JP2004016858A - Film forming apparatus and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film forming apparatus and a method capable of easily forming a film having a diamagnetic material of desired orientation to a desired shape at a high accuracy. <P>SOLUTION: The film having the diamagnetic material is formed by the film forming apparatus 10 provided with an ink jet head 20 delivering a material to be delivered containing the diamagnetic material comprising a carbon nano-tube or a carbon nano-fiber and a curing resin on a medium 1 as a liquid drop; an orientation means 30 for orienting the diamagnetic material in the material to be delivered delivered on the medium 1 by a magnetic field; and a curing means 40 for curing the curing resin in the state that the diamagnetic material in the delivered material to be delivered is oriented to a predetermined direction. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a film forming apparatus and method for forming a film containing a diamagnetic material composed of carbon nanotubes or carbon nanofibers used for an electronic device.
[0002]
[Prior art]
Fibrous carbon is classified according to fiber diameter. Carbon fibers having a fiber diameter of several μm or more are carbon fibers (CF), carbon fibers having a fiber diameter of 10 to 1000 nm are carbon nanofibers (CNF), and fiber diameters of 1 to nm are carbon nanotubes (CNT).
[0003]
CNT (CNF), which is a fibrous form of carbon and has an extremely small outer diameter on the nanometer scale, has attracted attention particularly from the viewpoint of industrial technology.
[0004]
CNTs include single-walled carbon nanotubes (SWCNTs) formed by rolling a graphite hexagonal mesh plane into a cylindrical shape and having no defects or multi-walled carbon nanotubes (MWCNTs) in which they are nested. These SWCNTs and MWCNTs are used. Has attracted much attention due to its chemical, electronic and mechanical properties, especially its chemical stability, metal droplet and semiconductive electrical conductivity, high electron emission, high mechanical strength, high thermal conductivity In order to make use of various physical properties such as, for example, field emission displays, heat pumps, solar cells, transistors, and fuel cells, it is expected to be used in many electronic devices.
[0005]
In order to use the diamagnetic material composed of CNT and CNF for an electronic device, it is necessary to orient it in a desired direction.
[0006]
For this reason, in order to make CNT (CNF) have a desired orientation, a carbon nanotube film having CNTs which is impregnated with an adhesive and then oriented by a magnetic field utilizing the properties of CNT which is a diamagnetic material is used. There has been no choice but to form the (CNT film) or arrange the catalyst at an arbitrary position and orient it by the method of growing the CNT.
[0007]
[Problems to be solved by the invention]
However, the method of impregnating the adhesive with CNT has a problem that a fine shape cannot be formed by the CNT film.
[0008]
Further, in the method of forming a CNT film by growing with a catalyst, it is difficult to arrange the catalyst at an arbitrary position, and thus there is a problem that a desired shape cannot be formed.
[0009]
In view of such circumstances, an object of the present invention is to provide a film forming apparatus and a method capable of easily and highly accurately forming a film having a diamagnetic material having a desired orientation into a desired shape.
[0010]
[Means for Solving the Problems]
A first aspect of the present invention that solves the above-described problem is an inkjet head that discharges a material to be discharged containing a diamagnetic material made of carbon nanotubes or carbon nanofibers and a curable resin as droplets onto a medium, An orientation unit for orienting the diamagnetic material in the material to be ejected onto the medium by a magnetic field, and the diamagnetic material in the material to be ejected in a state where the diamagnetic material is oriented in a predetermined direction. And a curing means for curing the curable resin.
[0011]
According to a second aspect of the present invention, in the first aspect, there is provided a film forming method, further comprising a pre-orienting means for orienting the diamagnetic material in the material to be ejected held in the inkjet head by a magnetic field. In the device.
[0012]
According to a third aspect of the present invention, there is provided a film forming apparatus according to the second aspect, wherein the preliminary orientation means comprises an electromagnet which generates a magnetic field.
[0013]
A fourth aspect of the present invention is directed to the film forming apparatus according to any one of the first to third aspects, wherein the curable resin is of an ultraviolet curing type, and the curing means is an ultraviolet irradiation device. is there.
[0014]
According to a fifth aspect of the present invention, in any one of the first to third aspects, the curable resin is an electron beam-curable type, and the curing means is an electron beam irradiation device. In the device.
[0015]
A sixth aspect of the present invention is the film forming apparatus according to any one of the first to third aspects, wherein the curable resin is a thermosetting type, and the curing means is a heating device. .
[0016]
According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the medium is an insulating substrate, a metal plate, a semiconductor substrate, a plastic film, or a wiring processed on the surface thereof. A feature of the invention is a film forming apparatus.
[0017]
An eighth aspect of the present invention is the film forming apparatus according to any one of the first to seventh aspects, wherein the orienting means comprises a plurality of electromagnets.
[0018]
According to a ninth aspect of the present invention, in any one of the first to eighth aspects, the inkjet head, the orientation unit, and the curing unit are provided movably in the scanning direction and the sub-scanning direction with respect to the medium. The film forming apparatus is characterized in that:
[0019]
According to a tenth aspect of the present invention, there is provided a method for ejecting a material to be ejected containing a diamagnetic material made of carbon nanotubes or carbon nanofibers and a curable resin onto an object to be ejected by an inkjet head as droplets, Orienting the diamagnetic material in the material to be ejected discharged in a predetermined direction by a magnetic field, and curing the diamagnetic material in the material to be ejected in a state oriented in a predetermined direction. Curing the conductive resin.
[0020]
According to an eleventh aspect of the present invention, in the tenth aspect, before the step of discharging the liquid as droplets on the medium, the method further comprises a step of pre-orienting the diamagnetic material in the material to be discharged by a magnetic field. A film forming method characterized in that:
[0021]
According to a twelfth aspect of the present invention, in the tenth or eleventh aspect, the curable resin is an ultraviolet curable type, and the step of curing the droplets is performed by irradiating ultraviolet rays. In the method of film formation.
[0022]
According to a thirteenth aspect of the present invention, in the tenth or eleventh aspect, the curable resin is an electron beam-curable type, and the step of curing the droplets is performed by irradiating an electron beam. To form a film.
[0023]
According to a fourteenth aspect of the present invention, in the tenth or eleventh aspect, the curable resin is a thermosetting resin, and the step of curing the droplets is performed by heating. In the way.
[0024]
In a fifteenth aspect of the present invention based on any one of the tenth to fourteenth aspects, in the step of orienting the diamagnetic material, a magnetic field in a direction orthogonal to a surface of the medium to be formed on which the material is formed is provided. A film forming method characterized by applying a voltage.
[0025]
According to a sixteenth aspect of the present invention, in any one of the tenth to fifteenth aspects, in the step of orienting the carbon nanotube or the carbon nanofiber, a magnetic field in a direction along a surface of the medium to be patterned on which the pattern is formed. In the film forming method.
[0026]
In the present invention, a film having a diamagnetic material having a desired orientation can be easily formed in a desired shape.
[0027]
Since the shape of the film can be formed by the ink jet head, a film having a fine shape can be easily and accurately formed. Further, by orienting the diamagnetic material by the alignment means, a film having the diamagnetic material having a desired orientation can be easily formed.
[0028]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail based on embodiments.
[0029]
(Embodiment 1)
FIG. 1 is a schematic perspective view of a film forming apparatus, and FIG. 2 is a schematic top view of the film forming apparatus and a cross-sectional view taken along line AA ′.
[0030]
As shown in the figure, the film forming apparatus 10 holds a material to be discharged containing a diamagnetic material made of carbon nanotubes (CNT) or carbon nanofibers (CNF) and a curable resin, and transfers the material to be discharged to a medium An ink jet head 20 capable of discharging the ink onto the medium 1, an orientation unit 30 for orienting the diamagnetic material of the material to be ejected on the medium 1 ejected from the inkjet head 20 in a predetermined direction by a magnetic field, and And a curing unit 40 for curing the curable resin in the material to be discharged in an oriented state.
[0031]
The diamagnetic material contained in the material to be ejected is, for example, a carbon nanotube (CNT) or a carbon nanofiber (CNF). In the present embodiment, CNT is used.
[0032]
The curable resin contained in the material to be discharged is, for example, a radiation curable resin such as an ultraviolet (UV) curable resin, an electron beam (EB) curable resin, or a thermosetting resin. In the present embodiment, a UV curable resin is used as the curable resin.
[0033]
Here, examples of the UV-curable resin include a radical polymerization system and a cationic polymerization system. Examples of radical polymerization type UV curable resins include monomers such as acrylates, oligomers such as epoxy acrylates and urethane acrylates, polymerization initiators such as benzophenones and acetophenones, and polymerization accelerators and polymerization inhibitors such as tertiary amines. And other additives such as a thixotropic agent, a plasticizer, a solvent, and a non-reactive polymer.
[0034]
Examples of the cationic polymerization UV curable resin include monomers such as alicyclic epoxy resin, glycidyl ether epoxy resin, urethane vinyl ether or polyester vinyl ether, oligomers such as alicyclic epoxy resin or glycidyl ether epoxy resin, and sulfonium salts. Or, it comprises a polymerization initiator such as an iodonium salt and other additives.
[0035]
It is preferable that the material to be discharged containing such CNT and UV-curable resin has a viscosity that allows normal discharge from the inkjet head 20 at normal temperature, for example, a viscosity of 40 mPa · s or less.
[0036]
Note that the viscosity of the material to be discharged is not limited to this. For example, by providing a heating device or the like in the inkjet head, the viscosity of the material to be discharged can be reduced by heating. A material to be ejected can be used.
[0037]
The ink jet head 20 that discharges such a material to be ejected onto the medium 1 is not particularly limited as long as the material to be ejected can be ejected as droplets. For example, a groove is formed in a piezoelectric ceramic plate. An ink-jet head that applies a voltage to a side wall that defines a liquid droplet to eject droplets from a nozzle opening, a vertical vibration-type ink-jet head that alternately laminates a piezoelectric material and an electrode forming material and expands and contracts in the axial direction, and a piezoelectric element. An ink-jet head of a bending deformation type, which alternately laminates with an electrode forming material and deforms in a bending direction, an ink-jet head which discharges ink droplets by bubbles generated by heat generation of a heating element and the like, and a discharge target material made of a conductive material. The discharge direction is adjusted by charging the discharged discharge target material and applying a magnetic field to the charged discharge target material. An inkjet head or the like which can be exemplified.
[0038]
Further, the orienting means 30 generates a magnetic field for orienting the CNTs in the material to be discharged, which has been discharged onto the medium 1, and in the present embodiment, a coil such as an electric wire is provided on the outer peripheral surface of a conductor such as an iron core. Are provided with a plurality of electromagnets 31 and 32 wound.
[0039]
The orienting means 30 includes four electromagnets 31 on one surface of the medium 1 on which the material to be ejected is provided and four electromagnets on the other surface of the medium 1 so that the direction of the magnetic field can be changed depending on the direction of the orientation. It comprises four electromagnets 32 provided so that the end faces thereof face each other.
[0040]
As will be described in detail later, such an orientation means 30 is oriented by utilizing the property that the CNT is a diamagnetic material. When a magnetic field is applied to the CNT by the orientation means 30, the axis of the CNT is aligned with the magnetic field. Can be oriented in a direction orthogonal to the CNTs, so that the CNTs in the material to be ejected on the medium 1 can have a desired orientation.
[0041]
The curing unit 40 is selected from, for example, an ultraviolet (UV) irradiation device, an electron beam (EB) irradiation device, a heating device, and the like, depending on the curable resin contained in the material to be discharged. In this embodiment, since the curable resin is a UV-curable resin, a UV irradiation device is used as the curing means 40.
[0042]
As such a UV irradiation device, for example, a mercury lamp, a metal halide lamp, an electroless lamp, or the like that emits electromagnetic radiation in a wavelength region of 200 nm to 450 nm can be used.
[0043]
The four electromagnets 31 and the curing unit 40 provided on one side of the ink jet head 20 and the orientation unit 30 on which the material to be ejected of the medium 1 is provided, are movable with respect to the medium 1 in the scanning direction. Four electromagnets 32 mounted on the first carriage 50 provided on the other surface of the orientation unit 30 are mounted on the second carriage 51 which moves in the scanning direction in conjunction with the first carriage 50. ing.
[0044]
The first carriage 50 is mounted on a pair of first guide rails 52 provided in the scanning direction of the medium 1 so as to be movable in the axial direction.
[0045]
Further, the second carriage 51 is mounted on a second guide rail 53 that is disposed on the opposite side of the medium 1 from the first guide rail 52 so as to be movable in the axial direction. .
[0046]
The first and second carriages 50 and 51 are moved by driving means such as a driving motor (not shown), and are interlocked so that they are always opposed to each other with the medium 1 interposed therebetween. And move.
[0047]
Further, the first and second guide rails 52 and 53 on which the first and second carriages 50 and 51 are respectively mounted are fixed to a base unit 54, and the base unit 54 is attached to the medium 1 in the sub-scanning direction. Are provided movably in the axial direction on a pair of third guide rails 55 provided over the first guide rail 55.
[0048]
The base unit 54 is also moved in the sub-scanning direction along the third guide rail 55 by driving means such as a driving motor (not shown), similarly to the first and second carriages 50 and 51. I have.
[0049]
That is, the first and second carriages 50 and 51 move in the scanning direction along the first and second guide rails 52 and 53, and the base unit 54 moves in the sub-scanning direction along the third guide rail 55. To move to. Thus, the inkjet head 20, the orientation unit 30, and the curing unit 40 can eject, orient, and cure the ejection target material at a desired position on the entire surface of the medium 1.
[0050]
As described above, the film forming apparatus according to the present embodiment causes the target material containing CNT and the UV curable resin to be discharged to a desired position of the medium 1 by the inkjet head 20, and the CNT in the discharged target material to be discharged is discharged. Is oriented in a desired direction by the orientation means 30, and the UV curable resin in the material to be ejected in which the CNTs are oriented is cured by the curing means 40, so that a film having CNTs of a desired orientation is formed in a predetermined shape. can do.
[0051]
Further, since the material to be discharged is discharged by the inkjet head 20, a film having a minute shape can be formed easily and with high precision.
[0052]
Here, an example of the CNT film formed by the above-described film forming apparatus is shown in FIG. FIG. 3 is a perspective view of the medium.
[0053]
As shown in FIG. 3A, a plurality of columns and a plurality of rows of circular CNT films 2 are provided at predetermined intervals on the surface of the medium 1. The CNTs 3 in the CNT film 2 are all oriented in the same direction. The medium 1 on which such a CNT film 2 is formed can be used for, for example, a field emission display.
[0054]
Further, as shown in FIG. 3B, a CNT film 2A is continuously provided on the surface of the medium 1 in a U-shape. The CNTs 3 of the CNT film 2A are oriented along the shape of the U-shaped CNT film 2A. The medium 1 on which such a CNT film 2A is formed can be used for, for example, a heat pump.
[0055]
Further, as shown in FIG. 3C, two CNT films 2B and 2C are laminated in a cross shape on the surface of the medium 1 and the CNTs 3 provided in each of the CNT films 2B and 2C are formed. Are provided such that their axes are along the longitudinal direction of the CNT films 2B and 2C, respectively. The medium 1 on which such laminated CNT films 2B and 2C are formed can be used, for example, for a solar cell or the like.
[0056]
Although not shown, various shapes other than the CNT films 2 to 2C can be formed by the film forming apparatus 10 described above.
[0057]
Further, the medium 1 on which the CNT films 2 to 2C are formed is not particularly limited, and examples thereof include an insulating substrate, a metal plate, a semiconductor substrate, a plastic film, and those having their surfaces subjected to wiring processing.
[0058]
Here, a manufacturing method of forming a CNT film on the medium 1 by the film forming apparatus 10 will be described with reference to FIGS. 4 is a cross-sectional view of the medium, and FIGS. 5 and 6 are a top view and a cross-sectional view of the medium.
[0059]
First, as shown in FIG. 4A, the material to be discharged 102 is discharged onto the medium 1 by the inkjet head 20. The CNTs 3 of the ejection target material 102 on the medium 1 are oriented in a random direction.
[0060]
Next, as shown in FIG. 4B, the CNTs 3 in the material to be ejected 102 on the medium 1 are oriented by the orientation means 30.
[0061]
More specifically, as shown in FIG. 5A, two electromagnets 31a provided so as to sandwich the medium 1 by moving the first and second carriages 50 and 51 in the scanning direction and the sub-scanning direction. , 32 are arranged so as to sandwich the material to be discharged 102 therebetween.
[0062]
Then, as shown in FIG. 5B, a magnetic field is generated in the two electromagnets 31 a and 32 to apply a magnetic field to the material to be discharged 102. Thereby, the axis of the CNT 3 is oriented in a direction orthogonal to the magnetic field, that is, in the plane of the medium 1.
[0063]
In the magnetic field generated by the two electromagnets 31a and 32, the axis of the CNT 3 is oriented only in the plane of the medium 1, so that the CNT 3 is disordered in the plane of the medium 1 as shown in FIG. In a different direction.
[0064]
For this reason, as shown in FIG. 6, two electromagnets 31a and 31b on one surface side on which the material to be discharged 102 is provided are arranged so that the material to be discharged 102 is sandwiched between the two electromagnets 31a and 31b. By applying a magnetic field to the material to be ejected 102 by generating a magnetic field, the axis of the CNT 3 can be oriented in a desired direction in the plane of the medium 1.
[0065]
Next, as shown in FIG. 4C, the curable resin in the material to be ejected 102 is cured by the curing means 40 to form the CNT film 2.
[0066]
In the present embodiment, since the UV-curable resin is used as the curable resin, the CNT film 2 is formed by irradiating the material to be discharged 102 with UV by using a UV irradiating device as the curing means 40.
[0067]
The CNT film 2 in which the CNTs 3 are formed in a desired orientation can be formed in a desired shape by repeatedly performing a series of steps of such ejection, orientation, and curing.
[0068]
Further, since the CNT film 2 is formed on the medium 1 by discharging the material to be discharged 102 by the ink jet head 20, a fine shape can be formed easily and with high precision.
[0069]
Further, the curable resin is contained in the material to be ejected 102, and the material to be ejected 102 is cured at a desired timing by the curing means 40, so that the laminated CNT films having different CNT3 orientations as shown in FIG. Can be formed easily and with high precision.
[0070]
In addition, a series of steps of discharging, orienting, and curing the material to be discharged 102 may be performed one drop at a time, or after discharging to a desired shape, all or a part of the CNTs may be aligned and aligned. The CNT film may be formed by curing the curable resin in the material to be ejected having the above.
[0071]
As described above, when aligning all or a part of the CNTs in the material to be ejected on the medium 1, all of the CNTs to be aligned are first aligned in the plane of the medium, and then in the plane. May be performed, or the two steps of aligning the CNTs may be repeatedly performed.
[0072]
(Other embodiments)
Although the first embodiment of the present invention has been described above, the basic configuration of the film forming apparatus and method is not limited to the above.
[0073]
For example, in the first embodiment, when the CNTs 3 in the material to be ejected 102 on the medium 1 are oriented, the electromagnets 31 a and 32 disposed on both sides of the medium 1 are oriented in the plane of the medium 1. However, the present invention is not limited to this. For example, a single electromagnet disposed on the surface of the medium on which the material to be ejected is provided may be used.
[0074]
In the first embodiment, the orientation of the material to be ejected on the medium is the surface direction of the medium. However, the orientation is not limited to this, and the direction in which the magnetic field of the electromagnet constituting the orientation means is applied may be changed. For example, the CNTs can be oriented in a direction orthogonal to the surface of the medium.
[0075]
In this way, the arrangement of the electromagnets 31 and 32 with respect to the material to be ejected 102 on the medium 1 of the orientation means 30 may be appropriately changed depending on the orientation of the CNT.
[0076]
Further, for example, in the above-described first embodiment, the CNTs 3 in the material to be ejected 102 ejected onto the medium 1 are oriented in a random direction, but the CNTs in the material to be ejected 102 in the inkjet head 20 are reduced to some extent. The ink may be ejected to the inkjet head 20 in the state of being oriented (preliminary orientation). Such a pre-orientation can be performed by providing a pre-orientation unit such as an electromagnet for applying a magnetic field to the ink jet head. It is preferable to perform the orientation of the CNTs 3 in the material to be ejected 102 on the medium 1 by 30.
[0077]
In the film forming apparatus 10 of the first embodiment described above, the medium 1 is fixed, and the first and second carriages 50 and 51 move in the scanning direction and the sub-scanning direction. The ejection, orientation, and curing of the ejection target material can be performed. However, the present invention is not limited to this. For example, the first and second carriages move in the scanning direction and the medium moves in the sub-scanning direction. The material to be discharged may be discharged, oriented and cured on the entire surface of the substrate.
[0078]
Further, in the first embodiment described above, the inkjet head 20, the orienting unit 30, and the curing unit 40 are applied to the first and second carriages 50 and 51 in the scanning direction, which is the moving direction of the first and second carriages 50 and 51. Although arranged side by side, the present invention is not limited to this. For example, the ink jet head, the orientation unit, and the curing unit are arranged side by side in the direction orthogonal to the moving direction of the first and second carriages, that is, in the sub-scanning direction. You may do so. In addition, the inkjet head 20, the orienting unit 30, and the curing unit 40 are simultaneously moved by being held by the first and second carriages 50 and 51. However, the invention is not limited thereto. And the curing means may be moved independently.
[0079]
【The invention's effect】
As described above, in the present invention, a discharge target material having a fine shape can be easily and accurately formed by discharging a discharge target material onto a medium by an ink jet head, and a diamagnetic material can be formed by a magnetic field of an alignment means. Is oriented and the curable resin in the material to be ejected is cured by the curing means, whereby a film having a diamagnetic material having a desired orientation can be formed.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view of a film forming apparatus according to a first embodiment of the present invention.
FIG. 2 is a schematic top view of a film forming apparatus according to Embodiment 1 of the present invention and a cross-sectional view taken along the line AA ′.
FIG. 3 is a perspective view showing an example of a film formed on a medium according to the first embodiment of the present invention.
FIG. 4 is a cross-sectional view of a medium to be printed, showing a film forming method according to the first embodiment of the present invention.
FIGS. 5A and 5B are a cross-sectional view and a top view of a medium, showing a film forming method according to the first embodiment of the present invention.
6A and 6B are a cross-sectional view and a top view of a medium showing a film forming method according to the first embodiment of the present invention.
[Explanation of symbols]
1 Medium 2, 2A, 2B, 2C CNT film 3 CNT
DESCRIPTION OF SYMBOLS 10 Film-forming apparatus 20 Ink-jet head 30 Orientation means 31, 32 Electromagnet 40 Curing means 50 First carriage 51 Second carriage 52 First guide rail 53 Second guide rail 54 Base unit 55 Third guide rail 102 Discharge material

Claims (16)

An inkjet head that ejects a material to be ejected containing a diamagnetic material composed of carbon nanotubes or carbon nanofibers and a curable resin as droplets onto a medium to be ejected, and An orientation unit for orienting the diamagnetic material by a magnetic field, and a curing unit for curing the curable resin in a state where the diamagnetic material in the ejected material to be ejected is oriented in a predetermined direction. Characteristic film forming apparatus. 2. The film forming apparatus according to claim 1, further comprising a pre-orienting unit for orienting the diamagnetic material in the material to be ejected held in the ink jet head by a magnetic field. 3. A film forming apparatus according to claim 2, wherein said pre-orientation means comprises an electromagnet for generating a magnetic field. The film forming apparatus according to any one of claims 1 to 3, wherein the curable resin is an ultraviolet curable resin, and the curing means is an ultraviolet irradiation device. 4. The film forming apparatus according to claim 1, wherein the curable resin is an electron beam curing type, and the curing unit is an electron beam irradiation device. The film forming apparatus according to claim 1, wherein the curable resin is a thermosetting resin, and the curing unit is a heating device. The film forming apparatus according to any one of claims 1 to 6, wherein the medium is an insulating substrate, a metal plate, a semiconductor substrate, a plastic film, or a wiring-processed surface thereof. The film forming apparatus according to any one of claims 1 to 7, wherein the orienting means comprises a plurality of electromagnets. 9. The film forming method according to claim 1, wherein the ink jet head, the orientation unit, and the curing unit are provided movably in a scanning direction and a sub-scanning direction with respect to the medium. apparatus. Ejecting a material to be ejected containing a diamagnetic material composed of carbon nanotubes or carbon nanofibers and a curable resin as droplets onto a medium to be ejected by an inkjet head, and the material to be ejected ejected onto the medium A step of orienting the diamagnetic material in a predetermined direction by a magnetic field, and a step of curing the curable resin in a state where the diamagnetic material in the discharged material to be discharged is oriented in a predetermined direction. A film forming method. 11. The film forming method according to claim 10, further comprising a step of pre-orienting the diamagnetic material in the material to be discharged by a magnetic field before the step of discharging the liquid as droplets onto the medium. 12. The film forming method according to claim 10, wherein the curable resin is an ultraviolet curable resin, and the step of curing the droplets is performed by irradiating an ultraviolet ray. 12. The film forming method according to claim 10, wherein the curable resin is an electron beam curing type, and the step of curing the droplets is performed by irradiating an electron beam. 12. The film forming method according to claim 10, wherein the curable resin is a thermosetting resin, and the step of curing the droplets is performed by heating. 15. The film according to claim 10, wherein the step of orienting the diamagnetic material is performed by applying a magnetic field in a direction perpendicular to a surface of the medium to be formed on which the material is formed. Forming method. The method according to any one of claims 10 to 15, wherein the step of aligning the carbon nanotubes or the carbon nanofibers is performed by applying a magnetic field in a direction along a surface of the medium to be patterned on which the pattern is formed. Film formation method.

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