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充填深さが最も深くなる方向に対向する一方の面が、充填口として解放された実質的に直方体形状であり、かつその長辺の長さが１０００ｍｍ以上である金属カプセルを、前記充填口が上方となるように載置した後、前記充填口より、原料粉末を充填し、次いで脱気孔を有する上蓋をもって充填された原料粉末を押し付けた状態で減圧封止し、その後、金属カプセルの充填口が上方となる状態で熱間静水圧プレスを施し、焼結体を得ることを特徴とするターゲット材の製造方法。
One surface facing in the direction in which the filling depth is deepest is a substantially rectangular parallelepiped shape released as a filling port, and the filling port has a metal capsule having a long side length of 1000 mm or more. After being placed so as to be on the upper side, the raw material powder is filled from the filling port, and then the raw material powder filled with the upper lid having a deaeration hole is sealed under reduced pressure, and then the filling port of the metal capsule A method for producing a target material, characterized in that hot isostatic pressing is performed in a state in which the material is on the upper side to obtain a sintered body.
前記の原料粉末は振動を与えながら充填することを特徴とする請求項１に記載のターゲット材の製造方法。
The target material manufacturing method according to claim 1, wherein the raw material powder is filled while applying vibration.
熱間静水圧プレスを施した焼結体を充填口面に対して垂直方向に複数に切断することを特徴とする請求項１または２に記載のターゲット材の製造方法。
3. The method for producing a target material according to claim 1, wherein the sintered body subjected to hot isostatic pressing is cut into a plurality of pieces in a direction perpendicular to the filling port surface.
前記の原料粉末は、平均一次粒子径が１０μm以下のＭｏを主体とする金属粉末であることを特徴とする請求項１乃至３のいずれかに記載のターゲット材の製造方法。
Wherein the raw material powder, method for producing a target material according to any one of claims 1 to 3, wherein the average primary particle diameter of the metal powder consisting mainly of less Mo 10 [mu] m.
JP2003347225A2003-10-062003-10-06
Target material manufacturing method
Expired - LifetimeJP4172019B2
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