtained. Of the coating layers, the inner layer was the same as in Test Example 1, and the outermost layer was the same as Sample 1-1. In addition, as a conventional product, a sample similar to Sample 1-5 (comprising only a coating layer formed by the CVD method) having no outermost layer formed by the PVD method was prepared. Perform drilling of SCM440 (H R C30) using a drill comprising these coating layers, tried to evaluate the tool lifetime.

切削条件は、切削速度90m/min、送り量0.2mm/rev.、切削油は用いず(エアブローを使用)、深さ24mmの止まり穴加工とした。工具寿命の判定は、被削材の寸法精度が規定の範囲を外れた時点とし、評価は、寿命となるまでの穴開け個数で行った。その結果、試料1-1と同様の被覆層を具えるドリルは、6,500穴加工できたが、試料1-5と同様の被覆層を具えるドリルは、610穴しか加工できなかった。このことから、本発明は、ドライ加工であっても、工具寿命を大きく向上していることが確認された。   Cutting conditions were a cutting speed of 90 m / min, a feed rate of 0.2 mm / rev., No cutting oil (using air blow), and a blind hole with a depth of 24 mm. The tool life was determined when the dimensional accuracy of the work material was out of the specified range, and the evaluation was performed based on the number of holes drilled until the life reached. As a result, the drill having the same coating layer as Sample 1-1 was able to machine 6,500 holes, but the drill having the same coating layer as Sample 1-5 could only process 610 holes. From this, it was confirmed that the present invention greatly improved the tool life even in the dry processing.

JIS規格K10の超硬合金からなる外径8mmの6枚刃エンドミル基材を複数用意し、実施例1と同様の方法により、各基材上にそれぞれ被覆層を形成して、被覆層を具えるエンドミルを得た。被覆層のうち、内層は試験例1と同様とし、最外層は試料1-2と同様のものとした。また、従来品として、PVD法による最外層を具えていない試料1-5(CVD法による被覆層のみを具える)と同様のものを用意した。これら被覆層を具えるエンドミルを用いてSKD11(HRC60)のエンドミル側面削り加工を行い、工具寿命を評価してみた。 Prepare multiple 6-blade end mill bases made of JIS standard K10 cemented carbide with an outer diameter of 8 mm, and form coating layers on each base in the same manner as in Example 1 to provide coating layers. An end mill was obtained. Of the coating layers, the inner layer was the same as in Test Example 1, and the outermost layer was the same as Sample 1-2. In addition, as a conventional product, a sample similar to Sample 1-5 (comprising only a coating layer formed by the CVD method) having no outermost layer formed by the PVD method was prepared. Using an end mill with these coating layers, SKD11 (H R C60) end mill side milling was performed and the tool life was evaluated.

切削条件は、切削速度200m/min、送り0.03mm/刃、切込み量Ad=12mm;Rd=0.2mm、切削油は用いず(エアブローを使用)とした。工具寿命の判定は、被削材の寸法精度が規定の範囲を外れた時点とし、評価は、寿命となるまでの加工長で行った。その結果、試料1-2と同様の被覆層を具えるエンドミルは、195m切削できたが、試料1-5と同様の被覆層を具えるエンドミルは、15mしか加工できなかった。このことから、本発明は、ドライ加工であっても、工具寿命を大きく向上していることが確認された。   Cutting conditions were a cutting speed of 200 m / min, a feed of 0.03 mm / blade, a cutting amount Ad = 12 mm; Rd = 0.2 mm, and no cutting oil (using air blow). The tool life was determined when the dimensional accuracy of the work material was outside the specified range, and the evaluation was performed based on the machining length until the end of the life. As a result, the end mill having the same coating layer as Sample 1-2 could cut 195 m, but the end mill having the same coating layer as Sample 1-5 could only process 15 m. From this, it was confirmed that the present invention greatly improved the tool life even in the dry processing.

基材にcBN焼結体を用いた切削チップ基材を作製し、この切削チップ基材に被覆層を形成して切削加工を行い、工具寿命を評価してみた。cBN焼結体は、超硬合金製ポット及びボールを用いて、質量%でTiN:40%、Al:10%からなる結合材粉末と平均粒径2.5μmのcBN粉末:50%とを混ぜ合わせ、超硬合金製容器に充填し、圧力5GPa、温度1400℃で60分焼結することで得た。このcBN焼結体を加工して、ISO規格SNGN120408の形状の切削チップ基材を得た。このようなチップ基材を複数用意した。そして、実施例1と同様の方法により各チップ基材上にそれぞれ被覆層を形成して、被覆層を具える切削チップを得た。被覆層は、実施例として、試料3-1と同様の被覆層を具える試料、従来品として、PVD法による最外層を具えていない試料1-5(CVD法による被覆層のみを具える)と同様の被覆層を具えるものを用意した。これら被覆層を具える切削チップを用いて、SCM415の丸棒(HRC62)の外周切削加工を行い、工具寿命を評価してみた。 A cutting chip base material using a cBN sintered body as a base material was prepared, and a cutting layer was formed on the cutting chip base material, and cutting was performed to evaluate the tool life. The cBN sintered body is made of cemented carbide pot and ball, and mixed with a binder powder consisting of 40% TiN: 10% by mass and 50% cBN powder with an average particle size of 2.5μm. It was obtained by filling a cemented carbide container and sintering at a pressure of 5 GPa and a temperature of 1400 ° C. for 60 minutes. This cBN sintered body was processed to obtain a cutting tip base material having the shape of ISO standard SNGN120408. A plurality of such chip base materials were prepared. Then, a coating layer was formed on each chip substrate by the same method as in Example 1 to obtain a cutting chip having the coating layer. As an example, the coating layer is a sample having a coating layer similar to that of Sample 3-1, and, as a conventional product, Sample 1-5 having no outermost layer by PVD method (only having a coating layer by CVD method) The thing provided with the same coating layer was prepared. Using a cutting tip comprising these coating layers, subjected to peripheral cutting machining of round bar of SCM415 (H R C62), tried to evaluate the tool lifetime.

切削条件は、切削速度160m/min、切込み0.1mm、送り0.08mm/rev.、切削油は用いずとした。工具寿命の判定は、被削材の面粗さがRzで3.2μmとなる時点とし、評価は、寿命となるまでの切削時間で行った。なお、上記切削条件にて1分間切削後の被削材の面粗さRzを初期面粗度とした。面粗さRzは、JIS B0601に定められた10点平均粗さである。その結果、試料3-1と同様の被覆層を具える切削チップは、初期面粗度がRzで1.2μmであり、Rzで3.2μmとなるまでに80分加工できたのに対して、試料1-5と同様の被覆層を具える切削チップは、初期面粗度がRzで3.4μmであり、Rzで3.2μmとなるまでに7分しか加工できなかった。このことから、本発明は、ドライ加工であっても、工具寿命を大きく向上していることが確認された。   Cutting conditions were a cutting speed of 160 m / min, a cutting depth of 0.1 mm, a feed of 0.08 mm / rev., And no cutting oil. Judgment of the tool life was made when the surface roughness of the work material reached 3.2 μm in Rz, and the evaluation was performed based on the cutting time until the life reached. The surface roughness Rz of the work material after cutting for 1 minute under the above cutting conditions was defined as the initial surface roughness. The surface roughness Rz is a 10-point average roughness defined in JIS B0601. As a result, the cutting tip having the same coating layer as Sample 3-1 had an initial surface roughness of 1.2 μm in Rz and could be processed for 80 minutes until it reached 3.2 μm in Rz. The cutting tip having the same coating layer as 1-5 had an initial surface roughness Rz of 3.4 μm and could only be processed for 7 minutes before reaching Rz of 3.2 μm. From this, it was confirmed that the present invention greatly improved the tool life even in the dry processing.

グレードがJIS規格P10の超硬合金からなり、チップ形状:ISO規格のSNMG120408の切削チップ基材を複数用意し、実施例1と同様の方法により、各基材上にそれぞれ被覆層を形成して、被覆層を具える切削チップを得た。被覆層のうち、内層は試験例1と同様とし、最外層は試料1-3と同様のものとした。また、従来品として、PVD法による最外層を具えていない試料1-5(CVD法による被覆層のみを具える)と同様のものを用意した。これら被覆層を具える切削チップを用いてSCM415の丸棒の外周切削加工を行い、被削材の面品位を調べてみた。   The grade is made of cemented carbide of JIS standard P10, and chip shape: Prepare multiple cutting chip base materials of SNMG120408 of ISO standard, and form coating layers on each base material in the same way as in Example 1. A cutting tip having a coating layer was obtained. Of the coating layers, the inner layer was the same as in Test Example 1, and the outermost layer was the same as in Sample 1-3. In addition, as a conventional product, a sample similar to Sample 1-5 (comprising only a coating layer formed by the CVD method) having no outermost layer formed by the PVD method was prepared. Using a cutting tip having these coating layers, the outer periphery of a round bar of SCM415 was cut and the surface quality of the work material was examined.

切削条件は、切削速度100m/min、切込み2mm、送り0.3mm/rev.、切削時間20分間、切削油使用とした。その結果、試料1-3と同様の被覆層を具える切削チップで切削加工を行った被削材は、虹色の光沢があったが、試料1-5と同様の被覆層を具える切削チップで切削加工を行った被削材は、仕上げ面が白濁し、全く光沢がなくなっていた。このことから、最外層に窒化系アルミニウム膜を具えることで、膜表面の潤滑性が寄与して刃先のチッピングが抑制されると共に、構成刃先の生成も抑制されて切れ味が維持できるため、仕上げ面品位が格段に向上することが確認できた。   Cutting conditions were a cutting speed of 100 m / min, a cutting depth of 2 mm, a feed of 0.3 mm / rev., A cutting time of 20 minutes, and a cutting oil used. As a result, the work material cut with the cutting tip having the same coating layer as Sample 1-3 had a iridescent gloss, but the cutting material having the same coating layer as Sample 1-5 was used. The work material that had been cut with the insert had a white finish and had no gloss. Therefore, by providing a nitride-based aluminum film in the outermost layer, the lubricity of the film surface contributes and the chipping of the cutting edge is suppressed, and the generation of the constituent cutting edge is also suppressed and the sharpness can be maintained. It was confirmed that the surface quality was remarkably improved.

本発明表面被覆切削工具は、特に、ドライ加工や、高速、高送り加工などといった刃先温度が高温となるような切削条件での切削加工に適する。   The surface-coated cutting tool of the present invention is particularly suitable for cutting under cutting conditions such as dry machining, high speed, high feed machining, and the like where the cutting edge temperature is high.

切削工具の典型的な刃先部分の構造を示す断面模式図であり、(A)は、切削前の状態、(B)〜(D)は、理想的な摩耗が行われている場合の切削初期、切削中期、切削後期をそれぞれ示し、(E)は、従来の切削工具において切削初期の摩耗状態を示す。It is a cross-sectional schematic diagram showing the structure of a typical cutting edge part of a cutting tool, (A) is the state before cutting, (B) ~ (D) is the initial stage of cutting when ideal wear is performed , The middle stage of cutting and the latter stage of cutting are shown, respectively, and (E) shows the wear state at the beginning of cutting in the conventional cutting tool.

符号の説明Explanation of symbols

10 基材 11 逃げ面 12 すくい面 13 露出部分 20 被覆膜   10 Substrate 11 Flank 12 Rake face 13 Exposed part 20 Coating film

Claims (10)

基材表面に被覆層を具える表面被覆切削工具において、
前記被覆層は、基材上に化学的蒸着法にて形成される内層と、この内層上に物理的蒸着法にて形成される最外層とからなり、
前記内層は、
アスペクト比3以上の柱状組織を有し、結晶の(220)面、(311)面、(422)面の各配向性指数TC(220)、TC(311)、TC(422)のいずれかが配向性指数の最大値をとるTiCNからなるチタン含有層を具え、
前記最外層は、
Alの窒化物、炭窒化物、窒酸化物、炭窒酸化物から選ばれるいずれかのアルミニウム化合物からなることを特徴とする表面被覆切削工具。
In a surface-coated cutting tool having a coating layer on the substrate surface,
The coating layer comprises an inner layer formed by chemical vapor deposition on the substrate and an outermost layer formed by physical vapor deposition on the inner layer,
The inner layer is
It has a columnar structure with an aspect ratio of 3 or more, and any one of the orientation indices TC (220), TC (311), and TC (422) of the (220) plane, (311) plane, and (422) plane of the crystal is It has a titanium-containing layer made of TiCN that takes the maximum value of the orientation index,
The outermost layer is
A surface-coated cutting tool comprising an aluminum compound selected from Al nitride, carbonitride, nitrogen oxide, and carbonitride.
最外層には、B、F、Mg、Si、Ca、V、Cr、Zn、Zr、Tiから選ばれる1種以上の付加元素が含まれ、
前記付加元素の含有量は、Alと付加元素とで100原子%として、0超10原子%未満であることを特徴とする請求項1に記載の表面被覆切削工具。
The outermost layer contains one or more additional elements selected from B, F, Mg, Si, Ca, V, Cr, Zn, Zr, Ti,
2. The surface-coated cutting tool according to claim 1, wherein the content of the additional element is more than 0 and less than 10 atomic% when Al and the additional element are 100 atomic%.
最外層には、塩素が含まれないことを特徴とする請求項1又は2に記載の表面被覆切削工具。   3. The surface-coated cutting tool according to claim 1, wherein the outermost layer does not contain chlorine. 更に、内層には、周期律表IVa、Va、VIa族金属、Al、Si、Bから選ばれる1種以上の第一元素と、B、C、N、Oから選ばれる1種以上の第二元素とからなる化合物層を具えることを特徴とする請求項1〜3のいずれかに記載の表面被覆切削工具。
但し、化合物層は、チタン含有層と異なる層とする。また、第一元素がBのみの場合、第二元素は、B以外とする。
Further, the inner layer includes one or more first elements selected from periodic table IVa, Va, VIa group metals, Al, Si, and B, and one or more second elements selected from B, C, N, and O. 4. The surface-coated cutting tool according to claim 1, further comprising a compound layer made of an element.
However, the compound layer is a layer different from the titanium-containing layer. When the first element is only B, the second element is other than B.
最外層の膜厚は、内層の合計膜厚の1/2以下であることを特徴とする請求項1〜4のいずれかに記載の表面被覆切削工具。   5. The surface-coated cutting tool according to claim 1, wherein the film thickness of the outermost layer is 1/2 or less of the total film thickness of the inner layer. 最外層の膜厚は、0.03μm以上10μm以下、被覆層全体の膜厚は、0.1μm以上30μm以下であることを特徴とする請求項1〜5のいずれかに記載の表面被覆切削工具。   6. The surface-coated cutting tool according to claim 1, wherein a film thickness of the outermost layer is 0.03 μm or more and 10 μm or less, and a film thickness of the entire coating layer is 0.1 μm or more and 30 μm or less. 最外層において、刃先稜線部分近傍で被削材と接触する箇所の面粗さが、切削工具断面から観察する方法で測定される5μmに対してRmaxで1.3μm以下であることを特徴とする請求項1〜6のいずれかに記載の表面被覆切削工具。   In the outermost layer, the surface roughness of the portion in contact with the work material in the vicinity of the edge portion of the cutting edge is 1.3 μm or less in Rmax with respect to 5 μm measured by a method of observing from the cutting tool cross section. Item 7. A surface-coated cutting tool according to any one of Items 1 to 6. 基材は、WC基超硬合金、サーメット、高速度鋼、セラミックス、立方晶型窒化硼素焼結体、ダイヤモンド焼結体、窒化ケイ素焼結体、及び酸化アルミニウムと炭化チタンとを含む焼結体のいずれかから構成されることを特徴とする請求項1〜7のいずれかに記載の表面被覆切削工具。   The base material is a WC base cemented carbide, cermet, high speed steel, ceramics, cubic boron nitride sintered body, diamond sintered body, silicon nitride sintered body, and sintered body containing aluminum oxide and titanium carbide. The surface-coated cutting tool according to any one of claims 1 to 7, wherein the surface-coated cutting tool is formed of any one of the following. 表面被覆切削工具は、ドリル、エンドミル、フライス加工用刃先交換型チップ、旋削用刃先交換型チップ、メタルソー、歯切工具、リーマ及びタップのいずれかであることを特徴とする請求項1〜8のいずれかに記載の表面被覆切削工具。   The surface-coated cutting tool is any one of a drill, an end mill, a milling blade tip, a turning tip, a metal saw, a cutting tool, a reamer, and a tap. The surface coating cutting tool in any one. 物理的蒸着法がアーク式イオンプレーティング法、又はマグネトロンスパッタ法であることを特徴とする請求項1〜9のいずれかに記載の表面被覆切削工具。   The surface-coated cutting tool according to any one of claims 1 to 9, wherein the physical vapor deposition method is an arc ion plating method or a magnetron sputtering method.
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Cited By (13)

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JP2008006550A (en) * 2006-06-29 2008-01-17 Mitsubishi Materials Corp Surface-coated cutting tool whose hard coating layer exhibits excellent wear resistance in high-speed cutting
JP2010115740A (en) * 2008-11-12 2010-05-27 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
JP2010115739A (en) * 2008-11-12 2010-05-27 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
WO2011077928A1 (en) 2009-12-21 2011-06-30 住友電工ハードメタル株式会社 Surface-coated cutting tool
WO2011077929A1 (en) 2009-12-21 2011-06-30 住友電工ハードメタル株式会社 Surface-coated cutting tool
JP2011167784A (en) * 2010-02-17 2011-09-01 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
WO2012126030A1 (en) * 2011-03-18 2012-09-27 Boehlerit Gmbh & Co. Kg. Coated body and method for the production thereof
WO2012144088A1 (en) * 2011-04-21 2012-10-26 住友電工ハードメタル株式会社 Surface-coated cutting tool and method for manufacturing same
JP2013252607A (en) * 2013-07-18 2013-12-19 Sumitomo Electric Ind Ltd Surface coating cutting tool
US8741428B2 (en) 2011-04-21 2014-06-03 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and manufacturing method thereof
JP2015182207A (en) * 2014-03-26 2015-10-22 三菱マテリアル株式会社 surface-coated cutting tool
US20180112308A1 (en) * 2016-10-21 2018-04-26 Tungaloy Corporation Coated cutting tool
US10612133B2 (en) * 2016-10-19 2020-04-07 Tungaloy Corporation Coated cutting tool

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008006550A (en) * 2006-06-29 2008-01-17 Mitsubishi Materials Corp Surface-coated cutting tool whose hard coating layer exhibits excellent wear resistance in high-speed cutting
JP2010115740A (en) * 2008-11-12 2010-05-27 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
JP2010115739A (en) * 2008-11-12 2010-05-27 Sumitomo Electric Hardmetal Corp Surface-coated cutting tool
US8685531B2 (en) 2009-12-21 2014-04-01 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
WO2011077928A1 (en) 2009-12-21 2011-06-30 住友電工ハードメタル株式会社 Surface-coated cutting tool
WO2011077929A1 (en) 2009-12-21 2011-06-30 住友電工ハードメタル株式会社 Surface-coated cutting tool
US8685530B2 (en) 2009-12-21 2014-04-01 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
JP2011167784A (en) * 2010-02-17 2011-09-01 Sumitomo Electric Hardmetal Corp Surface coated cutting tool
WO2012126030A1 (en) * 2011-03-18 2012-09-27 Boehlerit Gmbh & Co. Kg. Coated body and method for the production thereof
CN102858483A (en) * 2011-04-21 2013-01-02 住友电工硬质合金株式会社 Surface-coated cutting tool and method for manufacturing same
WO2012144088A1 (en) * 2011-04-21 2012-10-26 住友電工ハードメタル株式会社 Surface-coated cutting tool and method for manufacturing same
US8741428B2 (en) 2011-04-21 2014-06-03 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool and manufacturing method thereof
JP5884138B2 (en) * 2011-04-21 2016-03-15 住友電工ハードメタル株式会社 Surface-coated cutting tool and manufacturing method thereof
JP2013252607A (en) * 2013-07-18 2013-12-19 Sumitomo Electric Ind Ltd Surface coating cutting tool
JP2015182207A (en) * 2014-03-26 2015-10-22 三菱マテリアル株式会社 surface-coated cutting tool
US10612133B2 (en) * 2016-10-19 2020-04-07 Tungaloy Corporation Coated cutting tool
US20180112308A1 (en) * 2016-10-21 2018-04-26 Tungaloy Corporation Coated cutting tool
US10612134B2 (en) * 2016-10-21 2020-04-07 Tungaloy Corporation Coated cutting tool

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