JP2005166269A - Surface heater and method of adjusting the amount of heat generated by the same surface heater - Google Patents

Abstract

To provide a thin sheet heater that can easily finely adjust the distribution of heat output.
A lath surface heating element obtained by lathing a heat-treated metal foil material to form a mesh-like lath, and further flattening so as to form a flat lath surface having substantially the same thickness as the metal foil material. It was set as the planar heater which has. Further, the thickness of the metal foil material is 0.02 to 0.3 mm, and the ratio of the width and length of the lath is in the range of lath width: lath length = 1: 2 to 1: 3. . With such a configuration, the finish of the joint surface is beautiful, and the superposed portion is not unnecessarily thick and bulky.
[Selection] Figure 6

Description

  The present invention relates to a sheet heater and a method for adjusting the amount of heat generated by the sheet heater, and more specifically, a sheet heater made of an electric resistor formed by lath processing of a metal foil material, and the sheet heater It is related with the calorific value adjustment method.

  2. Description of the Related Art Conventionally, for example, a planar heater is often used as a heating furnace that heats a wafer serving as a base material of an electronic component or a heater that generates heat in a predetermined region at a certain temperature.

  As one of such planar heaters, for example, an electric resistor having a meandering pattern in which a metal foil material such as stainless steel is formed by etching or the like is formed, and the electric resistor is used as a heating element, which is a ceramic as a plate-like insulator. A ceramic heater having a structure sandwiched between plates is widely known.

  There has also been proposed a planar heater using a lath surface-like electric resistor having a mesh-like lath as a heating element by lathing the metal foil material (see, for example, Patent Document 1).

In this case, the lath-plane electric resistor can obtain an arbitrary electric resistance value by changing the thickness of the metal foil and the size of the lath, so that the necessary heat generation capacity can be easily obtained where necessary. There is an advantage that it can be obtained.
JP-A-4-206380

  However, as described in Patent Document 1 described above, it is possible to roughly adjust the resistance value only by changing the thickness of the metal foil and the size of the lath, but precise adjustment is difficult.

  Therefore, in order to manufacture many types of planar heaters with different calorific values (electric resistance values), it is necessary to form in advance various types of electric resistors having different lath dimensions, which is not rational. On top of that, product quality control becomes troublesome. Further, when the lath size of the electrical resistor manufactured with a predetermined lath size is secondarily changed, a crack may be generated when the lath is deformed, and sometimes it may be broken.

  An object of the present invention is to provide a plate heater that can solve the above-described problems.

  According to the first aspect of the present invention, the heat-treated metal foil material is lathed to form a mesh lath, and the lath is flattened to have a flat lath surface having substantially the same thickness as the metal foil material. A planar heater having a planar heating element was obtained.

  In this invention of Claim 2, the said metal foil material shall be thickness of 0.02-0.3mm, and the ratio of the width | variety of said lath and length is lath width: Lath length = 1: 2-. The range was 1: 3.

  According to the third aspect of the present invention, the lath surface heating element cut into a strip shape is polymerized on the lath surface heating element serving as a base.

  According to the fourth aspect of the present invention, a band-shaped metal plate is polymerized on the lath surface heating element as a base.

  According to a fifth aspect of the present invention, there is provided a method for adjusting a calorific value of the planar heater according to the first or second aspect, wherein the lath planar heating element is cut into a strip shape on one lath planar heating element. Was polymerized to reduce the electrical resistance at any site as needed.

  In this invention of Claim 6, it is a method of adjusting the emitted-heat amount of the planar heater of Claim 1 or 2, Comprising: The width | variety and length of a lath eye, and the thickness of the lath body which comprises a lath eye, A plurality of types of lath surface heating elements having different electrical resistance values are prepared by varying at least one of the width dimensions, and the electrical resistance value is provided on the base lath surface heating element. The lath-planar heating elements having different thicknesses were cut into a belt shape and polymerized, and the electrical resistance at an arbitrary portion was reduced as necessary.

  The present invention according to claim 7 is a method for adjusting the amount of heat generated by the planar heater according to any one of claims 1 to 4, wherein a predetermined region of the lath planar heating element is separated and optionally It was decided to increase the electrical resistance of this part as needed.

  (1) In the present invention described in claim 1, by flat processing, a flat lath surface heating element having a uniform thickness can be obtained as a whole, and an extremely thin surface heater can be easily manufactured. Is possible. In addition, since the metal foil material that is the material of the lath-planar heating element is previously heat-treated, cracks and the like do not occur during flat processing. Furthermore, since the lath surface heating element is resistant to expansion and contraction and has a plurality of electric paths, even if one of the paths is broken, it does not become unusable and the life of the heater can be extended.

  (2) In the present invention according to claim 2, the thickness of the metal foil material is 0.02 to 0.3 mm, and the ratio between the width of the lath and the length is lath width: lath length = 1. : In the range of 2 to 1: 3, in addition to the effect of (1) above, there is no risk of cracking, and it has sufficient resistance to breakage and crushing, improving the heater quality. To do.

  (3) In the present invention according to claim 3, the lath surface heating element cut into a strip shape is polymerized on the lath surface heating element serving as a base, so that the desired electric resistance value can be obtained accurately. The lath surface heating element is adjusted, and the lath surface heating element is flat processed, so the finish of the polymerized adhesive surface is beautiful, and the polymerization part does not become unnecessarily thick and bulky, making the heater thinner. Can contribute.

  (4) In the present invention according to claim 4, the resistance of the portion where the metal foil is polymerized can be reduced by polymerizing the belt-shaped metal plate on the lath surface heating element as the base. Therefore, the resistance value becomes high in the lath surface heating element, the resistance is reduced by polymerizing the metal foil in a place where the temperature is likely to rise more than necessary, and the current is easily flown to prevent the temperature rise. The risk of disconnection due to current concentration can be prevented in advance while preventing temperature deviation.

  (5) The present invention according to claim 5 is a method for adjusting the amount of heat generated by the planar heater according to claim 1 or 2, wherein the lath surface is cut into a strip shape on one lath surface heating element. The heating element is polymerized and the electrical resistance at any part is reduced as necessary. Therefore, the heating element can be accurately adjusted to have a desired electrical resistance value. Since it is flat processed, the polymerization connection can be easily performed, the finish of the joint surface is beautiful, and the polymerization portion is not unnecessarily thick and bulky.

  (6) The present invention according to claim 6 is a method for adjusting the heat generation amount of the planar heater according to claim 1 or 2, wherein the lath body forms the lath width, length, and lath eye. By preparing at least one of the dimensions of the thickness and width of each, a plurality of types of lath surface heating elements having different electric resistance values are prepared, and on the lath surface heating element as a base, The lath surface heating elements having different electric resistance values were cut into a belt shape and polymerized, and the electric resistance at an arbitrary portion was reduced as necessary. Therefore, it is possible to manufacture and provide a planar heater that is precisely adjusted to have a desired electric resistance value by preparing as few kinds of heating elements as possible, and also to generate a lath planar heating. Since the body is flattened, polymerization adhesion is facilitated, and the polymerized portion does not become unnecessarily thick and bulky, which can contribute to thinning of the planar heater.

  (7) The present invention according to claim 7 is a method for adjusting the heat generation amount of the planar heater according to any one of claims 1 to 4, wherein a predetermined region of the lath planar heating element is set. The electrical resistance of any part was increased as necessary. Therefore, it is possible to manufacture and provide a planar heater that is precisely adjusted to have a desired electrical resistance value, and the lath planar heating element is flat processed, so that a tool such as scissors is used. Since it can be easily separated according to the required dimensions, workability is improved.

  The plate heater according to the present invention is a lath processed by lathing a heat-treated metal foil material to form a mesh lath, and further flattened to have a flat lath surface having substantially the same thickness as the metal foil material. It has a configuration having a planar heating element, and can be suitably used for a heating furnace for heating a wafer which is a base material of an electronic component. Here, the heat-treated metal foil material refers to a metal foil material subjected to annealing treatment or solution heat treatment.

  In other words, the metal foil material that has undergone lath processing is further flattened, so that it has a feature in the structure of a heating element consisting of a lath-surface-shaped electrical resistor with the same thickness as the metal foil material itself. doing.

  The lath surface heating element thus obtained can be made very thin until it has the same thickness as the metal foil material, so that it can be made of a planar insulator such as a resin film including polyimide, mica sheet, or various ceramic plates. It becomes easy to sandwich the sheet, and an extremely thin planar heater having a heater thickness of 1 mm or less can be manufactured and provided.

  Heating elements are exposed to thermal stresses associated with expansion during heat generation and contraction when heat generation is stopped. If this is large, the heat generation element may break, especially if the heat generation element has scratches, etc. However, the lath planar heating element, which is the main part of the planar heater according to the present embodiment, is resistant to expansion and contraction as a shape characteristic and has a plurality of electrical paths. Even if the path is disconnected, it does not become unusable and the life of the planar heater can be extended. Moreover, since the metal foil material used as the material for the lath-planar heating element has been heat-treated in advance, cracks and the like do not occur during flat processing using a distraction device or the like.

  The metal foil material has a thickness of 0.02 to 0.3 mm, and the ratio of the width and length of the lath is in the range of lath width: lath length = 1: 2 to 1: 3. It is preferable.

  In other words, it has been experimentally known that such a lath has no risk of cracking and has sufficient resistance to breakage and crushing, and the quality of the thin planar heater, Reliability can be improved. Further, in order to prevent the occurrence of cracks, it is desirable that the width of the lath body constituting the lath eye is within about 1 to 3 mm.

  The planar heater having the above-described configuration can arbitrarily adjust the heat generation amount.

  That is, by laminating the lath surface heating element cut into a strip shape on one lath surface heating element serving as a base, the electrical resistance of an arbitrary portion can be reduced as necessary. Furthermore, if the predetermined region of the lath surface heating element is separated, the electrical resistance of an arbitrary portion can be increased as necessary.

  As described above, the lath surface heating element according to the present embodiment can be accurately adjusted so as to have a desired electric resistance value, and the lath surface heating element is flat-processed, so that the polymerization adhesion is achieved. It can be easily performed and the finish of the adhesive surface becomes beautiful, and the superposed portion does not become unnecessarily thick and bulky, contributing to the reduction in thickness of the planar heater. Further, when the predetermined area of the lath surface heating element is cut off, the lath surface heating element is flat processed, so that it can be easily separated according to the required dimensions using a tool such as scissors. Workability is improved.

  In addition, when adjusting the heat generation amount, by varying at least one of the width and length of the lath mesh and the thickness and width of the lath body constituting the lath mesh, the electrical resistance value is varied. A plurality of types of lath surface heating elements are prepared, and on the base lath surface heating element, lath surface heating elements having different electric resistance values are cut into strips and polymerized, and the electric resistance of an arbitrary part Can be reduced as necessary. Furthermore, also in this case, the predetermined region may be separated if the electrical resistance of an arbitrary part is increased as necessary.

  Therefore, it is possible to manufacture and provide a sheet heater accurately adjusted to have a desired electric resistance value by preparing as few kinds of heating elements as possible.

  By the way, when a predetermined area is separated when adjusting the heat generation amount of the lath surface heating element, or when various patterns are formed on the lath surface heating element, a corner portion that is bent at 90 degrees or 180 degrees is generated. Sometimes. In the lath surface heating element, since the current is distributed in a plurality of current paths, the current tends to concentrate more on the inside than on the outside in the corner portion.

  If the temperature is biased due to the concentration of current, the quality of the planar heater deteriorates, which is not preferable. If the current value is large, there is a risk of disconnection. If one wire breaks, the wire breaks in a chained manner, which may lead to breakage as a planar heater.

  Therefore, a belt-shaped metal plate can be polymerized on the lath surface heating element as a base, and in particular, the resistance can be increased by polymerizing the metal plate at a location where the current value is difficult to flow and the resistance value is likely to increase. The current can be made easier to flow.

  That is, in the case of the above-described corner portion, it is possible to prevent temperature deviation and disconnection by welding and arranging a terminal made of a metal plate on the outside thereof. With such a structure, the mechanical strength of the lath surface heating element can also be improved. Note that the metal plate is a concept including a metal foil, and the portion of the terminal made of the metal plate including the metal foil hardly contributes to heat generation compared with the surrounding area. It is desirable to set conditions so as not to affect the heat generation performance.

  Further, instead of a terminal made of a metal plate (including a metal foil), a lath surface heating element similar to the base may be superposed.

  Hereinafter, embodiments of the present invention will be described more specifically with reference to the drawings. FIG. 1 is a sectional view of a sheet heater according to the present embodiment, FIG. 2 is a diagram illustrating an example of a usage state of the sheet heater, and FIG. 3 is a lath sheet heating element used for the sheet heater. FIG.

  As shown in FIG. 1, a basic structure of a planar heater 1 according to the present invention is a planar insulator 3 having a lath planar heating element 2 having a thickness of 0.1 mm and a thickness of approximately 0.3 mm. Thus, a thin planar heater 1 having a heater thickness T of about 0.8 mm is provided. As the planar insulator 3, a mica sheet is used in this embodiment, but other resin films such as polyimide and various ceramic plates can also be used.

  In this embodiment, as shown in FIG. 2, the thin planar heater 1 is disposed in a heating furnace 4 for heating a substrate 5 of an electronic component such as a wafer or a glass substrate.

  In FIG. 2, reference numeral 40 denotes a furnace body formed in a box shape by a side wall 41 in which a heat insulating material (not shown) is attached to the inner wall surface. The substrate storage chamber 43 is provided. The planar heater 1 according to the present invention is disposed on the side wall 41 and the partition plate 42. In the figure, reference numeral 44 denotes an open / close lid provided at the front of each substrate storage chamber 43, which can be opened and closed by an actuator (not shown). Reference numeral 45 denotes a quartz tube for holding the substrate 5.

  The planar heater 1 according to the present embodiment is a mesh-like lath obtained by slit punching a stainless steel foil having a thickness of 0.1 mm, which is a metal foil material subjected to heat treatment, that is, annealing treatment or solution heat treatment, using a known lath processing machine. The eye 20 is formed, and further flattened by a known drawing machine to form a lath surface heating element 2 having a flat lath surface having the same thickness (about 0.1 mm) as the stainless steel foil. It is set as the structure pinched | interposed with the said insulator 3 (mica sheet).

  That is, the planar heater 1 according to the present invention is the lath surface shape formed of an electric resistor having a lath surface shape having the same thickness as the thickness of the metal foil material itself by further flattening the lath processed metal foil material. The structure of the heating element 2 is characterized.

  As the metal foil material, other metal foil materials may be used instead of the stainless steel foil, but the thickness is preferably 0.02 to 0.3 mm, and the lath having the mesh shape is preferable. It is desirable that the ratio between the width and the length of the eye 20 be in the range of the lath width D: the lath length L = 1: 2 to 1: 3.0.

  In the present embodiment, as shown in FIG. 3, the width W of the lath body 20a constituting the lath eye 20 is 2 mm, the lath width D is 8 mm, and the lath length L is 20 mm.

  Thus, in this example, since the stainless steel foil was heat-treated in advance, cracks and the like were not generated during flat processing using a distraction processing machine, and the thickness was about 0.1 mm. In addition, the lath surface heating element 2 having a width W of the lath body 20a of about 2 mm can be formed, and the lath surface heating element 2 is resistant to expansion and contraction and has a plurality of electric paths. Even if the path of the book is disconnected, there is no inconvenience, and the life of the planar heater 1 can be extended.

  In addition, since the lath 20 has the above dimensions, there is no risk of cracking, and it has sufficient resistance to breakage and crushing, and improves the quality and reliability of the thin planar heater 1. Can be made.

  The lath-planar heating element 2 having the above-described configuration can arbitrarily adjust the amount of heat generation, and the adjustment method is also characterized.

  That is, by polymerizing the lath surface heating element 2 cut into a strip shape on one lath surface heating element 2 serving as a base, the electrical resistance of an arbitrary portion can be reduced as necessary, If the predetermined region of the lath surface heating element 2 is cut off, the electrical resistance of an arbitrary part can be increased as necessary. This makes it possible to finely adjust the heat generation density and to adjust the heat generation amount very precisely. Yes.

  More specifically, when finely adjusting the heat generation amount, each of the lath width D, the lath length L, the thickness t (see FIG. 1), and the width W of the lath surface heating element 2 is used. By preparing at least one of the dimensions, a lath surface heating element 2 having a plurality of patterns with different electric resistance values is prepared, and the lath surface heating element 2 serving as a base is electrically connected. The lath surface heating element 2 having a different resistance value can be cut into a strip and polymerized to reduce the electrical resistance at any part as required. Further, when the electrical resistance of an arbitrary part is increased as necessary, a predetermined region is separated.

  FIG. 4 is an explanatory view showing the first lath surface heating element 2A having the first basic pattern, FIG. 5 is an explanatory view showing the second lath surface heating element 2B having the second basic pattern, and FIG. Is an explanatory view showing a state in which the first lath surface heating elements 2A are polymerized, and FIG. 7 is a state in which the second lath surface heating element 2B is polymerized to the first lath surface heating elements 2A. FIG. 8 is an explanatory view showing a state in which a part of the lath surface heating element 2 is cut away.

  As shown in FIGS. 4 and 5, at least one of the dimensions of the lath width D, the lath length L, and the thickness t and width W of the lath body 20a constituting the lath eye 20 is made different. When the first lath surface heating element 2A and the second lath surface heating element 2B having different electrical resistance values are prepared in advance and the electric resistance value of a predetermined portion is reduced, FIG. 6 or FIG. As shown in FIG. 1, one lath surface heating element (here, the second lath surface heating element 2B) is formed in a band shape having a predetermined width, and the other lath surface heating element (here, the first lath surface heating element). By integrally joining the heating element 2A) by a method such as welding, it becomes possible to reduce the electrical resistance value of an arbitrary part as much as necessary. At this time, since the lath surface heating element 2 is flat processed, the welding operation can be easily performed, and the finish of the joined portion is also good. Further, when the electric resistance value of the predetermined portion is reduced, the predetermined region S may be cut off as shown in FIG.

  As described above, according to the present embodiment, since the lath surface heating element 2 has good workability, its size, the size and shape of the lath eye 20 can be arbitrarily set, and the degree of freedom is increased. In addition, for example, only by preparing two types of lath surface heating elements 2 (the first lath surface heating element 2A and the second lath surface heating element 2B), a desired value of the electrical resistance value of an arbitrary part is provided. Can be set to And since it can respond with a small cutting machine or a spot welding machine, it is advantageous in terms of work efficiency and cost.

  The lath planar heating element 2 thus manufactured inexpensively and efficiently has finely set electrical resistance values for each part. If the planar heater 1 uses this, the temperature distribution requirement is required. It can be suitably used for a glass substrate heating furnace for LCD (Liquid Crystal Display) with high accuracy.

  By the way, when the planar heater 1 using the lath planar heating element 2 described above is actually attached to an apparatus such as the heating furnace 4, for example, it is often fixed with a bolt or the like.

  In such a case, it is necessary to adjust the shape separately from the heat density adjustment. In this case, as shown in FIG. 9, it can be easily dealt with by making a hole H for attachment in the lath surface heating element 2 with a punch or the like.

  In addition, since the number of electrical paths locally decreases and the electrical resistance value increases due to the perforation, in order to correct this, a strip-shaped metal foil may be welded as the correction material 6 as shown in the figure. .

  As described above, according to the present embodiment, it is possible to easily eliminate the fluctuation of the heat generation amount. The correction material 6 does not necessarily need to be a strip-shaped metal foil, and may be a lath surface heating element 2.

  As another embodiment, when the lath surface heating element 2 has a pattern as shown in FIG. 10, that is, a lath surface shape having a corner portion 7 bent at 90 degrees or 180 degrees in the pattern shape. The case of the heating element 2c will be described. In the illustrated example, a corner portion 7 is formed around the notch portion 7 ′.

  Even in such a lath surface heating element 2 c, the current tends to concentrate more on the inner side than on the outer side of the corner portion 7 because it is distributed in a plurality of current paths. That is, as shown in the figure, current does not easily flow in region A, and current tends to concentrate particularly in region B.

  If the temperature is biased due to the concentration of current, the quality of the planar heater 1 is lowered, which is not preferable, and there is a risk of disconnection depending on the magnitude of the current value. If one wire breaks, the wire breaks in a chained manner and may not function as the planar heater 1.

  Therefore, a band-shaped metal plate can be polymerized on the lath surface heating element 2 serving as a base as shown in FIG. 11 to facilitate the flow of current. In the present embodiment, the resistance is reduced and the current is made to flow easily by welding the metal plate as the terminal 8 and attaching it at a location where the current is difficult to flow and the resistance value is likely to rise as in the region A.

  Moreover, if it is the above structures, the mechanical strength of the lath surface heating element 2c can also be improved.

  Here, the metal plate is a concept including a metal foil, and the thickness of the terminal 8 made of such a metal plate is about 0.05 mm to 0.3 mm, and the material has excellent weldability and heat resistance. For example, nickel, stainless steel, or the like can be preferably used. Further, since the terminal 8 hardly contributes to heat generation as compared with the surrounding area, the size and position of the terminal 8 must be determined in consideration of not affecting the heat generation performance.

  By the way, in the example shown in FIG. 11, the strip-shaped terminal 8 having a low resistance is continuously arranged along one edge of the lath surface heating element 2 c having the corner portion 7. As shown in FIG. 12, the terminals 8 may be partially attached so that the divided terminals 8 ′ and 8 ′ are arranged in tandem instead of being continuous in a strip shape.

  As a further modification, instead of the terminal 8 made of a metal plate shown in FIGS. 11 and 12, as shown in FIG. It doesn't matter.

  In the example shown in FIG. 12 and FIG. 13, it is effective when it is desired to generate heat near the inside of the corner portion 7 while avoiding excessive concentration of the current inside the corner portion 7.

  On the other hand, when it is desired to suppress the heat generation near the inside of the corner 7 portion, the configuration shown in FIGS. 14 and 15 can be adopted.

  That is, the example shown in FIG. 14 uses a strip-shaped terminal 8 and is arranged in a superposed manner inside the corner portion 7, and the example shown in FIG. 15 is a lath surface heating element similar to the base. 2d is used as a strip.

  In any case, although the current concentrates on the inner side of the corner portion 7, it is possible to effectively prevent the disconnection of the lath body 20a formed of a plurality of thin wires constituting the lath serving as a current path. As shown in FIG. 15, it is necessary to use the lath surface heating element 2d in consideration of the fact that the allowable electric energy is smaller than when the terminal 8 made of a metal plate is used.

  As mentioned above, although this invention was demonstrated through embodiment and an Example, this invention is not limited to the structure shown in each Example. For example, the current density and the heat generation density can be variously adjusted by not only implementing the configuration of each embodiment alone, but also by combining these configurations.

  The present invention can be applied particularly to a planar heater having a high required accuracy of temperature distribution and a planar heater that is preferably as thin as possible.

It is explanatory drawing by the cross sectional view of the planar heater which concerns on a present Example. It is explanatory drawing which shows an example of the use condition of a planar heater. It is a top view of the lath planar heating element used for a planar heater. It is explanatory drawing which shows the 1st lath planar heating element which has a 1st basic pattern. It is explanatory drawing which shows the 2nd lath surface heating element which has a 2nd basic pattern. It is explanatory drawing which shows the state which superposed | polymerized said 1st lath surface heating elements. It is explanatory drawing which shows the state which superposed | polymerized the 2nd lath surface heating element on the said 1st lath surface heating element. It is explanatory drawing which shows the state which separated some lath planar heating elements. It is explanatory drawing which shows the method of correct | amending an electrical resistance value when the hole for attachment is made in the lath surface heating element. It is explanatory drawing which shows the lath surface heating element which has a corner part. It is explanatory drawing which shows the example which has arrange | positioned the strip | belt-shaped terminal continuously along the one end edge of the outer side of the lath surface heating element which has a corner part. It is explanatory drawing which shows the example arrange | positioned so that the some divided | segmented terminal may be arranged in a line. It is explanatory drawing which shows the example which carried out superposition | polymerization arrangement | positioning by using the lath surface-like heat generating body like a base as a strip along the outer edge of the lath surface-like heat generating body which has a corner part. It is explanatory drawing which shows the example which carried out superposition | polymerization arrangement | positioning of the strip | belt-shaped metal plate along the inner side of the lath surface heating element which has a corner part. It is explanatory drawing which shows the example which carried out superposition | polymerization arrangement | positioning on the inner side of the lath surface heating element which has a corner part, using the lath surface heating element like a base as a strip.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Surface heater 2 Lath surface heating element 3 Insulator 7 Corner part 8 Terminal 20 Lath 20a Lath body

Claims (7)

  A planar heater having a lath surface heating element formed by lathing a heat-treated metal foil material to form a mesh-like lath, and further flattened to have a flat lath surface having substantially the same thickness as the metal foil material . The metal foil material has a thickness of 0.02 to 0.3 mm, and the ratio of the lath width to the length is
Lath width: Lath length = 1: 2 to 1: 3
The planar heater according to claim 1, wherein the planar heater is in a range of   The planar heater according to claim 1 or 2, wherein a lath surface heating element cut into a strip shape is polymerized on a lath surface heating element serving as a base.   The planar heater according to claim 1 or 2, wherein a belt-like metal plate is polymerized on a lath planar heating element serving as a base. A method for adjusting the amount of heat generated by the planar heater according to claim 1 or 2,
A method for adjusting a calorific value of a planar heater, wherein a lath planar heating element cut into a strip shape is polymerized on one lath planar heating element to reduce the electrical resistance of an arbitrary part as required. A method for adjusting the amount of heat generated by the planar heater according to claim 1 or 2,
Multiple types of lath surface heat generation with different electrical resistance values by varying at least one of the width and length of the lath and the thickness and width of the lath body constituting the lath Prepare the body,
A lath surface heating element having a different electrical resistance value is cut into a strip shape and polymerized on the lath surface heating element serving as a base, and the electrical resistance of any part is reduced as necessary. Heating amount adjustment method of the heater. A method for adjusting a calorific value of the sheet heater according to any one of claims 1 to 4,
A method for adjusting the amount of heat generated by a planar heater, wherein a predetermined region of the lath planar heating element is cut off to increase the electrical resistance of an arbitrary portion as necessary.

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