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JP2004034258A - Polishing device - Google Patents

Polishing device Download PDF

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Publication number
JP2004034258A
JP2004034258A JP2002197265A JP2002197265A JP2004034258A JP 2004034258 A JP2004034258 A JP 2004034258A JP 2002197265 A JP2002197265 A JP 2002197265A JP 2002197265 A JP2002197265 A JP 2002197265A JP 2004034258 A JP2004034258 A JP 2004034258A
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JP
Japan
Prior art keywords
polishing
unit
shaft
finishing
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002197265A
Other languages
Japanese (ja)
Inventor
Yoshio Nagai
永井 与志夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to JP2002197265A priority Critical patent/JP2004034258A/en
Publication of JP2004034258A publication Critical patent/JP2004034258A/en
Pending legal-status Critical Current

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  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a polishing device 1 capable of polishing a finishing portion 41 with a small diameter without giving a force in the bending direction. <P>SOLUTION: An approximately cylindrical polishing portion 11 is filled with a polishing solution 30 and the finishing portion 41 is turned in the polishing solution 30 in the polishing portion 11 by a drive unit 20. The polishing solution 30 in the polishing portion 11 is circulated by a pump 60. Thereby, the outer peripheral surface of the finishing portion 41 is polished by a frictional force with the polishing solution 30 acting on the whole outer peripheral surface of the finishing portion 41. Therefore, the polishing device 1 which can polish the finishing portion 41 with the small diameter can be provided without applying a bending forth to the finishing portion 41 by pressing a lap plate unlike a conventional polishing device. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、円筒状シャフト外周部を研磨する研磨装置に関するものであり、特に直径の小さいシャフトの研磨に用いて好適である。
【0002】
【従来の技術】
従来、被研磨材である円筒状シャフト外周部を研磨する研磨装置は、駆動手段の主軸にシャフトの一端側を保持固定させ、シャフトの中心を回転軸として回転させながら、研磨材を含む研磨液を含ませたラップ板をシャフト外周部に接触させ径方向に押圧することによりシャフト外周面を研磨している。
【0003】
【発明が解決しようとする課題】
しかしながら、この方法では、直径の小さいシャフト、特に直径が0.1mm以下のシャフトにおいては、シャフトの剛性が低いためラップ板の押圧力によりシャフトが曲がる、あるいは折損する等して研磨が困難になるという問題がある。
【0004】
本発明は、このような問題に鑑みてなされたものであり、その目的は、直径の小さいシャフトを、シャフトに曲げ方向の力を与えずに研磨することができる研磨装置を提供することにある。
【0005】
【課題を解決するための手段】
本発明は上記目的を達成するため、以下の技術的手段を採用する。
【0006】
本発明の請求項1に記載の研磨装置は、略軸状の被研磨材を保持し回転させる駆動手段と、略円筒孔状の研磨部が設けられる研磨本体と、研磨部の軸方向両端側を連通する通路と、研磨部内および通路内に充満される研磨砥粒を含む研磨液と、研磨部内および通路内の研磨液を循環させて研磨部内に研磨部の軸方向の研磨液流を発生させる循環手段とを備え、被研磨材の一部を、駆動手段により研磨部内において研磨液中で回転させる構成としている。研磨部内において研磨液中で被研磨材を回転させると、両者の速度差により被研磨材表面と研磨液との間に摩擦力が発生する。すなわち、研磨液に含まれる研磨砥粒と被研磨材表面との間に摩擦力が発生し、この摩擦力により被研磨材表面が研磨される。この摩擦力は、被研磨材表面の円周方向全域において均一に作用する。このため、被研磨材の半径方向に作用する力、すなわち被研磨材を曲げるように作用する力はほぼ0である。これにより、従来の研磨装置のように研磨中に被研磨材に対して曲げ方向の力を作用させることを防止できるので、被研磨材に曲げ方向の力を与えずに研磨することができる研磨装置を提供できる。
【0007】
また、研磨部内において、研磨液を研磨部の軸方向に流動させている。これにより、被研磨材外周表面に接触する研磨砥粒を常時入れ替えることができ、被研磨材外周表面を均一に研磨することができる。さらに、被研磨材表面の温度上昇を抑え一定温度に維持することができる。
【0008】
本発明の請求項2に記載の研磨装置は、駆動手段は、被研磨材を回転させると同時に軸方向に往復運動させる構成としている。これにより、被研磨材外周表面に接触する研磨砥粒を常時入れ替えることができ、被研磨材外周表面を均一に研磨することができる。さらに、被研磨材表面の温度上昇を抑え一定温度に維持して研磨状態を均一にすることができる。
【0009】
本発明の請求項3に記載の研磨装置は、駆動手段の回転速度および循環手段による研磨液流の流量の少なくとも一方を調整する制御手段を備える構成としている。これにより、被研磨材の材質あるいは直径等に応じて、被研磨材の回転速度、研磨液流量を最適に調整することができる。
【0010】
この場合、本発明の請求項4に記載の研磨装置のように、駆動手段による被研磨材の軸方向往復運動速度を調整する制御手段を備える構成とすれば、被研磨材の材質あるいは直径等に応じて、被研磨材の軸方向往復運動速度を最適化することができる。
【0011】
【発明の実施の形態】
以下、本発明の一実施形態による研磨装置について図面に従って説明する。
【0012】
図1には、本発明の一実施形態による研磨装置1の全体概略図を示す。
【0013】
研磨装置1は、大きくは、略円筒孔状の研磨部11が設けられた研磨本体10と、軸状の被研磨材であるシャフト40を保持し回転させる駆動手段である駆動ユニット20と、研磨部11内に充満される研磨液30から構成され、シャフト40の一部が、研磨部11内で研磨液30に浸漬した状態で駆動ユニット40により回転されて研磨される。
【0014】
研磨本体10は、金属材料で形成され、図1に示すように、円筒孔状の研磨部11が形成されている。また、研磨本体10において、研磨部11の両端側のそれぞれに連通して通路である連絡通路12、13が設けられている。また、研磨本体10には、通路である外部管路50が接続され、両連絡通路12、13に接続されている。つまり、研磨部11の両端側は、両連絡通路12、13、外部管路50を介して連通している。
【0015】
なお、研磨部11の内径は、被研磨材であるシャフト40の仕上げ部41の外径に対応して設定される。すなわち、研磨部11の内周壁面と仕上げ部41の外周面との間に形成される隙間が所定の大きさになるように設定される。
【0016】
研磨部11、両連絡通路12、13および外部管路50の内部には、研磨砥粒(図示せず)を含む研磨液30が充満されている。研磨液30としては、たとえば、ステアリン酸グリセリンエステル、ポリエチレングリコール等の混合液体に、研磨砥粒である油溶性ダイヤモンドスラリを混入させたものが使用される。
【0017】
外部管路50の途中には、循環手段であるポンプ60が接続されている。ポンプ60を運転することにより、研磨部11、両連絡通路12、13および外部管路50の閉回路内に研磨液30を循環させ、研磨部11内に研磨部11の軸方向(図1において上下方向)の研磨液30流を発生させることができる。なお、本発明の一実施形態による研磨装置1において、上述の研磨液30流は図1中の矢印の方向に流れている。また、ポンプ60としては、液体圧送用のものであれば形式は問わないが、研磨液30を吸入・吐出するため、耐摩耗性に優れる材質、構造のもの、たとえばダイヤフラム式ポンプ、空気エジェクタ式等を用いることがより望ましい。
【0018】
被研磨材であるシャフト40を保持し回転させる駆動手段である駆動ユニット20は、たとえば電動機等により回転される主軸21の一端にシャフト40を着脱自在に保持するアタッチメント22を備えている。シャフト40は、研磨時においては、アタッチメント22により主軸21と同軸上に保持固定される。また、駆動ユニット20の主軸21は、回転中、すなわち研磨作業中において軸方向に往復移動可能である。また、駆動ユニット20は、研磨本体10に対して、主軸21と研磨部11とが同軸上である位置関係を維持して直接あるいは別部材(図示せず)を介して固定されている。
【0019】
制御装置70は、駆動ユニット20およびポンプ30の運転状態を制御している。制御装置70には操作盤71が接続されており、作業者が操作盤71を操作することにより、制御装置70は、駆動ユニット20の主軸の回転速度およびポンプ30の吐出流量を、操作に対応したレベルに制御する。
【0020】
ここで、本発明の一実施形態による研磨装置1による研磨作業について説明する。
【0021】
ここで、本発明の一実施形態による研磨装置1において、シャフト40は超硬工具鋼で形成され、仕上げ部41の外径は0.17mmである。一方、研磨本体10の研磨部11の内径は0.29mmである。したがって、仕上げ部41の外周面と研磨部11の内周面との間には0.6mmの隙間が形成されている。
【0022】
ところで、仕上げ部41の外周面と研磨部11の内周面との隙間内の研磨液30の圧力は、上述の隙間の大きさによって変化する。隙間が小さくなるにつれて、研磨液30の圧力は高くなる。仕上げ部41の外周面に作用する研磨液30による摩擦力の大きさは、研磨液30の圧力とほぼ比例関係にある。一方、上述の摩擦力が高いほど研磨速度(単位時間当たりの研磨重量)は大きくなる。したがって、仕上げ部41の外周面と研磨部11の内周面との隙間の大きさを変えることによって、研磨速度を自由に設定することができる。ただし、研磨部11内において、仕上げ部41外周面に接触する研磨砥粒を常時入れ替え、仕上げ部41外周面の温度上昇を抑制して良好な研磨状態を維持するために必要最低限の研磨液流量が得られる隙間を確保する必要がある。
【0023】
先ず、駆動ユニット20に被研磨材であるシャフト40を保持固定する。この時、駆動ユニット20を図1の上方へ移動させた状態でアタッチメント22にシャフト40を取付ける。
【0024】
次に、駆動ユニット20を図1の下方へ移動させ、シャフト40の研磨が必要な部分である仕上げ部41が完全に研磨部11内に収容されるようにする。
【0025】
次に、研磨部11内に研磨液30を充満させ、続いて操作盤71を操作してポンプ30を運転し研磨液30を循環させる。
【0026】
次に、操作盤71を操作して駆動ユニット20を運転しシャフト40を回転させる。これにより研磨工程が開始される。さらに、必要に応じて操作盤71を操作してシャフト40を軸方向に往復運動させる。
【0027】
ここで、シャフト40の回転速度および研磨液30の循環流量は、シャフト40の材質、仕上げ部41の直径、研磨液30の仕様等に基づいて決定される。
【0028】
研磨部11内にて研磨液30中で仕上げ部41を回転させる場合、研磨液30の仕上げ部41の径方向速度成分は0であるため、仕上げ部41の外周面と研磨液30との間に摩擦力が発生する。すなわち、研磨液30に含まれる研磨砥粒と仕上げ部41の外周面との間に摩擦力が発生し、この摩擦力により仕上げ部41の外周面が研磨される。この摩擦力は、仕上げ部41の外周面の円周方向全周において均一に作用する。このため、仕上げ部41の半径方向に作用する力、すなわち仕上げ部41を曲げるように作用する力はほぼ0である。
【0029】
本発明の一実施形態による研磨装置1における仕上げ部41の外径は0.17mmと細い。そのため、従来の研磨装置のようにラップ板を仕上げ部41の外周表面に押し当てる方法による場合、仕上げ部41に半径方向の力が作用して仕上げ部41が曲がる、または折損する等の不具合が発生し、研磨が困難であった。
【0030】
一方、上述の本発明の一実施形態による研磨装置1によれば、研磨液30中において仕上げ部41を回転させているので、研磨中において、仕上げ部41を曲げるように作用する力の大きさはほぼ0であり、仕上げ部41に曲げ、または折損等の損傷を与えることはない。したがって、直径の小さい仕上げ部41を、仕上げ部41に曲げ方向の力を与えずに研磨することができる研磨装置を実現できる。
【0031】
また、本発明の一実施形態による研磨装置1においては、研磨部11内において、研磨液30を研磨部11の軸方向に流動させると同時に、駆動ユニット20により、仕上げ部41を軸方向に往復運動させている。これにより、仕上げ部41外周面に接触する研磨砥粒を常時入れ替えることができるので、仕上げ部41外周面の研磨状態(面粗度)を均一に研磨することができる。さらに、仕上げ部41外周面の温度上昇を抑制することができる。
【0032】
図2には、本発明の一実施形態による研磨装置1の変形例を示す。この変形例では、図2に示すように、研磨部11が設けられた部材14を研磨本体10に着脱可能に装着している。研磨部11の内径は、仕上げ部41の外径や材質に応じてその最適値が異なる。そのため、仕上げ部41の仕様に対応して専用の研磨本体を用意する必要があるが、この変形例によれば、研磨部11が設けられた部材14を交換することにより、異なる仕様の仕上げ部41の研磨加工に容易に対応することができる。
【0033】
なお、以上説明した、本発明の一実施形態による研磨装置1においては、シャフト40の材質を超硬工具鋼としたが、他の材質、たとえば超硬工具鋼以外の金属材料、またはセラミックス等の非金属材料であってもよい。
【図面の簡単な説明】
【図1】本発明の一実施形態による研磨装置1の全体概略図である。
【図2】本発明の一実施形態による研磨装置1の変形例を示す断面図である。
【符号の説明】
1  研磨装置
10  研磨本体
11  研磨部
12  連絡通路(通路)
13  連絡通路(通路)
14  部材
20  駆動ユニット(駆動手段)
21  主軸(駆動手段)
22  アタッチメント(駆動手段)
30  研磨液
40  シャフト(被研磨材)
41  仕上げ部(被研磨材)
50  外部管路(通路)
60  ポンプ(循環手段)
70  制御装置
71  操作盤
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a polishing apparatus for polishing an outer peripheral portion of a cylindrical shaft, and is particularly suitable for polishing a shaft having a small diameter.
[0002]
[Prior art]
Conventionally, a polishing apparatus for polishing an outer peripheral portion of a cylindrical shaft, which is a material to be polished, has a polishing liquid containing an abrasive while holding and fixing one end side of the shaft to a main shaft of a driving means, and rotating the shaft around the center of the shaft as a rotation axis. The outer peripheral surface of the shaft is polished by contacting the wrap plate containing the above with the outer peripheral portion of the shaft and pressing it in the radial direction.
[0003]
[Problems to be solved by the invention]
However, in this method, in the case of a shaft having a small diameter, particularly a shaft having a diameter of 0.1 mm or less, the shaft has low rigidity, so that the shaft is bent or broken by the pressing force of the lap plate, so that polishing becomes difficult. There is a problem.
[0004]
The present invention has been made in view of such a problem, and an object of the present invention is to provide a polishing apparatus that can polish a shaft having a small diameter without giving a force in a bending direction to the shaft. .
[0005]
[Means for Solving the Problems]
The present invention employs the following technical means to achieve the above object.
[0006]
The polishing apparatus according to claim 1 of the present invention includes a driving unit that holds and rotates a substantially shaft-shaped workpiece, a polishing body provided with a substantially cylindrical hole-shaped polishing unit, and both ends in the axial direction of the polishing unit. , A polishing liquid containing polishing grains filled in the polishing section and the passage, and a polishing liquid in the polishing section and the passage are circulated to generate a polishing liquid flow in the polishing section in the axial direction of the polishing section. And a circulating unit for rotating a part of the material to be polished in the polishing liquid in the polishing unit by the driving unit. When the material to be polished is rotated in the polishing liquid in the polishing section, a frictional force is generated between the surface of the material to be polished and the polishing liquid due to a speed difference between the two. That is, a frictional force is generated between the polishing abrasive grains contained in the polishing liquid and the surface of the workpiece, and the surface of the workpiece is polished by the frictional force. This frictional force acts uniformly in the entire circumferential direction of the surface of the workpiece. Therefore, the force acting in the radial direction of the workpiece, that is, the force acting to bend the workpiece is substantially zero. Accordingly, it is possible to prevent a force in the bending direction from acting on the workpiece during polishing as in the conventional polishing apparatus, so that the polishing can be performed without applying a force in the bending direction to the workpiece. Equipment can be provided.
[0007]
In the polishing section, the polishing liquid is caused to flow in the axial direction of the polishing section. Thus, the abrasive grains in contact with the outer peripheral surface of the workpiece can be constantly replaced, and the outer peripheral surface of the workpiece can be uniformly polished. Furthermore, the temperature rise on the surface of the material to be polished can be suppressed and maintained at a constant temperature.
[0008]
The polishing apparatus according to a second aspect of the present invention is configured such that the driving means rotates the material to be polished and simultaneously reciprocates in the axial direction. Thus, the abrasive grains in contact with the outer peripheral surface of the workpiece can be constantly replaced, and the outer peripheral surface of the workpiece can be uniformly polished. Further, the temperature rise on the surface of the material to be polished can be suppressed and maintained at a constant temperature to make the polishing state uniform.
[0009]
A polishing apparatus according to a third aspect of the present invention includes a control unit that adjusts at least one of a rotation speed of a driving unit and a flow rate of a polishing liquid flow by a circulation unit. This makes it possible to optimally adjust the rotation speed and the polishing liquid flow rate of the workpiece according to the material or diameter of the workpiece.
[0010]
In this case, as in the polishing apparatus according to the fourth aspect of the present invention, if the apparatus is provided with control means for adjusting the axial reciprocating movement speed of the material to be polished by the driving means, the material or diameter of the material to be polished can be improved. , The axial reciprocating speed of the workpiece can be optimized.
[0011]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a polishing apparatus according to an embodiment of the present invention will be described with reference to the drawings.
[0012]
FIG. 1 shows an overall schematic diagram of a polishing apparatus 1 according to an embodiment of the present invention.
[0013]
The polishing apparatus 1 roughly includes a polishing body 10 provided with a polishing portion 11 having a substantially cylindrical hole shape, a driving unit 20 as driving means for holding and rotating a shaft 40 which is a shaft-like material to be polished, The polishing unit 30 is filled with the polishing liquid 30, and a part of the shaft 40 is polished by being rotated by the drive unit 40 while being immersed in the polishing liquid 30 in the polishing unit 11.
[0014]
The polishing main body 10 is formed of a metal material, and has a cylindrical hole-shaped polishing portion 11 as shown in FIG. In the polishing main body 10, communication passages 12 and 13, which are passages, are provided so as to communicate with both ends of the polishing section 11, respectively. Further, an external conduit 50 which is a passage is connected to the polishing main body 10, and is connected to both communication passages 12 and 13. That is, both end sides of the polishing section 11 communicate with each other via both communication passages 12 and 13 and the external conduit 50.
[0015]
The inner diameter of the polishing section 11 is set in accordance with the outer diameter of the finishing section 41 of the shaft 40 that is the material to be polished. That is, the gap formed between the inner peripheral wall surface of the polishing unit 11 and the outer peripheral surface of the finishing unit 41 is set to have a predetermined size.
[0016]
The inside of the polishing section 11, the communication passages 12, 13 and the external conduit 50 is filled with a polishing liquid 30 containing polishing abrasive grains (not shown). As the polishing liquid 30, for example, a liquid obtained by mixing an oil-soluble diamond slurry, which is a polishing abrasive, into a mixed liquid of glycerin stearate, polyethylene glycol, or the like is used.
[0017]
In the middle of the external conduit 50, a pump 60 as a circulation means is connected. By operating the pump 60, the polishing liquid 30 is circulated in the closed circuit of the polishing section 11, the two communication passages 12 and 13, and the external conduit 50, and the polishing liquid 11 is circulated in the polishing section 11 in the axial direction (in FIG. 1). A polishing liquid 30 flow (up and down direction) can be generated. In the polishing apparatus 1 according to one embodiment of the present invention, the above-mentioned polishing liquid 30 flows in the direction of the arrow in FIG. The pump 60 may be of any type as long as it is for pumping liquid. However, since the polishing liquid 30 is sucked and discharged, the pump 60 is made of a material and a structure having excellent wear resistance, for example, a diaphragm pump, an air ejector pump. It is more desirable to use such as.
[0018]
The drive unit 20, which is a drive unit for holding and rotating the shaft 40 as a material to be polished, includes an attachment 22 for detachably holding the shaft 40 at one end of a main shaft 21 rotated by, for example, an electric motor. At the time of polishing, the shaft 40 is held and fixed coaxially with the main shaft 21 by the attachment 22. The main shaft 21 of the drive unit 20 can reciprocate in the axial direction during rotation, that is, during the polishing operation. Further, the drive unit 20 is fixed to the polishing main body 10 directly or via another member (not shown) while maintaining a positional relationship where the main shaft 21 and the polishing portion 11 are coaxial.
[0019]
The control device 70 controls the operation states of the drive unit 20 and the pump 30. An operation panel 71 is connected to the control device 70. When the operator operates the operation panel 71, the control device 70 adjusts the rotation speed of the main shaft of the drive unit 20 and the discharge flow rate of the pump 30 according to the operation. Control to the level you did.
[0020]
Here, a polishing operation by the polishing apparatus 1 according to the embodiment of the present invention will be described.
[0021]
Here, in the polishing apparatus 1 according to the embodiment of the present invention, the shaft 40 is formed of carbide tool steel, and the outer diameter of the finished portion 41 is 0.17 mm. On the other hand, the inner diameter of the polishing section 11 of the polishing main body 10 is 0.29 mm. Therefore, a gap of 0.6 mm is formed between the outer peripheral surface of the finishing unit 41 and the inner peripheral surface of the polishing unit 11.
[0022]
Incidentally, the pressure of the polishing liquid 30 in the gap between the outer peripheral surface of the finishing unit 41 and the inner peripheral surface of the polishing unit 11 changes depending on the size of the above-mentioned gap. As the gap becomes smaller, the pressure of the polishing liquid 30 increases. The magnitude of the frictional force by the polishing liquid 30 acting on the outer peripheral surface of the finishing portion 41 is substantially proportional to the pressure of the polishing liquid 30. On the other hand, the polishing rate (polishing weight per unit time) increases as the frictional force increases. Therefore, the polishing rate can be freely set by changing the size of the gap between the outer peripheral surface of the finishing section 41 and the inner peripheral surface of the polishing section 11. However, in the polishing section 11, polishing abrasive grains that are in contact with the outer peripheral surface of the finishing section 41 are constantly replaced, and a minimum amount of polishing liquid necessary to suppress a temperature rise of the outer peripheral surface of the finishing section 41 and maintain a good polishing state. It is necessary to secure a gap for obtaining the flow rate.
[0023]
First, a shaft 40 as a material to be polished is held and fixed to the drive unit 20. At this time, the shaft 40 is attached to the attachment 22 with the drive unit 20 moved upward in FIG.
[0024]
Next, the drive unit 20 is moved downward in FIG. 1 so that the finishing portion 41, which is a portion of the shaft 40 requiring polishing, is completely accommodated in the polishing portion 11.
[0025]
Next, the polishing section 11 is filled with the polishing liquid 30, and then the operation panel 71 is operated to operate the pump 30 to circulate the polishing liquid 30.
[0026]
Next, the operation panel 71 is operated to drive the drive unit 20 to rotate the shaft 40. This starts the polishing process. Further, the operation panel 71 is operated as necessary to reciprocate the shaft 40 in the axial direction.
[0027]
Here, the rotation speed of the shaft 40 and the circulation flow rate of the polishing liquid 30 are determined based on the material of the shaft 40, the diameter of the finishing portion 41, the specifications of the polishing liquid 30, and the like.
[0028]
When the finishing part 41 is rotated in the polishing liquid 30 in the polishing part 11, since the radial velocity component of the finishing part 41 of the polishing liquid 30 is 0, the rotation between the outer peripheral surface of the finishing part 41 and the polishing liquid 30 is performed. Generates frictional force. That is, a frictional force is generated between the polishing abrasive grains contained in the polishing liquid 30 and the outer peripheral surface of the finishing unit 41, and the outer peripheral surface of the finishing unit 41 is polished by the frictional force. This frictional force acts uniformly on the entire outer circumferential surface of the finishing portion 41 in the circumferential direction. Therefore, the force acting in the radial direction of the finishing portion 41, that is, the force acting to bend the finishing portion 41 is substantially zero.
[0029]
The outer diameter of the finishing portion 41 in the polishing apparatus 1 according to one embodiment of the present invention is as thin as 0.17 mm. Therefore, in the case of using a method in which the lap plate is pressed against the outer peripheral surface of the finishing unit 41 as in a conventional polishing apparatus, there is a problem that the finishing unit 41 bends or breaks due to a radial force acting on the finishing unit 41. And polishing was difficult.
[0030]
On the other hand, according to the polishing apparatus 1 according to the embodiment of the present invention described above, since the finishing portion 41 is rotated in the polishing liquid 30, the magnitude of the force acting to bend the finishing portion 41 during polishing is provided. Is almost zero, and does not damage the finished portion 41 such as bending or breakage. Therefore, it is possible to realize a polishing apparatus capable of polishing the finished portion 41 having a small diameter without giving a force in the bending direction to the finished portion 41.
[0031]
In the polishing apparatus 1 according to the embodiment of the present invention, the polishing liquid 30 is caused to flow in the polishing unit 11 in the axial direction, and the finishing unit 41 is reciprocated in the axial direction by the drive unit 20. Exercise. Accordingly, the abrasive grains that come into contact with the outer peripheral surface of the finishing unit 41 can be constantly replaced, so that the polishing state (surface roughness) of the outer peripheral surface of the finishing unit 41 can be uniformly polished. Further, a rise in the temperature of the outer peripheral surface of the finished portion 41 can be suppressed.
[0032]
FIG. 2 shows a modification of the polishing apparatus 1 according to one embodiment of the present invention. In this modification, as shown in FIG. 2, a member 14 provided with a polishing unit 11 is detachably mounted on the polishing main body 10. The optimum value of the inner diameter of the polishing section 11 differs depending on the outer diameter and the material of the finishing section 41. Therefore, it is necessary to prepare a dedicated polishing body corresponding to the specification of the finishing unit 41. However, according to this modified example, by replacing the member 14 provided with the polishing unit 11, 41 can easily cope with the polishing process.
[0033]
In the polishing apparatus 1 according to the embodiment of the present invention described above, the material of the shaft 40 is made of cemented carbide tool steel. However, other materials, for example, a metal material other than cemented carbide tool steel or ceramics or the like is used. It may be a non-metallic material.
[Brief description of the drawings]
FIG. 1 is an overall schematic diagram of a polishing apparatus 1 according to an embodiment of the present invention.
FIG. 2 is a sectional view showing a modified example of the polishing apparatus 1 according to one embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Polishing apparatus 10 Polishing main body 11 Polishing part 12 Communication passage (path)
13 communication passage (passage)
14 member 20 drive unit (drive means)
21 Spindle (drive means)
22 Attachment (drive means)
30 polishing liquid 40 shaft (material to be polished)
41 Finishing part (material to be polished)
50 External pipeline (passage)
60 pump (circulation means)
70 Control device 71 Operation panel

Claims (4)

軸状の被研磨材を保持し回転させる駆動手段と、
円筒孔状の研磨部が設けられる研磨本体と、
前記研磨部の軸方向両端側を連通する通路と、
前記研磨部内および前記管路内に充満される研磨砥粒を含む研磨液と、
前記研磨部内および前記管路内の前記研磨液を循環させて前記研磨部内に前記研磨部の軸方向の研磨液流を発生させる循環手段とを備え、
前記被研磨材の一部を、前記駆動手段により前記研磨部内において前記研磨液中で回転させることを特徴とする研磨装置。
Driving means for holding and rotating the shaft-shaped workpiece,
A polishing body provided with a cylindrical hole-shaped polishing portion,
A passage communicating with both ends in the axial direction of the polishing unit,
A polishing liquid containing polishing abrasive grains filled in the polishing section and the pipeline,
Circulating means for circulating the polishing liquid in the polishing section and the pipeline to generate a polishing liquid flow in the polishing section in the axial direction of the polishing section,
A polishing apparatus, wherein a part of the material to be polished is rotated in the polishing liquid in the polishing section by the driving means.
前記駆動手段は、前記被研磨材を回転させると同時に軸方向に往復運動させることを特徴とする請求項1に記載の研磨装置。The polishing apparatus according to claim 1, wherein the driving unit reciprocates in the axial direction at the same time as rotating the workpiece. 前記駆動手段の回転速度および前記循環手段による前記研磨液流量の少なくとも一方を調整する制御手段を備えることを特徴とする請求項1または請求項2に記載の研磨装置。The polishing apparatus according to claim 1, further comprising a control unit configured to adjust at least one of a rotation speed of the driving unit and a flow rate of the polishing liquid by the circulation unit. 前記駆動手段による前記被研磨材の軸方向往復運動速度を調整する制御手段を備えることを特徴とする請求項2または請求項3に記載の研磨装置。4. The polishing apparatus according to claim 2, further comprising control means for adjusting an axial reciprocating speed of the workpiece by the driving means.
JP2002197265A 2002-07-05 2002-07-05 Polishing device Pending JP2004034258A (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006142475A (en) * 2004-11-17 2006-06-08 Nuovo Pignone Spa Vibration tumbling device
JP2012144765A (en) * 2011-01-11 2012-08-02 Hitachi Constr Mach Co Ltd Surface modification device and surface modification method
CN108747795A (en) * 2018-05-21 2018-11-06 浙江工业大学 Liquid metal polishing fluid turns round inner surface polishing system
WO2019168790A1 (en) * 2018-02-28 2019-09-06 Baker Hughes, A Ge Company, Llc Polishing systems and methods for polishing complex polycrystalline diamond compact geometries
CN112091807A (en) * 2020-09-09 2020-12-18 嘉兴顺泽金属制品有限公司 Lead screw polishing equipment and lead screw production process using same
JP6869516B1 (en) * 2020-04-22 2021-05-12 アルゴヴィジョンテクノロジズ株式会社 Fluid polishing equipment
CN114750063A (en) * 2022-06-13 2022-07-15 中国航发上海商用航空发动机制造有限责任公司 Polishing device and polishing method
CN115648052A (en) * 2022-11-07 2023-01-31 中国科学技术大学先进技术研究院 Abnormal shape tubular product burnishing and polishing device
WO2023241408A1 (en) * 2022-06-13 2023-12-21 中国航发上海商用航空发动机制造有限责任公司 Surface finishing method for micro internal flow channel, micro internal flow channel workpiece, and finishing medium

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006142475A (en) * 2004-11-17 2006-06-08 Nuovo Pignone Spa Vibration tumbling device
JP2012144765A (en) * 2011-01-11 2012-08-02 Hitachi Constr Mach Co Ltd Surface modification device and surface modification method
WO2019168790A1 (en) * 2018-02-28 2019-09-06 Baker Hughes, A Ge Company, Llc Polishing systems and methods for polishing complex polycrystalline diamond compact geometries
CN108747795A (en) * 2018-05-21 2018-11-06 浙江工业大学 Liquid metal polishing fluid turns round inner surface polishing system
JP6869516B1 (en) * 2020-04-22 2021-05-12 アルゴヴィジョンテクノロジズ株式会社 Fluid polishing equipment
CN112091807A (en) * 2020-09-09 2020-12-18 嘉兴顺泽金属制品有限公司 Lead screw polishing equipment and lead screw production process using same
CN114750063A (en) * 2022-06-13 2022-07-15 中国航发上海商用航空发动机制造有限责任公司 Polishing device and polishing method
WO2023241408A1 (en) * 2022-06-13 2023-12-21 中国航发上海商用航空发动机制造有限责任公司 Surface finishing method for micro internal flow channel, micro internal flow channel workpiece, and finishing medium
CN115648052A (en) * 2022-11-07 2023-01-31 中国科学技术大学先进技术研究院 Abnormal shape tubular product burnishing and polishing device

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