JP2004034194A - Mold having microstructure and method for producing molded body using this mold - Google Patents

Abstract

An object of the present invention is to provide a mold having a cavity having a fine structure and excellent in mold releasability.
A cavity and / or a core having a size of less than 1 mm is provided on a surface of a substrate selected from the group consisting of ceramics, an intermetallic compound, glass, and amorphous carbon. In this mold, selected from the group consisting of glass, metals, metal complexes, semiconductors, ceramics, polymers, polymer precursors, biopolymers, sol or gel substances, or mixtures thereof dissolved or dispersed in a solvent. And a molded body can be obtained.
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a mold provided with cavities and / or cores of microstructures of micrometer (μm) size, preferably ultra-fine structures of smaller nanometer (nm) size, a method of manufacturing the same, and the mold. The present invention relates to a method for producing a molded article having a microstructure, preferably an ultrafine structure, using the same.
[0002]
[Prior art]
In recent years, nanotechnology has been developed, and molded articles having a fine structure have been used in various fields. For example, molded articles having a fine structure such as a semiconductor circuit, a DNA chip substrate, a nozzle of an ink jet head, and a sensor are manufactured. These molded products require high precision. For example, the smaller the nozzle diameter of the inkjet head is, the more information can be processed.
[0003]
In addition, demand for micromachines and their components is increasing. A precise microstructure and strength are also required for a molded product constituting these micromachines and parts thereof.
[0004]
2. Description of the Related Art Metal processing using a micro drill, a micro discharge, a laser beam (for example, a microsecond laser), or the like is performed. However, in these methods, a sharp processed surface cannot be obtained, so that there is also a problem that it is difficult to obtain a precise fine molded body.
[0005]
[Problems to be solved by the invention]
Therefore, it is desired to efficiently produce a molded body having a high-precision microstructure, and therefore, a mold having a fine structure for producing such a molded body and having a good mold release property and a processing method thereof. The development of is desired.
[0006]
[Means for Solving the Problems]
The present invention provides a mold in which a cavity and / or a core having a size from micrometer to nanometer is provided on a surface of a substrate selected from the group consisting of ceramics, intermetallic compounds, glass, and amorphous carbon. I do.
[0007]
The present invention also relates to a method for producing this type, wherein a surface of a base material selected from the group consisting of ceramics, intermetallic compounds, glass, and amorphous carbon is coated with a focused ion beam from micrometer to nanometer. A cavity and / or core of up to a size.
[0008]
Further, the present invention relates to a glass, a metal, a metal complex, a semiconductor, a ceramic, a polymer, a polymer precursor, a biopolymer, a sol-like or gel-like substance dissolved or dispersed in a solvent, or a mixture thereof. A method for producing a molded article is provided, comprising a step of molding a selected material using a cavity and / or a core of the mold.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
The mold of the present invention comprises a cavity having a size from micrometer (μm) to nanometer (nm) formed on the surface of a substrate selected from the group consisting of ceramics, intermetallic compounds, glass, and amorphous carbon. A core is provided. In the present specification, the term “cavity” means a concave portion (hole) or a hole having a fine structure. The fine structure may have irregularities or holes. Further, the term “core” means a projection having a fine structure, but the fine structure may have irregularities or holes. The cavities and holes in the core can serve as supply channels for the molding material.
[0010]
(Base material)
Examples of the ceramics serving as the base material of the mold include ceramics such as oxides, carbides, nitrides, and borides.
[0011]
Examples of the intermetallic compound include TiAl, Ni ₃ Al, NiAl, NiTi, and FeSi ₂ .
[0012]
Examples of the glass include amorphous glass such as soda-lime glass and borosilicate glass and various crystallized glasses.
[0013]
Amorphous carbon is formed, for example, by molding a resin such as a phenol resin, a polyimide resin, an epoxy resin, a polycarbodiimide resin, a furan resin, and a furfural resin, in a non-oxygen atmosphere (in a vacuum or in an inert gas atmosphere such as nitrogen or argon). ), At 500 to 3000 ° C. It is preferable that the amorphous carbon content after firing is 65% by weight or more in order to maintain the flatness of the substrate. Further, since the amorphous carbon base material is conductive and has an appropriate volume resistance value, it can be used as a heating element by passing a weak current. The volume resistance of amorphous carbon as a heating element is preferably 10 ⁻² Ω · cm or less. Further, an intermetallic compound can also be used as a heating element.
[0014]
The ceramics, intermetallic compounds, glass, and amorphous carbon used in the present invention have a cavity or a core formed by using a focused ion beam (hereinafter, sometimes referred to as FIB) apparatus as compared with metals such as iron. In this case, since the surface is not easily oxidized, the accuracy of the cavity can be maintained. In particular, in the case of a cavity or a core having a nanometer (nm) size, metal is not preferable because if the surface of the cavity or the core is oxidized, the accuracy is lost. Further, as described later, a metal flake may be used as a mold. However, when a metal such as iron is used as a flake, there is a problem that the strength of the base material is reduced due to oxidation.
[0015]
In general, silicon or the like is used as a mold because of easy processing, but the amorphous carbon and the intermetallic compound are excellent in thermal conductivity. Ceramics and intermetallic compounds are easily used as high-strength materials. For glass and the like, transparency can be used. Furthermore, these substrates have the advantage of being excellent in durability.
[0016]
When a mold comprising these substrates is used, in the production of the molded article, the mold releasability of the molded article from the mold is good. In particular, amorphous carbon is excellent in the releasability of a molded article.
[0017]
Also, these substrates can withstand high temperature processing. Therefore, it is also possible to sinter the molded body if necessary.
[0018]
Ceramics, intermetallic compounds, glass, and amorphous carbon can use these flakes as molds.
[0019]
(Cavity and / or core creation)
In order to provide (engrave) a cavity and / or a core having a size from micrometer (μm) to nanometer (nm) on the substrate surface, it is preferable to use FIB. By using FIB, a cavity having a finer and sharper shape can be obtained as compared with a microdrill, a microdischarge, a microsecond laser, or the like. FIB is particularly useful for creating nanometer-sized, fine and sharply shaped cavities.
[0020]
As the FIB apparatus, for example, an FIB processing observation apparatus (for example, FB-2000A or the like) manufactured by Hitachi High-Technologies Corporation is used. The variable iris of these devices can be adjusted to form micrometer-sized as well as nanometer-sized cavities.
[0021]
The shape of the cavity and / or the core provided (engraved) on the base material is not particularly limited. The cavity and / or the core may be formed according to the desired shape of the molded body. For example, U-shaped or V-shaped grooves, which may have a step, square, rectangular, cylindrical or conical concave portions (holes), convex portions or holes, or a combination thereof, or a more complicated shape Cavities and / or cores having a microstructure are illustrated.
[0022]
In this way, the mold of the invention is provided with cavities and / or cores of a size from micrometer (μm) to nanometer (nm) on the surface of the substrate. Here, the term “micrometer size” means that the largest portion (width, depth) in the cavity and / or core has a size of micrometers. The nanometer size means that the smallest (shortest) portion only needs to be nanometer size. However, in any case, when the cavity and / or the core have a continuous long shape (for example, a groove shape), the length may exceed the length of micrometers.
[0023]
The molds of the present invention may be formed with a FIB laser alone, or in combination with a FIB laser and other methods, such as MEMS methods such as micromachine, microdischarge, nanosecond laser, microsecond laser or femtosecond laser. Good.
[0024]
The obtained mold may be used alone, or a pair of molds may be used in combination (combination of a plurality of molds). By using in combination, a molded article having a more complicated shape can be produced.
[0025]
In addition, the core may be formed from ceramics, an intermetallic compound, glass, amorphous carbon, or a mixture thereof by using an inverted cavity formed by using the cavity. Alternatively, for example, it may be formed by an electroforming mold method, or may be formed of another material (for example, a polymer).
[0026]
(Manufacture of molded products)
The molded article is selected from the group consisting of glass, metal, metal complex, semiconductor, ceramics, polymer, polymer precursor, biopolymer, sol-like or gel-like substance dissolved or dispersed in a solvent, or a mixture thereof. The material to be molded (hereinafter referred to as a molded body material) is prepared by using the cavity and / or the core of the mold of the present invention in a method suitable for each material, for example, removal of solvent, solidification, hardening, polymerization, melting, and firing. It is obtained by molding using a method such as tying alone or in combination, and peeling it from the mold. The supply of the molding material to the mold is performed using an inkjet having a nozzle having a fine structure.
[0027]
Glass, which is a material used for manufacturing the molded article of the present invention, is not particularly limited.
[0028]
There is no particular limitation on the metal used as the material for producing the molded article of the present invention. Ni, Cu, Ag, Au, or powders of these alloys are preferably used.
[0029]
As the metal complex, a complex such as Ni, Cu, Ag, Au, and Ti is preferably used.
[0030]
There is no particular limitation on the type of ceramic powder that is a material used for producing the molded article of the present invention, but ceramic powder such as oxide, carbide, and nitride is preferably used.
[0031]
A thermoplastic resin or a thermosetting resin is used as a polymer and a precursor thereof, which are materials used for manufacturing the molded article of the present invention. For example, polystyrene, polypropylene, polyvinyl alcohol, polyethylene terephthalate, polybutylene terephthalate, polyamide (nylons), polycarbonate, polyphenylene sulfide, polyether sulfone, polyamide imide, polyether imide, polysulfone, methacrylic resin, acrylate resin, poly Arylate and the like.
[0032]
Examples of the polymer precursor include an unsaturated polyester resin polymer precursor. A precursor of a thermosetting resin or a photocurable resin is preferably used. For example, a polymerization precursor such as an epoxy resin, a polyurethane resin, a silicone resin, a diallyl phthalate resin, a formaldehyde resin, a phenol resin, and an amino resin is used. The photocurable resin is cross-linked and cured by light energy such as ultraviolet rays and radiation. If necessary, a release agent may be contained.
[0033]
Examples of the biopolymer include proteins (for example, collagen), polysaccharides, ES embryo cells and the like.
[0034]
Examples of the sol-like or gel-like substance include agar, jelly, tongue, mucous membrane and the like, and further, a substance prepared using a metal oxide, a metal alkoxide or the like. Examples of the metal for preparing the sol or gel material include Si, Zn, Ti, Ge, V, Cr, Mn, Fe, Ni, Co, Cu, In, Cd, Ta, Y, and Ba. Can be The sol or gel substance also includes a sol or gel composed of a biological substance and a sol or gel composed of an organic polymer.
[0035]
The size of the material dispersed in the solvent may be determined according to the purpose. Melting and sintering are possible if the particle size is up to nanometer size.
[0036]
The molded body is manufactured, for example, as follows. First, the molding material is dissolved or dispersed in an appropriate solvent, and injected into a mold using, for example, an inkjet nozzle, and the solvent is evaporated by heating or reducing the pressure as necessary. This operation is repeated until the mold is filled with the molding material. After the molding material is filled, a desired molding can be obtained by molding using a method such as solidification, hardening, polymerization, melting, and sintering alone or in combination, as necessary. In this repetitive step, a laminate is formed by filling different materials. Further, the inclined molded body can be formed by using a repeating process.
[0037]
In addition, it is preferable that the production of the molded body is performed under normal pressure or reduced pressure. In the case of normal pressure, if the mold is preliminarily warmed, the solvent is immediately evaporated, so that the molding material can be continuously injected. When amorphous carbon or an intermetallic compound is used as a mold, it can be used as a heating element only by energizing.
[0038]
The molded article manufactured by the above-described method is used for optical communication applications, electronics applications, micromachines or parts thereof.
[0039]
A molded article obtained from a polymer or a polymer precursor is used for optical communication applications such as microcircuits, optical switches, waveguides, and spectroscopes, and electronic applications such as organic semiconductor circuits.
[0040]
A molded product obtained from a metal, a metal complex, a sol or gel substance, or a semiconductor is used as a metal semiconductor circuit. Further, a molded body (metal molded body, sintered metal oxide molded body, ceramic molded body) obtained from these molded bodies and ceramics is used as a micromachine or a part thereof. For example, it is preferably used as a drilling head chip or a gear in a micromachine.
[0041]
The above-described micromachine and its components may require a certain thickness. In this case, a thin piece of the base material can be used as a mold. For example, a flake having a thickness required by the gear or the sleeve may be prepared, and the required shape of the flake may be punched out and used as a mold. Specifically, a patch plate is placed on the lower surface of a flake that has been punched out of the shape of a gear or a sleeve, filled with inorganic / metal powder, and further placed on the upper surface, and heated by pressing while heating. Parts such as gears and sleeves of a micromachine having a thickness of a size and a precise structure can be obtained. If necessary, a hole can be provided for the FIB to pass the gear through the shaft.
[0042]
In the same manner as described above, a resin-made micromachine or a part thereof can be manufactured using a die obtained by punching a thin piece into a desired shape.
[0043]
When using ES embryo cells, the mold is shaped into a desired artificial organ, filled with a medium suitable for culturing the ES embryo cells, and transplanted and cultured with the ES embryo cells to obtain the desired shape. An artificial organ can be obtained. Further, for example, micro-parts for biopsy, micro-parts for drug delivery system (DDS) (for example, micro-capsules), molded articles for forming artificial organs used for regenerating ES embryo cells as artificial organs, and the like. Manufactured.
[0044]
【Example】
(Example 1)
Using an FIB processing observation device FB-2000A, microprocessing was performed using amorphous carbon as a base material and a combination of concave portions and micropores of various shapes to form a pattern circuit mold. FIG. 1 shows a schematic diagram of the mold thus obtained. 1A is a plan view of the obtained pattern, FIG. 1B is a cross-sectional view taken along line AA, and FIG. 1C is a cross-sectional view taken along line BB. In this pattern, each groove had a width of 70 nm and a depth of 150 nm, the interval between the grooves was 500 nm, and the diameter of each hole was 200 nm.
[0045]
(Example 2)
Using a FIB processing observation device FB-2000A, a fine structure made of tungsten was formed, and ultrafine holes of about 30 nm and about 80 nm were formed in the fine structure. FIG. 2 shows an SEM photograph of the mold (fine holes) thus obtained. In this figure, the size of the leftmost hole was approximately 100 nm, and the size of the rightmost hole was 30 nm. The holes were formed at an acceleration voltage of 30 kV and a current of 2.2 to 2.4 μA.
[0046]
(Example 3)
Using an FIB processing observation apparatus FB-2000A, cavities having a width of 2 μm and a depth of 10 μm were formed vertically and horizontally using amorphous carbon as a base material so that the distance between the cavities was 5 μm. FIG. 3 shows an SEM photograph (magnification: 5000 times) of the resulting mold. The silicone resin was poured into the mold, cooled, and peeled from the mold. As a result, a silicone resin molded body having a fine structure was obtained. FIG. 4 shows an SEM photograph of the molded body (at a magnification of 7000 times). This result indicates that a compact having a fine structure can be obtained from an amorphous carbon mold having a fine structure.
[0047]
【The invention's effect】
Since the mold of the present invention has high strength, excellent durability, good releasability, and is provided with fine cavities and / or cores on a substrate capable of withstanding high-temperature treatment, various types of fine molded products are provided. Alternatively, a biomaterial is obtained. These fine compacts are used in fields such as optical communication applications, electronics applications, micromachines or parts thereof, and artificial organs.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of a pattern shape of a mold formed on amorphous carbon. 1A is a plan view, FIG. 1B is a sectional view taken along line AA of FIG. 1A, and FIG. 1 is a sectional view taken along line BB of FIG. 1A.
FIG. 2 is an SEM photograph showing the shape of a mold (fine holes) formed in amorphous carbon.
FIG. 3 is an SEM photograph showing a shape of a cavity formed in amorphous carbon.
FIG. 4 is an SEM photograph showing a shape of a resin molded body transferred from a cavity formed in amorphous carbon.

Claims (3)

A mold comprising a substrate selected from the group consisting of ceramics, intermetallics, glass, and amorphous carbon, provided with cavities and / or cores of micrometer to nanometer size on the surface. The method for manufacturing a mold according to claim 1, wherein the surface of a substrate selected from the group consisting of ceramics, an intermetallic compound, glass, and amorphous carbon is formed from a micrometer to a nanometer using a focused ion beam. A cavity and / or a core of the same size. Dissolved or dispersed in a solvent glass, metal, metal complex, semiconductor, ceramics, polymer, polymer precursor, biopolymer, sol or gel-like substance, or a material selected from the group consisting of a mixture thereof, A method for producing a molded article, comprising a step of molding using the cavity and / or the core of the mold according to claim 1.

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