JP2004078145A - Light supply arrangement - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical connection mechanism capable of making light, guided in respective optical fibers constituting an optical fiber bundle from a light source unit, uniform. <P>SOLUTION: The optical connection member is equipped with a glass member XGL as a circularly sectioned optical waveguide path conducting light and a mirror surface coating part XCT as a reflecting and refracting part which is disposed on the outer circumferential surface of the optical waveguide path XGL and reflects or refracts the light inward. Respective end faces of the glass member XGL are placed in contact with or closely to an end face of an optical fiber bundle X56 on the side of a light source unit X5B and an end face of an optical fiber bundle X7B on the side of a light irradiating device X6B respectively while having their optical axes aligned, and the diameter of the glass member XGL is set nearly equal to the diameters of the respective optical fiber bundles X56 and X7B. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an optical connection mechanism for connecting an optical fiber bundle or the like on a light source device side for supplying light and an optical fiber bundle on a light irradiation device side for irradiating light to an irradiation target portion.
[0002]
[Prior art]
Conventionally, a light source device that supplies light and a light irradiation device that irradiates light to an irradiation target site are connected via an optical fiber bundle.
[0003]
[Problems to be solved by the invention]
However, when the light irradiation device and the light source device are connected using an optical fiber bundle, when light is introduced from the light source device to the optical fiber bundle, for example, light is introduced for each optical fiber constituting the optical fiber bundle. If the light intensity is different, or if a multi-color LED is used, the color of the light introduced into each fiber will be different, resulting in uneven intensity and color of the light finally emitted from the light irradiation device. It can be a cause of unevenness.
[0004]
Therefore, the present invention provides an optical connection mechanism in which light supplied from a light source device via an optical fiber bundle or the like is uniformly introduced into each optical fiber constituting the optical fiber bundle on the light irradiation device side. The subject of the.
[0005]
[Means for Solving the Problems]
That is, the optical connection mechanism according to the present invention includes a light guide member such as an optical fiber bundle or a glass rod formed by bundling a plurality of optical fibers on the light source device side that supplies light, and a light irradiation unit that irradiates light to an irradiation target portion. An optical fiber bundle on the device side is connected, a light conducting path having a circular cross section for conducting light, and a reflection / refractive portion provided on the outer peripheral surface of the light conducting path to reflect or refract light inward. Each end face of the light conducting path is brought into close or close proximity with the end face of the light guide member and the end face of the optical fiber bundle on the light irradiating device side, and the diameter of the light conducting path is adjusted. The diameter of the light guide unit and the diameter of the optical fiber bundle on the light irradiation device side are set to be substantially the same.
[0006]
In such a case, the light emitted from the optical fiber on the light source device side is reflected or refracted inward by the reflection / refractive portion and uniformly mixed, so that the light emitted from the optical fiber on the light irradiation device side can be efficiently and efficiently used. Uniform light without color unevenness can be introduced.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First embodiment>
In the first embodiment, an optical connection mechanism will be described as an example in which the optical connection mechanism is used as a component of a product inspection system as shown in FIG.
[0008]
This product inspection system uses an XY stage X1, which is a movable support that can move horizontally in two horizontal directions, that is, in the X-axis direction and the Y-axis direction. The light conducting tube X2 supported by the XY stage X1 and An imaging device X8 for photographing a workpiece XW to be inspected through the light conducting tube X2, a power supply X3 installed at a place different from the XY stage X1, and a robot cable X4 from the power supply X3. LED light source devices X5A and X5B to be supplied with power, and light irradiation devices X6A and X6B provided with light irradiation ports X6Aa and X6Ba for irradiating a work XW as an object to be illuminated and attached to the light conducting tube X2. Optical fiber bundles X7A and X7B are light guides for guiding light from the LED light source devices X5A and X5B to the light irradiation devices X6A and X6B. Then, the irradiation light emitted from the irradiation ports X6Aa and X6Ba is applied to the irradiation target portion (inspection site) of the work XW conveyed by the conveyance device (not shown), and the appearance state is observed and inspected by the imaging device X8. Things.
[0009]
Each part will be described.
[0010]
As shown in FIG. 1, for example, an XY stage X1 is supported by a fixed body XK installed on the transfer device or the floor or the like so as to be horizontally slidable in the X-axis direction. And a Y stage X12 supported so as to be slidable in the horizontal direction. The Y stage X12 can be freely set in a horizontal two-dimensional direction. Each of the stages X11 and X12 is driven so that the position can be set remotely or automatically by using a drive mechanism such as a stepping motor (not shown).
[0011]
As shown in the figure, the light conducting tube X2 has a cylindrical shape that is fixed to the XY stage X1, specifically, the Y stage X12 via a bracket XB, and stands vertically. Inside the light conducting tube X2, optical components such as a half mirror and a lens (not shown) are housed. Then, the XY stage X1 is driven to move the light conducting tube X2 such that the central axis of the light conducting tube X2 is directed to the irradiation target portion of the work W.
[0012]
The imaging device X8 is, for example, a CCD camera, and is fixed to the upper end of the light conducting tube X2 so that the imaging surface faces downward.
[0013]
The power source X3 is of a DC type for supplying power to the LED light source devices X5A and X5B, and is disposed at a predetermined location separated from the XY stage X1. The robot cable X4 extending from the power supply X3 is guided through the cable bear X41 on the bellows to the LED light source devices X5A and X5B. In FIG. 1, the cable bear X41 has one end attached to the X stage X11 and the other end attached to the Y stage X12. The movement of the Y stage X12 with respect to the X stage X11 causes the cable X4 to be twisted or twisted. Play a role in preventing Of course, another cable carrier may be provided between the fixed body XK and the X stage X11.
[0014]
In the present embodiment, for example, two types of LED light source devices X5A and X5B are provided. One of them, X5A, has one power LED X52 built in a casing X53, and the other has a plurality (three R, G, B) power LEDs X52 of different colors built in a casing X53. It is.
[0015]
More specifically, as shown in FIG. 2, one LED light source device X5A includes an LED X52 disposed on a substrate X51 and a lens for condensing light emitted from the LED X52 to a predetermined light condensing portion X54a. A casing X53 containing a mechanism X54 is connected to an optical input connector X71 attached to a light introducing end of an optical fiber bundle X7A, and the light introducing end face of the optical fiber bundle X7A is connected to the condensing section X54a. And an optical output connector X55 to be positioned.
[0016]
The casing X53 is a hollow metal inside having an outer wall, and the outer wall is integrally provided with a fin XFin so as to perform a heat radiating function for heat generation of the LED X52.
[0017]
The LEDX52 is a bare chip of a surface emitting type, and an electric cable X4 is connected to a substrate X51 supporting the LEDX52 and extends from a side plate X531 of a casing X53. The side plate X531 is configured to be detachable and replaceable with the substrate X51 and the LED X52.
[0018]
The lens mechanism X54 has a pair of lenses X541 and X542 arranged in series, and is interposed between the LED X52 and the light output connector X55. The light emitted from the LEDX52 is made substantially parallel by the first light source lens X541 disposed on the LEDX52 side, and the light is collected by the second light source lens X542. In the present embodiment, the first lens X541 is a substantially cone-shaped cone having an outwardly diverging shape in the direction in which light travels, and the irradiation portion of the LEDX52 is located on the light introduction end side inward of the conical surface. The recessed portion X541a is formed. The light emitted from the LEDX 52 within a predetermined angle is refracted by a refraction-parallelizing portion provided inside the LEDX52 so as to be substantially parallel to the lens optical axis and to spread outward beyond the predetermined angle. With respect to the above, the light is made substantially parallel to the lens optical axis by a reflection parallelizing portion provided on the inner side surface, and the light emitted from the LEDX 52 is made substantially parallel light traveling in the lens optical axis direction with almost no leakage. The second lens X542 for the light source is a convex lens disposed so as to face the first lens X541 for the light source with the lens optical axis coincident with the first lens X541, and applies substantially parallel light passing through the first lens X541 for the light source to the condensing portion X54a. It is configured to collect light.
[0019]
The optical output connector X55 is mounted on the opposite side of the LED of the casing X53, and has a connector hole X551 for fitting and holding the optical input connector X71 mounted on the end of the optical fiber bundle X7A. The light input connector X71 connected to the light output connector X55 positions the light introduction end of the optical fiber bundle X7A at the light condensing part X54a. The light introducing end face of the optical fiber bundle X7A is formed by integrating the ends of the respective optical fibers X7a constituting the optical fiber bundle X7A by heat melting to form a mirror surface. The diameter of the light condensed by the optical fiber X7a is substantially equal to the diameter of the light introduction end face, and the light is introduced into the respective optical fibers X7a substantially uniformly.
[0020]
The other LED light source device X5B has three LEDs X52 arranged in parallel as shown in FIGS. 3 and 4, and accordingly has three substrates X51 and three lens mechanisms X54. . The colors of the LEDs X52 may be the same, but in the present embodiment, they are set to different colors such as R, G, and B. The light output connector X55 has a shape common to that of the one light source device X5A, and only one is provided. One end of an internal optical fiber bundle 56 is tightly bundled and attached to the condensing part X54a of each lens mechanism X54, and the other end of the internal optical fiber bundle 56 is integrally and randomly densely attached. It is bundled and attached to this optical output connector X55.
[0021]
Thus, in particular, in the optical output connector X55 of the light source device X5B, the optical connection mechanism XCN according to the present invention is provided inside, and the light emitted from the internal optical fiber bundle 56 is uniformly mixed in the optical connection mechanism XCN. The optical fiber bundle X7B is configured such that uniform light without color unevenness can be efficiently introduced into each optical fiber constituting the external optical fiber bundle X7B.
[0022]
Specifically, the optical connection mechanism XCN is formed by applying a mirror coating to the outer periphery of the cylindrical glass member XGL excluding the end face, and fitting the mirror into the connector hole X54a. The glass member XGL has substantially the same diameter as each of the optical fiber bundles X56 and X7B, has its axis aligned with the optical fiber bundles X56 and X7B, and has each end face closely contacted with the end surface of each of the optical fiber bundles X56 and X7B. It is arranged to do. This allows the glass member XGL to serve as a light conducting path for conducting and mixing light, and the outer peripheral mirror coating portion XCT reflects inward the light traveling through the glass member XGL so that it does not escape. It plays a role as a department. The light source device X5B having a plurality of LEDs, not limited to three, and having different colors in each LED, is particularly effective when light is uniformly mixed. Needless to say, the optical connection mechanism XCN also has a mirror space between the other end of the optical fiber bundle 56 and the input end of the optical input connector, for example, a mirror-finished inner peripheral surface of the connector hole. May be present, or a similar effect may be obtained by using a clad rod type glass member having two layers, a core and a clad. In addition, also in this LED light source device X5B, it is comprised so that each board | substrate X51 and LEDX52 can be pulled out and removed independently, and can be replaced.
[0023]
From these LED light source devices X5A and X5B, optical fiber bundles X7A and X7B, which are flexible light guides covered with an outer tube, extend and connect to light irradiation devices X6A and X6B mounted on the device main body 2 through the outside. I have. The optical fiber bundles X7A and X7B are extremely short, about 30 cm to 40 cm, and a light input connector X71 fitted to the light output connector X55 is attached to a base end thereof, while the light irradiation device is provided at a front end. X6A and X6B are respectively attached. FIG. 9 shows an example of an optical fiber bundle X7A (7B) in which the optical fibers X7a are tightly bundled. The wire diameter of (b) is smaller than that of (a) in FIG.
[0024]
The light irradiation device X6A is supplied with light from the LED light source device X5A via an optical fiber bundle X7A, and irradiates the light by irradiating the light to the irradiation target site from the surroundings, and has an outer diameter of 10 mm to 30 mm. It is very small. The light irradiation device X6A is attached to an irradiation target portion side end of the light guide tube X2, that is, a lower end portion, and is used to observe the irradiation target portion XW as shown in FIGS. It comprises a cylindrical housing X6A1 having an observation hole X6H, a fiber bundle holding portion X6A2 for holding one end of an optical fiber bundle X7A, and a cover body X6A3 for covering the housing X6A1 from outside. .
[0025]
More specifically, the housing X6A1 has a cylindrical shape, and the inner periphery thereof is the observation hole X6H. The housing X6A11 is externally fitted to the housing body X6A11. A ring-shaped head portion X6A12 that protrudes outward in a flange shape from an end on the target site side is provided.
[0026]
A plurality of through-holes XHL set at a predetermined angle with respect to the axis of the observation hole X6H are formed in the flange portion of the head portion X6A12 so that the center axis XL passes through the center point of the irradiation target portion XW. Are provided at equal intervals along the circumferential direction.
[0027]
As shown in the enlarged view of FIG. 8, the through hole XHL has the same or substantially the same inner diameter as the outer diameter of the ball lens X9 as a lens, and only one end on the irradiation site W side has a slightly smaller diameter. This serves as the lens holding hole for fitting the ball lens X9 from the other end without any gap and holding the ball lens X9 so as not to come off to the one end. The opening of the through hole XHL on the irradiation target site side is the light irradiation port X6Aa. A cylindrical member XB having the same or substantially the same diameter as the inner diameter of the through-hole XHL is fitted into the other end of the through-hole XHL by press-fitting, for example, so as to also prevent the ball lens X9 from slipping upward. The cylindrical member XB is, for example, a resin molded product such as polyacetal, and penetrates the fiber holding hole XB1 along the center axis thereof, and holds the optical fiber X7a through the fiber holding hole XB1.
[0028]
The fiber holding hole XB1 has a large-diameter portion XB11 formed, for example, in a cone shape from one end on the irradiation site XW side, and a small-diameter having an inner diameter set to be substantially the same as the outer diameter of the optical fiber X7a. The optical irradiation end of the optical fiber X7a, which is inserted from the other end toward the one end, is melted using a hot plate or the like, and the melted portion X7a1 is separated from the large diameter portion XB11 by a gap. It is fitted without. In the present embodiment, the distal end surface of the fusion portion X7a1 is made flush with one end surface of the cylindrical member XB on the irradiation site XW side, and the distal end surface of the fusion portion X7a1 is configured to be in contact with the ball lens X9. ing.
[0029]
That is, with such a configuration, the ball lenses X9 are brought into close contact with the respective light emitting ends of the respective optical fibers X7a, and the axis XL and the optical axis of the ball lens X9 at the light emitting ends of the respective optical fibers X7a are aligned. By setting the irradiation target site XW so as to face, the irradiation target site XW is illuminated from the surroundings.
[0030]
The fiber bundle holding portion X6A2 is attached so as to protrude outside the housing X6A1, and holds one end of the optical fiber bundle X7A as described above. Thus, each optical fiber X7a keeps a form as a bundle up to the fiber bundle holding portion X6A2, and from here on, each of the optical fibers X7a holds each light emitting end portion in each of the fiber holding portions XB1. Is done. In addition, a connector X71 is attached to the other end of the optical fiber bundle X7A, so that irradiation light emitted from the LED light source device X5A can be introduced.
[0031]
The cover X6A3 has a cylindrical shape and is attached to the housing X6A1 so as to form a space XS between the cover X6A3 and the outer peripheral surface of the lower end portion of the housing X6A1. The optical fibers X7a are accommodated and protected in the space XS.
[0032]
On the other hand, as shown in FIG. 5, the other light irradiating device X6B has an elongated cylindrical shape that tightly bundles and holds the tip of an optical fiber bundle X7B extending from the other LED light source device X5B. Light is emitted from the front end surface through a circular irradiation port X6Ba formed at the front end of the light irradiation device X6B. As shown in FIG. 1, the light irradiation device X6B is attached to the upper end of the light conducting tube X21 with its irradiation port X6Ba oriented in a direction perpendicular to the axial direction of the light conducting tube X21. is there. Then, the light emitted from the irradiation port X6Ba is reflected and refracted through an optical member such as a half mirror provided inside the light conducting tube X21, travels downward along the axial direction of the light conducting tube X21, and enters the housing X6A1. And is configured to illuminate the irradiation target portion XW from above from the lower end opening.
[0033]
The system configured as described above operates as follows.
[0034]
First, when a workpiece such as a printed circuit board is transported by the transport device, for example, an alignment mark of the workpiece is taken in from the imaging device X8 and recognized by an image recognition unit (not shown), and position information of the alignment mark is calculated. Then, based on the position information, the XY stage X1 is automatically controlled to position the light guide tube X21 immediately above the irradiation target site W of the work. As a result, the irradiation target site W is illuminated from around and directly above by the light emitted from the light irradiation devices X6A and X6B, and an image of the irradiation target site W is obtained by the imaging device X8. By performing the position control of the XY stage X1 in this manner, the position information of the work can be obtained on the contrary. This position information may be used in subsequent steps, and the present device can also be used as a work position measuring device. In addition, it can be used for bar code reading and the like.
[0035]
Therefore, according to the optical connection mechanism XCN according to the present embodiment, the glass member XGL serves as a light conducting path that conducts and mixes light, and the mirror-coated portion XCT on the outer periphery transmits light traveling through the glass member XGL. The light emitted from the optical fiber bundle 56 on the light source device X5B side is uniformly mixed to serve as a catadioptric portion that reflects inward and does not escape to form an optical fiber bundle X7B on the light irradiation device X6B side. It is possible to efficiently introduce uniform light without color unevenness into each of the optical fibers X7a. The light source device X5B having a plurality of LEDs, not limited to three, and having different colors in each LED, is particularly effective when light is uniformly mixed.
[0036]
Further, according to the light irradiation device X6A in the present embodiment, the light emitted from each of the optical fibers X7a is directed by the ball lenses X9 provided one by one corresponding to each optical fiber X7a. Is refracted so as to be stronger, so that the light condensing area at the irradiation target portion XW can be easily reduced. Further, since the ball lens X9 is arranged close to the light emitting end of the optical fiber X7a, the light emitted from each optical fiber X7a is refracted with almost no leakage, and irradiates the irradiation target portion XW with extremely high efficiency. can do.
[0037]
Further, according to the light source devices X5A and X5B in the present embodiment, the pair of light source lenses X541 and X542 is provided. Since almost all of the light emitted from the LEDX 52 is converted into substantially parallel light by the refraction-parallelization unit and the reflection-parallelization unit, it is possible to make the light-collecting area as small as possible at the time of final light-collection. it can. On the other hand, in the optical fiber, the light incident on the light introduction end is emitted from the emission end at an angle equal to the incident angle. In the case of the light source devices X5A and X5B, the second light source lens 542 is appropriately set. With only this, the incident angle of light to each optical fiber X7a can be adjusted at once. Therefore, in particular, in the light irradiation device X6A in which the ball lens 9 is made to correspond to each optical fiber 7a as in the present embodiment, it is possible to adjust the emission angle and the light condensing preferable for the light condensing without adjusting each lens 9 one by one. It can be easily adjusted to have an area.
[0038]
By using such light irradiation devices X6A, X6B and light source devices X5A, X5B in combination, their characteristics are superimposed, and extremely small portions such as a semiconductor chip and a portion where the semiconductor chip is soldered to a printed board. Therefore, it is possible to construct a system that can reasonably respond to a demand that requires precise inspection.
[0039]
On the other hand, when viewed as a whole system, since the LED light source devices X5A and X5B can be easily reduced in weight and size, the XY stage X1 has the LED light source devices X5A and X5B. Consequently, it is possible to hardly affect the driving of the light irradiation devices X6A and X6B.
[0040]
Even if the light irradiation devices X6A and X6B frequently move to correspond to the positions of the respective workpieces, only the electric cable X4 moves, and the relative positional relationship between the LED light source devices X5A and X5B and the light irradiation devices X6A and X6B is changed. Since it does not change in principle, the optical fiber bundles X7A and 7B do not deform. Since the electric cable X4 is far superior in flexibility, durability, price, and the like to the optical fiber 7a, the XY stage X1 and the XY stage X1 can be moved with a very small load compared to the conventional load by moving the optical fiber. The light irradiation devices X6A and X6B can be driven, and also have excellent durability and reliability. Of course, destruction due to the movement of the optical fiber bundles X7A and 7B can be prevented, and adverse effects on the reliability and life of the device can be eliminated.
[0041]
The present invention is not limited to the above embodiment, and various modifications are possible. Hereinafter, a modified example of the light irradiation device will be mainly described. In the description or in the drawings, members corresponding to those of the above-described embodiment are denoted by the same reference numerals.
[0042]
10 and 11 show the light irradiation device 6 in which the irradiation port X6a is formed on a concave spherical surface. The irradiation ports X6a are densely arranged on a concave spherical surface, and the tip of an optical fiber X7a faces each of the irradiation ports X6a via a ball lens X9. The light irradiation device X6 has a plurality (three) of light input connectors X71, and also has a plurality (three) of optical fiber bundles X7 corresponding thereto. Unlike the above-described embodiment, the optical fibers X7a constituting each of the fiber bundles X7 are connected correspondingly to the lower, middle, and upper stages, and can be used in a manner such as color highlight illumination. At the center, as in the above-described embodiment, a through-hole penetrating vertically is provided, and the work XW is inspected through the through-hole. Note that the optical fiber bundles X7 may be randomly assembled in the light irradiation device X6.
[0043]
FIG. 12 shows a light irradiation device X6 that can change the distance between the tip of the optical fiber bundle X7 and the ball lens X9 in a tightly bundled state. These light irradiation devices X6 can change the focal length and are suitably used for spot illumination. Specifically, two cylindrical head elements X6c and X6d are fitted with each other, and the fitting depth is changed by using a screw feed structure or the like, so that the tip of the optical fiber bundle X7 and the ball It has a structure that makes the distance to the lens X9 variable. It should be noted that a ball lens is not provided for each optical fiber as in the above-described embodiment, but only one ball lens X9 is provided. Further, a plurality of such light irradiation devices X6 are provided separately from one light input connector X71.
[0044]
The light irradiation device X6 shown in FIGS. 13 to 15 is for line inspection, and each optical fiber X7a is held with its tips arranged in one or more rows. In the drawing, a lens array having two stages of linear Fresnel lenses is used for light collection, but a cylindrical type may be used instead of the linear Fresnel lens.
[0045]
FIG. 16 shows a ring-type light irradiation device X6 as in the above embodiment. This is suitable for use when the thickness of the light irradiation device X6 is small and the distance between the work XW and the irradiation port X6a is short, such as a microscope.
[0046]
FIG. 17 shows that the optical axis of the irradiation light is bent through the lens X9 by setting the optical axis of the lens X9 so as to be deviated from the axis at the light emitting end of the optical fiber X7a. It is a partial sectional view of light irradiation device X6 turned to XW. In this case, the axis at the light emitting end of the optical fiber X7a does not necessarily need to be set so as to face the irradiation target portion XW. Specifically, for example, the fiber holding hole XHL may be formed at a position deviated from the central axis of the columnar member XB.
[0047]
As shown in FIG. 18, in order to further condense the light from each lens X9, a single condensing second lens having an opening X75A at the center (the Fresnel lens in FIG. Any lens, such as a convex lens, may be used. In this case, it is preferable that the ball lens X9 converts the light from the optical fiber X7a into substantially parallel light in consideration of the light condensing by the second lens X75.
[0048]
Further, depending on the application, a light source device may be provided integrally with the housing of the light irradiation device described above to form a unit. In this case, it is desirable that the light irradiation device and the light source device are connected by an optical fiber, and the optical fiber is housed in a housing.
[0049]
Of course, modifications other than the light irradiation device are conceivable. Note that various modifications of the light source device will be mainly described in the second embodiment.
[0050]
For example, by disposing the LED light source device in the vicinity of the irradiation port, the optical fiber can be shortened and lightened. Therefore, even if the light irradiation device is movably supported on the XY stage, the driving of the light irradiation device is impossible. It is possible to do without. At this time, it is preferable that the light irradiation device be configured to move slightly or slowly with respect to the XY stage within a range where there is no problem in the reliability and life of the optical fiber.
[0051]
Further, the configuration is not limited to the optical fiber bundle, and may be configured by one optical fiber. A power source may be provided by incorporating or attaching a battery to the LED light source device. This makes it possible to reduce cable. Further, power may be supplied to the LED light source device from another mechanism constituting the light irradiation device, such as an imaging device or a drive mechanism of an XY stage.
[0052]
Further, the movable support is not limited to the XY stage, and various types such as those capable of setting the position in three dimensions can be used.
[0053]
In the case of performing full-color illumination using LEDs of a plurality of colors (three colors), it is preferable that optical fibers that emit light of each color are arranged without bias on the light irradiation devices 6A and 6B side.
<Second embodiment>
In the second embodiment, various aspects mainly on the light source device side will be described. It is assumed that reference numerals in the following description have nothing to do with the first embodiment.
[0054]
19 and 20 show the light source device. This light source device includes a large number of bare chips 2 constituting a chip-type light emitting diode as a light emitting body mounted on a substantially rectangular (or circular) substrate K with an irradiation surface facing forward, and each of the light emitting diodes. A lens array 3 as a first lens for a light source disposed on the irradiation surface side of the light emitting diode so as to make the irradiation light emitted from the light into substantially parallel light, and collects light from the lens array 3 to guide the light. A Fresnel lens 5 as a second light source lens for introducing the optical fiber bundle (also referred to as a light guide) 4 into a light introducing end 4A of a plurality of optical fibers as members, and cooling for cooling the back surface of the substrate K Means 6 are provided, which are provided in a casing 7.
[0055]
The substrate K is composed of a glass epoxy substrate or the like, and is composed of two layers of a base substrate 1 located on the lower side and an upper substrate 17 having a mortar-shaped hole 17a integrated thereon. However, the substrate K may be constituted only by the base substrate 1 without the upper substrate 17. The portion of the upper substrate 17 having the mortar-shaped hole 17a is referred to as a reflector. By providing the reflector 17a, there is an advantage that the light that spreads to the left and right of the light from the bare chip 2 can be reflected by the reflector 17a and guided forward, but may be omitted.
[0056]
The light source device is suitable for a device mainly used for a product inspection in a factory or an inspection room, but may be used for other purposes. The number of optical fibers constituting the optical fiber bundle 4 may be any number as long as it is plural. The lens array 3 is composed of the same number of lens portions 3A arranged corresponding to the bare chips 2 of the respective light emitting diodes, but can convert light from the bare chips 2 of the light emitting diodes into substantially parallel light. Any configuration may be used. 4B shown in FIG. 19 is a light emitting end, and the inspection is performed by irradiating the light emitted from the light emitting end 4B to the inspection target. For example, reflected light that reflects the inspection target or the inspection target A camera (not shown) for imaging transmitted light transmitted through the light-emitting diode, turning on the light-emitting diode at or before the shutter of the camera is opened, and after a lapse of a predetermined time after the shutter is closed Lighting control means (not shown) for controlling the lighting of the light emitting diode to turn off the light emitting diode may be provided. Reference numeral 24 shown in FIG. 19 is a light control knob, and reference numeral 25 is a power switch for turning on and off the power.
[0057]
As shown in FIGS. 20 and 23, the bare chip 2 of the light emitting diode is provided in a predetermined order on the base substrate 1 corresponding to a portion of the substrate K excluding the outer peripheral edge of the upper substrate 17, that is, a large number of mortar-shaped holes 17a. In other words, in order from the top, a bare chip 2A of a red light emitting diode, a bare chip 2B of a green light emitting diode, and a bare chip 2C of a blue light emitting diode are directly mounted in the horizontal direction at the same pitch, respectively, and then a material having transparency. The bare chip 2 is sealed and protected with 19 (plastic, elastomer such as epoxy or silicone, glass, or the like) 19. Here, a light emitting diode is formed by mounting a bare chip on the base substrate 1 corresponding to the many mortar-shaped holes 17a of the upper substrate 17 forming the substrate K. However, a light emitting diode with a reflector having one hole is used. Many may be connected or one without a reflector may be used. Further, the surface of the upper substrate 17 may be plated, or the surface may be coated with a reflective layer to increase the reflection efficiency. In addition, a chip type light emitting diode is provided with a pair of electrodes (cathode and anode) via through holes (or not) on the front and back of a base made of an insulating material such as resin or glass epoxy, for example. (Surface Mount Device) or a chip type light emitting diode having another structure. The use of the chip type light emitting diode has an advantage that the mounting density can be increased. However, in some cases, a shell type light emitting diode may be used. Reference numeral 26 shown in FIG. 21 is a wire for connecting a bare chip and an electrode (not shown).
[0058]
Current limiting resistors 18R, 18G, 18B connected to the light emitting diode bare chips 2A, 2B, 2C are attached to the outer peripheral edge of the upper substrate 17 constituting the substrate K. Here, since the base substrate 1 and the upper substrate 17 are integrated to form the substrate K, the resistors 18R, 18G, and 18B are attached to the outer periphery of the upper substrate 17 of the substrate K. In the case where there is no reflector 17 or when a reflector formed separately and having a size smaller than that of the base substrate 1 is set, that is, the reflector separately formed in a size that can attach the bare chips 2A, 2B and 2C is used. In the case where it is provided, it is directly attached to the outer peripheral edge of the base substrate 1. The arrangement of the resistors 18R, 18G, 18B may be other than the arrangement shown in the figure. Also, as shown in the figure, providing one resistor for a predetermined number of bare chips (four in the figure, but any number) is advantageous in terms of miniaturization and assembling. May be connected to one bare chip.
[0059]
As shown in FIGS. 19 and 20, a cylindrical member 20 into which the introduction end 4A side portion of the optical fiber bundle 4 can be inserted is attached to the front surface of the casing 7, and the introduction end 4A portion of the optical fiber bundle 4 is attached to the cylindrical member 20. The cylindrical member 20 is provided with a screw 23 for fixing the inserted member.
[0060]
Further, the cylindrical member 20 is constituted by members having different inner diameters as shown in FIGS. 24 (b) and (c) in addition to those shown in FIG. , 22 can be mounted so that the optical fiber bundles 4 having different outer diameters can be mounted. In FIGS. 24 (a), (b) and (c), three types of cylindrical members 20, 21 and 22 are provided so that the optical fiber bundle 4 having three different outer diameters can be mounted on the casing 7. Although the mounting means is constructed, the mounting means may be composed of one kind of cylindrical member whose inner diameter is changeable, or may be another configuration. Further, two or four or more optical fiber bundles 4 having different outer diameters can be mounted.
[0061]
As shown in FIG. 25, the size of the inner diameter is different by providing an adapter into which the introduction end 4A side portion of the optical fiber bundle 4 can be inserted and which is detachable from the casing 7 with screws. By simply preparing a plurality of types of adapters, the adapters can be replaced corresponding to the optical fiber bundles 4 having different outer diameters. Specifically, a cylindrical portion 27 into which the introduction end 4A side portion of the optical fiber bundle 4 is inserted, and a cylindrical portion formed by screwing or loosening a screw hole (not shown) of the casing 7 into an intermediate portion of the cylindrical portion 27. An adapter is constituted by a rectangular flange portion 28 having four screw (screw) insertion holes for fixing and releasing the fixing of the 27 to the casing 7. Further, as shown in FIG. 25, a circumferential groove 29 </ b> A is formed substantially at the center of the introduction end 4 </ b> A of the optical fiber bundle 4 in the longitudinal direction, and a cylindrical insertion portion 29 inserted into the cylindrical portion 27 is formed. And a light guide holding portion 30 which is externally fitted and fixed in order from an end portion, and which is arranged in a cylindrical portion 27 constituting the adapter in a state of being protruded and biased inward by a coil spring in a cylindrical portion 27. The inner insertion portion 29 can be positioned with respect to the cylindrical portion 27 by engaging with the peripheral grooves 29A (not shown). 27A shown in the figure is a screw hole into which the screw 23 is screwed. By screwing the screw 23, the insertion portion 29 can be securely fixed to the cylindrical portion 27.
[0062]
As shown in FIGS. 19 and 20, the cooling means 6 has a heat-dissipating insulating rubber sheet (heat-dissipating grease) on the back surface of the front and back surfaces of the substrate K opposite to the side on which the bare chip 2 of the light emitting diode is mounted. And a cooling plate (which may be omitted) 9 disposed via a Peltier effect in which heat is transferred by flowing a current through two semiconductor elements having different properties to generate a temperature difference. Peltier device 10 for cooling the substrate K by pressing, a radiating fin 11 for transmitting and releasing the heat generated in the Peltier device 10, and a radiating fin 11 for applying a cooling air to the radiating fin 11 to promote heat release. The heat dissipation fan 12 is provided. Therefore, the heat transmitted through the heat insulating rubber sheet 8 and the cooling plate 9 is cooled by the Peltier element 10, and the heat generated on the side of the Peltier element 10 opposite to the cooling plate 9 is transmitted to the radiation fins 11. And radiating the heat from the radiating fins 11 by the radiating fan 12.
[0063]
When the cooling means 6 is composed of the Peltier device 10, the radiating fins 11, and the radiating fan 12 as described above, there is an advantage that cooling can be efficiently performed. Only the heat radiating fin 11 and the heat radiating fan 12 may be provided and implemented.
[0064]
As shown in FIG. 22, temperature detecting means 13 comprising a temperature sensor for detecting the temperature of the substrate K, temperature setting means 14 for setting the temperature of the substrate K as a desired target temperature, and the temperature setting means Temperature control means 16 as a control device for driving and controlling a Peltier device current control unit 15 for controlling the current of the Peltier device 10 so that the detected temperature of the substrate K matches or substantially matches the target temperature set by the unit 14 Is provided so that the temperature of the substrate K always becomes the set target temperature.
[0065]
The Fresnel lens 5 has the same shape as the substrate K (see FIG. 19), and has an outer shape having substantially the same size and is cut into a substantially square shape. You may. Further, by using the Fresnel lens 5, the light emitting diode 2 can be brought closer to the Fresnel lens 5 as compared with the case of using a normal convex lens (including a compound lens), as well as reducing the size and weight. Although the efficiency of capturing light into the light introducing end 4A of the light splitting fiber bundle 4 can be improved, a normal convex lens may be used. Although FIG. 21 shows a state in which a certain gap is provided between the Fresnel lens 5 and the lens array 3, a close state where there is almost no gap may be provided, or contact may occur in some cases. It may be in a state. The larger the gap is, the less heat is transmitted from the light emitting diode 2, which is effective for problems such as deformation.
[0066]
As shown in FIG. 23, with respect to the substrate K, 18 red light-emitting diode bare chips 2A, green light-emitting diode bare chips 2B, and blue light-emitting diode bare chips 2C are arranged at the same pitch in the horizontal direction from the top. By attaching to K, there is an advantage that a well-balanced white light can be obtained, but other arrangements may be used. Further, in addition to the bare chips of the plurality of types of light emitting diodes other than the above three types, the bare chips of the same color single color light emitting diodes may be used.
[0067]
By providing and implementing a PWM control circuit for stabilizing the output (voltage, current, power, etc.) by controlling the ON time (pulse width) of the bare chip of the light emitting diode, all the light emitting diodes 2 Light amount control such as making the light amount constant can be performed.
[0068]
As described above, by providing the mortar-shaped hole 17a in the upper substrate 17 which also serves as the substrate K on the irradiation side of the light-emitting diode 2, it is possible to capture light that could not be captured and increase the amount of light. There are advantages that can be done.
[0069]
The light source device may be a small (handy type) light source device that is convenient to carry as shown in FIGS. Referring to FIGS. 26A and 26B, a cylinder for internally fitting and supporting a rear end of a cylindrical holding portion 33 which can be fixedly held by screws 32 by inserting an optical fiber bundle 31 at the front end (front end). A front end portion 34, a front conical portion 35 having a shape expanding outward toward the rear end from the rear end of the front end portion 34, and a rear end extending rearward from the rear end of the front conical portion 35. A casing 39 is composed of a casing body 37 composed of the side cylindrical portion 36 and a lid 38 for closing the rear end opening of the casing body 37. The cover 38 constituting the casing 39 is made of a metal radiating fin, and a heat conductive material 40 is fixed to the inner surface of the radiating fin 38. A substrate 44 on which primary color light emitting diodes, that is, four red light emitting diodes 41, four green light emitting diodes 42, and four blue light emitting diodes 43 are attached, is fixed in a contact state. Examples of the material 40 include a solid material such as a silicone elastomer sheet filled with a suitable filler (for example, ceramic particles having good heat conductivity) for improving thermal conductivity, and a semi-solid formed in a gel state. And a liquid such as grease can be used.
[0070]
A lens array (the light source for converting light from the light-emitting diodes into substantially parallel light) including the same number of lens portions 45A disposed in front of the light-emitting diodes 41, 42, and 43 so as to correspond to the respective light-emitting diodes. 1 lens) 45, and a Fresnel as a second light source lens for condensing light from the lens array 45 and introducing the light from the lens array 45 to the light introduction end 31 A of the optical fiber bundle 31 in front of the lens array 45. The lens 46 is arranged. Then, one end of a power supply cord 47 for supplying power to the light emitting diodes 41, 42, 43 is connected to an electrode (not shown) of the substrate 44, and the other end is externally connected through a hole 38A formed in the radiation fin 38. And can be connected to an external power supply.
[0071]
Since the light source device configured as described above does not include a power supply, the entire light source device can be configured to be small and light, and the long optical fiber bundle (light guide) 4 described above is not required. When the long optical fiber bundle 4 is routed to irradiate the work with light, there is an advantage that damage such as breakage of the optical fiber bundle 4 can be prevented. In FIG. 26 (a), the tip of the optical fiber bundle 31 is set to be the same as the tip of the holding unit 33, but it may be set to be slightly longer or slightly shorter than the tip of the holding unit 33. You can also. Further, since the optical fiber bundle 31 is configured to be fixed and released by the screw 32, the optical fiber bundle 31 can be replaced with the optical fiber bundle 31 having a different length. Further, the length of the holding portion 33 is not limited to that shown in the drawing. Further, a total of twelve light emitting diodes 41, 42, 43 of the four red light emitting diodes 41, four green light emitting diodes 42, and four blue light emitting diodes 43 are arranged on two concentric circles S1, S2. By arranging the light emitting diodes adjacent to each other in the circumferential direction on the circle on each concentric circle S1 or S2 so as to be light emitting diodes of different colors, the light emitting diodes of the same color are not arranged at one place, It can be dispersed. Here, four light emitting diodes are arranged on one concentric circle S1 on the smaller diameter side, and eight light emitting diodes are arranged on the other concentric circle S2 on the larger diameter side. However, the number is limited to these numbers. Not something. In the drawings, the light emitting diodes 41, 42, and 43 are affixed with initials of R, G, and B on the surface of the light emitting diodes for easy understanding at a glance.
[0072]
FIGS. 27A and 27B show the small light source device shown in FIGS. 26A and 26B in which the number (12) of the light emitting diodes 41, 42, and 43 is increased to 24. Since the basic configuration is the same as that shown in FIGS. 27A and 27B, the same reference numerals are given and the description is omitted. In the figure, the light emitting diodes 41, 42 and 43 are arranged on four concentric circles S1, S2, S3 and S4 such that light emitting diodes adjacent in the circumferential direction on each circle become light emitting diodes of different colors. ing. Specifically, four light emitting diodes are arranged on the concentric circle S1 having the smallest diameter, eight light emitting diodes are arranged on the concentric circle S2 having the next largest diameter, and four light emitting diodes are arranged on the concentric circle S3 having the next largest diameter. Are arranged next to each other, and eight light-emitting diodes are arranged in a concentric circle S4 having the next largest diameter, but the light-emitting diodes of the same color can be dispersed and arranged without being concentrated at one place. If so, it is not limited to the arrangement in the figure.
[0073]
The small (handy) light source device may be configured as shown in FIGS. 28 (a) and 28 (b). The front case 50 includes a holding portion 48 for holding the optical fiber bundle 31, a cylindrical portion 49 formed in a step-like shape in which the outer surface extends outward from the rear end of the holding portion 48 toward the rear end. A casing 52 having a front open bottom portion 51A which is fitted and fixed to the front case portion 50, and a tubular rear case portion 51 having heat radiation fins (may be omitted) on the side surface. Is composed. A substrate 54 on which a single (one) light emitting diode 53 is attached is fixed to the inner surface of the bottom 51A of the rear case portion 51 with bolts 55. In front of the light-emitting diode 53, a transparent condensing member 56 having a substantially cone-shaped (substantially trumpet-shaped) outer shape as a first light source lens for converting light from the light-emitting diode 53 into substantially parallel light is disposed. A concave portion 56A into which the irradiation portion 53A of the light emitting diode 53 enters is formed on the rear end surface of the light collecting member 56. Then, the front end of the light collecting member 56 is held in a state sandwiched between the positioning fixing member 57 fixed inside the rear case portion 51 and the irradiation section 53A. Further, in front of the light collecting member 56, a convex lens (Fresnel lens as a second light source lens) for condensing light from the light collecting member 56 and introducing the light to the light introducing end 31A of the optical fiber bundle 31 is also provided. Good) 58 is disposed. Accordingly, of the light from the light emitting diode 53, light emitted at a large angle with respect to the optical axis of the light emitting diode 53 is reflected by the light reflecting layer 56 </ b> B provided on the outer peripheral surface of the light collecting member 56 and enters the convex lens 58. I try to make it. A power cord 59 shown in the figure has a socket 59A at an end thereof which can be connected to and disconnected from a power source.
[0074]
By providing a discharge fan (not shown) in the light source device shown in FIGS. 26 to 28, the internal hot air may be discharged to the outside to increase the cooling efficiency. Although the optical fiber bundle 31 is used as the light guide member in FIGS. 26 to 28, the optical fiber bundle may be formed of a single columnar member made of crystal glass or the like. In this case, the light emitting end (tip) may be tapered toward the light emitting end (front end) side to condense light so that strong light can be emitted.
[0075]
The small light source device shown in FIGS. 28A and 28B can be configured and implemented as shown in FIGS. 29A and 29B. The optical fiber bundle 31B which can be connected in a state in which light can be transferred by inserting the holding portion 48 of the light source device shown in FIGS. 28 (a) and 28 (b) in a state where the upper end portion thereof is bundled by a band or the like. The optical fiber bundle 31A is housed in the cover member 60, and the end of the optical fiber bundle 31A is circularly (ring-shaped) adjacent to the lower end of the cover member 60. Good). Therefore, for example, when the cover member 60 is attached to the end of the above-described long optical fiber bundle (light guide) 4 and the long optical fiber bundle 4 is routed as described above to irradiate the work with light, There is no trouble such as damage such as breakage, and there is an advantage that it can be used favorably for a long period of time. A through hole 60A is formed in the cover member 60 shown in the figure, and a lens of a camera, which is an image pickup means, is inserted into the through hole 60A, and light reflected by irradiating a workpiece from the extension portion 31A with the camera is reflected by the camera. For example, the image may be captured and image processing may be performed on the captured image, or the reflected light may be visually confirmed from the through hole 60A. Numeral 60B shown in FIG. 29A is a boss portion for internally fitting and supporting the holding portion 48 at the upper end of the cover member 60. The boss portion 60B has an internally fitted (inserted) holding portion. A screw 61 for fixing the part 48 is provided. In addition to arranging the tip of the optical fiber bundle 31A in a circular shape, arranging it in a rectangular shape, an elliptical shape, or a polygon, the shape of the annular light emitted from the tip of the optical fiber bundle 31A is configured in any shape. May be. In addition, the configuration shown in the drawing and not described is the same as the configuration described above, and is denoted by the same reference numerals.
[0076]
By configuring the optical fiber bundle 4 or 31 like a stranded wire by twisting a large number of optical fibers, especially when three types of light (red, green, and blue) are irradiated through the optical fiber bundle 4 or 31, Good (uniform) white color can be achieved, which is advantageous when white light is used.
[0077]
Also, by implementing the light source device shown in FIG. 29 in a form that can be housed in the cover member 60 as shown in FIG. 30, the size of the light source device can be reduced. The optical fiber bundle 31B shown in FIG. 30 is obtained by extending the optical fiber bundle 31 of the light source device. In addition, the cover member 60 shown in FIG. 30 is actually implemented by a vertically split type or a horizontal split type, or a structure in which only one wall is detachable so that the light source device can be inserted into the inside of the cover member 60. Become. In addition, by omitting the casing 52 and housing only the components constituting the light source device, that is, only the lens 58, the light condensing member 56, the light emitting diode 53, and the optical fiber bundle 31 in the cover member 60, Further, the size of the light source device can be reduced.
[0078]
Further, the light source device shown in FIG. 19 may be configured as shown in FIGS. 31 and 32. In FIGS. 31 and 32, a large number of light emitting diodes 53 integrated with the substrate 54 shown in FIG. Each of the light-emitting diodes 53 is irradiated with a light-collecting member 56, which is a substantially cone-shaped (substantially trumpet-shaped) transparent first light source lens for converting the irradiation light emitted from each of the light-emitting diodes 53 into substantially parallel light. In order to collect the light from the light collecting member 56 and to introduce the light from the light collecting member 56 to the light introduction end 62A of the optical fiber bundle (light guide member) 62 in which a plurality of (or one) optical fibers are bundled. A convex lens (which may be a Fresnel lens) 58, which is the second lens 58 for the light source, is disposed in front of the first lens 56 for the light source, and the light emitting side ends (tips) of the nine optical fiber bundles 62 are bundled. The assembly (light emitting die Constitute also referred) 62S and random part from bundling the optical fiber bundle at random as bias light is not generated by the brightness variation of the over-de. In the figure, a light collecting member 63 for further condensing the light from the convex lens 58 to the optical fiber bundle 62 is provided, but it can be omitted. 31 and 32 are radiating fins (one radiating fin is shown in FIG. 31, which is arranged in contact with the back surface of the substrate 69 to cool the nine substrates 69. It may be divided), and 12 shown in FIG. 32 is the heat dissipation fan also shown in FIG. 19, and will be described in detail later. Further, the light emitting end (tip) of the collecting portion 62S is the cylindrical member 20 holding the optical fiber bundle 4 (the one shown in FIG. 19) as the second light guide member. By inserting the optical fiber bundle 4 into the cylindrical member 20, the light from the collecting part 62S can be transferred to the light introducing end 4A by being inserted into the cylindrical part 20 provided at the end on the casing 7 side. Therefore, by moving the light emitting end 4B of the flexible optical fiber bundle 4 to an arbitrary position as shown in FIG. 19, light can be emitted from all directions while the inspection object is located at a predetermined position. Irradiation is possible. FIG. 31 shows a case where nine light emitting diodes 53 are attached to nine substrates 69, respectively. However, nine light emitting diodes 53 may be attached to a single (single) substrate. Further, here, two lenses, that is, the first lens 56 for the light source and the second lens 58 for the light source are used, but an integrated lens of the two lenses may be used. Further, each of the first lens 56 for the light source and the second lens 58 for the light source is constituted by a single lens array or a single Fresnel lens provided with nine lens portions in one transparent body. You can also. Further, the present invention can also be implemented by using the reflector 17a shown in FIG. 21 instead of the one shown in FIG. On the other hand, in FIG. 31, a cylindrical glass member (not shown) is fitted inside the cylindrical portion 20A of the cylindrical member 20, and the distal end of the optical fiber assembly 62S and the light introducing end 4A of the optical fiber bundle 4 (see FIG. 19), the light emitted from the tip of the optical fiber collecting portion 62S is efficiently reflected by the glass member without waste and color unevenness. The light can be guided to the light insertion end 4A of the optical fiber bundle 4 as uniform light without any light.
[0079]
Such a configuration is effective in uniformly mixing light from light-emitting diodes of two or more different colors.
[0080]
FIG. 31 shows a configuration in which light from nine light emitting diodes is collected in the optical fiber condensing part 62S. However, light from an arbitrary number of light emitting diodes such as three or six is collected in the optical fiber collecting part 62S. A configuration for collecting may be used.
[0081]
Instead of the cylindrical glass member, a cylindrical glass member having a hollow inside or a metal member having a mirror-finished inner surface, or a clad rod type glass member having two layers of a core and a clad may be used.
[0082]
The condensing member 63 will be described in detail. For example, as shown in FIG. 33, an optical fiber having a multi-step structure composed of four layers 64A, 64B, 64C and 64D so that the refractive index differs in multiple stages (four stages in the figure). As shown in FIG. 31, by forming a large number of 64 pieces in an integrated state and expanding them while applying heat, they are formed in a substantially conical shape (substantially inverted trumpet type or tapered type) having a smaller diameter toward the tip end (light emission side). By changing the trajectory of light inward, there is an effect of minimizing light leaking to the outside, but it may be constituted by a single glass rod, or As shown in FIG. 34, an optical fiber in which the refractive index of a tapered portion 65A having a smaller diameter toward the distal end and a straight portion 65B having the same diameter from the distal end of the tapered portion 65A is gradually and continuously changed. Over a a GI (may be an optical fiber wherein the straight portion 65B is composed of only without the tapered portion 65A) (graded index) type may be a fiber optic 65. Also, a multi-step optical fiber 64 having a refractive index that is stepwise (intermittently) may be used, such as the optical fiber 64 having the four layers 64A, 64B, 64C, and 64D. The optical fiber 65 has a double structure including a core 66A, which is a high refractive index region, and a low refractive index clad 66B surrounding the core 66A, but may have another configuration. Further, the distal end of the light condensing member 63 and the proximal end of the optical fiber 62 are connected by an adhesive or heat welding, but may be connected by another method. Reference numeral 67 shown in FIG. 31 denotes a casing, which comprises a square tubular casing body 67B for accommodating the above-mentioned various components, and nine square plate-shaped front lids 67A for closing the front opening of the casing body 67B. I have. A single radiating fin 68 is disposed behind the nine casing bodies 67B to close all the openings and to also serve as a fixing member for fixing the nine substrates 69 with screws. , And other configurations. Further, as shown in FIG. 32, a radiating fan 12 is provided behind the radiating fins 68 to blow cooling air to the radiating fins 68 to promote heat release, thereby avoiding a decrease in luminous efficiency of the light emitting diode 53 due to heat. There is an advantage that the operation can be performed and the life can be extended. A silicone elastomer sheet or the like filled with a suitable filler (for example, ceramic particles having good thermal conductivity) for improving thermal conductivity between the radiation fins 68 and the substrates 69 for mounting the light emitting diodes 53. In addition to a solid, a semi-solid gel or a liquid such as grease may be provided. Since the other members shown in FIGS. 31 and 32 are the same as those shown in FIG. 19, they are denoted by the same reference numerals and description thereof will be omitted.
[0083]
The light source device shown in FIGS. 29A and 29B may be configured as shown in FIGS. 35A and 35B. That is, the optical fiber bundle (which may be constituted by a single glass rod) 31 shown in FIGS. 28A and 28B is omitted, and the optical fiber 71 provided in the guide member 60 shown in FIG. Is configured so that light from the convex lens 58 is directly incident on the lens. More specifically, in FIG. 35 (a), the casing 52 is composed of two members, the rear case portion 51 and the cylindrical portion 49, so that the light from the convex lens 58 can directly enter the incident end face 71A of the optical fiber 71. , Which is advantageous in that attenuation of the spectrum can be avoided. Numeral 72 shown in the figure is a holding member for holding the light incident side end of the optical fiber 71 on the guide member 60, and 73 is a lens 74 of a camera as an image pickup means in a through hole of the guide member 60. Screws 73 (two in the figure, but any number) for fixing in the inserted state. The exit ends of the optical fibers 71 are arranged singly or in a bundle with a plurality of them at predetermined intervals and are arranged in a circular shape (in any shape such as an ellipse, a triangle, or a polygon) in a ring shape (ring shape). However, as shown in FIG. 29B, they can be arranged without any gap.
[0084]
At the light emitting end of the light source device shown in FIG. 35, the light from the large number of optical fibers 71 arranged at appropriate intervals on the circumference as shown in FIG. 36 is converted into substantially parallel light. A large number of convex lenses (a Fresnel lens or the like may be used as long as they can be converted into substantially parallel light) 70 (the same number as the optical fibers 71) are arranged, and an aperture is formed at the center in order to collect the light from these lenses 71. It is also possible to dispose a condenser lens (which may be any lens such as a Fresnel lens or a convex lens) 75 provided with the portion 75A. By arranging the convex lens 70 in this way, of the light condensed by the convex lens 58, the light that is about to spread from the light exit end of the optical fiber 71 can be reliably captured by making it approximately parallel light. Therefore, there is an advantage that the amount of light per unit area on the irradiation surface can be increased accordingly. Further, by changing the convex lens 58 to a lens having a different refractive index, the emission angle of the optical fiber 71 from the emission end is changed in FIG. 35, and the irradiation range of the light emitted from the condenser lens 75 in FIG. Can be changed. Further, if the condenser lens 75 can be freely replaced, the condenser distance (distance from the light emitting end surface to the target work) L can be changed simply by replacing the condenser lens with another condenser lens in accordance with various inspections. Can be changed. Since the other members shown in FIGS. 35 and 36 are the same as those shown in FIGS. 28 and 29, they are denoted by the same reference numerals and description thereof will be omitted.
[0085]
【The invention's effect】
As described in detail above, according to the present invention, the light emitted from the optical fiber on the light source device side is reflected or refracted inward by the catadioptric unit and uniformly mixed, and the optical fiber on the light irradiation device side It is possible to efficiently introduce uniform light without color loss without waste. As a result, while taking advantage of the features of the system in which the light irradiation device and the light source device are separated by interposing an optical fiber, it is a very small part such as a semiconductor chip and a soldered part of the semiconductor chip to a printed circuit board. Can easily respond to demands that require careful inspection.
[Brief description of the drawings]
FIG. 1 is an overall perspective view of a light irradiation device according to an embodiment of the present invention.
FIG. 2 is a longitudinal sectional view and a rear view of one LED light source device in the embodiment.
FIG. 3 is an exemplary front view of the other LED light source device according to the embodiment with a part cut away;
FIG. 4 is an exemplary side view of the other LED light source device in the same embodiment with a part broken away;
FIG. 5 is an overall view of the other light irradiation device in the embodiment.
FIG. 6 is a longitudinal sectional view of one light irradiation device in the same embodiment.
FIG. 7 is a bottom view of one light irradiation device in the embodiment.
FIG. 8 is a partial cross-sectional view of one light irradiation device in the same embodiment.
FIG. 9 is an end view showing a state where the optical fibers in the embodiment are tightly bundled.
FIG. 10 is a longitudinal sectional view of a light irradiation device according to a modification of the embodiment.
FIG. 11 is a bottom view of the light irradiation device in the modification.
FIG. 12 is a longitudinal sectional view of a light irradiation device in still another modification of the embodiment.
FIG. 13 is a longitudinal sectional view of a light irradiation device in still another modification of the embodiment.
FIG. 14 is a cross-sectional view of a light irradiation device in the modification.
FIG. 15 is a bottom view of the light irradiation device in the modification.
FIG. 16 is a longitudinal sectional view of a light irradiation device in still another modification of the embodiment.
FIG. 17 is a partial longitudinal sectional view of a light irradiation device according to still another modification of the embodiment.
FIG. 18 is a partial vertical sectional view of a light irradiation device according to still another modification of the embodiment.
FIG. 19 is a schematic perspective view of a light source device according to a second embodiment of the present invention.
FIG. 20 is a schematic plan view showing the inside of the light source device in the embodiment.
FIG. 21 is an exemplary sectional view showing a main part inside the light source device according to the embodiment;
FIG. 22 is a control block diagram in the embodiment.
FIG. 23 is an exemplary front view of the board to which the light emitting diode according to the embodiment is mounted.
FIG. 24 is a front view of three types of cylindrical members ((a), (b), and (c)) in the embodiment.
FIG. 25 is an exemplary perspective view of the adapter in the embodiment;
26A and 26B show a small light source device according to the same embodiment, wherein FIG. 26A is a cross-sectional view showing an internal structure, and FIG. 26B is a cross-sectional view taken along line II in FIG.
27A and 27B show a small light source device in which the light source device of FIG. 26 is slightly enlarged, wherein FIG. 27A is a cross-sectional view showing the internal structure, and FIG. 27B is a cross-sectional view taken along the line II-II in FIG.
FIG. 28 shows a small light source device according to a modified example of the embodiment, wherein (a) is a cross-sectional view showing an internal structure, and (b) is a rear view thereof.
FIGS. 29A and 29B show the small light source device of FIG. 28 with a cover member attached to the tip thereof, wherein FIG. 29A is a side view thereof, and FIG.
30 is a cross-sectional view showing another small light source device in a state where the light source device shown in FIG. 29 is housed in a cover member.
FIG. 31 is an exemplary sectional view showing the structure of the main part inside a light source device according to still another modification of the embodiment;
FIG. 32 is a schematic perspective view of the light source device shown in FIG. 31.
FIG. 33 is a front view showing a specific configuration of a light collecting member in the modification.
FIG. 34 is a side view showing a specific configuration of the light collecting member in still another modification of the embodiment.
35A and 35B show another small light source device in which the optical fiber bundle provided in the light source device shown in FIG. 29 is omitted, wherein FIG. 35A is a longitudinal side view thereof, and FIG. 35B is a bottom view thereof.
36 is a vertical sectional side view showing another small light source device in a state where a lens is mounted on the light source device shown in FIG. 29.
[Explanation of symbols]
X6A, X6B: Light irradiation device X7a: Optical fiber X56, X7B: Optical fiber bundle X5A, X5B: LED light source device XCN: Optical connection mechanism XGN: Optical conduction path (glass member)
XCT: catadioptric part (mirror coating part)

Claims (1)

Connecting a light guide member such as an optical fiber bundle or a glass rod made by bundling a plurality of optical fibers on the light source device side that supplies light, and an optical fiber bundle on the light irradiation device side that irradiates light to an irradiation target site And
It has a light conducting path having a circular cross section for conducting light, and a reflection / refraction portion provided on the outer peripheral surface of the light conducting path to reflect or refract light inward, and each end face of the light conducting path, The end face of the light guide member and the end face of the optical fiber bundle on the light irradiating device side are brought into close or close proximity to each other, and the diameter of the light conducting path is changed to the diameter of the optical fiber bundle on the light guiding portion and the light irradiating device side. An optical connection mechanism, wherein the optical connection mechanism is set to be substantially the same as that of the optical connection mechanism.

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