JP2004071162A - Method of manufacturing spacer and spacer - Google Patents

Abstract

An object of the present invention is to apply a heat-stretching method having high mass productivity, and to apply a relatively low electric resistance portion for preventing static electricity to a surface layer portion of a spacer by a method different from the conventional method. To provide a spacer manufacturing method and a spacer which can be formed in a state.
A method of manufacturing a spacer by heating a glass base material having a cross-sectional shape having different vertical and horizontal dimensions to a drawing temperature, drawing the glass base material, and cutting the glass base material to a required length. A composite structure composed of a core glass material disposed in the inner layer of the glass base material and a surface glass material having a predetermined resistivity disposed in a region including an outer surface along at least a cross-sectional longitudinal direction in a surface layer portion of the glass base material. A method for producing a spacer, comprising:
[Selection diagram] Fig. 1

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a spacer manufacturing method and a spacer interposed between a pair of substrates in an electronic / electric device and supporting the substrates. More specifically, the present invention relates to a method of manufacturing a spacer having, for example, an antistatic film formed on a surface thereof, which is disposed between a pair of front and back substrates of a panel display, and a spacer.
[0002]
[Prior art]
In recent years, surface-conduction type electron-emitting devices are arranged in a matrix on a substrate, and emitted electrons are radiated to phosphors provided on a substrate facing each other so as to hermetically seal the electron-emitting devices to form an image. The development of a panel-shaped display to be formed is in progress.
[0003]
Such a method of manufacturing a spacer for supporting a space between substrates of an electron beam apparatus in which an electron source is hermetically sealed between a pair of substrates includes a glass base material having a rectangular cross section, and a delivery roller sandwiching the glass base material. On the other hand, the glass base material that has been sent out is sandwiched between the take-up rollers, and the glass base material is heated and softened between the feed-out roller and the take-up roller. Stretched by the difference in speed between the feed speed of the feed roller and the take-up speed of the take-off roller to form a stretched glass base material having a similar cross-sectional shape to the glass base material. There is known a heat stretching method (Japanese Patent Application Laid-Open No. 2000-164129).
[0004]
[Problems to be solved by the invention]
On the other hand, the spacer used in such an electron beam device is charged by a part of the electrons emitted from the electron source hitting the spacer, or the ions ionized by the action of the emitted electrons adhere to the spacer. It is pointed out that it may cause it. When the spacer is charged, the trajectory of the electrons emitted from the electron source cannot be accurately controlled, which leads to a problem that a displayed image is distorted, for example.
[0005]
In order to solve such a problem, an antistatic film is provided on the surface of the spacer, which is a portion having a relatively low electric resistance to quickly release the charged charges to the outside and prevent the charging, thereby reducing the charging of the spacer. Techniques for preventing this are disclosed in JP-A-57-118355, JP-A-61-124031, and the like. In addition, as a technique for efficiently manufacturing a spacer having such an antistatic film in a smaller number of steps, the above-described heating and stretching method is applied, and a conductive material is sprayed on the base material surface of the spacer while performing heating and stretching. A method of applying the material is disclosed in JP-A-2000-31605.
[0006]
An object of the present invention is to form an antistatic film on the surface of a spacer more easily and in a good state by a method different from the above-mentioned conventional method, while applying a heat-drawing method having high mass productivity. And a spacer manufacturing method.
[0007]
[Means for Solving the Problems]
A first aspect of the present invention for solving the above-mentioned problems is as follows.
A spacer having a surface on which an antistatic film is formed, in a method of manufacturing a spacer manufactured by heating and stretching a glass base material having a cross-sectional shape having different vertical and horizontal dimensions to a stretching temperature and cutting to a required length,
A glass base material, a core glass material disposed in an inner layer of the glass base material, and a surface glass material having a predetermined resistivity disposed in a region including at least an outer surface along a cross-sectional longitudinal direction in a surface layer portion of the glass base material. And a composite structure comprising:
[0008]
The present invention provides, in the above first invention,
“The cross-sectional shape of the core glass material is rectangular, and the surface glass material is addressed to at least two surfaces on the long side of the cross-section of the core glass material.”
"The resistivity of the surface glass material addressed to the two surfaces on the longer side of the cross section of the core glass material is 10 ⁸ to 10 ¹⁰ Ω · cm."
"The surface glass material is further addressed to two surfaces on the short side of the cross section of the core glass material."
“The resistivity of the surface glass material addressed to the two surfaces on the short side of the cross section of the core glass material is 10 ³ to 10 ⁴ Ω · cm”,
Is included as a preferable embodiment.
[0009]
By the way, in general, the glass material is stretched by heating so that the viscosity of the glass material is in the range of 10 ⁵ to 10 ¹⁰ dPa · s.
[0010]
In the above-mentioned conventional manufacturing method as well, stretching is performed by heating so that the viscosity of the glass base material is in the range of 10 ⁵ to 10 ¹⁰ dPa · s. However, the stretching is performed by setting the viscosity to be relatively low, that is, the heating temperature is increased. When the film is stretched at a higher height, as shown in FIG. 8, both ends of the obtained thin plate-shaped spacer in the longitudinal direction of the cross section become round and easily swell. When such a swelling occurs, when the obtained thin plate-shaped spacer is installed vertically on the substrate, the contact surface with the substrate is curved, so that the stability is poor and the assembling property is poor. In addition, there is a problem that it is difficult to obtain the supporting strength.
[0011]
Further, when stretching is performed with a higher viscosity set, that is, when stretching is performed at a lower heating temperature, as shown in FIG. 9, an intermediate portion of the obtained thin plate-shaped spacer in the longitudinal direction of the cross section is easily constricted. When such constriction occurs, the desired strength cannot be obtained.For example, when used as a spacer disposed between a pair of front and back substrates of a panel-shaped display, the pressure between the pair of substrates is reduced. In some cases, high atmospheric pressure resistance cannot be obtained.
[0012]
It is considered that the cause of the occurrence of the swelling or constriction is that both ends in the longitudinal direction of the cross section are more likely to be heated when the glass base material having a different cross-sectional shape in vertical and horizontal dimensions is heated than in the intermediate portion. For example, in a glass base material having a rectangular cross section, if a surface along the longitudinal direction is a long surface and a surface along the short direction is a short surface, an intermediate portion in the cross section is heated by heat from the long surface. On the other hand, both ends in the cross-section longitudinal direction are heated by receiving heat from both the long side and the short side, and are more likely to be heated as compared with the intermediate part. For this reason, if it is attempted to heat the entire length of the glass base material in the cross-sectional longitudinal direction to a state where the glass base material has a viscosity that facilitates stretching, it is considered that the heating of the both ends becomes excessive, the viscosity is reduced, and swelling is caused. Further, if the heating temperature is lowered to suppress the bulging, the heating of the intermediate portion becomes insufficient, the viscosity of the intermediate portion increases, and the concentration of stress during stretching is considered to cause necking.
[0013]
In order to solve this, the present invention provides, in the first invention,
"The glass base material is heated to a stretching temperature at which the viscosity of both the core glass material and the surface glass material is within the range of 10 ⁵ to 10 ¹⁰ dPa · s and the viscosity of the surface glass material is higher than the viscosity of the core glass material. Stretching ",
Is included as a preferable embodiment.
[0014]
The second aspect of the present invention is as follows.
In the spacer with the antistatic film formed on the surface, the cross-sectional shape with different vertical and horizontal dimensions,
The core glass material disposed in the inner layer of the spacer and the surface glass material having a predetermined resistivity disposed in the area of the antistatic film including at least the outer surface along the cross-sectional longitudinal direction of the surface layer portion of the spacer are integrated. A spacer having a complex structure.
[0015]
The present invention provides, in the above second invention,
"The cross-sectional shape of the core glass material is rectangular, and the surface glass material is integrated with at least two surfaces on the long side of the cross-section of the core glass material."
“The resistivity of the surface glass material integrated on the two surfaces on the longer side of the cross section of the core glass material is 10 ⁸ to 10 ¹⁰ Ω · cm”,
"The surface glass material is further integrated on the two surfaces on the short side of the cross section of the core glass material."
"The resistivity of the surface glass material integrated on the two surfaces on the short side of the cross section of the core glass material is 10 ³ to 10 ⁴ Ω · cm”,
"When the core glass material and the surface glass material are heated to a temperature at which both the viscosity of the core glass material and the surface glass material are within the range of 10 ⁵ to 10 ¹⁰ dPa · s, the surface glass material becomes more viscous than the viscosity of the core glass material. Glass material that increases the viscosity of
Is included as a preferable embodiment.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is an explanatory view showing an example of a method of manufacturing a spacer according to the present invention, FIG. 2 is a partially enlarged view of the glass base material shown in FIG. 1, and FIG. 3 is a view of a spacer according to the present invention obtained by the method of FIG. It is an expansion perspective view.
[0017]
In FIG. 1, reference numeral 1 denotes a glass base material. As shown in an enlarged manner in FIG. 2, the glass base material 1 has a rectangular core glass material 2 (cross-section in a direction perpendicular to the stretching direction of the glass base material 1). And a plate-shaped surface glass material 3 sandwiching the core glass material 2 sandwiched between two surfaces (surfaces along the longitudinal direction of the cross section) on the longer side of the cross section, and combined so that the cross section becomes rectangular as a whole. It has become something.
[0018]
Although the cross-sectional shape of the glass preform 1 in this example is rectangular, the present invention is not limited to the glass preform 1 having such a cross-sectional shape, and the glass preform 1 having a cross-sectional shape having different vertical and horizontal dimensions, for example, having a cross-sectional shape. Oval or trapezoidal shapes are also acceptable. In addition, the rectangle in this specification includes not only a shape in which four corners intersect at a right angle but also a shape in which a corner is chamfered or rounded (R-processed). However, in order to obtain a spacer that stably supports between the substrates, a preferred form is a rectangular section.
[0019]
The combination of the core glass material 2 and the surface glass material 3 may be any of a pressed state, a fitted state, and a bonded state. In this example, as shown in FIG. 1, the core glass material 2 and the surface glass material 3 are combined in a state where they are pressed against each other by tightening the periphery of the glass base material 1 with a mechanical chuck 4.
[0020]
The glass constituting the core glass material 2 can be selected from, for example, elemental glass, oxide glass, fluoride glass, chloride glass, sulfide glass and the like according to the application. Among these, oxide glass (for example, silicate glass, phosphate glass, borate glass, borosilicate glass, etc.) is preferable from the viewpoint of processability.
[0021]
The glass material constituting the surface glass material 3 has a low resistance enough that the surface layer portion of the spacer is capable of appropriately discharging the charged charge from the contact portion between the spacer and another member, and the spacer between the substrates. A material having a resistivity that is high enough to prevent an excessive current from flowing through is used. Therefore, it is preferable to use a material having a resistivity of 10 ⁸ to 10 ¹⁰ Ω · cm. As a method of obtaining such a material, a method of controlling the resistivity by using a glass material having a composition different from that of the core glass material, such as changing the content of a metal oxide such as PbO, is mentioned as a preferable method. Can be According to such a method, the resistance value can be controlled according to the product design, and the antistatic function of the spacer can be adjusted.
[0022]
Usually, the thickness of the spacer 8 is about 0.05 to 0.5 mm, and the thickness of the surface glass material 3 when the spacer 8 having such a thickness is preferably 0.5 to 5 μm. That is, the thickness of the glass base material 1 and the thicknesses of the core glass material 2 and the surface glass material 3 in the glass base material 1 are preferably such that the thickness after stretching is within the above range. If the thickness of the surface glass material 3 in the glass base material 1 is too large, it is difficult to perform stretching, and if the thickness of the surface glass material 3 is too small, it is difficult to obtain the effect of suppressing swelling. Further, in order to make the surface glass material have an appropriate sheet resistance so as to function as an antistatic film, the surface glass material used as the spacer 8 preferably has the above-described thickness.
[0023]
In the example shown in FIG. 1, a glass base material 1 in which the core glass material 2 and the surface glass material 3 are combined is used. The glass base material 1 is clamped and held by a mechanical chuck 4, and a lower portion is heated by a heater 6. The lower part of the stretched drawn glass base material 1 ′ is sandwiched between the take-up rollers 5. In this state, while gradually lowering the mechanical chuck 4, the take-off roller 5 is rotated to take out the drawn glass base material 1 ′ at a take-up speed higher than the descending speed of the mechanical chuck 4, and the mechanical chuck 4 and the take-up roller 5 In the meantime, the glass base material 1 is heated to the stretching temperature by the heater 6 and softened. Then, the speed difference between the descending speed of the mechanical chuck 4 and the take-up speed of the take-off roller 5 causes the glass base material 1 heated to the drawing temperature and softened to be drawn, and the core glass material 2 and the surface glass material 3 are integrated. Thus, a stretched glass base material 1 ′ having a cross-sectional shape substantially similar to that of the glass base material 1 is continuously formed. Then, the stretched glass base material 1 ′ that has passed through the take-off roller 5 in a state of being cooled and solidified is cut by a cutter 7 to obtain a plate-like or column-like spacer 8 having a desired thinness (see FIG. 3). .
[0024]
According to the present invention, the antistatic film can be formed by combining the materials of the glass base material without adding a special process in the heating and stretching step, and the process is simplified. Further, the film thickness is controlled by adjusting the ratio of the similar shape between the glass base material and the spacer by the speed difference between the descending speed of the mechanical chuck 4 and the take-up speed by the take-off roller 5, thereby controlling the film thickness to be uniform and good. An antistatic film can be formed.
[0025]
When the glass base material 1 is stretched, the viscosity of the core glass material 2 and the surface glass material 3 are both within the range of 10 ⁵ to 10 ¹⁰ dPa · s, and the viscosity of the surface glass material 3 is higher than the viscosity of the core glass material 2. It is preferable to carry out by heating to a stretching temperature. When the viscosity of the core glass material 2 and the surface glass material 3 at the stretching temperature is out of the range of 10 ⁵ to 10 ¹⁰ dPa · s, the stretching of the glass base material 1 becomes difficult. The specific stretching temperature varies depending on the material of the core glass material 2 and the surface glass material 3 and the like, but is generally about 500 to 1000 ° C.
[0026]
Stretching by heating to a stretching temperature at which both the viscosity of the core glass material 2 and the surface glass material 3 are within the range of 10 ⁵ to 10 ¹⁰ dPa · s and the viscosity of the surface glass material 3 is higher than the viscosity of the core glass material 2 When the core glass material and the surface glass material in the present invention are heated to a temperature at which both the viscosity of the core glass material and the surface glass material are within the range of 10 ⁵ to 10 ¹⁰ dPa · s, This can be performed by using a glass material whose surface glass material has a high viscosity. The adjustment of the viscosity of the core glass material 2 and the surface glass material 3 can be performed by adjusting the components of the core glass material 2 and the surface glass material 3 and the amounts of the components. For example, in an oxide glass, the viscosity in a high-temperature region can be reduced (increased) by increasing (decreasing) the content of the contained alkali oxide, boron oxide, lead oxide, and the like. By increasing (decreasing) the content of silicon oxide, aluminum oxide, titanium oxide, zirconium oxide, or the like, the viscosity in the high-temperature region can be increased (decreased). Further, the adjustment of the above components and the compounding amount thereof and the adjustment of the heating temperature of the core glass material 2 and the surface glass material 3 can be used together. The heating temperature is adjusted by, for example, irradiating infrared rays through a lens or a concave mirror focused on the center of the core glass material 2 so that the core glass material 2 is heated to a higher temperature than the surface glass material 3. It can be performed by heating. The difference in viscosity between the core glass material 2 and the surface glass material 3 at the stretching temperature is preferably 0.1 dPa · s or more in order to easily obtain the effect of suppressing swelling.
[0027]
According to the stretching method in consideration of such viscosity, a spacer 8 without swelling and constriction as shown in FIG. 3 can be obtained. This is because, at the above stretching temperature, the viscosity of the surface glass material 3 covering both longitudinal surfaces of the core glass material 2 is higher than the viscosity of the core glass material 2. It is considered that even if the viscosity of the core glass material 2 becomes too low, the surface glass material 3 covering the core glass material 2 can suppress swelling. Therefore, when the glass preform 1 is composed of the core glass material 2 alone, even if the glass base material 1 is heated to a stretching temperature that causes swelling at both ends in the cross-section longitudinal direction, the swelling does not occur, and neither swelling nor constriction occurs. The spacer 8 can be obtained. In addition, this method is particularly apt to cause a difference in the heating state between the middle portion and both ends in the longitudinal direction of the glass base material. This is effective for the base material 1.
[0028]
Further, since the shape stability of the spacer is good, another effect can be obtained. This effect will be described with reference to FIGS. FIG. 6 is a conceptual cross-sectional view for explaining a state in which spacers are arranged so as to support between the substrates, and FIG. 7 is a conceptual view for explaining a step of forming a low-resistance film on a bonding surface of the spacer with the substrate. FIG. 6, reference numeral 9 denotes a low-resistance film, 1000 denotes a substrate, and 1001 denotes a wiring arranged on the substrate.
[0029]
In order to prevent the spacer from being charged, as shown in FIG. 6, not only is an antistatic film (surface glass material 3) formed on the surface of the spacer 8, but also the spacer 8 is used to efficiently discharge electric charges to the outside. It is preferable to provide the low-resistance film 9 on the bonding surface with the substrate 1000 and the wiring 1001 arranged on the substrate.
[0030]
There are various methods for forming the low-resistance film 9. As a method for forming a high-quality low-resistance film 9 on a large number of spacers, a method as shown in FIG. 7 is considered. That is, a large number of spacers 8 are bundled in a state where the bonding surface with the substrate is exposed, and a low-resistance material such as a metal is deposited on the exposed portion by a sputtering method or the like.
[0031]
However, the shape stability is poor. For example, when spacers having a distorted shape are bundled as shown in FIGS. 8 and 9, a gap is generated between the spacers. And the predetermined low resistance film 9 cannot be formed.
[0032]
If the spacer 8 is formed with good shape stability by the method according to the preferred embodiment of the present invention, such a problem at the time of forming the low-resistance film 9 can be avoided, and a good low-resistance film 9 can be obtained. Will be done.
[0033]
4 is a partially enlarged view showing another example of the glass base material, and FIG. 5 is a perspective view showing a spacer according to the present invention obtained from the glass base material of FIG. 4, and the same reference numerals as those in FIGS. It is shown. Reference numeral 3 'denotes a surface glass material addressed to the short side of the cross section of the core glass material 2 having a rectangular cross section.
[0034]
In the glass preform 1 in this example, the surface glass material 3 ′ is also directed to the short side of the cross section of the core glass material 2 having a rectangular cross section. In this manner, the spacer 8 obtained has the short side covered with the surface glass material, and the smoothness of the short side can be more easily obtained. Further, in this example, the surface glass material 3 on the long side of the cross section and the surface glass material 3 ′ on the short side of the cross section of the core glass material 2 are made of different types of glass materials having different types and / or different amounts of components. And swelling prevention control can be performed precisely.
[0035]
Further, in the embodiment shown in FIG. 4, the resistivity of the surface glass material 3 ′ addressed to the two surfaces on the short side of the cross section of the core glass material is changed from the spacer 8 to another member such as the substrate 1000. The surface glass material 3 'can be used as the low-resistance film 9 described with reference to FIG. 6 as long as the resistance is low enough to prevent the discharge of the charged charges. Preferably, the resistivity of the surface glass material 3 ′ is 10 ³ to 10 ⁴ Ω · cm. In addition, as for the control of the resistivity of the surface glass material 3 ′, a method based on a change in the composition of the glass material is preferred as in the case of the surface glass material 3.
[0036]
【Example】
(Example 1)
The spacer 8 was formed by stretching the heated glass base material 1 using the mechanical chuck 4 and the take-off roller 5 as shown in FIG.
[0037]
As the glass base material 1, a surface glass material 3 having a thickness of 1 mm and a width of 48 mm is formed on a surface on a longer side of a cross section of a core glass material 2 having a rectangular shape having a cross section of 4 mm × 48 mm in a form as shown in FIG. the present invention was Ate', the entire cross-sectional area _{S 1} is was used 288 mm ² of (6mm × 48mm). As a material, the core glass material 2 has a viscosity of 10 ⁶ dPa · s at a heating temperature of 800 ° C. during stretching, the surface glass material 3 has a resistivity of 10 ⁹ Ω · cm, and a viscosity of 10 ⁹ Ω · cm at a heating temperature of 800 ° C. during stretching. ^7.6 dPa · s was used.
[0038]
The glass base material 1 is sent out by lowering the mechanical chuck 4 at a speed of V ₁ = 5 mm / min, is heated to about 800 ° C. by a heater 6, and is discharged by a take-up roller 5 disposed near the heater 6 to V _2. = 4500 mm / min, the film was heated and stretched, and finally cut with a cutter 7 to a length of 1000 mm. In the cross-sectional area of the resulting spacer 8 _{S 2} is ^{0.32 (0.2 × 1.6mm) mm 2} , partial constriction and bulging mentioned above were not found.
[0039]
The sheet resistance of the surface glass material 3 of the spacer 8 after cutting was 10 ¹² Ω / □.
[0040]
(Example 2)
The spacer 8 was formed by stretching the heated glass base material 1 using the mechanical chuck 4 and the take-off roller 5 as shown in FIG.
[0041]
As the glass base material 1, a surface glass material 3 having a thickness of 1 mm and a width of 46 mm is formed on a surface of a core glass material 2 having a rectangular shape having a cross section of 4 mm × 46 mm in a form as shown in FIG. , but was Ate' the surface glass material 3 'of width 6mm in thickness of 1mm, respectively to the plane of the cross-section short side of the core glass material 2, the one entire cross-sectional area _{S 1} is 288 mm ² of (6mm × 48 mm) Using. As a material, the core glass material 2 has a viscosity of 10 ⁶ dPa · s at a heating temperature of 800 ° C. during stretching, and the surface glass materials 3 and 3 ′ have a resistivity of 10 ⁹ Ω · cm and a heating temperature of 800 ° C. during stretching. The viscosity at ^107.6 dPa · s was used.
[0042]
The glass base material 1 is sent out by lowering the mechanical chuck 4 at a speed of V ₁ = 5 mm / min, is heated to about 800 ° C. by a heater 6, and is discharged by a take-up roller 5 disposed near the heater 6 to V _2. = 4500 mm / min, the film was heated and stretched, and finally cut with a cutter 7 to a length of 1000 mm. The cross-sectional area S ₂ of the obtained spacer 8 was 0.32 (0.2 × 1.6 mn) mm ² , and the above-described partial necking and swelling were not observed. It was superior to the spacer of Example 1.
[0043]
Further, the sheet resistance of the surface glass materials 3 and 3 ′ of the spacer 8 after cutting was 10 ¹² Ω / □.
[0044]
(Example 3) (Low resistance film formation by sputtering)
In this example, a 10 nm-thick Ti film and a 200 nm-thick Pt film are formed by sputtering on the spacers manufactured in Examples 1 and 2 in this order by the method described with reference to FIG. A low resistance film is formed.
[0045]
As a result, the film forming material did not wrap around the spacer 8 on the surface glass material 3 side, and a desired low-resistance film was obtained.
[0046]
(Example 4)
In this example, the material of the surface glass material 3 ′ addressed to the surface on the short side of the cross section of the core glass material 2 is prepared by forming a material having a resistivity of 10 ⁴ Ω · cm and a viscosity of 10 ^7.6 dPa at a heating temperature of 800 ° C. during stretching. A spacer was prepared in the same manner as in Example 2 except that s was set.
[0047]
In the spacer obtained in this example, the portion of the surface glass material 3 ′ had a sheet resistance of 10 ³ Ω / □, and thus functioned sufficiently as a low-resistance film.
[0048]
【The invention's effect】
The present invention is as described above, and it is possible to form an antistatic film on the surface of the spacer more easily and in a favorable state by applying the heat stretching method.
[0049]
Further, by a stretching method in consideration of viscosity, swelling and constriction are prevented, and a spacer having good shape stability and stable strength can be easily manufactured.
[0050]
Furthermore, due to good shape stability, a high-quality low-resistance film can be formed in a desired state without wrapping around unnecessary portions.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing an example of a method for manufacturing a spacer according to the present invention.
FIG. 2 is a partially enlarged view of the glass base material shown in FIG.
FIG. 3 is an enlarged perspective view of a spacer according to the present invention obtained by the method of FIG. 1;
FIG. 4 is a partially enlarged view showing another example of the glass base material.
FIG. 5 is a perspective view showing a spacer according to the present invention obtained from the glass base material of FIG. 4;
FIG. 6 is a conceptual cross-sectional view illustrating a state in which spacers are arranged to support between substrates.
FIG. 7 is a conceptual diagram for explaining a process of forming a low-resistance film on a bonding surface of a spacer with a substrate.
FIG. 8 is an explanatory diagram of a state of occurrence of swelling.
FIG. 9 is an explanatory diagram of a state of occurrence of constriction.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 glass base material 1 ′ stretched glass base material 2 core glass material 3, 3 ′ surface glass material 4 mechanical chuck 5 take-up roller 6 heater 7 cutter 8 spacer 9 low-resistance film 1000 substrate 1001 wiring

Claims (12)

A spacer having a surface on which an antistatic film is formed, in a method for manufacturing a spacer manufactured by heating and stretching a glass base material having a cross-sectional shape having different vertical and horizontal dimensions to a stretching temperature and cutting to a required length,
A glass base material, a core glass material disposed in an inner layer of the glass base material, and a surface glass material having a predetermined resistivity disposed in a region including at least an outer surface along a cross-sectional longitudinal direction in a surface layer portion of the glass base material. A method for producing a spacer, comprising a composite structure comprising: The method for manufacturing a spacer according to claim 1, wherein the cross-sectional shape of the core glass material is rectangular, and the surface glass material is addressed to at least two surfaces on the long side of the cross-section of the core glass material. The method for manufacturing a spacer according to claim 2, wherein the resistivity of the surface glass material addressed to the two surfaces on the longer side of the cross section of the core glass material is 10 ⁸ to 10 ¹⁰ Ω · cm. 4. The method for producing a spacer according to claim 2, wherein the surface glass material is further directed to two surfaces on the short side of the cross section of the core glass material. The method for producing a spacer according to claim 4, wherein the resistivity of the surface glass material addressed to the two surfaces on the short side of the cross section of the core glass material is 10 ³ to 10 ⁴ Ω · cm. The glass base material is stretched by heating to a stretching temperature at which the viscosity of the core glass material and the surface glass material are both within the range of 10 ⁵ to 10 ¹⁰ dPa · s and the viscosity of the surface glass material is higher than the viscosity of the core glass material. The method for producing a spacer according to any one of claims 1 to 5, wherein: In the spacer with the antistatic film formed on the surface, the cross-sectional shape with different vertical and horizontal dimensions,
The core glass material disposed in the inner layer of the spacer and the surface glass material having a predetermined resistivity disposed in the region of the antistatic film including the outer surface along at least the cross-sectional longitudinal direction of the surface layer portion of the spacer are integrated. A spacer having a complex structure. The spacer according to claim 7, wherein the core glass material has a rectangular cross-sectional shape, and the surface glass material is integrated with at least two surfaces on the longer side of the cross-section of the core glass material. 9. The spacer according to claim 8, wherein the resistivity of the surface glass material integrated on the two surfaces on the longer side of the cross section of the core glass material is 10 ⁸ to 10 ¹⁰ Ω · cm. ¹⁰ . The spacer according to claim 8 or 9, wherein the surface glass material is further integrated on two surfaces on the short side of the cross section of the core glass material. The spacer according to claim 10, wherein the resistivity of the surface glass material integrated with the two surfaces on the short side of the cross section of the core glass material is 10 ³ to 10 ⁴ Ω · cm. When the core glass material and the surface glass material are heated to a temperature at which both the viscosity of the core glass material and the surface glass material fall within the range of 10 ⁵ to 10 ¹⁰ dPa · s, the viscosity of the surface glass material is The spacer according to any one of claims 7 to 11, wherein the spacer is a glass material having a high viscosity.

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