JP2005176464A - Linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a linear motor in which the weight of an armature is reduced and variation in thrust force is eliminated. <P>SOLUTION: The linear motor comprises an armature having a hollow three-phase coil 3 applied with a conductor tubularly, and a plurality of magnets 60 each having a magnetic pole arranged oppositely to the outer circumferential surface of the three-phase coil 3 such that the magnetic poles of the same polarity face each other wherein only the three-phase coil 3 exists between the opposing magnets. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a linear motor.

The coreless linear motor is a type of linear motor that does not have a core (iron core) in the armature, and has features such as no cogging, small thrust fluctuation, and easy precision control. The coreless linear motor is used in various fields such as machine tools, injection molding machines, and semiconductor manufacturing apparatuses. The structure of the coreless linear motor is disclosed in, for example, Patent Document 1 and the like.
For example, in a mover of a coreless linear motor as disclosed in Patent Document 1, in order to ensure the rigidity of the mover, both sides of a plate-like holding plate made of a nonmagnetic material such as stainless steel or FRP are flattened. A plurality of formed coils are fixed with resin. This holding plate is arranged between a pair of linearly arranged permanent magnet rows, and the left-hand Fleming law is determined by the interaction between the magnetic flux from one permanent magnet row to the other permanent magnet row and the current flowing through the coil. Thrust based on is generated.
JP 2002-165434 A

By the way, in the coreless linear motor having the above-described structure, since the rigidity of the coil is low, a holding plate for ensuring the rigidity is indispensable. For this reason, there existed a disadvantage that a needle | mover became heavy and control responsiveness fell.
If a non-magnetic metal such as stainless steel is used for the coil holding plate, the holding plate is in the magnetic flux path of the magnetic circuit, so that an induced current flows through the holding plate when the mover moves linearly through the holding plate. In this case, a force in the direction opposite to the thrust is generated, which causes the thrust fluctuation.

  The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a linear motor in which the armature is reduced in weight and the thrust does not vary.

  The linear motor of the present invention is arranged such that a hollow three-phase coil in which conductive wires are wound in a cylindrical shape, a magnetic pole is opposed to the outer peripheral surface of the hollow three-phase coil, and a magnetic pole of the same polarity is opposed. A plurality of magnets.

  Preferably, the hollow three-phase coil is configured such that the coils of each phase are aligned and wound in a cylindrical shape and are hardened with an adhesive, and end faces are coupled to each other via an electrically insulating member.

  More preferably, the hollow three-phase coil includes first and second hollow three-phase coils that generate magnetic fields having opposite phases, and the first and second hollow three-phase coils. Corresponding coils of each phase are arranged adjacent to each other.

  The linear motor of the present invention is such that a hollow three-phase coil in which conductive wires are wound in a cylindrical shape, a magnetic pole is opposed to the outer peripheral surface of the hollow three-phase coil, and a magnetic pole of the same polarity is opposed. A plurality of magnets arranged, and a non-magnetic and electrically insulating material, and a hollow reinforcing member that commonly supports the inner circumference of each phase of the hollow three-phase coil.

In the present invention, the three-phase coil used for the armature is formed by winding a conductive wire in a cylindrical shape, so that the secondary moment of the coil can be increased, and the rigidity of the coil, in particular, the bending and shearing rigidity can be increased. In addition, the rigidity of the coil itself is remarkably increased by winding the conductive wires in a multi-layered arrangement in a cylindrical shape, and hardening them with an adhesive, and connecting the end faces to each other via an electrically insulating member. As a result, a metal member for ensuring the rigidity of the coil is not required in the coil, and the armature is significantly reduced in weight.
In the present invention, the coil is disposed between magnets having the same polarity of magnetic poles facing each other, and only a hollow coil is disposed between the facing magnets, and a magnetic body such as a yoke or a coil is held between the magnets. There is no conductor such as a metal plate. For this reason, the magnetic fluxes of the opposing magnets have opposite directions, and there is no magnetic material such as a yoke inside the coil, so that the magnetic flux reaches the coil near the magnet, but inside the three-phase coil. Hardly reach.
The direction of the force generated between one magnetic flux of the opposing magnet and the coil is the same as the direction of the force generated between the other magnetic flux and the coil, and this is the thrust of the linear motor.
Moreover, since there is no conductor other than the coil between the magnets, no induced current is generated other than the coil. As a result, there is no thrust fluctuation due to the force in the direction opposite to the thrust drop due to magnetic saturation of the magnetic material and the thrust caused by the induced current flowing in the conductor other than the coil.
Furthermore, in the present invention, a three-phase coil having a reverse phase relationship with respect to the three-phase coil is disposed adjacent to each phase coil. In the coils adjacent to each other, magnetic fluxes in opposite directions are generated and cancel each other. As a result, the magnetic flux from the coil does not adversely affect the magnetic field formed by the magnet.
Further, in the present invention, eddy current loss can also be avoided, and reduction in motor efficiency can be prevented.

According to the present invention, the rigidity of the armature coil can be greatly improved.
In addition, according to the present invention, it is possible to obtain a linear motor that can efficiently release the heat from the coil and suppress the temperature rise.
Furthermore, according to the present invention, a linear motor having a significantly reduced armature can be obtained.
Moreover, according to the present invention, a linear motor in which fluctuations in thrust are significantly suppressed can be obtained.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
First Embodiment FIG. 1 is a perspective view showing the structure of a linear motor according to an embodiment of the present invention.
As shown in FIG. 1, the linear motor 1 has a movable part 2 and a fixed part 50. In the present embodiment, the armature is the movable portion 2.

The fixed part 50 includes a yoke 51 and a plurality of permanent magnets 60 held by the yoke.
The yoke 51 is connected to the opposing portions 51A and 51B, which are opposed to each other at a predetermined interval, having a plane opposite to each other, and one end portion of the opposing portions 51A and 51B that are arranged perpendicular to these and along the linear motion directions A1 and A2. Part 51C. The linear movement directions A1 and A2 are directions in which the movable part 2 moves.
The facing portions 51A and 51B and the connecting portion 51C are integrally formed of a ferromagnetic material such as iron, for example. The outer surface of the facing portions 51A, 51B or the connecting portion 51C is fixed to the base or the like. The facing portions 51A and 51B and the connecting portion 51C may be separate. Moreover, it is good also as a structure which uses a ferromagnetic material for the opposing parts 51A and 51B, and uses a nonmagnetic material for the connection part 51C. Further, from the viewpoint of weight reduction, the yoke 51 may be made of a non-magnetic material such as a lightweight metal having a high specific strength such as an aluminum alloy or a reinforced plastic.

The permanent magnet 60 is formed in a plate shape having a rectangular outer shape, and each permanent magnet 60 has the same dimensions.
These permanent magnets 60 are arranged on the facing surfaces of the facing portions 51A and 51B along the linear motion directions A1 and A2. The permanent magnets 60 are arranged so that the polarities of the magnetic poles are alternately reversed along the linear motion directions A1 and A2, that is, the N pole, the S pole, the N pole, and the S pole. Furthermore, the permanent magnets 60 facing the facing portion 51A and the facing portion 51B are arranged so that the magnetic poles having the same polarity face each other.

FIG. 2 is a perspective view showing the structure of the movable part 2.
As shown in FIG. 2, the movable part 2 includes a coil assembly 3 and a holding member 10.
The holding member 10 is made of a plate-like member, and is formed of, for example, a metal such as stainless steel or an aluminum alloy. The holding member 10 plays a role of holding the coil assembly 3. The holding member 10 is supported by a guide mechanism (not shown) so as to be movable in the linear motion directions A1 and A2.

The coil coupling body 3 includes three-phase coils 3A, 3B, 3C. For each phase coil 3A, 3B, 3C, for example, a wet adhesive was applied to a conductive wire covered with an electrically insulating material, and this was aligned and wound in a cylindrical shape, and the adhesive was cured and hardened. Is. The coils 3A, 3B, and 3C have a rectangular cross-sectional shape, and each side facing the permanent magnet 60 is longer than the other sides.
After forming the cylindrical three-phase coils 3A, 3B, 3C, the end faces are joined to each other by the electrically insulating member 9 made of a nonmagnetic material, and the coil assembly 3 is formed. The electrically insulating member 9 is, for example, a glass epoxy resin or a hard anodized aluminum alloy. The coil coupling body 3 has a hollow portion 3H having a rectangular outline penetrating along the longitudinal direction.
Note that the winding directions of the three-phase coils 3A, 3B, and 3C are all the same.
Further, by configuring the three-phase coils 3A, 3B, and 3C as described above, the moment of inertia of the cross section can be increased, and the rigidity, particularly the bending and shearing rigidity of the three-phase coils 3A, 3B, and 3C coils is increased. Further, the rigidity of the three-phase coils 3A, 3B, and 3C itself is increased, and the three-phase coils 3A, 3B, and 3C are lightweight because they have the hollow portion 3H.

  For fixing the coil assembly 3 to the holding member 10, first, the outer peripheral surface 3 s 1 facing the holding member 10 is fixed to the holding member 10 with an electrically insulating adhesive 350 as shown in FIG. 3. Further, the fastening member 11 is fastened to the holding member 10 with the bolt 30 in a state where the outer peripheral surfaces 3 f 3 and 3 f 4 facing the permanent magnet 60 of the coil assembly 3 are fastened by the fastening member 11. As a result, the coil assembly 3 is firmly fixed to the holding member 10.

  Since the three-phase coils 3A, 3B, and 3C have a rectangular cross-sectional profile, the facing surface 60f of the permanent magnet 60 facing each other is the outer peripheral surface 3f3 of the coil assembly 3 as shown in FIG. , 3f4 with a predetermined gap, and the facing surface 60f and the outer peripheral surfaces 3f3, 3f4 are substantially parallel. As can be seen from FIG. 4, only the coil assembly 3 in which the three-phase coils 3 </ b> A, 3 </ b> B, 3 </ b> C are coupled is disposed between the opposing permanent magnets 60, 60. Therefore, there is no magnetic body or conductor inside the hollow portion 3H of the coil assembly 3.

Next, the operation of the linear motor 1 having the above configuration will be described with reference to FIG.
As shown in FIG. 5, the dimensions of the pair of magnetic poles, that is, the two permanent magnets 60, and the dimensions of the three-phase coils 3A, 3B, 3C substantially coincide with each other in the linear motion directions A1, A2.
The magnetic flux BF of the opposing permanent magnets 60, 60 with the three-phase coils 3A, 3B, 3C in between is the same in the polarity of the magnetic poles, so that from one of the opposing permanent magnets 60, 60 to the other Going to the permanent magnets 60, 60 that are mainly adjacent to each other, mostly.

  When three-phase alternating currents of U-phase, V-phase, and W-phase that are 120 degrees apart from each other are supplied to the three-phase coils 3A, 3B, and 3C, the direction of the current flowing through the three-phase coils 3A, 3B, and 3C on the yoke 51A side The direction of the current flowing in the three-phase coils 3A, 3B, 3C on the yoke 51B side is opposite, and the direction of the magnetic flux BF passing through the three-phase coils 3A, 3B, 3C on the yoke 51A side and the yoke 51B side The direction of the magnetic flux BF passing through the three-phase coils 3A, 3B, 3C is reversed. Therefore, thrust in the same direction is generated on the yoke 51A side and the yoke 51B side. Due to this thrust, the movable portion 2 is driven in the linear motion directions A1 and A2.

    As can be seen from FIG. 5, the magnetic flux BF of the permanent magnet 60 is mainly distributed in the vicinity of the surface 60f of the permanent magnet 60 and hardly reaches the interior of the three-phase coils 3A, 3B, 3C. Therefore, even if there are conductive wires up to the cores of the three-phase coils 3A, 3B, 3C, the magnetic flux of the permanent magnet 60 cannot be used. In the present embodiment, the region where the magnetic flux does not reach is defined as the hollow portion 3H, so that the utilization efficiency of the magnetic flux of the permanent magnet 60 is enhanced, and at the same time, the weight of the three-phase coils 3A, 3B, 3C is reduced. As a result, the movable part 2 is significantly reduced in weight and high control responsiveness is realized.

Moreover, according to this embodiment, since the coil coupling body 3 has the hollow part 3H, the heat generated in the three-phase coils 3A, 3B, 3C is easily released to the outside through the hollow part 3H. Further, if a cooling medium such as air is flowed using the hollow portion 3H, the cooling can be performed more efficiently. As a result, the temperature rise of the linear motor can be suppressed, and a decrease in positioning accuracy due to thermal deformation can be prevented.
Further, according to the present embodiment, since the coil assembly 3 has no conductor in the hollow portion 3H, no induced current is generated by the magnetic field generated by the three-phase coils 3A, 3B, 3C. No reverse force is generated. As a result, the thrust force fluctuation of the linear motor 1 due to the induced current does not occur. Further, since no induced current is generated, it is possible to prevent a reduction in motor efficiency.

Second embodiment Fig. 6 is a perspective view showing a structure of a movable portion of a linear motor according to a second embodiment of the present invention. The basic configuration of the linear motor according to this embodiment is the same as that of the linear motor 1 of the first embodiment. Moreover, in FIG. 6, the same code | symbol is used for the same component as 1st Embodiment.
The movable part 2A shown in FIG. 6 includes a coil combination 30 including three-phase coils 3A1, 3B1, 3C1, and three-phase coils 3A2, 3B2, 3C2. The coils 3A2, 3B2, 3C2 of each phase are arranged adjacent to the coils 3A1, 3B1, 3C1 of each phase, respectively.
The three-phase coils 3A1, 3B1, 3C1 and the three-phase coils 3A2, 3B2, 3C2 have the same configuration as the three-phase coils 3A, 3B, 3C of the above-described embodiment. The coil combination 30 is also formed in the same manner as in the above-described embodiment.
The three-phase coils 3A2, 3B2, and 3C2 generate magnetic fields that are opposite in phase to the three-phase coils 3A1, 3B1, and 3C1, that is, a phase that is 180 degrees different.

Next, the operation of the linear motor provided with the movable portion 2A will be described.
As shown in FIG. 7, two sets of three-phase coils 3A1, 3B1, 3C1 and three-phase coils 3A2, 3B2, 3C2 face two pairs of magnetic poles, that is, four adjacent permanent magnets 60. Regarding the linear motion directions A1 and A2, the dimensions of the four permanent magnets 60 and the dimensions of the six coils are substantially the same.

For example, when the winding directions of the three-phase coils 3A1, 3B1, 3C1 and the three-phase coils 3A2, 3B2, 3C2 are the same, the three-phase alternating current of the U phase, the V phase, and the W phase is transferred to the three-phase coils 3A1, 3B1, 3C1. To the three-phase coils 3A2, 3B2, and 3C2 are supplied with a three-phase alternating current of -U phase, -V phase, and -W phase that is 180 degrees different from the three-phase alternating current. Accordingly, as shown in FIG. 7, magnetic fields in opposite directions are generated in the coils 3A1 and 3A2, the coils 3B1 and 3B2, and the coils 3C1 and 3C2. Since these are in an antiphase relationship, the magnetic fluxes of the magnetic fields cancel each other.
As a result, since the magnetic flux leaking from the coils 3A1, 3A2, 3B1, 3B2, and 3C1, 3C2 is suppressed, the disturbance to the magnetic field formed by the permanent magnet 60 can be reduced, and the yoke 51 by the magnetic flux generated by the coil can be reduced. Can prevent magnetic saturation.

  In order to reverse the magnetic fields generated by the three-phase coils 3A2, 3B2, 3C2 and the three-phase coils 3A1, 3B1, 3C1, the three-phase coils 3A2, 3B2, 3C2 and the three-phase coils 3A1, 3B1, 3C1 The winding direction may be reversed to apply a three-phase alternating current of the same phase, or the coil connection method may be changed.

FIG. 8 is a diagram showing a modification of the above-described second embodiment.
As shown in FIG. 8, the dimensions of the coil 3A1, 3A2, coil 3B1, 3B2 and coil 3C1, 3C2 are made substantially the same as the dimensions of the two magnets 60, and each coil set has a phase of 60 degrees or 120 degrees. Different arrangements are used. By generating a magnetic field in each coil set in the same manner as described above, similar actions and effects can be obtained.

Third Embodiment FIG. 9 is a perspective view showing the structure of a movable part of a linear motor according to a third embodiment of the present invention.
The basic configuration of the linear motor 1A shown in FIG. 9 is the same as that of the linear motor 1 according to the first embodiment, but a different configuration is that the reinforcing member 20 is provided in the hollow portion 3H of the coil assembly 3. It is.

The reinforcing member 20 has a cross-sectional shape that matches the cross-sectional shape of the hollow portion 3H of the coil assembly 3, and is fitted to the inner periphery of the hollow portion 3H over the entire length of the hollow portion 3H. The reinforcing member 20 is coupled to the coil assembly 3.
The reinforcing member 20 includes a hollow portion 20h. The hollow portion 20h is formed for weight reduction.
As a material for forming the reinforcing member 20, a nonmagnetic and electrically insulating material is used. For example, a material such as glass epoxy resin, FRP (Fiber Reinforced Plastics) using reinforcing fibers such as carbon fibers is preferable, and a material that is lighter and more rigid than metal is preferable.
Thus, the rigidity of the coil assembly 3 can be further improved by supporting the inner periphery of the hollow portion 3H of the coil assembly 3 by the reinforcing member 20 made of a nonmagnetic and electrically insulating material.
In the present embodiment, the shape of the reinforcing member 20 is a cylindrical shape. However, the shape is not limited to this, and various shapes can be employed. For example, it may be flat. Moreover, it is good also as a structure which provides a flat reinforcement member in a pair of side surface which opposes, for example, without providing in the perimeter in a coil, respectively. Moreover, it is also possible to use all the hollow portions 3H as reinforcing members by using solid members.

Fourth Embodiment FIG. 11 is a perspective view of a linear motor according to a fourth embodiment of the present invention.
As shown in FIG. 11, the linear motor 100 includes a movable part 150 and a fixed part 101. In the present embodiment, the fixing portion 101 is an armature.

The fixing unit 101 includes a coil coupling body 103 and a holding member 110.
The holding member 110 is made of a flat plate member, and is formed of a metal such as stainless steel or an aluminum alloy, for example. The holding member 110 plays a role of holding the coil assembly 103. The holding member 110 is fixed to a base (not shown).

  The coil combination 103 is a collection of a plurality of three-phase coils 103A, 103B, 103C. The coils 103A, 103B, and 103C are coupled via an electrical insulating member 109. The formation of the coil combination 103 is the same as that of the coil combination 3 described in the first embodiment. However, the three-phase coils 103 </ b> A, 103 </ b> B, and 103 </ b> C are coupled together and are different in that the total length is long.

As shown in FIG. 11, the holding member 110 holds the entire outer peripheral surface of the coil assembly 103 facing each other. For this reason, the rigidity of the fixed portion 101 having a relatively long overall length is dramatically increased.
The hollow portion 103H of the coil assembly 3 penetrates along the linear motion directions A1 and A2.

The movable part 150 includes a yoke 151 and a plurality of permanent magnets 106 held by the yoke. The movable portion 150 is supported by a guide mechanism (not shown) so as to be movable in the linear motion directions A1 and A2.
As shown in FIG. 12, the yoke 151 includes opposed portions 51A and 151B having a plane opposite to each other at a predetermined interval, and opposed portions 151A and 151B which are arranged perpendicularly to these and along the linear motion directions A1 and A2. The connecting portion 151C for connecting the one end portions is integrally formed. In addition, it is good also considering the opposing part 151A, 151B and the connection part 151C as a different body.
The yoke 151 can be formed of a magnetic material such as iron, but from the viewpoint of reducing the weight of the movable portion 150, a lightweight material having a high specific strength such as an aluminum alloy can be used.
Further, a magnetic material may be used for the facing portions 151A and 151B, and a nonmagnetic material such as an aluminum alloy may be used for the connecting portion 151C.

The permanent magnet 106 is formed in a plate shape having a rectangular or square outer shape, for example, and has the same dimensions. The permanent magnet 106 is fixed to each facing surface of the facing portions 151A and 151B of the yoke 151. Two are provided on each facing surface. Further, the permanent magnets 106 provided on the same facing surface are arranged so that the polarities of the magnetic poles are different. Further, the permanent magnet 106 facing the facing portion 151A and the facing portion 151B is disposed so that the magnetic poles having the same polarity face each other.

  Since the three-phase coils 103A, 103B, and 103C have rectangular cross-sectional contours, the facing surfaces 106f of the permanent magnets 106 facing each other are formed on the outer peripheral surface 103f of the coil assembly 103 as shown in FIG. The opposing surface 106f and the outer peripheral surface 103f are arranged substantially parallel to each other with a predetermined gap.

Next, the operation of the linear motor 100 will be described with reference to FIG.
As shown in FIG. 13, the dimensions of the pair of magnetic poles, that is, the two permanent magnets 106, and the dimensions of the three-phase coils 103A, 103B, and 103C substantially coincide with each other in the linear motion directions A1 and A2.
The magnetic flux BF of the opposing permanent magnets 106, 106 with the three-phase coils 103A, 103B, 103C in between is the same in the polarity of the magnetic poles, so that from one of the opposing permanent magnets 106, 106 to the other. Going to the permanent magnets 106 that are mainly adjacent to each other.
Therefore, as can be seen from FIG. 13, the magnetic flux BF of the permanent magnet 106 is mainly distributed in the vicinity of the surface of the permanent magnet 106 and hardly reaches the inside of the three-phase coils 103A, 103B, 103C facing each other.

  When three-phase alternating currents of U phase, V phase, and W phase, each having a phase difference of 120 degrees, are supplied to the three-phase coils 103A, 103B, and 103C, current flows in all the coils. The direction of the current flowing through the three-phase coils 103A, 103B, 103C on the yoke 151A side is opposite to the direction of the current flowing through the three-phase coils 103A, 103B, 103C on the yoke 151B side, and the three-phase on the yoke 151A side. The direction of the magnetic flux BF passing through the coils 103A, 103B, and 103C is opposite to the direction of the magnetic flux BF passing through the three-phase coils 103A, 103B, and 103C on the yoke 51B side. Therefore, thrust in the same direction is generated on the yoke 151A side and the yoke 151B side. Due to this thrust, the movable portion 150 is driven in the linear motion directions A1 and A2.

Next, an example of a cooling method of the linear motor 100 will be described with reference to FIG.
As shown in FIG. 14, air is supplied from one end of the hollow portion 103 </ b> H of the coil assembly 103 using a fan 300. The air supplied from one end of the hollow portion 103H passes through the hollow portion H, efficiently absorbs heat, and is discharged from the other end of the hollow portion 103H.
In the present embodiment, since the coil assembly 103 is fixed, a forced cooling can be easily performed by constantly supplying a cooling medium such as air to the hollow portion 103H. As a result, the temperature control of the linear motor can be easily performed.
Although air is used as the cooling medium, it is also possible to cool using a liquid cooling medium by sealing the coil assembly 103 or the like.

Fifth Embodiment FIG. 15 is a diagram showing a configuration of a linear motor according to a fifth embodiment of the present invention.
The basic configuration of the linear motor according to this embodiment is the same as that of the linear motor 100 according to the third embodiment. In FIG. 15, the same components as those in the third embodiment use the same reference numerals.
In the linear motor 100A shown in FIG. 15, the fixed portion is an armature and the movable portion is provided with a permanent magnet, as in the third embodiment. The linear motor 100A includes a coil combination 103-A including a plurality of three-phase coils 103A1, 103B1, and 103C1 and three-phase coils 103A2, 103B2, and 103C2. The coils 103A2, 103B2, and 103C2 for each phase are disposed adjacent to the coils 103A1, 103B1, and 103C1 for each phase, respectively.
The three-phase coils 103A1, 103B1, and 103C1 and the three-phase coils 103A2, 103B2, and 103C2 have the same configuration as the three-phase coils 103A, 103B, and 103C of the above-described embodiment.
Three-phase coils 103A2, 103B2, and 103C2 generate magnetic fields that are 180 degrees out of phase with respect to three-phase coils 103A1, 103B1, and 103C1.

  Further, in each of the yokes 151A and 151B, four permanent magnets 160 are arranged so that the polarities of the magnetic poles are alternately reversed along the linear motion directions A1 and A2, and the polarities of the magnetic poles of the opposing permanent magnets 160 are arranged. Are fixed to be the same.

  As shown in FIG. 15, two sets of three-phase coils 103A1, 103B1, and 103C1 and three-phase coils 103A2, 103B2, and 103C2 face two pairs of magnetic poles, that is, four adjacent permanent magnets 60. Regarding the linear motion directions A1 and A2, the dimensions of the four permanent magnets 60 and the dimensions of the six coils are substantially the same.

  In the linear motor 100A having the above-described configuration, the U-phase, V-phase, and W-phase three-phase alternating current is supplied to the three-phase coils 103A1, 103B1, and 103C1, and the three-phase coils 103A2, 103B2, and 103C2 are in phase with the three-phase alternating current. Supply three-phase alternating current of -U phase, -V phase, and -W phase different by 180 degrees. In the coils 103A1 and 103A2, the coils 103B1 and 103B2, and the coils 103C1 and 103C2, respectively, opposite magnetic fields are generated. As a result, the same operation and effect as in the second embodiment can be obtained.

Sixth Embodiment FIG. 16 is a diagram showing a configuration of a linear motor according to a sixth embodiment of the present invention.
FIG. 17 is a cross-sectional view showing the structure of the movable part and the fixed part of the linear motor shown in FIG.
In the linear motor according to the present embodiment, the armature is a fixed part, and a permanent magnet is provided in the movable part. The basic configuration of the linear motor according to the present embodiment is the same as that of the fourth embodiment or the fifth embodiment.
In the present embodiment, the yoke 151-A is formed in a cylindrical shape having a rectangular outer shape. Two sets of opposing permanent magnets 106 are provided on the inner surface of the yoke 151-A. These permanent magnets 106 are respectively opposed to the four outer peripheral surfaces of the coil assembly 103.
By comprising in this way, the utilization efficiency of the permanent magnet which a coil utilizes can increase, and thrust etc. can be improved.

In the above-described embodiment, the coil has a rectangular cross-sectional shape and the permanent magnet is formed in a flat plate shape, but the present invention is not limited to this. For example, the cross-sectional shape of the coil may be other shapes such as a square, a circle, and an ellipse, and the permanent magnet can be curved according to these shapes.
Further, the reinforcing member 20 described in the third embodiment can be applied to the coils of the second and fourth to sixth embodiments.
Further, the reinforcing member of the present invention can be applied to a coil of a linear motor in which a center yoke is inserted into the coil.

It is a perspective view which shows the structure of the linear motor which concerns on one Embodiment of this invention. It is a perspective view which shows the structure of a movable part. It is a side view of a movable part. It is sectional drawing along the plane orthogonal to the linear motion direction of a movable part and a fixed part. It is a figure for demonstrating the effect | action of a linear motor. It is a perspective view which shows the structure of the movable part of the linear motor which concerns on the 2nd Embodiment of this invention. It is a figure for demonstrating an effect | action of the linear motor which has a movable part shown in FIG. It is a figure which shows the modification of 2nd Embodiment. It is sectional drawing which shows the structure of the linear motor which concerns on the 3rd Embodiment of this invention. It is a perspective view of the linear motor which concerns on the 4th Embodiment of this invention. It is a front view of the linear motor which concerns on the 4th Embodiment of this invention. It is sectional drawing along the plane orthogonal to the linear motion direction of the movable part and fixed part of a linear motor shown in FIG. It is sectional drawing of the horizontal surface direction of the movable part and fixed part of a linear motor shown in FIG. It is sectional drawing which shows an example of the cooling method in the linear motor shown in FIG. It is a figure which shows the structure of the linear motor which concerns on the 5th Embodiment of this invention. It is a figure which shows the structure of the linear motor which concerns on the 6th Embodiment of this invention. It is sectional drawing which shows the structure of the movable part and fixed part of a linear motor shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,100,400 ... Linear motor 2 ... Movable part 3 ... Coil coupling body 10 ... Holding member 20 ... Reinforcement member 50 ... Fixed part 51 ... Yoke 60 ... Permanent magnet

Claims (4)

A hollow three-phase coil in which a conductive wire is wound in a cylindrical shape;
And a plurality of magnets arranged such that the magnetic poles face the outer peripheral surface of the hollow three-phase coil and the magnetic poles of the same polarity face each other. 2. The hollow three-phase coil is configured such that each coil is arranged in a multi-layered manner in a cylindrical shape and is hardened with an adhesive, and end faces thereof are coupled to each other via an electrically insulating member. Linear motor. The hollow three-phase coil is composed of first and second hollow three-phase coils that generate magnetic fields having opposite phases to each other,
The linear motor according to claim 1, wherein the corresponding coils of the first and second hollow three-phase coils are arranged adjacent to each other. A hollow three-phase coil in which a conductive wire is wound in a cylindrical shape;
A plurality of magnets arranged such that the magnetic poles face the outer peripheral surface of the hollow three-phase coil and the magnetic poles of the same polarity face each other;
A linear motor having a non-magnetic and electrically insulating material, and having a reinforcing member that commonly supports the inner circumference of each of the hollow three-phase coils.

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