JP2004012431A

JP2004012431A - Non-contact measurement method and measurement device

Info

Publication number: JP2004012431A
Application number: JP2002170565A
Authority: JP
Inventors: Heizaburo Nakagawa; 中川　平三郎; Yoshiaki Kakino; 垣野　義昭
Original assignee: GRAPHIC PROD KK; Mori Seiki Co Ltd; Yasuda Kogyo KK
Current assignee: GRAPHIC PROD KK; DMG Mori Co Ltd; Yasuda Kogyo KK
Priority date: 2002-06-11
Filing date: 2002-06-11
Publication date: 2004-01-15
Anticipated expiration: 2022-06-11
Also published as: JP4159809B2

Abstract

【課題】非接触変位計を用いた三角測量法による変位測定において、従来に増して高精度に変位量を測定し得る測定装置等を提供する。
【解決手段】載置台２０、非接触変位計３０、支持手段１６、送り機構部１４，２１，２３、送り制御手段４３、形状データ生成手段４７の他、被測定物Ｍ表面の測定対象領域内に存在する加工条痕の整列方向を認識する加工条痕認識手段４５と、非接触変位計３０をレーザ光の光軸周りに回転させる回転駆動手段１６，１７と、加工条痕認識手段４５から認識信号を受信し、非接触変位計３０の投光素子３１，受光レンズ及び受光素子３２を含む平面が加工条痕に対して平行となるように、回転駆動手段１６，１７を制御する回転制御手段４４とを備える。
【選択図】　　　　　図２Provided is a measuring device and the like capable of measuring a displacement amount with higher accuracy than before in displacement measurement by a triangulation method using a non-contact displacement meter.
In addition to a mounting table 20, a non-contact displacement meter 30, a support means 16, feed mechanisms 14, 21, 23, a feed control means 43, a shape data generating means 47, and a measurement target area on the surface of a workpiece M Processing line recognition means 45 for recognizing the alignment direction of the processing line existing in the workpiece, rotation driving units 16 and 17 for rotating the non-contact displacement meter 30 around the optical axis of the laser beam, and processing line recognition unit 45 Rotation control for receiving the recognition signal and controlling the rotation driving means 16 and 17 so that the plane including the light projecting element 31, the light receiving lens and the light receiving element 32 of the non-contact displacement meter 30 is parallel to the processing streak. Means 44.
[Selection] Fig. 2

Description

【０００１】
【発明の属する技術分野】
本発明は、レーザ光を被測定物表面に照射してその反射光を受光する非接触変位計を用い、三角測量法によって被測定物表面の変位量を測定する非接触測定方法及び測定装置に関する。
【０００２】
【従来の技術】
上述した非接触変位計は、図１０に示す如き基本構造を備える。即ち、図示するように、この非接触変位計３０は、レーザ光を被測定物表面Ｍａに向けて照射する投光素子３１と、被測定物表面Ｍａによって反射されたレーザ光を受光する受光面３２ａを具備し、この受光面３２ａの法線が投光素子３１から照射されるレーザ光の光軸に対し傾斜した状態に配置される受光素子３２と、投光素子３１と被測定物Ｍとの間に配置され、投光素子３１から照射されたレーザ光を集光して被測定物表面Ｍａに導く投光レンズ３３と、被測定物表面Ｍａのレーザ光受光位置と受光素子３２との間に配置され、被測定物表面Ｍａから反射されたレーザ光を集光して受光素子３２の受光面３２ａに結像せしめる受光レンズ３４などを備え、図１１に示すように、これらが適宜カバー３５内に収容された構成を備える。
【０００３】
受光素子３２に結像されるレーザ光の光量は、図１０に示すように、ガウス分布を示すが、当該受光素子３２では、入光光量のピーク位置を結像位置として認識する。
【０００４】
そして、上記構成の非接触変位計３０は、図１１に示すような三次元測定装置５０の一部として組み込まれ、測定に供される。尚、図中の符号５１は、前記非接触変位計３０を支持する支持部材であり、符号５２は、被測定物Ｍが載置される載置台５２である。支持部材５１は適宜送り装置（図示せず）によって直交３軸（Ｘ軸，Ｙ軸，Ｚ軸）方向に移動するように構成され、かかる支持部材５１の移動によって、非接触変位計３０が被測定物Ｍに対して走査せしめられ、当該被測定物Ｍの三次元形状が測定される。
【０００５】
この非接触変位計３０を用いた変位測定の基本原理は、上述の如く三角測量法による。具体的には、図１２に示すように、受光レンズ３４の中心位置と被測定物表面Ｍａとの間の距離をｈ、受光レンズ３４の中心位置と受光素子３２との間の距離をａ、受光素子３２の中心位置Ｌに立てた法線と、投光素子から照射されるレーザ光の光軸とが交差する角度をγとし、被測定物表面Ｍａによって反射されたレーザ光が受光素子３２の中心位置Ｌに受光されるとした場合に、被測定物表面Ｍａが上方にεだけ変位することによって、受光素子３２のレーザ光受光位置が中心位置ＬからΔｇだけずれたとすると、当該変位εは、下式数式１によってこれを算出することができる。
【０００６】
【数１】

【０００７】
したがって、適宜校正処理によって、前記距離ｈ及びａ、角度γ並びにこの関係における前記受光位置（中心位置）Ｌを予め既定値として取得しておけば、上記数式１によって被測定物表面Ｍａの変位を測定することができる。
【０００８】
【発明が解決しようとする課題】
ところが、被測定物表面Ｍａによって反射される前記反射光は、当該被測定物表面Ｍａの性状に依る影響を極めて受け易く、このため、上述した従来の測定方法及び測定装置では、被測定物表面Ｍａの変位を高精度に測定することができないという問題があった。
【０００９】
より具体的に言うと、例えば、旋盤，マシニングセンタ，研削盤といった工作機械によって機械加工された被測定物Ｍの表面は、鏡面のような平滑面ではなく、当該表面には波状の凹凸が形成され、また、工具の走査方向に沿った加工条痕（筋状の加工跡）が形成される。
【００１０】
前記受光面３２ａに受光されるレーザ光の受光光量は、被測定物Ｍの表面が平滑面である場合には、受光領域の中心部において最大となるが、上記のような凹凸や加工条痕が存在する表面では、凸部で強く反射されたり、或いは、斜面で反射方向が変向したりして、前記受光面３２ａにおける受光量のピークが受光領域の中心部から周縁部にズレた（偏った）状態となる。そして、このピークのズレによって測定誤差を生じる。
【００１１】
その一方、近時、リードタイムの短縮といった観点から、工作機械で加工されたワークを、そのまま機上で高精度に形状測定し得る測定装置が待望されているが、前記非接触変位計３０は振動等の外乱によって測定精度が影響を受け難いといった優れた特長を有することから、機上計測に最も適したツールであると考えられている。
【００１２】
そこで、本発明者らは、上述した非接触変位計３０の特長を生かしつつ、更にその測定精度を高めるべく鋭意研究を重ねた結果、本発明をなすに至ったものである。
【００１３】
斯くして、本発明は、非接触変位計を用い、三角測量法によって被測定物表面の変位を測定する非接触測定方法及び測定装置において、当該被測定物表面の変位を従来に増して高精度に測定し得る測定方法及び測定装置の提供を、その目的とする。
【００１４】
【課題を解決するための手段】
上記課題を解決するための本発明は、レーザ光を被測定物表面に照射する投光素子と、前記被測定物表面によって反射されたレーザ光を受光する受光面を具備し、該受光面の法線が前記投光素子から照射されるレーザ光の光軸に対し傾斜した状態に配置される受光素子と、前記被測定物表面のレーザ光受光位置と前記受光素子との間に配置され、前記被測定物表面から反射されたレーザ光を集光して前記受光素子の受光面に結像せしめる受光レンズとを備えた非接触変位計を用い、
前記投光素子から被測定物表面にレーザ光を照射して、その反射光を前記受光素子に受光せしめ、該受光素子受光面の受光位置を検出して、検出された受光位置、並びに前記投光素子，受光レンズ及び受光素子の配置関係を基に、三角測量法によって前記被測定物表面におけるレーザ光受光位置の変位量を測定する方法において、
前記被測定物表面の測定対象領域に、機械加工によって形成され、一方向に整列された加工条痕が存在する場合に、前記非接触変位計を、その前記投光素子，受光レンズ及び受光素子を含む平面が前記加工条痕と平行となるように配置して、前記測定を行うようにしたことを特徴とする非接触測定方法に係る。
【００１５】
そして、この非接触測定方法は、以下の非接触測定装置によって、これを好適に実施することができる。
【００１６】
即ち、上記非接触測定装置は、
被測定物が載置される載置台と、
前記載置台上の被測定物表面にレーザ光を照射する投光素子と、前記被測定物表面によって反射されたレーザ光を受光する受光面を具備し、該受光面の法線が前記投光素子から照射されるレーザ光の光軸に対し傾斜した状態に配置される受光素子と、前記被測定物表面のレーザ光受光位置と前記受光素子との間に配置され、前記被測定物表面から反射されたレーザ光を集光して前記受光素子の受光面に結像せしめる受光レンズとからなる非接触変位計と、
前記非接触変位計を支持する支持手段と、
前記支持手段と載置台とを直交３軸方向に相対移動させる送り機構部と、
前記直交３軸方向における前記支持手段と載置台との間の相対位置を検出する位置検出器と、
前記送り機構部の作動を制御する送り制御手段と、
前記非接触変位計の受光素子からその受光位置に係るデータを受信し、受信した受光位置、並びに前記投光素子，受光レンズ及び受光素子の配置関係を基に、三角測量法によって前記被測定物表面におけるレーザ光受光位置の変位量を算出し、算出した変位量から前記被測定物に係る形状データを生成する形状データ生成手段と、
前記被測定物表面の測定対象領域に、機械加工によって形成され、一方向に整列された加工条痕が存在するか否かを認識するとともに、該加工条痕の前記整列方向を認識する条痕認識手段と、
前記非接触変位計を、その投光素子から照射されるレーザ光の光軸周りに回転させる回転駆動手段と、
前記条痕認識手段から認識信号を受信し、前記条痕認識手段によって加工条痕の存在が確認された場合に、前記非接触変位計の前記投光素子，受光レンズ及び受光素子を含む平面が前記加工条痕に対して平行となるように、前記回転駆動手段の作動を制御して前記非接触変位計の回転位置を制御する回転制御手段とを設けて構成される。
【００１７】
【発明の実施の形態】
以下、本発明の具体的な実施形態について添付図面に基づき説明する。尚、本例では、工作機械で加工されたワークを機上で測定するように構成された測定装置について説明する。したがって、本測定装置は、工作機械の機構部分及び制御部分の一部をそのまま測定用に利用した構成として観念され、以下、当該工作機械の機構部分及び制御部分を含めて測定装置と呼ぶこととする。
【００１８】
図１は、本実施形態に係る測定装置の概略構成を示した側面図であり、図２は、そのブロック図である。図１に示すように、本例の測定装置１は、ベッド１１と、このベッド１１上に立設されたコラム１２と、コラム１２に上下方向（矢示Ｚ軸方向）に移動可能に支持された主軸頭１３と、主軸頭１３に回転自在に支持された主軸１６と、ベッド１１上に矢示Ｙ軸方向に移動可能に設けられたサドル１９と、このサドル１９上に紙面に対し直交する方向（Ｘ軸方向）に移動可能に設けられたテーブル２０と、主軸１６に保持される非接触変位計３０と、数値制御装置４０などから構成される。
【００１９】
図２に示すように、前記主軸頭１３は送り機構部１４によって駆動され、そのＺ軸方向における位置が送り機構部１４に付設された位置検出器１５によって検出される。また、主軸１６は駆動モータ１７によって回転駆動され、その回転位置が当該主軸１６に付設された回転位置検出器１８によって検出される。
【００２０】
また、前記サドル１９は送り機構部２３によって駆動され、そのＹ軸方向における位置が送り機構部２３に付設された位置検出器２４によって検出される。同様に、前記テーブル２０は送り機構部２１によって駆動され、そのＸ軸方向における位置が送り機構部２１に付設された位置検出器２２によって検出される。
【００２１】
また、前記非接触変位計３０は、上述の図１０及び図１１に示したものと同様の構成を備える。
【００２２】
尚、前記位置検出器１５，２２，２４はそれぞれ磁気スケールや光学スケールなどからなり、回転位置検出器１８は光学式のパルスエンコーダなどからなる。
【００２３】
前記数値制御装置４０は、データ記億部４１，プログラム解析部４２，送り制御部４３，主軸制御部４４，変位計制御部４６，加工条痕認識部４５，形状データ生成部４７などから構成される。
【００２４】
データ記憶部４１はＮＣプログラム，ツールパスデータ，測定プログラム，形状データといった各種プログラムやデータが格納される機能部であり、数値制御装置４０に接続された入出力装置５０から前記プログラムやデータが入力され、当該データ記憶部４１に格納される。このデータ記憶部４１内に格納されたプログラムやデータは、入出力装置５０の出力部に出力されるようになっており、その内容を、当該出力部を通して確認することができるようになっている。
【００２５】
尚、前記加工プログラムは、言うまでもなく、加工順序にしたがって主軸の回転（回転開始，回転停止，回転方向）、その回転角度や回転速度、送り軸、その移動位置や送り速度といった指令をＮＣコードで記述したものである。
【００２６】
また、測定プログラムも同様に、主軸の回転角度、送り軸、その移動位置や送り速度、測定の開始や終了といった指令を、ＮＣコードを含む特定のコードで記述したものである。
【００２７】
例えば、図３に示すように、テーブル２０上に載置された被測定物Ｍの表面Ｍａに適宜設定した測定位置Ｐ_１〜Ｐ_１４の変位量を順次測定する場合、当該測定プログラムでは、まず、測定の開始が指令され、次に、主軸１６の初期回転角度が指令された後、主軸１６に装着された非接触変位計３０を前記各測定位置Ｐ_１〜Ｐ_１４の上方の所定位置に移動させるための座標位置（各送り軸における位置）とその位置に移動する移動速度が順次指令され、最後に測定の終了が指令される。
【００２８】
前記プログラム解析部４２は、前記データ記憶部４１に格納されたプログラムを順次読み出して、これを実行する機能部であり、例えば、ＮＣプログラムを実行する場合には、プログラム中に指定された主軸の回転、その回転角度や回転速度、送り軸、その移動位置や送り速度といった指令を認識し、指令に応じた制御信号を前記送り制御部４３や主軸制御部４４に送信する。また、測定プログラムを実行する場合には、プログラム中に指定された主軸の回転角度、送り軸、その移動位置や送り速度、測定の開始や終了といった指令を認識し、指令に応じた制御信号を前記送り制御部４３，主軸制御部４４，加工条痕認識部４５，変位計制御部４６や形状データ生成部４７に送信する。
【００２９】
前記送り制御部４３は、前記プログラム解析部４２から受信した送り軸，移動位置，送り速度などに関する制御信号に従い、制御対象の各送り機構部１４，２１，２３を各位置検出器１５，２２，２４からフィードバックされる位置信号を基にフィードバック制御して、主軸頭１３，サドル１９やテーブル２０を指令位置に移動させる。これにより、テーブル２０上に載置されたワーク（被測定物）と主軸１６とが前記直交３軸（Ｘ軸，Ｙ軸及びＺ軸）方向に適宜相対移動せしめられる。
【００３０】
前記主軸制御部４４は、前記プログラム解析部４２から受信した主軸の回転，その回転角度や回転速度などに関する制御信号に従い、駆動モータ１７を回転位置検出器１８からフィードバックされる回転位置信号を基にフィードバック制御して、主軸１６を指令角度に割り出したり、指令回転速度で回転させる。
【００３１】
前記変位計制御部４６は、前記プログラム解析部４２から受信した制御信号に基づき、前記非接触変位計３０の作動を制御する。具体的には、前記プログラム解析部４２から測定開始信号を受信して前記非接触変位計３０の投光素子３１からレーザ光を照射させ、測定終了信号を受信してレーザ光の照射を停止させる。
【００３２】
前記加工条痕認識部４５は、図４に示した処理を実行する。即ち、前記プログラム解析部４２から測定開始信号を受信して処理を開始し（ステップＳ１）、ついで、前記プログラム解析部４２から非接触変位計３０の移動位置（測定位置）に係る信号を受信すると（ステップＳ２）、データ記憶部４１に格納されたＮＣプログラム若しくは当該ＮＣプログラムを生成するためのツールパスデータを解析して、当該測定位置を含む所定領域内に存在する加工条痕の角度（本例では、Ｘ軸−Ｙ軸平面における角度）を算出（認識）する（ステップＳ３）。
【００３３】
通常、工作機械によって加工された被測定物Ｍの加工表面には、図５に示すように、工具Ｔの走査方向に沿った加工条痕（筋状の加工跡）Ｔ_Ｍが形成される。尚、図５は、一例としてボールエンドミルによって加工された被測定物Ｍの加工表面を図示したものである。
【００３４】
かかる加工条痕Ｔ_ＭのＸ軸−Ｙ軸平面における角度（図６における角度θ）は、データ記憶部４１に格納されたＮＣプログラム若しくはこのＮＣプログラムを生成するためのツールパスデータからこれを容易に算出することができ、前記加工条痕認識部４５は算出した角度データを主軸制御部４４に送信し、主軸制御部４４は受信した角度位置に主軸１６を回転させる。
【００３５】
前記非接触変位計３０は、主軸１６の回転角度が０°のとき、投光素子３１，受光素子３２，投光レンズ３３及び受光レンズ３４を含む平面が前記Ｘ軸と平行になるように、前記主軸１６に装着されており、主軸１６が加工条痕Ｔ_Ｍと一致する角度に回転せしめられると、図７に示すように、非接触変位計３０の投光素子３１，受光素子３２，投光レンズ３３及び受光レンズ３４を含む平面が加工条痕Ｔ_Ｍと平行になる。
【００３６】
以後、加工条痕認識部４５は、プログラム解析部４２から非接触変位計３０の測定位置に係る信号を受信するたびに、上記加工条痕Ｔ_Ｍの角度を算出してこれを主軸制御部４４に送信し（ステップＳ５）、プログラム解析部４２から測定終了信号を受信した後、処理を終了する（ステップＳ６）。
【００３７】
前記形状データ生成部４７は、前記プログラム解析部４２から測定開始信号を受信して処理を開始し、非接触変位計３０が測定位置に移動したとき、その受光素子３２によって検出された受光位置データ（図１２に示したΔｇ）を受信する。そして、受信した受光位置データを基に三角測量法によって測定位置の変位量を算出し、算出した変位量と前記位置検出器１５から受信した位置信号とを基に、所定の基準位置に対する当該測定位置のＺ軸方向における位置を算出し、算出したＺ軸方向の位置データと、Ｘ軸−Ｙ軸平面における測定位置の位置データとを関連付けて、これを当該測定位置の三次元位置データとしてデータ記憶部４１に格納する。
【００３８】
以上の構成を備えた本例の測定装置１では、テーブル２０上に載置された被測定物Ｍの形状が、以下のようにして測定される。尚、被測定物Ｍは、データ記憶部４１に格納されたＮＣプログラムに基づいて、図３に示した形状に加工され、当該加工済みの被測定物Ｍがそのまま機上で測定されるものとする。また、測定は、被測定物表面Ｍａに設定された測定位置Ｐ_１〜Ｐ_１４のＺ軸方向における位置を測定するものとする。
【００３９】
まず、プログラム解析部４２によりデータ記憶部４１から測定プログラムが読み出され、当該測定プログラムが順次実行される。
【００４０】
即ち、まず、非接触変位計３０の投光素子３１からレーザ光が照射せしめられ、レーザ光が照射された状態で当該非接触変位計３０が、測定位置Ｐ_１の上方に移動せしめられる。その際、測定位置Ｐ_１を含む所定領域内に形成された加工条痕Ｔ_Ｍの角度が、前記加工条痕認識部４５によって認識され、認識された角度となるように主軸１６が回転せしめられる。これにより、当該主軸１６に装着された非接触変位計３０の投光素子３１，受光素子３２，投光レンズ３３及び受光レンズ３４を含む平面が前記加工条痕Ｔ_Ｍと平行になる。
【００４１】
次に、非接触変位計３０の受光素子３２によって検出された受光位置データが、形状データ生成部４７によってサンプリングされ、サンプリングされた受光位置データを基に三角測量法によって測定位置Ｐ_１の変位量が算出される。ついで、算出された変位量を基に、所定の基準位置に対する当該測定位置Ｐ_１のＺ軸方向における位置が算出され、算出されたＺ軸方向の位置データと、Ｘ軸−Ｙ軸平面における測定位置Ｐ_１の位置データとが関連付けられて、これが当該測定位置Ｐ_１の三次元位置データ（形状データ）としてデータ記憶部４１に格納される。
【００４２】
以後、順次、非接触変位計３０が測定位置Ｐ_２〜Ｐ_１４の上方に移動せしめられ、上述の如くして、各測定位置Ｐ_２〜Ｐ_１４における三次元位置が測定され、測定された三次元位置データがデータ記憶部４１に格納される。そして、全ての測定位置Ｐ_１〜Ｐ_１４についての測定が終了した後、当該測定処理が終了される。
【００４３】
上述したように、レーザ光による非接触変位計３０では、被測定物表面Ｍａによって反射されるレーザ反射光が、当該被測定物表面Ｍａの性状に極めて影響され易く、このために、被測定物表面Ｍａの変位量を高精度に測定することができないという根本的な問題がある。
【００４４】
しかしながら、本実施形態では、上述したように、非接触変位計３０の姿勢を、その投光素子３１，受光素子３２，投光レンズ３３及び受光レンズ３４を含む平面が、被測定物表面Ｍａの測定対象領域内に存在する加工条痕Ｔ_Ｍに対して平行となる姿勢としているので、前記受光素子３２に受光される光量のピークが受光領域の中心部から周縁部にズレるのを防止することができ、当該変位量を高精度に測定することができる。
【００４５】
このように、本実施形態によれば、上述した非接触変位計３０の有する問題点を解決し、変位量を高精度に測定することができるが、かかる本実施形態、即ち、本発明における効果を下記実験例によってより具体的に実証する。
【００４６】
（実験例１）
非接触変位計３０として、レーザフォーカス変位計（ＬＴ−８１１０、キーエンス社製）を用い、図８（ａ）に示すように、試料Ｍをテーブル２０上に載置して、非接触変位計３０をＸ軸方向に走査し、前記試料Ｍ表面の変位量を連続的にサンプリング（測定距離１０ｍｍで５０００点）した後、ＪＩＳ　Ｂ　０６０１に従って、その表面粗さＲ_ＺＬを算出した。
【００４７】
尚、非接触変位計３０のレーザ光径は３０μｍであり、図１２に示すｈ，γ，ａの値は、それぞれｈ＝３０ｍｍ，γ＝４０°，ａ＝１０ｍｍであった。また、試料Ｍには、表面粗さがＲ_ｙ＝６．０μｍとＲ_ｙ＝１１．６μｍ（いずれも接触式表面粗さ計で測定）に研削加工された２種類の鋼片を用いた。
【００４８】
また、試料Ｍに形成された加工条痕（研削痕）Ｔ_ＭがＹ軸と平行になるように、当該試料Ｍをテーブル２０上に載置するとともに、主軸１６の回転角度αが０°のとき、図１０に示した投光素子３１，受光素子３２，投光レンズ３３及び受光レンズ３４を含む平面がＸ軸、即ち加工条根Ｔ_Ｍと直交するように、当該非接触変位計３０を主軸１６に装着し、主軸１６の回転角度αを、０°（図８（ｂ）），１０°，２０°，３０°，４０°，４５°，５０°，６０°，７０°，８０°，９０°（図８（ｃ））としてＸ軸方向に走査し、上記の如く試料Ｍの表面粗さＲ_ＺＬを測定した。その結果を図９に示す。
【００４９】
図９から明らかなように、主軸１６の回転角度αが９０°のとき、即ち、前記投光素子３１，受光素子３２，投光レンズ３３及び受光レンズ３４を含む平面が加工条根Ｔ_Ｍと平行となるように、当該非接触変位計３０を配置することで、その測定精度を高めることができる。
【００５０】
以上、本発明の実施形態について説明したが、本発明の採り得る具体的な態様は、何らこれに限定されるものではない。例えば、上例では、制御系を工作機械の数値制御装置４０内に組み込んだ構成としたが、これに限られるものではなく、かかる制御系を工作機械の数値制御装置４０とは別個に設けた構成としても良い。更に、上例では、被測定物Ｍを工作機械上で測定し得る構成としたが、言うまでもなく、測定装置を工作機械とは別に設けた構成とすることもできる。
【００５１】
【発明の効果】
以上詳述したように、本発明によれば、非接触変位計の姿勢を、その投光素子，受光素子及び受光レンズを含む平面が、被測定物表面の測定対象領域内に存在する加工条痕に対して平行となる姿勢としているので、受光素子に受光される光量のピークが受光領域の中心部から周縁部にズレるのを防止することができ、当該変位量を高精度に測定することができる。
【００５２】
斯くして、本発明によれば、外乱の影響を受け難いという特長を備えた非接触変位計の測定精度を高めることができるので、かかる非接触変位計を用いることで、工作機械で加工された加工品をそのまま機上で測定することが可能である。これにより、当該加工におけるリードタイムの短縮など、その生産性を高めることができる。
【図面の簡単な説明】
【図１】本発明の一実施形態に係る非接触測定装置の概略構成を示した側面図である。
【図２】本実施形態に係る非接触測定装置の概略構成を示したブロック図である。
【図３】本実施形態に係る測定手順を説明するための説明図である。
【図４】本実施形態の加工条痕認識部における処理手順をしめしたフローチャートである。
【図５】本実施形態の加工条痕認識部における処理を説明するための説明図である。
【図６】本実施形態の加工条痕認識部における処理を説明するための説明図である。
【図７】本実施形態の加工条痕認識部における処理を説明するための説明図である。
【図８】（ａ），（ｂ）及び（ｃ）は、実験例１の内容を説明するための説明図である。
【図９】実験例１における測定結果を示したグラフである。
【図１０】非接触変位計の基本構造を説明するための説明図である。
【図１１】非接触変位計を備えた測定装置の基本構成を説明するための説明図である。
【図１２】三角測量法による変位測定の基本原理について説明するための説明図である。
【符号の説明】
１　　測定装置
１６　主軸
１７　駆動モータ
１８　回転位置検出器
２０　テーブル
１４，２１，２３　送り機構部
１５，２２，２４　位置検出器
３０　非接触変位計
３１　投光素子
３２　受光素子
３３　投光レンズ
３４　受光レンズ
４０　数値制御装置
４１　データ記憶部
４２　プログラム解析部
４３　送り制御部
４４　主軸制御部
４５　加工条痕認識部
４６　変位計制御部
４７　形状データ生成部[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a non-contact measuring method and a measuring device for measuring a displacement amount of a surface of an object to be measured by a triangulation method using a non-contact displacement meter which irradiates a surface of the object with a laser beam and receives a reflected light thereof. .
[0002]
[Prior art]
The above-mentioned non-contact displacement meter has a basic structure as shown in FIG. That is, as shown in the drawing, the non-contact displacement meter 30 includes a light projecting element 31 that irradiates laser light toward the surface of the object to be measured Ma, and a light receiving surface that receives the laser light reflected by the surface of the object to be measured Ma A light receiving element 32 having a normal to the light receiving surface 32a inclined with respect to the optical axis of the laser light emitted from the light projecting element 31; And a light projecting lens 33 that condenses the laser light emitted from the light projecting element 31 and guides the laser light to the surface Ma of the object to be measured. A light-receiving lens 34 is disposed between the light-receiving elements 32 for condensing the laser light reflected from the surface Ma of the device to be measured and forming an image on the light-receiving surface 32a of the light-receiving element 32. As shown in FIG. 35 is provided.
[0003]
As shown in FIG. 10, the light amount of the laser light imaged on the light receiving element 32 has a Gaussian distribution, but the light receiving element 32 recognizes the peak position of the incident light amount as the image forming position.
[0004]
Then, the non-contact displacement meter 30 having the above configuration is incorporated as a part of the three-dimensional measuring device 50 as shown in FIG. 11 and used for measurement. Note that reference numeral 51 in the drawing denotes a support member that supports the non-contact displacement meter 30, and reference numeral 52 denotes a mounting table 52 on which the workpiece M is mounted. The support member 51 is configured to move in three orthogonal directions (X-axis, Y-axis, and Z-axis) by a feeder (not shown), and the non-contact displacement meter 30 is moved by the movement of the support member 51. The measurement object M is scanned, and the three-dimensional shape of the measurement object M is measured.
[0005]
The basic principle of displacement measurement using the non-contact displacement meter 30 is based on the triangulation method as described above. Specifically, as shown in FIG. 12, the distance between the center position of the light receiving lens 34 and the surface Ma of the device under test is h, the distance between the center position of the light receiving lens 34 and the light receiving element 32 is a, The angle at which the normal line at the center position L of the light receiving element 32 intersects the optical axis of the laser light emitted from the light projecting element is γ, and the laser light reflected by the surface Ma of the object to be measured is the light receiving element 32. If the laser beam receiving position of the light receiving element 32 is shifted from the center position L by Δg due to the object surface Ma being displaced upward by ε when the light is received at the center position L of the Can be calculated by the following equation (1).
[0006]
(Equation 1)

[0007]
Therefore, if the distances h and a, the angle γ, and the light receiving position (center position) L in this relationship are acquired as default values in advance by appropriate calibration processing, the displacement of the surface Ma of the object to be measured can be calculated by the above equation 1. Can be measured.
[0008]
[Problems to be solved by the invention]
However, the reflected light reflected by the surface Ma of the object to be measured is extremely easily affected by the properties of the surface Ma of the object to be measured. There was a problem that the displacement of Ma could not be measured with high accuracy.
[0009]
More specifically, for example, the surface of the workpiece M machined by a machine tool such as a lathe, a machining center, or a grinding machine is not a smooth surface such as a mirror surface, but has wavy irregularities on the surface. Further, a processing streak (streak-like processing trace) is formed along the scanning direction of the tool.
[0010]
The amount of laser light received on the light receiving surface 32a is maximum at the center of the light receiving region when the surface of the device under test M is a smooth surface. On the surface where is present, the light is strongly reflected by the convex portion, or the reflection direction is changed by the slope, and the peak of the amount of light received on the light receiving surface 32a is shifted from the center of the light receiving region to the peripheral portion ( State). Then, a measurement error occurs due to the deviation of the peak.
[0011]
On the other hand, recently, from the viewpoint of shortening the lead time, there has been a long-awaited demand for a measuring device capable of directly measuring the shape of a workpiece machined by a machine tool on the machine with high accuracy. It is considered to be the most suitable tool for on-machine measurement because it has excellent features that measurement accuracy is not easily affected by disturbances such as vibration.
[0012]
Therefore, the present inventors have made extensive studies to improve the measurement accuracy while utilizing the features of the non-contact displacement meter 30 described above, and as a result, have accomplished the present invention.
[0013]
Thus, the present invention provides a non-contact measuring method and a measuring apparatus for measuring the displacement of the surface of an object by triangulation using a non-contact displacement meter, wherein the displacement of the surface of the object is higher than before. It is an object of the present invention to provide a measuring method and a measuring device capable of measuring with high accuracy.
[0014]
[Means for Solving the Problems]
The present invention for solving the above problems has a light emitting element that irradiates a laser beam to a surface of an object to be measured, and a light receiving surface that receives the laser light reflected by the surface of the object to be measured. A light receiving element disposed in a state where the normal is inclined with respect to the optical axis of the laser light emitted from the light emitting element, and is disposed between the laser light receiving position on the surface of the object to be measured and the light receiving element, Using a non-contact displacement meter with a light receiving lens that focuses the laser light reflected from the surface of the measurement object and forms an image on the light receiving surface of the light receiving element,
The surface of the object is irradiated with laser light from the light emitting element, the reflected light is received by the light receiving element, the light receiving position of the light receiving element light receiving surface is detected, and the detected light receiving position and the light emitting position are detected. A method for measuring a displacement amount of a laser light receiving position on the surface of the measured object by a triangulation method based on an arrangement relationship of an optical element, a light receiving lens, and a light receiving element,
In the case where there is a processing streak formed by machining and aligned in one direction in the measurement target area on the surface of the workpiece, the non-contact displacement meter is moved to the light projecting element, the light receiving lens, and the light receiving element. The non-contact measurement method according to claim 1, wherein the measurement is performed by arranging a plane including (i) in parallel with the processing streak.
[0015]
This non-contact measurement method can be suitably implemented by the following non-contact measurement device.
[0016]
That is, the non-contact measurement device is
A mounting table on which an object to be measured is mounted;
A light-emitting element for irradiating the surface of the object to be measured with laser light on the table, and a light-receiving surface for receiving the laser light reflected by the surface of the object to be measured; A light receiving element arranged in a state inclined with respect to the optical axis of the laser light emitted from the element, and disposed between the laser light receiving position on the surface of the object to be measured and the light receiving element, from the surface of the object to be measured. A non-contact displacement meter comprising a light receiving lens for collecting the reflected laser light and forming an image on a light receiving surface of the light receiving element,
Support means for supporting the non-contact displacement meter,
A feed mechanism for relatively moving the support means and the mounting table in three orthogonal directions;
A position detector for detecting a relative position between the support means and the mounting table in the three orthogonal axes;
Feed control means for controlling the operation of the feed mechanism,
The data on the light receiving position is received from the light receiving element of the non-contact displacement meter, and based on the received light receiving position, and the arrangement relationship of the light projecting element, the light receiving lens, and the light receiving element, the object to be measured is triangulated. Shape data generating means for calculating the amount of displacement of the laser beam receiving position on the surface, and generating shape data relating to the measured object from the calculated amount of displacement,
In the measurement target area on the surface of the workpiece, whether or not there is a processing streak formed by machining and aligned in one direction, and a streak that recognizes the alignment direction of the processing streak Recognition means;
Rotation driving means for rotating the non-contact displacement meter around the optical axis of the laser light emitted from the light emitting element,
When a recognition signal is received from the streak recognition means, and the presence of a processing streak is confirmed by the streak recognition means, the plane including the light projecting element, the light receiving lens, and the light receiving element of the non-contact displacement meter is Rotation control means for controlling the operation of the rotation drive means and controlling the rotation position of the non-contact displacement meter so as to be parallel to the processing streak is provided.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings. In this example, a measuring apparatus configured to measure a workpiece processed by a machine tool on the machine will be described. Therefore, the present measuring device is considered as a configuration in which a part of the mechanical part and the control part of the machine tool is used for measurement as it is, and hereinafter, it is referred to as a measuring device including the mechanical part and the control part of the machine tool. I do.
[0018]
FIG. 1 is a side view showing a schematic configuration of a measuring apparatus according to the present embodiment, and FIG. 2 is a block diagram thereof. As shown in FIG. 1, the measuring apparatus 1 of the present embodiment is supported by a bed 11, a column 12 erected on the bed 11, and movably in the vertical direction (Z-axis direction indicated by an arrow) on the column 12. A spindle head 13; a spindle 16 rotatably supported by the spindle head 13; a saddle 19 provided on the bed 11 so as to be movable in the direction of the arrow Y-axis; It comprises a table 20 movably provided in the direction (X-axis direction), a non-contact displacement meter 30 held on the main shaft 16, a numerical controller 40, and the like.
[0019]
As shown in FIG. 2, the spindle head 13 is driven by a feed mechanism 14, and its position in the Z-axis direction is detected by a position detector 15 attached to the feed mechanism 14. The main shaft 16 is driven to rotate by a drive motor 17, and its rotational position is detected by a rotational position detector 18 attached to the main shaft 16.
[0020]
The saddle 19 is driven by a feed mechanism 23, and its position in the Y-axis direction is detected by a position detector 24 attached to the feed mechanism 23. Similarly, the table 20 is driven by a feed mechanism 21 and its position in the X-axis direction is detected by a position detector 22 attached to the feed mechanism 21.
[0021]
The non-contact displacement meter 30 has the same configuration as that shown in FIGS. 10 and 11 described above.
[0022]
The

position detectors

15, 22, and 24 each include a magnetic scale or an optical scale, and the rotational position detector 18 includes an optical pulse encoder or the like.
[0023]
The numerical control device 40 includes a data storage unit 41, a program analysis unit 42, a feed control unit 43, a spindle control unit 44, a displacement meter control unit 46, a machining streak recognition unit 45, a shape data generation unit 47, and the like. You.
[0024]
The data storage unit 41 is a functional unit that stores various programs and data such as NC programs, tool path data, measurement programs, and shape data. The programs and data are input from an input / output device 50 connected to the numerical controller 40. And stored in the data storage unit 41. The programs and data stored in the data storage unit 41 are output to the output unit of the input / output device 50, and the contents can be confirmed through the output unit. .
[0025]
Needless to say, the processing program uses NC codes to issue commands such as rotation of the spindle (start of rotation, rotation stop, rotation direction), rotation angle and rotation speed, feed axis, its movement position and feed speed in accordance with the processing order. It is described.
[0026]
Similarly, in the measurement program, commands such as the rotation angle of the main spindle, the feed axis, its moving position and feed speed, and the start and end of the measurement are described by specific codes including NC codes.
[0027]
For example, as shown in FIG. 3, when sequentially measuring the displacement amounts of the measurement positions P _{1 to} P ₁₄ appropriately set on the surface Ma of the DUT placed on the table 20, first, in the measurement program, , the start of measurement is instructed, then, after the initial rotation angle of the main shaft 16 is commanded, the non-contact displacement meter 30 mounted on the main spindle 16 in a predetermined position above the respective measurement positions P ₁ to P ₁₄ A coordinate position (position on each feed axis) for movement and a moving speed for moving to that position are sequentially commanded, and finally, the end of measurement is commanded.
[0028]
The program analysis unit 42 is a functional unit that sequentially reads out the programs stored in the data storage unit 41 and executes the programs. For example, when an NC program is executed, the It recognizes commands such as rotation, its rotation angle and rotation speed, feed axis, its movement position and feed speed, and transmits a control signal corresponding to the command to the feed control unit 43 and the spindle control unit 44. Also, when executing the measurement program, it recognizes commands such as the rotation angle of the main spindle, the feed axis, its movement position and feed speed, and the start and end of measurement specified in the program, and sends a control signal according to the command. The data is transmitted to the feed control unit 43, the spindle control unit 44, the machining streak recognition unit 45, the displacement meter control unit 46, and the shape data generation unit 47.
[0029]
The feed control unit 43 controls the

feed mechanism units

14, 21, and 23 to be controlled by the

position detectors

15, 22, and 23 according to control signals related to the feed axis, the movement position, the feed speed, and the like received from the program analysis unit 42. The spindle head 13, the saddle 19 and the table 20 are moved to the command position by performing feedback control based on the position signal fed back from 24. As a result, the work (object to be measured) placed on the table 20 and the main shaft 16 are appropriately moved relative to each other in the three orthogonal axes (X axis, Y axis and Z axis).
[0030]
The spindle control unit 44 controls the drive motor 17 based on the rotation position signal fed back from the rotation position detector 18 in accordance with control signals related to the rotation of the spindle, its rotation angle and rotation speed, etc. received from the program analysis unit 42. By performing feedback control, the main shaft 16 is indexed to a command angle or rotated at a command rotation speed.
[0031]
The displacement meter controller 46 controls the operation of the non-contact displacement meter 30 based on the control signal received from the program analyzer 42. More specifically, a measurement start signal is received from the program analysis unit 42, the laser light is emitted from the light emitting element 31 of the non-contact displacement meter 30, and a measurement end signal is received to stop the laser light emission. .
[0032]
The processing streak recognition unit 45 performs the processing shown in FIG. That is, a process is started by receiving a measurement start signal from the program analysis unit 42 (step S1). Then, when a signal related to the movement position (measurement position) of the non-contact displacement meter 30 is received from the program analysis unit 42. (Step S2), the NC program stored in the data storage unit 41 or the tool path data for generating the NC program is analyzed, and the angle of the machining mark existing in the predetermined area including the measurement position (the In the example, an angle on the X-axis-Y-axis plane) is calculated (recognized) (step S3).
[0033]
Normally, as shown in FIG. 5, a processing streak (streak-like processing trace) T _M along the scanning direction of the tool T is formed on the processing surface of the workpiece M processed by the machine tool. FIG. 5 shows a processed surface of the workpiece M processed by a ball end mill as an example.
[0034]
Such angle in X-axis -Y-axis plane of the machining streaks T _M (angular in FIG 6 theta) is facilitate this from the tool path data for generating an NC program or the NC program stored in the data storage unit 41 The machining streak recognition unit 45 transmits the calculated angle data to the spindle control unit 44, and the spindle control unit 44 rotates the spindle 16 to the received angular position.
[0035]
The non-contact displacement meter 30 is configured such that when the rotation angle of the main shaft 16 is 0 °, a plane including the light projecting element 31, the light receiving element 32, the light projecting lens 33, and the light receiving lens 34 is parallel to the X axis. wherein is mounted on the main shaft 16, when is rotated to an angle spindle 16 coincides with the machining streaks T _M, as shown in FIG. 7, the light projecting element 31 of the non-contact displacement gauge 30, the light receiving element 32, projecting plane containing the optical lens 33 and the light receiving lens 34 is parallel to the machining striations T _M.
[0036]
Thereafter, the processing striations recognition unit 45, each time it receives a signal related from the program analyzing section 42 in the measurement position of the non-contact displacement gauge 30, which spindle control unit 44 calculates the angle of the machining streaks T _M (Step S5), and after receiving the measurement end signal from the program analysis unit 42, the process ends (Step S6).
[0037]
The shape data generation unit 47 receives the measurement start signal from the program analysis unit 42, starts processing, and when the non-contact displacement meter 30 moves to the measurement position, the light reception position data detected by the light reception element 32 (Δg shown in FIG. 12) is received. Then, the displacement of the measurement position is calculated by triangulation based on the received light receiving position data, and the measurement for a predetermined reference position is performed based on the calculated displacement and the position signal received from the position detector 15. The position of the position in the Z-axis direction is calculated, the calculated position data in the Z-axis direction is associated with the position data of the measurement position on the X-axis-Y-axis plane, and the data is used as three-dimensional position data of the measurement position. It is stored in the storage unit 41.
[0038]
In the measuring apparatus 1 of the present example having the above configuration, the shape of the DUT placed on the table 20 is measured as follows. Note that the DUT M is processed into the shape shown in FIG. 3 based on the NC program stored in the data storage unit 41, and the processed DUT M is measured on the machine as it is. I do. The measurement is intended to measure the position in the Z-axis direction of the measuring position P ₁ to P ₁₄ which is set in the workpiece surface Ma.
[0039]
First, the measurement programs are read from the data storage unit 41 by the program analysis unit 42, and the measurement programs are sequentially executed.
[0040]
That is, first, the laser beam is made to irradiate from the light emitting element 31 of the non-contact displacement gauge 30, the non-contact type displacement gauge 30 in a state in which laser light is irradiated, it is moved above the measurement position P _1. At that time, the angle of the machining streaks T _M which is formed on a prescribed region including the measurement position P _1, are recognized by the machining streak recognition unit 45, the main shaft 16 is rotated so that the recognized angle . Accordingly, the light projecting element 31 of the non-contact displacement gauge 30 mounted on the spindle 16, the light receiving element 32, the plane containing the projection lens 33 and the light receiving lens 34 becomes parallel to the machining striations T _M.
[0041]
Next, the light receiving position data detected by the light receiving element 32 of the non-contact displacement gauge 30 is sampled by the shape data generating unit 47, the displacement amount of the measurement position P ₁ by triangulation based on the sampled light receiving position data Is calculated. Then, based on the calculated displacement amount, the position in the Z-axis direction of the measuring position P ₁ is calculated with respect to a predetermined reference position, the position data of the calculated Z-axis direction, measured in the X-axis -Y axis plane associated with the position data of the position P ₁ is, which are stored in the data storage unit 41 as a three-dimensional positional data of the measuring position P ₁ (shape data).
[0042]
Thereafter, sequentially, the non-contact displacement meter 30 is moved above the measurement position P ₂ to P _14, and as described above, is measured three-dimensional position at each measurement position P ₂ to P _14, measured tertiary The original position data is stored in the data storage unit 41. Then, after the measurement of all the measurement positions P ₁ to P ₁₄ has ended, the measurement process is ended.
[0043]
As described above, in the non-contact displacement meter 30 using laser light, the laser reflected light reflected by the surface Ma of the object to be measured is extremely easily affected by the properties of the surface Ma of the object to be measured. There is a fundamental problem that the displacement amount of the surface Ma cannot be measured with high accuracy.
[0044]
However, in the present embodiment, as described above, the posture of the non-contact displacement meter 30 is adjusted such that the plane including the light projecting element 31, the light receiving element 32, the light projecting lens 33, and the light receiving lens 34 is positioned on the surface Ma of the workpiece. since the posture to be parallel to the machining streaks T _M present in the measurement target region, the peak of the amount of light received in the light receiving element 32 is prevented from shifting to the peripheral portion from the center of the light-receiving region And the displacement amount can be measured with high accuracy.
[0045]
As described above, according to the present embodiment, the problem of the non-contact displacement meter 30 described above can be solved and the displacement can be measured with high accuracy. Is more specifically demonstrated by the following experimental examples.
[0046]
(Experimental example 1)
A laser focus displacement meter (LT-8110, manufactured by Keyence Corporation) is used as the non-contact displacement meter 30, and the sample M is placed on the table 20 as shown in FIG. Was scanned in the X-axis direction, and the displacement of the surface of the sample M was continuously sampled (5000 points at a measurement distance of 10 mm), and then the surface roughness R _ZL was calculated according to JIS B0601.
[0047]
The laser beam diameter of the non-contact displacement meter 30 was 30 μm, and the values of h, γ, and a shown in FIG. 12 were h = 30 mm, γ = 40 °, and a = 10 mm, respectively. Further, as the sample M, two types of steel slabs having a surface roughness of _Ry = 6.0 μm and _Ry = 11.6 μm (both measured by a contact type surface roughness meter) were used.
[0048]
In addition, the sample M is placed on the table 20 so that the processing mark (grinding mark) T _M formed on the sample M is parallel to the Y axis, and the rotation angle α of the main shaft 16 is 0 °. when, the light projecting element 31 shown in FIG. 10, the light receiving element 32, plane X axis including a light projecting lens 33 and the light receiving lens 34, i.e. so as to be perpendicular to the machining conditions root T _M, the non-contact displacement gauge 30 Attached to the main shaft 16, the rotation angle α of the main shaft 16 is set to 0 ° (FIG. 8B), 10 °, 20 °, 30 °, 40 °, 45 °, 50 °, 60 °, 70 °, 80 ° , 90 ° (FIG. 8C), and scanning was performed in the X-axis direction, and the surface roughness R _ZL of the sample M was measured as described above. The result is shown in FIG.
[0049]
As apparent from FIG. 9, when the rotation angle α of the main shaft 16 is 90 °, i.e., a plane including the light emitting element 31, light receiving element 32, projection lens 33 and the light receiving lens 34 and the working conditions roots T _M By arranging the non-contact displacement meter 30 so as to be parallel, the measurement accuracy can be improved.
[0050]
As described above, the embodiments of the present invention have been described, but specific embodiments that can be adopted by the present invention are not limited thereto. For example, in the above example, the control system is configured to be incorporated in the numerical control device 40 of the machine tool. However, the present invention is not limited to this, and such a control system is provided separately from the numerical control device 40 of the machine tool. It is good also as composition. Further, in the above example, the configuration is such that the workpiece M can be measured on the machine tool. However, it is needless to say that the configuration can be such that the measuring device is provided separately from the machine tool.
[0051]
【The invention's effect】
As described above in detail, according to the present invention, the attitude of the non-contact displacement meter is changed to a processing condition in which a plane including the light projecting element, the light receiving element, and the light receiving lens exists in the measurement target area on the surface of the workpiece. Since the posture is parallel to the mark, it is possible to prevent the peak of the amount of light received by the light receiving element from shifting from the center of the light receiving region to the peripheral portion, and to measure the displacement with high accuracy. Can be.
[0052]
Thus, according to the present invention, it is possible to improve the measurement accuracy of a non-contact displacement meter having a feature of being hardly affected by disturbance. It is possible to measure the processed product as it is on the machine. Thus, productivity such as shortening of the lead time in the processing can be improved.
[Brief description of the drawings]
FIG. 1 is a side view showing a schematic configuration of a non-contact measurement device according to an embodiment of the present invention.
FIG. 2 is a block diagram showing a schematic configuration of the non-contact measurement device according to the embodiment.
FIG. 3 is an explanatory diagram for explaining a measurement procedure according to the embodiment.
FIG. 4 is a flowchart showing a processing procedure in a processing streak recognition unit of the embodiment.
FIG. 5 is an explanatory diagram for explaining processing in a processing streak recognition unit of the embodiment.
FIG. 6 is an explanatory diagram for describing processing in a processing streak recognition unit of the embodiment.
FIG. 7 is an explanatory diagram for describing processing in a processing streak recognition unit of the embodiment.
FIGS. 8A, 8B, and 8C are explanatory diagrams for explaining the contents of Experimental Example 1. FIGS.
FIG. 9 is a graph showing measurement results in Experimental Example 1.
FIG. 10 is an explanatory diagram for explaining a basic structure of a non-contact displacement meter.
FIG. 11 is an explanatory diagram for describing a basic configuration of a measuring device including a non-contact displacement meter.
FIG. 12 is an explanatory diagram for describing a basic principle of displacement measurement by a triangulation method.
[Explanation of symbols]
Reference Signs List 1 Measuring device 16 Main shaft 17 Drive motor 18 Rotational position detector 20 Table 14, 21, 23

Feeding mechanism

15, 22, 24 Position detector 30 Non-contact displacement meter 31 Light emitting element 32 Light receiving element 33 Light emitting lens 34 Light receiving lens Reference Signs List 40 Numerical control device 41 Data storage unit 42 Program analysis unit 43 Feed control unit 44 Spindle control unit 45 Machining mark recognition unit 46 Displacement gauge control unit 47 Shape data generation unit

Claims

A light emitting element for irradiating the surface of the object with the laser light,
A light receiving surface for receiving the laser light reflected by the surface of the object to be measured, the light receiving surface being arranged so that the normal of the light receiving surface is inclined with respect to the optical axis of the laser light emitted from the light emitting element; Element,
A light receiving lens disposed between the laser light receiving position on the surface of the device to be measured and the light receiving element, for condensing the laser light reflected from the surface of the device to be measured and forming an image on a light receiving surface of the light receiving device; Using a non-contact displacement meter with
The surface of the object is irradiated with laser light from the light emitting element, the reflected light is received by the light receiving element, the light receiving position of the light receiving element light receiving surface is detected, and the detected light receiving position and the light emitting position are detected. A method for measuring a displacement amount of a laser light receiving position on the surface of the measured object by a triangulation method based on an arrangement relationship of an optical element, a light receiving lens, and a light receiving element,
In the measurement target area of the surface of the object to be measured, when there is a processing streak formed by machining and aligned in one direction,
The non-contact displacement meter is arranged so that a plane including the light projecting element, the light receiving lens and the light receiving element is parallel to the processing streak, and performs the measurement. Measuring method.

A mounting table on which an object to be measured is mounted;
A light-emitting element for irradiating the surface of the object to be measured with laser light on the table, and a light-receiving surface for receiving the laser light reflected by the surface of the object to be measured; A light receiving element arranged in a state inclined with respect to the optical axis of the laser light emitted from the element, and disposed between the laser light receiving position on the surface of the object to be measured and the light receiving element, from the surface of the object to be measured. A non-contact displacement meter comprising a light receiving lens for collecting the reflected laser light and forming an image on a light receiving surface of the light receiving element,
Support means for supporting the non-contact displacement meter,
A feed mechanism for relatively moving the support means and the mounting table in three orthogonal directions;
A position detector for detecting a relative position between the support means and the mounting table in the three orthogonal axes;
Feed control means for controlling the operation of the feed mechanism,
The data on the light receiving position is received from the light receiving element of the non-contact displacement meter, and based on the received light receiving position, and the arrangement relationship of the light projecting element, the light receiving lens, and the light receiving element, the object to be measured is triangulated. Shape data generating means for calculating the amount of displacement of the laser beam receiving position on the surface, and generating shape data relating to the measured object from the calculated amount of displacement,
In the measurement target area on the surface of the workpiece, whether or not there is a processing streak formed by machining and aligned in one direction, and a streak that recognizes the alignment direction of the processing streak Recognition means;
Rotation driving means for rotating the non-contact displacement meter around the optical axis of the laser light emitted from the light emitting element,
When a recognition signal is received from the streak recognition means, and the presence of a processing streak is confirmed by the streak recognition means, the plane including the light projecting element, the light receiving lens, and the light receiving element of the non-contact displacement meter is A rotation control means for controlling an operation of the rotation drive means to control a rotation position of the non-contact displacement meter so as to be parallel to the processing streak; measuring device.

Further comprising storage means for storing an NC program used for machining the object to be measured or tool path data for generating the NC program;
3. The non-contact measurement device according to claim 2, wherein the streak recognition means is configured to recognize the processing streak based on an NC program or tool path data stored in the storage means.