JP2005281509A - Curable resin composition and metal base circuit board using the same - Google Patents
Curable resin composition and metal base circuit board using the same Download PDFInfo
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- JP2005281509A JP2005281509A JP2004097754A JP2004097754A JP2005281509A JP 2005281509 A JP2005281509 A JP 2005281509A JP 2004097754 A JP2004097754 A JP 2004097754A JP 2004097754 A JP2004097754 A JP 2004097754A JP 2005281509 A JP2005281509 A JP 2005281509A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 40
- 239000002184 metal Substances 0.000 title claims abstract description 40
- 239000011342 resin composition Substances 0.000 title claims abstract description 15
- 239000011256 inorganic filler Substances 0.000 claims abstract description 13
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 13
- 229920002050 silicone resin Polymers 0.000 claims abstract description 10
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 9
- 238000007259 addition reaction Methods 0.000 claims abstract description 7
- 239000004840 adhesive resin Substances 0.000 claims abstract description 7
- 229920006223 adhesive resin Polymers 0.000 claims abstract description 7
- 238000003860 storage Methods 0.000 claims abstract description 7
- 239000001257 hydrogen Substances 0.000 claims abstract description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 5
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 claims abstract description 5
- 229910000679 solder Inorganic materials 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000001816 cooling Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 abstract description 3
- 230000005856 abnormality Effects 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000001404 mediated effect Effects 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- 239000011889 copper foil Substances 0.000 description 13
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 239000010410 layer Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 9
- 239000003795 chemical substances by application Substances 0.000 description 8
- 239000011888 foil Substances 0.000 description 8
- 238000009413 insulation Methods 0.000 description 8
- 239000000203 mixture Substances 0.000 description 8
- 229920000647 polyepoxide Polymers 0.000 description 8
- 230000035882 stress Effects 0.000 description 8
- 239000004020 conductor Substances 0.000 description 7
- 230000017525 heat dissipation Effects 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- OTARVPUIYXHRRB-UHFFFAOYSA-N diethoxy-methyl-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CCO[Si](C)(OCC)CCCOCC1CO1 OTARVPUIYXHRRB-UHFFFAOYSA-N 0.000 description 3
- 238000010292 electrical insulation Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000009477 glass transition Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008646 thermal stress Effects 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229920000800 acrylic rubber Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical class C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- BXKDSDJJOVIHMX-UHFFFAOYSA-N edrophonium chloride Chemical compound [Cl-].CC[N+](C)(C)C1=CC=CC(O)=C1 BXKDSDJJOVIHMX-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000004073 vulcanization Methods 0.000 description 1
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- Compositions Of Macromolecular Compounds (AREA)
- Insulated Metal Substrates For Printed Circuits (AREA)
Abstract
Description
本発明は、応力緩和性に優れ、しかも絶縁信頼性及び放熱性に優れた金属ベ−ス回路基板とそれを提供する硬化性樹脂組成物に関する。 The present invention relates to a metal-based circuit board excellent in stress relaxation properties and excellent in insulation reliability and heat dissipation and a curable resin composition providing the same.
金属板上に無機充填剤を配合したエポキシ樹脂等の樹脂からなる絶縁層を設け、その上に導電回路を配設した金属ベース回路基板が、熱放散性に優れることから高発熱性電子部品を実装する回路基板として用いられている。 A metal base circuit board that has an insulating layer made of epoxy resin or other resin compounded with an inorganic filler on a metal plate, and a conductive circuit on the insulating layer has excellent heat dissipation. Used as a circuit board for mounting.
一方、車載用電子機器について、その小型化、省スペ−ス化と共に電子機器をエンジンル−ム内に設置することが要望されている。エンジンル−ム内は温度が高く、温度変化が大きいなど過酷な環境であり、また、放熱面積の大きな基板が必要とされる。このような用途に対して、より一層放熱性に優れる金属ベ−ス回路基板が注目されている。 On the other hand, with respect to in-vehicle electronic devices, it is desired to install the electronic devices in the engine room together with downsizing and space saving. The engine room has a severe environment such as a high temperature and a large temperature change, and a substrate having a large heat radiation area is required. For such applications, a metal-based circuit board that is further excellent in heat dissipation has attracted attention.
従来の金属ベ−ス回路基板は、熱放散性や経済的な理由からアルミニウム板を用いることが多いが、実使用下で加熱/冷却が繰り返されると、前記アルミニウム板と電子部品、特にチップ部品との熱膨張率の差に起因して大きな熱応力が発生し、部品を固定している半田部分或いはその近傍にクラックが発生するなど電気的信頼性が低下するという問題点がある。 Conventional metal-based circuit boards often use aluminum plates for heat dissipation and economical reasons. However, when heating / cooling is repeated under actual use, the aluminum plates and electronic components, particularly chip components, are used. A large thermal stress is generated due to the difference in thermal expansion coefficient with respect to the solder, and there is a problem that the electrical reliability is lowered, for example, a crack is generated in the solder portion where the component is fixed or in the vicinity thereof.
このような点を改良するためには、絶縁層を熱伝導性が高く、低弾性率にして、さらに高レベルの耐熱性、耐湿性を有することが必要である。このような目的のために、たとえば特許文献1には反応性アクリルゴムで低弾性率化した組成物が開示されているが、−40℃、125℃でのヒートサイクル性は未だ十分ではない。
また従来のエポキシ樹脂ではガラス転移点が存在し、その近辺での貯蔵弾性率の変化は顕著であり、熱応力の吸収という意味から不十分であった。 Further, the conventional epoxy resin has a glass transition point, and the change in the storage elastic modulus in the vicinity thereof is remarkable, which is insufficient from the viewpoint of absorbing thermal stress.
ヒートサイクル試験条件下で、ガラス転移点の無い樹脂として、シリコーン樹脂が挙げられるが、従来、接着性の悪さ、充填性の悪さから優れたヒートサイクル性の潜在性をもちながら、実用的に用いられなかった。 Silicone resin can be used as a resin with no glass transition point under heat cycle test conditions, but it has been used practically while having the potential for excellent heat cycle due to poor adhesion and poor fillability. I couldn't.
本発明は、上記の事情に鑑みてなされたものであり、低弾性率であり、かつ接着性、耐熱性、耐湿性に優れる硬化性樹脂化合物を提供し、その結果として、金属板と導電回路との密着性に優れ、しかも応力緩和性にも優れ、急激な加熱/冷却を受けても半田或いはその近傍でのクラック発生等の異常を生じない、耐熱性、放熱性更に耐湿性に優れている金属ベ−ス回路基板を提供することを目的とするものである。 The present invention has been made in view of the above circumstances, and provides a curable resin compound having a low elastic modulus and excellent in adhesion, heat resistance, and moisture resistance. As a result, a metal plate and a conductive circuit are provided. It has excellent adhesion to the surface, and also has excellent stress relaxation properties, and does not cause abnormalities such as cracking in the solder or its vicinity even when subjected to rapid heating / cooling, excellent heat resistance, heat dissipation, and moisture resistance An object of the present invention is to provide a metal base circuit board.
本発明は、(1)付加反応型シリコーン樹脂からなる接着性樹脂、(2)シリコーンの骨格を有し、主鎖に少なくとも1個以上の活性シリル水素結合をもつ硬化促進剤、及び(3)無機充填剤からなることを特徴とする硬化性樹脂組成物である。 The present invention includes (1) an adhesive resin comprising an addition reaction type silicone resin, (2) a curing accelerator having a silicone skeleton and having at least one active silyl hydrogen bond in the main chain, and (3) A curable resin composition comprising an inorganic filler.
また、本発明は、前記樹脂組成物の硬化体であって、貯蔵弾性率が、−40℃で0.3GPa以下であり、かつ125℃で0.05GPa以上0.1GPa以下であることを特徴とする硬化体である。 Further, the present invention is a cured product of the resin composition, wherein the storage elastic modulus is 0.3 GPa or less at −40 ° C. and 0.05 GPa or more and 0.1 GPa or less at 125 ° C. This is a cured product.
更に、本発明は、金属板の少なくとも一主面に絶縁層を介して回路を設けてなる金属ベース回路基板において、前記絶縁層が請求項2記載の硬化体からなることを特徴とする金属ベース回路基板である。 Furthermore, the present invention provides a metal base circuit board in which a circuit is provided on at least one main surface of a metal plate via an insulating layer, wherein the insulating layer is made of the hardened body according to claim 2. It is a circuit board.
本発明の硬化性樹脂組成物は、その硬化体が応力緩和性に優れ、絶縁信頼性にも優れている特徴を有するので、これを用いた金属ベ−ス回路基板は、実使用条件下で受ける激しい温度変化によっても、チップを固定している半田部分にクラックを生じることがなく高信頼性の混成集積回路を提供することができる。 Since the curable resin composition of the present invention has the characteristics that the cured product has excellent stress relaxation properties and excellent insulation reliability, the metal base circuit board using the cured product is under actual use conditions. It is possible to provide a highly reliable hybrid integrated circuit without causing cracks in a solder portion to which a chip is fixed even by a severe temperature change.
加えて、本発明の硬化体は、無機充填剤を含有させていることで従来からの熱放散性が優れる点、耐電圧等の電気絶縁性に優れる点等が良好のままに維持されていながら、応力緩和性が改善されている特徴があり、それを用いた本発明の金属ベース回路基板は自動車のエンジンル−ム等過酷な環境でも使用することができ、産業上非常に有用である。 In addition, the cured product of the present invention contains an inorganic filler so that the conventional heat dissipating properties are excellent, while the excellent electrical insulation properties such as withstand voltage are maintained in good condition. The metal base circuit board of the present invention using the stress relaxation property can be used in a harsh environment such as an automobile engine room, and is very useful industrially.
本発明の硬化性樹脂組成物は、(1)付加反応型シリコーン樹脂からなる接着性樹脂、(2)シリコーンの骨格を有し、主鎖に少なくとも1個以上の活性シリル水素結合をもつ硬化促進剤、及び(3)無機充填剤からなることを特徴とする硬化性樹脂組成物である。 The curable resin composition of the present invention comprises (1) an adhesive resin composed of an addition reaction type silicone resin, and (2) a curing acceleration having a silicone skeleton and having at least one active silyl hydrogen bond in the main chain. And (3) a curable resin composition comprising an inorganic filler.
シリコーン樹脂としては、アルコール、酢酸が生ずる縮合タイプ等いろいろなものが知られているが、当該発明の適用分野である電気電子分野に於いては、ガスの発生によるプレス時の膨れ、酸による配線材料の腐食等の恐れがないことが理由で付加反応型の接着剤が好ましく選択される。 Various types of silicone resins are known, such as condensation types that produce alcohol and acetic acid. In the electrical and electronic field, which is the application field of the invention, swelling during pressing due to the generation of gas, wiring due to acid, etc. An addition reaction type adhesive is preferably selected because there is no fear of corrosion of the material.
付加反応型液状シリコーン樹脂の具体例としては、一分子中にビニル基とH−Si基の両方を有する一液性のシリコーン樹脂、末端あるいは側鎖にビニル基を有するオルガノポリシロキサンと、末端又は側鎖に2個以上のH−Si基を有するオルガノポリシロキサンと、の二液性のシリコーン樹脂等を挙げることができ、このような付加反応型液状シリコーン樹脂の市販品として、例えばGE東芝シリコーン社製、商品名「TSE3033、XE14−C0914」(以下「XE−14」と略する)等が例示できる。 Specific examples of the addition reaction type liquid silicone resin include one-part silicone resin having both a vinyl group and an H-Si group in one molecule, an organopolysiloxane having a vinyl group at the terminal or side chain, and a terminal or Two-part silicone resins such as organopolysiloxanes having two or more H-Si groups in the side chain can be mentioned. Commercial products of such addition reaction type liquid silicone resins include, for example, GE Toshiba Silicone. For example, trade names “TSE3033, XE14-C0914” (hereinafter abbreviated as “XE-14”) and the like can be exemplified.
また、本発明は、前記特定組成の接着性樹脂に特定組成の硬化促進剤を適用すること、更に無機充填剤を配合することを本質としている。即ち、硬化促進剤は、前記接着性樹脂の硬化を促進する働きを有すると共に、その種類と量により得られる硬化体の特性を大きく変えることができる。接着性樹脂の硬化体の柔軟性は、加硫によって形成される架橋密度に応じて変化するが、硬化促進剤はまさに前記架橋密度を制御出来る特徴がある。更に、硬化促進剤は、後述する無機充填剤の存在の下で、無機充填剤表面に一般的に存在している水酸基と反応することで、界面密着性を極めて高めることができるという効果をも有する。 In addition, the essence of the present invention is to apply a curing accelerator having a specific composition to the adhesive resin having the specific composition, and further blend an inorganic filler. That is, the curing accelerator has a function of accelerating the curing of the adhesive resin, and can greatly change the properties of the cured body obtained depending on the type and amount thereof. The flexibility of the cured body of the adhesive resin varies depending on the crosslink density formed by vulcanization, but the curing accelerator has a feature that can exactly control the crosslink density. Furthermore, the curing accelerator has the effect that the interfacial adhesion can be extremely enhanced by reacting with a hydroxyl group generally present on the surface of the inorganic filler in the presence of the inorganic filler described later. Have.
硬化促進剤としては、本発明者の検討結果に拠れば、シリコーン骨格を有し主鎖に少なくとも1個以上の活性シリル水素結合をもつ硬化促進剤が選択され、このようなものとして、例えば、GE東芝シリコーン社製、商品名「TC−25B」、東レダウコーニング社製商品名「RD−1」が挙げることができる。 As the curing accelerator, a curing accelerator having a silicone skeleton and having at least one active silyl hydrogen bond in the main chain is selected according to the results of the study of the present inventors. GE Toshiba Silicone, trade name “TC-25B”, Toray Dow Corning trade name “RD-1” can be mentioned.
本発明に用いることのできる無機充填剤は、電気絶縁性が良好で、しかも高熱伝導率のものが用いられる。このようなものとして酸化アルミニウム(Al2O3)、窒化アルミニウム(AlN)、窒化珪素(Si3N4)、窒化ホウ素(BN)、シリカ(SiO2)等があり、単独でも複合してでも用いることができる。これらのうち、酸化アルミニウムは粒子形状が球状で高充填可能なものが安価に、容易に入手できるという理由で好ましい。この例としては、電気化学工業株式会社製「DAW−10」、アドマテックス社製「AO−802」などが挙げられる。 As the inorganic filler that can be used in the present invention, those having good electrical insulation and high thermal conductivity are used. Such as aluminum oxide (Al 2 O 3 ), aluminum nitride (AlN), silicon nitride (Si 3 N 4 ), boron nitride (BN), silica (SiO 2 ), etc. Can be used. Of these, aluminum oxide is preferable because it can be easily obtained at a low cost because it has a spherical particle shape and can be highly filled. Examples of this include “DAW-10” manufactured by Denki Kagaku Kogyo Co., Ltd. and “AO-802” manufactured by Admatechs.
本発明の硬化性樹脂組成物の硬化体は、その好ましい実施態様において、−40℃での貯蔵弾性率が0.3GPa以下、好ましくは0.27GPa以下であり、125℃での貯蔵弾性率が0.05GPa以上0.1GPa以下、好ましくは0.07GPa以下0.06GPa以上である。 In a preferred embodiment, the cured product of the curable resin composition of the present invention has a storage elastic modulus at −40 ° C. of 0.3 GPa or less, preferably 0.27 GPa or less, and a storage elastic modulus at 125 ° C. It is 0.05 GPa or more and 0.1 GPa or less, preferably 0.07 GPa or less and 0.06 GPa or more.
本発明の硬化性樹脂組成物を金属ベース回路基板に適用する場合、硬化した後の絶縁層の厚さは、応力緩和性、放熱性、絶縁信頼性、生産性等を考慮して決められるが、通常は50〜150μm程度である。 When the curable resin composition of the present invention is applied to a metal base circuit board, the thickness of the insulating layer after curing is determined in consideration of stress relaxation, heat dissipation, insulation reliability, productivity, etc. Usually, it is about 50 to 150 μm.
金属ベース回路基板として使用する導体回路としては、銅、アルミニウム、ニッケル、鉄、錫、銀、チタニウムのいずれか、これらの金属を2種類以上含む合金、或いは前記金属又は合金を使用したクラッド箔等を用いることができる。尚、前記箔の製造方法は電解法でも圧延法で作製したものでもよく、箔上にはNiメッキ、Ni−Auメッキ、半田メッキなどの金属メッキがほどこされていてもかまわないが、絶縁接着層との接着性の点から導体回路の絶縁接着層に接する側の表面はエッチングやメッキ等により予め粗化処理されていることが一層好ましい。 As a conductor circuit used as a metal base circuit board, any of copper, aluminum, nickel, iron, tin, silver, titanium, an alloy containing two or more of these metals, or a clad foil using the metal or alloy, etc. Can be used. The foil manufacturing method may be an electrolytic method or a rolling method, and the foil may be plated with a metal such as Ni plating, Ni-Au plating, or solder plating. From the viewpoint of adhesion to the layer, the surface of the conductor circuit on the side in contact with the insulating adhesive layer is more preferably roughened in advance by etching, plating or the like.
金属ベース回路基板に用いられる金属板は、アルミニウム、鉄、銅およびそれらのものの合金、もしくはこれらのクラッド材等からなり、その厚みは特に規定するものではないが、熱放散性に富みしかも経済的であることから、厚み0.5〜5.0mmのアルミニウムが一般的に選択される。 The metal plate used for the metal base circuit board is made of aluminum, iron, copper and alloys thereof, or clad materials thereof, and the thickness of the metal plate is not particularly specified, but it is rich in heat dissipation and economical. Therefore, aluminum having a thickness of 0.5 to 5.0 mm is generally selected.
尚、本発明の金属ベース回路基板の製造方法に関しては、硬化性樹脂組成物に適宜消泡剤やレベリング剤等の添加剤を添加した絶縁材料を金属板及び/又は導体箔上に塗布し、導体箔又は金属板を張り合わせた後に十分に硬化させ、その後導体箔より回路形成する方法、或いは予め絶縁材料からなるシ−トを作製しておき、前記シートを介して金属板と導体箔を張り合わせ回路形成する方法、或いは前記方法に於いて導体箔に変えて予め回路形成されている導体回路を直接に用いる方法等の従来公知の方法で得ることができる。 In addition, regarding the manufacturing method of the metal base circuit board of the present invention, an insulating material obtained by appropriately adding an additive such as an antifoaming agent or a leveling agent to the curable resin composition is applied on the metal plate and / or the conductive foil, A method of forming a circuit from the conductor foil after the conductor foil or the metal plate is sufficiently cured, or a sheet made of an insulating material in advance, and attaching the metal plate and the conductor foil through the sheet It can be obtained by a conventionally known method such as a method of forming a circuit or a method of directly using a conductor circuit formed in advance in place of the conductor foil in the above method.
以下、実施例に基づき、本発明を更に詳細に説明する。 Hereinafter, based on an Example, this invention is demonstrated still in detail.
(実施例1)予め70μmの電解銅箔にXE−14のA剤B剤を等量混合し、張り合わせる面に薄く塗布し、ベンコットでふき取った。次に表1に示す配合で絶縁剤をハイブリッドミキサーで、混合し2mm厚のアルミニウム板に乾燥後70μmになるように塗布、80℃のオーブン中で20分乾燥させた。
銅箔を張り合わせ、真空プレスで、プレス圧30kg/cm2で、80℃30分、100℃30分、150℃60分の条件でプレスし、金属ベース回路基板用の基板を得た。尚、前記と同じ条件で硬化体を作成し、貯蔵弾性率を測定したところ、−40℃で0.27GPaであり、125℃で0.06GPaであった。 The copper foil was laminated and pressed by a vacuum press at a pressing pressure of 30 kg / cm 2 at 80 ° C. for 30 minutes, 100 ° C. for 30 minutes, and 150 ° C. for 60 minutes to obtain a substrate for a metal base circuit board. In addition, when the hardening body was created on the same conditions as the above and the storage elastic modulus was measured, it was 0.27 GPa at -40 degreeC, and was 0.06 GPa at 125 degreeC.
(実施例2)予め70μmの電解銅箔にXE−14のA剤B剤を等量混合し、張り合わせる面に薄く塗布し、ベンコットでふき取った。次に表2に示す配合で絶縁剤をハイブリッドミキサーで、混合し2mm厚のアルミニウム板に乾燥後50μmになるように塗布、80℃のオーブン中で20分乾燥させた。
銅箔を張り合わせ、真空プレスで、プレス圧30kg/cm2で、80℃30分、100℃30分、150℃60分の条件下でプレスし、金属ベース回路基板用の基板を得た。 Copper foils were bonded together and pressed by a vacuum press at a pressing pressure of 30 kg / cm 2 under conditions of 80 ° C. for 30 minutes, 100 ° C. for 30 minutes, and 150 ° C. for 60 minutes to obtain a substrate for a metal base circuit board.
(実施例3)予め70μmの電解銅箔を300℃で5分間加熱処理した。次に表3に示す配合で絶縁剤をハイブリッドミキサーで混合し、銅箔に乾燥後100μmになるように塗布、40℃の遠赤外炉中で20分乾燥させた。
絶縁層つき銅箔と2mm厚のアルミニウム板を張り合わせ、真空プレスで、プレス圧30kg/cm2で80℃30分、100℃30分、150℃60分の条件下で、プレスし金属ベース回路基板用の基板を得た。 A metal base circuit board is pressed by pressing a copper foil with an insulating layer and a 2 mm thick aluminum plate under a vacuum press at a pressing pressure of 30 kg / cm 2 at 80 ° C. for 30 minutes, 100 ° C. for 30 minutes, and 150 ° C. for 60 minutes. A substrate for was obtained.
(比較例1)予めアセトン洗浄した75μの銅箔に、表4に示す配合物を乾燥後100μmになるように塗布、80℃のオーブンで20分乾燥させた。以下は実施例1と同様にプレスし、金属ベース回路基板用の基板を得た。
(比較例2)エポキシ樹脂としてビスフェノールF型エポキシ樹脂(エピコート807、エポキシ当量=173、ジャパンエポキシレジン社製)100質量部、シランカップリング剤としてγ−グリシドキシプロピルメチルジエトキシシラン(AZ−6165、日本ユニカー株式会社製)5質量部、無機充填剤として平均粒径5μmのアルミナ(AS−50:昭和電工株式会社製)500質量部を、万能混合攪拌機で混合し、これに硬化剤としてポリオキシプロピレンアミン(ジェファーミンT−403、テキサコケミカル社製)25質量部、ポリオキシプロピレンアミン(ジェファーミンD2000、テキサコケミカル社製)20質量部を配合、混合した。 (Comparative Example 2) 100 parts by mass of bisphenol F type epoxy resin (Epicoat 807, epoxy equivalent = 173, manufactured by Japan Epoxy Resin Co., Ltd.) as an epoxy resin, and γ-glycidoxypropylmethyldiethoxysilane (AZ-) as a silane coupling agent 6165, manufactured by Nihon Unicar Co., Ltd.), 5 parts by mass, and 500 parts by mass of alumina (AS-50: manufactured by Showa Denko Co., Ltd.) having an average particle size of 5 μm as an inorganic filler were mixed with a universal mixing stirrer and used as a curing agent. 25 parts by mass of polyoxypropyleneamine (Jefamine T-403, manufactured by Texaco Chemical Co.) and 20 parts by mass of polyoxypropyleneamine (Jephamine D2000, manufactured by Texaco Chemical Co., Ltd.) were blended and mixed.
前記の混合物を厚さ2.0mmのアルミニウム板上に、硬化後の絶縁層の厚みが100μmになるように塗布し、Bステージ状態に予備硬化させ、ラミネーターで厚さ70μmの電解銅箔を張り合わせ、その後80℃×2時間、150℃×3時間のアフターキュアを行い、金属ベース回路基板用の基板を作製した。 The above mixture is applied onto an aluminum plate having a thickness of 2.0 mm so that the thickness of the insulating layer after curing is 100 μm, pre-cured to a B stage state, and an electrolytic copper foil having a thickness of 70 μm is pasted with a laminator. Then, after-cure at 80 ° C. × 2 hours and 150 ° C. × 3 hours was performed to produce a substrate for a metal base circuit board.
〔比較例3〕エポキシ樹脂として水添ビスフェノールA型エポキシ樹脂(YX8000、エポキシ当量=201、ジャパンエポキシレジン社製)116質量部、シランカップリング剤としてγ−グリシドキシプロピルメチルジエトキシシラン(AZ−6165、日本ユニカー株式会社製)5質量部、無機充填剤として平均粒径5μmのアルミナ(AS−50、昭和電工株式会社製)500質量部を、万能混合攪拌機で混合し、これに硬化剤としてポリオキシプロピレンアミン(ジェファーミンT−403、テキサコケミカル社製)25質量部、ポリオキシプロピレンアミン(ジェファーミンD2000、テキサコケミカル社製)20質量部を配合、混合した。 [Comparative Example 3] 116 parts by mass of hydrogenated bisphenol A type epoxy resin (YX8000, epoxy equivalent = 201, manufactured by Japan Epoxy Resin Co., Ltd.) as an epoxy resin, and γ-glycidoxypropylmethyldiethoxysilane (AZ) as a silane coupling agent -6165, manufactured by Nihon Unicar Co., Ltd.) 5 parts by mass, and 500 parts by mass of alumina (AS-50, Showa Denko Co., Ltd.) having an average particle size of 5 μm as an inorganic filler were mixed with a universal mixing stirrer, and a curing agent was mixed therewith. 25 parts by mass of polyoxypropyleneamine (Jefamine T-403, manufactured by Texaco Chemical Co., Ltd.) and 20 parts by mass of polyoxypropyleneamine (Jefamine D2000, manufactured by Texaco Chemical Co., Ltd.) were mixed and mixed.
前記の混合物を厚さ2.0mmのアルミニウム板上に、硬化後の絶縁層の厚みが100μmになるように塗布し、Bステージ状態に予備硬化させ、ラミネーターで厚さ70μmの電解銅箔を張り合わせ、その後80℃×2時間、150℃×3時間のアフターキュアを行い、金属ベース回路基板用の基板を作製した。 The above mixture is applied onto an aluminum plate having a thickness of 2.0 mm so that the thickness of the insulating layer after curing is 100 μm, pre-cured to a B stage state, and an electrolytic copper foil having a thickness of 70 μm is pasted with a laminator. Then, after-cure at 80 ° C. × 2 hours and 150 ° C. × 3 hours was performed to produce a substrate for a metal base circuit board.
前記の実施例、比較例で得た金属ベース回路基板用の基板について、銅箔をエッチングして、パッド部を有する所望の回路を形成して金属ベース回路基板とした。また、前記樹脂組成物を80℃×2時間、150℃×3時間の条件で硬化させて、厚さ約100μm、幅約3mm、長さ約50mmの硬化体の試験片を別途作製し、貯蔵弾性率の測定に供した。また、硬化体については、動的粘弾性測定器(レオメトリックス社製;RSAIII)を用い、周波数11Hz、昇温速度10℃/分の条件下、−50℃〜+150℃の温度範囲で貯蔵弾性率を測定した。これらの結果を表5に示した。なお、耐電圧等の測定条件については下記に示す通りである。
<耐電圧>温度121℃、相対湿度100%、気圧2026HPaのプレッシャークッカーテスターにて50及び100時間処理後と処理前の試験片を絶縁油中に浸漬し、室温で銅箔とアルミニウム板間に交流電圧を印加し、絶縁破壊する電圧を測定した。初期印加電圧は0.5kVであり、各電圧で30秒間保持した後、0.5kVずつ段階的に昇圧しカットオフ電流を2mAとする方法で印加した。 <Withstand voltage> The test piece after treatment for 50 and 100 hours in a pressure cooker tester at a temperature of 121 ° C., a relative humidity of 100% and an atmospheric pressure of 2026 HPa is immersed in insulating oil, and at room temperature between the copper foil and the aluminum plate. An AC voltage was applied, and the voltage at which dielectric breakdown occurred was measured. The initial applied voltage was 0.5 kV. After holding at each voltage for 30 seconds, the voltage was increased stepwise by 0.5 kV and applied with a cutoff current of 2 mA.
<絶縁抵抗>アドバンテスト絶縁抵抗計R8340により、印加電圧100Vにて測定した。 <Insulation resistance> It was measured at an applied voltage of 100 V with an Advantest insulation resistance meter R8340.
<熱伝導率>「月間セミコンダクターワールド臨時増刊号」第4巻第10号59ページ記載の方法で行った。 <Thermal conductivity> It was carried out by the method described in “Monthly Semiconductor World Special Issue” Vol. 4, No. 10, page 59.
<銅箔ピール強度測定方法> テンシロン(オリエンテック社製;型式UCT−1T)を用い、1cm幅で90°の方向に室温で50mm/分の速度で剥離した時の強度を求めた。 <Method for Measuring Copper Foil Peel Strength> Using Tensilon (Orientec Co., Ltd .; Model UCT-1T), the strength when peeled at a rate of 50 mm / min at room temperature in the direction of 90 ° with a width of 1 cm was determined.
<ヒ−トサイクル試験方法> パッド間にチップサイズ2.0mm×1.25mmのチップ抵抗を半田付けし、−40℃7分〜+125℃7分を1サイクルとして5000回のヒートサイクル試験を行なった後、顕微鏡で半田部分のクラックの有無を観察した。半田部分のクラックの発生が10%以上あるものは不良とし、半田クラックの発生が10%未満のものを良好と判定し、良好な状況が確認出来たヒートサイクル回数を求めた。 <Heat cycle test method> A chip resistor having a chip size of 2.0 mm x 1.25 mm is soldered between pads, and a heat cycle test is performed 5000 times with one cycle of -40 ° C 7 minutes to + 125 ° C 7 minutes. Thereafter, the presence or absence of cracks in the solder portion was observed with a microscope. Those having a crack occurrence of 10% or more in the solder portion were regarded as defective, those having a solder crack occurrence of less than 10% were judged good, and the number of heat cycles at which a good situation could be confirmed was determined.
本発明の硬化性樹脂組成物は、応力緩和性に優れ、絶縁信頼性にも優れている硬化体を与えるので、これを用いた本発明の金属ベ−ス回路基板は、実使用条件下で受ける激しい温度変化によっても、チップを固定している半田部分にクラックを生じることがなく高信頼性の混成集積回路を提供することができる。 Since the curable resin composition of the present invention provides a cured product having excellent stress relaxation properties and excellent insulation reliability, the metal base circuit board of the present invention using the same is used under actual use conditions. It is possible to provide a highly reliable hybrid integrated circuit without causing cracks in a solder portion to which a chip is fixed even by a severe temperature change.
加えて、本発明の硬化体は、無機充填剤を含有させていることで従来からの熱放散性が優れる点、耐電圧等の電気絶縁性に優れる点等が良好のままに維持されていながら、前記応力緩和性が改善されている特徴があり、それを用いた本発明の金属ベース回路基板は自動車のエンジンル−ム等過酷な環境でも使用することができ、産業上非常に有用である。 In addition, the cured product of the present invention contains an inorganic filler so that the conventional heat dissipating properties are excellent, while the excellent electrical insulation properties such as withstand voltage are maintained in good condition. The stress relaxation property is improved, and the metal base circuit board of the present invention using the stress relaxation property can be used in a harsh environment such as an automobile engine room, and is very useful in industry. .
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