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JP2004363295A - Semiconductor device - Google Patents

Semiconductor device Download PDF

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Publication number
JP2004363295A
JP2004363295A JP2003159457A JP2003159457A JP2004363295A JP 2004363295 A JP2004363295 A JP 2004363295A JP 2003159457 A JP2003159457 A JP 2003159457A JP 2003159457 A JP2003159457 A JP 2003159457A JP 2004363295 A JP2004363295 A JP 2004363295A
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JP
Japan
Prior art keywords
semiconductor device
conductor
semiconductor element
semiconductor
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003159457A
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Japanese (ja)
Inventor
Takanobu Yoshida
貴信 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2003159457A priority Critical patent/JP2004363295A/en
Publication of JP2004363295A publication Critical patent/JP2004363295A/en
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    • H10W99/00
    • H10W72/07336
    • H10W72/07636
    • H10W72/07651
    • H10W72/07653
    • H10W72/50
    • H10W72/5524
    • H10W72/60
    • H10W72/865
    • H10W72/871
    • H10W72/884
    • H10W90/763

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  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor device which has a high heat dissipation efficiency and is highly reliable. <P>SOLUTION: The semiconductor device 10 has an outer electrode 34, a semiconductor element 28 having a plurality of strip electrodes 37 arranged in parallel at every a prescribed distance, and a conductor 32 electrically connecting the strip electrodes 37 of the semiconductor element 28 to the outer electrode 34. The conductor 32 has a plate conductor body 38 and a plurality of projecting stripe contacts 44 which are projected from one main surface 40 of the conductor body 38 and arranged in parallel at the same distance as that of the strip electrodes 37. The semiconductor element 28 is connected to the outer electrode 34 via the conductor 32 by making projecting stripe contacts 44 come in contact with the strip electrodes 37. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、半導体素子を有する半導体装置の構造に関する。
【0002】
【従来の技術】
従来の半導体装置において、半導体素子表面の電極と素子外の電極との電気的接続は、主にアルミワイヤなどの金属細線で行われている(例えば、特許文献1)。
【0003】
【特許文献1】
特開2001−332678号公報
【0004】
【発明が解決しようとする課題】
しかしながら、このような半導体装置では、金属細線と半導体素子との接着面積が小さいため、その接触部分に電流が集中して高温となり、最終的に接触部分が熱破壊されるという問題があった。
【0005】
【課題を解決するための手段】
本発明はその問題を解消するためになされたもので、外部電極と、所定の間隔をあけて並列に配置された複数の帯状電極を有する半導体素子と、上記半導体素子の帯状電極と外部電極とを電気的に接続する導電体とを備えた半導体装置において、
上記導電体が、板状導電体本体と、上記板状導電体本体の一方の主表面から突出し且つ上記複数の帯状電極と同一の間隔をあけて並列に配置された複数の突条接触部とを備えており、
上記複数の突条接触部を上記複数の帯状電極に接触させることにより、上記半導体素子と外部電極とが上記導電体を介して電気的に接続されていることを特徴とする。
【0006】
【発明の実施の形態】
実施の形態1.
図1〜図4は、本発明に係る半導体装置の第1の実施形態を示す。図1は本発明の半導体装置の平面図であり、図2は図1に示す半導体装置のA−A線断面図である。図3と図4は、本発明の特徴を詳細に示すためのものであり、図3は図1のB−B線断面図、図4は半導体素子の拡大平面図である。
【0007】
図1と図2を参照すると、半導体装置10は、四角形の中空枠(フレーム)からなる絶縁ハウジング12を備えている。ハウジング12の内側には、複数の半導体素子を備えた半導体素子部14が収容されている。半導体素子部14は、四角形ハウジング12の下部開口部に固定された放熱板16を有する。放熱板16は、ハウジング12の内側に位置する基板18を支持している。基板18は、絶縁板20と、この絶縁板20の上面と下面にそれぞれ設けた導電部22、24を備えており、下面の導電部24がろう材26を介して放熱板16に接着されている。一方、上面の導電部22は、複数の半導体素子28を支持しており、これら導電部22と複数の半導体素子28はろう材30を介して接着されている。また、複数の半導体素子28は、板状導電体32を介して、ハウジング12に設けた第1の外部電極34と電気的に接続されている。
【0008】
図4に示すように、各半導体素子28は、所定の間隔(ピッチ)をあけて並列に配置された複数の半導体セル36を備えており、各半導体セル36の表面に形成されている帯状電極又は帯状接触部37が個々に板状導電体32と電気的に接続される。一方、板状導電体32は、導電材料からなる板状本体38を備えている。板状本体38は、対向する一対の主表面(下面40と上面42)を備えており、下面40の一端側には半導体セル36と同一の間隔(ピッチ)をあけて並列に配置された複数の突条接続部44を一体的に備えている。そして、板状導電体32は、各突条接続部44を対応する半導体セル36に対向するようにしてハウジング12と半導体素子部14との間に橋渡しされ、一端側の突条接続部44と半導体セル36との間をろう材46を介して電気的に接続し、他端側の端部と第1の外部電極34との間を同様にして電気的に接続して固定される。また、半導体素子28は、金属細線48を介して、ハウジング12に設けた第2の外部電極50に接続される。
【0009】
このように構成された半導体装置10によれば、図2を参照して説明すると、半導体素子28で発生した熱の一部は、ろう材30、基板18、ろう材26、放熱板16を介して大気中に放出される。この点は、従来の半導体装置でも同様である。本発明の半導体装置10では更に、半導体素子28で発生した熱の一部がろう材46を介して板状導電体32の突条接続部44から板状本体38を介して大気中に放出される。したがって、半導体素子28で発生する熱は効率良く大気に放出される。また、各構成要素に蓄積される熱の量が少なくなり、そのため各構成要素の熱膨張が抑制され、結果として各構成要素を結合する接着部の破壊が防止される。
【0010】
また、半導体素子28と板状導電体32との電気的接続は、図4に示すように、半導体セル36の帯状接触部37の全面を介して行われている。したがって、半導体素子28と板状導電体32の間の電気抵抗は、例えば金属細線(導電体)と半導体素子とのはんだ接着部に比べて低く、そのために電流の流れが接続部に集中することが防止される。これにより、半導体素子28と板状導電体32との電気接続部が電力集中に起因する熱によって破壊されることがない。
【0011】
実施の形態2.
図5には、本発明の第2の実施形態である半導体装置110が示されている。第2の実施形態に係る半導体装置110の特徴は、板状導電体132の一端部が外部電極134として利用されていることである。他の構成やその作用は第1の実施形態と同一である。これにより、ハウジング112に設ける外部電極の数が削減でき、また板状導電体132と外部電極とを接続する手間が省ける。また、半導体素子128で発生した熱が板状導電体132を介して効率良く大気に放出される。
【0012】
実施の形態3.
図6には、本発明に係る第3の実施形態である半導体装置210が示されている。第3の実施形態の半導体装置が他の実施形態と異なる点は、板状導電体232と半導体素子228がろう材を介することなく接触されて接続されていることである。また、接触を維持するために、ハウジング212に支持された板ばね252が板状導電体232の上に配置され、この板ばね252によって板状導電体232が半導体素子228に向かって押圧されている。このように、本実施の形態では、半導体素子と導電体との接続にろう材を使用しないため、当然ながら、このろう材の破壊が無くなり、それにより装置全体の信頼性や寿命も向上する。更に、半導体素子228で発生した熱の一部は、板ばね252を通じて大気に放出されるため、装置全体の放熱効率が向上する。
【0013】
実施の形態4.
図7には、本発明に係る第4の実施形態である半導体装置310が示されている。第4の実施形態は、第1の実施形態である半導体装置の板状導電体332の上面342に放熱フィン354を取付けたものである。従って、この実施の形態の半導体装置310によれば、半導体素子328で発生した熱は板状導電体332から放熱フィン354を介して効率良く大気に放出される。当然、放熱効率を上げるために、放熱フィン354は、熱伝導性のよい材料で形成するのが好ましく、更に、放熱フィン354が導電性材料である場合には、板状導電体332と放熱フィン354との間に絶縁材356を設けるのが好ましい。当然ながら、放熱フィンは上述した他の実施形態にも設けることが可能である。
【0014】
また、本発明の導電体は、導電性と放熱性を備えるため他の用途に使用できるのは明らかである。そのために導電体が種々に変更できるのも明らかである。本明細書では導電体の材料に関しての説明はなされていないが、適当な材料から導電体を作成することにより、更に放熱性が向上するのは認めるところである。例えば、導電体に、熱源である半導体素子と類似する機械的または物理的性質(例えば、熱伝導率や線膨張係数)を有する材料を選択することにより、導電体と半導体素子の間の熱移動をスムーズに行うことが可能になる。
【0015】
【発明の効果】
本発明の半導体装置により、放熱効率が向上する。それによって、熱に起因する破壊が発生しなくなり、装置全体の信頼性も向上する。
【図面の簡単な説明】
【図1】本発明に係る第1の実施形態の半導体装置の平面図である。
【図2】図1におけるA−A断面図である。
【図3】図1におけるB−B断面図である。
【図4】本発明に係る半導体装置における半導体素子の平面図である。
【図5】図2と同様の視点から見た本発明に係る第2の実施形態の半導体装置の断面図である。
【図6】図2と同様の視点から見た本発明に係る第3の実施形態の半導体装置の断面図である。
【図7】図2と同様の視点から見た本発明に係る第4の実施形態の半導体装置の断面図である。
【符号の説明】
10 半導体装置、 12 ハウジング、 14 半導体素子部、 16 放熱板、 18 基板、 20 絶縁板、 22 上面導電部、 24 下面導電部、 26 ろう材、 28 半導体素子、 30 ろう材、 32 板状導電体、 34 第1の外部電極、 36 半導体セル、 37 帯状接触部、 38 板状本体、 40 下面(主表面)、 42 上面(主表面)、 44 突条接続部、 46 ろう材、 48 金属細線、 50 第2の外部電極、 110 半導体装置、 112 ハウジング、 128 半導体素子、 132 板状導電体、 134 外部電極、 210 半導体装置、 212 ハウジング、 228 半導体素子、 232 板状導電体、 252 板ばね、 310 半導体装置、 328 半導体素子、 332 板状導電体、 342 上面、 354 放熱フィン、 356 絶縁材。
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a structure of a semiconductor device having a semiconductor element.
[0002]
[Prior art]
In a conventional semiconductor device, an electrical connection between an electrode on the surface of a semiconductor element and an electrode outside the element is mainly performed by a thin metal wire such as an aluminum wire (for example, Patent Document 1).
[0003]
[Patent Document 1]
JP 2001-332678 A
[Problems to be solved by the invention]
However, such a semiconductor device has a problem in that the contact area between the thin metal wire and the semiconductor element is small, the current is concentrated on the contact portion, the temperature becomes high, and the contact portion is finally thermally destroyed.
[0005]
[Means for Solving the Problems]
The present invention has been made in order to solve the problem, an external electrode, a semiconductor element having a plurality of strip electrodes arranged in parallel at a predetermined interval, a strip electrode and an external electrode of the semiconductor element. And a conductor that electrically connects the
The conductor, the plate-shaped conductor body, and a plurality of ridge contact portions protruding from one main surface of the plate-shaped conductor body and arranged in parallel at the same interval as the plurality of strip electrodes. With
The semiconductor element and the external electrode are electrically connected via the conductor by bringing the plurality of ridge contact portions into contact with the plurality of strip electrodes.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiment 1 FIG.
1 to 4 show a first embodiment of a semiconductor device according to the present invention. FIG. 1 is a plan view of the semiconductor device of the present invention, and FIG. 2 is a cross-sectional view of the semiconductor device shown in FIG. 3 and 4 are for showing the features of the present invention in detail. FIG. 3 is a sectional view taken along line BB of FIG. 1, and FIG. 4 is an enlarged plan view of the semiconductor element.
[0007]
Referring to FIG. 1 and FIG. 2, the semiconductor device 10 includes an insulating housing 12 formed of a rectangular hollow frame. Inside the housing 12, a semiconductor element section 14 including a plurality of semiconductor elements is accommodated. The semiconductor element section 14 has a heat radiating plate 16 fixed to a lower opening of the rectangular housing 12. The heat radiating plate 16 supports a substrate 18 located inside the housing 12. The substrate 18 includes an insulating plate 20 and conductive portions 22 and 24 provided on the upper and lower surfaces of the insulating plate 20, respectively. The conductive portion 24 on the lower surface is bonded to the heat radiating plate 16 via a brazing material 26. I have. On the other hand, the conductive part 22 on the upper surface supports a plurality of semiconductor elements 28, and these conductive parts 22 and the plurality of semiconductor elements 28 are bonded via a brazing material 30. The plurality of semiconductor elements 28 are electrically connected to the first external electrodes 34 provided on the housing 12 via the plate-shaped conductor 32.
[0008]
As shown in FIG. 4, each semiconductor element 28 includes a plurality of semiconductor cells 36 arranged in parallel at a predetermined interval (pitch), and a strip electrode formed on the surface of each semiconductor cell 36. Alternatively, the strip-shaped contact portions 37 are individually electrically connected to the plate-shaped conductor 32. On the other hand, the plate-shaped conductor 32 includes a plate-shaped main body 38 made of a conductive material. The plate-shaped main body 38 has a pair of opposing main surfaces (a lower surface 40 and an upper surface 42), and a plurality of main bodies 38 are arranged in parallel at one end of the lower surface 40 at the same interval (pitch) as the semiconductor cell 36. Are integrally provided. Then, the plate-shaped conductor 32 is bridged between the housing 12 and the semiconductor element portion 14 such that each of the ridge connection portions 44 faces the corresponding semiconductor cell 36, and is connected to the ridge connection portion 44 on one end side. The semiconductor cell 36 is electrically connected to the semiconductor cell 36 via the brazing material 46, and the other end and the first external electrode 34 are similarly electrically connected and fixed. Further, the semiconductor element 28 is connected to a second external electrode 50 provided on the housing 12 via a thin metal wire 48.
[0009]
According to the semiconductor device 10 configured as described above, referring to FIG. 2, a part of the heat generated in the semiconductor element 28 is transmitted through the brazing material 30, the substrate 18, the brazing material 26, and the heat radiating plate 16. Released into the atmosphere. This is the same in a conventional semiconductor device. Further, in the semiconductor device 10 of the present invention, part of the heat generated in the semiconductor element 28 is released to the atmosphere via the brazing material 46 from the ridge connection portion 44 of the plate-shaped conductor 32 through the plate-shaped main body 38. You. Therefore, heat generated in the semiconductor element 28 is efficiently released to the atmosphere. In addition, the amount of heat accumulated in each component is reduced, so that the thermal expansion of each component is suppressed, and as a result, the destruction of the bonding portion connecting the components is prevented.
[0010]
Further, the electrical connection between the semiconductor element 28 and the plate-shaped conductor 32 is made through the entire surface of the band-shaped contact portion 37 of the semiconductor cell 36 as shown in FIG. Therefore, the electric resistance between the semiconductor element 28 and the plate-shaped conductor 32 is lower than that of, for example, the solder bonding portion between the thin metal wire (conductor) and the semiconductor element, and therefore, the flow of current concentrates on the connection part. Is prevented. This prevents the electrical connection between the semiconductor element 28 and the plate-shaped conductor 32 from being destroyed by heat resulting from power concentration.
[0011]
Embodiment 2 FIG.
FIG. 5 shows a semiconductor device 110 according to a second embodiment of the present invention. A feature of the semiconductor device 110 according to the second embodiment is that one end of the plate-shaped conductor 132 is used as an external electrode 134. Other configurations and operations thereof are the same as those of the first embodiment. Thus, the number of external electrodes provided on the housing 112 can be reduced, and labor for connecting the plate-shaped conductor 132 and the external electrodes can be omitted. Further, heat generated in the semiconductor element 128 is efficiently released to the atmosphere via the plate-shaped conductor 132.
[0012]
Embodiment 3 FIG.
FIG. 6 shows a semiconductor device 210 according to a third embodiment of the present invention. The difference between the semiconductor device of the third embodiment and the other embodiments is that the plate-shaped conductor 232 and the semiconductor element 228 are contacted and connected without the intermediary of a brazing material. Further, in order to maintain contact, a leaf spring 252 supported by the housing 212 is disposed on the leaf conductor 232, and the leaf spring 252 presses the leaf conductor 232 toward the semiconductor element 228. I have. As described above, in the present embodiment, since no brazing material is used for connecting the semiconductor element and the conductor, the destruction of the brazing material is naturally eliminated, thereby improving the reliability and life of the entire device. Further, part of the heat generated in the semiconductor element 228 is released to the atmosphere through the leaf spring 252, so that the heat radiation efficiency of the entire device is improved.
[0013]
Embodiment 4 FIG.
FIG. 7 shows a semiconductor device 310 according to a fourth embodiment of the present invention. In the fourth embodiment, a radiation fin 354 is attached to an upper surface 342 of a plate-shaped conductor 332 of the semiconductor device according to the first embodiment. Therefore, according to the semiconductor device 310 of this embodiment, the heat generated in the semiconductor element 328 is efficiently released from the plate-shaped conductor 332 to the atmosphere via the radiation fins 354. Naturally, in order to increase the heat radiation efficiency, the heat radiation fins 354 are preferably formed of a material having good thermal conductivity. It is preferable to provide an insulating material 356 between the insulating material 354 and the insulating material 354. Naturally, the radiation fins can be provided in the other embodiments described above.
[0014]
In addition, it is clear that the conductor of the present invention can be used for other purposes because it has conductivity and heat dissipation. It is clear that the conductor can be changed variously for that purpose. Although the description of the material of the conductor is not given in this specification, it is recognized that the heat dissipation can be further improved by forming the conductor from an appropriate material. For example, by selecting a material having a mechanical or physical property (for example, thermal conductivity or coefficient of linear expansion) similar to that of a semiconductor element as a heat source, heat transfer between the conductor and the semiconductor element can be achieved. Can be performed smoothly.
[0015]
【The invention's effect】
The heat dissipation efficiency is improved by the semiconductor device of the present invention. As a result, breakage due to heat does not occur, and the reliability of the entire device is improved.
[Brief description of the drawings]
FIG. 1 is a plan view of a semiconductor device according to a first embodiment of the present invention.
FIG. 2 is a sectional view taken along the line AA in FIG.
FIG. 3 is a sectional view taken along line BB in FIG.
FIG. 4 is a plan view of a semiconductor element in the semiconductor device according to the present invention.
FIG. 5 is a cross-sectional view of a semiconductor device according to a second embodiment of the present invention viewed from the same viewpoint as FIG.
FIG. 6 is a cross-sectional view of a semiconductor device according to a third embodiment of the present invention as viewed from the same viewpoint as FIG. 2;
FIG. 7 is a cross-sectional view of a semiconductor device according to a fourth embodiment of the present invention viewed from the same viewpoint as FIG.
[Explanation of symbols]
Reference Signs List 10 semiconductor device, 12 housing, 14 semiconductor element portion, 16 heat sink, 18 substrate, 20 insulating plate, 22 upper surface conductive portion, 24 lower surface conductive portion, 26 brazing material, 28 semiconductor element, 30 brazing material, 32 plate-shaped conductor , 34 first external electrode, 36 semiconductor cell, 37 band-shaped contact portion, 38 plate-shaped main body, 40 lower surface (main surface), 42 upper surface (main surface), 44 ridge connection portion, 46 brazing material, 48 metal wire, 50 second external electrode, 110 semiconductor device, 112 housing, 128 semiconductor element, 132 plate conductor, 134 external electrode, 210 semiconductor device, 212 housing, 228 semiconductor element, 232 plate conductor, 252 leaf spring, 310 Semiconductor device, 328 semiconductor element, 332 plate-shaped conductor, 342 upper surface, 354 radiating fin, 356 insulating material.

Claims (5)

外部電極と、所定の間隔をあけて並列に配置された複数の帯状電極を有する半導体素子と、上記半導体素子の帯状電極と外部電極とを電気的に接続する導電体とを備えた半導体装置において、
上記導電体が、板状導電体本体と、上記板状導電体本体の一方の主表面から突出し且つ上記複数の帯状電極と同一の間隔をあけて並列に配置された複数の突条接触部とを備えており、
上記複数の突条接触部を上記複数の帯状電極に接触させることにより、上記半導体素子と外部電極とが上記導電体を介して電気的に接続されていることを特徴とする半導体装置。
In a semiconductor device including an external electrode, a semiconductor element having a plurality of strip-shaped electrodes arranged in parallel at a predetermined interval, and a conductor electrically connecting the strip-shaped electrode of the semiconductor element and the external electrode. ,
The conductor, the plate-shaped conductor body, and a plurality of ridge contact portions protruding from one main surface of the plate-shaped conductor body and arranged in parallel at the same interval as the plurality of strip electrodes. With
A semiconductor device, wherein the semiconductor element and the external electrode are electrically connected via the conductor by bringing the plurality of ridge contact portions into contact with the plurality of strip electrodes.
上記半導体装置は複数の半導体素子を備えており、
上記導電体は、各半導体素子の複数の帯状電極に対応する複数の突条接触部を備えていることを特徴とする請求項1に記載の半導体装置。
The semiconductor device includes a plurality of semiconductor elements,
2. The semiconductor device according to claim 1, wherein the conductor includes a plurality of ridge contact portions corresponding to a plurality of strip electrodes of each semiconductor element.
上記半導体装置は上記半導体素子を収容するハウジングを備えており、
上記導電体は、上記ハウジングの外部に引き出されていることを特徴とする請求項1又は2のいずれかに記載の半導体装置。
The semiconductor device includes a housing that houses the semiconductor element,
3. The semiconductor device according to claim 1, wherein the conductor is drawn out of the housing.
上記導電体の他方の主表面に放熱突起部が形成されていることを特徴とする請求項1〜3のいずれかに記載の半導体装置。The semiconductor device according to claim 1, wherein a heat radiation protrusion is formed on the other main surface of the conductor. 上記半導体装置が、
上記複数の突条接触部を上記複数の帯状電極に付勢する付勢部を備えていることを特徴とする請求項1〜4のいずれかに記載の半導体装置。
The semiconductor device is
5. The semiconductor device according to claim 1, further comprising an urging portion that urges the plurality of ridge contact portions to the plurality of strip electrodes. 6.
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