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JP2005164562A - Flux gate magnetic sensor - Google Patents

Flux gate magnetic sensor Download PDF

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JP2005164562A
JP2005164562A JP2003436200A JP2003436200A JP2005164562A JP 2005164562 A JP2005164562 A JP 2005164562A JP 2003436200 A JP2003436200 A JP 2003436200A JP 2003436200 A JP2003436200 A JP 2003436200A JP 2005164562 A JP2005164562 A JP 2005164562A
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magnetic
excitation coil
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Koji Yamada
興治 山田
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a flux gate magnetic sensor having a structure which can suppress outside leakage in a magnetic field so as to be low, and has high sensitivity and is suitable for detecting the local magnetic field. <P>SOLUTION: In the flux gate magnetic sensor, two amorphous ribbons with each of which has a sharp tip suitable for detecting the local magnetic field being arranged in parallel so as to slightly shift their tips, and a pair of exciting coils which generate magnetic fields in opposite directions, are wound on the ribbons from their edges, and magnetic field detecting coils are wound on respective center sections of the two amorphous ribbons and are connected so as to cancel a wide-area external magnetic field, whereby only the local magnetic field can be detected. Therefore, the influence of the wide-area external magnetic field, such as the terrestrial magnetism or the like, can be made less by this flux gate magnetic sensor, without using two sets of magnetic sensors. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

発明の詳細な説明Detailed Description of the Invention

本発明は、フラックスゲートタイプの高感度磁気センサの新しいタイプであり、地磁気のような広域磁場の検出の他に、磁気による非破壊試験、紙幣の磁気インクの読み取り、生体磁気観測等、微弱な局所的な磁界の検出が要求される多くの分野に利用される。  The present invention is a new type of high-sensitivity magnetic sensor of the fluxgate type. In addition to detection of a wide magnetic field such as geomagnetism, non-destructive testing by magnetism, reading of magnetic ink of banknotes, observation of biomagnetism, etc. are weak. It is used in many fields where local magnetic field detection is required.

フラックスゲート磁気センサは、以前から地磁気等の微弱磁界の検出に広く用いられてきた非常に高感度な磁気センサである。励磁コイルに交流を印可することにより磁性体を過飽和状態にするため、磁気センサ自身も磁界を発生する。この発生磁界が、特に磁性体、生体等の被測定対象物に加えられると、被測定対象物事態の特性に影響を与える可能性がある。そのためフラックスゲート磁気センサは、このような場合は対象物の磁気計測に用いることができない。  The fluxgate magnetic sensor is a highly sensitive magnetic sensor that has been widely used for detecting weak magnetic fields such as geomagnetism. The magnetic sensor itself generates a magnetic field in order to put the magnetic material in a supersaturated state by applying alternating current to the exciting coil. When this generated magnetic field is applied to an object to be measured such as a magnetic body or a living body, the characteristics of the object to be measured may be affected. Therefore, the fluxgate magnetic sensor cannot be used for magnetic measurement of the object in such a case.

外部への漏洩磁束が比較的少ない構造としては、例えば図1のようにトロイダル状の高透磁率磁性体に励磁コイルと検出コイルを形成した場合が考えられる。しかしこの形状は、地磁気のような広域磁界の検出には適すが、近接磁界の検出には構造的に適さない。フラックスゲート磁気センサで近接磁界の検出を行うには、棒状の高透磁率磁性体に励磁コイルと検出コイルを形成するほうが望ましい。しかしこの構造では外部に漏洩磁束が多く漏れ出し、被測定対象物事態の特性に影響を与える場合が生ずる。  As a structure with relatively little leakage magnetic flux to the outside, for example, a case where an excitation coil and a detection coil are formed on a toroidal high permeability magnetic material as shown in FIG. However, this shape is suitable for detecting a wide magnetic field such as geomagnetism, but is not structurally suitable for detecting a near magnetic field. In order to detect a near magnetic field with a fluxgate magnetic sensor, it is desirable to form an excitation coil and a detection coil on a rod-like high permeability magnetic body. However, in this structure, a large amount of leakage magnetic flux leaks to the outside, which may affect the characteristics of the measured object situation.

また非破壊試験にフラックスゲート磁気センサを用いる場合、材料内部の残留応力の増大を計測するが、この場合検出される磁界は地磁気や、電気機器が発生する各種広域の外部磁界に比較して遙かに少量である。さらに非破壊試験においては、場所的な制約から外部磁界を遮蔽することが困難であるため、一般には磁気センサを2組用いて差を取るような試みが成されるが装置が複雑になる弱点がある。  In addition, when a fluxgate magnetic sensor is used for nondestructive testing, the increase in residual stress inside the material is measured. In this case, the detected magnetic field is smaller than that of various external magnetic fields generated by geomagnetism and electrical equipment. A small amount of crab. Furthermore, in non-destructive testing, it is difficult to shield an external magnetic field due to location restrictions, so in general, an attempt is made to take a difference using two sets of magnetic sensors, but the device becomes complicated. There is.

発明が解決しようとする課題Problems to be solved by the invention

本発明の目的は、外部への漏洩磁界を少なく押さえることができ、且つ高感度で局所磁界の検出に適した構造のフラックスゲート磁気センサを提供することである。
さらに磁気センサを2組用いることなく、当該外部磁界の影響を少なく押さえることの可能な構造を持ったフラックスゲート磁気センサを提供することである。
An object of the present invention is to provide a fluxgate magnetic sensor having a structure that can suppress a leakage magnetic field to the outside to a small extent and is highly sensitive and suitable for detecting a local magnetic field.
Furthermore, it is to provide a fluxgate magnetic sensor having a structure capable of suppressing the influence of the external magnetic field to a small extent without using two sets of magnetic sensors.

課題を解決するための手段Means for solving the problem

上記目的を達成するために、我々は高透磁率磁性体との形状として棒状の磁性材料を使用し、且つ先端部分の面積を棒の断面積よりも充分に狭くするため、先端を円錐状等とする形状のものを用いた。棒の形状としては必ずしも円柱状である必要は無く、長方形やその他の形も可能であり、先端はその形状に応じた任意の形をとることができる。  In order to achieve the above object, we use a rod-shaped magnetic material as a shape with a high permeability magnetic body, and in order to make the area of the tip portion sufficiently narrower than the cross-sectional area of the rod, the tip is conical, etc. The thing of the shape to be used was used. The shape of the bar is not necessarily a columnar shape, and may be a rectangle or other shapes, and the tip may take any shape according to the shape.

高透磁率磁性体の材料としては、軟磁性材料である棒状のアモルファス磁性体(以下アモルファスリボン)を用いた。なお実際にはアモルファスリボンでは無く他の棒状の高透磁率磁性体でも可能であるが、ここではアモルファスリボンを用いた場合を説明する。  As a material of the high magnetic permeability magnetic material, a rod-shaped amorphous magnetic material (hereinafter referred to as an amorphous ribbon) that is a soft magnetic material was used. Actually, it is possible to use not only an amorphous ribbon but also other rod-like high magnetic permeability magnetic bodies, but here, a case where an amorphous ribbon is used will be described.

さらに外部へ出て行く磁界をキャンセルするために、互いに反対向きの磁界を発生する第1の励磁用コイルと第2の励磁用コイルから成る1セットの変調用励磁コイルを用いた。  Further, in order to cancel the magnetic field that goes out, a set of modulation exciting coils including a first exciting coil and a second exciting coil that generate magnetic fields in opposite directions are used.

当該1セットの変調用励磁コイルはアモルファスリボンの両側から、当該アモルファスリボン中央に対して対象となるように互いに反対向きに巻かれており、アモルファスリボン中央側の2端子はそれぞれ結線され、アモルファスリボン両端の端子はそれぞれ交流電源に結線されており、全体で直列の閉ループを形成して、アモルファスリボンを励磁している。  The set of excitation coils for modulation is wound in opposite directions from both sides of the amorphous ribbon so as to be targeted with respect to the center of the amorphous ribbon. The terminals at both ends are respectively connected to an AC power source, and form a series closed loop as a whole to excite the amorphous ribbon.

これによって、アモルファスリボンの回りに磁界の対象性が得られる。磁界の変調は当該1セットの変調用励磁コイルのそれぞれに得られ、充分に広い領域で磁化は飽和している。全体の磁気抵抗はゼロフィールドよりも大きくなる。アモルファスリボンの中央部分には、検出用のコイルが別に巻かれており、これによってリボン内に導入した外部磁界の検出が可能となる。  As a result, magnetic field symmetry is obtained around the amorphous ribbon. The modulation of the magnetic field is obtained in each of the set of excitation coils for modulation, and the magnetization is saturated in a sufficiently wide region. The overall magnetoresistance is greater than the zero field. A detection coil is separately wound around the central portion of the amorphous ribbon, thereby enabling detection of an external magnetic field introduced into the ribbon.

先に  First

で記した当該1セットの変調用励磁コイルと交流電源の結線方法は、アモルファスリボン中央側の2端子間に交流電源を接続し、アモルファスリボン両端の端子をそれぞれ結線して直列の閉ループを形成しても効果は同じである。The method of connecting the one set of excitation coil and AC power source described in the above is to connect an AC power source between the two terminals at the center of the amorphous ribbon, and connect the terminals at both ends of the amorphous ribbon to form a series closed loop. But the effect is the same.

また当該1セットの変調用励磁コイルは同じ向きに巻線し、交流電源を第1の励磁用コイルの端側と第2の励磁用コイルの中央側に接続し、第1の励磁用コイルの中央側と第2の励磁用コイルの端側をそれぞれ結線しても、同じ効果が得られる。  The one set of modulation exciting coils is wound in the same direction, and an AC power source is connected to the end side of the first exciting coil and the central side of the second exciting coil. The same effect can be obtained by connecting the center side and the end side of the second exciting coil.

以上の方法で、外部への漏洩磁界を少なく押さえたフラックスゲート磁気センサを提供することができるが、さらにこれに加えて地磁気や電気機器等が発生する広域外部磁界の影響を受けず、局所磁界のみを検出可能なフラックスゲート磁気センサを提供する。  With the above method, a fluxgate magnetic sensor that suppresses the leakage magnetic field to the outside can be provided, but in addition to this, the local magnetic field is not affected by the wide-area external magnetic field generated by geomagnetism or electrical equipment. Provided is a fluxgate magnetic sensor capable of detecting only.

上記目的を達成するために、我々は平行に並べた2本のアモルファスリボンを用いた。以下にその構成方法を記載する。
2本のアモルファスリボンは、一方が他方よりも若干前に出る形で束ねられている。当該2本のアモルファスリボンには1セットの変調用励磁コイルが、2本のアモルファスリボンを一体にした形で、両側から当該2本のアモルファスリボン中央に対して対象となるように互いに反対向きに巻かれており、2本のアモルファスリボン中央側の2端子はそれぞれ結線され、アモルファスリボン両端の端子はそれぞれ交流電源に結線されており、全体で直列の閉ループを形成している。
In order to achieve the above objective, we used two amorphous ribbons arranged in parallel. The configuration method is described below.
The two amorphous ribbons are bundled so that one protrudes slightly before the other. The two amorphous ribbons have a set of modulation exciting coils integrated with the two amorphous ribbons so that the two amorphous ribbons are opposed to each other so as to be directed to the center of the two amorphous ribbons from both sides. Two terminals on the center side of the two amorphous ribbons are connected to each other, and terminals on both ends of the amorphous ribbon are connected to an AC power source, forming a series closed loop as a whole.

2本のアモルファスリボンの中央部分には、検出用のコイルが当該2本のアモルファスリボンに別々に巻かれているが、これらは外部磁界をうち消す向きに巻かれ、片側の端子が互いに結線され、結線されていない残りの2本の端子は出力端子としての働きをする。地磁気等の外部磁界は2本のアモルファスリボンに均等に入力されるが、近接磁界は前に出ている方の当該アモルファスリボンにのみ入力される。  In the central part of the two amorphous ribbons, a detection coil is separately wound around the two amorphous ribbons. These coils are wound in such a direction as to extinguish the external magnetic field, and the terminals on one side are connected to each other. The remaining two terminals that are not connected serve as output terminals. An external magnetic field such as geomagnetism is equally input to the two amorphous ribbons, but a near magnetic field is input only to the amorphous ribbon that is in front.

先の  Previous

,

の部分で記載された、当該2組の変調用励磁コイルと当該交流電源の結線方法は、The method of connecting the two sets of modulation exciting coils and the AC power source described in the section of

以降の発明に対しても、当然適用される。Of course, this also applies to the following inventions.

発明の実施の形態を実施例にもとづき図面を参照して説明する。
図2は外部への漏洩磁界を押さえたタイプのフラックスゲート磁気センサの構造図であり、1のアモルファスリボンには、2の第1励磁用コイルと3の第2励磁用コイルが互いに反対向きの磁界を発生するように巻かれている。さらに2の第1励磁用コイルと3の第2励磁用コイルの中央側端子はそれぞれ結線されている。2の第1励磁用コイルと3の第2励磁用コイルの端側端子には、4の交流電源が加えられて、アモルファスリボンを励磁している。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described based on examples with reference to the drawings.
FIG. 2 is a structural diagram of a fluxgate magnetic sensor of a type that suppresses the leakage magnetic field to the outside. In one amorphous ribbon, two first exciting coils and three second exciting coils are opposite to each other. It is wound to generate a magnetic field. Further, the center side terminals of the second first exciting coil and the third second exciting coil are respectively connected. Four AC power supplies are applied to the end side terminals of the first excitation coil 2 and the second excitation coil 3 to excite the amorphous ribbon.

アモルファスリボンの中央には、5の検出コイルが巻かれており、コイルの両端に検出磁界の波形が現れる。図4はその波形であり、13は2と3の励磁コイルに加えられる交流電源の波形I(t)であり、13は検出コイルの出力波形のR(t)である。なお図から明瞭なように、アモルファスリボンの先端は、局所磁界の検出に適したように先の尖った形となっている。Five detection coils are wound around the center of the amorphous ribbon, and a waveform of the detection magnetic field appears at both ends of the coil. FIG. 4 shows the waveform, 13 is the waveform I (t) of the AC power source applied to the excitation coils 2 and 3, and 13 is the output waveform R M (t) of the detection coil. As is clear from the figure, the tip of the amorphous ribbon has a pointed shape suitable for detection of a local magnetic field.

図3は、外部への漏洩磁界を少なく押さえ、さらに地磁気等の広域外部磁界からの影響を少なくしたタイプのフラックスゲート磁気センサの構造図である。6と7のアモルファスリボンは、平行の状態でさらに6が7よりも若干前に出る形で束ねられる。当該2本に平行としたアモルファスリボンの全体に対して、8の第1励磁用コイルと9の第2励磁用コイルが互いに反対向きの磁界を発生するように巻かれている。さらに8の第1励磁用コイルと9の第2励磁用コイルの中央側端子はそれぞれ結線されている。8の第1励磁用コイルと9の第2励磁用コイルの端側端子には、10の交流電源が加えられて、アモルファスリボンを励磁している。  FIG. 3 is a structural diagram of a fluxgate magnetic sensor of a type that suppresses the leakage magnetic field to the outside and further reduces the influence from a wide-range external magnetic field such as geomagnetism. The amorphous ribbons of 6 and 7 are bundled in a state where 6 further protrudes slightly before 7 in a parallel state. Eight first exciting coils and nine second exciting coils are wound around the entire amorphous ribbon parallel to the two to generate magnetic fields in opposite directions. Furthermore, the center side terminals of the 8 first exciting coils and the 9 second exciting coils are respectively connected. Ten AC power supplies are applied to the end terminals of the first excitation coil 8 and the second excitation coil 9 to excite the amorphous ribbon.

11と12は検出用のコイルであり、11は6のアモルファスリボンに12は7のアモルファスリボンに地磁気等の広域外部磁界を打ち消す向きにそれぞれ巻かれ、さらに11と12の1端が結線されている。11と12の結線されていない2本の端子は出力端子であり、検出された信号が出力される。  11 and 12 are detection coils, 11 is wound on an amorphous ribbon 6 and 12 is wound on an amorphous ribbon 7 in a direction to cancel a wide-area external magnetic field such as geomagnetism, and one end of 11 and 12 is connected. Yes. The two unconnected terminals 11 and 12 are output terminals, and the detected signals are output.

図4は信号の波形図であり、13は励磁用の変調信号の波形、14は検出された信号の出力波形である。14の検出された信号の出力波形は、13は励磁用変調信号波形の2倍の周波数であることが判る。14において、振幅R(t)が0となる点を観測して、外部磁界の大きさを計測する。  FIG. 4 is a waveform diagram of a signal, 13 is a waveform of a modulation signal for excitation, and 14 is an output waveform of a detected signal. It can be seen that the output waveform of 14 detected signals has a frequency 13 that is twice the frequency of the excitation modulation signal waveform. 14, the point where the amplitude R (t) becomes 0 is observed, and the magnitude of the external magnetic field is measured.

発明の効果The invention's effect

本発明を用いることによって、これまで外部に磁束が漏れて測定対象に影響を与えるため使用が困難であった生体磁気測定等の分野においてもフラックスゲート磁気センサを用いることができる。さらに微弱な局所磁界を検出する際に問題となる、地磁気や電気機器の発生する広域的な磁界の影響を、磁気シールドやセンサを2台用いて差をとるような複雑な処理をせずに測定することが可能となる。  By using the present invention, the fluxgate magnetic sensor can be used also in fields such as biomagnetism measurement that has been difficult to use because magnetic flux leaks to the outside and affects the measurement object. In addition, the influence of the wide-area magnetic field generated by geomagnetism and electrical equipment, which is a problem when detecting weak local magnetic fields, can be handled without complicated processing such as using two magnetic shields and sensors. It becomes possible to measure.

従来のフラックスゲート磁気センサの一構成例A configuration example of a conventional fluxgate magnetic sensor 外部への漏洩磁界を少なく押さえたフラックスゲート磁気センサの構成図Configuration diagram of a fluxgate magnetic sensor that reduces the leakage magnetic field to the outside. 外部への漏洩磁界を少なく押さえ、広域磁界の影響の少ないフラックスゲート磁気センサの構成図Configuration diagram of a fluxgate magnetic sensor that suppresses leakage magnetic field to the outside and is less affected by a wide-area magnetic field 本発明におけるフラックスゲート磁気センサの波形図Waveform diagram of fluxgate magnetic sensor in the present invention

Claims (3)

棒状の高透磁率磁性体の片側一端から中央の方向に巻かれた第1の変調用励磁コイルと、当該高透磁率磁性体の反対側の一端から中夬の方向に巻かれた第2の変調用励磁コイルを有し、当該第1の変調用励磁コイルと第2の変調用励磁コイルの発生する磁場が反対方向になるように、それぞれ当該第1の変調用励磁コイルと第2の変調用励磁コイルのそれぞれ一端を結線し、当該第1の変調用励磁コイルと第2の変調用励磁コイルのそれぞれの他の端子に変調用の交流電源を接続して直列回路を形成し、さらに当該第1の変調用励磁用コイルと第2の励磁用コイルが巻かれている当該棒状の高透磁率磁性体の中間部分に検出用のコイルを形成することにより、装置から外部への漏洩磁界を少なく押さえたことを特徴とするフラックスゲート磁気センサ。  A first modulation exciting coil wound in the center direction from one end of the rod-like high permeability magnetic body, and a second coil wound in the middle direction from the opposite end of the high permeability magnetic body. A modulation excitation coil, and the first modulation excitation coil and the second modulation are arranged so that the magnetic fields generated by the first modulation excitation coil and the second modulation excitation coil are in opposite directions, respectively. One end of each excitation coil is connected, and a modulation AC power source is connected to the other terminals of the first modulation excitation coil and the second modulation excitation coil to form a series circuit. By forming a detection coil in an intermediate portion of the rod-like high permeability magnetic body around which the first modulation excitation coil and the second excitation coil are wound, a leakage magnetic field from the device to the outside can be reduced. Fluxgate magnetism characterized by low holding Sensor. 請求項1の第1と第2の励磁コイルを有するフラックスゲート磁気センサにおいて、棒状の高透磁率の磁性体2本を平行に並べ、片方の当該棒状磁性体が他の当該棒状磁性体よりも先端が若干前に出た状態で束ね、請求項1と同等に、第1の変調用励磁コイルと第2の変調用励磁コイルと交流電源を当該第1の変調用励磁コイルと第2の変調用励磁コイルの発生する磁塲が反対方向になるように結線して直列回路を形成し、さらに当該第1の励磁用コイルと第2の励磁用コイルの中間部分に検出用のコイル2組を当該2本の棒状磁性体に別々に外部磁界をキャンセルする形に巻いた後直列に結線し、広域磁場をキャンセルして局所磁界のみを検出可能としたことを特徴とするフラックスゲート磁気センサ。  The fluxgate magnetic sensor having the first and second exciting coils according to claim 1, wherein two rod-like high magnetic permeability magnetic bodies are arranged in parallel, and one of the rod-like magnetic bodies is more than the other of the rod-like magnetic bodies. The first modulation excitation coil, the second modulation excitation coil, and the AC power supply are connected to the first modulation excitation coil and the second modulation in the same manner as in claim 1. A series circuit is formed by connecting so that the magnetic field generated by the excitation coil is in the opposite direction, and two detection coils are provided in the middle portion between the first excitation coil and the second excitation coil. A fluxgate magnetic sensor, wherein the two magnetic rods are wound separately in such a manner as to cancel an external magnetic field and then connected in series so that only a local magnetic field can be detected by canceling a wide-area magnetic field. 請求項1と請求項における棒状の高透磁率の磁性体は、先端部分を円錐状等にすることにより、当該先端部分の面積を棒の断面積より充分狭くして空間解像度を向上させるとともに、アモルファス磁性体等の軟磁性材料を使用することを特徴とするフラックスゲート磁気センサ。In the rod-like high permeability magnetic body according to claim 1 and claim, by making the tip portion conical or the like, the area of the tip portion is sufficiently narrower than the cross-sectional area of the rod, and the spatial resolution is improved. A fluxgate magnetic sensor using a soft magnetic material such as an amorphous magnetic material.
JP2003436200A 2003-12-03 2003-12-03 Flux gate magnetic sensor Pending JP2005164562A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009519452A (en) * 2005-12-14 2009-05-14 コミサリヤ・ア・レネルジ・アトミク Small magnetic core, sensor including small magnetic core, and method for manufacturing small magnetic core
WO2011155526A1 (en) * 2010-06-09 2011-12-15 株式会社フジクラ Flux gate sensor, electronic direction finder using same, and current meter
WO2011155527A1 (en) * 2010-06-09 2011-12-15 株式会社フジクラ Flux gate sensor, electronic direction finder using same, and current meter

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009519452A (en) * 2005-12-14 2009-05-14 コミサリヤ・ア・レネルジ・アトミク Small magnetic core, sensor including small magnetic core, and method for manufacturing small magnetic core
WO2011155526A1 (en) * 2010-06-09 2011-12-15 株式会社フジクラ Flux gate sensor, electronic direction finder using same, and current meter
WO2011155527A1 (en) * 2010-06-09 2011-12-15 株式会社フジクラ Flux gate sensor, electronic direction finder using same, and current meter
JPWO2011155527A1 (en) * 2010-06-09 2013-08-01 株式会社フジクラ Fluxgate sensor and electronic compass and ammeter using the same
JPWO2011155526A1 (en) * 2010-06-09 2013-08-01 株式会社フジクラ Fluxgate sensor and electronic compass and ammeter using the same

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