JP2005102368A - Drive device - Google Patents

Abstract

Provided is a drive device that can feed a driven body minutely (finely) and obtain a large driving force.
A drive device has a vibrating body. The vibrating body 2 is provided on the bendable main body 21, the central axis (symmetric axis) 31 of the main body 21, the contact portion 23 contacting the driven body P, and the central axis 31 of the main body 21. It has the excitation part 22a and the excitation part 22b which are provided symmetrically via the center axis | shaft 31 and which deform | transform by applying a voltage in the removed position. By vibrating only one of the excitation portions 22a and 22b, the vibrating body 2 is bent and displaced by a balance between the stress caused by the deformation of one of the excitation portions 22a and 22b, that is, the driving force and the reaction force that the contact portion 23 receives from the driven body P. Then, the driven body P is driven through the contact portion 23 by this bending displacement.
[Selection] Figure 1

Description

  The present invention relates to a drive device.

As a conventional drive device, a technique described in Patent Document 1 is known. In the conventional driving device, the vibrating body is bent and displaced directly by the excitation unit, thereby driving the driven body via the contact portion.
However, in the conventional driving device in which the vibrator is driven by bending and displacing it directly by the excitation unit, particularly in the case of the conventional driving device that uses both longitudinal vibration and bending vibration and resonates them at the same time, the driving control is performed. In addition, the wiring pattern is complicated, and the vibration characteristics of the longitudinal vibration and the bending vibration are affected by the driving conditions and the environmental conditions, and the driving characteristics vary greatly.
Further, in order to obtain a large driving force with the vibrating body, it is necessary to increase the amplitude of the vibrating body, which increases the driving amount, and it is difficult to feed the driven body slightly (fine movement). .

Japanese Patent Laid-Open No. 11-235063

  An object of the present invention is to provide a driving apparatus that can feed a driven body minutely (finely) and obtain a large driving force.

Such an object is achieved by the present invention described below.
The driving device according to the present invention is provided on a bendable main body, a contact portion that is provided on the symmetry axis of the main body portion, abuts on the driven body, and a position off the symmetry axis of the main body portion, A drive device including a vibrating body having a plurality of excitation parts that are deformed by applying a voltage,
By driving at least one of the plurality of excitation units without driving at least one excitation unit and applying a driving force to the other excitation unit, the vibrator receives the contact from the driven body. A bending displacement is caused by a balance with a reaction force, and the driven body is driven through the contact portion by the bending displacement.

According to this invention, the vibrating body is indirectly bent and displaced by a balance between the driving force of the excitation unit and the reaction force received by the contact portion from the driven body, and the driven body is moved via the contact portion by this bending displacement. To drive. Thereby, the drive system of a vibrating body can be simplified compared with the case where a vibrating body is bent and displaced directly by an excitation part.
In addition, a large driving force can be obtained and the driven body can be slightly (finely moved) fed.
Further, by arranging at least one pair of excitation parts with the symmetry axis (center axis) of the main body interposed therebetween, the vibrating body can be bent in both forward and reverse directions with respect to the symmetry axis. Can be driven in both forward and reverse directions.

In the drive device of the present invention, it is preferable that the drive direction of the driven body is changed by changing the combination of the excitation unit that is not driven and the excitation unit that is driven.
Thereby, the drive direction of a to-be-driven body can be changed easily.
In the driving apparatus of the present invention, it is preferable that the non-driven excitation unit is configured to be grounded.
This suppresses (prevents) curing of the excitation unit due to charge accumulation, makes the vibrating body easier to deform, and improves the vibration efficiency of the vibrating body.
In the drive device according to the aspect of the invention, it is preferable that the non-driven excitation unit is connected to a detection circuit that detects vibration of the vibrating body.
Thereby, the vibration of the vibrating body can be detected.

The driving device according to the present invention is provided on a bendable main body, a contact portion that is provided on the symmetry axis of the main body portion, abuts on the driven body, and a position off the symmetry axis of the main body portion, A drive device including a vibrating body having a plurality of excitation parts that are deformed by applying a voltage,
By making the distortion amount of at least one excitation part of the plurality of excitation parts different from a reference distortion amount, the vibrating body is bent and displaced, and the driven body via the contact part is caused by the bending displacement. It is characterized by driving.

According to the present invention, the vibrating body is displaced by bending (inducing bending displacement in the vibrating body) due to the deviation (difference) in the distortion amount (stretching amount) of the excitation unit, and driven by the bending portion through the contact portion. Drive the body. As a result, a larger driving force can be obtained and the driven body can be finely (finely moved) fed. Moreover, the drive system of the vibrating body can be simplified.
Further, by arranging at least one pair of excitation parts with the symmetry axis (center axis) of the main body interposed therebetween, the vibrating body can be bent in both forward and reverse directions with respect to the symmetry axis. Can be driven in both forward and reverse directions.

In the drive device of the present invention, it is preferable that the drive direction of the driven body is changed by changing the combination of the excitation units that vary the amount of distortion.
Thereby, the drive direction of a to-be-driven body can be changed easily.
In the drive device of the present invention, it is preferable that all of the plurality of excitation units are driven to drive the driven body.
Thereby, a higher driving force can be obtained.

The drive device of the present invention is preferably configured to adjust the voltage value applied to the excitation unit so that the distortion amount of the corresponding excitation unit is different from the reference distortion amount.
Thereby, the distortion amount of the excitation unit can be easily adjusted (adjusted), and the distortion amount of the corresponding excitation unit can be made different from the reference distortion amount.
In the drive device of the present invention, it is preferable that the displacement direction of the excitation unit is substantially perpendicular to the movement direction of the driven body.
Thereby, the frictional force between the contact portion and the driven body can be increased, and efficient driving can be realized.

In the drive device of the present invention, it is preferable that longitudinal vibration is excited by the excitation unit.
As a result, the displacement amount of the contact portion in the bending direction (lateral direction) can be suppressed as compared with the case where bending vibration or the combined vibration of longitudinal vibration and bending vibration is directly excited on the vibrating body, and the driven body Can be finely fed.

In the drive device of the present invention, it is preferable that the excitation unit is configured to be driven at a frequency substantially equal to a resonance frequency of longitudinal vibration.
As a result, the displacement amount of the contact portion in the bending direction (lateral direction) can be suppressed as compared with the case where bending vibration or the combined vibration of longitudinal vibration and bending vibration is directly excited on the vibrating body, and the driven body Can be slightly fed, and the driving efficiency can be improved.

In the drive device of the present invention, it is preferable that the symmetry axis of the main body is substantially perpendicular to the moving direction of the driven body.
Thereby, the frictional force between the contact portion and the driven body can be increased, and efficient driving can be realized.
In the drive device of the present invention, it is preferable that at least one pair of the plurality of excitation portions is disposed with the symmetry axis of the main body portion interposed therebetween.
Thereby, since the vibrating body can be bent in both forward and reverse directions with respect to the symmetry axis, the driven body can be driven in both forward and reverse directions.

In the drive device according to the aspect of the invention, it is preferable that at least one pair of the excitation units among the plurality of excitation units is arranged symmetrically with respect to the symmetry axis of the main body.
As a result, the vibrating body can be bent symmetrically in both forward and reverse directions with respect to the symmetry axis, so that the driven body can be driven symmetrically in both forward and reverse directions.
In the driving apparatus according to the present invention, it is preferable that the pair of excitation units is provided so as to sandwich the main body unit from the moving direction of the driven body.

In the driving apparatus of the present invention, it is preferable that a slit is provided between the pair of excitation units.
Thereby, the restraint between each excitation part is suppressed and the drive efficiency of a vibrating body can be improved.
In the driving apparatus according to the present invention, it is preferable that the main body portion has a substantially polygonal columnar portion, and the excitation portion is provided on each side surface of the main body portion.
Thereby, a main-body part (vibration body) can be bent-displaced to arbitrary directions.

In the drive device according to the aspect of the invention, it is preferable that the main body portion has a substantially cylindrical portion, and the plurality of excitation portions are provided so as to surround the main body portion from a side surface.
Thereby, a main-body part (vibration body) can be bent-displaced to arbitrary directions.
In the driving apparatus according to the aspect of the invention, it is preferable that the excitation unit includes a piezoelectric element.
In the drive device of the present invention, it is preferable that a plurality of the vibrators are provided and a common driven body is driven by the plurality of vibrators.
Thereby, the movement of the driven body can be arbitrarily set (adjusted).
In the drive device of the present invention, it is preferable that at least three of the vibrating bodies are provided and a common driven body is driven by the plurality of vibrating bodies.
Thereby, the movement of the driven body can be arbitrarily set (adjusted).

DESCRIPTION OF EMBODIMENTS Hereinafter, a drive device of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.
(First embodiment)
FIG. 1 is a perspective view showing a drive device according to a first embodiment of the present invention, and FIG. 2 is a configuration diagram showing the drive device shown in FIG.
As shown in these drawings, the drive device 1 includes a vibrating body 2 and a control system having a drive circuit and a detection circuit. The drive device 1 vibrates the vibrating body 2 by applying an alternating voltage (high frequency voltage), and transmits the vibration to the driven body (moving body) P to drive (move) the driven body P. It is. The driving device 1 is capable of moving the driven body P by a slight displacement, that is, a slight (fine movement), by suppressing the vibration component of the vibrating body 2 in the driving direction (movement direction) of the driven body P. It has the characteristics.

The vibrating body 2 includes a bendable main body portion (reinforcing plate) 21, a first excitation portion 22a, a second excitation portion 22b, a contact portion (convex portion) 23, and a pair of support portions (arm portions). 24). Hereinafter, the first excitation unit and the second excitation unit are also simply referred to as “excitation units”, respectively.
The main body 21 has a substantially rectangular plate-like structure and is made of, for example, stainless steel, aluminum, an aluminum alloy, titanium, a titanium alloy, copper, a copper-based alloy, or other metal materials. However, the shape and constituent materials of the main body 21 are not limited to this. The main body 21 has a function of reinforcing the vibrating body 2 and prevents damage to the vibrating body 2 due to over-amplitude or external force. The main body 21 functions as a common electrode for a pair of deformation elements (electric / mechanical conversion elements) 25 described later.

  Each of the excitation units 22a and 22b includes a deformation element 25 and an electrode 26, and has a function of exciting (exciting) the vibration of the vibrating body 2. Specifically, in the portion of the deformation element 25, the portion that expands and contracts (stretching vibration) by application of voltage and the electrode 26 are the main portions of the excitation portions 22a and 22b, respectively. That is, in this drive device 1, of the deformation element 25, the portion where the electrodes 26, 26 are disposed (the portion corresponding to the electrodes 26, 26) and the corresponding electrode 26 are respectively connected to the excitation portions 22 a, 22 b. It constitutes the main part.

Here, the “deformation element” refers to an element having a member or part that is deformed by the supply of electric energy. Examples of such a deformable element include a piezoelectric element, a shape memory element, a magnetostrictive element, and an artificial muscle. Among these, a piezoelectric element is preferable. In the driving device 1, a piezoelectric element is employed as the deformation element 25.
The constituent material of the piezoelectric element is not particularly limited. For example, lead zirconate titanate (PZT), crystal, lithium niobate, barium titanate, lead titanate, lead metaniobate, polyvinylidene fluoride, lead zinc niobate Various types such as lead scandium niobate can be used. By applying an alternating voltage to the piezoelectric element, the piezoelectric element expands and contracts in a predetermined direction. Further, the expansion / contraction displacement can be easily and arbitrarily controlled by adjusting (adjusting) the magnitude and frequency of the applied voltage. Thereby, the deformation of the deformation element 25 can be easily and accurately controlled.

  The deformation element 25 has a rectangular plate-like structure substantially congruent with the main body portion 21. The deformation elements 25 are configured as a pair, and are laminated so as to be planar with the main body 21 so as to face each other and sandwich the main body 21 from the front and back sides (see FIG. 1). . Further, the deformation elements 25, 25 are fixed to the main body 21. Thereby, there exists an advantage which can improve the intensity | strength of the vibrating body 2. FIG.

The electrode 26 is composed of a strip-shaped (rectangular) plate-like member, and two electrodes are installed as a set on one deformation element 25 along the edge on the long side on the deformation element 25. ing. One of the installed electrodes 26 and 26 is included in the first excitation unit 22a, and the other is included in the second excitation unit 22b.
Each electrode 26 is provided at a position deviated from the longitudinal central axis (symmetric axis) 31 of the vibrating body 2 (main body portion 21), and is disposed substantially parallel to the central axis 31. (See FIGS. 1 and 2). Thereby, bending vibration is excited (excited) in the vibrating body 2 by the action described later.

Moreover, both the electrodes 26 and 26 are arrange | positioned symmetrically via the central axis 31 (refer FIG. 1 and FIG. 2). That is, on the vibrating body 2, the first excitation part 22 a and the second excitation part 22 b are provided symmetrically with the central axis 31 interposed therebetween. Thereby, symmetrical vibrations are excited in the vibrator 2 when the first excitation unit 22a is driven and when the second excitation unit 22b is driven.
In addition, a total of four electrodes 26 are provided, two for each of the front and back deformation elements 25, 25. Thereby, the vibrating body 2 is formed with the first excitation portion 22a and the second excitation portion 22b on the front and back sides, respectively. However, illustration of the 1st excitation part 22a and the 2nd excitation part 22b of the back surface side which does not appear in drawing is abbreviate | omitted.

In this drive device 1, the vibrating body 2 has a total of four excitation parts 22 a, 22 a, 22 b, and 22 b on the front and back sides, but this is more compared to the case where the excitation parts 22 a and 22 b are provided only on one side. This is preferable in that a strong driving force can be obtained.
However, the present invention is not limited to this, and the excitation units 22 a and 22 b may be provided only on one side of the vibrating body 2. Thereby, the vibrating body 2 (drive device 1) can be reduced in thickness and weight.

In addition, the electrodes 26 and 26 of the first excitation parts 22a and 22a on the front and back sides and the electrodes 26 and 26 of the second excitation parts 22b and 22b on the front and back sides are electrically connected to each other by a conductive wire (conductive wire). Connected (see FIGS. 1 and 2).
Moreover, the electrodes 26 and 26 of each excitation part 22a and 22b are respectively connected to the drive circuit and detection circuit (illustration omitted) of the vibrating body 2 (refer FIG. 1 and FIG. 2). The drive circuit applies an alternating voltage to the excitation units 22a and 22b to expand and contract the excitation units 22a and 22b at a high speed, and adjusts the applied voltage, that is, adjusts the magnitude and frequency of the applied voltage, thereby adjusting the excitation units 22a and 22b. Control expansion and contraction freely. In this case, only one of the first excitation unit 22a and the second excitation unit 22b is driven (energized). As a result, the drive circuit excites vibrations in the vibrating body 2 and controls the vibrations.

The detection circuit detects the vibration frequency (vibration) of the vibrating body 2 by detecting the voltage from the excitation unit on the non-drive side (the non-energized side). The detection circuit side is grounded via a detection resistor (detection resistor) for detecting such a voltage (connected to the ground) (see FIG. 2).
In the driving device 1, a switch (changeover switch) S is provided between the vibrating body 2 and the driving circuit and the detection circuit. The switch S includes the excitation units 22a and 22b and the drive circuit so that only one of the first excitation unit 22a and the second excitation unit 22b is connected to the drive circuit and driven by the drive circuit. And the connection with the detection circuit is switched. The excitation unit on the non-drive side is connected to the detection circuit by switching the switch S, and is used for voltage detection, that is, detection of the vibration frequency of the vibrating body 2 as described above. Note that any configuration can be adopted for the switch S.

In the driving device 1, the excitation circuit electrode on the detection circuit side (non-driving side) is grounded (see FIG. 2). This is preferable in that the flexibility of the element 25 can be increased and the vibration efficiency of the vibrating body 2 can be improved.
The contact part 23 is provided in the center part of the short side of the vibrating body 2, that is, the center part of the tip part in the longitudinal direction. Further, the contact portion 23 is disposed on the central axis 31 of the vibrating body 2, protrudes in the direction of the central axis 31, and comes into contact with the driven body P substantially vertically (see FIGS. 1 and 2). The contact portion 23 is formed integrally with the main body portion 21 (the main body portion 21 and the contact portion 23 are formed as one member). Thereby, there exists an advantage which can install the contact part 23 firmly with respect to the main-body part 21 (vibrating body 2). In particular, in the driving device 1, the contact portion 23 collides with the driven body P at a high speed and repeatedly with a high pressing force due to the vibration of the vibrating body 2 during driving. Therefore, this configuration has an advantage that the durability of the contact portion 23 can be improved.

  In the present embodiment, the contact portion 23 has a substantially semicircular tip (see FIGS. 1 and 2). Such a contact portion 23 stably makes frictional contact with the side surface of the driven body P as compared with the case where the contact portion 23 has a square tip portion. Accordingly, there is an advantage that the pressing force from the vibrating body 2 can be reliably transmitted to the driven body P even when the acting direction of the vibrating body 2 is slightly deviated. Note that the shape of the contact portion 23 is not limited to a semicircular shape, and may be another shape.

  Here, the positional relationship between the excitation units 22a and 22b and the contact unit 23 will be described. In this drive device 1, the excitation portions 22 a and 22 b and the contact portion 23 are provided at positions where bending vibration is indirectly induced in the vibrating body 2 by expansion and contraction of the excitation portions 22 a and 22 b, respectively. Specifically, as described above, each of the excitation units 22a and 22b is provided at a position deviated from the central axis 31 of the vibrating body 2, and substantially parallel to the central axis 31 and the central axis. It arrange | positions symmetrically via 31 (refer FIG. 1 and FIG. 2).

On the other hand, the contact portion 23 is disposed on the central axis 31 of the vibrating body 2, protrudes in the direction of the central axis 31, and makes contact with the driven body P substantially perpendicularly.
In such an arrangement, when the driving device 1 is not driven (stationary), the longitudinal direction of the excitation parts 22a and 22b, that is, the extension line in the expansion / contraction direction, serves as a contact point (contact point) between the contact part 23 and the driven body P. I can't pass. Therefore, in this configuration, as will be described later, the stress caused by the expansion / contraction of the excitation portion 22a or 22b and the reaction force received by the contact portion 23 from the driven body P act on the vibration body 2 and Bending motion (bending vibration) is induced. As a result, there is an advantage that minute bending vibration can be excited in the vibrating body 2. Further, for example, by adjusting the voltage applied to the excitation units 22a and 22b and adjusting the positional relationship between the excitation units 22a and 22b and the contact unit 23, the bending vibration excited by the vibrating body 2 is adjusted with a small amount. There are advantages you can do. Specifically, the bending vibration can be adjusted by, for example, increasing / decreasing (changing) the applied voltage, increasing / decreasing the frequency, increasing / decreasing the distance between the excitation units 22a, 22b and the central axis 31 of the vibrating body 2, and the like.

  Each support portion 24 is provided so as to protrude substantially perpendicularly to the long side at the center portion of the corresponding long side of the vibrating body 2, that is, the central portion of the side portion in the longitudinal direction. Each support portion 24 is formed integrally with the main body portion 21 (the main body portion 21 and each support portion 24 are formed as one member). Thereby, there exists an advantage which can install the support part 24 firmly with respect to the main-body part 21 (vibrating body 2). For example, bolts, screws, and other fixing means (not shown) are inserted through holes provided at the ends of the support portions 24, and are fixedly installed on a casing (base) (not shown) via the fixing means. Each support portion 24 supports the vibrating body 2 in a state of being separated from the wall surface (not shown) of the casing (floating with respect to the wall surface). In such a configuration, since no friction is generated between the vibrating body 2 and the wall surface of the housing, there is an advantage that the vibration of the vibrating body 2 is not easily restrained and free vibration of the vibrating body 2 can be realized.

Each support portion 24 has elasticity, and the elastic body (restoring force) urges the vibrating body 2 toward the driven body P, and the urging force causes the contact portion 23 of the vibrating body 2 to be urged. Is pressed (pressed) against the side surface of the driven body P. The main body 21 is grounded through the support 24, for example.
Here, the support portion 24 is provided on the side of the vibrating body 2 and at a position that is a node of vibration of the vibrating body 2. This position can be obtained by vibration analysis or other known methods. For example, when the electrodes 26, 26 are provided symmetrically in the longitudinal direction and the width direction of the vibrating body 2 (see FIGS. 1 and 2) as in the driving device 1, the longitudinal direction of the vibrating body 2 Near the center is a vibration node. Therefore, in the driving device 1, the support portion 24 is provided at the approximate center of the long side of the vibrator 2. With this configuration, when the vibrating body 2 vibrates, the support portion 24 does not hinder the vibration of the vibrating body 2, so that dissipation of vibration energy from the support portion 24 to the outside can be suppressed. Thereby, there exists an advantage which can drive the drive device 1 efficiently.

In this first embodiment, the driven body P is a slider and is slidable (movable) in a direction perpendicular to the central axis 31 of the vibrating body 2 (the x-axis direction in FIGS. 1 and 2). is set up.
In the present invention, the configuration of the driven body P is not limited to this, and the driven body P includes, for example, a plate-like body, a linear body, a rod-like body, a columnar body, a cylindrical state, a rotor (rotary body), An annular body, a spherical body, etc. may be sufficient, and the to-be-driven body P may be provided, for example so that rotation is possible or rocking | swinging about a predetermined fulcrum.

FIG. 3 is an explanatory diagram illustrating the operation of the drive device illustrated in FIG. 1. 3a to 3c show a case where the driven body P slides in the right direction in the figure, and FIG. 3d shows a case where the driven body P slides in the left direction in the figure.
In this drive device 1, when the driven body P is driven (slid) to the right side in FIG. 3, the vibrating body 2 receives an alternating voltage of a predetermined frequency (high frequency) from a drive circuit (not shown). It is applied to the first excitation unit 22a. At this time, the second excitation unit 22b is connected to the detection circuit side by the switch S. As a result, the first excitation portion 22a (specifically, the deformation element 25 in the portion where the electrode 26 is disposed) is elastically displaced in the longitudinal direction at high speed and repeatedly by the application of the AC voltage. The expansion / contraction displacement (vibration) of the first excitation unit 22a itself is longitudinal vibration without bending. At this time, the second excitation unit 22b side does not expand or contract, or performs a very small expansion / contraction displacement due to the expansion / contraction displacement of the first excitation unit 22a.

  First, from the initial state where the vibrating body 2 is not deformed (see FIG. 3A), the first excitation portion 22a extends in the longitudinal direction. At this time, the stress generated by the extension of the first excitation portion 22a and the reaction force received by the contact portion 23 from the driven body P act in the vibrating body 2, and the vibrating body 2 has a central axis 31 in the figure. The middle left side is bent so as to be convex (see FIG. 3B). The pressing force L (displacement of the contact portion 23) L exerted on the driven body P by the contact portion 23 acts in a direction inclined with respect to a direction perpendicular to the moving direction of the driven body P (vertical direction). A pressure component (component in the moving direction of the driven body P in the displacement of the contact portion 23) Lx is generated in the moving direction of the body P. On the other hand, the pressing component Lz in the vertical direction of the pressing force L (the vertical component in the displacement of the contact portion 23) Lz generates a frictional force between the contact portion 23 and the driven body P. Thereby, the driven body P slides in the right direction in FIG. 3B by the pressing component Lx in the moving direction and the pressing component Lz in the vertical direction given from the contact portion 23.

Next, the first excitation part 22a contracts, and the vibrating body 2 bends in the opposite direction (see FIG. 3C). At this time, the contact portion 23 is instantaneously separated from the driven body P, and does not inhibit the driven body P from sliding in the right direction and does not slide the driven body P in the left direction.
By repeatedly expanding and contracting the first excitation unit 22a in the vibrating body 2, the vibrating body 2 alternately repeats the states shown in FIGS. 3B and 3C. As a result, bending vibration is induced in the vibrating body 2 as a result (indirectly), and the contact portion 23 performs a slight rotational motion in a counterclockwise elliptical orbit in the drawing. Then, the driven body P is sent in the right direction in the figure by the pressing force L from the contact portion 23. As described above, in the driving device 1, bending vibration is indirectly induced in the vibrating body 2 by the longitudinal vibration excited by the first excitation portion 22 a and the reaction force received by the contact portion 23 due to the longitudinal vibration. As a result, the driven body P is driven.

  The electrode 26 of the second excitation unit 22b that is not driven functions as a detection electrode when the first excitation unit 22a is driven, and detects the vibration of the vibrating body 2. Then, the drive circuit adjusts the voltage applied to the first excitation unit 22a based on the detection result, and feedback-controls the vibration of the vibrating body 2. Thereby, there exists an advantage which can control suitably the moving amount of the to-be-driven body P, a moving speed, etc.

Here, the drive frequency of the vibrating body 2 is preferably the resonance frequency of the longitudinal vibration. As a result, there is an advantage that the driving efficiency can be improved and a larger driving force can be obtained. The resonance frequency can be determined as appropriate based on the shape, structure, material, and other factors of the vibrating body 2.
On the other hand, contrary to the above case, if the switch S is switched, the second excitation unit 22b side is connected to the drive circuit, and the first excitation unit 22a side is connected to the detection circuit, the driven body P is It can be driven in the opposite direction (left direction in the figure) (see FIG. 3D). At this time, the contact portion 23 of the vibrating body 2 performs a slight rotational motion in a clockwise elliptical orbit in the drawing. And the to-be-driven body P is sent to the left direction in a figure with the pressing force from this contact part 23. FIG.

In this way, the driven body P can be arbitrarily driven in both forward and reverse directions (both left and right directions in the figure). That is, by changing the switch S and changing the driving excitation unit (combination of the non-driving excitation unit and the driving excitation unit), the moving direction of the driven body P can be changed. Can be moved in either the forward direction or the reverse direction.
In the driving device 1, the excitation units 22 a and 22 b are formed symmetrically with respect to the central axis 31 of the vibrating body 2. As a result, symmetrical vibrations are excited in the vibrator 2 when the first excitation unit 22a is driven and when the second excitation unit 22b is driven. There is an advantage that P can be moved forward and backward equally.

  As described above, in the driving device 1, the stress generated by the expansion and contraction of the first excitation portion 22a, that is, the driving force of the first excitation portion 22a and the reaction force that the contact portion 23 receives from the driven body P As a result of this balance, bending vibration is indirectly induced in the vibrating body 2 to generate (form) a pressing component Lx in the moving direction of the driven body P. Therefore, as compared to the case of exciting bending vibration in the excitation unit and causing bending vibration directly in the vibrating body as in the conventional driving device, there is an advantage that the pressing component Lx in the moving direction can be suppressed to a minute amount. is there. The pressing component Lx in the moving direction can be arbitrarily adjusted by adjusting the voltage applied to the excitation units 22 a and 22 b and adjusting the positional relationship between the excitation units 22 a and 22 b and the contact unit 23. As a result, the driven body P can be displaced, that is, finely (finely moved) with a small amount. In addition, the displacement amount of the driven body P can be adjusted in minute units.

Moreover, in this drive device 1, the structure of the vibrating body 2 is simple, and the drive device 1 can be reduced in size and weight.
Further, in the driving device 1, longitudinal vibrations are excited in the excitation portions 22 a and 22 b (that is, the deformation element 25) themselves, and the driving force due to the longitudinal vibrations and the reaction force that the contact portion 23 receives from the driven body P. The bending vibration is indirectly induced in the vibrating body 2 by the balance. Therefore, the pressing component Lz in the direction perpendicular to the moving direction of the driven body P is larger than in the case where the bending vibration is directly excited in the excitation unit. Thereby, a large frictional force is obtained between the contact portion 23 and the driven body P, and the driving force of the driven body P can be increased.

  In particular, in the conventional driving device, since the driven body is driven by exciting the bending vibration directly to the excitation unit, the movement of the driven body is reduced to reduce the amplitude of the bending vibration. It was necessary to suppress the pressing component Lx in the direction (see FIG. 4B). For this reason, the conventional driving device has a problem that the vertical pressing component Lz is reduced, the frictional force between the contact portion and the driven body is reduced, and a large driving force cannot be obtained. In this respect, the drive device 1 excites longitudinal vibration in the excitation unit 22a and indirectly induces bending vibration in the vibrating body 2. Therefore, even when the pressing component Lx in the moving direction equivalent to the above is obtained. The vertical pressing component Lz can be increased (see FIG. 4A). Accordingly, there is an advantage that a large driving force can be obtained and the driven body P can be slightly fed and positioning with high accuracy is possible.

  Further, in the driving device 1, since the longitudinal vibration is excited in the excitation units 22a and 22b, the driving circuit and the detection circuit are compared with the case where the bending vibration (or the combined vibration of the bending vibration and the longitudinal vibration) is directly excited. The configuration of the control system such as can be simplified. Further, the contact portion 23 of the vibrating body 2 can be largely displaced in the vertical direction (the height direction with respect to the contacted surface of the driven body P) by the longitudinal vibration of the excitation portions 22a and 22b. Therefore, for example, even when the surface roughness of the driven body P is large, the contact portion 23 can easily get over the unevenness, and thus stable driving can be realized.

  Further, in the driving device 1, the vibrating body 2 is disposed with the vibration direction (displacement direction) of the excitation portions 22a and 22b oriented substantially perpendicular to the moving direction of the driven body P (FIG. 1). And FIG. 2). Therefore, as compared with the configuration in which the vibrating body is arranged so that the vibration direction is inclined with respect to the driven body, the pressing component Lz in the moving direction of the driven body P can be reduced, and a larger driving force (high driving force) ) Can be obtained.

  In the conventional driving device, the vibration body is driven by directly exciting the combined vibration of the longitudinal vibration and the bending vibration. However, it is difficult to set an appropriate drive frequency in consideration of both the resonance frequency of the longitudinal vibration and the resonance frequency of the bending vibration, and it is difficult to drive efficiently. Since the vibration characteristics vary due to the influence of driving conditions and environmental conditions, it is difficult to adjust the vibration characteristics. In this respect, in this drive device 1, since the excitation units 22 a and 22 b of the vibrating body 2 are both driven by longitudinal vibration, the vibration body can be obtained by setting a frequency substantially equal to the resonance frequency of the longitudinal vibration as the driving frequency. 2 can be driven efficiently. Further, the adjustment between the longitudinal vibration and the bending vibration as described above is unnecessary, and the drive pattern and the conductive wiring can be simplified.

  In the driving device 1, the contact portion 23 is disposed on the central axis 31 of the vibrating body 2, and the excitation portions 22 a and 22 b are disposed symmetrically with respect to the central axis 31. And since the excitation parts 22a and 22b driven by the switch S are switched and the induction | guidance | derivation direction of a bending vibration is switched, the to-be-driven body P can be moved symmetrically to both forward and reverse directions. That is, since it is forward / reverse (right / left) symmetric, the drive characteristics in the forward direction and the drive characteristics in the reverse direction can be made substantially equal.

  Further, the usage of the driving device 1 is not particularly limited, but the driving device 1 has a characteristic capable of minutely feeding the driven body P with a large driving force as described above. It can be suitably used for an operating device (control device) and electronic equipment that require fine feed. Specific examples of this include an electric stage, a turntable of an imaging device (camera), and the like.

In the present embodiment, as shown in FIG. 2, the detection circuit side is grounded via a detection resistor. However, the present invention is not limited to this. For example, the detection circuit side may not be grounded. When the detection circuit side is not grounded, the vibration of the vibrating body 2 can be detected by detecting the voltage from the non-driving side excitation unit even if the detection resistor is omitted.
For example, when vibration of the vibrating body 2 is not detected (when the non-driving side excitation unit is not connected to the detection circuit), the detection resistor is omitted and the non-driving side excitation unit is grounded. You may comprise. By grounding the non-driving side excitation unit, as described above, curing of the deformation element 25 due to charge accumulation is suppressed, the flexibility of the deformation element 25 is increased, and the vibration efficiency of the vibrating body 2 is improved. Can do.

(Second Embodiment)
Next, a second embodiment will be described.
FIG. 5 is a configuration diagram showing a driving apparatus according to the second embodiment of the present invention.
Hereinafter, the driving apparatus 1 according to the second embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.
As shown in the figure, in the second embodiment, both the first excitation unit 22a and the second excitation unit 22b are connected to a drive circuit, and are driven by applying an AC voltage to both of them. In the driving device 1, since both the first excitation unit 22a and the second excitation unit 22b are connected to the drive circuit, the detection circuit is omitted.

  In the driving device 1, a switch (switching switch) S is provided between the vibrating body 2 and the driving circuit. In the switch S, one of the first excitation unit 22a and the second excitation unit 22b is connected to a high (High) AC voltage side of the drive circuit, and the other is a low (Low) AC of the drive circuit. The excitation units 22a and 22b are connected to the high AC voltage side and the low AC voltage side of the drive circuit so that the excitation units 22a and 22b are driven by alternating voltages having different magnitudes. Switch. The high AC voltage and the low AC voltage of the driving circuit are AC voltages having the same frequency and the same phase.

FIG. 6 is an explanatory diagram showing the operation of the drive device described in FIG.
When a high AC voltage is applied to the first excitation unit 22a side and a low AC voltage is applied to the second excitation unit 22b side, as shown in FIG. 6, both of these excitation units 22a and 22b are longitudinal. Extends and contracts vertically to vibrate. However, since the voltage applied to the first excitation unit 22a is larger than that applied to the second excitation unit 22b, the first excitation unit 22a is more deformed than the second excitation unit 22b, that is, the amount of expansion and contraction. The (distortion amount) increases, and the vibrating body 2 vibrates due to the bias (difference) in the amount of expansion and contraction. And the to-be-driven body P is sent to the right direction in a figure with the pressing force L from the contact part 23. FIG.

On the other hand, when the switch S is switched to apply a low AC voltage to the first excitation unit 22a and a high AC voltage is applied to the second excitation unit 22b, the driven body P is switched. Can be driven in the opposite direction (left direction in the figure).
Note that either the distortion amount of the excitation unit when the low AC voltage is applied or the distortion amount of the excitation unit when the high AC voltage is applied may be set as the reference distortion amount. In addition, an arbitrary distortion amount between the distortion amount of the excitation unit when the low AC voltage is applied and the distortion amount of the excitation unit when the high AC voltage is applied may be set as a reference distortion amount. Good.

  In this way, by adjusting the magnitude (voltage value) of the alternating voltage applied to the excitation units 22a and 22b, the distortion amount of the corresponding excitation unit is made different from the reference distortion amount. , 22b can be adjusted (adjusted), and the distortion amount of the corresponding excitation unit can be made different from the reference distortion amount. That is, the distortion amount of the first excitation unit 22a is easily made larger than the distortion amount of the second excitation unit 22b, and the distortion amount of the second excitation unit 22b is easily set to the distortion amount of the first excitation unit 22a. Can be larger. Then, by switching the switch S to change the excitation unit having a large (small) distortion amount (combination of excitation units that vary the distortion amount), the moving direction of the driven body P can be changed, and the driven The body P can be moved in either the forward direction or the reverse direction.

According to this drive device 1, the same effect as the drive device 1 of 1st Embodiment mentioned above is acquired.
And in this drive device 1, since a plurality of excitation parts 22a and 22b (all the excitation parts) are driven (excited) to induce flexural vibration, it is larger than the drive apparatus 1 of the first embodiment. A driving force can be obtained.

  Further, in the driving device 1, the bending magnitude (bending rate) of the vibrating body 2 is such that the difference between the voltage applied to the first excitation unit 22a and the voltage applied to the second excitation unit 22b ( It is regulated by the voltage difference between the excitation units 22a and 22b. Therefore, by adjusting the voltage difference between the excitation units 22 a and 22 b, the amount of movement of the driven body P due to one vibration of the vibrating body 2 can be easily adjusted.

  Further, even if the voltage difference between the excitation parts 22a and 22b is reduced and the amount of movement of the driven body P due to one vibration of the vibration body 2 is small, a large alternating voltage is applied to each excitation part 22a and 22b itself. Since it can be applied, the pressing component Lz applied in the vertical direction can be increased. Therefore, a sufficiently large frictional force can be applied between the contact portion 23 and the driven body P, a larger driving force can be obtained, and the driving efficiency of the driven body P can be further increased.

FIG. 7 is a configuration diagram illustrating a modified example of the driving device illustrated in FIG. 5.
As shown in the figure, in this driving apparatus 1, a switch (switching switch) S and a voltage for depressurization (step-down) that depressurizes (steps down) the output voltage of the drive circuit between the vibrating body 2 and the drive circuit. And a resistor. The first excitation unit 22a and the second excitation unit 22b are connected to a common output unit of the drive circuit.

  In the switch S, one of the first excitation unit 22a and the second excitation unit 22b is connected to the output unit of the drive circuit without passing through the pressure reducing resistor, and a high (High) AC voltage is generated. The other is connected to the output part of the drive circuit via the pressure reducing resistor, a low (Low) AC voltage is applied, and the excitation parts 22a and 22b are driven by AC voltages of different magnitudes. Thus, the connection between the excitation units 22a and 22b and the high AC voltage side and the low AC voltage side is switched.

In this configuration, when the first excitation unit 22a is connected to the output unit of the drive circuit without a pressure reducing resistor, and the second excitation unit 22b is connected to the output unit of the drive circuit via a pressure reducing resistor. On the second excitation unit 22b side, the applied voltage is reduced by the pressure reducing resistance and the expansion / contraction amount (distortion amount) is smaller than that on the first excitation unit 22a side. As a result, a bias (difference) in the amount of expansion / contraction occurs between the first excitation unit 22a and the second excitation unit 22b, and bending vibration is induced in the vibrator 2 by the same action as described above. The same applies when the switch S is switched.
According to this configuration, the configuration of the drive circuit and other control systems can be further simplified.
The second embodiment can be applied to each embodiment.

(Third embodiment)
Next, a third embodiment will be described.
FIG. 8 is a configuration diagram showing a vibrating body of the driving apparatus according to the third embodiment of the present invention.
Hereinafter, the driving device 1 of the third embodiment will be described focusing on the differences from the first embodiment described above, and the description of the same matters will be omitted.

  As shown in the figure, in the third embodiment, the vibrating body 2 has a slit 27. The slit 27 is provided between the first excitation part 22 a and the second excitation part 22 b, that is, on the central axis 31 of the vibrating body 2, and the main body part 21 and the deformation element 25 are formed by the slit 27. It looks like it was cut out. That is, the first excitation unit 22 a and the second excitation unit 22 b are separated on the vibrating body 2 by the slit 27.

In this case, as shown in FIG. 8A, the slit 27 may be opened at the end opposite to the contact portion 23 (upper side in the drawing) of the vibrating body 2, and FIG. 8B. As shown in FIG.
According to this drive device 1, the same effect as the drive device 1 of 1st Embodiment mentioned above is acquired.

And in this drive device 1, the excitation parts 22a and 22b to which the voltage was applied are not restrained by the other excitation part, but are expanded and contracted almost independently. That is, interference between the excitation units 22a and 22b is suppressed, and the excitation units 22a and 22b to which a voltage is applied are easily expanded and contracted, thereby improving the driving efficiency of the vibrating body 2.
The third embodiment can be applied to each embodiment.

(Fourth embodiment)
Next, a fourth embodiment will be described.
FIG. 9 is a perspective view showing a drive device according to a fourth embodiment of the present invention, and FIG. 10 is an explanatory view showing the operation of the drive device shown in FIG.
Hereinafter, the driving device 1 according to the fourth embodiment will be described focusing on the differences from the first embodiment described above, and description of similar matters will be omitted.
As shown in these drawings, the fourth embodiment has a thicker main body portion 21 as compared with the driving device 1 of the first embodiment, and the first excitation portion is provided on one side of the main body portion 21. 22a and the second excitation part 22b on the other side.

  In this drive device 1, the excitation units 22 a and 22 b are respectively installed on opposite side surfaces of the main body 21 so as to sandwich the main body 21 from the moving direction of the driven body P (the x-axis direction in FIG. 9). Yes. Further, the excitation units 22 a and 22 b are arranged at positions deviating from the central axis 31 of the vibrating body 2 in the moving direction of the driven body P depending on the thickness of the main body 21. In other words, the excitation units 22 a and 22 b are installed on the surface of the side surface of the main body unit 21 on the moving direction side of the driven body P so as to face each other.

The vibrating body 2 is connected to a housing (not shown) via a fixing means (not shown) on the rear end side in the longitudinal direction (side where the contact portion 23 is not provided) or directly. Fixed. The vibrating body 2 may be fixed on the side surface on which the excitation parts 22a and 22b are not formed.
In the driving device 1, when an alternating voltage is applied to the first excitation unit 22 a and the first excitation unit 22 a expands and contracts, the contact unit 23 bends to the vibrating body 2 due to a reaction force received from the driven body P. Vibration is induced. And the to-be-driven body P is sent to the right direction in a figure with the pressing force L from the contact part 23. FIG. When an AC voltage is applied to the second excitation unit 22b, the driven body P is similarly sent in the left direction in the figure.
According to this drive device 1, the same effect as the drive device 1 of 1st Embodiment mentioned above is acquired.

(Fifth embodiment)
Next, a fifth embodiment will be described.
FIG. 11 is a perspective view showing a drive device according to a fifth embodiment of the present invention, and FIG. 12 is a configuration diagram showing the drive device shown in FIG.
Hereinafter, the driving device 1 of the fifth embodiment will be described focusing on the differences from the first embodiment described above, and the description of the same matters will be omitted.

As shown in these drawings, in the fifth embodiment, the vibrating body 2 has excitation portions 22a to 22b arranged in a three-dimensional manner, so that the driven body P can be arbitrarily driven in the plane direction. It has become.
In the drive device 1, the main body 21 has a columnar shape (square column shape) having a square (quadrangle) cross-sectional shape. On the four side surfaces of the main body portion 21, a first excitation portion 22 a to a fourth excitation portion 22 d are respectively provided. These excitation parts 22 a to 22 d are provided at positions deviating from the central axis 31 of the vibrating body 2 depending on the thickness of the main body part 21, and are provided substantially parallel to the central axis 31. In addition, in this drive device 1, it arrange | positions so that the 1st excitation part 22a and the 2nd excitation part 22b may mutually oppose, and the 3rd excitation part 22c and the 4th excitation part 22d mutually oppose. (See FIG. 12).

These excitation units 22 a to 22 d are connected to the drive circuit and the detection circuit, and the connection is switched by switching the switch S.
A contact portion 23 is provided on the front end surface of the main body portion 21. The contact portion 23 protrudes in the direction of the central axis 31 of the vibrating body 2 and is in contact with the driven body P.
The vibrating body 2 is installed with its central axis 31 standing substantially perpendicular to the driven body P. The vibrating body 2 is connected to a housing (not shown) via a fixing means (not shown) on the rear end side in the longitudinal direction (side where the contact portion 23 is not provided) or directly. Fixed.

13-16 is explanatory drawing which shows the effect | action of the drive device described in FIG.
In the driving device 1, as shown in FIG. 13, when a voltage is applied to the first excitation unit 22a, the second excitation unit 22b, and the third excitation unit 22c to drive them, the excitation units 22a to 22a- The amount of expansion and contraction in the vibrating body 2 is biased by 22c and the non-driven excitation unit 22d. Then, bending vibration is induced in the vibrating body 2 by a balance between this driving force and the reaction force received by the contact portion 23 from the driven body P (see FIG. 14). As a result, the contact portion 23 rotates in an elliptical orbit, and the driven member P moves on the xy plane (a plane perpendicular to the z-axis with the direction of the central axis 31 of the vibrating body 2 as the z-axis direction (FIG. 10). See))). Specifically, when the first to third excitation units 22a to 22c are driven, the driven body P moves from the third excitation unit 22c to the fourth excitation unit 22d (see FIGS. 13 and 13). 14 in the left direction).

Further, when the first, second, and fourth excitation units 22a, 22b, and 22d are driven, the driven body P is directed from the fourth excitation unit 22d to the third excitation unit 22c (FIG. 13). And in the right direction in FIG.
In addition, when the first, third, and fourth excitation units 22a, 22c, and 22d are driven, the driven body P moves from the first excitation unit 22a to the second excitation unit 22b (FIG. 13). Sent down in the middle).

Further, when the second, third, and fourth excitation units 22b, 22c, and 22d are driven, the driven body P is directed from the second excitation unit 22b to the first excitation unit 22a (FIG. 13). Sent upward).
According to this drive device 1, as compared with the drive device 1 of the first embodiment, since the number of excitation units 22 is large, there is an advantage that the driven body P can be driven with a stronger driving force.

In addition, even if only the 3rd excitation part 22c is driven, the to-be-driven body P can be driven in the same direction as the case where the 1st-3rd excitation parts 22a-22c are driven. The same applies to other excitation units.
In addition, in the driving device 1, as shown in FIG. 15, when the first excitation unit 22a and the third excitation unit 22c are driven, the excitation unit 22b that is not driven from the excitation units 22a and 22c, A bending vibration that bends toward 22d (in the lower left direction in FIG. 15) is induced, and the driven body P is sent in this direction (lower left direction in FIG. 15).

Further, as shown in FIG. 16, when the first excitation unit 22a and the fourth excitation unit 22d are driven, the excitation units 22a and 22d are directed toward the non-drive excitation units 22b and 22c (see FIG. 16). 16 is induced to bend, and the driven body P is sent in this direction (lower right direction in FIG. 16).
When the second excitation unit 22b and the fourth excitation unit 22d are driven, the excitation units 22b and 22d are directed toward the non-drive excitation units 22a and 22c (in the upper right direction in FIG. 15). Bending bending vibration is induced, and the driven body P is sent in this direction (upper right direction in FIG. 15).

When the second excitation unit 22b and the third excitation unit 22c are driven, the excitation units 22b and 22c are directed toward the non-drive excitation units 22a and 22d (in the upper left direction in FIG. 16). Bending vibration is induced, and the driven body P is sent in this direction (upper left in FIG. 16).
In the present embodiment, the main body 21 has a quadrangular prism shape. However, the present invention is not limited to this. For example, the main body portion 21 may have a polygonal prism shape with a polygonal cross section such as a triangular prism shape, a pentagonal prism shape, or a hexagonal column shape. Good. Further, any other geometric shape may be formed.
In the present embodiment, one excitation unit is provided on each side surface. However, the present invention is not limited to this. For example, a plurality of excitation units may be provided on each side surface.

(Sixth embodiment)
Next, a sixth embodiment will be described.
FIG. 17 is a perspective view showing a driving apparatus according to the sixth embodiment of the present invention.
Hereinafter, the driving device 1 according to the sixth embodiment will be described with a focus on differences from the above-described fifth embodiment, and description of similar matters will be omitted.

As shown in the figure, the driving device 1 according to the sixth embodiment is applied to an electric stage. The driving device 1 includes a base 11, a driven body P that is a plate-like stage, and a plurality (three in the present embodiment) of vibrating bodies 2 of the fifth embodiment. The driven body P is a driven body common to the vibrating bodies 2.
Each vibrating body 2 has its center axis 31 standing vertically on the base 11 with the contact portion 23 facing directly upward (upper side in the figure), and the rear end side in the longitudinal direction (the contact portion 23 is provided). It is fixed on the side that is not. These vibrating bodies 2 are arranged so that the contact portions 23 are not arranged in a straight line but are positioned at the vertices of a triangle.

The driven body P is installed on the contact portion 23 of each vibrating body 2 arranged in this way so that it can be displaced. That is, the bottom surface of the driven body P is point-supported by the contact portion 23 of each vibrating body 2.
FIG. 18 is an explanatory diagram showing the operation of the drive device described in FIG.
As shown in the figure, in the driving device 1, by controlling the driving of each vibrating body 2, the driven body P is linearly moved, for example, in an arbitrary direction on the xy plane (FIG. 18). (See (a)), rotating (see FIG. 18 (b)), or linear movement and rotational movement can be performed at the same time.

As described above, according to the driving apparatus 1, the driven body P can be arbitrarily driven within the xy plane with a large driving force and a minute feed.
Moreover, in this drive device 1, by driving all the excitation portions 22a to 22d of each vibrating body 2, the frictional resistance between the contact portion 23 and the driven body P is substantially eliminated (very small). The restraining force in the xy plane direction of the driven body P can be eliminated. Thereby, the driven body P can be easily moved in the xy plane direction.

Moreover, in this drive device 1, after all the excitation parts 22a-22d of each vibrating body 2 are made to shrink | contract slowly, it is extended rapidly, and the to-be-driven body P is launched in the z-axis direction (refer FIG. 17). Is also possible.
In addition, in this 6th Embodiment, although the to-be-driven body P is a flat plate-like stage, not only this but the shape of the to-be-driven body P is good also as a spherical shape or a column shape, for example.

(Seventh embodiment)
Next, a seventh embodiment will be described.
FIG. 19 is a perspective view showing a driving apparatus according to the seventh embodiment of the present invention.
Hereinafter, the driving device 1 according to the seventh embodiment will be described with a focus on differences from the fifth embodiment described above, and description of similar matters will be omitted.

  As shown in the figure, in the seventh embodiment, the main body 21 of the vibrating body 2 has a cylindrical shape. In this drive device 1, eight excitation portions 22 a to 22 h having the same shape are provided at equal intervals (equal angular intervals) on the peripheral surface (side surface) of the main body portion 21. That is, the excitation parts 22 a to 22 h are provided so as to surround the peripheral surface of the main body part 21. Needless to say, the number of excitation units is not limited to eight.

Further, a contact portion 23 is provided on the front end surface of the main body portion 21. The contact portion 23 protrudes in the direction of the central axis 31 of the vibrating body 2 and is in contact with the driven body P. In this drive device 1, the driven body P is a sphere (having a spherical shape).
In addition, the vibrating body 2 is attached to a casing (not shown) via a fixing means (not shown) or directly on the rear end side in the longitudinal direction (side where the contact portion 23 is not provided). It is fixed against.

In this drive device 1, an arbitrary bending vibration with respect to the direction of the central axis 31 can be excited in the vibrating body 2 depending on which excitation unit 22 a to 22 h is driven. Thereby, the driven body P can be slightly rotated (smallly displaced) in an arbitrary direction with a large driving force.
The drive device of the present invention has been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part is replaced with an arbitrary configuration having the same function. be able to. In addition, any other component may be added to the present invention.
Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

It is a perspective view which shows the drive device concerning 1st Embodiment of this invention. It is a block diagram which shows the drive device described in FIG. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is a block diagram which shows the drive device concerning 2nd Embodiment of this invention. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is a block diagram which shows the modification of the drive device described in FIG. It is a block diagram which shows the vibrating body of the drive device concerning 3rd Embodiment of this invention. It is a perspective view which shows the drive device concerning 4th Embodiment of this invention. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is a perspective view which shows the drive device concerning 5th Embodiment of this invention. It is a block diagram which shows the drive device concerning 5th Embodiment of this invention. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is a perspective view which shows the drive device concerning 6th Embodiment of this invention. It is explanatory drawing which shows the effect | action of the drive device described in FIG. It is a perspective view which shows the drive device concerning 7th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Drive apparatus 2 ... Vibrating body 11 ... Base 21 ... Main body part 22a-22h ... Excitation part 23 ... Contact part 24 ... Supporting part 25 ... Deformation element 26 ... Electrode 27 ... Slit 31 ... Center axis L ... Pressing force Lx ... Pressing Component Lz ... Pressing component P ... Driven body S ... Switch

Claims (18)

Deformable by applying a voltage to a bendable main body, a contact portion provided on a symmetry axis of the main body portion, a contact portion contacting the driven body, and a position deviating from the symmetry axis of the main body portion. A driving device including a vibrating body having a plurality of excitation units,
By driving at least one of the plurality of excitation units without driving at least one excitation unit and applying a driving force to the other excitation unit, the vibrator receives the contact from the driven body. A driving apparatus which is bent and displaced by balance with a reaction force, and drives the driven body via the contact portion by the bending displacement.   The driving apparatus according to claim 1, wherein the driving direction of the driven body is changed by changing a combination of the excitation unit that is not driven and the excitation unit that is driven.   The drive device according to claim 1, wherein the excitation unit that is not driven is configured to be grounded.   4. The drive device according to claim 1, wherein the excitation unit that is not driven is configured to be connected to a detection circuit that detects vibration of the vibrating body. 5. Deformable by applying a voltage to a bendable main body, a contact portion provided on a symmetry axis of the main body portion, a contact portion contacting the driven body, and a position deviating from the symmetry axis of the main body portion. A driving device including a vibrating body having a plurality of excitation units,
By making the distortion amount of at least one excitation part of the plurality of excitation parts different from a reference distortion amount, the vibrating body is bent and displaced, and the driven body via the contact part is caused by the bending displacement. A driving device characterized by driving the motor.   The driving apparatus according to claim 5, wherein the driving direction of the driven body is changed by changing a combination of excitation units that vary the amount of distortion.   The drive device according to claim 5 or 6, wherein all of the plurality of excitation units are driven to drive the driven body.   The drive device according to any one of claims 5 to 7, wherein the drive unit is configured to make the distortion amount of the corresponding excitation unit different from a reference distortion amount by adjusting a voltage value applied to the excitation unit.   The driving device according to claim 1, wherein a displacement direction of the excitation unit is substantially perpendicular to a moving direction of the driven body.   The drive device according to claim 1, wherein the excitation unit is configured to be driven at a frequency substantially equal to a resonance frequency of longitudinal vibration.   The drive device according to claim 1, wherein a symmetry axis of the main body is substantially perpendicular to a moving direction of the driven body.   The drive device according to any one of claims 1 to 11, wherein at least one pair of excitation units among the plurality of excitation units is disposed with a symmetry axis of the main body portion interposed therebetween.   The drive device according to any one of claims 1 to 11, wherein at least one pair of the excitation units among the plurality of excitation units is arranged symmetrically with respect to an axis of symmetry of the main body unit.   The drive device according to claim 12 or 13, wherein the pair of excitation units are provided so as to sandwich the main body unit from a moving direction of the driven body.   The drive device according to claim 12, wherein a slit is provided between the pair of excitation units.   The drive device according to claim 1, wherein the main body portion has a substantially polygonal column-like portion, and the excitation portion is provided on each side surface of the main body portion.   The drive device according to claim 1, wherein the main body portion has a substantially cylindrical portion, and the plurality of excitation portions are provided so as to surround the main body portion from a side surface. The drive device according to claim 1, wherein the drive device includes at least three vibrating bodies, and is configured to drive a common driven body by the plurality of vibrating bodies.

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