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JP2004069508A - Contact probe - Google Patents

Contact probe Download PDF

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Publication number
JP2004069508A
JP2004069508A JP2002229498A JP2002229498A JP2004069508A JP 2004069508 A JP2004069508 A JP 2004069508A JP 2002229498 A JP2002229498 A JP 2002229498A JP 2002229498 A JP2002229498 A JP 2002229498A JP 2004069508 A JP2004069508 A JP 2004069508A
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JP
Japan
Prior art keywords
plunger
bias
contact
bottomed hole
conductive tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002229498A
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Japanese (ja)
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JP4021275B2 (en
Inventor
Yasuo Fukushima
福島 康夫
Tomoyuki Yamada
山田 智之
Satoshi Kakegawa
掛川 聡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokowo Co Ltd
Original Assignee
Yokowo Co Ltd
Yokowo Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokowo Co Ltd, Yokowo Mfg Co Ltd filed Critical Yokowo Co Ltd
Priority to JP2002229498A priority Critical patent/JP4021275B2/en
Publication of JP2004069508A publication Critical patent/JP2004069508A/en
Application granted granted Critical
Publication of JP4021275B2 publication Critical patent/JP4021275B2/en
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Expired - Fee Related legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact probe improved in durability by bringing a conductive tube 10 and a plunger 22 into mutual contact via a wide face and allowing variation of the contact point for reducing and stabilizing contact resistance. <P>SOLUTION: The plunger 22 is relatively turned around an axis freely to the conductive tube 10, while a bottomed hole 22b bored in the axial direction toward the projection side is arranged on the opposite side of the projection side of the plunger 22, and the bottom face of the bottomed hole 22b is formed into a conical shape. Inside the bottomed hole 22b, a bias pin 24 having a conical front end face and a rear end face serving as a bias face 24a is inserted freely rotationally around an axis relatively to the plunger 22, and the conical top point of the bias pin 24 is brought into contact with the conical top point of the bottom face in the bottomed hole 22b. A spring 14 is arranged so that the bias face 24a in the bias pin 24 is elastically energized in the projection direction. The tip of the projecting one end side 22a of the plunger 22 is formed into a crown shape. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、導電チューブとプランジャの接触抵抗を安定させて長寿命となるようにしたコンタクトプローブに関するものである。
【0002】
【従来の技術】
従来のコンタクトプローブの一例を図6を参照して説明する。図6は、従来のコンタクトプローブの一例の縦断面部分図である。図6において、導電チューブ10に、プランジャ12が当接部である一端部を突出させて、しかも抜け出ないようにして軸方向に移動自在に配設される。そして、このプランジャ12の他端面である後端面にはバイアス面12aが形成される。さらに、導電チューブ10内に、プランジャ12を突出方向に弾性付勢すべく、バイアス面12aに一端を弾接させてスプリング14が縮設される。なお、導電チューブ10の内周面とプランジャ12の外周面には、接触抵抗と導電抵抗を小さくすべく、金メッキなどが適宜に施されている。
【0003】
かかる構成の従来のコンタクトプローブにあっては、スプリング14の一端がバイアス面12aを弾性付勢することで、プランジャ12に軸方向と直交する軸回りの回転力が生じ、図6の点A,Bにて、プランジャ12が導電チューブ10に当接する。そこで、点A,Bにて、導電チューブ10とプランジャ12が確実に当接されて、接触抵抗を小さく、しかも安定したものとすることができる。なお、当接点のA、Bは、バイアス面12aの傾斜方向により定まる点である。
【0004】
【発明が解決しようとする課題】
しかるに、図6に示す従来技術にあっては、点A,Bでのみ導電チューブ10とプランジャ12が当接して導通しており、点A,Bの接触面が何らかの原因により荒れると、急激に接触抵抗が大きくなってしまい、耐久性に問題があった。そこで、より耐久性の改善が望まれていた。
【0005】
本発明は、上述の従来技術のかかる事情に鑑みてなされたもので、導電チューブとプランジャが広い面で接触し、また当接点が変化し得るようにして、耐久性の改善を図ったコンタクトプローブを提供することを目的とする。
【0006】
【課題を解決するための手段】
かかる目的を達成するために、本発明のコンタクトプローブは、導電チューブに、プランジャを一端部を突出させしかも抜け出ないようにして軸方向に移動自在に配設し、前記導電チューブ内に前記プランジャを突出方向に弾性付勢するスプリングを配設したコンタクトプローブにおいて、前記プランジャの突出側と反対側の面に突出側に向けて軸方向に有底孔を穿設し、前記有底孔の底面を円錐状となし、前記有底孔内に先端面が円錐状とされ後端面がバイアス面とされるバイアスピンを挿入配設し、しかも前記バイアスピンの前記円錐状の頂点が前記有底孔の底面の前記円錐状の頂点に当接するようにし、前記バイアスピンの前記バイアス面を突出方向に弾性付勢するように前記スプリングを配設して構成されている。
【0007】
また、導電チューブに、プランジャを一端部を突出させしかも抜け出ないようにして軸方向に移動自在に配設し、前記導電チューブ内に前記プランジャを突出方向に弾性付勢するスプリングを配設したコンタクトプローブにおいて、前記導電チューブに対して前記プランジャを相対的に軸回り自在とし、前記プランジャの突出側と反対側の面に突出側に向けて軸方向に有底孔を穿設し、前記有底孔内に、後端面がバイアス面とされたバイアスピンを前記プランジャに対して相対的に軸回り自在に挿入配設し、前記バイアスピンの前記バイアス面を突出方向に弾性付勢するように前記スプリングを配設し、前記プランジャの突出側先端をクラウン状に形成して構成しても良い。
【0008】
さらに、前記プランジャの有底孔の底面を円錐状とし、前記バイアスピンの先端面を円錐状とし、しかも前記バイアスピンの前記円錐状の頂点が前記有底孔の底面の前記円錐状の頂点に当接するようにして構成することもできる。
【0009】
【発明の実施の形態】
以下、本発明の第1実施例を図1および図2を参照して説明する。図1は、本発明のコンタクトプローブの第1実施例の構造を示し、(a)は縦断面部分図であり、(b)はプランジャの突出する一端側の先端のクラウン状の切り割りを軸方向から見た図である。図2は、本発明のコンタクトプローブの第1実施例でプランジャが軸回りに移動する作用を説明する図である。
【0010】
まず、図1において、導電チューブ10にプランジャ22が当接部である一端部22aを突出させ、しかも抜け出ないようにして軸方向に移動自在に配設される。そして、プランジャ22の導電チューブ10内の他端面である後端面に、突出方向に向けて軸方向に有底孔22bが穿設される。この有底孔22bの底面は、突出方向に凹なる円錐状とされる。また、プランジャ22の一端部22aの先端は、クラウン状に切り割りが形成される。なお、プランジャ22は、導電チューブ10に対して相対的に軸回りに回転自在である。そして、導電チューブ10の内周面とプランジャ22の外周面には、適宜に金メッキが施されている。
【0011】
さらに、プランジャ22の有底孔22b内に、先端面が突出方向に凸なる円錐状に形成され、後端面にバイアス面24aが形成されたバイアスピン24が、挿入配設される。このバイアスピン24の円錐状の頂角は、有底孔22bの底面の円錐状の頂角よりも小さく、バイアスピン24の円錐状の頂点が、有底孔22bの底面の円錐状の頂点に当接され、バイアスピン24はプランジャ22に対して相対的に軸回りに回転自在である。そして、スプリング14が、その一端がバイアスピン24のバイアス面24aを突出方向に弾性付勢するように弾接して、導電チューブ10内に縮設される。
【0012】
かかる構成において、スプリング14がバイアス面24aを弾接付勢することで、バイアスピン24は軸方向と直交する軸回りに回転する力が作用し、有底孔22b内で点C,Dの2点で主としてプランジャ22に当接する。なお、点Cはバイアス面24の傾斜方向により定まる点であり、点Dは円錐状の頂点である。ここで、図1において、主として点C,Dでバイアスピン24がプランジャ22に当接するとすれば、プランジャ22には図1において上向きの力が作用し、プランジャ22の外周面の上側部分が導電チューブ10の内周面に当接することとなる。
【0013】
そこで、図6に示す従来技術に比較して、プランジャ22の広い面で導電チューブ10の内周面に当接することとなる。この広い面による接触により、小さな接触抵抗でしかも安定した導通が得られる。なお、上記第1実施例では、プランジャ22の有底孔22bの底面を突出側に凹なる円錐状としたが、突出側と反対側に凸なる円錐状とし、バイアスピン24の先端面の円錐状を突出側に凹なる円錐状とし、有底孔22bの円錐状の頂角を、バイアスピン24の円錐状の頂角よりも小さく設定して、双方の円錐状の頂点が当接できるようにしても良い。
【0014】
また、図2に示すごとく、プランジャ22の突出側の一端部22aのクラウン状の先端が、被当接端子としての半田ボール26に当接する際に、クラウン状を形成する斜面に対して軸対称に当接するとは限らない。そこで、図2に図示するごとく、半田ボール26に対してプランジャ22の一端部22aのクラウン状の先端が当接するとすれば、半田ボール26が片側の斜面にまず当接し、図2において、F方向の力が軸からずれてプランジャ22に作用する可能性がある。そこで、この力Fにより、プランジャ22は軸回りに回転され得る。そこで、プランジャ22は、導電チューブ10に対して軸回りに回転し、その当接位置が変化し得る。なお、プランジャ22を軸回りに回転させる力Fの方向や大きさは、半田ボール26の端子にプランジャ22が当接される毎に相違する。このためにプランジャ22の導電チューブ10に接触する位置が僅かずつずれて移動することにより、図6に示す従来の当触面が限定されてしまう構造に対して、荒れていない面により当接する確率が高く、それだけ耐久性に優れたものとなる。
【0015】
次に、本発明の第2実施例を図3および図4を参照して説明する。図3は、本発明のコンタクトプローブの第2実施例の突出する一端側の先端の構造を示し、(a)は軸に対して側方から見た図であり、(b)は軸方向から見た図である。図4は、本発明のコンタクトプローブの第2実施例でプランジャが軸回りに回転する作用を説明する図である。
【0016】
図3に示す第2実施例では、プランジャ22の突出する一端側22bの先端に設けたクラウン状の切り割りが、均等でなく、急な斜面22cと緩い斜面22dが交互となるように形成される。すると、図4に示すごとく、被当接端子としての半田ボール26がまず急な斜面22cに当接するよりも緩い斜面22dに当接する確率が高いものとなる。そして、図4において、半田ボール26が緩い斜面22dに当接したとすれば、図4でF方向の力が作用し、プランジャ22が軸回りに移動される。もって、第2実施例では、プランジャ22が僅かながら、軸回りに一定方向で回転される傾向となる。この結果、プランジャ22の導通チューブ10に当接する接触面が、僅かづつではあるが、全周にわたって移動する可能性が高い。したがって、より耐久性に優れたものである。
【0017】
さらに、本発明の第3実施例を図5を参照して説明する。図5は、本発明のコンタクトプローブの第3実施例の突出する一端側の先端の構造を示し、(a)は軸に対して側方から見た図であり、(b)は軸方向から見た図である。
【0018】
図5に示す第3実施例では、プランジャ22の突出する一端側22bの先端に設けたクラウン状の切り割りは均等であるが、クラウン状を構成する傾斜面の稜が軸回りに同方向に曲線を描くように形成される。すると、隣り合う斜面の軸に対する角度が相違し、第2実施例の急な斜面22cと緩い斜面22dを設けたのと同様に、半田ボールに当接させることで、プランジャ22を軸回りに一定方向に回転させる傾向が生ずる。しかも、半田ボールにクラウン状を構成する傾斜面の稜が当接して僅かに食い込むとすれば、この食い込みによりプランジャ22に軸回りに回転させる力が作用する。もって、第3実施例にあっても、第2実施例と同様に、プランジャ22の導通チューブ10に当接する接触面が僅かずつではあるが、全周にわたって移動する可能性があり、それだけ耐久性に優れている。
【0019】
なお、上記実施例にあっては、被当接端子が半球状の半田ボール26である場合に付き説明したが、被当接端子が平面状の端子であっても、本発明のコンタクトプローブを使用することは可能である。しかし、被当接端子が平面状の端子であれば、プランジャ22が導電チューブ10の内周面に広い面で接触する作用は得られるが、被当接端子にプランジャ22が当接する毎にプランジャ22を軸回りに移動させる力は作用し得ない。
【0020】
【発明の効果】
以上説明したように、本発明のコンタクトプローブは構成されているので、以下のごとき格別な作用効果を奏する。
【0021】
請求項1記載のコンタクトプローブにあっては、スプリングによりバイアスピンのバイアス面に加わる弾力により、プランジャに軸方向と直交する方向の力が作用し、プランジャが導電チューブの内周面に広い面で当接することとなり、小さな接触抵抗でしかも安定した導通が得られる。
【0022】
また、請求項2記載のコンタクトプローブにあっては、被当接端子としての半田ボールにプランジャが当接する毎に、プランジャを軸回りに移動させる力が作用する可能性がある。そこで、プランジャの導電チューブに当接する位置が僅かずつながら移動することにより、荒れていない面により接触する確率が高く、それだけ小さな接触抵抗が安定して得られ、耐久性にも優れたものとなる。
【0023】
さらに、請求項3記載のコンタクトプローブにあっては、スプリングが弾接するバイアスピンが、円錐状の頂点でプランジャの有底孔の底面の円錐状の頂点に当接し、バイアスピンに対してプランジャが相対的に軸回りに容易に回転し得る。もって、プランジャが導電チューブに対して軸回りに容易に移動でき、それだけ接触面が移動され易く、耐久性に優れたものとなり得る。
【図面の簡単な説明】
【図1】本発明のコンタクトプローブの第1実施例の構造を示し、(a)は縦断面部分図であり、(b)はプランジャの突出する一端側の先端のクラウン状の切り割りを軸方向から見た図である。
【図2】本発明のコンタクトプローブの第1実施例でプランジャが軸回りに移動する作用を説明する図である。
【図3】本発明のコンタクトプローブの第2実施例の突出する一端側の先端の構造を示し、(a)は軸に対して側方から見た図であり、(b)は軸方向から見た図である。
【図4】本発明のコンタクトプローブの第2実施例でプランジャが軸回りに回転する作用を説明する図である。
【図5】本発明のコンタクトプローブの第3実施例の突出する一端側の先端の構造を示し、(a)は軸に対して側方から見た図であり、(b)は軸方向から見た図である。
【図6】従来のコンタクトプローブの一例の縦断面部分図である。
【符号の説明】
10 導電チューブ
12,22 プランジャ
12a,24a バイアス面
14 スプリング
22a 一端側
22b 有底孔
24 バイアスピン
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a contact probe that stabilizes the contact resistance between a conductive tube and a plunger and has a long life.
[0002]
[Prior art]
An example of a conventional contact probe will be described with reference to FIG. FIG. 6 is a partial longitudinal sectional view of an example of a conventional contact probe. In FIG. 6, a plunger 12 is disposed on a conductive tube 10 such that one end portion, which is an abutting portion, protrudes and is movable in the axial direction so as not to come off. A bias surface 12a is formed on a rear end surface, which is the other end surface of the plunger 12. Further, in order to elastically urge the plunger 12 in the protruding direction in the conductive tube 10, one end is elastically contacted with the bias surface 12a, and the spring 14 is contracted. The inner peripheral surface of the conductive tube 10 and the outer peripheral surface of the plunger 12 are appropriately plated with gold or the like to reduce contact resistance and conductive resistance.
[0003]
In the conventional contact probe having such a configuration, when one end of the spring 14 elastically urges the bias surface 12a, a rotational force is generated in the plunger 12 about an axis orthogonal to the axial direction. At B, the plunger 12 contacts the conductive tube 10. Therefore, at points A and B, the conductive tube 10 and the plunger 12 are reliably brought into contact with each other, so that the contact resistance can be reduced and the contact resistance can be stabilized. A and B of the contact point are points determined by the inclination direction of the bias surface 12a.
[0004]
[Problems to be solved by the invention]
However, in the prior art shown in FIG. 6, the conductive tube 10 and the plunger 12 are in contact with each other only at points A and B, so that conduction occurs. The contact resistance increased, and there was a problem in durability. Therefore, improvement in durability has been desired.
[0005]
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances of the related art, and a contact probe in which a conductive tube and a plunger come into contact on a wide surface and the contact point can be changed to improve durability. The purpose is to provide.
[0006]
[Means for Solving the Problems]
In order to achieve such an object, a contact probe of the present invention is arranged such that a plunger is disposed in a conductive tube so that one end thereof protrudes and does not come out, and is movable in the axial direction, and the plunger is placed in the conductive tube. In a contact probe provided with a spring that elastically biases in a protruding direction, a bottomed hole is formed in a surface opposite to a protruding side of the plunger in an axial direction toward a protruding side, and a bottom surface of the bottomed hole is formed. A bias pin having a conical front end surface and a rear end surface serving as a bias surface is inserted into the bottomed hole, and the conical apex of the bias pin is formed in the bottomed hole. The spring is provided so as to abut on the conical apex of the bottom surface and to elastically urge the bias surface of the bias pin in a protruding direction.
[0007]
A contact in which a plunger is disposed on the conductive tube such that one end thereof protrudes and does not come out so as to be movable in the axial direction, and a spring is disposed within the conductive tube to elastically bias the plunger in the protruding direction. In the probe, the plunger is freely rotatable around the axis with respect to the conductive tube, and a bottomed hole is formed in the surface opposite to the protruding side of the plunger in the axial direction toward the protruding side. A bias pin having a rear end surface as a bias surface is inserted and disposed in the hole so as to be freely rotatable around the axis with respect to the plunger, and the bias pin is elastically biased in a projecting direction with respect to the bias surface. A spring may be provided, and the tip of the protruding side of the plunger may be formed in a crown shape.
[0008]
Further, the bottom surface of the bottomed hole of the plunger has a conical shape, the tip end surface of the bias pin has a conical shape, and the conical apex of the bias pin corresponds to the conical apex of the bottom surface of the bottomed hole. It can also be configured to abut.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a first embodiment of the present invention will be described with reference to FIGS. 1A and 1B show the structure of a contact probe according to a first embodiment of the present invention, in which FIG. 1A is a partial longitudinal sectional view, and FIG. FIG. FIG. 2 is a view for explaining the action of the plunger moving around the axis in the first embodiment of the contact probe of the present invention.
[0010]
First, in FIG. 1, the plunger 22 is disposed so as to protrude from the conductive tube 10 at one end portion 22 a, which is a contact portion, and to be movable in the axial direction so as not to come off. A bottomed hole 22b is formed in the rear end face, which is the other end face in the conductive tube 10, of the plunger 22 in the axial direction toward the protruding direction. The bottom surface of the bottomed hole 22b has a conical shape that is concave in the protruding direction. Further, a tip of the one end 22a of the plunger 22 is formed with a cut in a crown shape. The plunger 22 is rotatable around the axis relative to the conductive tube 10. The inner peripheral surface of the conductive tube 10 and the outer peripheral surface of the plunger 22 are appropriately plated with gold.
[0011]
Further, a bias pin 24 having a front end surface formed in a conical shape protruding in the protruding direction and a bias surface 24a formed on a rear end surface is inserted and disposed in the bottomed hole 22b of the plunger 22. The conical apex angle of the bias pin 24 is smaller than the conical apex angle of the bottom surface of the bottomed hole 22b, and the conical apex of the bias pin 24 is located at the bottom of the bottomed hole 22b. The bias pin 24 is in contact with the plunger 22 and is rotatable about an axis. One end of the spring 14 elastically contacts the bias surface 24 a of the bias pin 24 in a projecting direction so as to elastically urge the bias surface 24 a, and is contracted into the conductive tube 10.
[0012]
In such a configuration, when the spring 14 elastically urges the bias surface 24a, a force is applied to the bias pin 24 to rotate around an axis perpendicular to the axial direction, and the two points C and D in the bottomed hole 22b. Mainly in contact with the plunger 22. Note that point C is a point determined by the inclination direction of the bias surface 24, and point D is a conical vertex. Here, in FIG. 1, if the bias pin 24 mainly contacts the plunger 22 at points C and D, an upward force acts on the plunger 22 in FIG. 1, and the upper part of the outer peripheral surface of the plunger 22 becomes conductive. It comes into contact with the inner peripheral surface of the tube 10.
[0013]
Therefore, as compared with the prior art shown in FIG. 6, the wider surface of the plunger 22 comes into contact with the inner peripheral surface of the conductive tube 10. Due to the contact with this wide surface, stable conduction can be obtained with small contact resistance. In the first embodiment, the bottom surface of the bottomed hole 22b of the plunger 22 has a conical shape that is concave on the protruding side, but has a conical shape that is convex on the opposite side to the protruding side. The shape is a conical shape concave to the protruding side, and the conical apex angle of the bottomed hole 22b is set smaller than the conical apex angle of the bias pin 24 so that both apex vertices can abut. You may do it.
[0014]
Further, as shown in FIG. 2, when the crown-shaped tip of the one end 22a on the protruding side of the plunger 22 contacts the solder ball 26 as the contacted terminal, it is axially symmetric with respect to the slope forming the crown. Does not necessarily abut. Therefore, as shown in FIG. 2, if the crown-shaped tip of the one end 22a of the plunger 22 contacts the solder ball 26, the solder ball 26 first contacts one slope, and in FIG. Directional forces can be offset from the axis and act on the plunger 22. Then, the plunger 22 can be rotated around the axis by the force F. Therefore, the plunger 22 rotates around the axis with respect to the conductive tube 10, and the contact position thereof may change. The direction and the magnitude of the force F for rotating the plunger 22 around the axis are different each time the plunger 22 is brought into contact with the terminal of the solder ball 26. For this reason, the position where the contact of the plunger 22 with the conductive tube 10 is slightly displaced is shifted, so that the probability that the plunger 22 comes into contact with the non-roughened surface in the conventional structure in which the contact surface is limited as shown in FIG. And high durability.
[0015]
Next, a second embodiment of the present invention will be described with reference to FIGS. 3A and 3B show the structure of the tip of one end side of a contact probe according to a second embodiment of the present invention, wherein FIG. 3A is a diagram viewed from a side with respect to an axis, and FIG. FIG. FIG. 4 is a view for explaining the action of the plunger rotating around the axis in the second embodiment of the contact probe of the present invention.
[0016]
In the second embodiment shown in FIG. 3, the crown-shaped cut provided at the tip of one end side 22b of the plunger 22 is not uniform, and the steep slope 22c and the gentle slope 22d are formed alternately. . Then, as shown in FIG. 4, there is a high probability that the solder ball 26 as the contacted terminal contacts the gentle slope 22d rather than the steep slope 22c first. Then, in FIG. 4, if the solder ball 26 comes into contact with the gentle slope 22d, a force in the direction F acts in FIG. 4, and the plunger 22 is moved around the axis. Therefore, in the second embodiment, the plunger 22 tends to rotate slightly around the axis in a fixed direction. As a result, the contact surface of the plunger 22 that contacts the conduction tube 10 is likely to move over the entire circumference, albeit slightly. Therefore, it is more excellent in durability.
[0017]
Further, a third embodiment of the present invention will be described with reference to FIG. 5A and 5B show the structure of the tip of one end of a contact probe according to a third embodiment of the present invention, wherein FIG. 5A is a diagram viewed from a side with respect to an axis, and FIG. FIG.
[0018]
In the third embodiment shown in FIG. 5, the crown-shaped cut provided at the distal end of the one end 22b of the plunger 22 is equal, but the ridges of the inclined surface forming the crown are curved in the same direction around the axis. It is formed so as to draw. Then, the angles of the adjacent slopes with respect to the axis are different, and the plunger 22 is fixed around the axis by abutting on the solder ball as in the case of providing the steep slope 22c and the gentle slope 22d of the second embodiment. Direction. In addition, if the edge of the inclined surface forming the crown shape comes into contact with the solder ball and bites slightly, the biting exerts a force to rotate the plunger 22 around the axis. Thus, even in the third embodiment, similarly to the second embodiment, the contact surface of the plunger 22 that contacts the conduction tube 10 may move over the entire circumference, albeit slightly, and the durability is accordingly high. Is excellent.
[0019]
In the above embodiment, the case where the contacted terminal is a hemispherical solder ball 26 has been described. However, even if the contacted terminal is a planar terminal, the contact probe of the present invention can be used. It is possible to use. However, if the contacted terminal is a flat terminal, the plunger 22 can be brought into contact with the inner peripheral surface of the conductive tube 10 on a wide surface, but the plunger 22 is contacted each time the plunger 22 contacts the contacted terminal. No force can be applied to move 22 about its axis.
[0020]
【The invention's effect】
As described above, since the contact probe of the present invention is configured, it has the following special effects.
[0021]
In the contact probe according to the first aspect, a force in a direction perpendicular to the axial direction acts on the plunger due to the elastic force applied to the bias surface of the bias pin by the spring, so that the plunger has a wide surface on the inner peripheral surface of the conductive tube. As a result, a stable conduction can be obtained with a small contact resistance.
[0022]
Further, in the contact probe according to the second aspect, every time the plunger comes into contact with the solder ball as the contacted terminal, a force for moving the plunger around the axis may be applied. Therefore, by moving the position of the plunger in contact with the conductive tube little by little, the probability that the plunger comes into contact with a non-roughened surface is high, so that a small contact resistance can be obtained stably and the durability is excellent. .
[0023]
Further, in the contact probe according to the third aspect, the bias pin against which the spring resiliently contacts a cone-shaped apex on the bottom surface of the bottomed hole of the plunger at the conical apex, and the plunger contacts the bias pin. Can rotate relatively easily around an axis. Thus, the plunger can be easily moved around the axis with respect to the conductive tube, so that the contact surface can be easily moved and the durability can be excellent.
[Brief description of the drawings]
FIGS. 1A and 1B show the structure of a first embodiment of a contact probe of the present invention, wherein FIG. 1A is a partial longitudinal sectional view, and FIG. FIG.
FIG. 2 is a view for explaining an action of a plunger moving around an axis in the first embodiment of the contact probe of the present invention.
3A and 3B show a structure of a tip of one end of a contact probe according to a second embodiment of the present invention, wherein FIG. 3A is a diagram viewed from a side with respect to an axis, and FIG. FIG.
FIG. 4 is a view illustrating an operation of rotating a plunger around an axis in a second embodiment of the contact probe of the present invention.
5A and 5B show a structure of a tip of one end of a contact probe according to a third embodiment of the present invention, wherein FIG. 5A is a diagram viewed from a side with respect to an axis, and FIG. FIG.
FIG. 6 is a partial longitudinal sectional view of an example of a conventional contact probe.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Conductive tube 12, 22 Plunger 12a, 24a Bias surface 14 Spring 22a One end side 22b Bottomed hole 24 Bias pin

Claims (3)

導電チューブに、プランジャを一端部を突出させしかも抜け出ないようにして軸方向に移動自在に配設し、前記導電チューブ内に前記プランジャを突出方向に弾性付勢するスプリングを配設したコンタクトプローブにおいて、前記プランジャの突出側と反対側の面に突出側に向けて軸方向に有底孔を穿設し、前記有底孔の底面を円錐状となし、前記有底孔内に先端面が円錐状とされ後端面がバイアス面とされるバイアスピンを挿入配設し、しかも前記バイアスピンの前記円錐状の頂点が前記有底孔の底面の前記円錐状の頂点に当接するようにし、前記バイアスピンの前記バイアス面を突出方向に弾性付勢するように前記スプリングを配設して構成したことを特徴とするコンタクトプローブ。In a contact probe in which a plunger is disposed on a conductive tube so that one end thereof protrudes and does not come out so as to be movable in the axial direction, and a spring that elastically biases the plunger in the protruding direction in the conductive tube is disposed. A bottomed hole is formed in the axial direction on the surface opposite to the protruding side of the plunger toward the protruding side, and the bottom surface of the bottomed hole is formed in a conical shape. A bias pin whose rear end face is a bias surface is inserted and disposed, and the conical apex of the bias pin is brought into contact with the conical apex of the bottom surface of the bottomed hole; A contact probe, wherein the spring is disposed so as to elastically bias the bias surface of a pin in a protruding direction. 導電チューブに、プランジャを一端部を突出させしかも抜け出ないようにして軸方向に移動自在に配設し、前記導電チューブ内に前記プランジャを突出方向に弾性付勢するスプリングを配設したコンタクトプローブにおいて、前記導電チューブに対して前記プランジャを相対的に軸回り自在とし、前記プランジャの突出側と反対側の面に突出側に向けて軸方向に有底孔を穿設し、前記有底孔内に、後端面がバイアス面とされたバイアスピンを前記プランジャに対して相対的に軸回り自在に挿入配設し、前記バイアスピンの前記バイアス面を突出方向に弾性付勢するように前記スプリングを配設し、前記プランジャの突出側先端をクラウン状に形成して構成したことを特徴とするコンタクトプローブ。In a contact probe in which a plunger is disposed on a conductive tube so that one end thereof protrudes and does not come out so as to be movable in the axial direction, and a spring that elastically biases the plunger in the protruding direction in the conductive tube is disposed. The plunger is made rotatable relative to the conductive tube relative to the axis, and a bottomed hole is formed in the surface opposite to the protruding side of the plunger in the axial direction toward the protruding side. A bias pin having a rear end surface as a bias surface is inserted and disposed so as to be freely rotatable around the axis with respect to the plunger, and the spring is biased so as to elastically bias the bias surface of the bias pin in a protruding direction. A contact probe, wherein the contact probe is disposed and configured so that a protruding end of the plunger is formed in a crown shape. 請求項2記載のコンタクトプローブにおいて、前記プランジャの有底孔の底面を円錐状とし、前記バイアスピンの先端面を円錐状とし、しかも前記バイアスピンの前記円錐状の頂点が前記有底孔の底面の前記円錐状の頂点に当接するようにして構成したことを特徴とするコンタクトプローブ。3. The contact probe according to claim 2, wherein the bottom surface of the bottomed hole of the plunger has a conical shape, the tip end surface of the bias pin has a conical shape, and the conical apex of the bias pin has a bottom surface of the bottomed hole. A contact probe configured to abut on the apex of the cone.
JP2002229498A 2002-08-07 2002-08-07 Contact probe Expired - Fee Related JP4021275B2 (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006184055A (en) * 2004-12-27 2006-07-13 Japan Electronic Materials Corp Contact probe and probe card
JP2007093216A (en) * 2005-09-27 2007-04-12 Japan Electronic Materials Corp Contact probe and probe card
WO2008024124A1 (en) * 2006-08-25 2008-02-28 Interconnect Devices, Inc. Probe with contact ring
KR100876960B1 (en) 2007-08-28 2009-01-07 리노공업주식회사 Inspection probe
KR100889613B1 (en) 2007-09-20 2009-03-20 주식회사 아이에스시테크놀러지 Method for manufacturing probe pin and probe pin manufactured by the method
JP2009258100A (en) * 2008-03-28 2009-11-05 Panasonic Corp Conductive contact pin and semiconductor inspecting equipment
JP2012207994A (en) * 2011-03-29 2012-10-25 Yamaichi Electronics Co Ltd Contact probe and socket for semiconductor element with the same
US8310255B2 (en) 2009-07-24 2012-11-13 Sumitomo Electric Industries, Ltd. Sensing probe for measuring device performance
EP2743707A4 (en) * 2011-09-05 2015-04-15 Shimano Mfg Co Ltd Contact terminal
KR102212346B1 (en) * 2019-12-17 2021-02-04 주식회사 제네드 A probe pin

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006184055A (en) * 2004-12-27 2006-07-13 Japan Electronic Materials Corp Contact probe and probe card
JP2007093216A (en) * 2005-09-27 2007-04-12 Japan Electronic Materials Corp Contact probe and probe card
WO2008024124A1 (en) * 2006-08-25 2008-02-28 Interconnect Devices, Inc. Probe with contact ring
KR100876960B1 (en) 2007-08-28 2009-01-07 리노공업주식회사 Inspection probe
KR100889613B1 (en) 2007-09-20 2009-03-20 주식회사 아이에스시테크놀러지 Method for manufacturing probe pin and probe pin manufactured by the method
JP2009258100A (en) * 2008-03-28 2009-11-05 Panasonic Corp Conductive contact pin and semiconductor inspecting equipment
US8310255B2 (en) 2009-07-24 2012-11-13 Sumitomo Electric Industries, Ltd. Sensing probe for measuring device performance
JP2012207994A (en) * 2011-03-29 2012-10-25 Yamaichi Electronics Co Ltd Contact probe and socket for semiconductor element with the same
KR101288274B1 (en) * 2011-03-29 2013-07-26 야마이치덴키 가부시키가이샤 Contact probe and semiconductor device socket including contact probe
TWI452301B (en) * 2011-03-29 2014-09-11 山一電機股份有限公司 Contact probe and slot for semiconductor component having the same
US9105994B2 (en) 2011-03-29 2015-08-11 Yamaichi Electronics Co., Ltd. Contact probe and semiconductor device socket including contact probe
EP2743707A4 (en) * 2011-09-05 2015-04-15 Shimano Mfg Co Ltd Contact terminal
US9385461B2 (en) 2011-09-05 2016-07-05 Shimano Manufacturing Co., Ltd. Contact terminal having a plunger pin
KR102212346B1 (en) * 2019-12-17 2021-02-04 주식회사 제네드 A probe pin

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