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JP2005268518A - Wiring board - Google Patents

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JP2005268518A
JP2005268518A JP2004078512A JP2004078512A JP2005268518A JP 2005268518 A JP2005268518 A JP 2005268518A JP 2004078512 A JP2004078512 A JP 2004078512A JP 2004078512 A JP2004078512 A JP 2004078512A JP 2005268518 A JP2005268518 A JP 2005268518A
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resin
metal
resin layer
circuit
wiring board
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Kenji Tanaka
賢治 田中
Kazumasa Takeuchi
一雅 竹内
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Resonac Corp
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Hitachi Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a wiring board wherein an interface between metal to be formed with a circuit and substrate resin is smoothed, thereby obtaining excellent micro-circuit formability or high frequency characteristic. <P>SOLUTION: The wiring board contains the metal to be formed with a circuit and the substrate resin, and contains a resin layer which differs from the substrate resin between the metal and the substrate resin. The resin layer contains an amide group of 4 mol% or more. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、回路を形成する金属と基材樹脂との界面に、基材と異なる樹脂層を含む配線板に関する。   The present invention relates to a wiring board including a resin layer different from a base material at an interface between a metal forming a circuit and the base material resin.

プリント配線板用積層板は、電気絶縁性樹脂組成物をマトリックスとするプリプレグを所定枚数重ね、加熱加圧して一体化したものである。プリント回路をサブトラクティブ法により形成する場合には、金属張積層板が用いられる。この金属張積層板は、プリプレグの表面(片面又は両面)に金属箔を重ねて加熱加圧することにより製造される。金属箔としては主に銅箔が用いられ、金属張積層板に使用される電気絶縁性樹脂としては、フェノール樹脂、エポキシ樹脂、ポリイミド樹脂、ビスマレイミド−トリアジン樹脂などのような熱硬化性樹脂が汎用され、フッ素樹脂やポリフェニレンエーテル樹脂などのような熱可塑性樹脂が用いられることもある。   The laminate for a printed wiring board is obtained by stacking a predetermined number of prepregs each having an electrically insulating resin composition as a matrix and then heating and pressing to integrate them. When a printed circuit is formed by a subtractive method, a metal-clad laminate is used. This metal-clad laminate is manufactured by stacking a metal foil on the surface (one side or both sides) of the prepreg and heating and pressing. Copper foil is mainly used as the metal foil, and thermosetting resins such as phenol resin, epoxy resin, polyimide resin, bismaleimide-triazine resin are used as the electrically insulating resin used for the metal-clad laminate. A thermoplastic resin such as a fluororesin or a polyphenylene ether resin is sometimes used.

プリント配線板において、パーソナルコンピュータや携帯電話等の情報端末機器の普及に伴い、小型化、高密度化が進んでいる。その実装形態はピン挿入型から表面実装型へさらにはプラスチック基板を使用したBGA(ボールグリッドアレイ)に代表されるエリアアレイ型へと進んでいる。BGAのようなベアチップを直接実装する基板ではチップと基板の接続は、熱超音波圧着によるワイヤボンディングで行うのが一般的である。このため、ベアチップを実装する基板は150℃以上の高温にさらされることになる。したがって、上記の電気絶縁性樹脂にはある程度の耐熱性が必要になる。   With the spread of information terminal devices such as personal computers and mobile phones, printed wiring boards are becoming smaller and higher in density. The mounting form has progressed from a pin insertion type to a surface mounting type and further to an area array type represented by BGA (ball grid array) using a plastic substrate. In a substrate on which a bare chip such as a BGA is directly mounted, the connection between the chip and the substrate is generally performed by wire bonding by thermosonic bonding. For this reason, the substrate on which the bare chip is mounted is exposed to a high temperature of 150 ° C. or higher. Therefore, a certain amount of heat resistance is required for the above-mentioned electrically insulating resin.

また、導体回路の形成には、一般的に金属箔の不要部分をエッチングによって除去するサブトラクティブ法や、薄層金属上にレジストを形成し、めっきにより導体形成を行うセミアディティブ法があるが(例えば、特許文献1)、いずれにせよ最終的には不要部分の金属を除去する工程が存在する。その際に、粗化面のアンカー部分が基材樹脂に残りやすく、エッチングに時間を要するばかりか、アンカー部分のエッチング残りによって回路のショートが発生したり、回路の上面と下面で回路幅の設計値からのズレが生じたりする。そのため、アンカー効果に頼らない、樹脂と導体回路との優れた接着が求められている。   In addition, the conductor circuit is generally formed by a subtractive method in which an unnecessary portion of a metal foil is removed by etching, or a semi-additive method in which a resist is formed on a thin metal layer and a conductor is formed by plating ( For example, Patent Document 1), in any case, there is a process of finally removing unnecessary metal. At that time, the anchor part of the roughened surface tends to remain on the base resin, and it takes time to etch, and the short circuit of the anchor part caused by etching or the circuit width design on the upper and lower surfaces of the circuit Deviation from the value may occur. Therefore, there is a demand for excellent adhesion between the resin and the conductor circuit without relying on the anchor effect.

さらに、導体中の電流の付近には磁力線が発生するが、導体の中心部ほど磁力線の干渉が大きいため、電流は周辺とコーナーに集中する。これを表皮効果と呼び、周波数が高いほどこの傾向は強まる。導体の表面が平滑であるほど表皮効果による抵抗の増加を抑えられると考えられるが、従来の電気絶縁性樹脂の接着は主に粗表面へのアンカー効果によるところが大きく信号の高周波化とは相反するものとなっている。そのため、信号の高周波化が進むことで、回路導体には表面平滑性が要求されている。   Furthermore, magnetic lines of force are generated in the vicinity of the current in the conductor, but since the interference of the lines of magnetic force is greater at the center of the conductor, the current is concentrated at the periphery and corners. This is called the skin effect, and this tendency increases as the frequency increases. It is thought that the smoother the surface of the conductor, the more the increase in resistance due to the skin effect can be suppressed, but the adhesion of the conventional electrically insulating resin is largely due to the anchor effect on the rough surface, which is contrary to the high frequency signal. It has become a thing. For this reason, surface smoothness is required for circuit conductors as signal frequency increases.

以上のことから、プリプレグに使用される絶縁樹脂に耐熱性が要求されるだけでなく、回路形成を施される金属箔と電気絶縁性樹脂との接着に従来以上の接着力が望まれるとともに、より細い配線を作製するために金属箔表面の平滑性、すなわち、粗化形状の微細化も要求されている。
特開平11−186716号公報
From the above, not only is the heat resistance required for the insulating resin used in the prepreg, but an adhesive force higher than conventional is desired for bonding between the metal foil subjected to circuit formation and the electrically insulating resin, In order to produce thinner wiring, smoothness of the surface of the metal foil, that is, refinement of the roughened shape is also required.
Japanese Patent Laid-Open No. 11-186716

本発明は、上記従来技術の問題点を解消し、耐熱性及び金属や基材との接着性に優れた基材樹脂と異なる樹脂層を、回路を形成する金属と基材樹脂の界面に含むことによって、微細回路形成性や高周波特性に優れた配線板の提供を実現するものである。   The present invention eliminates the above-mentioned problems of the prior art and includes a resin layer different from a base resin excellent in heat resistance and adhesion to a metal or base material at the interface between the metal forming the circuit and the base resin. Thus, it is possible to provide a wiring board excellent in fine circuit formability and high frequency characteristics.

本発明は、次のものに関する。   The present invention relates to the following.

(1) 回路を形成する金属と基材樹脂の少なくとも一界面に基材と異なる樹脂層を含み、基材と異なる樹脂層がアミド基を4質量%以上含む配線板。   (1) A wiring board comprising a resin layer different from a base material at at least one interface between a metal forming a circuit and the base material resin, and the resin layer different from the base material contains 4% by mass or more of amide groups.

(2) 基材と異なる樹脂層と接する回路を形成する金属の表面粗さが十点平均粗さで3μm以下である項(1)に記載の配線板。   (2) The wiring board according to item (1), wherein the surface roughness of the metal forming the circuit in contact with the resin layer different from the base material is 3 μm or less in terms of 10-point average roughness.

(3) 基材と異なる樹脂層の厚みが10μm以下である項(1)に記載の配線板。   (3) The wiring board according to item (1), wherein the thickness of the resin layer different from that of the substrate is 10 μm or less.

(4) 基材と異なる樹脂層のガラス転移点(Tg)が200℃以上である項(1)に記載の配線板。   (4) The wiring board according to item (1), wherein the glass transition point (Tg) of the resin layer different from the substrate is 200 ° C. or higher.

本発明の配線板によると、耐熱性に優れ、樹脂層と回路を形成する金属との接着性が向上するため、微細配線の形成や高周波の信号伝送にとって有利である。   According to the wiring board of the present invention, heat resistance is excellent, and the adhesiveness between the resin layer and the metal forming the circuit is improved, which is advantageous for the formation of fine wiring and high-frequency signal transmission.

以下、本発明の好適な実施形態について説明する。   Hereinafter, preferred embodiments of the present invention will be described.

導体回路の形成は一般的に絶縁材上の金属箔の不要部分をエッチングによって除去するサブトラクティブ法や、絶縁材上の薄層金属の上にレジストを形成し、めっきにより導体形成を行うセミアディティブ法があるが、いずれにせよ最終的には不要部分の金属を除去する工程が存在する。その際に、粗化面のアンカー部分が残りやすく、エッチングに時間を要するばかりか、アンカー部分のエッチング残りによって回路のショートが発生したり、回路の上面と下面で回路幅の設計値からのズレが生じたりする。また、回路が微細化すると絶縁材と金属との接触面積が小さくなるため、工程上で不要な応力が発生することによって金属箔のはく離が生じる。したがって、回路形成を施される金属箔と絶縁材の接着には従来以上の接着力と共に、より細い配線を作製するために金属箔表面の粗化形状の微細化が必要である。   The conductor circuit is generally formed by a subtractive method in which unnecessary portions of the metal foil on the insulating material are removed by etching, or a semi-additive method in which a resist is formed on a thin metal layer on the insulating material and the conductor is formed by plating. There is a method, but in any event, there is a process of removing the unnecessary portion of the metal. At that time, the anchor portion of the roughened surface tends to remain, and it takes time for etching. In addition, a short circuit may occur due to the etching residue of the anchor portion, or the circuit width may deviate from the design value on the upper and lower surfaces of the circuit. May occur. Further, when the circuit is miniaturized, the contact area between the insulating material and the metal is reduced, so that unnecessary stress is generated in the process, and the metal foil is peeled off. Therefore, in order to bond a metal foil to be subjected to circuit formation and an insulating material, it is necessary to refine the roughened shape on the surface of the metal foil in order to produce a finer wiring as well as an adhesive force higher than that in the past.

また,導体中の電流の付近には磁力線が発生するが、導体の中心部ほど磁力線の干渉が大きいため、電流は周辺とコーナーに集中する。これを表皮効果と呼び、周波数が高いほどこの傾向は強まる。導体回路の表面粗さが小さいほど表皮効果による抵抗の増加を抑えられると考えられ、高周波信号の伝送に有利と考えられる。   Magnetic field lines are generated in the vicinity of the current in the conductor, but since the interference of the magnetic field lines is greater at the center of the conductor, the current is concentrated at the periphery and corners. This is called the skin effect, and this tendency increases as the frequency increases. It is considered that the smaller the surface roughness of the conductor circuit, the more the resistance increase due to the skin effect can be suppressed, which is advantageous for the transmission of high-frequency signals.

「回路を形成する金属」として銅箔を用いることができる。銅箔を使用する場合、表面粗さの小さな銅箔を使用することが好ましい。表面粗さとして十点平均粗さ(Rz)を使用した場合、Rzは3μm以下が好ましく、2μm以下であればさらに好ましい。なお、Rzとは、JIS B 0601の定義に従って算出される表面粗さであり、例えば、触針式表面粗さ測定器を用いて測定される。   A copper foil can be used as the “metal forming the circuit”. When using copper foil, it is preferable to use copper foil with small surface roughness. When ten-point average roughness (Rz) is used as the surface roughness, Rz is preferably 3 μm or less, and more preferably 2 μm or less. Rz is the surface roughness calculated according to the definition of JIS B 0601, and is measured using, for example, a stylus type surface roughness measuring instrument.

銅箔は電解銅箔でも圧延銅箔でも使用することができるが表面粗さの小さな接着面を利用するには粗化処理などの表面に微細な凹凸を持たせる処理が施されていないものが好ましい。また、いわゆる電解銅箔の光沢面をそのまま利用することも可能である。銅箔の光沢面を利用する場合には特に制限はなく市販の銅箔をそのまま利用できる。市販の銅箔としては、古河サーキットフォイル株式会社製のGTS、GTS−MP、GTS−FLP、GY、GY−MP、F−WS、TSTO、DT−GL、DT−GLD、日本電解株式会社製のSLP、YGP、三井金属株式会社製の3EC−VLPなどがあるが、これらに限られるものではない。これら市販の銅箔の光沢面はRz = 1.5〜2.0μmである。   Copper foil can be used as either electrolytic copper foil or rolled copper foil, but in order to use an adhesive surface with a small surface roughness, it has not been subjected to a treatment to give fine irregularities to the surface such as a roughening treatment. preferable. Further, the glossy surface of the so-called electrolytic copper foil can be used as it is. When using the glossy surface of the copper foil, there is no particular limitation, and a commercially available copper foil can be used as it is. As commercially available copper foil, GTS, GTS-MP, GTS-FLP, GY, GY-MP, F-WS, TSTO, DT-GL, DT-GLD manufactured by Furukawa Circuit Foil Co., Ltd. There are SLP, YGP, 3EC-VLP manufactured by Mitsui Kinzoku Co., Ltd., but not limited thereto. The glossy surface of these commercially available copper foils is Rz = 1.5-2.0 μm.

表面粗さの小さな銅箔としてはF2−WS(古河サーキットフォイル株式会社製、Rz = 3.0μm)、3EC−VLP(三井金属株式会社製、Rz = 3.0μm)などが入手できる。また市販の表面粗さを極めて小さくした銅箔としてはF0−WS(古河サーキットフォイル株式会社製、Rz = 1.2μm)などが利用できる。   F2-WS (Furukawa Circuit Foil, Rz = 3.0 μm), 3EC-VLP (Mitsui Metals, Rz = 3.0 μm), etc. are available as copper foils with a small surface roughness. Further, as a commercially available copper foil having a very small surface roughness, F0-WS (Furukawa Circuit Foil Co., Ltd., Rz = 1.2 μm) can be used.

市販の銅箔の厚みは10〜150μmまでさまざまな種類があるが、回路基板用途としては18μmと35μmが主要になっている。微細な配線パターンを形成するには12μmや9μmなどの薄い銅箔を用いることがより好ましい。   There are various types of commercially available copper foils having thicknesses ranging from 10 to 150 μm, but 18 μm and 35 μm are mainly used as circuit board applications. In order to form a fine wiring pattern, it is more preferable to use a thin copper foil of 12 μm or 9 μm.

また、「回路を形成する金属」としては、銅箔の他アルミニウム箔等の金属箔も用いることができ、厚さは5〜200μmであることが好ましい。また、厚さ0.5〜15μmの銅箔層と厚さ10〜300μmの銅箔層の間に、ニッケル、ニッケル−リン、ニッケル−スズ合金、ニッケル−鉄合金、鉛、鉛−スズ合金等からなる中間層を設けた3層構造の複合箔や、アルミニウムと銅箔を複合した2層構造の複合箔を用いることもできる。いずれの場合も金属箔の表面粗さはRz = 3.0μm以下であることが好ましく、Rz = 2.0μm以下であることがより好ましい。   Moreover, as "the metal which forms a circuit", metal foils, such as aluminum foil other than copper foil, can also be used, and it is preferable that thickness is 5-200 micrometers. Also, nickel, nickel-phosphorus, nickel-tin alloy, nickel-iron alloy, lead, lead-tin alloy, etc. between a copper foil layer having a thickness of 0.5-15 μm and a copper foil layer having a thickness of 10-300 μm A composite foil having a three-layer structure provided with an intermediate layer made of or a composite foil having a two-layer structure in which aluminum and copper foil are combined can also be used. In any case, the surface roughness of the metal foil is preferably Rz = 3.0 μm or less, and more preferably Rz = 2.0 μm or less.

次に、「基材樹脂と異なる樹脂層」、すなわち、回路を形成する金属と基材樹脂の界面に設ける樹脂層について説明する。   Next, the “resin layer different from the base resin”, that is, the resin layer provided at the interface between the metal forming the circuit and the base resin will be described.

本発明における「樹脂層」は、基材樹脂とは異なるものであり、厚みが10μm以下であることが好ましい。厚みを10μm以下とすることで、単位面積当たりに必要とする樹脂の量を少なくすることができ、基材本来の特性を損ねることが少なくなる。   The “resin layer” in the present invention is different from the base resin and preferably has a thickness of 10 μm or less. By setting the thickness to 10 μm or less, the amount of resin required per unit area can be reduced, and the original properties of the base material are less likely to be impaired.

また、上記樹脂層はアミド基を4質量%以上含むものである。アミド基が4質量%より少ないと、金属箔との接着強度が不十分となる場合がある。なお、上記樹脂中のアミド基の割合については、アミド基の分子量を43として算出した。   The resin layer contains 4% by mass or more of amide groups. If the amide group is less than 4% by mass, the adhesive strength with the metal foil may be insufficient. The ratio of the amide group in the resin was calculated with the molecular weight of the amide group being 43.

アミド基を含む樹脂としては、ポリアミド、ポリアミドイミド、ナイロンなどが挙げられるが、耐熱性の観点からポリアミドイミドを用いることが好ましく、樹脂中の残存揮発分を低減する観点から、シロキサンによって変性したポリアミドイミドを用いることがさらに好ましい。これらの樹脂は単独で用いても良いし、数種を混合して用いても良い。   Examples of the resin containing an amide group include polyamide, polyamideimide, and nylon. Polyamideimide is preferably used from the viewpoint of heat resistance, and polyamide modified by siloxane from the viewpoint of reducing residual volatile content in the resin. More preferably, an imide is used. These resins may be used alone or in combination of several kinds.

アミド基を含む樹脂は、アミド基を含む化合物と、アミド基と反応する官能基を有するアミド反応性化合物とを混合して熱硬化性樹脂とすることがより好ましい。アミド反応性化合物としては、多官能エポキシ樹脂、ポリイミド樹脂、不飽和ポリエステル樹脂、ポリウレタン樹脂、ビスマレイミド樹脂、トリアジン−ビスマレイミド樹脂、フェノール樹脂などが例示でき、多官能エポキシ化合物を用いることが好ましい。アミド反応性化合物として多官能エポキシ化合物を用いることにより、上記樹脂層の耐熱性だけでなく機械的特性及び電気的特性を向上させることができる。多官能エポキシ化合物としては、ビスフェノールA型エポキシ樹脂、テトラブロモビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビフェニル型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、ビフェニルノボラック型エポキシ樹脂、脂環式エポキシ樹脂等が例示できる。これらの樹脂は単独で用いても良いし、数種を混合して用いても良い。アミド反応性化合物の配合量は、上記樹脂層中のアミド基量が4質量%より少なくならない範囲で決定することができる。   The resin containing an amide group is more preferably a thermosetting resin by mixing a compound containing an amide group and an amide reactive compound having a functional group that reacts with the amide group. Examples of the amide-reactive compound include polyfunctional epoxy resins, polyimide resins, unsaturated polyester resins, polyurethane resins, bismaleimide resins, triazine-bismaleimide resins, and phenol resins, and polyfunctional epoxy compounds are preferably used. By using a polyfunctional epoxy compound as the amide-reactive compound, not only the heat resistance of the resin layer but also the mechanical characteristics and electrical characteristics can be improved. Polyfunctional epoxy compounds include bisphenol A type epoxy resin, tetrabromobisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, biphenyl type epoxy resin, phenol novolac type epoxy resin, cresol novolak type epoxy resin, Examples thereof include biphenyl novolac type epoxy resins and alicyclic epoxy resins. These resins may be used alone or in combination of several kinds. The compounding amount of the amide-reactive compound can be determined in such a range that the amount of amide groups in the resin layer is not less than 4% by mass.

アミド反応性化合物として多官能エポキシ化合物を用いる場合、多官能エポキシ化合物とアミド基の反応促進剤をさらに加えることが好ましい。この反応促進剤としては、ジシアンジアミド、ジアミノジフェニルメタン、グアニル尿素などのアミン類や2−エチル−4−メチルイミダゾールなどのアルキル基置換イミダゾール、ベンゾイミダゾールなどのイミダゾール類などが挙げられる。   When a polyfunctional epoxy compound is used as the amide-reactive compound, it is preferable to further add a polyfunctional epoxy compound and an amide group reaction accelerator. Examples of the reaction accelerator include amines such as dicyandiamide, diaminodiphenylmethane, and guanylurea, alkyl group-substituted imidazoles such as 2-ethyl-4-methylimidazole, and imidazoles such as benzimidazole.

上記の反応促進剤の配合量は、多官能エポキシ化合物におけるエポキシ当量に応じて決定することができ、例えば反応促進剤としてアミン化合物を用いる場合、アミンの活性水素の当量と、多官能エポキシ化合物のエポキシ当量が等しくなるように配合することが好ましい。また、反応促進剤としてイミダゾール類を用いる場合、反応促進剤の配合量は多官能エポキシ化合物100重量部に対して、0.1〜2.0重量部であることが好ましい。これらの反応促進剤の配合量が上記範囲より少ない場合は多官能エポキシ化合物の硬化が不充分となり、硬化性樹脂の硬化後のガラス転移温度が低下する傾向があり、多い場合は残存する反応促進剤により硬化性樹脂の硬化後の電気的特性が低下する傾向がある。上記樹脂層は、ガラス転移点(Tg)が200℃以上であることが好ましい。BGAのようなベアチップを直接実装する基板ではチップと基板の接続は、熱超音波圧着によるワイヤボンディングで行うため、ベアチップを実装する基板は高温にさらされることになる。したがって、金属箔と基材樹脂の界面に存在する樹脂層は耐熱性に優れたものでなければならず、そのTgは200℃以上であることが好ましい。なお、上記樹脂層のTgは、動的粘弾性測定装置(DVE)を用いて測定される。   The compounding amount of the reaction accelerator can be determined according to the epoxy equivalent in the polyfunctional epoxy compound. For example, when an amine compound is used as the reaction accelerator, the equivalent of the active hydrogen of the amine and the polyfunctional epoxy compound It is preferable to blend so that the epoxy equivalents are equal. Moreover, when using imidazole as a reaction accelerator, it is preferable that the compounding quantity of a reaction accelerator is 0.1-2.0 weight part with respect to 100 weight part of polyfunctional epoxy compounds. When the blending amount of these reaction accelerators is less than the above range, the polyfunctional epoxy compound is insufficiently cured, and the glass transition temperature after curing of the curable resin tends to decrease. There is a tendency that the electrical characteristics after curing of the curable resin are lowered by the agent. The resin layer preferably has a glass transition point (Tg) of 200 ° C. or higher. In a substrate on which a bare chip such as a BGA is directly mounted, the connection between the chip and the substrate is performed by wire bonding using thermosonic bonding, so that the substrate on which the bare chip is mounted is exposed to a high temperature. Therefore, the resin layer present at the interface between the metal foil and the base resin must be excellent in heat resistance, and the Tg is preferably 200 ° C. or higher. In addition, Tg of the said resin layer is measured using a dynamic viscoelasticity measuring apparatus (DVE).

上記樹脂層中には、更に、硬化を阻害しない範囲で、充填剤、カップリング剤、難燃剤等をその他の成分として添加することができる。   In the resin layer, a filler, a coupling agent, a flame retardant, and the like can be added as other components as long as the curing is not inhibited.

次に本発明で基材として使用するプリプレグについて説明する。   Next, the prepreg used as a base material in the present invention will be described.

本発明で使用するプリプレグは、強化繊維を含有しないBステージ状態の硬化性樹脂からなるプリプレグであってもよく、強化繊維を配したBステージ状態の硬化性樹脂からなるプリプレグであってもよいが、強化繊維を配したBステージ状態の硬化性樹脂からなるプリプレグであることが好ましい。   The prepreg used in the present invention may be a prepreg made of a curable resin in a B stage state that does not contain reinforcing fibers, or a prepreg made of a curable resin in a B stage state in which reinforcing fibers are arranged. A prepreg made of a curable resin in a B-stage state in which reinforcing fibers are arranged is preferable.

強化繊維を配していないBステージ状態の硬化性樹脂からなるプリプレグは、硬化性樹脂をフィルム形状として半硬化状態(Bステージ)にすることにより得ることができ、また、強化繊維を配したBステージ状態の硬化性樹脂からなるプリプレグは、強化繊維に硬化性樹脂を含浸させた後、含浸させた樹脂を半硬化状態(Bステージ)にすることにより得ることができる。硬化性樹脂としてはエポキシ樹脂、ポリイミド樹脂、フェノール樹脂等の熱硬化性樹脂を用いることが好ましい。強化繊維としては、Eガラス、Dガラス、Sガラス、Qガラス等からなるガラス繊維、ポリイミド、ポリエステル、テトラフルオロエチレン等からなる有機繊維、及びこれらを混合した繊維が例示できる。これらの繊維は、例えば、織布、不織布、ロービング、チョップドストランドマット、サーフェシングマット等の形状で強化繊維として用いることができる。   A prepreg made of a curable resin in a B-stage state in which no reinforcing fiber is arranged can be obtained by making the curable resin into a semi-cured state (B-stage) with a film shape, and B in which a reinforcing fiber is arranged A prepreg made of a curable resin in a stage state can be obtained by impregnating a curable resin into a reinforcing fiber and then making the impregnated resin into a semi-cured state (B stage). As the curable resin, it is preferable to use a thermosetting resin such as an epoxy resin, a polyimide resin, or a phenol resin. Examples of reinforcing fibers include glass fibers made of E glass, D glass, S glass, Q glass, and the like, organic fibers made of polyimide, polyester, tetrafluoroethylene, and the like, and fibers obtained by mixing these. These fibers can be used as reinforcing fibers in the form of, for example, woven fabric, non-woven fabric, roving, chopped strand mat, and surfacing mat.

プリプレグとしては、市販のプリプレグを用いることができ、またプリプレグを複数層備えたものを用いてもよい。適用可能な市販のプリプレグとしては、エポキシ樹脂を主成分とする熱硬化性樹脂をガラス繊維織布であるガラスクロスに含浸させたプリプレグ(GEA−67、GEA−679、GEA−679F、日立化成工業株式会社製)、低誘電率の樹脂を含浸した高周波対応プリプレグ(GXA−67、日立化成工業株式会社製)、ポリイミドに熱硬化成分を配合した樹脂組成物をガラスクロスに含浸させたプリプレグ(GEA−I−671、日立化成工業社製)が挙げられる。   As the prepreg, a commercially available prepreg can be used, or a prepreg having a plurality of layers of prepreg may be used. Applicable commercially available prepregs include prepregs (GEA-67, GEA-679, GEA-679F, Hitachi Chemical Co., Ltd.) in which a glass cloth, which is a glass fiber woven fabric, is impregnated with a thermosetting resin mainly composed of an epoxy resin. Co., Ltd.), high frequency prepreg impregnated with low dielectric constant resin (GXA-67, manufactured by Hitachi Chemical Co., Ltd.), prepreg impregnated with glass cloth with resin composition in which thermosetting component is blended in polyimide (GEA) -I-671, manufactured by Hitachi Chemical Co., Ltd.).

強化繊維を配したプリプレグにおける硬化性樹脂と強化繊維の配合比は、重量比で硬化性樹脂/強化繊維 = 20/80 〜 80/20であることが好ましく、40/60 〜 60/40であることがより好ましい。   The blending ratio of the curable resin and the reinforcing fiber in the prepreg provided with the reinforcing fibers is preferably curable resin / reinforced fiber = 20/80 to 80/20, and 40/60 to 60/40 in weight ratio. It is more preferable.

本発明における基材樹脂とは異なる樹脂層の形成は、樹脂を有機溶剤に溶解した溶液を直接金属箔に塗布して樹脂付金属箔とする方法、支持体上に塗布してフィルム化した樹脂層とする方法、樹脂を有機溶剤に溶解した溶液を基材に塗布する方法があるが、これらに限られるものではない。   Formation of a resin layer different from the base resin in the present invention is a method in which a solution obtained by dissolving a resin in an organic solvent is directly applied to a metal foil to form a metal foil with resin, and a resin formed into a film by applying on a support. There are a method of forming a layer and a method of applying a solution in which a resin is dissolved in an organic solvent to a base material, but the method is not limited thereto.

樹脂付金属箔とする方法は、塗工機を使用して上記樹脂溶液を銅箔の所定面に塗布した後、加熱乾燥を行うことによって作製することができる。塗工方法はコンマコータ、ディップコータ、キスコータの他、自然流延塗布などが利用できる。次に、両面金属箔付き積層板とするためには、数枚の積層体形成用プリプレグを2枚の樹脂付金属箔の接着層とプリプレグが合わさるようにして重ね、160℃〜250℃で0.1〜8.0MPaの圧力をかけ10分以上、好ましくは30分以上、さらに好ましくは60分以上加熱加圧することで得ることができる。この工程は真空下で行うとより好ましい。   The method for forming a metal foil with a resin can be prepared by applying the resin solution to a predetermined surface of a copper foil using a coating machine and then drying by heating. As a coating method, a comma casting machine, a dip coating machine, a kiss coating machine, and a natural casting application can be used. Next, in order to obtain a laminated board with double-sided metal foil, several prepregs for forming a laminate are stacked so that the adhesive layer of the two metal foils with resin and the prepreg are combined, and the temperature is 0 at 160 ° C. to 250 ° C. It can be obtained by applying pressure of 0.1 to 8.0 MPa and heating and pressurizing for 10 minutes or more, preferably 30 minutes or more, more preferably 60 minutes or more. This step is more preferably performed under vacuum.

フィルム化した樹脂層とする方法、すなわち、樹脂フィルムとする方法は、塗工機を使用して上記樹脂溶液を支持体上に塗布した後、加熱乾燥を行うことによって作製することができる。塗工方法はコンマコータ、ディップコータ、キスコータの他、自然流延塗布などが利用できる。次に、両面金属箔付き積層板を得るために、作製した樹脂フィルムを金属箔と基材樹脂の間に挿入することができる。作製した樹脂フィルムを金属箔と基材樹脂の間に挿入する方法としては、上記支持体ごと基材上に樹脂層が接するように仮圧着させた後、支持体をはく離し、その上に金属箔を積層する方法や、先に支持体をはく離して基材上に重ね、その上に金属箔を重ねてプレス積層する方法がある。いずれの方法においても、数枚の積層体形成用プリプレグの両面に上記樹脂フィルム、金属箔の順に重ね、160℃〜250℃で0.1〜8.0MPaの圧力をかけ10分以上、好ましくは30分以上、さらに好ましくは60分以上加熱加圧することで両面金属箔付き積層板を得ることができる。この工程は真空下で行うとより好ましい。   A method of forming a resin layer into a film, that is, a method of forming a resin film can be produced by applying the resin solution onto a support using a coating machine and then drying by heating. As a coating method, a comma casting machine, a dip coating machine, a kiss coating machine, and a natural casting application can be used. Next, in order to obtain a laminated board with a double-sided metal foil, the produced resin film can be inserted between the metal foil and the base resin. As a method of inserting the prepared resin film between the metal foil and the base resin, after temporarily bonding together the above support so that the resin layer is in contact with the base material, the support is peeled off, and the metal is placed thereon. There are a method of laminating a foil and a method of peeling a support first and stacking it on a base material, and stacking a metal foil on the substrate and press laminating. In any method, the resin film and the metal foil are sequentially laminated on both surfaces of several prepregs for forming a laminate, and a pressure of 0.1 to 8.0 MPa is applied at 160 to 250 ° C. for 10 minutes or more, preferably A laminate with a double-sided metal foil can be obtained by heating and pressing for 30 minutes or more, more preferably 60 minutes or more. This step is more preferably performed under vacuum.

基材に塗布する方法は、数枚の積層体形成用プリプレグを重ねて基材とし、最も外側に面するプリプレグ表面に上記樹脂溶液を塗布した後、加熱乾燥を行って樹脂層を形成してもよい。この後、両面金属箔付き積層板を得るためには、塗布した樹脂層の上に金属箔を重ね、160℃〜250℃で0.1〜8.0MPaの圧力をかけ10分以上、好ましくは30分以上、さらに好ましくは60分以上加熱加圧してもよい。この工程は真空下で行うとより好ましい。   The method of applying to the substrate is to laminate several prepregs for forming a laminate to form a substrate, and after applying the resin solution to the outermost prepreg surface, heat drying to form a resin layer. Also good. Thereafter, in order to obtain a laminated board with double-sided metal foil, the metal foil is overlaid on the applied resin layer, and a pressure of 0.1 to 8.0 MPa is applied at 160 to 250 ° C. for 10 minutes or more, preferably You may heat-press for 30 minutes or more, More preferably, 60 minutes or more. This step is more preferably performed under vacuum.

得られた金属張積層板は、積層体形成用プリプレグの硬化物である積層体形成用プリプレグ硬化物の3層を中心層として、この上面及び下面に樹脂層を介して金属箔がこの順に積層された構成を有している。   The obtained metal-clad laminate has three layers of laminate-formed prepreg cured product, which is a cured product of the laminate-forming prepreg, as a central layer, and metal foils are laminated in this order via a resin layer on the upper and lower surfaces. It has the structure which was made.

さらに、金属箔に所定の配線パターンを形成し、配線板とすることができる。この金属張積層板においては、金属箔が樹脂層を介してプリプレグ硬化物に接着され、金属箔は金属張積層板おいて上記積層体と強固に接着しており、金属箔と接着層の界面が平滑であるため金属張積層板に微細な配線パターンを形成させ、高周波信号の伝送損失を低減することが可能である。その場合においても、金属箔からなる導体層のはく離を生じることが極めて少なくなる。   Furthermore, a predetermined wiring pattern can be formed on the metal foil to obtain a wiring board. In this metal-clad laminate, the metal foil is adhered to the prepreg cured product via the resin layer, and the metal foil is firmly adhered to the laminate in the metal-clad laminate, and the interface between the metal foil and the adhesive layer Therefore, it is possible to form a fine wiring pattern on the metal-clad laminate and reduce the transmission loss of high-frequency signals. Even in that case, peeling of the conductor layer made of the metal foil is extremely reduced.

以下、具体例を挙げて本発明を具体的に説明するが、本発明はこれらに限られるものではない。   Hereinafter, the present invention will be specifically described with specific examples, but the present invention is not limited thereto.

(ワニスの作製)
(実施例1〜2)
PAI−37(日立化成工業社製商品名、ポリアミドイミド樹脂、樹脂固形分30重量%、アミド基8.05質量%)63.3gとエポキシ樹脂としてDER−331L(ダウ・ケミカル社製商品名、ビスフェノールA型エポキシ樹脂)2.0g(樹脂固形分50質量%のジメチルアセトアミド溶液)、2−エチル−4−メチルイミダゾール0.02gを配合し、樹脂が均一になるまで約1時間撹拌した後、脱泡のため2時間室温で静置して実施例1のワニス(アミド基7.63質量%)とした。また、エポキシ樹脂及びイミダゾールを加えない場合を実施例2のワニスとした。
(Production of varnish)
(Examples 1-2)
PAI-37 (trade name, manufactured by Hitachi Chemical Co., Ltd., polyamideimide resin, resin solid content 30 wt%, amide group 8.05 mass%) 63.3 g and epoxy resin DER-331L (trade name, manufactured by Dow Chemical Co., Ltd.) Bisphenol A type epoxy resin) 2.0 g (dimethylacetamide solution having a resin solid content of 50% by mass) and 0.02 g of 2-ethyl-4-methylimidazole were blended and stirred for about 1 hour until the resin became uniform. It left still at room temperature for 2 hours for defoaming, and it was set as the varnish of Example 1 (7.63 mass% of amide groups). Moreover, the case where an epoxy resin and imidazole were not added was made into the varnish of Example 2.

(実施例3〜4)
PAI−55(日立化成工業社製商品名、ポリアミドイミド樹脂、樹脂固形分30重量%、アミド基7.38質量%)63.3gとエポキシ樹脂としてDER−331L(ダウ・ケミカル社製商品名、ビスフェノールA型エポキシ樹脂)2.0g(樹脂固形分50質量%のジメチルアセトアミド溶液)、2−エチル−4−メチルイミダゾール0.02gを配合し、樹脂が均一になるまで約1時間撹拌した後、脱泡のため2時間室温で静置してワニス(アミド基7.00質量%)とした。また、エポキシ樹脂及びイミダゾールを加えない場合を実施例4のワニスとした。
(Examples 3 to 4)
PAI-55 (trade name, manufactured by Hitachi Chemical Co., Ltd., polyamide imide resin, resin solid content 30% by weight, amide group 7.38% by mass) 63.3 g and epoxy resin DER-331L (trade name, manufactured by Dow Chemical Co., Ltd.) Bisphenol A type epoxy resin) 2.0 g (dimethylacetamide solution having a resin solid content of 50% by mass) and 0.02 g of 2-ethyl-4-methylimidazole were blended and stirred for about 1 hour until the resin became uniform. It left still at room temperature for 2 hours for defoaming, and it was set as the varnish (amide group 7.00 mass%). Moreover, the case where an epoxy resin and imidazole were not added was made into the varnish of Example 4.

(比較例1)
PAI−37(日立化成工業社製商品名、ポリアミドイミド樹脂、樹脂固形分30重量%、アミド基8.05質量%)26.7gとエポキシ樹脂としてDER−331L(ダウ・ケミカル社製商品名、ビスフェノールA型エポキシ樹脂)24.0g(樹脂固形分50質量%のジメチルアセトアミド溶液)、2−エチル−4−メチルイミダゾール0.24gを配合し、樹脂が均一になるまで約1時間撹拌した後、脱泡のため2時間室温で静置してワニス(アミド基3.18質量%)とした。
(Comparative Example 1)
PAI-37 (trade name, manufactured by Hitachi Chemical Co., Ltd., polyamideimide resin, resin solid content 30% by weight, amide group 8.05% by mass) 26.7 g and epoxy resin DER-331L (trade name, manufactured by Dow Chemical Company, (Bisphenol A type epoxy resin) 24.0 g (dimethylacetamide solution having a resin solid content of 50% by mass) and 0.24 g of 2-ethyl-4-methylimidazole were mixed and stirred for about 1 hour until the resin became uniform. It left still at room temperature for 2 hours for defoaming, and it was set as the varnish (amide group 3.18 mass%).

(比較例2)
PAI−55(日立化成工業社製商品名、ポリアミドイミド樹脂、樹脂固形分30重量%、アミド基7.38質量%)26.7gとエポキシ樹脂としてDER−331L(ダウ・ケミカル社製商品名、ビスフェノールA型エポキシ樹脂)24.0g(樹脂固形分50質量%のジメチルアセトアミド溶液)、2−エチル−4−メチルイミダゾール0.24gを配合し、樹脂が均一になるまで約1時間撹拌した後、脱泡のため2時間室温で静置してワニス(アミド基2.95質量%)とした。
(Comparative Example 2)
PAI-55 (trade name, manufactured by Hitachi Chemical Co., Ltd., polyamideimide resin, resin solid content 30 wt%, amide group 7.38 mass%) 26.7 g and epoxy resin DER-331L (trade name, manufactured by Dow Chemical Co., Ltd.) (Bisphenol A type epoxy resin) 24.0 g (dimethylacetamide solution having a resin solid content of 50% by mass) and 0.24 g of 2-ethyl-4-methylimidazole were mixed and stirred for about 1 hour until the resin became uniform. It left still at room temperature for 2 hours for defoaming, and it was set as the varnish (amide group 2.95 mass%).

(樹脂層の形成1)
実施例1〜4及び比較例1〜2で作製したワニスを、ジメチルアセトアミドを加えて固形分を7質量%に調整した後、電解銅箔の光沢面(Rz = 2μm)に自然流延塗布し、温風循環型乾燥機中で160℃、10分間乾燥させて樹脂付銅箔を作製した。乾燥後の樹脂の厚みは2〜3μmであった。これらを用いて作製した銅張積層板をそれぞれ実施例5〜8及び比較例4〜5とする。
(Formation of resin layer 1)
The varnishes produced in Examples 1 to 4 and Comparative Examples 1 to 2 were adjusted to a solid content of 7% by mass by adding dimethylacetamide, and then naturally cast on the glossy surface (Rz = 2 μm) of the electrolytic copper foil. The resin-coated copper foil was produced by drying at 160 ° C. for 10 minutes in a hot air circulation dryer. The thickness of the resin after drying was 2 to 3 μm. Let the copper clad laminated board produced using these be Examples 5-8 and Comparative Examples 4-5, respectively.

(樹脂層の形成2)
実施例1〜4及び比較例1〜2で作製したワニスをPETフィルム上に塗布し、温風循環型乾燥機中で160℃、10分間乾燥させてフィルム化した。乾燥後の樹脂の厚みは8μmとした。これらを用いて作製した銅張積層板をそれぞれ実施例9〜12及び比較例6〜7とする。
(Formation of resin layer 2)
The varnishes produced in Examples 1 to 4 and Comparative Examples 1 to 2 were applied onto a PET film, and dried in a warm air circulating drier at 160 ° C. for 10 minutes to form a film. The resin thickness after drying was 8 μm. Let the copper clad laminated board produced using these be Examples 9-12 and Comparative Examples 6-7, respectively.

(樹脂層の形成3)
実施例1〜4及び比較例1〜2で作製したワニスを、ジメチルアセトアミドを加えて固形分を7質量%に調整した後、低誘電率プリプレグGXA−67N(日立化成工業株式会社製)の片面に自然流延塗布し、温風循環型乾燥機中で160℃、10分間乾燥させた。乾燥後の樹脂の厚みは1〜2μmであった。これらを用いて作製した銅張積層板をそれぞれ実施例13〜16及び比較例8〜9とする。
(Formation of resin layer 3)
After adjusting the solid content to 7 mass% by adding dimethylacetamide to the varnishes produced in Examples 1-4 and Comparative Examples 1-2, one side of a low dielectric constant prepreg GXA-67N (manufactured by Hitachi Chemical Co., Ltd.) The film was naturally cast and then dried at 160 ° C. for 10 minutes in a hot air circulating dryer. The thickness of the resin after drying was 1 to 2 μm. Let the copper clad laminated board produced using these be Examples 13-16 and Comparative Examples 8-9, respectively.

(銅張積層板の作製方法)
低誘電率プリプレグGXA−67N(日立化成工業株式会社製)を4枚重ねて基材とし、その両側に樹脂層、電解銅箔の順に重ね、230℃、90分、3.0MPaのプレス条件で両面銅張積層板を作製した。このとき、樹脂層に電解銅箔の光沢面(Rz = 2μm)が接するように構成した。また、比較例10として、低誘電率プリプレグGXA−67N(日立化成工業株式会社製)を4枚重ね、その両側に電解銅箔の光沢面(Rz = 2μm)とプリプレグが向かい合うように重ね、230℃、90分、3.0MPaのプレス条件で両面銅張積層板を作製した。
(Method for producing copper-clad laminate)
Four sheets of low dielectric constant prepreg GXA-67N (manufactured by Hitachi Chemical Co., Ltd.) are used as a base material, and a resin layer and an electrolytic copper foil are stacked on both sides in that order at 230 ° C., 90 minutes, under a 3.0 MPa press condition. A double-sided copper clad laminate was produced. At this time, the glossy surface (Rz = 2 μm) of the electrolytic copper foil was in contact with the resin layer. Further, as Comparative Example 10, four low dielectric constant prepregs GXA-67N (manufactured by Hitachi Chemical Co., Ltd.) are stacked, and the glossy surface of the electrolytic copper foil (Rz = 2 μm) and the prepreg are stacked on both sides thereof, and 230 A double-sided copper-clad laminate was produced under the press conditions of 3.0 MPa at 90 ° C. for 90 minutes.

(接着性及び吸湿耐熱性評価)
上記の銅張積層板の銅箔を5mm幅、5cm/minの速度で引きはがすこと(90°ピール試験、JIS C 6481に準拠)によって銅箔引きはがし強さを測定した。また、121℃、100%RHの恒温恒湿槽に2時間静置した(PCT処理)後の銅箔引きはがし強さも同様にして測定した。
(Adhesion and moisture absorption heat resistance evaluation)
The copper foil peeling strength was measured by peeling the copper foil of the above copper-clad laminate at a rate of 5 mm width and 5 cm / min (90 ° peel test, conforming to JIS C 6481). Moreover, the copper foil peeling strength after leaving still for 2 hours (PCT process) at 121 degreeC and 100% RH constant temperature was measured similarly.

また、銅箔−基材間の吸湿耐熱性の評価は、上記銅張積層板を5mm角にカットし、両面ともその半分の面積の銅箔を残してエッチングしたものを121℃、100%RHの恒温恒湿槽に2時間静置した後、260℃のはんだ槽に20秒間沈めた時の銅箔−基材間のふくれの有無を評価した。   In addition, the moisture absorption and heat resistance between the copper foil and the substrate was evaluated by cutting the copper-clad laminate into 5 mm squares, and etching the copper foil having a half area on both sides at 121 ° C. and 100% RH. After being allowed to stand in a constant temperature and humidity chamber for 2 hours, the presence or absence of blistering between the copper foil and the base material was evaluated when submerged in a solder bath at 260 ° C. for 20 seconds.

(樹脂のTgの測定)
実施例1〜4及び比較例1〜2で、固形分調製前又は樹脂固形分30%としたワニスをPETフィルム上に塗布し、温風循環型乾燥機中で160℃、10分間乾燥させて樹脂フィルムを作製した。その後このフィルムをさらに250℃で1時間加熱した。このフィルムを幅5mmに切断し、チャック間20mm、昇温速度5℃/min、測定範囲30〜300℃の条件で、動的粘弾性測定装置(DVE)を用いてTgを測定した。
(Measurement of Tg of resin)
In Examples 1 to 4 and Comparative Examples 1 to 2, a varnish before solid content preparation or a resin solid content of 30% was applied onto a PET film, and dried in a hot air circulating dryer at 160 ° C. for 10 minutes. A resin film was prepared. The film was then further heated at 250 ° C. for 1 hour. This film was cut into a width of 5 mm, and Tg was measured using a dynamic viscoelasticity measuring apparatus (DVE) under the conditions of 20 mm between chucks, a temperature rising rate of 5 ° C./min, and a measurement range of 30 to 300 ° C.

(接着性及び吸湿耐熱性の評価結果)
評価結果を表1にまとめた。

Figure 2005268518
(Evaluation results of adhesion and moisture absorption heat resistance)
The evaluation results are summarized in Table 1.
Figure 2005268518

銅箔の接着面が光沢面(Rz = 2μm)レベルであっても、実施例5〜16では基材との接着性及び吸湿耐熱性は良好であった。一方、アミド基量が4質量%以下の比較例4〜9及び樹脂層を形成しない比較例10では、基材との接着性及び吸湿耐熱性は不十分であった。   Even if the adhesive surface of the copper foil was a glossy surface (Rz = 2 μm) level, in Examples 5 to 16, the adhesion to the substrate and the moisture absorption heat resistance were good. On the other hand, in Comparative Examples 4 to 9 in which the amount of amide groups was 4% by mass or less and Comparative Example 10 in which no resin layer was formed, the adhesion to the substrate and the moisture absorption heat resistance were insufficient.

(高周波信号の伝送特性及び微細回路パターンの形成性)
実施例7の銅張積層板上に直線線路をエッチングによって形成し、0.1〜10GHzの周波数領域の信号を伝送したときの損失を測定した。また、銅張積層板の作製で、銅箔として基材(プリプレグ)との接着面のRzが5.0μmの銅箔を使用した場合を比較例11とした。信号の周波数と伝送損失の関係を図1に示した。銅箔のRzが3μm以下である実施例7の方が伝送損失は小さくなった。実線が実施例7(導体/樹脂界面のRz = 2.0μm)、破線が比較例11(導体/樹脂界面のRz = 5.0μm)を示す。
(High-frequency signal transmission characteristics and fine circuit pattern formability)
A straight line was formed on the copper clad laminate of Example 7 by etching, and the loss when a signal in the frequency range of 0.1 to 10 GHz was transmitted was measured. Further, in the production of a copper-clad laminate, Comparative Example 11 was used when a copper foil having an adhesive surface Rz of 5.0 μm was used as the copper foil. The relationship between signal frequency and transmission loss is shown in FIG. The transmission loss was smaller in Example 7 where the Rz of the copper foil was 3 μm or less. The solid line shows Example 7 (Rz = 2.0 μm at the conductor / resin interface), and the broken line shows Comparative Example 11 (Rz = 5.0 μm at the conductor / resin interface).

また、実施例5〜16及び比較例4〜11の銅張積層板について、微細回路パターンの形成性を評価した結果、実施例5〜16では、ライン/スペース = 20/20μmのパターン形成が可能であったが、比較例4〜11では回路のはがれが生じた。比較例11では、回路の形状が台形となり、設計値に大きなズレを生じた。   In addition, as a result of evaluating the fine circuit pattern formability of the copper-clad laminates of Examples 5 to 16 and Comparative Examples 4 to 11, in Examples 5 to 16, pattern formation of line / space = 20/20 μm is possible. However, in Comparative Examples 4 to 11, circuit peeling occurred. In Comparative Example 11, the circuit shape was trapezoidal, and a large deviation occurred in the design value.

信号の周波数と伝送損失の関係を示したグラフである。5 is a graph showing the relationship between signal frequency and transmission loss.

Claims (4)

回路を形成する金属と基材樹脂とを含む配線板であって、前記金属と前記基材樹脂との間に基材樹脂と異なる樹脂層を含み、前記樹脂層がアミド基を4質量%以上含む配線板。   A wiring board including a metal forming a circuit and a base resin, wherein the resin layer includes a resin layer different from the base resin between the metal and the base resin, and the resin layer has an amide group of 4% by mass or more. Including wiring board. 前記樹脂層と接する前記金属の表面粗さが十点平均粗さ(Rz)で3μm以下である請求項1に記載の配線板。   The wiring board according to claim 1, wherein the surface roughness of the metal in contact with the resin layer is 3 μm or less in terms of 10-point average roughness (Rz). 前記樹脂層の厚みが10μm以下である請求項1に記載の配線板。   The wiring board according to claim 1, wherein the resin layer has a thickness of 10 μm or less. 前記樹脂層のガラス転移点(Tg)が200℃以上である請求項1に記載の配線板。   The wiring board according to claim 1, wherein the resin layer has a glass transition point (Tg) of 200 ° C. or higher.
JP2004078512A 2004-03-18 2004-03-18 Wiring board Pending JP2005268518A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11274716A (en) * 1998-03-20 1999-10-08 Hitachi Chem Co Ltd Flexible wiring board
JPH11340624A (en) * 1998-05-29 1999-12-10 Hitachi Chem Co Ltd Method for manufacturing multilayer wiring board
JP2000006312A (en) * 1998-06-26 2000-01-11 Hitachi Chem Co Ltd Polyamideimide resin laminated material fitted with copper foil
JP2003193016A (en) * 2001-12-26 2003-07-09 Hitachi Chem Co Ltd Highly thermo resistant adhesive film with high heat dissipation
WO2003072639A1 (en) * 2002-02-26 2003-09-04 Toyo Boseki Kabushiki Kaisha Polyamide-imide resin, flexible metal-clad laminate, and flexible printed wiring board
JP2003258422A (en) * 2002-02-28 2003-09-12 Hitachi Chem Co Ltd Method of manufacturing wiring board and wiring board
JP2004025778A (en) * 2002-06-28 2004-01-29 Arakawa Chem Ind Co Ltd Metallic-foil laminated body and double-faced metallic-foil laminated body
JP2004047681A (en) * 2002-07-11 2004-02-12 Nippon Denkai Kk Copper foil for printed circuit board

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11274716A (en) * 1998-03-20 1999-10-08 Hitachi Chem Co Ltd Flexible wiring board
JPH11340624A (en) * 1998-05-29 1999-12-10 Hitachi Chem Co Ltd Method for manufacturing multilayer wiring board
JP2000006312A (en) * 1998-06-26 2000-01-11 Hitachi Chem Co Ltd Polyamideimide resin laminated material fitted with copper foil
JP2003193016A (en) * 2001-12-26 2003-07-09 Hitachi Chem Co Ltd Highly thermo resistant adhesive film with high heat dissipation
WO2003072639A1 (en) * 2002-02-26 2003-09-04 Toyo Boseki Kabushiki Kaisha Polyamide-imide resin, flexible metal-clad laminate, and flexible printed wiring board
JP2003258422A (en) * 2002-02-28 2003-09-12 Hitachi Chem Co Ltd Method of manufacturing wiring board and wiring board
JP2004025778A (en) * 2002-06-28 2004-01-29 Arakawa Chem Ind Co Ltd Metallic-foil laminated body and double-faced metallic-foil laminated body
JP2004047681A (en) * 2002-07-11 2004-02-12 Nippon Denkai Kk Copper foil for printed circuit board

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