JP2004170935A - Functional substrate having columnar microprojections and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a functional substrate provided with a group of columnar microprojections made of an organic polymer, whose position, bottom area and height can be controlled.
SOLUTION: A first base made of an organic polymer, and a group of columnar microprojections made of the organic polymer extending from the base, have an equivalent diameter of 10 nm to 500 µm and a height of 50 nm to 5000 µm. A functional substrate comprising a group of columnar microprojections, wherein a ratio (H / D) of an equivalent diameter (D) to a height (H) of the group of columnar microprojections is 4 or more.
The present invention also discloses an optical device, a microbiochip, a culture film, an antireflection layer, and the like using the structure having the microprojection group.
[Selection diagram] Fig. 1

Description

  The present invention relates to a functional substrate or a functional element provided with a group of organic polymer microprojections and a method of manufacturing the same, and also relates to a microbiochip, an optical device, and the like using the same.

  Non-Patent Document 1 discloses that a metal cluster such as iron, gold, or silver is used as a self-forming nucleus of a plasma etching mask to form a group of silicon nano-columns, and a row of specific columns is removed to remove a photonic crystal (light Device) is disclosed. The diameter of the silicon nano-column formed on the surface of the silicon substrate is 50 nm, the height is 1 μm, and the period (pitch) of the cluster is 500 nm.

  Light having a wavelength about twice as long as the period of such a nano-cylinder cannot pass between the cylinders due to the photonic band gap. However, at a portion where one column of the cylinder is removed (linear defect), the light is converted to a linear defect (linear defect). Gap). The incident light travels through the linear defect, and by appropriately laying out the linear defect, an optical signal can be synthesized (ADD), split (DROP), or traveling in an extremely narrow space. You can change direction. When a signal is to be DROPed, a grating is preferably used. Therefore, by forming this linear defect, an extremely small optical waveguide can be obtained.

  Non-Patent Document 2 discloses a technique relating to formation of a resin protrusion. A PMMA (polymethylmethacrylate) film having a molecular weight of 2,000 and a thickness of 95 nm is applied to the surface of the silicon substrate. Next, a mask made of a silicon substrate is placed on the PMMA film via a spacer. The distance between the PMMA film and the mask is, for example, 0.3 μm. Next, when the sample is heated at 130 ° C. for 5 to 80 minutes, a protrusion is formed on the PMMA film. Finally, the mask and the spacer are removed from the sample. It is described that the diameter of the projections is several μm, and the height is determined by the spacer, but a projection group of 0.28 μm to 0.43 μm can be produced.

Applied Physics, Vol. 71, No. 10, pp. 1251 to 1255, 2002

Journal of Vacuum Science and Technology B, Vol. 17, No. 6, pages 3197 to 3202, 1999 (Journal of Vacuum Science and Technology B, 17 (6), 3197-3202 (1999))

  According to the technique described in Non-Patent Document 1, a group of minute projections at the nm level is formed by a dry etching method. The material of the nano cylinder needs to react with the etching gas and be removed as a volatile gas. Therefore, it is limited to inorganic materials such as metal, silicon oxide (SiO 2), silicon nitride (Si 3 N 4), and silicon (Si), and the manufacturing method must rely on a dry etching method such as an ECR plasma etching method as described above. Absent.

  According to the above document, the diameter of the obtained nano-cylinder is always 15 to 20 nm regardless of the cluster size (see FIG. 5 of Non-Patent Document 1), and thus the light used in the optical device obtained by this method. Is limited to a specific range.

  Among the above prior arts, in the formation of PMMA projections described in Non-Patent Document 2, a projection structure made of an organic material (PMMA) can be formed because a dry etching method is not used. However, since the self-organization of the PMMA film is the driving force for forming the projections, it has been difficult to freely control the position, diameter, and height of the projections.

  An object of the present invention is to provide a functional substrate or a functional element having an organic material columnar microprojection group which can be used for various applications and can easily control the size and aspect ratio of the microprojection group. The present invention also provides a simple and inexpensive method for manufacturing a functional substrate or a functional element, and a columnar microprojection group.

  A functional substrate or a functional element having a group of microprojections according to the present invention includes a first base made of an organic polymer and a group of columnar microprojections made of an organic polymer extending from the base. The equivalent diameter of the object is from 10 nm to 500 μm, and the height is from 50 nm to 5000 μm. The present invention is particularly suitable to be applied to a functional substrate having a group of nano-level minute projections. Therefore, the equivalent diameter of the projections is 50 nm or more and less than 1 μm, and the height is 100 nm or more and 10 μm or less. preferable.

  The functional substrate or functional element of the present invention includes a film or a sheet. In the present invention, unless otherwise specified, the organic polymer means only the organic polymer, and also includes those in which the physical properties are changed by adding an inorganic filler or chemically modifying the organic polymer.

  It is desirable that the ratio (H / D, aspect ratio) of the equivalent diameter (D) to the height (H) of the projection is 4 or more. This is because, when the aspect ratio is large to some extent, arbitrary characteristics as a functional substrate or a functional element can be designed, and the use is expanded accordingly.

  In the present invention, the equivalent diameter of the columnar minute projection is an equivalent diameter at an intermediate position of the projection. The term "equivalent diameter" is used because the cross section of the projection is not necessarily circular, but may be elliptical, polygonal, asymmetric, etc. In the present invention, the equivalent diameter is used to encompass all of these. ing. The aspect ratio (H / D) is preferably 4 or more, more preferably 8 to 30. However, it is preferably 100 or less from the viewpoint of structural strength.

  The film or substrate provided with the microprojections according to the present invention can be formed by using a thermoplastic resin or an uncured resin using a micromold (precision mold) in which recesses having a specific arrangement (hereinafter referred to as pits) are formed. To form a pattern according to the type of the pit group.

  The mold is made of, for example, quartz. When the mold is separated from the thin film, the thermoplastic resin, the uncured photocurable resin, or the thermosetting resin that has entered the pits is stretched to form a desired microprojection group. In particular, the height of the protrusions can be adjusted by the aspect ratio of the concave and convex groups (pit groups) of the mold, and the position and bottom area of the protrusions can be adjusted by the position and opening area of the concave portion formed in the mold. This manufacturing method will be described later in detail.

  The microprojection group is preferably self-supporting, and preferably in a form that can be self-supporting from the first base. Further, the tip or the entire surface of each microprojection of the microprojection group may be chemically modified by chemical plating or the like to control the reflectance of the side surface of the microprojection.

  The projections constituting the columnar minute projections have a slightly larger equivalent diameter at the bottom part than at the equivalent diameter at the tip. This is advantageous in ensuring the self-supporting and self-supporting properties of the resin-made microprojections, and the microprojections have a portion that becomes thinner from the base in contact with the first base toward the tip. have. Further, it is desirable that the material of the columnar minute protrusion group and the material of the first base are the same. In particular, it is preferable that the projection and the substrate to which the projection is connected are integrated. Since the microprojection aggregate of the present invention can have a structure in which the microprojections are densely packed, it is possible to make the individual microprojections hard to be crushed and difficult to remove from the substrate.

  The above structure is a structure in which a base and a group of minute projections formed on the base are used in an integrated manner. The group of small projections formed using a molding die is transferred to another base and used. You can also. Further, a structure in which a group of microprojections is stacked in multiple layers can be used. For example, when the functional substrate according to the present invention is used for an antireflection film or the like, the equivalent diameter of the microprojections may be larger than that of an optical device or a microbiochip, and the microprojections are formed by a transfer method. be able to. When the transfer method is used, the tips of the minute projections are fixed to the surface of the base by an adhesive or thermocompression bonding. In the case of the transfer method, the minute projections are separated from the base or the resin film, and thus become independent projections.

  Therefore, in the present invention, a group of microprojections made of an organic polymer and having an aspect ratio of 4 or more are integrated with a substrate in a specific arrangement, and the equivalent diameter of the microprojections is 1 μm or less and the height is 100 μm or less. The microprojections provide a functional substrate characterized by having a self-supporting property. Also, the present invention provides a functional substrate in which the equivalent diameter of one end of the projections of the group of small projections is smaller than the equivalent diameter of the other end, and the tip of the small projection group having a small equivalent diameter is connected to another base. Further, the present invention provides a functional substrate in which a plurality of the microprojection groups are formed, a substrate is provided between the layers, and the substrate and the microprojection group are integrated.

  The organic material may be a thermoplastic polymer material, an uncured photocurable resin, or a thermosetting resin in the manufacturing process of the microprojection group. The organic material may be a thermoplastic photocurable polymer material. For example, the main components of the columnar microprojection group are cycloolefin polymer, polymethyl methacrylate, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid, polypropylene, polyethylene, polyvinyl alcohol, ABS resin, AS resin, polyamide, polyacetal, polybutylene. Terephthalate, glass reinforced polyethylene terephthalate, modified polyphenylene ether, polyvinyl chloride, polyphenylene sulfide, polyether ether ketone, liquid crystalline polymer, fluororesin, polyalate, polysulfone, polyethersulfone, polyamideimide, polyetherimide, thermoplastic polyimide, etc. Thermoplastic resin, phenolic resin, melamine resin, urea resin, epoxy resin, unsaturated polyester resin Silicone resin, diallyl phthalate resin, polyamide bismaleimide, poly bisamide thermosetting resin triazole and the like, and the like these blended material of two or more or photocurable material a photosensitive substance is added. Further, an antioxidant, a flame retardant and the like may be added to these materials.

  When the aforementioned mold is pressed against a thin film of thermoplastic resin and peeled off, the resin pressed into the pit is stretched, and the equivalent diameter of the projection is slightly smaller than the inner diameter of the pit, but is smaller than the pit depth. A long group of minute projections is also formed. Since the length of the minute projections by the equivalent diameter and the length vary depending on the kind of resin used, physical properties (molecular weight, etc.), and molding conditions (pit depth, temperature, molding pressure, etc.), various It is good to confirm by experiment.

  When the thin film of the thermosetting resin is in an uncured state, by pressing a precision mold having pits having a predetermined arrangement and peeling it off, a group of microprojections having a desired shape is formed. It is formed. Next, this is cured by heat curing, light curing, or the like, whereby a functional substrate having high mechanical strength can be obtained. In curing the thermosetting resin, a curing temperature and a heating profile are examined in order to select a condition under which the resin does not melt and flow or deform. It should be noted that a curing agent or a curing accelerator may be added to the thermosetting resin.

  ADVANTAGE OF THE INVENTION According to this invention, the functional board | substrate provided with the fine protrusion group made of an organic polymer which can control a dimension, an aspect ratio, etc. freely can be provided. In addition, since an organic polymer is used to manufacture the columnar microprojection group, it can be formed by a simple manufacturing technique called pressing, and an inexpensive functional substrate can be provided.

  Although it is easy to produce minute projections having a small aspect ratio, minute projections having a unit of nm and an aspect ratio as large as 4 or more can be formed by a simple method. Accordingly, a functional substrate on the order of nm that can be developed for various uses can be obtained. It is also possible to change the distance (pitch, P) between the center positions of the projections depending on the position to give a changed function.

(Example 1)
FIG. 1 is a schematic perspective view of a functional substrate 100 provided with a group of protrusions 104 manufactured in this embodiment. The material of the group of projections 104 is PMMA, and the molecular weight is 20,000 to 600,000. The base 102 made of the same organic polymer as the microprojections 104 is continuous with the projections and firmly fixes the projections. In FIG. 1, the projection groups 104 have the same shape and are arranged in the vertical and horizontal directions, but they may be formed randomly. Further, the height dimension and the aspect ratio of the projection group may be changed depending on the position where the projection is formed. Such a change is a characteristic that can be achieved by the manufacturing method of the present invention.

  Furthermore, a specific function can be given by omitting a part of the projection group. According to the method of the present invention, a functional substrate having a defective portion can be easily formed in one step by forming a defective portion of a group of protrusions in a mold in advance.

(Example 2)
FIG. 2 is a perspective view showing a structure of a functional substrate 200 according to another embodiment, and FIG. 3 is a view showing a side structure of a minute projection 204. FIG. 4 is a flowchart showing a manufacturing process of the functional substrate shown in FIGS.

  2 and 3, the height of the columnar microprojections 204 is 3 μm, the equivalent diameter is 330 nm at the root, and 300 nm at the intermediate height position. The columnar microprojections 204 have a smooth surface state at the upper part of about 1 μm, and the surface of the part at about 2 μm from the root has a horizontal stripe pattern 209 as shown in FIG.

  The columnar microprojection group 204 is formed at a constant pitch P, the equivalent diameter of the bottom surface is 330 nm, and the height is 3 μm, so that the aspect ratio at the bottom surface is 9. Further, since the equivalent diameter at the intermediate height position of the projection 204 is 300 nm, the aspect ratio at the intermediate height position is 10, which is a sufficiently large aspect ratio of 4 or more. In the present invention, the term “aspect ratio” is a value at an intermediate height position of a minute projection unless otherwise specified.

  In addition, it can be seen that the columnar minute projection 204 has a tip portion smaller than the bottom portion and is flared. In the present embodiment, the shape of the columnar microprojections is a shape that becomes thinner from the root to the tip, but for example, a shape that becomes thinner from the root to the tip and the tip part swells may be used. One of the features of the columnar microprojection of the present invention is that it has a portion that becomes narrower from the root to the tip. Since the tip of the projection is smaller and wider than the bottom of the projection, the projection is difficult to remove from the substrate. In addition, since the protrusion is the same as the material of the base, the protrusion is difficult to remove from the base.

  As will be described later, the columnar microprojections 204 are made of the same PMMA as the base film (thin film) 202. Further, the columnar minute projections 204 are connected to the base film 202 and are integrated. A portion having a specific width d is formed by removing a specific row of the minute protrusion group. Thereby, a specific function can be given. A spacer 201 is formed between the first base 203 and the second base 207 to protect the projections. Note that a resin film 206 is formed in order to protect the tip of the projection group and secure adhesion to the second base 207.

  FIG. 2 is a perspective view of an optical device 200 for realizing a light waveguide manufactured by the manufacturing method of FIG. The optical device 200 includes a spacer 201 made of silicon nitride having a height of 3 μm, a thin film 202 having a thickness of 0.5 μm (PMMA to which an antioxidant and a flame retardant are added), and a first substrate 203 made of silicon having a thickness of 550 μm and a width of 1 mm. , A second substrate 206 made of polycarbonate and columnar microprojections 204 having an equivalent diameter of 300 nm and containing PMMA as a main component.

  In this example, PMMA was used as the material of the columnar minute projections 204 and the base film 202. However, a cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid, polypropylene, or the like, or the other materials described above may be used.

  FIG. 17 shows a method of manufacturing the main part of the functional substrate. As the substrate 401, a silicon wafer having a crystal orientation (100) and a diameter of 150 mm was used. A thin film 404 of PMMA having a molecular weight of 120,00 was applied to the surface of the substrate 401 by spin coating. The thickness of the thin film 404 is 1.5 μm. Next, the mold 405 having pits formed on the surface was pressed into the thin film 404. The mold 405 is a silicon wafer having the same crystal orientation (100) as the substrate 401 and a diameter of 150 mm. The mold 405 was pulled up vertically to form columnar minute projections 406. As shown in FIG. 17, the aspect ratio of the columnar microprojections 406 is about four times the pit aspect ratio (about 1) of the mold 405. It is generally difficult to form a pit having a large aspect ratio in the nm level on the mold 405. However, by using the method of this embodiment, the columnar minute projection 406 having a large aspect ratio can be easily formed.

  In the present embodiment, a silicon wafer having a crystal orientation of (100) and a diameter of 150 mm is used as the substrate 401, but the substrate 401 is not limited to a silicon wafer. For example, an inorganic substance such as glass, an organic substance such as polycarbonate, or a stacked structure thereof may be used.

  In this embodiment, the thin film 404 made of PMMA is formed on the surface of the substrate 401. However, the thin film 404 can be made of, for example, an organic polymer such as cycloolefin polymer, polystyrene, polycarbonate, or polypropylene in addition to PMMA. . Further, an inorganic substance such as silica may be added to these polymers.

  In this embodiment, a silicon wafer having a crystal orientation of (100) and a diameter of 150 mm is used for the mold 405. However, a metal thin film such as nickel or a PDMS (thermosetting or photosetting polydimethylsiloxane) is used. Organic substances may be used.

  Further, the diameter and height of the columnar minute projection 406 can be controlled by adjusting the depth of the concave portion (pit) of the mold 405 and the thickness and viscosity of the thin film 404. By increasing the opening area of the concave portion of the mold 405, the size of the bottom of the columnar minute projection 406 can be controlled. Further, by controlling the positions of the pits of the mold 405, the positions at which the columnar minute projections 406 are formed can be controlled.

  In addition, by using a thermoplastic resin as the material of the columnar minute protrusions 406, the temperature at the time of forming the columnar minute protrusions 406 can be adjusted, and the shape of the columnar minute protrusions 406 can be easily controlled. Further, by using the photocurable material for the columnar microprojections 406, the shape of the columnar microprojections 406 can be easily controlled by irradiating light when the columnar microprojections 406 are formed.

  Next, a method for manufacturing the optical device 200 will be described in detail. FIG. 4 is a flowchart showing a method of manufacturing the optical device 200 according to the present embodiment shown in FIGS. First, a 3 μm-thick silicon nitride film 402 was deposited on a first silicon substrate 401 shown in FIG. 4A by a plasma CVD method as shown in FIG. 4B.

  Next, as shown in FIG. 4C, the silicon nitride film 402 was patterned by photolithography to form spacers 403. Next, PMMA (solvent; ethyl cellosolve) to which 5% by weight of ultrafine silica particles having a particle diameter of 2 nm is added is spin-coated, and as shown in FIG. Of the resin film 404 was formed.

  Next, a mold (precision mold) 405 shown in FIG. 4E in which pits having a depth of 1 μm and a diameter of 500 nm are formed at a pitch of 1 μm on the surface is pressed onto the first resin film 404 to partially remove the resin film. After being pressed into the pit, the mold 405 was peeled off. As a result, as shown in FIG. 4F, a columnar minute projection group 406 was formed. Note that a support 409 is provided on the back surface of the mold 405 so that the pressing force on the resin film is constant and the resin film and the mold surface are maintained in parallel.

  As shown in FIG. 2, the columnar microprojection group has columnar microprojections 204 arranged at a height of 3 μm and a period (pitch, P) of 1 μm. The equivalent diameter of the columnar projection at an intermediate position in the height direction is 300 nm, and 330 nm at the root. As shown in FIG. 3, the columnar microprojections 204 have a smooth surface state at the upper portion of about 1 μm, and the surface of the portion at about 2 μm from the root may have a striped pattern 209 or an enlarged portion.

  Also, since the equivalent diameter of the intermediate height of the columnar microprojections 204 is 300 nm and the height is 3 μm, the ratio of height to one side (aspect ratio) is 10, which is sufficiently larger than 4. Further, it can be seen that the cross-sectional area of the tip of the columnar microprojection 204 is smaller than the cross-sectional area of the bottom, and is flared. The columnar microprojections 204 are made of the same PMMA as the thin film 202. Further, the columnar minute projections 204 are connected to the thin film 202 and are integrated.

  Although the reason has not been elucidated yet, when the mold is peeled from the resin film, a portion enlarged in the diameter direction may be formed at the tip of the minute projection. The function of the microprojection group is not impaired even if the enormous portion exists. The present invention includes such a structure.

  Next, as shown in FIG. 4G, a second resin film 408 having the same components as the resin film 404 was formed on a second substrate 407 made of polycarbonate by a spin coating method. Next, the second substrate 407 was overlaid as shown in FIG. Next, the first substrate 401 and the second substrate 407 were heated at 150 ° C. for 2 minutes while applying a pressure of 10 MPa to obtain an optical device 200 shown in FIG. In the step of FIG. 4H, the resin film 404 and the resin film 408 are joined and integrated.

  As shown in FIG. 2, the columnar microprojections 204 are integrated with the thin film 202. The protrusions 204 are arranged at a period (pitch, P) of 1 μm so that a photonic band gap appears. Further, the columnar minute projections 204 are not provided on the path 205 through which light passes, and a gap (optical path) 205 having a width d is formed.

  Although the columnar microprojections in the present invention do not have to have the shape shown in FIG. 2, when forming a group of columnar microprojections by a thermoplastic resin film press molding method described below, as shown in FIGS. 2 and 3. In general, That is, the upper end of the projection 204 has a smaller cross-sectional area than the lower end, and as shown in FIG. 3, the upper part of the projection is smooth, but the lower part may have some lines 209 in the horizontal direction. The reason why this line is generated has not been elucidated, but this is one of the shape characteristics of the columnar microprojections formed by the press molding method.

  In FIG. 2, for simplicity, only seven protrusions 204 are shown in one row, but in the optical device 200 that is actually manufactured, 80 protrusions 204 are formed in one row. Laser light was incident from the end of the optical device 200 having a length of 30 cm, and the spectrum of the transmitted light was examined. As a result, it was found that light having a wavelength of 1.8 μm was transmitted. The transmittance was 80%.

  In this embodiment, the main components of the protrusions 204 and 406 and the thin films 404 and 408 are PMMA. However, a polymer material containing another thermoplastic resin such as a cycloolefin polymer, polystyrene, polycarbonate, polyethylene terephthalate (PET), polylactic acid or polypropylene may be used. The refractive index may be changed by adding ultrafine particles such as silica and gold to the polymer material. Further, the surface of the formed columnar microprojections can be chemically modified by bonding another monomer or plating. The wavelength of the transmitted light can be adjusted by the equivalent diameter and the period of the columnar microprojections 204, and the point that the adjustment is possible is basically different from the technique described in Non-Patent Document 1.

  By adjusting the equivalent diameter and period of the minute protrusion 204 according to the communication wavelength, the present invention can be applied to communication devices corresponding to various communication wavelengths. Further, a photo-curable resin may be used, but in that case, the column-shaped minute projections are cured during or after press molding.

  As described above, the columnar microprojections 204 of the optical device 200 are formed by press molding, and do not require dry etching or photolithography as in a semiconductor process, unlike conventional optical devices, and can be manufactured at low cost. There is an effect that the device 200 can be manufactured.

  In the conventional columnar microprojections made of a silicon-based material, it was observed that the projections were damaged when the second substrate 407 and the first substrate 401 shown in FIG. 4H were pressed together. . However, when the main component of the projection 204 is made of a polymer material as in this embodiment, the columnar micro projection 406 is not damaged even when it comes into contact with the second resin film 408. That is, the columnar microprojections 204 can be in close contact with and fixed to the second resin film 408 without being damaged, and incident light can leak from the gap between the columnar microprojections 204 and the second resin film 408. lost. By improving the adhesion, the background noise of the output light could be reduced.

  In an optical device, it is necessary to form protrusions periodically so that a photonic band gap is developed. The photonic band gap is obtained by forming regions having different refractive indices at a period of about half the wavelength of light. Therefore, the wavelength of the transmitted light can be controlled by adjusting the interval (pitch) between the columnar minute projections. Therefore, in order to selectively transmit short-wavelength light, it is necessary to narrow the interval between the columnar microprojections and reduce the equivalent diameter or one side of the columnar microprojections.

  Since the height of the columnar microprojections is related to the aperture for entering incident light used in the optical device, the height is preferably at least several μm. In the method of manufacturing the protrusions of this embodiment, the aspect ratio of the columnar minute protrusions can be increased, and thus there is an effect that the incident light intensity can be sufficiently secured.

  Further, in this embodiment, since the tip of the columnar microprojection is smaller and wider than the bottom of the columnar microprojection, the columnar microprojection group is difficult to remove from the substrate. Further, since the columnar microprojection group is the same as the material of the base, the columnar microprojection group is difficult to remove from the base. Further, since the protrusion is integrated with the base, the optical device is easy to handle.

(Example 3)
In this embodiment, an example is described in which the optical device 200 in which the traveling direction of incident light changes is applied to an optical information processing apparatus. FIG. 5 is a schematic configuration diagram of an optical circuit 500 manufactured according to the present invention. The optical circuit 500 was formed on an aluminum nitride substrate 501 having a length (l) of 30 mm, a width (w) of 5 mm, and a thickness of 1 mm. The optical circuit 500 includes ten transmitting units 502 each including an indium phosphide semiconductor laser and a driver circuit, optical waveguides 503 and 503 ', and optical connectors 504 and 504'.

  The emission wavelengths of the ten semiconductor lasers were different from each other by 2 to 50 nm. The optical circuit 500 is a basic component of an optical multiplex communication system device. The present invention is applied to the portions of the waveguides 503 and 503 '. The waveguide 503 receives the optical signal input from the transmission unit 502 by the connecting portion oscillating portion 503 ′, and transmits the optical signal from the connecting portion 504 ′ to the optical connector 504 through the sub-waveguide 506 and the main waveguide 505 sequentially. . In this case, the input optical signal is multiplexed from each of the sub-waveguides.

  The structure of the oscillating portion 503 'is as shown in FIG. 6, and the structure of the connecting portion 504' is a structure in which the left and right of FIG. 6 are reversed. The column-shaped minute projection group of the connection portion 504 'is arranged in the direction opposite to that in FIG.

FIG. 6 is a schematic layout diagram of the columnar minute projections 508 inside the optical waveguide 503. The width of the input part of the optical waveguide 503 ′ is 20 μm and the plane section is trumpet-shaped so that an alignment error between the transmission unit 502 and the optical waveguide 503 can be allowed. At the center of the straight portion, the columnar microprojections are removed by one row to form a region without a photonic band gap, whereby signal light is guided to a region (w ₁ ) having a width of 1 μm. It has become. Note that the interval (pitch) between the columnar minute projections 508 is 0.5 μm. In FIG. 6, the columnar projection group 508 is shown in a simplified manner and is smaller than the actual number.

  The optical circuit 500 can superimpose and output ten types of signal light having different wavelengths. However, since the traveling direction of light can be changed, the width of the optical circuit 500 can be made extremely short as 5 mm, and the size of the optical communication device can be reduced. it can. Further, since the columnar minute projections 508 can be formed by pressing the mold, the manufacturing cost can be reduced. In this embodiment, the device is a device that superimposes input light. However, it is clear that the optical waveguide 503 is useful for all optical devices that control the optical path.

  As described in the above embodiment, by applying the film having the columnar microprojection group of the present invention, it is possible to provide an optical device that can arbitrarily select a wavelength of light used as an optical signal. . In this embodiment, a photonic band gap and a micro-sized or nano-sized optical path can be easily formed by molding the nanocolumnar projection group with an organic polymer or a material mainly composed of the same.

  The optical device of the present invention is characterized in that a group of columnar microprojections mainly composed of an organic polymer is arranged according to a predetermined arrangement method, and an optical path is formed according to a photonic band gap to input and output an optical signal. It is. Further, two opposing substrates and a group of microprojections made of an organic polymer are arranged according to a predetermined arrangement method in a space between the substrates to form an optical path by a photonic band gap. An optical device. It is desirable that the protrusion is connected to a thin film formed on the surface of the substrate, and it is particularly desirable that the material of the thin film formed on the surface of the substrate be the same as the material of the protrusion. At least one selected from the group consisting of oxide, nitride, and metal fine particles can be added to the organic polymer to give a predetermined refractive index. Further, it is preferable that two opposing substrates and a spacer separating the substrates are provided to support the minute projections.

  Here, the size of the equivalent diameter (diameter or one side) of the minute projection can be arbitrarily adjusted from 10 nm to 10 μm in relation to the wavelength of a light source used for a semiconductor laser or the like. Further, the height of the minute projection is preferably 50 nm to 10 μm. The distance (pitch) between the minute projections is about half of the signal wavelength used.

(Example 4)
In this embodiment, the protrusion aggregate 100 shown in Embodiment 1 is applied to the micro biochip 900. FIG. 7 is a schematic plan view of the biochip 900. A flow path 902 having a depth of 3 μm and a width of 20 μm is formed in a glass substrate 901. After that, it is structured to flow to the discharge hole 904.

  A molecular filter 905 is provided in the channel 902. On the molecular filter 905, a projection group 1000 (FIG. 8) having a diameter of 250 nm to 300 nm and a height of 3 μm is formed. FIG. 8 is a perspective view of the molecular filter 905. A channel 902 is formed in the substrate 901, and a group of protrusions 1000 is formed in a part of the channel 902.

  The substrate 901 is covered by the upper substrate 1001, and the sample moves inside the flow path 902. For example, in the case of DNA chain length analysis, when a sample containing DNA passes through the molecular filter 905 in the flow path 902 by electrophoresis, it is separated according to the DNA chain length. That is, DNA with a short chain length passes through a molecular filter faster than DNA with a long chain length, so that DNA can be separated according to the chain length.

  The sample that has passed through the molecular filter 905 is irradiated with laser light from a semiconductor laser 906 mounted on the surface of the substrate 901. Since the light incident on the photodetector 907 decreases by about 4% when the DNA passes, the chain length of the DNA in the sample can be analyzed based on the output signal from the photodetector 907.

  The signal detected by the photodetector 907 is input to the signal processing chip 909 via the signal wiring 908. A signal wiring 910 is connected to the signal processing chip 909, and the signal wiring 910 is connected to an output pad 911 and connected to an external terminal. The power was supplied to each component from a power supply pad 912 provided on the surface of the substrate 901.

  The molecular filter 905 of this embodiment includes a substrate 901 having a concave portion, a number of protrusions 1000 formed in the concave portion of the substrate 901, and an upper substrate 1001 formed so as to cover the concave portion of the substrate. Here, the tip of the protrusion is formed so as to be in contact with the upper substrate.

  Since the main component of the projection group 1000 is an organic polymer, it can be deformed, so that the projection group 1000 is not damaged when the upper substrate 1001 is put on the flow path 902. Therefore, the upper substrate 1001 and the projection group 1000 can be brought into close contact with each other. With such a configuration, the sample does not leak from the gap between the projection group 1000 and the upper substrate 1001, and high-sensitivity analysis can be performed.

  As a result of the actual analysis of the DNA chain length, the resolution of base pairs was 10 base pairs in half width in the group of glass protrusions, whereas the group of protrusions 1000 made of organic polymer was not. It was found that the resolution could be improved to 3 base pairs in half width. In the molecular filter of this embodiment, the projections and the upper substrate are in direct contact with each other. For example, a film of the same material as the projections is formed on the upper substrate, and the projections and the film are in contact with each other. If so, the adhesion can be improved.

  In this embodiment, the number of the flow paths 902 is one. However, a plurality of analyzes can be performed at the same time by arranging a plurality of flow paths 902 provided with protrusions of different sizes. In this example, DNA was examined as a sample. However, a specific sugar chain, protein, or antigen can be analyzed by previously modifying a molecule that reacts with a sugar chain, protein, or antigen on the surface of the protrusion group 1000. Can be. As described above, by modifying the surface of the protrusion with the antibody, the sensitivity of the immunoassay can be improved.

  According to this embodiment, a group of analytical projections made of an organic polymer having a nanoscale diameter can be easily formed. Further, the position, diameter, height, aspect ratio, and the like of the projection made of an organic material can be controlled by controlling the unevenness of the mold surface and the viscosity of the organic material thin film. Therefore, according to the present invention, a highly sensitive microbiochip for analysis can be provided.

  In the microbiochip of this example, a plurality of protrusions are present in the sample detection portion, and the material of the protrusions is an organic polymer. The diameter of the protrusions is 10 nm to 100 μm, and the height is 0.5 μm to 500 μm. It is preferable that The diameter or one side of the protrusion is preferably 10 nm to 100 μm, which is the same size as a biopolymer or a cell. Further, the height of the protrusion is adjusted according to the height of the flow path of the microchip. By providing a large number of protrusions on the detection portion of the microchip to increase the reaction surface area, it is possible to obtain a highly sensitive microchip for analysis by interaction with biomolecules (particularly biopolymers) and cells.

  In the projections of the present embodiment, the ratio of the height to the diameter or one side of the projections is sufficiently larger than 1, so that a group of minute projections can be provided in a microchannel having a depth of several μm or more.

(Example 5) (Cell culture sheet)
FIG. 9 is a plan view of the cell culture sheet 600. FIG. The cell culture sheet 600 includes a thin film (sheet) 602 having a thickness of 0.5 μm and containing PMMA as a main component, and a columnar microprojection 604 having an equivalent diameter of 2 μm and containing PMMA as a main component and extending from the thin film.

  A gap 605 is formed by removing a part of the columnar microprojection group. The cell culture sheet 600 is placed in a container such as a glass Petri dish, and the culture is performed by immersing the culture solution in the container. As shown in FIG. 10, cells and the like are cultured by placing cells (tissue) such as skin, bone and blood and a culture solution 603 such as a culture medium and nutrients on the columnar microprojection group 604 of the cell culture sheet 600. .

  It is preferable to provide a fixed gap 605 with a part thereof removed from the columnar microprojection group, and in this embodiment, as shown in FIG. 9, the gap is provided in a cross shape. By forming such gaps, the culture solution can easily flow, and nutrients can be efficiently supplied to the cells. Further, waste products of cells during cell culture can be efficiently discharged.

  By using this cell culture sheet, it is possible to greatly reduce damage to the sheet-like epidermal cells due to peeling from the petri dish that occurred when using a normal glass petri dish, and to reduce the sheet-like epidermal cells. The fixation rate at the time of transplantation to the skin can be increased. In addition, the culture solution easily flows through the entire sheet-like epidermal cell through a gap formed below the sheet-like epidermal cell formed by the columnar microprojections on the cell culture sheet. As a result, it is possible to efficiently supply nutrients to the cells and discharge waste products from the cells, and it is possible to suppress the death of epidermal cells during cell culture, which has conventionally occurred.

  Next, a method for producing the cell culture sheet will be described. PMMA (solvent; ethyl cellosolve) was applied to the mold side of the stage of the press device to form a resin film. Next, a mold in which pits having a depth of 1 μm and a diameter of 500 nm are formed in an area of 2 cm in diameter at a pitch of 1 μm on the surface is pressed into a resin film, and a part of the resin film is pressed into the pits. More peel off. Thus, a columnar microprojection group was formed, and a cell culture sheet having the columnar microprojection group formed on the thin film was obtained. In this embodiment, the resin film is applied directly on the stage, but it is also possible to form the cell culture sheet by applying the resin film on a substrate such as silicon.

  The columnar microprojection group has a height of 3 μm and is arranged at a period (pitch) of 1 μm. The equivalent diameter of the columnar microprojections at an intermediate position in the height direction is 300 nm, and the root is 330 nm. Therefore, the aspect ratio of the minute projection is 10. The upper portion of about 1 μm of the columnar microprojections has a smooth surface state as shown in FIG. 3, and the surface of about 2 μm from the root has a striped pattern 209. Also, the cross-sectional area of the tip of the columnar microprojection is smaller than the cross-sectional area of the bottom, and is flared.

  The cell culture sheet formed in this example was placed in a glass Petri dish with the culture solution immersed therein, and normal human epidermal keratinocytes were cultured on the cell culture sheet by a conventional method (used medium: HuMedia-KB2 (Kurabo ( Co., Ltd.), cultured at 37 ° C. in a flow of 5% CO 2). As a result, the epidermal keratinocytes adhered normally on the cell culture sheet and proliferated in a sheet shape.

  Fourteen days after the start of the culture, a 2 cm diameter polyvinylidene difluoride (PVDF) membrane was put on the cultured cells, and the medium was aspirated, whereby the sheet-like epidermal keratinocytes grown on the nanopillar sheet were obtained. It was peeled off from the cell culture sheet together with the PVDF membrane. The sheet-like epidermal keratinocytes could be easily detached from the PVDF membrane covered. Damage to the sheet-like epidermal keratinocytes due to detachment from the cell culture sheet was significantly reduced as compared with the case where a normal glass petri dish or the like was used.

  The polymer material may be subjected to a hydrophilic treatment by a plasma treatment or the like. Further, the polymer material is not particularly limited, but it is preferable to select a material having little effect on cells (tissue) to be cultured. For example, polystyrene, PMMA, polylactic acid, and the like are desirable.

  Further, in this embodiment, since the tip of the columnar microprojection is smaller and wider than the bottom of the columnar microprojection, the columnar microprojection group is difficult to remove from the substrate. Further, since the columnar microprojection group is the same as the material of the base, the columnar microprojection group is difficult to remove from the base. If the cell culture sheet is formed on a substrate such as silicon, the cell culture sheet can be easily handled.

(Example 6) (water-repellent surface)
In this embodiment, an example will be described in which a thin film (sheet) having a group of columnar microprojections formed on the surface is applied as a water-repellent film. As shown in FIG. 11, the water-repellent film of this embodiment has a configuration in which a group of columnar microprojections 607 is formed on a sheet 606. The columnar microprojections of this embodiment preferably have a pitch (interval) between the projections of 20 nm to 10 μm, a height of several μm to several tens of μm, and an equivalent diameter of the tip of the projection of 50 nm to 500 nm. The material of the columnar microprojections is not particularly limited, but is preferably a water-repellent material such as PMMA. Alternatively, the surface of the microprojection group can be treated with a water-repellent or oil-repellent agent.

  In the water-repellent film of this embodiment, as shown in FIG. 11, the contact angle of the water droplet 609 can be increased by forming the column-shaped minute projections 607 on the surface as compared with the water-repellent sheet 606 alone. . Therefore, it is possible to amplify the water repellency of the material by the lotus leaf effect obtained by forming the columnar minute projections 607. In addition, since the columnar microprojections of the water-repellent film of this embodiment can be formed in a dense structure with a spacing of nm size, they have a property of being hard to be crushed and hard to be removed, and have excellent durability of the water / oil repellency. I have.

  The water-repellent / oil-repellent film of this embodiment can be applied to a surface such as an umbrella, clothing, and a wall. In this case, as a method of forming the water-repellent film, a sheet in which a group of fine protrusions is formed by the same method as in Example 5 and a method of attaching the sheet with an adhesive, or a method of water-repelling an umbrella, clothing, walls, and the like A method of directly transferring the oil-repellent film to the surface of the substrate on which the oil-repellent film is to be formed.

  According to the water-repellent film of this embodiment, the material surface itself can be easily modified by one transfer without the need for a conventional water-repellent coating treatment.

(Example 7) (Undyed coloring sheet)
In this embodiment, an example will be described in which a group of columnar microprojections formed on a sheet is applied as an unstained color developing sheet. FIG. 12 shows the coloring principle of the unstained coloring sheet of this example. The visible light that has entered the columnar microprojections reflects while causing interference in the columnar microprojections, and can appear as if the sheet surface had developed color. As shown in FIG. 12, by changing the intervals (pitch) P1 and P2 of the protrusions, the degree of interference of visible light changes, and the visible color tone can be changed.

  For example, when white light containing components of wavelengths λ1, λ2,... Is incident on the group of minute protrusions 704 of the sheet 700, the reflected light from the small pitch P1 becomes λ1 (blue) light and reflected from the large pitch P2. The light becomes λ2 (yellow).

  As the distance between the protrusions is increased, the interference of the long-wavelength color becomes stronger, and the color can be changed in the order of blue, green, yellow, and red. As described above, by adjusting the interval between the protrusions, it is possible to make the sheet look as if it were colored without using a dye or a pigment. It is also possible to change the color for each location. Further, in the non-stained colored sheet of this embodiment, since the interference light is used, the color tone can be changed depending on the viewing angle.

  Also, by changing the diameter and height of the protrusion, the degree of interference of visible light can be similarly changed, and the color of the sheet can also be changed by adjusting the diameter and height of the protrusion. is there.

  In the non-stained colored sheet of this example, the diameter of the columnar microprojections used is 100 nm to 2,000 nm, the interval between the projections is 100 nm to 2,000 nm, and the height of the projections is 100 nm so that visible light interference occurs. 1 μm to 5 μm is preferred.

  The unstained unstained sheet of this embodiment can be applied to clothes, in-vehicle seats, accessories, wallpapers, holography, and the like.

(Example 8) (Anti-reflection layer)
In this embodiment, an example in which a group of columnar microprojections is applied as an antireflection layer will be described. As shown in FIG. 13, the antireflection layer 705 of this embodiment has a thin film (sheet) 707 having a thickness of 0.1 μm or less and containing PMMA as a main component, and an equivalent diameter containing PMMA as a main component extending from the thin film 707. It is composed of a columnar microprojection group 708 of 1 μm or less. This antireflection film is formed on the surface of a cover glass of a display or an optical substrate for optical communication, and is used as an antireflection layer. Note that the sheet 707 and the minute projections 708 formed by the transfer method are integrated by an adhesive or a thermocompression bonding method.

  As a method of forming an anti-reflection layer on a cover glass of a display or an optical substrate for optical communication, for example, the following methods are available. That is, a method in which a sheet in which a group of columnar microprojections is formed on a thin film is attached with an adhesive, a resin is directly applied on a substrate such as a cover glass or an optical substrate, and columnar microprojections are formed by transfer to form an anti-reflection layer. Is a method. In the case of a method of attaching a sheet with an adhesive, it is preferable to use a material having excellent optical transparency, such as an acrylic adhesive, as the adhesive.

  In the antireflection layer of the present embodiment, the diameter, spacing, height, or cross-sectional shape of the protrusions is adjusted, and the dielectric region of the protrusion and the air region where the protrusion does not exist in the layer composed of the protrusion group. Can be changed. Therefore, the effective refractive index (hereinafter, abbreviated as the refractive index) in the layer composed of the projection group can be arbitrarily adjusted, and the light reflected on the substrate surface can be suppressed.

The ideal conditions of the refractive index (nAR) and the thickness (tAR) in the present antireflection layer are represented by the following equations.
Refractive index: nAR = (nsub.nair) 1/2
Thickness: tAR = λ / (4nAR)
nsub: refractive index of the substrate, nair: refractive index of air, λ: design wavelength For example, when the refractive index of the substrate (assuming glass) is 1.5 and λ is 1550 nm, the refraction of the antireflection layer is calculated from the above equation The ratio is 1.22 and the thickness is about 320 nm. As described above, by calculating the parameters required for the anti-reflection layer and adjusting the shape and arrangement of the protrusions, the anti-reflection layer can be formed as a cover glass of a display or an optical communication optical substrate.

  The structure and operation of the antireflection layer shown in FIG. 13 will be described. A light-emitting element is provided on the substrate 706 side. The antireflection layer 705 is provided in order to suppress reflected light generated at the boundary between the substrate 706 and air when light incident from the substrate 706 side. The operation principle of the antireflection layer 705 will be described. First, since there is a refractive index difference at the boundary between the substrate 706 and the antireflection layer 705, reflected light # 1 returning to the substrate 706 side is generated. Further, reflected light also occurs at the boundary between the anti-reflection layer 705 and the air, and the reflected light repeats multiple reflection within the anti-reflection layer 705 and transmission from the anti-reflection layer 705, and then returns to the substrate 706. To form At this time, when the amplitude of the reflected light # 1 and the amplitude of the reflected light # 2 have the same amplitude and opposite phase relationship, the two reflected lights cancel each other out, so that there is no reflected light returning to the base 706 side.

  Regarding the transmitted light to the air side, the transmitted light # 1 directly passed through the antireflection layer 705 and the transmitted light # 1 formed after repeating multiple reflection in the antireflection layer 705 and transmission from the antireflection layer 705. 2 have the same phase relationship, a transmittance of 100% is obtained.

  The condition of the anti-reflection layer that satisfies the above non-reflection condition (total transmission condition) is represented by the above-described formula. Note that the same antireflection effect can be obtained when light enters from the air side as when the light enters from the substrate 706 side. Since the structure shown in FIG. 13 is an antireflection layer using phase interference of light, the antireflection effect is weakened with incident light deviating from the design wavelength.

  14 and 15 will be described. The operation principle is different from the structure of FIG. 13 as follows. By gradually changing the refractive index in the anti-reflection layer from the refractive index of the substrate 706 to the refractive index of air, it is possible to eliminate discontinuous surfaces due to a difference in refractive index and suppress reflection. Become. Further, since the phase interference of light is not used, the wavelength dependence of the reflectance is also reduced.

According to this embodiment, by expanding the air region in the layer composed of the projection group, the refractive index that is difficult with the antireflection layer composed of the continuous film of MgF ₂ used for the antireflection layer of the glass substrate is difficult. A low refractive index layer of 1.3 or less can be realized. Therefore, for example, an anti-reflection layer that suppresses light reflected from the surface of the glass substrate having a refractive index of about 1.5 can be formed as a single layer. Specifically, the refractive index of the conventional MgF ₂ continuous film is at least about 1.3 at the minimum, but in the antireflection layer of this embodiment, the refractive index is optimized by optimizing the diameter and spacing of the protrusions. It can be adjusted to about 1.2 which is close to the ideal condition.

  Next, another example of the antireflection layer according to the present embodiment will be described with reference to FIG. In this example, the shape of the projections of the columnar microprojection group 708 is a tapered shape that becomes thinner from the root toward the tip. By adopting such a shape, the reflectivity was able to be suppressed to 1/50 or less in the wavelength region of 300 nm to 700 nm as compared with the case without the antireflection layer. As described above, by making the shape of the protrusion tapered, the refractive index in the layer can be changed in the thickness direction, and an antireflection effect in a wide wavelength band can be obtained.

  Another form of the antireflection layer will be described with reference to FIG. In this example, a sheet 705 in which columnar microprojection groups 708 having different refractive indexes are formed on a substrate is stacked. Here, as a method of laminating the sheet 705, a method of laminating a sheet formed of a single layer using an adhesive, and a method of crimping a sheet formed of a single layer (for example, 300 kg / cm 2 load, heating at 100 ° C.) It is possible to stack.

  By stacking sheets having different effective refractive indices as in this example, the refractive index in the thickness direction can be changed similarly to the tapered structure in FIG. 14, and an antireflection effect in a wide wavelength band is obtained. be able to.

  In addition to the above-described embodiments, by changing the diameter and interval of the protrusion for each specific region on the substrate, an antireflection layer having a different wavelength characteristic on the same substrate can be arbitrarily formed as a single layer or a plurality of layers. It is also possible to arrange in the region of.

Example 9 (High-sensitivity electrode substrate)
In this embodiment, an example in which a nickel thin film layer is formed on the surface of a columnar microprojection by electroless plating and applied as a high-sensitivity electrode of an anodic stripping method which is a technique for analyzing trace metal ions will be described with reference to FIG. I do.

  First, a polystyrene resin layer 801 was formed on a glass substrate having a length of 30 millimeters, a width of 30 millimeters, and a thickness of 1 millimeter by a method similar to the method disclosed in Example 1. Thereafter, columnar microprojections 804 of polystyrene resin were formed on the surface of the polystyrene resin layer 801 using a precision mold 803, and a substrate having the columnar microprojections 804 on the surface was manufactured. Here, the formed columnar microprojections 804 had a bottom diameter of 240 nm, an upper diameter of 200 nm, and a height of 1 μm, and the pitch between the centers of the columnar microprojections 804 was 500 nm.

  Next, the surface of the substrate having the polystyrene resin columnar microprojections on the surface was covered with a nickel layer having a thickness of 20 nm by electroless plating. Hereinafter, the electroless plating method applied in the present embodiment will be described in detail. First, palladium, which is a nucleus for electroless plating deposition, was adhered to the surface of a substrate having polystyrene resin columnar microprojections on the surface using a neogant treatment solution manufactured by Atotech Japan. This process is generally called a catalyst application activation process. Next, the obtained substrate was immersed in a top chemialloy 66 electroless nickel plating solution manufactured by Okuno Pharmaceutical Co., Ltd. for 3 minutes to form a nickel layer on the surface of the substrate having columnar microprojections on the surface. The obtained substrate surface had metallic luster. Observation with a scanning electron microscope revealed that the fine protrusion had an upper diameter of 240 nm and a lower diameter of 280 nm, confirming that a 20 nm nickel layer was uniformly formed on the surface of the columnar fine protrusion.

  A method for analyzing a trace amount of copper ions contained in an aqueous solution by an anodic stripping method using a substrate having on its surface columnar microprojections coated with a nickel layer formed by the above method as an electrode is described below. The anodic stripping method is a method of reducing and concentrating metal ions contained in a solution on an electrode, then oxidizing and eluting the electrode by anodic polarization, and identifying the ions in the solution from the potential and the amount of flowing electricity at that time. is there. First, four types of copper sulfate aqueous solutions having a copper ion concentration of 1 × 10−8 mol / l, 1 × 10−9 mol / l, 1 × 10−10 mol / l, and 1 × 10−11 mol / l were mixed with ultrapure water. Prepared.

  Next, with respect to each copper sulfate aqueous solution, a substrate having columnar minute protrusions coated with a nickel layer on the surface and a substrate of a comparative example were compared. The substrate of the comparative example is a substrate produced by the same method as the above method except for the process of forming the minute projections, and having no columnar minute projections covered with a nickel layer on the surface. Using these as electrodes, measurement was performed by the anode stripping method. A glass beaker was used for the measurement, and the size of the electrode was 5 mm square. A platinum electrode was used as a counter electrode, and a saturated calomel electrode was used as a reference electrode. 30 cc of an aqueous solution of copper sulfate was introduced into a beaker, and the electrode, counter electrode, and reference electrode were immersed in the beaker and purged with argon gas.

  Next, a voltage of -0.4 Vvs. After a potential of SCE was applied for 15 minutes to precipitate copper on the electrode surface, the potential of the electrode was reduced to -0.1 V vs. 0.1 V. +1.0 V vs. SCE. Sweep at 0.1 V / min to SCE. Thus, the copper deposited on the electrode surface was dissolved, and the potential and current at that time were recorded. Table 1 shows the obtained results. The ratio of the amount of dissolved copper in the plate electrode (electrode without minute projections) to the amount of dissolved copper in the high-sensitivity electrode substrate (electrode having minute projections) according to the present invention is 10 regardless of the copper ion concentration. ~ 15. It has been found that the measurement can be performed with higher accuracy and sensitivity when using an electrode having minute projections than when using an electrode having no minute projections.

  The reason for this is that by forming minute projections on the electrode surface, the surface area of the high-sensitivity electrode substrate of the present invention is dramatically increased as compared with a smooth electrode (one having no minute projections on the electrode surface). It is considered that this is because the amount of copper deposited on the electrode surface increased. Table 1 shows the results of the anode stripping measurement.

  Hereinafter, specific embodiments of the present invention will be described.

  (1) A functional substrate in which tips of projections of a group of microprojections made of an organic polymer are fixed to another substrate surface.

  (2) A functional substrate in which a plurality of layers of organic polymer microprojections are formed and fixed to a base.

  (3) The columnar microprojection group mainly composed of an organic substance is arranged according to a predetermined arrangement method, and constitutes a photonic band gap and an optical path to input and output an optical signal. An optical device as described.

  (4) Two opposing substrates and a group of columnar microprojections made of an organic polymer are arranged in a space between the substrates according to a predetermined arrangement method. The optical device according to claim 1, wherein an optical path is formed by forming a photonic band gap and a specific region where the minute columnar protrusion group does not exist.

  (5) The optical device according to any one of claims 1 to 3, wherein the columnar minute projections are connected to a thin film formed on a surface of the substrate.

  (6) The optical device according to any one of claims 1 to 3, wherein the organic polymer contains at least one selected from the group consisting of oxide, nitride, and metal fine particles.

  (7) The optical signal processing device according to any one of the claims, further comprising an optical signal input device and a light receiving device.

  (8) The functional substrate according to any one of claims 1 to 3, further comprising a columnar microprojection group, wherein the projection and the substrate connected to the projection are integrated.

  (9) The functional substrate according to any one of claims 1 to 3, wherein the organic material is a material mainly composed of a thermoplastic polymer material.

  (10) The functional substrate according to any one of (1) to (4), wherein the organic material is a photocurable polymer material, and the group of columnar microprojections is provided.

  (11) The main component of the columnar projection group is at least one of cycloolefin polymer, polymethyl methacrylate, polystyrene, polycarbonate, polyethylene terephthalate, polylactic acid, and polypropylene.

  (12) The functional substrate according to any one of (1) to (4), further comprising a columnar minute projection group having a second base on the first base via a spacer.

  (13) An optical connector and a plurality of optical output units optically connected to the connector are mounted on one substrate, and at least one of the optical connector and the optical output unit is made of an organic material first base. And a group of columnar microprojections made of an organic material extending from the base. The tip of the microprojection group is in contact with the second base, the equivalent diameter of the projection is 10 nm to 10 μm, the height is 50 nm to 10 μm, and the aspect ratio of the microprojection is 4 or more. An optical circuit, wherein the microprojection group is an optical device having at least one light entrance portion and at least one light exit portion arranged to constitute at least one optical path.

  (14) a first organic polymer surface and a group of columnar microprojections made of a polymer extending from the first organic polymer surface, and the tips of the group of microcolumnar small protrusions are in contact with the second organic polymer surface; The projection has an equivalent diameter of 10 nm to 10 μm and a height of 50 nm to 10 μm. The aspect ratio of the columnar microprojections is 4 or more, and the columnar microprojections are arranged so as to form at least one optical path, and the optical device has one or more light entrance portions and one or more light exit portions. An optical signal processing device optically coupled with two or more optical signal processors.

FIG. 3 is a perspective view of a functional substrate manufactured in an example. FIG. 3 is a side view showing the structure of the functional substrate manufactured in the example. FIG. 4 is a side view showing a structural example of a group of minute projections manufactured in an example. FIG. 4 is a flowchart showing a process for manufacturing a functional substrate according to the present invention. FIG. 1 is a schematic plan view showing a configuration of an optical circuit according to an embodiment of the present invention. FIG. 6 is a schematic plan view showing the structure of the optical waveguide oscillation unit in FIG. FIG. 1 is an exploded perspective view showing the configuration of a micro-in-chip according to the present invention. FIG. 8 is an exploded perspective view showing the configuration of the molecular filter in FIG. 7. FIG. 2 is a plan view showing the structure of the cell culture sheet according to the present invention. The side view of the culture sheet explaining the cell culture in FIG. FIG. 2 is a side view illustrating the configuration and operation of the water / oil repellent sheet according to the present invention. The side view explaining the effect | action of the non-staining coloring sheet by this invention. FIG. 2 is a schematic side view illustrating the operation of the antireflection layer according to the present invention. FIG. 4 is a schematic side view illustrating the operation of an antireflection layer according to another example of the present invention. FIG. 9 is a schematic side view illustrating the operation of an antireflection layer according to still another example of the present invention. FIG. 4 is a flowchart showing a step of forming a nickel thin film layer on the surface of a columnar microprojection according to the present invention. FIG. 5 is a flowchart illustrating a method for manufacturing a functional substrate according to another embodiment of the present invention.

Explanation of reference numerals

  200 optical device, 201 spacer, 202 thin film, 203 first substrate, 204 protrusion, 205 optical path, 206 second substrate, 401 silicon substrate, 402 silicon nitride film, 404th No. 1 resin film, 405 mold, 408 second resin film, 500 optical circuit, 501 AlN substrate, 502 transmission unit, 503 optical waveguide, 504 optical connector.

Claims (19)

  A first substrate made of an organic polymer and a columnar microprojection made of an organic polymer extending from the substrate, wherein the columnar microprojection has an equivalent diameter of 10 nm to 500 μm and a height of 50 nm to 5000 μm, A functional substrate comprising a group of columnar microprojections, wherein the ratio (H / D) of the equivalent diameter (D) to the height (H) of the group of columnar microprojections is 4 or more.   2. The functional substrate according to claim 1, wherein the column-shaped micro projections are self-supporting.   2. The functional substrate according to claim 1, wherein the ratio (H / D) of the equivalent diameter (D) to the height (H) of the group of columnar microprojections is 8 to 30. .   2. The functional substrate according to claim 1, wherein the equivalent diameter of the tip of the group of columnar projections is smaller than the equivalent diameter of the bottom of the group of columnar projections.   2. The functional substrate according to claim 1, further comprising a radially swelled portion at a tip end of the columnar microprojection group.   2. The functional substrate according to claim 1, wherein the column-shaped minute projections have a portion that becomes narrower from a root in contact with the first base toward the tip. .   2. The functional substrate according to claim 1, wherein at least the surface of the microprojection group is mainly composed of a water-repellent and / or oil-repellent organic polymer.   2. The functional substrate according to claim 1, wherein at least a part of the surface of the microprojection group is plated with metal.   A first base made of an organic polymer, and a group of columnar microprojections made of the organic polymer extending from the base; the tip of the group of microprojections is in contact with the second base; A diameter of 10 nm to 10 μm, a height of 50 nm to 10 μm, an aspect ratio of the microprojections of the columnar microprojections is 4 or more, and the columnar microprojections are arranged to constitute at least one optical path; An optical device comprising one or more light entrance parts and one or more light exit parts.   10. The optical device according to claim 9, wherein a part of the columnar microprojections is removed to form a gap at a predetermined interval.   A projection group containing an organic polymer is formed on the substrate surface of the organic polymer, the equivalent diameter of the projection group is 10 nm to 100 μm, the height is 0.5 μm to 500 μm, and the aspect ratio of the fine projection is 4 or more. A microbiochip, characterized in that:   12. The micro bi-chip according to claim 11, wherein the surface of the projection is modified.   The microbiochip according to claim 12, wherein the surface of the protrusion is modified with at least one of an antibody, a sugar chain, and a base.   12. The method according to claim 11, wherein a plurality of organic polymer protrusions are provided in the flow path for flowing the sample, and the tip of the protrusions is in contact with the upper substrate constituting the flow path. Micro bio chip.   On a base made of a material mainly composed of an organic polymer, a molding die made of a material having a higher hardness than the material, having a large number of pits having an equivalent diameter of 10 μm or less, arranged to form a predetermined pattern, is pressed. A step of press-fitting a part of the material into the pit, peeling off the mold from the material, and forming a group of columnar microprojections in which the material in the pit is elongated. Method for manufacturing a functional substrate.   The spacer according to claim 15, wherein a spacer made of an inorganic material is formed on the first substrate surface, a material film is formed on the surface including the spacer, the mold is pressed against the material film, and the mold is peeled off. Then, a method of manufacturing a functional substrate having a group of columnar microprojections, wherein the second substrate is brought into contact with and fixed to the tip of the group of columnar microprojections via the spacer.   A group of microprojections made of an organic polymer and having an aspect ratio of 4 or more are integrated with the substrate in a specific arrangement, and the equivalent diameter of the microprojections is 1 μm or less and the height is 100 μm or less. A functional substrate characterized by being supportive.   18. The functional substrate according to claim 17, wherein the equivalent diameter of one end of the projections of the small projection group is smaller than the equivalent diameter of the other end, and the tip of the small projection group having a small equivalent diameter is connected to another base. 18. The functional substrate according to claim 17, wherein a plurality of the fine protrusion groups are formed, a base is provided between the respective layers, and the base and the fine protrusion groups are integrated.

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