JP2004021779A - Axial operation device, axial operation method, and axial operation program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an axial operation device, axial operation method, and axial operation program capable of rapidly and precisely moving the observation visual field on a sample regardless of distance without requiring to be familialized in operation or giving an uncomfortable feeling. <P>SOLUTION: A range setting means 21 sets a range that is the ratio of the moving quantity of an actuator 28 to the operation quantity of an axial operating apparatus 26. An operation detecting means 24 detects the operation quantity of the axial operation apparatus 26 within a sampling time generated by a time generating means 22. An arithmetic means 24 calculates an instruction pulse position and an instruction pulse speed which are converted to the moving position and moving speed of the actuator 28 from the range, the sampling time, and the operation quantity within the sampling time. An instruction pulse output means 25 outputs an instruction pulse string consisting of the instruction pulse position and instruction pulse speed obtained by the arithmetic means 24 to an actuator driving device 27. Accordingly, an actuator 281 is moved in the designated range to the operation of the axial operating apparatus 26. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to the axis operation of a movable shaft such as a microscope used for observing a sample, and in particular, an axis operation device of a microscope that can move an observation field of view on a sample by operating an operation handle or the like by an operator, The present invention relates to an operation method and an axis operation program.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, there has been known an axis operating device that drives and operates a movable axis such as a microscope used for observing a sample.
FIG. 8 is a diagram showing a configuration of an axis operating device related to such a conventional scanning electron microscope. The figure is disclosed in Japanese Patent Application Laid-Open No. 8-180826, and it is proposed that the visual field of view can be moved to a desired position by a simple operation using a trackball even when the moving axis is long. Things.
[0003]
In the figure, first, a position mode / speed mode is instructed to the stage control means 3 by operating a position mode / speed mode selection switch 2 on the console 1. In the case of the position mode, by rotating the track ball rotator 4, the observation field of view on the sample moves to a position corresponding to the rotation direction and the rotation angle.
[0004]
In the case of the speed mode, by rotating the rotating body 4, the observation visual field moves at a moving speed according to the rotation direction and the rotation angle. When the position at which the user desires to move the observation field is far away, the observation mode is set by operating the trackball rotator 4 in the speed mode.
[0005]
FIG. 9 is a diagram showing a configuration of an axis operating device related to a motorized stage vertical moving device of a microscope. This figure is disclosed in Japanese Patent Application Laid-Open No. Hei 8-166545. The motorized stage up / down operation has the same feeling as the operation of a conventional manual stage. It has been proposed that the user can concentrate on the examination of a specimen by a microscope without performing the inspection.
[0006]
The electric stage up and down movement device shown in FIG. 1 includes a movable section 6 having a DC motor 5 and a speed reduction mechanism, and a control circuit 9 having operation switches 7 and 8 for moving the stage. Is provided with a dial type coarse handle 11 and a fine handle 12.
[0007]
The control circuit 9 controls the rotation of the DC motor 5 so as to move the stage at a relatively high speed in response to the operation of the coarse movement handle 11 or to move the stage at a relatively low speed in response to the operation of the fine movement handle 12. I do.
FIG. 10 is a diagram illustrating a configuration of an axis operating device related to a distributed control system capable of controlling a plurality of actuators. This figure is disclosed in Japanese Patent Application Laid-Open No. 2000-155608, which enables simultaneous control of a plurality of actuators and continuous control of the actuators. It has been proposed that accurate positioning can be achieved.
[0008]
As shown in the figure, in this distributed control system, a host control device 13, three actuator control devices 14 (14-1, 14-2, 14-3) and an axis operating device 15 communicate with each other. They are connected to each other via a serial communication line 16 via a controller so that they can transmit and receive each other. A motor 17 (17-1, 17-2, 17-3) for driving an actuator shaft is connected to the actuator control device 14 via a motor controller and a motor driver, and the shaft operation device 15 has three shafts. The operation devices 18 (18-1, 18-2, 18-3) are connected. A trackball, a joystick, a mouse, or the like is used for the axis operation device 18.
[0009]
The axis operating device 15 can simultaneously designate a plurality of actuator control devices 14, and manually operates a plurality of axis operating devices 18 to generate a timer interrupt signal at predetermined time intervals. In response to the timer interrupt signal, The control command is output to the designated actuator control device 14 via the serial communication line 16 while converting the operation signal output from the axis operation device 18 into the actuator control command.
[0010]
[Problems to be solved by the invention]
The technique disclosed in Japanese Patent Application Laid-Open No. H08-180826 describes that the operation mode is a position mode at the time of precise positioning operation in which the moving distance of the observation field is short, and the position to be observed on the sample is far away from the current observation field and the observation field is too large. The operability is improved by setting the operation mode to the speed mode during rough positioning operation where the moving distance is long, but since the rough positioning operation is set to speed mode, the amount operated and the moving distance are uniquely If it is not supported, it becomes difficult for the operator to operate.
[0011]
For example, if a trackball is replaced with an operation handle having a built-in encoder, the operation angle can be visually checked in that case. For example, if the movement distance in a 1/4 turn operation is 100 μm, 1 / The movement distance when performing two rotations must be 200 μm in proportion to the operation amount. However, since the above-mentioned technique does not make it so, the operation causes a feeling of strangeness, and the operation requires learning.
[0012]
In the technique disclosed in Japanese Patent Application Laid-Open No. 8-166545, a dial-type handle for coarse movement and a handle for fine movement are provided in an operation unit, and a changeover switch for notifying the control circuit of these operations is provided. In this case, two operation handles are required for one axis, and the changeover switch must be operated each time the two operation handles are changed, which complicates the operation. In other words, in this case also, operation requires learning.
[0013]
Further, the technology of Japanese Patent Application Laid-Open No. 2000-155608 discloses a technique of connecting a track ball and a joystick as the axis operation device 18 and setting them so as to control a common actuator control device. If the joystick is assigned for high-speed / low-resolution control, the joystick is operated for long-distance movement, and the trackball is operated for high-resolution positioning near the stop position.
[0014]
In addition, the above-mentioned system achieves a high-resolution stop position control over a wide operation range, in addition to obtaining a constant speed movement proportional to the exponential function of the operation input value. That is, a high range and high resolution are realized by allocating a plurality of operation devices to different operation ranges. For this reason, it is necessary to operate a plurality of operation devices, and since the drive amount with respect to the operation amount changes exponentially, there is no clear correspondence between the operation amount and the movement amount. For this reason, complaints remain that the operation is somewhat complicated and the operation is somewhat uncomfortable.
[0015]
In view of the above conventional circumstances, the problem of the present invention is that even when using an input means such as an operation handle having a built-in encoder in an axis operation device, there is no need for skill in operation and there is no sense of incongruity, An object of the present invention is to provide an axis operating device, an axis operating method, and an axis operating program that can easily move an observation visual field on a sample precisely at a near position and quickly to a distant position.
[0016]
[Means for Solving the Problems]
First, an axis operating device according to the first aspect of the present invention is an axis operating device that controls an actuator using an axis operating device of a man-machine interface, wherein a range setting unit that sets a range of a plurality of or continuous arbitrary values. A period generating means for generating an arbitrary time interval, an operation detecting means for detecting an operation amount of the axis operating device at each time interval obtained by the period generating means, and the operation detected by the operation detecting means Calculating means for calculating an actuator speed and an actuator position from the amount, the time interval obtained by the period generating means, and the range set by the range setting means, and the actuator speed calculated by the calculating means Command pulse output means for outputting the actuator position as a command pulse speed and a command pulse position. Detection of the operation amount of the axis operating device by the operation detection means for each of the first time intervals obtained by the period generation means, the calculation by the calculation means based on the detection of the operation amount, and the command pulse output means based on the calculation The output of the command pulse speed and the command pulse position is repeated.
[0017]
In this shaft operating device, for example, the operation amount of the shaft operating device detected by the operation detecting means, the range set by the range setting means, and the calculation by the calculating means are calculated. The command pulse speed and the command pulse position calculated by the calculation means are each composed of data of an arbitrary length.
[0018]
In this axis operating device, for example, as set forth in claim 3, the calculating means includes a speed value setting register and a position value setting register, and the command pulse output means includes a pulse frequency control unit and a pulse frequency control unit. It comprises a number control section and a pulse output section.
[0019]
Next, in the axis operating method according to the present invention, in the axis operating method of controlling an actuator using an axis operating device of a man-machine interface, a range setting step of setting a plurality of or a continuous range of arbitrary values is provided. A period generating step of generating an arbitrary time interval, an operation detecting step of detecting an operation amount of the axis operating device for each of the first time intervals obtained by the period generating step, and a step of detecting the operation detected by the operation detecting step. A calculating step of calculating an actuator speed and an actuator position from the operation amount, the time interval obtained in the period generating step, and the range set in the range setting step, and the actuator speed calculated in the calculating step; A command pulse output step of outputting the actuator position as a command pulse speed and a command pulse position. Configured Suyo.
[0020]
In this axis operation method, for example, the operation amount of the axis operation device detected in the operation detection step, the range set in the range setting step, and the operation in the operation step are calculated. The command pulse speed and the command pulse position calculated in the calculation step are each composed of data of an arbitrary length.
[0021]
In this axis operating method, for example, the calculation step includes a speed value setting step and a position value setting step, and the command pulse output step includes a pulse frequency control step and a pulse number control step. And a pulse output step.
Furthermore, the axis operation program according to the invention of claim 7 is an axis operation program for causing a computer to execute an axis operation process for controlling an actuator using an axis operation device of a man-machine interface, and a plurality of or continuous arbitrary axis operation programs are provided. Range setting processing for setting a range of values, a period generation processing for generating an arbitrary time interval, and an operation detection processing for detecting an operation amount of the axis operating device for each of the first time intervals obtained by the period generation processing. An operation process of calculating an actuator speed and an actuator position from the operation amount detected by the operation detection process, the time interval obtained by the period generation process, and the range set by the range setting process; The above-mentioned actuator speed and the above-mentioned actuator position calculated by the calculation process are compared with the command pulse speed and the command pulse speed. A command pulse output processing for outputting the scan position, repeating the configured to execute the computer.
[0022]
In this axis operation program, for example, the operation amount of the axis operation device detected by the operation detection processing, the range set by the range setting processing, and the arithmetic processing are calculated. The command pulse speed and the command pulse position calculated by the calculation processing are each data of an arbitrary length.
[0023]
In this axis operation program, for example, the arithmetic processing includes a speed value setting processing and a position value setting processing, and the command pulse output processing includes a pulse frequency control processing and a pulse number control processing. It is configured to include processing and pulse output processing.
[0024]
BEST MODE FOR CARRYING OUT THE INVENTION
First, the basic configuration of the shaft operating device of the present invention will be described.
FIG. 1 is a block diagram showing a basic configuration of the axis operating device of the present invention. As shown in FIG. 1, the axis operating device 20 includes a range setting unit 21, a period generating unit 22, an operation detecting unit 23, a calculating unit 24, and a command pulse output unit 25.
[0025]
An axis operating device 26 is connected to the operation detecting means 23, an input side of an actuator driving device 27 is connected to the command pulse output means 25, and an actuator 28 is connected to an output side of the actuator driving device 27. Are linked.
The range setting means 21 sets a range that is a ratio of the movement amount of the actuator 28 to the operation amount of the axis operating device 26. The period generating means 22 generates a sampling timing for dividing a series of processes in the axis operating device 20 into an arbitrary time. The operation detecting unit 23 detects an operation amount of the axis operating device 26 within a sampling time delimited by the sampling timing generated by the period generating unit 22.
[0026]
The calculating means 24 calculates the moving position and moving speed of the actuator 28 from the range obtained by the range setting means 21, the sampling time obtained by the period generating means 22, and the operation amount within the sampling time obtained by the operation detecting means 23. Calculate the command pulse position and command pulse speed converted to The command pulse output means 25 outputs a command pulse train composed of the command pulse position and the command pulse speed obtained by the calculation means 24 to the actuator driving device 27.
[0027]
Thereby, the actuator 281 moves in the designated range with respect to the operation of the axis operating device 26.
Here, as an example of the basic configuration, a case in which the actuator has one axis is shown. However, the actuator is not limited to one axis, and the present invention can be applied to a plurality of axes.
[0028]
FIG. 2 is a diagram showing an example of the operation timing in the above configuration of the present invention. FIG. 7A shows a range R which is a ratio of the movement amount of the actuator 28 to the operation amount of the axis operating device 26 set by the range setting means 21. Here, an example is shown in which the range changes from “100” to “1” at a certain time tx.
[0029]
FIG. 6B shows the operation amount of the axis operating device 26. Here, it is substantially assumed that the operation amount of the axis operating device 26 increases positively and slightly, and then decreases slightly. An example in which the same state is repeated is shown.
FIG. 3C shows a sampling time Tsamp [sec], which is a sampling period divided by the sampling timing generated by the period generating means 22. Here, a fixed interval of 0.05 sec at any time is shown. Is shown.
[0030]
FIG. 3D shows the operation amount of the axis operating device 26 shown in FIG. 2B as an actual operation amount divided for each sampling time Tsamp [sec] in FIG. In FIG. 3D, the operation amount which is a continuous amount is shown by a value quantized in a sampling time Tsamp [sec] period in FIG.
[0031]
FIG. 7E shows the detected operation amount Lop detected by the operation detecting means 23. Here, the value of the operation amount quantized for each sampling time Tsamp [sec] shown in FIG. Are detected with a delay of the sampling time Tsamp [sec].
[0032]
FIG. 11F shows a calculation based on the range R, which is the ratio of the movement amount to the operation amount obtained by the range setting means 21, and the operation amount Lop within the sampling time Tsamp [sec] obtained by the operation detection means 23. A command pulse position Pcmd [pulse] converted into a movement position Pact [mm] of the actuator 28 calculated by the means 24 is shown.
[0033]
As shown in this example, since the set range R changes from “100” to “1” at time tx, the same operation amount shown in FIGS. 8B, 8D, and 8E is repeated. On the other hand, the command pulse position Pcmd [pulse] converted into the movement position Pact [mm] of the actuator 28 has changed to a value of 1/100 after the time tx.
[0034]
FIG. 9G shows a range R, which is a ratio of the movement amount to the operation amount obtained by the range setting means 21, a sampling time Tsamp [sec] obtained by the period generation means 22, and a sampling time obtained by the operation detection means 23. The command pulse speed Vcmd [pps] converted from the operation amount Lop within the time Tsamp [sec] to the moving speed Vact [mm / sec] of the actuator 28 calculated by the calculation unit 24 is shown.
[0035]
As shown in this example, since the set range R changes from “100” to “1” at time tx, the same operation amount shown in FIGS. 8B, 8D, and 8E is repeated. On the other hand, the command pulse speed Vcmd [pps] converted into the moving speed Vact [mm / sec] of the actuator 28 has changed to a value of 1/100 after the time tx.
[0036]
Here, as an example of the operation timing, the sampling time Tsamp is illustrated as a fixed operation timing of 0.05 sec. However, the present invention is not limited to this, that is, it is necessary to limit the sampling time Tsamp to 0.05 sec. However, Tsamp may be a variable value according to the operation status or the like.
[0037]
An example of the operation of the axis operating device having the above configuration will be described below again with reference to FIGS. 1 and 2. First, power is supplied to the shaft operating device 20, the shaft operating device 26, the actuator 28, and the actuator driving device 27, particularly when a power source (not shown) is turned on. With this energization, the shaft operating device 20 and the actuator driving device 27 perform an initialization operation. By this initialization operation, the operation detecting means 3 can detect the operation of the axis operating device 26, and the actuator driving device 27 can drive the actuator 28. Thereafter, the following processing is repeated every sampling time Tsamp = 0.05 sec generated by the period generating means 22.
[0038]
First, when the axis operating device 26 is not operated, the operation amount Lop per sampling time Tsamp = 0.05 sec detected by the operation detection unit 23 is 0, and the range R set by the range setting unit 21 Regardless of the sampling time Tsamp generated by the period generating means 22, the calculating means 24 calculates that the command pulse position Pcmd is "0" pulse and the command pulse speed Vcmd is "0" pps. Based on the result that the command pulse position is “0” pulse and the command pulse speed Vcmd is “0” pps, the command pulse output means 25 outputs pulses of speed “0” pps for “0” pulses, that is, outputs pulses. do not do.
[0039]
Although the actuator control device 27 is connected to the command pulse output means 25, but the command pulse is not output from the command pulse output means 25, the actuator control device 27 does not drive the actuator 28 but stops it. . As long as there is no operation amount of the axis operating device 26, the above processing is repeated every sampling time Tsamp = 0.05 sec.
[0040]
Next, a state in which the axis operating device 26 is operated and the operation amount changes will be described. When the axis operating device 26 is operated by the operator, the amount of operation changes according to the state of the operation. For example, it is assumed that the operation shown in FIG. 2B is performed.
In this case, at every sampling time Tsamp = 0.05 sec generated by the period generating means 22 shown in FIG. 4C, the actual operation amount is divided as shown in FIG. The actual operation amount divided every 05 sec is detected by the operation detection means 23 as a detected operation amount Lop with a detection delay of 0.05 sec at the maximum as shown in FIG.
[0041]
When the detected manipulated variable Lop is detected, the calculating means 24 calculates the detected manipulated variable Lop, the range R set by the range setting means 21, and the sampling time Tsamp = 0.05 sec generated by the period generating means 22. Then, the command pulse position Pcmd and the command pulse speed Vcmd are calculated according to the following equations.
Command pulse position Pcmd [pulse] = operation detection amount Loopx range R
Command pulse speed Vcmd [pps] = operation detection amount Loopx range R / sampling time Tsamp
Here, when the relationship between the command pulse position Pcmd and the command pulse speed Vcmd is obtained by using the above two equations as simultaneous equations, the following equation is obtained.
Command pulse position Pcmd [pulse] = command pulse speed Vcmd [pps] x sampling time Tsamp [sec]
As shown in FIG. 2, when the range R = 100 shown in FIG. 2A, as shown in FIG. 2F, a value 100 times the value of the detected operation amount Lop shown in FIG. (G), the pulse position Pcmd of 100 times the above value is divided by the sampling time 0.05 sec, and the value of 2000 times the value of the detection operation amount Lop is calculated as shown in FIG. It can be seen that the pulse speed Vcmd has been calculated. Similarly, at time tx after a certain time has elapsed, as shown in FIG. 2A, as the range R is changed from “100” to “1”, the command pulse position Pcmd and the command pulse speed Vcmd are changed. The value is also changed to the same or 20 times the detection operation amount Lop, respectively.
[0042]
The command pulse position Pcmd and the command pulse speed Vcmd thus calculated are output as a command pulse train to the actuator 28 by controlling the number of command pulses and the command pulse frequency via the command pulse output means 25. You. The output command pulse train is input to the actuator driving device 27, and the actuator 28 moves to the moving position Pact at the moving speed Vact according to the command pulse position Pcmd [pulse] and the command pulse speed Vcmd [pps].
[0043]
The above processing is repeated every sampling time Tsamp = 0.05 sec generated by the period setting means 22. Therefore, based on the value of the range R and the sampling time Tsamp, the command pulse position Pcmd and the The command pulse speed Vcmd is changed for each sampling time Tsamp, and the movement of the actuator according to the operation of the operator is performed while controlling the position and speed.
[0044]
Subsequently, specific embodiments will be described below.
FIG. 3 is a block diagram illustrating a configuration of a main part of the axis operating device according to the first embodiment. In the figure, components having the same functions as those shown in FIG. 1 are denoted by the same reference numerals as those in FIG.
[0045]
As shown in FIG. 3, the axis operating device 30 is connected to an axis operating device 26 and an actuator driving device 27. An actuator 28 is connected to the actuator driving device 27. The axis operating device 26 includes a changeover switch 31 as the range setting means 21 shown in FIG. 1, an operation handle 32, and an encoder 33.
[0046]
The changeover switch 31 is a switch for switching between a coarse movement mode for moving the actuator 28 at high speed and a fine movement mode for moving the actuator 28 at low speed.
In FIG. 3, the changeover switch 31 is provided on the side of the axis operating device 30 as the range setting means 21. However, here, the changeover switch 31 is arranged on the side of the axis operating device 26, that is, beside the operation handle 32. The operation of rotating and the operation of pressing the changeover switch 31 can be performed quickly and easily with one hand.
[0047]
The operation handle 32 has a circular shape and incorporates an encoder 33. When the operator rotates the circular operation handle 32, the encoder 33 outputs an A / B phase signal corresponding to the rotation direction, the rotation amount, and the rotation speed of the operation handle 32.
[0048]
The A / B phase signal referred to here is two pulse signals having a phase difference of 90 °, and the phase shift of the B phase signal with respect to the A phase signal output according to the rotation direction is + 90 ° or −90 °. At 90 °, the number of pulses of the A / B phase signal output according to the amount of rotation increases or decreases, and the pulse interval of the A / B phase signal output according to the rotation speed becomes wider or narrower.
[0049]
The axis operating device 30 includes a timer 34 as the period generating means 22 and a counter 35 as the operation detecting means 23. The timer 34 generates a sampling time Tsamp [sec], and the counter 35 counts the number of pulses of the A / B phase signal output from the encoder 33.
[0050]
The axis operating device 30 includes a CPU (central processing unit) 36 as a calculating means 24, a RAM (random access memory) 37, a ROM (read only memory) 38, a speed value setting register 39, and a position value setting register 40. Is provided.
[0051]
The CPU 36 executes various kinds of judgments and processing such as calculations. The RAM 37 temporarily stores parameters and the like during the processing of the CPU 36. The ROM 38 stores a program to be processed by the CPU 36. The speed value setting register 39 stores a later-described speed value Vcmd obtained by calculation, and the position value setting register 40 stores a later-described position value Pcmd obtained by calculation.
[0052]
Further, the axis operating device 30 is provided with a pulse frequency control unit 41, a pulse number control unit 42, and a pulse output unit 43 as the command pulse output unit 25. The pulse frequency control unit 41 controls the pulse frequency, that is, the command pulse speed Vcmd [pps], based on the register value of the speed value setting register 39. The pulse number control unit 42 controls the pulse number, that is, the command pulse position Pcmd [pulse] based on the register value of the position value setting register 40. Then, the pulse output unit 43 outputs a command pulse to the actuator driving device 27 based on the controlled command pulse speed and command pulse position. As a result, the actuator 28 is driven.
[0053]
FIG. 4 is a flowchart illustrating a processing operation by the CPU 36 of the axis operating device 30 according to the first embodiment. The illustration and description of functions and operations not directly related to the present invention are omitted. This process is started when the power of the entire system is turned on.
[0054]
In the figure, the CPU 36 first performs various initializations in the processing operation (A) shown in the processing S1. That is, the settings inside the CPU 36 including interrupt settings, port settings, and other settings, the settings of the timer 34, the settings of the counter 35, the settings of peripheral modules connected to the CPU 36, including the clearing of the RAM 37, etc. 26, setting of the command pulse output means 25, setting of the actuator driving device 27, and setting of connected devices including other settings. In the setting of the timer 34, the value of the sampling time Tsamp [sec] is determined and set in the timer 34.
[0055]
Next, in the processing operation (B) shown in the processing S2, the CPU 36 performs processing for realizing functions and operations different from the processing range according to the present invention. This process is a sequence process and forms an infinite loop. During the processing in the infinite loop, the timer interrupt processing operates at every sampling time Tsamp [sec] set by the setting of the timer 34 performed in the processing operation (A) of the processing S1.
[0056]
In the processing operation (C) of the timer interrupt shown in the processing S3 (S3-1 to S3-4), the CPU 36 first reads the value of the counter 35, and reads the read value as a read counter value Loop to the RAM 37. After storing, the counter 35 is cleared (S3-1).
[0057]
Subsequently, the CPU 36 reads the state of the changeover switch 31, determines that the mode is the coarse movement mode if the read switch state is OFF, and sets the range R = 100 if the switch state is ON, and determines the range R if the switch state is ON. The range R is determined in accordance with the state of the changeover switch 31 where S = 1 (S3-2).
[0058]
Next, a position value Pcmd and a speed value Vcmd are calculated from the read counter value Lop, the range R, and the sampling time Tsamp based on the following two equations (S3-3).
Position value Pcmd = Read counter value Loopx range R
Speed value Vcmd = read counter value Loopx range R / sampling time Tsamp
Then, the position value Pcmd and the speed value Vcmd obtained by this calculation are written in the position value setting register 40 and the speed value setting register 39, respectively, and the position value and the speed value are set (S3-4).
[0059]
When the position value Pcmd is written into the position value setting register 40 as described above, the pulse number control unit 42 changes the target position of the command pulse for stopping the output when the pulse number matches the output pulse number.
When the speed value Vcmd is written to the speed value setting register 39, the pulse frequency control unit 41 changes the frequency at which the pulse output is completed at the completion of the current sampling time, that is, at the start of the next sampling, according to the change of the target position. Changes the target speed of the command pulse.
[0060]
The command pulse whose target position and target speed have been changed is output from the pulse output unit 43 as a command pulse position Pcmd [pulse] and a command pulse speed Vcmd [pps]. The output command pulse is input to the actuator driving device 27, and the actuator driving device 27 drives the actuator. As a result, the actuator 28 operates according to the command pulse.
[0061]
Here, a case will be described in which the operator operates the operation handle 32 and the changeover switch 31 to move the actuator 28 to a distant specific position quickly and precisely. In this case, the operator first moves the actuator 28 to a distant approximate position at a high speed, and then performs an operation to precisely move the actuator 28 from the approximate position to a specific position.
[0062]
For this purpose, the operator first confirms that the changeover switch 31 is OFF. If the changeover switch 31 is ON, the changeover switch 31 is pressed once to change the state to 0FF. Thus, the coarse movement mode is confirmed or set.
Next, the operator quickly rotates the operation handle 32 in a desired direction to move the actuator 28 at high speed. Then, in the axis operating device 30, from the operation of counting the number of pulses of the A / B phase signal of the encoder 33 for each sampling time Tsamp to the operation of outputting a command pulse composed of the position value Pcmd and the speed value Vcmd. Is repeated.
[0063]
In this series of processes, the range R is set to 100 because the changeover switch 31 is OFF and the coarse movement mode is set. A large number of A / B phase signal pulses are counted by the counter 35 when the operator rotates the operation handle 32 rapidly. The counted counter value is multiplied by 100 by setting the range R = 100, and a position value Pcmd and a velocity value Vcmd are generated. The actuator 28 moves based on the generated position value Pcmd and velocity value Vcmd. That is, the actuator 28 moves at high speed in response to the operation of the operator.
[0064]
Then, when the actuator 28 reaches the vicinity of a specific position far away, the observer presses the changeover switch 31 once to change the state to the ON state. Thereby, the fine movement mode is set. Then, the operator slowly rotates the operation handle 32 in a desired direction for precise movement. The operator operates the operation handle 32 while checking the movement state of the actuator 28 as necessary.
[0065]
Then, in the axis operating device 30, from the operation of counting the number of pulses of the A / B phase signal of the encoder 33 for each sampling time Tsamp to the operation of outputting a command pulse composed of the position value Pcmd and the speed value Vcmd. Is repeated.
[0066]
In this series of processing, the changeover switch 31 is ON and the fine movement mode is set, so that 1 is selected for the range R. When the operation handle 32 is slowly rotated by the operator, a small number of A / B phase signal pulses are counted by the counter 35. Since the counted counter value is set to the range R = 1, it is multiplied by 1 to generate a position value Pcmd and a velocity value Vcmd. The actuator 28 moves at a low speed based on the generated position value Pcmd and speed value Vcmd.
[0067]
The operation accuracy of the operator can be reduced to the level of the pulse accuracy of the encoder 33 built in the operation handle 32, and the movement of the actuator 28 can also be made precise. Therefore, the movement of the actuator 28 can be quickly and precisely controlled from a distant approximate position to a desired specific position.
[0068]
As described above, the operator can switch between the coarse movement mode and the fine movement mode only by changing the ON / OFF state of the changeover switch 31 and greatly change the output amount range with respect to the operation amount to 100: 1. By changing the ON / OFF state of the changeover switch 31 during the operation of the operation handle 32, the driving operation for high-speed and high-accuracy positioning with respect to the actuator 28 can be easily performed.
[0069]
In addition, when only the command pulse position is controlled, the delay of the movement of the actuator with respect to the operation becomes remarkable. On the other hand, in this example, since the command pulse position is controlled after roughly controlling the command pulse speed, there is no delay in the movement of the actuator due to the operation of the operation handle 32. The amount of movement of the actuator with respect to the operation of the operation handle 32 is accurate even if the pulse speed and the sampling time include some errors.
[0070]
Further, since the changeover switch 31 is arranged beside the operation handle 32, the operation of the handle 32 and the operation of the changeover switch 31 can be performed with one hand. Therefore, when the actuator has two axes, the operator can use both hands. Simultaneous operation of the shaft actuators 28 can be easily performed.
[0071]
FIG. 5 is a block diagram illustrating a configuration of a main part of the axis operating device according to the second embodiment. In this figure, components having the same functions as those shown in FIG. 3 are given the same numbers as those in FIG. 3, and new components having different forms are given new numbers, and only necessary portions are shown. explain.
[0072]
As shown in FIG. 5, the axis operating device 45 in this example is also connected to the axis operating device 26 and the actuator driving device 27. An actuator 28 is connected to the actuator driving device 27. In this system configuration of this example, the only difference from the case of FIG. 3 is the configuration of the range setting means 21 ′. In this example, the range setting means 21 ′ is composed of a volume 46 and an A / D converter 47. It is configured.
[0073]
The volume 46 can set a range value as a continuous value, and the A / D converter 47 converts a voltage value input according to the set value of the volume 46 into digital data and outputs the digital data.
In the axis operating device 30 according to the first embodiment described above, the range R of the movement amount of the actuator 28 with respect to the operation amount of the operation handle 32 is switched to 100 or 1 according to the ON / OFF state of the changeover switch 31.
[0074]
On the other hand, in this example, the volume 46 and the A / D converter 47 as the range setting means 21 are used so that the value of the range R can be set almost continuously. Therefore, the range settable value is determined by the resolution of the A / D converter 47. Operations other than those of the volume 46 and the A / D converter 47 are the same as those in the first embodiment.
[0075]
In the shaft operating device 45 according to the second embodiment, the operator can rotate the operation handle 32 while adjusting the volume 46. Since the range can be continuously changed almost steplessly, a rapid change such as 100: 1 does not occur with respect to the movement of the actuator 28.
[0076]
Therefore, when there is a possibility that a problem such as vibration due to the actuator 28, an operation error, torque limitation, or the like may occur, it is possible to prevent the occurrence of these problems. For example, when a stepping motor is used for the actuator 28, step-out due to a rapid change in the range can be prevented. Further, when a servomotor is used, it is possible to prevent the occurrence of a servo alarm due to an overload based on a rapid change in the range.
[0077]
FIG. 6 is a block diagram illustrating a configuration of a main part of the axis operating device according to the third embodiment. In this figure, components having the same functions as those shown in FIG. 3 are given the same numbers as those in FIG. 3, and new components having different forms are given new numbers, and only necessary portions are shown. explain.
[0078]
As shown in FIG. 6, the axis operating device 50 in this example is also connected with the axis operating device 26 and the actuator driving device 27. An actuator 28 is connected to the actuator driving device 27. The difference of the system configuration of the present embodiment from that of FIG. 3 is that the position value setting register 40 of FIG. 3 is deleted in the calculating means 24 'of the present example, and 3, the pulse number control unit 42 is omitted. Instead, in this example, a period monitoring unit 51 and a speed calculation correction unit 52 are added.
[0079]
The period monitoring unit 51 measures the time generated by the timer 34 as the period generating unit 22, monitors the difference between the desired time interval and the measured time interval, and uses the difference in the monitored time interval as time difference data. Output.
The speed calculation and correction means 52 is constituted by a program processed by the CPU 36, and corrects the calculated value of the command pulse speed according to the difference in the time interval obtained from the time difference data output by the period monitoring means 51.
[0080]
The axis operating device 50 according to the third embodiment is different from the axis operating device 30 according to the first embodiment in that the axis operating device 30 according to the first embodiment has a sampling time Tsamp. Although the command pulse position Pcmd and the command pulse speed Vcmd are controlled in accordance with the detected operation amount Lop for each time, in the shaft operating device 50 according to the third embodiment, the Instead of controlling the command pulse position Pcmd for each time interval, ie, for each sampling time Tsamp, the time interval calculated based on the command pulse speed Vcmd and the time interval, ie, the command pulse position for each sampling time Tsamp, is substantially controlled. In addition, the command pulse speed Vcmd is corrected. Therefore, it is possible to control the command pulse position Pcmd in addition to controlling the command pulse speed Vcmd.
[0081]
FIG. 7 is a flowchart illustrating a processing operation by the CPU 36 of the axis operating device 50 according to the third embodiment. The illustration and description of functions and operations not directly related to the present invention are omitted. This process is started when the power of the entire system is turned on.
[0082]
7, the CPU 36 first performs the processing operation (A) shown in the processing S1, and then performs the processing operation (B) shown in the processing S2. The processing operation (A) and the processing operation (B) are the processing operation (A) in the processing S1 shown in FIG. 3 and the processing operation (B) in the processing S2 of the axis operating device 30 according to the first embodiment. And are respectively the same.
[0083]
That is, also in this case, during the processing in the infinite loop in the processing operation (B) of the processing S2, the sampling time Tsamp [sec] set by the setting of the timer 34 performed in the processing operation (A) of the processing S1. Each time, a timer interrupt process occurs.
[0084]
In the timer interrupt processing operation (C-2) shown in the processing S103 (S103-1 to S103-6), the CPU 36 first reads the value of the counter 35, and stores the read value in the RAM 37 as a read counter value Loop. After the storage, the counter 35 is cleared (S103-1).
[0085]
Subsequently, the CPU 36 reads the state of the changeover switch 31, determines that the mode is the coarse movement mode if the read switch state is OFF, and sets the range R = 100 if the switch state is ON, and determines the range R if the switch state is ON. The range R is determined according to the state of the changeover switch 31 that sets = 1 (S103-2).
[0086]
Next, the CPU 36 reads data “ΔT = Tsamp−Treal” of the difference between the desired time interval Tsmap (for example, 5 milliseconds) and the measured time interval Treal obtained by the period monitoring unit 51 (S103-3). .
Further, the CPU 36 calculates “position value Pcmd = read counter value Lop × range R” from the read counter value Lop and the set range R (S103-4).
[0087]
Then, the CPU 36 performs processing as the speed calculation and correction means 52. That is, from the obtained position value Pcmd, sampling time Tsamp, and time interval difference ΔT, “speed correction value Vcmdc = position value Pcmd / (sampling time Tsamp−time interval difference ΔT)” is calculated (S103-5).
[0088]
The CPU 36 writes the speed correction value Vcmdc obtained by this calculation into the speed value setting register 39 (S103-6).
By writing the speed correction value Vcmdc in the speed value setting register 39 in this manner, the pulse frequency control unit 41 obtains the speed correction value Vcmdc calculated in accordance with the change of the target position and at the measured accurate time interval. The target speed of the command pulse is changed at the reflected frequency.
[0089]
The command pulse whose target speed has been changed is output from the pulse output unit 43 as a command pulse position Pcmd [pulse] and a command pulse speed correction value Vcmdc [pps]. The output command pulse is input to the actuator driving device 27 and is driven by the actuator driving device 27, and the actuator 28 performs an operation according to the command pulse.
[0090]
In the first embodiment, when the position value Pcmd is written to the position value setting register 40, the pulse number control unit 42 changes the target position of the command pulse for stopping the output when the position value Pcmd matches the output pulse number. In the first embodiment, the pulse number control unit 42 is deleted as in this example. If the pulse number control unit 42 is left as it is, the command pulse position Pcmd is not strictly controlled. Otherwise, if the time interval, that is, the sampling time includes a deviation from a desired value, the command pulse position Pcmd will deviate from the desired position by the command pulse speed Vcmdx time interval difference ΔT. . In this example, instead of deleting the pulse number control unit 42, correction is made by the speed calculation correction unit 52.
[0091]
As described above, the hardware (the position value setting register 40, the pulse number control unit 42) is deleted and replaced with software (the speed calculation correction unit 52), thereby simplifying the hardware configuration.
As described above, as will be apparent from the description of the first, second, and third embodiments, the present invention includes the following structures.
(1) In an axis operation system that controls an actuator using an axis operation device, a range setting unit that sets a range of a plurality of or continuous arbitrary values, a period generation unit that generates an arbitrary time interval, Operation detecting means for detecting an operation amount, operation means for calculating an actuator speed and an actuator position from the detected operation amount, the time interval, and a preset range, based on a calculation result of the calculation means Command pulse output means for outputting the actuator speed as a command pulse speed, and for each of the first time intervals obtained by the period generating means, the operation amount is detected, and after the time interval elapses in addition to the actuator speed The above processing including the calculation for predicting the actuator position is performed, and the output is performed while changing the command pulse speed. Axis steering apparatus characterized by repeated.
(2) Period monitoring means for monitoring the time interval of the period generating means, and speed calculation correcting means for correcting the axis moving speed calculated according to the difference between the time interval to be generated and the monitored time interval. The shaft operating device according to (1), further comprising:
[0092]
In the above-described first and third embodiments, the range is switched between two stages of “100” and “1” by operating the changeover switch. However, the present invention is not limited to this. Every time, a range of three or more stages may be sequentially circulated and switched.
[0093]
Further, in each of the embodiments, the sampling time Tsamp [sec] has been described as being fixed, but the sampling time Tsamp [sec] is not limited to this and may be variable according to the detection operation amount Lop or the like. However, in this case, the correlation between the position value Pcmd and the velocity value Vcmd satisfies Pcmd = VcmdxTsmp2 by using an arbitrary time Tsamp2 longer than a series of processing times from detection to calculation and control. That is the condition.
[0094]
【The invention's effect】
As described above, according to the present invention, precise positioning with a short moving distance is performed by operating one axis operating device so that it is not troublesome to operate a plurality of axis operating devices and operate one actuator. Since the operation and the rough positioning operation with a long moving distance can be performed only by the range switching operation, it is not necessary to learn the operation of the axis operation device, and the operation of the axis operation becomes easier. It is convenient.
[0095]
In addition, by controlling the time interval to be controlled, the actuator speed, and the actuator position with respect to the operation amount of the operating device, the speed per unit time is greatly controlled to easily control the position, and then, per unit time. The position of the robot can be precisely controlled by precisely controlling the position, so errors in unit time and speed and delays in movement due to operation are finally absorbed, eliminating the need for learning about operation. In addition, it is possible to realize that the operation does not cause a feeling of strangeness.
[0096]
Furthermore, since the exact position can be controlled, even when operating with an operation handle having a built-in encoder capable of visually confirming the operation angle, the amount of operation and the movement distance can be uniquely associated. Also in this respect, it is possible to provide an easy-to-use shaft operating device which can eliminate a sense of incongruity in operation.
[Brief description of the drawings]
FIG. 1 is a block diagram showing a basic configuration of an axis operating device according to the present invention.
FIG. 2 is a diagram showing an example of operation timing in the basic configuration of the axis operating device of the present invention.
FIG. 3 is a block diagram illustrating a configuration of a main part of the axis operating device according to the first embodiment.
FIG. 4 is a flowchart illustrating a processing operation by a CPU of the axis operating device according to the first embodiment.
FIG. 5 is a block diagram illustrating a configuration of a main part of an axis operating device according to a second embodiment.
FIG. 6 is a block diagram illustrating a configuration of a main part of an axis operating device according to a third embodiment.
FIG. 7 is a flowchart illustrating a processing operation by a CPU of an axis operating device according to a third embodiment.
FIG. 8 is a diagram showing a configuration of a shaft operating device relating to a conventional scanning electron microscope.
FIG. 9 is a diagram showing a configuration of a shaft operating device related to a conventional motorized stage up / down moving device of a microscope.
FIG. 10 is a diagram showing a configuration of a shaft operating device related to a conventional distributed control system capable of controlling a plurality of actuators.
[Explanation of symbols]
1 Operation console
2 Position mode / speed mode selection switch
3 Stage control means
4 Trackball rotator
5 DC motor
6 Moving parts
7, 8 Operation switch
9 Control circuit
11 Coarse handle
12 Fine adjustment handle
13 Host controller
14 (14-1, 14-2, 14-3) Actuator control device
15 axis operation device
16 Serial communication line
17 (17-1, 17-2, 17-3) motor
18 (18-1, 18-2, 18-3) Axis operating device
20 axis operation device
21, 21 'range setting means
22 Period generation means
23 Operation detection means
24, 24 'arithmetic means
25, 25 'command pulse output means
26 axis operation device
27 Actuator drive
28 Actuator
30 axis operation device
31 Changeover switch
32 Operation handle
33 encoder
34 timer
35 counter
36 CPU (central processing unit)
37 RAM (random access memory)
38 ROM (read only memory)
39 Speed value setting register
40 Position value setting register
41 Pulse frequency control unit
42 pulse number control unit
43 pulse output section
45 axis operation device
46 volumes
47 A / D converter
50 axis operation device
51 Period monitoring means
52 Speed calculation correction means

Claims (9)

In an axis operating device that controls an actuator using an axis operating device of a man-machine interface,
Range setting means for setting a range of a plurality of or continuous arbitrary values,
A period generating means for generating an arbitrary time interval;
Operation detecting means for detecting the operation amount of the axis operating device at each time interval obtained by the period generating means,
Calculating means for calculating an actuator speed and an actuator position from the operation amount detected by the operation detecting means, the time interval obtained by the period generating means, and the range set by the range setting means,
Command pulse output means for outputting the actuator speed and the actuator position calculated by the calculation means as a command pulse speed and a command pulse position,
Has,
Detection of an operation amount of the axis operating device by the operation detection unit at each time interval obtained by the period generation unit; the calculation by the calculation unit based on the detection of the operation amount; and the command pulse output unit based on the calculation An output of the command pulse speed and the output of the command pulse position. The amount of operation of the axis operating device detected by the operation detecting means, the range set by the range setting means, the command pulse speed calculated by the calculating means, and the command pulse calculated by the calculating means The axis operating device according to claim 1, wherein the position is data of an arbitrary length. The arithmetic unit includes a speed value setting register and a position value setting register, and the command pulse output unit includes a pulse frequency control unit, a pulse number control unit, and a pulse output unit. Item 7. The shaft operating device according to Item 1. In an axis operating method of controlling an actuator using an axis operating device of a man-machine interface,
A range setting step of setting a range of a plurality of or continuous arbitrary values,
A period generating step for generating an arbitrary time interval;
An operation detecting step of detecting an operation amount of the axis operating device for each of the first time intervals obtained by the period generating step;
A calculating step of calculating an actuator speed and an actuator position from the operation amount detected by the operation detecting step, the time interval obtained by the period generating step, and the range set by the range setting step,
A command pulse output step of outputting the actuator speed and the actuator position calculated by the calculation step as a command pulse speed and a command pulse position,
An axis operating method characterized by repeating the above. The operation amount of the axis operation device detected by the operation detection step, the range set by the range setting step, the command pulse speed calculated by the calculation step, and the command pulse calculated by the calculation step 5. The axis operating method according to claim 4, wherein the position is data of an arbitrary length. 2. The method according to claim 1, wherein the calculating step includes a speed value setting step and a position value setting step, and the command pulse output step includes a pulse frequency control step, a pulse number control step, and a pulse output step. Axis operation method. An axis operation program for causing a computer to execute an axis operation process for controlling an actuator using an axis operation device of a man-machine interface,
A range setting process for setting a range of a plurality of or continuous arbitrary values;
A period generation process for generating an arbitrary time interval;
An operation detection process of detecting an operation amount of the axis operating device for each of the first time intervals obtained by the period generation process;
A calculation process of calculating an actuator speed and an actuator position from the operation amount detected by the operation detection process, the time interval obtained by the period generation process, and the range set by the range setting process,
A command pulse output process of outputting the actuator speed and the actuator position calculated by the calculation process as a command pulse speed and a command pulse position;
A program for causing the computer to execute the following. The operation amount of the axis operating device detected by the operation detection process, the range set by the range setting process, the command pulse speed calculated by the calculation process, and the command pulse calculated by the calculation process The axis operation program according to claim 7, wherein the position is data of an arbitrary length. The method according to claim 7, wherein the calculation processing includes a speed value setting processing and a position value setting processing, and the command pulse output processing includes a pulse frequency control processing, a pulse number control processing, and a pulse output processing. Axis operation program.

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