JP2004114234A - Thin plate work fixing device and fixing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thin plate work fixing device and a fixing method for placing a thin plate with low rigidity such as a PET film on a work placing base in a flat state. <P>SOLUTION: The device is provided with: the box-shaped work placing base 16 having a hollow part 16b formed inside and a plurality of holes 30 formed on a contact face contacting the work for communicating with the hollow part 16b; a box-shaped work holding base 19 having a hollow part 19b formed inside and the plurality of the holes 30 formed on the contact face contacting the work for communicating with the hollow part 19b; a lifter 13 moving the work holding base 16 in a vertical direction; and a spring 17 energizing the work holding base 16. The hollow part 16b and the hollow part 19b are connected with a source of vacuum and a source of compressed air. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a thin plate work fixing device and a fixing method for fixing a thin rigid work.
[0002]
[Prior art]
For example, Japanese Patent Application Laid-Open No. 2001-139170 discloses a work transfer means for transferring a plate-shaped work from a first work placement section to a second work placement section, and a work placement means for placing the plate-shaped work on the second work placement section. The work thickness detecting means for detecting whether or not the placed work is a single work, and when the work thickness detecting means detects that there are a plurality of works, the work transfer means is controlled to perform the second work. And a work transfer control means for transferring and transferring an excess work to the first work mounting portion until the number of works on the work mounting portion becomes one. I have.
[0003]
In this conventional technique, a plate-shaped work is sucked and held and moved by a plurality of vacuum suction pads, and a work mounting table for mounting the work is formed in a box shape having a plurality of holes on the surface. The work is reliably held by sucking the placed work.
[0004]
[Problems to be solved by the invention]
However, when the material of the work is polyethylene terephthalate and the plate thickness is 0.1 to 0.2 mm (hereinafter, referred to as a pet film), the rigidity is small, so that the work is wrinkled if the suction portion is small. In addition, when wrinkles are formed on the pet film placed on the work mounting table, the pet film is held on the work mounting table in a wrinkled state, so that the processing accuracy is reduced.
[0005]
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems in the prior art, and to provide a fixing device and a fixing method for a thin work in which a thin plate such as a pet film having low rigidity can be mounted on a work mounting table in a flat state. is there.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, according to the present invention, there is provided a thin plate work fixing device, wherein the thin plate work fixing device has a box shape having a hollow portion formed therein, and a contact surface with the work communicates with the hollow portion. A work mounting table having a plurality of holes formed therein, and a work holding table having a plurality of holes formed in a box shape having a hollow portion formed therein and communicating with the hollow portion on a contact surface with the work, Means for vertically moving the work holding table, and pressurizing means for urging the work holding table, wherein the work mounting table and the hollow portion of the work holding table are connected to a vacuum source and a compressed air source. Connecting.
[0007]
Further, the work mounted on the work mounting table is held by the work holding table by the following steps using the thin plate work fixing device according to the first aspect.
1. 1. a step of positioning the contact surface of the work holding table on which the work is not sucked in a horizontal direction with respect to the work mounted on the work mounting table; 2. A step of facing the contact surface of the work holding table to the surface of the work with a slight gap. 3. a step of supplying compressed air with a small pressure to the inside of the work holding table and the work mounting table; 4. a step of supplying compressed air at a small pressure to the inside of the work holding table or setting the atmospheric pressure and the inside of the work mounting table to atmospheric pressure, and pressing the work holding table against the work mounting table at a predetermined pressure; 5. a step of adsorbing the work on the work holding table; A step of moving the work holding table away from the work mounting table
Further, using the thin-plate work fixing device according to claim 1, the work sucked by the work holding table is held on the work mounting table in the following steps. 1. 1. positioning the work in a horizontal direction with respect to the contact surface of the work mounting table; 2. A step in which the lower surface of the work is opposed to the contact surface of the work mounting table with a slight gap. 3. a step of supplying compressed air with a small pressure to the inside of the work holding table and the work mounting table; 4. a step of supplying compressed air at a small pressure to the inside of the work holding table or setting the atmospheric pressure and the inside of the work mounting table to atmospheric pressure, and pressing the work holding table against the work mounting table at a predetermined pressure; 5. a step of adsorbing the work on the work mounting table; A step of moving the work holding table away from the work mounting table
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described based on the illustrated embodiments.
FIG. 1 is a configuration diagram of a laser processing machine main body according to the present invention.
In the figure, an XY table 2 of a laser processing machine main body A is movable on a bed 1 in horizontal X and Y directions. A plurality of holes are formed on the surface of the XY table 2 to connect to the internal hollow portion, and the table 3 having a vacuum suction function by connecting the hollow portion to a vacuum source is fixed. A work 4 is held on the table 3 by suction.
[0010]
The gate-shaped column 5 is fixed to the bed 1. The laser beam output from the laser oscillator 6 mounted on the column 5 is deflected in the optical path by a mirror 7, positioned by a galvano scanner mirror 8, passes through an fθ lens 9, and processes the work 4.
[0011]
FIG. 2 is an overall configuration diagram of the laser processing machine, where B is a carry-in device, and C is a carry-out device.
In the figure, the slider 12 of the loading device B is reciprocally movable on the rail 11 in the left-right direction of the figure. A lifter 13 is arranged below the slider 12. The plate 14 is fixed to the tip of the moving part of the lifter 13. A work holding table 16 is supported on the plate 14 via a guide rod 15 so as to be vertically movable in the figure. The spring 17 urges the work holding table 16 in a direction away from the slider 12. A work mounting table 19 is fixed on the upper surface of the table 18 of the loading device B.
[0012]
The slider 12 of the unloading device C is reciprocally movable on the rail 23 in the left-right direction in the figure. A lifter 13 is arranged below the slider 12. The upper surface of the table 20 is formed flat.
In the drawing, the standby position of the slider 12 is a position indicated by a solid line, and a supply position is a position indicated by a broken line. When the slider 12 is at the standby position, the plate 14 is at the raised position.
[0013]
Next, the configurations of the work holding table 16 and the work mounting table 19 will be further described.
FIG. 3 is a front sectional view near the work holding table 16.
The work holding table 16 is box-shaped, a plurality of holes 30 are formed in the lower plate 16a, and the hollow portion 16b is connected via a joint 31 to a compressed air source or a vacuum source (not shown).
The work mounting table 19 is box-shaped, a plurality of holes 30 are formed in the upper plate 19a, and the hollow portion 19b is connected via a joint 31 to a compressed air source or a vacuum source (not shown).
[0014]
Next, the operation of this embodiment will be described.
The work 4 is mounted on the work mounting table 19 in advance.
Procedure 1. The work holding table 16 on which the work 4 is not sucked is positioned above the work 4 mounted on the work mounting table 19. (See Fig. 4)
Procedure 2. The work holding table 16 is lowered, and the contact surface is opposed to the surface of the work 4 with a slight gap (for example, 0.05 to 0.2 mm). (See Fig. 5)
Procedure 3. A small amount of compressed air is supplied to the hollow portions 16b and 19b through the joint 31. At this time, it is desirable that the pressure supplied to the hollow portion 16b be slightly higher than the pressure supplied to the hollow portion 19b.
Step 4. The pressure supplied to the hollow portions 16b and 19b is stopped, the pressure inside the hollow portions 16b and 19b is reduced to the atmospheric pressure, and the work holding table 16 is lowered by a predetermined distance against the spring 17 so that the elastic force of the spring 17 The work 4 is pressed by the mass of the work holding table 16. The pressing force at this time is preferably set to 10 to 50 kg per square meter. (See Fig. 5)
Procedure 5. In this state, the hollow portion 16b is connected to a vacuum source via the joint 31, and the work 4 is sucked to the work holding table 16.
Step 6. The work holding table 16 is raised and moved away from the work mounting table 19.
Step 7. The work holding table 16 is positioned above the table 3.
Step 8. The work holder 16 is lowered, and the work holder 16 is pressed against the table 3. The pressing amount may be the same as in the case of the procedure 4.
Procedure 9. The table 3 is caused to perform a suction operation.
Procedure 10. The suction operation of the work holding table 16 is stopped. After the suction operation is stopped, compressed air may be supplied to the hollow portion 16b for a short time. With this configuration, even when the work 4 is in close contact with the holding surface of the work holding table 16 due to static electricity or the like, wrinkling of the work 4 can be prevented.
Procedure 11. After raising the work holding table 16, the work holding table 16 is moved to the standby position.
Procedure 12. Perform processing.
The procedure after processing is the same as in the conventional case, and a description thereof will be omitted.
[0015]
As described above, according to the present invention, it is possible to prevent wrinkles from being generated on the work 4, and it is possible to improve the processing accuracy.
[0016]
In the above description, the case where the work 4 placed on the work mounting table 19 is held by the work holding table 16 has been described. Can also be applied. The procedure in this case is as follows.
1. The work 4 is positioned in the horizontal direction with respect to the contact surface of the work mounting table 19.
2. The lower surface of the work 4 is opposed to the contact surface of the work mounting table 19 with a slight gap.
3. A small amount of compressed air is supplied to the hollow portions 16b and 19b.
4. The inside of the hollow portions 16b and 19b is set to the atmospheric pressure, and the work holding table 14 is lowered by a predetermined distance.
5. The work 4 is sucked to the work mounting table 19.
6. The work holding table 16 is moved away from the work mounting table 19.
[0017]
In the above description, the table 3 of the laser processing machine main body A has only the vacuum suction function. However, when the table 3 is connected to the compressed air source as well as the work mounting table 19, the table in FIG. The work mounting table 19 can be replaced with the table 20 in FIG.
[0018]
【The invention's effect】
As described above, according to the present invention, a work mounting table having a box-like shape having a hollow portion formed therein and having a plurality of holes formed in a contact surface with the work and communicating with the hollow portion, A work holding table in which a plurality of holes communicating with the hollow part are formed on a contact surface with the work, a means for moving the work holding table in a vertical direction, Pressurizing means for urging the work holding table is provided, the hollow portion of the work mounting table and the work holding table is connected to a vacuum source and a compressed air source, and the compressed air and the pressurizing means are coordinated, The work is held on the work holding table in a state where wrinkles are not generated on the work. As a result, a work without wrinkles can be supplied to the table.
be able to.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a laser processing machine main body according to the present invention.
FIG. 2 is an overall configuration diagram of a laser processing machine according to the present invention.
FIG. 3 is a front sectional view of the vicinity of a work holding table 16 according to the present invention.
FIG. 4 is an explanatory diagram of an adsorption procedure.
FIG. 5 is an explanatory diagram of a suction procedure.
FIG. 6 is an explanatory diagram of a suction procedure.
[Explanation of symbols]
4 Work 13 Lifter 16 Work mounting table 16b, 19b Hollow part 17 Spring 19 Work holding table 30 Hole

Claims (4)

A work mounting table in which a plurality of holes formed in a box shape having a hollow portion formed therein and communicating with the hollow portion on a contact surface with the work,
A work holding table in which a plurality of holes communicating with the hollow portion are formed on a contact surface with the work in a box shape having a hollow portion formed therein,
Means for vertically moving the work holding table,
Pressurizing means for urging the work holding table,
An apparatus for fixing a thin work, wherein the hollow portions of the work mounting table and the work holding table are connected to a vacuum source and a compressed air source. A method for fixing a thin plate work, comprising using the thin plate work fixing device according to claim 1 and holding the work mounted on the work mounting table on the work holding table in the following steps.
1. 1. a step of positioning the contact surface of the work holding table on which the work is not sucked in a horizontal direction with respect to the work mounted on the work mounting table; 2. A step of facing the contact surface of the work holding table to the surface of the work with a slight gap. 3. a step of supplying compressed air with a small pressure to the inside of the work holding table and the work mounting table; 4. a step of supplying compressed air at a small pressure to the inside of the work holding table or setting the atmospheric pressure and the inside of the work mounting table to atmospheric pressure, and pressing the work holding table against the work mounting table at a predetermined pressure; 5. a step of adsorbing the work on the work holding table; A step of moving the work holding table away from the work mounting table A method for fixing a thin work, comprising using the thin work fixing device according to claim 1 and holding the work sucked on the work holding base on the work mounting base in the following steps.
1. 1. positioning the work in a horizontal direction with respect to the contact surface of the work mounting table; 2. A step in which the lower surface of the work is opposed to the contact surface of the work mounting table with a slight gap. 3. a step of supplying compressed air with a small pressure to the inside of the work holding table and the work mounting table; 4. a step of supplying compressed air at a small pressure to the inside of the work holding table or setting the atmospheric pressure and the inside of the work mounting table to atmospheric pressure, and pressing the work holding table against the work mounting table at a predetermined pressure; 5. a step of adsorbing the work on the work mounting table; A step of moving the work holding table away from the work mounting table 4. The method according to claim 2, wherein the pressing force is set to 10 to 50 kg per square meter. 5.

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