JP2005276765A - Discharge lamp device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent fine powder from adhering to an irradiated body.
An internal electrode 12 including an internal feeding electrode 121 and a conductive anchor 122 is arranged in an axial direction inside a tubular lamp body 11 in which a discharge medium is sealed. A conductive holding member 4 that acts as an external electrode in which the accommodating portion 42 is formed is disposed on a part of the outer peripheral surface of the lamp body 11 so as to face the longitudinal direction of the lamp body 11. A contact member 5 that comes into contact with or non-contact with the lamp main body 11 is attached to the conductive holding member 4, and a suction hole 43 is provided in the accommodating portion 42 in the vicinity where the contact member 5 is installed. The suction pump 7 is attached to the suction hole 43.
[Selection] Figure 2

Description

  The present invention relates to a discharge lamp apparatus used for dry cleaning of liquid crystal substrates, surface modification of plastics, and the like.

Conventional discharge lamp devices used for dry cleaning have internal electrodes arranged in the axial direction inside the lamp body, surface contact with the outer peripheral surface, and conductive holding that acts as external electrodes for the internal electrodes of the lamp It is made up of a member, and is irradiated with ultraviolet rays from the side surface of the lamp main body where no conductive holding member exists by dielectric barrier discharge. (For example, Patent Document 1)
Japanese Patent Laid-Open No. 2003-197152 (5th page, FIGS. 1 and 2)

  In the discharge lamp device of the above-mentioned Patent Document 1, since the lamp body and the conductive holding member are arranged in surface contact, the lamp and the conductive holding member are expanded and contracted by turning on and off the lamp, Due to the difference in coefficient of thermal expansion, they rub against each other to generate fine powder, which adheres to the irradiated object that is the object of irradiation of the lamp, and contributes to the defective product of the irradiated object. It was.

  An object of the present invention is to provide a discharge lamp device that prevents fine powder from adhering to an irradiated body.

  In order to achieve the above object, a discharge lamp device according to the present invention includes a tubular or torus-shaped translucent lamp body in which a discharge medium is enclosed, and a substantially central axis or central space of the lamp body. An internal electrode provided in the axial direction of the lamp main body, and a housing portion that covers a part of the outer peripheral surface of the lamp main body and is disposed opposite to the longitudinal direction of the lamp main body, and is external to the internal electrode A conductive holding member that acts as an electrode; a contact member that is attached to the conductive holding member and is positioned in the housing portion and is in contact with or non-contact with the lamp body; and the contact of the conductive holding member A suction hole provided in the vicinity of the member and a suction means attached so as to communicate with the space in the suction hole.

  ADVANTAGE OF THE INVENTION According to this invention, it can prevent that fine powder adheres to a to-be-irradiated body.

(First embodiment)
Hereinafter, a backlight according to an embodiment of the present invention will be described with reference to the drawings.

  1 is an overall view of a discharge lamp device according to a first embodiment of the present invention, FIG. 2 is a cross-sectional view in the direction of AA ′ in FIG. 1, and FIG. 3 is in the direction of BB ′ in FIG. FIG. 4 is a cross-sectional view of FIG. 2 rotated 90 degrees.

  The lamp body 11 is made of, for example, quartz glass having ultraviolet transparency, and includes a long and narrow tubular portion and sealing portions that are formed at both ends (not shown). In FIG. 2, an internal electrode 12 including an internal power supply electrode 121 and a conductive anchor 122 is disposed in the lamp body 11 along the tube axis direction of the lamp, and the internal power supply electrode 121 is made of, for example, tungsten. The lamp body 11 is formed in a spiral shape and is arranged along the tube axis in the approximate center of the lamp body 11. The conductive anchor 122 is made of, for example, tungsten. One end of the conductive anchor 122 is connected so as to wrap around the internal power supply electrode 121, and the other end extends in a direction perpendicular to the internal power supply electrode 121 of the lamp body 11, and then is attached to the inner wall of the tube. It is formed in an arc shape along. A plurality of the conductive anchors 122 formed in the same manner are arranged at substantially the same pitch in the tube axis direction of the internal feeding electrode 121. In addition, xenon is enclosed in the lamp body 11 as an excimer production gas. In this excimer production gas, a rare gas such as argon or a halide may be mixed and sealed.

  A metal foil made of, for example, molybdenum is hermetically sealed inside the sealing portion of the lamp body 11, and an internal power supply electrode 121 disposed inside the lamp body 11 is sealed at one end, and the other end is sealed at the other end. An external lead wire extending from the stop to the outside is connected. As shown in FIG. 1, sockets 21 and 22 made of SUS made of alloy steel, for example, iron containing chromium or nickel, are attached to the outside of the sealing portion. The sockets 21 and 22 include cylindrical portions 211 and 221 that hold the sealing portions, and fastening portions 212 that fasten and fix the outer peripheral surface of the container 1 after the sealing portions are inserted deep into the cylindrical portions 211 and 221. 222.

  Hanging members 31 and 32 for hanging and supporting the lamp are provided on the outer peripheral surfaces of the sockets 21 and 22, and the hanging members 31 and 32 are socket support portions 311 and 321, a leaf spring portion 312. 322 and device attachment portions 313 and 323. One end of each of the socket support portions 311 and 321 is connected upright to the outer peripheral surface of the cylindrical portions 211 and 221, and the other end is connected to the leaf spring portions 312 and 322. The device mounting portions 313 and 323 are respectively connected to the leaf spring portions 312 and 322 opposite to the connection portions with the socket support portions 311 and 321 by screwing in the direction perpendicular to the socket support portions 311 and 321. ing.

  Here, of the sockets 21 and 22, the lead wire 33 provided to be electrically connected to the internal power supply electrode 121 inside the lamp body 11 is led out from the inside of the cylindrical portion 221 to the socket 22. The leaf spring portion 322 and the device attachment portion 323 are connected with the same screw. Therefore, since power is supplied to the inside via the lead wire 33, the socket support portion 321 is formed in the cylindrical shape of the socket 22 via the insulating member 34 so that no current flows toward the suspension member 32. The part 221 is supported.

  On the outer peripheral surface of the upper half of the lamp body 11, there is disposed a conductive holding member 4 made of, for example, aluminum that acts as an external electrode with respect to the internal power supply electrode 121 of the lamp body 11. Cooling holes 411 and 412 are formed in the longitudinal direction, and cooling water is supplied to cool the lamp body 11 that becomes high temperature by lighting. Further, the conductive holding member 4 is formed with an accommodating portion 42 having a semicircular arc-shaped cross section perpendicular to the longitudinal direction, and the contact member 5 is provided at a substantially middle portion of the accommodating portion 42 in the longitudinal direction. It is attached.

  The contact member and the suction hole will be described in detail with reference to FIGS. FIG. 5 is a perspective view of the contact member, and FIG. 6 is a perspective view of the contact member attached to the conductive holding member.

  The contact member 5 is made of, for example, SUS having a plate shape, and a groove is formed in the width direction by penetrating the plate surface in a semicircular shape. The groove is formed to be slightly larger than the diameter of the lamp body 11, and a convex portion 51 is formed along an arc at substantially the center in the thickness direction of the groove.

  A hole 421 having substantially the same size and the same shape as the contact member 5 is formed in the center in the longitudinal direction of the accommodating portion 42 and in the arc direction. After fitting the contact member 5 into the hole 421, a part is pressed and fixed by the umbrella-shaped portions of the screws 521 and 522 so that the contact member 5 does not come out in the direction of the lamp body 11.

  That is, as shown in FIGS. 3 and 4, when the lamp main body 11 is disposed in the accommodating portion 42 having these, the gap between the outer peripheral surface of the lamp main body 11 and the accommodating portion 42 is D, and the lamp main body 11 and the contact member The gap with respect to the five convex portions 51 is maintained by d, and the relationship of D> d is always satisfied.

  Thereby, depending on the shape of the lamp body 11, the contact member 5 is brought into contact or non-contact. That is, when the lamp body 11 has a shape close to a straight line, the lamp body 11 does not come into contact with the contact member 5, and when the lamp body 11 is bent, the lamp body 11 can be brought into contact with the contact member 5 so

  In addition, a suction hole 43 extends across the width direction of the contact member 5 at the deepest portion of the accommodating portion 42 of the conductive holding member 4 to which the contact member 5 is attached. It is provided penetrating in the opposite direction. A plurality of suction holes 43 are provided on the upper surface of a substantially intermediate portion in the longitudinal direction of the conductive holding member 4. When the plurality of suction holes 43 are provided, the suction holes 61 and the suction holes 43 are combined into one space and the number of suction means is reduced. A suction port 6 having a screw hole 62 formed on the extension line is attached so as to be inserted through the suction hole 43. In the screw hole 62, there is a suction pump 7 which is a suction means having a screw part 71 whose inside is screwed into the screw hole, a pipe part 72 for sucking fine powder, and a connection part 73 connecting them. It is connected.

Here, the area of the suction hole 43 is preferably 100 mm ² or less. The reason is that the change in the lamp surface temperature due to the air cooling effect of suction is reduced and the irradiation unevenness is reduced by not making the suction area too large. Further, by adjusting the suction force of the suction pump 7 so that the suction pressure taken from the suction hole 43 is 0.01 kPa or more, the generated fine powder can be reliably sucked.

  L-shaped holding members 81 and 82 made of, for example, SUS, for example, are attached to both sides in the longitudinal direction of the conductive holding member 4 by screwing, and part of the outer peripheral surfaces on the upper side of the sockets 21 and 22. Touching. The holding members 81 and 82 are attached as adjustment means for mainly holding the gap between the lamp main body 11 and the housing portion 42 constant in the longitudinal direction. As a result, the discharge distance between the lamp body 11 and the accommodating portion 42 becomes constant, and the distance between the lamp body 11 and the irradiated body can be kept constant, so that the irradiated body can be irradiated with uniform ultraviolet rays. become.

  Here, the contact portions of the sockets 21 and 22 and the holding members 81 and 82 may rub due to expansion and contraction due to heat, and fine powder may be generated. Therefore, by providing the suction means in the vicinity of the portion where the fine powder is generated, even if fine powder is generated, it is possible to prevent adhesion to the irradiated object.

  Lamp fixing members 91 and 92 are attached to both ends in the longitudinal direction on the conductive holding member 4 on the opposite side to the portion where the accommodating portion 42 is formed, and the lamp fixing members 91 and 92 are L-shaped support portions 911 and 921, arm portions 912 and 922 connected at right angles to the support portions 911 and 921, and fixing portions 913 and 923 attached near the ends opposite to the connection portions with the support portions 911 and 921 Become. The lamp main body 11 and the conductive holding member 4 can be connected by connecting the fixing portions 913 and 923 and the device attaching portions 313 and 323 by screws.

  Here, in order to supply electric power to the lead wire 33, a power supply terminal 93 is provided on the opposite side to which the fixing portion 923 of the arm portion 922 is connected. By supplying electric power to this, dielectric barrier discharge is started between the internal electrode 12 of the lamp body 11 and the conductive holding member 4 having the ground potential, and the wavelength of the excimer generation gas sealed inside is increased. Excimer light of 172 nm is irradiated.

  For example, even if the gap D between the lamp body 11 and the accommodating portion 42 is provided at about 0.3 mm, some of the lamp bodies 11 are bent or distorted to the extent of the gap. The main body 11 and the accommodating portion 42 come into contact with each other, and fine powder due to friction is generated. And it is difficult to specify this contact portion, and even if it can be specified, it is impossible to take a contact measure for each lamp having a different shape. Therefore, by providing the contact member 5, even if the lamp is bent, the lamp body 11 is provided on the convex portion 51 of the contact member 5, which is d smaller than the gap D with the housing portion 42. However, it is possible to prevent the lamp main body 11 and the accommodating portion 42 from being in contact with each other.

  In this embodiment, even when the lamp main body 11 and the accommodating portion 42 usually come into contact with each other due to the bent shape of the lamp main body 11, by specifying the contact location to the contact member 5, The portion of the contact member 5 can be brought into a non-contact state, and when fine powder is generated at the contact member 5 portion, the suction can be removed by suction with the suction pump 7 to prevent differential adhesion to the irradiated object. can do.

(Second Embodiment)
FIG. 7 is a cross-sectional view of the discharge lamp device according to the second embodiment of the present invention. About each part of this 2nd Embodiment, the same part as each part of the discharge lamp apparatus of 1st Embodiment is shown with the same code | symbol, and the description is abbreviate | omitted.

  In the second embodiment, the lamp body 11 ′ has a torus shape composed of an outer tube 111 and an inner tube 112 formed therein, that is, a cross-sectional shape perpendicular to the longitudinal direction has a donut shape. Yes. In the central space formed by the inner tube 112, the internal electrode 12 is disposed along the inner wall surface of the inner tube 112. By supplying power to the internal electrode 12, the same as in the first embodiment. In addition, dielectric barrier discharge occurs between the electrodes.

  Even in the discharge lamp device provided with the lamp body 11, when the lamp body 11 and the accommodating portion 42 come into contact with each other due to the bent shape of the outer tube 111 of the lamp body 11, the contact location is set as the contact member 5. If the fine powder generated at the contact portion is sucked by the suction pump 7, the powder can be removed and the fine powder can be prevented from adhering to the irradiated body.

  The present invention is not limited to the above-described embodiment, and may be modified as follows, for example.

  A plurality of suction holes 43 may be provided around the contact member 5, thereby further ensuring the suction of fine powder.

  The contact member 5 may be simply provided with a contact piece having a certain thickness by bonding or the like on a part of the groove surface of the accommodating portion 42. In this case, the contact member 5 can be easily obtained while having substantially the same effect as the contact member 5. Can be attached to.

  Moreover, since the contact member 5 and the lamp body 11 are fixed in contact with each other in advance, a gap corresponding to the thickness of the contact member 5 can be formed between the lamp body 11 and the accommodating portion 42. The member 5 can also be used as an adjustment means for forming a specific gap.

  Furthermore, a plurality of contact members 5 may be provided in the longitudinal direction of the conductive holding member 4. Thereby, for example, even when the lamp main body 11 to be used is wave-like or the length of the lamp is long, it becomes easy to come into contact with any one of the contact portions 5, and the lamp main body 11 and the housing portion 42 are in direct contact with each other. Can be prevented. Further, by adding the suction hole 43 and the suction pump 7 around these, the reliability of preventing generation of fine powder is further improved.

BRIEF DESCRIPTION OF THE DRAWINGS The whole figure explaining 1st Embodiment of the discharge lamp apparatus of this invention. Sectional drawing of the A-A 'direction of the discharge lamp apparatus of FIG. Sectional drawing of the B-B 'direction of the discharge lamp apparatus of FIG. Sectional drawing which rotated FIG. 2 90 degree | times. The perspective view of the contact member of FIG. The perspective view explaining the contact member and suction hole of the discharge lamp apparatus of FIG. Sectional drawing explaining 2nd Embodiment of the discharge lamp apparatus of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Lamp main body 12 Internal electrode 21, 22 Socket 31, 32 Suspension member 4 Conductive holding member 42 Housing part 43 Suction hole 5 Contact member 6 Suction port 7 Suction pump 81, 82 Holding member 91, 92 Lamp fixing member

Claims (1)

A tubular or torus-like translucent lamp body in which a discharge medium is enclosed;
An internal electrode provided in the axial direction of the lamp body in a substantially central axis or central space of the lamp body;
A conductive holding member that covers a part of the outer peripheral surface of the lamp body and has a housing portion that is disposed opposite to the longitudinal direction of the lamp body, and that acts as an external electrode with respect to the internal electrode;
A contact member that is attached to the conductive holding member and located in the housing portion, and is in contact with or non-contact with the lamp body;
A suction hole provided near the contact member of the conductive holding member;
A discharge lamp device comprising: suction means attached so as to communicate with a space in the suction hole.

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