JP2004325578A - Deflection mirror - Google Patents

Abstract

The present invention relates to a deflecting mirror in which a flat mirror portion having a reflecting surface is tiltably supported by a torsion beam portion. The deflecting mirror can reduce distortion of the reflecting surface of the flat mirror portion and can cope with high speed. Realize.
Kind Code: A1 A torsion beam portion is disposed so as to sandwich a plane mirror portion from the side, and an inner end thereof is connected to a corner portion on the outer periphery of the plane mirror portion. The torsion beams 2 and 3 allow the plane mirror 1 to tilt by the torsion of the beams. The base 6 is connected to the outer ends of the torsion beams 2 and 3. A rib 7 for reinforcing the plane mirror 1 is provided on the back side of the plane mirror 1. The height of the rib 7 is determined by the height H1 of the rib 7 at a position distant from the tilt center axis of the plane mirror 1 (the center axis L1 of torsion of the torsion beams 2 and 3). The rib 7 is formed so as to be lower than the height H2 of the nearby rib 7.
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a deflecting mirror in which a flat mirror having a reflective surface is tiltably supported by a torsion beam.
[0002]
[Prior art]
In a deflection mirror manufactured by a semiconductor process or the like, a torsion beam functioning as a torsion spring is formed at the rotation center position of the plane mirror, and the plane mirror can be tilted by elastically deforming the torsion beam. I have.
[0003]
The deflecting mirror includes a deflecting mirror having one degree of freedom rotating about only one axis (for example, see Patent Document 1) and a deflecting mirror having two degrees of freedom rotatable about two orthogonal axes (for example, see Patent Document 1). 2).
[0004]
As a driving means of the plane mirror unit, there is an electrostatic driving method, an electromagnetic driving method, or the like. The point at which the rotational driving force is transmitted from the driving means to the plane mirror is at a position distant from the torsion beam. For this reason, a force corresponding to the amount of elastic deformation of the torsion beam portion is applied to the tilted flat mirror portion, and the flat mirror portion is deformed according to this force, and its reflection surface is distorted. . In the deflecting mirrors described in Patent Documents 1 and 2, there is a problem that the distortion of the reflection surface of the plane mirror portion is large.
[0005]
Therefore, a deflection mirror with one degree of freedom in which a reinforcing member is joined to the back surface of the plane mirror section has been proposed in order to make the plane mirror section less likely to warp and to reduce the weight of the plane mirror section (for example, see Patent Document 3). ). This reinforcing member has a certain height.
[0006]
[Patent Document 1]
JP 2002-131885 A (FIG. 1)
[Patent Document 2]
JP-A-5-60993 (FIG. 1)
[Patent Document 3]
JP 2001-249300 A (FIGS. 7 and 10)
[0007]
[Problems to be solved by the invention]
The deflecting mirror described in the above cited document 3 has higher strength than the deflecting mirrors described in the cited documents 1 and 2, and the distortion of the reflection surface of the plane mirror portion is reduced. However, the provision of the reinforcing member having a constant height has a problem that the inertia of the plane mirror section including the ribs is increased, even though a hole is formed in the reinforcing member, and it is not possible to cope with high speed.
[0008]
An object of the present invention is to solve the above-mentioned problem, and an object of the present invention is to realize a deflecting mirror that can reduce distortion of a reflection surface of a plane mirror portion and can cope with high-speed operation.
[0009]
[Means for Solving the Problems]
The invention according to claim 1 relates to a deflecting mirror having one degree of freedom, and includes a plane mirror having a reflection surface, and a flat mirror arranged to sandwich the plane mirror from the side and provided on an outer periphery of the plane mirror. A torsion beam part having an inner end connected thereto and capable of tilting the plane mirror part by torsion of the beam, a base part connected to an outer end of the torsion beam part, and a back surface of the plane mirror part And a rib formed on the side and reinforcing the plane mirror portion, the rib having a plurality of heights.
[0010]
In the present invention, since the flat mirror portion is reinforced by the rib, even when a force corresponding to the amount of elastic deformation of the torsion beam portion is applied to the flat mirror portion, the deformation of the flat mirror portion can be reduced, and the distortion of the reflection surface is also reduced. it can.
[0011]
Further, since the transmission point of the rotational driving force to this kind of plane mirror is located at a position distant from the torsion beam, the plane mirror in a tilted state has an amount corresponding to the elastic deformation of the torsion beam. As a result, a force is applied, and the plane mirror receives the largest bending stress at the position of the tilt center axis, and receives a small bending stress at a position away from the tilt center axis. In view of this, in the present invention, a rib having a plurality of heights is used as a rib for reinforcing the plane mirror portion, and the weight of a portion having a sufficient stress is reduced. This reduction in weight leads to a reduction in inertia of the plane mirror section including the rib, and can cope with an increase in the speed of the plane mirror section.
[0012]
The invention according to claim 2 relates to a deflecting mirror having two degrees of freedom, and includes a plane mirror part whose surface is a reflection surface, and is disposed so as to sandwich the plane mirror part from the side and is provided on an outer periphery of the plane mirror part. An inner end is connected, and a first torsion beam portion that enables the flat mirror portion to tilt about the first axis by the torsion of the beam, and is disposed so as to surround the outer periphery of the flat mirror portion with a gap. An outer end of the first torsion beam portion connected to an inner periphery of the first torsion beam portion; and an annular beam portion arranged to sandwich the annular beam portion from a direction orthogonal to the first axis. An inner end connected to the outer periphery of the portion, the second torsion beam portion allowing the flat mirror portion to tilt about a second axis orthogonal to the first axis by torsion of the beam; A base portion connected to the outer end of the second torsion beam portion and a flat mirror portion formed on the back side of the flat mirror portion; A rib having a height that is lower than the height of the first axis and a rib that is formed lower than a rib near the first axis. Is what you do.
[0013]
Also in the present invention, since the flat mirror portion is reinforced by the rib, even if a force corresponding to the amount of elastic deformation of the first torsion beam portion as a tilt center with respect to the first axis is applied to the flat mirror portion, the flat mirror portion is not deformed. The deformation can be reduced, and the distortion of the reflection surface can be reduced. Further, a rib having a plurality of heights is used as a rib for reinforcing the plane mirror portion, so that the weight of a portion having a sufficient stress is reduced. This reduction in weight leads to a reduction in inertia of the plane mirror section including the rib, and can cope with an increase in the speed of the plane mirror section.
[0014]
Further, since the annular beam portion is provided between the second torsion beam portion as the tilt center with respect to the second axis and the plane mirror portion, the annular beam portion is elastically deformed, so that the second screw portion is formed. The amount of elastic deformation of the torsion beam can be reduced by that amount, and as a result, the force applied to the plane mirror can be reduced. In this regard, the deformation of the plane mirror can be reduced and the distortion of the reflection surface can be reduced.
[0015]
The invention according to claim 3 relates to a deflecting mirror having one degree of freedom, a plane mirror having a reflecting surface, a support beam having an inner end connected to an outer periphery of the plane mirror, and the plane mirror. An annular beam portion is disposed so as to surround the outer periphery of the annular beam portion with a gap, and the outer end of the support beam portion is connected to the inner periphery, and the annular beam portion is disposed so as to sandwich the annular beam portion from the side. An inner end connected to the outer periphery, the torsion beam part being capable of tilting the plane mirror part by torsion of the beam, a base part connected to an outer end of the torsion beam part, and the plane mirror part And a rib formed on the back surface side of the slab to reinforce the plane mirror portion, the rib having a plurality of heights.
[0016]
Also in the present invention, since the flat mirror portion is reinforced by the rib, even if a force corresponding to the amount of elastic deformation of the torsion beam portion as the tilt center is applied to the flat mirror portion, the deformation of the flat mirror portion can be reduced, and the reflection surface can be reduced. Can be reduced. Further, a rib having a plurality of heights is used as a rib for reinforcing the plane mirror portion, so that the weight of a portion having a sufficient stress is reduced. This reduction in weight leads to a reduction in inertia of the plane mirror section including the rib, and can cope with an increase in the speed of the plane mirror section.
[0017]
Further, since the annular beam portion is provided between the torsion beam portion as the tilting center and the plane mirror portion, the amount of elastic deformation of the torsion beam portion is reduced by elastically deforming the annular beam portion. As a result, the force applied to the plane mirror can be reduced, and from this point, the deformation of the plane mirror can be reduced and the distortion of the reflection surface can be reduced.
[0018]
According to a fourth aspect of the present invention, as the rib according to the first to third aspects, the height of the rib at a position away from the tilt center axis of the plane mirror portion is lower than the rib near the tilt center axis. It is characterized by using what is formed.
[0019]
According to the present invention, the rib located at a position away from the tilt center axis of the plane mirror portion is formed lower than the rib near the tilt center axis, thereby reducing the weight of the rib at a position separated from the tilt center axis. . This reduction in weight at a position distant from the tilt center axis is extremely effective in reducing the inertia of the plane mirror section including the ribs, and can cope with an increase in the speed of the plane mirror section.
[0020]
According to a fifth aspect of the present invention, there is provided a flat mirror portion having a reflective surface, and the flat mirror portion is disposed so as to sandwich the flat mirror portion from the side, and the inner end is connected to the outer periphery of the flat mirror portion. Accordingly, a torsion beam that enables the plane mirror to tilt about a first axis and / or a second axis orthogonal to the first axis is connected to an outer end of the torsion beam. Base portion, and a skeleton-shaped rib located on the back side of the plane mirror portion and reinforcing the plane mirror portion, and the torsion beam portion, the base portion, and the rib are formed as a single structure. The planar mirror portion, which is formed integrally with the structure and is separate from the structure, is joined to a surface side of a portion corresponding to the rib in the structure.
[0021]
In the present invention, since the torsion beam portion, the base portion, and the rib are integrally formed, the flat mirror portion is joined to the front surface side of the portion corresponding to the rib in the structure in which the flat mirror portion is integrally formed. Unlike the torsion beam (which cannot be made of a material with a high Young's modulus because of its flexibility), the support layer can be made of a material with a high Young's modulus. become. Therefore, the flat mirror portion is reinforced, and the distortion of the reflection surface can be reduced. In addition, the weight of the flat mirror portion can be reduced, so that the speed of the flat mirror portion can be increased.
[0022]
Embodiment
(First Embodiment)
A first embodiment of the present invention will be described with reference to FIGS. This embodiment is an embodiment having one degree of freedom. FIG. 1 is a perspective view of this embodiment viewed from the back side, and FIG. 2 is a perspective view of this embodiment viewed from the front side. In these figures, the surface of a hexagonal flat mirror portion 1 is polished, and a reflection surface 1a made of a thin film of aluminum, gold, or the like is formed thereon.
[0023]
The torsion beams 2, 3 are arranged so as to sandwich the plane mirror 1 from 180 ° different directions (sides), and the inner ends thereof are connected to the outer corners of the plane mirror 1. The torsion beams 2 and 3 allow the plane mirror 1 to tilt by the torsion of the beams. The torsion beams 2 and 3 are formed in an arc-shaped hole (the inner peripheral shape is a hexagonal hole) centered on the center O of the plane mirror 1 around the plane mirror 1 on a substrate made of silicon or the like. By drilling 5, the arc-shaped holes 4, 5 are formed integrally with the plane mirror portion 1 at the end boundaries.
[0024]
The outer ends of the torsion beams 2 and 3 are integrally connected to a substrate portion located outside the arc-shaped holes 4 and 5, and the substrate portion constitutes a base portion 6. A rib 7 for reinforcing the plane mirror 1 is provided on the back side of the plane mirror 1. The rib 7 shown here is provided in a hexagonal shape so that the wall surface rises along the outer periphery of the plane mirror unit 1. Further, the ribs 7 are provided radially so as to connect the center of the hexagon and each vertex.
[0025]
Since a particularly large bending stress is applied to the connection portion between the torsion beam portions 2 and 3 and the inner ends, local distortion is likely to occur. Therefore, it is important to always provide the ribs 7 in this portion. In the present embodiment, the rib 7 is provided not only at the connection with the inner ends of the torsion beams 2, 3 but also over the entire back surface of the plane mirror unit 1. Has a plurality of triangular prism-shaped recesses.
[0026]
The height of the rib 7 differs depending on its position. In the present embodiment, the height of the rib 7 is away from the tilt center axis of the plane mirror 1 (the center axis L1 of the torsion of the torsion beams 2, 3) (FIG. 1). Of the rib 7 at a position distant from the upper side of the rib 7) is lower than the height H2 of the rib 7 near the tilt center axis L1. In addition, since the cross section of the rib 7 of this embodiment is a rectangle that is easy to process, its thickness is constant in the height direction.
[0027]
When set as a deflecting mirror, the base portion 6 is fixed, and the plane mirror portion 1 tilts with the torsion beams 2 and 3 as rotation fulcrums. The driving means of the plane mirror unit 1 includes, for example, an electrostatic driving method, an electromagnetic driving method, and the like. The transmission point of the rotational driving force from the driving means to the plane mirror section 1 is a position on the plane mirror section 1 away from the torsion beams 2 and 3, which is the tilt center. For this reason, a force corresponding to the amount of elastic deformation of the torsion beams 2 and 3 acts on the plane mirror 1 in a tilted state as a force for bending the plane mirror 1.
[0028]
In the present embodiment, the rib 7 at a position distant from the tilt center axis L1 of the plane mirror portion 1 is formed shorter than the rib 7 near the tilt center axis L1, and the rib at a position distant from the tilt center axis L1. 7 has been reduced in weight. Reducing the weight at a position distant from the tilt center axis L1 is extremely effective in reducing the inertia of the plane mirror unit 1 including the ribs 7, and can cope with an increase in the speed of the plane mirror unit 1.
[0029]
Further, in the present embodiment, since the flat mirror portion 1 is reinforced by the ribs 7, even if a force corresponding to the elastic deformation of the torsion beam portions 2 and 3 is applied to the flat mirror portion 1, the flat mirror portion 1 is deformed. Can be reduced, and the distortion of the reflection surface 1a can be reduced. At this time, if the ribs 7 are made of a material having a high Young's modulus such as diamond or carbon nanotube, the distortion of the plane mirror portion 1 becomes smaller in each step.
[0030]
In the above embodiment, since the structure is formed on the substrate, a large number of deflection mirrors can be collectively manufactured on the same substrate by using photolithography technology. At that time, the above-mentioned silicon or the like can be used as a material of the substrate or the like, and an ultra-small one can be manufactured by MEMS (Micro Electro Mechanical Systems).
(Second embodiment)
A second embodiment of the present invention will be described with reference to FIGS. This embodiment is an embodiment with two degrees of freedom. FIG. 3 is a perspective view of this embodiment viewed from the back side, and FIG. 4 is a perspective view of this embodiment viewed from the front side. In these figures, parts corresponding to those in FIGS. 1 and 2 are denoted by the same reference numerals.
[0031]
In the present embodiment, an annular beam portion 11 is provided so as to surround the outer periphery of the plane mirror portion 1 of the first embodiment with a gap, and the inner periphery thereof has a plane mirror portion centered on the first axis L1. The outer ends of the torsion beam portions (referred to as “first torsion beam portion” in the second embodiment) 2 and 3 which enable the tilting of the first torsion member 1 are connected. Second torsion beam portions 12 and 13 are connected to the outer periphery of the annular beam portion 11 so as to sandwich the annular beam portion 11 from a direction of a second axis L2 orthogonal to the first axis L1. I have.
[0032]
The second torsion beams 12 and 13 allow the plane mirror 1 to tilt about the second axis L2 due to the torsion of the beams. The second torsion beam portions 12 and 13 are provided with large-diameter arc-shaped holes 14 and 15 having the center O at the center of the plane mirror portion 1 at intervals around the arc-shaped holes 4 and 5. By drilling, it is formed at the boundary between the end portions of the arc-shaped holes 14 and 15.
[0033]
Substrate portions located outside the arc-shaped holes 14 and 15 are integrally connected to the outer ends of the second torsion beams 12 and 13. This substrate part constitutes the base part 6. On the back side of the plane mirror 1, a rib 7 for reinforcing the plane mirror 1 is provided just like in the first embodiment. That is, the ribs 7 are provided in a hexagonal shape so that the wall surface rises along the outer periphery of the plane mirror portion 1, and are also provided radially so as to connect the center of the hexagonal shape and each vertex. The height of the rib 7 is formed such that the height H1 of the rib 7 at a position away from the first axis L1 is lower than the height H2 of the rib 7 near the first axis L1. In this embodiment, the height of the rib 7 is continuously changed.
[0034]
Also in this embodiment, since the flat mirror portion 1 is reinforced by the ribs 7, a force according to the amount of elastic deformation of the first torsion beam portions 2 and 3 as a tilt center with respect to the first axis L1 is applied to the flat mirror portion 1. , The deformation of the plane mirror 1 can be reduced, and the distortion of the reflection surface 1a can be reduced. Further, the ribs 7 of the plane mirror portion 1 at a position away from the first axis L1 are formed shorter than the ribs 7 near the first axis L1, and the weight at the position away from the first axis L1 is reduced. Therefore, the inertia of the plane mirror 1 including the ribs 7 can be effectively reduced, and the speed of the plane mirror 1 can be increased.
[0035]
Further, in the present embodiment, since the annular beam portion 11 is provided between the plane mirror portion 1 and the second torsion beam portions 12 and 13 as the tilt center with respect to the second axis L2, the annular beam portion is provided. Elastic deformation of the first torsion beam portions 12 and 13 makes it possible to reduce the amount of elastic deformation of the second torsion beam portions 12 and 13 accordingly. As a result, the force applied to the flat mirror portion 1 can be reduced. Can be reduced, and the distortion of the reflection surface 1a can also be reduced.
(Third Embodiment)
A third embodiment of the present invention will be described with reference to FIGS. This embodiment is an embodiment with one degree of freedom. FIG. 5 is a perspective view of this embodiment viewed from the back side, and FIG. 6 is a perspective view of this embodiment viewed from the front side. In these figures, parts corresponding to those in FIGS. 3 and 4 are denoted by the same reference numerals. The difference between the present embodiment and the second embodiment is that the torsion beams 2 and 3 are changed to support beams 22 to 25 having no twist, and the tilt of the plane mirror 1 with respect to the annular beam 11 ( Tilting with respect to the first axis L1).
[0036]
Also in this embodiment, since the plane mirror 1 is reinforced by the ribs 7, a force corresponding to the amount of elastic deformation of the torsion beams 12, 13 as a tilt center with respect to the second axis L2 is applied to the plane mirror 1. Also, the deformation of the plane mirror 1 can be reduced, and the distortion of the reflection surface 1a can also be reduced. Further, the ribs 7 of the plane mirror portion 1 at a position away from the second axis L2 are formed shorter than the ribs 7 near the second axis L2, and the weight at the position away from the second axis L2 is reduced. Therefore, the inertia of the plane mirror 1 including the ribs 7 can be effectively reduced, and the speed of the plane mirror 1 can be increased.
[0037]
Further, in the present embodiment, since the annular beam portion 11 is provided between the second torsion beam portions 12, 13 as the tilt center with respect to the second axis L2 and the plane mirror portion 1, the annular beam portion 11 is elastically deformed. By doing so, the amount of elastic deformation of the second torsion beam portions 12 and 13 can be reduced by that much, and as a result, the force applied to the plane mirror portion 1 can be reduced. Thus, the distortion of the reflection surface 1a can be reduced.
(Fourth Embodiment)
In the first to third embodiments, the base and the torsion beam (including the support beam) and the plane mirror (excluding the reflection surface) are manufactured from the same substrate. It is also possible to configure so that a plane mirror portion is later joined to the surface side of a portion corresponding to the rib in the structure in which the torsion beam portion, the base portion, and the rib are integrally formed.
[0038]
FIGS. 7 and 8 show a fourth embodiment (one degree of freedom) configured in this manner. FIG. 7 is a perspective view of this embodiment viewed from the front side, and FIG. 8 is an illustration of this embodiment. It is the disassembled perspective view seen from the surface side. In these figures, parts corresponding to those in FIGS. 1 and 2 are denoted by the same reference numerals.
[0039]
In the present embodiment, a flat mirror 1 whose surface is a reflection surface 1a is arranged so as to sandwich the flat mirror 1 from the side, and the inner end is connected to the outer periphery of the flat mirror 1 so that the internal twist is generated. Torsion beams 2 and 3 that enable tilting of the plane mirror 1, a base 6 connected to the outer ends of the torsion beams 2 and 3, and a plane mirror located on the back side of the plane mirror 1 And a skeleton-shaped rib 7 for reinforcing the portion 1.
[0040]
The skeleton-shaped rib 7 has a plurality of holes 7a penetrating in the front and back directions. The rib 7, the torsion beams 2, 3 and the base 6 are integrally formed as a single structure, and a structure corresponding to the rib 7 in the structure is provided on the surface side. And a separate plane mirror unit 1 is joined.
[0041]
According to the present embodiment, the support layer 1b of the plane mirror portion 1 is different from the torsion beam portions (which cannot be formed of a material having a high Young's modulus because flexibility is required) 2 and 3, and has a high Young's modulus. It can be made of a material, and it is possible to increase the strength and at the same time reduce the thickness. For example, the support layer 1b of the plane mirror 1 can be made of a material having a high Young's modulus such as diamond or carbon nanotube. By doing so, the plane mirror section 1 is reinforced, the distortion of the reflection surface 1a can be reduced, and the weight of the plane mirror section 1 can be reduced, so that the speed of the plane mirror section 1 can be increased.
(Other Embodiments)
The present invention is not limited to the first to fourth embodiments. For example, various shapes can be considered as the shape of the rib. An example in which the modified examples of the ribs are applied to the second embodiment having two degrees of freedom will be described.
[0042]
-Embodiment of FIG. 9 The ribs 7 other than the peripheral portion are arranged in a lattice shape so as to be parallel or orthogonal to the first axis L1.
[0043]
-Embodiment of FIG. 10 The ribs 7 other than the peripheral portion are arranged in a lattice so as to be parallel or perpendicular to the first axis L1, and the width B1 of the rib 7 extending in the direction perpendicular to the first axis L1 is parallel. The width is larger than the width B2 of the rib 7 extending to the side. Note that the width of the rib 7 extending in a direction orthogonal to the first axis L1 is set such that the width of a portion remote from the first axis L1 is smaller than the width of a portion near the first axis L1. The width of the corresponding rib 7 may be reduced continuously or stepwise. As a result, both strength enhancement and weight reduction can be achieved.
[0044]
-Embodiment of FIG. 11 The ribs 7 provided on the entire back of the plane mirror unit 1 are formed in a honeycomb shape. With this honeycomb structure, the strength of the plane mirror unit 1 can be efficiently increased.
[0045]
-Not only the strength is increased by forming the ribs 7 in the form of a honeycomb in FIG. 12 but also the hexagonal shape of the honeycomb recess at a position away from the first axis L1 (the center distance of the honeycomb recess is constant), The thickness of the rib 7 can be reduced, and the weight can be reduced.
[0046]
-Embodiment of FIG. 13 The rear surface of the plane mirror unit 1 is partitioned by linear ribs 7, and a plurality of honeycomb-shaped ribs 7 are arranged in each partition.
[0047]
In the embodiment of FIG. 14, when the height H1 of the rib 7 located at a position distant from the first axis L1 is lower than the height H2 of the rib 7 near the first axis L1, the height is continuously reduced. Instead of decreasing in steps. In this embodiment, the change is one stage, but a plurality of stages may be provided. In the case of the configuration in which the number is reduced in a stepwise manner, the manufacturing is simplified.
[0048]
The shapes of the ribs 7 shown in FIGS. 9 to 14 can be used for the ribs 7 in the first embodiment, the third embodiment, and the like. Further, as the shape of the rib 7 in the fourth embodiment, the rib 7 in the first to third embodiments or the rib 7 shown in FIGS. 9 to 14 can be used. With such a combination, a synergistic effect can be obtained.
[0049]
Hereinafter, main aspects of the present invention will be shown as additional notes.
[0050]
(Supplementary Note 1) A plane mirror part whose surface is a reflection surface,
A torsion beam portion which is disposed so as to sandwich the plane mirror portion from the side and whose inner end is connected to the outer periphery of the plane mirror portion, and which allows the plane mirror portion to tilt with torsion of the beam;
A base portion connected to an outer end of the torsion beam portion,
A deflecting mirror having one degree of freedom, comprising: ribs formed on the back side of the plane mirror section and reinforcing the plane mirror section, the ribs having a plurality of heights.
(Supplementary Note 2) A plane mirror part whose surface is a reflection surface,
A first mirror is disposed so as to sandwich the flat mirror from the side and has an inner end connected to the outer periphery of the flat mirror, and the flat mirror can be tilted about the first axis by the torsion of the beam. Torsion beam part,
An annular beam portion disposed so as to surround the outer periphery of the plane mirror portion with a gap, and an outer end of the first torsion beam portion connected to an inner periphery;
A second axis that is arranged to sandwich the annular beam from the direction orthogonal to the first axis and that has an inner end connected to the outer periphery of the annular beam and that the beam is twisted, A second torsion beam that allows the plane mirror to tilt about
A base portion connected to an outer end of the second torsion beam portion;
A deflection mirror having two degrees of freedom, comprising: ribs formed on a back surface side of the plane mirror section and reinforcing the plane mirror section, the ribs having a plurality of heights.
(Supplementary Note 3) A plane mirror part whose surface is a reflection surface,
A support beam portion having an inner end connected to the outer periphery of the plane mirror portion,
An annular beam portion arranged so as to surround the outer periphery of the plane mirror portion with a gap, and an outer end of the support beam portion connected to an inner periphery,
A torsion beam portion arranged so as to sandwich the annular beam portion from the side and having an inner end connected to the outer periphery of the annular beam portion and torsion of the beam to allow the plane mirror portion to tilt,
A base portion connected to an outer end of the torsion beam portion,
A deflecting mirror having one degree of freedom, comprising: ribs formed on the back side of the plane mirror section and reinforcing the plane mirror section, the ribs having a plurality of heights.
(Supplementary Note 4) As the rib, a rib whose height is away from the tilt center axis of the plane mirror portion is formed lower than a rib near the tilt center axis. The deflecting mirror according to claim 1, wherein:
(Supplementary note 5) The deflection mirror according to any one of Supplementary notes 1 to 4, wherein the rib is provided so that a wall surface rises along an outer periphery of the plane mirror unit.
[0051]
(Supplementary note 6) The deflection mirror according to any one of Supplementary notes 1 to 5, wherein the rib is made of a material having a higher Young's modulus than each of the beam portions and the plane mirror portion.
[0052]
(Supplementary Note 7) A plane mirror part whose surface is a reflection surface,
The plane mirror is disposed so as to sandwich the plane mirror from the side, and the inner end is connected to the outer periphery of the plane mirror. The center of the plane mirror is centered on the first axis and / or the second axis orthogonal to the first axis by internal twist. A torsion beam that allows the plane mirror to tilt,
A base portion connected to an outer end of the torsion beam portion,
Skeleton-shaped ribs located on the back side of the plane mirror section and reinforcing the plane mirror section,
The torsion beam portion, the base portion, and the rib are integrally formed as a single structure, and the structure corresponds to the surface of a portion corresponding to the rib in the structure. A deflecting mirror to which the separate flat mirror unit is joined.
(Supplementary note 8) The deflection mirror according to supplementary note 7, wherein the support layer in the plane mirror portion is formed of a material having a higher Young's modulus than the structure.
[0053]
(Supplementary note 9) The ribs in which the height of the ribs located at a position apart from the tilt center axis of the plane mirror portion are formed lower than the ribs near the tilt center axis. The deflection mirror as described.
[0054]
【The invention's effect】
As described above, in the invention according to claims 1 to 4, since the plane mirror portion is reinforced by the rib, even if a force corresponding to the amount of elastic deformation of the torsion beam portion is applied to the plane mirror portion, The deformation of the plane mirror can be reduced, and the distortion of the reflecting surface can be reduced.
[0055]
In addition, by using ribs having a plurality of heights as ribs for reinforcing the plane mirror section, it is possible to reduce the weight of a portion having a margin for stress and to reduce the inertia of the plane mirror section including the rib. It can respond to speeding up of parts.
[0056]
In addition to the above-described effects, in the invention having two degrees of freedom according to the second aspect, the annular beam portion is provided between the second torsion beam portion as the tilt center with respect to the second axis and the plane mirror portion. By elastically deforming the annular beam portion, the amount of elastic deformation of the second torsion beam portion can be reduced accordingly, and as a result, the force applied to the plane mirror portion can be reduced. The deformation can be reduced, and the distortion of the reflection surface can be reduced.
[0057]
Also in the invention according to claim 3, since the annular beam portion is provided between the torsion beam portion as the tilt center and the plane mirror portion, the torsion beam portion is elastically deformed by the annular beam portion. Can be reduced accordingly, and as a result, the force applied to the plane mirror can be reduced. In this respect, the deformation of the plane mirror can be reduced, and the distortion of the reflection surface can be reduced.
[0058]
In particular, in the invention according to claim 4, the rib located at a position distant from the tilt center axis of the plane mirror portion is formed lower than the rib near the tilt center axis, and the rib at a position distant from the tilt center axis is formed. Since the weight is reduced, the inertia of the plane mirror section including the ribs including the ribs is greatly reduced, so that the speed of the plane mirror section can be increased.
[0059]
In the invention according to claim 5, since the torsion beam portion, the base portion and the rib are integrally formed, the plane mirror portion is joined to the front surface side of the portion corresponding to the rib in the structure. Unlike the torsion beam portion (which cannot be made of a material having a high Young's modulus because of its flexibility), the support layer of the plane mirror portion can be made of a material having a high Young's modulus. It becomes possible to do. Therefore, the flat mirror portion is reinforced, and the distortion of the reflection surface can be reduced. In addition, the weight of the flat mirror portion can be reduced, so that the speed of the flat mirror portion can be increased.
[Brief description of the drawings]
FIG. 1 is a perspective view of a first embodiment viewed from the back side.
FIG. 2 is a perspective view of the first embodiment viewed from the front side.
FIG. 3 is a perspective view of a second embodiment viewed from the back side.
FIG. 4 is a perspective view of the second embodiment viewed from the front side.
FIG. 5 is a perspective view of a third embodiment viewed from the back side.
FIG. 6 is a perspective view of a third embodiment viewed from the front side.
FIG. 7 is a perspective view of a fourth embodiment viewed from the front side.
FIG. 8 is an exploded perspective view of the fourth embodiment viewed from the front side.
FIG. 9 is a perspective view showing another embodiment.
FIG. 10 is a perspective view showing another embodiment.
FIG. 11 is a perspective view showing another embodiment.
FIG. 12 is a perspective view showing another embodiment.
FIG. 13 is a perspective view showing another embodiment.
FIG. 14 is a perspective view showing another embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Planar mirror part 1a Reflection surface 1b Support layer 11 Annular beam part 2, 3, 12, 13 Torsion beam part 22-25 Support beam part 4, 5 Arc-shaped hole 6 Base part 7 Rib 11 Annular beam part

Claims (5)

A plane mirror part whose surface is a reflective surface,
A torsion beam portion which is disposed so as to sandwich the plane mirror portion from the side and whose inner end is connected to the outer periphery of the plane mirror portion, and which allows the plane mirror portion to tilt with torsion of the beam;
A base portion connected to an outer end of the torsion beam portion,
A deflecting mirror having one degree of freedom, comprising: ribs formed on the back side of the plane mirror section and reinforcing the plane mirror section, the ribs having a plurality of heights. A plane mirror part whose surface is a reflective surface,
A first mirror is disposed so as to sandwich the flat mirror from the side and has an inner end connected to the outer periphery of the flat mirror, and the flat mirror can be tilted about the first axis by the torsion of the beam. Torsion beam part,
An annular beam portion disposed so as to surround the outer periphery of the plane mirror portion with a gap, and an outer end of the first torsion beam portion connected to an inner periphery;
A second axis that is arranged to sandwich the annular beam from the direction orthogonal to the first axis and that has an inner end connected to the outer periphery of the annular beam and that the beam is twisted, A second torsion beam that allows the plane mirror to tilt about
A base portion connected to an outer end of the second torsion beam portion;
A deflection mirror having two degrees of freedom, comprising: ribs formed on a back surface side of the plane mirror section and reinforcing the plane mirror section, the ribs having a plurality of heights. A plane mirror part whose surface is a reflective surface,
A support beam portion having an inner end connected to the outer periphery of the plane mirror portion,
An annular beam portion arranged so as to surround the outer periphery of the plane mirror portion with a gap, and an outer end of the support beam portion connected to an inner periphery,
A torsion beam portion arranged so as to sandwich the annular beam portion from the side and having an inner end connected to the outer periphery of the annular beam portion and torsion of the beam to allow the plane mirror portion to tilt,
A base portion connected to an outer end of the torsion beam portion,
A deflecting mirror having one degree of freedom, comprising: ribs formed on the back side of the plane mirror section and reinforcing the plane mirror section, the ribs having a plurality of heights. 2. The rib according to claim 1, wherein a height of the rib at a position apart from the tilt center axis of the plane mirror is lower than a rib near the tilt center axis. The deflecting mirror according to any one of claims 1 to 3. A plane mirror part whose surface is a reflective surface,
The plane mirror is disposed so as to sandwich the plane mirror from the side, and the inner end is connected to the outer periphery of the plane mirror. The center of the plane mirror is centered on the first axis and / or the second axis orthogonal to the first axis by internal twist. A torsion beam that allows the plane mirror to tilt,
A base portion connected to an outer end of the torsion beam portion,
Skeleton-shaped ribs located on the back side of the plane mirror section and reinforcing the plane mirror section,
The torsion beam portion, the base portion, and the rib are integrally formed as a single structure, and the structure corresponds to the surface of a portion corresponding to the rib in the structure. A deflecting mirror to which the separate flat mirror unit is joined.

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