JP2004028329A - Linear motion stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of machining a steel ball guide groove for a linear motion stage, which can accurately form both guide grooves wherein a steel ball is interposed, and to provide a device thereof. <P>SOLUTION: A lower plate 2 as a fixed member of the linear motion stage and an upper plate 3 as a movable member are inserted into a recessed part 25 of a work holder 21 in the condition that guide rail parts 4 and 5 face to each other, and a presser means 31 and a pushing means 32 fix the lower plate 2 and the upper plate 3. An electric discharge machining wire is inserted between the guide rails, and the work holder 21 is two-dimensionally moved in a horizontal surface by a two-dimensional moving device to form the guide groove, in which the steel ball is to be interposed, in opposite surfaces of the guide rail parts 4 and 5. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a linear motion stage in which a movable member moves linearly with respect to a stationary member.
[0002]
[Prior art]
2. Description of the Related Art In a laboratory or the like, a linear motion stage is used as a device for accurately linearly moving a research instrument or a research target. In this linear motion stage, an upper plate, which is a movable member, is mounted on a lower plate, which is an immovable member, so as to be able to linearly move via steel balls constituting roller bearing means. Etc. are fixed. In a conventional linear motion stage, two guide rail members having steel ball guide grooves are attached to the lower surface of the upper plate at intervals, and the steel ball guide grooves of the lower plate disposed between these guide rail members are provided. The steel ball guide groove and the steel ball guide groove of the guide rail member are laterally opposed to each other, and a steel ball is interposed between the two guide grooves.
[0003]
According to this conventional linear motion stage, at least four members, an upper plate, a lower plate, and a guide rail member, are required, which causes problems of a complicated structure and complicated assembly work. It is known that both upper and lower plates are provided with guide rail portions facing each other, and steel balls are interposed in guide grooves formed in these guide rail portions. In this linear motion stage, guide grooves are formed on the upper plate and the lower plate in order to form guide grooves on the surfaces facing the guide rails.
[0004]
[Problems to be solved by the invention]
Since the linear motion stage is a precision device that requires the upper plate to move accurately and smoothly relative to the lower plate, the shape and positional relationship of both guide grooves with respect to the steel ball must be highly accurate. is necessary. However, in the above-mentioned linear motion stage, it was difficult to form both guide grooves formed by processing performed for each of the upper plate and the lower plate with a high-precision shape and a positional relationship with the steel balls.
[0005]
SUMMARY OF THE INVENTION An object of the present invention is to provide a linear motion stage capable of performing high-precision linear motion by making both guide grooves into which steel balls intervene with high precision.
[0006]
[Means for Solving the Problems]
As means for solving the above-mentioned problems, the first means is:
Immovable members,
And a movable member that can move linearly with respect to the immovable member.
These immovable member and movable member are both formed in a shape of a block-shaped member having a guide rail portion extending in the linear movement direction of the movable member and guiding the linear movement of the movable member,
The guide rail portions of each other are opposed to each other in the width direction of the immovable member and the movable member, and a guide groove having a cross section of an arc having a surface in contact with the steel ball is formed on an opposing surface of these guide rail portions. Is formed,
A linear motion stage in which a steel ball is interposed in the guide groove, and the steel ball rolls to perform a linear motion of the movable member.
A coil spring extending in the length direction of the guide rail portion is provided between the immovable member and the movable member, and one end of the coil spring is connected to the immovable member, and the other end is connected to the movable member. Joined,
Screw-type feed means is attached to the immovable member via a bracket,
The screw-type feed means includes a rotary knob, a spindle abutting on the movable member, and a spindle abutting on the movable member with forward or reverse rotation of the rotary knob being moved forward or forward in the linear movement direction of the movable member. And a screw feed mechanism for retracting,
When the rotary knob is rotated forward, the spindle advances, whereby the movable member advances with respect to the immovable member while extending the coil spring.On the other hand, when the rotary knob is rotated reversely, the spindle retracts. Wherein the movable member is retracted with respect to the immovable member by the return spring force of the coil spring.
The second means is
The immovable member and the movable member are formed into a shape having at least two guide rail portions, so that each member forms at least two pairs of the guide rail portions facing each other,
The linear motion stage according to the first means, wherein the coil spring is disposed between one pair of guide rails and the other pair of guide rails.
The third means is
A linear motion according to a second means, wherein the one guide rail portion pair and the other guide rail portion pair are formed at substantially both end portions in the width direction of the immovable member and the movable member. The stage.
The fourth means is
A stopper plate having a long hole extending in a linear movement direction of the movable member is fixed to a side surface of the immovable member,
A screw hole into which a stopper screw is screwed is provided on a side surface of the movable member,
After inserting the stopper screw into the elongated hole of the stopper plate, screwing into the screw hole, and further tightening the stopper screw to the end, the movable member is fixed at that position with respect to the immovable member. A linear motion stage according to any one of the first to third means, wherein:
The fifth means is
On both end surfaces of each guide rail portion extending in the linear movement direction of the movable member, a screw hole into which a holding screw having a large diameter head is screwed is provided,
The large diameter head of the cap screw screwed into the screw hole prevents the steel ball from falling off from the end of the guide rail portion. It is a linear motion stage according to such means.
[0007]
Further, in the method of machining a steel ball guide groove of the linear motion stage, the stationary member and the movable member constituting the linear motion stage together with the stationary member are provided on the stationary member and the movable member, and are movable with respect to the stationary member. The guide rails for guiding the linear motion of the members are in a fixed positional relationship facing each other, and a wire inserted between the guide rails is used as one electrode for electric discharge machining, and the immovable member and the movable member are used as the other electrode. The two-dimensional movement of the immovable member and the movable member with respect to the wire in a plane perpendicular to the extending direction of the wire while maintaining the positional relationship in the fixed state with respect to the wire causes these surfaces to face each other between the guide rail portions. A guide groove of a steel ball interposed between the guide rail portions is formed by electric discharge machining.
[0008]
According to this processing method, the immovable member and the movable member move two-dimensionally in a plane perpendicular to the extending direction of the wire while maintaining the positional relationship of the fixed state, so that the two-dimensional movement corresponds to the size of the steel ball. The shape and positional relationship of the two guide grooves formed on the opposing surfaces of the guide rail portions by electric discharge machining are highly accurate in relation to the steel balls. For this reason, the roller bearing means constituted by the two guide grooves and the steel balls can accurately and smoothly linearly move the movable member with respect to the immovable member.
[0009]
In the above description, the stationary member and the movable member may be in a vertical relationship, in other words, may be upper and lower plates, or may be in a left and right relationship, in other words, two side plates. Further, the immobile member and the movable member may be plate-shaped members or block-shaped members, and their shapes are arbitrary.
[0010]
Further, the two-dimensional motion may be a simple circular motion or a complicated two-dimensional motion in which a recess for a lubricating oil reservoir is provided in the guide groove.
[0011]
When the guide grooves of steel balls interposed between these guide rails are formed by electric discharge machining on the opposing surfaces of the guide rails, and the guide grooves are finished by honing, the fixing of the immovable member and the movable member It is preferable to perform honing while maintaining the positional relationship in the state.
[0012]
With this configuration, the positional relationship between the guide grooves at the end of the electric discharge machining is directly brought into the honing process, and the guide grooves finished by the honing process have high precision.
[0013]
The linear motion stage steel ball guide groove machining apparatus includes an immovable member, and a movable member that forms a linear motion stage together with the immovable member. The immovable member and the movable member are provided on the immovable member and the movable member. A recess is provided for inserting the guide rails for guiding the linear motion in a state where the guide rails face each other, and a hole is formed at the bottom of the recess for passing a wire for electric discharge machining inserted between the guide rails. A workpiece holder, a two-dimensional motion device for two-dimensionally moving the workpiece holder in a plane perpendicular to the direction in which the wire extends, and a stationary member and a movable member interposed between the stationary member and the movable member. And pressing means for pressing in opposite directions to press against the inner walls of the concave portion facing each other.
[0014]
According to this processing apparatus, when the immovable member and the movable member are inserted into the concave portion of the work holding body and the immovable member and the movable member are pressed against the inner walls of the concave portion by pressing means, the immovable member and the movable member are fixed. When the workpiece holder is two-dimensionally moved by the two-dimensional motion device, a guide groove of a steel ball is formed on the opposing surfaces of the guide rails by electric discharge machining with a wire.
[0015]
In this processing apparatus, in order to bring the stationary member and the movable member into a fixed positional relationship, the work of inserting the stationary member and the movable member into the concave portion of the work holding body and pressing the movable member against the inner wall of the concave portion by pressing means. , The simplification of the operation and the simplification of the structure of the device can be achieved.
[0016]
The work holding body may be, for example, itself a single block, or may be formed by a combination of a plurality of members.
[0017]
Further, the width dimension of the concave portion of the work holding member may be exactly the same as the width dimension of the stationary member or the movable member, or may be larger than the width dimension of the stationary member or the movable member.
[0018]
When the width dimension of the concave portion of the work holding member is larger than the width dimension of the immovable member and the movable member, the work holding member includes the immovable member and the movable member inserted in the concave portion from one side in the width direction to the other side. To press the stationary member and the movable member against the inner wall of the concave portion.
[0019]
The pressing means for intervening between the immovable member and the movable member and pressing the immovable member and the movable member in directions away from each other to press the opposing inner walls of the concave portion of the work holding body includes, for example, a wedge-shaped member. Or a plurality of parts such as two parts.
[0020]
An example of the pressing means composed of a plurality of parts includes a screw shaft member and a nut member into which the screw shaft member is screwed, and the screw shaft member has a taper tapered in the screw shaft member screwing direction. The nut member is formed with a split groove extending in the screw shaft member screwing direction.
[0021]
According to this pressing means, when the screw shaft member is screwed into the nut member and screwed forward, the nut member receives a pushing-expanding force from the tapered portion and is expanded and deformed by the split groove, so that the nut member is movable with the immovable member. The members and the members are pressed in directions away from each other, and are pressed against opposing inner walls of the concave portion of the work holding body. The pressing force can be made appropriate by adjusting the amount of screwing of the screw shaft member.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described below with reference to the drawings. First, the linear motion stage will be described. FIG. 1 is an overall view of the linear motion stage 1, and FIG. 2 is an exploded view of main members constituting the linear motion stage 1.
[0023]
The linear motion stage 1 includes a lower plate 2 fixed to a laboratory desk or a work table or the like and serving as an immovable member, and an upper plate 3 serving as a movable member capable of linearly moving with respect to the lower plate 2. On the upper surface of the lower plate 2 and the lower surface of the upper plate 3, two guide rail portions 4 and 5 extending in the direction of linear movement of the upper plate 3 are protruded. The guide rail portion 4 of the lower plate 2 and the guide rail portion 5 of the upper plate 3 face each other in the width direction of the lower plate 2 and the upper plate 3, and as shown in FIG. Guide grooves 6 are formed, and steel balls 7 are interposed between the guide grooves 6. A screw hole 9 into which a holding screw 8 is screwed is provided on both end surfaces of the guide rail portions 4 and 5, and the steel ball 7 is formed by the large diameter head of the holding screw 9 screwed into the screw hole 9. It is prevented from falling off from the ends of 4,5.
[0024]
Two coil springs 10 are provided between the lower plate 2 and the upper plate 3 and extend in the longitudinal direction of the guide rails 4 and 5. One end of each of the coil springs 10 is connected to the lower plate 2. The other end is connected to the upper plate 3, respectively, so that when the coil spring 10 extends beyond its natural length, the upper plate 3 linearly moves with respect to the lower plate 2 by the spring force of the coil spring 10. ing.
[0025]
As shown in FIG. 1, a screw-type feeding means 12 is attached to the front surface of the lower plate 2 via a bracket 11, and the screw-type feeding means 12 rotates the rotary knob 13 forward and backward to rotate the upper plate 3. The spindle 15 in contact with the pressure receiving member 14 is moved forward and backward by a screw feed mechanism. A stopper plate 16 is fixed to a side surface of the lower plate 2, and a screw hole 18 in FIG. 3 into which a screw shaft portion at the tip of a stopper screw 17 is screwed is provided on a side surface of the upper plate 3. After being inserted into the long hole 16A of the washer 19 and the stopper plate 16, the screw is screwed into the screw hole 18, and the stopper screw 17 is further tightened to the end. The upper plate 3 is fixed at that position with respect to the lower plate 2 due to the frictional force.
[0026]
From the above, when the rotary knob 13 is rotated forward after the stopper screw 17 is loosened, the upper plate 3 advances with respect to the lower plate 2 while the coil spring 10 is extended by the advance of the spindle 15, while the rotary knob 13 is rotated. Is rotated in reverse, the upper plate 3 retreats with respect to the lower plate 2 by the return spring force of the coil spring 10 with the retraction of the spindle 15, and when the upper plate 3 reaches a desired position with respect to the lower plate 2. When the stopper screw 17 is tightened, the upper plate 3 can be fixed at that position. For this reason, if a research instrument, a research object, or the like is attached to the upper plate 2 with bolts using a bolt hole 20 formed on the upper surface of the upper plate 3, the research instrument, the research object, or the like is rotated by a rotary knob. After moving by the moving distance indicated by the scale 13A of 13, it can be stopped at that position.
[0027]
The linear motion of the upper plate 3 with respect to the lower plate 2 is performed by rolling the steel balls 7 interposed between the guide grooves 6 of the guide rail portions 4 and 5, and therefore, these guide grooves The precision of the steel plate 6 with respect to the steel ball 7 is an important factor affecting the linear motion precision of the upper plate 3.
[0028]
FIG. 3 et seq. Show a processing method for forming the guide grooves 6 in the guide rail portions 4 and 5 of the lower plate 2 and the upper plate 3, and an apparatus used to carry out this processing method. Until the state shown in FIG. 3, the lower plate 2 and the upper plate 3 are formed from a plate-like material into a shape having guide rail portions 4 and 5 by milling, and are punched by a drilling machine and threaded. Thus, the screw holes 9 and the bolt holes 20 are formed, and the lower plate 2 and the upper plate 3 are subjected to quenching, surface grinding, and surface coating.
[0029]
FIG. 3 shows a workpiece holder 21 used when forming the guide grooves 6 in the guide rail portions 4 and 5 of the lower plate 2 and the upper plate 3 by electric discharge machining. The work holder 21 includes a bottom plate 22, a main body 23 connected to the bottom plate 22, and a receiving stand 24 fixed on the main body 23. The main body 23 has upper and lower surfaces as shown in FIG. A through-hole 23A is provided, and a recess 22A is formed at a location of the bottom plate 22 corresponding to the through-hole 23A. The lower plate 2 and the upper plate 3 which are works are vertically arranged on the work holder 21 by the through-holes 23A and the recesses 22A (in other words, the longitudinal directions of the guide rails 4 and 5 are set in the vertical direction). ) This means that a flat rectangular recess 25 for insertion is formed.
[0030]
In FIG. 3, the width W1 of the recess 25 is slightly larger than the width W2 of the lower plate 2 and the upper plate 3. Further, the depth dimension T1 perpendicular to the width direction of the concave portion 25 is the sum of the thickness directions of the lower plate 2 and the upper plate 3 when the lower plate 2 and the upper plate 3 face each other with a predetermined gap therebetween. It is the same as the dimension (in other words, the thickness dimension of the linear motion stage 1) T2. The two receiving bases 24 are arranged on both sides in the concave portion 25, and a hole 26 is formed in the bottom of the work holder 21 as shown in FIG.
[0031]
Further, as shown in FIG. 5, a screw hole 28 into which a push screw 27 is screwed is formed on a side surface of the work holding body 21, and a small hole into which the spacer 29 is inserted down to the recess 25 at the bottom of the screw hole 28. A hole 30 is drilled. The push screw 27 and the spacer 29 press the lower plate 2 and the upper plate 3 inserted into the concave portion 25 from one side in the width direction to the other side, and the lower plate 2 and the upper plate 3 It constitutes a pressing means 31 for pressing against the inner wall.
[0032]
In the present embodiment, a pressing means 32 shown in FIG. 4 for pressing the lower plate 2 and the upper plate 3 in directions away from each other and pressing them against two opposing inner walls of the recess 25 is also used. The pressing means 32 includes a screw shaft member 33 and an elongated rectangular nut member 34 into which the screw shaft member 33 is screwed. The neck of the screw shaft member 33 tapers in the screwing direction of the screw shaft member 33. The nut member 34 is formed with a split groove 34A extending in the longitudinal direction of the nut member 34, that is, in the screwing direction of the screw shaft member 33. When the screw shaft member 33 screwed into the nut member 34 is screwed with a tool such as a hexagon wrench, the nut member 34 expands and deforms from the split groove 34A by the spreading force received from the tapered portion 33A. In order to hold the plate 3 on the work holder 21, the lower plate 2 and the upper plate 3 are inserted into the recess 25 in close contact with each other, and the lower plate 2 and the upper plate 3 are pressed by the pressing means 31 including the push screw 27 and the spacer 29. Is pressed against the inner wall in the width direction of the concave portion 25 for positioning. As shown in FIG. 3, two nut members 34 into which the screw shaft members 33 are screwed are inserted between the lower plate 2 and the upper plate 3, specifically, two guides of the upper plate 3. The lower plate 2 and the upper plate 3 are inserted into both sides of the ridge 3A formed in the middle of the rail 5, and the nut member 34 is expanded and deformed by the screw shaft member 33 being advanced by the rotation of the tool. Are pressed by the nut member 34 in directions away from each other, and pressed against two opposing inner walls of the recess 25.
[0033]
Accordingly, the lower plate 2 and the upper plate 3 are in a fixed positional relationship in which the guide rail members 4 and 5 are opposed to each other in the width direction of the lower plate 2 and the upper plate 3, and the recess 25 of the work holder 21 is formed. This positional relationship is a correct positional relationship between the lower plate 2 and the upper plate 3 when the linear motion stage 1 is assembled by the lower plate 2 and the upper plate 3 and the like.
[0034]
Next, a work of bridging each of the conductive plates 35 shown in FIG. 3 between the lower plate 2 and the upper plate 3 and the cradle 24 is performed. In this operation, set screws 36 are inserted into holes provided at both ends of each energizing plate 35, and set screws 36 of the lower plate 2 and the upper plate 3 are formed in advance in the lower plate 2 and the upper plate 3, respectively. The screw 24 is screwed into the screw hole 9 and the set screw 26 on the receiving base 24 is screwed into a screw hole 37 formed in the receiving base 24. As a result, the lower plate 2 and the upper plate 3 are coated with the surface as described above. As a result, even if the surfaces of the lower plate 2 and the upper plate 3 are in a non-conductive state, the lower plate 2 and the upper plate 3 The space between the holder 21 and the holder 21 is brought into a conductive state via the conducting plate 35 and the set screw 36.
[0035]
The work holder 21 in which the lower plate 2 and the upper plate 3 are inserted and set in the recesses 25 as described above is fixed to the upper surface of the two-dimensional motion device 38 shown in FIG. The binary motion device 38 is for moving the workpiece holder 21 two-dimensionally in a horizontal plane, and includes first and second motion means 39 and 40 stacked vertically. These movement means 39, 40 are provided with a lower substrate 41 and an upper movement plate 42. The movement plate 42 is advanced with respect to the substrate 41 by driving means 43 including a motor, a feed screw mechanism, and the like. fall back. The movement directions of the movement plate 42 of the first movement means 39 and the movement plate 42 of the second movement means 40 are two directions which are perpendicular to each other in the horizontal plane, and the second movement means is placed on the movement plate 42 of the first movement means 39. Since the substrate 41 of 40 is fixed, the driving means 43 of the first and second moving means 39 and 40 are driven while being controlled by the control device, thereby fixing the work holding body 21, in other words, to the work holding body 21. The lower plate 2 and the upper plate 3 held in the state can be moved two-dimensionally in a horizontal plane.
[0036]
The two-dimensional motion device 38 described above is set on the work table 44 of the electric discharge machine shown in FIG. After this setting, a wire 45 for electric discharge machining of the electric discharge machine is paid out from the payout reel, and is vertically inserted between the guide rail member 4 of the lower plate 2 and the guide rail portion 5 of the upper plate 3, and the wire 45 is further inserted. Insert the hole 26 formed in the bottom of the work holder 21, the hole 46 formed in each component of the two-dimensional motion device 38, and the hole 47 formed in the work table 44, and wind the tip thereof. Wrap around the take-up reel. Then, tension is applied to the wire 45 by a tension mechanism.
[0037]
Thereafter, an operation for forming the guide grooves 6 in the guide rail portions 4 and 5 by electric discharge machining is started. This electric discharge machining operation is performed by using the wire 45 as one electrode, and using the work holder 21 connected to the lower plate 2 and the upper plate 3 via the conducting plate 35 or the like as the other electrode, and automatically feeding the wire 45. The work fluid is supplied to the periphery of the wire 45 while the workpiece holder 21 is two-dimensionally moved by the two-dimensional motion device 38.
[0038]
Thereby, a guide groove having a shape corresponding to the two-dimensional motion by the two-dimensional motion device 38 is formed on the opposing surface of the guide rail portion 4 of the lower plate 2 and the guide rail portion 5 of the upper plate 3 shown in FIG. 6 will be formed. These guide grooves 6 have a size corresponding to that of the steel balls 7 interposed between the guide grooves 6, and have a recess 6A for storing lubricating oil supplied to the steel balls 6. The guide groove 6 having such a complicated shape is accurately machined by numerically controlling and driving the two driving means 43 of the two-dimensional motion device 38 with the control device. As shown in FIG. 5, when the energizing plate 35 and the set screw 36 protrude into the processing region by the wire 45, the guide groove 6 is processed while cutting off the energized plate 35 and the set screw 36. .
[0039]
The electric discharge machining of the guide groove 6 by the wire 45 described above is performed by resetting the wire 45 for each of the two guide rails 4 and 5 provided on the lower plate 2 and the upper plate 3 respectively. If two wires are provided in the electric discharge machine, these may be machined simultaneously. In addition, by making the work holder large and providing a plurality of recesses 25 in this large work holder, a plurality of sets of the lower plate 2 and the upper plate 3 which are one set of each one are combined into one set. The guide groove may be processed by an electric discharge machine provided with one or a plurality of wires while holding the work holder.
[0040]
Thereafter, the energizing plate 35 is removed or the energizing plate 35 is left as it is, and the lower plate 2 and the upper plate 3 inserted into the concave portion 25 of the work holder 21 are maintained in the fixed positional relationship described above. The work holder 21 is set on a honing machine shown in FIG. Then, the rotating processing head 48 of the honing machine is inserted between the guide grooves 6 of the guide rail portions 4 and 5 to finish the guide grooves 6.
[0041]
According to the present embodiment described above, the lower plate 2 and the upper plate 3 inserted into the concave portion 25 of the work holding body 21 are in a horizontal plane while maintaining the fixed positional relationship in which the guide rails 4 and 5 face each other. In this case, the size of the two-dimensional motion corresponds to the size of the steel ball 7, so that the two guide grooves 6 formed on the opposing surfaces of the guide rail portions 4 and 5 by electric discharge machining. The shape and the positional relationship can be of a high degree of accuracy required in relation to the steel ball 7, and therefore, the linear motion stage 1 constituted by the two guide grooves 6 and the steel ball 7 The roller bearing means can smoothly and linearly move the upper plate 3 as a movable member with accurate precision with respect to the lower plate 2 as a stationary member.
[0042]
In this embodiment, when the guide grooves 6 are formed on the opposing surfaces of the guide rails 4 and 5 of the lower plate 2 and the upper plate 3 by electric discharge machining and then the guide grooves 6 are finished with a honing machine, and when the electric discharge machining is completed. Since the honing process is performed while maintaining the fixed positional relationship between the lower plate 2 and the upper plate 3, the positional relationship between the guide grooves 6 at the end of the electric discharge machining is directly brought into the honing process. Therefore, the guide groove 6 finished by the honing process has a high precision.
[0043]
Further, in order to make the lower plate 2 and the upper plate 3 have a fixed positional relationship at the time of electric discharge machining, the lower plate 2 and the upper plate 3 are inserted into the concave portion 25 of the work holder 21 and these are The lower plate 2 and the upper plate 3 are pressed and positioned in the width direction of the concave portion 25, and the lower plate 2 and the upper plate 3 are pressed in directions in which the lower plate 2 and the upper plate 3 are separated from each other by pressing means 32 including a screw shaft portion 33 and a nut member 34. Since the lower plate 2 and the upper plate 3 may be pressed against the inner walls of the recess 25 facing each other, the work can be easily performed. In addition to the work holder 21 having the recess 25, the pressing means 31 and the pressing means 32 , The simplification of the structure of the device and the simplification of the production can be realized.
[0044]
Further, since the pressing means 32 includes the screw shaft member 33 having the tapered portion 33A and the nut member 34 having the split groove 34A, the screw shaft member 33 is screwed into the nut member 34 and screwed. Accordingly, the lower plate 2 and the upper plate 3 can be reliably pressed against the inner walls facing the recess 25 by the expansion deformation of the nut member 34, and the pressing force can be appropriately adjusted by adjusting the amount of screwing of the screw shaft member 33. Can be set to the size.
[0045]
According to the present invention, since the immovable member and the movable member are in the fixed positional relationship, the guide grooves of the steel balls are formed on the opposing surfaces of the guide rail portions by electric discharge machining. The resulting guide groove is of high precision.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an entire linear motion stage.
FIG. 2 is an exploded perspective view showing main members of a linear motion stage.
FIG. 3 is a perspective view showing a work holder before a lower plate as an immovable member and an upper plate as a movable member are inserted into recesses.
FIG. 4 is a front view showing a screw shaft member and a nut member which are components of the pressing means.
FIG. 5 is a partially enlarged plan view showing a state after the lower plate and the upper plate shown in FIG. 3 have been inserted into recesses of the work holding body.
FIG. 6 is a front view of a partial cross section showing a state in which the work holding body is attached to a two-dimensional exercise device and set on a work table of an electric discharge machine.
FIG. 7 is a perspective view showing honing processing performed after electric discharge machining.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Linear motion stage 2 Lower plate 3 which is an immovable member 3 Upper plate 4 which is a movable member 5 Guide rail 6 Guide groove 7 Steel ball 21 Work holder 25 Depression 26 Hole 31 Pressing means 32 Pressing means 33 Screw shaft member 33A Taper Part 34 nut member 34A split groove 35 conducting plate 38 two-dimensional motion device 44 work table of electric discharge machine 45 wire of electric discharge machine 48 machining head of honing machine

Claims (5)

Immovable members,
And a movable member that can move linearly with respect to the immovable member.
These immovable member and movable member are both formed in a shape of a block-shaped member having a guide rail portion extending in the linear movement direction of the movable member and guiding the linear movement of the movable member,
The guide rail portions of each other are opposed to each other in the width direction of the immovable member and the movable member, and a guide groove having a cross section of an arc having a surface in contact with the steel ball is formed on an opposing surface of these guide rail portions. Is formed,
A linear motion stage in which a steel ball is interposed in the guide groove, and the steel ball rolls to perform a linear motion of the movable member.
A coil spring extending in the length direction of the guide rail portion is provided between the immovable member and the movable member, and one end of the coil spring is connected to the immovable member, and the other end is connected to the movable member. Joined,
Screw-type feed means is attached to the immovable member via a bracket,
The screw-type feed means includes a rotary knob, a spindle abutting on the movable member, and a spindle abutting on the movable member with forward or reverse rotation of the rotary knob being moved forward or forward in the linear movement direction of the movable member. And a screw feed mechanism for retracting,
When the rotary knob is rotated forward, the spindle advances, whereby the movable member advances with respect to the immovable member while extending the coil spring.On the other hand, when the rotary knob is rotated reversely, the spindle retracts. Wherein the movable member is retracted with respect to the immovable member by the return spring force of the coil spring. The immovable member and the movable member are formed into a shape having at least two guide rail portions, so that each member forms at least two pairs of the guide rail portions facing each other,
2. The linear motion stage according to claim 1, wherein the coil spring is disposed between one of the pair of guide rails and the other of the pair of guide rails. 3. The linear motion stage according to claim 2, wherein the one guide rail portion pair and the other guide rail portion pair are formed at substantially both end portions in the width direction of the immovable member and the movable member. . A stopper plate having a long hole extending in a linear movement direction of the movable member is fixed to a side surface of the immovable member,
A screw hole into which a stopper screw is screwed is provided on a side surface of the movable member,
After inserting the stopper screw into the elongated hole of the stopper plate, screwing into the screw hole, and further tightening the stopper screw to the end, the movable member is fixed at that position with respect to the immovable member. The linear motion stage according to any one of claims 1 to 3, wherein: On both end surfaces of each guide rail portion extending in the linear movement direction of the movable member, a screw hole into which a holding screw having a large diameter head is screwed is provided,
The large diameter head of the cap screw screwed into the screw hole prevents the steel ball from falling off from the end of the guide rail portion. Or linear motion stage described.

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