JP2004362668A - Thin-film magnetic head and manufacturing method thereof, and magnetic recording device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin-film magnetic head for securing stable recording property, while coping with tendency for high recording density, to provide a method for manufacturing the thin-film recording head, and to provide a magnetic recording device. <P>SOLUTION: A helical coil 22 is composed so that the periphery of a main magnetic pole layer 24 is wound helically with an axis orthogonally crossing a magnetic disk 2 as a center, so that a strong reflux magnetic flux 30 can be formed efficiently, generation of heat can be reduced by shortening the coil length, and stable recording operation can be secured. Additionally, the reflux magnetic flux 30 flowing out of the main magnetic pole layer 24 is branched into lower and upper return yoke layers 18, 28, after passing the magnetic disk 2 for smoothly flowing in recording operation. Therefore, the concentration of return magnetic flux 30R is relaxed, thus avoiding the problems of unintended erasure or overwriting of recording information. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a thin-film magnetic head having at least a recording inductive magnetic transducer, a method of manufacturing the same, and a magnetic recording device equipped with the thin-film magnetic head.
[0002]
[Prior art]
In recent years, as the areal recording density of a magnetic recording medium such as a hard disk (hereinafter, simply referred to as “recording medium”) has been improved, the performance of a thin-film magnetic head has been required to be improved. As a recording method of the thin-film magnetic head, for example, a longitudinal recording method in which the direction of the signal magnetic field is set to an in-plane direction (longitudinal direction) of the recording medium, or a direction of the signal magnetic field is set to a direction perpendicular to the surface of the recording medium. A perpendicular recording method is known. At present, the longitudinal recording method is widely used, but in view of market trends accompanying the improvement in areal recording density, it is expected that the perpendicular recording method will be promising in the future instead of the longitudinal recording method. This is because the perpendicular recording method has the advantages that a high linear recording density can be ensured and that the recorded recording medium is less likely to be affected by thermal fluctuations.
[0003]
The main parts of a perpendicular recording type thin-film magnetic head include, for example, a thin-film coil for generating magnetic flux, a main magnetic pole layer for emitting a magnetic flux generated in the thin-film coil to the outside, and performing a recording process, and a main magnetic pole layer. A return yoke layer (recirculating magnetic pole layer) for circulating the magnetic flux emitted and magnetizing the recording medium. As this type of thin-film magnetic head, for example, there are known some thin-film magnetic heads in which a return yoke layer is provided on a trailing side (media outlet side) of a main pole layer (for example, see Patent Documents 1 to 3). ). In these thin-film magnetic heads, when a magnetic flux is emitted from the main magnetic pole layer, a part of the magnetic flux emitted from the vicinity of the trailing edge of the main magnetic pole layer spreads out to the return yoke layer. Therefore, as a result, the spread of the magnetic flux is suppressed. Therefore, as compared with the case without the return yoke layer, the recording magnetic field gradient near the recording medium facing surface (air bearing surface) becomes steeper, and as a result, the SN (Signal to Noise) ratio is improved. can get.
[0004]
On the other hand, the conventional perpendicular recording type thin film magnetic head has a problem that information recorded on a recording medium is erased or overwritten by unnecessary magnetic flux. FIG. 33 and FIG. 34 each show a cross-sectional configuration of a conventional thin-film magnetic head 110 including a reproducing head section 110A and a recording head section 110B. The thin-film coil 122 has a spiral structure wound around the same plane (XY plane) parallel to the lamination plane with the connection portion between the return yoke layer 128 and the main magnetic pole layer 124 as the center. To generate magnetic flux. FIG. 33 shows that the magnetic flux 130 emitted from the main magnetic pole layer 124 returns to the return yoke layer 128 provided on the opposite side (that is, the trailing side) of the read head unit 110A from the main magnetic pole layer 124. It is comprised in. On the other hand, FIG. 34 shows that the magnetic flux 130 emitted from the main magnetic pole layer 124 returns to the return yoke layer 128 provided on the side (also referred to as a leading side) of the reproducing head 110A as viewed from the main magnetic pole layer 124. It is composed. As shown in FIGS. 33 and 34, in each case, a return magnetic flux 130R emitted from the main magnetic pole layer 124 and flowing into the return yoke layer 128 after passing through the magnetic disk 102 as a recording medium flows into the return yoke layer 128. Concentrate on 128. For this reason, the return magnetic flux 130R becomes an unnecessary magnetic flux that should not originally contribute to writing on the recording medium, and may cause a problem such as unintentional erasure or overwriting of recorded information as described above. To cope with this problem, a thin film magnetic head in which return yoke layers are provided on both the trailing side and the leading side is disclosed (for example, see Patent Document 4).
[0005]
[Patent Document 1]
U.S. Pat. No. 4,656,546
[Patent Document 2]
JP 05-325137 A
[Patent Document 3]
JP-A-06-236526
[Patent Document 4]
Japanese Patent No. 3368247
[0006]
[Problems to be solved by the invention]
By the way, in order to spread the thin film magnetic head of the perpendicular recording type, it is required to further improve the recording density. Therefore, it is necessary to generate a stronger recording magnetic field. However, in the conventional perpendicular recording type thin film magnetic head having the spiral structure thin film coil, it is difficult to sufficiently utilize the magnetic flux generated by the thin film coil, and the recording magnetic field with respect to the recording current is low. To cope with the problem, a larger recording current had to flow during the information recording operation. However, there is a limit to the current value that can be passed through the drive circuit, and when a large current is passed, the thin-film magnetic head itself may generate heat and expand due to the heat. She lacked gender. For this reason, a thin film magnetic head capable of realizing a stable recording operation even at a lower recording current is desired.
[0007]
The present invention has been made in view of such a problem, and an object of the present invention is to provide a thin-film magnetic head capable of ensuring stable recording characteristics while coping with a higher recording density, a method of manufacturing the same, and a thin-film magnetic head. An object of the present invention is to provide a magnetic recording device having a head.
[0008]
[Means for Solving the Problems]
The thin-film magnetic head according to the present invention has a main pole layer extending in a direction away from a recording medium facing surface facing a recording medium moving in a predetermined medium advancing direction, and about an axis perpendicular to the recording medium facing surface, A thin-film coil configured to be wound helically around the main magnetic pole layer, and configured to face each other with the main magnetic pole layer and the thin-film coil interposed therebetween with an insulating layer interposed therebetween, and emitted from the main magnetic pole layer A first and a second circulating magnetic pole layer for circulating a magnetic flux that has magnetized the recording medium are provided. Here, “winding in a helical shape” means to wind around the main magnetic pole layer substantially perpendicular to the recording medium facing surface on the projection plane parallel to the recording medium facing surface, and in a plane parallel to the film surface. 3 shows a state having a component in the central axis direction orthogonal to the recording medium facing surface and extending along the central axis direction, unlike the state of being wound in a spiral like a spiral.
[0009]
A magnetic recording apparatus according to the present invention includes a recording medium and a thin-film magnetic head that magnetically records information on the recording medium, and the thin-film magnetic head faces a recording medium that moves in a predetermined medium traveling direction. A main magnetic pole layer extending in a direction away from the recording medium facing surface, a thin film coil configured to helically wind around the main magnetic pole layer around an axis perpendicular to the recording medium facing surface, A first magnetic pole layer and a second circulating magnetic pole layer configured to be opposed to each other with the main pole layer and the thin film coil interposed therebetween, and to circulate magnetic flux emitted from the main pole layer and magnetizing the recording medium. It was made.
[0010]
In the thin film magnetic head or the magnetic recording device according to the present invention, since the thin film coil wound in a helical shape is used, the distance between the thin film coil and the main magnetic pole layer is different from the case where the thin film coil wound in a spiral shape is used. It can be shortened over almost the entire area of the thin film coil. Therefore, by passing a current through the helical thin-film coil, a magnetic flux passing through the main magnetic pole layer is formed more efficiently than when a spiral thin-film coil is used. Furthermore, the magnetic flux flowing out of the main magnetic pole layer branches and flows to the first and second circulating magnetic pole layers configured to face each other with the main magnetic pole layer and the thin-film coil interposed therebetween via the insulating layer. The concentration of magnetic flux is reduced.
[0011]
In the thin-film magnetic head according to the present invention, the first return magnetic pole layer is provided on the medium inflow side of the main magnetic pole layer in the medium traveling direction, and the first return magnetic pole layer and the main magnetic pole layer are provided in a first connection region farther from the recording medium facing surface. A second return magnetic pole layer disposed on the medium outflow side of the main magnetic pole layer in the medium traveling direction, and a main magnetic pole layer disposed on the side near the recording medium facing surface via a gap layer; It is preferable that the second magnetic field is disposed so as to be connected to the main magnetic pole layer in the second connection region on the side farther from the recording medium facing surface. In this case, the second return pole layer is connected to the first portion extending from the recording medium facing surface to a position on the insulating layer closest to the recording medium facing surface, and is connected to the first portion. A second portion extending to the second connection region and connected to the main magnetic pole layer, the thin film coil being perpendicular to the recording medium facing surface and in a plane including the medium traveling direction. The cross section closest to the recording medium among the cross sections on the medium inflow side of the thin film coil is located farther from the recording medium facing surface than the cross section closest to the recording medium among the cross sections on the medium outflow side of the thin film coil. Is desirable. Further, the main magnetic pole layer is configured to emit a magnetic flux for magnetizing the recording medium in a direction orthogonal to the surface thereof.
[0012]
The method of manufacturing a thin-film magnetic head according to the present invention includes a main magnetic pole layer extending in a direction away from a recording medium facing surface facing a recording medium moving in a predetermined medium traveling direction, and an axis perpendicular to the recording medium facing surface. The center and the thin film coil configured to be wound around the main magnetic pole layer in a helical manner, and the main magnetic pole layer and the thin film coil are configured to be opposed to each other with the insulating layer interposed therebetween. A method for manufacturing a thin-film magnetic head comprising first and second circulating magnetic pole layers for circulating magnetic flux emitted and magnetizing a recording medium, comprising: forming a first return magnetic pole layer; A plurality of first coil members extending in a band shape along the track width direction corresponding to the track width of the recording medium are interposed on the first return pole layer via an insulating layer from the recording medium facing surface. Arrange along the away direction And a region corresponding to the plurality of first coil members is magnetically connected to the first return pole layer via the connection layer, and has a plurality of widths along the track width direction. Selectively forming the main magnetic pole layer so as to be smaller than the first coil member, and forming a plurality of intermediate coil members extending in the stacking direction by respectively connecting to both end portions of the plurality of first coil members. And forming a second coil member on the main magnetic pole layer so as to be connected to the intermediate coil member, thereby completing the formation of the thin-film coil. And forming a second return pole layer.
[0013]
In the method of manufacturing a thin-film magnetic head according to the present invention, by passing a current through a thin-film coil wound in a helical shape, the magnetic flux passing through the main magnetic pole layer is more efficiently than in the case of using a coil wound in a spiral shape. Is formed, and the magnetic flux flowing out of the main magnetic pole layer is diverted to the first and second return magnetic pole layers, whereby the concentration of the return magnetic flux can be reduced to manufacture a thin-film magnetic head. In this case, it is particularly desirable to simultaneously form the intermediate coil member and the connection layer in the step of forming the intermediate coil member.
[0014]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0015]
First, a configuration of a magnetic recording apparatus equipped with a thin-film magnetic head according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing an internal configuration of the magnetic recording apparatus, and FIG. 2 is an enlarged perspective view showing an appearance of a head slider which is a main part of the magnetic recording apparatus.
[0016]
As shown in FIG. 1, this magnetic recording device includes, for example, a plurality of magnetic disks 2 as recording media on which information is to be recorded in a housing 1 and a plurality of magnetic disks 2 corresponding to each magnetic disk 2. And a plurality of arms 4 to which a head slider 3 is attached at the tip. The magnetic disk 2 is rotatable around a spindle motor 5 fixed to the housing 1. The arm 4 is connected to a drive unit 6 as a power source, and is rotatable around a fixed shaft 7 fixed to the housing 1 via a bearing 8. In FIG. 1, for example, a model in which a plurality of arms 4 rotate integrally about a fixed shaft 7 is shown.
[0017]
As shown in FIG. 2, the head slider 3 has a substantially rectangular parallelepiped base 11 on which an uneven structure is formed to reduce air resistance when the arm 4 turns, and the magnetic disk 2 of the base 11 A perpendicular recording type thin-film magnetic head 10 is provided on one side surface (the front surface in FIG. 2) orthogonal to the opposed recording medium facing surface 11A (hereinafter, referred to as an air bearing surface 11A). . Note that FIG. 2 shows a state where the state shown in FIG. 1 is turned upside down so that the uneven structure on the side of the bearing surface 11A can be visually recognized.
[0018]
Next, the configuration of the thin-film magnetic head 10 will be described with reference to FIGS. 3A and 3B show a cross-sectional configuration of the thin-film magnetic head 10, wherein FIG. 3A shows a cross-sectional configuration parallel to the air bearing surface 11A, and FIG. 3B shows a cross-sectional configuration perpendicular to the air bearing surface 11A. 4 shows a plan view of the main part of the thin-film magnetic head 10 shown in FIG. 3 viewed from the direction of the arrow IV. FIG. 5 shows a perspective view of the main part of the thin-film magnetic head 10 shown in FIG. . Note that the cross-sectional configuration in FIG. 3 corresponds to the direction of the arrows along the line III-III shown in FIG. An upward arrow M shown in FIG. 3 indicates a direction in which the magnetic disk 2 (not shown in FIG. 3) moves relatively to the thin-film magnetic head 10, that is, a moving direction of the magnetic disk 2 (medium moving direction). Is shown.
[0019]
In the following description, the distance in the X-axis direction is “width”, the distance in the Y-axis direction is “length”, and the distance in the Z-axis direction is “thickness or height” in each of FIGS. write. Further, the side closer to the air bearing surface 11A in the Y-axis direction is referred to as “front side or front side”, and the opposite side is referred to as “rear side or rear side”. The contents of these notations are the same in FIG.
[0020]
The thin-film magnetic head 10 is, for example, a composite type head capable of performing both functions of recording and reproduction, and as shown in FIG. ₂ O ₃ • On a substrate 11 made of a ceramic material such as TiC), for example, aluminum oxide (Al ₂ O ₃ ), A reproducing head unit 10A for executing a reproducing process using a magneto-resistive effect (MR), and, for example, an Al layer. ₂ O ₃ A separation layer 17 made of a non-magnetic insulating material such as a single-pole type, a single-pole type recording head unit 10B for executing a recording process of a perpendicular recording method, ₂ O ₃ And an overcoat layer 29 made of a non-magnetic insulating material such as this.
[0021]
The reproducing head section 10A has, for example, a configuration in which a lower shield layer 13, a shield gap film 14, and an upper shield layer 15 are stacked in this order. An MR element 16 as a reproducing element is buried in the shield gap film 14 such that one end face is exposed on the air bearing surface 11A.
[0022]
The lower shield layer 13 and the upper shield layer 15 are each made of, for example, a nickel-iron alloy (NiFe (for example, Ni: 80% by weight, Fe: 20% by weight); hereinafter, simply referred to as “Permalloy (trade name)”). It is made of a magnetic material and their thickness is about 1.0 μm to 2.0 μm. The shield gap film 14 electrically isolates the MR element 16 from the surroundings. ₂ O ₃ And the like. The MR element 16 performs a reproducing process using, for example, a giant magnetoresistive effect (GMR: Giant Magneto-resistive) or a tunnel magnetoresistive effect (TMR: Tunneling Magneto-resistive).
[0023]
The recording head unit 10B is insulated from the surroundings by the main magnetic pole layer 24, the insulating layers 21, 23, 26B, 27 and the gap layer 26A. Helical coil 22 configured to helically wind the main magnetic pole layer 24 and the helical coil 22 so as to face each other, and is emitted from the main magnetic pole layer 24 to magnetize the magnetic disk 2. It has a lower return yoke layer 18 and an upper return yoke layer 28 for circulating magnetic flux. Here, the helical coil 22 corresponds to a specific example of the “thin film coil” of the present invention, and the lower return yoke layer 8 and the upper return yoke layer 18 correspond to the “first return pole layer” and “ This corresponds to a specific example of “second return magnetic pole layer”.
[0024]
The helical coil 22 is made of a highly conductive material such as copper (Cu), and has both ends connected to electrodes (not shown) so that a current flows during a write operation. Magnetic flux is generated by the current flowing through the helical coil 22. The helical coil 22 is configured as a single continuous body in which a plurality of coil members 22A on the leading side and a plurality of coil members 22C on the trailing side are sequentially connected via respective coil members 22B. Furthermore, the section closest to the magnetic disk 2 among the sections on the leading side of the helical coil 22 is farther from the air bearing surface 11A than the section closest to the magnetic disk 2 among the sections on the trailing side of the helical coil 22. It is configured to be located. That is, the foremost end position 22AF of the coil member 22A is located farther than the foremost end position 22CF of the coil member 22C. Here, the coil member 22A is a specific example corresponding to the “first coil member” of the present invention, the coil member 22B is a specific example corresponding to the “intermediate coil member” of the present invention, 22C is one specific example corresponding to the "second coil member" of the present invention. The term “connection” as used herein means not only in contact but also in a state in which electrical contact is possible upon contact.
[0025]
The main magnetic pole layer 24 accommodates a magnetic flux generated in the helical coil 22 and emits the magnetic flux toward the magnetic disk 2. The main magnetic pole layer 24 extends from the air bearing surface 11A in a direction away from the air bearing surface 11A, and extends from the air bearing surface 11A with a fixed width W1 defining a recording track width; And a rear end 24B having a width W2 (W2> W1) larger than the width W1 of the front end 24A. The width W1 of the tip portion 24A is, for example, about 0.2 μm or less. The width of the rear end portion 24B has, for example, a constant width W2 at the rear, and gradually decreases as approaching the front end 24A at the front. The position where the width of the main magnetic pole layer 24 extends from the front end 24A to the rear end 24B is a “flare point FP” which is one of the important factors that determine the recording performance of the thin-film magnetic head 10. The main magnetic pole layer 24 is made of, for example, a magnetic material having a saturation magnetic flux density of 2.4 T (tesla), specifically, an iron-cobalt alloy (FeCo) -based or iron-cobalt-nickel alloy (FeCoNi) -based magnetic material. And its thickness is about 0.2 μm to 0.3 μm. Further, the main magnetic pole layer 24 may include an auxiliary magnetic pole layer functioning as an auxiliary magnetic flux accommodating portion for securing a magnetic volume (flux accommodation amount) of the main magnetic pole layer 24. Here, the helical coil 22 is configured to be wound only around the rear end 24B.
[0026]
The gap layer 26A is for providing a magnetic gap between the main pole layer 24 and the upper return yoke layer 28 near the air bearing surface 11A. This gap layer 26A is made of, for example, Al ₂ O ₃ And the like, and has a thickness of about 0.2 μm or less.
[0027]
The insulating layers 21, 23, 26B and 27 are for electrically separating the helical coil 22 from the surroundings. The insulating layers 21, 23, 26B are made of, for example, Al ₂ O ₃ And the like. The insulating layer 27 is made of, for example, a photoresist (photosensitive resin) or spin-on-glass (SOG), which exhibits fluidity when heated, and has a rounded slope. The position of the front end of the insulating layer 24 is a “throat height zero position TP” which is one of the important factors that determine the recording performance of the thin-film magnetic head 10. The distance between the throat height zero position TP and the air bearing surface 11A is "throat height TH", which is about 0.3 μm or less.
[0028]
The lower and upper return yoke layers 18 and 28 are for returning the magnetic flux emitted from the main pole layer 24 and magnetizing the magnetic disk 2. The lower return yoke layer 18 includes, for example, a lower yoke portion 18A and a back yoke portion 18B. The lower yoke portion 18A is insulated on the leading side (medium inflow side) of the main magnetic pole layer 24 on the side near the air bearing surface 11A. The back yoke portion 18B is connected to the main magnetic pole layer 24 at the back gap 21BG as the first connection region on the side farther from the air bearing surface 11A while being opposed to the main magnetic pole layer 24 via the layers 21 and 23. It is arranged. On the other hand, the upper return yoke layer 28 is opposed to the main magnetic pole layer 24 via the gap layer 26A on the trailing side (medium outflow side) of the main magnetic pole layer 24 on the side close to the air bearing surface 11A, and the air bearing surface 11A. It is arranged so as to be connected to the main magnetic pole layer 24 at a back gap 26BG as a second connection region farther from the main magnetic pole layer 24. More specifically, the upper return yoke layer 28 includes a TH defining portion 28A as a first portion extending from the air bearing surface 11A to the forefront position of the insulating layer 27 (that is, the zero throat height position TP). It has a composite structure including an upper yoke portion 28B as a second portion connected to the TH defining portion 28A and extending to the back gap 26BG and connected to the main pole layer 24. The TH defining portion 28A is provided so as to separate the air bearing surface 11A and a coil member 22C including at least a portion of the helical coil 22 closest to the air bearing surface 11A, and has a shielding function of magnetically shielding. ing. The shielding function referred to here is a function of suppressing a magnetic flux generated by a current flowing through the helical coil 22 from magnetizing the magnetic disk 2 without flowing into the main magnetic pole layer 24. This also means a function of sucking an unnecessary spread component of the return magnetic flux 30 flowing out from the surface 11A before reaching the magnetic disk 2.
[0029]
The lower and upper return yoke layers 18 and 28 have a structure that extends from the air bearing surface 11A to the back gaps 21BG and 26BG and is magnetically connected, for example. It is made of material. Each of the lower return yoke layer 18 and the upper yoke portion 28B has, for example, a rectangular planar shape, and the TH defining portion 28A is directed rearward from the flare point FP, for example, as shown in FIG. It has a planar shape corresponding to the main magnetic pole layer 24 having a gradually expanding slope.
[0030]
The “trailing side (medium outflow side)” refers to the outflow of the flow when the movement state of the magnetic disk 2 advancing in the medium advancing direction M (see FIG. 3) is regarded as one flow. Side, here the upper side in the thickness direction (Z-axis direction). On the other hand, the “leading side (medium inflow side)” refers to the side into which the flow flows, and here the lower side in the thickness direction.
[0031]
Next, the operation of the thin-film magnetic head 10 will be described with reference to FIG.
[0032]
As shown in FIG. 6, in the thin-film magnetic head 10, when current flows through the helical coil 22 of the recording head unit 10B through an external circuit (not shown) during information recording, a return magnetic flux 30 is generated in the helical coil 22. I do. The return magnetic flux 30 generated at this time is accommodated in the main magnetic pole layer 24, and then flows inside the main magnetic pole layer 24 from the rear end 24B to the front end 24A. At this time, the magnetic flux flowing in the main magnetic pole layer 24 is narrowed and focused at the flare point FP as the width of the main magnetic pole layer 24 decreases (W2 → W1). Magnetic flux concentrates on the part. When this magnetic flux is emitted from the tip portion 24A to the outside, a recording magnetic field is generated in a direction (Y direction) orthogonal to the surface of the magnetic disk 2, and the recording magnetic field magnetizes the magnetic disk 2 in the vertical direction. Information is magnetically recorded on the magnetic disk 2. Further, the return magnetic flux 30 magnetizing the magnetic disk 2 is returned to the lower and upper return yoke layers 18 and 28 as a return magnetic flux 30R.
[0033]
In this thin-film magnetic head 10, for example, as shown in FIG. 33 or FIG. 34, a helical coil 22 configured to helically wind around the main magnetic pole layer 24 about an axis orthogonal to the magnetic disk 2. There are the following advantages as compared with the spiral thin film coil 122 described above. In other words, the spiral thin film coil 122 is inefficient because the proportion of the magnetic flux generated by the current flowing inside it to the main pole layer 124 is relatively low, but it is inefficient. In 22, most of the magnetic flux components flow into the main magnetic pole layer 24, so that the return magnetic flux 30 can be formed efficiently. In addition, since the helical coil 22 can have a shorter coil length (total length) than the spiral-shaped thin film coil 122 as shown in FIG. 33 or FIG. 34, the electric resistance value of the coil itself can be reduced. . In addition, since the return magnetic flux 30 flowing out of the main magnetic pole layer 24 passes through the magnetic disk 2 and branches and flows into the lower and upper return yoke layers 18 and 28, the air bearing surfaces in the lower and upper return yoke layers 18 and 28. The concentration of the return magnetic flux 30R near the end face on the 11A side can be reduced.
[0034]
Further, since the TH defining portion 28A extending from the air bearing surface 11A to the front end position (throat height zero position TP) of the insulating layer 27 is provided, the shielding effect on the magnetic disk 2 can be enhanced. For example, as in a thin-film magnetic head 210 as a comparative example shown in FIG. 32, the foremost end position 22AF of the coil member 22A is closer to the air bearing surface 11A than the foremost end position 22CF of the coil member 22C. In such a case, the magnetic flux generated by the current flowing through the helical coil 22 does not flow into the main magnetic pole layer 24 and the magnetic disk 2 is directly magnetized, whereby writing or erasing of an unintended track is performed. Such operations may be performed. On the other hand, according to the thin-film magnetic head 10 of the present embodiment, the TH defining portion 28A functions as a shield layer between the coil member 22C and the magnetic disk 2, and the foremost end position 22AF of the coil member 22A. However, since it is located at a position farther from the air bearing surface 11A than the foremost end position 22CF of the coil member 22C, it is possible to suppress operations such as unintended writing and erasing of tracks. Therefore, even when the helical coil 22 is moved closer to the magnetic disk 2, a relatively stable writing operation can be performed.
[0035]
On the other hand, at the time of reproduction, when a sense current flows through the MR element 16 of the reproduction head unit 10A, the resistance value of the MR element 16 changes according to the signal magnetic field for reproduction from the magnetic disk 2. Then, since this change in resistance is detected as a change in sense current, information recorded on the magnetic disk 2 is magnetically read.
[0036]
Next, a method of manufacturing the thin-film magnetic head shown in FIGS. 3 to 5 will be described with reference to FIGS. 7 to 18 are cross-sectional views or plan views for explaining a manufacturing process of the thin-film magnetic head 10.
[0037]
Hereinafter, first, an outline of a manufacturing process of the entire thin-film magnetic head will be described, and then a forming process of a main part (here, the recording head unit 10B) of the thin-film magnetic head 10 will be described in detail. Since the materials, dimensions, structural features, and the like of a series of components of the thin-film magnetic head 10 have already been described in detail, the description thereof will be omitted as needed.
[0038]
The thin-film magnetic head 10 is mainly composed of various components using existing thin-film processes including a film forming technique such as plating and sputtering, a patterning technique such as photolithography, and an etching technique such as dry etching. Are sequentially formed and laminated. That is, first, after the insulating layer 12 is formed on the base 11, the lower shield layer 13, the shield gap film 14 in which the MR element 16 is embedded, and the upper shield layer 15 are laminated on the insulating layer 12 in this order. By doing so, the reproducing head portion 10A is formed. Subsequently, after the separation layer 17 is formed on the reproducing head 10A, the main pole layer 24 and the insulating layers 21, 23, 26B, and 27 are embedded on the separation layer 17, and the main pole layer 24 is centered. A helical coil 22 that is wound and extends along the direction in which the main magnetic pole layer 24 extends, and a lower return yoke that is configured to face each other with the main magnetic pole layer 24 and the helical coil 22 interposed therebetween. A recording head section 10B having the layer 18 and the upper return yoke layer 28 is formed. Finally, after the overcoat layer 29 is formed on the recording head section 10B, the air bearing surface 11A is formed by using machining or polishing to complete the thin-film magnetic head.
[0039]
When forming the recording head unit 10B, after forming the separation layer 17, first, as shown in FIG. 7, on the separation layer 17, for example, a plating process is used to form an air bearing surface 11A in a later step. The lower yoke portion 18A made of an iron-cobalt alloy (FeCo) -based, iron-nickel alloy (NiFe) -based or iron-cobalt-nickel alloy (FeCoNi) -based magnetic material is selectively formed so as to include a position (see FIG. 3). I do. Subsequently, for example, by using sputtering, the lower yoke portion 18A and the surrounding separation layer 17 are covered with Al ₂ O ₃ A precursor insulating layer (not shown) is formed.
[0040]
Subsequently, the precursor insulating layer is polished and flattened at least until the lower yoke portion 18A is exposed by using, for example, a CMP (Chemical Mechanical Polishing) method, thereby forming the lower yoke portion 18A as shown in FIG. The insulating layer 19 is formed so as to bury the periphery of.
[0041]
Subsequently, as shown in FIG. 9, Al is formed on the lower yoke portion 18A and the insulating layer 19 in a region other than the back gap 21BG where the back yoke portion 18B will be formed later. ₂ O ₃ After the insulating layer 21 is selectively formed, a plurality of coil members 22A extending in a strip shape in the track width direction (X direction) are plated on the insulating layer 21 in the formation region of the lower yoke portion 18A by, for example, plating. Using processing, it is formed so as to be arranged along the direction (Y direction) away from the air bearing surface 11A. As shown in FIG. 9A, the coil members 22A have, for example, a strip shape, and are disposed so as to be parallel to each other and at equal intervals. Further, after a photoresist film is selectively formed so as to cover the plurality of coil members 22A and a part of the insulating layer 21, the insulating layer 23A is formed by firing. Here, both ends of the coil portion 22A and the back gap 21BG are left without being covered with the insulating layer 23A. Note that FIG. 9A illustrates a plane configuration along the lamination plane, and FIG. 9B illustrates a cross section taken along a cutting line IX (B) -IX (B) illustrated in FIG. Represents the configuration. Hereinafter, the same applies to FIGS. 10 to 14.
[0042]
Subsequently, after a photoresist layer (not shown) is selectively formed so as to leave both ends of the coil portion 22A and the back gap 21BG, as shown in FIG. A columnar member 22BL which forms a part of a plurality of coil members 22B extending in the stacking direction by being connected to both ends of the coil portion 22A, and a back yoke portion serving as a connection layer connected to the lower yoke layer 18A in the back gap 21BG. 18B is formed at the same time. Further, over the entire surface, for example, Al ₂ O ₃ The precursor insulating layer 23BZ made of is formed. Thereafter, the precursor insulating layer 23BZ is polished and flattened by, for example, a CMP method so that at least the back yoke portion 18B is exposed and the coil member 22A and the insulating layer 23A are not exposed, as shown in FIG. Then, an insulating layer 23 (23A, 23B) is formed so as to bury the periphery of the back yoke portion 18B. Thus, the formation of the lower return yoke layer 18 is temporarily completed.
[0043]
Next, as shown in FIG. 12, the main pole layer 24 is selectively formed on a flat surface including the upper surfaces of the insulating layer 23, the back yoke portion 18B, and the columnar member 22BL. When forming the main magnetic pole layer 24, the main magnetic pole layer 24 is formed, for example, by a plating process using the same type of magnetic material as the lower yoke portion 18A, and includes the front end portion 24A and the rear end portion 24B in order from the front. A portion (a portion corresponding to the back gap 21BG) of the end portion 24B farthest from the air bearing surface 11A is magnetically connected to the back yoke portion 18B. At this time, the constant width W2 of the rear end portion 24B along the track width direction (X direction) is set to be smaller than the width (in the X direction) of the coil member 22A. Further, simultaneously with the formation of the main magnetic pole layer 24, the columnar member 22BU having the same thickness as this is formed on the columnar member 22BL, thereby completing the coil member 22B. Here, for convenience, of the coil members 22B, the one formed at one end of each coil member 22A is called a coil member 22B1, and the one formed at the opposite end with the main magnetic pole layer 24 interposed therebetween. Is called a coil member 22B2.
[0044]
After forming the main magnetic pole layer 24 and the coil member 22B, as shown in FIG. 13, for example, the main magnetic pole layer 24 and the insulating layer 23 around the main magnetic pole layer 24 are covered by sputtering, for example. ₂ O ₃ A gap 26A is formed. Here, it is desirable that the thickness of the gap layer 26A on the main magnetic pole layer 24 be about 0.2 μm or less. Thereafter, an insulating layer 26B is further formed on the gap layer 26A in a region corresponding to the rear end portion 24B. When forming the gap layer 26A and the insulating layer 26B, the coil portion 22B and the back gap 26BG are not covered.
[0045]
After forming the gap layer 26A and the insulating layer 26B, as shown in FIG. 14, the coil member 22C is formed so as to alternately connect the coil members 22B1 and 22B2 in the adjacent coil members 22A. As a result, the coil member 22A, the coil member 22B, and the coil member 22C are wound around the main magnetic pole layer 24 and connected to extend in the direction in which the main magnetic pole layer 24 extends (Y direction). The formation of the helical coil 22 as a single continuum is temporarily completed. Note that both ends of the helical coil 22 are connected to a drive circuit (not shown).
[0046]
Subsequently, as shown in FIG. 15, the TH defining portion 28A is selectively formed on the gap layer 26A by using, for example, plating or sputtering so that the throat height TH becomes about 0.3 μm or less finally. After the formation, a photoresist film 27F is selectively formed using, for example, a photolithography technique so as to cover the coil member 22C and the gap layer 26A around the coil member 22C. Next, the insulating film 27 is formed by baking the photoresist film 27F, as shown in FIG. Since the photoresist film 27F flows by this baking, the insulating layer 27 is formed such that the front portion is adjacent to the rear end surface of the TH defining portion 28A and the rear portion has a rounded slope. Finally, an upper yoke portion 28B made of permalloy or an iron-cobalt-nickel alloy (FeCoNi) is selectively formed so as to cover the insulating layer 27 and its periphery by using, for example, plating or sputtering, thereby forming an upper return portion. The yoke layer 28 is completed. When the upper return yoke layer 28 is formed, the upper return yoke layer 28 is connected to the TH defining portion 28A facing the main pole layer 24 via the gap layer 26A at the front, and is connected to the main pole layer 24 via the back gap 26BG at the rear. To be connected. Thus, the formation of the recording head unit 10B is completed. In the above description, the TH defining portion 28A is formed after the formation of the helical coil 22 is completed. However, the present invention is not limited to this. The coil member 22C is formed after the TH defining portion 28A is formed. Alternatively, the helical coil 22 may be completed.
[0047]
As described above, according to the present embodiment, the helical coil 22 configured to helically wind around the main magnetic pole layer 24 about the axis orthogonal to the magnetic disk 2 makes the main magnetic pole layer The return magnetic flux 30 passing through 24 can be efficiently formed. In addition, since the helical coil 22 can have a shorter coil length (total length) than the spiral-shaped thin film coil 122 as shown in FIG. 33 or FIG. 34, the electric resistance value of the coil itself can be reduced. . As a result, heat generation of the helical coil 22 at the time of recording can be reduced, expansion of the thin-film magnetic head due to heat (thermal pultrusion) can be suppressed, and a stable recording (writing) operation can be secured. In addition, since the return magnetic flux 30 flowing out of the main magnetic pole layer 24 passes through the magnetic disk 2 and is diverted to the lower and upper return yoke layers 18 and 28 to smoothly flow in, the air in the lower and upper return yoke layers 18 and 28 The concentration of the return magnetic flux 30R in the vicinity of the end surface on the bearing surface 11A side is reduced, and the problem of unintentionally erasing or overwriting recorded information can be avoided.
[0048]
Further, since the foremost end position 22AF of the coil member 22A is located farther from the air bearing surface 11A than the foremost end position 22CF of the coil member 22C, operations such as unintended track writing and erasing can be easily performed. Can be suppressed. In particular, since the TH defining portion 28A extending from the air bearing surface 11A to the foremost end position (throat height zero position TP) of the insulating layer 27 is provided, the shielding effect for the magnetic disk 2 is increased, and the unnecessary portion is more reliably unnecessary. Writing can be avoided. Therefore, a more stable writing operation can be performed. Further, since the throat height zero position TP is defined based on the position of the rear end face of the TH defining portion 28A, the throat height TH can be controlled more precisely, and blurring of the recording characteristics can be prevented. That is, when the throat height zero position TP is defined based on the molding position of the insulating layer 27 after firing without using the TH defining portion 28A, for example, due to a shift in firing conditions or the like, If the photoresist film 27F flows too much, the forefront position of the insulating layer 27 shifts forward from a desired position, and as a result, the throat height TH may be shorter than a design value. On the other hand, in the case of the present embodiment in which the foremost end position of the insulating layer 27 is defined by using the TH defining portion 28A, as long as the insulating layer 27 is adjacent to the TH defining portion 28A, the throat height is increased. Since the zero position TP is always defined by the position of the rear end face of the TH defining portion 28A, the throat height TH can be precisely controlled as a result. Therefore, the fluctuation of the recording characteristics based on the throat height TH is prevented.
[0049]
<Modification>
Next, a modification of the method of manufacturing a thin-film magnetic head according to the present embodiment will be described.
[0050]
In the above-described embodiment, the back yoke portion 18B connected to the lower yoke portion 18A and the intermediate coil member 22B are formed at the same time when the recording head portion 10B is formed. You can also. Hereinafter, with reference to FIGS. 17 to 26, only the steps of forming the recording head portion 10B different from the above-described embodiment in the method of manufacturing the thin-film magnetic head as a modification will be described in detail.
[0051]
First, as shown in FIG. 17, an iron-cobalt alloy (FeCo) -based material is formed on the separation layer 17 by using, for example, a plating process so as to include a position to be the air bearing surface 11A in a later step (see FIG. 3). The lower yoke portion 18A made of an iron-nickel alloy (NiFe) -based or iron-cobalt-nickel alloy (FeCoNi) -based magnetic material is selectively formed. Subsequently, for example, by using sputtering, the lower yoke portion 18A and the surrounding separation layer 17 are covered with Al ₂ O ₃ A precursor insulating layer (not shown) is formed.
[0052]
Subsequently, the precursor insulating layer is polished and flattened at least until the lower yoke portion 18A is exposed using, for example, a CMP (Chemical Mechanical Polishing) method, so that the lower yoke portion 18A as shown in FIG. The insulating layer 19 is formed so as to bury the periphery of. Thereafter, a back yoke portion 18B made of the same magnetic material as the lower yoke portion 18A is selectively formed on the flat surface of the lower yoke portion 18A by, for example, plating. Thus, the formation of the lower return yoke layer 18 is temporarily completed.
[0053]
Subsequently, as shown in FIG. ₂ O ₃ After the precursor insulating layer 21Z is formed, a plurality of coil members 22A extending in a track-width direction on the precursor insulating layer 21Z in the formation region of the lower yoke portion 18A excluding the formation region of the back yoke portion 18B. Are formed along a direction away from the air bearing surface 11A by using, for example, a plating process. Further, Al is applied over the entire surface so as to cover the plurality of coil members 22A and the precursor insulating layer 21Z. ₂ O ₃ The precursor insulating layer 23Z made of is formed. 20 and 21. Thereafter, the precursor insulating layers 23Z and 21Z are polished and flattened using, for example, a CMP method so that at least the back yoke portion 18B is exposed and the coil member 22A is not exposed. As shown in (1), the insulating layers 21 and 23 are formed so as to fill the periphery of the back yoke portion 18B. FIG. 21 is a plan view corresponding to FIG. 20 and viewed from the XXI arrow direction. As shown in FIG. 21, the coil members 22A have a strip shape, and are arranged so as to be parallel to each other and at equal intervals.
[0054]
Next, as shown in FIG. 22, the main magnetic pole layer 24 is selectively formed on the flat surface including the insulating layers 21 and 23 and the back yoke portion 18B. When forming the main magnetic pole layer 24, the main magnetic pole layer 24 is formed, for example, by a plating process using the same type of magnetic material as the lower yoke portion 18A, and includes the front end portion 24A and the rear end portion 24B in order from the front. A portion (a portion corresponding to the back gap 21BG) of the end portion 24B farthest from the air bearing surface 11A is magnetically connected to the back yoke portion 18B. At this time, the constant width W2 of the rear end portion 24B along the track width direction (X direction) is set to be smaller than the width (in the X direction) of the coil member 22A. After the main magnetic pole layer 24 is formed, as shown in FIG. 23, for example, the main magnetic pole layer 24 and the insulating layers 21 and 23 around it are ₂ O ₃ A precursor insulating layer 25Z is formed.
[0055]
Subsequently, the periphery of the main magnetic pole layer 24 is buried as shown in FIG. 24 by polishing and flattening the precursor insulating layer 25Z at least until the main magnetic pole layer 24 is exposed using, for example, a CMP method. The insulating layer 25 is formed as described above. Subsequently, a gap layer 26A is formed on the flat surface constituted by the main magnetic pole layer 24 and the insulating layer 25 so as to have a thickness of about 0.2 μm or less by using, for example, sputtering. Thereafter, an insulating layer 26B is selectively formed on the gap layer 26A so as not to cover both end portions of the plurality of coil members 22A. When forming the gap layer 26A and the insulating layer 26B, neither of them covers the back gap 26BG.
[0056]
After forming the gap layer 26A and the insulating layer 26B, as shown in FIG. 25, a plurality of coil members 22B extending in the Z direction (stacking direction) are formed by being respectively connected to both end portions of the plurality of coil members 22A. I do. Specifically, after removing the gap layer 26A and the insulating layer 23 in regions corresponding to both end portions of each coil member 22A in the stacking direction by ion beam etching or the like, a through hole is formed, and then the coil is formed by plating or the like. The coil member 22B is formed by embedding the same material as the member 22A in the through hole. Here, for convenience, of the coil members 22B, the one formed at one end of each coil member 22A is called a coil member 22B1, and the one formed at the opposite end with the main magnetic pole layer 24 interposed therebetween. Is called a coil member 22B2.
[0057]
After forming the coil member 22B, as shown in FIG. 26, the coil member 22C is formed so as to alternately connect the coil members 22B1 and 22B2 in the adjacent coil members 22A. Thereby, the coil member 22A, the coil member 22B, and the coil member 22C are wound around the main magnetic pole layer 24 and connected so as to extend along the direction (Y direction) in which the main magnetic pole layer 24 extends. The formation of the helical coil 22 as a single continuum is temporarily completed. Note that both ends of the helical coil 22 are connected to a drive circuit (not shown).
[0058]
Subsequently, as shown in FIG. 27, the TH defining portion 28A is selectively formed on the gap layer 26A by using, for example, plating treatment or sputtering so that the throat height TH becomes about 0.3 μm or less finally. After the formation, a photoresist film 27F is selectively formed using, for example, a photolithography technique so as to cover the coil member 22C and the gap layer 26A around the coil member 22C. Next, by baking the photoresist film 27F, the insulating layer 27 is formed as shown in FIG. Since the photoresist film 27F flows by this baking, the insulating layer 27 is formed such that the front portion is adjacent to the rear end surface of the TH defining portion 28A and the rear portion has a rounded slope. Finally, an upper yoke portion 28B made of permalloy or an iron-cobalt-nickel alloy (FeCoNi) is selectively formed so as to cover the insulating layer 27 and its periphery by using, for example, plating or sputtering, thereby forming an upper return portion. The yoke layer 28 is completed. When the upper return yoke layer 28 is formed, the upper return yoke layer 28 is connected to the TH defining portion 28A facing the main pole layer 24 via the gap layer 26A at the front, and is connected to the main pole layer 24 via the back gap 26BG at the rear. To be connected. Thus, the formation of the recording head unit 10B is completed. In this modification, the TH defining portion 28A is formed after the formation of the helical coil 22 is completed. However, the present invention is not limited to this. The coil member 22C is formed after the TH defining portion 28A is formed. May be formed to complete the helical coil 22.
[0059]
As described above, also in this modification, the recording head section 10B of the thin-film magnetic head 10 according to the above embodiment can be formed.
[0060]
【Example】
Next, examples related to the present invention will be described. When the various characteristics of the thin-film magnetic head 10 in the above embodiment were examined together with the conventional thin-film magnetic head 110 shown in FIG. 34, the following was confirmed.
[0061]
First, when the recording position dependence of the reproducing magnetic field strength of the thin film magnetic heads 10 and 110 was examined, the results shown in FIGS. 29A and 29B were obtained. FIG. 29A shows the result of the thin-film magnetic head 10, and FIG. 29B shows the result of the thin-film magnetic head 110. In each case, the “horizontal axis” in the figure indicates the recording position on the same track provided on the magnetic disks 2 and 102, and the “vertical axis” indicates the reproducing magnetic field intensity (arbitrary unit) standardized for comparison. ing. The “0” position on the horizontal axis corresponds to the center position of the thin-film magnetic heads 10 and 110 in the track width direction (X direction), that is, the center position of the tip portion 24A of the main magnetic pole layer 24.
[0062]
As can be seen from the results shown in FIGS. 29A and 29B, in FIG. 29A, a sharp peak appears only at the position “0” on the horizontal axis, whereas FIG. Also, small peaks appear on both sides of the position “0” on the horizontal axis. For this reason, on the magnetic disk 102 on which recording was performed using the conventional thin-film magnetic head 110, information was originally recorded on a portion other than the track to be recorded. On the magnetic disk 2 on which recording was performed using the head 10, it was confirmed that information was originally recorded only on the track to be recorded.
[0063]
Subsequently, when the current dependency of the overwrite characteristics of the thin-film magnetic heads 10 and 110 was examined, the result shown in FIG. 30 was obtained. A curve L10 shown by a solid line is a result of the thin-film magnetic head 10, and a curve L110 shown by a broken line is a result of the thin-film magnetic head 110. In FIG. 30, the “horizontal axis” indicates a current value flowing through the inside of the helical coil 22 (or the thin film coil 122) during the writing operation, and the “vertical axis” indicates the overwrite characteristic (dB).
[0064]
As can be seen from the results shown in FIG. 30, the overwrite characteristics show that the thin-film magnetic head 10 of the present invention has a better numerical value over the entire write current region than the conventional thin-film magnetic head 110. Indicated. That is, it was confirmed that the thin-film magnetic head 10 of the present invention using the helical coil 22 can efficiently form the return magnetic field 30 even with a lower write current.
[0065]
Summarizing the above points, the thin-film magnetic head of the present invention can ensure high reliability while ensuring higher recording efficiency than before, without causing problems such as unintentional erasure or overwriting of recorded information. all right.
[0066]
As described above, the present invention has been described with reference to the embodiments and the examples. However, the present invention is not limited to these embodiments, and various modifications are possible. Specifically, for example, in the above-described embodiments and examples, the case where the present invention is applied to a single-pole type head has been described. However, the present invention is not necessarily limited to this, and may be applied to a ring-type head. . Further, in the above-described embodiment, the case where the present invention is applied to the composite type thin film magnetic head has been described. However, the present invention is not necessarily limited to this. For example, a recording-only thin film having an inductive magnetic transducer for writing. The present invention is also applicable to a magnetic head and a thin-film magnetic head having an inductive magnetic transducer for both recording and reproduction. Of course, the present invention can be applied to a thin film magnetic head having a structure in which the stacking order of the write element and the read element is reversed.
[0067]
Further, in the above-described embodiments and examples, the second return pole layer (the upper return yoke layer 28) is formed by separately forming the first portion (the TH defining portion 28A) and the second portion (the upper yoke layer 28A). Although the portion 28B) is connected and configured, it may be configured as an integral body as shown in FIG. However, in the case of the thin-film magnetic head shown in FIG. 31, the shield region 28S, which is a part of the second return pole layer, is so arranged that the magnetic flux generated by the thin-film coil does not directly excite the recording medium. It will have the function of blocking light.
[0068]
【The invention's effect】
As described above, according to the thin-film magnetic head or the magnetic recording apparatus of the present invention, the main magnetic pole layer extending in the direction away from the recording medium facing surface facing the recording medium moving in the predetermined medium traveling direction, A thin-film coil configured to be wound around the main pole layer in a helical manner around an axis perpendicular to the medium facing surface, and facing each other with the main pole layer and the thin-film coil interposed therebetween via an insulating layer. And the first and second circulating magnetic pole layers for circulating the magnetic flux emitted from the main magnetic pole layer and magnetizing the recording medium. Magnetic flux passing through the main magnetic pole layer can be formed more efficiently as compared with the case where the thin film coil is provided, and the magnetic flux flowing out of the main magnetic pole layer is divided into the first and second return magnetic pole layers. It is possible to alleviate the concentration of the reflux magnetic flux. For this reason, it is possible to avoid a problem such as unintentional erasure or overwriting of recording information and to secure stable recording characteristics while coping with a higher recording density.
[0069]
In particular, the second return pole layer is connected to the first portion extending from the recording medium facing surface to a position of the insulating layer closest to the recording medium facing surface, and is connected to the first portion. And a second portion connected to the main magnetic pole layer and extending to the connection region of the thin film magnetic head, the throat is one of the important factors that determine the recording performance of the thin film magnetic head. By controlling the height more precisely and preventing fluctuations in recording characteristics, it is possible to suppress the return magnetic flux generated by the thin-film coil from directly reaching the recording medium and magnetizing it. Can be avoided.
[0070]
Also, in particular, in a plane orthogonal to the recording medium facing surface and including the medium advancing direction, the cross section of the thin film coil on the medium inflow side is smaller than the cross section closest to the recording medium among the cross sections of the thin film coil on the medium outflow side. In the case where the section closest to the recording medium is located farther from the recording medium facing surface, it is possible to prevent the return magnetic flux generated by the thin film coil from directly reaching the recording medium and magnetizing it. And unnecessary writing can be avoided more easily.
[0071]
According to the method of manufacturing a thin film magnetic head of the present invention, a main pole layer extending in a direction away from a recording medium facing surface facing a recording medium moving in a predetermined medium traveling direction, and an axis perpendicular to the recording medium facing surface A thin film coil configured to be wound around the main magnetic pole layer in a helical manner around the main magnetic pole layer, and a main magnetic pole layer configured to face each other with the main magnetic pole layer and the thin film coil interposed therebetween with an insulating layer interposed therebetween. Forming a first return magnetic pole layer in manufacturing a thin-film magnetic head including first and second circulating magnetic pole layers for circulating magnetic flux emitted from the recording medium and magnetizing the recording medium; and A plurality of first coil members extending in a strip shape along a track width direction corresponding to the track width of the recording medium are arranged on the return magnetic pole layer via an insulating layer along a direction away from the recording medium facing surface. To form an array And a step of magnetically connecting the first return magnetic pole layer to a region corresponding to the plurality of first coil members via a connection layer, and having a width along the track width direction of the plurality of first coil members. A step of selectively forming the main magnetic pole layer so as to be smaller than the coil member, and a step of forming a plurality of intermediate coil members extending in the stacking direction by respectively connecting to both end portions of the plurality of first coil members. And forming a second coil member on the main magnetic pole layer so as to be connected to the intermediate coil member, thereby completing the formation of the thin-film coil. A step of forming the second return pole layer, so that a current is passed through the thin-film coil wound in a helical shape, so that the main coil is more efficiently used than in the case of using a coil wound in a spiral shape. Magnetic flux passing through the pole layer While being formed, it is possible to flux flowing out from the main magnetic pole layer to produce a thin film magnetic head concentration is relaxed in diverted by refluxing flux to the first and second reflux pole layer. For this reason, it is possible to obtain a thin-film magnetic head capable of ensuring stable recording characteristics while avoiding the problem of unintentionally erasing or overwriting recorded information while coping with higher recording density.
[0072]
In particular, in the step of forming the intermediate coil member, if the intermediate coil member and the connection layer are formed at the same time, the process can be simplified. It is possible to easily obtain a thin film magnetic head capable of ensuring stable recording characteristics while responding.
[Brief description of the drawings]
FIG. 1 is a perspective view illustrating an internal configuration of a magnetic recording device according to a first embodiment of the present invention.
FIG. 2 is a perspective view illustrating an external configuration of a head slider in the magnetic recording device illustrated in FIG.
FIG. 3 is a cross-sectional view illustrating a cross-sectional configuration of the thin-film magnetic head according to the first embodiment of the present invention.
FIG. 4 is a plan view illustrating a planar configuration of a main part of the thin-film magnetic head illustrated in FIG.
FIG. 5 is a perspective view illustrating a perspective configuration of a main part of the thin-film magnetic head illustrated in FIG.
FIG. 6 is a cross-sectional view for explaining a write operation in the thin-film magnetic head shown in FIG.
FIG. 7 is a cross-sectional view for explaining one step in a step of manufacturing the thin-film magnetic head shown in FIGS. 3 to 5;
FIG. 8 is a cross-sectional view for explaining a step following the step shown in FIG. 7;
FIG. 9 is a cross-sectional view for explaining a step following the step shown in FIG. 8;
FIG. 10 is a cross-sectional view for explaining a step following the step shown in FIG. 9;
FIG. 11 is a cross-sectional view for explaining a step following the step shown in FIG. 10;
FIG. 12 is a cross-sectional view for explaining a step following the step shown in FIG. 11;
FIG. 13 is a cross-sectional view for explaining a step following the step shown in FIG. 12;
FIG. 14 is a sectional view for illustrating a step following the step shown in FIG. 13;
FIG. 15 is a cross-sectional view for explaining a step following the step shown in FIG. 14;
FIG. 16 is a cross-sectional view for explaining a step following the step shown in FIG. 15;
FIG. 17 is a cross-sectional view for explaining one step in a modification of the step of manufacturing the thin-film magnetic head shown in FIGS. 3 to 5;
FIG. 18 is a cross-sectional view for explaining a step following the step shown in FIG. 17;
FIG. 19 is a sectional view for illustrating a step following the step shown in FIG. 18;
FIG. 20 is a cross-sectional view for explaining a step following the step shown in FIG. 19;
FIG. 21 is a cross-sectional view for explaining a step following the step shown in FIG. 20.
FIG. 22 is a cross-sectional view for explaining a step following the step shown in FIG. 21.
FIG. 23 is a cross-sectional view for explaining a step following the step shown in FIG. 22.
FIG. 24 is a sectional view for illustrating a step following the step shown in FIG. 23;
FIG. 25 is a cross-sectional view for explaining a step following the step shown in FIG. 24;
FIG. 26 is a sectional view for illustrating a step following the step shown in FIG. 25;
FIG. 27 is a sectional view for illustrating a step following the step shown in FIG. 26;
FIG. 28 is a sectional view for illustrating a step following the step shown in FIG. 27;
FIG. 29 is a diagram showing the recording position dependency of the reproducing magnetic field intensity.
FIG. 30 is a diagram illustrating the dependence of overwrite characteristics on recording current.
FIG. 31 is a cross-sectional view illustrating a cross-sectional configuration in a modification of the thin-film magnetic head illustrated in FIG.
FIG. 32 is a cross-sectional view illustrating a cross-sectional configuration of a thin-film magnetic head as a comparative example.
FIG. 33 is a cross-sectional view illustrating a cross-sectional configuration of a conventional thin-film magnetic head.
FIG. 34 is a cross-sectional view illustrating a cross-sectional configuration of another conventional thin-film magnetic head.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Housing, 2 ... Magnetic disk, 3 ... Head slider, 10 ... Thin film magnetic head, 10A ... Reproduction head part, 10B ... Recording head part, 11 ... Base, 11A ... Air bearing surface, 12, 19, 21, 23 , 25, 26B, 27 ... insulating layer, 13 ... lower shield layer, 14 ... shield gap film, 15 ... upper shield layer, 16 ... MR element, 17 ... separation layer, 18 ... lower return yoke layer, 18A ... lower yoke part , 18B: back yoke portion, 22: helical coil, 24: main magnetic pole layer, 24A: front end portion, 24B: rear end portion, 26A: gap layer, 27: photoresist layer, 28: upper return yoke layer, 28A: TH Prescribed part, 28B: Upper yoke part, 29: Overcoat layer, 30: Return magnetic flux, 30R: Return magnetic flux, FP: Flare point, NH: Neck height, TH Throat height, TP ... throat height zero position.

Claims (8)

A main pole layer extending in a direction away from a recording medium facing surface facing a recording medium moving in a predetermined medium traveling direction;
A thin film coil configured to be wound around the main magnetic pole layer in a helical shape around an axis perpendicular to the recording medium facing surface,
First and second circulating magnetic poles configured to face each other with an insulating layer interposed therebetween with the main magnetic pole layer and the thin film coil interposed therebetween and configured to circulate magnetic flux emitted from the main magnetic pole layer and magnetizing the recording medium. A thin-film magnetic head comprising: The first return magnetic pole layer is provided on the medium inflow side of the main magnetic pole layer in the medium traveling direction, and is connected to the main magnetic pole layer in a first connection region farther from the recording medium facing surface. It is arranged in
The second return magnetic pole layer is provided on the medium outflow side of the main magnetic pole layer in the medium traveling direction, and is opposed to the main magnetic pole layer via a gap layer on a side near the recording medium facing surface, and the recording is performed. 2. The thin-film magnetic head according to claim 1, wherein the thin-film magnetic head is provided so as to be connected to the main pole layer in a second connection region farther from the medium facing surface. The second return pole layer comprises:
A first portion extending from the recording medium facing surface to a position of the insulating layer closest to the recording medium facing surface;
3. The semiconductor device according to claim 2, further comprising a second portion connected to the first portion and extending to the second connection region and connected to the main pole layer. 2. The thin-film magnetic head according to 1. In a plane perpendicular to the recording medium facing surface and including the medium traveling direction,
The cross section of the thin film coil closest to the recording medium among the cross sections of the thin film coil closest to the recording medium is farther from the recording medium facing surface than the cross section of the thin film coil closest to the recording medium. The thin-film magnetic head according to claim 2, wherein the thin-film magnetic head is configured to be located on a side of the thin-film magnetic head. 5. The magnetic recording medium according to claim 1, wherein the main magnetic pole layer is configured to emit a magnetic flux for magnetizing the recording medium in a direction orthogonal to a surface of the recording medium. 6. Thin film magnetic head. A main magnetic pole layer extending in a direction away from the recording medium facing surface facing the recording medium moving in a predetermined medium traveling direction; and a helical around the main magnetic pole layer around an axis perpendicular to the recording medium facing surface. The thin film coil configured to be wound in a shape, the main magnetic pole layer and the thin film coil are configured to face each other with an insulating layer interposed therebetween, and the recording medium is released from the main magnetic pole layer to discharge the recording medium. A method for manufacturing a thin-film magnetic head comprising first and second circulating magnetic pole layers for circulating a magnetized magnetic flux, comprising:
Forming the first return pole layer;
A plurality of first coil members extending in a band shape along a track width direction corresponding to a track width of the recording medium via the insulating layer on the first return pole layer via the insulating layer, Forming it so as to be arranged along the direction away from the opposing surface;
The region corresponding to the plurality of first coil members is magnetically connected to the first return pole layer via a connection layer, and has a width along the track width direction of the plurality of first coil members. Selectively forming the main pole layer so as to be smaller than the coil member;
Forming a plurality of intermediate coil members extending in the stacking direction by respectively connecting to both end portions of the plurality of first coil members;
Forming a second coil member on the main magnetic pole layer so as to be connected to the intermediate coil member, thereby completing the formation of the thin-film coil;
Forming the second return pole layer on the thin film coil via the insulating layer. 7. The method according to claim 6, wherein in the step of forming the intermediate coil member, the intermediate coil member and the connection layer are simultaneously formed. Having a recording medium and a thin-film magnetic head that magnetically records information on the recording medium,
A main magnetic pole layer extending in a direction away from a recording medium facing surface facing a recording medium moving in a predetermined medium traveling direction;
A thin film coil configured to be wound around the main magnetic pole layer in a helical shape around an axis perpendicular to the recording medium facing surface,
First and second circulating magnetic poles configured to face each other with an insulating layer interposed therebetween with the main magnetic pole layer and the thin film coil interposed therebetween and configured to circulate magnetic flux emitted from the main magnetic pole layer and magnetizing the recording medium. And a layer.

Images