JP2004087123A - Recording head, method for manufacturing recording head, and composite head and magnetic recording and reproducing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a recording head capable of utilizing its high saturation magnetization characteristics derived from a high saturation magnetization core material and a 2T saturation magnetization Co-Ni-Fe film by materializing the recording head and a composite head, each having low reproduction noise even in applying the Co-Ni-Fe film or a 45 NiFe film to the composite head and the recording head having high recording performance at a high frequency, the recording head having narrow track width in high density recording, and to provide a method for manufacturing the recording head and the composite head, and a storage device having high capacity and for high speed data transfer by using a recording head- or composite head-mounted magnetic recording and reproducing device. <P>SOLUTION: The recording head forms a recording gap at one end of a first and a second magnetic core facing each other and magnetic connection at the other end. An insulated coil is provided between the first and the second magnetic core. The magnetic fluxes of the first and the second magnetic core excited by the coil are leaked from the recording gap to apply recording to the magnetic medium. Distance from the tip section formed in proximity to the magnetic medium of the gap to the contact point of the magnetic connection is <20 μm. <P>COPYRIGHT: (C)2004,JPO

Description

The present invention relates to a magnetic head for a magnetic recording / reproducing apparatus and a magnetic recording / reproducing apparatus. More particularly, the present invention relates to a magnetic recording / reproducing apparatus. The present invention relates to a recording head, a composite head, and a magnetic recording / reproducing apparatus in which fluctuation is suppressed.

(4) With the miniaturization and large capacity of magnetic storage devices, the volume per bit recorded on a magnetic medium is rapidly decreasing. A magnetoresistive head (hereinafter referred to as "MR head") can detect a magnetic signal generated from the minute bit as a large reproduction output.

This MR head is discussed in Non-Patent Document 1 as "A MagnetoresistivityReadoutTransducer".

More recently, a GMR head using a giant magnetoresistance effect (hereinafter referred to as "GMR") capable of realizing a significantly higher output than this MR head has been put into practical use.

In the GMR effect, in particular, the magnetoresistive effect generally called a spin valve effect, in which the change in resistance corresponds to the cosine between the magnetization directions of two adjacent magnetic layers, is because a large change in resistance occurs with a small operating magnetic field. A GMR head using this is a general term for a “GMR head”.

Ｇ The GMR head using the spin valve effect is discussed in Non-Patent Document 2 as “Design, Fabrication & Testing of Spin-ValveRead Heads for High Density Recording”.

Among them, one of the two magnetic layers that generate the spin valve effect enters the head magnetic sensing part by an exchange coupling magnetic field generated by laminating an antiferromagnetic film on this magnetic layer. The magnetization fixed layer has a magnetization fixed so as to be substantially aligned with the direction of the medium magnetic field.

{Circle around (2)} The other magnetic layer adjacent to the fixed magnetization layer and the conductive layer made of Cu or the like is a magnetization free layer that can freely change the magnetization direction with respect to the medium magnetic field. Hereinafter, a GMR head using the spin valve effect is referred to as a “GMR head”.

6 and 7 are configuration diagrams of a specific example of a conventional composite head 50 including a GMR reproducing head 70 and an ID recording head 60. FIG. 7 shows a structure of the GMR head in a surface facing a magnetic medium. FIG. 6 is a cross-sectional view taken along a line AB in FIG. 7 as viewed from a certain air bearing surface surface (ABS surface).

That is, between the lower shield 2 and the upper shield 6 laminated on the ceramic 1 serving as the slider, the spin valve laminated structure for generating the GMR effect is disposed as the central region 4 via the magnetic separation layer 3 made of an insulator. Then, an end region 5 for supplying a current and a bias magnetic field to both ends of the central region 4 is formed. The above is the GMR element for performing reproduction.

Furthermore, the upper shield 6 is used as the first magnetic core 6, and the second magnetic core 11 is arranged on the surface of the magnetic core 6 opposite to the GMR element via the recording gap 7.

A coil 9 sandwiched between a recording gap film 7, a non-magnetic insulator 10a and a non-magnetic insulator 10b is disposed slightly behind the ABS of the magnetic cores 6 and 11, and a magnetic field magnetized by a magnetic field generated from the coil. Recording is performed by magnetic flux leaking from the recording gap 7 between the cores 6 and 11.

複合 A composite structure head in which the above-described GMR or MR reproducing head and an inductive (hereinafter, referred to as “ID”) recording head are stacked is referred to as a composite head.

The recording density at which the composite head using GMR is actually used is a high-density recording area of 3 gigabits or more per square inch. At recording densities lower than this, a conventional composite head using magnetic anisotropy can be sufficiently covered.

That is, a composite head using GMR that is practically meaningful realizes high-density magnetic recording and reproduction of 3 gigabits or more per square inch.

Conversely, a magnetic recording / reproducing device constructed using a composite head using GMR is a device for performing high-density recording / reproducing of 3 gigabits per square inch or more.

ＩＤBy the way, an ID head having a function of recording on a magnetic medium has always been required to have high-density recording performance. In particular, in order to perform high-density recording, it is essential to increase the coercive force of the magnetic medium. This is because the transition length of the magnetization recorded on the medium is reduced along with the improvement in the recording density, and the magnetization is stably maintained even if the magnetization length per bit is shortened.

From this, the development of an ID head for increasing the recording magnetic field so as to perform recording on a high coercive force medium suitable for high-density recording has been energetically advanced.

Conventionally, a Ni—Fe plated film (hereinafter, referred to as permalloy) of about 80% by weight of Ni has been used for the magnetic core of the ID head. This material has a saturation magnetization (Bs) of about 1T (tesla) and can perform recording of 3 gigabits per square inch, which is described in Non-Patent Document 3 as "3 Gb / in2 recording demostation with dual element heads & thin film disks". Has been stated.

However, in order to perform recording at 5 gigabits or more per square inch, a Ni—Fe plating film (hereinafter abbreviated as 45NiFe) of about 45% by weight of Ni is required instead of permalloy. No. 4 describes “5 Gb / in2 recording demonstration with conventional AMR dual element heads & thin film disks”.

材料 This material has a maximum saturation magnetization of 1.6T (tesla). In addition, Non-Patent Document 5 describes that this material can record about 12 gigabits per square inch as "12 Gb / in2 recording demonstration with SV read heads & conventional near-narrow pole-write". On the other hand, Patent Literature 1 and Patent Literature 2 are examples of using a Ni—Fe plating film with Bs of about 1.6.

Further, as an example using a high saturation magnetization Bs material formed by a sputtering method, an example using a Co-based amorphous material typified by a Co-Ta-Zr sputtered film as in Patent Document 3 is known. is there.

In a Co-based amorphous film, high Bs up to about 1.5T is possible. Patent Document 4 discloses application of a high Bs material such as ferric nitride. It is thought that a high Bs of about 1.9T is possible with an iron-nitrogen-based material.

Further, in consideration of the simplicity of the manufacturing process and the low cost of the magnetic head, it is effective that the magnetic material for forming the recording magnetic pole is formed by a plating method.

In the plating method, a desired pattern can be obtained by forming a photoresist frame in advance through the shape of the magnetic pole and growing a plating film in the frame. Due to the simplicity and low cost of this method, this method is now the standard method for manufacturing thin-film magnetic heads.

On the other hand, when a magnetic core pattern is formed by a sputtering method, a photoresist mask is formed in a core shape on a magnetic film formed in advance, and the core pattern is formed by etching using an ion beam.

In this method, firstly, an expensive ion beam etching apparatus is required, secondly, a long processing time is required to pattern a thick magnetic core film of several μm, and thirdly, a recording width on a medium is required. There is a problem that it is very difficult to form a magnetic core tip portion having a narrow width.

Particularly, it is very difficult to pattern the upper core 11 under the condition that there is a large step due to the coil and the insulating layers above and below it as shown in FIG.

Patent Document 5 discloses a method in which only a magnetic core tip is formed before a large step formed by a coil and an insulating layer is formed, and an iron-nitrogen sputter film is introduced into this portion. Therefore, an inexpensive manufacturing method cannot be provided.

As described above, applying the sputtered film to the magnetic core cannot avoid the increase in cost due to the complicated manufacturing process.

Also, it is considered that a high Bs film exceeding 1.5 T obtained by 45Ni—Fe is required as the recording density is improved. It is of great significance to achieve this with an inexpensive plating method. A Co-Fe-Ni-based material is considered to be promising as a material system for realizing high Bs exceeding 1.5 T in the plating film.

Further, in the composition diagram of the three elements in FIG. 1 of Patent Document 6, a line of magnetostriction λs = 0 in the Co—Fe—Ni plating film is shown, and in the ternary composition diagram of FIG. Bs in the Co—Fe—Ni plated film is shown.

From these figures, it is disclosed that Bs in the vicinity of 80Co10Fe10Ni where λs becomes substantially zero is about 1.6T.

On the other hand, in Patent Document 7, the crystallinity of the Co—Fe—Ni plated film is adjusted in order to achieve both low magnetostriction and high Bs, which were not realized in Patent Document 8 described above.

As a result, a plated Co—Fe—Ni film with λs <5 × 10 −6 and Bs of about 1.7 T is obtained.

Moreover, Patent Document 9 also states that a low coercive force was obtained by adjusting the crystallinity, and that Bs in the range of 1.3 to 2T was obtained.

Further, in Patent Document 10, a Co—Ni—Fe plated film is formed in a bath without an additive containing S such as saccharin, and a high-purity film in which the sulfur concentration in the film is suppressed to 0.1% by weight or less. As compared with Patent Document 11, the mixed crystal composition of fcc and bcc moves to the region where the Fe composition is large, and the magnetostriction is reduced to a practical level by this composition, and 1.9T to 2.2T is obtained. It is disclosed that extremely high Bs is realized with good soft magnetic properties of a coercive force of 2.50 e or less.

As described above, the Co—Ni—Fe-based plating film realizes practical soft magnetic characteristics as a magnetic core material of an ID head by controlling its crystallinity and the content of contaminants in the film. can do. And, as disclosed in Patent Document 12, it is possible to have extremely large Bs and realize good soft magnetism.
"IEEETrans.onMagn, .MAG7 (1971) 150" "IEEE Trans. On Magn, Vol. 30, No. 6 (1994) 3801" "IEEE Trans. On Magn, Vol. 32, No. 1 (1996) pp. 7-12" "IEEE Trans. On Magn, Vol. 33, No. 5 (1997) pp. 2866-2871" “IEEE Trans. On Magn, Vol. 32, No. 1 (1996) pp. 7-12” JP-A-8-212512 JP-A-11-16120 JP-A-10-162322 JP-A-7-262519 JP-A-7-262519 JP-B-63-53277 JP-A-6-346202 JP-B-63-53277 JP-A-7-3489 Japanese Patent No. 282456 JP-B-63-53277 Patent No. 2821456

As described above, as described above, a Co-Ni-Fe film or a 45NiFe film having a large saturation magnetization formed by a plating method is extremely promising as a recording core material for achieving high-density magnetic recording. It can be said that. However, these films have the following properties, and have conventionally caused various problems due to these properties.

That is, the first problem is that the magnetostriction of a high Bs Co—Ni—Fe film or 45NiFe film is positive.

For example, when a 45NiFe film is applied to the upper shield of a GMR reproducing head also used as a recording core, the reproduction output after the recording operation fluctuates significantly, resulting in a composite head that is not practical.

(4) This is because the magnetostriction is positive, so that the magnetization state of the upper shield after the recording operation is hardly stabilized at a constant state, which affects the reproduction characteristics.

Therefore, 45NiFe could not be applied to the upper shield which was also used as the recording magnetic core.

(4) For this reason, 45NiFe having a large saturation magnetization was applied only to the upper core, and ordinary permalloy was applied to the upper shield, so that the recording capability itself was limited.

ＣｏAlthough the Co—Ni—Fe film can control the magnetostriction from positive to negative by controlling the composition, it has positive magnetostriction when the saturation magnetization is as large as 1.7 T or more. Therefore, there was a problem similar to that of 45NiFe described above.

Furthermore, in the case of permalloy conventionally used for the upper shield, since the magnetostriction of the permalloy film is controlled by the film composition, it is necessary to strictly control the composition for obtaining an appropriate magnetostriction as the upper shield. was there. This has led to increased manufacturing costs.

２The second problem is that the stress is large especially in a Co—Ni—Fe film in which the saturation magnetization is as large as about 2T.

The stress is about 0.8 GPa, and when a thick film having a thickness of 2 μm or more is to be formed, peeling of the film has been remarkable.

As a result, conventionally, if it was attempted to form the entire upper magnetic core with a Co—Ni—Fe film having a large saturation magnetization, it was difficult to manufacture because the film thickness required was 2 μm or more. As a method of applying the Co-Ni-Fe film to the upper magnetic core, a method of forming a Co-Ni-Fe film in the vicinity of the recording gap in a thickness of about 0.5 µm and further laminating a permalloy in a thickness of about 3.5 µm has been used. .

で も Also with this method, the effect of the high saturation magnetization material has been successfully brought out to a great extent, but in order to further bring out the effect to the maximum, it is desirable to form the entire upper core with a Co—Ni—Fe film.

Further, the third problem is that, generally, the recording head is required to operate at higher frequency as well as to increase the recording density. In particular, in the case of a Co—Ni—Fe film having a large saturation magnetization of about 2T, the specific resistance is as small as about 20 μΩcm, so that the eddy current loss in high-frequency operation increases and recording characteristics are likely to deteriorate. That is the point.

Therefore, a main object of the present invention is to improve the above-mentioned disadvantages of the conventional technique and to apply a Co--Ni--Fe film or 45NiFe film having a large saturation magnetization for realizing high recording performance to the upper shield of the composite head. Another object of the present invention is to provide a recording head and a composite head in which fluctuations in reproduction characteristics are suppressed.

A second object of the present invention is to use a magnetic core material having a large saturation magnetization, in particular, a Co—Ni—Fe film or a Ni—Fe alloy film having a saturation magnetization of 1.5 or more to obtain a high saturation magnetization. An object of the present invention is to provide a recording head capable of maximizing the use of magnetization characteristics as recording characteristics.

A third object of the present invention is to provide a recording head having high recording performance at high frequencies.

{Circle around (4)} A fourth object of the present invention is to provide a method for manufacturing the above-described recording head and composite head. In particular, it is an object of the present invention to provide a method of manufacturing a magnetic core capable of performing narrow recording corresponding to high-density recording realized by applying the recording head of the present invention.

Further, a fifth object of the present invention is to provide a magnetic recording / reproducing apparatus equipped with the above recording head and composite head.

In order to achieve the above object, the present invention basically adopts the technical configuration as described below.

That is, according to a first aspect of the present invention, one end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction. A coil insulated by an insulator is provided between the first magnetic core and the second magnetic core, and a magnetic flux of the first and second magnetic cores excited by the coil is provided. A magnetic head that performs recording on a magnetic medium by leaking from the recording gap, wherein a distance L (hereinafter referred to as a yoke length) from a leading end of the recording gap close to the magnetic medium to a contact point of the magnetic junction. ) Is 20 μm or less, and the vicinity of the recording gap of at least one of the opposing first and second magnetic cores is mainly composed of at least two types of elements selected from Co, Fe, and Ni. Specially According to a second aspect of the present invention, there is provided a method for manufacturing a recording head having a magnetic head as described above, wherein the coil is formed by seeding on an insulator film. A first step of forming a layer, a second step of forming a resist pattern on the seed layer, a third step of depositing a coil material between the resist patterns by plating, and a fourth step of removing the resist pattern. , A fifth step of removing the seed layer under the resist pattern, and a sixth step of covering the coil material with an insulator in the above-described order. Is a manufacturing method.

According to a third aspect of the present invention, there is provided a method of manufacturing a recording head having a magnetic head as described above, wherein the coil is formed by a first step of forming an insulator film pattern, A second step of forming a groove for forming a coil in the insulator film pattern, a third step of forming a seed layer in the insulator pattern in which the groove is formed, and forming a coil material on the seed layer by plating. The fourth step of forming, while removing the coil material formed other than the groove by polishing, the height of the surface of the coil material formed in the groove, the height of the surface of the insulator film other than the groove, And a sixth step of covering the surface of the insulator film other than the groove with an insulator, and a fifth step of combining the coil material formed in the groove with an insulator. Of the recording head It is a production method.

On the other hand, according to a fourth aspect of the present invention, one of the first and second magnetic cores provided in the recording head is also used as a first magnetic shield, and the first magnetic shield is provided. The present invention is a composite head configured to perform reproduction by a magnetoresistive element provided between a magnetic shield and a second magnetic shield provided opposite to the first magnetic shield. A fifth aspect according to the present invention is a magnetic recording / reproducing apparatus equipped with the above-described composite head.

According to the present invention, first, even when a Co—Ni—Fe film or 45NiFe film having a large saturation magnetization for realizing high recording performance is applied to the upper shield of the composite head, a recording head in which reproduction noise is suppressed, and A composite head has been realized.

Secondly, there is provided a recording head which uses a magnetic core material having a large saturation magnetization, in particular, a Co-Ni-Fe film capable of obtaining a 2T saturation magnetization, and can utilize its high saturation magnetization characteristics to the maximum extent as recording characteristics. Was.

Third, a recording head having high recording performance at high frequencies was provided.

Fourth, it is possible to provide a recording head with a narrow track width corresponding to high-density recording.

Fifth, the above-described method of manufacturing a recording head and a composite head can be provided. Sixth, a storage device suitable for high-speed data transfer with a large capacity has been realized by the magnetic recording / reproducing device equipped with the above-mentioned recording head and composite head.

Since the recording head, the composite head, or the magnetic recording / reproducing apparatus according to the present invention employs the above-described technical configuration, a Co—Ni—Fe film or a 45NiFe film having a large saturation magnetization for realizing high recording performance is provided. Is applied to the upper shield of the composite head, it is possible to realize a recording head in which reproduction noise is suppressed, and a composite head, and at the same time, a magnetic core material having a large saturation magnetization, in particular, 1.5 or more. By using a Co—Ni—Fe film capable of obtaining a saturation magnetization, a recording head capable of maximally utilizing its high saturation magnetization characteristics as recording characteristics can be realized.

In particular, in the case of a Co—Ni—Fe film or a Ni—Fe alloy film having a Bs of 1.7 or more, the magnetostriction tends to be positively increased as the Bs increases, and thus there is a problem that the reproduction noise increases. However, in the configuration of the present invention, since the reproduction noise can be suppressed even with a material having a large magnetostriction, a higher Bs film can be applied to the magnetic core.

In addition, the recording head, composite head, or magnetic recording / reproducing apparatus according to the present invention has a high recording performance at high frequencies and can form a recording head with a narrow track width corresponding to high-density recording. A storage device suitable for recording, reproducing, and transferring high-speed data can be realized.

Hereinafter, the configuration of a specific example of a recording head and a method of manufacturing the recording head according to the present invention will be described in detail with reference to the drawings.

That is, FIG. 1 is a cross-sectional view showing a configuration of a specific example of the recording head according to the present invention, in which one end of a first magnetic core 6 and a second magnetic core 11 facing each other. 61 forms a recording gap 7, and the other end 62 forms a magnetic junction 63. An insulator 10 is provided between the first magnetic core 6 and the second magnetic core 11. A magnetic head that is provided with an insulated coil 9 and that performs recording on a magnetic medium 31 by leaking magnetic flux from the first and second magnetic cores 6 and 11 excited by the coil 9 from the recording gap 7. 60, a distance L (hereinafter referred to as a yoke length) from a leading end 64 of the recording gap 7 close to the magnetic medium 31 to a contact 65 of the magnetic junction 63 is set to be 20 μm or less. Shown recording head 60 That.

FIG. 3 shows another configuration example of the recording head 60 according to the present invention, in which a photoresist 8 is arranged as a lower insulator covering the coil 9. FIG. 4 shows still another configuration example of the recording head 60 according to the present invention, in which the coil 9 has a two-layer configuration.

FIGS. 1, 3 and 4 show the names of the parameters defined by the recording head 60 according to the present invention.

That is, also in each of the above-described specific examples, the yoke length L is a length from the ABS 40 of the magnetic core 11 to a point 65 where the magnetic core 11 and the magnetic core 6 are in contact. In the drawing, the distances from the coil at the extreme end to the ends of the insulators 10, 10a, and 10b that cover the coil from above are represented by W1, W2, W1 ', and W2'. The thicknesses of the insulators 10, 10a, and 10b on the upper side in the drawing that cover the coil 9 are represented by h and h '.

In the recording head 60 according to the present invention, the vicinity of the recording gap of at least one of the opposed first and second magnetic cores 6 and 11 is selected from Co, Fe, and Ni. It is desirable to use a magnetic material containing at least two types of elements as main components and a magnetic material having a saturation magnetization of 1.5 T or more.

Further, in the recording head 60 according to the present invention, at least one of the opposed first and second magnetic cores is formed of a laminated body of magnetic materials having different saturation magnetizations. It is also desirable that the saturation magnetization of the magnetic body near the recording gap be larger than the saturation magnetization of the magnetic body far from the recording gap.

In this case, the magnetic material in the vicinity of the recording gap is a magnetic material containing at least two kinds of elements selected from Co, Fe, and Ni as main components, and has a saturation magnetization of 1.5 T or more. desirable.

Further, in the recording head 60 according to the present invention, the saturation magnetization (unit: T) and the film thickness (unit) of the magnetic material constituting each of the first and second magnetic cores 6 and 11 facing each other are set. : Μm) is 0.05 (T) × yoke length (μm) +0.5 (T · μm) ≦ saturated magnetization (T) × film thickness (μm) with respect to the yoke length (unit: μm). It is preferable that the relationship is satisfied.

As a more preferable condition, a relational expression of 0.05 (T) × yoke length (μm) +0.5 (T · μm) ≦ saturated magnetization (T) × film thickness (μm) ≦ 4 (T · μm) Is satisfied.

発 明 The inventors of the present application have conducted various experiments to solve the above-mentioned problems of the prior art, and have reached the present invention.

That is, the inventors of the present invention have proposed a method of recording a Co-Ni-Fe film or a 45NiFe film having a large saturation magnetization, which achieves a high recording performance, on the upper shield of a recording head or a magnetic core, which is a main object of the present invention. It has been found that by arranging the recording head in the vicinity of the gap, it is possible to manufacture a recording head and a composite head in which fluctuations in reproduction characteristics are suppressed, but various technical problems may occur at that time. It became clear that the countermeasures had to be considered together.

The inventors of the present application have shown in Tables 1 to 3 the magnetic cores constituting the upper core and the magnetic shield constituting the upper shield in the magnetic head as described in Tables 1 to 3. Samples having various film configurations were prepared, and various magnetic heads were manufactured using the samples.

Each of the above samples is manufactured by plating or sputtering, including various permalloy films and magnetic films in which the composition ratio of each composition of Co—Ni—Fe is variously changed.

The saturation magnetic field (T), magnetostriction, specific resistance, and film thickness of each sample film are changed as shown in Table 1, and the yoke length L when manufacturing a magnetic head using each sample film. Was manufactured with various lengths.

In particular, regarding the yoke length L, as described in Tables 1 to 3, when a magnetic head in which the yoke length L is variously changed between 5 μm and 75 μm is created and the yoke length is changed. Of the recording head 60 was examined.

The coil constituting the magnetic head had the pattern shape shown in FIG. 34, and was formed by reducing or enlarging the pattern shape according to the length of the yoke length L. The measurement was performed so that the magnitude of the magnetic field intensity (the number of coil turns × current) generated by the coil was the same.

First, in the first embodiment and Comparative Examples 1, 2, and 3 of the present invention shown in Table 1, as shown in FIGS. 2 and 5, the configuration of the magnetic head is the same as that of the coil. The magnetic core 6 is composed of two layers of magnetic films, and the magnetic core 11 is composed of one layer of magnetic films.

Further, in the second embodiment according to the present invention in Table 2 and Comparative Examples 4 to 14 shown in Table 1, magnetic heads having the structure shown in FIGS. 8 and 9 are formed. In this case, the form of the coil is one stage, the magnetic core 6 is composed of two layers of magnetic films, and the magnetic core 11 is also composed of two layers of magnetic films.

Further, in the third embodiment according to the present invention shown in Table 2, as shown in FIGS. 11 and 12, the configuration of the magnetic head is such that the form of the coil is one stage and the magnetic core 6 Is composed of a single magnetic film, and the magnetic core 11 is composed of two magnetic films.

Further, in the fourth embodiment of the present invention shown in Table 2, as shown in FIGS. 13 and 14, the configuration of the magnetic head is such that the form of the coil is one stage and the magnetic core 6 Is composed of a single magnetic film, and the magnetic core 11 is also composed of a single magnetic film.

Further, in the fifth embodiment and comparative example 15 of the present invention shown in Table 3, as shown in FIG. 15, the configuration of the magnetic head is such that the form of the coil is one stage, Numeral 6 is composed of two magnetic films, and the magnetic core 11 is composed of one magnetic film.

In the evaluation of each sample in Tables 1 to 3, the output fluctuation rate, a 30% Roll-off frequency of 100 MHz, and an O / W value (dB) described later were adopted. Is not more than 1.0%, the 30% Roll-off frequency is not less than 100 MHz, and the overwrite O / W value (dB) is not less than 30. The evaluation was performed based on criteria to be established.

記録 The recording and reproducing conditions were evaluated based on the coercive force of the magnetic medium of 4000 Oe and the magnetic spacing of 35 nm.

First, judging from the respective characteristic values of the first embodiment, if the yoke length is 19 μm or less, the output fluctuation rate described later is 1. regardless of the configuration of the magnetic film and the manufacturing method thereof. It was found that the magnetic head exhibited good characteristics of being 0% or less and having a 30% Roll-off frequency of 100 MHz or more. On the other hand, as shown in Comparative Example 1, it was found that when the yoke length was long, the frequency characteristics were particularly deteriorated.

特 に Also, it is understood that good magnetic head characteristics are exhibited even when the 45NiFe film is used for the upper core 11 and the magnetostriction value of the 45NiFe film is 15 × 10 −6.

Although the comparative examples 2 and 3 have the same configuration as the above-described first embodiment of the present invention, the thickness of the magnetic core 11 constituting the upper core is too small. As a result, the O / W value (dB) is significantly reduced, and it has been found that the magnetic head exhibits undesirable characteristics.

Next, from the results of the second embodiment of the present invention and the results of Comparative Examples 4 to 14 in which the yoke length L was changed from 23 μm to 75 μm, the output fluctuation accompanying the recording operation and the 30% Roll-off frequency characteristic 18 and 19 show the evaluation results for the yoke length.

Here, the “output fluctuation accompanying the recording operation” means the ratio of the standard deviation of the reproduction output to the average value of the reproduction output (“standard deviation” / reproduction output) when the reproduction output is measured after each recording operation. The average value of ").

In such an experiment, in the composite head 50, as shown in FIGS. 8 and 9, the magnetic core 6a and the magnetic core 11a in the vicinity of the recording gap 7 are provided with Co--Ni-- having large saturation magnetization and positive magnetostriction. An Fe film was arranged. Further, a permalloy film was disposed on the magnetic core 6b and the magnetic core 11b far from the recording gap 7.

明 ら か As is clear from FIG. 18, it is clear that the above-described output fluctuation accompanying the recording operation is reduced by shortening the yoke length L so as to be 20 μm or less.

ノ イ ズ The effect of reducing the noise by shortening the yoke length L is a matter which has not been pointed out at all, but it has been found that it is actually surprisingly remarkable.

As shown in FIG. 18, when the yoke length is 20 μm or less, the output fluctuation becomes 1% or less (“standard deviation” / average value of reproduced output ≦ 0.01).

This level is such that the effect of the recording operation of the recording head can be almost ignored. On the other hand, FIG. 19 shows the frequency characteristics of the inductance of the composite head (the configuration is shown in FIGS. 8 and 9) in which the yoke length L is changed, and the frequency at which the inductance on the high frequency side is reduced by 30% from the low frequency side. (Referred to as “30% Roll-off frequency”).

Here, the 30% Roll-off frequency is used as a guide of the high frequency characteristics because the non-linear transition shift (NLTS) in the recording / reproducing characteristics is a frequency at which the inductance is reduced by about 30%. %, Which has been confirmed to be a range in which a magnetic recording / reproducing system can be satisfactorily obtained.

(4) In the present invention, the case where the 30% Roll-off frequency is 100 MHz or more was evaluated as having appropriate characteristics as the magnetic head.

As is clear from FIGS. 18 and 19, it was confirmed that the shortening of the yoke length L in the magnetic head improved the high-frequency characteristics, and particularly when the yoke length L was 20 μm or less, the improvement was extremely remarkable. Was done.

The reason for the decrease in output fluctuation caused by shortening the yoke length L is that, qualitatively, the effect of the effective magnetostriction is reduced due to the reduced volume of the upper shield magnetized during the recording operation. It is inferred.

定量 However, it is difficult to quantitatively estimate how much the reduction in volume will substantially affect the fluctuation of the reproduction output, and it has not been predicted at all.

The relationship between the output fluctuation and the yoke length L is quantified for the first time based on the above experimental results of the present invention.

The above results show that even if a magnetic film having a positive magnetostriction is disposed on the upper shield, the effect of the recording operation on the reproduction characteristics can be sufficiently reduced. That is, when only the permalloy film is applied to the upper shield as in the related art, it means that the management of the film composition can be relaxed, and the production yield can be improved.

Further, a Co-Ni-Fe plating film used in the embodiment of the present invention (having an element composition ratio of 60 to 70 wt% Co, 15 to 30 wt% Fe, and 5 to 15 wt% Ni). Is a material suitable for high-density recording, especially since it is a high Bs film, but is a material having large magnetostriction and stress. For this reason, it can be said that it is a particularly preferable material in applying the technology of the present invention.

Furthermore, as is clear from the above example, it can be seen that the object of the present invention can be achieved even with an Fe—N film formed by a sputtering method.

On the other hand, FIG. 20, FIG. 21 and FIG. 22 show the recording magnetic field intensity generated from the recording gap, the saturation magnetization of the magnetic core and the film thickness when the yoke length L is changed to a short length of 5 μm, 10 μm and 20 μm. It shows the relationship of the product with the thickness (simulation result).

At this time, the recording gap length and the recording gap depth were constant.

磁 界 Further, the magnetic field generated by the coil of each head (the number of turns of the coil × the current flowing through the coil) was made constant.

Furthermore, the magnetic field strength was normalized by the saturation value.

As can be seen from the respective drawings, the saturation magnetization × film thickness at which the recording magnetic field intensity is saturated is 0.75 (T · nm) at a yoke length of 5 μm, 1.00 (T · nm) at 10 μm, and 1. at 20 μm. 5 (T · nm).

(4) It can be understood that the recording magnetic field intensity is saturated, that is, a sufficient recording magnetic field is obtained by setting the saturation magnetization to the above-mentioned thickness for each yoke length.

In other words, judging from the above results, when the saturation magnetization is assumed to be constant, it is understood that the shorter the yoke length, the thinner the magnetic film can be configured. That is, it is indicated that it is necessary to set an appropriate film thickness corresponding to the yoke length.

対 応 In order to make the reproduction gap and the recording gap close to each other in response to the improvement in recording density, it is required to make the upper shield thinner.

(4) Conventionally, there has been a tendency that when the upper shield is made thinner, the output fluctuation after the recording operation becomes larger. Thus, as shown in the above results, it can be seen that by reducing the yoke length L to 20 μm or less, it is possible to provide a composite head with suppressed output fluctuation even if the upper shield is made thinner.

Further, judging from the above results, the influence of the eddy current loss becomes smaller as the film thickness of the magnetic core becomes thinner.

(4) Since the yoke length L can be reduced by reducing the yoke length L, the volume of the magnetic core can be drastically reduced.

As a result, since the eddy current loss at high frequencies is greatly reduced, it is considered that as the yoke length L is reduced, the characteristics at high frequencies are dramatically improved. However, in practice, it is only necessary to satisfy the recording characteristics in the frequency band to be used, and if the recording characteristics are within the range, the thickness may be easily manufactured.

場合 When forming a magnetic core film by plating, if the film thickness is too small, it becomes difficult to control the film thickness. Therefore, there is an advantage in manufacturing that the film thickness is somewhat large.

FIG. 24 shows the relationship between the yoke length L, which indicates preferable characteristics as the recording head, the saturation magnetization, and the film thickness, based on the characteristic data of each recording head obtained in each of the above embodiments.

That is, FIG. 24 is a graph showing a preferable magnetic core region based on the above-described experimental results.

That is, the preferable region in FIG. 24 has a yoke length L of 20 μm or less, and the magnetic core has a length of 0.05 (T) × yoke length L (μm) +0.5 (T · μm) ≦ saturated magnetization (T). It is desirable that the setting is made so as to satisfy the relationship of × core film thickness (μm).

結果 The results in FIG. 24 also include the case where the magnetic core is formed of a laminated body of magnetic films. That is, when there are two or more magnetic films, the above-mentioned saturation magnetization (T) × core film thickness (μm) is obtained by calculating the saturation magnetization (T) × core film in each magnetic material constituting the magnetic core. The sum of the product of the thickness and the thickness (μm) Σ (saturation magnetization (T) × core film thickness (μm)). In this case, 0.05 (T) × yoke length L (μm) +0.5 (T · μm ) ≦ Σ (saturation magnetization (T) × film thickness (μm)).

(4) In the case of a Co—Ni—Fe plating film having a large saturation magnetization, the stress becomes a problem.

For example, a Co—Ni—Fe plating film having a saturation magnetization of 2T may have a stress of about 0.8 GPa.

FIG. 23 is a diagram showing the relationship between the thickness of a Co—Ni—Fe plated film having a saturation magnetization of 2T and the rate of occurrence of peeling of the film.

に As can be seen from this figure, abrupt peeling occurs when the film thickness is 2 μm or more.

From this, in the present invention, when a Co—Ni—Fe plated film of high Bs is used, the yoke length L is 20 μm or less, and the magnetic core is 0.05 (T) × yoke length L (μm ) +0.5 (T · μm) ≦ saturation magnetization (T) × core film thickness (μm) ≦ 4 (T · μm).

As described above, in each of the samples shown in Tables 1 to 3 above, in the case of a coil having 5 turns or a coil arranged in two stages as shown in FIG. A coil having 9 turns is used. Therefore, as the length of the yoke length L becomes shorter, the width of the coil penetrating between the magnetic cores is accordingly arranged. It is formed narrower than the width of the same coil.

Accordingly, the width of the coil penetrating between the magnetic cores changes according to the length of the yoke length L.

Therefore, the coil used in the magnetic head according to the present invention is configured to penetrate through a space formed between the first and second magnetic cores facing each other via the insulator. In the coil, the width of the coil penetrating through the space when viewed from above (in the direction of FIG. 34) on the surface on which the coil is formed is such that the width of the coil is located outside the space. It is preferable that the coil is configured to be thinner than the width of the coil. Thereby, an increase in coil resistance can be suppressed.

That is, the coil portion formed between the magnetic cores needs to have a smaller coil width as the yoke length L becomes shorter. However, reducing the coil width causes an increase in coil resistance.

為 Therefore, in order to suppress the increase in the coil resistance, a portion that does not need to be reduced in the coil width, that is, a portion other than the coil portion formed between the magnetic cores is increased.

Thereby, an increase in coil resistance of the entire coil can be suppressed.

In the present invention, the characteristic is that the yoke length L is set to 20 μm or less, so that the width of the coil portion formed between the magnetic cores needs to be particularly small. The effect of suppressing the coil resistance by appropriately changing is very large.

In each of the embodiments shown in Tables 1 to 3, when the yoke length L is reduced, the coil width is reduced in order to keep the generated magnetic field of the coil (= the number of coil turns × current) constant at the same current. The number of turns must be the same.

However, in general, the entire coil magnetic field is absorbed by the yoke. Therefore, when physically considered, the output from the magnetic head does not change even if the coil becomes thinner or thicker.

FIG. 33 shows that the yoke length L is set to 44 μm, the magnetic core 11 as the upper core is composed of a magnetic film composed of two layers of 67Co8Ni25Fe and 11b is composed of 82Ni18Fe, and the magnetic core 6 as the upper shield is composed of 6a. Is the result of measuring the output fluctuation (%) when the width of the coil penetrating between the magnetic cores is changed in a magnetic head composed of a magnetic film composed of two layers of 67Co8Ni25Fe and 6Ni82Fe18Fe. It is shown.

理解 As understood from FIG. 33, it is understood that even if the width of the coil is changed, the output fluctuation in the magnetic head is not affected.

(4) This indicates that the magnetic field generated by the coil is independent of the width of the coil, and that a change in the width of the coil cannot be a physical factor affecting the output fluctuation of the magnetic head.

Similarly, in each of the above embodiments according to the present invention, it is understood that the value of the magnetostriction changes when the composition constituting the magnetic core changes.

However, as shown in FIG. 32, similarly to FIG. 18, the relationship between the yoke length L and the output fluctuation value is as follows: the magnetic film whose magnetostriction is 5 × 10 −6 and the magnetostriction is 0.5 × 10 −6. A comparative experiment was conducted on the magnetic film and the difference was examined. As a result, it was found that the yoke length L was 20 μm or less under any conditions where the output fluctuation was 1% or less.

Accordingly, if the yoke length L is 20 μm or less, it can be understood that the output fluctuation value is not affected by the magnetostriction.

Accordingly, as described above, the effect obtained by shortening the yoke length L of the magnetic head to 20 μm or less is obtained irrespective of other various factors.

(4) Next, the problem of stress in the manufacturing process for the magnetic head according to the present invention was examined.

However, as described above, in particular, a plating film having a large saturation magnetization has a large stress, and a Co—Ni—Fe film may have a stress of about 0.8 GPa. Will occur.

FIG. 23 is a graph showing the relationship between the film thickness and the rate of occurrence of film peeling when a Co—Ni—Fe film having a saturation magnetization of 2T is formed by plating.

That is, when the film thickness is 2 μm or more, the rate of occurrence of peeling sharply increases. That is, it is understood that the magnetic core needs to be 2 μm or less in order to manufacture a recording head having a large saturation magnetization.

(4) Next, the technical problems relating to the structure of the recording head or the reproducing head in manufacturing the magnetic head according to the present invention were examined.

Especially, in the present invention, the production of the magnetic head by the plating method is considered to be advantageous. Therefore, in the following examination, the plating method was mainly examined.

That is, as described above, as one specific example of the method for manufacturing the recording head according to the present invention, one end of the opposing first magnetic core and second magnetic core forms a recording gap, and One end forms a magnetic junction, a coil insulated by an insulator is provided between the first magnetic core and the second magnetic core, and the coil excited by the coil is provided. When manufacturing a recording head having a magnetic head for performing recording on a magnetic medium by leaking magnetic fluxes of the first and second magnetic cores from the recording gap, a step of forming the coil includes a step of forming a seed on an insulator film. A first step of forming a layer, a second step of forming a resist pattern on the seed layer, a third step of depositing a coil material between the resist patterns by plating, and removing the resist pattern. The fourth step, the fifth step of removing the seed layer under the resist pattern, and the sixth step of covering the coil material with an insulator are performed in the above order. This is a method for manufacturing a recording head.

Further, as another specific example of the method of manufacturing the recording head 60 according to the present invention, one end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms the recording gap. Part forms a magnetic junction, a coil insulated by an insulator is provided between the first magnetic core and the second magnetic core, and the first and the second magnetic cores are excited by the coil. When manufacturing a recording head having a magnetic head for performing recording on a magnetic medium by leaking magnetic flux of a second magnetic core from the recording gap, the step of forming the coil includes the first step of forming an insulator film pattern. A step of forming a groove for forming a coil in the insulator film pattern, a third step of forming a seed layer in the insulator pattern in which the groove is formed, and plating on the seed layer. By coil material A fourth step of forming, by removing mechanically polishing the coil material other than the groove portion, and removing the height of the coil material surface formed in the groove portion and the height of the insulator film surface other than the groove portion. And the sixth step of combining the coil material formed in the groove and the surface of the insulator film other than the groove with an insulator is performed in the order described above. This is a method for manufacturing the recording head configured.

In the method of manufacturing the recording head 60 according to the present invention, it is preferable that the coil material is mainly composed of Cu, and that the seed layer is mainly composed of Cu. Is also desirable.

Further, in the method for manufacturing a recording head according to the present invention, the seed layer is formed on at least one kind of underlayer selected from Ta, TaN, Ti, and TiN for the purpose of preventing diffusion of Cu. Is preferred.

Hereinafter, the recording head 60 and the method of manufacturing the same according to the present invention will be described in more detail with reference to examples.

That is, FIGS. 1, 2 and 5 are views showing a part of the configuration of the first embodiment of the recording head 60 according to the present invention shown in Table 1, and FIG. FIG. 2 is a plan view seen from a cross section perpendicular to the ABS plane 40, and FIG. 2 is a plan view seen from the ABS plane 40. (That is, FIG. 1 is a cross-sectional view taken along line AB in FIG. 2.) FIG. 5 shows a composite head including a recording head 60 according to the present invention and an appropriate reproducing head unit 70. FIG. 5 is a cross-sectional view showing a configuration of one specific example of a reference numeral 50, in which a substrate 1 serving as a slider includes a composite ceramic 1a made of alumina and titanium carbide and an alumina film 1b. A GMR head 70 having a reproducing function is formed thereon.

The GMR head 70 is provided between the lower shield 2 and the upper shield 6 made of a patterned 1 μm-thick Co—Zr—Ta—Cr film (of a composition exhibiting soft magnetic characteristics, for example, Co87Zr5 Ta5 Cr3). And a magnetoresistive element 4 via a magnetic separation layer 3 made of alumina.

Furthermore, the gap length between the lower shield 2 and the upper shield 6 is 0.12 μm.

As shown in FIG. 2, the magnetoresistive element 4 has a central region 4 for sensing a magnetic field from the recording medium 31 and an end region 5 having a function of supplying a bias magnetic field and current to the central region 4. Consists of

The central region 4 is formed of a laminated structure having a GMR effect generally called a spin valve effect. Specifically, from the lower shield 2 side, a base Zr film (thickness 3 nm), a Pt-Mn film (thickness 20 nm), Co-Fe film (film thickness 2 nm), Cu film (film thickness 2.1 nm), Co-Fe film (film thickness 0.5 nm), Ni-Fe film (film thickness 2 nm), Zr film (film thickness 3 nm) It consists of the layers laminated in this order. The width of the central region 4 is 0.4 μm, which defines the reproduction track width.

The end region 5 has a laminated structure of a Co—Pt film (film thickness: 20 nm) as a permanent magnet film and an Au film (film thickness: 50 nm) as an electrode film.

On the other hand, the upper shield 6 is also used as the first magnetic core 6 of the recording head 60. The upper shield 6 includes a permalloy film 6b having a thickness of 2 μm and a Co—Ni—Fe film (having a composition exhibiting soft magnetic properties, for example, 65Co12Ni23Fe) 6a having a thickness of 0.5 μm.

Further, in the recording head 60 according to the present invention, the upper shield 6 is used as the first magnetic core 6, and the non-magnetic insulating material existing on the magnetic core 6 through the recording gap 7 of 0.18 μm thick alumina is used. Zero throat height is defined by body 10a.

非 This non-magnetic insulator 10a is made of photoresist. The coil 9 has a two-layer structure made of a Cu plating film. The first layer is insulated by the non-magnetic insulator 10a, and the second layer is insulated by the non-magnetic insulator 10b.

The second magnetic core 11 is formed so as to straddle the structure including the coil 9 and the non-magnetic insulator 10.

{Circle around (2)} The second magnetic core 11 is made of a Co—Ni—Fe film (having a composition exhibiting soft magnetic properties, for example, 65Co12Ni23Fe) having a saturation magnetization of 2T. The yoke length of the magnetic core 11 is 9.5 μm, and the film thickness is 1 μm.

Next, FIGS. 8, 9 and 10 show configuration examples of a composite head 50 using a part of recording heads according to the configuration of the second embodiment of the present invention shown in Table 2 above. FIG. 8 is a configuration diagram viewed from the ABS surface 40 facing the recording medium 31, and FIGS. 9 and 10 are cross-sectional views (AB cross-section in FIG. 8) perpendicular to the ABS surface 40.

The composite head 50 in this specific example has a configuration in which a part of the recording heads 60 and an appropriate reproducing head 70 in the second embodiment are stacked.

In the figure, a reproducing head 70 including a lower shield 2, a GMR element 4 and an upper shield 6 is provided on a base 1 serving as a slider, and the above-described second magnetic shield 6 is used as the first magnetic core 6. The configuration in which the recording head 60 according to the embodiment is formed is shown.

The zero throat height of the recording head 60 in this specific example is defined by the non-magnetic insulator 10 in FIG. Has become.

コ イ ル In this example, the coil 9 has a single-layer structure.

Further, the second magnetic core 11 in some of the recording heads 60 according to the present embodiment is formed of a Co—Ni—Fe film having a saturation magnetization of 2T (of a composition exhibiting soft magnetic properties, for example, 65Co12Ni23Fe). ) 11a and a permalloy film 11b were laminated.

As a more detailed configuration of a part of the magnetic cores 11 in the second embodiment, the yoke length L of the second magnetic core 11 is 9.5 μm, and the film thickness is a Co—Ni—Fe film. 11a is 0.6 μm, and permalloy film 11b is 1 μm.

Next, FIGS. 11 and 12 show an example of a part of the configuration according to the third embodiment of the present invention shown in Table 2.

That is, the third embodiment of the present invention is shown in the form of a composite head 50 including the recording head 60 according to the present invention, as in the second embodiment, and FIG. FIG. 12 is a plan view showing the configuration as viewed from the ABS surface 40 facing thereto, and FIG. 12 is a cross-sectional view showing the configuration as viewed in a cross section perpendicular to the ABS surface 40, that is, as viewed from the line AB in FIG. It is sectional drawing.

In a specific example of this embodiment, the upper shield 6 is placed on a suitable reproducing head 70 including the lower shield 2, the GMR element 4, and the upper shield 6 on the base 1 serving as a slider. 1 shows a configuration in which the recording head 60 according to the first embodiment described above is formed as the first magnetic core 6.

The configuration of a part of the recording gap 7 in this embodiment is the same as that of the above-described first embodiment of the present invention, and the upper shield 6 is made of a 2 μm-thick Co—Ni—Fe film (soft film). The second magnetic core 11 is a Co—Ni—Fe film (having a composition exhibiting soft magnetic characteristics, for example, 65Co12Ni23Fe) 11a having a composition exhibiting magnetic characteristics, for example, 65Co12Ni23Fe). And a laminated structure of the permalloy film 11b.

In the embodiment, the yoke length L of the magnetic core 11 is 9.5 μm, and the thickness of the Co—Ni—Fe film 11 a is 0.6 μm and the thickness of the permalloy film 11 b is 1 μm.

13 and 14 are views showing a fourth embodiment of the composite head 50 including the recording head 60 according to the present invention, and FIG. 13 is a configuration viewed from the ABS 40 facing the recording medium 31. 14 is a sectional view perpendicular to the ABS 40 facing the recording medium 31, that is, a sectional view taken along line AB in FIG. In this embodiment, on a reproducing head 70 composed of a lower shield 2, a GMR element 4, and an upper shield 6 on a base 1 serving as a slider, as in the above-described embodiment, It has a configuration in which a recording head 60 having a configuration in which the upper shield 6 is used as the first magnetic core 6 is mounted.

The configurations of the recording gap 7 and the second magnetic core 11 are the same as in the above-described first embodiment of the present invention.

The upper shield 6 of the recording head according to a part of the embodiment is a 2 μm-thick Co—Ni—Fe film (of a composition exhibiting soft magnetic properties, for example, 65Co12Ni23Fe).

As already described, for each of the samples according to the above-described embodiments, the composition and manufacture of the magnetic film constituting the upper shield 6 (6a, 6b) and the second magnetic core 11 (11a, 11b). Table 1 shows the results of measuring characteristic values relating to the recording / reproducing function by changing the method, the saturation magnetization, the magnetostriction, the specific resistance and its film thickness, and the yoke length L. Table 1 shows the characteristic values of the composite head having a long yoke length.

(4) As is clear from the results of the above-described comparative experiments, the low noise characteristics and good high-frequency characteristics of the head of the present invention are evident, and the O / W characteristics are sufficient.

Next, a method of manufacturing the recording head 60 according to the present invention will be discussed.

Here, a recording head having a yoke length L of 20 μm or less has never been manufactured. In order to manufacture a magnetic core having a short yoke length L, the width and thickness of the coil, the coil interval, the positional relationship of the insulator for insulating the coil with respect to the coil, the thickness of the insulator, and the like are appropriately set. It must be.

内 Of these, the width and thickness of the coil and the coil interval are arbitrarily set based on the required number of coil turns and coil resistance. In this case, mainly, the exposure resolution at the time of forming the coil pattern defines the limit.

When the coil resistance becomes too large, as described above, it is effective to increase the coil width of the coil portion not penetrating than the coil portion penetrating between the magnetic cores shown in FIG. .

On the other hand, as the yoke length L decreases, the volume of the insulator that insulates the coil also needs to be appropriately changed. That is, if the thickness of the insulator becomes too thin, the occurrence of coil insulation failure becomes a problem.

Therefore, various samples were prepared and test evaluations were made especially on the coatability of the coil at the outermost end and the coatability of the coil upper surface, which are likely to cause insulation failure of the coil.

The results are shown in FIG. That is, FIG. 25 shows the distances W1 and W2 () from the shortest coil to the end of the insulator 10 covering the coil 9 from above in FIG. 2 shows the relationship between the ratio W1 / d of the thickness d (μm) of the coil 9 to the thickness d (μm) of the coil 9 and the insulation failure rate.

At this time, the method for manufacturing the coil and the insulator includes, for example, as shown in FIG. 30, (a) a step of forming a seed layer 13 on the insulator film 12 and (b) a seed layer Forming a resist pattern 14 thereon, (c) plating a coil material 15 between the resist patterns, (d) removing the resist pattern, and (e) removing a seed layer under the resist pattern. And (f) covering the coil with an insulator 16 made of resist.

That is, as shown in FIG. 25, when W1 / d is 0.5 or more, insulation failure is almost eliminated.

This is because a sufficient distance from the coil end to the end of the resist insulating layer is ensured with respect to the thickness of the coil 9 so that the corners of the coil 9 at the end are sufficiently covered. That's why.

This tendency is the same in the case of W2 / d, W1 '/ d', and W2 '/ d' in the configuration of the recording head 60 according to the present invention shown in FIGS.

On the other hand, FIG. 26 shows the relationship between the ratio h / d of the thickness h (μm) of the insulator covering the coil 9 on the coil 9 to the thickness d (μm) of the coil and the insulation failure rate. Show.

製造 The method of manufacturing the coil portion is the same as that of FIG. When h / d is 0.2 or more, insulation failure is almost eliminated. This is because when the resist film thickness on the coil 9 is small, the unevenness between the coils is left on the surface, so that the coverage of the coil 9 at corners or the like becomes insufficient. This tendency also applies to the lower coil and the upper coil when the coil has a two-layer configuration as shown in FIG. 3, for example.

ＷW1 / d ≧ 0.5 or more where insulation failure is eliminated in FIG. 25 holds when h / d ≧ 0.2 shown in FIG.

That is, in the recording head according to the present invention, the thickness d (μm) of the coil 9 and the distance from the coil 9 at the end to the end of the insulator 10 covering the coil 9 are represented by W1 and W2 ( μm), it is desirable that the distances W1 and W2 (μm) are configured to satisfy W1 / d ≧ 0.5 and W2 / d ≧ 0.5, respectively.

Further, in the recording head 60 according to the present invention, the thickness d (μm) of the coil 9 and the thickness h (μm) of the insulator 10 covering the coil 9 on the coil are as follows. It is desirable that the thickness h (μm) is configured to satisfy h / d ≧ 0.2.

In the case where the configuration and the process of covering the coil 9 with the resist 10 as described above are used, the above-described rules are required. For example, in the case of i-line stepper exposure, the coil width and coil interval that can be manufactured in the above steps are estimated to be about 0.8 μm and 0.3 μm, respectively.

This is estimated from the fact that a resist pattern height of about 2 μm is required to secure a coil thickness of about 1 μm, and that it is necessary to ensure adhesion of the resist pattern during plating. Realistic dimensions.

At this time, if the coil 9 has a two-layer structure and has five turns in the lower layer and four turns in the upper layer, a yoke length of about 10 μm is realized. The composite head 50 manufactured according to the present invention is, for example, as shown in FIG.

As a method for realizing a further short yoke, as described above, as shown in FIG. 31, (a) a step of forming an insulator film pattern 17 and (b) a step of forming a coil in the insulator film pattern Forming the resist pattern, forming a resist pattern 18, (c) performing etching using the resist pattern, (d) removing the resist pattern, and (e) forming the groove. A step of forming the underlayer 19 and the seed layer 20 on the insulator pattern; (f) a step of forming the coil material 21 by plating on the seed layer; and (g) a coil formed by polishing other than the groove. Removing the material by polishing, and matching the height of the surface of the coil material 22 formed in the groove with the height of the surface of the insulator film other than the groove, (h) removing the coil formed in the groove. Wood and the insulator film surface other than the grooves it is desirable to employ comprised method the step of covering with an insulating material 23.

According to this method, the resist thickness at the time of patterning the insulator film 17 can be as small as about 1 μm, so that the coil width and the coil interval can be formed at about 0.3 μm and 0.3 μm, respectively.

In other words, this is a manufacturing method capable of manufacturing the coil width and the coil interval more precisely by the manufacturing method.

In addition, in this method, the relationship between W and d and the relationship between h and d, which are defined in the method of FIG. 30, are released.

By the above manufacturing method, a magnetic core having a yoke length L of 20 μm or less can be manufactured, and a magnetic core having a yoke length of 5 μm or less can be manufactured. The composite head manufactured by this method is as shown in FIG.

As shown in FIGS. 16 and 17, in a composite head 50 using the recording head 60 manufactured according to the present invention, the reproducing head 70 and the recording head 60 are independent, and the upper shield 6 ′ and the lower A configuration in which the recording core 6 is not shared is also possible.

The configuration of the magnetic recording / reproducing device 80 equipped with the composite head 50 of the present invention is as shown in FIG. A head 32 of the present invention is attached to a magnetic recording surface of a magnetic medium 31 rotated by a driving motor 30 by a suspension 33 and an arm 34 and tracked by a voice coil motor (VCM) 35.

The head 32 includes a slider 25, electrodes 27, and a recording / reproducing element (composite head) 26, as shown in FIG. The recording / reproducing operation is performed by a signal from a recording / reproducing channel 38 to the head. The recording / reproducing channel 38, the VCM 35 for positioning the head, and the drive motor 30 for rotating the medium are linked by a control unit 37. .

Next, an embodiment of a method of manufacturing the composite head 50 according to the present invention will be described in detail with reference to FIG. 5 while referring to the above various conditions.

That is, an alumina film 1b as an insulator is formed by a sputtering method on a composite ceramic 1a made of alumina and titanium carbide, which will be a substrate 1 as a slider.

Then, a GMR head 70 having a reproducing function and an ID head 60 having a recording function are formed thereon in this order.

Ｇ The GMR head 70 functioning as the reproducing head 70 in the present embodiment is formed by the following procedure.

{Circle over (1)} First, a Co-Ta-Zr film serving as the lower shield 2 is formed to a thickness of 1 μm by sputtering, and then etched by an ion beam using a photoresist mask and patterned.

Next, an alumina film for forming the reproducing gap 3 corresponding to the magnetic separation layer is formed to a thickness of 0.03 μm by sputtering.

Thereafter, a spin valve laminated structure to be the central region 4 is formed thereon by sputtering from the lower shield 2 side to form a base Zr film (thickness: 3 nm), a Pt-Mn film (thickness: 20 nm), Co- Stacked in the order of Fe film (2 nm thick), Cu film (2.1 nm thick), Co-Fe film (0.5 nm thick), Ni-Fe film (2 nm thick), Zr film (3 nm thick) I do. Further, using a photoresist mask, ion beam etching is performed to form a pattern.

Next, a laminated structure film of a Co—Pt film (thickness: 20 nm) and an Au film (thickness: 50 nm) to be the end regions 5 is formed by sputtering using the photoresist mask, and the photoresist mask is lifted off. By doing so, the MR element 4 is completed.

(4) On this MR element 4, an alumina film for forming the other reproducing gap 3 is formed to a thickness of 0.057 μm by sputtering. The reproduction gap length is 0.12 μm.

On the other hand, the ID head 60 according to the present embodiment is formed by the following procedure.

That is, the upper shield 6, which is also used as the recording magnetic pole, is formed by a method of growing a plating film in a photoresist frame.

条件 The conditions of the plating bath for the permalloy film constituting the upper shield 6b used in the present embodiment are as follows.

Name Concentration (mol / L)
Nickel chloride 0.16
Nickel sulfate 0.08
Sodium chloride 0.42
Boric acid 0.40
Saccharin Na 0.0072
Ferrous sulfate 0.0045
Na lauryl sulfate 0.00035
36% hydrochloric acid 0.0017
PH 2.6
Current density 6 mA / cm ²
Further, the conditions of the plating bath for the Co—Ni—Fe film constituting the upper shield 6a are as follows.

Name Concentration (mol / L)
Cobalt sulfate 0.092
Nickel sulfate 0.20
Ammonium chloride 0.28
Boric acid 0.40
Ferrous sulfate 0.0016
Na lauryl sulfate 0.00035
80% sulfuric acid 0.0012
PH 2.8
Current density 15 mA / cm ²
The above-mentioned first magnetic core 6 and upper shield 6 are also used, and a recording gap 7 of 0.18 μm thick alumina is formed on the upper shield 6 by sputtering. A first layer of the coil 9 is formed thereon by a method of growing a Cu plating film in a photoresist frame, and a nonmagnetic insulator 10a made of a photoresist is formed thereon. A second layer of the coil 9 is formed in the same manner, and a non-magnetic insulator 10b made of photoresist is formed.

This step is as shown in FIG.

When manufacturing a magnetic core having a yoke length L of 9.5 μm, assuming a two-layer coil configuration as shown in FIG. This becomes possible with a coil interval of about 0.3 μm.

At this time, W1 and W2 shown in FIG. 4 become 1.4 μm when the throat height is 0.5 μm, and W1 / d ≧ 0.5, W2 / d ≧ 0.5, and W1 ′ / d ≧ 0.5. , W2 ′ / d ≧ 0.5.

Also, in order to satisfy h / d ≧ 0.2 and h ′ / d ′ ≧ 0.2, h (h ′) ≧ 0.2 μm, which can be sufficiently manufactured.

コ イ ル The coil resistance at this time was about 18Ω.

(4) Although the resistance increases due to the small cross-sectional area of the coil, it was possible to keep the resistance small by increasing the coil width at a portion that does not intersect with the magnetic core.

す る と If d and d ′ are 1 μm and h and h ′ are 0.5 μm in FIG. 5, the height of the structure of the two-layer coil and the insulator is 3 μm.

Conventionally, in a head having a long yoke length L, a coil width of 2 μm, a coil thickness of 2 μm, and an insulating film thickness on the coil of about 2 μm are standard. It was.

記録 In the recording head 60 of the present invention, the step due to the height of the structure between the coil and the insulator when the upper magnetic core 11 was formed could be greatly reduced from 8 μm in the past to 3 μm.

(4) When forming the second magnetic core 11, as shown in FIG. 27, a photoresist 28 is applied on the step between the coil and the insulator.

At this time, conventionally, it was necessary to apply a resist of about 5 μm to form a magnetic core having a thickness of about 3 μm, but in the vicinity of the ABS where the patterning must be performed at the narrowest width that determines the recording width. The resist thickness reached about 10 μm due to the influence of the step. Therefore, the minimum width that can be patterned by the conventional head is about 1 μm.

On the other hand, in the recording head 60 of the present invention, since the step of the coil / insulator is as low as about 3 μm and the thickness of the magnetic core itself can be reduced, the resist thickness near the ABS becomes 5 μm or less. A pattern of about 0.5 μm was made possible. On the other hand, as the second magnetic pole 11, a Co—Ni—Fe film with Bs of 2T was used. The conditions of the plating bath for the Co—Ni—Fe film are as follows.
Name Concentration (mol / L)
Cobalt sulfate 0.092
Nickel sulfate 0.20
Ammonium chloride 0.28
Boric acid 0.40
Ferrous sulfate 0.0016
Na lauryl sulfate 0.00035
80% sulfuric acid 0.0012
PH 2.8
Current density 15 mA / cm ²
Next, a fifth embodiment of the present invention shown in Table 3 is shown in FIG.

The structures of the base 1, the lower shield 2, the GMR element 4, the recording gap 7, and the upper shield 6 serving as the slider are the same as those in the first embodiment of the present invention. The yoke length L in this embodiment is 5 μm. Table 3 shows an embodiment of the head according to the present invention and Comparative Example 15.

製造 The manufacturing method according to the fifth embodiment will be described below. In the present embodiment, a completely new method shown in FIG. 31 is used for the method of manufacturing the coil 9 and the insulators 10a and 10b.

First, an SiO ₂ film having a thickness of 1 μm was formed on the alumina film constituting the recording gap 7 and patterned 17 (FIG. 31A).

Next, as a step of forming a groove for forming a coil in the SiO ₂ insulator film pattern 17, a resist pattern 18 was formed (FIG. 31B).

Next, etching was performed using the resist pattern and CF4 gas (FIG. 31C). The etching depth was 0.8 μm.

Next, the resist pattern is removed (FIG. 31 (d)), and a TaN underlayer 19 and a Cu seed layer 20 are formed on the insulator pattern having the grooves (FIG. 31 (e)). Then, a Cu film 21 was formed by plating (FIG. 31F).

Next, by mechanical polishing, the Cu film formed in the portions other than the grooves is removed by polishing, and the height of the surface of the Cu film 22 formed in the grooves and the height of the surface of the insulator film other than the grooves are adjusted. (FIG. 31 (g)). Finally, the Cu coil formed in the groove and the insulator film surface other than the groove are covered with a 0.2 μm-thick SiO ₂ insulator 23 to form a coil and an insulator. And completed the structure.

According to this method, the coil width is 0.4 μm, the coil thickness (height) is 0.7 μm, the coil interval is 0.3 μm, the throat height is 0.5 μm, and the SiO ₂ width between the magnetic core and the outermost coil side is 0.65 μm. And a yoke length of 5 μm.

(4) The height of the structure including the coil and the insulator was only 1.1 μm. Due to this low step, a pattern having a width of about 0.3 μm could be formed near the ABS.

Therefore, it can be said that this process is effective not only for forming a magnetic core having a short yoke length but also for manufacturing a recording head having a narrow track width.

Next, a sixth embodiment of the present invention is shown in FIGS. 16 and 17 as a configuration of a composite head.

That is, FIG. 16 is a plan view showing the configuration viewed from the ABS 40 facing the recording medium 31, and FIG. 17 is a cross section perpendicular to the ABS 40, that is, a cross section viewed from the line AB in FIG. FIG.

In the present embodiment, the upper shield 6 ′ of the reproducing GMR head 70 and the magnetic core 6 below the recording head 60 are independent and are separated by the nonmagnetic layer 24.

上 The upper shield 6 ′ in this embodiment is a permalloy film having a thickness of 2 μm. The yoke length L is 9.5 μm, and the lower magnetic core 6 and the upper magnetic core 11 are both a 1 μm-thick Co—Ni—Fe film (having a composition exhibiting soft magnetic properties, For example, it is made of 65Co12Ni23Fe).

Also in the composite head 50 of the present embodiment, the output fluctuation accompanying the recording operation was 0.5% or less, the 30% Roll-off frequency of the inductance was 390 MHz, and the O / W was as good as 45 dB.

On the other hand, the seventh embodiment of the present invention is a magnetic recording / reproducing apparatus 80 equipped with a composite head 50 including the recording head 60 according to the present invention.

As shown in FIG. 29, a head 32 according to the present invention is attached to a magnetic recording surface of a magnetic medium 31 rotated by a driving motor 30 by a suspension 33 and an arm 34, and a voice coil motor (VCM) 35 Is tracked by

The head 32 includes a slider 25, electrodes 27, and a recording / reproducing element (composite head) 26, as shown in FIG.

The recording / reproducing operation is performed by a signal from a recording / reproducing channel 38 to the head. The recording / reproducing channel, the VCM for positioning the head, and the drive motor for rotating the medium are linked by the control unit 37.

The present magnetic recording / reproducing device is a storage device that is a high-density and large-capacity storage device and is advantageous for high-speed data transfer.

Further, one of the first and second magnetic cores is also used as a first magnetic shield, and the first magnetic shield (referred to as an upper shield) is opposed to the first magnetic shield. The composite head 50 is characterized in that reproduction is performed by the magnetoresistive element 4 provided between the second magnetic shield (referred to as a lower shield) provided and recording is performed by the recording head 60 described above. is there.

Further, reproduction is performed by a magnetoresistive element 4 provided between a first magnetic shield (referred to as an upper shield) and a second magnetic shield (referred to as a lower shield) provided to face each other. A composite head 50 in which recording is performed by the laminated recording heads 60 described above.

The magnetic recording / reproducing device 80 according to the embodiment of the present invention is configured by mounting the composite head 50 described above.

FIG. 1 is a sectional view showing the configuration of a first embodiment of the recording head according to the present invention. FIG. 2 is a plan view showing the configuration of an embodiment of the recording head according to the present invention as viewed from the ABS. FIG. 3 is a sectional view showing another configuration of the recording head according to the present invention. FIG. 4 is a sectional view showing another configuration of the recording head according to the present invention. FIG. 5 is a sectional view showing a configuration example of the composite head according to the present invention. FIG. 6 is a cross-sectional view showing a configuration of an example of a conventional composite head. FIG. 7 is a plan view showing the configuration of the conventional composite head shown in FIG. 6 as viewed from the ABS. FIG. 8 is a configuration diagram of the composite head according to the second embodiment of the present invention as viewed from the ABS. FIG. 9 is a cross-sectional view of the composite head showing the second embodiment of the present invention. FIG. 10 is a sectional view of a composite head showing another configuration of the second embodiment of the present invention. FIG. 11 is a configuration diagram of the composite head according to the third embodiment of the present invention as viewed from the ABS. FIG. 12 is a sectional view of a composite head showing a third embodiment of the present invention. FIG. 13 is a configuration diagram of the composite head according to the fourth embodiment of the present invention as viewed from the ABS. FIG. 14 is a sectional view of a composite head showing a fourth embodiment of the present invention. FIG. 15 is a sectional view of a composite head showing a fifth embodiment of the present invention. FIG. 16 is a configuration diagram of the composite head according to the sixth embodiment of the present invention as viewed from the ABS. FIG. 17 is a sectional view of a composite head showing a sixth embodiment of the present invention. FIG. 18 is a diagram showing the relationship between the output fluctuation and the yoke length L accompanying the recording operation. FIG. 19 is a diagram showing the relationship between the frequency at which the inductance is reduced by 30% and the yoke length. FIG. 20 is a relationship diagram between the recording magnetic field and the saturation magnetization × film thickness of the magnetic core. FIG. 21 is a relationship diagram between the recording magnetic field and the saturation magnetization × film thickness of the magnetic core. FIG. 22 is a relationship diagram between the recording magnetic field and the saturation magnetization × film thickness of the magnetic core. FIG. 23 is a graph showing the relationship between the occurrence rate of peeling of the magnetic core film and the film thickness (the saturation magnetization is constant at 2T). FIG. 24 is a diagram showing the range of the yoke length L and the saturation magnetization × film thickness of the present invention. FIG. 25 is a diagram illustrating a positional relationship between a coil insulation failure rate and a coil-insulating film. FIG. 26 is a graph showing the relationship between the insulation failure rate of the coil and the thickness (h) of the insulating layer on the coil / (d) of the coil. FIG. 27 is a cross-sectional view of a coil / insulator structure coated with a photoresist for forming a magnetic core. FIG. 28 is a slider diagram on which the composite head of the present invention is mounted. FIG. 29 is a configuration diagram showing the configuration of an embodiment of the magnetic recording / reproducing apparatus of the present invention. FIG. 30 is a process chart showing an example of a manufacturing process for manufacturing the recording head of the present invention. FIG. 31 is a process chart showing another example of the manufacturing process for manufacturing the recording head of the present invention. FIG. 32 is a graph showing the relationship between the output fluctuation and the yoke length L associated with the recording operation of the recording head according to the present invention, using magnetostriction as a parameter. FIG. 33 is a graph showing the relationship between the coil width and the output fluctuation of the recording head of the present invention. FIG. 34 is a plan view showing an example of a wiring pattern of a coil formed in the recording head of the present invention.

Explanation of reference numerals

DESCRIPTION OF SYMBOLS 1 ... Base 1a ... Composite ceramic 1b ... Alumina film 2 ... Lower shield 3 ... Reproduction gap 4 ... Central area 5 ... End area 6 ... Magnetic core 6 '... Upper shield 6a ... Co-Ni-Fe film 6b ... Permalloy film 7 ... Recording gap 8 ... Photoresist 9 ... Coil 10, 10a, 10b ... Insulator 11 ... Second magnetic core, upper magnetic core 12 ... Insulator film 13 ... Seed layer 14 ... Resist pattern 15 ... Coil material 16 ... Insulator Reference Signs List 17 ... insulator film pattern 18 ... resist pattern 19 ... underlayer 20 ... seed layer 21 ... coil material 22 ... coil material 23 ... insulator 24 ... nonmagnetic layer 25 ... slider 26 ... recording / reproducing element (composite head)
27 ... Electrode 30 ... Drive motor 31 ... Recording medium 32 ... Head 33 ... Suspension 34 ... Arm 35 ... Voice coil motor (VCM)
37 control unit 38 recording / reproducing channel 40 ABS plane 50 composite head 60 recording heads 61 and 62 magnetic core end 63 magnetic junction 64 tip 65 contact 70 reproducing head, GMR head 80 ... Magnetic recording / reproducing device

Claims (19)

One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. Wherein the vicinity of the recording gap of at least one of the opposed first and second magnetic cores contains at least two types of elements selected from Co, Fe, and Ni as main components. Note Head. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. A recording head, wherein the vicinity of the recording gap of at least one of the opposed first and second magnetic cores contains Co, Fe, and Ni as main components. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. Wherein at least one of the opposing first and second magnetic cores is formed of a laminated body of magnetic materials having different saturation magnetizations, and a magnetic material near the recording gap. The saturation magnetization is Recording head, characterized in that it is configured as larger than the saturation magnetization of the farther magnetic material from the recording gap. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. The product of the saturation magnetization (unit: T) and the film thickness (unit: μm) of the magnetic material constituting each of the first and second magnetic cores facing each other is the yoke length L (unit: μm)
0.05 (T) × yoke length L (μm) +0.5 (T · μm) ≦ saturation magnetization (T) × film thickness (μm)
A recording head characterized by satisfying the following relationship. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. Wherein each of the first and second magnetic cores facing each other has a configuration in which a plurality of magnetic materials are laminated, and each of the individual magnetic cores forming each magnetic core Saturation magnetization at Position: T) and film thickness (unit: [mu] m) the product of the sum sigma (saturation magnetization and (T) × thickness ([mu] m)) is, the yoke length L (unit: against [mu] m),
0.05 (T) × yoke length L (μm) +0.5 (T · μm) ≦ Σ (saturation magnetization (T) × film thickness (μm))
A recording head characterized by satisfying the following relationship. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. The coil is configured to penetrate through a space formed between the first and second magnetic cores facing each other via the insulator, and penetrates the space. The width of the coil is Recording head, characterized in that is constituted as made thinner than the width equal to or of the coils are arranged in addition to the space portion. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. A coil formed so as to penetrate through a space formed between the first and second magnetic cores facing each other via the insulator, wherein the coil width is appropriately changed. By doing so, Recording head, characterized in that configured so that the resistance value of the coil from the case where the yl width as constant becomes smaller. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. If the thickness d (μm) of the coil and the distances W1 and W2 (μm) from the outermost coil to the end of the insulator covering the coil, the distances W1 and W2 (μm) are as follows: Respectively,
W1 / d ≧ 0.5, W2 / d ≧ 0.5
A recording head characterized by being configured to satisfy the following. One end of the opposing first magnetic core and the second magnetic core forms a recording gap, and the other end forms a magnetic junction, and the first magnetic core and the second magnetic core are connected to each other. A coil insulated by an insulator is provided between the magnetic core and the magnetic core, and the magnetic flux of the first and second magnetic cores excited by the coil leaks from the recording gap to record data on the magnetic medium. Wherein the distance from the tip of the recording gap close to the magnetic medium to the contact point of the magnetic junction (hereinafter referred to as yoke length) is 20 μm or less. When the thickness of the coil is d (μm) and the thickness of the insulator covering the coil is h (μm) on the coil, the thickness h (μm) is
h / d ≧ 0.2
A recording head characterized by being configured to satisfy the following. 10. The magnetic recording medium according to claim 1, wherein the vicinity of the recording gap of at least one of the opposed first and second magnetic cores is made of a magnetic material having a saturation magnetization of 1.5 T or more. A recording head according to claim 1. The vicinity of the recording gap of at least one of the opposing first and second magnetic cores is a magnetic material containing Co, Fe, and Ni as main components. The recording head according to any one of claims 1 to 10, wherein 70 wt%, Fe is 15 to 30 wt%, and Ni is 5 to 15 wt%. 12. The first magnetic shield, wherein one of the first and second magnetic cores in the recording head according to claim 1 is also used as a first magnetic shield. And a magneto-resistive element provided between the first magnetic shield and a second magnetic shield provided opposite to the first magnetic shield to perform reproduction. 12. Reproduction is performed by a magnetoresistive element provided between a first magnetic shield and a second magnetic shield provided to face each other, and recording is performed by a recording head according to any one of claims 1 to 11. A composite head, characterized in that: 14. The composite head according to claim 12, wherein the relationship between the reproduction output of the magnetoresistive element and its standard deviation is (standard deviation) ÷ (average of reproduction output) ≦ 0.01. A method for manufacturing a recording head having the magnetic head according to claim 1, wherein the coil is formed by:
A first step of forming a seed layer on the insulator film,
A second step of forming a resist pattern on the seed layer;
A third step of depositing a coil material between the resist patterns by plating;
A fourth step of removing the resist pattern,
A fifth step of removing the seed layer under the resist pattern, and a sixth step of covering the coil material with an insulator;
Are performed in the order described above. 16. The method according to claim 15, wherein the sixth step is performed by spin coating. A method for manufacturing a recording head having the magnetic head according to claim 1, wherein the coil is formed by:
A first step of forming an insulator film pattern,
A second step of forming a groove for forming a coil in the insulator film pattern;
A third step of forming a seed layer on the insulator pattern in which the groove is formed,
A fourth step of forming a coil material by plating on the seed layer;
A fifth step of removing the coil material formed in other than the groove by polishing, and adjusting the height of the surface of the coil material formed in the groove with the height of the surface of the insulator film other than the groove, And a sixth step of covering the surface of the insulating film other than the groove with the coil material formed in the other than the groove and covering the surface of the insulator film with the insulator in the above order. Manufacturing method of a recording head. 16. The method according to claim 15, wherein the seed layer is formed mainly of Cu, and the seed layer is formed on at least one kind of underlayer selected from Ta, TaN, Ti, and TiN. 18. The method for manufacturing a recording head according to any one of items 17. A magnetic recording / reproducing apparatus equipped with the recording head or the composite head according to any one of claims 1 to 14.

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