JP2005000849A - Adhesive rubber roll in surface cleaning equipment for resin sheet products and film material products - Google Patents

Abstract

In a surface cleaning apparatus for resin thin plate products and film material products, wrapping of an object to be cleaned around an adhesive rubber roll due to a peeling electrification phenomenon is suppressed, and damage or the like is prevented.
An adhesive rubber roll (6) includes a conductive layer (8) made of a conductive rubber and an insulating property on the entire long peripheral side surface of a cylindrical cored bar (7) from the inside to the outside in the short axis direction. By covering the layers sequentially with a thin adsorption layer (9) made of rubber, the conductive layer of the adhesive rubber roll is electrically connected to the core metal even if the adhesive rubber roll is charged with static electricity due to the peeling charging phenomenon. Since the static electricity can be reliably removed from the grounding, it is possible to prevent the resin thin plate product and the film material product from being wound around the adhesive rubber roll and being damaged while the cleaning is reliably performed by the adsorption layer.
[Selection] Figure 2

Description

[0001]
[Technical field to which the invention belongs]
The present invention provides a surface cleaning of a resin thin plate product and a film material product obtained by removing dust and cut pieces (hereinafter referred to as dust etc.) adhering to the front and back surfaces of the resin thin plate product and the film material product. In an apparatus, the present invention relates to an adhesive rubber roll formed by adhering and removing dust and the like by directly adhering to the front and back surfaces of a resin thin plate product and a film material product.
[0002]
[Prior art]
Conventionally, in the process of manufacturing printed circuit boards incorporating electronic components, resin thin plate products such as liquid crystal panels, and film material products used as raw materials thereof (hereinafter, resin thin plate products and film material products are collectively referred to as “substrates”). A large amount of dust or the like is generated due to dust existing in the air or cut pieces generated when the substrate or the like is cut. If this large amount of dust or the like adheres to the substrate or the like, it may cause a product failure or breakage and reduce the yield rate of the substrate or the like. A surface cleaning apparatus for the substrate or the like is required.
For this reason, for example, as a surface cleaning device for the substrate or the like, the adhesive rubber roll that is rotatably held by power in the frame, and the holding cylinder that is rotatable to be in close contact with the surface of the adhesive rubber roll. The one composed of the pressure-sensitive adhesive tape roll to be held is arranged on the upper and / or lower sides of the substrate to be cleaned, and a conveyance mechanism for supporting and conveying the substrate is arranged and conveyed by the conveyance mechanism. By adhering the front and back surfaces of the substrate, etc. or either side to the adhesive rubber roll, the dust or the like adhering to the front or back surface of the substrate or any one surface is adsorbed to and removed from the adhesive rubber roll. The dust transferred and removed to the adhesive rubber roll is finally transferred and removed to the adhesive tape roll to remove the dust on the surface of the substrate and clean it. There is Umono.
[0003]
Here, the adhesive rubber roll of the surface cleaning apparatus such as the conventional substrate adheres to the front and back surfaces of the substrate or the like when the front or back surface of the substrate or the like is allowed to pass while contacting either side of the adhesive rubber roll. In order to more reliably adsorb and remove the dust and the like, the adhesive rubber roll is spread over the entire peripheral surface in the longitudinal direction of the holding cylinder by an adsorption layer made of, for example, silicon rubber having excellent adsorbability of dust or the like. What is coated is common.
However, since the adsorbing layer made of silicon rubber or the like that is excellent in adsorbing dust or the like has high insulating properties, if the substrate is passed through while contacting the adhesive rubber roll, the adhering layer and the adhering substrate or the like adhere to each other. When the rubber roll is peeled off, a peeling charging phenomenon occurs in which static electricity is charged opposite to each other between the substrate and the adhesive rubber roll. As a result, the peeling electrification phenomenon that occurs between the substrate and the adhesive rubber roll may have an electrical adverse effect not only on the substrate and the like but also on a surface cleaning device such as the substrate.
Therefore, in order to cope with the peeling charging phenomenon that occurs between the substrate or the like and the adhesive rubber roll, in the surface cleaning apparatus for the substrate or the like, first, the surface of the substrate or the like is charged from the viewpoint of ensuring the quality of the product. A static elimination system that electrically neutralizes static electricity charged on the surface of the substrate or the like by blowing an airflow or the like having a charge opposite to the static electricity is mounted.
[0004]
[Problems to be solved by the invention]
However, when the substrate or the like is thinned with the recent technological advancement, when the surface of the thinned substrate or the like is washed, as described above, the separation charging is performed between the substrate and the adhesive rubber roll. When the phenomenon occurs, because the substrate is lightened by thinning the substrate, the thinned substrate is wound around the adhesive rubber roll by static electricity charged to the adhesive rubber roll, Damage to the substrate or the like has frequently occurred. That is, it is necessary not only to remove static electricity from the substrate itself, which has been charged with static electricity due to the peeling charging phenomenon, but also to remove static electricity from the adhesive rubber roll that is charged with static electricity due to the same peeling charging phenomenon. I came.
[0005]
Therefore, the present invention is to improve the disadvantages of the above-described conventional ones, and is an adsorption made of silicon rubber or the like that has been used in the adhesive rubber roll of a conventional surface cleaning device such as a substrate, etc., which is excellent in adsorbing dust and the like. While securing the cleaning performance by the layer, it is possible to surely remove static electricity that the adhesive rubber roll of the surface cleaning device such as a substrate is charged by a peeling charging phenomenon or the like.
[0006]
[Means for Solving the Problems]
For this purpose, in a surface cleaning apparatus such as a substrate, the entire surface on the long axis direction side of the cylindrical cored bar is formed of a conductive layer made of conductive rubber and a thin adsorbed layer made of insulating rubber from the inside toward the outside in the short axis direction. In addition, silicon rubber, silicon rubber or butyl rubber is used for the adsorption layer, or NBR (nitrile rubber) or carbon rubber is used for the conductive layer. Is used.
[0007]
And the thickness of this adsorption layer shall be less than 5 mm.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Since it has the above configuration, first, in the adhesive rubber roll that adsorbs and removes dust and the like, the adsorbing layer that directly adheres to the surface of the substrate etc. is the same as the conventional material silicon rubber, silicon rubber or butyl Since the rubber is used, the surface cleaning performance is reliably ensured, and the surface of the substrate or the like can be reliably cleaned.
[0009]
Further, the adhesive rubber roll that adsorbs and removes dust and the like is a peeling electrification phenomenon that occurs when the adhesive rubber roll peels off the substrate and the like that are in close contact with each other after adsorbing dust and the like adhering to the surface of the substrate and the like. Accordingly, the adsorption layer made of an insulating rubber such as silicon rubber, silicon rubber or butyl rubber on the surface of the adhesive rubber roll is charged with static electricity. At this time, the thickness of the adsorption layer made of the insulating rubber constituting the adhesive rubber roll is thin, and in particular, by reducing the thickness of the adsorption layer to less than 5 mm, the insulation of the adsorption layer is intentionally lowered. Under this adsorbing layer, a conductive layer made of conductive rubber such as NBR (nitrile rubber) or carbon rubber covers the entire peripheral surface in the long axis direction of the metal core, and the static electricity charged by the adsorbing layer is cored. Since it is electrically connected to the gold and grounded through the core metal, the static electricity charged in the adsorption layer due to the peeling charging phenomenon can be eliminated. Therefore, even if the substrate or the like is still charged due to the peeling electrification phenomenon, the adhesive rubber roll is neutralized, so the substrate or the like is not wound around the adhesive rubber roll and can be prevented from being damaged. At the same time, the adverse electrical effects on the surface cleaning apparatus can be eliminated. Here, if the thickness of the adsorption layer is 5 mm or more, the insulating property is completely ensured in the silicon rubber, silicon rubber or butyl rubber constituting the adsorption layer, and the conductivity under the adsorption layer is reduced. Since the earth cannot be grounded through the mandrel that is electrically conducted by the layer, it is impossible to eliminate the peeling electrification phenomenon that occurs in the adhesive rubber roll as a result.
[0010]
In addition, the conductive layer made of conductive rubber that covers the entire circumferential surface on the long axis side of the core metal under the adsorption layer made of insulating rubber electrically conducts the static electricity charged by the adsorption layer to the core metal. Integrating with the insulating rubber of the adsorption layer, when the adhesive rubber roll comes into contact with the substrate, etc. for cleaning, the load applied to the substrate, etc. is buffered and the surface irregularities of the substrate, etc. are flexible It also has a role to deform and respond.
[0011]
Moreover, even if a large amount of substrates are continuously cleaned, the adhesive rubber roll is made of conductive rubber that covers the entire long-side surface of the cylindrical cored bar under the adsorption layer. Since it is electrically connected to the metal core through the conductive layer and is grounded through the frame, static electricity that causes the adsorbing layer of the adhesive rubber roll to be charged can be constantly eliminated. Therefore, even if a large number of substrates and the like are subjected to surface cleaning work, it is possible to suppress the storage phenomenon that the charging voltage of the adsorption layer of the adhesive rubber roll increases, which can be caused by a large number of peeling charging phenomena. Does not wind around the adhesive rubber roll, and can prevent damage to the substrate and the like, and at the same time, can eliminate adverse effects on the surface cleaning apparatus.
[0012]
【Example】
The present invention will be further described with reference to the embodiments shown in the drawings. FIG. 1 is a conceptual diagram of a surface cleaning apparatus (1) for a resin thin plate product and a film material product having an embodiment of the present invention, and a surface cleaning apparatus (1) for a resin thin plate product and a film material product shown in FIG. Is a pressure-sensitive rubber roll (6) (6 ') that is rotatably held by a power of a motor or the like (not shown) in a frame (not shown), and this pressure-sensitive rubber roll (6) ( 6 '), which is composed of an adhesive tape roll (3) (3') that is rotatably held by a holding cylinder so as to be in close contact with the surface of the resin thin plate product and film material product (4 ) And a transport mechanism (2) for supporting and transporting the resin sheet product and film material product (4). Then, the front and back surfaces (4 ′) and (4 ″) of the resin thin plate product and the film material product (4) conveyed by the conveyance mechanism (2) are arranged above and below the resin thin plate product and the film material product (4). Dust and the like (5) adhering to the front and back surfaces (4 ′) and (4 ″) of the resin thin plate product and the film material product (4) by passing the adhesive rubber roll (6) (6 ′) in contact with the adhesive rubber roll (6). Transfer to and remove from the adhesive rubber roll (6), and adhere to the front and back surfaces (4 ′) and (4 ″) of the resin sheet product and film material product (4) transferred and removed to the adhesive rubber roll (6). The dust and the like (5) that has been transferred are finally transferred to and removed from the adhesive tape rolls (3) and (3 ') to remove the dust and clean it.
[0013]
And as shown in FIG.2 and FIG.3, the adhesion rubber roll (6) which is an Example of this invention is a short axis | shaft. From the inner side to the outer side in the direction, for example, the conductive layer (8) made of conductive rubber made of NBR (nitrile rubber) or carbon rubber (hereinafter referred to as NBR in the embodiments of the present invention) and the like, and the adsorptive property For example, a thin adsorbing layer (9) made of an insulating rubber made of, for example, silicon rubber, silicon rubber, or butyl rubber (hereinafter referred to as silicon rubber in the embodiments of the present invention) is coated in layers. It will be. Here, the thickness of the adsorption layer (9) is less than 5 mm.
[0014]
Since the adhesive rubber roll (6) (6 ') according to the embodiment of the present invention has the above-described configuration, the surface cleaning device (1) for the resin thin plate product and the film material product is operated, and the resin thin plate product and When the dust or the like (5) adhering to the front and back surfaces (4 ′) and (4 ″) of the film material product (4) is to be cleaned, it is as shown in FIG. (6) The unwashed resin thin plate product and film material product (4) conveyed to (6 ′) [see (a) of FIG. 4] are the front and back surfaces of the resin thin plate product and film material product (4). (4 ′) and (4 ″) are brought into close contact with each other by passing them in contact with the adhesive rubber rolls (6) and (6 ′) disposed above and below the resin sheet product and film material product (4). This adhesive rubber roll (6) (6 ') Since the adsorbing layers (9) and (9 ') of the landing rubber rolls (6) and (6') are made of silicon rubber, which is a conventional material, the front and back surfaces of the resin thin plate product and the film material product (4) can be reliably (4 ' ) (4 ″) can be adsorbed and removed by the dust rubber (5) on the adhesive rubber roll (6) (6 ′). At this time, the adsorbing layer (9) (9 ′) The lower conductive layers (8) and (8 ') are integrated with the adsorbing layers (9) and (9') so that the adhesive rubber rolls (6) and (6 ') are made of resin thin plate products and film materials for cleaning. When closely adhering to the product (4), the adhesive rubber roll (6) (6 ') itself retains its elasticity to buffer the resin thin plate product and the film material product (4), and the resin thin plate product. In addition, it can flexibly cope with the surface condition (unevenness) of the film material product.
[0015]
Further, when the front and back surfaces (4 ′) and (4 ″) of the resin thin plate product and the film material product (4) are cleaned by the adhesive rubber roll (6) (6 ′), they are in close contact with each other for the surface cleaning. When the front and back surfaces (4 ′) and (4 ″) of the resin thin plate product and the film material product (4) are about to be separated from each other, the opposite static electricity is charged in both. A peeling electrification phenomenon occurs. That is, due to this peeling charging phenomenon, the resin thin plate product and the film material product (4) whose front and back surfaces (4 ′) and (4 ″) are to be washed are charged with negatively charged static electricity, and the adhesive rubber roll (6). (6 ') is charged with positively charged static electricity and both are charged with opposite static electricity (see (b) in FIG. 4).
However, the adhesive rubber rolls (6) and (6 ') according to the embodiment of the present invention have an adsorbing layer (9) and (9) made of an insulating rubber made of silicon rubber constituting the adhesive rubber rolls (6 and 6'). ') Is thin, in particular, its insulating property is intentionally lowered by making its thickness less than 5 mm, and under this adsorbing layer (9) (9'), the core metal (7) Since the entire long-axis-direction peripheral surface of (7 ′) is covered with the conductive layers (8) and (8 ′) of conductive rubber, the insulating properties of the adhesive rubber rolls (6) and (6 ′) The static electricity charged on the adsorption layer (9) (9 ') made of rubber is electrically conducted from the adsorption layer (9) (9') through the conductive layer (8) (8 '). The adhesive rubber rolls (6) (6 ') which are grounded through the core bars (7) (7') and further through the frame, and are thus charged. Is intended to go is securely neutralization [of (iii) see Figure 4].
For this reason, even if the resin thin plate product and the film material product (4) are thinned, they are not wound around the adhesive rubber roll (6) (6 ′) due to static electricity generated by the peeling charging phenomenon. In addition, the resin thin plate product and the film material product (4) can be prevented from being damaged, and electrical adverse effects on the cleaning device (1) itself can be eliminated (see (d) of FIG. 4).
In addition, the static electricity with which the said resin thin plate product and film material product (4) itself are charged can be neutralized easily and reliably electrically by utilizing the conventional static elimination system.
[0016]
In addition, the adhesive rubber roll (6) (6 ′) according to the embodiment of the present invention has a conductive layer (8) (8 ′) made of conductive rubber constituting the adhesive rubber roll (6) (6 ′). In addition to being always electrically connected to the cored bar (7) and grounded via the frame, even if a large amount of resin thin plate product and film material product (4) are subjected to cleaning treatment, The electricity storage phenomenon that the electrostatic voltage charged by the adhesive rubber rolls (6) and (6 ′) rises according to the number of processed sheets does not occur, so a large amount of resin sheet products and film material products (4) Even if the cleaning operation is performed, the peeling electrification phenomenon generated between the front and back surfaces (4 ′) and (4 ″) of the resin thin plate product and the film material product (4) and the adhesive rubber roll (6) and (6 ′). Resin thin plate products and The film material product (4) does not wrap around the adhesive rubber roll (6) (6 '), and the resin thin plate product and the film material product (4) can be prevented from being damaged, and to the cleaning device (1) itself. The electrical adverse effects of can be eliminated.
[0017]
Therefore, in order to confirm the effect of the present invention, a conventional adhesive rubber roll, which is an insulating rubber having a surface thickness of 5 mm, for example, only covered with an adsorption layer made of silicon rubber, and an embodiment of the present invention. The static charge voltage charged by the surface cleaning operation of the resin thin plate product and the film material product (4) was compared with an adhesive rubber roll (6) (6 ′) by experiments. In this comparative experiment, as the adhesive rubber roll (6) (6 ′) according to the embodiment of the present invention, a silicon rubber having a diameter of 50 mm and an adsorption layer (9) (9 ′) having a thickness of 1 mm, a conductive layer (8) NBR (nitrile rubber) with a thickness of 4 mm is used as (8 '), and aluminum material with a diameter of 40 mm is used as the core metal (7) (7'). As the product (4), a PET panel material (30 cm × 40 cm, thickness 100 microns) used for a liquid crystal panel is used. And in the measurement of the charged static electricity, the multiple places of the said adhesion rubber roll (6) (6 ') were measured. As a result, the conventional adhesive rubber roll is +2 kv to +4 kv [when a large amount of resin thin plate product and film material product (4) is subjected to surface cleaning operation (the surface cleaning operation of about 20 pieces of the PET panel material is performed continuously) If done, it reaches a maximum of 20 kv due to the electricity storage phenomenon. In contrast, in the adhesive rubber roll (6) (6 ′) which is an embodiment of the present invention, even if the surface cleaning operation is continuously performed, it is always ± 0.05 kv to ± 0.15 kv. It was measured. That is, in this comparative experiment, the adhesive rubber roll (6) (6 ′) which is an embodiment of the present invention has an effect that the charged static electricity can be surely removed even when compared with the conventional adhesive rubber roll. confirmed. Conversely, when the thickness of the adsorption layer (9) (9 ') made of silicon rubber is 5 mm or more, the adhesive rubber roll regardless of the thickness and type of the conductive layer (8) (8'). On the other hand, it was measured that the electrostatic charge was not significantly different from the experimental result in the conventional example.
[0018]
【The invention's effect】
As described above, in the surface cleaning apparatus for resin thin plate products and film material products, the adhesive rubber roll is coated with the conductive layer made of conductive rubber on the entire circumferential surface in the longitudinal direction of the cylindrical cored bar, and then the conductive rubber By further covering the entire peripheral surface in the major axis direction of the cored bar covered with the layer with an adsorbing layer made of insulating rubber such as silicon rubber having excellent adsorbability, the conventional resin thin plate product and Adhesive rubber rolls for resin sheet products and film material products, while ensuring the cleaning ability for film material products, while suppressing the peeling resistance phenomenon that occurs during this cleaning process and the electricity storage phenomenon that the charged voltage of charged static electricity increases. Excellent effect to prevent electrical damage to resin thin plate products and film material products or cleaning equipment due to wrapping around and high voltage static electricity And it has a.
[Brief description of the drawings]
FIG. 1 is a conceptual diagram of a main part of a substrate or sheet surface cleaning apparatus including an embodiment of the present invention.
FIG. 2 is a cross-sectional view in the major axis direction of an adhesive rubber roll according to an embodiment of the present invention.
FIG. 3 is a cross-sectional view in the minor axis direction of an adhesive rubber roll according to an embodiment of the present invention.
FIG. 4 is a conceptual diagram showing an operating state of an adhesive rubber roll according to an embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Surface cleaning apparatus of resin thin plate product and film material product 2 Conveyance mechanism 3, 3 'Adhesive tape roll 4 Surface 4 "(resin thin plate product and film material product) surface 4" (resin thin plate product and film material product) Back surface 5 (of film material product) Dust, etc. 6, 6 'Adhesive rubber roll 7, 7' Core metal 8, 8 'Conductive layer 9, 9' Adsorption layer

Claims (4)

In the surface cleaning device for resin thin plate products and film material products, which removes dust by bringing the dust attached to the surfaces of the resin thin plate products and film material products into contact with an adhesive rubber roll that is rotatably held, transferred, removed,
A thin resin sheet product in which the entire long-axis-side peripheral surface of a cylindrical core is covered in layers with a conductive layer made of conductive rubber and a thin adsorption layer made of insulating rubber from the inside to the outside in the short-axis direction. And an adhesive rubber roll in a surface cleaning apparatus for film material products. The adhesive rubber roll in the apparatus for cleaning a surface of a resin sheet product and a film material product according to claim 1, wherein the adsorption layer is made of silicon rubber, silicon rubber or butyl rubber. 3. The adhesive rubber roll in a surface cleaning apparatus for resin sheet products and film material products according to claim 1 or 2, wherein NBR (nitrile rubber) or carbon rubber is used for the conductive layer. The pressure-sensitive rubber roll in the surface cleaning apparatus for resin thin plate products and film material products according to claim 1, 2 or 3, wherein the thickness of the adsorption layer is less than 5 mm.

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