JP2004119948A - Electromagnetic induction spiral inductor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electromagnetic induction spiral inductor, in which inductance efficiency per unit volume can be enhanced, by generating electromagnetic induction, which is generated by the fluctuations of current, not only in one direction but also in multiple directions. <P>SOLUTION: A wiring layer of a spiral inductor conductor is divided into two. A divided wiring layer 21 of the spiral inductor conductor and a divided wiring layer 22 of the spiral inductor conductor are formed on an insulating substrate 11 via an insulating layer 12. The divided wiring layer 21 of the spiral inductor conductor and the divided wiring layer 22 of the spiral inductor conductor are electrically connected by a via 41. The electromagnetic induction spiral inductor with a two-layer structure, in which the divided wiring layer 21 of the spiral inductor conductor and the divided wiring layer 22 of the spiral inductor conductor move in and out via the insulating layer 12, can be obtained. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a structure of an inductor incorporated in a semiconductor device substrate.
[0002]
[Prior art]
As the application fields of high-frequency circuits are expanding, demands for circuit miniaturization are increasing. In semiconductors, research and development of MMICs (Monolithic Microwave Integrated Circuits) integrated up to passive elements and substrates for semiconductor devices with built-in components in which components are built in printed wiring boards are being promoted.
In order to promote these miniaturizations, it is necessary to increase not only the density of the wiring but also the density of L (inductor), C (capacitor), and R (register) used in the internal circuit.
[0003]
Among the LRCs, it is difficult to increase the density of the inductor L, and a spiral inductor using a large area as shown in FIGS. 4A to 4C is used. In a two-dimensional configuration, the inductance of the inductor is reduced. There are certain limits to securing.
[0004]
[Problems to be solved by the invention]
When a spiral inductor is used, a certain area is required to obtain a required inductance. In the future, as the number of semiconductor device substrates increases, the need for not only planar inductors but also three-dimensional inductors with reduced area (volume) is increasing.
The present invention has been devised in view of the above problems, and an electromagnetic induction that can be increased not only in one direction but also in multiple directions by increasing the inductance efficiency per unit volume by generating electromagnetic induction caused by a change in current. It is an object to provide an inductive spiral inductor.
[0005]
[Means for Solving the Problems]
In order to achieve the above object in the present invention, the present invention provides a semiconductor device substrate having at least an inductor built therein, wherein at least two divided spiral inductor conductor wiring layers are formed via an insulating layer. An electromagnetic induction spiral inductor is characterized in that the divided spiral inductor conductor wiring layers are connected by vias to form a spiral inductor.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described.
The electromagnetic induction spiral inductor of the present invention not only enhances the inductor component but also utilizes the magnetic field to the component horizontal to the substrate by creating a magnetic field generated perpendicular to the substrate in response to a change in current in the spiral inductor conductor wiring layer. Then, the inductor component is efficiently obtained by increasing the obstructing force due to electromagnetic induction (a phenomenon in which a magnetic field is generated in a direction that obstructs a change in current in a coil-shaped wiring).
As described above, the electromagnetic induction spiral inductor of the present invention increases the inductance component of the spiral inductor conductor wiring layer by enhancing the electromagnetic induction action of the spiral inductor. Therefore, the use area of the spiral inductor can be reduced.
[0007]
FIG. 1A is a schematic plan view showing an embodiment of the electromagnetic induction spiral inductor of the present invention. In this electromagnetic induction spiral inductor, the spiral inductor conductor wiring layer is divided into two, and the divided spiral inductor conductor wiring layer 21 and the divided spiral inductor conductor wiring layer 22 are placed on the insulating base material 11 via the insulating layer 12. The divided spiral inductor conductor wiring layer 21 and the divided spiral inductor conductor wiring layer 22 are electrically connected by vias 41, and are divided via the insulating layer 12. In addition, a spiral inductor having a two-layer structure in which the divided spiral inductor conductor wiring layers 22 come and go is formed.
[0008]
1B is a schematic cross-sectional view of FIG. 1A taken along line AA ′, and FIG. 1C is a schematic configuration of FIG. 1A taken along line BB ′. It is sectional drawing.
FIG. 1D is an explanatory diagram showing the direction of the current when FIG. 1A is viewed from the direction D. The direction of the current also occurs in the vertical direction, and the direction of the magnetic field generated by electromagnetic induction is 2. To form a spiral inductor. Therefore, by obtaining a magnetic field component acting to prevent an alternating current (particularly, a high-frequency component) flowing through the conductor wiring layer from two directions, the inductor component can be obtained efficiently and the inductance value is increased.
[0009]
FIG. 2A is a schematic plan view showing another embodiment of the electromagnetic induction spiral inductor of the present invention. In this electromagnetic induction spiral inductor, the spiral inductor conductor wiring layer is divided into eight parts, and the divided spiral inductor conductor wiring layer 21 and the divided spiral inductor conductor wiring layer 22 are placed on the insulating base material 11 via the insulating layer 12. The divided spiral inductor conductor wiring layer 21 and the divided spiral inductor conductor wiring layer 22 are electrically connected by vias 41, and are divided via the insulating layer 12. A spiral inductor having a two-layer structure in which the divided spiral inductor conductor wiring layers 22 move back and forth is formed, and the number of times of movement is increased by the number of divisions of the spiral inductor conductor wiring layers.
[0010]
2B is a schematic cross-sectional view of FIG. 2A taken along line AA ′, and FIG. 2C is a schematic configuration of FIG. 2A taken along line BB ′. It is sectional drawing.
FIG. 2D is an explanatory diagram showing the direction of the current when FIG. 1A is viewed from the direction D. The direction of the current also occurs in the vertical direction, and the direction of the magnetic field generated by electromagnetic induction is 2. To form a spiral inductor. Therefore, by obtaining a magnetic field component acting to prevent an alternating current (particularly, a high-frequency component) flowing through the conductor wiring layer from two directions, the inductor component can be obtained efficiently and the inductance value is increased. In this case, the spiral inductor conductor wiring layer is arranged in an aminda shape, so that the inductor component can be obtained more efficiently.
[0011]
FIG. 3A is a schematic plan view showing another embodiment of the electromagnetic induction spiral inductor of the present invention. In this electromagnetic induction spiral inductor, a spiral inductor conductor wiring layer is divided into three parts, and a divided spiral inductor conductor wiring layer 21, a divided spiral inductor conductor wiring layer 22, and a divided spiral inductor conductor wiring layer 23 are formed of an insulating layer. The divided spiral inductor conductor wiring layer 21, the divided spiral inductor conductor wiring layer 22, and the divided spiral inductor conductor wiring layer 23, which are formed on the insulating base material 11 via the insulating layer 12 and the insulating layer 13, The spiral inductor conductor wiring layer 21, the divided spiral inductor conductor wiring layer 22, and the divided spiral inductor conductor wiring layer, which are electrically connected by the via 41 and the via 42 and are divided via the insulating layer 12 and the insulating layer 13. A three-layered spy with 22 coming and going Obtained by forming a Le inductors, we are increasing the number of back and forth by the amount the layer structure of the spiral inductor conductor interconnect layer is large.
[0012]
FIG. 3B is a schematic cross-sectional view of FIG. 3A taken along the line AA ′, and FIG. 3C is a schematic configuration of FIG. 3A taken along the line BB ′. It is sectional drawing.
FIG. 3D is an explanatory view showing the direction of the current when FIG. 3A is viewed from the direction D. The direction of the current also occurs in the vertical direction, and the direction of the magnetic field generated by electromagnetic induction is 2. To form a spiral inductor. Therefore, by obtaining a magnetic field component acting to prevent an alternating current (particularly, a high-frequency component) flowing through the conductor wiring layer from two directions, the inductor component can be obtained efficiently and the inductance value is increased. Further, by providing a thickness between the uppermost layer and the lowermost layer of the conductor wiring, the current flowing in the vertical direction of the substrate is increased, and the inductor component is efficiently obtained.
[0013]
【The invention's effect】
As described above, in the electromagnetic induction spiral inductor of the present invention, the spiral inductor conductor wiring layer constituting the spiral inductor is divided and arranged via the insulating layer, so that the direction of the magnetic field generated by the electromagnetic induction can be changed in two directions. Since the inductor component is generated and the inductor component is efficiently obtained, the area of the spiral inductor can be reduced in a semiconductor that requires integration such as an MMIC or a component-embedded substrate, and a high-density semiconductor device substrate with a built-in component (inductor) is provided. be able to.
[Brief description of the drawings]
FIG. 1A is a schematic plan view showing an embodiment of the electromagnetic induction spiral inductor of the present invention. (B) is a schematic configuration sectional view of (a) cut along the line AA '. (C) is a schematic cross-sectional view of (a) cut along line BB '. (D) is an explanatory view showing the direction of current when (a) is viewed from the D direction.
FIG. 2A is a schematic plan view showing another embodiment of the electromagnetic induction spiral inductor of the present invention. (B) is a schematic configuration sectional view of (a) cut along the line AA '. (C) is a schematic cross-sectional view of (a) cut along line BB '. (D) is an explanatory view showing the direction of current when (a) is viewed from the D direction.
FIG. 3 (a) is a schematic plan view showing another embodiment of the electromagnetic induction spiral inductor of the present invention. (B) is a schematic configuration sectional view of (a) cut along the line AA '. (C) is a schematic cross-sectional view of (a) cut along line BB '. (D) is an explanatory view showing the direction of current when (a) is viewed from the D direction.
FIG. 4A is a schematic plan view showing an example of a conventional spiral inductor. (B) is a schematic configuration sectional view of (a) cut along the line AA '. (C) is a schematic cross-sectional view of (a) cut along line BB '.
[Explanation of symbols]
11 insulating base materials 12, 13 insulating layers 21, 22, 23, 31, 32 split spiral inductor conductor wiring layers 41, 42, 43 vias

Claims (1)

In a semiconductor device substrate having at least an inductor built therein, at least two divided spiral inductor conductor wiring layers are formed via an insulating layer, and the divided spiral inductor conductor wiring layers are connected by vias. An electromagnetic induction spiral inductor characterized by forming a spiral inductor.

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