JP2004069039A - Mounting structure for diaphragm - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mounting structure for a diaphragm, in which fluid is prevented from coming into contact with a cushion material of an outer circumferential seal part of the diaphragm, in which it is hard to be deteriorated even after long-period use by prevention of permeation, and in which the diaphragm can be securely mounted. <P>SOLUTION: This mounting structure is for mounting the diaphragm into a valve body to hold the outer circumferential seal part of a diaphragm part to a mounting part in the valve body. The outer circumferential seal part 48 is formed as a U-shaped groove part having a cross section comprising a vertical piece part 48B opened on the outer circumferential side and two lateral piece parts 48A and 48C. One lateral piece part of the two lateral piece parts is formed of a thin part that is deformable, while the other lateral piece part and the vertical piece part are formed of thick parts. The cushion material DG is fitted into the U-shaped groove part to be held by the mounting part of the valve body 10. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a structure in which an outer peripheral seal portion of a diaphragm portion is narrowly attached to a mounting portion of a valve body to mount the diaphragm in the valve body.
[0002]
[Prior art]
In recent years, a device using a diaphragm has been proposed as a device for controlling or measuring a flow rate. In a control device and a measuring device of this kind of flow rate, for example, a diaphragm is composed of a diaphragm surface composed of a thin film portion composed of a movable portion and an outer peripheral seal portion on an outer edge side thereof. There is a case where a cushion is attached and narrowly fixed to the valve body.
[0003]
However, in the flow rate control device and the measurement device, in particular, when both surfaces of the diaphragm portion are in contact with the fluid, there is a concern that the cushion material may be deteriorated by contact with the fluid. Further, when the fluid is ozone water or a gaseous body, the cushion material is easily deteriorated by permeating the fluorine resin constituting the diaphragm.
[0004]
[Problems to be solved by the invention]
The present invention provides a diaphragm mounting structure in which a fluid does not come into contact with a cushion material of a diaphragm outer peripheral seal portion and further prevents permeation, whereby the diaphragm is hardly deteriorated even after long-term use, and a diaphragm can be securely mounted. The purpose is to provide.
[0005]
[Means for Solving the Problems]
That is, the invention according to claim 1 is a structure in which the outer peripheral seal portion of the diaphragm portion is narrowly attached to the mounting portion of the valve body to mount the diaphragm in the valve body. It is configured in a substantially U-shaped cross-sectional groove composed of two horizontal pieces, one of the two horizontal pieces is formed by a deformable thin portion, and the other horizontal piece and the other horizontal pieces are formed. The vertical piece portion is formed by a thick portion, and a cushion material is press-fitted into the U-shaped groove portion and is tightly attached to a mounting portion of the valve body.
[0006]
The invention according to claim 2 relates to the diaphragm mounting structure according to claim 1, wherein a protrusion that covers the thin horizontal side of the vertical piece is formed in the mounting portion of the valve body.
[0007]
Further, the invention according to claim 3 relates to the diaphragm mounting structure according to claim 1 or 2, wherein the valve body and the diaphragm are made of a fluororesin.
[0008]
The invention according to claim 4 relates to the diaphragm mounting structure according to any one of claims 1 to 2, wherein the cushion material is made of any one of fluorine rubber, nitrile rubber, EPDM, and silicon.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a central longitudinal sectional view of a constant flow valve according to one embodiment of the present invention, FIG. 2 is an enlarged sectional view showing one embodiment of a diaphragm of the constant flow valve, and FIG. 3 is a diagram in which a diaphragm is mounted on the constant flow valve. It is a fragmentary sectional view which expands and shows the state which carried out.
[0010]
The constant flow valve 9 according to the diaphragm mounting structure of the present invention is used for various fluids such as pure water, chemical liquid, corrosive fluid, organic solvent, electrolyzed water, gas and the like, as shown in FIG. The outflow of the controlled fluid F is controlled to a predetermined flow rate by the pressure difference between the fluid on the side and the secondary side. The constant flow valve 9 of this embodiment includes a valve body 10, a valve operating chamber 20 formed in the valve body 10, a connection flow path 50, and a valve mechanism 30 provided in the valve operating chamber 20. And a throttle section 60 provided in the connection flow path 50.
[0011]
The valve body 10 has a valve operating chamber 20 formed therein. The valve operating chamber 20 is connected to the inlet 11 of the primary fluid of the controlled fluid F, the valve seat 15, and the connection passage 50. An outlet 12, an inlet 13 from the connection channel 50, and an outlet 14 for the secondary fluid are formed.
[0012]
The inlet 11 of the primary fluid and the outlet 14 of the secondary fluid are flow passage connecting ports for inflow and outflow of the controlled fluid F. Pipes are connected. In addition, an outlet 12 to the connection channel 50 and an inlet 13 from the connection channel 50 are connected to the connection channel 50 having a throttle portion 60 for adjusting the pressure difference between the primary fluid and the secondary fluid. It is a connection port. The valve seat 15 is formed so as to protrude inside the valve working chamber 20, and a valve mechanism 30 described below is provided.
[0013]
A valve mechanism 30 is provided inside the valve working chamber 20. The valve mechanism 30 includes a valve portion 31, a first diaphragm portion 41, a second diaphragm portion 42, and a third diaphragm portion 43 that move integrally with the valve portion 31.
[0014]
The first diaphragm part 41, the second diaphragm part 42, and the third diaphragm part 43 provided on the valve mechanism 30 are respectively provided with diaphragm surfaces 44, 45, and 46 made of thin film parts which are movable parts, and the other parts. The outer peripheral seal portions 47, 48, and 49 on the edge side. The first, second, and third diaphragm portions 41, 42, and 43 have their outer peripheral seal portions 47, 48, and 49 sandwiched and fixed inside the valve body 10. The valve body 10 of this example has a first valve body portion 10a, a second valve body portion 10b, and a third valve body portion 10c for easily sandwiching and fixing the outer peripheral seal portions of the diaphragm portions 41, 42, and 43. , And the fourth valve body 10d.
[0015]
As shown in FIG. 2, in particular, the diaphragm 42 of the present invention has a substantially U-shaped cross-section formed of a standing piece 48B and two horizontal pieces 48A, 48C in which the outer peripheral sealing portion 48 opens to the outer peripheral side. And one of the two horizontal pieces 48A, 48C is formed of a deformable thin portion and the other horizontal piece 48C (or 48A), and The upright portion A8B is formed by a thick portion, and a cushion material DG is press-fitted into the U-shaped groove.
[0016]
In the embodiment shown in FIGS. 2 and 3, in the outer circumferential seal portion 48 of the second diaphragm portion 42 having a substantially U-shaped cross section, the thin portion which can deform the upper portion 48A of the horizontal pieces 48A and 48C for mounting. And the other two sides (in this case, the standing piece portion 48B and the lower piece portion 48C) are formed as thick portions in order to enhance non-permeability and deformation resistance, and a cushion material DG is pressed into the inside of the thick portion. Shown. FIG. 4 shows a state before the second diaphragm portion 42 and the cushion material DG are mounted on the valve body. In this example, the thickness of the upper piece 48A of the outer peripheral seal 48 was 0.5 mm, and the thickness of the upright piece 48B and the lower piece 48C was 1 mm (or more). Needless to say, the lower piece 48C can be a deformable thin part and the upper piece 48A can be a thick part.
[0017]
Also, as can be seen from the enlarged view of FIG. 3, the valve body 10c to which the outer peripheral seal portion 48 is attached is attached to the thin side of the upright portion 48B (here, the upper portion 48A). By forming the protective protruding wall portion 10P inside the inside, the thin horizontal piece portion (the upper piece portion 48A) is covered, and the non-permeability and the deformation resistance can be improved.
[0018]
Further, the valve body 10 and the valve mechanism 30 of this example are formed of a resin having high corrosion resistance and chemical resistance such as fluororesin, as defined in claim 3. In addition, it is preferable that the other parts such as the valve operation chamber be made of the same resin.
[0019]
Further, as the cushion material DG, fluorine rubber, nitrile rubber, EPDM, silicon, or the like is preferably used as defined in claim 4. It shall be excellent in corrosion resistance and chemical resistance.
[0020]
With this structure, as shown in FIG. 3, when the second diaphragm portion 42 is mounted on the valve body 10, the cushion material DG is formed by the upright portion formed of the outer peripheral seal portion 48 of the diaphragm portion 42. The piece 48B and the lower piece 48C are protected from fluid permeation and can prevent deterioration. At the same time, the standing piece portion 48B and the lower piece portion 48C formed of the thick portions can suppress the repulsive force of the compressed cushion material DG in the radial direction of the diaphragm, and can prevent the deformation of the diaphragm surface 45.
[0021]
In the drawing, reference numeral 25 denotes a pressurizing chamber, which presses the valve mechanism 30 at a predetermined pressure by a pressurizing means 72 as appropriate. In the embodiment, the pressurizing means 72 is pressurized air from the inflow port 19b, and a spring body 76 is provided in the pressurizing chamber 25 as an auxiliary pressurizing means. Reference numeral 77 denotes a pressing member, and the pressing force of the spring body 76 is adjusted by moving forward and backward.
[0022]
Reference numeral 21 denotes an air pressure chamber, and 19a denotes an air outlet. Further, as shown in the figure, the pressurizing means 71 such as pressurized air is provided in the pneumatic chamber 21 so that, for example, when the supply of the controlled fluid F is forcibly stopped, the valve mechanism 30 is advanced. The valve portion 31 may be configured to be brought into contact with the valve seat 15 to be closed. At this time, reference numeral 19a serves as an inflow port of the pressurized air.
[0023]
【The invention's effect】
As shown and described above, in the constant flow valve according to the present invention, the outer peripheral seal portion is configured to have a substantially U-shaped groove formed by a vertical piece opening on the outer peripheral side and two horizontal pieces. And one of the two horizontal portions is formed by a deformable thin portion, and the other horizontal portion and the upright portion are formed by thick portions. Since the cushion material is press-fitted into the valve body and is tightly attached to the mounting portion of the valve body, the vertical portion and the one horizontal portion of the outer peripheral seal portion of the diaphragm portion prevent the fluid from permeating. It is protected and its degradation can be prevented. At the same time, the upright portion and the one horizontal portion formed of the thick portion can suppress the repulsive force of the compressed cushion material in the radial direction of the diaphragm, thereby preventing the deformation of the diaphragm surface.
[Brief description of the drawings]
FIG. 1 is a central longitudinal sectional view of a constant flow valve according to an embodiment of the present invention.
FIG. 2 is an enlarged sectional view showing one embodiment of a diaphragm of the constant flow valve.
FIG. 3 is an enlarged partial sectional view showing a state where a diaphragm is mounted on a constant flow valve.
[Explanation of symbols]
9 Constant flow valve 10 Valve body 20 Valve operating chamber 21 Pneumatic chamber 25 Pressurizing chamber 30 Valve mechanism 31 Valve 41 First diaphragm 42 Second diaphragm 43 Third diaphragm 47 First diaphragm outer peripheral seal 48 Second Diaphragm outer peripheral seal part 49 Third diaphragm outer peripheral seal part

Claims (4)

In the structure in which the outer peripheral seal portion of the diaphragm portion is tightly attached to the mounting portion of the valve body to mount the diaphragm in the valve body, the outer peripheral seal portion has a cross-sectional configuration including a standing piece portion opened to the outer peripheral side and two horizontal piece portions. The U-shaped groove is formed, and one of the two horizontal pieces is formed by a deformable thin portion, and the other horizontal piece and the vertical piece are formed by a thick portion. A diaphragm mounting structure, wherein a cushion material is press-fitted into the U-shaped groove and tightly fitted to a mounting portion of the valve body. The diaphragm mounting structure according to claim 1, wherein a projecting piece portion is formed on the mounting portion of the valve body so as to cover a side of the thin piece of the vertical piece. 3. The diaphragm mounting structure according to claim 1, wherein the valve body and the diaphragm are made of a fluorine resin. The diaphragm mounting structure according to any one of claims 1 to 2, wherein the cushion material is made of any one of fluorine rubber, nitrile rubber, EPDM, and silicon.

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